PHILIPS ELECTRONICS N V
SC 13D/A, 1998-12-08
ELECTRONIC & OTHER ELECTRICAL EQUIPMENT (NO COMPUTER EQUIP)
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                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                 SCHEDULE 13D/A
                    Under the Securities Exchange Act of 1934

                                (Amendment No. 1)

                                   FEI COMPANY
- --------------------------------------------------------------------------------
                                (Name of Issuer)


                                  Common Stock
- --------------------------------------------------------------------------------
                         (Title of Class of Securities)


                                    30241L109
- --------------------------------------------------------------------------------
                                 (CUSIP Number)


                               Alexandra D. Korry
                               Sullivan & Cromwell
                                125 Broad Street
                            New York, New York 10004
                                 (212) 558-4000
- --------------------------------------------------------------------------------
            (Name, Address and Telephone Number of Person Authorized
                     to Receive Notices and Communications)


                                December 3, 1998
- --------------------------------------------------------------------------------
             (Date of Event which Requires Filing of this Statement)

If a filing person has previously filed a statement on Schedule 13G to report
the acquisition which is the subject of this Schedule 13D, and is filing this
schedule because of Rule 13d-1(b)(3) or (4), check the following box [X].

Check the following box if a fee is being paid with this statement [ ].


<PAGE>



- --------------------------------------------------------------------------------
CUSIP NO. 30241L109
- --------------------------------------------------------------------------------
1.   NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

     Koninklijke Philips Electronics N.V. (Royal Philips Electronics)
- --------------------------------------------------------------------------------
2.   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP
                                                           (a)  [X ]
                                                           (b)  [  ]
- --------------------------------------------------------------------------------
3.   SEC USE ONLY

- --------------------------------------------------------------------------------
4.   SOURCE OF FUNDS
     WC, OO
- --------------------------------------------------------------------------------
 5.      CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS
         REQUIRED PURSUANT TO ITEMS 2(D) OR 2(E)
                                                                [  ]
- --------------------------------------------------------------------------------
6.   CITIZENSHIP OR PLACE OF ORGANIZATION

     The Netherlands
- --------------------------------------------------------------------------------
                 7.  SOLE VOTING POWER
 NUMBER OF           0
  SHARES         ----------------------------------------------------
BENEFICIALLY     8.  SHARED VOTING POWER
 OWNED BY            11,184,471
   EACH          ----------------------------------------------------
 REPORTING       9.  SOLE DISPOSITIVE POWER
  PERSON             0
   WITH          ----------------------------------------------------
                 10. SHARED DISPOSITIVE POWER
                     11,184,471
- --------------------------------------------------------------------------------
11.  AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     11,184,471
- --------------------------------------------------------------------------------
12.  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
                                                                [  ]
- --------------------------------------------------------------------------------
13.  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     54.7
- --------------------------------------------------------------------------------
14.  TYPE OF REPORTING PERSON
     CO
- --------------------------------------------------------------------------------

                                       -2-
<PAGE>
- --------------------------------------------------------------------------------
CUSIP NO. 30241L109
- --------------------------------------------------------------------------------
1.   NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

     Philips Business Electronics International B.V.
- --------------------------------------------------------------------------------
2.   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP
                                                           (a)  [X ]
                                                           (b)  [  ]
- --------------------------------------------------------------------------------
3.   SEC USE ONLY

- --------------------------------------------------------------------------------
4.   SOURCE OF FUNDS
     WC, OO
- --------------------------------------------------------------------------------
 5.      CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS
         REQUIRED PURSUANT TO ITEMS 2(D) OR 2(E)
                                                                [  ]
- --------------------------------------------------------------------------------
6.   CITIZENSHIP OR PLACE OF ORGANIZATION

     The Netherlands
- --------------------------------------------------------------------------------
                 7.  SOLE VOTING POWER
 NUMBER OF           0
  SHARES         ----------------------------------------------------
BENEFICIALLY     8.  SHARED VOTING POWER
 OWNED BY            11,184,471
   EACH          ----------------------------------------------------
 REPORTING       9.  SOLE DISPOSITIVE POWER
  PERSON             0
   WITH          ----------------------------------------------------
                 10. SHARED DISPOSITIVE POWER
                     11,184,471
- --------------------------------------------------------------------------------
11.  AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     11,184,471
- --------------------------------------------------------------------------------
12.  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
                                                                [  ]
- --------------------------------------------------------------------------------
13.  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     54.7
- --------------------------------------------------------------------------------
14.  TYPE OF REPORTING PERSON
     CO
- --------------------------------------------------------------------------------

                                       -3-
<PAGE>

         This Amendment No. 1 to Schedule 13D relates to the Schedule 13D filed
on March 1, 1997 with respect to the Common Stock of FEI Company (the "Issuer")
by Koninklijke Philips Electronics N.V., a Netherlands corporation ("Philips"),
and Philips Business Electronics International B.V. ("PBE"), a Netherlands
corporation and a wholly owned subsidiary of Philips, formerly known as Philips
Industrial Electronics International B.V.

Item 2. Identity and Background.

         Item 2 is hereby amended and supplemented as follows:

         (a)-(c); (f). This Statement is being filed by PBE and Philips, which
acts as the holding company of the Philips group. The Philips group is engaged
primarily in the manufacture and distribution of electronic and electrical
products, systems and equipment. The principal office and business address of
Philips is Rembrandt Tower, Amstelplein 1, 1096 HA Amsterdam, The Netherlands.
PBE is a wholly owned subsidiary of Philips which manages the Business
Electronics product division of Philips through a number of operating companies
or business units. The principal office and business address of PBE is Building
SX-4, P.O. Box 218, 5600 MD Eindhoven, The Netherlands. Philips and PBE are
sometimes referred to herein as the "Reporting Persons".

         Attached as Schedule I hereto and incorporated by reference herein is a
list of the members of the Supervisory Board and the members of the Board of
Management and the Group Management Committee of Philips, and the directors and
executive officers of PBE. Schedule I sets forth each of such persons' name,
business address, present principal occupation or employment and citizenship,
and the name, principal business and address of the corporation or other
organization in which such employment is conducted. To the best knowledge of the
Reporting Persons, no such person is the beneficial owner of any shares of
Common Stock of the Issuer.

         (d) (e). During the last five years, neither Philips nor PBE, nor, to
the best knowledge of the Reporting Persons, any of the directors or executive
officers of Philips or PBE has been convicted in a criminal proceeding
(excluding traffic violations or similar criminal


                                       -4-

<PAGE>

misdemeanors) or was a party to a civil proceeding of a judicial or
administrative body of competent jurisdiction and as a result of such proceeding
was or is subject to a judgment, decree or final order enjoining future
violations of, or prohibiting or mandating activities subject to, Federal or
State securities laws or finding any violation with respect to such laws.

Item 3. Source and Amount of Funds or Other Consideration.

         Item 3 is hereby amended and supplemented as follows:

         On December 3, 1998, PBE entered into a Stock Purchase Agreement (the
"Stock Purchase Agreement") with the Issuer in order to provide financing,
through the purchase of additional shares of the Issuer's Common Stock, for the
proposed merger (the "Merger") between the Issuer and Micrion Corporation
("Micrion") pursuant to an Agreement and Plan of Merger, dated December 3, 1998
(the "Merger Agreement"), among the Issuer, Micrion and MC Acquisition
Corporation, which provides that at the Effective Time of the Merger, Micrion
will be merged with MC Acquisition Corporation, which is a wholly owned
subsidiary of the Issuer. Pursuant to the Stock Purchase Agreement, the Issuer
and PBE agreed that PBE would purchase at the Per Share Price (as defined below)
such number of shares (the "Financing Shares") of the Issuer's Common Stock that
is equal to (x) the sum of (i) $6.00 multiplied by the number of shares of
Micrion Common Stock outstanding at the effective time of the Merger (excluding
Micrion Common Stock held by The Issuer or its subsidiaries, Micrion shares held
by Micrion, or Micrion shares held by stockholders dissenting to the Merger) and
(ii) transactions costs of the Merger, divided by (y) the Per Share Price. The
"Per Share Price" is defined as the average of the closing price of FEI Common
Stock for (i) the nine full trading days immediately preceding December 3, 1998
and (ii) the six consecutive full trading days beginning December 3, 1998. In
addition, the Stock Purchase Agreement provides that PBE has the right, but not
the obligation, to purchase for cash at the Per Share Price on the closing date
of the Stock Purchase Agreement a number of additional shares of the Issuer's
Common Stock (the "Top-Up Shares"), provided that the maximum number of shares
that PBE may acquire pursuant to the Stock Purchase Agreement is equal to (A)
122.23% of (i) the number of shares of the Issuer's Common Stock issued


                                       -5-



<PAGE>


in the Merger plus (ii) the number of shares of Common Stock issuable upon
exercise of options to be issued to former officers or employees of Micrion as
part of their Employment Agreements with the Issuer, less (B) the number of
Financing Shares issued. The Stock Purchase Agreement is subject to certain
conditions, including the absence of a Material Pricing Event (as defined
therein) and satisfaction of the conditions precedent set forth in the Merger
Agreement. If a Material Pricing Event occurs, Philips will determine at that
time whether to consummate the transactions contemplated by the Stock Purchase
Agreement. If Philips elects to terminate the Stock Purchase Agreement on the
ground that a Material Pricing Event has occurred, Philips will thereby waive
its top-up rights set forth in Section 5.17 of the Combination Agreement with
respect to the shares issued in the Merger.

         The cash used by PBE to purchase the Financing Shares and, if
applicable, the Top-Up Shares is expected to be made available to PBE from
Philips out of Philips' working capital.

         This item 3 is qualified in its entirety by reference to the
Combination Agreement, the Stock Purchase Agreement and the Merger Agreement,
which are filed as Exhibits 1, 2 and 3 hereto and are incorporated herein by
reference.

Item 4. Purpose of the Transaction.

         Item 4 is hereby amended and supplemented as follows:

         Upon satisfaction of the conditions precedent in the Stock Purchase
Agreement, the Reporting Persons plan to acquire the Financing Shares in
exchange for providing financing for the cash portion of the merger
consideration which Micrion shareholders will be entitled to receive at the
effective time of the Merger. In addition, the Reporting Persons have the right,
but not the obligation, to acquire the Top-Up Shares. The Reporting Persons'
current intention, which is subject to change, is that PBE will acquire at least
the number of Top-Up Shares which, after giving effect to the Merger and the
purchase of the Financing Shares, would be sufficient to maintain its majority
ownership of the Issuer's Common Stock.



                                       -6-

<PAGE>


         As of the date of this statement, other than the purchase of the
Financing Shares and the Top-Up Shares as described above none of the Reporting
Persons has any plans or proposals with respect to the Issuer that relate to or
could result in any of the actions specified in clauses (a) through (j) of Item
4 of Schedule 13D other than the following:

         1. Pursuant to the Merger Agreement, at the Effective Time Micrion will
merge with a subsidiary of the Issuer and will thereafter become a wholly owned
subsidiary of the Issuer. Thus, the business conducted by the Issuer and the
Issuer's corporate structure will materially change.

         2. Except as described above, PBE retains all of its rights under the
Combination Agreement.

         3. As described in Item 6, PBE has entered into a Voting Agreement with
Micrion, pursuant to which PBE has agreed to vote in favor of the proposal to
amend the Issuer's Articles of Incorporation to increase the number of
authorized shares of Common Stock of the Issuer to 45,000,000 and to approve the
issuance of shares in the Merger.

         Each Reporting Person expects to evaluate on an ongoing basis the
Issuer's financial condition and prospects and their interest in, and intentions
with respect to, the Issuer. Accordingly, each Reporting Person reserves the
right to change its plans and intentions at any time, as it deems appropriate.
In particular, although each Reporting Person has no present intention to
acquire any shares of Common Stock other than as described above and has no
present intention to dispose of any of such shares once acquired, each Reporting
Person may acquire additional shares of Common Stock or securities convertible
or exchangeable for Common Stock and/or may dispose of shares of Common Stock on
the Nasdaq national market, in privately negotiated transactions or otherwise.
Any such transactions may be effected at any time and from time to time. To the
knowledge of the Reporting Persons, each of the persons listed on Schedule I
hereto may make the same evaluation and may have the same reservations.

         This Item 4 is qualified in its entirety by reference to the
Combination Agreement, the Stock Purchase Agreement the Merger Agreement and the
Voting Agreement,


                                       -7-

<PAGE>


which are filed as Exhibits 1, 2, 3, and 4 hereto and are incorporated herein by
reference.

Item 5. Interest in Securities of Issuer.

         Item 5 is hereby amended and supplemented as follows:

         (a) and (b). As described in the Schedule 13D filed by Philips and PBE
on March 1, 1997, PBE was issued 9,728,807 at the Closing of the Combination
Agreement, representing 55% of the Issuer's outstanding shares of Common Stock.
Since that time, PBE has been issued 213,616 shares of the Issuer's Common
Stock, and may be issued without additional consideration 1,242,048 additional
shares from time to time in the future in accordance with the terms and
conditions of the Combination Agreement. By virtue of the fact that PBE is a
wholly owned subsidiary of Philips, Philips and PBE may be deemed to share the
voting and dispositive power over the 11,184,471 shares of Common Stock
beneficially owned by PBE.

         To the knowledge of the Reporting Persons none of the persons listed on
Schedule I hereto own any shares of Common Stock.

         (c). To the knowledge of the Reporting Persons, none of the persons
listed on Schedule I hereto has been party to any transaction in the Common
Stock during the sixty-day period ending on the date of this Statement on
Schedule 13D.

         (d). To the knowledge of the Reporting Persons, no other person has the
right to receive or the power to direct the receipt of dividends from, or the
proceeds from the sale of, any shares of Common Stock deemed beneficially owned
by the Reporting Persons.

         This Item 5 is qualified in its entirety by reference to the responses
to Items 3 and 4, the Combination Agreement, the Stock Purchase Agreement, the
Merger Agreement and the Voting Agreement, which are filed as Exhibits 1, 2, 3
and 4 hereto and are incorporated herein by reference.



                                       -8-

<PAGE>


Item 6. Contracts, Arrangement, Understandings or Relationships
        with Respect to Securities of the Issuer

         Item 6 is hereby amended and supplemented as follows:

         PBE has certain rights to be issued without additional consideration,
and to purchase, additional shares of Common Stock, which rights are more fully
described in response to Items 4 and 5.

         PBE has also entered into a Voting Agreement, dated December 3, 1998,
with Micrion (the "Voting Agreement") pursuant to which PBE has agreed to vote
the shares it currently holds or any new shares it subsequently acquires in
favor of (a) a proposal to approve and adopt an amendment to the Issuer's
Articles of Incorporation to increase the number of authorized shares of the
Issuer's Common Stock to allow the issuance of shares contemplated by the Merger
Agreement, and (b) a proposal to approve the issuance of shares of the Issuer's
Common Stock pursuant to the Merger Agreement and the Stock Purchase Agreement.
The Voting Agreement also restricts PBE's ability to voluntarily transfer, sell,
offer, pledge or otherwise encumber any of the shares of the Issuer's Common
Stock that it currently holds or subsequently acquires, which restriction will
cease upon termination of the Voting Agreement.

         This Item 6 is qualified in its entirety by reference to the
Combination Agreement, the Stock Purchase Agreement, the Merger Agreement and
the Voting Agreement which are filed as Exhibits 1, 2, 3 and 4 hereto and are
incorporated herein by reference.

Item 7. Material to be Filed as Exhibits

     Exhibit       Description
     -------       -----------

       1           Combination Agreement, dated November 15, 1996, by and among
                   Philips Industrial Electronics International B.V., FEI
                   Company and, for the purposes of Sections 4.1, 4.2, 4.3,
                   4.6(d)(ii), 4.15, 5.8(b), 5.8(c), 5.9(a), 5.13(a), 5.13(d),
                   5.16, 7.2 and 9.10 only, Philips Electronics N.V.
                   (incorporated


                                       -9-

<PAGE>


                   herein by reference to Exhibit 1 to the Reporting Persons'
                   Form 8-K with respect to FEI Company filed March 1,
                   1997.

       2           Stock Purchase Agreement, dated December 3, 1998, between
                   Philips Business Electronics International B.V. and the
                   Issuer.

       3           Agreement and Plan of Merger, dated December 3, 1998, among
                   the Issuer, Micrion Corporation and MC Acquisition
                   Corporation.

       4           Voting Agreement, dated December 3, 1998, between Philips
                   Business Electronics International B.V. and Micrion
                   Corporation.



                                      -10-

<PAGE>


                                   SIGNATURES

         After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

Date:  December 8, 1998

                                            KONINKLIJKE PHILIPS ELECTRONICS N.V.


                                            By: /s/ Arie Westerlaken
                                               --------------------------------
                                            Name:  Arie Westerlaken
                                            Title: General Secretary




<PAGE>



                                   SIGNATURES

         After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

Date:  December 8, 1998

                                            PHILIPS BUSINESS ELECTRONICS
                                            INTERNATIONAL B.V


                                            By /s/ Alfred B. Bok
                                              ---------------------------------
                                            Name:  Alfred B. Bok
                                            Title: CEO and President



                                            By /s/ Theo Sonnemanns
                                              ---------------------------------
                                            Name:  Theo Sonnemans
                                            Title: CFO and Vice President


<PAGE>


                                                      Schedule I to Schedule 13D




A.   MEMBERS OF THE SUPERVISORY BOARD OF KONINKLIJKE PHILIPS ELECTRONICS N.V.
     (ROYAL PHILIPS ELECTRONICS)

     Unless otherwise indicated each person listed below is not employed, other
     than as a member of the Supervisory board, and thus no employer, employer's
     address or principal place of business of employer is listed.


NAME:                      F.A. MALJERS
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               The Netherlands

NAME:                      A. LEYSEN
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               Belgium

NAME:                      W. HILGER
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               Germany

NAME:                      L.C. VAN WACHEM
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               The Netherlands


                                       I-1

<PAGE>


NAME:                      C.J. OORT
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               The Netherlands

NAME:                      L. SCHWEITZER
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Chairman and Chief Executive
                           Officer of La regie nationale des
                           usines Renault
Employer:                  La regie nationale des usines
                           Renault
Employer's Address:        34 Quai du Point du Jour
                           BP 103 92109
                           Boulogne Bilancourt
                           Cedex, France
Principal Business of
Employer:                  Design, manufacture and sale of
                           automobiles and related businesses
Citizenship:               Swiss

NAME:                      SIR RICHARD GREENBURRY
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Chairman and Chief Executive of
                           Marks & Spencer plc.
Employer:                  Marks & Spencer plc.
Employer's Address:        Michael House
                           47 Bakerstreet
                           London W1A 1DN
                           United Kingdom
Principal Business of
Employer:
Citizenship:               United Kingdom

NAME:                      IR. W. DE KLEUVER
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Retired
Citizenship:               The Netherlands


                                       I-2

<PAGE>


B.   BOARD OF MANAGEMENT AND GROUP MANAGEMENT COMMITTEE OF ROYAL PHILIPS
     ELECTRONICS

     Unless otherwise indicated, all of the members of the Board of Management
     and Group Management Committee are employed by Royal Philips Electronics at
     Rembrandt Tower, Amstelplein 1, 1096 HA Amsterdam, The Netherlands, whose
     principal business is the manufacture and distribution of electronic and
     electrical products, systems and equipment.

NAME:                      C. BOONSTRA
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      President, Chairman of the Board of
                           Management and the Group Management
                           Committee
Citizenship:               The Netherlands

NAME:                      D.G. EUSTACE
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice President, Vice
                           Chairman of the Board of Management
                           and the Group Management Committee
Citizenship:               United Kingdom and Canada

NAME:                      J.H.M. HOMMEN
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice-President, Chief
                           Financial Officer and member of the
                           Board of Management and the Group
                           Management Committee
Citizenship:               The Netherlands

NAME:                      R. PIEPER
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice-President, Member of
                           the Board of Management and the
                           Group Management Committee
Citizenship:               The Netherlands

                                       I-3

<PAGE>


NAME:                      J. WHYBROW
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice President, Member of
                           the Board of Management and the
                           Group Management Committee and
                           Chairman of the Lighting Division
Citizenship:               United Kingdom

NAME:                      A.H.A. VEENHOF
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee and Chairman of the
                           Domestic Appliances and Personal
                           Care Division
Citizenship:               The Netherlands

NAME:                      Y.C. LO
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice President, Member of
                           the Board of Management and the
                           Group Management Committee and
                           Chairman of the Components Division
Citizenship:               Republic of China

NAME:                      A.P.M. VAN DER POEL
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice President, Member of
                           the Board of Management and the
                           Group Management Committee and
                           Chairman of the Semiconductors
                           Division
Citizenship:               The Netherlands


                                       I-4

<PAGE>


NAME:                      A. BAAN
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Executive Vice President, Member of
                           the Board of Management and the
                           Group Management Committee and
                           Chairman of the Business
                           Electronics Division
Citizenship:               The Netherlands

NAME:                      J.M. BARRELLA
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee and Chairman of the
                           Medical Systems Division
Citizenship:               The Netherlands

NAME:                      K. BULTHUIS
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee and Senior Managing
                           Director of Corporate Research
Citizenship:               The Netherlands

NAME:                      A. WESTERLAKEN
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee; General Secretary; Chief
                           Legal Officer; Secretary to the
                           Board of Management
Citizenship:               The Netherlands

NAME:                      N.J. BRUIJEL
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee responsible for Corporate
                           Human Resources Management
Citizenship:

                                       I-5

<PAGE>


NAME:                      A.B. BOK
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee; Chairman of the Business
                           Electronics Division
Citizenship:               The Netherlands

NAME:                      J.P. OOSTERVELD
Business Address:          Royal Philips Electronics
                           Rembrandt Tower
                           Amstelplein 1
                           1096 HA Amsterdam, The Netherlands
Principal Occupation:      Member of the Group Management
                           Committee; Senior Director of
                           Corporate Strategy
Citizenship:               The Netherlands


C.   DIRECTORS AND EXECUTIVE OFFICERS OF PHILIPS BUSINESS ELECTRONICS
     INTERNATIONAL B.V.

     Unless otherwise indicated, all of the directors and executive officers of
     Philips Business Electronics International B.V. are employed by Philips
     Business Electronics International B.V. at Building TQ III-2, P.O. Box 218,
     5600 MD Eindhoven, The Netherlands, whose principal business is the
     managing of the Business Electronics Product division of Philips
     Electronics N.V. through a number of operating companies or business units.

NAME:                      A.B. BOK
Business Address:          Philips Business Electronics
                           International B.V.
                           Building TQ III-2
                           P.O. Box 218
                           5600 MD Eindhoven, The Netherlands
Principal Occupation:      CEO and President of Philips
                           Business Electronics International
                           B.V.
Citizenship:               The Netherlands


                                       I-6

<PAGE>


NAME:                      T.J.H. SONNEMANS
Business Address:          Philips Business Electronics
                           International B.V.
                           Building TQ III-2
                           P.O. Box 218
                           5600 MD Eindhoven, The Netherlands
Principal Occupation:      CFO and Vice-President of Philips
                           Business Electronics International
                           B.V.
Citizenship:               The Netherlands


                                       I-7


================================================================================
                                                                  EXECUTION COPY






                            STOCK PURCHASE AGREEMENT

                                     BETWEEN

                 PHILIPS BUSINESS ELECTRONICS INTERNATIONAL B.V.

                                       AND

                                   FEI COMPANY





                          DATED AS OF DECEMBER 3, 1998






================================================================================


<PAGE>


                                TABLE OF CONTENTS


ARTICLE I    DEFINITIONS AND TERMS

     Section 1.1  Specific Definitions.........................................1
     Section 1.2  Other Terms..................................................7
     Section 1.3  Other Definitional Provisions................................7

ARTICLE II   PURCHASE OF COMMON STOCK AND BRIDGE FINANCING

     Section 2.1  Purchase and Sale of Financing Shares........................7
     Section 2.2  Purchase and Sale of Top-Up Shares...........................7
     Section 2.3  Notices; Closing; Delivery and Payment.......................8

ARTICLE III  REPRESENTATIONS AND WARRANTIES OF FEI

     Section 3.1  Organization, Good Standing and Qualification................9
     Section 3.2  Approval and Fairness........................................9
     Section 3.3  No Adverse Consequences......................................9
     Section 3.4  Capital Structure; Valid Issuance...........................10
     Section 3.5  FEI Reports; Financial Statements...........................10
     Section 3.6  Absence of Certain Changes..................................11
     Section 3.7  Takeover Statutes...........................................12
     Section 3.8  Brokers.....................................................12
     Section 3.9  Merger Agreement............................................12
     Section 3.10  Other Information..........................................12
     Section 3.11  No Other Representations or Warranties.....................12

ARTICLE IV   REPRESENTATIONS AND WARRANTIES OF PBE

     Section 4.1  Due Incorporation of PBE....................................13
     Section 4.2  No Adverse Consequences.....................................13
     Section 4.3  Financing...................................................14
     Section 4.4  Securities Act..............................................14
     Section 4.5  No Other Representations or Warranties......................14

ARTICLE V    COVENANTS

     Section 5.1  Continuation of Business....................................14
     Section 5.2  Information Supplied........................................15
     Section 5.3  Shareholders Approval.......................................16


                                       -i-



<PAGE>

                                                                            Page
                                                                            ----

     Section 5.4  Filings; Other Actions; Notification........................16
     Section 5.5  Publicity...................................................17
     Section 5.6  Expenses....................................................17
     Section 5.7  Takeover Statute............................................17
     Section 5.8  Right to Maintain Percentage Interest.......................18
     Section 5.9  Use of Proceeds.............................................18


ARTICLE VI   CONDITIONS TO THE CLOSING

     Section 6.1  Conditions to the Obligations of FEI and PBE................18
     Section 6.2  Conditions to the Obligations of PBE........................19
     Section 6.3  Conditions to the Obligations of FEI........................19

ARTICLE VII  SURVIVAL; INDEMNIFICATION

     Section 7.1  Survival....................................................20
     Section 7.2  Reciprocal Indemnification..................................20
     Section 7.3  Indemnification Procedures..................................20
     Section 7.4  Indemnification Net of Taxes................................22

ARTICLE VIII TERMINATION

     Section 8.1  Termination.................................................22
     Section 8.2  Effect of Termination.......................................23

ARTICLE IX   MISCELLANEOUS

     Section 9.1  Notices.....................................................24
     Section 9.2  Amendment; Waiver...........................................25
     Section 9.3  Amendment of Merger Agreement...............................25
     Section 9.4  Assignment..................................................25
     Section 9.5  Entire Agreement............................................25
     Section 9.6  Fulfillment of Obligations..................................25
     Section 9.7  Parties in Interest.........................................26
     Section 9.8  Disclosure Schedules........................................26
     Section 9.9  Governing Law; Mediation and Arbitration....................26
     Section 9.10  Counterparts...............................................27
     Section 9.11  Headings...................................................27



                                      -ii-



<PAGE>













         STOCK PURCHASE AGREEMENT, dated as of December 3, 1998, between FEI
COMPANY, an Oregon corporation ("FEI") and PHILIPS BUSINESS ELECTRONICS
INTERNATIONAL B.V., a Netherlands corporation ("PBE").

                              W I T N E S S E T H :

         WHEREAS, simultaneously herewith, FEI, MC Acquisition Corporation, an
Oregon corporation and wholly owned subsidiary of FEI ("FEI Merger Sub"), and
Micrion Corporation, a Massachusetts corporation ("Micrion") are entering into
the Merger Agreement (as defined herein) and FEI desires to obtain financing for
the cash portion of the acquisition of Micrion pursuant to such agreement. As
used in this Agreement, the term "FEI" means FEI and its wholly owned direct or
indirect subsidiaries and the term "PBE" means PBE and its wholly owned direct
or indirect subsidiaries;

         WHEREAS, PBE desires to provide such financing in the form of a
purchase of shares of the common stock of FEI (the "Common Stock"), upon the
terms and subject to the conditions hereinafter set forth; and

         WHEREAS, PBE may desire to purchase shares of the Common Stock in
addition to those obtained in connection with such financing in order to
maintain its 55% interest in FEI and FEI desires to sell such additional shares
to PBE.

         NOW, THEREFORE, in consideration of the mutual covenants and
undertakings contained herein, and subject to and on the terms and conditions
herein set forth, the parties hereto agree as follows:

                                    ARTICLE I

                              DEFINITIONS AND TERMS

         Section 1.1 Specific Definitions. As used in this Agreement, the
following terms shall have the meanings set forth or as referenced below:

"Adjusted Price" shall mean the average closing price of the Common Stock for
     the 20 full trading days preceding the Closing Notice Date; provided, that
     if a Material Adverse Effect occurs or is discovered less than 20 trading
     days prior to the Closing Notice Date, then the Adjusted Price will be the
     average closing price of the Common Stock only for those full trading days
     following the date of such occurrence or discovery of such Material Adverse
     Effect and preceding the Closing Notice Date.

"Affiliate" shall mean, with respect to any Person, any Person directly or
     indirectly controlling, controlled by, or under common control with, such
     other Person at any


<PAGE>


     time during the period for which the determination of affiliation is being
     made; provided, however, for purposes of this agreement FEI and PBE shall
     not be considered "Affiliates".

"Agreement" shall mean this Agreement, as the same may be amended or
     supplemented from time to time in accordance with the terms hereof.

"Announcement Date" shall mean the first full trading day that commences
     following the announcement that FEI and Micrion have entered into the
     Merger Agreement; it being understood that such announcement will not be
     made while the Nasdaq National Market is open for the transaction of
     business.

"board of directors" shall mean any board of directors or other body of persons,
     including all committees thereof, performing functions equivalent or
     similar to those performed by a board of directors of a corporation
     incorporated in one of the states of the United States of America.

"Business Day" shall mean any day other than a Saturday or a Sunday or a day on
     which banks in New York City are authorized or required by law to close.

"Claim" shall have the meaning set forth in Section 7.3.

"Claim Notice" shall have the meaning set forth in Section 7.3.

"Closing" shall have the meaning set forth in Section 2.3(b).

"Closing Date" shall have the meaning set forth in Section 2.3(b).

"Closing Notice" shall have the meaning set forth in Section 2.3(a).

"Closing Notice Date" shall mean the date on which FEI delivers the Closing
     Notice to PBE.

"Code" shall mean the Internal Revenue Code of 1986, as amended.

"Common Stock" shall have the meaning set forth in the recitals.

"Competition Laws" shall mean statutes, rules, regulations, orders, decrees,
     administrative and judicial doctrines, and other laws that are designed or
     intended to prohibit, restrict or regulate actions having the purpose or
     effect of monopolization or restraint of trade.



                                       -2-

<PAGE>


"Contracts" shall mean (i) any mortgage, note, or other instrument or agreement
     relating to the borrowing of money or the incurrence of indebtedness by a
     party or such party's guaranty of any obligation for the borrowing of
     money; (ii) contracts, agreements, purchase orders, or acknowledgment forms
     for the purchase, sale, lease or other disposition of a party's equipment,
     products, materials or capital assets, or for the performance of services;
     (iii) contracts or agreements for the joint performance of work or services
     and all other joint venture agreements; (iv) contracts or agreements with
     agents, brokers, consignees, sales representatives or distributors relating
     to the sale of a party's products or services; and (v) contracts or
     agreements relating to the employment or compensation of a party's
     officers, directors or employees, including without limitation any
     collective bargaining agreements..

"Control" with respect to any Person shall mean ownership (directly or
     indirectly) of a majority of total voting power of such Person's voting
     securities or interests.

"Disclosure Schedule" shall mean the disclosure schedule accompanying this
     Agreement. The Disclosure Schedule shall be deemed to include the FEI
     Reports filed prior to the date hereof, which are hereby incorporated
     therein by reference.

"Dissenting Stockholders" shall have the meaning assigned thereto in the Merger
     Agreement.

"Effective Time" shall mean the effective time of the Merger.

"Encumbrances" shall mean liens (including any liens for Taxes), charges,
     encumbrances, security interests, options, or any other restrictions or
     third party rights.

"Exchange Act" shall mean the Securities Exchange Act of 1934, as amended.

"FEI" shall have the meaning set forth in the preamble.

"FEI Merger Sub" shall have the meaning set forth in the recitals.

"FEI Option" shall have the meaning set forth in Section 3.4.

"FEI Option Plans" shall have the meaning set forth in Section 3.4.

"FEI Reports" shall have the meaning set forth in Section 3.5.

"FEI'sBusiness" shall mean the business of FEI as conducted or contemplated to
     be conducted as of the date hereof.

"Financing Price" shall have the meaning set forth in Section 2.1.



                                       -3-

<PAGE>


"Financing Shares" shall mean the number of shares of the Common Stock (rounded
     up to the nearest share) that is equal to:

              ($6.00 X Micrion Shares Number) + (Transaction Costs)
              -----------------------------------------------------
                                 Per Share Price

"Governmental Authorizations" shall mean all licenses, permits, certificates and
     other authorizations and approvals required for PBE to perform its
     obligations under this Agreement, under the applicable laws, ordinances or
     regulations of any Governmental Entity.

"Governmental Entity" shall mean any court, legislature, arbitral tribunal,
     administrative agency or other governmental or regulatory authority or
     agency.

"Indemnified Parties" shall have the meaning set forth in Section 7.2.

"Indemnifying Party" shall have the meaning set forth in Section 7.3.

"Losses" shall have the meaning set forth in Section 7.2.

"Material Adverse Effect" shall have the meaning set forth in the Introduction
     to Article III.

"Material Pricing Event" shall mean that a Material Adverse Effect on FEI has
     occurred and that the Adjusted Price is less than 80% of the Per Share
     Price.

"Maximum Number" shall equal (rounded down to the nearest integer) (A) 122.23%
     of (i) the number of shares of Common Stock issued in the Merger plus (ii)
     the number of shares of Common Stock issuable upon exercise of options to
     be issued to former officers or employees of Micrion as part of their
     Employment Agreements with FEI less (B) the number of Financing Shares
     issued.

"Micrion" shall have the meaning set forth in the recitals.

"Micrion Shares Number" shall mean the number of shares of Micrion common stock
     outstanding immediately before the Effective Time (other than (i) Micrion
     Shares that are owned by FEI or Merger Sub, (ii) Micrion Shares that are
     owned by Micrion, in each case (i) and (ii) not held on behalf of third
     parties, or (iii) Micrion Shares held by Dissenting Stockholders.

"Merger" shall mean the merger of Micrion with and into FEI Merger Sub, as more
     fully set forth in the Merger Agreement.



                                       -4-

<PAGE>


"Merger Agreement" shall mean the Agreement and Plan of Merger, dated as of the
     date hereof, among FEI, Micrion and FEI Merger Sub.

"Named Members" shall mean each of Alfred B. Bok, William E. Curran, Theo J.H.J.
     Sonnemans and Karel D. van der Mast.

"Nasdaq" shall mean the National Association of Securities Dealers Automated
     Quotation System.

"Needham" shall have the meaning set forth in Section 8.3.

"Notice Period" shall have the meaning set forth in Section 7.3.

"PBE" shall have the meaning set forth in the preamble.

"PBE Information" shall have the meaning set forth in Section 5.2(b).

"Per Share Price" shall have the meaning set forth in Section 2.1.

"Person" shall mean an individual, a corporation, a partnership, an association,
     a trust or other entity or organization.

"Philips" shall mean Royal Philips Electronics N.V.

"Philips Group" shall mean Philips and all of its Affiliates, whether
     consolidated or not.

"Pricing Notice" shall have the meaning set forth in Section 2.3(a).

"Proxy Statement" shall have the meaning set forth in Section 5.2(a).

"Purchase Price" shall mean the aggregate of the Financing Price and the Top-up
     Price, if any.

"Purchased Shares" shall mean the Financing Shares plus, if any, the Top-Up
     Shares.

"Representatives" of a party shall mean, collectively, its employees, agents and
     representatives (including any investment banker, attorney or accountant
     retained by it).

"Required Approvals" shall have the meaning set forth in Section 6.1(b).

"SEC" shall mean the Securities and Exchange Commission.

"Securities Act" shall mean the Securities Act of 1933, as amended.


                                       -5-

<PAGE>


"Shareholders Meeting" shall have the meaning set forth in Section 5.3.

"Stock Right" means any options, warrants, convertible securities or other
     rights to acquire shares of Common Stock, including without limitation any
     options issued under the Stock Option Plan other than Stock Rights held by
     PBE.

"Subsidiary" means any entity, whether incorporated or unincorporated, of which
     at least a majority of the securities or ownership interests having by
     their terms ordinary voting power to elect a majority of the board of
     directors or other persons performing similar functions is directly or
     indirectly owned or controlled by such party or by one or more of its
     respective Subsidiaries and, with respect to FEI, includes, without
     limitation, FEI Asia, Inc., FEI U.K., Ltd., a United Kingdom corporation,
     FEI Deutschland GmbH, a German limited liability company, and FEI FSC, Ltd,
     a United States Virgin Islands corporation.

"Takeover Statute" shall have the meaning set forth in Section 3.7.

"Taxes" shall mean all federal, state, local, or foreign taxes, charges, fees,
     levies, or other assessments, including without limitation all net income,
     gross income, gross receipts, premium, sales, use, ad valorem, transfer,
     franchise, profits, license, withholding, payroll, employment, excise,
     production, value added, estimated severance, stamp, occupation, property,
     or other taxes, fees, assessments, or charges of any kind whatsoever,
     together with any interest and any penalties (including penalties for
     failure to file in accordance with applicable information reporting
     requirements), and additions to tax.

"Tax Returns" includes all federal, state, foreign, and other returns, reports,
     forms, declarations, and information returns required to be filed by a
     party with respect to Taxes that relate to such party's business, results
     of operations, financial condition, properties, or assets.

"Top-Up Price" shall have the meaning set forth in Section 2.2.

"Top-Up Shares" shall have the meaning set forth in Section 2.2.

"To the knowledge of" a party or words of similar import shall mean the actual
     knowledge of any executive officer of that party who has been designated as
     such in that party's annual report to stockholders and any other officer
     who has specific managerial authority with respect to the relevant area, in
     each case after due inquiry.

"Transaction Costs" shall mean FEI's transaction costs incurred in connection
     with the transaction contemplated by this Agreement and the Merger
     Agreement up to a maximum aggregate amount of $1,000,000.



                                       -6-

<PAGE>


"Unaffected Trading Days" shall have the meaning set forth in Section 2.1.

         Section 1.2 Other Terms. Other terms may be defined elsewhere in the
text of this Agreement and, unless otherwise indicated, shall have such meaning
throughout this Agreement.

         Section 1.3 Other Definitional Provisions.

         (a) The words "hereof", "herein", and "hereunder" and words of similar
import, when used in this Agreement, shall refer to this Agreement as a whole
and not to any particular provision of this Agreement.

         (b) The terms defined in the singular shall have a comparable meaning
when used in the plural, and vice versa.

         (c) The terms "dollars" and "$" shall mean United States dollars.


                                   ARTICLE II

                  PURCHASE OF COMMON STOCK AND BRIDGE FINANCING

         Section 2.1 Purchase and Sale of Financing Shares. On the terms and
subject to the conditions set forth herein, on the Closing Date (as defined
below) FEI agrees to sell to PBE, and PBE agrees to purchase from FEI, the
Financing Shares at a price per share of Common Stock in cash equal to the
fifteen day average of the closing prices of FEI stock for (i) the nine full
trading days preceding the Announcement Date (the "Unaffected Trading Days") and
(ii) the six full trading days comprised of the Announcement Date and the five
full trading days immediately following the Announcement Date; provided,
however, that the price for the Financing Shares shall not exceed 130% of the
average of the closing prices on the Unaffected Trading Days (such price per
share being the "Per Share Price," and the product of the Financing Shares and
the Per Share Price being the "Financing Price"); and provided, further, that if
the Pricing Notice asserts that a Material Pricing Event has occurred, the Per
Share Price shall equal the Adjusted Price.

         Section 2.2 Purchase and Sale of Top-Up Shares. On the terms and
subject to the conditions set forth herein, FEI agrees that PBE shall have the
right, but not the obligation, to purchase for cash on the Closing Date such
number of shares of Common Stock as PBE shall specify by written notice to FEI
delivered not later than two Business Days prior to the Closing Date at the Per
Share Price for each share of Common Stock so purchased (such shares being the
"Top-Up Shares", and the product of the number of Top-Up Shares and the Per
Share Price being the "Top-Up Price"); provided, that the number of Top-Up
Shares purchased pursuant to this Section 2.2 shall not exceed the Maximum
Number.


                                       -7-

<PAGE>


         Section 2.3 Notices; Closing; Delivery and Payment.

         (a) Promptly following the determination by FEI that the conditions to
the closing of the Merger Agreement and the Stock Purchase Agreement have been
satisfied, FEI shall deliver to PBE notice to that effect (the "Closing
Notice"). No later than three business days following the Closing Notice Date,
PBE shall deliver to FEI notice indicating whether PBE asserts that a Material
Pricing Event has occurred (the "Pricing Notice"). If the Closing does not take
place within two business days following the delivery by PBE of the Pricing
Notice, FEI will deliver another Closing Notice within two business days
following delivery of the Pricing Notice.

         (b) The closing (the "Closing") shall take place at the offices of
Stoel Rives LLP, 900 SW Fifth Avenue, Suite 2300, Portland, Oregon 97204 at 5
p.m., Pacific time, on the date that is no later than the third day following
the date when the last of the conditions set forth in Article VI have been
satisfied or waived (or at such other time and place as the parties hereto may
mutually agree). The date on which the Closing occurs is referred herein as the
"Closing Date". The Closing hereunder shall be deemed to occur simultaneously
with the closing under the Merger Agreement.

         (c) In a simultaneous transaction on the Closing Date, PBE shall
deliver to FEI the Purchase Price, in immediately available funds by wire
transfer to an account of FEI at a bank designated by FEI, by notice to PBE, and
FEI shall deliver to PBE of certificates representing the Purchased Shares duly
issued to PBE and registered in the name of PBE or its designee.


                                   ARTICLE III

                      REPRESENTATIONS AND WARRANTIES OF FEI

         For purposes of the representations and warranties contained in this
Article III and Article IV hereof, "Material Adverse Effect" used in connection
with a party means any event, change or effect that is materially adverse to the
condition (financial or other), properties, assets, liabilities, businesses,
operations or results of operations (any one of the foregoing, the "Business")
of such party and its subsidiaries taken as a whole; provided, however, that an
adverse event, change or effect on the Business of a party that results from any
one or more of the following shall not constitute a Material Adverse Effect: (i)
changes in laws, regulations or GAAP, (ii) any event, change or effect
reasonably determined to have resulted from the announcement of the Merger or
the execution of the Merger Agreement, (iii) any decline in the financial
markets generally or the semiconductor industry in particular, (iv) in the case
of FEI, any event or occurrence of which any of the PBE designees on the FEI
board of directors has actual knowledge as of the date hereof or (v) any adverse
effect on FEI that is directly related to a corresponding beneficial effect on
Micrion.


                                       -8-

<PAGE>


         FEI hereby represents and warrants to PBE as of the date hereof and as
of the Closing that:

         Section 3.1 Organization, Good Standing and Qualification. FEI is a
corporation legally existing under the laws of the State of Oregon and, except
as set forth on Schedule 3.1, is in good standing as a foreign corporation in
each jurisdiction where the properties owned, leased or operated, or the
business conducted, by it require such qualification, except for such failure to
qualify or be in such good standing which, when taken together with all other
such failures, is not reasonably likely to have a Material Adverse Effect on
FEI. FEI has the full corporate power and authority to enter into this Agreement
and carry out its terms. Except for the approval of its stockholders, if
required, FEI has taken all corporate action necessary to execute, deliver and
perform this Agreement. This Agreement has been duly and validly executed and
delivered by FEI and is binding upon and enforceable against FEI in accordance
with its terms, except as enforceability may be limited or affected by
applicable bankruptcy, insolvency, reorganization, or other laws of general
application relating to or affecting the rights of creditors and except as
enforceability may be limited by principles of equity governing specific
performance, injunctive relief, or other equitable remedies.

         Section 3.2 Approval and Fairness. The Board of Directors of FEI (i)
has duly approved this Agreement and the transactions contemplated hereby and
(ii) received on behalf of FEI the opinion of its financial advisors, Needham &
Company, Inc. ("Needham"), to the effect that the Merger Consideration and PBE's
purchase of the Purchased Shares are fair to the FEI stockholders (other than
PBE, with respect to the purchase of the Purchased Shares) from a financial
point of view. An executed copy of such opinion has been delivered to PBE.

         Section 3.3 No Adverse Consequences. Except as set forth on Schedule
3.3, neither the execution and delivery of this Agreement by FEI nor the
consummation of the transactions contemplated by this Agreement will:

         (a) violate or conflict with any provision of FEI's articles of
incorporation or bylaws;

         (b) violate any law, judgment, order, injunction, decree, rule,
regulation, or ruling of any Governmental Entity applicable to FEI, except such
as is not reasonably likely to have, individually or in the aggregate, a
Material Adverse Effect on FEI;

         (c) either alone or with or without the giving of notice or the passage
of time or both, conflict with, constitute grounds for termination or
acceleration of, result in the breach of the terms, conditions, or provisions
of, result in the loss of any benefit to FEI under, or constitute a default
under any agreement, instrument, license or permit to which FEI is bound, except
such as is not reasonably likely to have, individually or in the aggregate, a
Material Adverse Effect on FEI;


                                       -9-

<PAGE>


         (d) except for applicable requirements, if any, of the Exchange Act,
the Securities Act and Blue Sky Laws and (ii) with respect to matters set forth
in Schedule 3.3, require any consent, approval or authorization of, permit from,
or declaration, filing or registration with, any Governmental Entity, or any
other person or entity by FEI, except where the failure to obtain such consent,
approval, authorization, permit or declaration or to make such filing or
registration is not reasonably likely to have, individually or in the aggregate,
a Material Adverse Effect on FEI.

         Section 3.4 Capital Structure; Valid Issuance. Other than as disclosed
in Schedule 3.4, FEI has authorized capital stock consisting of 30,000,000
shares of Common Stock, of which 18,160,808 shares were outstanding on November
25, 1998 and 500,000 shares of preferred stock, none of which is outstanding.
Options to purchase 1,493,188 shares of Common Stock were outstanding on October
31, 1998 under grants made pursuant to the 1984 Stock Incentive Plan, the 1995
Stock Incentive Plan and the 1995 Supplemental Stock Incentive Plan (the "FEI
Option Plans") and options to purchase 36,100 shares of Common Stock have been
granted since October 31, 1998. Schedule 3.4 sets forth a complete list of all
options outstanding and the exercise prices and strike prices thereof. All of
the outstanding shares of capital stock of FEI have been duly authorized and are
validly issued, fully paid and nonassessable, and no shares were issued in
violation of preemptive or similar rights of any stockholder or in violation of
any applicable securities laws. Except as set forth above, there are no shares
of capital stock of FEI authorized, issued or outstanding and, except for
options granted pursuant to the FEI Option Plans, there are no preemptive rights
or any outstanding subscriptions, options, warrants, rights, convertible
securities or other agreements or commitments of FEI of any character relating
to the issued or unissued capital stock or other securities of FEI other than
rights of PBE to maintain its percentage interest in the issued and outstanding
shares of FEI as provided in the Combination Agreement dated November 15, 1996,
as amended. There are no outstanding obligations of FEI to repurchase, redeem,
or otherwise acquire any of the Purchased Shares. Prior to the Closing Date,
upon obtaining the shareholder approval contemplated by Section 5.2 hereof, the
Financing Shares will be duly authorized and, when issued, will be validly
issued, fully paid and non-assessable. Prior to the Closing Date, FEI will have
duly authorized and reserved for issuance 45,000,000 shares of Common Stock,
sufficient for the issuance of the Maximum Number of shares issuable to PBE
pursuant to this Agreement.

         Section 3.5 FEI Reports; Financial Statements. FEI has filed with the
SEC, and has made available to PBE true and complete copies of, all forms,
reports, schedules, statements and other documents required to be filed by it
since December 31, 1996 under the Exchange Act or the Securities Act (each of
such forms, reports, schedules, statements, and other documents, to the extent
filed and publicly available before the date of this Agreement or filed
subsequent to the date hereof, other than preliminary filings, is referred to as
an "FEI Report"). Each FEI Report, at the time filed complied and, in the case
of


                                      -10-

<PAGE>


future filings, will comply in all material respects with the applicable
requirements of the Exchange Act or the Securities Act, as the case may be, and
the applicable rules and regulations of the SEC thereunder. The consolidated
financial statements of FEI included in the FEI Reports comply and, in the case
of future filings, will comply as to form in all material respects with
applicable accounting requirements and with the published rules and regulations
of the SEC with respect thereto, have been and, in the case of future filings,
will be prepared in accordance with U.S. generally accepted accounting
principles applied on a consistent basis during the periods involved (except as
may be indicated in the notes thereto or, in the case of the unaudited
statements, as permitted by Form 10-Q of the SEC) and fairly present (subject,
in the case of the unaudited statements, to normal, recurring year end audit
adjustments) the consolidated financial position of FEI and its subsidiaries as
at the dates thereof and the consolidated results of their operations and cash
flows for the periods then ended.

         Section 3.6 Absence of Certain Changes. Except as disclosed in Schedule
3.6 or in any FEI Reports, since September 27, 1998 FEI has conducted its
business only in, and has not engaged in any material transactions other than
according to, the ordinary and usual course of such business, and there has not
been:

          (a) Any event, occurrence or development which individually or in the
     aggregate could reasonably be expected to result in a Material Adverse
     Effect on FEI, other than with respect to market conditions in the
     semiconductor industry;

          (b) Any amendment to FEI's Articles of Incorporation or Bylaws or any
     entry into any material agreement, commitment, or transaction (including,
     without limitation, any borrowing, capital expenditure or capital financing
     or any amendment, modification, or termination of any existing agreement,
     commitment, or transaction) by FEI, except agreements, commitments, or
     transactions in the ordinary course of business and consistent with past
     practices or as expressly contemplated in this Agreement;

          (c) Any direct or indirect declaration, setting aside, or payment of
     any dividend or other distribution (whether in cash, stock, property, or
     any combination thereof) in respect of the common stock of FEI, or any
     direct or indirect repurchase, redemption, or other acquisition by FEI of
     any shares of its stock, or any change by FEI in its accounting principles,
     practices or methods;

          (d) Any issuance or sale of any stock of FEI (other than issuances
     pursuant to the exercise of options granted pursuant to the FEI Option
     Plans) or any issuance or granting of any option, warrant, or right to
     purchase any stock of FEI (other than options granted under the FEI Option
     Plans and the FEI Employee Share Purchase Plan) or any commitment to do any
     of the foregoing;



                                      -11-

<PAGE>


          (e) Any material purchase or other acquisition of property by FEI, any
     sale, lease, or other disposition of property by FEI, or any expenditure by
     FEI, except in the ordinary course of business;

          (f) Any incurrence of any noncontract liability which, either singly
     or in the aggregate is material to the business, results of operations or
     financial condition of FEI; or

          (g) Any encumbrance or consent to encumbrance of any material property
     or assets of FEI except in the ordinary course of business.

         Section 3.7 Takeover Statutes. No "fair price," "moratorium," "control
share acquisition" or other similar anti-takeover statute or regulation
(including Sections 60.801 to 60.816 of the Oregon Business Corporation Act)
(each a "Takeover Statute") or any applicable anti-takeover provision in FEI's
certificate of incorporation and bylaws is, or at the Closing will be,
applicable to the transactions contemplated by this Agreement.

         Section 3.8 Brokers. No broker, investment banker, financial advisor,
or other Person, other than Needham, the fees and expenses of which will be paid
by FEI, is entitled to any broker's, finder's, financial advisor's, or other
similar fee or commission in connection with the transactions contemplated by
this Agreement and the Merger Agreement based upon arrangements made by or on
behalf of FEI. FEI has disclosed the Terms of Needham's engagement letter to PBE
prior to the date hereof.

         Section 3.9 Merger Agreement. The Merger Agreement has been duly
executed and delivered by the duly authorized officers of FEI and FEI Merger
Sub, and constitutes a valid and binding obligation of each of FEI and FEI
Merger Sub enforceable against FEI and Merger Sub in accordance with its terms,
except as enforceability may be limited or affected by applicable bankruptcy,
insolvency, reorganization, or other laws of general application relating to or
affecting the rights of creditors and except as enforceability may be limited by
principles of equity governing specific performance, injunctive relief, or other
equitable remedies.

         Section 3.10 Other Information. The information furnished by FEI in
this Agreement, the Disclosure Schedule and in any certificate executed or
delivered pursuant hereto by or on behalf of FEI is not materially false or
misleading and does not contain a misstatement of a material fact or omit to
state any material fact required to be stated in order to make the statements
herein and therein not misleading.

         Section 3.11 No Other Representations or Warranties. Except for the
representations and warranties contained in this Article III, neither FEI nor
any other Person makes any other express or implied representation or warranty
on behalf of FEI.


                                      -12-

<PAGE>


To the extent that FEI can demonstrate that PBE had actual knowledge, as of the
Closing Date, of a fact that would make a representation or warranty of FEI
stated herein false, and PBE proceeds to Closing, PBE shall be deemed to have
relinquished and released any rights resulting therefrom or relating thereto.

                                   ARTICLE IV

                      REPRESENTATIONS AND WARRANTIES OF PBE

         PBE hereby represents and warrants to FEI as of the date hereof and as
of the Closing that:

         Section 4.1 Due Incorporation of PBE. PBE is a private limited
liability company that is duly organized and validly existing under the laws of
the Netherlands with full corporate power and authority, or similar power and
authority, to own and operate its business and properties and to carry on its
business as such business is now being conducted and is in good standing as a
foreign corporation in each jurisdiction where the properties owned, leased or
operated, or the business conducted, by it require such qualification, except
for such failure to qualify or be in such good standing which, when taken
together with all other such failures, is not reasonably likely to have a
Material Adverse Effect on PBE. PBE has full corporate power and authority to
enter into this Agreement and carry out its terms. PBE has taken all corporate
action necessary to execute, deliver and perform this Agreement. This Agreement
has been duly and validly executed and delivered by PBE and is binding and
enforceable against PBE in accordance with its terms, except as enforceability
may be limited or affected by applicable bankruptcy, insolvency, reorganization,
or other laws of general application relating to or affecting the rights of
creditors and except as enforceability may be limited by principles of equity
governing specific performance, injunctive relief, or other equitable remedies.

         Section 4.2 No Adverse Consequences. Except as set forth on Schedule
4.2, neither the execution and delivery of this Agreement by PBE nor the
consummation of the transactions contemplated by this Agreement will:

         (a) violate or conflict with any provision of PBE's articles of
incorporation or bylaws;

         (b) violate any law, judgment, order, injunction, decree, rule,
regulation, or ruling of any Governmental Entity applicable to PBE, except such
as is not reasonably likely to have, individually or in the aggregate, a
Material Adverse Effect on PBE;

         (c) either alone or with or without the giving of notice or the passage
of time or both, conflict with, constitute grounds for termination or
acceleration of, result in the breach of the terms, conditions, or provisions
of, result in the loss of any benefit to PBE


                                      -13-

<PAGE>

under, or constitute a default under any agreement, instrument, license or
permit to which PBE is bound, except such as is not reasonably likely to have,
individually or in the aggregate, a Material Adverse Effect on PBE;

         (d) except for applicable requirements, if any, of the Exchange Act,
the Securities Act and Blue Sky Laws and (ii) with respect to matters set forth
in Schedule 4.2, require any consent, approval or authorization of, permit from,
or declaration, filing or registration with, any Governmental Entity, or any
other person or entity by PBE, except where the failure to obtain such consent,
approval, authorization, permit or declaration or to make such filing or
registration is not reasonably likely to have, individually or in the aggregate,
a Material Adverse Effect on PBE.

         Section 4.3 Financing. PBE has or will have, as and when required, the
funds necessary to consummate the transactions contemplated hereby in accordance
with the terms hereof.

         Section 4.4 Securities Act. PBE is acquiring the Purchased Shares for
its own account and not with a view to their distribution within the meaning of
Section 2(11) of the Securities Act in any manner that would be in violation of
the Securities Act. PBE understands each certificate representing the Purchase
Shares shall bear legends in the following form:

         "THESE SECURITIES HAVE NOT BEEN REGISTERED UNDER THE
         SECURITIES ACT OF 1933 OR ANY STATE SECURITIES LAWS. THEY MAY
         NOT BE SOLD OR OFFERED FOR SALE IN THE ABSENCE OF AN EFFECTIVE
         REGISTRATION STATEMENT AS TO THE SECURITIES UNDER SAID ACT AND
         ANY APPLICABLE STATE SECURITIES LAW OR AN OPINION OF COUNSEL
         REASONABLY SATISFACTORY TO THE COMPANY THAT SUCH REGISTRATION
         IS NOT REQUIRED."

         Section 4.5 No Other Representations or Warranties. Except for the
representations and warranties contained in this Article IV, neither PBE nor any
other Person makes any other express or implied representation or warranty on
behalf of PBE.

                                    ARTICLE V

                                    COVENANTS

         Section 5.1 Continuation of Business. Except as set forth on Schedule
5.1, without the prior written consent of PBE, from and after the execution date
of this


                                      -14-

<PAGE>


Agreement until Closing, FEI will use its commercially reasonable best efforts
to carry out the following:

          (a) operate and maintain its business in its usual manner and in the
     ordinary course and, to the extent consistent therewith, use its reasonably
     best efforts to preserve its business organization intact and maintain its
     existing relations with customers, suppliers, employees and business
     associates;

          (b) not declare, pay, or set aside for payment and dividend or other
     distribution of money or property in respect of its capital stock;

          (c) not acquire any assets other than assets acquired in the ordinary
     and usual course of its business and consistent with past practices; and

          (d) not amend its Articles of Organization or Incorporation or Bylaws,
     except to increase the number of authorized shares of Common Stock to not
     more than 45,000,000 shares.

         Section 5.2 Information Supplied.

         (a) FEI agrees, as to itself and its Subsidiaries that (i) none of the
information, except for such information to be provided by PBE pursuant to
Section 5.2(b) below or by Micrion, to be included or incorporated by reference
in a Joint Proxy Statement/Prospectus (including any amendments or supplements
thereto, the "Proxy Statement"), used in connection with the Shareholders
Meeting will, at the time the Proxy Statement is published and mailed to FEI's
Shareholders, contain any untrue statement of a material fact or omit to state
any material fact required to be stated therein or necessary to make the
statements therein, in light of the circumstances under which they were made,
not misleading, and (ii) the Proxy Statement will not, at the date of mailing to
shareholders and at the times of the Shareholders Meeting, contain any untrue
statement of a material fact or omit to state any material fact required to be
stated therein or necessary in order to make the statements therein, in light of
the circumstances under which they were made, not misleading, except to the
extent any such untrue statement is provided by PBE pursuant to Section 5.2(b)
below or by Micrion or such omission is directly caused by PBE's breach of its
covenant in Section 5.2(b) below.

         (b) PBE agrees to provide to FEI in writing all material information
required by Law to be included in the Proxy Statement that cannot reasonably be
provided by FEI or its Subsidiaries because such information is exclusively
within the control and knowledge of PBE or its Affiliates (such information, the
"PBE Information"). PBE agrees, as to itself and its Affiliates, that none of
the PBE Information supplied by it for inclusion in the Proxy Statement will, at
the time the Proxy Statement is published and mailed to FEI's shareholders,
contain any untrue statement of a material fact or omit to state any material


                                      -15-

<PAGE>


fact required to be stated therein or necessary to make the statements therein,
in light of the circumstances under which they were made, not misleading. PBE
further agrees to supply such additional PBE Information to FEI for inclusion in
the Proxy Statement if, in light of circumstances occurring subsequent to the
time the Proxy Statement is published and mailed, such additional PBE
Information is necessary in order that the PBE Information in the Proxy
Statement will not, at the time of the Shareholders Meeting, contain any untrue
statement of a material fact or omit to state any material fact required to be
stated therein or necessary to make the statements therein, in the light of the
circumstances under which they were made, not misleading.

         Section 5.3 Shareholders Approval. Subject to fiduciary obligations
under applicable law, FEI will take, in accordance with applicable law and its
Articles of Incorporation and by-laws, all action necessary to convene a meeting
of holders of its Common Stock (the "Shareholders Meeting") as promptly as
practicable to consider and vote upon the issuance of Purchased Shares
contemplated thereby. Subject to fiduciary obligations under applicable law,
FEI's board of directors shall recommend such approval and shall take all lawful
action to solicit such approval.

         Section 5.4 Filings; Other Actions; Notification.

         (a) FEI shall promptly prepare and file with the SEC the Proxy
Statement, shall promptly respond to any SEC comments thereon and shall, as soon
as practicable thereafter, mail the Proxy Statement to the shareholders of FEI.
Subsequent to mailing the Proxy Statement, FEI shall promptly amend or
supplement the Proxy Statement, if the information in it is required by law to
be amended or supplemented or if such an amendment or supplement is otherwise
necessary, proper or advisable in light of the terms hereof. FEI shall use its
reasonable efforts to obtain all necessary state securities law or "blue sky"
permits and approvals required in connection with the transactions contemplated
by this Agreement and the Merger Agreement and will pay all expenses incident
thereto (except to the extent that Micrion shall pay such expenses pursuant to
the Merger Agreement). FEI shall also use its best efforts to comply with all
NASD rules applicable to the transactions contemplated hereby and shall use its
best efforts to obtain the approvals necessary for the Purchased Shares to be
quoted on the Nasdaq National Market.

         (b) FEI shall cooperate with PBE and use (and shall cause its
Affiliates to use) reasonable efforts to take or cause to be taken all actions,
and do or cause to be done all things, necessary, proper or advisable under this
Agreement and applicable laws to consummate and make effective the transactions
contemplated by this Agreement as soon as practicable, including preparing and
filing as promptly as practicable all documentation to effect all necessary
applications, notices, petitions, filings and other documents and to obtain as
promptly as practicable all permits, consents, approvals and authorizations
necessary or advisable to be obtained from any third party and/or any
Governmental Entity


                                      -16-

<PAGE>


in order to consummate the transactions contemplated by this Agreement and the
Merger Agreement. Subject to applicable laws relating to the exchange of
information, PBE shall have the right to review in advance all the information
relating to FEI and any of its Affiliates, that appear in any filing made with,
or written materials submitted to, any third party and/or any Governmental
Entity in connection with the transactions contemplated by this Agreement and
the Merger Agreement. In exercising the foregoing right, PBE shall act
reasonably and as promptly as practicable.

         (c) PBE shall, upon request by FEI, furnish the other with all
information concerning itself and as applicable, its Affiliates, directors,
officers and, shareholders and such other matters as may be reasonably necessary
or advisable in connection with the Proxy Statement or any other statement,
filing, notice or application made by or on behalf of FEI or any of their
respective Subsidiaries to any third party and/or any Governmental Entity in
connection with the transactions contemplated by this Agreement and the Merger
Agreement.

         (d) FEI shall keep PBE apprised of the status of matters relating to
completion of the transactions contemplated by this Agreement and the Merger
Agreement, including promptly furnishing PBE with copies of notices or other
communications received by FEI or any of its Subsidiaries, from any third party
and/or any Governmental Entity with respect to the transactions contemplated by
this Agreement. FEI will notify PBE promptly of any fact or occurrence between
the date of this Agreement and the Closing Date of which it becomes aware which
would make any of the conditions to Closing of this Agreement not capable of
being satisfied and of any event, change or effect that has had or is reasonably
likely to have, individually or in the aggregate, a Material Adverse Effect on
FEI.

         Section 5.5 Publicity. FEI shall not issue any press releases or
otherwise make public announcements with respect to the transactions
contemplated by this Agreement, nor shall FEI make any filings with any third
party and/or any Governmental Entity (including any interdealer quotation
service) with respect thereto unless FEI first obtains the consent of PBE,
except as may be required by law or by obligations pursuant to any listing
agreement with, or rules of, the Nasdaq National Market (and then, to the extent
feasible, only after notice to and consultation with PBE).

         Section 5.6 Expenses. FEI shall pay all charges and expenses incurred
by it, and PBE shall pay all charges and expenses incurred by it or its
Affiliates, in connection with the transactions contemplated by this Agreement.

         Section 5.7 Takeover Statute. If any Takeover Statute is or may become
applicable to the transactions contemplated by this Agreement, FEI and its board
of directors shall grant such approvals and take such actions as are necessary
so that such transactions may be consummated as promptly as practicable on the
terms contemplated


                                      -17-

<PAGE>


by this Agreement and otherwise act to eliminate the effects of such statute or
regulation on such transactions.

         Section 5.8 Right to Maintain Percentage Interest. Nothing in this
Agreement shall affect the right of PBE to maintain its percentage interest in
FEI in accordance with the terms of the Combination Agreement, dated as of
November 15, 1996, between PBE and FEI; provided, however, that if PBE elects to
terminate this Agreement pursuant to Section 8.1(h) hereof, the reduction in
PBE's percentage ownership of FEI Common Stock resulting from the issuance of
the shares of Common Stock in the Merger or upon the exercise of options to be
issued to former officers or employees of Micrion as part of their Employment
Agreements with FEI shall be considered to have occurred as a result of a sale
of FEI Common Stock by PBE for purposes of Section 5.17 of the Combination
Agreement.

         Section 5.9 Use of Proceeds. The Financing Price shall be used by FEI
to pay (A) (i) the cash portion of the consideration to be paid to the
stockholders of Micrion pursuant to the Merger Agreement and (ii) the
Transaction Costs, and (B) the Top-Up Price, if any, shall be used by FEI for
working capital.


                                   ARTICLE VI

                            CONDITIONS TO THE CLOSING

         Section 6.1 Conditions to the Obligations of FEI and PBE. The
obligations of the parties hereto to effect the Closing are subject to the
satisfaction (or waiver) prior to the Closing of the following conditions:

         (a) Shareholders Approval. At the Shareholders Meeting, the
shareholders of FEI shall approve the issuance of Purchased Shares contemplated
hereby and by the Merger Agreement;

         (b) Governmental Authorizations. All filings required to be made prior
to the Effect Time with, and all consents, approvals and authorizations required
to be obtained prior to the Effective Time from, and Governmental Entities in
order to consummate the transactions contemplated by this Agreement, will have
been made or obtained, as the case may be, and the waiting period under the HSR
Act and any applicable competitions laws of any jurisdiction will have expired
or been terminated (collectively, the "Required Approvals").

         (c) No Prohibitions. There shall not have been promulgated or issued a
law, statute, rule, regulation, decree, order, injunction or ruling by any
Governmental Entity that remains in effect and prohibits, restrains or enjoins
the consummation of the Merger.


                                      -18-

<PAGE>


         (d) Merger Conditions. Prior to the Closing, all of the conditions to
the closing of the Merger Agreement shall have been satisfied (it being
understood that if FEI has waived satisfaction of any of the conditions set
forth in the Merger Agreement this condition shall not be deemed satisfied
unless PBE shall have consented to such waiver in writing).

         (e) Nasdaq Listing. The Purchased Shares shall have been approved for
listing on the Nasdaq National Market; and

         (f) Notices. FEI and PBE shall have complied with Section 2.3(a).

         Section 6.2 Conditions to the Obligations of PBE. The obligation of PBE
to effect the Closing is subject to the satisfaction (or waiver by PBE) prior to
the Closing, of the following conditions:

         (a) Representations and Warranties. The representations and warranties
of FEI contained in the following sections of this Agreement shall be true and
correct as of the date of this Agreement and as of the Closing Date (except to
the extent any such representation or warranty expressly speaks of an earlier
date): 3.1, 3.2, 3.3, 3.4, 3.5, 3.6(b)-(g), 3.7, 3.8, 3.9 and 3.10; provided,
however, that notwithstanding anything herein to the contrary, this Section 6.2
shall be deemed to be satisfied even if such representations or warranties are
not so true and correct unless the failure of such representations or warranties
to be so true and correct, individually or in the aggregate, has had, or is
reasonably likely to have, a Material Adverse Effect on FEI;

         (b) Covenants. The covenants and agreements of FEI to be performed on
or prior to the Closing, shall have been duly performed in all material
respects, and PBE shall have received a certificate to such effect dated the
Closing Date and executed by a duly authorized officer of FEI;

         (c) Acquisition Documentation. PBE shall be reasonably satisfied with
the Merger Agreement (such satisfaction is hereby confirmed by PBE's execution
and delivery of this Agreement);

         (d) Legal Opinion. PBE shall have received the opinion of Stoel Rives
LLP, dated as of the Closing Date, addressed to PBE substantially similar to the
opinion by Stoel Rives LLP dated February 21, 1997 and delivered to Philips
Industrial Electronics International B.V. in connection with the Combination
Agreement, except for paragraphs (9), (10) and (11) of such opinion.




                                      -19-

<PAGE>


         Section 6.3 Conditions to the Obligations of FEI. The obligation of FEI
to effect the Closing is subject to the satisfaction (or waiver) prior to the
Closing of the following condition:

         Representations and Warranties. The representations and warranties of
PBE set forth in this Agreement shall be true and correct as of the date of this
Agreement and as of the Closing Date as though made on and as of the Closing
Date (except to the extent any such representation or warranty expressly speaks
of an earlier date); provided, however, that notwithstanding anything herein to
the contrary, this Section 6.3 shall be deemed to be satisfied even if such
representations or warranties are not so true and correct unless the failure of
such representations or warranties to be so true and correct, individually or in
the aggregate, has had, or is reasonably likely to have, a Material Adverse
Effect on PBE.


                                   ARTICLE VII

                            SURVIVAL; INDEMNIFICATION

         Section 7.1 Survival. All of the representations and warranties of FEI
contained in this Agreement and all claims and causes of action with respect
thereto shall survive the Closing until 30 calendar days after FEI files with
the SEC audited financial statements covering an annual period that ends
subsequent to the Closing Date.

         Section 7.2 Reciprocal Indemnification. Each of FEI and PBE hereby
agrees that it shall indemnify, defend and hold harmless the other, the other's
Affiliates and, if applicable, the other's respective directors, officers,
shareholders, partners, agents and employees and their heirs, successors and
assigns (each an Indemnified Party and, collectively, the "Indemnified Parties")
from, against and in respect of any losses ("Losses") imposed on, sustained,
incurred or suffered by or asserted against any of the Indemnified Parties,
directly or indirectly relating to or arising out of (i) any breach of any
representation or warranty made by it contained in this Agreement, (ii) the
breach of any covenant or agreement of it contained in this Agreement and (iii)
any claim, litigation, investigation or proceeding relating to this Agreement,
the transactions contemplated by this Agreement, or the use of the Purchase
Price.

         Section 7.3 Indemnification Procedures. With respect to third party
claims, all claims for indemnification by any Indemnified Party hereunder shall
be asserted and resolved as set forth in this Section 7.3. In the event that any
claim or demand ("Claim") for which FEI or PBE (as the case may be, the
"Indemnifying Party"), may be liable to any Indemnified Party hereunder is
asserted against or sought to be collected from any Indemnified Party by a third
party, such Indemnified Party shall promptly, but in no event more than 30 days
following such Indemnified Party's receipt of written notice of such Claim,
notify the Indemnifying Party in writing of such Claim and the amount or the


                                      -20-

<PAGE>


estimated amount thereof to the extent then feasible (which estimate shall not
be conclusive of the final amount of such Claim) (the "Claim Notice"). The
failure on the part of the Indemnified Party to give any such Claim Notice
within such 30 day period shall not relieve the Indemnifying Party of any
indemnification obligation hereunder unless, and only to the extent that, the
Indemnifying Party is materially prejudiced thereby. The Indemnifying Party
shall have 60 days from the personal delivery or mailing of the Claim Notice
(the "Notice Period") to notify the Indemnified Party (a) whether or not the
Indemnifying Party disputes the liability of the Indemnifying Party to the
Indemnified Party hereunder with respect to such Claim and (b) whether or not it
desires to defend the Indemnified Party against such Claim. Except as
hereinafter provided, in the event that the Indemnifying Party notifies the
Indemnified Party within the Notice Period that it desires to defend the
Indemnified Party against such Claim, the Indemnifying Party shall, at its sole
cost and expense, have the right to defend the Indemnified Party by appropriate
proceedings and shall have the sole power to direct and control such defense;
provided, that the Indemnifying Party shall not take any action which would
result in the creation, and shall promptly seek the removal, of any Encumbrance
on the property or assets of the Indemnified Party resulting from such Claim or
the litigation thereof. If any Indemnified Party desires to participate in any
such defense it may do so at its sole cost and expense. The Indemnified Party
shall not settle a Claim for which it is indemnified by the Indemnifying Party
without the written consent of the Indemnifying Party unless the Indemnifying
Party elects not to defend the Indemnified Party against such Claim. The
Indemnifying Party may, with the consent of the Indemnified Party (which consent
shall not be unreasonably withheld), settle or compromise any action or consent
to the entry of any judgment which (i) includes as a term thereof the delivery
by the claimant or plaintiff to the Indemnified Party of a duly executed written
unconditional release of the Indemnified Party from all liability in respect of
such action, which release shall be reasonably satisfactory in form and
substance to counsel for the Indemnified Party and (ii) would not adversely
affect the right of the Indemnified Party and its Affiliates to own, hold and
use their respective assets or operate businesses. Notwithstanding the
foregoing, (i) the Indemnified Party shall have the sole right to defend, settle
or compromise any Claim with respect to which it has waived its right to
indemnification pursuant to this Agreement and (ii) the Indemnified Party,
during the period the Indemnifying Party is determining whether to elect to
assume the defense of a matter covered by this section, may take such reasonable
actions as it deems necessary to preserve any and all rights with respect to the
matter, without such actions being construed as a waiver of the Indemnified
Party's rights to defense and indemnification pursuant to this Agreement. If the
Indemnifying Party elects not to defend the Indemnified Party against such
Claim, whether by not giving the Indemnified Party timely notice as provided
above or otherwise, then the amount of any such Claim, or, if the same be
contested by the Indemnified Party, then that portion thereof as to which such
defense is unsuccessful (and the reasonable costs and expenses pertaining to
such defense) shall be the liability of the Indemnifying Party hereunder. To the
extent the Indemnifying Party shall direct, control or participate in the
defense or settlement of any third party claim or demand, the Indemnified Party
will give the Indemnifying Party


                                      -21-



<PAGE>



and its counsel access to, during normal business hours, the relevant business
records and other documents, and shall permit them to consult with the employees
and counsel of the Indemnified Party. The Indemnified Party shall use its
reasonable efforts in the defense of all such claims.

         Section 7.4 Indemnification Net of Taxes. The amount of any Losses for
which indemnification is provided pursuant to this Article VII shall be
increased to take account of any net Tax costs incurred by the Indemnified Party
(including the present value of any lost net operating loss carryforwards or
other tax attributes) arising from the receipt of indemnity payments hereunder
(taking into account the effects of such increase). In computing the amount of
any such Tax cost, the Indemnified Party shall be deemed to recognize all other
items of income, gain, loss, deduction or credit before recognizing any items
arising from the receipt of any indemnity payment hereunder.


                                  ARTICLE VIII

                                   TERMINATION

         Section 8.1 Termination. This Agreement may be terminated at any time
prior to the Closing:

         (a) by agreement of FEI and PBE;

         (b) by either FEI or PBE, by giving written notice of such termination
to the other party, if the Merger shall not have occurred on or prior to October
31, 1999;

         (c) by either FEI or PBE in writing, if there shall have occurred any
failure of any condition precedent to the Merger and such failure is either not
capable of being cured prior to the closing of the Merger, or, if such failure
is capable of being cured, is not cured within a reasonable amount of time after
notice thereof;

         (d) by either FEI or PBE in writing, if there shall have occurred any
failure of any condition precedent to the obligations of the terminating party
to effect the transactions contemplated by this Agreement and such failure is
either not capable of being cured prior to the Closing or, if such failure is
capable of being cured, is not cured within a reasonable amount of time after
notice thereof; provided, however, that neither FEI nor PBE, as the case may be,
may terminate this agreement pursuant to this Section 8.1(d) if FEI or PBE, as
the case may be, has failed to fully comply with its obligations hereunder in
any manner that shall have proximately caused such failure to satisfy any
condition precedent;



                                      -22-

<PAGE>


         (e) by PBE if FEI has materially breached any representation, warranty,
covenant or agreement contained in this Agreement and such breach is either not
capable of being cured prior to the Closing or if such breach is capable of
being cured, is not so cured within a reasonable amount of time; provided,
however, that PBE may not terminate under this provision because of the failure
of a representation or warranty of FEI to be true and correct unless such
failure, individually or in the aggregate, has had, or is reasonably likely to
have, a Material Adverse Effect on FEI; and provided, further, that termination
pursuant to this Section 8.1(e) shall not relieve FEI of liability for such
breach or otherwise;

         (f) by FEI if PBE has materially breached any representation, warranty,
covenant or agreement made by it in this Agreement and such breach is either not
capable of being cured prior to the Closing or if such breach is capable of
being cured, is not so cured within a reasonable amount of time; provided,
however, that FEI may not terminate under this provision because of the failure
of a representation or warranty of PBE to be true and correct unless such
failure, individually or in the aggregate, has had, or is reasonably likely to
have, a Material Adverse Effect on PBE; and provided, further, that termination
pursuant to this Section 8.1(f) shall not relieve PBE of liability for such
breach or otherwise;

         (g) by PBE if FEI's Common Stock is no longer quoted on the Nasdaq
National Market System;

         (h) by PBE if a Material Pricing Event has occurred and the Adjusted
Price is less than $5.00 per share; or

         (i) by PBE pursuant to Section 9.3 hereof.

         Section 8.2 Effect of Termination.

         (a) Except as set forth in paragraph (b) below, in the event of the
termination of this Agreement in accordance with Section 8.1 hereof, this
Agreement shall thereafter become void and have no effect, and no party hereto
shall have any liability to the other party hereto or its respective Affiliates,
directors, officers or employees, except for the obligations of the parties
hereto contained in this Section 8.2 and except that nothing herein will relieve
any party from liability for any breach of this Agreement prior to such
termination.

         (b) In the event this Agreement is terminated by PBE pursuant to
Section 8.1(e) hereof, FEI shall promptly pay to PBE all of the expenses PBE
incurred in connection with this Agreement and the transactions contemplated by
this Agreement.


                                      -23-

<PAGE>

                                   ARTICLE IX

                                  MISCELLANEOUS

         Section 9.1 Notices. All notices or other communications hereunder
shall be deemed to have been duly given and made if in writing and if served by
personal delivery upon the party for whom it is intended, if delivered by
registered or certified mail, return receipt requested, or by a national courier
service, or if sent by telecopier, provided that the telecopy is promptly
confirmed by telephone confirmation thereof, to the person at the address set
forth below, or such other address as may be designated in writing hereafter, in
the same manner, by such person:

         To PBE:

         c/o PHILIPS INTERNATIONAL B.V.
         Rembrandt Tower
         Amstelplein 1
         1096 HA Amsterdam
         The Netherlands
         Telephone: 31-20-597-7236
         Telecopy:  31-20-597-7230
         Attn:  Guido R.C. Dierick

         With a copy to:

         SULLIVAN & CROMWELL
         125 Broad Street
         New York, New York 10004
         Telephone:  212-558-4000
         Telecopy:   212-558-3358
         Attn:  Alexandra D. Korry

         To FEI:

         FEI COMPANY
         7451 N.E. Evergreen Parkway
         Hillsboro, Oregon 97124-5830
         Telephone:  503-640-7500
         Telecopy:   503-540-7509
         Attn:  Chief Executive Officer



                                      -24-

<PAGE>


         With a copy to:

         STOEL RIVES LLP
         900 S.W. Fifth Avenue, Suite 2600
         Portland, Oregon 97204-1268
         Telephone:  503-224-3380
         Telecopy:   503-220-2480
         Attn:  Stephen E. Babson

         Section 9.2 Amendment; Waiver. Any provision of this Agreement may be
amended or waived if, and only if, such amendment or waiver is in writing and
signed, in the case of an amendment, by FEI and PBE, or in the case of a waiver,
by the party against whom the waiver is to be effective. No failure or delay by
any party in exercising any right, power or privilege hereunder shall operate as
a waiver thereof nor shall any single or partial exercise thereof preclude any
other or further exercise thereof or the exercise of any other right, power or
privilege. The rights and remedies herein provided shall be cumulative and,
except as otherwise provided herein, shall not be exclusive of any rights or
remedies provided by law.

         Section 9.3 Amendment of Merger Agreement. FEI and PBE hereby agree
that the Merger Agreement shall not be amended without the prior written consent
of PBE, which consent shall not be unreasonably withheld or delayed. In the
event that the Merger Agreement is amended in contravention of the preceding
sentence, PBE may terminate this Agreement without penalty three days after it
has delivered to FEI written notice of its intention to do so, and PBE shall
have no liability to FEI or its Affiliates, directors, officers or employees,
notwithstanding any other provision of this Agreement.

         Section 9.4 Assignment. No party to this Agreement may assign any of
its rights or obligations under this Agreement without the prior written consent
of the other party hereto, but PBE may assign all or any portion of its rights
and obligations pursuant to this Agreement to any other Person in the Philips
Group.

         Section 9.5 Entire Agreement. This Agreement (including the Disclosure
Schedule hereto) contains the entire agreement between the parties hereto, with
respect to the subject matter hereof and supersedes all prior agreements and
understandings, oral or written, with respect to such matters, except that the
Combination Agreement shall remain in full force and effect and shall not be
amended or modified by the terms hereof.

         Section 9.6 Fulfillment of Obligations. Any obligation of any party to
any other party under this Agreement, which obligation is performed, satisfied
or fulfilled by an Affiliate of such party, shall be deemed to have been
performed, satisfied or fulfilled by such party.



                                      -25-

<PAGE>


         Section 9.7 Parties in Interest. This Agreement shall inure to the
benefit of and be binding upon the parties hereto and their respective
successors and permitted assigns. Nothing in this Agreement, express or implied,
is intended to confer upon any Person other than PBE or FEI, or their successors
or permitted assigns, any rights or remedies under or by reason of this
Agreement.

         Section 9.8 Disclosure Schedules. The disclosure of any matter in the
Disclosure Schedule, including any FEI Reports incorporated by reference
therein, pursuant to this Agreement shall be deemed to be a disclosure for all
purposes of this Agreement to which such matter could reasonably be expected to
be pertinent, but shall expressly not be deemed to constitute an admission by
FEI or PBE, or to otherwise imply, that any such matter is material for the
purposes of this Agreement.

         Section 9.9 Governing Law; Mediation and Arbitration.

         (a) The Agreement shall be governed by the laws of the state of New
York, without giving effect to principles of conflicts of laws thereof.

         (b) If a dispute arises out of or relates to this contract, or the
breach thereof, and if that dispute cannot be settled through direct
discussions, the parties agree to first endeavor to settle the dispute in an
amicable manner by mediation administered by the American Arbitration
Association under its Commercial Mediation Rules, before resorting to
arbitration. Thereafter, any unresolved controversy or claim arising out of or
relating to this contract, or breach thereof, shall be settled by arbitration
administered by the American Arbitration Association in accordance with its
International Arbitration Rules and Title 9 of the U.S. Code and PBE hereby
consents to the jurisdiction of such arbitration to the extent required.
Judgment on the award rendered by the arbitrators may be entered in any court
having jurisdiction thereof.

         (c) The number of arbitrators shall be three, one of whom shall be
appointed by each of PBE and FEI and the third of whom shall be selected by
mutual agreement, if possible, within 30 days of the selection of the second
arbitrator and thereafter by the administering authority and the place of
arbitration shall be New York, New York. The language of the arbitration shall
be English, but documents or testimony may be submitted in Dutch if a
translation is provided.

         (d) The arbitrators will have no authority to award punitive damages or
any other damages not measured by the prevailing party's actual damages, and may
not, in any event, make any ruling, finding or award that does not conform to
the terms and conditions of the Agreement.

         (e) Either party may make an application to the arbitrators seeking
injunctive relief to maintain the status quo until such time as the arbitration
award is rendered or the


                                      -26-

<PAGE>


controversy is otherwise resolved. Either party may apply to any court having
jurisdiction hereof and seek injunctive relief in order to maintain the status
quo until such time as the arbitration award is rendered or the controversy is
otherwise resolved.

         Section 9.10 Counterparts. This Agreement may be executed by the
parties on separate counterparts which, when taken together with counterparts
signed by each of the other parties, shall constitute a single fully executed
Agreement which shall be as fully binding and effective as if each party had
executed a single signature page.

         Section 9.11 Headings. The heading references herein and the table of
contents hereto are for convenience purposes only, do not constitute a part of
this Agreement and shall not be deemed to limit or affect any of the provisions
hereof.




                                      -27-

<PAGE>


         IN WITNESS WHEREOF, the parties have executed or caused this Agreement
to be executed as of the date first written above.

                                           PHILIPS BUSINESS ELECTRONICS
                                           INTERNATIONAL B.V.


                                           By:
                                              -------------------------------
                                              Name:
                                              Title:



                                           FEI COMPANY


                                           By:
                                              -------------------------------
                                              Name:
                                              Title:



                                      -28-




                          AGREEMENT AND PLAN OF MERGER


                                      AMONG


                                  FEI COMPANY,


                              MICRION CORPORATION,


                                       AND


                           MC ACQUISITION CORPORATION



                                DECEMBER 3, 1998



<PAGE>



                                TABLE OF CONTENTS


ARTICLE 1.  THE MERGER.........................................................1
            1.1   The Merger...................................................1
            1.2   Stockholders' Meeting; Proxy Statement.......................2
            1.3   Effective Time...............................................3
            1.4   Effect of Merger.............................................3
            1.5   Articles of Organization, Bylaws, Directors and Officers.....3
                  1.5.1   Articles of Organization and Bylaws..................3
                  1.5.2   Directors............................................3
                  1.5.3   Officers.............................................3
            1.6   Merger Consideration.........................................4
                  1.6.1   FEI Stock and Cash...................................4
                  1.6.2   All Stock............................................4
            1.7   Shares of Dissenting Stockholders............................4
            1.8   Withholding Tax..............................................5
            1.9   Exchange of Certificates for Shares..........................5
                  1.9.1   Exchange Agent.......................................5
                  1.9.2   Exchange Procedure...................................5
                  1.9.3   No Further Ownership Rights in Micrion Common
                             Stock.............................................6
                  1.9.4   Termination of Exchange Period; Unclaimed Stock......6
                  1.9.5   Lost, Stolen or Destroyed Certificates...............7
                  1.9.6   Micrion Stock Options and Warrants...................7
            1.10  Closing......................................................7

ARTICLE 2   REPRESENTATIONS AND WARRANTIES.....................................7
            2.1   Micrion's Representations and Warranties.....................8
                  2.1.1   Corporate Existence and Authority....................8
                  2.1.2   No Adverse Consequences..............................8
                  2.1.3   Capitalization.......................................9
                  2.1.4   Subsidiaries and Joint Ventures.....................10
                  2.1.5   SEC Reports and Financial Statements................10
                  2.1.6   Information Supplied................................10
                  2.1.7   Legal Proceedings...................................10
                  2.1.8   Contracts and Arrangements..........................11
                  2.1.9   Material Assets.....................................11
                  2.1.10  Compliance with Laws................................12
                  2.1.11  Environmental Matters...............................12
                  2.1.12  Tax Matters.........................................13
                  2.1.13  Employees and Labor Relations Matters...............14
                  2.1.14  Employee Benefits...................................15


                                        i

<PAGE>



                  2.1.15  Absence of Certain Changes or Events................16
                  2.1.16  Undisclosed Liabilities.............................17
                  2.1.17  Insurance...........................................17
                  2.1.18  Intellectual Property...............................17
                  2.1.19  Guaranties; Powers of Attorney......................18
                  2.1.20  Brokers.............................................18
                  2.1.21  Opinion of Financial Advisor........................19
                  2.1.22  Vote Required.......................................19
                  2.1.23  Rights Agreement....................................19
                  2.1.24  State Takeover Statutes and Other Takeover
                          Provisions..........................................19
                  2.1.25  Deferred Compensation Obligations...................19
                  2.1.26  Product Warranties and Liabilities..................19
                  2.1.27  Inventories.........................................20
                  2.1.28  Receivables.........................................20
                  2.1.29  Year 2000 Compliance................................20
                  2.1.30  Indebtedness........................................21
                  2.1.31  No Other Representations or Warranty................21
            2.2   FEI's Representations and Warranties........................21
                  2.2.1   Corporate Existence and Authority...................21
                  2.2.2   No Adverse Consequences.............................21
                  2.2.3   Capitalization......................................22
                  2.2.4   Subsidiaries and Joint Ventures.....................23
                  2.2.5   SEC Reports and Financial Statements................23
                  2.2.6   Information Supplied................................23
                  2.2.7   Legal Proceedings...................................23
                  2.2.8   Contracts and Arrangements..........................24
                  2.2.9   Material Assets.....................................24
                  2.2.10  Compliance with Laws................................24
                  2.2.11  Environmental Compliance............................24
                  2.2.12  Tax Matters.........................................25
                  2.2.13  Employees and Labor Relations Matters...............26
                  2.2.14  Employee Benefits...................................27
                  2.2.15  Absence of Certain Changes or Events................27
                  2.2.16  Undisclosed Liabilities.............................28
                  2.2.17  Insurance...........................................28
                  2.2.18  Intellectual Property...............................29
                  2.2.19  Guaranties; Powers of Attorney......................29
                  2.2.20  Brokers.............................................29
                  2.2.21  Opinion of Financial Advisor........................29
                  2.2.22  Vote Required.......................................30
                  2.2.23  Year 2000 Compliance................................30
                  2.2.24  Financing...........................................30


                                       ii

<PAGE>



                  2.2.25  Product Warranties and Liabilities..................30
                  2.2.26  Inventories.........................................31
                  2.2.27  Receivables.........................................31
                  2.2.28  No Other Representations or Warranties..............31

ARTICLE 3   COVENANTS.........................................................31
            3.1   Continuation of Business....................................31
                  3.1.1   Joint Covenants.....................................31
                  3.1.2   Micrion Covenants...................................32
                  3.1.3   Closing Notice......................................34
            3.2   No Solicitation.............................................34
            3.3   Access......................................................35
            3.4   Hart Scott Rodino...........................................36
            3.5   Other Government Consents...................................36
            3.6   Reasonable Best Efforts; No Inconsistent Action.............36
            3.7   Changed Circumstances.......................................37
            3.8   Fees and Expenses...........................................37
            3.9   Rights Agreement............................................37
            3.10  Options and Warrants........................................37
            3.11  Press Releases..............................................37
            3.12  Indemnification; Directors' and Officers' Insurance.........37
            3.13  Other Agreements and Related Documents......................39
                  3.13.1  Stock Option Agreement..............................39
                  3.13.2  Employment Agreement................................39
                  3.13.3  Assignment of Patents and Trademarks................39
            3.14  FEI Board of Directors......................................39
            3.15  Golden Parachutes...........................................39
            3.16  Authorized Shares...........................................39

ARTICLE 4   CONDITIONS TO THE PARTIES' OBLIGATIONS TO
            CONSUMMATE THE MERGER.............................................39
            4.1   Mutual Conditions...........................................39
                  4.1.1   Governmental Authorizations.........................39
                  4.1.2   Stockholder Approval................................40
                  4.1.3   No Prohibitions.....................................40
                  4.1.4   No Suits............................................40
                  4.1.5   Nasdaq Listing......................................40
                  4.1.6   Form S-4............................................40
                  4.1.7   Regulatory Burdens..................................40
            4.2   Conditions to Obligations of FEI............................41
                  4.2.1   Representations and Warranties; Covenants...........41
                  4.2.2   Dissenting Shares...................................42
                  4.2.3   Delivery of Exhibits and Micrion Officers'
                            Certificates......................................42

                                       iii

<PAGE>


            4.3   Conditions to Obligations of Micrion........................42
                  4.3.1   Representations and Warranties; Covenants...........42
                  4.3.2   Deposit of Certificates and Funds...................43
                  4.3.3   Delivery of Certificates by FEI.....................43

ARTICLE 5   TERMINATION              .........................................43
            5.1   Termination by Mutual Consent...............................43
            5.2   Termination by Either Party.................................43
            5.3   Termination by Micrion......................................44
            5.4   Termination by FEI..........................................44
            5.5   Effect of Termination.......................................45

ARTICLE 6   GENERAL PROVISIONS................................................46
            6.1   Nonsurvival of Representations and Warranties...............46
            6.2   Further Action..............................................46
            6.3   Entire Agreement............................................46
            6.4   Assignment..................................................47
            6.5   Binding Effect; No Third Party Benefit......................47
            6.6   Waiver......................................................47
            6.7   Governing Law...............................................47
            6.8   Severability................................................47
            6.9   Time of Essence.............................................47
            6.10  Counterparts................................................47
            6.11  Amendments..................................................47
            6.12  Notices.....................................................48
            6.13  Voting Agreements...........................................48
            6.14  Schedules...................................................48



                                       iv

<PAGE>


                             EXHIBITS AND SCHEDULES

EXHIBITS

Exhibit A                 Amendment to Micrion Rights Agreement (Section 2.1.23)
Exhibit B                 19.9% Stock Option Agreement (Section 3.13.1)
Exhibit C                 Form of Employment Agreement (Section 3.13.2)
Exhibit D                 Assignments of Patents and Trademarks (Section 3.13.3)
Exhibit E                 Voting Agreements (Section 6.13)

SCHEDULES

Schedule 2.1.2            Micrion Adverse Consequences; Required Consents
Schedule 2.1.3            Micrion Options and Warrants
Schedule 2.1.4            Micrion Subsidiaries and Joint Ventures
Schedule 2.1.7            Micrion Legal Proceedings
Schedule 2.1.8            Micrion Contracts and Arrangements
Schedule 2.1.9            Micrion Material Assets
Schedule 2.1.11           Micrion Environmental Matters
Schedule 2.1.12           Micrion Tax Matters
Schedule 2.1.13           Micrion Employees and Labor Matters
Schedule 2.1.14           Micrion Employee Benefits
Schedule 2.1.15           Micrion Changes or Events
Schedule 2.1.16           Micrion Liabilities
Schedule 2.1.18           Micrion Marks, Patents and Copyrights
Schedule 2.1.26           Micrion Products and Warranties
Schedule 2.1.28           Micrion Receivables
Schedule 2.1.30           Micrion Mask Repair Products

Schedule 2.2.2            FEI Adverse Consequences; Required Consents
Schedule 2.2.3            FEI Options and Warrants
Schedule 2.2.4            FEI Subsidiaries and Joint Ventures
Schedule 2.2.7            FEI Legal Proceedings
Schedule 2.2.9            FEI Material Assets
Schedule 2.2.11           FEI Environmental Matters
Schedule 2.2.12           FEI Tax Matters
Schedule 2.2.13           FEI Employees and Labor Matters
Schedule 2.2.14           FEI Employee Benefits
Schedule 2.2.15           FEI Changes or Events
Schedule 2.2.16           FEI Liabilities
Schedule 2.2.18           FEI Marks, Patents and Copyrights
Schedule 2.2.25           FEI Product Warranties

Schedule 3.1.1            Business Continuation
Schedule 3.1.2            Micrion Covenants
Schedule 3.13.12          Micrion Key Employees


                                        v

<PAGE>



                             INDEX OF DEFINED TERMS


         The following terms are defined in this Agreement in the sections
identified below:

         Term                        Definition Section

"Agreement"                             Preamble
"Articles of Merger"                    1.3
"Blue Sky Laws"                         2.1.2(d)
"Business"                              Introduction to Article 2
"Cash Portion"                          1.6
"Certificate of Merger"                 1.3
"Certificates"                          1.9.2
"Closing" and "Closing Date"            1.11
"Code"                                  Section 1.4
"Confidentiality Agreement"             3.2(b)
"Contamination"                         2.1.11(a)
"Contracts"                             2.1.8
"Copyrights"                            2.1.18(a)(iii)
"Costs"                                 3.12(a)
"Dissenting Stockholders"               1.6
"Dissenting Shares"                     1.7
"DOJ"                                   3.4
"Effective Time"                        1.3
"Environmental Law"                     2.1.11(a)
"Equitable Adjustment"                  1.6.1
"ERISA"                                 2.1.14
"Exchange Act"                          2.1.2(d)
"Exchange Agent"                        1.9.1
"FEI"                                   Recital A
"FEI Board"                             Recital A
"FEI Expenses"                          5.5.2
"FEI Stock Plans"                       2.2.3
"FEI Returns"                           2.2.12(a)
"FEI SEC Documents"                     2.2.5
"FEI Stockholders Meeting"              1.2(a)
"Form S-4"                              1.2(a)
"FTC"                                   3.4
"GAAP"                                  2.1.5
"Governmental Entity"                   2.1.2(b)
"Hazardous Substance"                   2.1.11(a)
"HSR Act"                               2.1.2(d)


                                       vi

<PAGE>



"Indebtedness"                          2.1.30
"Indemnified Parties"                   3.12(a)
"Intellectual Property Assets"          2.1.18(a)
"Licenses"                              2.1.10
"Marks"                                 2.1.18(a)(i)
"Material Adverse Effect"               Introduction to Article 2
"Micrion"                               Recital A
"Micrion Board"                         Recital A
"Micrion Compensation and Benefit Plans"2.1.14
"Micrion Returns"                       2.1.12(a)
"Micrion SEC Document"                  2.1.5
"Micrion Share," "Micrion Shares"       1.6
"Micrion Stock Plans"                   2.1.3
"Micrion Stockholders Meeting"          1.2(a)
"Merger"                                Recitals
"Merger Consideration"                  1.6.2
"MBCL"                                  Recital B
"Needham"                               2.2.20
"OBCA"                                  Recital B
"Patents"                               2.1.18(a)(ii)
"Person"                                1.9.4
"Philips"                               2.2.3
"Philips Additional Shares Right"       2.2.3
"Pre-Closing Average Price"             1.6.2
"Proxy Statement"                       1.2(b)
"Representatives"                       3.2
"Required Approvals"                    4.1.1
"Right," "Rights"                       1.6
"Rights Agreement"                      1.6
"SEC"                                   1.2(b)
"Securities Act"                        1.2(b)
"To the knowledge of"                   Introduction to Article 2
"Stock Option Agreement"                Recital C
"Stock Purchase Agreement"              2.2.28
"Sub"                                   Preamble
"Superior Proposal"                     3.2
"Surviving Corporation"                 1.4
"Taxes"                                 2.1.12(e)
"Takeover Proposal"                     3.2
"Termination Fee"                       5.5.2
"Warrants"                              2.1.3
"WDR"                                   2.1.20
"Year 2000 compliant"                   2.1.26


                                       vii

<PAGE>



                          AGREEMENT AND PLAN OF MERGER

         THIS  AGREEMENT  AND PLAN OF MERGER  made as of  December  3, 1998 (the
"Agreement")  is among FEI  COMPANY,  an  Oregon  corporation  ("FEI"),  MICRION
CORPORATION,  a  Massachusetts  corporation  ("Micrion"),   and  MC  ACQUISITION
CORPORATION, an Oregon corporation and wholly-owned subsidiary of FEI ("Sub").

                                    RECITALS

         A. The Boards of Directors of FEI and Micrion  (respectively,  the "FEI
Board" and the "Micrion  Board") have determined that it is advisable and in the
best  interests  of  their  respective  shareholders  to enter  into a  business
combination as described in this Agreement. As used in this Agreement,  the term
"FEI" means FEI Company and its wholly owned direct or indirect subsidiaries and
the term  "Micrion"  means  Micrion  and its  wholly  owned  direct or  indirect
subsidiaries.

         B. In furtherance of such combination it is proposed that Micrion merge
with and into Sub pursuant to the applicable  provisions of the Oregon  Business
Corporation Act (the "OBCA") and the Massachusetts Business Corporation Law (the
"MBCL") and the terms and conditions of this Agreement (the "Merger").

         C. To induce FEI to enter into this Agreement,  Micrion will enter into
a Stock Option Agreement with FEI (the "19.9% Stock Option Agreement"), pursuant
to which  Micrion  will grant to FEI an option to  purchase  Micrion  Shares (as
hereinafter  defined)  pursuant  to the  terms and  conditions  set forth in the
Option Agreement.

                                    AGREEMENT

         NOW,  THEREFORE,   in  consideration  of  the  mutual  representations,
warranties, covenants, agreements and conditions contained in this Agreement and
in the Stock Option Agreement, the parties agree as follows:

                                    ARTICLE 1

                                   THE MERGER

         1.1 THE MERGER. Pursuant to the OBCA and the MBCL and subject to and in
accordance  with  the  terms  and  conditions  of  this  Agreement  as  soon  as
practicable  following the satisfaction or waiver of the conditions set forth in
Article  4 of this  Agreement,  Micrion  will  merged  with and into Sub or,  as
specified in Section 1.4, Sub will be merged with and into Micrion.



<PAGE>



         1.2 STOCKHOLDERS' MEETING; PROXY STATEMENT.

          (a)  Micrion  will take,  in  accordance  with  Massachusetts  law and
     Micrion's  Articles of  Organization  and Bylaws,  all action  necessary to
     convene a meeting of its stockholders (the "Micrion Stockholders  Meeting")
     as  promptly as  practicable  after the Form S-4  (hereinafter  defined) is
     declared  effective to consider and vote upon  approval of this  Agreement.
     FEI  will  take,  in  accordance  with  Oregon  law  and  its  Articles  of
     Incorporation and Bylaws,  all action necessary to convene a meeting of its
     stockholders   (the  "FEI   Stockholders   Meeting,"  and  either  the  FEI
     Stockholders Meeting or the Micrion  Stockholders  Meeting, a "Stockholders
     Meeting")  as  promptly  as  practicable  after  the Form  S-4 is  declared
     effective  to consider  and vote upon the  approval of the  issuance of FEI
     Common Stock to be issued in connection with the transactions  contemplated
     hereby.  Except to the extent the Micrion  Board  determines in good faith,
     after receipt of written  advice from outside legal counsel  experienced in
     such  matters,  that such action is  incompatible  with  compliance  by its
     directors with their respective  fiduciary duties under applicable law, the
     Micrion Board shall unanimously  recommend that the stockholders of Micrion
     approve this Agreement and thereby  approve the  transactions  contemplated
     hereby, shall take all lawful action to solicit such approval and shall not
     withdraw or modify such  recommendation,  and the FEI Board shall recommend
     that the stockholders of FEI approve the issuance of FEI Common Stock to be
     issued in connection with the  transactions  contemplated  hereby and shall
     take all lawful action to solicit such approval.

          (b) FEI and Micrion will promptly prepare and file with the Securities
     and  Exchange  Commission  (the "SEC") a Joint  Proxy  Statement/Prospectus
     (including any amendments or supplements  thereto,  the "Proxy Statement"),
     and FEI shall  prepare and file with the SEC a  Registration  Statement  on
     Form S-4 in  connection  with the issuance of shares of FEI Common Stock in
     the Merger  (including  any amendments or  supplements  thereto,  the "Form
     S-4") as  promptly  as  practicable.  FEI and  Micrion  each  shall use all
     reasonable  best efforts to have the Form S-4 declared  effective under the
     Securities  Act of 1933, as amended (the  "Securities  Act") as promptly as
     practicable  after such filing,  and promptly  thereafter mail the Form S-4
     and Proxy Statement to their  respective  stockholders.  FEI shall also use
     all  reasonable  best efforts to obtain prior to the effective  date of the
     Form S-4 all  necessary  state  securities  law or "blue sky"  permits  and
     approvals  required in  connection  with the Merger and to  consummate  the
     other transactions contemplated by this Agreement and will pay all expenses
     incident thereto.

          (c)  If at any  time  prior  to the  Effective  Time  any  information
     relating  to  Micrion  or  FEI  or  any of  their  respective  officers  or
     directors,  should be  discovered  by Micrion or FEI,  respectively,  which
     should be set forth in an amendment or supplement to any of the Form S-4 or
     the Proxy  Statement,  so that any of such  documents  would not  include a
     misstatement  of material fact or omit to state any material fact necessary
     to make the statements  therein,  in light of the circumstances under which
     they were made, not


                                        2

<PAGE>



     misleading,  Micrion or FEI, as the case may be, shall promptly  notify the
     other parties hereto and an appropriate  amendment or supplement describing
     such  information  shall be promptly  filed with the SEC and, to the extent
     required by law, disseminated to the stockholders of Micrion and FEI.

         1.3 EFFECTIVE  TIME. As soon as  practicable  following  Closing of the
Merger, Articles of Merger prepared in accordance with the applicable provisions
of the OBCA and the MBCL (the  "Articles of Merger")  will be executed and filed
with  the  State  Secretary  of the  State of  Oregon  and the  Commonwealth  of
Massachusetts.  The  Merger  will be  effective  upon the later of the time when
Articles of Merger are duly filed with the State  Secretary of the  Commonwealth
of  Massachusetts  and the time when  Articles of Merger are duly filed with the
State Secretary of the State of Oregon, or at such other time as the parties may
agree upon in writing pursuant to applicable law (the "Effective Time").

         1.4 EFFECT OF MERGER.  At the  Effective  Time,  Micrion will be merged
with and into Sub in the manner and with the effect provided by the OBCA and the
MBCL, the separate  corporate  existence of Micrion will cease and thereupon Sub
and Micrion will be a single corporation (the "Surviving  Corporation") and will
be a wholly owned subsidiary of FEI governed by the laws of the State of Oregon.
The  parties  will use  reasonable  efforts  to cause the Merger to qualify as a
reorganization  under Section 368(a) of the U.S.  Internal Revenue Code of 1986,
as amended (the "Code"); provided, however, that if (i) the Merger Consideration
consists of FEI Common Stock and cash  pursuant to Section 1.6.1 and the closing
sale price per share of the FEI Common Stock on the Closing Date is not equal to
or greater  than 40 percent of the sum of such  closing sale price plus the Cash
Portion,  as defined in  Section  1.6 below or (ii) if the Merger  Consideration
consists  solely of shares of FEI Common Stock pursuant to Section  1.6.2,  then
Sub will be merged  with and into  Micrion  in the  manner  and with the  effect
provided by the OBCA and the MBCL, the separate corporate  existence of Sub will
cease and thereupon Sub and Micrion will be the Surviving  Corporation  and will
be a wholly owned  subsidiary of FEI governed by the laws of the Commonwealth of
Massachusetts.

         1.5 ARTICLES OF ORGANIZATION, BYLAWS, DIRECTORS AND OFFICERS.

              1.5.1  ARTICLES  OF  ORGANIZATION  AND  BYLAWS.  The  Articles  of
Incorporation  and Bylaws of Sub as in effect at the Effective  Time will be the
Articles of Incorporation and Bylaws of the Surviving Corporation.

              1.5.2  DIRECTORS.  The directors of Sub at the Effective Time will
be the directors of the Surviving Corporation,  until their successors have been
duly  elected  or  appointed  and  qualified  or  until  their  earlier   death,
resignation,  or removal in accordance with the Surviving Corporation's Articles
of Incorporation and Bylaws.

              1.5.3 OFFICERS.  The officers of Sub at the Effective Time will be
the officers of the Surviving  Corporation in accordance  with the Bylaws of the
Surviving Corporation.


                                        3

<PAGE>



         1.6 MERGER CONSIDERATION.

              1.6.1 FEI COMMON  STOCK AND CASH.  Each  share of  Micrion  Common
Stock, no par value, of Micrion (each a "Micrion  Share" and  collectively,  the
"Micrion   Shares")  and  the  associated   stock  right  (each  a  "Right"  and
collectively,  the "Rights")  issued pursuant to the Rights Agreement dated July
30,  1997,  as  amended,  between  Micrion and  BankBoston,  N.A.  (the  "Rights
Agreement")  and outstanding  immediately  before the Effective Time (other than
(i) Micrion  Shares that are owned by FEI or Sub,  (ii) Micrion  Shares that are
owned by Micrion, in each case (i) and (ii) not held on behalf of third parties,
or  (iii)  Micrion  Shares  held  by  stockholders  ("Dissenting  Stockholders")
exercising  appraisal  rights  pursuant  to  Sections  85  to  98  of  the  MBCL
(collectively,  "Excluded  Micrion Shares")) will be converted into the right to
receive (A) one share of FEI Common  Stock,  subject to equitable  adjustment in
the  event  of  a  stock   split,   combination,   stock   dividend  or  similar
reclassification  of FEI Common Stock or Micrion Common Stock occurring prior to
the Closing  Date  ("Equitable  Adjustment")  and (B) subject to  adjustment  as
provided in Section 4.2.1, $6.00 in cash, without interest (the "Cash Portion").

              1.6.2 ALL  STOCK.  Notwithstanding  the  foregoing  provisions  of
Section 1.6.1, if the Stock Purchase Agreement, as defined in Section 2.2.24, is
terminated  prior to  Closing,  each  Micrion  Share and the  associated  Rights
outstanding  immediately  before the  Effective  Time,  other than the  Excluded
Micrion Shares, will be converted into the right to receive (A) one share of FEI
Common  Stock plus (B) such number of shares of FEI Common  Stock,  which,  when
multiplied by the  Pre-Closing  Average Price,  as defined below,  equals $6.00,
subject to Equitable Adjustment and subject to adjustment as provided in Section
4.2.1.  The aggregate  number of shares of FEI Common Stock to be issued to each
Micrion stockholder will be rounded to the nearest whole share.

         The  "Pre-Closing  Average  Price" is the average  closing price of FEI
Common Stock for the 20 full trading days  preceding  the date that FEI provides
notice to Philips pursuant to the Stock Purchase Agreement,  that all conditions
to Closing of this  Agreement  specified  in Article IV have been  satisfied  or
waived;  provided  that if a Material  Adverse  Effect,  as defined in the Stock
Purchase  Agreement,  occurs or is discovered less than 20 trading days prior to
the Closing Notice Date, then the Pre-Closing  Average Price will be the average
closing price of FEI Common Stock only for those full trading days following the
date  of  such  Material  Adverse  Effect,  as  defined  in the  Stock  Purchase
Agreement, through and including the Closing Notice Date. "Merger Consideration"
means either the shares of FEI Common Stock plus the Cash Portion to be received
by the  Micrion  stockholders  pursuant  to  Section  1.6.1 or the shares of FEI
Common  Stock to be  received by the  Micrion  stockholders  pursuant to Section
1.6.2.

         1.7 SHARES OF DISSENTING STOCKHOLDERS. Notwithstanding anything in this
Agreement  to the  contrary,  any issued and  outstanding  Micrion  Shares  (and
associated  Rights) held by any  Dissenting  Stockholder  who has not voted such
Micrion  Shares in favor of or consented to the Merger and who complies with all
the provisions of Sections 85 to 98 of the MBCL  concerning the right of holders
of Micrion Shares to dissent from the Merger and require appraisal of their


                                        4

<PAGE>



Micrion  Shares  ("Dissenting  Shares")  will not be  converted  as described in
Section 1.6 but will become the right to receive  such  consideration  as may be
determined to be due to such Dissenting  Stockholder pursuant to such provisions
of the MBCL. If, after the Effective Time, such Dissenting Stockholder withdraws
his or her demand for  appraisal or fails to perfect or  otherwise  loses his or
her right of  appraisal,  in any case  pursuant to the MBCL,  his or her Micrion
Shares will be deemed to be converted as of the Effective Time into the right to
receive the Merger Consideration. Micrion will give FEI (i) prompt notice of any
demands  received  by  Micrion  for  appraisal  of  Micrion  Shares and (ii) the
opportunity to participate in and direct all  negotiations  and proceedings with
respect to any such demands. Micrion will not, without the prior written consent
of FEI,  make any  payment  with  respect  to, or settle,  offer to  settle,  or
otherwise negotiate, any such demands.

         1.8 WITHHOLDING TAX. The right of any stockholder to receive the Merger
Consideration  will be subject to and reduced by the amount of any  required tax
withholding obligation.

         1.9 EXCHANGE OF CERTIFICATES FOR SHARES.

              1.9.1  EXCHANGE  AGENT.  Prior to the  Effective  Time,  FEI shall
designate an Exchange Agent selected by FEI with Micrion's prior approval, which
shall not be  unreasonably  withheld  (the  "Exchange  Agent"),  and  before the
Effective Time, FEI will make available,  or cause the Surviving  Corporation to
make  available,  to the  Exchange  Agent shares of FEI Common Stock and (if the
Merger  Consideration  is FEI Common Stock and cash pursuant to Section  1.6.1.)
funds  in  amounts  and  at the  times  necessary  for  delivery  of the  Merger
Consideration upon surrender of certificates representing Micrion Shares as part
of the Merger  pursuant to Section  1.6.  The  Exchange  Agent shall invest such
funds,  as directed by FEI, in (a) direct  obligations  of the United  States of
America,  (b)  obligations  for which the full  faith and  credit of the  United
States of  America  is pledged to  provide  for the  payment  of  principal  and
interest or (c) commercial  paper rated,  at the time of purchase,  in either of
the two highest  categories by Moody's  Investors  Services,  Inc. or Standard &
Poor's  Corporation,  it being  understood  that any and all interest  earned on
funds made  available to the Exchange  Agent  pursuant to this Agreement will be
turned over to FEI. In the event the funds  deposited  with the  Exchange  Agent
shall  realize  a loss on any such  investment,  FEI shall  promptly  thereafter
deposit in such fund cash in an amount sufficient to enable such fund to satisfy
all remaining obligations originally contemplated to be paid out of such fund.

              1.9.2 EXCHANGE PROCEDURE.  As soon as reasonably practicable after
the Effective  Time,  the Exchange Agent will mail to each holder of record of a
certificate or certificates  (the  "Certificates")  that immediately  before the
Effective  Time  represented  Micrion  Shares  (other than  holders of record of
Excluded Micrion Shares), (i) a notice (advising the holders that the Merger has
become  effective) and a letter of transmittal  specifying that delivery will be
effected,  and that risk of loss and title to the  Certificates  will pass, only
upon  proper  delivery  of the  Certificates  to the  Exchange  Agent  and  (ii)
instructions for exchanging the Certificates (or affidavits in lieu


                                        5

<PAGE>



thereof)  for the Merger  Consideration.  Upon  surrender of a  Certificate  for
cancellation  to the  Exchange  Agent or to such other agent or agents as may be
appointed by FEI, together with such letter of transmittal,  properly  completed
and duly  executed,  and such other  customary  documents as may  reasonably  be
required by the Exchange Agent,  the holder of such Certificate will be entitled
to receive in exchange therefor the Merger  Consideration for each Micrion Share
represented thereby, and the Certificate so surrendered will be canceled. In the
event of a transfer of ownership of Micrion Shares that is not registered in the
transfer  records of  Micrion,  payment  may be made to a Person (as  defined in
Section  1.9.4  below)  other than the Person in whose name the  Certificate  so
surrendered is registered, if such Certificate is properly endorsed or otherwise
is in proper form for transfer and the Person  requesting  such payment pays any
transfer or other taxes required by reason of the payment to a Person other than
the registered  holder of such Certificate or establishes to the satisfaction of
FEI that  such tax has been  paid or is not  applicable.  Until  surrendered  as
contemplated by this Section 1.9.1,  each Certificate will be deemed at any time
after  the  Effective  Time to  represent  only the right to  receive  upon such
surrender the Merger  Consideration for each Micrion Share represented  thereby.
No interest  will be paid or will accrue on any cash payable upon the  surrender
of any Certificate.

              1.9.3 NO FURTHER  OWNERSHIP  RIGHTS IN MICRION  COMMON STOCK.  The
Merger Consideration  delivered upon the surrender of Certificates in accordance
with the terms of Section  1.9.2 will be deemed to have been  delivered  in full
satisfaction  of  all  rights  pertaining  to  the  Micrion  Shares  theretofore
represented  by such  Certificates.  At the Effective  Time,  the stock transfer
books of Micrion will be closed,  and there will be no further  registration  of
transfers  on the  stock  transfer  books of the  Surviving  Corporation  of the
Micrion Shares that were outstanding  immediately before the Effective Time. If,
after  the  Effective  Time,   Certificates   are  presented  to  the  Surviving
Corporation  or the  Exchange  Agent for any reason,  they will be canceled  and
exchanged as provided in Section 1.9.2.

              1.9.4 TERMINATION OF EXCHANGE PERIOD;  UNCLAIMED STOCK. Any shares
of  FEI  Common  Stock  and  any  portion  of  any  cash,   dividends  or  other
distributions  with  respect  to FEI  Common  Stock  deposited  by FEI  with the
Exchange Agent  (including the proceeds of any investments  thereof) that remain
unclaimed by the stockholders of Micrion 270 days after the Effective Time shall
be paid to FEI. Any stockholders of Micrion who have not theretofore surrendered
their  shares shall  thereafter  look only to FEI for payment of their shares of
FEI Common  Stock and any cash,  dividends  and other  distributions  in respect
thereof  issuable and/or payable pursuant to this Section 1.9 upon due surrender
of (i)  their  Certificates  (or  affidavits  of loss in lieu  thereof)  or (ii)
delivery of duly executed  letters of  transmittal,  as the case may be, in each
case with  respect to both clause (i) and (ii),  without any  interest  thereon.
None of FEI, Sub,  Micrion or the Exchange Agent will be liable to any Person in
respect of any cash  delivered to a public  official  pursuant to any applicable
abandoned property, escheat, or similar law. As used in this Agreement, the term
"Person"  means  any  individual,   corporation,  general  partnership,  limited
partnership,  limited liability company,  joint venture,  trust,  cooperative or
other association,  Governmental  Entity (as defined in Section 2.1.2(b) below),
or any other organization.


                                        6

<PAGE>



              1.9.5 LOST, STOLEN OR DESTROYED  CERTIFICATES.  If any Certificate
has been lost, stolen or destroyed, upon the making of an affidavit of that fact
by the Person claiming such Certificate to be lost, stolen or destroyed, Micrion
will issue in exchange for such lost, stolen or destroyed Certificate the Merger
Consideration  deliverable in respect  thereof as determined in accordance  with
this Agreement;  provided, however, that Micrion may, in its sole discretion and
as a condition  precedent  to the  issuance  thereof,  require the owner of such
lost,  stolen or destroyed  Certificate to give Micrion a bond in such sum as it
may  reasonably  direct as indemnity  against any claim that may be made against
Micrion with  respect to the  certificate  alleged to have been lost,  stolen or
destroyed.

              1.9.6 MICRION STOCK OPTIONS AND WARRANTS.  At the Effective  Time,
each then  outstanding  option and warrant to  purchase  Micrion  Common  Stock,
whether or not then  exercisable or vested in accordance with its terms (each, a
"Micrion  Option")  which  theretofore  has been granted under the Micrion Stock
Plans,  shall be  terminated.  Any and all rights  under any  provisions  of the
Micrion Stock Plans or any other plan, program or arrangement  providing for the
issuance  or grant of any other  interest  in  respect of the  capital  stock of
Micrion shall be canceled as of the Effective Time. Prior to the Effective Time,
the Board of Directors of Micrion (or, if  appropriate,  any committee  thereof)
and Micrion shall take all action necessary to terminate all Micrion Stock Plans
and any other plan,  program or arrangement with respect to, including any right
to acquire, equity securities of Micrion and to ensure that no Person shall have
any right under any of the Micrion Stock Plans (or any Micrion  option,  warrant
or other  right to acquire  equity  securities  of Micrion  granted  thereunder)
following  the  Effective  Time  other  than the 19.9%  Stock  Option  Agreement
attached hereto as Exhibit B.

         1.10  CLOSING.  Unless  this  Agreement  has  been  terminated  and the
transactions  contemplated by it have been abandoned  pursuant to Article 5, the
closing of the Merger  (the  "Closing")  will take place at the offices of Stoel
Rives LLP, 900 SW Fifth Avenue,  Suite 2600,  Portland,  Oregon  97204,  at 5:00
p.m.,  Pacific time,  on the date that is not later than the sixth  business day
following the date when the last of the conditions set forth in Article 5 hereof
(other than  conditions  that by their terms are to occur at Closing)  will have
been  satisfied or waived in accordance  with this  Agreement,  or at such other
time and date as FEI and Micrion may agree in writing (the "Closing Date").

                                    ARTICLE 2

                         REPRESENTATIONS AND WARRANTIES

         For purposes of the  representations  and warranties  contained in this
Article 2, the following terms have the following meanings:

"Material  Adverse  Effect"  used in  connection  with a party  means any event,
change or effect  that is  materially  adverse to the  condition  (financial  or
other), properties,  assets, liabilities,  businesses,  operations or results of
operations (any one of the foregoing, the "Business") of such party and


                                        7

<PAGE>



its subsidiaries  taken as a whole;  provided,  however,  that an adverse event,
change or effect on the Business of a party that results from any one or more of
the following shall not constitute a Material Adverse Effect:  (i) reductions or
cancellations in orders for FIB systems;  (ii) delays in shipments by Micrion of
products   containing  both  an  ion  and  electron  column  due  to  delays  or
interruptions  in the  supply of  electron  columns;  or (iii)  changes in laws,
regulations or GAAP.

"To the  knowledge  of" a party or  words  of  similar  import  mean the  actual
knowledge of any executive officer of that party who has been designated as such
in that party's annual report to stockholders  (or his or her successor) and any
other officer who has specific managerial authority with respect to the relevant
area, in each case after due inquiry.

         2.1 MICRION'S  REPRESENTATIONS  AND WARRANTIES.  Micrion represents and
warrants to FEI as follows:

              2.1.1 CORPORATE EXISTENCE AND AUTHORITY.  Micrion is a corporation
duly  organized,  validly  existing and in good  standing  under the laws of The
Commonwealth of Massachusetts  and is in good standing as a foreign  corporation
in each  jurisdiction  where the properties  owned,  leased or operated,  or the
business conducted,  by it require such qualification,  except for such failures
to qualify or be in such good standing which, when taken together with all other
such  failures,  is not reasonably  likely to have a Material  Adverse Effect on
Micrion.  Micrion has the full corporate  power and authority to enter into this
Agreement and carry out its terms.  Except for the approval of its stockholders,
Micrion has taken all corporate action necessary to execute, deliver and perform
this Agreement.  This Agreement has been duly and validly executed and delivered
by Micrion and is binding upon and  enforceable  against  Micrion in  accordance
with  its  terms,  except  as  enforceability  may be  limited  or  affected  by
applicable  bankruptcy,  insolvency,  reorganization,  or other  laws of general
application  relating  to or  affecting  the rights of  creditors  and except as
enforceability  may be  limited  by  principles  of  equity  governing  specific
performance, injunctive relief, or other equitable remedies.

              2.1.2 NO  ADVERSE  CONSEQUENCES.  Except as set forth on  Schedule
2.1.2,  neither the execution and delivery of this  Agreement by Micrion nor the
consummation of the transactions contemplated by this Agreement will:

          
                   (a)  violate or  conflict  with any  provision  of  Micrion's
     articles of organization or bylaws;

                   (b) violate any law,  judgment,  order,  injunction,  decree,
     rule, regulation, or ruling of any court,  legislature,  arbitral tribunal,
     administrative   agency  or  commission  or  other  governmental  or  other
     regulatory  authority or agency (a  "Governmental  Entity")  applicable  to
     Micrion,  except such as is not reasonably likely to have,  individually or
     in the aggregate, a Material Adverse Effect on Micrion;



                                        8

<PAGE>



                   (c) either  alone or with the giving of notice or the passage
     of time or both,  conflict  with,  constitute  grounds for  termination  or
     acceleration  of,  result  in the  breach  of  the  terms,  conditions,  or
     provisions  of,  result in the loss of any  benefit  to Micrion  under,  or
     constitute a default under any agreement, instrument, license, or permit to
     which  Micrion  is a party or by which it is bound,  except  such as is not
     reasonably  likely to have,  individually  or in the aggregate,  a Material
     Adverse Effect on Micrion; or

                   (d) except (i) for  applicable  requirements,  if any, of the
     Securities  Exchange Act of 1934,  as amended  (the  "Exchange  Act"),  the
     Securities  Act and state  securities or "blue sky" laws ("Blue Sky Laws"),
     (ii) for the pre-merger notification  requirements of the Hart-Scott-Rodino
     Antitrust  Improvements  Act  of  1976,  as  amended,  and  the  rules  and
     regulations thereunder (the "HSR Act"), (iii) for the filing of Articles of
     Merger  pursuant to the OBCA and the MBCL, and (iv) with respect to matters
     set forth in Schedule 2.1.2, require any consent, approval or authorization
     of,  permit  from,  or  declaration,   filing  or  registration  with,  any
     governmental  or  regulatory  authority,  or any other  person or entity by
     Micrion,  except  where the  failure  to  obtain  such  consent,  approval,
     authorization, permit or declaration or to make such filing or registration
     is not  reasonably  likely to have,  individually  or in the  aggregate,  a
     Material Adverse Effect on Micrion.

              2.1.3   CAPITALIZATION.   Micrion  has  authorized  capital  stock
consisting of 12,300,000  shares of Micrion  Common  Stock,  of which  4,074,397
shares were  outstanding on November 23, 1998 and 5,000,000  shares of preferred
stock, no par value,  none of which is outstanding.  Options to purchase 870,815
shares were  outstanding  on October 31, 1998 under grants made  pursuant to the
Micrion  Stock Plans and no stock  options have been granted  since  October 31,
1998. "Micrion Stock Plans" means, collectively,  Micrion's 1986 Incentive Stock
Plan,  1990  Nonqualified  Stock Option Plan,  1993 Common Stock Incentive Plan,
1994 Amended and Restated  Omnibus Stock Option Plan,  1994 Stock  Purchase Plan
and 1994  Non-Employee  Director Stock Option Plan, each as amended or modified.
Warrants to purchase  100,000  shares were  outstanding  on November  23,  1998.
Schedule  2.1.3  sets  forth  a  complete  list  of  all  options  and  warrants
outstanding  and the  exercise  prices and  strike  prices  thereof.  All of the
outstanding shares of capital stock of Micrion have been duly authorized and are
validly  issued,  fully paid and  nonassessable,  and no shares  were  issued in
violation of preemptive or similar rights of any  stockholder or in violation of
any applicable  securities  laws.  Except as set forth above,  other than shares
reserved  for  issuance  pursuant to the Stock  Option  Agreement,  there are no
shares of capital stock of Micrion authorized, issued or outstanding and, except
for options  granted  pursuant to the Micrion Stock Plans and the Rights and the
Warrants,  there  are no  preemptive  rights or any  outstanding  subscriptions,
options,  warrants,  rights,  convertible  securities  or  other  agreements  or
commitments  of  Micrion of any  character  relating  to the issued or  unissued
capital  stock  or  other  securities  of  Micrion.  There  are  no  outstanding
obligations of Micrion to repurchase,  redeem,  or otherwise  acquire any of the
Micrion Shares.



                                        9

<PAGE>



              2.1.4  SUBSIDIARIES  AND JOINT  VENTURES.  Except as  disclosed on
Schedule 2.1.4,  Micrion has no subsidiaries and owns no stock or other interest
in any other  corporation or in any partnership or limited  liability company or
other venture or entity.  Each subsidiary of Micrion is duly organized,  validly
existing  and  in  good  standing  under  the  laws  of  its   jurisdiction   of
incorporation  or formation,  except where the failure to do so would not have a
Material Adverse Effect on Micrion.

              2.1.5 SEC REPORTS AND FINANCIAL STATEMENTS. Micrion has filed with
the SEC, and has made  available to FEI true and complete  copies of, all forms,
reports,  schedules,  statements and other documents  required to be filed by it
since June 30, 1996 under the Exchange Act or the  Securities  Act (each of such
forms, reports, schedules,  statements, and other documents, to the extent filed
and publicly  available before the date of this Agreement or filed subsequent to
the date hereof,  other than preliminary  filings,  is referred to as a "Micrion
SEC Document"). Each Micrion SEC Document at the time filed complied and, in the
case of future filings, will comply in all material respects with the applicable
requirements  of the Exchange Act or the Securities Act, as the case may be, and
the applicable  rules and  regulations of the SEC thereunder.  The  consolidated
financial  statements of Micrion  included in the Micrion SEC  Documents  comply
and,  in the case of future  filings,  will  comply  as to form in all  material
respects with applicable  accounting  requirements  and with the published rules
and regulations of the SEC with respect  thereto,  have been and, in the case of
future  filings,  will be prepared in accordance  with U.S.  generally  accepted
accounting  principles ("GAAP") applied on a consistent basis during the periods
involved (except as may be indicated in the notes thereto or, in the case of the
unaudited  statements,  as permitted by Form 10-Q of the SEC) and fairly present
(subject, in the case of the unaudited statements, to normal, recurring year end
audit  adjustments)  the  consolidated  financial  position  of Micrion  and its
subsidiaries  as at the dates  thereof  and the  consolidated  results  of their
operations and cash flows for the periods then ended.

              2.1.6 INFORMATION SUPPLIED. None of the information supplied or to
be  supplied  by  or  on  behalf  of  Micrion   specifically  for  inclusion  or
incorporation  by reference in the Form S-4 or the Proxy Statement  contains any
untrue statement of a material fact or omits to state any material fact required
to be stated  therein or necessary in order to make the statements  therein,  in
light of the circumstances under which they are made, not misleading.  The Proxy
Statement will comply as to form in all material  respects with the requirements
of the Exchange Act and the rules and regulations thereunder.

              2.1.7 LEGAL  PROCEEDINGS.  Except as disclosed in Schedule  2.1.7,
there is neither  pending  nor, to the  knowledge of Micrion,  threatened  by or
against  Micrion  any  legal  action,  claim,  arbitration,   investigation,  or
proceeding  that could (i) have a Material  Adverse Effect on Micrion  following
the Closing;  or (ii) enjoin,  delay or restrict the right or ability of Micrion
to perform  its  obligations  under this  Agreement  and,  to the  knowledge  of
Micrion,  there  is no basis  for any such  claim,  litigation,  proceeding,  or
investigation.



                                       10

<PAGE>



              2.1.8 CONTRACTS AND ARRANGEMENTS.

              (a)  Schedule  2.1.8,  which is  organized  by type of  agreement,
contains a complete and accurate list of all  agreements of the following  types
to which  Micrion is a party or by which it is bound and which are  material  to
Micrion (the "Contracts"):

              (i) any mortgage,  note or other instrument or agreement  relating
     to the borrowing of money or the incurrence of  indebtedness  by Micrion or
     Micrion's guaranty of any obligation for the borrowing of money;

              (ii) contracts,  agreements,  purchase orders,  or  acknowledgment
     forms for the  purchase,  sale,  lease or other  disposition  of  Micrion's
     equipment,  products,  materials, or capital assets, or for the performance
     of services;

              (iii) contracts or agreements for the joint performance of work or
     services and all other joint venture agreements;

              (iv)  contracts or agreements  with agents,  brokers,  consignees,
     sales  representatives,  or distributors  relating to the sale of Micrion's
     products or services; and

              (v)  contracts  or  agreements   relating  to  the  employment  or
     compensation of any Micrion  Entity's  officers,  directors,  or employees,
     including without limitation any collective bargaining agreements.

              (b) Each of the Contracts  has been duly and validly  executed and
delivered by Micrion and is binding upon and  enforceable by and against Micrion
in  accordance  with its  terms,  except as  enforceability  may be  limited  or
affected by applicable bankruptcy, insolvency,  reorganization, or other laws of
general application  relating to or affecting the rights of creditors and except
as  enforceability  may be limited by  principles of equity  governing  specific
performance, injunctive relief, or other equitable remedies.

              2.1.9  MATERIAL  ASSETS.  Except as set forth in  Schedule  2.1.9,
Micrion has good and  marketable  title to all of its  material  properties  and
assets subject to no encumbrance, lien, charge, or other restriction (including,
without limitation,  any restriction on transfer) of any kind or character other
than (i) such  imperfections or irregularities of title,  encumbrances,  claims,
liens,  charges or other  conditions,  restrictions  or  reservations  as do not
materially  affect  the use of the  properties  or  assets  subject  thereto  or
affected  thereby or otherwise  materially  impair  business  operations at such
properties, (ii) statutory liens securing payments (including taxes) not yet due
and (iii) such imperfections or irregularities of title,  encumbrances,  claims,
liens,  charges or other  conditions,  restrictions  or  reservations  as do not
individually or in the aggregate have a Material Adverse Effect on Micrion.



                                       11

<PAGE>



              2.1.10  COMPLIANCE  WITH LAWS.  Except for those whose absence has
not had and is not reasonably likely to have,  individually or in the aggregate,
a  Material  Adverse  Effect,  Micrion  possesses  all  governmental  and  other
licenses,   certificates,   consents,   permits,  and  other  authorizations  of
Governmental  Entities  (collectively,  "Licenses") legally required to carry on
its business as now conducted.  No material  violation exists in respect of, and
no  proceeding  is pending or to  Micrion's  knowledge  threatened  to revoke or
limit, any such License.  Except as disclosed in the Micrion SEC Documents,  the
business of Micrion is not being  conducted  in  violation  of any laws,  rules,
regulations,  ordinances, codes, judgments, orders, writs, or decrees applicable
to its business  except where such violations  would not  individually or in the
aggregate have a Material Adverse Effect on Micrion.

              2.1.11 ENVIRONMENTAL MATTERS.

                   (a)  DEFINITIONS.  As used in this Agreement,  "Environmental
     Law" means any federal,  state or local statute,  regulation,  or ordinance
     pertaining  to the  protection of human health or the  environment  and any
     applicable  orders,  judgments,   decrees,  permits,   licenses,  or  other
     authorizations,   agreements  or  mandates  under  such  laws.   "Hazardous
     Substance"  means  any  hazardous,   toxic,   radioactive,   or  infectious
     substance,  material,  or waste as defined,  listed, or regulated under any
     Environmental  Law, and includes without  limitation  petroleum oil and its
     fractions.  "Contamination"  means  the  existence  (actual  or  reasonably
     suspected) in the environment of a Hazardous Substance, if the existence or
     suspected existence of such Hazardous Substance requires any investigatory,
     remedial, removal, or other response action under any Environmental Law.

                   (b) ENVIRONMENTAL COMPLIANCE. Except as set forth in Schedule
     2.1.11  and  except  where  the  contrary  would  not  individually  or the
     aggregate have a Material Adverse Effect on Micrion:

                        (1)  Micrion  possesses  all  material  Licenses  it  is
          required to carry under any  Environmental Law for its business as now
          conducted.  No  material  violation  exists  in  respect  of,  and  no
          proceeding  is  pending  or  threatened  to revoke or limit,  any such
          License. Micrion is operating its business in material compliance with
          all Environmental  Laws. No incident regarding  environmental  matters
          has  occurred in  connection  with the  business  of Micrion  that was
          required  to  be  reported  to  a   Governmental   Entity   under  any
          Environmental Law that was not so reported.

                        (2) To the  knowledge of Micrion,  (i) no real  property
          currently  or  previously  owned,  leased,  or  occupied  by  Micrion,
          including,  without limitation, soil, groundwater or surface water on,
          under  or  adjacent  to the  properties  and  buildings  thereon  (the
          "Properties") is or during Micrion's  ownership or occupation was used
          as a hazardous waste treatment,  storage,  or disposal facility within
          the meaning of Subtitle C of the  Resource  Conservation  and Recovery
          Act or any


                                       12

<PAGE>



          comparable  state   Environmental  Law;  and  (ii)  no  real  property
          currently owned,  leased,  or occupied by Micrion and no real property
          previously  owned,  leased,  or  occupied  by Micrion is listed on the
          National  Priority List or the Comprehensive  Environmental  Response,
          Compensation  and  Liability  Information  System list compiled by the
          Environmental  Protection Agency or any comparable listing compiled by
          any  state or  local  Governmental  Entity  having  jurisdiction  over
          environmental matters.

                        (3)   Micrion   has  not   received   notice   from  any
          Governmental Entity or other Person that it may be in violation of, or
          liable  under,  any  Environmental  Law and none of the  properties of
          Micrion is subject to any court order,  administrative order or decree
          arising  under  any  Environmental  Law,  nor  has  been  named  as  a
          responsible or potentially  responsible party with respect to any site
          listed  on the  lists  described  in  paragraph  (2)  above or that it
          otherwise  is   potentially   liable  for   Contamination   under  any
          Environmental Law.

                        (4) To the  knowledge  of  Micrion,  no  portion  of any
          property   currently  owned,   leased,   or  occupied  by  Micrion  is
          Contaminated and with respect to property previously owned, leased, or
          occupied  by  Micrion,  no  Contamination  occurred  during  Micrion's
          ownership, lease, or occupancy.

              2.1.12 TAX MATTERS.

                   (a) RETURNS.  Micrion has prepared in good faith and filed on
     a timely basis all federal,  state,  foreign,  and other returns,  reports,
     forms,  declarations,  and information  returns  required to be filed by it
     with  respect to Taxes (as  defined  below)  that  relate to the  business,
     results  of  operations,  financial  condition,  properties,  or  assets of
     Micrion  (collectively,  the  "Micrion  Returns")  and has paid on a timely
     basis all Taxes shown to be due on the  Micrion  Returns and all Taxes with
     respect to which no Micrion  Returns are  required  to be filed.  Except as
     detailed on Schedule 2.1.12,  Micrion is not part of an affiliated group of
     corporations  that files or has the  privilege of filing  consolidated  tax
     returns  pursuant to Section 1501 of the Code or any similar  provisions of
     state, local, or foreign law, and Micrion is not a party to any tax-sharing
     or tax-allocation  agreement. No extensions of time have been requested for
     Micrion  Returns  that have not been filed  except as set forth on Schedule
     2.1.12.  Except as set forth on Schedule  2.1.12,  (i) all Micrion  Returns
     with  respect to periods  ending on or before  the  Closing  Date have been
     examined by the Internal Revenue Service or the appropriate state, local or
     foreign  taxing  authority  or the  period for  assessment  of the Taxes in
     respect  of which  such  Micrion  Returns  were  required  to be filed  has
     expired,  (ii)  no  issue  raised  by  any  relevant  taxing  authority  in
     connection with an audit or examination of any such Micrion Returns remains
     unresolved,  and (iii) no waivers of statutes of limitations  are in effect
     with respect to any Taxes of any Micrion Entity.  All Micrion Returns filed
     are complete and  accurate in all material  respects.  Micrion has provided
     FEI with complete and accurate copies of Micrion


                                       13

<PAGE>



     Returns for each of Micrion's  fiscal years 1992 through 1997 and the Forms
     1139 related to any loss or credit or carryback claim for those years.

                   (b) TAXES PAID OR RESERVED.  The reserves for taxes reflected
     in the current  balance sheet most recently  filed as part of a Micrion SEC
     Document are adequate for payment of Taxes in respect of periods  ending on
     or before the Closing Date. All reserves for Taxes have been  determined in
     accordance with GAAP consistently  applied  throughout the periods involved
     and prior  periods.  All Taxes that Micrion has been required to collect or
     withhold have been collected or withheld and, to the extent required,  have
     been paid to the proper taxing  authority except where the failure to do so
     has not had and is not reasonably likely to have a Material Adverse Effect.
     Micrion has not elected to be treated as a consenting  corporation pursuant
     to Section 341(f) of the Code.

                   (c) LOSS CARRYFORWARDS;  INVESTMENT TAX CREDIT CARRYFORWARDS.
     Schedule 2.1.12 contains a complete and accurate list of net operating loss
     carryforwards and investment tax credit carryforwards  available to Micrion
     for federal income tax purposes that  originated in taxable years set forth
     in Schedule 2.1.12.

                   (d)  GOLDEN  PARACHUTE  PAYMENTS.  Except  as  set  forth  on
     Schedule  2.1.12(d),  Micrion  will not be  obligated  as a  result  of the
     transactions contemplated by this Agreement to make a payment that would be
     a "parachute  payment" to a  "disqualified  individual," as those terms are
     defined in Section 280G of the Code, without regard to whether such payment
     is  reasonable  compensation  for  personal  services  performed  or  to be
     performed in the future.

                   (e) FIRPTA. Micrion is not, nor was it at any time during the
     five-year period ending on the Closing Date, a "United States real property
     holding corporation" within the meaning of Section 897(c) of the Code.

                   (f) DEFINITION.  As used in this Agreement,  the term "Taxes"
     means all federal,  state, local, or foreign taxes, charges,  fees, levies,
     or other assessments,  including without  limitation all net income,  gross
     income,  gross  receipts,   premium,  sales,  use,  ad  valorem,  transfer,
     franchise,  profits, license,  withholding,  payroll,  employment,  excise,
     production, value added, estimated severance, stamp, occupation,  property,
     or other  taxes,  fees,  assessments,  or charges  of any kind  whatsoever,
     together  with any  interest and any  penalties  (including  penalties  for
     failure  to  file  in  accordance  with  applicable  information  reporting
     requirements), and additions to tax.

              2.1.13 EMPLOYEES AND LABOR RELATIONS MATTERS.  Except as set forth
on Schedule 2.1.13 or as provided in this Agreement:

                   (a) Micrion has  complied in all material  respects  with all
     applicable labor and employment laws, including provisions thereof relating
     to wages, hours, equal


                                       14

<PAGE>



     opportunity,  collective bargaining, and the payment of social security and
     other  taxes,  except  where the  failure  to comply has not had and is not
     reasonably likely to have a Material Adverse Effect on Micrion;

                   (b)  There is no unfair  labor  practice  charge,  complaint,
     representation petition,  grievance or other action against Micrion pending
     or to Micrion's  knowledge  threatened  before the National Labor Relations
     Board or any other  Governmental  Entity and  Micrion is not subject to any
     order to bargain by the National Labor Relations Board;

                   (c) There is no labor  strike,  request  for  representation,
     slowdown,  or work stoppage actually  occurring,  pending,  or to Micrion's
     knowledge threatened against Micrion;

                   (d) To Micrion's  knowledge no employee of Micrion is subject
     to  any   noncompetition,   nondisclosure,   confidentiality,   employment,
     consulting,  or similar agreements with Persons other than Micrion relating
     to the present business activities of Micrion; and

                   (e)  Attached as Schedule  2.1.13(e)  hereto is a list of all
     employee positions at Micrion that Micrion is attempting to staff.

              2.1.14  EMPLOYEE  BENEFITS.  Schedule  2.1.14  lists all  pension,
retirement, profit sharing, deferred compensation, bonus, commission, incentive,
stock option, life insurance, health and disability insurance,  hospitalization,
change  of  control  and  all  other  employee  benefit  plans  or  arrangements
established, maintained, or contributed to by Micrion (the "Micrion Compensation
and Benefit Plans").  Complete and accurate copies of each Micrion  Compensation
and Benefit Plan and each summary plan description,  insurance  contract,  trust
agreement or other agreement  relating to such Micrion  Compensation and Benefit
Plans, have been provided to FEI.

Each Micrion  Compensation  and Benefit Plan that is a "pension plan"  ("Pension
Plan"),  within the meaning of Section  3(2) of the Employee  Retirement  Income
Security  Act of 1974,  as amended  ("ERISA"),  and which is intended to qualify
under Section 401(a) of the Code, has received a favorable  determination letter
from the Internal Revenue Service  regarding its  qualification,  and Micrion is
not aware of any  circumstances  which are likely to cause any  Pension  Plan to
fail to be qualified  under Section 401(a) of the Code. The present value of all
accrued  benefits  under each Pension Plan covered by Title IV of ERISA does not
exceed by more than  $250,000  the fair market value of such Plan's  assets.  No
"reportable  event" (as such term is used in section 4043 of ERISA),  non-exempt
"prohibited  transaction"  (as  such  term is used in  section  406 of  ERISA or
section 4975 of the Code),  "nondeductible  contributions" (as such term is used
in section 4972 of the Code) or "accumulated  funding  deficiency" (as such term
is used in section 412 or 4971 of the Code) has heretofore occurred with respect
to any Micrion  Compensation  or Benefit Plan.  Neither Micrion nor a controlled
group of corporations of which Micrion is a member has any "potential withdrawal
liability," as defined in Section 4201 of ERISA. To the knowledge of


                                       15

<PAGE>



Micrion,  there  are not and  have  not  been any  excess  deferrals  or  excess
contributions under any ERISA Plan that have not been corrected.

Each  Micrion  Compensation  or  Benefit  Plan  is and  has  been  operated  and
administered  in  substantial  compliance  with the terms of such  plans and the
requirements of all applicable U.S. and non-U.S. laws. Each Micrion Compensation
or Benefit  Plan can be  terminated  by Micrion  under the terms of such Micrion
Compensation  or Benefit  Plan.  Any  termination  of, or withdrawal  from,  any
Micrion Compensation or Benefit Plan of Micrion on or prior to Closing would not
subject Micrion to any material  liability under Title IV of ERISA.  Micrion has
no material  unfunded  liabilities with respect to any Pension Plan which covers
non-U.S.  employees (a "Non-U.S.  Pension Plan"). Each Non-U.S. Pension Plan has
received all necessary  governmental  approvals or has been  registered with the
appropriate governmental agency as required by local law.

              2.1.15 ABSENCE OF CERTAIN  CHANGES OR EVENTS.  Except as disclosed
in Schedule  2.1.15 or in any Micrion SEC Documents or except as contemplated or
permitted under Section 3.1.2,  since September 30, 1998,  Micrion has conducted
its  business  only in, and has not engaged in any material  transactions  other
than according to, the ordinary and usual course of such business, and there has
not been:

                   (a) Any event,  occurrence or development which  individually
     or in the  aggregate  could  reasonably be expected to result in a Material
     Adverse Effect on Micrion;

                   (b) Any increase in the rate of terms of compensation payable
     or to  become  payable  by  Micrion  to  its  directors,  officers,  or key
     employees;  any  increase  in the rate or terms  of any  bonus,  insurance,
     pension,  or other employee benefit plan,  payment, or arrangement made to,
     for or with any such  directors,  officers,  or key employees;  any special
     bonus or remuneration paid; or any written employment  contract executed or
     amended;

                   (c) Any amendment to Micrion's  Articles of  Organization  or
     Bylaws or any entry into any material agreement, commitment, or transaction
     (including,  without  limitation,  any  borrowing,  capital  expenditure or
     capital  financing or any  amendment,  modification,  or termination of any
     existing  agreement,   commitment,   or  transaction)  by  Micrion,  except
     agreements, commitments, or transactions in the ordinary course of business
     and  consistent  with past practices or as expressly  contemplated  in this
     Agreement;

                   (d) Any direct or indirect  declaration,  setting  aside,  or
     payment of any  dividend or other  distribution  (whether  in cash,  stock,
     property,  or any  combination  thereof) in respect of the common  stock of
     Micrion,  or any  direct  or  indirect  repurchase,  redemption,  or  other
     acquisition by Micrion of any shares of its stock, or any change by Micrion
     in its accounting principles, practices or methods;



                                       16

<PAGE>



                   (e) Any issuance or sale of any stock of Micrion  (other than
     issuances  pursuant to the exercise of warrants or options  outstanding  on
     September 30, 1998) or any issuance or granting of any option,  warrant, or
     right to purchase any stock of Micrion  (other than options  granted  under
     the Micrion Stock Plans) or any commitment to do any of the foregoing;

                   (f) Any material purchase or other acquisition of property by
     Micrion,  any material  sale,  lease,  or other  disposition of property by
     Micrion,  or any material  expenditure  by Micrion,  except in the ordinary
     course of business;

                   (g) Any incurrence of any noncontract liability which, either
     singly  or in the  aggregate  is  material  to  the  business,  results  of
     operations or financial condition of Micrion; or

                   (h) Any encumbrance or consent to encumbrance of any material
     property or assets of Micrion except in the ordinary course of business and
     except for the types of encumbrances listed in Section 2.1.9.

              2.1.16   UNDISCLOSED   LIABILITIES.   Except  for  liabilities  or
obligations  described  in the Micrion SEC  Documents,  Schedule  2.1.16,  or in
another  Schedule to this Agreement,  neither Micrion nor any of its property is
subject to any material liability or obligation, whether absolute or contingent,
that has not been included in the financial  statements contained in the Micrion
SEC  Documents or  adequately  reserved for in a financial  statement of Micrion
that has been provided to FEI.

              2.1.17  INSURANCE.   All  material  fire  and  casualty,   general
liability,  business interruption,  public liability,  workers' compensation and
directors'  and  officers'  liability  insurance  policies  are  with  reputable
insurance  carriers,  provide  full and  adequate  coverage for all normal risks
incident to the business of Micrion and its  properties  and assets,  and are in
character and amount at least equivalent to that carried by companies engaged in
similar businesses, except for any failures to maintain insurance policies that,
individually or in the aggregate,  are not reasonably  likely to have a Material
Adverse Effect. Copies of all such policies have been provided to FEI.

              2.1.18 INTELLECTUAL PROPERTY.

                   (a)   The   term   "Intellectual   Property   Assets"   means
     collectively:

                        (i) all registered and unregistered trademarks,  service
          marks, and applications (collectively, "Marks");

                        (ii) all patents and patent applications  (collectively,
          "Patents");



                                       17

<PAGE>



                        (iii)  all  copyrights  in  both  published   works  and
          unpublished   works  that  are   material  to   Micrion's   businesses
          (collectively, "Copyrights"); and

                        (iv)  all  trade  secrets  used  in the  conduct  of the
          businesses of Micrion.

                   (b) Except as set forth on Schedule  2.1.18,  Micrion owns or
     has a valid license to use and to bring actions for the misappropriation of
     all of the Intellectual Property Assets used in the conduct of its business
     without any conflict with or infringement of the rights of others, free and
     clear of all liens,  charges,  encumbrances,  or other  restrictions of any
     kind.

                   (c) Schedule 2.1.18  contains a list and summary  description
     of all Marks, Patents and Copyrights.

                   (d)  Schedule  2.1.18  contains  a  list  of  all  agreements
     relating  to the  Intellectual  Property  Assets used in the conduct of its
     business to which Micrion is a party.

                   (e) To Micrion's  knowledge,  there is no  unauthorized  use,
     infringement  or  misappropriation  of  any  of  the  Micrion  Intellectual
     Property  Assets by any  third  party,  including  any  employee  or former
     employee  of Micrion  except for  potential  disputes  between  the parties
     hereto, as to which no representation is made.

                   (f)  Except  as set  forth on  Schedule  2.1.18,  there is no
     action, suit, proceeding,  judgment, order, or writ pending or to Micrion's
     knowledge,  threatened against Micrion contesting the validity,  ownership,
     or right to use,  sell,  license,  dispose of, or to bring  actions for the
     misappropriation of the Intellectual Property Assets used in the conduct of
     its business,  except for potential disputes between the parties hereto, as
     to which no representation is made.

              2.1.19 GUARANTIES;  POWERS OF ATTORNEY. Micrion is not a guarantor
or otherwise liable for any material  obligation  (including  without limitation
any  indebtedness)  of any other Person.  To Micrion's  knowledge,  there are no
outstanding powers of attorney executed on behalf of Micrion.

              2.1.20 BROKERS. No broker,  investment banker,  financial advisor,
or other  Person,  other than  Warburg  Dillon  Read LLC  ("WDR"),  the fees and
expenses  of  which  will be paid  by  Micrion,  is  entitled  to any  broker's,
finder's,  financial advisor's, or other similar fee or commission in connection
with the  transactions  contemplated by this Agreement  based upon  arrangements
made by or on behalf of  Micrion.  Micrion  has  provided  FEI true and  correct
copies of all agreements between Micrion and WDR.



                                       18

<PAGE>



              2.1.21  OPINION OF  FINANCIAL  ADVISOR.  Micrion has  received the
written  opinion  of  WDR,  dated  December  1,  1998  to the  effect  that  the
consideration to be received in the Merger by Micrion's  stockholders is fair to
such  stockholders  from a financial  point of view.  An  executed  copy of such
opinion has been delivered to FEI.  Micrion has been authorized by WDR,  subject
to  prior  review  and  consent  by WDR  (such  consent  not to be  unreasonably
withheld),  to include such fairness  opinion and reference  thereto in the Form
S-4 and the Proxy Statement.

              2.1.22  VOTE  REQUIRED.  The  affirmative  vote of the  holders of
two-thirds of the  outstanding  shares of Micrion  Common Stock entitled to vote
thereon  is the only  vote of any class or series  of  Micrion's  capital  stock
necessary to approve the Merger.  The Micrion Board at a meeting duly called and
held has (i) approved  this  Agreement,  (ii)  unanimously  determined  that the
Merger is fair to and in the best  interests  of the  holders of Micrion  Common
Stock, (iii) resolved to recommend this Agreement and the Merger to such holders
for approval  and (iv)  directed  that this  Agreement be submitted to Micrion's
stockholders.  Micrion  hereby  agrees to the  inclusion in the Form S-4 and the
Proxy  Statement of the  recommendations  of the Micrion Board described in this
Section.

              2.1.23 RIGHTS AGREEMENT.  Micrion has provided FEI with a complete
and correct copy of the Rights Agreement,  including all amendments and exhibits
thereto.  The amendment to the Rights  Agreement  attached to this  Agreement as
Exhibit  B has been  duly  authorized  by the  Micrion  Board  and has been duly
executed  and  adopted  by  Micrion,  and  accordingly,  the  execution  of this
Agreement and any other related  agreements  between Micrion and FEI, the Merger
and the other  transactions  contemplated  by this  Agreement will not cause the
Rights to  become  exercisable  or  result in either  FEI or Sub or any of their
Affiliates,  alone or together, being considered to be an "Acquiring Person" (as
defined in the Rights  Agreement) or the occurrence of a "Distribution  Date," a
"Section  13 Event" or a  "Triggering  Event" (as such terms are  defined in the
Rights Agreement).

              2.1.24 STATE TAKEOVER STATUTES AND OTHER TAKEOVER PROVISIONS.  The
provisions   of   Chapter   110C   and   Chapter   110D  of  the   Massachusetts
Corporation-Related  Laws and any other  Massachusetts state takeover statute or
similar  statute or regulation  do not apply to prevent or impose  conditions on
the  Merger,  this  Agreement,   the  Stock  Option  Agreement  or  any  of  the
transactions contemplated by this Agreement.

              2.1.25 DEFERRED COMPENSATION OBLIGATIONS.  Micrion has no deferred
compensation obligations, whether vested or unvested.

              2.1.26 PRODUCT WARRANTIES AND LIABILITIES.

                   (a) Except as set forth on Schedule 2.1.26,  (i) there are no
     material warranties,  express or implied,  written or oral, with respect to
     the products of Micrion  ("Micrion  Products"),  (ii) as of the date hereof
     there are no pending or threatened material claims with respect to any such
     warranty, (iii) there are no statements, citations or


                                       19

<PAGE>



     decisions  by  any  Governmental  Entity  declaring  any  Micrion  Products
     defective  or  unsafe,  (iv)  there  are no  material  pending,  or, to the
     knowledge of Micrion as of the date hereof,  threatened,  product liability
     claims  against or  involving  Micrion or any  Micrion  Product and no such
     claims have been settled or adjudicated since December 31, 1995, and (v) to
     Micrion's  knowledge,  Micrion is in  compliance  with all of its  purchase
     contracts  with  customers  with  respect  to Micrion  Products  and is not
     reasonably  likely to incur any  material  penalties  or other such form of
     purchase  price  adjustment  for  late  delivery  or  failure  to  build to
     specification any Micrion Product.

                   (b)  Micrion  has  provided  FEI with a complete  list of all
     Micrion Products for which there is a remaining  purchase price balance due
     and with  respect to which a customer of Micrion  has made a  complaint  or
     assertion  that  has  directly  or  indirectly  been  the  basis  for  such
     customer's refusal to grant on-site acceptance of such Micrion Product.

                   (c) In  connection  with the sale of its  first  300 mm wafer
     technology  workstation,  as of the  date of this  agreement,  no  facts or
     circumstances  exist  that are  reasonably  likely to cause  Micrion  to be
     subject to penalties or other purchase  price  adjustments in excess of 10%
     of the purchase price thereof.

              2.1.27 INVENTORIES. Micrion's inventories, whether finished goods,
work in process or raw  materials,  shown on the balance sheet  contained in the
most recent  Micrion  SEC  Document or  thereafter  acquired  are all items of a
quality  usable  or  saleable  in the  ordinary  and usual  course of  Micrion's
business, except for inventory items that are obsolete or not usable or saleable
in the ordinary  course of business and that have been written down to an amount
not in excess of  realizable  market  value or for which  adequate  reserves  or
allowances  have been  provided.  The values at which  inventories  are  carried
reflect an inventory  valuation  policy  consistent with Micrion's past practice
and in accordance with GAAP consistently applied.

              2.1.28 RECEIVABLES.  Each of the receivables of Micrion (including
accounts  receivable,  loans  receivable  and advances) that is reflected in the
balance sheet contained in the most recent Micrion SEC Document, and each of the
receivables  that has arisen  since the date of such balance  sheet,  has arisen
only from bona fide  transactions in the ordinary  course of Micrion's  business
and  Micrion's  reserves  for  doubtful  accounts  receivable  are  adequate  in
accordance  with  GAAP.   Schedule  2.1.28  contains  a  statement  of  accounts
receivable balance as of September 26, 1998, reconciled to such balance sheet.

              2.1.29 YEAR 2000  COMPLIANCE.  Micrion has a Year 2000  program in
place which is  adequate  to cause all  computer  software  and data  processing
devices (i) used in or for the manufacturing of the Micrion Products by Micrion,
or (ii) used in or by any Micrion Products,  including any Micrion Products sold
and/or installed prior to the date hereof,  to become Year 2000 compliant during
1999  except to the extent  that the  failure to do so,  individually  or in the
aggregate,  would not have a Material  Adverse  Effect on  Micrion,  and Micrion
reasonably  believes that the material costs  associated  with such program that
are included in Micrion's fiscal 1999


                                       20

<PAGE>



budget are adequate and that the rate of  expenditures  after June 30, 1999 will
not  increase  materially.  "Year  2000  compliant"  means  that the  product or
software  accurately  processes and stores  date/time data  (including,  but not
limited  to,  calculating,   comparing,  displaying,  recording  and  sequencing
operations  involving  date/time  data)  during,  from and into and  between the
twentieth and  twenty-first  centuries,  and the years 1999 and 2000,  including
correct processing of leap year data.

              2.1.30  INDEBTEDNESS.  Micrion's  Indebtedness  does not exceed an
aggregate of $18,518,000,  consisting of the following amounts: $7,333,000 under
a term loan from Fleet Bank, $10,000,000 under its Fleet Bank line of credit and
$1,185,000   payable  under  currently   existing  capital  lease   obligations.
"Indebtedness"  means all  indebtedness for borrowed money,  including,  without
limitation,  the long term and current  portions of amounts  outstanding as term
debt or under a line of credit and capital lease obligations.

              2.1.31 NO OTHER  REPRESENTATIONS  OR  WARRANTIES.  Except  for the
representations  and  warranties  contained in this Article 2, Micrion  makes no
other express or implied representation or warranty to FEI or Sub.

         2.2 FEI'S  REPRESENTATIONS AND WARRANTIES.  FEI represents and warrants
to Micrion as follows:

              2.2.1  CORPORATE  EXISTENCE  AND  AUTHORITY.  FEI is a corporation
legally  existing  under the laws of the State of Oregon and is in good standing
as a foreign corporation in each jurisdiction where the properties owned, leased
or operated, or the business conducted, by it require such qualification, except
for such  failures  to qualify  or be in such good  standing  which,  when taken
together  with all  other  such  failures,  is not  reasonably  likely to have a
Material  Adverse Effect on FEI. FEI has the full corporate  power and authority
to enter into this Agreement and carry out its terms. Except for the approval of
its  stockholders,  FEI has taken all  corporate  action  necessary  to execute,
deliver and perform this  Agreement.  This  Agreement  has been duly and validly
executed and delivered by FEI and is binding upon and enforceable against FEI in
accordance with its terms,  except as enforceability  may be limited or affected
by applicable bankruptcy,  insolvency,  reorganization, or other laws of general
application  relating  to or  affecting  the rights of  creditors  and except as
enforceability  may be  limited  by  principles  of  equity  governing  specific
performance, injunctive relief, or other equitable remedies.

              2.2.2 NO  ADVERSE  CONSEQUENCES.  Except as set forth on  Schedule
2.2.2,  neither the  execution  and  delivery of this  Agreement  by FEI nor the
consummation of the transactions contemplated by this Agreement will:

                   (a) violate or conflict with any provision of FEI's  articles
     of incorporation or bylaws;



                                       21

<PAGE>



                   (b) violate any law,  judgment,  order,  injunction,  decree,
     rule,  regulation,  or ruling of any Governmental Entity applicable to FEI,
     except such as is not  reasonably  likely to have,  individually  or in the
     aggregate, a Material Adverse Effect on FEI;

                   (c) either  alone or with the giving of notice or the passage
     of time or both,  conflict  with,  constitute  grounds for  termination  or
     acceleration  of,  result  in the  breach  of  the  terms,  conditions,  or
     provisions  of,  result  in the  loss  of any  benefit  to  FEI  under,  or
     constitute a default under any agreement, instrument, license, or permit to
     which  FEI is a  party  or by  which  it is  bound,  except  such as is not
     reasonably  likely to have,  individually  or in the aggregate,  a Material
     Adverse Effect on FEI; or

                   (d) except (i) for  applicable  requirements,  if any, of the
     Exchange Act, the Securities Act and Blue Sky Laws, (ii) the HSR Act, (iii)
     for the filing of Articles of Merger pursuant to the OBCA and the MBCL, and
     (iv) with  respect to matters  set forth in  Schedule  2.2.2,  require  any
     consent, approval or authorization of, permit from, or declaration,  filing
     or  registration  with, any  governmental or regulatory  authority,  or any
     other  person or entity by FEI,  except  where the  failure to obtain  such
     consent,  approval,  authorization,  permit or  declaration or to make such
     filing or registration is not reasonably likely to have, individually or in
     the aggregate, a Material Adverse Effect on FEI.

              2.2.3 CAPITALIZATION.  FEI has authorized capital stock consisting
of  30,000,000  shares of FEI Common  Stock,  of which  18,160,808  shares  were
outstanding on November 25, 1998 and 500,000 shares of preferred stock,  none of
which is outstanding.  Options to purchase 1,493,188 shares of Common Stock were
outstanding  on October  31, 1998 under  grants made  pursuant to the 1984 Stock
Incentive  Plan, the 1995 Stock Incentive Plan and the 1995  Supplemental  Stock
Incentive Plan (the "FEI Stock Plans") and options to purchase  36,100 shares of
Common Stock have been granted since October 31, 1998. Schedule 2.2.3 sets forth
a complete list of all options  outstanding  and the exercise  prices and strike
prices thereof.  All of the outstanding shares of capital stock of FEI have been
duly authorized and are validly  issued,  fully paid and  nonassessable,  and no
shares  were  issued  in  violation  of  preemptive  or  similar  rights  of any
stockholder or in violation of any  applicable  securities  laws.  Except as set
forth above,  there are no shares of capital stock of FEI authorized,  issued or
outstanding  and,  except for options  granted  pursuant to the FEI Stock Plans,
there  are no  preemptive  rights  or any  outstanding  subscriptions,  options,
warrants,  rights,  convertible securities or other agreements or commitments of
FEI of any character  relating to the issued or unissued  capital stock or other
securities   of  FEI  other  than   rights  of  Philips   Business   Electronics
International B.V. ("Philips") to maintain its percentage interest in the issued
and  outstanding  shares of FEI as provided in the  Combination  Agreement dated
November 15, 1996, as amended (the "Philips Additional Shares Right"). There are
no outstanding  obligations of FEI to repurchase,  redeem,  or otherwise acquire
any of the FEI Shares.

              2.2.4  SUBSIDIARIES  AND JOINT  VENTURES.  Except as  disclosed on
Schedule 2.2.4,  FEI has no subsidiaries  and owns no stock or other interest in
any other corporation or in any


                                       22

<PAGE>



partnership  or  limited  liability  company or other  venture  or entity.  Each
subsidiary of FEI is duly organized, validly existing and in good standing under
the laws of its  jurisdiction of  incorporation  or formation,  except where the
failure to do so would not have a Material Adverse Effect on FEI.

              2.2.5 SEC REPORTS AND FINANCIAL STATEMENTS. FEI has filed with the
SEC, and has made  available to Micrion true and complete  copies of, all forms,
reports,  schedules,  statements and other documents  required to be filed by it
since  December 31, 1996 under the Exchange Act or the  Securities  Act (each of
such forms, reports,  schedules,  statements, and other documents, to the extent
filed  and  publicly  available  before  the  date of this  Agreement  or  filed
subsequent to the date hereof, other than preliminary filings, is referred to as
a "FEI SEC Document"). Each FEI SEC Document, at the time filed complied and, in
the case of future  filings,  will  comply  in all  material  respects  with the
applicable  requirements  of the Exchange Act or the Securities Act, as the case
may be, and the  applicable  rules and  regulations of the SEC  thereunder.  The
consolidated  financial  statements  of FEI  included  in the FEI SEC  Documents
comply  and,  in the  case of  future  filings,  will  comply  as to form in all
material respects with applicable accounting requirements and with the published
rules and  regulations  of the SEC with respect  thereto,  have been and, in the
case of future  filings,  will be prepared in accordance  with GAAP applied on a
consistent  basis during the periods involved (except as may be indicated in the
notes thereto or, in the case of the unaudited statements,  as permitted by Form
10-Q of the SEC)  and  fairly  present  (subject,  in the case of the  unaudited
statements,  to normal,  recurring year end audit  adjustments) the consolidated
financial  position of FEI and its  subsidiaries as at the dates thereof and the
consolidated  results of their  operations  and cash flows for the periods  then
ended.

              2.2.6 INFORMATION SUPPLIED. None of the information supplied or to
be supplied by or on behalf of FEI  specifically  for inclusion or incorporation
by  reference  in the  Form  S-4 or the  Proxy  Statement  contains  any  untrue
statement of a material  fact or omits to state any material fact required to be
stated therein or necessary in order to make the statements therein, in light of
the  circumstances  under which they are made,  not  misleading,  except that no
representation  or warranty is made by FEI with  respect to  statements  made or
incorporated  by reference  therein based on information  supplied by Micrion in
writing  specifically for inclusion or incorporation by reference  therein.  The
Proxy  Statement  will  comply  as to form in all  material  respects  with  the
requirements of the Exchange Act and the rules and regulations thereunder.

              2.2.7 LEGAL  PROCEEDINGS.  Except as disclosed in Schedule  2.2.7,
there is neither pending nor, to the knowledge of FEI,  threatened by or against
FEI any legal action,  claim,  arbitration,  investigation,  or proceeding  that
could (i) have a Material  Adverse Effect on FEI following the Closing;  or (ii)
enjoin, delay or restrict the right or ability of FEI to perform its obligations
under this  Agreement  and, to the  knowledge of FEI,  there is no basis for any
such claim, litigation, proceeding, or investigation.

              2.2.8  CONTRACTS  AND   ARRANGEMENTS.   Each  material   contract,
instrument,  agreement,  or obligation to which FEI is a party or by which it is
bound or which  affects  its  assets or its  rights  has been  duly and  validly
executed and delivered by FEI and is binding upon and


                                       23

<PAGE>



enforceable  by  and  against  FEI in  accordance  with  its  terms,  except  as
enforceability may be limited or affected by applicable bankruptcy,  insolvency,
reorganization,  or other laws of general  application  relating to or affecting
the  rights  of  creditors  and  except  as  enforceability  may be  limited  by
principles of equity governing specific performance, injunctive relief, or other
equitable remedies.  Each material contract of FEI required to be filed with the
FEI SEC Documents has been so filed.

              2.2.9 MATERIAL ASSETS.  Except as set forth on Schedule 2.2.9, FEI
has good and  marketable  title to all of its  material  properties  and  assets
subject  to no  encumbrance,  lien,  charge,  or other  restriction  (including,
without limitation,  any restriction on transfer) of any kind or character other
than (i) such  imperfections or irregularities of title,  encumbrances,  claims,
liens,  charges or other  conditions,  restrictions  or  reservations  as do not
materially  affect  the use of the  properties  or  assets  subject  thereto  or
affected  thereby or otherwise  materially  impair  business  operations at such
properties, (ii) statutory liens securing payments (including taxes) not yet due
and (iii) such imperfections or irregularities of title,  encumbrances,  claims,
liens,  charges or other  conditions,  restrictions  or  reservations  as do not
individually or in the aggregate have a Material Adverse Effect on FEI.

              2.2.10  COMPLIANCE  WITH LAWS.  Except for those whose absence has
not had and is not reasonably likely to have,  individually or in the aggregate,
a Material Adverse Effect,  FEI possesses all Licenses legally required to carry
on its business as now conducted.  No material  violation  exists in respect of,
and no  proceeding  is pending  or to FEI's  knowledge  threatened  to revoke or
limit,  any such  License.  Except as  disclosed in the FEI SEC  Documents,  the
business  of FEI  is not  being  conducted  in  violation  of any  laws,  rules,
regulations,  ordinances, codes, judgments, orders, writs, or decrees applicable
to its business  except where such violations  would not  individually or in the
aggregate have a Material Adverse Effect on FEI.

              2.2.11 ENVIRONMENTAL  COMPLIANCE.  Except as set forth in Schedule
2.2.11 and except where the contrary  would not  individually  or the  aggregate
have a Material Adverse Effect on FEI:

                   (a) FEI  possesses  all  material  Licenses it is required to
     carry under any  Environmental  Law for its business as now  conducted.  No
     material  violation  exists in respect of, and no  proceeding is pending or
     threatened  to revoke or limit,  any such  License.  FEI is  operating  its
     business in material  compliance with all  Environmental  Laws. No incident
     regarding  environmental  matters  has  occurred  in  connection  with  the
     business of FEI that was required to be reported to a  Governmental  Entity
     under any Environmental Law that was not so reported.

                   (b) To the knowledge of FEI, (i) no real  property  currently
     or  previously  owned,  leased,  or  occupied  by FEI,  including,  without
     limitation, soil, groundwater or surface water on, under or adjacent to the
     properties and buildings  thereon (the "FEI Properties") is or during FEI's
     ownership or occupation was used as a hazardous waste


                                       24

<PAGE>



     treatment,  storage,  or disposal facility within the meaning of Subtitle C
     of the  Resource  Conservation  and Recovery  Act or any  comparable  state
     Environmental  Law; and (ii) no real property  currently owned,  leased, or
     occupied by FEI and no real property previously owned,  leased, or occupied
     by FEI is  listed  on  the  National  Priority  List  or the  Comprehensive
     Environmental Response,  Compensation and Liability Information System list
     compiled by the Environmental  Protection Agency or any comparable  listing
     compiled by any state or local Governmental Entity having jurisdiction over
     environmental matters.

                   (c) FEI has not received notice from any Governmental  Entity
     or other  Person  that it may be in  violation  of,  or liable  under,  any
     Environmental Law and none of the properties of FEI is subject to any court
     order,  administrative order or decree arising under any Environmental Law,
     nor has been named as a responsible or potentially  responsible  party with
     respect to any site listed on the lists described in paragraph (b) above or
     that it  otherwise  is  potentially  liable  for  Contamination  under  any
     Environmental Law.

                   (d) To the  knowledge  of FEI,  no  portion  of any  property
     currently  owned,  leased,  or  occupied  by FEI is  Contaminated  and with
     respect to  property  previously  owned,  leased,  or  occupied  by FEI, no
     Contamination occurred during FEI's ownership, lease, or occupancy.

              2.2.12 TAX MATTERS.

                   (a)  RETURNS.  FEI has  prepared in good faith and filed on a
timely basis all federal,  state,  foreign, and other returns,  reports,  forms,
declarations, and information returns required to be filed by it with respect to
Taxes that relate to the business,  results of operations,  financial condition,
properties, or assets of FEI (collectively, the "FEI Returns") and has paid on a
timely  basis all Taxes  shown to be due on the FEI  Returns  and all Taxes with
respect to which no FEI Returns are required to be filed.  Except as detailed on
Schedule  2.2.12,  FEI is not part of an affiliated  group of corporations  that
files or has the  privilege  of filing  consolidated  tax  returns  pursuant  to
Section 1501 of the Code or any similar  provisions of state,  local, or foreign
law, and FEI is not a party to any tax-sharing or tax-allocation  agreement.  No
extensions of time have been  requested for FEI Returns that have not been filed
except as set forth on Schedule 2.2.12.  Except as set forth on Schedule 2.2.12,
(i) all FEI Returns with respect to periods ending on or before the Closing Date
have been examined by the Internal  Revenue  Service or the  appropriate  state,
local or foreign  taxing  authority or the period for assessment of the Taxes in
respect of which such FEI Returns were required to be filed has expired, (ii) no
issue raised by any relevant  taxing  authority in  connection  with an audit or
examination of any such FEI Returns remains unresolved,  and (iii) no waivers of
statutes  of  limitations  are in effect  with  respect  to any Taxes of any FEI
Entity.  All FEI  Returns  filed  are  complete  and  accurate  in all  material
respects.  FEI has  provided  Micrion with  complete and accurate  copies of FEI
Federal Returns for FEI's fiscal years 1995 through 1997.



                                       25

<PAGE>



                   (b) TAXES PAID OR RESERVED.  The reserves for taxes reflected
in the current  balance sheet most recently  filed as part of a FEI SEC Document
are adequate for payment of Taxes in respect of periods  ending on or before the
Closing Date.  All reserves for Taxes have been  determined  in accordance  with
GAAP consistently applied throughout the periods involved and prior periods. All
Taxes that FEI has been required to collect or withhold  have been  collected or
withheld  and,  to the  extent  required,  have been paid to the  proper  taxing
authority  except  where the failure to do so has not had and is not  reasonably
likely to have a  Material  Adverse  Effect on FEI.  FEI has not  elected  to be
treated as a consenting corporation pursuant to Section 341(f) of the Code.

              2.2.13 EMPLOYEES AND LABOR RELATIONS MATTERS.  Except as set forth
on Schedule 2.2.13 or as provided in this Agreement:

                   (a)  FEI has  complied  in all  material  respects  with  all
     applicable labor and employment laws, including provisions thereof relating
     to wages, hours, equal opportunity,  collective bargaining, and the payment
     of social security and other taxes,  except where the failure to comply has
     not had and is not reasonably  likely to have a Material  Adverse Effect on
     FEI;

                   (b)  There is no unfair  labor  practice  charge,  complaint,
     representation  petition,  grievance or other action against FEI pending or
     to FEI's knowledge  threatened before the National Labor Relations Board or
     any  other  Governmental  Entity  and FEI is not  subject  to any  order to
     bargain by the National Labor Relations Board;

                   (c) There is no labor  strike,  request  for  representation,
     slowdown,  or  work  stoppage  actually  occurring,  pending,  or to  FEI's
     knowledge threatened against FEI; and

                   (e) To FEI's  knowledge  no employee of FEI is subject to any
     noncompetition,  nondisclosure, confidentiality, employment, consulting, or
     similar  agreements  with  Persons  other than FEI  relating to the present
     business activities of FEI.

              2.2.14  EMPLOYEE  BENEFITS.  Schedule  2.2.14  lists all  pension,
retirement, profit sharing, deferred compensation, bonus, commission, incentive,
stock option, life insurance, health and disability insurance,  hospitalization,
change  of  control  and  all  other  employee  benefit  plans  or  arrangements
established,  maintained,  or contributed to by FEI (the "FEI  Compensation  and
Benefit  Plans").  Complete and  accurate  copies of each FEI  Compensation  and
Benefit  Plan and each  summary  plan  description,  insurance  contract,  trust
agreement  or other  agreement  relating  to such FEI  Compensation  and Benefit
Plans, have been provided to Micrion.

No  "reportable  event"  (as  such  term  is  used in  section  4043 of  ERISA),
"prohibited  transaction"  (as  such  term is used in  section  406 of  ERISA or
section 4975 of the Code),  "nondeductible  contributions" (as such term is used
in section 4972 of the Code) or "accumulated  funding  deficiency" (as such term
is used in section 412 or 4971 of the Code) has heretofore occurred with


                                       26

<PAGE>



respect  to any FEI  Compensation  or  Benefit  Plan.  FEI  does  not  have  any
"potential  withdrawal  liability," as defined in Section 4201 of ERISA.  To the
knowledge of FEI, there are not and have not been any excess deferrals or excess
contributions under any ERISA Plan that have not been corrected.

Each FEI  Compensation or Benefit Plan is and has been operated and administered
in all material  respects in conformance  with the requirements of such plan and
applicable  U.S. and foreign  laws,  except where such failure  would not have a
Material  Adverse  Effect on FEI. Each FEI  Compensation  or Benefit Plan can be
terminated by FEI. Any termination of, or withdrawal  from, any FEI Compensation
or Benefit  Plan on or prior to Closing  would not subject  FEI to any  material
liability under Title IV of ERISA.

              2.2.15 ABSENCE OF CERTAIN  CHANGES OR EVENTS.  Except as disclosed
in Schedule 2.2.15 or in any FEI SEC Documents, since September 27, 1998 FEI has
conducted its business only in, and has not engaged in any material transactions
other than  according  to, the ordinary and usual course of such  business,  and
there has not been:

                   (a) Any event,  occurrence or development which  individually
     or in the  aggregate  could  reasonably be expected to result in a Material
     Adverse Effect on FEI;

                   (b) Any  amendment  to FEI's  Articles  of  Incorporation  or
     Bylaws or any entry into any material agreement, commitment, or transaction
     (including,  without  limitation,  any  borrowing,  capital  expenditure or
     capital  financing or any  amendment,  modification,  or termination of any
     existing agreement,  commitment, or transaction) by FEI, except agreements,
     commitments,  or  transactions  in the  ordinary  course  of  business  and
     consistent  with  past  practices  or as  expressly  contemplated  in  this
     Agreement;

                   (c) Any direct or indirect  declaration,  setting  aside,  or
     payment of any  dividend or other  distribution  (whether  in cash,  stock,
     property,  or any  combination  thereof) in respect of the common  stock of
     FEI, or any direct or indirect repurchase, redemption, or other acquisition
     by FEI of any shares of its stock,  or any change by FEI in its  accounting
     principles, practices or methods;

                   (d) Any  issuance  or sale of any  stock of FEI  (other  than
     issuances  pursuant to the exercise of warrants or options  outstanding  on
     September 27, 1998) or any issuance or granting of any option,  warrant, or
     right to purchase  any stock of FEI (other than options  granted  under the
     FEI Stock Plans and the FEI Employee Share Purchase Plan) or any commitment
     to do any of the foregoing;

                   (e) Any material purchase or other acquisition of property by
     FEI,  any sale,  lease,  or other  disposition  of  property by FEI, or any
     material expenditure by FEI, except in the ordinary course of business;



                                       27

<PAGE>



                   (f) Any incurrence of any noncontract liability which, either
     singly  or in the  aggregate  is  material  to  the  business,  results  of
     operations or financial condition of FEI; or

                   (g) Any encumbrance or consent to encumbrance of any material
     property or assets of FEI except in the  ordinary  course of  business  and
     except for the types of encumbrances listed in Section 2.2.9.

              2.2.16   UNDISCLOSED   LIABILITIES.   Except  for  liabilities  or
obligations  described in the FEI SEC Documents,  Schedule 2.2.16, or in another
Schedule to this  Agreement,  neither FEI nor any of its  property is subject to
any material liability or obligation,  whether absolute or contingent,  that has
not been included in the financial statements contained in the FEI SEC Documents
or adequately  reserved for in a FEI financial  statement that has been provided
to Micrion.

              2.2.17  INSURANCE.   All  material  fire  and  casualty,   general
liability,  business interruption,  public liability,  workers' compensation and
directors'  and  officers'  liability  insurance  policies  are  with  reputable
insurance  carriers,  provide  full and  adequate  coverage for all normal risks
incident  to the  business  of FEI and its  properties  and  assets,  and are in
character and amount at least equivalent to that carried by companies engaged in
similar businesses, except for any failures to maintain insurance policies that,
individually or in the aggregate,  are not reasonably  likely to have a Material
Adverse Effect. Copies of all such policies have been provided to Micrion.

              2.2.18 INTELLECTUAL PROPERTY.

                   (a) Except as set forth on Schedule 2.2.18, FEI owns or has a
     valid license to use and to bring actions for the  misappropriation  of all
     of the Intellectual  Property  Assets,  used in the conduct of its business
     without any conflict with or infringement of the rights of others, free and
     clear of all liens,  charges,  encumbrances,  or other  restrictions of any
     kind.

                   (b) Schedule 2.2.18  contains a list and summary  description
     of all Marks, Patents and Copyrights owned by FEI.

                   (c)  Schedule  2.2.18  contains  a  list  of  all  agreements
     relating  to the  Intellectual  Property  Assets used in the conduct of its
     business to which FEI is a party.

                   (d)  To  FEI's  knowledge,  there  is  no  unauthorized  use,
     infringement or  misappropriation  of any of the FEI Intellectual  Property
     Assets by any third party,  including  any  employee or former  employee of
     FEI, except for potential  disputes between the parties hereto, as to which
     no representation is made.



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<PAGE>



                   (e)  Except  as set  forth on  Schedule  2.2.18,  there is no
     action,  suit,  proceeding,  judgment,  order,  or writ pending or to FEI's
     knowledge,  threatened against FEI contesting the validity,  ownership,  or
     right to use,  sell,  license,  dispose  of,  or to bring  actions  for the
     misappropriation of the Intellectual Property Assets used in the conduct of
     its business,  except for potential disputes between the parties hereto, as
     to which no representation is made.

              2.2.19 GUARANTIES;  POWERS OF ATTORNEY.  FEI is not a guarantor or
otherwise liable for any material  obligation  (including without limitation any
indebtedness) of any other Person. To FEI's knowledge,  there are no outstanding
powers of attorney executed on behalf of FEI.

              2.2.20 BROKERS. No broker,  investment banker,  financial advisor,
or other Person, other than Needham & Company,  Inc.  ("Needham"),  the fees and
expenses of which will be paid by FEI, is  entitled to any  broker's,  finder's,
financial  advisor's,  or other similar fee or commission in connection with the
transactions  contemplated by this Agreement based upon  arrangements made by or
on behalf of FEI.

              2.2.21 OPINION OF FINANCIAL ADVISOR.  FEI has received the written
opinion  of  Needham,  dated  December  1, 1998 to the  effect  that the  Merger
Consideration  and Philips' purchase of the Financing Shares are fair to the FEI
shareholders (other than Philips,  with respect to the Philips financing) from a
financial  point of view. An executed copy of such opinion has been delivered to
Micrion. FEI has been authorized by Needham, subject to prior review and consent
by Needham,  to include such fairness opinion and reference  thereto in the Form
S-4 and the Proxy Statement.

              2.2.22 VOTE  REQUIRED.  The  affirmative  vote of the holders of a
majority of the outstanding  shares of FEI Common Stock entitled to vote thereon
is the only  vote of any class or series of FEI's  capital  stock  necessary  to
approve the issuance of shares in connection with the transactions  contemplated
by this Agreement and the Stock Purchase  Agreement (as defined below).  The FEI
Board at a meeting duly called and held has (i) approved  this  Agreement,  (ii)
unanimously determined that the Merger and the transactions  contemplated by the
Stock Purchase Agreement are fair to and in the best interests of the holders of
FEI Common Stock,  (iii) resolved to recommend the transactions  contemplated by
this Agreement and the Stock Purchase Agreement to such holders for approval and
(iv) directed that such proposal be submitted to FEI's stockholders.  FEI hereby
agrees  to the  inclusion  in the  Form  S-4  and  the  Proxy  Statement  of the
recommendations of the FEI Board described in this Section.

              2.2.23 YEAR 2000 COMPLIANCE.  FEI has a Year 2000 program in place
which is adequate to cause all computer software and data processing devices (i)
used in or for the  manufacturing  of the FEI products by FEI or (ii) used in or
by any FEI products,  including any FEI products sold and/or  installed prior to
the date hereof,  to become Year 2000  compliant  during 1999,  except where the
failure to comply would not have a Material Adverse Effect on FEI, and


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<PAGE>



FEI reasonably believes that all material costs associated with such program are
included in FEI's 1998 budget and in its budget forecasts for 1999.

              2.2.24  FINANCING.  Simultaneously  herewith  FEI and  Philips are
entering  into a Stock  Purchase  Agreement  (the  "Stock  Purchase  Agreement")
pursuant to which  Philips has agreed to provide  financing  to FEI for the cash
portion of the Merger Consideration,  on the terms and subject to the conditions
set forth therein.  A form of the Stock Purchase  Agreement has been provided to
Micrion prior to the date hereof.

              2.2.25 PRODUCT WARRANTIES AND LIABILITIES.

                   (a) Except as set forth on Schedule 2.2.25,  (i) there are no
     material warranties,  express or implied,  written or oral, with respect to
     the products of FEI ("FEI Products"),  (ii) as of the date hereof there are
     no pending or threatened material claims with respect to any such warranty,
     (iii) there are no statements,  citations or decisions by any  Governmental
     Entity  declaring any FEI Products  defective or unsafe,  (iv) there are no
     material  pending,  or,  to the  knowledge  of FEI as of the  date  hereof,
     threatened,  product  liability  claims against or involving FEI or any FEI
     Product and no such claims have been settled or adjudicated  since December
     31, 1995, and (v) to FEI's knowledge,  FEI is in compliance with all of its
     purchase  contracts  with customers with respect to FEI Products and is not
     reasonably  likely to incur any  material  penalties  or other such form of
     purchase  price  adjustment  for  late  delivery  or  failure  to  build to
     specification any FEI Product.

                   (b) FEI has  provided  FEI  with a  complete  list of all FEI
     Products for which there is a remaining purchase price balance due and with
     respect to which a customer of FEI has made a complaint or  assertion  that
     has directly or indirectly  been the basis for such  customer's  refusal to
     grant on-site acceptance of such FEI Product.

              2.2.26  INVENTORIES.  FEI's  inventories,  whether finished goods,
work in process or raw  materials,  shown on the balance sheet  contained in the
most recent FEI SEC Document or  thereafter  acquired are all items of a quality
usable or saleable in the ordinary and usual  course of FEI's  business,  except
for inventory  items that are obsolete or not usable or saleable in the ordinary
course of business and that have been written down to an amount not in excess of
realizable  market value or for which adequate  reserves or allowances have been
provided.  The values at which  inventories  are  carried  reflect an  inventory
valuation policy consistent with FEI's past practice and in accordance with GAAP
consistently applied.

              2.2.27  RECEIVABLES.  Each of the  receivables  of FEI  (including
accounts  receivable,  loans  receivable  and advances) that is reflected in the
balance  sheet  contained in the most recent FEI SEC  Document,  and each of the
receivables  that has arisen  since the date of such balance  sheet,  has arisen
only from bona fide  transactions  in the ordinary  course of FEI's business and
FEI reserves for doubtful  accounts  receivable are adequate in accordance  with
GAAP.



                                       30

<PAGE>



              2.2.28 NO OTHER  REPRESENTATIONS  OR  WARRANTIES.  Except  for the
representations  and warranties  contained in this Article 2, FEI makes no other
express or implied representation or warranty to Micrion.

                                    ARTICLE 3

                                    COVENANTS

         3.1 CONTINUATION OF BUSINESS.

              3.1.1  JOINT  COVENANTS.  Except as set forth on  Schedule  3.1.1,
without the prior written  consent of FEI or Micrion,  as the case may be, which
shall not be unreasonably withheld or delayed, from and after the execution date
of this Agreement until Closing, Micrion and FEI will each:

                   (a) operate and maintain its business in its usual manner and
     in the ordinary  course and, to the extent  consistent  therewith,  use its
     reasonable  best efforts to preserve its business  organization  intact and
     maintain its existing  relations with customers,  suppliers,  employees and
     business associates;

                   (b) not  declare,  pay, or set aside for payment any dividend
     (whether in cash,  stock or  property)  or other  distribution  of money or
     property in respect of its capital stock; effect any split,  combination or
     similar  reclassification  of its capital stock;  or purchase or redeem any
     shares of its capital  stock,  except  pursuant to existing  agreements set
     forth on Schedule 2.2.3.

                   (c) not issue or sell any capital  stock or rights to acquire
     capital stock, except:

                   (1)  shares of Micrion  Common  Stock  issued  upon the valid
                   exercise of currently  outstanding  options under the Micrion
                   Stock Plans;

                   (2) shares of FEI Common Stock issued upon the valid exercise
                   of rights under the FEI Stock Plans;

                   (3) options to purchase shares under the FEI Stock Plans;

                   (4) shares of FEI Common Stock or Micrion Common Stock issued
                   under the FEI or Micrion Employee Stock Purchase Plan, as the
                   case may be; and


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<PAGE>



                   (5) shares of FEI Common Stock issued pursuant to the Philips
                   Additional Shares Right and the Stock Purchase Agreement;

                   (d) not acquire any assets other than assets  acquired in the
     ordinary  and  usual  course  of its  business  and  consistent  with  past
     practices;

                   (e) not amend its Articles of Organization  or  Incorporation
     or Bylaws,  except for an amendment to the FEI Articles of Incorporation to
     increase the number of authorized shares of Common Stock; and

                   (f) not authorize or enter into an agreement to do any of the
     foregoing.

              3.1.2 MICRION COVENANTS.  Without the prior written consent of FEI
and except as contemplated  hereby and as set forth on Schedule 3.1.2,  from and
after the execution date of this Agreement until Closing, Micrion agrees that:

                   (a) Micrion  will not  increase  its  aggregate  Indebtedness
     above the amount stated in Section  2.1.30 and will not encumber any of its
     material  assets or make any material  commitments  related to such assets,
     except in the ordinary and usual course of its business and consistent with
     past practices;

                   (b)  Micrion  will not make any tax  election  or permit  any
     insurance  policy naming it as a beneficiary  or a loss payable payee to be
     canceled  or  terminated,  except  in the  ordinary  and  usual  course  of
     business;

                   (c) Micrion will not make any payment to discharge or satisfy
     any lien or  encumbrance  or pay any  obligation  or  liability  (fixed  or
     contingent)  other than (i) any lien or  encumbrance  or any  obligation or
     liability set forth in the current  financial  statements  contained in the
     Micrion SEC Documents and (ii) current liabilities  incurred or maturing in
     the ordinary course of business since the date of the current balance sheet
     most  recently  filed as part of a Micrion SEC  Document or (iii)  payments
     under its line of credit facility with Fleet Bank,  N.A.  ("Fleet") made in
     accordance  with the terms of the agreements  entered into between  Micrion
     and Fleet as of September 22, 1998 and July 31, 1997;

                   (d) Micrion will not purchase or otherwise acquire,  or agree
     to purchase or  otherwise  acquire,  any debt or equity  securities  of any
     Person  other  than  equity  securities  issued  by  a  money  market  fund
     registered as an investment  company  under the  Investment  Company Act of
     1940;

                   (e)  Micrion   will  not   increase   the  wages,   salaries,
     compensation,  pension,  or other benefits  payable to any of its officers,
     employees,  or  agents,  including  any  severance  or  change  of  control
     payments, other than increases in wages and salaries


                                       32

<PAGE>



     required by employment  arrangements existing on the execution date of this
     Agreement or otherwise in the ordinary and usual course of its business;

                   (f) Micrion will not  implement or amend any employee  profit
     sharing,  stock  option,  stock  purchase,   pension,  bonus,   commission,
     incentive,  retirement,  medical  reimbursement,  life insurance,  deferred
     compensation, or any other employee benefit plan or arrangement;

                   (g) Micrion will not change its accounting methods,  policies
     or practices;

                   (h) when the consent of any third  party to the  transactions
     contemplated  by this Agreement is required under the terms of any Contract
     to which Micrion is a party Micrion will use its reasonable best efforts to
     obtain such consent on terms and conditions  not materially  less favorable
     than those in effect on the execution date of this Agreement;

                   (i) Micrion will not settle or compromise any material claims
     or  litigation  or,  except in the  ordinary  and usual course of business,
     modify,  amend or terminate any of its material contracts or waive, release
     or assign any material rights or claims; and

                   (j) As to negative  covenants  specified above,  Micrion will
     not authorize or enter into an agreement to do any of the foregoing.

              3.1.3 CLOSING NOTICE.  Promptly following the determination by FEI
that the  conditions  to Closing  (other than the  condition  contained  in this
Section 3.1.3) are met, FEI shall deliver to Philips notice to that effect.

         3.2 NO  SOLICITATION.  From and after the date hereof until the earlier
of the Effective Time or termination of the Agreement, subject to the proviso in
the next  paragraph,  Micrion agrees that neither it nor any of its officers and
directors  shall,  and that  Micrion  shall direct and use its  reasonable  best
efforts  to cause its  employees,  agents  and  representatives  (including  any
investment  banker,  attorney  or  accountant  retained  by it  or  any  of  its
subsidiaries) (such officers,  directors,  employees, agents and representatives
sometimes collectively referred to herein as "Representatives") not to, directly
or  indirectly,   initiate,  solicit,  encourage  or  otherwise  facilitate  any
inquiries  or the  making of any  proposal  or offer  with  respect to a merger,
reorganization,  share exchange, consolidation or similar transaction involving,
or any  purchase of 10% or more of the assets or any class of equity  securities
of, it or any of its subsidiaries  (any such proposal or offer being hereinafter
referred to as a "Takeover Proposal").

Micrion further agrees that neither it nor its Representatives shall directly or
indirectly,  engage in any negotiations concerning,  or provide any confidential
information or data to, or have any  discussions  with, any Person relating to a
Takeover Proposal,  whether made before or after the date of this Agreement,  or
otherwise facilitate any effort or attempt to make or implement a


                                       33

<PAGE>



Takeover Proposal;  provided,  however, that nothing contained in this Agreement
shall prevent Micrion or the Micrion Board from:

          (a)  complying  with Rule  14d-9 or Rule 14e-2  promulgated  under the
     Exchange Act with regard to a Takeover Proposal;

          (b)  providing  information  in  response  to a request  therefor by a
     Person who has made an unsolicited bona fide written  Takeover  Proposal if
     the Micrion Board receives from the Person so requesting  such  information
     an executed confidentiality  agreement on terms substantially equivalent to
     those  contained  in the  Confidentiality  Agreement  dated  March 30, 1998
     between Micrion and FEI (the "Confidentiality Agreement");

          (c) engaging in any  negotiations  or discussions  with any Person who
     has made an unsolicited bona fide written Takeover Proposal; or

          (d)  withdrawing  or modifying the approval or  recommendation  by the
     Micrion  Board  of  this  Agreement  or  the  Merger  in  connection   with
     recommending  an  unsolicited  bona fide written  Takeover  Proposal to the
     stockholders  of Micrion or entering into any agreement  with respect to an
     unsolicited bona fide written Takeover Proposal;

if and only to the extent that, both (i) in each such case referred to in clause
(b), (c) or (d) above,  the Micrion Board determines in good faith after receipt
of written  advice from outside legal counsel  experienced  in such matters that
such  action is  necessary  in order for its  directors  to  comply  with  their
respective  fiduciary duties under applicable law and (ii) in each case referred
to in clause (c) or (d) above, the Micrion Board determines in good faith (after
consultation  with its  financial  advisor)  that  such  Takeover  Proposal,  if
accepted, is reasonably likely to be consummated, taking into account all legal,
financial  and  regulatory  aspects of the  proposal  and the Person  making the
proposal and would,  if  consummated,  result in a  transaction  superior to the
transaction  contemplated  by this Agreement,  taking into account,  among other
things,  the long term  prospects and interests of Micrion and its  stockholders
(any such superior  Takeover  Proposal  being referred to in this Agreement as a
"Superior Proposal").

Micrion  will  immediately  cease  and  cause  to  be  terminated  any  existing
activities,  discussions or negotiations with any parties  conducted  heretofore
with  respect  to any of the  foregoing.  Micrion  agrees  that it will take the
necessary  steps to  promptly  inform  its  Representatives  of the  obligations
undertaken  in this Section 3.2 and in the  Confidentiality  Agreement.  Micrion
will promptly notify FEI if any such inquiries, proposals or offers are received
by,  any  such  information  is  requested  from,  or any  such  discussions  or
negotiations are sought to be initiated or continued with, Micrion or any of its
Representatives relating to a Takeover Proposal,  indicating, in connection with
such notice,  the name of such Person and the material  terms and  conditions of
any proposals or offers and  thereafter  shall keep FEI  informed,  on a current
basis, on the status and terms of any such proposals or offers and the status of
any such  negotiations or discussions.  Micrion also will promptly  request each
Person that has heretofore executed a confidentiality agreement in


                                       34

<PAGE>



connection  with  its  consideration  of  a  Takeover  Proposal  to  return  all
confidential  information heretofore furnished to such Person by or on behalf of
it or any of its subsidiaries.

         3.3  ACCESS.  For the  period up to and  including  the  Closing  Date,
Micrion and FEI will provide to each other and their authorized agents access to
all physical assets,  facilities,  financial  information,  production  records,
contracts  and other  corporate  records and  document  as the other  reasonably
requests and will allow the other and the other's authorized agents to meet with
management personnel,  employees and any outside consultants,  including without
limitation  auditors and  accountants,  investment  and other  bankers,  tax and
financial advisors and environmental consultants; provided that no investigation
by either Micrion or FEI or any of its Representatives  pursuant to this Section
3.3 will affect any  representation,  warranty or closing condition of the other
party to this  Agreement and  provided,  further,  that the foregoing  shall not
require FEI or Micrion to permit any inspection, or to disclose any information,
that in the reasonable  judgment of the nondisclosing  party,  would result in a
violation  of  applicable  law or would  result in the  disclosure  of any trade
secrets of third  parties  or violate  any of its  obligations  with  respect to
confidentiality  if the nondisclosing  party shall have used all best efforts to
obtain the consent of such third party to such inspection or disclosure.

         3.4 HART SCOTT  RODINO.  Each of Micrion  and FEI will  promptly  after
executing this Agreement prepare and file with the Federal Trade Commission (the
"FTC") and the Department of Justice (the "DOJ") the premerger notification form
required  under the HSR Act and a request for early  termination  of the waiting
period provided under the HSR Act and similar foreign pre-merger  notifications.
The parties will further take all  reasonable  steps to (i) cooperate  with each
other in connection with such filings,  which cooperation will include,  but not
be limited to, furnishing the other with such information or documents as may be
reasonably  required in connection  with such filings as permitted by applicable
law; (ii) promptly file after any request by the FTC or the DOJ any  appropriate
information  or  documents  so requested by the FTC or the DOJ; and (iii) notify
each other of any other  communications  with the FTC or the DOJ that  relate to
the transactions  contemplated by this Agreement and, to the extent appropriate,
permit the other to participate in any conferences  with the FTC or the DOJ. The
parties  will use best  efforts to  accelerate  and  obtain  HSR Act  clearance;
provided,  however,  that  nothing  in this  Section  3.4  will  require,  or be
construed to require, Micrion or FEI to proffer to, or agree to, any concession,
condition,  requirement or restriction of any  Governmental  Entity which either
the Micrion Board or the FEI Board, reasonably determines in good faith would so
materially   adversely   impact  the  economic  or  business   benefits  of  the
transactions  contemplated  by  this  Agreement  as to  render  inadvisable  the
consummation of the Merger. Each of Micrion and FEI will pay its own expenses in
connection with the preparation of the premerger notification form.

         3.5 OTHER GOVERNMENT CONSENTS. Promptly following the execution of this
Agreement,  the parties  will  proceed to prepare and file with the  appropriate
Governmental  Entities any requests for approval or waiver (in addition to those
specifically  described  above),  if any,  that are required  from  Governmental
Entities in connection with the transactions contemplated by this Agreement, and
the parties will diligently and  expeditiously  prosecute and cooperate fully in
the


                                       35

<PAGE>



prosecution  of such  requests  for  approval  or  waiver  and  all  proceedings
necessary to secure such approvals and waivers; provided,  however, that nothing
in this Section 3.5 will require, or be construed to require,  Micrion or FEI to
proffer to, or agree to, any concession,  condition,  requirement or restriction
of any  Governmental  Entity  which  either the FEI Board or the  Micrion  Board
reasonably  determines  in good faith would so materially  adversely  impact the
economic or business benefits of the transactions contemplated by this Agreement
as to render inadvisable the consummation of the Merger.

         3.6  REASONABLE  BEST  EFFORTS;  NO  INCONSISTENT  ACTION.   Except  as
otherwise  provided in this  Agreement,  each party will use its reasonable best
efforts to effect the transactions contemplated by this Agreement and to fulfill
the conditions to the obligations of the opposing parties set forth in Article 4
of this Agreement. Except as otherwise provided in this Agreement, no party will
take any action  inconsistent  with its obligations under this Agreement or that
could hinder or delay the consummation of the transactions  contemplated by this
Agreement,  except that nothing in this Section 3.6 will limit the rights of the
parties under Article 4 of this Agreement.

         3.7  CHANGED  CIRCUMSTANCES.  Each of Micrion  and FEI will  notify the
other  party  promptly  of any  fact  or  occurrence  between  the  date of this
Agreement and the Closing Date of which it becomes aware which would make any of
the  conditions  to Closing of the other party to this  Agreement not capable of
being satisfied and of any event, change or effect that has had or is reasonably
likely to have,  individually or in the aggregate,  a Material Adverse Effect on
it.

         3.8 FEES AND EXPENSES.  Except as provided in Section 5.5, all fees and
expenses  incurred  in  connection  with the  Merger,  this  Agreement,  and the
transactions  contemplated by this Agreement will be paid by the party incurring
such fees or expenses, whether or not the Merger is completed.

         3.9 RIGHTS  AGREEMENT.  Except as provided in Section  2.1.23,  Micrion
will not redeem the Rights or amend or terminate the Rights Agreement before the
earlier of Effective Time or the  termination of this Agreement  unless required
to do so by order of a court of competent jurisdiction.

         3.10 OPTIONS AND WARRANTS. Prior to the Effective Time, Micrion and FEI
will take such actions as may be necessary  so that at the  Effective  Time each
Micrion option and warrant outstanding will be terminated as provided in Section
1.9.6 of this Agreement.

         3.11 PRESS  RELEASES.  No press releases or other public  announcements
concerning the transactions contemplated by this Agreement may be made by any of
the parties  without  the prior  written  consent of each of the other  parties,
which consent will not be unreasonably withheld; provided, however, that nothing
in  this   provision   will  prevent  a  party  from  making  such  releases  or
announcements  as are necessary for a party to satisfy its legal  obligations or
the  requirements  of the Nasdaq  National Market or the SEC and then only after
prior consultation with the other party.


                                       36

<PAGE>



         3.12 INDEMNIFICATION; DIRECTORS' AND OFFICERS' INSURANCE.

                   (a) From and after the  Effective  Time,  FEI agrees  that it
     will  indemnify  and hold  harmless  each  present and former  director and
     officer of Micrion  (when acting in such  capacity)  (each an  "Indemnified
     Party" and, collectively,  the "Indemnified Parties"), against any costs or
     expenses (including, without limitation,  reasonable attorneys' fees, costs
     of investigation and fees of other advisers and experts), judgments, fines,
     losses, claims, damages or liabilities (collectively,  "Costs") incurred in
     connection  with any claim,  action,  suit,  proceeding  or  investigation,
     whether  civil,  criminal,  administrative  or  investigative,   including,
     without limitation,  claims, actions, suits,  proceedings or investigations
     by or on behalf of any present or former  shareholder  of Micrion,  arising
     out of matters  existing or  occurring at or prior to the  Effective  Time,
     whether  asserted or claimed prior to, at or after the  Effective  Time, to
     the  fullest   extent  that  Micrion  would  have  been   permitted   under
     Massachusetts  Law and its Articles of  Organization or Bylaws in effect on
     the date  hereof to  indemnify  such  Person  (and FEI shall  also  advance
     expenses as incurred to the fullest extent  permitted under applicable law;
     provided  the  Person to whom  expenses  are  advanced  provides  a written
     affirmation  of his or her good faith  belief that the  standard of conduct
     necessary for  indemnification  has been met, and an  undertaking  to repay
     such  advances  if it is  ultimately  determined  that  such  Person is not
     entitled to indemnification).

                   (b) Any  Indemnified  Party wishing to claim  indemnification
     under  paragraph (a) of this Section 3.12, upon learning of any such claim,
     action,  suit,  proceeding  or  investigation,  shall  promptly  notify FEI
     thereof,  but  the  failure  to so  notify  shall  not  relieve  FEI of any
     liability  it may have to such  Indemnified  Party if such failure does not
     materially  prejudice  the  indemnifying  party.  In the  event of any such
     claim, action, suit, proceeding or investigation (whether arising before or
     after the Effective Time), (i) FEI or the Surviving  Corporation shall have
     the right to assume the defense thereof and FEI shall not be liable to such
     Indemnified  Parties for any legal  expenses of other  counsel or any other
     expenses  subsequently  incurred by such Indemnified  Parties in connection
     with the defense thereof,  except that if FEI or the Surviving  Corporation
     elects not to assume such  defense or counsel for the  Indemnified  Parties
     advises that there are issues which raise conflicts of interest between FEI
     or the Surviving  Corporation and the Indemnified  Parties, the Indemnified
     Parties may retain counsel  satisfactory  to them, and FEI or the Surviving
     Corporation  shall pay all reasonable fees and expenses of such counsel for
     the  Indemnified  Parties  promptly as  statements  therefor are  received;
     provided,  however,  that FEI shall be obligated pursuant to this paragraph
     (b) to pay for only one firm of counsel for all Indemnified  Parties in any
     jurisdiction  unless the use of one  counsel for such  Indemnified  Parties
     would  present  such  counsel  with  a  conflict  of  interest,   (ii)  the
     Indemnified  Parties  will  cooperate in the defense of any such matter and
     (iii) FEI shall not be liable for any settlement effected without its prior
     written  consent;  and  provided,  further,  that  FEI  shall  not have any
     obligation  hereunder  to any  Indemnified  Party  if and  when a court  of
     competent jurisdiction shall ultimately determine, and such determination


                                       37

<PAGE>



     shall have become final and  non-appealable,  that the  indemnification  of
     such Indemnified Party in the manner  contemplated  hereby is prohibited by
     applicable law.

                   (c)  The  Surviving   Corporation  shall  maintain  Micrion's
     existing officers' and directors'  liability insurance for a period of five
     years after the Effective  Time;  provided,  however,  that if the existing
     officers'  and  directors'  insurance  expires,  is  terminated or canceled
     during  such  five-year  period,  the  Surviving  Corporation  will  obtain
     officers'  and  directors'  liability  insurance  for the remainder of such
     period of at least  the same  coverage  and  amounts  containing  terms and
     conditions that are not less  advantageous  to the Indemnified  Parties and
     that is issued by an insurer having a claims-paying rating at least as good
     as the rating of the issuer of Micrion's existing policy.

                   (d) The  provisions  of this  Section 3.12 are intended to be
     for the benefit of, and shall be  enforceable  by, each of the  Indemnified
     Parties, their heirs and their representatives.

         3.13 OTHER AGREEMENTS AND RELATED DOCUMENTS.

              3.13.1  STOCK  OPTION   AGREEMENT.   Contemporaneously   with  the
execution of this Agreement,  FEI and Micrion will execute and deliver the 19.9%
Stock Option Agreement substantially in the form attached hereto as Exhibit B.

              3.13.2 EMPLOYMENT  AGREEMENT.  At or prior to Closing,  FEI and at
least 10 of the 12  individuals  listed  on  Schedule  3.13.2  will  enter  into
employment  agreements  substantially  in the form attached  hereto as Exhibit C
(each, an "Employment Agreement"),  to be effective upon Closing;  provided that
Nicholas P. Economou will be one of the ten  individuals who enters into such an
Employment Agreement.

              3.13.3 ASSIGNMENT OF PATENTS AND TRADEMARKS.  At Closing,  Micrion
will execute  assignments of its patents and trademarks to FEI  substantially in
the forms attached as Exhibit D-1 and D-2.

         3.14 FEI BOARD OF DIRECTORS.  Effective  upon  Closing,  FEI will cause
Nicholas P. Economou to be elected or appointed to the FEI Board.

         3.15  GOLDEN  PARACHUTES.  Not later than five days  before the Closing
Date, Micrion shall amend the terms of any Micrion compensation or benefit plan,
or any other  agreement to which Micrion is a party,  that is listed on Schedule
2.1.12(d) so that neither  Micrion nor FEI following  consummation of the Merger
shall be required  to make a payment  that would be a  "parachute  payment" to a
"disqualified  individual,"  as those terms are  defined in Section  280G of the
Code.



                                       38

<PAGE>



         3.16 AUTHORIZED SHARES.  Prior to Closing,  FEI will amend its Articles
of Incorporation to increase the number of its authorized shares of Common Stock
to allow the issuance of the shares of FEI Common  Stock  included in the Merger
Consideration.

                                    ARTICLE 4

                     CONDITIONS TO THE PARTIES' OBLIGATIONS
                            TO CONSUMMATE THE MERGER

         4.1 MUTUAL  CONDITIONS.  The  respective  obligations  of each party to
consummate the Merger are subject to the following conditions:

              4.1.1 GOVERNMENTAL AUTHORIZATIONS. All filings required to be made
prior to the Effective Time with, and all consents, approvals and authorizations
required to be  obtained  prior to the  Effective  Time from,  any  Governmental
Entities in order to consummate the transactions contemplated by this Agreement,
will have been made or obtained, as the case may be, and the waiting period (and
any extension thereof) under the HSR Act and any applicable  competition laws of
any  jurisdiction  will  have  expired  or been  terminated  (collectively,  the
"Required Approvals").

              4.1.2 STOCKHOLDER  APPROVAL. At duly called and held Stockholders'
Meetings,  acting in accordance with applicable  provisions of their  respective
state corporation laws and their respective  organizational documents and bylaws
and the rules of the Nasdaq National Market and federal securities laws, Micrion
shall  have  obtained  the  approval  of the  Merger by the  holders of at least
two-thirds of the issued and outstanding shares of Micrion Common Stock entitled
to vote  thereon and FEI shall have  obtained  the approval of the holders of at
least a  majority  of the  issued and  outstanding  shares of FEI  Common  Stock
entitled to vote  thereon on the matters  submitted to FEI  shareholders  in the
Proxy Statement.

              4.1.3 NO  PROHIBITIONS.  There shall not have been  promulgated or
issued a law, statute, rule, regulation,  decree, order, injunction or ruling by
any  Governmental  Entity that  remains in effect and  prohibits,  restrains  or
enjoins the consummation of the Merger; provided, however, that each party shall
use its  reasonable  best  efforts to have any such decree or order  reversed or
vacated.

              4.1.4 NO SUITS.  No action,  suit or other  proceeding  shall have
been overtly  threatened by any  Governmental  Entity or be pending  against any
party to this Agreement to prohibit, restrain or enjoin or otherwise prevent the
consummation of the transactions contemplated by this Agreement.

              4.1.5 NASDAQ  LISTING.  The shares of FEI Common Stock issuable to
Micrion  stockholders  shall have been  authorized  for  inclusion on the Nasdaq
National  Market.  FEI shall  use its  reasonable  best  efforts  to effect  the
inclusion of all such shares on the Nasdaq National Market.


                                       39

<PAGE>



              4.1.6 FORM S-4. No stop order suspending the  effectiveness of the
Form S-4 shall have been issued,  and no proceedings for that purpose shall have
been instituted or threatened by the SEC.

              4.1.7  REGULATORY  BURDENS.  No  Regulatory  Approval  shall  have
imposed any condition,  requirement  or  restriction  which the FEI Board or the
Micrion Board determines in good faith would so materially  adversely impact the
economic or business benefits of the transactions contemplated by this Agreement
to FEI and its stockholders or Micrion and its stockholders, as the case may be,
as to render inadvisable the consummation of the Merger.

         4.2 CONDITIONS TO OBLIGATIONS OF FEI. The obligations of FEI and Sub to
effect the Merger are also  subject to the  satisfaction  or waiver by FEI at or
prior to the Effective Time of the following conditions:

              4.2.1  REPRESENTATIONS  AND  WARRANTIES;  COVENANTS.  Except  with
respect to the  representation  of Micrion regarding  Indebtedness  contained in
Section 2.1.30, (i) the  representations  and warranties of Micrion set forth in
this Agreement (A) to the extent  qualified by Material  Adverse Effect shall be
true and correct and (B) to the extent not qualified by Material  Adverse Effect
shall be true and correct, except that this clause (B) shall be deemed satisfied
so long as any failures of such  representations  and  warranties to be true and
correct,  taken together,  do not have a Material Adverse Effect on Micrion,  in
each case (A) and (B),  as of the  Closing  Date as though made on and as of the
Closing Date (except to the extent such  representations and warranties speak of
an earlier  date);  and (ii)  except  with  respect to the  covenant  of Micrion
regarding  Indebtedness  contained  in  Section  3.1.2(a),  Micrion  shall  have
performed and complied in all material respects with all covenants,  obligations
and  agreements  required to be  performed  and  complied  with by it under this
Agreement  at or prior to the  Closing  Date,  and FEI  shall  have  received  a
certificate  signed on behalf of Micrion by an  executive  officer of Micrion to
the effect of (i) and (ii).

If the representation  contained in Section 2.1.30 is not true and correct as of
the Closing Date or if the Micrion  covenant  contained in Section  3.1.2(a) has
not been complied with, the following provisions shall apply:

          (1) CLOSING ON OR PRIOR TO MARCH 31, 1999. If the Closing occurs on or
     prior to March 31, 1999, if Micrion Indebtedness at Closing is greater than
     $17,681,000,  the Cash  Portion  will be reduced by an amount  equal to the
     Indebtedness  in excess of  $17,681,000  divided  by the  number of Micrion
     Shares for which  Merger  Consideration  will be paid  pursuant  to Section
     1.6.1. If Micrion Indebtedness at Closing is greater than $21,844,000,  FEI
     will be entitled to terminate this Agreement pursuant to Section 5.4(c).

          (2) CLOSING  AFTER MARCH 31, 1999 AND ON OR PRIOR TO JUNE 30, 1999. If
     the Closing  occurs  after March 31, 1999 and on or prior to June 30, 1999,
     if Micrion  Indebtedness at Closing is greater than  $16,844,000,  the Cash
     Portion will be reduced by


                                       40

<PAGE>



     an amount equal to the Indebtedness in excess of $16,844,000 divided by the
     number of  Micrion  Shares  for  which  Merger  Consideration  will be paid
     pursuant to Section 1.6.1.  If Micrion  Indebtedness  at Closing is greater
     than $21,844,000, FEI will be entitled to terminate this Agreement pursuant
     to Section 5.4(c).

          (3) CLOSING AFTER JUNE 30, 1999. If the Closing  occurs after June 30,
     1999, if Micrion  Indebtedness at Closing is greater than $16,007,000,  the
     Cash  Portion  will be reduced by an amount  equal to the  Indebtedness  in
     excess of  $16,007,000  divided by the  number of Micrion  Shares for which
     Merger  Consideration  will be paid pursuant to Section  1.6.1.  If Micrion
     Indebtedness at Closing is greater than  $23,507,000,  FEI will be entitled
     to terminate this Agreement pursuant to Section 5.4(c).

          (4) ALL STOCK  CONSIDERATION.  If the  Merger  Consideration  consists
     solely of shares of FEI Common Stock  pursuant to Section 1.6.2 and Micrion
     Indebtedness  at  Closing  is  greater  than  $17,681,000,  $16,844,000  or
     $16,007,000,  for Closing at the time  specified  in (1), (2) or (3) above,
     respectively, then the number of shares of FEI Common Stock to be issued to
     each  Micrion  stockholder  as Merger  Consideration  will be  reduced by a
     number equal to (a) (i) the amount of the  applicable  excess  Indebtedness
     pursuant  to  paragraph  (1),  (2)  or  (3)  above,  divided  by  (ii)  the
     Pre-Closing  Average  Price,  divided by (b) the  number of Micrion  Shares
     outstanding prior to such reduction.

              4.2.2 DISSENTING SHARES. No more than fifteen percent (15%) of the
total issued and  outstanding  Micrion  Shares  (taking into account all Micrion
Shares issued or issuable pursuant to options, warrants,  convertible securities
or other rights to acquire Micrion Shares) shall be Dissenting Shares.

              4.2.3 DELIVERY OF EXHIBITS AND MICRION OFFICERS' CERTIFICATES. FEI
shall  have  received  an  Employment  Agreement  with  at  least  10 of  the 12
individuals  listed on Schedule 3.13.12  including an Employment  Agreement with
Nicholas Economou,  the 19.9% Stock Option Agreement,  the Patent Assignment and
the  Trademark  Assignment,  all  executed  by  the  parties  thereto,  and  the
certificate of Micrion officers referred to in Section 4.2.1.

         4.3 CONDITIONS TO OBLIGATIONS OF MICRION. The obligations of Micrion to
effect the merger are also subject to the  satisfaction  or waiver by Micrion at
or prior to the Effective Time of the following conditions:

              4.3.1   REPRESENTATIONS   AND  WARRANTIES;   COVENANTS.   (i)  The
representations  and  warranties  of FEI set forth in this  Agreement (A) to the
extent qualified by Material Adverse Effect shall be true and correct and (B) to
the extent not qualified by Material  Adverse  Effect shall be true and correct,
except that this clause (B) shall be deemed satisfied so long as any failures of
such representations and warranties to be true and correct,  taken together,  do
not have a Material  Adverse  Effect on FEI, in each case (A) and (B), as of the
Closing  Date as though made on and as of the Closing Date (except to the extent
such representations and warranties speak of


                                       41

<PAGE>



an earlier date); and (ii) FEI shall have performed and complied in all material
respects with all material  obligations and agreements  required to be performed
and complied  with by it under this  Agreement at or prior to the Closing  Date.
Micrion  shall  have  received  a  certificate  signed  on  behalf  of FEI by an
executive officer of FEI to the effect of (i) and (ii).

              4.3.2 DEPOSIT OF CERTIFICATES  AND FUNDS. FEI shall have deposited
the shares of FEI Common  Stock and funds (if the Merger  Consideration  will be
paid pursuant to Section 1.6.1) specified in Section 1.9.1 hereof.

              4.3.3 DELIVERY OF CERTIFICATES BY FEI. Micrion shall have received
the certificate of FEI officers referred to in Section 4.3.1.

                                    ARTICLE 5

                                   TERMINATION

         5.1 TERMINATION BY MUTUAL CONSENT. This Agreement may be terminated and
the Merger may be abandoned  at any time prior to the  Effective  Time,  whether
before or after the  approvals  by  stockholders  of  Micrion  and FEI by mutual
written  consent  of  Micrion  and FEI by action of their  respective  Boards of
Directors.

         5.2  TERMINATION BY EITHER PARTY.  This Agreement may be terminated and
the Merger may be abandoned at any time prior to the Effective Time by action of
either the FEI Board or the Micrion Board if any one of the following conditions
are met:

                   (a) the Merger shall not have been consummated by October 31,
     1999,  whether  such date is before or after the date of  approvals  by the
     stockholders of Micrion or FEI, provided,  that the right to terminate this
     Agreement  pursuant to this clause (a) shall not be  available to any party
     that has  breached  in any  material  respect  its  obligations  under this
     Agreement  in any manner  that shall have  proximately  contributed  to the
     occurrence of the failure of the Merger to be consummated;

                   (b)  the  approval  of  Micrion's  stockholders  required  by
     Section  4.1.2  shall not have been  obtained  at a meeting  duly  convened
     therefor or at any adjournment or postponement thereof;

                   (c) the approval of FEI'  shareholders as required by Section
     4.1.2 shall not have been obtained at a meeting duly  convened  therefor or
     at any adjournment or postponement thereof;

                   (d) any order permanently restraining, enjoining or otherwise
     prohibiting consummation of the Merger shall become final and nonappealable
     (whether  before or after the  approval by the  stockholders  of Micrion or
     FEI); or


                                       42

<PAGE>



                   (e) if the  Pre-Closing  Average  Price is less  than  $3.00,
     subject to Equitable Adjustment.

         5.3  TERMINATION  BY MICRION.  This Agreement may be terminated and the
Merger may be abandoned by action of the Micrion Board,  whether before or after
the approval by stockholders of Micrion:

              (a) at any time  prior to the  Effective  Time if there has been a
material breach by FEI of any  representation,  warranty,  covenant or agreement
contained  in this  Agreement  that is not curable or, if curable,  is not cured
within a  reasonable  time  (but in no event  more than 45 days)  after  written
notice of such breach is given by FEI to Micrion;

              (b)  at  any  time  prior  to the  Effective  Time,  if all of the
following conditions are met:

                   (1) Micrion is not in material breach of any of its covenants
     contained in Section 3.2, 3.4, 3.5 and 3.6 of this Agreement,

                   (2)  the  Micrion  Board  authorizes   Micrion,   subject  to
     complying with the terms of this Agreement, to enter into a binding written
     agreement concerning a transaction that constitutes a Superior Proposal and
     Micrion  notifies  FEI in  writing  that it  intends  to enter into such an
     agreement, attaching a summary of the material terms thereof,

                   (3) FEI  does not  make,  within  five  business  days  after
     receipt of Micrion's written  notification of its intention to enter into a
     binding agreement for a Superior Proposal,  an offer that the Micrion Board
     determines,  in good faith consistent with its fiduciary  obligations under
     applicable law after consultation with its financial advisors,  is at least
     as  favorable,  taking into  account,  among other  things,  the  long-term
     prospects  and interests of Micrion and its  stockholders,  as the Superior
     Proposal, and

                   (4) Micrion promptly, but in no event later than two business
     days  after  the  date of  such  termination,  pays  to FEI in  immediately
     available  funds the fees  required  to be paid  pursuant  to Section  5.5.
     Micrion agrees (i) that it will not enter into a binding agreement referred
     to in clause 5.3 (b)(2)  above until at least the sixth  business day after
     it has provided  the notice to FEI required  thereby and (ii) to notify FEI
     promptly if its intention to enter into a written agreement  referred to in
     its notification changes at any time after giving such notification; or

              (c) within  five  business  days  following  receipt by Micrion of
written notice from FEI that the Stock Purchase Agreement has been terminated.



                                       43

<PAGE>



         5.4 TERMINATION BY FEI. This Agreement may be terminated and the Merger
may be  abandoned at any time prior to the  Effective  Time,  whether  before or
after the approval by the stockholders of FEI, by action of the FEI Board if any
one of the following conditions are met:

                   (a) Micrion  enters into a binding  agreement  for a Superior
     Proposal or the Micrion Board recommends a Superior  Proposal or shall have
     withdrawn or adversely  modified  its  approval or  recommendation  of this
     Agreement  or failed to  reconfirm  its  recommendation  of this  Agreement
     within five business days after a written request by FEI to do so;

                   (b)  there  has been a  material  breach  by  Micrion  of any
     representation, warranty, covenant or agreement contained in this Agreement
     that is not curable or, if curable,  is not cured within a reasonable  time
     (but in no event more than 45 days) after written  notice of such breach is
     given by FEI to Micrion;

                   (c) if Micrion Indebtedness at Closing exceeds the applicable
     amount  specified  in the last  sentence  of  either  subsection  4.2.1(1),
     4.2.1(2), or 4.2.1.(3);

                   (d)  if  Micrion,  any of its  subsidiaries  or any of  their
     Representatives  shall take any actions  pursuant to clause (b), (c) or (d)
     of the proviso set forth in Section 3.2; provided that if Micrion or any of
     its representatives shall take any actions pursuant to clause (b) or (c) of
     such proviso,  FEI may only  terminate this Agreement no later than 30 days
     following  the date on which  Micrion  provides  notice  to FEI that it has
     taken such action; or

         5.5 EFFECT OF TERMINATION.

              5.5.1  In the  event  of  termination  of this  Agreement  and the
abandonment  of the Merger  pursuant  to this  Article V, this  Agreement  shall
become void and of no effect with no  liability  on the part of any party hereto
(or of any of its directors,  officers,  employees,  agents, legal and financial
advisors or other representatives); provided, however, no such termination shall
relieve any party hereto of any liability or damages  resulting  from any breach
of this Agreement.

              5.5.2 In the event that:

                    (i) a Takeover  Proposal  shall have been made to Micrion or
               any of  its  stockholders  or  any  Person  shall  have  publicly
               announced an  intention  (whether or not  conditional)  to make a
               Takeover  Proposal  with respect to Micrion and  thereafter  this
               Agreement  is  terminated  by either FEI or Micrion  pursuant  to
               Section 5.2(b), or

                    (ii) this Agreement is terminated (A) by Micrion pursuant to
               Section  5.3(b)  or (B) by FEI  pursuant  to  Section  5.4(a)  or
               Section 5.4(d) (in the case of 5.4(d),


                                       44

<PAGE>



               only with respect to termination by FEI because  Micrion,  any of
               its subsidiaries or any of their Representatives shall have taken
               any  actions  pursuant  to clause (d) of the proviso set forth in
               Section 3.2) or because of a breach of Section 3.2 by Micrion,

then Micrion shall promptly,  but in no event later than two business days after
the date of such termination or such earlier time as required by this Agreement,
pay FEI a termination fee of $3.5 million (the  "Termination  Fee"),  payable by
wire transfer of same day funds. If this Agreement is terminated by FEI pursuant
to Section  5.4(d)  because  Micrion,  any of its  subsidiaries  or any of their
Representatives  shall have taken any  actions  pursuant to clause (b) or (c) of
the proviso set forth in Section 3.2 and Micrion  consummates an agreement for a
Takeover  Proposal within nine months after FEI's termination of this Agreement,
Micrion  shall  promptly,   but  in  no  event  later  than  the  date  of  such
consummation, pay to FEI the Termination Fee.

              5.5.3  Micrion  acknowledges  that  the  agreements  contained  in
Section  5.5 are an  integral  part  of the  transactions  contemplated  by this
Agreement, and that, without these agreements,  FEI and Sub would not enter into
this  Agreement;  accordingly,  if Micrion  fails to promptly pay the amount due
pursuant to Section 5.5.2 and, in order to obtain such payment,  FEI commences a
suit which results in a judgment  against Micrion for the fee set forth therein,
Micrion shall pay to FEI its reasonable costs and expenses (including attorneys'
fees) in  connection  with such suit,  together  with  interest from the date of
termination of this Agreement on the amounts owed at the prime rate as announced
by Key Bank of Oregon in effect  from time to time  during  such period plus two
percent.

                                    ARTICLE 6

                               GENERAL PROVISIONS

         6.1  NONSURVIVAL  OF  REPRESENTATIONS  AND  WARRANTIES.   None  of  the
representations and warranties in this Agreement or in any instrument  delivered
pursuant to this Agreement will survive the Effective Time.

         6.2 FURTHER  ACTION.  Micrion,  Sub, and FEI will execute any documents
and take any  additional  action  reasonably  required to  implement  fully this
Agreement.

         6.3 ENTIRE AGREEMENT.  This Agreement  (including any exhibits hereto),
the Confidentiality  Agreement and the Exchange Of Information and Joint Defense
Agreement constitute the entire agreement and understanding among Micrion,  Sub,
and FEI  regarding  the subject  matter  hereof and thereof  and  supersede  and
replace   all   prior   or   contemporaneous   negotiations,    representations,
understandings  or  agreements,  whether  written or oral among the parties with
respect to the subject matter  hereof.  No party to this Agreement is relying on
any  representations  or warranties  other than those that are set forth in this
Agreement.



                                       45

<PAGE>



         6.4  ASSIGNMENT.  This Agreement may not be assigned by any party or by
operation of law without the prior written consent of all parties.

         6.5 BINDING EFFECT;  NO THIRD PARTY BENEFIT.  This Agreement will inure
to the benefit of and be binding  upon each of the parties and their  respective
successors and assigns,  subject to the restrictions on assignment  contained in
Section 6.4. Nothing express or implied in this Agreement is intended or will be
construed  to confer  upon or give to any Person  other than the parties to this
Agreement  any rights or remedies  under or by reason of this  Agreement  or any
transaction contemplated by it, except with respect to Section 3.12.

         6.6 WAIVER.  Failure of any party at any time to require performance of
any  provision of this  Agreement  will not limit such party's  right to enforce
such  provision,  nor will any  waiver of any  breach of any  provision  of this
Agreement  constitute a waiver of any  succeeding  breach of such provision or a
waiver of such provision  itself.  Any waiver of any provision of this Agreement
will be  effective  only if set forth in  writing  and signed by the party to be
bound.

         6.7  GOVERNING  LAW. This  Agreement  will be governed and construed in
accordance with the laws of the State of Oregon.

         6.8  SEVERABILITY.  The  provisions of this  Agreement  shall be deemed
severable and the  invalidity  or  unenforceability  of any provision  shall not
affect the validity or  enforceability  of the other provisions  hereof.  If any
provision  of this  Agreement,  or the  application  thereof  to any  Person  or
circumstance,  is  invalid  or  unenforceable,  (a)  a  suitable  and  equitable
provision shall be substituted  therefor in order to carry out, so far as may be
valid and  enforceable,  the intent and purpose of such invalid or unenforceable
provision and (b) the remainder of this  Agreement and the  application  of such
provision  to other  Persons  or  circumstances  shall not be  affected  by such
invalidity or  unenforceability,  nor shall such invalidity or  unenforceability
affect the validity or  enforceability  of such  provision,  or the  application
thereof, in any other jurisdiction.

         6.9 TIME OF ESSENCE.  Micrion, Sub and FEI hereby acknowledge and agree
that time is  strictly  of the  essence  with  respect  to each and every  term,
condition, obligation, and provision of this Agreement.

         6.10 COUNTERPARTS. This Agreement may be executed in counterparts, each
of which  will be deemed  an  original,  but all of which  taken  together  will
constitute  one  and  the  same  instrument,  binding  on the  parties.  If this
Agreement is executed in  counterparts,  each party will transmit by facsimile a
copy of the  signed  counterpart  upon  execution  and will  cause  an  executed
original counterpart to be transmitted by courier service to the other parties.

         6.11  AMENDMENTS.  This Agreement may not be modified or amended except
by the written  agreement of Micrion,  Sub and FEI.  This  Agreement  may not be
terminated  other than pursuant to Article 5 except by the written  agreement of
Micrion, Sub and FEI. A party may


                                       46

<PAGE>



waive  one or  more  of its  rights  under  this  Agreement  only  in a  written
instrument signed by such party.

         6.12 NOTICES. All notices or other communications required or permitted
under this Agreement must be in writing and must be personally  delivered,  sent
by registered or certified mail, postage prepaid,  return receipt requested,  or
sent by facsimile.  Any notice,  if mailed,  will be deemed given when received;
any notice,  if transmitted by facsimile,  will be deemed given when transmitted
and electronically confirmed. Notices will be given to the following Persons:

         To FEI:           Mr. Vahe Sarkissian
                                   FEI Company
                                   7451 NW Evergreen Parkway
                                   Hillsboro, Oregon  97124
                                   Facsimile No.: (503) 640-7570

         With a copy to:           Stephen E. Babson
                                   Stoel Rives LLP
                                   900 SW Fifth Avenue, Suite 2300
                                   Portland, OR  97204
                                   Facsimile No.: (503) 220-2480

         To Micrion:               Dr. Nicholas P. Economou
                                   Micrion Corporation
                                   One Corporation Way
                                   Peabody, MA  01960
                                   Facsimile No.: (978) 531-9648

         With a copy to:           Ms. Roslyn G. Daum
                                   Choate, Hall & Stewart
                                   Exchange Place, 53 State Street
                                   Boston, MA  02109
                                   Facsimile No.: (617) 248-4000

or to such  other  persons or  addresses  as may be  designated  in writing by a
party.

         6.13 VOTING  AGREEMENTS.  Philips has duly  executed  and  delivered to
Micrion a Voting Agreement  substantially in the form of Exhibit F-1 hereto with
respect to all shares of FEI Common  Stock  owned by Philips  and all  executive
officers of Micrion have duly  executed and  delivered to FEI Voting  Agreements
substantially  in the form of Exhibit  F-2 with  respect  to the shares  held by
those individuals.

         6.14  SCHEDULES.  Disclosure of any fact or item in any Schedule hereto
shall be deemed to have been so disclosed in any other Schedule  hereto provided
that disclosure of such fact or item


                                       47

<PAGE>


on such Schedule  contains fair  disclosure of the facts that would otherwise be
required  to be  disclosed  in such other  Schedule.  Matters  reflected  in the
Schedules  hereto  are not  necessarily  limited  to  matters  required  by this
Agreement  to  be  disclosed   herein,   are  not   necessarily   indicative  of
"materiality" and may be provided for information purposes only.

         IN WITNESS WHEREOF, the parties have executed this Agreement, effective
the day and year first written above.


FEI COMPANY                                    MICRION CORPORATION




By: /s/ Vahe Sarkissian                        By: /s/ Nicholas P. Economou
   ------------------------                       -------------------------
   (Signature)                                    (Signature)

Name:  Vahe Sarkissian                         Name:  Nicholas P. Economou
Title: Chief Executive Officer                 Title: Chief Executive Officer


MC ACQUISITION CORPORATION



By: /s/ Vahe Sarkissian
   ------------------------
   (Signature)

Name:  Vahe Sarkissian
Title: Chief Executive Officer



                                       48


                                VOTING AGREEMENT


         THIS SHAREHOLDER VOTING AGREEMENT (the "Agreement") is entered into as
of December 3, 1998, between Philips Business Electronics International B.V., a
shareholder (the "Shareholder") of FEI Company, an Oregon corporation ("FEI"),
and Micrion Corporation, a Massachusetts corporation (the "Company").

         WHEREAS, contemporaneously with the execution and delivery of this
Agreement, FEI, the Company and MC Acquisition Corporation are entering into an
Agreement and Plan of Merger, dated as of the date hereof (the "Merger
Agreement"), pursuant to which the Company will merge (the "Merger") with MC
Acquisition Corporation, upon the terms and conditions set forth therein; and

         WHEREAS, the Shareholder owns a majority of the outstanding capital
stock of FEI and desires that the Merger occur;

         NOW, THEREFORE, for good and valuable consideration, the receipt,
sufficiency and adequacy of which are hereby acknowledged, the parties hereto
agree as follows:

         1. Representations of Shareholder. The Shareholder represents that it
(a) is the holder, free and clear of all liens and encumbrances, of 9,942,423
shares of the Common Stock of FEI (the Shareholder's "Shares"), (b) does not
beneficially own (as such term is defined in the Securities Exchange Act of
1934, as amended (the "1934 Act")) any shares of the Common Stock of FEI other
than its Shares, except for 1,242,048 shares of Common Stock of FEI that the
Shareholder has a right to receive upon exercise of certain options held by
holders of options to purchase shares of Common Stock of FEI and (c) has full
power and authority to make, enter into and carry out the terms of this
Agreement.

         2. Agreement to Vote Shares. The Shareholder agrees to vote its Shares
and any New Shares (as defined in Section 6 hereof), and shall cause any holder
of record of its Shares or New Shares to vote in favor of (a) a proposal (the
"Amendment Proposal") to approve and adopt an amendment to the Articles of
Incorporation of FEI to increase the number of authorized shares of the Common
Stock of FEI to allow the issuance of shares of Common Stock of FEI included in
the Merger Consideration (as defined in the Merger Agreement) and (b) a proposal
(the "Issuance Proposal" and, together with the Amendment Proposal, the
"Proposals") to approve the issuance of shares of Common Stock of FEI pursuant
to the Merger Agreement and the Stock Purchase Agreement. The Shareholder agrees
to deliver to Nicholas P. Economou, President of the Company, immediately upon
request therefor a proxy substantially in the



<PAGE>


form attached hereto as Exhibit A, which proxy shall be irrevocable to the
extent permitted by law (except that such proxy shall be deemed automatically
revoked upon a termination of this Agreement), with the total number of his
Shares and any New Shares correctly indicated thereon.

         3. No Voting Trusts. After the date hereof, the Shareholder agrees that
it has not and will not, nor has it or will it permit any entity under its
control to, deposit any of its Shares in a voting trust or subject any of its
Shares to any arrangement with respect to the voting of such Shares other than
agreements entered into with the Company.

         4. No Proxy Solicitations. The Shareholder agrees that it will not, nor
will it permit any entity under its control to, (a) solicit proxies or become a
"participant" in a "solicitation" (as such terms are defined in Regulation 14A
under the 1934 Act) in opposition to or competition with the Proposals or
otherwise encourage or assist any party in taking or planning any action which
would compete with or otherwise serve to interfere with or inhibit the timely
approval of the Proposals, (b) directly or indirectly encourage, initiate or
cooperate in a shareholders' vote or action by consent of FEI's shareholders in
opposition to or in competition with the Proposals or (c) become a member of a
"group" (as such term is used in Section 13(d) of the 1934 Act) with respect to
any voting securities of FEI for the purpose of opposing or competing with the
approval of the Proposals. 5. Transfer and Encumbrance. Except for gifts given
without consideration where the recipient thereof agrees to execute a voting
agreement in form and substance similar to this Agreement, on or after the date
hereof, the Shareholder agrees not to voluntarily transfer, sell, offer, pledge
or otherwise dispose of or encumber any of its Shares or New Shares prior to the
termination of this Agreement in accordance with its terms.

         6. Additional Purchases. The Shareholder agrees that it will not
purchase or otherwise acquire beneficial ownership of any shares of the Common
Stock after the execution of this Agreement ("New Shares"), nor will it
voluntarily acquire the right to vote or share in the voting of any shares of
the Common Stock other than the Shares, unless it agrees to deliver to the
Company immediately after such purchase or acquisition a proxy substantially in
the form attached hereto as Exhibit A, which shall be irrevocable to the extent
permitted by law (except that such proxy shall be deemed automatically revoked
upon a termination of this Agreement) with respect to such New Shares. The
Shareholder also agrees that any New Shares acquired or purchased by it shall be
subject to the terms of this Agreement to the same extent as if they constituted
Shares.



                                       -2-

<PAGE>


         7. Specific Performance. Each party hereto severally acknowledges that
it will be impossible to measure in money the damage to the other party if a
party hereto fails to comply with any of the obligations imposed by this
Agreement, that every such obligation is material and that, in the event of any
such failure, the other party will not have an adequate remedy at law or
damages. Accordingly, each party hereto severally agrees that injunctive relief
or other equitable remedy, in addition to remedies at law or damages, is the
appropriate remedy for any such failure and will not oppose the granting of such
relief on the basis that the other party has an adequate remedy at law. Each
party hereto severally agrees that it will not seek, and agrees to waive any
requirement for, the securing or posting of a bond in connection with any other
party's seeking or obtaining such equitable relief.

         8. Successors and Assigns. This Agreement shall be binding upon and
inure to the benefit of the parties hereto and their respective successors and
assigns and shall not be assignable without the written consent of all other
parties hereto.

         9. Entire Agreement. This Agreement contains the entire agreement
between the parties hereto with respect to the subject matter hereof, and this
Agreement supersedes all prior agreements, written or oral, between the parties
hereto with respect to the subject matter hereof. This Agreement may not be
amended, supplemented or modified, and no provisions hereof may be modified or
waived, except by an instrument in writing signed by all the parties hereto. No
waiver of any provisions hereof by any party shall be deemed a waiver of any
other provisions hereof by any such party, nor shall any such waiver be deemed a
continuing waiver of any provision hereof by such party.

         10. Miscellaneous

         (a) This Agreement shall be deemed a contract made under, and for all
purposes shall be construed in accordance with, the laws of the State of The
Commonwealth of Massachusetts.

         (b) If any provision of this Agreement or the application of such
provision to any person or circumstances shall be held invalid by a court of
competent jurisdiction, the remainder of the provision held invalid and the
application of such provision to persons or circumstances, other than the party
as to which it is held invalid, shall not be affected.

         (c) This Agreement may be executed in one or more counterparts, each of
which shall be deemed to be an original but all of which together shall
constitute one and the same instrument.



                                       -3-

<PAGE>


         (d) This Agreement shall terminate upon the earliest to occur of (i)
the consummation of the Merger or (ii) termination of the Merger Agreement.

         (e) All Section headings herein are for convenience of reference only
and are not part of this Agreement, and no construction or reference shall be
derived therefrom.

         (f) The obligations of the Shareholder set forth in this Agreement
shall not be effective or binding upon it until after such time as the Merger
Agreement is executed and delivered by the Company, FEI and MC Acquisition
Corporation. The parties agree that there is not and has not been any other
agreement, arrangement or understanding between the parties hereto with respect
to the matters set forth herein.

            [The remainder of this page is left blank intentionally.]


                                       -4-

<PAGE>


         IN WITNESS WHEREOF, the parties hereto have executed and delivered this
Agreement as of the date first written above.

                                             MICRION CORPORATION



                                             By: /s/ Nicholas P. Economou
                                                --------------------------------
                                             Name:  Nicholas P. Economou
                                             Title: Chairman, President
                                                    and CEO



                                             PHILIPS BUSINESS ELECTRONICS
                                               INTERNATIONAL B.V.



                                             By: /s/ Theo Sonnemans
                                                --------------------------------
                                             Name:  Theo Sonnemans
                                             Title: CFO and Vice President



                                       -5-

<PAGE>


                                                                       EXHIBIT A

                                  FORM OF PROXY

         The undersigned, for consideration received, hereby appoints Nicholas
P. Economou, President of the Micrion Corporation ("Micrion"), and David M..
Hunter, and Vice President and Chief Financial Officer of the Micrion, its
proxy, with power of substitution, to vote all shares of common stock of FEI
Company, an Oregon corporation ("FEI"), owned by the undersigned at the upcoming
Special Meeting of Stockholders of FEI, and at any adjournment thereof, FOR
approval and adoption of (i) an amendment to the Articles of Incorporation of
FEI to increase the number of authorized shares of the Common Stock of FEI to
allow the issuance of shares of Common Stock of FEI included in the Merger
Consideration (as defined in that certain Merger Agreement, dated as of December
1, 1998, between the FEI, Micrion and MC Acquisition Corporation) and (ii) a
proposal to approve the issuance of shares of Common Stock of FEI pursuant to
the Merger Agreement and the Stock Purchase Agreement, and AGAINST any proposal
that would compete with or serve to interfere or inhibit the timely adoption
thereof. This proxy is coupled with an interest and is irrevocable until such
time as the Voting Agreement, dated as of December 3, 1998, among the
undersigned and Micrion terminates in accordance with its terms.

                                            Dated                     , 199  
                                                 ---------------------     --

                                            PHILIPS BUSINESS ELECTRONICS
                                              INTERNATIONAL B.V.



                                            ------------------------------------
                                            Name:
                                            Title:








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