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<PAGE> Exhibit 23.3 CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS As independent public accountants, we hereby consent to the use of our report dated October 8, 1998 included in Entegris, Inc.'s Amendment No. 6 to Form S-1 on the August 31, 1998 and 1997 consolidated financial statements of Empak, Inc. and subsidiaries and to all references to our firm included in this registration statement. /s/ Arthur Andersen LLP Denver, Colorado July 10, 2000
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