KLA TENCOR CORP
10-K, EX-23.1, 2000-09-28
OPTICAL INSTRUMENTS & LENSES
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<PAGE>   1


EXHIBIT 23.1


Consent of Independent Accountants



We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (No. 33-15784, No. 2-71584, No. 2-75314, No. 33-26002,
No. 33-42973, No. 33-42982, No. 33-42975, No. 33-55362, No. 33-88662, No.
333-03003, No. 333-22939, No. 333-22941, No. 333-26681, No. 333-32537, No.
333-45271, No. 333-60887, No. 333-60883, No. 333-68423, No. 333-68415, No.
333-85121, No. 333-85123 and No. 333-46598) and in the Prospectus constituting
part of the Registration Statement on Form S-3 (No. 333-52393) of KLA-Tencor
Corporation of our report dated July 24, 2000 relating to the financial
statements and the financial statement schedule, which appear in this Annual
Report on Form 10-K.

PRICEWATERHOUSECOOPERS LLP

San Jose, California
September 27, 2000

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