Exhibit 23.1
CONSENT OF ERNST & YOUNG LLP
We consent to the incorporation by reference in the Registration Statement (Form
S-8) pertaining to the Axcelis Technologies, Inc. 2000 Stock Plan, of our report
dated May 3, 2000, except for Note 19, as to which the date is June 14, 2000,
with respect to the combined financial statements of Axcelis Technologies, Inc.
included in its Prospectus, filed on July 11, 2000 with the Securities and
Exchange Commission.
/s/ Ernst & Young LLP
Boston, Massachusetts
October 31, 2000
