KLA TENCOR CORP
10-K, 1997-09-29
OPTICAL INSTRUMENTS & LENSES
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                            ------------------------
 
                                   FORM 10-K
 
(MARK ONE)
 
   [X]   ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE
       SECURITIES EXCHANGE ACT OF 1934
 
                    FOR THE FISCAL YEAR ENDED JUNE 30, 1997
 
                                       OR
 
   [ ]   TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE
       SECURITIES EXCHANGE ACT OF 1934
 
      FOR THE TRANSITION PERIOD FROM ________________ TO ________________
 
                           COMMISSION FILE NO. 0-9992
                            ------------------------
 
                             KLA-TENCOR CORPORATION
             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)
 
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<S>                                                <C>
                     DELAWARE                                          04-2564110
          (STATE OR OTHER JURISDICTION OF                           (I.R.S. EMPLOYER
          INCORPORATION OR ORGANIZATION)                           IDENTIFICATION NO.)
 
        160 RIO ROBLES SAN JOSE, CALIFORNIA                               95134
     (ADDRESS OF PRINCIPAL EXECUTIVE OFFICES)                          (ZIP CODE)
</TABLE>
 
       REGISTRANT'S TELEPHONE NUMBER, INCLUDING AREA CODE: (408) 875-4200
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(B) OF THE ACT:
 
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                TITLE OF EACH CLASS                     NAME OF EACH EXCHANGE ON WHICH REGISTERED
- ------------------------------------------------------------------------------------------------------
<S>                                                <C>
                       NONE                                               NONE
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                            ------------------------
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(G) OF THE ACT:
 
                         COMMON STOCK, $0.001 PAR VALUE
                          COMMON STOCK PURCHASE RIGHTS
                                (TITLE OF CLASS)
                            ------------------------
 
     Indicate by check mark whether the registrant: (1) has filed all reports
required to be filed by Section 13 or 15(d) of the Securities Exchange Act of
1934 during the preceding 12 months (or for such shorter period that the
registrant was required to file such reports), and (2) has been subject to such
filing requirements for the past 90 days. Yes [X]  No [ ]
 
     Indicate by check mark if disclosure of delinquent filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of registrant's knowledge, in definitive proxy or information statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K. [ ]
 
     The aggregate market value of the voting stock held by non-affiliates of
the registrant based upon the closing price of the registrant's stock, as of
August 31, 1997, was $5,095,010,757. Shares of common stock held by each
officer and director and by each person or group who owns 5% or more of the
outstanding common stock have been excluded in that such persons or groups may
be deemed to be affiliates. This determination of affiliate status is not
necessarily a conclusive determination for other purposes.
 
     The registrant had 84,318,173 shares of Common Stock outstanding as of
August 31, 1997.
 
                      DOCUMENTS INCORPORATED BY REFERENCE
 
     Portions of the Annual Report to Stockholders for the fiscal year ended
June 30, 1997 ("1997 Annual Report to Stockholders" ) are incorporated by
reference into Parts I, II and IV of this Report. Portions of the Proxy
Statement for the Annual Meeting of Stockholders ("Proxy Statement" ) to be held
on November 18, 1997, and to be filed pursuant to Regulation 14A within 120 days
after registrant's fiscal year ended June 30, 1997, are incorporated by
reference into Part III of this Report.
 
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                                     PART I

ITEM 1. DESCRIPTION OF BUSINESS

THE COMPANY

        Merger. Effective April 30, 1997, Tencor Instruments ("Tencor") merged
into a wholly-owned subsidiary of KLA Instruments Corporation ("KLA"). Following
the Merger, KLA changed its name to KLA-Tencor Corporation (the "Company"). In
the Merger, shares and options for Tencor common stock were exchanged on a
one-for-one basis for the common stock of KLA. The transaction was accounted for
as a pooling of interests for financial reporting purposes and structured to
qualify as a tax-free reorganization. The stockholders of each of KLA and Tencor
approved the transaction and the transaction was effective April 30, 1997.

        The Merger brought together two companies with largely complementary
product lines which provide customers with yield management solutions and
process monitoring products throughout the semiconductor manufacturing process.
As the complexity of the sub-micron semiconductor manufacturing process
increases, the need for more, and more effective, process monitors also
increases. Quickly attaining and then maintaining high yields is one of the most
important determinants of profitability in the semiconductor industry. The
importance of high yields from the manufacturing process has grown dramatically
as wafer sizes increase and process geometries decrease. Total yield management
solutions have taken on a significance which has not been experienced in the
past. The Company, as a result of the Merger, is in a unique position to be the
single source for total yield management solutions with a portfolio of
applications-focused technologies and dedicated yield consulting expertise.

        General. The Company was incorporated in Delaware in July 1975. Its
headquarters are located at 160 Rio Robles, San Jose, California, 95134,
telephone (408) 875-4200.

        The Company is the leader in the design, manufacture, marketing and
service of yield management and process monitoring systems for the semiconductor
industry. The Company uses its technical expertise and understanding of customer
needs to supply unique yield management solutions and one of the broadest lines
of wafer inspection, thin film measurement, metrology and reticle inspection
systems available in the semiconductor industry. The Company's systems are used
to analyze product and process quality at critical steps in the manufacturing
process for integrated circuits and to provide feedback to our customers in
order that fabrication problems can be identified, addressed and contained. This
understanding of defect sources and how to contain them enables semiconductor
manufacturers to increase yields.

        Semiconductor fabrication facilities are increasingly expensive to build
and equip. Yield management and process monitoring systems, which typically
represent a small percentage of the total investment required to build and equip
a fabrication facility, enable integrated circuit manufacturers to leverage
these expensive facilities and improve their returns on investment.

        The Company's principal market is the semiconductor industry, marketing
and selling products worldwide to virtually all of the major semiconductor
manufacturers. The Company's revenues are derived primarily from product sales,
principally through its direct sales force, and to a lesser extent, through
distributors. The Company's technological strength has enabled it to develop and
introduce major new product families in each of its business units during the
last year.

        YIELD MANAGEMENT SOLUTIONS

        Maximizing yields, or the number of good die per wafer, is a key goal of
modern semiconductor manufacturing. Higher yields increase the revenue a
manufacturer can obtain for each semiconductor wafer processed. As geometry
linewidths decrease, yields become more sensitive to the size and density of
defects. Semiconductor manufacturers use yield management and process monitoring
systems to improve yields by identifying defects, by analyzing them to determine
process problems, and, after corrective action has been taken, by monitoring
subsequent results to ensure that the problem has been contained. Monitoring and
analysis often takes place at various points in the fabrication process as
wafers move through a production cycle consisting of hundreds of separate
process steps.

        The following are some of the methods used to manage yield, all of which
require the capture and analysis of data gathered through many measurements:


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        -       Engineering analysis is performed off the manufacturing line to
                identify and analyze defect sources. Engineering analysis
                equipment operates with very high sensitivity to enable
                comprehensive analysis of wafers. Because they operate off-line,
                engineering analysis systems do not require high speeds of
                operation.

        -       In-line monitoring is used to review the status of circuits
                during production steps. Information generated is used to
                determine whether the fabrication process steps are within
                required tolerances and to make any necessary process
                adjustments in real-time before wafer lots move to subsequent
                process stations. Because the information is needed quickly to
                be of greatest value, in-line monitoring requires both high
                throughput and high sensitivity.

        -       Pass/fail tests are used at several steps in the manufacturing
                process to evaluate products. For example, a pass/fail test is
                used to determine whether reticles used in photolithography are
                defect-free; electrical pass/fail testing is performed at the
                end of the manufacturing process to determine whether products
                meet performance specifications.

        The most significant opportunities for yield improvement generally occur
when production is started at new factories and when new products are first
built. Equipment that helps a manufacturer quickly increase new product yields
enables the manufacturer to offer these new products in volume at a time when
they are likely to generate the greatest profits.

        WAFER INSPECTION SYSTEMS

        The Company created the market for automated inspection of semiconductor
wafers over 12 years ago. The wafer inspection group product offerings include
unpatterned wafer inspection and patterned wafer inspection tools which are used
to find, count and characterize particles and pattern defects on wafers both in
engineering applications and in-line at various stages during the semiconductor
and wafer manufacturing processes. Semiconductor manufacturers use wafer
inspection systems to monitor their manufacturing processes and to refine those
processes to increase the yield of acceptable integrated circuits. Accordingly,
semiconductor manufacturers base their purchase of wafer inspection systems on a
variety of criteria, including sensitivity, throughput, total cost of ownership,
ease of use, degree of automation, system repeatability and correlation and its
ability to be integrated into overall yield management systems. The Company
offers two primary product families in the wafer inspection area.

        In 1992, the Company introduced the 2130 inspection required for
microprocessors and other logic devices as well as both the logic and repeating
array portions of memory devices. The 2130 was subsequently upgraded with each
new model having greater sensitivity and greater maximum speed compared to its
predecessor. The 2135 was introduced in 1996 with twice the throughput and
higher sensitivity compared to its predecessor. In 1997, the Company introduced
the 2138, a new patterned wafer inspection system specifically designed to
address chemical mechanical planarization (CMP) and other demanding inspection
applications. The 2138 is based on the 2135 inspection platform and combines an
ultra- broadband illumination source and significantly improved bright field
optics with Segmented Auto Thresholding. This combination significantly
increases defect sensitivity and capture, while reducing or eliminating false
defect counts in semiconductor processes. The 2138 extends the Company's full
line of intelligent in-line monitoring solutions.

        The Company's Surfscan(R) family of laser-scanning products are widely
used for wafer qualification, process monitoring and equipment monitoring. They
provide the high sensitivity, fast throughput and low cost of ownership required
in a production environment and are used in virtually all semiconductor
manufacturing processes. Surfscans are key components of the defect reduction
strategies of many leading semiconductor manufacturers. The systems use a
standardized file format that allow defect location data to be easily
transferred to off-line review stations for defect classification. The latest
patterned Surfscan, the Surfscan AIT, is the cost/performance leader for in-line
monitoring of deposited films and CMP layers.

        The Surfscan AIT and the 2138 are part of the Company's Intelligent Line
Monitoring solution, which includes the full line of patterned wafer inspection
systems, as well as the IMPACT/Online, ADC, CRS/Offline ADC and Quest defect
data analysis systems. This integrated yield management approach provides
semiconductor device manufacturers with a comprehensive tool set which enables
the acceleration of time-to-yield enhancements and yield goals.


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        The SP1 is the Company's first system to address the unique unpatterned
inspection requirements of 300mm wafers. It performs rapid, highly sensitive
inspection of unpatterned 300mm wafers, providing capabilities critical to wafer
and equipment manufacturers who are developing products for emerging 0.25 micron
process technologies and below. It combines a stationary illumination beam,
uniform axi-symmetric collection optics and an optional bright field channel
with a rotating wafer scheme and allows detection of surface defects and
contaminants at speeds of 100 wafers per hour on 300mm wafers, and 150 wafers
per hour on 200mm wafers. The Surfscan 6420 detects submicron defects on metal
films and rough surfaces but still provides sensitivity down to 0.1 micron on
polished silicon. It is effective for detecting defects on non-uniform films, a
critical requirement for CMP applications.


        As feature sizes of semiconductor circuits continue to decrease for
leading edge semiconductor products, the Company believes that conventional
optical technologies ultimately will begin to reach physical limits imposed by
the wavelength of light and fail to provide the necessary inspection resolution.
Working closely with those customers with the most advanced inspection
requirements, the Company has developed the SemSPEC, the industry's only fully
automatic electron beam inspection system. This system, comprised of the
industry's fastest scanning electron-optical column and a high speed image
computer, are used for wafer and x-ray mask inspection. The development of these
systems was funded in part by customer-sponsored research and development
programs. The Company expects the market for these inspection systems to emerge
slowly.

        The Company offers analysis systems comprised of database management
hardware and software to translate raw inspection data into patterns which
reveal process problems. The Company's software productivity and analysis
systems collect, store and analyze data collected by test equipment manufactured
by both the Company and others to provide semiconductor manufacturers with an
integrated yield management application. The software systems identify data
sources, show defect trends and help semiconductor manufacturers develop
long-term yield improvement strategies. In 1997, the Company introduced IMPACT,
its automated defect classification (ADC) tool, which will enable semiconductor
manufacturers to match automated defect classification schemes both within and
between fabrication facilities to accelerate the ramp to higher process yields.
With ADC matching, semiconductor manufacturers can develop a defect
classification recipe on one system and then export it to any other system or
fabrication facility running identical processes. The Company has an OEM
agreement with Uniphase Corporation to sell Uniphase Corporation's confocal
review station (CRS) ADC. The CRS interfaces with the Company's inspection
systems to collect, store and analyze defect data generated by the Surfscan
systems.

        The PRISM group, formed in April 1994 to address the market for software
products that can be utilized in semiconductor fabrication applications for
yield management and productivity improvement, has developed and is marketing
two software product lines - Discovery and CIMA. Discovery is an enterprise-wide
yield management system that collects, stores and correlates yield information
from multiple data sources in a fabrication facility. This product was the
result of a cooperative development project with Motorola. CIMA is a test floor
automation product that collects test data from, and automates the operation of,
the wafer floor.

        OPTICAL METROLOGY

        Lithography for sub-micron semiconductor fabrication requires
increasingly stringent overlay and critical dimension tolerances. In particular,
decreasing linewidths, larger die sizes, and additional layers have made overlay
mis-registration errors a crucial cause of yield loss. To address these
challenges, the Company offers the 5000 series metrology systems: the 5100 for
overlay, and the 5105 for both overlay and critical dimension measurement. In
1996, the Company introduced the 5200 overlay system, which has performance and
usability enhancements compared to the 5100.

        The Company, utilizing its expertise in digital image processing, has
developed sophisticated measurement algorithms that are more tolerant of process
variations. Using coherence probe microscopy, the system scans the image-forming
coherence region through the wafer plane, only gathering information from
in-focus surfaces. As a result, measurements are more tolerant of process and
substrate reflectivity variations than those from ordinary optical systems. The
precision measurements from the 5000 series identify the magnitude and direction
of overlay mis-registration errors arising from the stepping process and from
optical distortion inherent in the stepper lens. Based upon these measurements,


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users can fine-tune the stepper program to compensate for these errors, and
improve process yield.

        E-BEAM METROLOGY

        The Company broadened its portfolio of metrology products in December
1994 with the acquisition of Metrologix, Inc., a manufacturer of advanced
electron beam measurement equipment. With this acquisition, the Company's E-Beam
metrology business gained an established position in the Critical Dimension
Scanning Electron Microscope (CD-SEM) inspection market, a market which the
Company believes is larger than the optical overlay market, and one which it
believes will grow as semiconductor manufacturers continue to produce more
complex semiconductor devices.

        The Company's first generation E-Beam metrology system features high
throughput and automated setup. One major U.S. memory manufacturer and two major
U.S. microprocessor manufacturers have purchased multiple systems for use in
both production and research and development. The Company has made substantial
investments in engineering and manufacturing to bring to market the
next-generation tool, the 8100-R CD-SEM. Production shipments of this product
began in June 1996.

        FILM MEASUREMENT

        The Company's film measurement division produces both film thickness and
resistivity measurement tools. The film thickness products are used to measure a
variety of optical properties of thin films, while the resistivity products
measure the resistivity of the various layers used to make integrated circuits.
These products are used to control a wide range of wafer fabrication steps,
where within-wafer and wafer-to-wafer uniformity of the process is of paramount
importance to semiconductor manufacturers achieving high yields at the lowest
possible cost.

        The Company has been a leader in the thin film market since entering it
over 12 years ago. In 1995, the Company introduced the UV-1250SE, which brought
a powerful new technology, spectroscopic ellipsometry, to production. Continuing
innovations resulted in the UV-1280SE with one of the most robust measurement
capabilities in the industry. Thin film systems are used throughout the
manufacturing facility which creates significant challenges in measurement
flexibility, recipe management and factory floor computer automation. The
Company's UV product line, which has an installed base of over 500 systems has
addressed these requirements by delivering powerful measurement engines in
reliable, easy to use system designs. The systems also incorporate software
which enables extensive use of host computer operation to control the equipment,
analyze the data and feedback to the process equipment, all steps which are
critical for effective process control and maintaining high yields.

        The Company's resistivity products have lead their markets since the
Company first entered this market in 1983. The high end product, the RS75te, is
used today in diffusion, implant and metal deposition for equipment monitoring
and control.

        SURFACE METROLOGY

        Stylus profilers are used to measure the surface topography of films
and etched surfaces and are used in basic research and development as well as
production and quality control areas. In addition, the Company produces stress
measurement systems which detect reliability related problems such as film
cracking, voiding and lifting. The Company recently introduced a new
high-resolution profiler (HRP) product which significantly increased the
potential applications for surface profilers. The HRP-200 is the first metrology
system to offer the combined monitoring capability traditionally achieved by two
different instruments, an in-line profiler for measuring wide spatial problems
such as dishing and erosion and the off-line atomic force microscope for the
nanoscale problem of plug recess. The data storage industry is an emerging
market for the Company's metrology systems. Recent achievements in utilization
efficiencies in this industry have increased the need to monitor surface
topography.

        RETICLE INSPECTION SYSTEMS

        RAPID, the Company's first business unit, created the market for
automated inspection of reticles and photomasks


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for the semiconductor manufacturing industry over 19 years ago and continues to
have a predominant share of this market. The Company has delivered over 800
reticle and photomask inspection systems worldwide. During photolithography, a
stepper projects a circuit pattern from a reticle onto a wafer. Error-free
reticles are the first step in ensuring high yields in the manufacturing process
because defects in reticles can translate into millions of ruined die.

        The Company's 351 product incorporates a reference database generator
and data preparation system which gives full die-to-database functionality to
the inspection, permitting inspection against the ideal reticle pattern as
specified by the user's CAD program. The Company is continuing to develop
enhancements to the 351 inspection system to improve performance, serviceability
and reliability. In 1995, the Company introduced a new reticle inspection
product, STARlight, which uses reflected and transmitted light detection
techniques simultaneously to identify reticle contaminants, including particles.
STARlight permits users to identify defects which previously had not been
detectable. The Company believes STARlight will be used by mask manufacturers
and semiconductor manufacturers. STARlight is offered as an option on the KLA
351 inspection system and as a stand-alone unit. In 1997, the Company introduced
two new reticle and photomask inspection enhancements, the Advanced Performance
Algorithm (APA) and the STARlight High Resolution option. These enhancements
enable highly accurate and reliable inspection of next-generation 0.25 micron
reticles, including reticles with complex optical proximity correction
geometries.

CUSTOMERS

        The Company sells its systems to virtually all of the world's
semiconductor manufacturers. In fiscal 1997, 1996 and 1995, no single customer
accounted for more than 10% of the Company's revenues.

INTERNATIONAL REVENUES

        The Company has wholly-owned foreign subsidiaries or foreign branches of
domestic subsidiaries in Japan, Korea, Taiwan, Europe, Israel, Singapore and
Malaysia for marketing, sales and service of products. In addition, the Company
has manufacturing operations in Israel for its metrology products. International
sales accounted for approximately 65% of the Company's revenues for each of
1997, 1996 and 1995. For information regarding the Company's revenues from
foreign operations for the Company's last three fiscal years, see Note 9 of
Notes to Consolidated Financial Statements incorporated herein by reference to
Exhibit 13.1 hereto.

        The Company believes that foreign sales will continue to be a
significant percentage of revenues. The future performance of the Company will
be dependent upon, in part, its ability to continue to compete successfully in
Asia, one of the largest areas for the sale of yield management services in
process monitoring equipment. The Company's ability to compete in this area in
the future is dependent upon the continuation of favorable trading relationships
between the region (especially Japan and Korea) and the United States and the
continuing ability of the Company to maintain satisfactory relationships with
leading semiconductor companies in the region. International sales and
operations may be adversely affected by imposition of governmental controls,
restrictions on export technology, political instability, trade restrictions,
changes in tariffs and the difficulties associated with staffing and managing
international operations. In addition, international sales may be adversely
affected by the economic conditions in each country. The revenues from the
Company's international business may be affected by fluctuations in currency
exchange rates. Although the Company attempts to manage near term currency risks
through "hedging," there can be no assurance that such efforts will be adequate.
These factors could have a material adverse effect on the Company's future
business and financial results.

SALES, SERVICE AND MARKETING

        The Company believes that the size and location of its field sales,
service and applications engineering organization represents a competitive
advantage in its served markets. In the United States, Europe, Asia Pacific and
Japan the Company has a direct sales force although in the past it has used a
mix of direct sales and distributor/sales representative arrangements. The
Company maintains an export compliance program that fully meets the requirements
of the U.S. Department of Commerce and the Department of State. The Company does
not consider its business to be seasonal in nature, but it is cyclical with
respect to the capital equipment procurement practices of major semiconductor
manufacturers and is impacted by the investment patterns of such manufacturers
in different global markets.


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        The Company's sales, service and applications facilities throughout the
world employ over 1500 sales, service and applications engineers. The Company
maintains sales and service offices throughout the United States and in Japan,
Korea, Taiwan, Singapore, Europe and Israel.

RESEARCH AND DEVELOPMENT

        The market for yield management and process monitoring systems is
characterized by rapid technological development and product innovation. The
Company believes that continued and timely development of new products and
enhancements to existing products are necessary to maintain its competitive
position. Accordingly, the Company devotes a significant portion of its
personnel and financial resources to research and development programs and seeks
to maintain close relationships with customers to remain responsive to their
needs. In order to meet continuing developments in the semiconductor industry
and to broaden the applications for its image processing technology, the Company
is committed to significant engineering efforts for product improvement and new
product development. New product introductions may contribute to fluctuations in
operating results, since customers may defer ordering products from existing
product lines. If new products have reliability or quality problems, reduced
orders, higher manufacturing costs, delays in acceptance of and payment for new
products and additional service and warranty expense may result. On occasion,
the Company has experienced reliability and quality problems in connection with
certain product introductions, resulting in some of these consequences. There
can be no assurance that the Company will successfully develop and manufacture
new hardware and software products or that new hardware and software products
introduced by the Company will be accepted in the marketplace. If the Company
does not successfully introduce new products, its results of operations will be
affected adversely.

        The Company typically receives some external funding from customers,
industry groups, and government sources to augment its engineering, research and
development efforts. The Company reports engineering, research and development
expense net of this funding. Amounts for engineering, research and development
expense were 13.0%, 10.6% and 10.6% of sales in fiscal 1997, 1996 and 1995,
respectively. For information regarding the Company's research and development
expense during the last three fiscal years, see Management's Discussion and
Analysis of Results of Operations and Financial Condition incorporated herein by
reference to Exhibit 13.1 hereto.

MANUFACTURING

        The Company's principal manufacturing activities take place in San Jose
and Milpitas, California and Migdal Ha'Emek, Israel, and consist primarily of
manufacturing, assembling and testing components and subassemblies which are
acquired from third party vendors and then integrated into the Company's
finished products. The Company employs over 1800 manufacturing and engineering
personnel and also cross-trains personnel in order to respond to changes in
product mix. This reallocation of personnel is in addition to new hires.

        Many of the components and subassemblies are standard products, although
certain items are made to Company specifications. Certain of the components and
subassemblies included in the Company's systems are obtained from a single
source or a limited group of suppliers. Those parts subject to single or limited
source supply are routinely monitored by management and the Company endeavors to
ensure that adequate supplies are available to maintain manufacturing schedules,
should supply for any part be interrupted. Although the Company seeks to reduce
its dependence on sole and limited source suppliers, in some cases the partial
or complete loss of certain of these sources could disrupt scheduled deliveries
to customers and have a material adverse effect on the Company's results of
operations and damage customer relationships.

COMPETITION

        The worldwide market for yield management and process control systems is
highly competitive. In each of the markets it serves, the Company faces
competition from established and potential competitors, some of which may have
greater financial, engineering, manufacturing and marketing resources than the
Company. The Company believes that to remain competitive it will require
significant financial resources in order to offer a broad range of products, to
maintain customer service and support centers worldwide, and to invest in
product and process research and development. The


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semiconductor equipment industry is becoming increasingly dominated by large
manufacturers such as Applied Materials, Inc. which recently entered the wafer
defect inspection market, Hitachi Electronics Engineering Co., Ltd. and Tokyo
Electron Limited, who have the resources to support customers on a worldwide
basis. Many of these competitors have substantially greater financial resources
and more extensive engineering, manufacturing, marketing and customer service
and support capabilities than the Company. The Company expects its competitors
to continue to improve the design and performance of their current products and
processes and to introduce new products and processes with improved price and
performance characteristics. No assurance can be given that the Company will be
able to continue to compete successfully against its competitors.

        Significant competitive factors in the market for yield management and
process control systems include system performance, ease of use, reliability,
installed base and technical service and support. The Company believes that,
while price and delivery are important competitive factors, the customers'
overriding requirement is for systems which easily and effectively incorporate
automated, highly accurate inspection capabilities into their existing
manufacturing processes, thereby enhancing productivity. The Company's yield
management and process control systems for the semiconductor industry are
generally higher priced than those of its present competitors and are intended
to compete based upon performance and technical capabilities. These systems also
compete with less expensive, more labor-intensive manual inspection devices.

        In addition, in configuring their fabrication plants, semiconductor
manufacturers increasingly tend to select specific items of manufacturing
equipment for all of the fabrication facilities used to produce each generation
of integrated circuits. As a result of this process, the Company's failure to
have one or more of its products selected by a semiconductor manufacturer for
use in its facilities for a particular generation of integrated circuits may
effectively eliminate sales of that product for all of that manufacturer's
fabrication plants used for that generation of integrated circuits. The failure
to have one or more of the Company's products selected by a major semiconductor
manufacturer, especially one that is a significant customer of the Company, for
a particular generation of its integrated circuit products could have a
significant and long-term adverse effect on the Company's results of operations.
Although the Company has been relatively successful to date in these selection
decisions, not all of the Company's products have been selected by each of its
customers for fabrication facilities for each generation of integrated circuits.
Further, there can be no assurance that the Company's products will be selected
in the future, or that the Company will continue to be as successful in
connection with selection processes as it has been to date.

PATENTS AND OTHER PROPRIETARY RIGHTS

        The Company protects its proprietary technology through a variety of
intellectual property laws including patent, copyright and trade secrets law;
however, the Company believes that, due to the rapid pace of innovation within
the yield management and process control systems industry, its protection of
patent and other intellectual property rights is less important than factors
such as its technological expertise, continuing development of new systems,
market penetration and installed base and the ability to provide comprehensive
support and service to customers. There can be no assurance that the Company
will be able to protect its technology or that competitors will not be able to
develop similar technology independently.

        The Company currently holds 106 U.S. patents and has applied for 33
additional patents in the United States. In addition, the Company has 24 foreign
patents and applied for 75 additional foreign patents. From time to time the
Company acquires license rights under U.S. and foreign patents and other
proprietary rights of third parties. No assurance can be given that patents will
be issued on any of the Company's applications, that license assignments will be
made as anticipated or that the Company's patents, licenses or other proprietary
rights will be sufficiently broad to protect its technology. In addition, no
assurance can be given that any patents issued to or licensed by the Company
will not be challenged, invalidated or circumvented or that the rights granted
thereunder will provide a competitive advantage to the Company.

BACKLOG

        At June 30, 1997, the Company's backlog for systems totaled $573
million, compared to $385 million at June 30, 1996. In general, systems ship
within six months to a year after receipt of a customer's purchase order. The
Company expects to fill the present backlog of orders during fiscal 1998. All
orders are subject to cancellation or delay by the customer


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with limited or no penalty. The Company's backlog is not necessarily indicative
of actual sales for any succeeding period.


EMPLOYEES

        As of June 30, 1997, the Company employed a total of approximately 3,600
persons. None of the Company's employees are represented by a labor union. The
Company has experienced no work stoppages and believes that its employee
relations are good.

        Competition in the recruiting of personnel in the semiconductor and
semiconductor equipment industry is intense. The Company believes that its
future success will depend in part on its continued ability to hire and retain
qualified management, marketing and technical employees.


ITEM 2. PROPERTIES

        Certain information concerning the Company's properties at June 30, 1997
is set forth below:

<TABLE>
<CAPTION>
Location              Type          Principal use                Footage       Ownership
- --------              ----          -------------                -------       ---------

<S>                   <C>           <C>                          <C>           <C>    
San Jose, CA          Office,       Corporate Headquarters          711,667      lease
                      plant,        Research and Engineering,
                      warehouse     Marketing, Manufacturing,
                                    Sales and Service and
                                    Sales Administration


Milpitas, CA          Office,       Research and Engineering,       563,565      lease
                      plant,        Marketing, Manufacturing,
                      warehouse     Sales and Service and
                                    Sales Administration


Austin, TX            office        Sales and Service, Training      27,424      lease


Naruse, Japan         office        Sales and Service                29,107      lease


Yokohama, Japan       office        Sales and Service                23,057      lease


Seoul, Korea          office        Sales and Service                17,558      lease


Hsinchu, Taiwan       office        Sales and Service                14,892      lease


Migdal Ha'Emek,       office        Research and Engineering,        53,800      lease
 Israel                             Marketing, Manufacturing,
                                    Sales and Service and
                                    Sales Administration
</TABLE>


                                       8
<PAGE>   10
        The Company leases several other facilities under operating leases that
expire at various times through June 30, 2012 with renewal options at the fair
market value for additional periods up to five years. See Note 4 to Notes to
Consolidated Financial Statements in Exhibit 13.1 hereto.


ITEM 3. LEGAL PROCEEDINGS

        None.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

        On April 30, 1997 a Special Meeting of the Stockholders was held. At
that meeting, the Company's stockholders approved the following three proposals:

        1.      Proposal to issue shares of the common stock to the shareholders
                of Tencor Instruments in accordance with a merger agreement
                among the Company, Tencor Instruments and a wholly-owned
                subsidiary of the Company:

<TABLE>
<S>                                                <C>       
                             FOR:                  37,673,729
                             ABSTAIN:                  65,188
                             AGAINST:                  58,776
</TABLE>

        2.      Proposal to amend the Company's Certificate of Incorporation to
                change the name of the Company to KLA-Tencor Corporation:

<TABLE>
<S>                                                <C>       
                             FOR:                  38,368,617
                             ABSTAIN:                  73,058
                             AGAINST:                  78,877
</TABLE>

        3.      Proposal to amend the Company's Certificate of Incorporation to
                increase the number of authorized shares of the Company from
                175,000,000 to 250,000,000 and to eliminate the designation of a
                class of junior common stock:

<TABLE>
<S>                                                <C>       
                             FOR:                  37,435,273
                             ABSTAIN:                  79,605
                             AGAINST:                 533,500
</TABLE>


                                       9
<PAGE>   11
                                     PART II

ITEM 5. MARKET FOR THE REGISTRANT'S COMMON STOCK AND RELATED STOCKHOLDER MATTERS

        The information required by this Item is incorporated herein by
reference to Exhibit 13.1 hereto.


ITEM 6. SELECTED FINANCIAL DATA

FIVE YEAR FINANCIAL HIGHLIGHTS
In thousands, except per share data

<TABLE>
<CAPTION>
Year ended June 30,             1993         1994         1995            1996         1997
- -------------------          ----------   ----------   ----------      ----------   ----------
<S>                          <C>          <C>          <C>             <C>          <C>       

Revenues                     $  261,105   $  376,454   $  695,950      $1,094,492   $1,031,824
Net income                   $   11,507   $   40,443   $  104,811(1)   $  196,634   $  105,396(2)
Net income per share         $     0.19   $     0.59   $     1.34(1)   $     2.34   $     1.24(2)
Weighted average number
    of common shares             60,841       69,076       78,427          84,195       85,203

As of June 30,

Cash, cash equivalents and
    marketable securities    $   70,044   $  174,305   $  385,040      $  468,475   $  687,249
Working capital              $  133,084   $  277,791   $  452,350      $  591,397   $  535,256

Total assets                 $  260,485   $  430,453   $  850,406      $1,157,919   $1,343,307
Stockholders equity          $  165,379   $  307,334   $  652,222      $  870,999   $1,014,613
</TABLE>

(1)     Includes a net charge of $16.2 million, or $0.33 per share, for
        write-off of acquired in-process technology. Net income and net income
        per share would have been $121 million and $1.54, respectively,
        excluding this charge.

(2)     Includes merger, restructuring and other costs of $60.6 million. Net
        income and net income per share would have been $151.3 million and
        $1.78, respectively, excluding these costs.

ITEM 7. MANAGEMENT'S DISCUSSION AND ANALYSIS OF RESULTS OF OPERATIONS AND
FINANCIAL CONDITION

        Management's Discussion and Analysis of Results of Operations and
Financial Condition is incorporated herein by reference to Exhibit 13.1 hereto.

ITEM 7A. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

        The information required by this item is incorporated herein by
reference to Exhibit 13.1 hereto.

ITEM 8. FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

        The consolidated financial statements are incorporated herein by
reference to Exhibit 13.1 hereto.

ITEM 9. DISAGREEMENTS ON ACCOUNTING AND FINANCIAL DISCLOSURE

        Not Applicable.


                                       10
<PAGE>   12
                                    PART III

ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

        Set forth below are the names of the present directors and executive
officers of the Company, their ages and positions held with the Company.
Additional information required by Item 405 of Regulation S-K of the Securities
Act of 1933, as amended, is incorporated herein by reference to the Company's
Proxy Statement. 

<TABLE>
<CAPTION>
Name                        Age      Position
- ----                        ---      --------
<S>                         <C>      <C>                                  
Kenneth Levy                55       Chairman of the Board of Directors
Jon D. Tompkins             57       Chief Executive Officer and Director
Kenneth L. Schroeder        51       President, Chief Operating Officer and Director
Robert J. Boehlke           56       Executive Vice President, Chief Financial Officer and
                                     Assistant Secretary
Frederick A. Ball           35       Vice President Finance and Accounting
Lisa C. Berry               39       Vice President, General Counsel and Assistant Secretary
Gary E. Dickerson           40       Executive Vice President Yield Management Group
Samuel A. Harrell           57       Senior Vice President, Strategic Business Development
Neil Richardson             42       Executive Vice President Metrology Group
Magnus O. W. Ryde           42       Vice President Worldwide Field Operations
Arthur P. Schnitzer         54       Executive Vice President Human Resources
Graham J. Siddall           51       Executive Vice President Wafer Group
James W. Bagley             58       Director
Edward W. Barnholt          54       Director
Leo J. Chamberlain          67       Director
Richard J. Elkus, Jr.       62       Director
Dean O. Morton              65       Director
Yoshio Nishi                57       Director
Samuel Rubinovitz           67       Director
Dag Tellefsen               55       Director
Lida Urbanek                54       Director
</TABLE>

        Kenneth Levy is a co-founder of the Company and is Chairman of the
Board. From 1975 until April 30, 1997 he was Chairman of the Board and Chief
Executive Officer. He currently serves on the boards of directors of Ultratech
Stepper, Inc., Network Peripherals, Inc., Integrated Process Equipment
Corporation and Trikon Technologies, Inc.

        Jon D. Tompkins has been Chief Executive Officer of the Company since
April 30, 1997. From April 1991 until April 30, 1997 he was president and chief
executive officer of Tencor Instruments, a manufacturer of wafer inspection,
film measurement and metrology systems for the semiconductor industry. He was a
director of Tencor Instruments from 1991 until 1997 and was appointed chairman
of the board of directors of Tencor Instruments  in November 1993. He currently 
serves on the board of directors of Varian Corporation as well as SEMI/SEMATECH,
a private research and development consortium of U.S. semiconductor equipment
and materials companies.

        Kenneth L. Schroeder has been President, Chief Operating Officer and
Director of the Company since November 1991. He currently serves on the board of
directors of GaSonics International.

        Robert J. Boehlke has been Vice President and Chief Financial Officer of
the Company since July 1990. In April 1997 he was promoted to Executive Vice
President. He currently serves on the board of directors of LTX Corporation.

        Frederick A. Ball became Vice President Finance and Accounting of the
Company on April 30,1997. He joined Tencor Instruments, a manufacturer of wafer
inspection, film measurement and metrology systems for the semiconductor
industry, as corporate controller in March 1995 and was promoted to corporate
vice president and appointed corporate secretary in January of 1996. Prior to
Tencor Instruments, Mr. Ball was with Price Waterhouse LLP for ten years.


                                       11
<PAGE>   13
        Lisa C. Berry joined the Company in September 1996 as Vice President and
General Counsel. Ms. Berry joined the Company from LSI Logic Corporation, a
manufacturer of application specific integrated circuits, where she held the
positions of associate general counsel from October 1994 until September 1996
and assistant general counsel from August 1991 until October 1994.

        Gary E. Dickerson joined the Company in January 1986 and has held a
series of positions. In July 1990 he was promoted to Director of Marketing and
Vice President of Marketing in July 1992. In July 1993, he was promoted to Vice
President and Director of the Wafer Inspection Group. In January 1996, he was
promoted to Group Vice President. In 1997, Mr. Dickerson became Executive Vice
President of the newly formed Yield Management Solutions Group.

        Dr. Samuel A. Harrell joined the Company in September 1995 as Senior
Vice President of Strategic Business Development. Dr. Harrell is responsible for
strategic corporate development. Dr. Harrell served from October 1992 to
December 1995 as the senior vice president and chief strategy officer of
SEMATECH. From August 1987 to September 1992 he served as president of
SEMI/SEMATECH.

        Dr. Neil Richardson joined the Company in June 1993 as Vice President
and General Manager of the Metrology Division. He became Executive Vice
President of the Metrology Group (of the combined operations of the Company and
Tencor Instruments as a result of the Merger) in 1997. He served as vice
president and general Manager of the Diagnostic Systems Group of Schlumberger
Technologies from September 1985 to November 1991, and was the corporate
technology adviser for Schlumberger Ltd., a manufacturer of electronic test
equipment, from November 1991 to May 1993.

        Magnus O.W. Ryde joined the Company in June 1980 and has held a series
of positions. In 1991, Mr. Ryde became Vice President of Operations for the
Company's ATS division. He was promoted to Vice President and General Manager of
the Customer Support division in July 1992. In July 1995, he became Vice
President for the United States and European Sales Organizations. In July 1997
he was promoted to Vice President of Worldwide Field Operations.

        Arthur P. Schnitzer joined the Company in July 1978 and has held a
series of positions. In 1989 he was promoted to Vice President and General
Manager of the Wisard division. In July 1993, he became Group Vice President
responsible for RAPID, SEMSPEC, PRISM and manufacturing for WISARD and RAPID. In
June 1997 he became Executive Vice President, Human Resources.

        Dr. Graham J. Siddall was appointed Executive Vice President of the
Wafer Group (of the combined operations of the Company and Tencor as a result of
the Merger) in April 1997. In December 1995, he was appointed executive vice
president and chief operating officer of Tencor Instruments, a manufacturer of
wafer inspection, film measurement and metrology systems for the semiconductor
industry. Previously Dr. Siddall served as senior vice president for the Tencor
Instruments Wafer Inspection Division from November 1994 to December 1995 and
has been a vice president since joining Tencor Instruments in 1988.

        James W. Bagley has been a Director of the Company since April 30, 1997.
He was a director of Tencor Instruments, a manufacturer of wafer inspection,
film measurement and metrology systems for the semiconductor industry, from June
1993 until April 30, 1997. He has been chief executive officer and a director of
Lam Research Corporation, a manufacturer of semiconductor processing equipment,
since August 1997. From May 1996 until August 1997 he was chairman of the board
and chief executive officer of OnTrak Systems, Inc. until its merger with Lam
Research Corporation in August 1997. From December 1987 until December 1993 Mr.
Bagley was president and chief operating officer for Applied Materials, Inc.,
a manufacturer of wafer fabrication systems to the semiconductor industry.
From January 1994 until October 1995 he was vice chairman and chief operating
officer of Applied Materials, Inc., and vice chairman from November 1995 until
May 1996. Mr. Bagley currently serves on the boards of directors of Teradyne,
Inc., Kulicke & Soffa Industries, Inc., Micron Technology, Inc. and
Semi/SEMATECH.

        Edward W. Barnholt has been a Director of the Company since 1995. Mr.
Barnholt joined Hewlett-Packard Company, a manufacturer of electronic and
computer equipment in December 1966. From 1988 to 1990 he was general manager of
the Electronics Instruments Group of the Hewlett Packard Company. In July 1988,
he was elected vice president and in November 1993 was elected senior vice
president. Mr. Barnholt is currently executive vice president and general
manager of the Test and Measurement Organization of the Hewlett Packard Company.

        Leo J. Chamberlain has been a Director of the Company since 1982. He is
a private investor. Mr. Chamberlain currently serves on the board of directors
of Octel Communications Corporation.

        Richard J. Elkus, Jr. has been a Director of the Company since April 30,
1997. He was executive vice president and vice chairman of the board of
directors of Tencor Instruments, a manufacturer of wafer inspection, film
measurement and metrology systems for the semiconductor industry, from February
1994 until April 30, 1997. Previously, he was with Prometrix Corporation from
September 1983 until February 1994 where he held the positions of chairman and
chief executive


                                       12
<PAGE>   14
officer until its merger with Tencor Instruments in February 1994. He currently
serves on the boards of directors of Voyan Technology and Lam Research
Corporation.

        Dean O. Morton has been a Director of the Company since April 30, 1997.
From June 1993 until April 30, 1997 he was director of Tencor Instruments, a
manufacturer of wafer inspection, film measurement and metrology systems for the
semiconductor industry. In October 1992 Mr. Morton retired as executive vice
president and chief operating officer and as a director of the Hewlett Packard
Company, a manufacturer of electronic and computer equipment, where he held
various positions from 1960 until his retirement. Mr. Morton currently serves as
chairman of the board of Centigram Communications Corporation and as a director
of ALZA Corporation, The Clorox Company, BEA Systems Inc. and Raychem
Corporation. Mr. Morton is also a trustee of the Metropolitan Series Fund and
State Street Research Funds Group and Portfolio, Inc.

        Yoshio Nishi has been a Director since 1989. Since May 1995 he has been
director of research and development and senior vice president of the
Semiconductor Group of Texas Instruments Incorporated, a manufacturer of
integrated circuits and electronic equipment. From January 1986 to April 1995 he
was director of Silicon Process Laboratory for Hewlett-Packard Laboratories, a
semiconductor technology research facility affiliated with the Hewlett-Packard
Company.

        Samuel Rubinovitz has been a Director since 1990. He previously served
as a Director of the Company from October 1979 to January 1989. From April 1989
to January 1994 he was executive vice president of EG&G, Inc., a diversified
manufacturer of scientific instruments and electronic, optical and mechanical
equipment. He currently serves on the boards of directors of Richardson
Electronics, Inc., LTX Corporation and Kronos, Inc.

        Dag Tellefsen has been a Director of the Company since 1978. He is the
general partner of the Investment Manager of Glenwood Ventures I and II, venture
capital funds. He currently serves on the boards of directors of Iwerks
Entertainment Corporation, Aptix and Metorex International.

        Lida Urbanek has been a Director of the Company since April 30, 1997.
She is a private investor. She was a director of Tencor Instruments, a
manufacturer of wafer inspection, film measurement and metrology systems for the
semiconductor industry, from August 1991 until April 30, 1997.


ITEM 11. EXECUTIVE COMPENSATION

        The information required by this Item is incorporated by reference to
"EXECUTIVE COMPENSATION" in the Company's Proxy Statement.


ITEM 12. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

        The information required by this Item is incorporated by reference to
"SECURITY OWNERSHIP -- Principal Stockholders and Security Ownership of
Management" in the Company's Proxy Statement.


ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

        The information regarding "Certain Relationships and Related
Transactions" as it appears in the Proxy Statement is incorporated herein by
reference.


                                       13
<PAGE>   15
                                     PART IV

ITEM 14. EXHIBITS, FINANCIAL STATEMENTS, SCHEDULES, AND REPORT ON FORM 8-K

    (a) FINANCIAL STATEMENTS AND FINANCIAL STATEMENT SCHEDULES.

        1.  FINANCIAL STATEMENTS.

Consolidated Balance Sheets - As of June 30, 1997 and 1996 

Consolidated Statements of Operations - For the Three Years Ended June 30, 1997 

Consolidated Statement of Stockholders' Equity - For the Three Years Ended 
June 30, 1997

Consolidated Statements of Cash Flows - For the Three Years Ended June 30, 1997

Notes to Consolidated Financial Statements 

Report of Independent Accountants                                     

        2.  FINANCIAL STATEMENT SCHEDULES.

        All schedules are omitted because they are either not applicable or the
required information is shown in the consolidated financial statements or notes
thereto.

        3. EXHIBITS.

<TABLE>
<CAPTION>
Exhibit No. Description
- ----------- -----------

<S>         <C>
3.1         Certificate of Incorporation as amended(1)

3.2         Bylaws, as amended(1)

4.1         Amended and Restated Rights Agreement dated as of August 26, 1995,
            between the Company and First National Bank of Boston, as Rights
            Agent. The Rights Agreement includes as Exhibit A, the form of Right
            Certificate and as Exhibit B, the summary of transactions of
            Rights.(2)

10.1        Form of Retention and Non-Competition Agreement(3)

10.2        Form of KLA-Tencor Corporation Corporate Officers Retention Plan(3)

10.3        Form of Indemnification Agreement

10.4        1990 Outside Directors Stock Option Plan(4)

10.5        Second Amended and Restated 1981 Employee Stock Purchase Plan, as 
            amended on November 18, 1996(5)

10.6        1982 Stock Option Plan, as amended on November 18, 1996(6)

10.7        Tencor Instruments Second Amended and Restated 1984 Stock Option
            Plan (7)

10.8        Tencor Instruments Amended and Restated 1993 Equity Incentive Plan
            (7)

10.9        Tencor Instruments 1993 Nonemployee Directors Stock Option Plan(7)

10.10       1983 Employee Incentive Stock Option Plan of Prometrix Corporation
            (7)

10.11       1993 Employee Incentive Stock Option Plan of Prometrix Corporation
            (7)
 
10.12       Lease Agreement, Ground Lease Agreement and Purchase Agreement dated
            June 5, 1995, between BNP Leasing Corporation and the Company(8)

10.13       Lease Agreement and Purchase Agreement dated August 10, 1995,
            between BNP Leasing Corporation and the Company(8)

10.14       Phase IIA and Phase IIB Leases for Milpitas Facilities dated
            December 29, 1995(9)

13.1        1997 Annual Report to Stockholders (deemed to be filed except to 
            the extent that the information is specifically incorporated by 
            reference)

21.1        List of Subsidiaries of KLA-Tencor Corporation
</TABLE>


                                       14
<PAGE>   16
<TABLE>
<S>         <C>
23.1        Consent of Independent Accountants

27.1        Financial Data Schedule
</TABLE>


(1)   Previously filed, with the same exhibit number, to the Registrant's Form
      10-Q for the quarter ended March 31, 1997

(2)   Previously filed as exhibit 1 to the Registrant's report on Form 8-A/A
      Amendment No. 1 to the Registration Statement on Form 8-A (filed September
      24, 1996, SEC File No. 0-9992)

(3)   Previously filed, with the same exhibit number, to the Registrant's
      Registration Statement on Form S-4 (filed March 11, 1997, SEC File No.
      333-23075)

(4)   Previously filed as exhibit 4.6 to the Registrant's Annual Report on Form
      10-K for the year ended June 30, 1997

(5)   Previously filed as exhibit 10.75 to the Registrant's Registration
      Statement on Form S-8 (filed March 7, 1997, SEC File No. 333-22939)

(6)   Previously filed as exhibit 10.74 to the Registrant's Registration
      Statement on Form S-8 (filed March 7, 1997, SEC File No. 333-22941)

(7)   Previously filed as exhibits 10.1, 10.2, 10.3, 10.6 and 10.7,
      respectively, to the Registrant's Registration Statement on Form S-8
      (filed May 8, 1997, SEC File No. 333-26681)

(8)   Previously filed, with the same exhibit number, to the
      Registrant's Form 10-Q for the quarter ended December 31, 1995

(9)   Previously filed as exhibit 10.27 to Tencor Instruments 
      Annual Report on Form 10-K for the fiscal year ended December
      31, 1995


    (b) REPORT ON FORM 8-K.

        The Company filed a Current Report on Form 8-K on April 15, 1997 which
incorporated the Company's earnings release for the third quarter of fiscal 1997
ended March 31, 1997. The Company amended that Form 8-K by filing an Amendment
to Current Report on Form 8-K setting forth financial statements reflecting 30
days of combined earnings of the Company and Tencor Instruments to reflect the
Merger using the pooling of interests method of accounting.



                                       15
<PAGE>   17
                                   SIGNATURES

        Pursuant to the requirements of Section 13 or 15(d) of the Securities
Exchange Act of 1934, the registrant has duly caused this report to be signed on
its behalf by the undersigned, thereunto duly authorized on September 25, 1997.

                                       KLA-Tencor Corporation

                                       By: /s/ Kenneth Levy
                                          ------------------------------------
                                          Kenneth Levy, Chairman of the Board

Pursuant to the requirements of the Securities Exchange Act of 1934, this report
has been signed below by the following persons on behalf of the registrant and
in the capacities and on the dates indicated.

<TABLE>
<CAPTION>
           Signature                         Title                        Date
           ---------                         -----                        ----
                                    
<S>                                 <C>                             <C>   
/s/ Kenneth Levy
- --------------------------------    Chairman of the Board and       September 25, 1997  
Kenneth Levy                        Director                                            
                                    
                                    
/s/ Jon D. Tompkins
- --------------------------------    Chief Executive Officer and     September 25, 1997    
Jon D. Tompkins                     Director                                                        
                                    (Principal Executive Officer)                         
                                    
/s/ Kenneth L. Schroeder                                    
- --------------------------------    President, Chief Operating      September 25, 1997 
Kenneth L. Schroeder                Officer and Director                               

/s/ Robert J. Boehlke
- --------------------------------    Executive Vice President and    September 25, 1997   
Robert J. Boehlke                   Chief Financial Officer                                        
                                    (Principal Accounting Officer)                       
                                    
/s/ James W. Bagley
- --------------------------------    Director                        September 25, 1997
James W. Bagley     

/s/ Edward W. Barnholt
- --------------------------------    Director                        September 25, 1997
Edward W. Barnholt

/s/ Leo J. Chamberlain
- --------------------------------    Director                        September 25, 1997
Leo J. Chamberlain
        
/s/ Richard J. Elkus, Jr.
- --------------------------------    Director                        September 25, 1997
Richard J. Elkus, Jr.
                                              

/s/ Dean O. Morton
- --------------------------------    Director                        September 25, 1997
Dean O. Morton

/s/ Yoshio Nishi
- --------------------------------    Director                        September 25, 1997
Yoshio Nishi

/s/ Samuel Rubinovitz
- --------------------------------    Director                        September 25, 1997
Samuel Rubinovitz
        
/s/ Dag Tellefsen
- --------------------------------    Director                        September 25, 1997
Dag Tellefsen
         
/s/ Lida Urbanek
- --------------------------------    Director                        September 25, 1997
Lida Urbanek
</TABLE>


                                       16
<PAGE>   18
                                     

<TABLE>
<CAPTION>

                                EXHIBIT INDEX
                                -------------

Exhibit No. Description
- ----------- -----------

<S>         <C>
3.1         Certificate of Incorporation as amended(1)

3.2         Bylaws, as amended(1)

4.1         Amended and Restated Rights Agreement dated as of August 26, 1995,
            between the Company and First National Bank of Boston, as Rights
            Agent. The Rights Agreement includes as Exhibit A, the form of Right
            Certificate and as Exhibit B, the summary of transactions of
            Rights.(2)

10.1        Form of Retention and Non-Competition Agreement(3)

10.2        Form of KLA-Tencor Corporation Corporate Officers Retention Plan(3)

10.3        Form of Indemnification Agreement

10.4        1990 Outside Directors Stock Option Plan(4)

10.5        Second Amended and Restated 1981 Employee Stock Purchase Plan, as 
            amended on November 18, 1996(5)

10.6        1982 Stock Option Plan, as amended on November 18, 1996(6)

10.7        Tencor Instruments Second Amended and Restated 1984 Stock Option
            Plan (7)

10.8        Tencor Instruments Amended and Restated 1993 Equity Incentive Plan
            (7)

10.9        Tencor Instruments 1993 Nonemployee Directors Stock Option Plan(7)

10.10       1983 Employee Incentive Stock Option Plan of Prometrix Corporation
            (7)

10.11       1993 Employee Incentive Stock Option Plan of Prometrix Corporation
            (7)
 
10.12       Lease Agreement, Ground Lease Agreement and Purchase Agreement dated
            June 5, 1995, between BNP Leasing Corporation and the Company(8)

10.13       Lease Agreement and Purchase Agreement dated August 10, 1995,
            between BNP Leasing Corporation and the Company(8)

10.14       Phase IIA and Phase IIB Leases for Milpitas Facilities dated
            December 29, 1995(9)

13.1        1997 Annual Report to Stockholders (deemed to be filed except to 
            the extent that the information is specifically incorporated by 
            reference)

21.1        List of Subsidiaries of KLA-Tencor Corporation
</TABLE>

<PAGE>   19
<TABLE>
<S>         <C>
23.1        Consent of Independent Accountants

27.1        Financial Data Schedule
</TABLE>

(1)   Previously filed, with the same exhibit number, to the Registrant's Form
      10-Q for the quarter ended March 31, 1997

(2)   Previously filed as exhibit 1 to the Registrant's report on Form 8-A/A
      Amendment No. 1 to the Registration Statement on Form 8-A (filed September
      24, 1996, SEC File No. 0-9992)

(3)   Previously filed, with the same exhibit number, to the Registrant's
      Registration Statement on Form S-4 (filed March 11, 1997, SEC File No.
      333-23075)

(4)   Previously filed as exhibit 4.6 to the Registrant's Annual Report on Form
      10-K for the year ended June 30, 1997

(5)   Previously filed as exhibit 10.75 to the Registrant's Registration
      Statement on Form S-8 (filed March 7, 1997, SEC File No. 333-22939)

(6)   Previously filed as exhibit 10.74 to the Registrant's Registration
      Statement on Form S-8 (filed March 7, 1997, SEC File No. 333-22941)

(7)   Previously filed as exhibits 10.1, 10.2, 10.3, 10.6 and 10.7,
      respectively, to the Registrant's Registration Statement on Form S-8
      (filed May 8, 1997, SEC File No. 333-26681)

(8)   Previously filed, with the same exhibit number, to the
      Registrant's Form 10-Q for the quarter ended December 31, 1995

(9)   Previously filed as exhibit 10.27 to Tencor Instruments 
      Annual Report on Form 10-K for the fiscal year ended December
      31, 1995


 


                                       

<PAGE>   1
                                  EXHIBIT 10.3

                            INDEMNIFICATION AGREEMENT

      This Indemnification Agreement (the "Agreement") is entered into as of the
_______, 199_ by and between KLA-Tencor Corporation, a Delaware corporation (the
"Company") and ______________________ ("Indemnitee").

RECITALS

      A.    The Company and Indemnitee recognize the continued difficulty in
obtaining liability insurance for its directors, officers, employees, agents and
fiduciaries, the significant increases in the cost of such insurance and the
general reductions in the coverage of such insurance.

      B.    The Company and Indemnitee further recognize the substantial
increase in corporate litigation in general, subjecting directors, officers,
employees, agents and fiduciaries to expensive litigation risks at the same time
as the availability and coverage of liability insurance has been severely
limited.

      C.    Indemnitee does not regard the current protection available as
adequate under the present circumstances, and Indemnitee and other directors,
officers, employees, agents and fiduciaries of the Company may not be willing to
continue to serve in such capacities without additional protection.

      D.    The Company desires to attract and retain the services of highly
qualified individuals, such as Indemnitee, to serve the Company and, in part, in
order to induce Indemnitee to continue to provide services to the Company,
wishes to provide for the indemnification and advancing of expenses to
Indemnitee to the maximum extent permitted by law.

      E.    In view of the considerations set forth above, the Company desires
that Indemnitee be indemnified by the Company as set forth herein.

NOW, THEREFORE, the Company and Indemnitee hereby agree as follows:

      1.    Indemnification.

            (a)   Indemnification of Expenses. The Company shall indemnify
Indemnitee to the fullest extent permitted by law if Indemnitee was or is or
becomes a party to or witness or other participant in, or is threatened to be
made a party to or witness or other participant in, any threatened, pending or
completed action, suit, proceeding or alternative dispute resolution mechanism,
or any hearing, inquiry or investigation that Indemnitee in good faith believes
might lead to the institution of any such action, suit, proceeding or
alternative dispute resolution mechanism, whether civil, criminal,



                                       1
<PAGE>   2
administrative, investigative or other (hereinafter a "Claim") by reason of (or
arising in part out of) any event or occurrence related to the fact that
Indemnitee is or was a director, officer, employee, agent or fiduciary of the
Company, or any subsidiary of the Company, or is or was serving at the request
of the Company as a director, officer, employee, agent or fiduciary of another
corporation, partnership, joint venture, trust or other enterprise, or by reason
of any action or inaction on the part of Indemnitee while serving in such
capacity (hereinafter an "Indemnifiable Event") against any and all expenses
(including attorneys' fees and all other costs, expenses and obligations
incurred in connection with investigating, defending, being a witness in or
participating in (including on appeal), or preparing to defend, be a witness in
or participate in, any such action, suit, proceeding, alternative dispute
resolution mechanism, hearing, inquiry or investigation), judgments, fines,
penalties and amounts paid in settlement (if such settlement is approved in
advance by the Company, which approval shall not be unreasonably withheld) of
such Claim and any federal, state, local or foreign taxes imposed on Indemnitee
as a result of the actual or deemed receipt of any payments under this Agreement
(collectively, hereinafter "Expenses"), including all interest, assessments and
other charges paid or payable in connection with or in respect of such Expenses.
Such payment of Expenses shall be made by the Company as soon as practicable but
in any event no later than five days after written demand by Indemnitee therefor
is presented to the Company.

            (b)   Reviewing Party. Notwithstanding the foregoing, (i) the
obligations of the Company under Section 1(a) shall be subject to the condition
that the Reviewing Party (as described in Section 10(e) hereof) shall not have
determined (in a written opinion, in any case in which the Independent Legal
Counsel referred to in Section 1(c) hereof is involved) that Indemnitee would
not be permitted to be indemnified under applicable law, and (ii) the obligation
of the Company to make an advance payment of Expenses to Indemnitee pursuant to
Section 2(a) (an "Expense Advance") shall be subject to the condition that, if,
when and to the extent that the Reviewing Party determines that Indemnitee would
not be permitted to be so indemnified under applicable law, the Company shall be
entitled to be reimbursed by Indemnitee (who hereby agrees to reim burse the
Company) for all such amounts theretofore paid; provided, however, that if
Indemnitee has commenced or thereafter commences legal proceedings in a court of
competent jurisdiction to secure a determination that Indemnitee should be
indemnified under applicable law, any determination made by the Reviewing Party
that Indemnitee would not be permitted to be indemnified under applicable law
shall not be binding and Indemnitee shall not be required to reimburse the
Company for any Expense Advance until a final judicial determination is made
with respect thereto (as to which all rights of appeal therefrom have been
exhausted or lapsed). Indemnitee's obligation to reimburse the Company for any
Expense Advance shall be unsecured and no interest shall be charged thereon. If
there has not been a Change in Control (as defined in Section 10(c) hereof), the
Reviewing Party shall be selected by the Board of Directors, and if there has
been such a Change in Control (other than a Change in Control which has been
approved by a majority of the Company's Board of Directors who were directors
immediately prior to such Change in Control), the Reviewing Party shall be the
Independent Legal Counsel referred to in Section 1(c) hereof. If there has been
no determination by the Reviewing Party or if



                                       2
<PAGE>   3
the Reviewing Party determines that Indemnitee substantively would not be
permitted to be indemnified in whole or in part under applicable law, Indemnitee
shall have the right to commence litigation seeking an initial determination by
the court or challenging any such determination by the Reviewing Party or any
aspect thereof, including the legal or factual bases therefor, and the Company
hereby consents to service of process and to appear in any such proceeding. Any
determination by the Reviewing Party otherwise shall be conclusive and binding
on the Company and Indemnitee.

            (c)   Change in Control. The Company agrees that if there is a
Change in Control of the Company (other than a Change in Control which has been
approved by a majority of the Company's Board of Directors who were directors
immediately prior to such Change in Control) then, with respect to all matters
thereafter arising concerning the rights of Indemnitee to payments of Expenses
and Expense Advances under this Agreement or any other agreement or under the
Company's Certificate of Incorporation or Bylaws as now or hereafter in effect,
Independent Legal Counsel (as defined in Section 10(d) hereof) shall be selected
by Indemnitee and approved by the Company (which approval shall not be
unreasonably withheld). Such counsel, among other things, shall render its
written opinion to the Company and Indemnitee as to whether and to what extent
Indemnitee would be permitted to be indemnified under applicable law and the
Company agrees to abide by such opinion. The Company agrees to pay the
reasonable fees of the Independent Legal Counsel referred to above and to fully
indemnify such counsel against any and all expenses (including attorneys' fees),
claims, liabilities and damages arising out of or relating to this Agreement or
its engagement pursuant hereto.

            (d)   Mandatory Payment of Expenses. Notwithstanding any other
provision of this Agreement other than Section 9 hereof, to the extent that
Indemnitee has been successful on the merits or otherwise, including, without
limitation, the dismissal of an action without prejudice, in defense of any
action, suit, proceeding, inquiry or investigation referred to in Section (1)(a)
hereof or in the defense of any claim, issue or matter therein, Indemnitee shall
be indemnified against all Expenses incurred by Indemnitee in connection
therewith.

      2.    Expenses; Indemnification Procedure.

            (a)   Advancement of Expenses. The Company shall advance all
Expenses incurred by Indemnitee. The advances to be made hereunder shall be paid
by the Company to Indemnitee as soon as practicable but in any event no later
than five days after written demand by Indemnitee therefor to the Company.

            (b)   Notice/Cooperation by Indemnitee. Indemnitee shall, as a
condition precedent to Indemnitee's right to be indemnified under this
Agreement, give the Company notice in writing as soon as practicable of any
Claim made against Indemnitee for which indemnification will or could be sought
under this Agreement. Notice to the Company shall be directed to the Chief
Executive Officer of the Company at the address shown on the signature page of
this Agreement (or such other address as the Company shall designate



                                       3
<PAGE>   4
in writing to Indemnitee). In addition, Indemnitee shall give the Company such
information and cooperation as it may reasonably require and as shall be within
Indemnitee's power.

            (c)   No Presumptions; Burden of Proof. For purposes of this
Agreement, the termination of any Claim by judgment, order, settlement (whether
with or without court approval) or conviction, or upon a plea of nolo
contendere, or its equivalent, shall not create a presumption that Indemnitee
did not meet any particular standard of conduct or have any particular belief or
that a court has determined that indemnification is not permitted by applicable
law. In addition, neither the failure of the Reviewing Party to have made a
determination as to whether Indemnitee has met any particular standard of
conduct or had any particular belief, nor an actual determination by the
Reviewing Party that Indemnitee has not met such standard of conduct or did not
have such belief, prior to the commencement of legal proceedings by Indemnitee
to secure a judicial determination that Indemnitee should be indemnified under
applicable law, shall be a defense to Indemnitee's claim or create a presumption
that Indemnitee has not met any particular standard of conduct or did not have
any particular belief. In connection with any determination by the Reviewing
Party or otherwise as to whether Indemnitee is entitled to be indemnified
hereunder, the burden of proof shall be on the Company to establish that
Indemnitee is not so entitled.

            (d)   Notice to Insurers. If, at the time of the receipt by the
Company of a notice of a Claim pursuant to Section 2(b) hereof, the Company has
liability insurance in effect which may cover such Claim, the Company shall give
prompt notice of the commencement of such Claim to the insurers in accordance
with the procedures set forth in the respective policies. The Company shall
thereafter take all necessary or desirable action to cause such insurers to pay,
on behalf of Indemnitee, all amounts payable as a result of such action, suit,
proceeding, inquiry or investigation in accordance with the terms of such
policies.

            (e)   Selection of Counsel. In the event the Company shall be
obligated hereunder to pay the Expenses of any Claim, the Company, if
appropriate, shall be entitled to assume the defense of such Claim with counsel
approved by Indemnitee, upon the delivery to Indemnitee of written notice of its
election so to do. After delivery of such notice, approval of such counsel by
Indemnitee and the retention of such counsel by the Company, the Company will
not be liable to Indemnitee under this Agreement for any fees of counsel
subsequently incurred by Indemnitee with respect to the same Claim; provided
that, (i) Indemnitee shall have the right to employ Indemnitee's counsel in any
such Claim at Indemnitee's expense and (ii) if (A) the employment of counsel by
Indemnitee has been previously authorized by the Company, (B) Indemnitee shall
have reasonably concluded that there may be a conflict of interest between the
Company and Indemnitee in the conduct of any such defense, or (C) the Company
shall not continue to retain such counsel to defend such Claim, then the fees
and expenses of Indemnitee's counsel shall be at the expense of the Company.

      3.    Additional Indemnification Rights; Nonexclusivity.



                                       4
<PAGE>   5
            (a)   Scope. The Company hereby agrees to indemnify Indemnitee to
the fullest extent permitted by law, notwithstanding that such indemnification
is not specifically authorized by the other provisions of this Agreement, the
Company's Certificate of Incorporation, the Company's Bylaws or by statute. In
the event of any change after the date of this Agreement in any applicable law,
statute or rule which expands the right of a Delaware corporation to indemnify a
member of its Board of Directors or an officer, employee, agent or fiduciary, it
is the intent of the parties hereto that Indemnitee shall enjoy by this
Agreement the greater benefits afforded by such change. In the event of any
change in any applicable law, statute or rule which narrows the right of a
Delaware corporation to indemnify a member of its Board of Directors or an
officer, employee, agent or fiduciary, such change, to the extent not otherwise
required by such law, statute or rule to be applied to this Agreement, shall
have no effect on this Agreement or the parties' rights and obligations
hereunder except as set forth in Section 8(a) hereof.

            (b)   Nonexclusivity. The indemnification provided by this Agreement
shall be in addition to any rights to which Indemnitee may be entitled under the
Company's Certificate of Incorporation, its Bylaws, any agreement, any vote of
Shareholders or disinterested directors, the General Corporation Law of the
State of Delaware, or otherwise. The indemnification provided under this
Agreement shall continue as to Indemnitee for any action taken or not taken
while serving in an indemnified capacity even though Indemnitee may have ceased
to serve in such capacity.

      4.    No Duplication of Payments. The Company shall not be liable under
this Agreement to make any payment in connection with any Claim made against
Indemnitee to the extent Indemnitee has otherwise actually received payment
(under any insurance policy, Certificate of Incorporation, Bylaw or otherwise)
of the amounts otherwise indemnifiable hereunder.

      5.    Partial Indemnification. If Indemnitee is entitled under any
provision of this Agreement to indemnification by the Company for some or a
portion of Expenses incurred in connection with any Claim, but not, however, for
all of the total amount thereof, the Company shall nevertheless indemnify
Indemnitee for the portion of such Expenses to which Indemnitee is entitled.

      6.    Mutual Acknowledgment. Both the Company and Indemnitee acknowledge
that in certain instances, Federal law or applicable public policy may prohibit
the Company from indemnifying its directors, officers, employees, agents or
fiduciaries under this Agreement or otherwise. Indemnitee understands and
acknowledges that the Company has undertaken or may be required in the future to
undertake with the Securities and Exchange Commission to submit the question of
indemnification to a court in certain circumstances for a determination of the
Company's right under public policy to indemnify Indemnitee.

      7.    Liability Insurance. To the extent the Company maintains liability
insurance applicable to directors, officers, employees, agents or fiduciaries,
Indemnitee shall be covered by such policies in such a manner as to provide
Indemnitee the same rights and 



                                       5
<PAGE>   6
benefits as are accorded to the most favorably insured of the Company's
directors, if Indemnitee is a director; or of the Company's officers, if
Indemnitee is not a director of the Company but is an officer; or of the
Company's key employees, agents or fiduciaries, if Indemnitee is not an officer
or director but is a key employee, agent or fiduciary.

      8.    Exceptions. Any other provision herein to the contrary
notwithstanding, the Company shall not be obligated pursuant to the terms of
this Agreement:

            (a)   Excluded Action or Omissions. To indemnify Indemnitee for
acts, omissions or transactions from which Indemnitee may not be relieved of
liability under applicable law;

            (b)   Claims Initiated by Indemnitee. To indemnify or advance
expenses to Indemnitee with respect to Claims initiated or brought voluntarily
by Indemnitee and not by way of defense, except (i) with respect to actions or
proceedings brought to establish or enforce a right to indemnification under
this Agreement or any other agreement or insurance policy or under the Company's
Certificate of Incorporation or Bylaws now or hereafter in effect relating to
Claims for Indemnifiable Events, (ii) in specific cases if the Board of
Directors has approved the initiation or bringing of such Claim, or (iii) as
otherwise required under Section 145 of the Delaware General Corporation Law,
regardless of whether Indemnitee ultimately is determined to be entitled to such
indemnification, advance expense payment or insurance recovery, as the case may
be;

            (c)   Lack of Good Faith. To indemnify Indemnitee for any expenses
incurred by Indemnitee with respect to any proceeding instituted by Indemnitee
to enforce or interpret this Agreement, if a court of competent jurisdiction
determines that each of the material assertions made by Indemnitee in such
proceeding was not made in good faith or was frivolous; or

            (d)   Claims Under Section 16(b). To indemnify Indemnitee for
expenses and the payment of profits arising from the purchase and sale by
Indemnitee of securities in violation of Section 16(b) of the Securities
Exchange Act of 1934, as amended, or any similar successor statute.

      9.    Period of Limitations. No legal action shall be brought and no cause
of action shall be asserted by or in the right of the Company against
Indemnitee, Indemnitee's estate, spouse, heirs, executors or personal or legal
representatives after the expiration of two years from the date of accrual of
such cause of action, and any claim or cause of action of the Company shall be
extinguished and deemed released unless asserted by the timely filing of a legal
action within such two-year period; provided, however, that if any shorter
period of limitations is otherwise applicable to any such cause of action, such
shorter period shall govern.



                                       6
<PAGE>   7
      10.   Construction of Certain Phrases.

            (a)   For purposes of this Agreement, references to the "Company"
shall include, in addition to the resulting corporation, any constituent
corporation (including any constituent of a constituent) absorbed in a
consolidation or merger which, if its separate existence had continued, would
have had power and authority to indemnify its directors, officers, employees,
agents or fiduciaries, so that if Indemnitee is or was a director, officer,
employee, agent or fiduciary of such constituent corporation, or is or was
serving at the request of such constituent corporation as a director, officer,
employee, agent or fiduciary of another corporation, partnership, joint venture,
employee benefit plan, trust or other enterprise, Indemnitee shall stand in the
same position under the provisions of this Agreement with respect to the
resulting or surviving corporation as Indemnitee would have with respect to such
constituent corporation if its separate existence had continued.

            (b)   For purposes of this Agreement, references to "other
enterprises" shall include employee benefit plans; references to "fines" shall
include any excise taxes assessed on Indemnitee with respect to an employee
benefit plan; and references to "serving at the request of the Company" shall
include any service as a director, officer, employee, agent or fiduciary of the
Company which imposes duties on, or involves services by, such director,
officer, employee, agent or fiduciary with respect to an employee benefit plan,
its participants or its beneficiaries; and if Indemnitee acted in good faith and
in a manner Indemnitee reasonably believed to be in the interest of the
participants and beneficiaries of an employee benefit plan, Indemnitee shall be
deemed to have acted in a manner "not opposed to the best interests of the
Company" as referred to in this Agreement.

            (c)   For purposes of this Agreement a "Change in Control" shall be
deemed to have occurred if (i) any "person" (as such term is used in Sections
13(d) and 14(d) of the Securities Exchange Act of 1934, as amended), other than
a trustee or other fiduciary holding securities under an employee benefit plan
of the Company or a corporation owned directly or indirectly by the Shareholders
of the Company in substantially the same proportions as their ownership of stock
of the Company, (A) who is or becomes the beneficial owner, directly or
indirectly, of securities of the Company representing 10% or more of the
combined voting power of the Company's then outstanding Voting Securities,
increases his beneficial ownership of such securities by 5% or more over the
percentage so owned by such person, or (B) becomes the "beneficial owner" (as
defined in Rule 13d-3 under said Act), directly or indirectly, of securities of
the Company representing more than 20% of the total voting power represented by
the Company's then outstanding Voting Securities, (ii) during any period of two
consecutive years, individuals who at the beginning of such period constitute
the Board of Directors of the Company and any new director whose election by the
Board of Directors or nomination for election by the Company's Shareholders was
approved by a vote of at least two-thirds of the directors then still in office
who either were directors at the beginning of the period or whose election or
nomination for election was previously so approved, cease for any reason to
constitute a majority thereof, or (iii) the Shareholders of the Company approve



                                       7
<PAGE>   8
a merger or consolidation of the Company with any other corporation other than a
merger or consolidation which would result in the Voting Securities of the
Company outstanding immediately prior thereto continuing to represent (either by
remaining outstanding or by being converted into Voting Securities of the
surviving entity) at least 80% of the total voting power represented by the
Voting Securities of the Company or such surviving entity outstanding
immediately after such merger or consolidation, or the Shareholders of the
Company approve a plan of complete liquidation of the Company or an agreement
for the sale or disposition by the Company of (in one transaction or a series of
transactions) all or substantially all of the Company's assets.

            (d)   For purposes of this Agreement, "Independent Legal Counsel"
shall mean an attorney or firm of attorneys, selected in accordance with the
provisions of Section 1(c) hereof, who shall not have otherwise performed
services for the Company or Indemnitee within the last three years (other than
with respect to matters concerning the rights of Indemnitee under this
Agreement, or of other indemnitees under similar indemnity agreements).

            (e)   For purposes of this Agreement, a "Reviewing Party" shall mean
any appropriate person or body consisting of a member or members of the
Company's Board of Directors or any other person or body appointed by the Board
of Directors who is not a party to the particular Claim for which Indemnitee is
seeking indemnification, or Independent Legal Counsel.

            (f)   For purposes of this Agreement, "Voting Securities" shall mean
any securities of the Company that vote generally in the election of directors.

      11.   Counterparts. This Agreement may be executed in one or more
counterparts, each of which shall constitute an original.

      12.   Binding Effect; Successors and Assigns. This Agreement shall be
binding upon and inure to the benefit of and be enforceable by the parties
hereto and their respective successors, assigns, including any direct or
indirect successor by purchase, merger, consolidation or otherwise to all or
substantially all of the business and/or assets of the Company, spouses, heirs,
and personal and legal representatives. The Company shall require and cause any
successor (whether direct or indirect by purchase, merger, consolidation or
otherwise) to all, substantially all, or a substantial part, of the business
and/or assets of the Company, by written agreement in form and substance
satisfactory to Indemnitee, expressly to assume and agree to perform this
Agreement in the same manner and to the same extent that the Company would be
required to perform if no such succession had taken place. This Agreement shall
continue in effect regardless of whether Indemnitee continues to serve as a
director, officer, employee, agent or fiduciary of the Company or of any other
enterprise at the Company's request.

      13.   Attorneys' Fees. In the event that any action is instituted by
Indemnitee under this Agreement or under any liability insurance policies
maintained by the Company 



                                       8
<PAGE>   9
to enforce or interpret any of the terms hereof or thereof, Indemnitee shall be
entitled to be paid all Expenses incurred by Indemnitee with respect to such
action, regardless of whether Indemnitee is ultimately successful in such
action, and shall be entitled to the advancement of Expenses with respect to
such action, unless, as a part of such action, a court of competent jurisdiction
over such action determines that each of the material assertions made by
Indemnitee as a basis for such action was not made in good faith or was
frivolous. In the event of an action instituted by or in the name of the Company
under this Agreement to enforce or interpret any of the terms of this Agreement,
Indemnitee shall be entitled to be paid all Expenses incurred by Indemnitee in
defense of such action (including costs and expenses incurred with respect to
Indemnitee's counterclaims and cross-claims made in such action), and shall be
entitled to the advancement of Expenses with respect to such action, unless, as
a part of such action, a court having jurisdiction over such action determines
that each of Indemnitee's material defenses to such action was made in bad faith
or was frivolous.

      14.   Notice. All notices and other communications required or permitted
hereunder shall be in writing, shall be effective when given, and shall in any
event be deemed to be given (a) five (5) days after deposit with the U.S. Postal
Service or other applicable postal service, if delivered by first class mail,
postage prepaid, (b) upon delivery, if delivered by hand, (c) one business day
after the business day of deposit with Federal Express or similar overnight
courier, freight prepaid, or (d) one day after the business day of delivery by
facsimile transmission, if delivered by facsimile transmission with copy by
first class mail, postage prepaid, and shall be addressed if to the Indemnitee,
at the Indemnitee's address as set forth beneath his signature to this Agreement
and if to the Company at the address of its principal corporate offices
(attention: General Counsel) or at such other address as such party may
designate by ten days' advance written notice to the other party hereto.

      15.   Consent to Jurisdiction. The Company and Indemnitee each hereby
irrevocably consent to the jurisdiction of the courts of the State of Delaware
for all purposes in connection with any action or proceeding which arises out of
or relates to this Agreement and agree that any action instituted under this
Agreement shall be commenced, prosecuted and continued only in the Court of
Chancery of the State of Delaware in and for New Castle County, which shall be
the exclusive and only proper forum for adjudicating such a claim.

      16.   Severability. The provisions of this Agreement shall be severable in
the event that any of the provisions hereof (including any provision within a
single section, paragraph or sentence) are held by a court of competent
jurisdiction to be invalid, void or otherwise unenforceable, and the remaining
provisions shall remain enforceable to the fullest extent permitted by law.
Furthermore, to the fullest extent possible, the provisions of this Agreement
(including, without limitations, each portion of this Agreement containing any
provision held to be invalid, void or otherwise unenforceable, that is not
itself invalid, void or unenforceable) shall be construed so as to give effect
to the intent manifested by the provision held invalid, illegal or
unenforceable.



                                       9
<PAGE>   10
      17.   Choice of Law. This Agreement shall be governed by and its
provisions construed and enforced in accordance with the laws of the State of
Delaware, as applied to contracts between Delaware residents, entered into and
to be performed entirely within the State of Delaware, without regard to the
conflict of laws principles thereof.

      18.   Subrogation. In the event of payment under this Agreement, the
Company shall be subrogated to the extent of such payment to all of the rights
of recovery of Indemnitee, who shall execute all documents required and shall do
all acts that may be necessary to secure such rights and to enable the Company
effectively to bring suit to enforce such rights.

      19.   Amendment and Termination. No amendment, modification, termination
or cancellation of this Agreement shall be effective unless it is in writing
signed by both the parties hereto. No waiver of any of the provisions of this
Agreement shall be deemed or shall constitute a waiver of any other provisions
hereof (whether or not similar) nor shall such waiver constitute a continuing
waiver.

      20.   Integration and Entire Agreement. This Agreement sets forth the
entire understanding between the parties hereto and supersedes and merges all
previous written and oral negotiations, commitments, understandings and
agreements relating to the subject matter hereof between the parties hereto.

      21.   No Construction as Employment Agreement. Nothing contained in this
Agreement shall be construed as giving Indemnitee any right to be retained in
the employ of the Company or any of its subsidiaries.

IN WITNESS WHEREOF, the parties hereto have executed this Agreement as of the
date first above written.

KLA-TENCOR CORPORATION                 INDEMNITEE

BY:________________________________    By:______________________________

NAME:______________________________    Name:____________________________

TITLE:_____________________________



                                       10

<PAGE>   1

Management's Discussion and Analysis of Financial Condition and Results of
Operations

MERGER
On April 30, 1997, Tencor merged into a wholly-owned subsidiary of KLA using the
pooling-of-interests method of accounting. Each outstanding share of Tencor was
exchanged for one share of KLA and KLA changed its name to KLA-Tencor
Corporation (the Company). All financial data of the Company included herein
reflects the combination of the historical financial information of both KLA and
Tencor.

RESULTS OF OPERATIONS
As the Company began fiscal year 1997, semiconductor manufacturers were
reassessing their spending plans because of the sharp drop in prices for memory
devices. This change in market conditions caught them by surprise and resulted
in the postponement of many new memory fabrication facilities. Even though
prices for logic and microprocessors were not as affected, these manufacturers
postponed many expansion projects while they assessed the market. By the
December quarter, it became more clear that the memory price drop was not an
overall demand problem but a memory oversupply issue. New order levels reflected
these conditions and were quite low in the September quarter but began to
recover by December. Thus, many logic and microprocessor customers cautiously
began to resume their planned expansions. During the March and June quarters
these expansion plans accelerated and new orders for the Company reached record
levels by June. The market for logic, microprocessor, and foundry fabs continues
to be healthy while memory fab construction remains limited primarily to pilot
plants for next generation memories. The Company responded quickly to these
market changes and reduced spending and reduced shipment levels. Shipments
bottomed in December and grew gradually as the new order rate recovered.

The Company's operating results benefited from the demand for process control
equipment from previously constructed fabs which have not yet been outfitted
with a full complement of process monitoring equipment. Thus the Company's
results of operations were not affected as severely as many other semiconductor
equipment companies and this demand from older facilities has helped the Company
to recover faster.

REVENUES AND GROSS MARGINS
Aggregate revenues reflected the trends described above. Particular strength
came from several new product divisions which are either inventing new markets
or gaining share with new technologies in established markets. New markets were
addressed by the SEMSpec division, which markets a $7 million defect inspection
tool using a scanning electron beam, and by the Yield Management Group's new
Automatic Defect Classification product. Both these divisions experienced
significant new revenues during the year. Additionally, share of market
increases resulted in higher revenues for the CD SEM Metrology division (model
8100).

Gross margins decreased to 54.3% in 1997 from 57.1% in 1996. The decrease during
the period was due primarily to increased warranty and installation costs
related to new product introductions and to an increase in infrastructure costs
for the Company's Customer Service Group. Gross margin increased slightly to
57.1% in 1996 from 57.0% in 1995 on higher system product margins offset by
lower service margins. The Company anticipates that gross margin will increase
modestly in 1998.

RESEARCH AND DEVELOPMENT
Research and development (R&D) expenses were $134 million, $116 million and $74
million, or 13.0%, 10.6% and 10.6% of revenues in 1997, 1996 and 1995,
respectively. The Company has identified a large number of process monitoring
and yield management opportunities and has initiated new development programs in
these new market segments. As a result, the Company's spending on development
programs in 1997 rose as a percent of revenues and the Company expects R&D
spending to increase in absolute dollars in 1998.

SELLING, GENERAL AND ADMINISTRATIVE
Selling, general and administrative (SG&A) expenses were $219 million, $213
million and $141 million, or 21.3%, 19.4% and 20.2% of revenues, in 1997, 1996
and 1995, respectively.

The increase in absolute dollars in 1997 compared to 1996 can be attributed in
part to increases in expenses resulting from the significant efforts involved
with enhancements to the Company's information systems infrastructure. In 1996,
compared to 1995, SG&A expenses increased in relation

<PAGE>   2

to the increased revenues. The Company anticipates that SG&A expenses will
increase in absolute dollars in 1998.

MERGER AND RESTRUCTURING COSTS
The Company recorded charges totaling $60.6 million for merger, restructuring
and other non-recurring events which occurred during the year ended June 30,
1997. During the quarter ended June 30, 1997, the Company recorded a pre-tax
charge of $52.1 million for merger, restructuring and other costs. This charge
included direct merger costs of $19.4 million for professional fees and other
transaction costs associated with the merger, $4.2 million for severance related
costs, $13.5 million for non-cash write-offs of certain property, equipment and
other assets, $2.6 million for the elimination and/or relocation of duplicate
sales and service facilities worldwide and $6.3 million of merger related
consulting services and other costs providing no expected future benefit to the
Company. Approximately $22 million of the original charge remained in accrued
liabilities as of June 30, 1997 and is expected to be utilized within the next
twelve months. In addition, the Company incurred a pre-tax charge of $6.1
million as a result of the write-off of a bad debt for shipments made to a
Thailand company in fiscal 1997.

During the quarter ended September 30, 1996, the Company recorded a charge for
Tencor restructuring costs of $8.5 million. This charge consisted of $2.0
million of employee severance and related costs and $6.5 million of lease exit
costs associated with the abandonment of certain of Tencor's leased facilities.

OTHER INCOME, NET
Other income, net consisted primarily of interest income on investments less
interest expense on bank borrowings. Also included were foreign currency gains
and losses, and certain royalties.

PROVISION FOR INCOME TAXES
The provision for income taxes on the Company's pretax income was 39.4%, 37.4%
and 37.2% in 1997, 1996 and 1995, respectively. The Company's effective tax rate
in- creased from 1996 to 1997 primarily as a result of certain merger related
costs that were not tax deductible.

OTHER ACQUISITION COSTS
In 1995, the Company acquired Metrologix Inc., a manufacturer of advanced
electron beam measurement equipment. A significant portion of the acquisition
cost was allocated to acquired in- process technology which was written-off at
the time of the acquisition, because substantial research and development
investment was necessary to complete the new product development then underway.
This resulted in a pre-tax charge of $25 million.

LIQUIDITY AND CAPITAL RESOURCES
The Company has financed its growth primarily through cash flow from operations.
Cash flow from operations was $236 million in 1997 due to net income
(which includes non-cash charges for depreciation), and to declines in accounts
receivable and inventory balances year over year. The decrease in accounts
receivable during fiscal 1997 is due primarily to improved collections and as a
result of a factoring agreement to sell certain trade receivables.

Capital expenditures for each of the fiscal years 1997 and 1996 were
approximately $60 million, consisting primarily of computers, manufacturing
equipment and cleanrooms. The Company expects capital expenditures in 1998 to be
at levels approximating those of 1997.

At June 30, 1997, the Company's principal sources of liquidity consisted of $349
million in cash, cash equivalents and short-term investments, and $338 million
in marketable securities classified as long-term. The Company believes that the
existing
<PAGE>   3

cash balances and short-term investments, along with cash generated from
operations, will be sufficient to meet the Company's working capital
requirements through 1998.

OTHER FACTORS AFFECTING COMPANY RESULTS
The Company will continue to invest during fiscal 1998 in expanding its sales
and service operations worldwide. The achievement of continued sales and
earnings growth will depend, in part, on the success of the merger between KLA
and Tencor. There can be no assurance that products, technologies, distribution
channels and key personnel will be effectively assimilated into the Company's
business, or that such integration may will not adversely affect the Company's
business, financial condition or results of operations.

As a participant in the semiconductor industry, the Company operates in a
technologically advanced, highly competitive environment. In addition, the
Company depends in large part on the capital expenditures of semiconductor
manufacturers worldwide, which in turn depend on the current and anticipated
market demand for integrated circuits and products utilizing integrated
circuits. The semiconductor industry has historically been highly cyclical and
has experienced periodic downturns, which have had an adverse effect on the
level of capital expenditures. While the Company cannot predict what effect
these various factors will have on operating results, the effect of these and
other factors could significantly affect the Company's future operating results
and stock market value.

The Company, from time to time, has experienced, and expects to continue to
experience, significant fluctuations in its results of operations, particularly
on a quarterly basis. The Company's expense levels are based, in part, on
expectations of future revenues. If revenue levels in a particular period do not
meet expectations, operating results will be adversely affected. A variety of
factors have an influence on the Company's operating results in a particular
period. These factors primarily include economic conditions in the semiconductor
industry, the timing of the receipt of orders from major customers, customer
cancellations or delays of shipments, the Company's ability to design, introduce
and manufacture new products on a cost effective and timely basis, specific
feature requests by customers, production delays or manufacturing
inefficiencies.

EFFECTS OF RECENT ACCOUNTING PRONOUNCEMENTS
In February 1997, The Financial Accounting Standards Board issued Statement No.
128, "Earnings per Share," which is required to be adopted in the Company's
fiscal quarter ending December 31, 1997. See Note 2 of Notes to Consolidated
Financial Statements for the effect of Statement No. 128.

MARKET RISK DISCLOSURE
At the end of fiscal 1997, the Company had an investment portfolio of fixed
income securities, excluding those classified as cash and cash equivalents, of
$408 million (see Note 6 of Notes to Consolidated Financial Statements). These
securities, like all fixed income instruments, are subject to interest rate risk
and will fall in value if market interest rates increase. If market interest
rates were to increase immediately and uniformly by 10% from levels as of June
30, 1997, the fair value of the portfolio would decline by approximately $5.5
million. However, the Company has the ability to hold its fixed income
investments until maturity, and therefore the Company would not expect to
recognize such an adverse impact in income or cash flows.


Other than statements of historical fact, statements made in this Annual Report
include forward looking statements, such as statements with respect to the
Company's future financial performance, operating results, plans and objectives.
Actual results may differ materially from those currently anticipated depending
on a variety of risk factors some of which are set forth in "Other Factors
Affecting Company Results" above.



<PAGE>   4


KLA-Tencor CONSOLIDATED BALANCE SHEETS


<TABLE>
<CAPTION>
                                                                          June 30,
                                                                    1996           1997
                                                                -----------    -----------
In thousands, except per share data
<S>                                                             <C>            <C>        
ASSETS

Current assets:
         Cash and cash equivalents                              $   201,704    $   279,225
         Short-term investments                                     108,291         69,606
         Accounts receivable, net                                   310,077        269,291
         Inventories                                                197,803        174,634
         Deferred income taxes                                       41,081         54,799
         Other current assets                                        10,753         12,452
             Total current assets                                   869,709        860,007


Land, property and equipment, net                                   104,837        117,595
Marketable securities                                               158,480        338,418
Other assets                                                         24,893         27,287
            Total assets                                        $ 1,157,919    $ 1,343,307



LIABILITIES AND STOCKHOLDERS' EQUITY

Current liabilities:
         Notes payable                                          $    35,825    $    25,113
         Accounts payable                                            44,818         41,155
         Other current liabilities                                  197,669        258,483
             Total current liabilities                              278,312        324,751

Deferred income taxes and other                                       8,608          3,943

Commitments and contingencies (Note 4)

Stockholders' equity:
         Common stock, $0.001 par value, 250,000 authorized,
             81,746 and  83,759 shares issued and outstanding            82             84
         Capital in excess of par value                             426,348        458,224
         Retained earnings                                          437,310        542,706
         Net unrealized gain on investments                           9,203         17,591
         Cumulative translation adjustment                           (1,944)        (3,992)
             Total stockholders' equity                             870,999      1,014,613
             Total liabilities and stockholders' equity         $ 1,157,919    $ 1,343,307
</TABLE>




See accompanying notes to consolidated financial statements.


<PAGE>   5


KLA-Tencor CONSOLIDATED STATEMENTS OF INCOME


<TABLE>
<CAPTION>
Year ended June 30,                                        1995          1996         1997
                                                        ----------   ----------   ----------
In thousands, except per share data
<S>                                                    <C>          <C>          <C>
Revenues                                                $  695,950   $1,094,492   $1,031,824

Costs and operating expenses:
         Cost of goods sold                                299,571      469,681      471,910
         Engineering, research and development              73,945      115,920      134,105
         Selling, general and administrative               140,585      212,625      219,425
         Merger/restructuring and other charges             25,240         --         60,552
             Total costs and operating expenses            539,341      798,226      885,992

Income from operations                                     156,609      296,266      145,832
Interest income and other, net                              10,417       17,834       28,147

Income before income taxes                                 167,026      314,100      173,979

Provision for income taxes                                  62,215      117,466       68,583

Net income                                              $  104,811   $  196,634   $  105,396


Net income per share                                    $     1.34   $     2.34   $     1.24
Weighted average common shares
         and equivalents                                    78,427       84,195       85,203
</TABLE>




See accompanying notes to consolidated financial statements.
<PAGE>   6

KLA-Tencor CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY


<TABLE>
<CAPTION>
                                                                Common Stock and                  Net     Cumulative
                                                         Capital in Excess of Par Value        Retained    Unrealized   Translation
                                                         Shares      Amount      Earnings         Gain     Adjustment      Totals
                                                         ------      ------      --------         ----     ----------      ------
In thousands
<S>                                                     <C>      <C>           <C>                <C>      <C>         <C>
Balances at June 30, 1994                                69,178   $   170,645   $   135,865       $ --      $   823     $   307,333
         Net issuance under employee stock plans          2,846        14,490          --           --           --          14,490
         Equity offering, net of offering costs           7,796       195,019          --           --           --         195,019
         Release of escrowed shares                         572         3,396          --           --           --           3,396
         Tax benefits of stock option transactions         --          23,260          --           --           --          23,260
         Cumulative translation adjustment                 --            --            --           --          2,672         2,672
         Unrealized gain on investments, net               --            --            --          1,241         --           1,241
         Net income                                        --            --         104,811         --           --         104,811
Balances at June 30, 1995                                80,392       406,810       240,676        1,241        3,495       652,222

         Net issuance under employee stock plans          1,604        15,298          --           --           --          15,298
         Repurchase of common stock                        (250)       (5,456)         --           --           --          (5,456)
         Tax benefits of stock option transactions         --           9,778          --           --           --           9,778
         Cumulative translation adjustment                 --            --            --           --         (5,439)       (5,439)
         Unrealized gain on investments, net               --            --            --          7,962         --           7,962
         Net income                                        --            --         196,634         --           --         196,634
Balances at June 30, 1996                                81,746       426,430       437,310        9,203       (1,944)      870,999

         Net issuance under employee stock plans          2,013        22,235          --           --           --          22,235
         Tax benefits of stock option transactions         --           9,643          --           --           --           9,643
         Cumulative translation adjustment                 --            --            --           --         (2,048)       (2,048)
         Unrealized gain on investments, net               --            --            --          8,388         --           8,388
         Net income                                        --            --         105,396         --           --         105,396
Balances at June 30, 1997                                83,759   $   458,308   $   542,706  $    17,591  $    (3,992)  $ 1,014,613
</TABLE>




See accompanying notes to consolidated financial statements.

<PAGE>   7
KLA-TENCOR CONSOLIDATED STATEMENTS OF CASH FLOWS


<TABLE>
<CAPTION>
                                                                                   Year ended June 30,       
                                                                             1995        1996        1997
                                                                          ---------   ---------   ---------
In thousands
<S>                                                                      <C>         <C>         <C>
Cash flows from operating activities:
         Net income                                                       $ 104,811   $ 196,634   $ 105,396
         Adjustments to reconcile net income to net
             cash provided by (used in) operating activities:
                 Depreciation and amortization                               15,014      24,967      52,340
                 Write-off of acquired in-process technology                 16,154        --          --
                 Deferred income taxes                                      (14,140)    (19,611)    (19,226)
                 Changes in assets and liabilities:
                          Accounts receivable, net                         (110,691)    (96,586)     34,859
                           Inventories                                      (37,311)    (86,538)     21,307
                           Other assets                                     (18,696)      3,815     (11,817)
                           Accounts payable                                  10,318      15,921      (3,580)
                           Accrued compensation                               6,055       9,669      11,669
                           Other accrued expenses                            31,878      47,669      30,084
                           Income taxes payable                              14,196      15,329      15,300
                               Net cash provided by operating activities     17,588     111,269     236,332
Cash flows from investing activities:
         Purchase of property and equipment                                 (29,970)    (64,589)    (56,793)
         Purchases of available for sale securities                        (429,519)   (509,262)   (997,283)
         Proceeds from available for sale securities                        211,326     484,060     870,391
         Long-term equity investment                                        (14,182)       --          --
                               Net cash used in investing activities       (262,345)    (89,791)   (183,685)
Cash flows from financing activities:
         Issuance of common stock, net                                       41,146      25,076      31,878
         Proceeds from equity offerings, net                                195,019        --          --
         Stock repurchases                                                     --        (5,456)       --
         Payments under debt obligations                                     (1,921)    (39,277)    (42,490)
         Borrowings under debt obligations                                    2,978      45,177      35,738
                               Net cash provided by financing activities    237,222      25,520      25,126
Effect of exchange rate changes on cash and cash equivalents                 (1,163)      2,586        (252)
Net increase in cash and cash equivalents                                    (8,698)     49,584      77,521
Cash and cash equivalents at beginning of period                            160,818     152,120     201,704
Cash and cash equivalents at end of period                                $ 152,120   $ 201,704   $ 279,225


Supplemental cash flow disclosures:
         Income taxes paid                                                $  53,592   $ 108,196   $  68,430
         Interest paid                                                    $   2,594   $   2,103   $   1,551
</TABLE>



See accompanying notes to consolidated financial statements.


<PAGE>   8
NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


NOTE 1 - BUSINESS COMBINATION AND BASIS OF PRESENTATION

Effective April 30, 1997 following the approval by stockholders, Tencor
Instruments (Tencor) merged into a wholly-owned subsidiary of KLA Instruments
(KLA) using the pooling-of-interests method of accounting.  Each outstanding
share of Tencor common stock was exchanged for one share of KLA common stock
and the Company changed its name to KLA-Tencor Corporation (the Company).  A
total of 31.9 million shares of common stock were issued.  All financial data
of the Company included herein reflects the combination of the historical
financial information of both KLA and Tencor. The Consolidated Financial
Statements and other financial information presented as of June 30, 1996 and
1997 and for the three years then ended, reflects the combination of KLA's and
Tencor's operations for those periods.

The following table shows revenues and net income of
the separate companies through the periods preceding
the business combination:

<TABLE>
<CAPTION>
                                              Year ended June 30,
                                     1995              1996              1997
                                  ----------        ----------        ----------
In thousands
<S>                              <C>               <C>               <C>
Revenues:
KLA                               $  442,416        $  694,867        $  473,586
Tencor                               253,534           399,625           282,055
KLA-Tencor                              --                --             276,183
Combined                          $  695,950        $1,094,492        $1,031,824


Net income:
KLA                               $   58,618        $  120,884        $   69,012
Tencor                                46,193            75,750            35,782
KLA-Tencor                              --                --                 602
Combined                          $  104,811        $  196,634        $  105,396
</TABLE>


NOTE 2 - SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Principles of Consolidation
The consolidated financial statements include the financial statements of the
Company and its wholly-owned subsidiaries. All significant intercompany
transactions and accounts have been eliminated. The Company has several foreign
subsidiaries. The functional currencies of the Company's significant foreign
subsidiaries are the local currencies. Accordingly, all assets and liabilities
of the foreign operations are translated to U.S. dollars at current exchange
rates, and revenues and expenses are translated to U.S. dollars using weighted
average exchange rates in effect during the period. The gains and losses from
foreign currency translation of these subsidiaries' financial statements are
recorded directly into a separate component of stockholders' equity under the
caption "cumulative translation adjustment." Foreign currency transaction gains
and losses have not been significant.

<PAGE>   9

Management Estimates
The preparation of financial statements in conformity with generally accepted
accounting principles requires management to make estimates and assumptions that
affect the reported amounts of assets and liabilities and disclosure of
contingent assets and liabilities at the date of the financial statements and
the reported amounts of revenues and expenses during the reporting period.
Actual results could differ from those estimates.

Cash Equivalents and Investments
Cash equivalents consist of highly liquid investments that are valued at
amortized cost, which approximates market value, and have original maturity
dates of three months or less from the date of acquisition. Investments in debt
and equity securities are classified as "available-for-sale" and have
maturities greater than three months from the date of acquisition. The Company
has classified all securities as available-for-sale, as the sale of such
securities may be required prior to maturity to implement management strategies.
Investments classified as available-for-sale are reported at fair value with
unrealized gains or losses excluded from earnings and reported as a separate
component of stockholders' equity, net of applicable taxes, until realized.

Revenue Recognition
The Company recognizes revenue when the product has been shipped and collection
of the resulting receivable is probable. A provision for the estimated costs of
fulfilling warranty and installation obligations is recorded at the time the
related revenue is recognized. Service and maintenance contract revenues are
deferred and recognized ratably over the period of the related contract.

Inventories
Inventories are stated at the lower of cost (on a first-in, first-out basis) or
market. Demonstration units are stated at their manufacturing costs and reserves
are recorded to state the demonstration units at their net realizable value.

Property and Equipment
Property and equipment are recorded at cost. Depreciation of property and
equipment is based on the straight-line method over the estimated useful lives
of the assets, which are 30 years for buildings, ten years for building
improvements, five to seven years for furniture and fixtures, and three to five
years for machinery and equipment. The life of the lease or the useful life,
whichever is shorter, is used for the amortization of leasehold improvements.

<PAGE>   10
Concentration of Credit Risk
Financial instruments which potentially subject the Company to credit risk
consist principally of investments, accounts receivable and financial
instruments used in hedging activities.

Investments are maintained with high quality institutions, the composition and
maturities of which are regularly monitored by management. Generally, these
securities are highly liquid and may be redeemed upon demand and, therefore,
bear minimal risk. The Company, by policy, limits the amount of credit exposure
to any one financial institution or commercial issuer. The Company has not
experienced any material losses on its investments.

A majority of the Company's trade receivables are derived from sales to large
multinational semiconductor manufacturers. Concentration of credit risk with
respect to trade receivables is considered to be limited due to its customer
base and the diversity of its geographic sales areas. The Company performs
ongoing credit evaluations of its customers' financial condition. The Company
maintains a provision for potential credit losses based upon expected
collectibility of all accounts receivable. The write-off of uncollectible
amounts other than the receivable from a Thailand company (see Note 5) has been
insignificant.

The Company is exposed to credit loss in the event of nonperformance by
counterparties on the foreign exchange contracts used in hedging activities. The
Company does not anticipate nonperformance by these counterparties.

Foreign Currency
The Company does not use derivative financial instruments for speculative or
trading purposes. The Company enters into foreign currency forward exchange
contracts to hedge against future movements in foreign exchange rates that
affect certain foreign currency denominated sales and purchase transactions. The
Company attempts to match the forward contracts with the underlying items being
hedged in terms of currency, amount and maturity. Because the impact of
movements in currency exchange rates on forward contracts offsets the related
impact on the exposures hedged, these financial instruments do not subject the
Company to speculative risk that would otherwise result from changes in currency
exchange rates. Realized gains and losses on forward exchange contracts are
included in other income, net, which offset foreign exchange gains or losses
from revaluation of foreign currency-denominated receivable and payable
balances. The cash flows related to gains and losses on these contracts are
classified in the same category as the hedged transactions in the Consolidated
Statements of Cash Flows.


At June 30, 1997, the Company had forward exchange contracts maturing throughout
fiscal 1998 and early fiscal 1999 to sell and purchase approximately $225.3
million and $9.6 million, respectively, in foreign currency, primarily Japanese
yen. At June 30, 1996, the Company had forward contracts maturing throughout
fiscal 1997 to sell and purchase approximately $161.6 million and $5.3 million,
respectively, in foreign currency, primarily Japanese yen. Of these forward
exchange contracts, approximately $83.0 million and $1.0 million of contracts
hedge foreign currency assets and liabilities, respectively, carried on the
balance sheet as of June 30, 1997, and consequently the financial statements
reflect the fair market value of the contracts and their underlying
transactions. Approximately $142.3 million and $8.6 million of the contracts
hedge firm commitments for future sales and purchases, respectively, denominated
in foreign currency. The fair market value of these contracts on June 30, 1997,
based upon prevailing market rates on that date, was approximately $142.5
million and $8.3 million, respectively. As of June 30, 1997, and based on
prevailing market rates on that date, the unrealized loss on each set of
contracts was approximately $0.3 million.

Fair Value of Disclosures of Financial Instruments

<PAGE>   11
The Company has evaluated the estimated fair value of financial instruments
using available market information and valuation methodologies. The amounts
reported as cash and cash equivalents, investments and bank borrowings
reasonably estimate their fair value.

Net Income Per Share
Net income per share is computed using the weighted average number of common and
common equivalent shares (weighted average shares) outstanding during the
period, which includes net shares issuable upon the exercise of stock options,
when dilutive.

In February 1997, the Financial Accounting Standards Board issued Statement of
Financial Accounting Standards No. 128, "Earnings per Share." The Statement
redefines earnings per share under generally accepted accounting principles, and
is effective for the Company's quarter ending December 31, 1997. Under the new
standard, primary earnings per share is replaced by basic earnings per share and
fully diluted earnings per share is replaced by diluted earnings per share. If
the Company had adopted this Statement for the year ended June 30, 1997, the
Company's earnings per share for the years ended June 30, 1997, 1996 and 1995
would have been as follows:

<TABLE>
<CAPTION>
                                     1995          1996         1997
                                   --------      --------      --------
<S>                               <C>           <C>           <C>    
Earnings per share:
         Basic                     $   1.40      $   2.42      $   1.29
         Diluted                   $   1.34      $   2.34      $   1.24
</TABLE>

<PAGE>   12

Reclassifications
Certain amounts in fiscal years prior to 1997 have been reclassified to conform
to the 1997 financial statement presentation.

Stock-Based Compensation Plans
The Company accounts for its stock option plans and employee stock purchase plan
in accordance with provisions of the Accounting Principles Board's Opinion No.
25 (APB 25), "Accounting for Stock Issued to Employees." The Company's policy is
to grant options at the fair market value on the date of grant. Accordingly no
compensation expense has been recorded. In 1995, the Financial Accounting
Standards Board released SFAS 123, "Accounting for Stock-Based Compensation."
SFAS 123 provides an alternative to APB 25 requiring additional disclosure
effective for fiscal years beginning after December 15, 1995. The Company
continues to account for its employee stock plans in accordance with APB 25 and
provides the additional disclosure required by SFAS 123. Accordingly, SFAS 123
did not have any impact on the Company's financial position or results of
operations. See Note 8 of Notes to Consolidated Financial Statements.

Recent Accounting Pronouncements
In June 1997, the Financial Accounting Standards Board issued Statement No. 130,
"Reporting Comprehensive Income." This Statement establishes standards for
reporting and display of comprehensive income and its components (revenues,
expenses, gains, and losses) in a full set of general-purpose financial
statements. Such items may include foreign currency translation adjustments,
unrealized gains/losses from investing and hedging activities, and other
transactions. This Statement requires that all items that are required to be
recognized under accounting standards as components of comprehensive income be
reported in a financial statement that is displayed with the same prominence as
other financial statements. This Statement is required to be adopted in the
Company's fiscal year ending June 30, 1999.

In June 1997, the Financial Accounting Standards Board issued Statement No. 131,
"Disclosures about Segments of an Enterprise and Related Information." This
Statement establishes standards for the way that public business enterprises
report information about operating segments in annual financial statements and
requires that those enterprises report selected information about operating
segments in interim financial reports issued to stockholders. It also
establishes standards for related disclosures about products and services,
geographic areas, and major customers. This Statement is required to be adopted
in the Company's fiscal year ending June 30, 1999.





NOTE 3 - BALANCE SHEET COMPONENTS

<TABLE>
<CAPTION>
                                                                 June 30,
                                                           1996            1997
                                                          ------          ------
In thousands
<S>                                                    <C>             <C>
Inventories:
         Customer service parts                         $ 26,078        $ 31,387
         Raw materials                                    54,602          36,829
         Work-in-process                                  64,532          71,998
         Demonstration equipment                          47,349          20,580
         Finished goods                                    5,242          13,840
                                                        $197,803        $174,634
</TABLE>



<PAGE>   13



<TABLE>
<S>                                                    <C>           <C>
Property and equipment:
         Land                                           $  10,502     $  10,502
         Buildings and improvements                        30,353        11,053
         Machinery and equipment                           99,307       129,869
         Office furniture and fixtures                     15,622        17,849
         Leasehold improvements                            21,301        38,805
                                                          177,085       208,078
         Less: accumulated depreciation
         and amortization                                 (72,248)      (90,483)
                                                        $ 104,837     $ 117,595


Other current liabilities:
         Warranty, installation and retrofit            $  44,021     $  50,569
         Compensation and benefits                         65,286        76,955
         Income taxes payable                              45,288        62,784
         Other accrued expenses                            43,074        68,175
                                                        $ 197,669     $ 258,483
</TABLE>



NOTE 4 - COMMITMENTS AND CONTINGENCIES

The Company has an agreement with a bank to sell, with recourse, certain of its
trade receivables. The total amount of the facility is the yen equivalent of
approximately $106 million based upon exchange rates as of June 30, 1997. The
Company has accounted for the sale of certain of these receivables as an off-
balance sheet financing arrangement. During fiscal 1997, a total of the yen
equivalent of approximately $138 million of receivables were sold under this
arrangement. As of June 30, 1997, the yen equivalent of $50 million remains
uncollected. The Company does not believe it is materially at risk for any
losses as a result of this agreement.

The Company has entered into various operating leases for land, office and
manufacturing facilities constructed for its use in Milpitas and San Jose,
California. Monthly rent payments under these leases vary based upon the London
Interbank Offering Rate (LIBOR). Under certain of these leases the Company's
obligation has been collateralized at the Company's option in order to reduce
the monthly payments. The leases for the Milpitas and San Jose facilities
provide the Company with the option at the end of each lease of either acquiring
the properties at their original cost or arranging for the properties to be
acquired. If the Company does not purchase the properties at the end of the
leases, the Company will be contingently liable to the lessor for residual value
guarantees aggregating $103 million. In addition, under the terms of the leases,
the Company must maintain compliance with certain financial covenants. As of
June 30, 1997, the Company was in compliance with all of its covenants.
Management believes that the contingent liability relating to the residual value
guarantees does not currently have a material adverse effect on the Company's
financial position or results of operations.

The Company leases several other facilities under operating leases that expire
at various times through fiscal 2012, with renewal options at the fair market
value for additional periods up to five years. The Company also leases equipment
and other facilities under operating leases.

Total rent expense under all operating leases was $14.9 million, $10.3 million
and $6.4 million for the years ended June 30, 1997, 1996 and 1995, respectively.

Future minimum lease commitments under these operating leases at June 30, 1997
(which include estimated lease payments for the Company's Milpitas and San Jose,
California facilities using a LIBOR of approximately 6%
<PAGE>   14

and total construction costs of $126 million), are $68 million, representing
$13.7 million, $12.7 million, $11.2 million, $9.3 million, $6.6 million and
$13.5 million in fiscal 1998 through 2002 and thereafter, respectively.



NOTE  5  - MERGER, RESTRUCTURING AND OTHER CHARGES

The Company recorded charges totaling $60.6 million for merger, restructuring
and other non-recurring events that occurred during the year ended June 30,
1997.

During the quarter ended June 30, 1997, the Company recorded a pre-tax charge of
$52.1 million for merger, restructuring and other costs. This charge consisted
of merger and restructuring costs of $46.0 million as a result of the business
combination of KLA and Tencor, which was effective on April 30, 1997. This
charge included direct merger costs of $19.4 million, which consisted of
professional fees and other transaction costs associated with the merger, $4.2
million for severance related costs, $13.5 million for non-cash write-offs of
certain redundant property, equipment and other assets, $2.6 million for the
elimination and/or relocation of duplicate sales and service facilities
worldwide and $6.3 million of other costs, primarily fees for merger-related
consulting services providing no expected future benefit to the Company. In
addition, the Company incurred a pre-tax charge of $6.1 million as a result of
the write-off of a bad debt for shipments made to a Thailand company in fiscal
1997. Of the $52.1 million total merger, restructuring and other costs recorded
during the quarter ended June 30, 1997, approximately $30 million was used as of
June 30, 1997, with the remaining balance of $22 million expected to be utilized
during the next twelve months.

During the quarter ended September 30, 1996, the Company recorded a charge for
restructuring costs of $8.5 million. This charge consisted of $2.0 million in
employee severance and related costs and $6.5 million in lease exit costs
associated with the abandonment of certain of the Company's leased facilities.
During the quarter ended March 31, 1997, the Company completed occupation of its
new facility in Milpitas, California. Of the $8.5 million total restructuring
costs, approximately $2.1 million remained as of June 30, 1997, and is expected
to be utilized during the next three months.

<PAGE>   15

NOTE 6 - INVESTMENTS

The amortized cost and estimated fair value of securities available for sale as
of June 30, 1996 and 1997, are as follows (in thousands):

<TABLE>
<CAPTION>
                                 Gross        Gross         Gross     Estimated
                               Amortized    Unrealized   Unrealized      Fair
                                  Cost        Gains        Losses        Value
                               ---------    ----------   ----------   ---------
June 30, 1996
<S>                           <C>          <C>          <C>          <C>
U.S. Treasuries                $  36,375    $      97    $     319    $  36,153
Municipal bonds                  184,081          549          318      184,312
Corporate debt
  securities                      32,654           50          320       32,384
Other                            190,299       17,302          547      207,054
                                 443,409       17,998        1,504      459,903

Less:
Cash equivalents                (194,373)         (50)      (1,291)    (193,132)
Short-term investments          (108,435)         (56)        (200)    (108,291)
Long-term investments          $ 140,601    $  17,892    $      13    $ 158,480



June 30, 1997

U.S. Treasuries                $  70,777    $     236    $     373    $  70,640
Municipal bonds                  273,391        1,010          494      273,907
Corporate debt
  securities                      26,120           63          228       25,955
Other                            245,178       28,111           26      273,263
                                 615,466       29,420        1,121      643,765

Less:
Cash equivalents                (235,622)        (135)         (16)    (235,741)
Short-term investments           (42,159)     (28,517)      (1,070)     (69,606)
Long-term investments          $ 337,685    $     768    $      35    $ 338,418
</TABLE>



The contractual maturities of securities classified as available for sale as of
June 30, 1997, regardless of the consolidated balance sheet classification, are
as follows (in thousands):
<TABLE>
<CAPTION>
                                                                      Estimated
                                                                      Fair Value
                                                                      ----------
<S>                                                                   <C>
Due within one year                                                     $264,342
Due after one year through five years                                    191,237
Due after five years                                                     188,186
                                                                        $643,765
</TABLE>



<PAGE>   16

Actual maturities may differ from contractual maturities because borrowers may
have the right to call or prepay obligations with or without call or prepayment
penalties. The realized gains and losses for the years ended June 30, 1997 and
1996, were not material to the Company's financial position or results of
operations.




NOTE 7 - INCOME TAXES

<TABLE>
<CAPTION>
Year ended June 30,                                             1995      1996      1997
                                                              --------  --------  --------
In thousands
<S>                                                          <C>       <C>       <C>
The components of income before income taxes are as follows:
         Domestic income before
                 income taxes                                 $144,117  $290,199  $152,778
         Foreign income before
                 income taxes                                   22,909    23,901    21,201
                                                              $167,026  $314,100  $173,979
</TABLE>


The provision (benefit) for income taxes is comprised of
the following:
<TABLE>
        <S>                                <C>          <C>          <C>
         Current:
                 Federal                    $  63,250    $ 109,420    $  66,439
                 State                         10,258       18,193       10,603
                 Foreign                        6,788        9,557        8,808
                                               80,296      137,170       85,850
         Deferred:
                 Federal                      (17,291)     (19,162)     (15,238)
                 State                         (1,791)      (1,787)      (1,766)
                 Foreign                        1,001        1,245         (263)
                                              (18,081)     (19,704)     (17,267)
         Provision for income taxes         $  62,215    $ 117,466    $  68,583
</TABLE>


Actual current tax liabilities are lower than reflected above for 1995, 1996 and
1997 by $23.3, $9.8 and $9.6 million, respectively, due to the stock option
deduction benefits recorded as credits to capital in excess of par value.

The significant components of deferred income tax assets (liabilities) are as
follows:

<TABLE>
<S>                                                      <C>          <C>
Deferred tax assets:
         Federal and state loss and
                 credit carryforwards                     $  3,034     $  2,820
         State tax                                           1,765          597
         Nondeductible reserves and other                   51,579       73,767
                                                            56,378       77,184

Deferred tax liabilities:
         Depreciation                                       (1,870)      (4,105)
         Unremitted earnings of foreign
                 subsidiaries                              (10,634)     (11,239)
         Unrealized (gain) loss on investments                  83      (11,036)
         Other                                              (2,097)      (2,713)
                                                           (14,518)     (29,093)

Valuation allowance                                         (4,576)      (4,576)

Net deferred tax assets                                   $ 37,284     $ 43,515 
</TABLE>
<PAGE>   17

The reconciliation of the United States federal statutory income tax rate to the
Company's effective income tax rate is as follows:

<TABLE>
<CAPTION>
                                                      1995       1996       1997
                                                      ----       ----       ----  
        <S>                                          <C>        <C>        <C>   

         Federal statutory rate                       35.0%      35.0%      35.0%
         State income taxes, net
                 of federal benefit                    3.6        3.5        3.3
         Effect of foreign operations
                 taxed at various rates                0.9        0.4        0.7
         Benefit from foreign sales
                 corporation                          (2.8)      (2.9)      (3.3)
         Realized deferred tax assets
                 previously reserved                  (1.4)      (0.4)        --
         Merger related costs                          0.4         --        4.5
         Other                                         1.5        1.7       (0.8)

                                                      37.2%      37.3%      39.4%
</TABLE>


Undistributed earnings of certain of the Company's foreign subsidiaries, for
which no U.S. federal income taxes have been provided, aggregated approximately
$11.2 million at June 30, 1997. The amount of the unrecognized deferred tax
expense related to the investments in foreign subsidiaries is estimated at
approximately $4.0 million at June 30,1997.

The IRS is currently auditing the Company's federal income tax returns for
fiscal 1985 to 1992 and 1995 to 1996. The Company received a notice of proposed
tax deficiency for the years 1985 through 1992 and filed a tax protest letter
with the IRS on June 10, 1996 in response to that IRS notice. Final proposed
adjustments have not been received for these years. Management believes
sufficient taxes have been provided in prior years and that the ultimate outcome
of the IRS audits will not have a material adverse impact on the Company's
financial position or results of operations.



NOTE 8 - STOCKHOLDERS' EQUITY AND EMPLOYEE BENEFITS

In March 1989, the Company implemented a plan to protect stockholders' rights in
the event of a proposed takeover of the Company. The plan provides that if any
person or group acquires 15% or more of the Company's Common Stock, each right
not owned by such person or group will entitle its holder to purchase, at the
then-current exercise price, shares of the Company's Common Stock which have a
value of twice that exercise price. The rights are redeemable by the Company and
expire in April 2006.

Stock Option and Incentive Plans. The Company has various stock option and
management incentive plans for selected employees, officers, directors, and
consultants. The plans provide for grants in the form of stock options, stock
appreciation rights, stock purchase rights, and performance shares. As of June
30, 1997, only stock options have been granted under the plans.

In calendar 1996, the Company offered employees the right to reprice certain
stock options issued to employees during the period from August 1994 through
August 1996. The repricing was done in the form of an exchange, whereby eligible
optionees could cancel their current options in exchange for new options with
exercise prices at the fair market value on the date of grant.


<PAGE>   18


The activity under the option plans, combined, was as
follows:
<TABLE>
<CAPTION>
                                                           Weighted-
                                         Available          Options        Average
                                         For Grant        Outstanding   Exercise Price
                                         ----------       -----------   --------------
<S>                                      <C>             <C>             <C>
Balances at June 30, 1994                 2,062,457        6,985,033      $    4.57
Additional shares reserved                4,000,000             --          --
Options granted                          (3,753,693)       3,753,693          19.68
Options canceled                            429,850         (477,628)          8.24
Options exercised                              --         (2,523,668)          3.72
Balances at June 30, 1995                 2,738,614        7,737,430          11.82
Additional shares reserved                3,700,000             --          --
Options granted                          (3,283,370)       3,283,370          30.62
Options canceled                          1,240,116       (1,253,098)         32.03
Options exercised                              --           (906,797)          5.40
Balances at June 30, 1996                 4,395,360        8,860,905          16.70
Additional shares reserved                1,600,000             --          --
Options granted                          (4,479,879)       4,479,879          30.15
Options canceled                            610,357       (1,992,129)         31.22
Options exercised                              --         (1,087,689)          8.20

Balances at June 30, 1997                 2,125,838       10,260,966      $   20.65
</TABLE>


The options outstanding and exercisable at June 30, 1997 have been segregated
into ranges for additional disclosure as follows:

<TABLE>
<CAPTION>
                               Options Outstanding                          Options Vested and Exercisable
                               -------------------                    ----------------------------------------
                                      Number       Weighted-Average   Weighted - Number Vested       Weighted-
Range of                           Outstanding       Remaining         Average  and Exercisable       Average
Exercise Prices at 06/30/97     Contractual Life   Exercise Price    at 06/30/97    Exercise           Price
- ---------------------------     ----------------   --------------    --------------------------      ---------
<S>                               <C>                  <C>             <C>
$1.45  - $ 3.75                    1,415,825            3.98            $ 3.46      1,295,526        $  3.51
$4.13  - $ 9.63                      742,599            5.99            $ 6.08        661,801        $  6.07
$10.13 - $17.63                    1,511,118            8.25            $16.01      1,476,570        $ 16.07
$17.75 - $21.63                    3,581,439            8.17            $19.58        943,459        $ 18.98
$21.88 - $30.06                    1,038,634            8.78            $23.52        156,484        $ 24.78
$33.81 - $46.56                    1,971,351            9.71            $42.49         59,123        $ 39.24
                                                                  
  $1.45 - $46.56                  10,260,966            7.80            $20.65      4,592,963        $ 12.28
</TABLE>                                                      

The weighted average fair value of options granted in 1997 and 1996 as defined
by SFAS 123 is $14.61 and $14.56, respectively.

<PAGE>   19

Employee Stock Purchase Plan The Company's employee stock purchase plan provides
that eligible employees may contribute up to 10% of their earnings toward the
purchase of the Company's Common Stock twice a year. The employee's purchase
price is derived from a formula based on the fair market value of the Common
Stock. No compensation expense is recorded in connection with the plan. In 1997,
1996 and 1995, 925,311, 697,203 and 322,332 shares, respectively, had been
purchased by employees. At June 30, 1997, 1,001,044 shares were reserved and
available for issuance under this plan.

Pro Forma Net Income and Earnings Per Share. Pro forma information regarding net
income and net income per share is required by SFAS 123, and has been determined
as if the Company had accounted for its employee stock purchase plan and
employee stock options granted subsequent to June 30, 1995, under the fair value
method of SFAS 123. The fair value of each option grant is estimated on the date
of grant using the Black-Scholes model with the following weighted average
assumptions:

<TABLE>
<CAPTION>
                                                              1996        1997
                                                              ----        ----
<S>                                                         <C>         <C>   
Stock option plan:
         Expected stock price volatility                     50.0%       50.0%
         Risk free interest rate                              6.4%        6.2%
         Expected life of options (years)                     5.4         5.4
Stock purchase plan:
         Expected stock price volatility                     50.0%       50.0%
         Risk free interest rate                              5.7%        5.6%
         Expected life of options (years)                     1-2         1-2

</TABLE>

The Black-Scholes option valuation model was developed for use in estimating
the fair value of traded options which have no vesting restrictions and are
fully transferable.  In addition, option valuation models require the input of
highly subjective assumptions including the expected stock price volatility.
Because the options granted pursuant to the Company's employee stock option and
purchase plan have characteristics significantly different from those of traded
options, and because changes in the subjective input assumptions can materially
affect the fair value estimate, in management's opinion, the existing models do
not necessarily provide a reliable single measure of the fair value of such
Company options.


For purposes of pro forma disclosures required by SFAS 123, the estimated fair
value of the options is amortized to expense over the options' vesting periods.
The Company's pro forma information for the years ended June 30, 1996 and 1997
follows (in thousands except for earnings per share information):
<TABLE>
<CAPTION>
                                                     1996                1997
                                                 -----------         ----------- 
<S>                                             <C>                 <C>
Net income:
         Historical                              $   196,634         $   105,396
         Pro forma                               $   189,331         $    89,608
Earnings per share:
         Historical                              $      2.34         $      1.24
         Pro forma                               $      2.27         $      1.07
</TABLE>

The pro forma effect on net income and earnings per share for fiscal 1997 and
fiscal 1996 is not representative of the pro forma effect on net income in
future years because it does not take into consideration pro forma compensation
expense related to grants made prior to fiscal 1996.

Other Employee Benefit Plans. The Company has a profit sharing program for
eligible employees which distributes, on a quarterly basis, a percentage of
pretax profits. In addition, the Company has an employee savings plan that
qualifies as a deferred salary arrangement under Section 401(k) of the Internal
Revenue Code. During 1997, the Company matched


<PAGE>   20

dollar-for-dollar up to $1,500 of an eligible employee's contribution. The total
charge to operations under the profit sharing and 401(k) plans aggregated
approximately $23.9 million, $32.0 million and $20.5 million in 1997, 1996 and
1995, respectively.

The Company has a non-qualified deferred compensation plan whereby certain key
executives may defer a portion of their salary and bonus. Participants direct
the investment of their account balances among mutual funds selected by the
participants. Distributions commence following a participant's retirement or
termination of employment. At June 30, 1997, the Company had a deferred
compensation liability under the plan of $15.3 million.



NOTE 9 -  INDUSTRY AND GEOGRAPHIC INFORMATION

No single customer accounted for more than 10% of net revenues in 1997, 1996 and
1995. International sales accounted for 65%, 66% and 65% of the Company's
revenues in 1997, 1996 and 1995, respectively. The Company designs,
manufactures, markets and services wafer defect inspection systems, reticle
inspection systems, thin film measurement and metrology systems used primarily
in the manufacture of integrated circuits by the semiconductor industry.

The following is a summary of the Company's geographic operations:

<TABLE>
<CAPTION>
Year ended June 30,                             1995          1996          1997
                                            -----------   -----------   -----------
In thousands
<S>                                        <C>           <C>           <C>
Sales to unaffiliated customers:
         United States                       $  245,666   $   375,639   $   364,162
         International:
                 Western Europe                  83,077       141,062       116,461
                 Japan                          217,488       352,080       257,382
                 Asia Pacific                   141,469       222,957       272,966
                 ROW                              8,250         2,754        20,853
                        Total                   695,950     1,094,492     1,031,824

Intercompany sales among geographic areas:
                 United States                   60,861        90,561         5,548
                 Western Europe                  32,157        54,059        85,075
                 Japan                           28,225        81,494       124,998
                 Asia Pacific                    10,225        18,627         6,337
                 Consolidation eliminations    (131,468)     (244,741)     (221,958)
                        Total                $  695,950   $ 1,094,492   $ 1,031,824


Operating results:
                 United States               $   53,037   $    75,597   $    40,802
                 Western Europe                  25,980        54,436        39,344
                 Japan                           68,595       124,100        68,835
                 Asia Pacific                    53,337        67,085        62,685
                 General corporate              200,949       321,218       211,666
                 
</TABLE>
<PAGE>   21
<TABLE>
<S>                                     <C>           <C>           <C>
                     expenses                (44,340)      (24,952)      (65,834)
Income from operations                   $   156,609   $   296,266   $   145,832

Identifiable assets:
                 United States           $   250,026   $   423,560   $   822,067
                 Western Europe               43,007        51,045        49,417
                 Japan                       113,565       124,839       100,311
                 Asia Pacific                 46,377        81,724        22,680
                 General corporate
                     assets                  397,431       476,751       348,832
                           Total assets  $   850,406   $ 1,157,919   $ 1,343,307
</TABLE>


Intercompany sales among the Company's geographic areas are recorded on the
basis of intercompany prices established by the Company. At June 30, 1997, 1996
and 1995, total foreign liabilities (excluding intercompany balances) were $85
million, $76 million and $54 million, respectively. For fiscal years 1997, 1996
and 1995, foreign capital expenditures and depreciation expense were $4 million,
$7 million and $3 million and $2 million, $1 million and $1, respectively.


NOTE 10 - CERTAIN TRANSACTIONS

Uniphase In November 1995, the Company entered into agreements with Uniphase
Corporation (Uniphase) to license certain technology, provide partial funding
for research and development and purchase 665,568 shares of Uniphase's common
stock (adjusted to reflect a two-for-one stock split in June 1996). Under these
agreements, the Company became the exclusive OEM reseller of Uniphase's laser
imaging defect review station and automatic defect classification (ADC)
software. The Company recorded the license as acquired product technology and is
amortizing the cost over its estimated useful life of three years. The research
and development funding is charged to research and development expense over the
term of the funding agreement. The Company has recorded the purchase of Uniphase
common stock as a short-term marketable equity investment at its fair value at
the time of the purchase. Included under the caption "Accumulated unrealized
gain on investments, net" is $17.7 million related to the increase in fair
market value of the Company's investment in Uniphase common stock as of June 30,
1997.

Metrologix
In December 1994, the Company acquired Metrologix Inc., a manufacturer of
advanced electron beam measurement equipment. The acquisition was accounted for
as a purchase. A significant portion of the acquisition cost was allocated to
acquired in-process technology that was written off at the time of the
acquisition, because further substantial research and development investment was
necessary to complete the new product development then underway. This resulted
in a pre-tax charge of $25.2 million.


<PAGE>   22
NOTE 11 - QUARTERLY CONSOLIDATED
RESULTS OF OPERATIONS (UNAUDITED)

<TABLE>
<CAPTION>
                            Sept. 30        Dec. 31       March 31     June 30
                            --------        --------     --------     --------
<S>                         <C>             <C>          <C>          <C>     
In thousands, except per share amounts
1997:
         Revenues           $261,140        $242,155     $252,346     $276,183
         Gross profit        145,776         127,281      135,241      151,616
         Income from
             operations       46,165(1)       47,750       49,000        2,917(2)
         Net income           33,580(1)       34,219       36,995          602(2)
         Net income
             per share      $   0.40(1)     $   0.40     $   0.43     $   0.01(2)

1996:
         Revenues           $237,079        $261,672     $293,777     $301,964
         Gross profit        137,906         150,784      167,715      168,406
         Income from
             operations       68,078          72,765       79,051       76,372
         Net income           45,500          48,614       52,068       50,452
         Net income
             per share      $   0.54        $   0.58     $   0.62     $   0.61
</TABLE>


(1)  Includes restructuring costs of $8.5 million.  Net income and
net income per share would have been $39.0 million and $0.46, respectively,
excluding these costs.

(2) Includes merger, restructuring and other costs of $52.1 million.  Net
income and net income per   share would have been $42 million and $0.48,
respectively, excluding these costs.





QUARTERLY COMMON STOCK MARKET PRICE:

<TABLE>
<CAPTION>
1997 Quarter ended           Sept. 30       Dec. 31    March 31        June 30
                             --------       -------    --------        -------
<S>                          <C>            <C>         <C>            <C>
High                          24 3/4         40 3/4      49 3/4         53 1/8

Low                           14 3/4         17 5/8      25 1/2         35 1/2
</TABLE>


<TABLE>
<CAPTION>
1996 Quarter ended           Sept. 30       Dec. 31     March 31        June 30
                             --------       -------     --------        -------
<S>      <C>     <C>      <C>     <C>      <C>
High                          47 1/8         46 3/4      35 1/4         31 1/4

Low                           38 1/2         24 3/4      16 1/2         17 1/4

</TABLE>





<PAGE>   23
The preceding table sets forth the high and low closing prices as reported on
the Nasdaq National Market System during the last two years. As of September 2,
1997, there were approximately 1,833 stockholders of record of the Company's
Common Stock. The price for the Company's Common Stock as of the close of
business on September 2, 1997 was $71.38 per share. The Company has never paid
cash dividends to its stockholders. The Company does not plan to pay cash
dividends in the foreseeable future.

REPORT OF INDEPENDENT ACCOUNTANTS

To the Board of Directors and Stockholders of KLA-Tencor Corporation

In our opinion, the accompanying consolidated balance sheets and the related
consolidated statements of income, of stockholders' equity and of cash flows
present fairly, in all material respects, the financial position of KLA-Tencor
Corporation and its subsidiaries at June 30, 1997 and 1996, and the results of
their operations and their cash flows for each of the three years in the period
ended June 30, 1997, in conformity with generally accepted accounting
principles. These financial statements are the responsibility of the Company's
management; our responsibility is to express an opinion on these financial
statements based on our audits. We conducted our audits of these statements in
accordance with generally accepted auditing standards which require that we plan
and perform the audit to obtain reasonable assurance about whether the financial
statements are free of material misstatement. An audit includes examining, on a
test basis, evidence supporting the amounts and disclosures in the financial
statements, assessing the accounting principles used and significant estimates
made by management, and evaluating the overall financial statement presentation.
We believe that our audits provide a reasonable basis for the opinion expressed
above.





PRICE WATERHOUSE LLP
San Jose, California
July 28, 1997



<PAGE>   1
EXHIBIT 21.1


UNITED STATES SUBSIDIARIES

<TABLE>
<CAPTION>
Name                                            State or Other Jurisdiction of Incorporation
- ----                                            --------------------------------------------
<S>                                             <C>
Tencor Instruments                              California
International Sales & Business, Inc.            California
KLA-Tencor Building Corporation                 California
KLA-Tencor Disc Corporation                     California
KLA-Tencor International Corporation            California
KLA-Tencor Instruments Klinnik                  California
Corporation
KLA-Tencor Management Corporation               California
KLA-Tencor (Thailand Branch) Corporation        California
VLSI Standards, Inc.                            California

INTERNATIONAL SUBSIDIARIES
KLA-Tencor (Cayman) Limited I                   Cayman Islands
KLA-Tencor (Cayman) Limited II                  Cayman Islands
KLA-Tencor (Cayman) Limited III                 Cayman Islands
KLA-Tencor (Israel) Corporation                 Israel
KLA-Tencor Holding Corporation 1987 Limited     Israel
KLA-Tencor Corporation 1992 Limited             Israel
KLA-Tencor Italy S.R.L.                         Italy
KLA-Tencor Japan, Ltd.                          Japan
KLA Instruments Sales Corporation               U.S. Virgin Islands
Tencor Foreign Sales Corporation                U.S. Virgin Islands
KLA-Tencor GmbH                                 Germany
Tencor Instruments GmbH                         Germany
</TABLE>


<PAGE>   2
<TABLE>
<S>                                             <C>
KLA-Tencor France SARL                          France
KLA Instruments France S.A.                     France
KLA-Tencor Korea, Inc.                          Korea
KLA-Tencor Limited                              United Kingdom
KLA-Tencor (Malaysia) Sdn Bhd                   Malaysia
KLA-Tencor (Singapore) PTE, Ltd.                Singapore
Tencor Instruments (Service) Limited            United Kingdom
VLSI Standards, KK                              Japan
</TABLE>

<PAGE>   1
                                  EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS


We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (No. 33-15784, No. 2-71584, No. 2-75314, No. 33-26002,
No. 33-42973, No. 33-42982, No. 33-42975, No. 33-55362, No. 33-88662, No.
333-03003, No. 333-22939, No. 333-22941, No. 333-26681 and No. 333-32537) of
KLA-Tencor Corporation of our report dated July 28, 1997 appearing on page 30 of
the Annual Report to Stockholders, which is incorporated in this Annual Report
on Form 10-K.




PRICE WATERHOUSE LLP

San Jose, California
September 26, 1997

<TABLE> <S> <C>

<ARTICLE> 5
       
<S>                             <C>
<PERIOD-TYPE>                   YEAR
<FISCAL-YEAR-END>                          JUN-30-1997
<PERIOD-START>                             JUL-01-1996
<PERIOD-END>                               JUN-30-1997
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