RUDOLPH TECHNOLOGIES INC
SC 13G, 2000-02-14
INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL
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                                 UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                            Washington, D.C.  20549


                                  SCHEDULE 13G



                   Under the Securities Exchange Act of 1934


                          Rudolph Technologies, Inc.
- --------------------------------------------------------------------------------
                                (Name of Issuer)

                                 Common Stock
- --------------------------------------------------------------------------------
                         (Title of Class of Securities)

                                  781270 10 3
                        ------------------------------
                                 (CUSIP Number)

                                   12/31/99
- --------------------------------------------------------------------------------
            (Date of Event Which Requires Filing of this Statement)


Check the appropriate box to designate the rule pursuant to which this Schedule
is filed:

     [_] Rule 13d-1(b)

     [_] Rule 13d-1(c)

     [X] Rule 13d-1(d)


*The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).


Potential persons who are to respond to the collection of information contained
in this form are not required to respond unless the form displays a currently
valid OMB control number.

SEC 1745 (3-98)

                               Page 1 of 10 pages
<PAGE>

  CUSIP NO. 781270 10 3

- ------------------------------------------------------------------------------
      NAMES OF REPORTING PERSONS.
 1.   I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY).

      Liberty Partners Holdings 11, L.L.C.

- ------------------------------------------------------------------------------
      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE INSTRUCTIONS)
 2.                                                             (a) [_]
                                                                (b) [X]

- ------------------------------------------------------------------------------
      SEC USE ONLY
 3.


- ------------------------------------------------------------------------------
      CITIZENSHIP OR PLACE OF ORGANIZATION
 4.
      United States-DE

- ------------------------------------------------------------------------------
                          SOLE VOTING POWER
                     5.
     NUMBER OF            0

      SHARES       -----------------------------------------------------------
                          SHARED VOTING POWER
   BENEFICIALLY      6.
                          6,847,972
     OWNED BY
                   -----------------------------------------------------------
       EACH               SOLE DISPOSITIVE POWER
                     7.
    REPORTING             0

      PERSON       -----------------------------------------------------------
                          SHARED DISPOSITIVE POWER
       WITH          8.
                          6,847,972
- ------------------------------------------------------------------------------
      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
 9.
      6,847,972
- ------------------------------------------------------------------------------
      CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
10.   (SEE INSTRUCTIONS)

- ------------------------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
11.
      46.7%

- ------------------------------------------------------------------------------
      TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)
12.


- ------------------------------------------------------------------------------

00

                               Page 2 of 10 pages
<PAGE>

  CUSIP NO. 781270 10 3

- ------------------------------------------------------------------------------
      NAMES OF REPORTING PERSONS.
 1.   I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY).

      Liberty Partners, L.P.

- ------------------------------------------------------------------------------
      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE INSTRUCTIONS)
 2.                                                             (a) [_]
                                                                (b) [X]

- ------------------------------------------------------------------------------
      SEC USE ONLY
 3.


- ------------------------------------------------------------------------------
      CITIZENSHIP OR PLACE OF ORGANIZATION
 4.
      United States-DE

- ------------------------------------------------------------------------------
                          SOLE VOTING POWER
                     5.
     NUMBER OF            0

      SHARES       -----------------------------------------------------------
                          SHARED VOTING POWER
   BENEFICIALLY      6.
                          6,847,972
     OWNED BY
                   -----------------------------------------------------------
       EACH               SOLE DISPOSITIVE POWER
                     7.
    REPORTING             0

      PERSON       -----------------------------------------------------------
                          SHARED DISPOSITIVE POWER
       WITH          8.
                          6,847,972
- ------------------------------------------------------------------------------
      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
 9.
      6,847,972
- ------------------------------------------------------------------------------
      CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
10.   (SEE INSTRUCTIONS)

- ------------------------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
11.
      46.7%

- ------------------------------------------------------------------------------
      TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)
12.


- ------------------------------------------------------------------------------

PN

                               Page 3 of 10 pages
<PAGE>

  CUSIP NO. 781270 10 3

- ------------------------------------------------------------------------------
      NAMES OF REPORTING PERSONS.
 1.   I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY).

      Liberty Capital Partners, Inc.

- ------------------------------------------------------------------------------
      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE INSTRUCTIONS)
 2.                                                             (a) [_]
                                                                (b) [X]

- ------------------------------------------------------------------------------
      SEC USE ONLY
 3.


- ------------------------------------------------------------------------------
      CITIZENSHIP OR PLACE OF ORGANIZATION
 4.
      United States-DE

- ------------------------------------------------------------------------------
                          SOLE VOTING POWER
                     5.
     NUMBER OF            0

      SHARES       -----------------------------------------------------------
                          SHARED VOTING POWER
   BENEFICIALLY      6.
                          6,847,972
     OWNED BY
                   -----------------------------------------------------------
       EACH               SOLE DISPOSITIVE POWER
                     7.
    REPORTING             0

      PERSON       -----------------------------------------------------------
                          SHARED DISPOSITIVE POWER
       WITH          8.
                          6,847,972
- ------------------------------------------------------------------------------
      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
 9.
      6,847,972
- ------------------------------------------------------------------------------
      CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
10.   (SEE INSTRUCTIONS)

- ------------------------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
11.
      46.7%

- ------------------------------------------------------------------------------
      TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)
12.


- ------------------------------------------------------------------------------

C0

                               Page 4 of 10 pages
<PAGE>

  CUSIP NO. 781270 10 3

- ------------------------------------------------------------------------------
      NAMES OF REPORTING PERSONS.
 1.   I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY).

      Steven J. Fisher

- ------------------------------------------------------------------------------
      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE INSTRUCTIONS)
 2.                                                             (a) [_]
                                                                (b) [X]

- ------------------------------------------------------------------------------
      SEC USE ONLY
 3.


- ------------------------------------------------------------------------------
      CITIZENSHIP OR PLACE OF ORGANIZATION
 4.
      United States

- ------------------------------------------------------------------------------
                          SOLE VOTING POWER
                     5.
     NUMBER OF            3,000

      SHARES       -----------------------------------------------------------
                          SHARED VOTING POWER
   BENEFICIALLY      6.
                          6,847,972
     OWNED BY
                   -----------------------------------------------------------
       EACH               SOLE DISPOSITIVE POWER
                     7.
    REPORTING             3,000

      PERSON       -----------------------------------------------------------
                          SHARED DISPOSITIVE POWER
       WITH          8.
                          6,847,972
- ------------------------------------------------------------------------------
      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
 9.
      6,850,972
- ------------------------------------------------------------------------------
      CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
10.   (SEE INSTRUCTIONS)

- ------------------------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
11.
      46.7%

- ------------------------------------------------------------------------------
      TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)
12.


- ------------------------------------------------------------------------------

IN

                               Page 5 of 10 pages
<PAGE>

  CUSIP NO. 781270 10 3

- ------------------------------------------------------------------------------
      NAMES OF REPORTING PERSONS.
 1.   I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY).

      Carl E. Ring, Jr.

- ------------------------------------------------------------------------------
      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE INSTRUCTIONS)
 2.                                                             (a) [_]
                                                                (b) [X]

- ------------------------------------------------------------------------------
      SEC USE ONLY
 3.


- ------------------------------------------------------------------------------
      CITIZENSHIP OR PLACE OF ORGANIZATION
 4.
      United States

- ------------------------------------------------------------------------------
                          SOLE VOTING POWER
                     5.
     NUMBER OF            0

      SHARES       -----------------------------------------------------------
                          SHARED VOTING POWER
   BENEFICIALLY      6.
                          6,847,972
     OWNED BY
                   -----------------------------------------------------------
       EACH               SOLE DISPOSITIVE POWER
                     7.
    REPORTING             0

      PERSON       -----------------------------------------------------------
                          SHARED DISPOSITIVE POWER
       WITH          8.
                          6,847,972
- ------------------------------------------------------------------------------
      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
 9.
      6,847,972
- ------------------------------------------------------------------------------
      CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
10.   (SEE INSTRUCTIONS)

- ------------------------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
11.
      46.7%

- ------------------------------------------------------------------------------
      TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)
12.


- ------------------------------------------------------------------------------

IN

                               Page 6 of 10 pages
<PAGE>

Item 1.

       (a)    Name of Issuer

              Rudolph Technologies, Inc.

       (b)    Address of Issuer's Principal Executive Offices

              One Rudolph Road
              Flanders, NJ 07836

Item 2.

       (a)-(c)This Statement is filed by:

              Liberty Partners Holdings 11, L.L.C. ("LLC"); Liberty Partners,
              L.P. ("LP"), Manager of LLC; Liberty Capital Partners, Inc.
              ("LCP"), L.P.'s general partner; Carl E. Ring, Jr. ("Ring"), and
              Steven J. Fisher ("Fisher"), who are directors and stockholders of
              LCP (Ring and Fisher are collectively referred to herein as the
              "Managers").

              The Business Address of LLC, LP, LCP and the Managers is 1177
              Avenue of the Americas, New York, NY 10036; LLC is a Delaware
              limited liability company; LP is a Delaware limited partnership;
              LCP is a Delaware corporation; and Ring and Fisher are U.S.
              citizens.

              LLC, LP, LCP and the Managers are individually referred to herein
              as "Reporting Person" and collectively, as the "Reporting
              Persons."

       (d)    Title of Class of Securities

              Common Stock

       (e)    CUSIP Number

              781270 10 3

Item 3.

       N/A

Item 4.   Ownership.

       Provide the following information regarding the aggregate number and
percentage of the class of securities of the issuer identified in Item 1.


       (a)    Amount beneficially owned:   See Row 9 for the amount beneficially
              owned by each Reporting Person

       (b)    Percent of class:  See Row 11 for the percentage of class
              beneficially owned by each Reporting Person

       (c)    Number of shares as to which the person has:  See Rows 5-8 for the
              voting and dispositive power for each Reporting Person

Item 5.  Ownership of Five Percent or Less of a Class.

       N/A

Item 6.   Ownership of More than Five Percent on Behalf of Another Person

       N/A

Item 7.   Identification and Classification of the Subsidiary Which Acquired the
          Security Being Reported on By the Parent Holding Company

       N/A

Item 8.   Identification and Classification of Members of the Group

     The Reporting Persons may be deemed to be a "group" for the purposes of
Section 13(g) of the Act and the rules thereunder, although each expressly
disclaims any assertion or presumption that it or the other person on whose
behalf this statement is filed constitute a "group."  The filing of this
statement should not be construed to be an admission that any of the Reporting
Persons is a member of a "group" consisting of one or more of such persons.  A
copy of the Agreement Relating to Joint Filing of Schedule 13(G) is attached
hereto as Exhibit A.
          ---------

                               Page 7 of 10 pages
<PAGE>

Item 9.   Notice of Dissolution of Group

          N/A

Item 10.  Certification

     By signing below I certify that, to the best of my knowledge and belief,
the securities referred to above were not acquired and are not held for the
purpose of or with the effect of changing or influencing the control of the
issuer of the securities and were not acquired and are not held in connection
with or as a participant in any transaction having that purpose or effect.

                               Page 8 of 10 pages
<PAGE>

                                   SIGNATURE

     After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set in this statement is true, complete and
correct.



Dated:  February 11, 2000
        -----------------





                         /s/ Steven J. Fisher
                         -------------------------------------------------------
                         Steven J. Fisher, individually, and on behalf of LCP in
                         his capacity as an officer thereof which is the general
                         partner of LP, which is Manager of LLC.





                         /s/ Carl E. Ring, Jr.
                         -------------------------------------------------------
                         Carl E. Ring, Jr., individually, and on behalf of LCP
                         in his capacity as an officer thereof which is the
                         general partner of LP, which is Manager of LLC.



                         LIBERTY PARTNERS HOLDINGS II, L.L.C.



                         BY:  /s/ Paul J. Huston
                              --------------------------------------------------

                         TITLE: Member
                               -------------------------------------------------

                         LIBERTY PARTNERS, L.P.


                         BY: /s/ Paul J. Huston
                             ---------------------------------------------------

                         TITLE: Partner
                               -------------------------------------------------
                               Page 9 of 10 pages

<PAGE>

                                                                       EXHIBIT A
                                                                       ---------

               AGREEMENT RELATING TO JOINT FILING OF SCHEDULE 13G

          The undersigned hereby agree that a single Schedule 13G (or any
amendment thereto) relating to the Common Stock of Rudolph Technologies, Inc.
shall be filed on behalf of each of the undersigned and that this Agreement
shall be filed as an Exhibit to such Schedule 13G.

          This Agreement and the filing of the Schedule 13G shall not be
construed to be an admission that any of the undersigned is a member of a
"group" consisting of one or more of such persons pursuant to Section 13(g) of
the Securities Exchange Act of 1934, as amended and the rules thereunder.


Dated: February 11, 2000
       -----------------

                         /s/ Steven J. Fisher
                         -------------------------------------------------------
                         Steven J. Fisher, individually, and on behalf of LCP in
                         his capacity as an officer thereof
                         which is the general partner of LP, which is Manager of
                         LLC.


                         /s/ Carl E. Ring, Jr.
                         -------------------------------------------------------
                         Carl E. Ring, Jr., individually, and on behalf of LCP
                         in his capacity as an officer thereof
                         which is the general partner of LP, which is Manager
                         of LLC.


                         LIBERTY PARTNERS HOLDINGS 11, L.L.C.


                         BY: /s/ Paul J. Huston
                             ---------------------------------------------------

                         TITLE: Member
                               -------------------------------------------------

                         LIBERTY PARTNERS, L.P.


                         BY: /s/ Paul J. Huston
                             ---------------------------------------------------

                         TITLE: Partner
                               -------------------------------------------------

                              Page 10 of 10 pages


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