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EXHIBIT 23.1 CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS WITH RESPECT TO FORM S-8 As independent public accountants, we hereby consent to the incorporation by reference in this registration statement of our report dated April 28, 2000 included in the Tvia, Inc. and subsidiary Form S-1 as of March 31, 2000 and to all references to our Firm included in this registration statement. /s/ Arthur Andersen LLP San Jose, California October 20, 2000
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