Exhibit 23.1
CONSENT OF ERNST & YOUNG LLP
We consent to the incorporation by reference in the Registration Statement (Form
S-8) pertaining to the Axcelis Technologies, Inc. Employee Stock Purchase Plan,
of our report dated May 3, 2000, except for Note 19, as to which the date is
June 14, 2000, with respect to the combined financial statements of Axcelis
Technologies, Inc. included in its Prospectus filed on July 11, 2000, filed with
the Securities and Exchange Commission.
/s/ Ernst & Young LLP
Boston, Massachusett
October 31, 2000
