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Previous: AXCELIS TECHNOLOGIES INC, S-1/A, EX-10.7, 2000-07-07 |
Next: ARISTOTLE INTERNATIONAL INC, S-1/A, 2000-07-07 |
<PAGE> 1
Exhibit 21.1
SUBSIDIARIES OF THE REGISTRANT
<TABLE>
<CAPTION>
JURISDICTION OF
SUBSIDIARY INCORPORATION OR ORGANIZATION
----------------------------------------------------------------------------------------------
<S> <C>
Eaton Semiconductor Limited Korea
Eaton Services Pte Limited Singapore
Axcelis Technologies, Inc. (Branch) Malaysia
Axcelis Technologies, Inc. (Branch) India
High Temperature Engineering Corporation (Delaware) United States
Fusion Systems Corporation (Delaware) United States
Fusion Technology International Inc. (Delaware) United States
Fusion Europe Limited United Kingdom
Axcelis Technologies Sarl France
Fusion Semiconductor KK Japan
Axcelis Technologies GmbH Germany
Fusion Pacific Limited Korea
Axcelis Technologies Limited United Kingdom
Axcelis Technologies Ltd. Taiwan
Axcelis Technologies Srl Italy
Fusion Semiconductor Systems Corp. (Maryland) United States
Fusion Investments Inc. (Maryland) United States
Fusion Advanced Tech Corp. (Delaware) United States
</TABLE>
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