<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THE
UNAUDITED FINANCIAL STATEMENTS OF AUGUST TECHNOLOGY CORPORATION FOR THE NINE
MONTHS ENDED SEPTEMBER 30, 2000 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO
SUCH FINANCIAL STATEMENTS.
</LEGEND>
<S> <C>
<PERIOD-TYPE> 9-MOS
<FISCAL-YEAR-END> DEC-31-2000
<PERIOD-START> JAN-01-2000
<PERIOD-END> SEP-30-2000
<CASH> 6,491,737
<SECURITIES> 17,985,808
<RECEIVABLES> 6,335,141
<ALLOWANCES> (121,545)
<INVENTORY> 8,163,568
<CURRENT-ASSETS> 39,851,250
<PP&E> 2,531,676
<DEPRECIATION> (519,264)
<TOTAL-ASSETS> 46,514,703
<CURRENT-LIABILITIES> 5,984,579
<BONDS> 0
0
0
<COMMON> 125,915
<OTHER-SE> 39,466,346
<TOTAL-LIABILITY-AND-EQUITY> 40,365,481
<SALES> 21,189,483
<TOTAL-REVENUES> 21,189,483
<CGS> 8,497,444
<TOTAL-COSTS> 8,497,444
<OTHER-EXPENSES> 11,826,871
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 100,132
<INCOME-PRETAX> 1,356,474
<INCOME-TAX> 422,097
<INCOME-CONTINUING> 934,377
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> 934,377
<EPS-BASIC> 0.09
<EPS-DILUTED> 0.08
</TABLE>