NANOMETRICS INC
S-8, 1997-08-14
MEASURING & CONTROLLING DEVICES, NEC
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<PAGE>
 
         As filed with the Securities and Exchange Commission on August 14, 1997
                                                      Registration No. 333-
=============================================================================== 
 
                      SECURITIES AND EXCHANGE COMMISSION
                            Washington, D.C. 20549
 
                               ---------------- 
 
                                   FORM S-8
                            REGISTRATION STATEMENT
                                     Under
                          The Securities Act of 1933
 
                               ---------------- 
 
                           NANOMETRICS INCORPORATED
            (Exact name of Registrant as specified in its charter)
 
                               ---------------- 
 
       CALIFORNIA                                        94-2276314
       ----------                                        ----------
(State of incorporation)                    (I.R.S. Employer Identification No.)
 
                              310 DeGuigne Drive
                          Sunnyvale, California 94086
  (Address, including zip code, of Registrant's principal executive offices)
 
                               ---------------- 
 
           1991 STOCK OPTION PLAN (As Amended Through May 15, 1997)
                           (Full title of the plan)
 
                               ---------------- 
 
                               Vincent J. Coates
                            Chief Executive Officer
                           Nanometrics Incorporated
                              310 DeGuigne Drive
                          Sunnyvale, California 94086
                                (408) 746-1600
(Name, address, and telephone number, including area code, of agent for service)
 
                               ---------------- 
 
                                   Copy to:
                             BARRY E. TAYLOR, ESQ.
                       WILSON SONSINI GOODRICH & ROSATI
                           PROFESSIONAL CORPORATION
                              650 PAGE MILL ROAD
                              PALO ALTO, CA 94304
                                (415) 493-9300

                        CALCULATION OF REGISTRATION FEE

<TABLE> 
<CAPTION> 
============================================================================================================== 
                                                              Proposed             Proposed                     
                                                              Maximum               Maximum                     
Title of Each Class                          Amount           Offering             Aggregate        Amount of   
 of Securities to                            to be             Price               Offering        Registration
  be Registered                            Registered         Per Share              Price             Fee      
- -------------------------------------------------------------------------------------------------------------- 
<S>                                     <C>                   <C>                  <C>             <C> 
Common Stock, no par value                                                           
To be issued under 1991 Stock Option                                                                
 Plan.................................  1,500,000 shares       $9.734(1)              $14,601,000     $4,424.55
============================================================================================================== 
</TABLE>

(1) Computed in accordance with Rule 457 under the Securities Act of 1933, as
    amended.  Such computation is based on an estimated exercise price of $9.734
    per share of Nanometrics Incorporated Common Stock, representing the average
    of the high and low prices of Nanometrics Incorporated Common Stock on the
    Nasdaq National Market on August 11, 1997.

=============================================================================== 
<PAGE>
 
                           NANOMETRICS INCORPORATED
                      REGISTRATION STATEMENT ON FORM S-8


                                    PART II

                INFORMATION REQUIRED IN REGISTRATION STATEMENT


Item 3.   Incorporation of Documents by Reference
          ---------------------------------------

          There are hereby incorporated by reference in this Registration 
Statement the following documents and information heretofore filed by
Nanometrics Incorporated (the "Company") with the Securities and Exchange
Commission (the "Commission"):

          (1) The Company's Annual Report on Form 10-K for the fiscal year ended
              December 31, 1996.

          (2) The Company's quarterly report on Form 10-Q for the fiscal 
              quarters ended June 30, 1997 and March 31, 1997 respectively.

          (3) The description of the Company's Common Stock contained in the
              Company's Registration Statement on Form 8-A filed with the
              Commission on April 29, 1985 pursuant to Section 12(g) of the
              Securities Exchange Act of 1934, as amended (the "Exchange Act").

          All documents filed by the Company pursuant to Sections 13(a), 13(c), 
14 and 15(d) of the Exchange Act on or after the date of this Registration
Statement and prior to the filing of a post-effective amendment which indicates
that all securities offered have been sold or which deregisters all securities
then remaining unsold shall be deemed to be incorporated by reference in this
Registration Statement and to be part hereof from the date of filing of such
documents.


Item 4.   Description of Securities.
          ------------------------- 

          Not applicable.


Item 5.   Interests of Named Experts and Counsel.
          -------------------------------------- 

          Not applicable.


Item 6.   Indemnification of Directors and Officers.
          ----------------------------------------- 

          Section 317 of the California Corporations Code authorizes a court to
award, or a corporation's Board of Directors to grant, indemnity to directors
and officers in terms sufficiently broad to permit such indemnification under
certain circumstances for liabilities (including reimbursement for expenses
incurred) arising under the Securities Act. Article V of the Company's Restated
Articles of Incorporation and Section 6.1 of Article VI of the Company's Bylaws
provide for indemnification of its directors, officers, employees 

                                      II-2
<PAGE>
 
and other agents to the maximum extent permitted by the California Corporations
Code. In addition, the Company has entered into indemnification agreements with
its officers and directors.


Item 7.   Exemption from Registration Claimed.
          ----------------------------------- 

          Not applicable.


Item 8.   Exhibits.
          --------
 
          Exhibit               
          Number                            Description
          -------    -----------------------------------------------------------
            4.1      1991 Stock Option Plan and form of Stock Option Agreements,
                     as amended through May 15, 1997.
            5.1      Opinion of Wilson Sonsini Goodrich & Rosati, a 
                     Professional Corporation as to legality of securities 
                     being registered.
           23.1      Consent of Wilson Sonsini Goodrich & Rosati, a 
                     Professional Corporation (contained in Exhibit 5.1 hereto).
           23.2      Independent Auditors' Consent.
           24.1      Power of Attorney (see page II-5).
 
Item 9.   Undertakings.
          ------------ 

          A.   The undersigned registrant hereby undertakes:

               (1) To file, during any period in which offers or sales are being
made, a post-effective amendment to this registration statement to include any
material information with respect to the plan of distribution not previously
disclosed in the registration statement or any material change to such
information in the registration statement.

               (2) That, for the purpose of determining any liability under the
Securities Act, each such post-effective amendment shall be deemed to be a new
registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial bona
fide offering thereof.

               (3) To remove from registration by means of a post-effective 
amendment any of the securities being registered which remain unsold at the
termination of the offering.

               (4) That for purposes of determining any liability under the
Securities Act, each filing of the Registrant's annual report pursuant to
Section 13(a) or Section 15(d) of the Exchange Act (and, where applicable, each
filing of an employee benefit plan's annual report pursuant to Section 15(d) of
the Exchange Act) that is incorporated by reference in the registration
statement shall be deemed to be a new registration statement relating to the
securities offered therein, and the offering of such securities at that time
shall be deemed to be the initial bona fide offering thereof.

                                      II-3
<PAGE>
 
          B.   The undersigned registrant hereby undertakes that, for purposes 
of determining any liability under the Securities Act, each filing of the
registrant's annual report pursuant to section 13(a) or section 15(d) of the
Exchange Act (and, where applicable, each filing of an employee benefit plan's
annual report pursuant to section 15(d) of the Exchange Act) that is
incorporated by reference in the registration statement shall be deemed to be a
new registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial bona
fide offering thereof.

          C.   The undersigned registrant hereby undertakes to deliver or cause 
to be delivered with the prospectus to each employee to whom the prospectus is
sent or give a copy of the registrant's annual report to stock holders for its
last fiscal year, unless such employee otherwise has received a copy of such
report, in which case the registration shall state in the prospectus that it
will promptly furnish, without charge, a copy of such report on written request
of the employee. If the last fiscal year of the registrant has ended within 120
days prior to the use of the prospectus, the annual report of the registrant for
the preceding fiscal year may be so delivered, but within such 120 days period
the annual report for the last fiscal year will be furnished to each such
employee.

          D.   The undersigned registrant hereby undertakes to transmit or 
cause to be transmitted to all employees participating in the plan who do not
otherwise receive such materials as stockholders of the registrant, at the time
and in the manner such material is sent to its stockholders, copies of all
reports, proxy statements and other communications distributed to its
stockholders generally.

          E.   Insofar as indemnification for liabilities arising under the
Securities Act may be permitted to directors, officers and controlling persons
of the registrant pursuant to the foregoing provisions, or otherwise, the
registrant has been advised that in the opinion of the Commission such
indemnification is against public policy as expressed in the Securities Act and
is, therefore, unenforceable.  In the event that a claim for indemnification
against such liabilities (other than the payment by the registrant of expenses
incurred or paid by a director, officer or controlling person of the registrant
in the successful defense of any action, suit or proceeding) is asserted by such
director, officer or controlling person in connection with the securities being
registered, the registrant will, unless in the opinion of its counsel the matter
has been settled by controlling precedent, submit to a court of appropriate
jurisdiction the question whether such indemnification by it is against public
policy as expressed in the Securities Act and will be governed by the final
adjudication of such issue.

                                      II-4
<PAGE>
 
                                  SIGNATURES

     Pursuant to the requirements of the Securities Act of 1933, the registrant,
Nanometrics Incorporated,  certifies that it has reasonable grounds to believe
that it meets all of the requirements for filing on Form S-8 and has duly caused
this registration statement to be signed on its behalf by the undesigned,
thereunto duly authorized, in the City of Sunnyvale, State of California, on
August 12, 1997.

                               NANOMETRICS INCORPORATED



                               By: /s/ Vincent J. Coates
                                  ----------------------------------------------
                               Vincent J. Coates
                               Chief Executive Officer and Chairman of the Board


                               POWER OF ATTORNEY

KNOW ALL PERSONS BY THESE PRESENTS, that each person whose signature appears
below constitutes and appoints Vincent J. Coates and Paul B. Nolan and each of
them, as his attorney-in-fact, with full power of substitution in each, for him
in any and all capacities to sign any amendments to this Registration Statement
on Form S-8, and to file the same, with exhibits thereto and other documents in
connection therewith, with the Securities and Exchange Commission, hereby
ratifying and confirming all that said attorney-in-fact, or his substitutes, may
do or cause to be done by virtue hereof.

                                      II-5
<PAGE>
 
     Pursuant to the requirements of the Securities Act of 1933, as amended,
this registration statement has been signed below by the following persons in
the capacities and on the dates indicated.

      Signature                     Capacity                        Date
- -----------------------  ---------------------------------    -----------------
 
 
/s/ Vincent J. Coates    Chief Executive Officer and           August 11, 1997
- -----------------------  Chairman of the Board of Directors 
Vincent J. Coates        (Principal Executive Officer)
 
 
/s/ Paul B. Nolan        Chief Financial Officer and Vice      August 11, 1997
- -----------------------  President (Principal Accounting
Paul B. Nolan            and Financial Officer)
                       
 
 
/s/ Nathaniel Brenner    Director                              August 11, 1997
- -----------------------
Nathaniel Brenner
 
 
/s/ Norman V. Coates     Director                              August 11, 1997
- -----------------------
Norman V. Coates
 
 
/s/ John D. Heaton       President, Chief Operating Officer    August 11, 1997
- -----------------------  and Director
John D. Heaton
 
/s/ Kanegi Nagai         Director                              August 11, 1997
- -----------------------
Kanegi Nagai
 
 
/s/ Clifford F. Smedley  Director                              August 11, 1997
- -----------------------
Clifford F. Smedley

                                      II-6
<PAGE>
 
                               INDEX TO EXHIBITS
 
Exhibit No.                         Description
- -----------    -----------------------------------------------------
 
    4.1        1991 Stock Option Plan and form of Stock Option
               Agreements, as amended through May 15, 1997.
 
    5.1        Opinion of Wilson Sonsini Goodrich & Rosati, a
               Professional Corporation as to legality of securities
               being registered.
 
   23.1        Consent of Wilson Sonsini Goodrich & Rosati, a
               Professional Corporation (contained in Exhibit 5.1
               hereto).
 
   23.2        Independent Auditors' Consent.
 
   24.1        Power of Attorney (see page II-5).

<PAGE>
 
                                                                     EXHIBIT 4.1

                            NANOMETRICS INCORPORATED

                             1991 STOCK OPTION PLAN

                      (AS AMENDED EFFECTIVE MAY 15, 1997)


     1. Purposes of the Plan.  The purposes of this
        --------------------                       
Stock Option Plan are:

     .    to attract and retain the best available personnel for positions of
          substantial responsibility,

     .    to provide additional incentive to Employees, Directors and
          Consultants, and

     .    to promote the success of the Company's business.

Options granted under the Plan may be Incentive Stock Options or Nonstatutory
Stock Options, as determined by the Administrator at the time of grant.  Stock
Purchase Rights may also be granted under the Plan.

     2. Definitions.  As used herein, the following definitions shall apply:
        -----------                                                         

        (a) "Administrator" means the Board or any of its Committees as shall be
            -------------                                                      
administering the Plan, in accordance with Section 4 of the Plan.

        (b)  "Applicable Laws" means the legal requirements relating to the
              ---------------                                              
administration of stock option plans under state corporate and securities laws
and the Code.

        (c)  "Board" means the Board of Directors of the Company.
              -----                                              

        (d)  "Code" means the Internal Revenue Code of 1986, as amended.
              ----                                                      

        (e) "Committee"  means a Committee appointed by the Board in
             ---------                                              
accordance with Section 4 of the Plan.

        (f) "Common Stock" means the Common Stock of the Company.
             ------------                                        

        (g) "Company" means Nanometrics Incorporated, a California
             -------                                              
corporation.

        (h) "Consultant" means any person, including an advisor, engaged by the
             ----------                                                        
Company or a Parent or Subsidiary to render services and who is compensated for
such services.

        (i) "Continuous Status as an Employee or Consultant" means the
             ----------------------------------------------
employment or consulting relationship is not interrupted or terminated by the
Company, any Parent or Subsidiary.
<PAGE>
 
Continuous Status as an Employee or Consultant shall not be considered
interrupted in the case of:  (i) any leave of absence approved by the Board,
including sick leave, military leave, or any other personal leave; provided,
however, that for purposes of Incentive Stock Options, any such leave may not
exceed ninety (90) days, unless reemployment upon the expiration of such leave
is guaranteed by contract (including certain Company policies) or statute; or
(ii) transfers between locations of the Company or between the Company, its
Parent, its Subsidiaries or its successor.  If reemployment upon expiration of a
leave of absence approved by the Company is not so guaranteed, on the 181st day
of such leave any Incentive Stock Option held by the Optionee shall cease to be
treated as an Incentive Stock Option and shall be treated for tax purposes as a
Nonstatutory Stock Option.

        (j) "Director" means a member of the Board.
             --------                              

        (k) "Disability" means total and permanent disability as defined in
             ----------                                                    
Section 22(e)(3) of the Code.

        (l) "Employee" means any person, including Officers and Directors,
             --------                                                     
employed by the Company or any Parent or Subsidiary of the Company.  Neither
service as a Director nor payment of a director's fee by the Company shall be
sufficient to constitute "employment" by the Company.

        (m) "Exchange Act" means the Securities Exchange Act of 1934, as
             ------------                                               
amended.

        (n) "Fair Market Value" means, as of any date, the value of Common
             -----------------                                            
Stock determined as follows:

            (i) If the Common Stock is listed on any established stock
exchange or a national market system, including without limitation the
National Market System of the National Association of Securities Dealers, Inc.
Automated Quotation ("NASDAQ") System, the Fair Market Value of a Share of
Common Stock shall be the closing sales price for such stock (or the closing
bid, if no sales were reported) as quoted on such system or exchange (or the
exchange with the greatest volume of trading in Common Stock) on the last
market trading day prior to the day of determination, as reported in the Wall
Street Journal or such other source as the Administrator deems reliable;

            (ii) If the Common Stock is quoted on the NASDAQ System (but not
on the National Market System thereof) or is regularly quoted by a recognized
securities dealer but selling prices are not reported, the Fair Market Value
of a Share of Common Stock shall be the mean between the high bid and low
asked prices for the Common Stock on the last market trading day prior to the
day of determination, as reported in the Wall Street Journal or such other
source as the Administrator deems reliable;

            (iii) In the absence of an established market for the Common
Stock, the Fair Market Value shall be determined in good faith by the
Administrator.

        (o) "Incentive Stock Option" means an Option intended to qualify as an
             ----------------------                                           
incentive stock option within the meaning of Section 422 of the Code and the
regulations promulgated thereunder.

                                      -2-
<PAGE>
 
        (p) "Nonstatutory Stock Option" means an Option not intended to
             -------------------------                                 
qualify as an Incentive Stock Option.

        (q) "Notice of Grant" means a written notice evidencing certain terms
             ---------------
and conditions of an individual Option or Stock Purchase Right grant. The
Notice of Grant is part of the Option Agreement.

        (r) "Officer" means a person who is an officer of the Company within the
             -------                                                            
meaning of Section 16 of the Exchange Act and the rules and regulations
promulgated thereunder.

        (s) "Option" means a stock option granted pursuant to the Plan.
             ------                                                    

        (t) "Option Agreement" means a written agreement between the Company and
             ----------------                                                   
an Optionee evidencing the terms and conditions of an individual Option grant.
The Option Agreement is subject to the terms and conditions of the Plan.

        (u) "Optioned Stock" means the Common Stock subject to an Option or
             --------------                                                
Stock Purchase Right.

        (v) "Optionee" means an Employee, Director  or Consultant who holds
             --------                                                      
an outstanding Option or Stock Purchase Right.

        (w) "Parent" means a "parent corporation", whether now or hereafter
              ------                                                        
existing, as defined in Section 424(e) of the Code.

        (x) "Plan" means this 1991 Stock Option Plan.
             ----                                    

        (y) "Restricted Stock" means shares of Common Stock acquired pursuant
             ----------------
to a grant of Stock Purchase Rights under Section 11 below.

        (z) "Restricted Stock Purchase Agreement" means a written agreement
             -----------------------------------                           
between the Company and the Optionee evidencing the terms and restrictions
applying to stock purchased under a Stock Purchase Right.  The Restricted Stock
Purchase Agreement is subject to the terms and conditions of the Plan and the
Notice of Grant.

        (aa) "Rule 16b-3" means Rule 16b-3 of the Exchange Act or any
              ----------
successor to Rule 16b-3, as in effect when discretion is being exercised with
respect to the Plan.

        (bb) "Share" means a share of the Common Stock, as adjusted in
              -----                                                   
accordance with Section 13 of the Plan.

        (cc) "Stock Purchase Right" means the right to purchase Common Stock
              --------------------                                          
pursuant to Section 11 of the Plan, as evidenced by a Notice of Grant.

                                      -3-
<PAGE>
 
        (dd) "Subsidiary" means a "subsidiary corporation", whether now or
              ----------                                                  
hereafter existing, as defined in Section 424(f) of the Code.

     3. Stock Subject to the Plan.  Subject to the provisions of Section 13 of
        -------------------------                                             
the Plan, the maximum aggregate number of Shares which may be optioned and sold
under the Plan is 3,000,000 Shares of Common Stock.  The Shares may be
authorized, but unissued, or reacquired Common Stock.  However, should the
Company reacquire Shares which were issued pursuant to the exercise of an Option
or Stock Purchase Right, such Shares shall not become available for future grant
under the Plan.

        If an Option or Stock Purchase Right expires or becomes unexercisable
without having been exercised in full, the unpurchased Shares which were subject
thereto shall become available for future grant under the Plan (unless the Plan
has terminated).

     4. Administration of the Plan.
        -------------------------- 

        (a) Procedure.
            --------- 

            (i) Multiple Administrative Bodies.  The Plan may be administered by
                ------------------------------                                  
different Committees with respect to different groups of Employees or
Consultants.

            (ii) Section 162(m). To the extent that the Administrator
                 --------------
determines it to be desirable to qualify Options granted hereunder as
"performance-based compensation" within the meaning of Section 162(m) of the
Code, the Plan shall be administered by a Committee of two or more "outside
directors" within the meaning of Section 162(m) of the Code.

            (iii) Rule 16b-3. To the extent desirable to qualify transactions
                  ----------
hereunder as exempt under Rule 16b-3, the transactions contemplated hereunder
shall be structured to satisfy the requirements for exemption under Rule
16b-3.

            (iv) Other Administration. Other than as provided above, the Plan
                 --------------------
shall be administered by (A) the Board or (B) a Committee, which committee
shall be constituted to satisfy Applicable Laws.

        (b) Powers of the Administrator.  Subject to the provisions of the Plan,
            ---------------------------                                         
and in the case of a Committee, subject to the specific duties delegated by the
Board to such Committee, the Administrator shall have the authority, in its
discretion:

            (i) to determine the Fair Market Value of the Common Stock, in
accordance with Section 2(n) of the Plan;

            (ii) to select the Employees, Directors and Consultants to whom
Options and Stock Purchase Rights may be granted hereunder;

                                      -4-
<PAGE>
 
            (iii) to determine whether and to what extent Options and Stock
Purchase Rights or any combination thereof, are granted hereunder;

            (iv) to determine the number of shares of Common Stock to be
covered by each Option and Stock Purchase Right granted hereunder;

            (v) to approve forms of agreement for use under the Plan;

            (vi) to determine the terms and conditions, not inconsistent with
the terms of the Plan, of any award granted hereunder. Such terms and
conditions include, but are not limited to, the exercise price, the time or
times when Options or Stock Purchase Rights may be exercised (which may be
based on performance criteria), and any restriction or limitation, or any
vesting acceleration or waiver of forfeiture restrictions regarding any Option
or Stock Purchase Right or the shares of Common Stock relating thereto, based
in each case on such factors as the Administrator, in its sole discretion,
shall determine;

            (vii) to determine whether, to what extent and under what
circumstances Common Stock and other amounts payable with respect to an award
under this Plan shall be deferred either automatically or at the election of
the participant (including providing for and determining the amount (if any)
of any deemed earnings on any deferred amount during any deferral period);

            (viii) to reduce the exercise price of any Option or Stock
Purchase Right to the then current Fair Market Value if the Fair Market Value
of the Common Stock covered by such Option or Stock Purchase Right shall have
declined since the date the Option was granted;

            (ix) to construe and interpret the terms of the Plan;

            (x)  to prescribe, amend and rescind rules and regulations
relating to the Plan;

            (xi) to modify or amend each Option or Stock Purchase Right
(subject to Section 15(c) of the Plan);

            (xii) to allow Optionees to satisfy withholding tax obligations by
electing to have the Company withhold from the Shares to be issued upon
exercise of an Option or Stock Purchase Right that number of Shares having a
Fair Market Value equal to the amount required to be withheld. The Fair Market
Value of the Shares to be withheld shall be determined on the date that the
amount of tax to be withheld is to be determined. All elections by an Optionee
to have Shares withheld for this purpose shall be made in such form and under
such conditions as the Administrator may deem necessary or advisable;

            (xiii) to authorize any person to execute on behalf of the Company
any instrument required to effect the grant of an Option or Stock Purchase
Right previously granted by the Administrator; and

                                      -5-
<PAGE>
 
            (xiv) to determine the terms and restrictions applicable to
Options and Stock Purchase Rights and any Restricted Stock.

            (xv) to make all other determinations deemed necessary or
advisable for administering the Plan.

        (c) Effect of Administrator's Decision.  The Administrator's decisions,
            ----------------------------------                                 
determinations and interpretations shall be final and binding on all Optionees
and any other holders of Options or Stock Purchase Rights.

     5. Eligibility.  Nonstatutory Stock Options and Stock Purchase Rights may
        -----------                                                           
be granted to Employees, Directors and Consultants.  Incentive Stock Options may
be granted only to Employees.  If otherwise eligible, an Employee, Director or
Consultant who has been granted an Option or Stock Purchase Right may be granted
additional Options or Stock Purchase Rights.

     6. Limitations.
        ----------- 

        (a) Each Option shall be designated in the Notice of Grant as either an
Incentive Stock Option or a Nonstatutory Stock Option.  However, notwithstanding
such designations, to the extent that the aggregate Fair Market Value:

            (i) of Shares subject to an Optionee's incentive stock options
granted by the Company, any Parent or Subsidiary, which (ii) become
exercisable for the first time during any calendar year (under all plans of
the Company or any Parent or Subsidiary) exceeds $100,000, such excess Options
shall be treated as Nonstatutory Stock Options. For purposes of this Section
6(a), incentive stock options shall be taken into account in the order in
which they were granted, and the Fair Market Value of the Shares shall be
determined as of the time of grant.

        (b) Neither the Plan nor any Option or Stock Purchase Right shall confer
upon an Optionee any right with respect to continuing the Optionee's employment
or consulting relationship with the Company, nor shall they interfere in any way
with the Optionee's right or the Company's right to terminate such employment or
consulting relationship at any time, with or without cause.

        (c) The following limitations shall apply to grants of Options:

            (i) No Employee, Director or Consultant shall be granted, in any
fiscal year of the Company, Options to purchase more than 1,000,000 Shares.

            (ii) In connection with his or her initial service, an Employee,
Director or Consultant may be granted Options to purchase up to an additional
1,000,000 Shares which shall not count against the limit set forth in
subsection (i) above.

            (iii) The foregoing limitations shall be adjusted proportionately
in connection with any change in the Company's capitalization as described in
Section 13.

                                      -6-
<PAGE>
 
            (iv) If an Option is cancelled in the same fiscal year of the
Company in which it was granted (other than in connection with a transaction
described in Section 13), the cancelled Option will be counted against the
limits set forth in subsections (i) and (ii) above. For this purpose, if the
exercise price of an Option is reduced, the transaction will be treated as a
cancellation of the Option and the grant of a new Option.

     7. Term of Plan.  Subject to Section 19 of the Plan, the Plan shall
        ------------                                                    
become effective upon the earlier to occur of its adoption by the Board or its
approval by the shareholders of the Company as described in Section 19 of the
Plan.  It shall continue in effect for a term of ten (10) years unless
terminated earlier under Section 15 of the Plan.

     8. Term of Option.  The term of each Option shall be stated in the Notice
        --------------                                                        
of Grant; provided, however, that in the case of an Incentive Stock Option, the
term shall be ten (10) years from the date of grant or such shorter term as may
be provided in the Notice of Grant.  However, in the case of an Option granted
to an Optionee who, at the time the Option is granted, owns stock representing
more than ten percent (10%) of the voting power of all classes of stock of the
Company or any Parent or Subsidiary, the term of the Option shall be five (5)
years from the date of grant or such shorter term as may be provided in the
Notice of Grant.

     9. Option Exercise Price and Consideration.
        --------------------------------------- 

        (a) Exercise Price.  The per share exercise price for the Shares to be
            --------------                                                    
issued pursuant to exercise of an Option shall be determined by the
Administrator, subject to the following:

            (i) In the case of an Incentive Stock Option

                (A) granted to an Employee who, at the time the Incentive
Stock Option is granted, owns stock representing more than ten percent (10%)
of the voting power of all classes of stock of the Company or any Parent or
Subsidiary, the per Share exercise price shall be no less than 110% of the
Fair Market Value per Share on the date of grant.

                (B) granted to any other Employee, the per Share exercise
price shall be no less than 100% of the Fair Market Value per Share on the
date of grant.

            (ii) In the case of a Nonstatutory Stock Option, the per Share
exercise price shall be no less than 50% of the Fair Market Value per Share on
the date of grant. In the case of a Nonstatutory Stock Option intended to
qualify as "performance-based compensation" within the meaning of Section
162(m) of the Code, the per Share exercise price shall be no less than 100% of
the Fair Market Value per Share on the date of grant.


        (b) Waiting Period and Exercise Dates. At the time an Option is
            ---------------------------------                     
granted, the Administrator shall fix the period within which the Option may be
exercised and shall determine any

                                      -7-
<PAGE>
 
conditions which must be satisfied before the Option may be exercised.  In so
doing, the Administrator may specify that an Option may not be exercised until
the completion of a service period.

        (c) Form of Consideration.  The Administrator shall determine the
            ---------------------                                        
acceptable form of consideration for exercising an Option, including the method
of payment.  In the case of an Incentive Stock Option, the Administrator shall
determine the acceptable form of consideration at the time of grant.  Such
consideration may consist entirely of:

            (i) cash,

            (ii) check,

            (iii) promissory note,

            (iv) other Shares which (A) in the case of Shares acquired upon
exercise of an option, have been owned by the Optionee for more than six
months on the date of surrender, and (B) have a Fair Market Value on the date
of surrender equal to the aggregate exercise price of the Shares as to which
said Option shall be exercised,

            (v) delivery of a properly executed exercise notice together with
such other documentation as the Administrator and the broker, if applicable,
shall require to effect an exercise of the Option and delivery to the Company
of the sale or loan proceeds required to pay the exercise price,

            (vi) any combination of the foregoing methods of payment, or

            (vii) such other consideration and method of payment for the
issuance of Shares to the extent permitted by Applicable Laws.

     10. Exercise of Option.
         ------------------ 

         (a) Procedure for Exercise; Rights as a Shareholder. Any Option granted
             -----------------------------------------------                    
hereunder shall be exercisable according to the terms of the Plan and at such
times and under such conditions as determined by the Administrator and set forth
in the Option Agreement.

          An Option may not be exercised for a fraction of a Share.

          An Option shall be deemed exercised when the Company receives: (i)
written notice of exercise (in accordance with the Option Agreement) from the
person entitled to exercise the Option, and (ii) full payment for the Shares
with respect to which the Option is exercised.  Full payment may consist of any
consideration and method of payment authorized by the Administrator and
permitted by the Option Agreement and the Plan.  Shares issued upon exercise of
an Option shall be issued in the name of the Optionee or, if requested by the
Optionee, in the name of the Optionee and his or her spouse.  Until the stock
certificate evidencing such Shares is issued (as evidenced by the appropriate
entry on the books of the Company or of a duly authorized transfer agent of the
Company), no right to vote or receive

                                      -8-
<PAGE>
 
dividends or any other rights as a shareholder shall exist with respect to the
Optioned Stock, notwith  standing the exercise of the Option.  The Company shall
issue (or cause to be issued) such stock certificate promptly after the Option
is exercised.  No adjustment will be made for a dividend or other right for
which the record date is prior to the date the stock certificate is issued,
except as provided in Section 13 of the Plan.

          Exercising an Option in any manner shall decrease the number of Shares
thereafter available, both for purposes of the Plan and for sale under the
Option, by the number of Shares as to which the Option is exercised.

       (b) Termination of Employment or Consulting Relationship or Directorship.
           --------------------------------------------------------------------
In the event an Optionee's Continuous Status as an Employee, Director or
Consultant terminates (other than upon the Optionee's death or Disability), the
Optionee may exercise his or her Option, but only within such period of time as
is determined by the Administrator, and only to the extent that the Optionee was
entitled to exercise it at the date of termination (but in no event later than
the expiration of the term of such Option as set forth in the Notice of Grant).
In the case of an Incentive Stock Option, the Admin  istrator shall determine
such period of time (in no event to exceed ninety (90) days from the date of
termination) when the Option is granted.  If, at the date of termination, the
Optionee is not entitled to exercise his or her entire Option, the Shares
covered by the unexercisable portion of the Option shall revert to the Plan.
If, after termination, the Optionee does not exercise his or her Option within
the time specified by the Administrator, the Option shall terminate, and the
Shares covered by such Option shall revert to the Plan.

       (c) Disability of Optionee.  In the event an Optionee's Continuous Status
           ----------------------                                               
as an Employee, Director or Consultant terminates as a result of the Optionee's
Disability, the Optionee may exercise his or her Option, but only within twelve
(12) months from the date of such termination, and only to the extent that the
Optionee was entitled to exercise it at the date of such termination (but in no
event later than the expiration of the term of such Option as set forth in the
Notice of Grant).  If, at the date of termination, the Optionee is not entitled
to exercise his or her entire Option, the Shares covered by the unexercisable
portion of the Option shall revert to the Plan.  If, after termination, the
Optionee does not exercise his or her Option within the time specified herein,
the Option shall terminate, and the Shares covered by such Option shall revert
to the Plan.

       (d) Death of Optionee.  In the event of the death of an Optionee, the
           -----------------                                                
Option may be exercised, at any time within twelve (12) months following the
date of death (but in no event later than the expiration of the term of such
Option as set forth in the Notice of Grant), by the Optionee's estate or by a
person who acquired the right to exercise the Option by bequest or inheritance,
but only to the extent the Optionee was entitled to exercise the Option at the
date of death.  If, at the time of death, the Optionee was not entitled to
exercise his or her entire Option, the Shares covered by the unexercisable
portion of the Option shall revert to the Plan.  If, after death, the Optionee's
estate or a person who acquired the right to exercise the Option by bequest or
inheritance does not exercise the Option within the time specified herein, the
Option shall terminate, and the Shares covered by such Option shall revert to
the Plan.

                                      -9-
<PAGE>
 
     11. Stock Purchase Rights.
         --------------------- 

         (a) Rights to Purchase. Stock Purchase Rights may be issued either
             ------------------
alone, in addition to, or in tandem with other awards granted under the Plan
and/or cash awards made outside of the Plan. After the Administrator
determines that it will offer Stock Purchase Rights under the Plan, it shall
advise the offeree in writing, by means of a Notice of Grant, of the terms,
conditions and restrictions related to the offer, including the number of
Shares that the offeree shall be entitled to purchase, the price to be paid
(which price shall not be less than 50% of the Fair Market Value of the Shares
as of the date of the offer), and the time within which the offeree must
accept such offer, which shall in no event exceed six (6) months from the date
upon which the Administrator made the determination to grant the Stock
Purchase Right. The offer shall be accepted by execution of a Restricted Stock
Purchase Agreement in the form determined by the Administrator.

         (b) Repurchase Option. Unless the Administrator determines otherwise,
             -----------------
the Restricted Stock Purchase Agreement shall grant the Company a repurchase
option exercisable upon the voluntary or involuntary termination of the
purchaser's employment with the Company for any reason (including death or
Disability). The purchase price for Shares repurchased pursuant to the
Restricted Stock purchase agreement shall be the original price paid by the
purchaser and may be paid by cancellation of any indebtedness of the purchaser
to the Company. The repurchase option shall lapse at a rate determined by the
Administrator.

         (c) Other Provisions.  The Restricted Stock Purchase Agreement shall
             ----------------                                                
contain such other terms, provisions and conditions not inconsistent with the
Plan as may be determined by the Administrator in its sole discretion.  In
addition, the provisions of Restricted Stock Purchase Agreements need not be the
same with respect to each purchaser.

         (d) Rights as a Shareholder. Once the Stock Purchase Right is
             -----------------------
exercised, the purchaser shall have the rights equivalent to those of a
shareholder, and shall be a shareholder when his or her purchase is entered
upon the records of the duly authorized transfer agent of the Company. No
adjustment will be made for a dividend or other right for which the record
date is prior to the date the Stock Purchase Right is exercised, except as
provided in Section 13 of the Plan.

     12. Non-Transferability of Options and Stock Purchase Rights. Unless
         --------------------------------------------------------        
determined otherwise by the Administrator, an Option or Stock Purchase Right may
not be sold, pledged, assigned, hypothecated, transferred, or disposed of in any
manner other than by will or by the laws of descent or distribution and may be
exercised, during the lifetime of the Optionee, only by the Optionee.  If the
Administrator makes an Option or Stock Purchase Right transferable, such Option
or Stock Purchase Right shall contain such additional terms and conditions as
the Administrator deems appropriate.

     13. Adjustments Upon Changes in Capitalization, Dissolution, Merger, Asset
          ----------------------------------------------------------------------
         Sale or Change of Control.
         ------------------------- 

         (a) Changes in Capitalization.  Subject to any required action by the
             -------------------------                                        
shareholders of the Company, the number of shares of Common Stock covered by
each outstanding Option and Stock

                                      -10-
<PAGE>
 
Purchase Right, and the number of shares of Common Stock which have been
authorized for issuance under the Plan but as to which no Options or Stock
Purchase Rights have yet been granted or which have been returned to the Plan
upon cancellation or expiration of an Option or Stock Purchase Right, as well as
the price per share of Common Stock covered by each such outstanding Option or
Stock Purchase Right, shall be proportionately adjusted for any increase or
decrease in the number of issued shares of Common Stock resulting from a stock
split, reverse stock split, stock dividend, combination or reclassification of
the Common Stock, or any other increase or decrease in the number of issued
shares of Common Stock effected without receipt of consideration by the Company;
provided, however, that conversion of any convertible securities of the Company
shall not be deemed to have been "effected without receipt of consideration."
Such adjustment shall be made by the Board, whose determination in that respect
shall be final, binding and conclusive.  Except as expressly provided herein, no
issuance by the Company of shares of stock of any class, or securities
convertible into shares of stock of any class, shall affect, and no adjustment
by reason thereof shall be made with respect to, the number or price of shares
of Common Stock subject to an Option or Stock Purchase Right.

         (b) Dissolution or Liquidation. In the event of the proposed
             --------------------------
dissolution or liquidation of the Company, to the extent that an Option or
Stock Purchase Right has not been previously exercised, it will terminate
immediately prior to the consummation of such proposed action. The Board may,
in the exercise of its sole discretion in such instances, declare that any
Option or Stock Purchase Right shall terminate as of a date fixed by the Board
and give each Optionee the right to exercise his or her Option or Stock
Purchase Right as to all or any part of the Optioned Stock, including Shares
as to which the Option or Stock Purchase Right would not otherwise be
exercisable.

         (c) Merger or Asset Sale.  Subject to the provisions of paragraph (d)
             --------------------                                             
hereof, in the event of a merger of the Company with or into another
corporation, or the sale of substantially all of the assets of the Company, each
outstanding Option and Stock Purchase Right shall be assumed or an equivalent
option or right shall be substituted by the successor corporation or a Parent or
Subsidiary of the successor corporation.  In the event that the successor
corporation does not agree to assume the Option or Stock Purchase Right or to
substitute an equivalent option or right, the Administrator shall, in lieu of
such assumption or substitution, provide for the Optionee to have the right to
exercise the Option or Stock Purchase Right as to all of the Optioned Stock,
including Shares as to which it would not otherwise be exercisable.  If the
Administrator makes an Option or Stock Purchase Right fully exer  cisable in
lieu of assumption or substitution in the event of a merger or sale of assets,
the Administrator shall notify the Optionee that the Option or Stock Purchase
Right shall be fully exercisable for a period of fifteen (15) days from the date
of such notice, and the Option or Stock Purchase Right will terminate upon the
expiration of such period.  For the purposes of this paragraph, the Option or
Stock Purchase Right shall be considered assumed if, following the merger or
sale of assets, the option or right confers the right to purchase, for each
Share of Optioned Stock subject to the Option or Stock Purchase Right
immediately prior to the merger or sale of assets, the consideration (whether
stock, cash, or other securities or property) received in the merger or sale of
assets by holders of Common Stock for each Share held on the effective date of
the transaction (and if holders were offered a choice of consideration, the type
of consideration chosen by the holders of a majority of the outstanding Shares);
provided, however, that if such consideration received in the merger or sale of
assets was not solely common stock of the successor corporation or its Parent,
the Administrator may, with the consent of the successor

                                      -11-
<PAGE>
 
corporation and the participant, provide for the consideration to be received
upon the exercise of the Option or Stock Purchase Right, for each Share of
Optioned Stock subject to the Option or Stock Purchase Right, to be solely
common stock of the successor corporation or its Parent equal in Fair Market
Value to the per share consideration received by holders of Common Stock in the
merger or sale of assets.

         (d) Change in Control.  In the event of a "Change in Control" of the
             -----------------                                               
Company, as defined in paragraph (e) below, then the following acceleration and
valuation provisions shall apply:

             (i) Except as otherwise determined by the Board, in its discretion,
prior to the occurrence of a Change in Control, any Options and Stock Purchase
Rights outstanding on the date such Change in Control is determined to have
occurred that are not yet exercisable and vested on such date shall become
fully exercisable and vested;

             (ii) Except as otherwise determined by the Board, in its
     discretion, prior to the occurrence of a Change in Control, the value of
     all outstanding Options and Stock Purchase Rights, to the extent they are
     exercisable and vested (including Options and Stock Purchase Rights that
     shall become exercisable and vested pursuant to subparagraph (i) above),
     shall be cashed out at the Change in Control Price, (reduced by the
     exercise price applicable to such Options or Stock Purchase Rights). The
     cash out proceeds shall be paid to the Optionee or, in the event of death
     of an Optionee prior to payment, to the estate of the Optionee or to a
     person who acquired the right to exercise the Option or Stock Purchase
     Right by bequest or inheritance.

         (e) Definition of "Change in Control". For purposes of this Section
             ---------------------------------
13, a "Change in Control" means the happening of any of the following:

              (i)  When any "person," as such term is used in Sections 13(d) and
     14(d) of the Exchange Act (other than the Company, a Subsidiary or a
Company employee benefit plan, including any trustee of such plan acting as
trustee) is or becomes the "beneficial owner" (as defined in Rule 13d-3 under
the Exchange Act), directly or indirectly, of securities of the Company
representing fifty percent (50%) or more of the combined voting power of the
Company's then outstanding securities other than the person who owns more than
50% of such voting power on the date of adoption of this plan; or

              (ii) The occurrence of a transaction requiring shareholder
     approval, and involving the sale of all or substantially all of the
     assets of the Company or the merger of the Company with or into another
     corporation.

        (f) Change in Control Price. For purposes of this Section 13, "Change
            -----------------------
in Control Price" shall be, as determined by the Board, (i) the highest Fair
Market Value of a Share within the 60 day period immediately preceding the
date of determination of the Change in Control Price by the Board (the "60-Day
Period"), or (ii) the highest price paid or offered per Share, as determined
by the Board, in any bona fide transaction or bona fide offer related to the
Change in Control of the Company, at any time within the 60-Day Period, or
(iii) some lower price as the Board, in its discretion, determines to be a
reasonable estimate of the fair market value of a Share.

                                      -12-
<PAGE>
 
     14. Date of Grant.  The date of grant of an Option or Stock Purchase Right
         -------------                                                         
shall be, for all purposes, the date on which the Administrator makes the
determination granting such Option or Stock Purchase Right, or such other later
date as is determined by the Administrator.  Notice of the determination shall
be provided to each Optionee within a reasonable time after the date of such
grant.

     15. Amendment and Termination of the Plan.
         ------------------------------------- 

         (a) Amendment and Termination.  The Board may at any time amend,
             -------------------------                                   
alter, suspend or terminate the Plan.

         (b) Shareholder Approval. The Company shall obtain shareholder
             --------------------
approval of any Plan amendment to the extent necessary and desirable to comply
with Section 422 of the Code (or any successor rule or statute or other
applicable law, rule or regulation, including the requirements of any exchange
or quotation system on which the Common Stock is listed or quoted). Such
shareholder approval, if required, shall be obtained in such a manner and to
such a degree as is required by the applicable law, rule or regulation.

         (c) Effect of Amendment or Termination.  No amendment, alteration,
             ----------------------------------                            
suspension or termination of the Plan shall impair the rights of any Optionee,
unless mutually agreed otherwise between the Optionee and the Administrator,
which agreement must be in writing and signed by the Optionee and the Company.

     16. Conditions Upon Issuance of Shares.
         ---------------------------------- 

         (a) Legal Compliance. Shares shall not be issued pursuant to the
             ----------------
exercise of an Option or Stock Purchase Right unless the exercise of such
Option or Stock Purchase Right and the issuance and delivery of such Shares
shall comply with all relevant provisions of law, including, without
limitation, the Securities Act of 1933, as amended, the Exchange Act, the
rules and regulations promulgated thereunder, and the requirements of any
stock exchange or quotation system upon which the Shares may then be listed or
quoted, and shall be further subject to the approval of counsel for the
Company with respect to such compliance.

         (b) Investment Representations.  As a condition to the exercise of an
             --------------------------                                       
Option or Stock Purchase Right, the Company may require the person exercising
such Option or Stock Purchase Right to represent and warrant at the time of any
such exercise that the Shares are being purchased only for investment and
without any present intention to sell or distribute such Shares if, in the
opinion of counsel for the Company, such a representation is required.

     17. Liability of Company.
         -------------------- 

         (a) Inability to Obtain Authority. The inability of the Company to
             ----------------------------- 
obtain authority from any regulatory body having jurisdiction, which authority
is deemed by the Company's counsel to be necessary to the lawful issuance and
sale of any Shares hereunder, shall relieve the Company of any

                                      -13-
<PAGE>
 
liability in respect of the failure to issue or sell such Shares as to which
such requisite authority shall not have been obtained.

         (b) Grants Exceeding Allotted Shares. If the Optioned Stock covered
             --------------------------------
by an Option or Stock Purchase Right exceeds, as of the date of grant, the
number of Shares which may be issued under the Plan without additional
shareholder approval, such Option or Stock Purchase shall be void with respect
to such excess Optioned Stock, unless shareholder approval of an amendment
sufficiently increasing the number of Shares subject to the Plan is timely
obtained in accordance with Section 15(b) of the Plan.

     18. Reservation of Shares.  The Company, during the term of this Plan,
         ---------------------                                             
will at all times reserve and keep available such number of Shares as shall be
sufficient to satisfy the requirements of the Plan.

     19. Shareholder Approval.  Continuance of the Plan shall be subject to
          --------------------                                              
approval by the shareholders of the Company within twelve (12) months before or
after the date the Plan is adopted.  Such shareholder approval shall be obtained
in the manner and to the degree required under applicable federal and state law.
 

                                      -14-
<PAGE>
 
                          NANOMETRICS INCORPORATED

                           1991 STOCK OPTION PLAN

                           STOCK OPTION AGREEMENT

     Unless otherwise defined herein, the terms defined in the Plan shall have
the same defined meanings in this Option Agreement.

I. NOTICE OF STOCK OPTION GRANT
   ----------------------------

Name and Address of Optionee:
 
- -------------------------------

- -------------------------------

- ------------------------------- 
 
     You have been granted an option to purchase Common Stock of the Company,
subject to the terms and conditions of the Plan and this Stock Option Agreement,
as follows:

     Grant Number                                       
                                                        -------------------
     Date of Grant                                      
                                                        -------------------
     Vesting Commencement Date                          
                                                        -------------------
     Exercise Price per Share                           $
                                                        -------------------
     Total Number of Shares Granted    
                                                        ------------------- 
     Total Exercise Price                               $
                                                        -------------------

     Type of Option:                                  Incentive Stock Option
                                                -----
                                                      Nonstatutory Stock Option
                                                -----
                

     Term/Expiration Date:                             
                                                        -------------------

     Vesting Schedule:
     ---------------- 

     This Option may be exercised, in whole or in part, in accordance with the
following schedule:

     33-1/3% of the Shares subject to the Option shall vest twelve months after
the Vesting Commencement Date, and 33-1/3% of the Shares subject to the Option
shall vest each year thereafter for the next two years.

                                       15
<PAGE>
 
     Termination Period:
     ------------------ 

     This Option may be exercised for three months (90 days) after termination
of employment or consulting relationship, or such longer period as may be
applicable upon death or Disability of Optionee as provided in the Plan, but in
no event later than the Term/Expiration Date as provided above.


II.  AGREEMENT
     ---------

     1.  Grant of Option.  The Plan Administrator of the Company hereby grants
         ---------------                                                      
to the Optionee named in the Notice of Grant attached as Part I of this
Agreement (the "Optionee"), an option (the "Option") to purchase a number of
Shares, as set forth in the Notice of Grant, at the exercise price per share set
forth in the Notice of Grant (the "Exercise Price"), subject to the terms and
conditions of the Plan, which is incorporated herein by reference.  Subject to
Section 15(c) of the Plan, in the event of a conflict between the terms and
conditions of the Plan and the terms and conditions of this Option Agreement,
the terms and conditions of the Plan shall prevail.

         If designated in the Notice of Grant as an Incentive Stock Option,
this Option is intended to qualify as an Incentive Stock Option under Section
422 of the Code.

     2.  Exercise of Option.
         ------------------ 

         (a) Right to Exercise.  This Option is exercisable during its term in
             -----------------                                                
accordance with the Vesting Schedule set out in the Notice of Grant and the
applicable provisions of the Plan and this Option Agreement.  In the event of
Optionee's death, Disability or other termination of Optionee's employment or
consulting relationship, the exercisability of the Option is governed by the
applicable provisions of the Plan and this Option Agreement.

         (b) Method of Exercise.  This Option is exercisable by delivery of an
             ------------------                                               
exercise notice, in the form attached as Exhibit A (the "Exercise Notice"),
which shall state the election to exercise the Option, the number of Shares in
respect of which the Option is being exercised (the "Exercised Shares"), and
such other representations and agreements as may be required by the Company
pursuant to the provisions of the Plan.  The Exercise Notice shall be signed by
the Optionee and, if the Optionee is married, by the Optionee's spouse, and
shall be delivered in person or by certified mail to the Secretary of the
Company.  The Exercise Notice shall be accompanied by payment of the aggregate
Exercise Price as to all Exercised Shares.  This Option shall be deemed to be
exercised upon receipt by the Company of such fully executed Exercise Notice
accompanied by such aggregate Exercise Price.

         No Shares shall be issued pursuant to the exercise of this Option
unless such issuance and exercise complies with all relevant provisions of law
and the requirements of any stock exchange upon which the Shares are then
listed.  Assuming such compliance, for income tax purposes the

                                       16
<PAGE>
 
Exercised Shares shall be considered transferred to the Optionee on the date the
Option is exercised with respect to such Exercised Shares.

     3. Method of Payment.  Payment of the aggregate Exercise Price shall be
        -----------------                                                   
by any of the following, or a combination thereof, at the election of the
Optionee:

       (a) cash; or

       (b) check; or

       (c) delivery of a properly executed exercise notice together with such
other documentation as the Administrator and the broker, if applicable, shall
require to effect an exercise of the Option and delivery to the Company of the
sale or loan proceeds required to pay the exercise price; or

       (d) surrender of other Shares which (i) in the case of Shares acquired
upon exercise of an option, have been owned by the Optionee for more than six
(6) months on the date of surrender, and (ii) have a Fair Market Value on the
date of surrender equal to the aggregate Exercise Price of the Exercised Shares;
or

       (e) delivery of Optionee's promissory note (the "Note") in the form
attached hereto as Exhibit C, in the amount of the aggregate Exercise Price of
the Exercised Shares together with the execution and delivery by the Optionee of
the Security Agreement attached hereto as Exhibit B.  The Note shall bear
interest at a rate no less than the "applicable federal rate" prescribed under
the Code and its regulations at time of purchase, and shall be secured by a
pledge of the Shares purchased by the Note pursuant to the Security Agreement.

     4.  Non-Transferability of Option.  This Option may not be transferred in
         -----------------------------                                        
any manner otherwise than by will or by the laws of descent or distribution and
may be exercised during the lifetime of Optionee only by the Optionee.  The
terms of the Plan and this Option Agreement shall be binding upon the executors,
administrators, heirs, successors and assigns of the Optionee.

     5.  Term of Option.  This Option may be exercised only within the term set
         --------------                                                        
out in the Notice of Grant, and may be exercised during such term only in
accordance with the Plan and the terms of this Option Agreement.  This Option
may not be exercised after the fifth anniversary of the date of grant.

     6.  Tax Consequences.  Some of the federal and California tax consequences
         ----------------                                                      
relating to this Option, as of the date of this Option, are set forth below.
THIS SUMMARY IS NECESSARILY INCOMPLETE, AND THE TAX LAWS AND REGULATIONS ARE
SUBJECT TO CHANGE.  THE OPTIONEE SHOULD CONSULT A TAX ADVISER BEFORE EXERCISING
THIS OPTION OR DISPOSING OF THE SHARES.

                                       17
<PAGE>
 
         (a) Exercising the Option.
             --------------------- 

              (i) Nonqualified Stock Option ("NSO"). If this Option does not
                  ---------------------------------
qualify as an ISO, the Optionee may incur regular federal income tax and
California income tax liability upon exercise. The Optionee will be treated as
having received compensation income (taxable at ordinary income tax rates)
equal to the excess, if any, of the fair market value of the Exercised Shares
on the date of exercise over their aggregate Exercise Price. If the Optionee
is an employee, the Company will be required to withhold from his or her
compensation or collect from Optionee and pay to the applicable taxing
authorities an amount equal to a percentage of this compensation income at the
time of exercise.

              (ii) Incentive Stock Option ("ISO"). If this Option qualifies
                   ------------------------------
as an ISO, the Optionee will have no regular federal income tax or California
income tax liability upon its exercise, although the excess, if any, of the
fair market value of the Exercised Shares on the date of exercise over their
aggregate Exercise Price will be treated as an adjustment to the alternative
minimum tax for federal tax purposes and may subject the Optionee to
alternative minimum tax in the year of exercise.

         (b) Disposition of Shares.
             --------------------- 

              (i) NSO. If the Optionee holds NSO Shares for at least one
                  ---
year, any gain realized on disposition of the Shares will be treated as long-
term capital gain for federal income tax purposes.

              (ii) ISO. If the Optionee holds ISO Shares for at least one
                   ---
year after exercise and two years after the grant date, any gain realized on
disposition of the Shares will be treated as long-term capital gain for
federal income tax purposes. If the Optionee disposes of ISO Shares within one
year after exercise or two years after the grant date, any gain realized on
such disposition will be treated as compensation income (taxable at ordinary
income rates) to the extent of the excess, if any, of the lesser of (A) the
difference between the fair market value of the Shares acquired on the date of
exercise and the aggregate Exercise Price, or (B) the difference between the
sale price of such Shares and the aggregate Exercise Price.

         (c) Notice of Disqualifying Disposition of ISO Shares. If the
             -------------------------------------------------
Optionee sells or otherwise disposes of any of the Shares acquired pursuant to
an ISO on or before the later of (i) two years after the grant date, or (ii)
one year after the exercise date, the Optionee shall immediately notify the
Company in writing of such disposition. The Optionee agrees that he or she may
be subject to income tax withholding by the Company on the compensation income
recognized from such early disposition of ISO Shares by payment in cash or out
of the current earnings paid to the Optionee.

     By your signature and the signature of the Company's representative below,
you and the Company agree that this Option is granted under and governed by the
terms and conditions of the Plan and this Option Agreement.  Optionee has
reviewed the Plan and this Option Agreement in their entirety, has had an
opportunity to obtain the advice of counsel prior to executing this Option

                                       18
<PAGE>
 
Agreement and fully understands all provisions of the Plan and Option Agreement.
Optionee hereby agrees to accept as binding, conclusive and final all decisions
or interpretations of the Administrator upon any questions relating to the Plan
and Option Agreement.

     OPTIONEE ACKNOWLEDGES AND AGREES THAT THE VESTING OF SHARES PURSUANT TO THE
OPTION HEREOF IS EARNED ONLY BY CONTINUING CONSULTANCY OR EMPLOYMENT AT THE WILL
OF THE COMPANY (NOT THROUGH THE ACT OF BEING HIRED, BEING GRANTED THIS OPTION OR
ACQUIRING SHARES HEREUNDER).  OPTIONEE FURTHER ACKNOWLEDGES AND AGREES THAT
NOTHING IN THIS AGREEMENT, NOR IN THE COMPANY'S STOCK OPTION PLAN WHICH IS
INCORPORATED HEREIN BY REFERENCE, SHALL CONFER UPON OPTIONEE ANY RIGHT WITH
RESPECT TO CONTINUATION OF EMPLOYMENT OR CONSULTANCY BY THE COMPANY, NOR SHALL
IT INTERFERE IN ANY WAY WITH HIS RIGHT OR THE COMPANY'S RIGHT TO TERMINATE HIS
EMPLOYMENT OR CONSULTANCY AT ANY TIME, WITH OR WITHOUT CAUSE.


OPTIONEE:                                 NANOMETRICS INCORPORATED


                                          By:
- ----------------------------                 ----------------------------
Signature

                                       Title:
- ----------------------------                 ----------------------------
Print Name

                                       19
<PAGE>
 
                              CONSENT OF SPOUSE
                              -----------------

     The undersigned spouse of Optionee has read and hereby approves the terms
and conditions of the Plan and this Option Agreement.  In consideration of the
Company's granting his or her spouse the right to purchase Shares as set forth
in the Plan and this Option Agreement, the undersigned hereby agrees to be
irrevocably bound by the terms and conditions of the Plan and this Option
Agreement and further agrees that any community property interest shall be
similarly bound.  The undersigned hereby appoints the undersigned's spouse as
attorney-in-fact for the undersigned with respect to any amendment or exercise
of rights under the Plan or this Option Agreement.



 
                                           
                                                 -----------------------------
                                                 Spouse of Optionee

                                       20
<PAGE>
 
                                  EXHIBIT A
                                  ---------

                          NANOMETRICS INCORPORATED

                           1991 STOCK OPTION PLAN

                               EXERCISE NOTICE


Nanometrics Incorporated
310 DeGuigne Drive
Sunnyvale, CA 94086
Attention:  Secretary

        1. Exercise of Option.  Effective as of today, ___________, 199__, the
           ------------------                                                 
undersigned ("Purchaser") hereby elects to purchase _________ shares (the
"Shares") of the Common Stock of Nanometrics Incorporated (the "Company") under
and pursuant to the 1991 Stock Option Plan (the "Plan") and the Stock Option
Agreement dated __________ (the "Option Agreement").  The purchase price for the
Shares shall be $__________, as required by the Option Agreement.

        2. Delivery of Payment. Purchaser herewith delivers to the Company the
           -------------------
full purchase price for the Shares.

        3. Representations of Optionee.  Optionee acknowledges that Optionee has
           ---------------------------                                          
received, read and understood the Plan and the Option Agreement and agrees to
abide by and be bound by their terms and conditions.

        4. Rights as Shareholder.  Subject to the terms and conditions of this
           ---------------------                                              
Agreement, Optionee shall have all of the rights of a shareholder of the Company
with respect to the Shares from and after the date that Optionee delivers full
payment of the Exercise Price until such time as Optionee disposes of the
Shares.

        5. Tax Consultation.  Optionee understands that Optionee may suffer
           ----------------                                                
adverse tax consequences as a result of Optionee's purchase or disposition of
the Shares.  Optionee represents that Optionee has consulted with any tax
consultants Optionee deems advisable in connection with the purchase or
disposition of the Shares and that Optionee is not relying on the Company for
any tax advice.

        6. Entire Agreement; Governing Law.  The Plan and Option Agreement are
           -------------------------------                                    
incorporated herein by reference.  This Agreement, the Plan and the Option
Agreement constitute the entire agreement of the parties and supersede in their
entirety all prior undertakings and agreements of the
<PAGE>
 
Company and Optionee with respect to the subject matter hereof, and such
agreement is governed by California law except for that body of law pertaining
to conflict of laws.


Submitted by:                                Accepted by:

OPTIONEE:                                    NANOMETRICS INCORPORATED


                                             By:
- --------------------------------                 ------------------------------
Signature

                                             Its:
- --------------------------------                 ------------------------------ 
Print Name


Address:                                     Address:
- -------                                      ------- 

- --------------------------------             310 DeGuigne Drive
                                             Sunnyvale, CA 94086
- --------------------------------
<PAGE>
 
                                   EXHIBIT B
                                   ---------

                              SECURITY AGREEMENT


     This Security Agreement is made as of __________, 19___ between Nanometrics
Incorporated, a California corporation ("Pledgee"), and
_________________________ ("Pledgor").


                                   Recitals
                                   --------

     Pursuant to Pledgor's election to purchase Shares under the Option
Agreement dated ________ (the "Option"), between Pledgor and Pledgee under
Pledgee's 1991 Stock Option Plan, and Pledgor's election under the terms of the
Option to pay for such shares with his promissory note (the "Note"), Pledgor has
purchased _________ shares of Pledgee's Common Stock (the "Shares") at a price
of $________ per share, for a total purchase price of $__________.  The Note and
the obligations thereunder are as set forth in Exhibit C to the Option.

     NOW, THEREFORE, it is agreed as follows:

        1. Creation and Description of Security Interest.  In consideration of
           ---------------------------------------------                      
the transfer of the Shares to Pledgor under the Option Agreement, Pledgor,
pursuant to the California Commercial Code, hereby pledges all of such Shares
(herein sometimes referred to as the "Collateral") represented by certificate
number ______, duly endorsed in blank or with executed stock powers, and
herewith delivers said certificate to the Secretary of Pledgee ("Pledgeholder"),
who shall hold said certificate subject to the terms and conditions of this
Security Agreement.

        The pledged stock (together with an executed blank stock assignment for
use in transferring all or a portion of the Shares to Pledgee if, as and when
required pursuant to this Security Agreement) shall be held by the Pledgeholder
as security for the repayment of the Note, and any extensions or renewals
thereof, to be executed by Pledgor pursuant to the terms of the Option, and the
Pledgeholder shall not encumber or dispose of such Shares except in accordance
with the provisions of this Security Agreement.

        2. Pledgor's Representations and Covenants.  To induce Pledgee to enter
           ---------------------------------------                             
into this Security Agreement, Pledgor represents and covenants to Pledgee, its
successors and assigns, as follows:

           a. Payment of Indebtedness. Pledgor will pay the principal sum of the
              -----------------------
Note secured hereby, together with interest thereon, at the time and in the
manner provided in the Note.

           b. Encumbrances. The Shares are free of all other encumbrances,
              ------------
defenses and liens, and Pledgor will not further encumber the Shares without the
prior written consent of Pledgee.
<PAGE>
 
           c. Margin Regulations. In the event that Pledgee's Common Stock is
              ------------------
now or later becomes margin-listed by the Federal Reserve Board and Pledgee is
classified as a "lender" within the meaning of the regulations under Part 207 of
Title 12 of the Code of Federal Regulations ("Regulation G"), Pledgor agrees to
cooperate with Pledgee in making any amendments to the Note or providing any
additional collateral as may be necessary to comply with such regulations.

        3. Voting Rights.  During the term of this pledge and so long as all
           -------------                                                    
payments of principal and interest are made as they become due under the terms
of the Note, Pledgor shall have the right to vote all of the Shares pledged
hereunder.

        4. Stock Adjustments.  In the event that during the term of the pledge
           -----------------                                                  
any stock dividend, reclassification, readjustment or other changes are declared
or made in the capital structure of Pledgee, all new, substituted and additional
shares or other securities issued by reason of any such change shall be
delivered to and held by the Pledgee under the terms of this Security Agreement
in the same manner as the Shares originally pledged hereunder.  In the event of
substitution of such securities, Pledgor, Pledgee and Pledgeholder shall
cooperate and execute such documents as are reasonable so as to provide for the
substitution of such Collateral and, upon such substitution, references to
"Shares" in this Security Agreement shall include the substituted shares of
capital stock of Pledgor as a result thereof.

        5. Options and Rights.  In the event that, during the term of this
           ------------------                                             
pledge, subscription Options or other rights or options shall be issued in
connection with the pledged Shares, such rights, Options and options shall be
the property of Pledgor and, if exercised by Pledgor, all new stock or other
securities so acquired by Pledgor as it relates to the pledged Shares then held
by Pledgeholder shall be immediately delivered to Pledgeholder, to be held under
the terms of this Security Agreement in the same manner as the Shares pledged.

        6. Default.  Pledgor shall be deemed to be in default of the Note and of
           -------                                                              
this Security Agreement in the event:

           a. Payment of principal or interest on the Note shall be delinquent
for a period of 10 days or more; or

           b. Pledgor fails to perform any of the covenants set forth in the
Option or contained in this Security Agreement for a period of 10 days after
written notice thereof from Pledgee.

        In the case of an event of Default, as set forth above, Pledgee shall
have the right to accelerate payment of the Note upon notice to Pledgor, and
Pledgee shall thereafter be entitled to pursue its remedies under the California
Commercial Code.

        7. Release of Collateral. Subject to any applicable contrary rules under
           ---------------------
Regulation G, there shall be released from this pledge a portion of the pledged
Shares held by Pledgeholder hereunder upon payments of the principal of the
Note. The number of the pledged Shares which
<PAGE>
 
shall be released shall be that number of full Shares which bears the same
proportion to the initial number of Shares pledged hereunder as the payment of
principal bears to the initial full principal amount of the Note.

        8. Withdrawal or Substitution of Collateral.  Pledgor shall not sell,
           ----------------------------------------                          
withdraw, pledge, substitute or otherwise dispose of all or any part of the
Collateral without the prior written consent of Pledgee.

        9. Term. The within pledge of Shares shall continue until the payment of
           ----
all indebtedness secured hereby, at which time the remaining pledged stock shall
be promptly delivered to Pledgor, subject to the provisions for prior release of
a portion of the Collateral as provided in paragraph 7 above.

        10. Insolvency.  Pledgor agrees that if a bankruptcy or insolvency
            ----------                                                    
proceeding is instituted by or against it, or if a receiver is appointed for the
property of Pledgor, or if Pledgor makes an assignment for the benefit of
creditors, the entire amount unpaid on the Note shall become immediately due and
payable, and Pledgee may proceed as provided in the case of default.

        11. Pledgeholder Liability.  In the absence of willful or gross
            ----------------------                                     
negligence, Pledgeholder shall not be liable to any party for any of his acts,
or omissions to act, as Pledgeholder.

        12. Invalidity of Particular Provisions.  Pledgor and Pledgee agree that
            -----------------------------------                                 
the enforceability or invalidity of any provision or provisions of this Security
Agreement shall not render any other provision or provisions herein contained
unenforceable or invalid.

        13. Successors or Assigns.  Pledgor and Pledgee agree that all of the
            ---------------------                                            
terms of this Security Agreement shall be binding on their respective successors
and assigns, and that the term "Pledgor" and the term "Pledgee" as used herein
shall be deemed to include, for all purposes, the respective designees,
successors, assigns, heirs, executors and administrators.

        14. Governing Law.  This Security Agreement shall be interpreted and
            -------------                                                   
governed under the laws of the State of California.
<PAGE>
 
     IN WITNESS WHEREOF, the parties hereto have executed this Agreement as of
the day and year first above written.


     "PLEDGOR"                      By:
                                       ---------------------------------------
 
                                       ---------------------------------------
                                       Print Name

                               Address:
                                       ---------------------------------------

                                       ---------------------------------------

 

     "PLEDGEE"                         Nanometrics Incorporated,
                                       a California corporation


                                    By:
                                       ---------------------------------------

                                 Title:
                                       --------------------------------------- 


     "PLEDGEHOLDER"                    ---------------------------------------
                                       Secretary of
                                        Nanometrics Incorporated
<PAGE>
 
                                   EXHIBIT C
                                   ---------

                               INSTALLMENT NOTE


  _______________$Sunnyvale, California
                                                           ______________, 19___


     FOR VALUE RECEIVED, _______________ promises to pay to Nanometrics
Incorporated, a California corporation (the "Company"), or order, the principal
sum of ______________________ ($_____________), together with interest on the
unpaid principal hereof from the date hereof at the rate of _______________
percent (____%) per annum, compounded semiannually.

     Principal and interest shall be due and payable on __________, 19___.
Should the undersigned fail to make full payment of any installment of principal
or interest for a period of 10 days or more after the due date thereof, the
whole unpaid balance on this Note of principal and interest shall become
immediately due at the option of the holder of this Note.  Payments of principal
and interest shall be made in lawful money of the United States of America.

     The undersigned may at any time prepay all or any portion of the principal
or interest owing hereunder.

     This Note is subject to the terms of the Option, dated as of
________________.  This Note is secured by a pledge of the Company's Common
Stock under the terms of a Security Agreement of even date herewith and is
subject to all the provisions thereof.

     In the event the undersigned shall cease to be an employee or consultant of
the Company for any reason, this Note shall, at the option of the Company, be
accelerated, and the whole unpaid balance on this Note of principal and accrued
interest shall be immediately due and payable.

     Should any action be instituted for the collection of this Note, the
reasonable costs and attorneys' fees therein of the holder shall be paid by the
undersigned.


 

 

<PAGE>
 
                                                                     EXHIBIT 5.1
                                                                     -----------


                                 August 14, 1997


Nanometrics Incorporated
310 DeGuigne Drive
Sunnyvale, California 94086


     RE:  REGISTRATION STATEMENT ON FORM S-8
          ----------------------------------

Gentlemen:

     We have examined the Registration Statement on Form S-8 to be filed by you
with the Securities and Exchange Commission on or about August 14, 1997 (the
"Registration Statement"), in connection with the registration under the
Securities Act of 1933, as amended, of 1,500,000 shares of your Common Stock
(the "Shares") which are to be issued pursuant to the 1991 Stock Option Plan
(the "Plan").  As your legal counsel, we have examined the proceedings taken and
are familiar with the proceedings proposed to be taken by you in connection with
the sale and issuance of the Shares under the Plan and pursuant to the
agreements which accompany the Plan (the "Agreement").

     It is our opinion that, when issued and sold in the manner referred to in
the Plan and pursuant to the Agreement, the Shares will be legally and validly
issued, fully-paid and nonassessable.

     We consent to the use of this opinion as an exhibit to the Registration
Statement and further consent to the use of our name wherever appearing in the
Registration Statement, including any Prospectus constituting a part thereof,
and any amendments thereto.

                              Sincerely yours,

                              WILSON SONSINI GOODRICH & ROSATI
                              Professional Corporation

                              /s/ WILSON SONSINI GOODRICH & ROSATI

<PAGE>
 
                                                                    EXHIBIT 23.2
                                                                    ------------

                       CONSENT OF INDEPENDENT AUDITORS


We consent to incorporation by reference in this Registration Statement of
Nanometrics Incorporated on Form S-8 of our report dated February 19, 1997,
appearing in the Annual Report on Form 10-K of Nanometrics Incorporated for 
the year ended December 31, 1996.



Deloitte & Touche LLP
/s/ Deloitte & Touche LLP



San Jose, California
August 8, 1997


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