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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL IMFORMATION EXTRACTED FROM THE
UNAUDITED FINANCIAL STATEMENTS OF AUGUST TECHNOLOGY CORPORATION FOR THE SIX
MONTHS ENDED JUNE 30, 2000 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO
SUCH FINANCIAL STATEMENTS.
</LEGEND>
<S> <C>
<PERIOD-TYPE> 6-MOS
<FISCAL-YEAR-END> DEC-31-2000
<PERIOD-START> JAN-01-2000
<PERIOD-END> JUN-30-2000
<CASH> 23,612,840
<SECURITIES> 7,425,652
<RECEIVABLES> 6,078,117
<ALLOWANCES> (90,045)
<INVENTORY> 5,604,892
<CURRENT-ASSETS> 43,241,330
<PP&E> 2,010,746
<DEPRECIATION> (421,842)
<TOTAL-ASSETS> 45,929,001
<CURRENT-LIABILITIES> 6,208,121
<BONDS> 0
0
0
<COMMON> 125,905
<OTHER-SE> 39,526,727
<TOTAL-LIABILITY-AND-EQUITY> 45,929,001
<SALES> 12,199,578
<TOTAL-REVENUES> 12,199,578
<CGS> 4,978,804
<TOTAL-COSTS> 4,978,804
<OTHER-EXPENSES> 7,105,526
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 100,132
<INCOME-PRETAX> 79,504
<INCOME-TAX> 26,236
<INCOME-CONTINUING> 53,268
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> 53,268
<EPS-BASIC> 0.01
<EPS-DILUTED> 0.01
</TABLE>
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