NANOMETRICS INC
DEF 14A, 1995-04-27
OPTICAL INSTRUMENTS & LENSES
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<PAGE>
                            SCHEDULE 14A INFORMATION

                  Proxy Statement Pursuant to Section 14(a) of
            the Securities Exchange Act of 1934 (Amendment No.    )

    Filed by the Registrant /X/
    Filed by a Party other than the Registrant / /

    Check the appropriate box:
    / /  Preliminary Proxy Statement
    / /  Confidential, for Use of the Commission Only (as permitted by Rule
         14a-6(e)(2))
    /X/  Definitive Proxy Statement
    / /  Definitive Additional Materials
    / /  Soliciting  Material  Pursuant  to  Section  240.14a-11(c)  or  Section
         240.14a-12

                          Nanometrics Incorporated
- - --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)

                           Susanne O. Hereford
- - --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

Payment of Filing Fee (Check the appropriate box):

/X/  $125 per  Exchange Act  Rules 0-11(c)(1)(ii),  14a-6(i)(1), 14a-6(i)(2)  or
     Item 22(a)(2) of Schedule 14A.
/ /  $500  per  each party  to  the controversy  pursuant  to Exchange  Act Rule
     14a-6(i)(3).
/ /  Fee  computed  on   table  below   per  Exchange   Act  Rules   14a-6(i)(4)
     and 0-11.
     1) Title of each class of securities to which transaction applies:
        ------------------------------------------------------------------------
     2) Aggregate number of securities to which transaction applies:
        ------------------------------------------------------------------------
     3) Per unit price or other underlying value of transaction computed
        pursuant to Exchange Act Rule 0-11 (Set forth the amount on which the
        filing fee is calculated and state how it was determined):
        ------------------------------------------------------------------------
     4) Proposed maximum aggregate value of transaction:
        ------------------------------------------------------------------------
     5) Total fee paid:
        ------------------------------------------------------------------------
/ /  Fee paid previously with preliminary materials.
/ /  Check box if any part of the fee is offset as provided by Exchange Act Rule
     0-11(a)(2)  and identify the  filing for which the  offsetting fee was paid
     previously. Identify the previous filing by registration statement  number,
     or the Form or Schedule and the date of its filing.
     1) Amount Previously Paid:
        ------------------------------------------------------------------------
     2) Form, Schedule or Registration Statement No.:
        ------------------------------------------------------------------------
     3) Filing Party:
        ------------------------------------------------------------------------
     4) Date Filed:
        ------------------------------------------------------------------------
<PAGE>
                            NANOMETRICS INCORPORATED
                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

TO THE SHAREHOLDERS:

    NOTICE   IS  HEREBY  GIVEN  that  the  Annual  Meeting  of  Shareholders  of
Nanometrics Incorporated (the "Company"), a California corporation, will be held
on May  23, 1995  at 1:30  p.m., local  time, at  the principal  offices of  the
Company  located at  310 DeGuigne  Drive, Sunnyvale,  California 94086,  for the
following purposes:

    1.   To elect  directors  to serve  for the  ensuing  year and  until  their
       successors are elected.

    2.   To ratify the appointment of  Deloitte & Touche as independent auditors
       of the Company for the fiscal year ending December 31, 1995.

    3.  To transact such other business as may properly come before the  meeting
       or any adjournment thereof.

    The  foregoing  items of  business  are more  fully  described in  the Proxy
Statement accompanying this Notice.

    Only shareholders of  record at the  close of  business on May  1, 1995  are
entitled to notice of and to vote at the meeting.

    All  shareholders are  cordially invited  to attend  the meeting  in person.
However, to ensure your  representation at the meeting,  you are urged to  mark,
sign,  date and return  the enclosed proxy  card as promptly  as possible in the
postage-prepaid envelope enclosed  for that purpose.  Any shareholder  attending
the meeting may vote in person even if such shareholder returned a proxy.

                                          Sincerely,
                                          Vincent J. Coates
                                          SECRETARY

Sunnyvale, California
May 12, 1995
<PAGE>
                            NANOMETRICS INCORPORATED
                                PROXY STATEMENT
                 INFORMATION CONCERNING SOLICITATION AND VOTING

GENERAL

    The  enclosed proxy  is solicited  on behalf  of the  Board of  Directors of
Nanometrics Incorporated  (the  "Company") for  use  at the  Annual  Meeting  of
Shareholders of the Company to be held on May 23, 1995 at 1:30 p.m., local time,
or  at any  adjournment thereof, for  the purposes  set forth herein  and in the
accompanying Notice of Annual Meeting  of Shareholders. The Annual Meeting  will
be  held at the principal offices of  the Company located at 310 DeGuigne Drive,
Sunnyvale, California 94086. The Company's  telephone number at that address  is
(408) 746-1600.

    These  proxy solicitation materials were mailed on  or about May 12, 1995 to
all shareholders entitled to vote at the meeting.

RECORD DATE AND SHARES OUTSTANDING

    Shareholders of record at the close of business on May 1, 1995 are  entitled
to notice of and to vote at the meeting. At the record date, 7,454,795 shares of
the  Company's  Common Stock,  no par  value, were  issued and  outstanding. For
information concerning beneficial  owners of  more than  5% of  the Company  see
"Security Ownership of Management and Certain Beneficial Owners."

REVOCABILITY OF PROXIES

    Any  proxy given pursuant to this solicitation  may be revoked by the person
giving it at  any time  before its  use by delivering  to the  Secretary of  the
Company  a written notice of revocation or a duly executed proxy bearing a later
date or by attending the meeting and voting in person.

VOTING AND SOLICITATION

    Every shareholder voting  for the  election of directors  may cumulate  such
shareholder's votes and give one candidate a number of votes equal to the number
of  directors  to be  elected multiplied  by the  number of  votes to  which the
shareholder's shares are entitled, or distribute the shareholder's votes on  the
same  principle among as many candidates as the shareholder thinks fit, provided
that votes cannot be cast for more than four candidates. However, no shareholder
shall be entitled to cumulate votes unless the candidate's name has been  placed
in nomination prior to the voting and the shareholder, or any other shareholder,
has given notice at the meeting prior to the voting of the intention to cumulate
the  shareholder's  votes. On  all  other matters,  each  share of  Common Stock
outstanding has one vote.

    The cost of this solicitation will be borne by the Company. In addition, the
Company may reimburse brokerage firms and other persons representing  beneficial
owners  of shares for their expenses in forwarding solicitation material to such
beneficial owners. Proxies  may also be  solicited by certain  of the  Company's
directors,  officers  and  regular employees,  without  additional compensation,
personally or by telephone.

QUORUM; ABSTENTIONS: BROKER NON-VOTES

    The required quorum for the transaction of business at the Annual Meeting is
a majority of the shares  of Common Stock issued  and outstanding on the  Record
Date.  Shares that are  voted "FOR," "AGAINST"  or "WITHHELD FROM"  a matter are
treated as being present  at the meeting for  purposes of establishing a  quorum
and  are also treated as  shares "represented and voting"  at the Annual Meeting
(the "Votes Cast") with respect to such matter.

    While there is no definitive statutory  or case law authority in  California
as to the proper treatment of abstentions, the Company believes that abstentions
should  be counted for purposes of determining  both (i) the presence or absence
of a quorum for the transaction of  business and (ii) the total number of  Votes
Cast  with respect to a proposal. In the absence of controlling precedent to the
contrary, the Company intends to  treat absentions in this manner.  Accordingly,
abstentions will have the same effect as a vote against a proposal.
<PAGE>
    Broker non-votes will be counted for purposes of determining the presence or
absence of a quorum for the transaction of business, but will not be counted for
purposes of determining the number of Votes Cast with respect to a proposal.

DEADLINE FOR RECEIPT OF SHAREHOLDER PROPOSALS

    Proposals  of shareholders of the Company which are intended to be presented
by such shareholders  at the Company's  Annual Meeting for  fiscal 1995 must  be
received  by the Company no later  than March 1, 1996 in  order that they may be
included in the proxy statement and form of proxy relating to that meeting.

                    PROPOSAL NO. 1 -- ELECTION OF DIRECTORS

NOMINEES

    A board of four directors is to be elected at the meeting. Unless  otherwise
instructed,  the proxy holders  will vote the  proxies received by  them for the
Company's four nominees named below, all of whom are presently directors of  the
Company.  In the event that any nominee of  the Company is unable or declines to
serve as a director at the time of the Annual Meeting, the proxies will be voted
for any nominee who  shall be designated  by the present  Board of Directors  to
fill  the vacancy. It  is not expected that  any nominee will  be unable or will
decline to  serve  as a  director.  In the  event  that additional  persons  are
nominated  for  election as  directors,  the proxy  holders  intend to  vote all
proxies received by  them in  such a manner  and in  accordance with  cumulative
voting  as will ensure the  election of as many of  the nominees listed below as
possible and, in  such event,  the specific  nominees to  be voted  for will  be
determined  by the proxy holders. The term of office of each person elected as a
director will continue until  the next Annual Meeting  of Shareholders or  until
such director's successor has been elected and qualified.

    The  names of the nominees and certain  information about them are set forth
below:

<TABLE>
<CAPTION>
       DIRECTOR
   NAME OF NOMINEE          AGE                       PRINCIPAL OCCUPATION                      SINCE
- - ----------------------      ---      -------------------------------------------------------  ---------
<S>                     <C>          <C>                                                      <C>
Vincent J. Coates               70   Chairman of the Board and Chief Executive Officer of          1975
                                      the Company
Nathaniel Brenner               68   Retired                                                       1986
Norman V. Coates                45   Proprietor of Gem of the River Produce                        1988
Roger G. Novesky                56   Chief Executive Officer of SOANE BioSciences                  1994
</TABLE>

    By virtue of  his position in  the Company and  beneficial ownership of  the
Company's  Common Stock, Vincent J.  Coates may be deemed  a "control person" of
the Company  as that  term  is defined  under the  Securities  Act of  1933,  as
amended.

    Mr.  Vincent J. Coates  is the father of  Mr. Norman V.  Coates. There is no
other family relationship  between any  directors or executive  officers of  the
Company.

    Except  as set  forth below, each  of the  nominees has been  engaged in his
principal occupation described above during the past five years.

    Mr. Vincent Coates  has been  Chairman of the  Board since  the Company  was
founded.  He served as President from the  founding through July 1988 except for
the period from January 1986 through February 1987 when he served exclusively as
Chief Executive Officer.  He is  currently the  Chief Executive  Officer of  the
Company and was elected Secretary in February 1989.

    Mr.  Nathaniel Brenner was elected a director  of the Company in August 1986
and also serves as a consultant  to the Company. He joined Beckman  Instruments,
Inc.  in 1976  where he  has held  the positions  of Program  Manager, Marketing
Manager (Instruments) and General Manager  (Spectroscopy). In 1993, Mr.  Brenner
retired from Beckman Instruments, Inc.

                                       2
<PAGE>
    Mr.  Norman V. Coates was elected a director  of the Company in May 1988. He
has operated Gem of the River Produce, farming and produce packing operations in
Orleans, California, as a sole proprietor  since 1978. He has also been  manager
of the Boise Creek Farm operation since 1984.

    Mr.  Roger G. Novesky was appointed a  director of the Company in the second
quarter of 1994 and was elected to  the Company's Board of Directors on May  18,
1994.  Mr. Novesky joined Beckman Instruments, Inc. ("Beckman") in 1963 where he
has held  the  positions of  Vice  President,  Division Manager  of  the  Spinco
division  of Beckman  and Director of  Marketing in the  Spinco organization. In
1994, Mr. Novesky retired from Beckman and remained in retirement until  October
1994  when  he became  Chief  Executive Officer  at  Soane BioSciences,  Inc., a
subsidiary of Soane Technologies, Inc.

    THE BOARD OF  DIRECTORS UNANIMOUSLY  RECOMMENDS THAT  THE SHAREHOLDERS  VOTE
"FOR" THE NOMINEES LISTED ABOVE.

SECURITY OWNERSHIP OF MANAGEMENT AND CERTAIN BENEFICIAL OWNERS

    The  following table sets forth beneficial  ownership of Common Stock of the
Company as  of April  17, 1995,  by each  director or  nominee, by  each of  the
executive  officers named in the table  under "Executive Compensation -- Summary
Compensation Table,"  by all  directors and  officers  as a  group, and  by  all
persons  known to the Company to be the beneficial owners of more than 5% of the
Company's Common Stock:

<TABLE>
<CAPTION>
                                                                NUMBER OF SHARES OF
                                                                    COMMON STOCK
                                                                    BENEFICIALLY        PERCENT
NAME OF BENEFICIAL OWNER                                             OWNED (1)         OF TOTAL
- - --------------------------------------------------------------  --------------------  -----------
<S>                                                             <C>                   <C>
Vincent J. Coates ............................................         5,401,774            72.5%
 310 DeGuigne Avenue
 Sunnyvale, CA 94086
Eaton Vance Management, Inc. .................................          441,850(2)           5.9%
 24 Federal Street
 Boston, MA 02110
Nathaniel Brenner.............................................           15,999(3)         *
Norman V. Coates..............................................           23,049(3)         *
Roger G. Novesky..............................................            8,333(4)         *
John D. Heaton................................................           50,000(5)         *
Paul B. Nolan.................................................           28,800(6)         *
All officers and directors as a group (6 persons).............        5,522,955(7)          73.0
<FN>
- - ------------------------
 * Represents less than 1% of outstanding shares of Common Stock.

(1)  Represents sole  voting and  investment power,  except as  otherwise  noted
     below.

(2)  According  to  a  Schedule  13G  filed  with  the  Securities  and Exchange
     Commission on  or about  January  31, 1995,  Eaton Vance  Management,  Inc.
     ("EVM")  may be  deemed to  be the  beneficial owner  of 441,850  shares of
     Common Stock held by certain funds.

(3)  Includes  14,999  shares  of  Common   Stock  issuable  upon  exercise   of
     outstanding options exercisable within 60 days of April 17, 1995.

(4)  Includes 3,333 shares of Common Stock issuable upon exercise of outstanding
     options exercisable within 60 days of April 17, 1995.

(5)  Represents  50,000  shares  of  Common  Stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 17, 1995.
</TABLE>

                                       3
<PAGE>
<TABLE>
<S>  <C>
(6)  Includes  27,000  shares  of  Common   Stock  issuable  upon  exercise   of
     outstanding options exercisable within 60 days of April 17, 1995.

(7)  Includes  an  aggregate of  110,331 shares  of  Common Stock  issuable upon
     exercise of outstanding  options exercisable  within 60 days  of April  17,
     1995.
</TABLE>

BOARD MEETINGS AND COMMITTEES

    The  Board of Directors held a total of five meetings during the fiscal year
ended January 1, 1995.

    The Stock Option Committee of the  Board of Directors currently consists  of
Norman  V. Coates and  Nathaniel Brenner. The committee,  which held no separate
meetings during the last fiscal year, is responsible for approving the grant  of
stock  options to the Company's employees  under the Company's 1991 Stock Option
Plan.

    The Audit Committee of the Board  of Directors was established in  September
1985 and currently consists of Vincent J. Coates, Norman V. Coates and Nathaniel
Brenner. One meeting was held during the last fiscal year.

    During  the last fiscal year, all incumbent directors attended more than 75%
of all meetings of the Board  of Directors and all incumbent directors  attended
more  than 75% of all meetings of  committees, if any, upon which such directors
served.

BOARD COMPENSATION

    Directors who  are not  also employees  of the  Company received  an  annual
retainer  fee of $1,500 plus $500 per  Board of Directors and committee meetings
attended, and are eligible to participate in the Company's 1991 Director  Option
Plan.

COMPENSATION OF EXECUTIVE OFFICERS

    The  following table  sets forth the  compensation paid by  the Company with
respect to the years  ended January 2,  1993, January 1,  1994 and December  31,
1994  to  the  Chief  Executive  Officer  and  all  of  the  executive  officers
(collectively, the "Named Officers") of the Company(1):

                           SUMMARY COMPENSATION TABLE

<TABLE>
<CAPTION>
                                                                             ANNUAL COMPENSATION
                                                                            ----------------------
                NAME AND PRINCIPAL POSITION                   FISCAL YEAR   SALARY ($)  BONUS ($)
- - -----------------------------------------------------------  -------------  ---------  -----------
<S>                                                          <C>            <C>        <C>
Vincent J. Coates                                                   1994      150,244       2,888
 Chief Executive Officer                                            1993      137,848       2,390
                                                                    1992      139,427      17,190
Paul B. Nolan(2)                                                    1994       73,097       1,290
 Chief Financial Officer
John Heaton(3)                                                      1994       80,786       1,540
 Vice President & General Manager
<FN>
- - ------------------------
(1)  The Company has three executive officers.

(2)  Mr. Nolan became Chief Financial Officer of the Company in March 1994.

(3)  Mr. Heaton became  Vice President  and General  Manager of  the Company  in
     March 1994
</TABLE>

    For  a discussion of the Company's  obligation to make severance payments to
Vincent J. Coates, see "Certain Transactions."

    The Company is the beneficiary of an insurance policy on the life of Vincent
J. Coates in a face amount of $8,000,000. Annual premiums, which are paid by the
Company, totaled $200,000 for fiscal 1994  and in subsequent years are fixed  at
$200,000.  Mr. Coates and  the Company have entered  into an agreement providing
that in the event of Mr. Coates' death,  his estate has the option to cause  the

                                       4
<PAGE>
Company  to use the proceeds  of the policy to  purchase shares of the Company's
Common Stock owned by the estate at their then fair market value. The estate  is
not  obligated under the terms  of the agreement to  exercise the option. If the
option were  not  exercised,  the  Company would  retain  the  proceeds  of  the
insurance.  The purpose of this  agreement is to provide  Mr. Coates' estate, at
its option, the opportunity to obtain cash to pay estate taxes without having to
raise all of such money from sales in the open market.

STOCK OPTION GRANTS AND EXERCISES

    The following  table sets  forth  further information  regarding  individual
grants  of options during  fiscal 1994 to  each of the  Named Officers. All such
grants were made pursuant to the Company's 1991 Incentive Stock Option Plan.  In
accordance with the rules of the Securities and Exchange Commission (the "SEC"),
the table sets forth the hypothetical gains or "option spreads" that would exist
for  the options at the end of their respective ten- year loans based on assumed
annualized rates of  compound stock price  appreciation of 5%  and 10% from  the
dates  the options  were granted  to the end  of their  respective option terms.
Actual  gains,  if  any,  on  option  exercises  are  dependent  on  the  future
performance  of the Company's common stock  and overall market conditions. There
can be no  assurance that the  potential realizable values  shown in this  table
will be achieved.

                          OPTION GRANTS IN FISCAL 1994

<TABLE>
<CAPTION>
                                      INDIVIDUAL GRANTS
                     ----------------------------------------------------  POTENTIAL REALIZABLE
                                     PERCENTAGE                              VALUE AT ASSUMED
                                      OF TOTAL                               ANNUAL RATES OF
                       NUMBER OF       OPTIONS                                 STOCK PRICE
                       SECURITIES    GRANTED TO                              APPRECIATION FOR
                       UNDERLYING     EMPLOYEES    EXERCISE                  OPTION TERM (3)
                        OPTIONS       IN FISCAL      PRICE     EXPIRATION  --------------------
       NAME          GRANTED (#)(1)   1994 (2)      ($/SH)        DATE      5% ($)     10% ($)
- - -------------------  --------------  -----------  -----------  ----------  ---------  ---------
<S>                  <C>             <C>          <C>          <C>         <C>        <C>
John D. Heaton             25,000          6.0%    $  0.5625     08/25/99  $   3,885  $   8,585
                          125,000         30.0%         0.75     10/12/99     25,901     57,235
Paul B. Nolan              15,000          3.6%       0.5625     08/25/99      2,331      5,151
<FN>
- - ------------------------
(1)  Stock  options are granted with an exercise  price equal to the fair market
     value of the Company's common stock on the date of grant. Options generally
     become exercisable  33%  after  the  first year  and  33%  each  full  year
     thereafter  and are fully  exercisable after 3 years.  Option lapse after 5
     years or, if earlier, 90 days after termination of employment.

(2)  Based on 419,000 shares granted during fiscal 1994.

(3)  Potential realizable  values on  net of  exercise price,  but before  taxes
     associated with exercise. These amounts represent certain assumed rights of
     appreciation  only, based  on the SEC  rules. Actual  realizable values, if
     any, on stock option exercises are  dependent on the future performance  of
     the  common  stock,  overall  market  conditions  and  the  option holder's
     continued employment through the vesting period.
</TABLE>

                                       5
<PAGE>
AGGREGATE OPTION EXERCISES IN LAST FISCAL YEAR AND FISCAL YEAR-END VALUES

    The following table  sets forth, for  each Named Officer,  each exercise  of
stock  options during the fiscal  year ended December 31,  1994 and the year-end
value of unexercised options:

<TABLE>
<CAPTION>
                                                                 NUMBER OF
                                                                 SECURITIES
                                                             UNDERLYING OPTIONS   VALUE OF UNEXERCISED
                                                                AT YEAR-END:     IN-THE-MONEY OPTIONS AT
                      SHARES ACQUIRED    VALUE ACQUIRED ON      EXERCISABLE/     YEAR-END: EXERCISABLE/
       NAME             ON EXERCISE         EXERCISE(1)        UNEXERCISABLE        UNEXERCISABLE(2)
- - -------------------  -----------------  -------------------  ------------------  -----------------------
<S>                  <C>                <C>                  <C>                 <C>
John D. Heaton                   0                   0          50,000/150,000                0/0
Paul B. Nolan                    0                   0           27,000/15,000                0/0
<FN>
- - ------------------------
(1)  Market value  of underlying  securities  minus exercise  price at  time  of
     exercise.

(2)  Market value of underlying securities at year-end minus the exercise price.
</TABLE>

COMPLIANCE WITH SECTION 16(A) OF THE EXCHANGE ACT

    Section  16(a) of the Securities Exchange  Act of 1934, as amended, requires
the Company's officers and directors, and persons who own more than ten  percent
of  a registered class  of the Company's  equity securities, to  file reports of
ownership on Form 3 and changes in ownership on Form 4 and Form 5 with the  SEC.
Such  officers, directors and ten percent  shareholders are also required by the
SEC rules to furnish  the Company with  copies of all  Section 16(a) forms  they
file.

    Based  solely on its review of the copies  of such forms received by it, the
Company believes that, during the fiscal year ended January 1, 1995, all Section
16(a) filing requirements applicable to the officers, directors and ten  percent
shareholders were complied with.

CERTAIN TRANSACTIONS

    Pursuant  to the terms of an agreement dated May 1, 1985 between the Company
and Vincent J.  Coates, the Company  is obligated,  in the event  Mr. Coates  is
required  to resign as Chief Executive Officer of the Company for any reason, to
continue to pay  Mr. Coates  his salary  for five years  from the  date of  such
resignation.

     PROPOSAL NO. 2 -- RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS

    The  Board has appointed  Deloitte & Touche,  independent auditors, to audit
the consolidated financial statements of the Company for the fiscal year  ending
December  31,  1995.  Deloitte  & Touche  has  audited  the  Company's financial
statements since the fiscal year ended December 31, 1991.

    Representatives of  Deloitte &  Touche are  expected to  be present  at  the
meeting  with the opportunity to  make a statement if they  desire to do so, and
are expected to be available to respond to appropriate questions.

    THE BOARD OF  DIRECTORS UNANIMOUSLY RECOMMEND  THAT SHAREHOLDERS VOTE  "FOR"
APPROVAL AND RATIFICATION OF THE SELECTION OF DELOITTE & TOUCHE AS THE COMPANY'S
INDEPENDENT AUDITORS.

                                 OTHER MATTERS

    The Company knows of no other matters to be submitted to the meeting. If any
other  matters properly  come before  the meeting,  it is  the intention  of the
persons named in the enclosed  proxy card to vote  the shares they represent  as
the Board of Directors may recommend.

                                          THE BOARD OF DIRECTORS

Dated: May 12, 1995

                                       6
<PAGE>

      THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                               PROXY
                       NANOMETRICS INCORPORATED
                 1995 ANNUAL MEETING OF SHAREHOLDERS
                            May 23, 1995

   The undersigned shareholder(s) of Nanometrics Incorporated, a California
corporation, hereby acknowledges receipt of the Notice of Annual Meeting of
Shareholders and Proxy Statement, each dated May 12, 1995, and hereby
appoints Vincent J. Coates and Paul B. Nolan, and each of them, Proxies and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in
the name of the undersigned, to represent the undersigned at the 1995 Annual
Meeting of Shareholders of Nanometrics Incorporated to be held on May 23,
1995 at 1:30 p.m., local time, at the principal offices of the Company
located at 310 DeGuigne Drive, Sunnyvale, California, 94086 and at any
adjournments thereof, and to vote all shares of Common Stock which the
undersigned is entitled to vote on the matters set forth below:

1.   ELECTION OF DIRECTORS:

     FOR all nominees listed below (except as indicated)

     WITHHOLD AUTHORITY to vote for all nominees listed below

     IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL NOMINEE,
     STRIKE A LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

     Vincent J. Coates, Nathaniel Brenner, Norman V. Coates, Roger G. Novesky.

2.   PROPOSAL TO RATIFY THE APPOINTMENT OF DELOITTE & TOUCHE AS INDEPENDENT
     PUBLIC AUDITORS OF THE COMPANY FOR THE 1995 FISCAL YEAR.

     / /FOR                 / /AGAINST             / /ABSTAIN

                   (CONTINUED, AND TO BE SIGNED, ON REVERSE SIDE)


<PAGE>

                          (CONTINUED FROM OTHER SIDE)

   In their discretion the Proxies are authorized to vote upon such other
business as may properly come before the meeting.

   THIS BALLOT WILL BE VOTED AS DIRECTED OR, IF NO CONTRARY DIRECTION IS
INDICATED, WILL BE VOTED FOR THE ELECTION OF DIRECTORS, FOR RATIFICATION OF
DELOITTE & TOUCHE AS INDEPENDENT PUBLIC AUDITORS AND AS SAID PROXIES DEEM
ADVISABLE ON SUCH OTHER MATTERS AS MAY COME BEFORE THE MEETING.

                                                Typed or Printed Name(s)

                                                       Signature

                                                       Signature

                                                 Title, if applicable

                                             Dated:____________________, 1995

   THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S) EXACTLY
AS HIS OR HER NAME APPEARS HEREON AND RETURNED PROMPTLY IN THE ENCLOSED
ENVELOPE.  PERSONS SIGNING IN A FIDUCIARY CAPACITY SHOULD SO INDICATE.  IF
SHARES ARE HELD BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.


<PAGE>

        THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                                   PROXY
                         NANOMETRICS INCORPORATED
                    1995 ANNUAL MEETING OF SHAREHOLDERS
                               MAY 23, 1995

     The undersigned shareholder(s) of Nanometrics Incorporated, a California
corporation, hereby acknowledges receipt of the Notice of Annual Meeting of
Shareholders and Proxy Statement, each dated May 12, 1995, and hereby appoints
Vincent J. Coates and Paul B. Nolan, and each of them, Proxies and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 1995 Annual Meeting
of Shareholders of Nanometrics Incorporated to be held on May 23, 1995 at 1:30
p.m., local time, at the principal offices of the Company located at 310
DeGuigne Drive, Sunnyvale, California, 94086 and at any adjournments thereof,
and to vote all shares of Common Stock which the undersigned is entitled to vote
on the matters set forth below:

1.   ELECTION OF DIRECTORS:

     FOR all nominees listed below
     (except as indicated)

     WITHHOLD AUTHORITY
     to vote for all nominees listed below

     IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL NOMINEE,
     STRIKE A LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

     Vincent J. Coates, Nathaniel Brenner, Norman V. Coates, Roger G. Novesky.

2.   PROPOSAL TO RATIFY THE APPOINTMENT OF DELOITTE & TOUCHE AS INDEPENDENT
     PUBLIC AUDITORS OF THE COMPANY FOR THE 1995 FISCAL YEAR.

     FOR                    AGAINST                ABSTAIN


              (CONTINUED, AND TO BE SIGNED, ON REVERSE SIDE)
<PAGE>

                        (CONTINUED FROM OTHER SIDE)

     In their discretion the Proxies are authorized to vote upon such other
business as may properly come before the meeting.

     THIS BALLOT WILL BE VOTED AS DIRECTED OR, IF NO CONTRARY DIRECTION IS
INDICATED, WILL BE VOTED FOR THE ELECTION OF DIRECTORS, FOR RATIFICATION OF
DELOITTE & TOUCHE AS INDEPENDENT PUBLIC AUDITORS AND AS SAID PROXIES DEEM
ADVISABLE ON SUCH OTHER MATTERS AS MAY COME BEFORE THE MEETING.


                                      Typed or Printed Name(s)


                                           Signature


                                           Signature


                                       Title, if applicable


                                  Dated:                      , 1995
                                        ----------------------

     THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S) EXACTLY AS
HIS OR HER NAME APPEARS HEREON AND RETURNED PROMPTLY IN THE ENCLOSED ENVELOPE.
PERSONS SIGNING IN A FIDUCIARY CAPACITY SHOULD SO INDICATE.  IF SHARES ARE HELD
BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.


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