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<PAGE>
Exhibit 23.3
CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS
As independent public accountants, we hereby consent to the use of our report
dated October 8, 1998 included in Entegris, Inc.'s Amendment No. 2 to Form S-1
on the August 31, 1998 and 1997 consolidated financial statements of Empak,
Inc. and subsidiaries and to all references to our firm included in this
registration statement.
/s/ Arthur Andersen LLP
Denver, Colorado
June 6, 2000
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