KLA INSTRUMENTS CORP
SC 13D, 1997-01-24
OPTICAL INSTRUMENTS & LENSES
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<PAGE>   1
                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                  SCHEDULE 13D

                    UNDER THE SECURITIES EXCHANGE ACT OF 1934
                          (AMENDMENT NO. ___________)*


                               TENCOR INSTRUMENTS
- --------------------------------------------------------------------------------
                                (Name of Issuer)

                                  COMMON STOCK
- --------------------------------------------------------------------------------
                         (Title of Class of Securities)

                                    880323100
                                    ---------
                                 (CUSIP Number)


                 LISA BERRY, VICE PRESIDENT AND GENERAL COUNSEL,
                 -----------------------------------------------
                          KLA INSTRUMENTS CORPORATION,
                          ----------------------------
 
                                 160 RIO ROBLES
                                 --------------
                           SAN JOSE, CALIFORNIA 95161
                           --------------------------
   (Name, Address and Telephone Number of Person Authorized to Receive Notices
                              and Communications)

                                January 14, 1997
                                ----------------
             (Date of Event which Requires Filing of this Statement)


If the filing person has previously filed a statement on Schedule 13G to report
the acquisition which is the subject of this Schedule 13D, and is filing this
schedule because of Rule 13d-1(b)(3) or (4), check the following box [  ].

Check the following box if a fee is being paid with the statement |X| . (A fee
is not required only if the reporting person: (1) has a previous statement on
file reporting beneficial ownership of more than five percent of the class of
securities described in Item 1; and (2) has filed no amendment subsequent
thereto reporting beneficial ownership of five percent or less of such class.)
(See Rule 13d-7.)

NOTE:  Six copies of this statement, including all exhibits, should be filed 
with the Commission. See Rule 13d-1(a) for other parties to whom copies are to
be sent.

* The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter
disclosures provided in a prior cover page.

The information required on the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).
                                           
<PAGE>   2
                                  SCHEDULE 13D


CUSIP NO. 880323100                                            PAGE 2 OF 6 PAGES

- --------------------------------------------------------------------------------
     1  NAME OF REPORTING PERSON
        S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON


        KLA INSTRUMENTS CORPORATION
- --------------------------------------------------------------------------------
     2  CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP* (a)  [ ]
        N/A                                               (b)  [ ]
- --------------------------------------------------------------------------------
     3  SEC USE ONLY

- --------------------------------------------------------------------------------
     4  SOURCE OF FUNDS*

        WC
- --------------------------------------------------------------------------------
     5  CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO 
        ITEMS 2(D) OR 2(E)                                     [ ]  

        N/A
- --------------------------------------------------------------------------------
     6  CITIZENSHIP OR PLACE OF ORGANIZATION

        STATE OF DELAWARE
- --------------------------------------------------------------------------------

                  7  SOLE VOTING POWER
                     In the event the stock option becomes
                     exercisable and is exercised in full, KLA will have sole
                     voting power with respect to that number of shares equal to
                     19.9% of the then outstanding shares of Common Stock of
                     Tencor Instruments, which, based upon the 31,073,715 shares
                     of Tencor Common Stock outstanding as of January 10, 1997,
                     currently equals 6,183,669 shares of Common Stock of
                     Tencor.1

  NUMBER OF       8  SHARED VOTING POWER                        
   SHARES            N/A                                        
BENEFICIALLY      --------------------------------------------------------------
  OWNED BY        9  SOLE DISPOSITIVE POWER                     
    EACH             In the event the stock option becomes      
  REPORTING          exercisable and is exercised in full, KLA  
   PERSON            will have sole dispositive power with      
    WITH             respect to that number of shares equal to  
                     19.9% of the then outstanding shares of               
                     Common Stock of Tencor Instruments, which,            
                     based upon the 31,073,715 shares of Tencor 
                     Common Stock outstanding as of January 10,            
                     1997, currently equals 6,183,669 shares of            
                     Common Stock of Tencor.1                              
                 ---------------------------------------------------------------
                 10  SHARED DISPOSITIVE POWER                              
                     N/A  
- --------------------------------------------------------------------------------
    11  AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
        In the event the stock option becomes exercisable and is exercised in
        full, KLA will beneficially own that number of shares equal to 19.9% of
        the then outstanding shares of Common Stock of Tencor Instruments,
        which, based upon the 31,073,715 shares of Tencor Common Stock
        outstanding as of January 10, 1997, currently equals 6,183,669 shares of
        Common Stock of Tencor.1
- --------------------------------------------------------------------------------
    12  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES* 
                                                               [ ]
- --------------------------------------------------------------------------------
    13  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
        19.9%
- --------------------------------------------------------------------------------
    14  TYPE OF REPORTING PERSON*
        CO
- --------------------------------------------------------------------------------

                      *SEE INSTRUCTIONS BEFORE FILLING OUT!
          INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
<PAGE>   3



                                  SCHEDULE 13D


CUSIP NO. 880323100                                            PAGE 3 OF 6 PAGES



ITEM 1.           SECURITY AND ISSUER.

                  This statement on Schedule 13D relates to the Common Stock of
                  Tencor Instruments, a California corporation ("Tencor"). The
                  principal executive offices of Tencor are located at One
                  Technology Drive, Milpitas, California 95035.

ITEM 2.           IDENTITY AND BACKGROUND.

                  The name of the corporation filing this statement is KLA
                  Instruments Corporation, a Delaware corporation ("KLA"). KLA's
                  principal business is design, manufacture, marketing and
                  service of yield management and process monitoring systems for
                  the semi-conductor industry. The address of the principal 
                  executive offices of KLA is 160 Rio Robles, San Jose, 
                  California 95161.

                  No disclosure of legal proceedings is required pursuant to
                  Items 2(d) or 2(e).

ITEM 3.           SOURCE AND AMOUNT OF FUNDS OR OTHER CONSIDERATION.

                  Working Capital

ITEM 4.           PURPOSE OF TRANSACTION.

                  On January 14, 1997, KLA and Tencor entered into an Agreement
                  and Plan of Reorganization (the "Merger Agreement") among KLA,
                  Tencor and Tiger Acquisition Corp., a California corporation
                  and a wholly-owned subsidiary of KLA ("Merger Sub"). Pursuant
                  to the Merger Agreement, and subject to the conditions set
                  forth therein (including approval of the transaction by the
                  stockholders and shareholders, respectively, of KLA and
                  Tencor), Merger Sub will be merged with and into Tencor (the
                  "Merger"). At the effective time of the Merger, the separate
                  existence of Merger Sub will cease and Tencor will continue as
                  the surviving corporation and as a wholly-owned subsidiary of
                  KLA.

                  As an inducement to KLA to enter into the Merger Agreement,
                  KLA and Tencor entered into a Stock Option Agreement dated
                  January 14, 1997 pursuant to which Tencor granted KLA
                  the right, under certain conditions, to acquire shares of
                  Tencor Common Stock up to a number of shares sufficient to
                  give KLA 19.9% of Tencor's outstanding Common Stock. Tencor's
                  obligation to issue shares pursuant to the exercise of the
                  option is subject to the occurrence of certain events, which
                  may not occur.

                  The purpose of the transactions under the Stock Option
                  Agreement is to enable KLA and Tencor to consummate the
                  transactions contemplated under the Merger Agreement.

                                             

<PAGE>   4



                                  SCHEDULE 13D


CUSIP NO. 880323100                                            PAGE 4 OF 6 PAGES



ITEM 5.           INTEREST IN SECURITIES OF ISSUER.

                  5(a). Beneficial Ownership: In the event the Stock Option
                  becomes exercisable and is exercised in full, KLA will
                  beneficially own that number of shares equal to 19.9% of the
                  then outstanding shares of Common Stock of Tencor Instruments,
                  which, based upon the 31,073,715 shares of Tencor Common Stock
                  outstanding as of January 10, 1997, currently equals 6,183,669
                  shares of Common Stock of Tencor.

                  5(b). Sole Voting Power: In the event the stock option becomes
                  exercisable and is exercised in full, KLA will have the sole
                  power to vote that number of shares equal to 19.9% of the then
                  outstanding shares of Common Stock of Tencor Instruments,
                  which, based upon the 31,073,715 shares of Tencor Common Stock
                  outstanding as of January 10, 1997, currently equals 6,183,669
                  shares of Common Stock of Tencor.

                  5(c). Transactions: On January 14, 1997, KLA and Tencor
                  entered into the Merger Agreement pursuant to which Merger Sub
                  will be merged with and into Tencor. At the effective time of
                  the Merger, the separate existence of Merger Sub will cease
                  and Tencor will continue as the surviving corporation and as a
                  wholly-owned subsidiary of KLA. Consummation of the Merger
                  Agreement is subject to the satisfaction or waiver of a number
                  of conditions to closing.

                  5(d).    Not applicable

                  5(e).    Not applicable


ITEM 6.           CONTRACTS, ARRANGEMENTS, UNDERSTANDINGS OR RELATIONSHIPS WITH
                  RESPECT TO SECURITIES OF ISSUER.

                  Arrangements: On January 14, 1997, KLA and Tencor entered into
                  the Merger Agreement pursuant to which Merger Sub will be
                  merged with and into Tencor. At the effective time of the
                  Merger, the separate existence of Merger Sub will cease and
                  Tencor will continue as the surviving corporation and as a
                  wholly-owned subsidiary of KLA. Consummation of the Merger
                  Agreement is subject to the satisfaction or waiver of a number
                  of conditions to closing.

                  As an inducement to KLA to enter into the Merger Agreement,
                  KLA and Tencor entered into a Stock Option Agreement dated
                  January 14, 1997 pursuant to which Tencor granted KLA the
                  right, under certain conditions, to acquire shares of Tencor
                  Common Stock up to a number of shares sufficient to give KLA
                  19.9% of Tencor's outstanding Common Stock. Tencor's
                  obligation to issue shares pursuant to the exercise of the
                  option is subject to the satisfaction or waiver of certain
                  conditions.


                                            
<PAGE>   5



                                  SCHEDULE 13D


CUSIP NO. 880323100                                            PAGE 5 OF 6 PAGES


                  As an inducement to Tencor to enter into the Merger Agreement,
                  KLA and Tencor entered into a Stock Option Agreement dated
                  January 14, 1997 pursuant to which KLA granted Tencor the
                  right, under certain conditions, to acquire shares of KLA
                  Common Stock up to a number of shares sufficient to give
                  Tencor 19.9% of KLA's outstanding Common Stock. KLA's
                  obligation to issue shares pursuant to the exercise of the
                  option is subject to the satisfaction or waiver of certain
                  conditions.

ITEM 7.           MATERIALS TO BE FILED AS EXHIBITS.

                  Exhibit 1*  Agreement and Plan or Reorganization dated 
                              January 14, 1997 by and among KLA, a Delaware 
                              corporation, Tiger Acquisition Corp., a California
                              corporation and a wholly-owned subsidiary of KLA,
                              and Tencor Instruments, a California corporation.

                  Exhibit 2*  Stock Option Agreement dated January 14, 1997 by
                              and between Tencor, a California corporation and
                              KLA, a Delaware corporation.

                  Exhibit 3*  Stock Option Agreement dated January 14, 1997 by
                              and between KLA, a Delaware corporation and
                              Tencor, a California corporation.

                  *           Previously filed as Exhibit 2.1, Exhibit 99.2 and
                              Exhibit 99.3, respectively, to the Current Report
                              on Form 8-K of KLA Instruments Corporation filed
                              on January 22, 1997.


- -----------------------
(1)    The stock option is not exercisable except upon the occurrence of certain
events, which may or may not occur. Due to the contingent nature of the stock
option, as of the date of this Schedule 13D, KLA disclaims beneficial ownership
of the shares subject to the stock option. The number of shares issuable upon
exercise of the option shall be adjusted in the event that any additional shares
of Tencor Common Stock are issued. In the event the Merger is consummated, KLA
will acquire all of the outstanding Common Stock of Tencor and Tencor will
become a wholly-owned subsidiary of KLA.

                                             

<PAGE>   6
                                  SCHEDULE 13D


CUSIP NO. 880323100                                            PAGE 6 OF 6 PAGES



                                    SIGNATURE

         After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

Dated:  January 24, 1997

                                       KLA INSTRUMENTS CORPORATION


                                       By:  /s/ Robert J. Boehlke
                                            ----------------------------
                                            Robert J. Boehlke
                                            Vice President, Finance and
                                            Chief Financial Officer


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