<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM CONDENSED
CONSOLIDATED STATEMENT OF OPERATIONS AND CONDENSED CONSOLIDATED BALANCE SHEETS
FOR VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. AND IS QUALIFIED IN ITS
ENTIRETY BY REFERENCE TO SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 9-MOS
<FISCAL-YEAR-END> SEP-29-2000
<PERIOD-START> OCT-02-1999
<PERIOD-END> JUN-30-2000
<CASH> (1,680)
<SECURITIES> 80,561
<RECEIVABLES> 161,075
<ALLOWANCES> 2,890
<INVENTORY> 115,471
<CURRENT-ASSETS> 389,408
<PP&E> 100,963
<DEPRECIATION> 58,075
<TOTAL-ASSETS> 451,509
<CURRENT-LIABILITIES> 178,864
<BONDS> 0
0
0
<COMMON> 320
<OTHER-SE> 264,073
<TOTAL-LIABILITY-AND-EQUITY> 451,509
<SALES> 452,182
<TOTAL-REVENUES> 458,803
<CGS> 282,517
<TOTAL-COSTS> 386,873
<OTHER-EXPENSES> (2,700)
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> (3,095)
<INCOME-PRETAX> 77,725
<INCOME-TAX> 26,081
<INCOME-CONTINUING> 51,644
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> 51,644
<EPS-BASIC> 1.66
<EPS-DILUTED> 1.54
</TABLE>