KLA TENCOR CORP
S-8, EX-24.1, 2000-09-26
OPTICAL INSTRUMENTS & LENSES
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                                                                    EXHIBIT 24.1

                         POWER OF ATTORNEY OF DIRECTORS

KNOW ALL PERSONS BY THESE PRESENTS:

         Each of the undersigned directors of KLA-Tencor Corporation, a Delaware
corporation (the "Company"), hereby constitutes and appoints STUART J. NICHOLS
as his or her true and lawful attorney-in-fact, for him or her and in his or her
name, place and stead, in any and all capacities, to execute a Registration
Statement or Registration Statements on Form S-8 or other appropriate form,
under the Securities Act of 1933, as amended, relating to up to 500,000 shares
of common stock, $0.001 par value, of the Company, and an indeterminate number
of plan interests issuable under the KLA-Tencor 401(k) Plan, as amended, and any
and all amendments (including post-effective amendments) to such Registration
Statements, and to file such Registration Statements and any and all amendments
thereto, with exhibits thereto, and other documents in connection therewith,
with the Securities and Exchange Commission, granting unto said attorney-in-fact
full power and authority to do and perform each and every act and thing
necessary or desirable to be done in and about the premises, as fully to all
intents and purposes, as he or she might or could do in person, thereby
ratifying and confirming all that said attorney-in-fact may lawfully do or cause
to be done by virtue hereof.

         IN WITNESS WHEREOF, I have hereunto set my hand this 25th day of
September, 2000.



/s/ Kenneth Levy                       /s/ Kenneth L. Schroeder
----------------------------------     -----------------------------------------
    Kenneth Levy                           Kenneth L. Schroeder


/s/ Edward W. Barnholt                 /s/ Richard J. Elkus, Jr.
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    Edward W. Barnholt                     Richard J. Elkus, Jr.


/s/ Dean O. Morton                     /s/ Jon D. Tompkins
----------------------------------     -----------------------------------------
    Dean O. Morton                         Jon D. Tompkins


/s/ Lida Urbanek                       /s/ H. Raymond Bingham
----------------------------------     -----------------------------------------
    Lida Urbanek                           H. Raymond Bingham


/s/ Robert T. Bond
----------------------------------
    Robert T. Bond


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