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EXHIBIT 23.1 CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS WITH RESPECT TO FORM S-8 As independent public accountants, we hereby consent to the incorporation by reference in this registration statement of our reports dated April 28, 2000, included in the Tvia, Inc. and subsidiary Form S-1, for the year ended March 31, 2000 and to all references to our Firm included in this registration statement. Arthur Andersen LLP San Jose, California January 12, 2001
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