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EXHIBIT 21.1
LIST OF SUBSIDIARIES
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<CAPTION>
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Name of Subsidiary Jurisdiction of Incorporation Ownership
<S> <C> <C>
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Fluoroware, Inc. Minnesota 100%
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Empak, Inc. Minnesota 100%
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Empak (Entegris) Malaysia SDN BHD Malaysia 100%
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Empak Korea Yohan Hoesa Korea 100%
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Empak Hanbal Korea Korea 100%
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Entegris Europa, GmbH Germany 100%
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Nippon Fluoroware, K.K. Japan 51%
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Fluoroware PEI, Inc. Minnesota 100%
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Fluoroware Jamaica, FSC Jamaica 100%
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Fluoroware South East Asia, Ltd Pte Singapore 100%
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Fluoroware Valqua Japan, K.K. Japan 51%
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Entegris Upland, Inc. California 100%
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Oregon Labs, Inc. Oregon 96%
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</TABLE>
