NANOMETRICS INC
DEF 14A, 2000-05-02
MEASURING & CONTROLLING DEVICES, NEC
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                                  SCHEDULE 14A
                                 (Rule 14a-101)

                     INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION

           PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES
                     EXCHANGE ACT OF 1934 (AMENDMENT NO. __)

Filed by the Registrant                       [X]
Filed by a party other than the Registrant    [ ]

Check the appropriate box:
[ ]  Preliminary Proxy Statement           [ ]  Confidential, for Use of the
[X]  Definitive Proxy Statement                 Commission Only (as permitted by
[ ]  Definitive Additional Materials            Rule 14a-6(e)(2))
[ ]  Soliciting Material Pursuant to
     Rule 14a-11(c) or Rule 14a-12


                                   NANOMETRICS
           ----------------------------------------------------------
                (Name of Registrant as Specified in Its Charter)

           ----------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

Payment of filing fee (Check the appropriate box):

[X]     No fee required.
[ ]     Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

(1)     Title of each class of securities to which transactions applies:

(2)     Aggregate number of securities to which transactions applies:

(3)     Per unit  price  or  other  underlying  value  of  transaction  computed
        pursuant  to  Exchange  Act Rule 0-11 (set forth the amount on which the
        filing fee is calculated and state how it was determined):

(4)     Proposed maximum aggregate value of transaction:

(5)     Total fee paid:

        [ ]      Fee paid previously with preliminary materials.

        [ ]      Check  box if any  part of the fee is  offset  as  provided  by
                 Exchange Act Rule  0-11(a)(2) and identify the filing for which
                 the offsetting fee was paid  previously.  Identify the previous
                 filing  by  registration  statement  number,  or  the  Form  or
                 Schedule and the date of its filing.

(1)     Amount previously paid:

(2)     Form, Schedule or Registration Statement No.:

(3)     Filing party:

(4)     Date filed:


<PAGE>

                           NANOMETRICS INCORPORATED

                               ----------------

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

                               ----------------


TO THE SHAREHOLDERS:

     NOTICE  IS  HEREBY  GIVEN  that  the  Annual  Meeting  of  Shareholders  of
Nanometrics  Incorporated,  a  California  corporation  (the "Company"), will be
held  on  Wednesday,  May  31,  2000  at 1:30 p.m., local time, at the principal
offices  of  the  Company  located  at 310 DeGuigne Drive, Sunnyvale, California
94086, for the following purposes:

   1. To  elect  five  directors  to  serve  until  the  next  annual meeting of
      shareholders or until their successors are elected.

   2. To  approve  the adoption of the Company's 2000 Employee Stock Option Plan
      and  the  reservation  of  1,250,000  shares  of Common Stock for issuance
      thereunder.

   3. To  approve  the adoption of the Company's 2000 Director Stock Option Plan
      and  the  reservation  of  250,000  shares  of  Common  Stock for issuance
      thereunder.

   4. To  approve  an amendment to the Company's Employee Stock Purchase Plan to
      increase  the  number  of shares common stock reserved for future issuance
      by 150,000.

   5. To  ratify  the  appointment  of  Deloitte  &  Touche  LLP  as independent
      auditors of the Company for the fiscal year ending December 31, 2000.

   6. To  transact  such  other business as may properly come before the meeting
      or any adjournment thereof.

     The  foregoing  items  of  business  are  more fully described in the Proxy
Statement accompanying this Notice.

     Only  shareholders of record at the close of business on April 28, 2000 are
entitled to notice of and to vote at the meeting and any adjournment thereof.

     All  shareholders  are  cordially  invited to attend the meeting in person.
However,  to  ensure  your representation at the meeting, you are urged to mark,
sign,  date  and  return  the enclosed proxy card as promptly as possible in the
postage-prepaid  envelope  enclosed  for that purpose. Any shareholder attending
the meeting may vote in person even if such shareholder returned a proxy.


                                            Sincerely,




                                            Vincent J. Coates
                                            Secretary



Sunnyvale, California
May 3, 2000

<PAGE>

                           NANOMETRICS INCORPORATED

                                 ------------

                                PROXY STATEMENT

                INFORMATION CONCERNING SOLICITATION AND VOTING


General

     The  enclosed  proxy  is  solicited  on behalf of the Board of Directors of
Nanometrics  Incorporated  (the  "Company")  for  use at the Annual Meeting (the
"Annual  Meeting")  of  Shareholders of the Company to be held on Wednesday, May
31,  2000  at  1:30  p.m.,  local  time,  or at any adjournment thereof, for the
purposes  set  forth  herein and in the accompanying Notice of Annual Meeting of
Shareholders.  The  Annual  Meeting will be held at the principal offices of the
Company  located  at  310  DeGuigne  Drive,  Sunnyvale,  California  94086.  The
Company's telephone number at that address is (408) 746-1600.

     These  proxy  solicitation materials were mailed on or about May 3, 2000 to
all  shareholders  entitled to vote at the meeting. A copy of the Company's 1999
Annual Report to Shareholders accompanies this Proxy Statement.


Record Date and Shares Outstanding

     Shareholders  of  record  at  the  close of business on April 28, 2000 (the
"Record  Date")  are  entitled  to  notice of and to vote at the meeting. At the
Record  Date,  11,284,754  shares  of  the Company's Common Stock, no par value,
were  issued  and  outstanding. For information concerning security ownership of
management  and beneficial owners of more than 5% of the Company's Common Stock,
see "Security Ownership of Management and Certain Beneficial Owners" below.


Revocability of Proxies

     Any  proxy given pursuant to this solicitation may be revoked by the person
giving  it  at  any  time  before  its use by delivering to the Secretary of the
Company  a written notice of revocation or a duly executed proxy bearing a later
date or by attending the meeting and voting in person.


Voting and Solicitation

     Every  shareholder  voting  for the election of directors may cumulate such
shareholder's  votes  and  give  one  candidate  a  number of votes equal to the
number  of  directors  to  be elected multiplied by the number of votes to which
the  shareholder's shares are entitled, or distribute the shareholder's votes on
the  same  principle  among  as  many  candidates as the shareholder may select,
provided  that  votes  cannot be cast for more than five candidates. However, no
shareholder  shall be entitled to cumulate votes unless the candidate's name has
been  placed in nomination prior to the voting and the shareholder, or any other
shareholder,  has  given  notice  at  the  meeting  prior  to  the voting of the
intention  to cumulate the shareholder's votes. On all other matters, each share
of Common Stock outstanding has one vote.

     The  cost  of  this solicitation will be borne by the Company. In addition,
the  Company  may  reimburse  brokerage  firms  and  other  persons representing
beneficial  owners  of  shares  for  their  expenses  in forwarding solicitation
material  to such beneficial owners. Proxies may also be solicited by certain of
the  Company's  directors,  officers  and  regular employees, without additional
compensation, personally or by telephone.


Quorum; Abstentions: Broker Non-votes

     The  required  quorum for the transaction of business at the Annual Meeting
is  a  majority  of  the  shares  of  Common Stock issued and outstanding on the
Record  Date. Shares that are voted "FOR," "AGAINST" or "WITHHELD FROM" a matter
are  treated  as  being  present  at  the meeting for purposes of establishing a
quorum  and  are  also  treated as shares "represented and voting" at the Annual
Meeting ("Votes Cast") with respect to such matter.


<PAGE>

     While  there is no definitive statutory or case law authority in California
as   to   the  proper  treatment  of  abstentions,  the  Company  believes  that
abstentions  should be counted for purposes of determining both (i) the presence
or  absence  of  a  quorum  for  the  transaction of business and (ii) the total
number  of  Votes Cast with respect to a proposal. In the absence of controlling
precedent  to  the  contrary,  the  Company intends to treat abstentions in this
manner.  Accordingly,  abstentions will have the same effect as a vote against a
proposal.

     Broker  non-votes  will be counted for purposes of determining the presence
or  absence of a quorum for the transaction of business, but will not be counted
for  purposes  of  determining  the  number  of  Votes  Cast  with  respect to a
proposal.


Deadline for Receipt of Shareholder Proposals

     The  attached  proxy  card grants the proxy holders discretionary authority
to  vote  on  any  matter  raised  at  the  2000  annual  meeting.  Proposals of
shareholders  of  the  Company  which  are  intended  to  be  presented  by such
shareholders  at  the  Company's  2001  Annual  Meeting  must be received by the
Company  no  later  than December 30, 2000 in order that they may be included in
the proxy statement and form of proxy relating to that meeting.

     If  a  shareholder  intends to submit a proposal at the 2001 annual meeting
that  is  not  eligible  for  inclusion  in  the  proxy statement and proxy, the
shareholder  must  do  so  no  later  than March 14, 2001. If such a shareholder
fails  to  comply with the foregoing notice provision, the proxy holders will be
allowed  to use their discretionary authority when the proposal is raised at the
2001 annual meeting.



                                 PROPOSAL NO. 1

                             ELECTION OF DIRECTORS


Nominees

     A  board  of  five directors is to be elected at the Annual Meeting. Unless
otherwise  instructed,  the proxy holders will vote the proxies received by them
for  the  Company's  five  nominees  named  below,  all  of  whom  are presently
directors  of  the  Company.  In  the  event  that any nominee of the Company is
unable  or  declines  to  serve as a director at the time of the Annual Meeting,
the  proxies  will  be  voted  for  any  nominee  who shall be designated by the
present  Board  of  Directors  to  fill the vacancy. It is not expected that any
nominee  will  be  unable  or  will decline to serve as a director. In the event
that  additional  persons  are  nominated  for  election as directors, the proxy
holders  intend  to  vote  all  proxies received by them in such a manner and in
accordance  with cumulative voting as will ensure the election of as many of the
nominees  listed  below as possible and, in such event, the specific nominees to
be  voted  for will be determined by the proxy holders. The Company is not aware
of  any  nominee  who will be unable or will decline to serve as a director. The
term  of  office  of  each  person elected as a director will continue until the
next  Annual Meeting of Shareholders or until such director's successor has been
elected and qualified.

     The  names of the nominees and certain information about them are set forth
below:

                                                            Director
                Name of Nominee                     Age      Since
                ----------------------------------- -----   ----------
                Vincent J. Coates   ..............   75       1975
                Nathaniel Brenner   ..............   74       1986
                Norman V. Coates    ..............   51       1988
                John D. Heaton   .................   40       1995
                Edmond R. Ward   .................   60       1999

     Vincent  J.  Coates  has  been  Chairman of the Board since the Company was
founded  in  1975.  He  has also served as Chief Executive Officer through April
1998  and  President  from  the founding through May 1996, except for the period
January  1986  through  February  1987  when  he  served  exclusively  as  Chief
Executive  Officer.  He  was  elected  Secretary  in February 1989. Prior to his
employment at Nanometrics,


                                       2


<PAGE>

Mr.  Coates  co-founded  Coates and Welter Instrument Corporation, a designer of
electron  microscopes,  which  company was subsequently acquired by Nanometrics.
Mr.  Coates  also  spent  over  twenty  years  working in engineering, sales and
international  operations  for the Perkin-Elmer corporation. In 1995 he received
an  award  which  recognized his contribution to the industry from Semiconductor
and Equipment and Materials International, an industry trade organization.

     Nathaniel  Brenner has served as a director of the Company since June 1986.
He  joined  Beckman  Instruments,  Inc.  in  1976 where he held the positions of
Program   Manager,   Marketing   Manager   (Instruments)   and  General  Manager
(Spectroscopy).  In 1992, Mr. Brenner retired from Beckman Instruments, Inc. Mr.
Brenner  is also a director of PMC, Inc., a manufacturer of optical and electron
microscopy equipment.

     Norman  V.  Coates  has served as a director of the Company since May 1988.
He  has  operated  Gem  of  the  River  Produce,  a  farming and produce packing
operation  in  Orleans, California, as a sole proprietor since 1978. He has also
been  manager  of  the  Boise  Creek  Farm operation since 1985 and a manager of
Coates Vineyard since 1997.

     John  D.  Heaton  joined the Company in September 1990 and in April 1994 he
was  elected Vice President of Engineering and General Manager. In July 1995, he
was  appointed  to the Board of Directors. In May 1996, he was elected President
and  Chief  Operating  Officer.  In  April  1998, he was elected Chief Executive
Officer.   Mr.   Heaton  served  in  various  technical  positions  at  National
Semiconductor from 1978 to 1990 prior to joining the Company.

     Edmond  R.  Ward  has served as one of the directors since June 1999. Since
August  1999,  Mr.  Ward  has  been  a General Partner of Virtual Founders. From
April  1992  to  June  1997,  Mr.  Ward  was the Vice President of Technology at
Silicon Valley Group, Inc.

     Kanegi  Nagai,  a  director  since  May  1996,  will  not  be  standing for
re-election  this  year.  Mr.  Nagai has served the Company very well during his
tenure  and  contributed  to  the  Company's  success  and  growth.  The Company
appreciates  the  enormous  service that he has given and will miss his presence
and contributions.

     Vincent  J.  Coates  is  the  father of Norman V. Coates. There is no other
family  relationship  between  any of the foregoing nominees or between any such
nominees and any of the executive officers of the Company.


     THE  BOARD  OF  DIRECTORS UNANIMOUSLY RECOMMENDS THAT THE SHAREHOLDERS VOTE
"FOR" THE NOMINEES SET FORTH HEREIN.


                                       3

<PAGE>

<TABLE>
Security Ownership of Management and Certain Beneficial Owners

     The  following table sets forth beneficial ownership of Common Stock of the
Company  as  of  December  31, 1999, by each director or nominee, by each of the
Named  Officers  (as  defined  below), by all directors and officers as a group,
and  by  all  persons  known  to the Company to be the beneficial owners of more
than  5%  of  the Company's Common Stock. Unless otherwise indicated the address
of  each  beneficial  owner  of 5% of the Company's Common Stock is 310 DeGuigne
Avenue, Sunnyvale, California 94086.

<CAPTION>
                                                                Number of Shares of     Percent
                                                                   Common Stock           of
Name of Beneficial Owner                                       Beneficially Owned(1)     Total
- ------------------------                                       ---------------------     -----
<S>                                                                  <C>                 <C>
Vincent J. Coates(2)   .......................................       5,388,774           58.8%
Putnam Investments, Inc.(3)  .................................         833,840            9.1%
 One Post Office Square
 Boston, MA 02109
FMR Corp.(4)  ................................................         700,000            7.6%
 82 Devonshire St
 Boston, MA 02109
Nathaniel Brenner(5)   .......................................          55,999            *
Norman V. Coates(6)    .......................................          38,049            *
John D. Heaton(7)   ..........................................         126,668            1.4%
Paul B. Nolan(8)    ..........................................          61,666            *
Kanegi Nagai(9)  .............................................          13,999            *
Roger Ingalls, Jr.(10)    ....................................          32,999            *
William A. McGahan(11)    ....................................          29,332            *
Edmond R. Ward   .............................................               0            *
All officers and directors as a group (9 persons)(12)   ......       5,747,486           60.6%
<FN>
- ------------
*    Represents less than 1% of outstanding shares of Common Stock.

(1)  Beneficial ownership is determined in accordance with the rules of the SEC.
     The  number of shares  beneficially  owned by a person  includes  shares of
     common  stock  subject to options  held by that person  that are  currently
     exercisable or exercisable within 60 days of December 31, 1999. Such shares
     issuable pursuant to such options are deemed  outstanding for computing the
     percentage  ownership of the person holding such options but are not deemed
     outstanding for the purposes of computing the percentage  ownership of each
     other person.

(2)  Includes  4,388,654 shares of common stock held of record by the Vincent J.
     Coates Separate  Property Trust,  U/D/T dated August 7, 1981, for which Mr.
     Coates acts as trustee, and 1,000,000 shares of common stock held of record
     by the Vincent J. Coates 1999 Charitable  Trust UTA dated December 17, 1999
     for which Mr. Coates acts as trustee.

(3)  According to a Schedule 13G filed with the Securities  Exchange  Commission
     on or about  February  17, 2000,  Putnam  Investments,  Inc.  ("PI") may be
     deemed to be the beneficial  owner of 833,840 shares of common stock. PI is
     identified as a Parent Holding Company on its Schedule 13G.

(4)  According to a Schedule 13G filed with the Securities  Exchange  Commission
     on or about  February  11,  2000 FMR Corp  ("FMR")  may be deemed to be the
     beneficial  owner of 700,000 shares of Common Stock. FMR is identified as a
     Parent Holding Company on its Schedule 13G.

(5)  Includes  26,000  shares of Common  Stock held of record by the N&J Brenner
     Living Trust, for which Mr. Brenner and his spouse act as trustees, for the
     benefit of members of Mr. Brenner's  immediate family, and 29,999 shares of
     common stock  issuable upon  exercise of  outstanding  options  exercisable
     within 60 days of December 31, 1999.


                                       4


<PAGE>

(6)  Includes  an  aggregate  of 8,050  shares  held as trustee on the behalf of
     other  family  members  and 29,999  shares of common  stock  issuable  upon
     exercise of outstanding  options exercisable within 60 days of December 31,
     1999.

(7)  Includes   126,668  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.

(8)  Includes   61,666  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.

(9)  Includes   13,999  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.

(10) Includes   32,999  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.

(11) Includes   29,332  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.

(12) Includes   324,662  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of December 31, 1999.
</FN>
</TABLE>


Board Meetings and Committees

     The  Board  of  Directors held a total of four meetings during fiscal 1999.
During  fiscal  1999,  no  incumbent  directors  attended  less  than 75% of the
meetings  of  the  Board  of  Directors and all incumbent directors attended all
meetings of committees, if any, upon which such directors served.

     Audit  Committee. The Audit Committee of the Board of Directors reviews and
monitors  the corporate financial reporting and the internal and external audits
of  the  Company, including among other things, the Company's internal audit and
control  functions, the results and scope of the annual audit and other services
provided  by  the  Company's  independent auditors, and the Company's compliance
with  legal  matters  with  a  significant  impact  on  the  Company's financial
reports.  In  addition,  the  Audit Committee has the responsibility to consider
and  recommend  the  employment  of,  and  to  review fee arrangements with, the
Company's  independent  auditors. The Audit Committee also monitors transactions
between  the Company and its officers, directors and employees for any potential
conflicts  of  interest.  The current members of the Audit Committee are Vincent
J.  Coates,  Nathaniel  Brenner and Edmond R. Ward. Kanegi Nagai was a member of
the  Audit  Committee until April 18, 2000. The Audit Committee met twice during
fiscal 1999.

     Compensation   Committee. The   Compensation  Committee  of  the  Board  of
Directors   reviews  and  makes  recommendations  to  the  Board  regarding  the
Company's  compensation  policy  and all forms of compensation to be provided to
executive  officers  and directors of the Company, including among other things,
annual  salaries  and bonuses. The current members of the Compensation Committee
are  Nathaniel Brenner and Norman V. Coates. Clifford F. Smedley was a member of
the  Compensation Committee until April 14, 1999. The Compensation Committee met
one time during fiscal 1999.

     Stock  Option  Committee. The  Stock  Option  Committee  of  the  Board  of
Directors  is  responsible  for  approving  the  grant  of  stock options to the
Company's  employees  under  the  Company's  1991 Stock Option Plan. The current
members  of  the  Stock  Option  Committee  are  Norman  V. Coates and Nathaniel
Brenner.  The Stock Option Committee did not meet separately during fiscal 1999,
but acted by written consent nine times during fiscal 1999.


Compensation Committee Interlocks and Insider Participation

     The  Compensation  Committee  of  the  Board  of  Directors  of Nanometrics
Incorporated  consisted  of Nathaniel Brenner, Norman V. Coates and, until April
14,  1999,  Clifford  F. Smedley. No member of the Compensation Committee of the
Company's  Board  serves  as  a member of the board of directors or compensation
committee  of  any  entity  that has one or more executive officers serving as a
member of the Company's Board of Directors or Compensation Committee.


                                       5


<PAGE>

Board Compensation

     Directors  who  are  not  also  employees  of the Company receive an annual
retainer  fee  of  $5,000  plus $1,000 for each Board of Directors and committee
meeting  attended (unless the Board and committee meeting take place on the same
day,  in  which  case  such  directors receive a $1,000 fee) and are eligible to
participate in the Company's 1991 Director Option Plan.

<TABLE>
Compensation of Executive Officers

     The  following table sets forth the compensation paid by the Company to the
Chief  Executive Officer and each of the other most highly compensated executive
officers  of  the  Company  (collectively, the "Named Officers") during the past
three fiscal years:


                          Summary Compensation Table

<CAPTION>

                                                                         Long Term
                                                                        Compensation
                                                                           Awards
                                                                        --------------
                                                Annual Compensation      Securities
                                   Fiscal     -----------------------    Underlying
                                    Year       Salary       Bonus        Options (#)
                                   --------   ----------   ----------   --------------
<S>                                <C>        <C>          <C>          <C>
John D. Heaton   ...............    1999      $241,445      $  5,338        50,000
 President and                      1998      $206,668      $ 21,098       100,000
 Chief Executive Officer            1997      $219,061      $ 45,261        75,000
Vincent J. Coates   ............    1999      $204,800      $    --            --
 Chairman of the Board and          1998      $215,231      $ 10,431           --
 Secretary                          1997      $238,776      $ 47,405           --
Roger Ingalls Jr    ............    1999      $178,529      $  3,203           --
 Vice President and                 1998      $209,178      $ 14,723        19,000
 Director of Marketing              1997      $222,900      $ 22,642        25,000
William Fate  ..................    1999      $177,767      $  2,925           --
 Former Vice President and          1998      $212,058      $ 13,442        19,000
 Director of International Sales    1997      $189,053      $ 21,630         4,000
William A. McGahan  ............    1999      $174,896      $  3,681           --
 Vice President and                 1998      $151,315      $ 15,934        38,000
 Chief Scientist                    1997      $143,390      $ 26,218        30,000
Paul B. Nolan    ...............    1999      $120,870      $  2,643           --
 Vice President and                 1998      $123,232      $ 13,809           --
 Chief Financial Officer            1997      $135,551      $ 29,378        40,000
</TABLE>



                                       6


<PAGE>

Stock Options Granted in the Fiscal Year Ended December 31, 1999

     The  following  table  sets forth information with respect to stock options
granted  during  the  fiscal  year  ended December 31, 1999 to each of the Named
Officers. All options were granted under the Company's 1991 Stock Option Plan.

     The  potential  realizable  value  amounts  in  the last two columns of the
following  chart  represent  hypothetical  gains  that could be achieved for the
respective  options  if  exercised at the end of the option term. The assumed 5%
and  10%  annual rates of stock price appreciation from the date of grant to the
end  of  the option term are provided in accordance with rules of the SEC and do
not  represent  the  Company's estimate or projection of the future common stock
price.  Actual  gains,  if  any,  on stock option exercises are dependent on the
future  performance  of  the  common  stock,  overall  market conditions and the
option holder's continued employment through the vesting period.

<TABLE>

                       Option Grants in Last Fiscal Year

<CAPTION>
                                               Individual Grants
                            -------------------------------------------------------

                                                                                      Potential Realized
                                                                                         Value  Rates
                            Number of     % of Total                                   at Assumed Annual
                            Securities      Options                                     of Stock Price
                            Underlying     Granted to                                  Appreciation for
                             Options        Employees     Exercise                      Option Term
                             Granted        in Fiscal      Price       Expiration     --------------------
           Name              (#) (1)        Year (2)       ($/Sh)         Date        5% ($)     10% ($)
- --------------------------- ------------   ------------   ----------   ------------   --------   ---------
<S>                         <C>            <C>            <C>          <C>            <C>        <C>
John D. Heaton    .........  50,000          11.0%         6.94        5/28/04        95,835     211,771
Vincent J. Coates    ......     --             --            --            --           --         --
Roger Ingalls Jr.    ......     --             --            --            --           --         --
William Fate   ............     --             --            --            --           --         --
William A. McGahan   ......     --             --            --            --           --         --
Paul B. Nolan  ............     --             --            --            --           --         --
<FN>
- ------------
(1) All  options  granted to the Named Officers in 1999 were granted at exercise
    prices  equal  to the fair market value of the Company's common stock on the
    dates  of  grant.  Historically,  options  granted become exercisable at the
    rate  of  33%  on  the first anniversary date of the option grant and 33% of
    the  option  shares  become exercisable each full year thereafter, such that
    full  vesting  occurs  three  years  after  the date of grant. Options lapse
    after 5 years or 90 days after termination of employment.

(2) Based  on  455,000 options granted during the fiscal year ended December 31,
    1999.
</FN>
</TABLE>


                                       7


<PAGE>

<TABLE>
Aggregated  Option  Exercises  in  Last  Fiscal  Year and Fiscal Year-End Option
Values

     The  following  table  sets  forth  the  number of shares acquired upon the
exercise  of  stock options during 1999 and the number of shares covered by both
exercisable  and  unexercisable stock options held by each of the Named Officers
at December 31, 1999.

<CAPTION>
                                                              Number of Securities
                                                            Underlying Unexercisable          Value of Unexercised
                                                                Options At Fiscal            In-the-Money Options At
                               Shares          Value               Year-End (#)               Fiscal Year-End ($)(2)
                             Acquired on     Realized     -----------------------------   -----------------------------
                            Exercise (#)      ($)(1)      Exercisable     Unexercised     Exercisable     Unexercised
                            --------------   ----------   -------------   -------------   -------------   -------------
<S>                         <C>              <C>          <C>             <C>             <C>             <C>
John D. Heaton    .........        --              --       126,668         141,667        1,906,687       2,034,380
Vincent J. Coates    ......        --              --           --              --               --              --
Roger Ingalls Jr.    ......     25,000         416,375       32,999          21,001          481,507         285,557
William Fate   ............     27,999         150,981          --              --               --              --
William A. McGahan   ......     25,000         193,505       29,332          33,668          416,453         458,144
Paul B. Nolan  ............     25,000         264,725       61,666          13,334          960,640         200,010

<FN>
- ------------
(1) The  value  realized  upon  exercise  is  (i)  the  fair market value of the
    Company's  common  stock  on  the date of exercise, less the option exercise
    price  per  share,  multiplied  by  (ii) the number of shares underlying the
    options exercised.
(2) The  value  of  unexercised  options  is  (i)  the  fair market value of the
    Company's  common  stock  on  December 31, 1999 ($20.13 per share), less the
    option  exercise  price  of  in-the-money  options,  multiplied  by (ii) the
    number of shares underlying such options.
</FN>
</TABLE>

<TABLE>

Report on Repricing of Options

     The  following  table  summarizes  stock  options  granted to the executive
officers of the Company that have been repriced during the past ten years.


                          Ten-Year Option Repricings

<CAPTION>
                                           Number of        Market       Exercise
                                           Securities      Price of      Price at                Length of Original
                                           Underlying      Stock at       Time of       New         Option Term
                              Repricing     Options         Time of      Repricing   Exercise    Remaining at Date
Name                            Date      Repriced (#)   Repricing ($)      ($)      Price ($)      of Repricing
- ---------------------------- ----------- -------------- --------------- ----------- ----------- --------------------
<S>                          <C>         <C>            <C>             <C>         <C>         <C>
John D. Heaton  ............   9/15/98       16,668          5.125          5.25       5.125    2 years 2 months
 President and Chief           9/15/98       75,000          5.125         10.22       5.125    3 years 11 months
 Executive Officer             9/15/98      100,000          5.125          8.63       5.125    4 years 7 months
Roger Ingalls Jr.  .........   9/15/98       25,000          5.125          6.13       5.125    1 year 11 months
 Vice President and Director   9/15/98        5,000          5.125          5.25       5.125    2 years 2 months
 of Marketing                  9/15/98       25,000          5.125         10.22       5.125    3 years 11 months
William Fate ...............   9/15/98       15,000          5.125          6.13       5.125    1 year 11 months
 Former Vice President and     9/15/98        9,000          5.125          5.25       5.125    2 years 2 months
 Director of                   9/15/98        4,000          5.125         10.22       5.125    3 years 11 months
 International Sales
William A. McGahan    ......   9/15/98       20,000          5.125          5.88       5.125    2 years 4 months
 Vice President and            9/15/98       30,000          5.125         10.22       5.125    3 years 11 months
 Chief Scientist               9/15/98       10,000          5.125          8.63       5.125    4 years 7 months
                               9/15/98        3,000          5.125          8.50       5.125    4 years 9 months
Paul B. Nolan   ............   9/15/98        5,000          5.125          5.25       5.125    2 years 2 months
 Vice President and Chief      9/15/98       40,000          5.125         10.22       5.125    3 years 11 months
 Financial Officer
</TABLE>

                                       8


<PAGE>

Certain Transactions

     The  Company  is  the  beneficiary  of  an  insurance policy on the life of
Vincent  J.  Coates  in  a face amount of $8,000,000. Annual premiums, which are
paid  by the Company, totaled $200,000 for fiscal 1999 are fixed at $200,000 per
year  upon  continuation  of  the  policy.  In  the  event of termination of the
policy,  any cash surrender value would belong to Mr. Coates. Mr. Coates and the
Company  have  entered  into  an  agreement  providing  that in the event of Mr.
Coates'  death,  his  estate  has  the  option  to  cause the Company to use the
proceeds  of  the  policy to purchase shares of the Company's Common Stock owned
by  the  estate  at  their  then  fair market value. The estate is not obligated
under  the  terms  of the agreement to exercise the option. If the option is not
exercised,  the  Company would retain the proceeds of the insurance. The purpose
of  this  agreement  is  to  provide  Mr.  Coates'  estate,  at  its option, the
opportunity  to  obtain  cash to pay estate taxes without having to raise all of
such money from sales in the open market.

     Pursuant  to  the  terms  of  an  agreement  dated  May 1, 1985 between the
Company  and  Vincent  J.  Coates,  the  terms  of  which  were then amended and
restated  in  August  1996  and  again  effective  April  1998,  the  Company is
obligated,  in  the  event  Mr.  Coates is required to resign as Chairman of the
Board  under certain circumstances, to continue to pay Mr. Coates his salary and
benefits for five years from the date of such resignation.

     In  April  1998,  the  Company entered into an agreement with Mr. Heaton in
which  the  Company  agrees to pay Mr. Heaton his usual annual salary (excluding
bonuses)  for  a  period  of  one  year  from  the  date  that he is required or
requested  for  any  reason not involving good cause to involuntarily relinquish
his  positions  with the Company as Chief Executive Officer and President and as
a  director.  If  Mr. Heaton leaves the Company voluntarily or if he is asked to
leave under certain circumstances, no such severance pay shall be awarded.


Compliance With Section 16(a) of the Securities Exchange Act of 1934

     Section  16(a) of the Securities Exchange Act of 1934, as amended, requires
the  Company's  executive  officers and directors, and persons who own more than
ten  percent  of  a registered class of the Company's equity securities, to file
reports  of  ownership and changes in ownership with the Securities and Exchange
Commission   ("SEC")   and  the  Nasdaq  National  Market.  Executive  officers,
directors  and  greater  than  ten  percent  shareholders  are  required  by SEC
regulations  to  furnish the Company with copies of all Section 16(a) forms they
file.  Based  solely on its review of the copies of such forms received by it or
written  representations  from  certain  reporting persons, the Company believes
that  during  fiscal  1999  all  filing requirements applicable to the executive
officers,  directors  and  greater  than  ten percent shareholders were complied
with,  except  that  the Vincent J. Coates Separate Property Trust, U/D/T/ dated
August  7,  1981  and  the  Vincent  J.  Coates  1999 Charitable Trust UTA dated
December  17,  1999,  both greater than ten percent shareholders, each filed one
report on Form 3 late.


Report  of the Compensation Committee and Stock Option Committee of the Board of
Directors

     The  following  is  the  report of the Compensation Committee and the Stock
Option  Committee of the Board of Directors describing compensation policies and
rationales  applicable  to  the Company's executive officers with respect to the
compensation  paid to such executive officers for the fiscal year ended December
31,  1999.  The  information  contained in such report shall not be deemed to be
"soliciting  material"  or  to  be  "filed"  with  the  Securities  and Exchange
Commission,  nor  shall  such  information be incorporated by reference into any
future  filing  under  the  Securities Act or Exchange Act, except to the extent
that the Company specifically incorporates it by reference into such filing.

     General. The    Compensation    Committee   is   responsible   for   making
recommendations  to  the  Board  of  Directors with respect to cash compensation
levels  for  the  Company's  executive  officers.  During 1999, the Stock Option
Committee  was  responsible  for determining levels of equity-based compensation
for the Company's executive officers and other key personnel of the Company.

     Compensation  Philosophy. The  Compensation Committee makes recommendations
as  to the salaries of the executive officers by considering (i) the salaries of
executive  officers  in  similar  positions  at comparably-sized peer companies,
(ii) the Company's financial performance over the past year based


                                       9


<PAGE>

upon  revenues  and  operating  results  and (iii) the achievement of individual
performance  goals  related  to  each  executive  officer's  duties and areas of
responsibility.  The  Compensation  Committee  makes  recommendations  as to the
levels  of  cash  bonuses  awarded to the Company's executive officers and views
such  bonuses  as  being  an integral part of its performance based compensation
program.  Such  bonuses  are  based  on  Company profits and are determined as a
percentage of the executive salaries.

     Equity-Based  Compensation. The  Stock Option Committee views stock options
as  an  important part of its long-term, performance-based compensation program.
The  Stock  Option  Committee  bases  grants  of  stock options to the executive
officers  of  the  Company  under the Company's 1991 Stock Option Plan upon such
Committee's  estimation of each executive's contribution to the long-term growth
and  profitability  of  the  Company.  The 1991 Stock Option Plan is intended to
provide  additional incentives to the executive officers to maximize shareholder
value.  Options are granted under the 1991 Stock Option Plan at the then-current
market  price  and  are  generally  subject  to  three-year  vesting  periods to
encourage key employees to remain with the Company.

     Compensation   of   the   President   and   Chief   Executive  Officer. The
compensation  of  the  Company's President and Chief Executive Officer was based
upon   the   same  criteria  described  above.  Specifically,  the  Compensation
Committee   considered   several   factors  as  important  in  determining  such
compensation  including  progress  toward  meeting  the  corporate  plan and the
objectives  set  for the President and Chief Executive Officer during his tenure
in  the  current  fiscal  year as well as progress toward attaining longer range
goals  as  a  result  of  his  leadership. In recognition of his progress toward
meeting  corporate  goals  and to remain competitive, based on a survey of other
CEO  salaries,  the  compensation of the Company's President and Chief Executive
Officer was increased to an annual salary of $250,000.


STOCK OPTION COMMITTEE            COMPENSATION COMMITTEE


Norman V. Coates                  Nathaniel Brenner
Nathaniel Brenner                 Norman V. Coates
                                  Clifford F. Smedley, until April 14, 1999







                                       10


<PAGE>

Performance Graph

     Set  forth  below is a line graph comparing the annual percentage change in
the  cumulative  return  to  the shareholders of the Company's Common Stock with
the  cumulative  return  of  the  Nasdaq  U.S.  Index  and the Hambrecht & Quist
Technology  Index  for  the  period  commencing on January 1, 1995 and ending on
December  31, 1999. The information contained in the performance graph shall not
be  deemed  to be "soliciting material" or to be "filed" with the Securities and
Exchange  Commission,  nor  shall  such information be incorporated by reference
into  any  future filing under the Securities Act or Exchange Act, except to the
extent  that  the  Company  specifically  incorporates it by reference into such
filing.


                 COMPARISON OF 5 YEAR CUMULATIVE TOTAL RETURN*
     AMONG NANOMETRICS INCORPORATED, THE NASDAQ STOCK MARKET (U.S.) INDEX
                   AND THE HAMBRECHT & QUIST TECHNOLOGY INDEX



[The following  descriptive  data is supplied in accordance  with Rule 304(d) of
Regulation S-T]

                                   12/94    12/95  12/96   12/97   12/98   12/99
                                   ---------------------------------------------
Nanometrics Incorporated            100     1,311    844   1,456   1,389   3,578
Hambrecht & Quist Technology        100       150    186     218     339     757
NASDAQ Stock Market (U.S.)          100       141    174     213     300     557


* $100 invested on 12/31/94 in stock or index.
  Including reinvestment of dividends.
  Fiscal Year Ending December 31.


                                       11


<PAGE>


                                 PROPOSAL NO. 2

            ADOPTION OF THE COMPANY'S 2000 EMPLOYEE STOCK OPTION PLAN
            AND THE RESERVATION OF 1,250,000 SHARES OF THE COMPANY'S
                      COMMON STOCK FOR ISSUANCE THEREUNDER


     On April 25, 2000,  the Board of  Directors  of the Company  (the  "Board")
adopted  the 2000  Employee  Stock  Option  Plan (the  "Plan"),  subject  to the
approval  of the  Company's  shareholders.  The Plan is  intended to replace the
Company's  1991 Employee  Stock Plan (the "1991 Plan").  Shareholders  are being
asked to approve  the  adoption  of the Plan and the  reservation  of  1,250,000
shares thereunder.  The fair market value of the Common Stock as of December 31,
1999 was $20.13 per share.

     The  Board  believes  that the Plan has  been  important  to the  Company's
efforts to encourage employee equity participation and increase worker retention
by aligning  employee  interests  with those of the  shareholders.  The Board is
pleased  with the success of the 1991 Plan in  increasing  the level of employee
interest in the  Company's  stock price,  and believes  that the offer of equity
incentives  to all  employees  has been a key  factor in the  Company's  overall
financial  performance.  As of December 31, 1999,  options to purchase 2,557,496
shares of Common  Stock were  issued  under the 1991 Plan,  of which  options to
purchase 1,340,664 shares of Common Stock were outstanding.

     The following is a summary  description  of the Plan under which no options
or stock purchase rights have yet been granted.


SUMMARY OF THE PLAN

     Purpose.  The  purposes  of the Plan are to  attract  and  retain  the best
available  personnel for  positions of  substantial  responsibility,  to provide
additional incentive to employees, directors and consultants (collectively,  the
"Service Providers"), and to promote the success of the Company's business.

     Shares  Subject to the Plan.  The Board has reserved a maximum of 1,250,000
shares of Common Stock for issuance under the Plan. The shares may be authorized
but unissued, or reacquired Common Stock.

     Administration.  The Plan may be administered by different  Committees with
respect  to  different   groups  of  Service   Providers  (as  applicable,   the
"Administrator"). The Administrator may make any determinations deemed necessary
or advisable for the Plan.

     Eligibility.  Nonstatutory  stock options and stock purchase  rights may be
granted to Service  Providers.  Incentive  stock  options may be granted only to
employees. The Administrator,  in its discretion,  selects the Service Providers
to whom options and stock purchase rights may be granted, and the exercise price
and number of shares subject to each such grant.  Currently,  approximately  160
employees of the Company are eligible to participate in the Plan.

     Limitations.  Section 162(m) of the Internal  Revenue Code, as amended (the
"Code")  places limits on the  deductibility  for federal income tax purposes of
compensation  paid to certain  executive  officers of the  Company.  In order to
preserve the Company's ability to deduct the compensation income associated with
the options  granted to such persons,  the Plan provides that no employee may be
granted,  in any  fiscal  year of the  Company,  options to  purchase  more than
1,000,000  shares of Common  Stock.  Notwithstanding  this  limit,  however,  in
connection with an individual's  initial employment with the Company,  he or she
may be granted  options to  purchase  up to an  additional  1,000,000  shares of
Common Stock.

     Terms and Conditions of Options. Each option is evidenced by a stock option
agreement between the Company and the optionee,  and is subject to the following
terms and conditions:

         (a) Exercise Price. The Administrator  determines the exercise price of
     options at the time the  options  are  granted.  The  exercise  price of an
     incentive  stock  option may not be less than 100% of the fair market value
     of the Common Stock on the date such option is granted; provided,  however,
     that the  exercise  price of an  incentive  stock  option  granted to a 10%
     shareholder  may not be less than 110% of the fair market value on the date
     such option is granted. The fair market value of the


                                       12


<PAGE>


     Common Stock is  generally  determined  with  reference to the closing sale
     price for the Common  Stock (or the closing bid if no sales were  reported)
     on the same trading day as the date the option is granted.

         (b)  Exercise  of  Option;  Form of  Consideration.  The  Administrator
     determines when options become exercisable.  An option shall be exercisable
     in whole or in part by giving written or electronic  notice to the Company,
     stating  the  number of shares  with  respect  to which the  options  being
     exercised,  accompanied  by payment in full for such  shares.  The means of
     payment for shares  issued upon  exercise of an option is specified in each
     option  agreement.  The Plan  permits  payment  to be made by cash,  check,
     promissory  note,  other shares of Common  Stock of the Company  (with some
     restrictions),  cashless  exercises,  a reduction  in the amount of Company
     liability to the  optionee,  any other form of  consideration  permitted by
     applicable law, or any combination thereof.

         (c)  Term of  Option.  The  Administrator  determines  the term of each
     option.  However, the term of an incentive stock option may be no more than
     ten (10) years from the date of grant; provided,  however, that in the case
     of an incentive stock option granted to a 10% shareholder,  the term of the
     option may be no more than five (5) years from the date of grant. No option
     may be exercised after the expiration of its term.

         (d)  Termination as a Service  Provider.  If an optionee's  employment,
     director or consulting  relationship  terminates for any reason  (excluding
     death or disability),  then the optionee  generally may exercise the option
     within 3 months of such termination to the extent that the option is vested
     on the date of  termination,  (but in no event later than the expiration of
     the term of such  option  as set  forth  in the  option  agreement).  If an
     optionee's employment,  director or consulting  relationship terminates due
     to the  optionee's  disability  or death,  the optionee (or the  optionee's
     estate or the  person  who  acquires  the right to  exercise  the option by
     bequest or  inheritance)  generally may exercise the option,  to the extent
     the option was vested on the date of termination, within 12 months from the
     date  of  such  termination.

         (e)  Nontransferability of Options.  Unless otherwise determined by the
     Administrator,  options granted under the Plan are not  transferable  other
     than by will or the laws of descent and distribution,  and may be exercised
     during the optionee's lifetime only by the optionee.

         (f) Other  Provisions.  The stock option  agreement  may contain  other
     terms,  provisions and conditions not inconsistent  with the Plan as may be
     determined by the  Administrator.

     Stock Purchase Rights. Stock purchase rights may be issued either alone, in
addition,   or  in  tandem  with  other  awards  granted  under  the  Plan.  The
Administrator determines who will be offered Common Stock and the conditions and
restrictions related to the offer, including the number of shares to be offered,
the price to be paid and the time which the offer must be  accepted.  Unless the
Administrator  determines  otherwise,  the restricted  stock purchase  agreement
shall grant the Company a repurchase  option  exercisable  upon the voluntary or
involuntary  termination  of the  purchaser's  employment to the Company for any
reason   (including  death  or  disability).   The  purchase  price  for  shares
repurchased  pursuant to the restricted  stock purchase  agreement  shall be the
original  price paid by the  purchaser  and may be paid by  cancellation  of any
indebtedness of the purchaser to the Company.  The repurchase option shall lapse
at  a  rate  determined  by  the  Administrator.

     Adjustments  Upon Changes in  Capitalization.  In the event that the Common
Stock of the Company changes by reason of any stock split,  reverse stock split,
stock  dividend,  combination,  reclassification  or other similar change in the
capital  structure of the Company effected without the receipt of consideration,
appropriate adjustments shall be made in the number and class of shares of stock
subject  to the Plan,  the  number  and class of shares of stock  subject to any
option or stock  purchase  right  outstanding  under the Plan,  and the exercise
price of any such outstanding option and stock purchase right.

     In the event of a liquidation or dissolution,  any  unexercised  options or
stock  purchase  rights  will  terminate.  The  Administrator  may,  in its sole
discretion,  provide that each optionee  shall have the right to exercise all or
any part of the  option,  including  shares  as to which  the  option  would not
otherwise be exercisable.  In addition,  the  Administrator may provide that any
Company  repurchase  option  applicable to shares  purchased upon exercise of an
option  or stock  purchase  right  will  lapse as to all  shares,  provided  the
proposed dissolution or liquidation takes place as contemplated.


                                       13


<PAGE>


     Subject to the  occurrence  of a change of control  (discussed  below),  in
connection  with any merger of the Company with or into another  corporation  or
the  sale  of  all or  substantially  all of the  assets  of the  Company,  each
outstanding  option and stock  purchase  right shall be assumed or an equivalent
option or stock purchase right substituted by the successor corporation.  If the
successor  corporation refuses to assume the options or stock purchase rights or
to substitute  substantially  equivalent  options or stock purchase rights,  the
optionee  shall have the right to  exercise  the  option as to all the  optioned
stock, including shares not otherwise vested or exercisable.  In such event, the
Administrator shall notify the optionee that the option is fully exercisable for
fifteen  (15) days from the date of such  notice and that the option  terminates
upon expiration of such period.

     Change of  Control.  In the event of a "change  of  control,"  any  options
outstanding  on the date of such  change in control  will vest and become  fully
exercisable and any Company  repurchase  right with respect to restricted  stock
will lapse if (i) a successor  corporation  fails to assume all obligations with
respect to such options and restricted  stock,  (ii) the optionees or holders of
restricted  stock do not or will not receive the same  consideration as received
by other shareholders in such change of control,  (iii) an optionee or holder of
restricted  stock is terminated in an  "involuntary  termination"  following the
change of control or (iv) the optionee is designated an executive officer by the
Company's  board of  directors as of the date of such change of control and such
optionee  does not  voluntarily  resign from the Company  during the twelve (12)
month period following such change of control.  A "change of control" is defined
as (i) any  "person" (as defined in Sections  13(d) and 14(d) of the  Securities
Exchange Act of 1934)  becoming the  "beneficial  owner" (as defined  under Rule
13d-3 of the Securities Exchange Act of 1934) of 50% or more of the total voting
power of the Company,  (ii) certain  changes in the  composition of the board of
directors,  (iii) a merger or consolidation where the Company's  shareholders do
not own at least 50% of the voting power after the  transaction or (iv) the sale
or disposition of  substantially  all of the Company's  assets.  An "involuntary
termination"  is  defined  as (i) a  termination  of an  optionee  for other the
"Cause," (ii) certain  reductions of an  optionee's  base salary,  (iii) certain
reductions of an optionee's  employee benefits,  (iv) certain  relocations of an
optionee,  and (v) with  respect to certain  officers,  a  reduction  of duties,
authority or responsibilities  following a change of control. "Cause" is defined
as (i) certain acts of dishonesty, fraud or misrepresentation in connection with
such optionee's  employment  responsibilities,  (ii) an optionee's  arrest for a
felony,  fraud or an act or moral  turpitude,  or (ii) an optionee's  failure to
perform  his or her  employment  obligations  or follow the  Company's  employee
policies.

     Amendment and Termination of the Plan. The Board may amend, alter,  suspend
or  terminate  the Plan,  or any part  thereof,  at any time and for any reason.
However,  the Company shall obtain shareholder approval for any amendment to the
Plan to the extent  necessary  and desirable to comply with  applicable  law. No
such  action by the Board or  shareholders  may alter or impair any rights of an
optionee without the written consent of the optionee. Unless terminated earlier,
the Plan shall  terminate  ten years  from the date the Plan was  adopted by the
Board.

     Federal  Income  Tax  Consequences.  The  following  discussion  summarizes
certain U.S. federal income tax considerations for persons receiving options and
stock  purchase  rights  under the Plan and certain tax effects to the  Company,
based  upon the  provisions  of the Code as in effect on the date of this  Proxy
Statement,  current regulations and existing  administrative rulings of the IRS.
However,  the  summary is not  intended to be a complete  discussion  of all the
federal income tax consequences of this Plan:

         (a) Incentive  Stock  Options.  An optionee who is granted an incentive
     stock option does not  recognize  taxable  income at the time the option is
     granted or upon its exercise,  although the exercise is an adjustment  item
     for  alternative  minimum tax  purposes and may subject the optionee to the
     alternative  minimum tax.  Upon a  disposition  of the shares more than two
     years after grant of the option and one year after  exercise of the option,
     any gain or loss is treated as long-term  capital gain or loss. Net capital
     gains on shares held more than 12 months may be taxed at a maximum  federal
     rate of 20%.  Capital losses are allowed in full against  capital gains and
     up to  $3,000  against  other  income.  If these  holding  periods  are not
     satisfied,   the  optionee  recognizes  ordinary  income  at  the  time  of
     disposition  equal to the  difference  between the  exercise  price and the
     lower of (i) the fair market  value of the shares at the date of the option
     exercise or (ii) the sale price of the shares. Any


                                       14


<PAGE>

     gain or loss  recognized on such a premature  disposition  of the shares in
     excess of the amount treated as ordinary  income is treated as long-term or
     short-term  capital  gain or  loss,  depending  on the  holding  period.  A
     different  rule  for  measuring  ordinary  income  upon  such  a  premature
     disposition may apply if the optionee is also an officer,  director, or 10%
     shareholder  of the Company.  Unless limited by Section 162(m) of the Code,
     the Company is entitled to a deduction  in the same amount as the  ordinary
     income recognized by the optionee.

         (b)  Nonstatutory  Stock  Options.  An optionee  does not recognize any
     taxable  income  at the  time he or she is  granted  a  nonstatutory  stock
     option.  Upon exercise,  the optionee  recognizes  taxable income generally
     measured by the excess of the then fair market value of the shares over the
     exercise price. Any taxable income  recognized in connection with an option
     exercise by an employee of the Company is subject to tax withholding by the
     Company.  Unless  limited by  Section  162(m) of the Code,  the  Company is
     entitled  to a  deduction  in  the  same  amount  as  the  ordinary  income
     recognized  by the  optionee.  Upon a  disposition  of such  shares  by the
     optionee, any difference between the sale price and the optionee's exercise
     price, to the extent not recognized as taxable income as provided above, is
     treated as long-term or short-term  capital gain or loss,  depending on the
     holding period. Net capital gains on shares held more than 12 months may be
     taxed at a maximum federal rate of 20%.  Capital losses are allowed in full
     against capital gains and up to $3,000 against other income.

         (c) Stock  Purchase  Rights.  Stock  purchase  rights will generally be
     taxed in the same manner as nonstatutory stock options. However, restricted
     stock is generally  purchased upon the exercise of a stock purchase  right.
     At the time of purchase, restricted stock is subject to a "substantial risk
     of  forfeiture"  within the meaning of Section 83 of the Code,  because the
     Company  may  repurchase  the stock  when the  purchaser  ceases to provide
     services  to  the  Company.  As  a  result  of  this  substantial  risk  of
     forfeiture, the purchaser will not recognize ordinary income at the time of
     purchase.  Instead,  the purchaser  will recognize  ordinary  income on the
     dates  when  the  stock  is no  longer  subject  to a  substantial  risk of
     forfeiture  (i.e.,  when the  Company's  right of repurchase  lapses).  The
     purchaser's  ordinary  income is  measured  as the  difference  between the
     purchase price and the fair market value of the stock on the date the stock
     is no longer subject to right of repurchase.

     The purchaser may accelerate to the date of purchase his or her recognition
of ordinary income, if any, and begin his or her capital gains holding period by
timely filing, (i.e., within thirty days of the purchase),  an election pursuant
to Section 83(b) of the Code. In such event, the ordinary income recognized,  if
any, is  measured as the  difference  between  the  purchase  price and the fair
market value of the stock on the date of purchase,  and the capital gain holding
period commences on such date. The ordinary income recognized by a purchaser who
is an employee  will be subject to tax  withholding  by the  Company.  Different
rules  may  apply  if  the  purchaser  is  also  an  officer,  director,  or 10%
shareholder of the Company.

     Option  Information  As of December 31, 1999.  The Company,  including  its
subsidiaries,  had  approximately  160 employees with outstanding  option grants
under the 1991 Plan.

     While it believes that  establishment of the Plan can result in dilution to
existing  shareholders,  the  Board  believes  that the  positive  effect on the
Company's  performance  that the 1991 Plan had and that the Plan will have, more
than offset the dilution to existing shareholders.

     With  the  demand  for  highly  skilled  employees  at an  all  time  high,
especially in the  technology  industries,  the Board believes it is critical to
the Company's success to maintain  competitive employee  compensation  programs,
including the Plan.


VOTE REQUIRED

     The  affirmative  vote of a majority  of the shares of Common  Stock of the
Company  represented  in person or by proxy at the Meeting and  entitled to vote
will be required to approve the adoption of the Plan.

     THE COMPANY'S  BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS A VOTE "FOR" THE
ADOPTION  OF THE 2000  EMPLOYEE  STOCK  OPTION  PLAN AND THE  NUMBER  OF  SHARES
RESERVED FOR ISSUANCE THEREUNDER.


                                       15


<PAGE>


                                 PROPOSAL NO. 3

            ADOPTION OF THE COMPANY'S 2000 DIRECTOR STOCK OPTION PLAN
             AND THE RESERVATION OF 250,000 SHARES OF THE COMPANY'S
                      COMMON STOCK FOR ISSUANCE THEREUNDER

     On April 25, 2000,  the Board of  Directors  of the Company  (the  "Board")
adopted the 2000 Director Stock Option Plan (the "2000 Director Plan"),  subject
to the  approval  of the  Company's  shareholders.  The  2000  Director  Plan is
intended to replace the  Company's  1991  Director  Stock Option Plan (the "1991
Director Plan"). The Board of Directors has reserved a maximum of 250,000 shares
of Common Stock for issuance under the 2000 Director Plan. The fair market value
of the Common Stock as of December 31, 1999 was $20.13 per share.

     The Board  believes that the 1991  Director Plan has been  important to the
Company's  efforts to  encourage  director  equity  participation  and  increase
retention.  Although  non-employee  directors  have  an  interest  in  acquiring
approval for the 2000 Director Plan since they will be the  beneficiaries of the
approval,  the Board is pleased with the success of the 1991 Plan in  increasing
the level of director  interest in the Company's stock price,  and believes that
the offer of equity  incentives  to all  directors  has been a key factor in the
Company's overall  financial  performance.  As of December 31, 1999,  options to
purchase 263,332 shares of Common Stock were issued under the 1991 Director Plan
of which options to purchase 154,000 shares of Common Stock were outstanding.

     The  following is a summary  description  of the 2000  Director  Plan under
which no options have yet been granted.

SUMMARY OF THE 2000 DIRECTOR PLAN

     Purpose.  The purposes of the 2000  Director Plan are to attract and retain
the best  available  personnel  for service as a Director who is not an Employee
(an "Outside  Director")  of the  Company,  to provide  additional  incentive to
Outside  Directors of the Company to serve as directors,  and to encourage their
continued service on the Board.

     Shares  Subject to the 2000 Director Plan. The Board has reserved a maximum
of 250,000 shares of Common Stock for issuance under the 2000 Director Plan. The
Shares may be authorized, but unissued, or reacquired Common Stock.

     Administration. The 2000 Director Plan provides for grants of options to be
made in two ways:

         (a) Each  Outside  Director  is  automatically  granted  an  option  to
     purchase  10,000 shares (the "First  Option") upon the date such individual
     first becomes a director,  whether through  election by the shareholders of
     the Company or by appointment by the Board in order to fill a vacancy; and

         (b) Each  non-employee  director is automatically  granted an option to
     purchase 10,000 shares (the "Subsequent Option") on January 1 of each year,
     if on such date he or she shall  have  served on the Board for at least the
     preceding six (6) months.

     The Board has the authority, in its discretion,  to: (i) determine the fair
market  value of the Common  Stock;  (ii)  interpret  the Director  Plan;  (iii)
prescribe,  amend and rescind  rules and  regulations  relating to the  Director
Plan;  (iv)  authorize  any person to  execute,  on behalf of the  Company,  any
instrument  required to  effectuate  the grant of an option  previously  granted
under  the 2000  Director  Plan;  and (v) make all other  determinations  deemed
necessary  or  advisable  for  the  administration  of the  Director  Plan.  All
decisions, determinations and interpretations of the Board are final.

     Eligibility;  Limitations.  Only  non-employee  directors  of the Board are
eligible to receive nonstatutory stock options under the 2000 Director Plan.

     Terms and  Conditions  of Options.  Each option is  evidenced by a director
option  agreement  between the Company and the  optionee,  and is subject to the
following additional terms and conditions:

         (a) Exercise  Price.  The exercise  price of options  granted under the
     Director  Plan is 100% of the fair  market  value per  share of the  Common
     Stock on the date of grant,  generally  determined  with  reference  to the
     closing  sale price for the Common  Stock (or the  closing  bid if no sales
     were reported) on the date of grant.


                                       16


<PAGE>


         (b) Exercise of Option. Both the First Option and the Subsequent Option
     shall vest as to 1/3 of the optioned stock on each  anniversary of the date
     of grant.  An  option  shall be  exercisable  in whole or in part by giving
     written notice to the Company, stating the number of shares with respect to
     which the  option is being  exercised,  accompanied  by payment in full for
     such shares.

         (c) Forms of Consideration. The means of payment for shares issued upon
     exercise  of an option is  specified  in each  option  agreement.  The 2000
     Director Plan permits payment to be made by cash,  check,  promissory note,
     other  shares of Common  Stock of the  Company  (with  some  restrictions),
     cashless  exercises,  any payment permitted by under applicable law, or any
     combination thereof.

         (d) Term of Option. The term of any option shall be five (5) years from
     the date of grant.  No option may be exercised  after the expiration of its
     term.

         (e) Termination of Directorship.  If an optionee's status as a director
     terminates for any reason,  then all options held by the optionee under the
     2000 Director Plan expire three months  following the  termination.  If the
     optionee's status as a director terminates due to death or disability, then
     all options held by the optionee under the 2000 Director Plan expire twelve
     months  following  the  termination.  In no case may an option be exercised
     after the expiration date of the option.

         (f)  Nontransferability  of  Options:  Options  granted  under the 2000
     Director  Plan  are not  transferable  other  than  by will or the  laws of
     descent  and  distribution,  and may be  exercised  during  the  optionee's
     lifetime only by the optionee.

         (g) Other  Provisions:  The director option agreement may contain other
     terms,  provisions and conditions not  inconsistent  with the 2000 Director
     Plan as may be determined by the Board.

     Adjustments Upon Changes in Capitalization.  In the event that the stock of
the  Company  changes  by  reason  of any  stock  split,  reverse  stock  split,
recapitalization  or  other  similar  change  in the  capital  structure  of the
Company,  or converted into or exchanged for other securities as a result of any
merger, consolidation or reorganization,  or in the event the outstanding number
of  shares of stock of the  Company  is  increased  through  payment  of a stock
dividend,  appropriate  adjustments  shall be made in the  number  and  class of
shares of stock  subject  to the 2000  Director  Plan,  the  number and class of
shares of stock subject to any option  outstanding  under the Director Plan, and
the exercise price of any such outstanding option.

     Unless  otherwise  determined  by the  Board,  in the  event of a  proposed
liquidation or dissolution, any unexercised options will terminate prior to such
action.  The Board may give the optionee  the right to exercise any  unexercised
options,  including  shares  as to which  the  option  would  not  otherwise  be
exercisable, prior to their termination.

     Subject to the occurrence of a change of control  (discussed below), in the
event of a merger of the Company or the sale of substantially  all of the assets
of the Company,  each option may be assumed or an equivalent option  substituted
for by the successor corporation.  If an option is assumed or substituted for by
the  successor  corporation,  it shall  continue to vest as provided in the 2000
Director  Plan.  If the  successor  corporation  does  not  agree to  assume  or
substitute for the option, each option shall become fully vested and exercisable
for a period of fifteen (15) days from the date the Board  notifies the optionee
of the  option's  full  exercisability,  after  which  period  the  option  will
terminate.

     Change of  Control.  In the event of a "change  of  control,"  any  options
outstanding  on the date of such  change in control  will vest and become  fully
exercisable if (i) a successor  corporation fails to assume all obligations with
respect to such options,  (ii) the optionees do not or will not receive the same
consideration as received by other shareholders in such change of control, (iii)
an optionee's  status as a director of the Company or the successor  corporation
is  terminated  other than by  voluntary  resignation  following  such change of
control.  A "change of  control" is defined as (i) any  "person"  (as defined in
Sections  13(d) and 14(d) of the  Securities  Exchange Act of 1934) becoming the
"beneficial  owner" (as defined under Rule 13d-3 of the Securities  Exchange Act
of 1934) of 50% or more of the total voting  power of the Company,  (ii) certain
changes in the composition of the board of directors, (iii) a merger or


                                       17


<PAGE>


consolidation  where  the  Company's shareholders do not own at least 50% of the
voting  power  after  the  transaction  or  (iv)  the  sale  or  disposition  of
substantially all of the Company's assets.

     Amendment and  Termination  of the 2000 Director Plan. The Board may amend,
alter,  suspend or terminate the 2000 Director Plan, or any part thereof, at any
time and for any reason.  However, the Company shall obtain shareholder approval
for any amendment to the 2000  Director  Plan to the extent  necessary to comply
with applicable laws or regulations. No such action by the Board or shareholders
may alter or impair any option  previously  granted under the 2000 Director Plan
without  the  consent  of the  optionee.  Unless  terminated  earlier,  the 2000
Director  Plan shall  terminate  ten years from the date of its  approval by the
shareholders or the Board, whichever is earlier.

     Federal  Income  Tax  Consequences.  The  following  discussion  summarizes
certain U.S. federal income tax considerations  for directors  receiving options
under the 2000 Director Plan and certain tax effects to the Company,  based upon
the  provisions  of the Code as in effect on the date of this  Proxy  Statement,
current regulations and existing  administrative rulings of the Internal Revenue
Service. However, the summary is not intended to be a complete discussion of all
the federal income tax consequences of this Plan:

         (a) Nonstatutory Stock Options. Options granted under the 2000 Director
     Plan do not qualify as incentive  stock  options  under  Section 422 of the
     Code. An optionee  does not recognize any taxable  income at the time he or
     she is granted a nonstatutory  stock option.  Upon  exercise,  the optionee
     recognizes taxable income generally measured by the excess of the then fair
     market value of the shares over the exercise price. The Company is entitled
     to a deduction in the same amount as the ordinary income  recognized by the
     optionee. Upon a disposition of such shares by the optionee, any difference
     between the sale price and the optionee's exercise price, to the extent not
     recognized as taxable income as provided  above, is treated as long-term or
     short-term  capital  gain or loss,  depending  on the holding  period.  Net
     capital  gains on shares held more than 12 months may be taxed at a maximum
     federal rate of 20%.  Capital  losses are allowed in full  against  capital
     gains and up to $3,000 against other income.


VOTE REQUIRED

     The  affirmative  vote of a majority  of the shares of Common  Stock of the
Company  represented  in person or by proxy at the Meeting and  entitled to vote
will be required to approve the adoption of the 2000 Director Plan.

     THE COMPANY'S  BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS A VOTE "FOR" THE
ADOPTION OF THE 2000 DIRECTOR  OPTION PLAN AND THE NUMBER OF SHARES RESERVED FOR
ISSUANCE THEREUNDER.


                                       18


<PAGE>


                                 PROPOSAL NO. 4

                  AMENDMENT TO THE EMPLOYEE STOCK PURCHASE PLAN
                TO INCREASE THE NUMBER OF SHARES OF COMMON STOCK
               RESERVED FOR ISSUANCE THEREUNDER BY 150,000 SHARES


     The  Company's  Board of  Directors  (the  "Board") and  shareholders  have
previously  adopted and approved the  Company's  Employee  Stock  Purchase  Plan
("Purchase  Plan")  (described  below). On April 25, 2000, the Board approved an
amendment to the Purchase Plan, subject to shareholder approval, to increase the
shares reserved for issuance  thereunder by 150,000  shares,  bringing the total
number of shares issuable under the Purchase Plan to 400,000. As of December 31,
1999, 25,894 shares were available for future issuance under the Purchase Plan.

     At the annual  meeting,  the  shareholders  are being  asked to approve the
increase in the number of shares issuable under the Purchase Plan.


SUMMARY OF THE PURCHASE PLAN

     General.  The purpose of the Purchase Plan is to provide  employees with an
opportunity to purchase Common Stock of the Company through payroll deductions.


     Administration.  The  Purchase  Plan may be  administered  by the  Board of
Directors (the "Board") or a committee  appointed by the Board. All questions of
interpretation  or  application of the Purchase Plan are determined by the Board
or its appointed committee,  and its decisions are final, conclusive and binding
upon all participants.

     Eligibility.  Each  employee of the  Company  (including  officers),  whose
customary employment with the Company is at least twenty (20) hours per week and
more than five (5) months in any calendar  year, is eligible to  participate  in
the  Purchase  Plan;  provided,  however,  that no employee  shall be granted an
option under the Purchase  Plan (i) to the extent  that,  immediately  after the
grant,  such  employee  would own 5% of either the voting  power or value of the
stock of the  Company,  or (ii) to the extent that his or her rights to purchase
stock under all employee stock  purchase plans of the Company  accrues at a rate
which exceeds $25,000 worth of stock (determined at the fair market value of the
shares at the time such option is granted) for each calendar year.

     Offering  Period.  The Purchase  Plan is  implemented  by offering  periods
lasting  approximately  six  months  in  duration  with  a new  offering  period
commencing  approximately  on October 1 and April 1 of each year. To participate
in the Purchase Plan, each eligible employee must authorize  payroll  deductions
pursuant to the Purchase Plan.  Such payroll  deductions may not exceed 10% of a
participant's  compensation.  Compensation  is defined as regular  straight time
gross earnings, but exclusive of commissions, overtime, shift premium, incentive
compensation,  bonuses  and  other  compensation.  Once an  employee  becomes  a
participant in the Purchase Plan,  Common Stock will  automatically be purchased
under  the  Purchase  Plan  at the  end of  each  offering  period,  unless  the
participant  withdraws or terminates  employment earlier,  and the employee will
automatically  participate in each successive offering period until such time as
the employee withdraws from the Purchase Plan or the employee's  employment with
the Company terminates.

     Purchase  Price.  The purchase price per share at which shares will be sold
in an  offering  under  the  Purchase  Plan is the  lower of (i) 85% of the fair
market value of a share of Common  Stock on the first day of an offering  period
or (ii) 85% of the fair market  value of a share of Common Stock on the last day
of each  offering  period.  The fair market value of the Common Stock on a given
date is generally  the closing sale price of the Common Stock as reported on the
Nasdaq National Market for such date.

     Payment of Purchase Price; Payroll Deductions. Payment for of the shares is
accumulated by payroll deductions  throughout the offering period. The number of
shares of Common Stock a  participant  may purchase in each  offering  period is
determined by dividing the total amount of payroll deductions  withheld from the
participant's  compensation  during that offering  period by the purchase price;
provided, however, that a participant may not purchase during an offering period
more than 5,000 shares during any


                                       19


<PAGE>


offering  period.  During the offering period, a participant may discontinue his
or  her  participation  in  the  Purchase Plan, and may decrease or increase the
rate  of  payroll  deductions  in  an  offering  period within limits set by the
Administrator.

     All  payroll  deductions  made  for  a  participant  are  credited  to  the
participant's account under the Purchase Plan, are withheld in whole percentages
only and are included with the general funds of the Company.  Funds  received by
the Company  pursuant to  exercises  under the  Purchase  Plan are also used for
general corporate  purposes.  A participant may not make any additional payments
into his or her account.

     Withdrawal.  A participant  may terminate his or her  participation  in the
Purchase Plan at any time by giving the Company a written  notice of withdrawal.
In such event, the payroll deductions credited to the participant's account will
be returned, without interest, to such participant.  Payroll deductions will not
resume unless a new  subscription  agreement is delivered in  connection  with a
subsequent offering period.

     Termination of Employment.  Termination of a  participant's  employment for
any reason,  including death,  cancels his or her  participation in the Purchase
Plan  immediately.  In  such  event  the  payroll  deductions  credited  to  the
participant's account will be returned without interest to such participant, his
or her designated beneficiaries or the executors or administrators of his or her
estate.

     Adjustments Upon Changes in Capitalization.  In the event of any changes in
the  capitalization  of the Company effected without receipt of consideration by
the  Company,   such  as  a  stock  split,   stock   dividend,   combination  or
reclassification  of the Common  Stock,  resulting in an increase or decrease in
the number of shares of Common Stock,  proportionate adjustments will be made by
the Board in the shares subject to purchase and in the price per share under the
Purchase Plan. In the event of  liquidation  or dissolution of the Company,  the
offering  periods  then in  progress  will  terminate  immediately  prior to the
consummation of such event unless otherwise  provided by the Board. In the event
of a sale of all or  substantially  all of the  assets  of the  Company,  or the
merger  of  the  Company  with  or  into  another  corporation,   the  successor
corporation will assume or substitute for each outstanding  option. In the event
the successor  corporation refuses to assume or substitute for the options,  the
offering  period then in progress will be shortened and a new exercise date will
be set. In such event, the Board shall notify each participant at least ten (10)
business days prior to the new exercise date.

     Amendment  and  Termination.  The Board may at any time and for any  reason
amend or terminate  the Purchase  Plan,  except that no such  termination  shall
affect options  previously  granted and no amendment shall make any change in an
option  granted  prior  thereto  which  adversely  affects  the  rights  of  any
participant.  Shareholder  approval for amendments to the Purchase Plan shall be
obtained  in such a manner and to such a degree as  required  to comply with all
applicable laws or regulations.  The Purchase Plan will terminate in 2006 unless
terminated earlier by the Board in accordance with the Purchase Plan.

     Certain Federal Income Tax Information.  The following brief summary of the
effect of federal  income  taxation  upon the  participant  and the Company with
respect to the shares  purchased under the Purchase Plan and does not purport to
be complete,  and does not discuss the tax consequences of a participant's death
or the income tax laws of any state or foreign  country in which the participant
may reside.

     The  Purchase  Plan,  and the  right  of  participants  to  make  purchases
thereunder,  is intended to qualify under the provisions of Sections 421 and 423
of the Code. Under these provisions,  no income will be taxable to a participant
until  the  shares  purchased  under  the  Purchase  Plan are sold or  otherwise
disposed of. Upon sale or other disposition of the shares,  the participant will
generally be subject to tax in an amount that  depends upon the holding  period.
If the shares  are sold or  otherwise  disposed  of more than two years from the
first day of the  applicable  offering  period and one year from the  applicable
date of purchase, the participant will recognize ordinary income measured as the
lesser of (a) the excess of the fair  market  value of the shares at the time of
such sale or disposition  over the purchase price, or (b) an amount equal to 15%
of the fair  market  value of the  shares as of the first day of the  applicable
offering period.  Any additional gain will be treated as long-term capital gain.
If the shares are sold or otherwise  disposed of before the  expiration of these
holding  periods,  the  participant  will recognize  ordinary  income  generally
measured  as the excess of the fair  market  value of the shares on the date the
shares are


                                       20


<PAGE>


purchased  over  the purchase price. Any additional gain or loss on such sale or
disposition  will  be long-term or short-term capital gain or loss, depending on
the  holding  period.  The  Company generally is not entitled to a deduction for
amounts  taxed as ordinary income or capital gain to a participant except to the
extent  of ordinary income recognized by participants upon a sale or disposition
of shares prior to the expiration of the holding periods described above.


VOTE REQUIRED

     The approval of the amendment to the Purchase Plan requires the affirmative
vote of a majority of the Votes Cast on the proposal at the Annual Meeting.

     THE COMPANY'S  BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS A VOTE "FOR" THE
AMENDMENT TO THE EMPLOYEE  STOCK  PURCHASE PLAN TO INCREASE THE NUMBER OF SHARES
OF COMMON STOCK RESERVED FOR ISSUANCE THERE-UNDER BY 150,000 SHARES.


                                 PROPOSAL NO. 5

                         RATIFICATION OF APPOINTMENT OF
                              INDEPENDENT AUDITORS

     The Board has appointed  Deloitte & Touche LLP,  independent  auditors,  to
audit the consolidated  financial  statements of the Company for the fiscal year
ending  December  31,  2000.  Deloitte & Touche LLP has  audited  the  Company's
financial statements since fiscal 1991.

     Representatives  of Deloitte & Touche LLP are expected to be present at the
meeting  with the  opportunity  to make a statement if they desire to do so, and
are expected to be available to respond to appropriate questions.

     THE BOARD OF DIRECTORS UNANIMOUSLY  RECOMMENDS THAT SHAREHOLDERS VOTE "FOR"
THE  RATIFICATION  OF THE  APPOINTMENT OF DELOITTE & TOUCHE LLP AS THE COMPANY'S
INDEPENDENT AUDITORS FOR THE FISCAL YEAR ENDING DECEMBER 31, 2000.


                                  OTHER MATTERS

     The Company  knows of no other  matters to be submitted to the meeting.  If
any other matters  properly come before the meeting,  it is the intention of the
persons  named in the enclosed  proxy card to vote the shares they  represent as
the Board of Directors may recommend.


                                            THE BOARD OF DIRECTORS


Dated: May 3, 2000

                                       21



<PAGE>


PROXY                       NANOMETRICS INCORPORATED
          This Proxy is Solicited on Behalf of the Board of Directors
                       2000 Annual Meeting of Shareholders
                                  May 31, 2000

     The undersigned  shareholder(s) of Nanometrics  Incorporated,  a California
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders  and Proxy  Statement,  each dated May 3, 2000, and hereby appoints
Vincent  J.  Coates  and  Paul  B.  Nolan,   and  each  of  them,   Proxies  and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 2000 Annual Meeting
of  Shareholders of Nanometrics  Incorporated  to be held on Wednesday,  May 31,
2000 at 1:30 p.m.,  local time, at the principal  offices of the Company located
at 310  DeGuigne  Drive,  Sunnyvale,  California  94086 and at any  adjournments
thereof,  and to vote all  shares  of Common  Stock  which  the  undersigned  is
entitled to vote on the matters set forth below:

ITEM 1. ELECTION OF DIRECTORS:

       [  ] FOR all nominees listed below           [ ] WITHHOLD AUTHORITY
            (except  as indicated)                      to vote for all nominees
                                                        listed below

If you wish to withhold authority to vote for any individual  nominee,  strike a
line through that nominee's name in the list below:

Vincent J. Coates   Nathaniel Brenner   Norman V. Coates   John D. Heaton
                                 Edmond R. Ward

ITEM 2.  Proposal to approve the adoption of the Company's  2000 Employee  Stock
         Option Plan and the  reservation  of 1,250,000  shares of the Company's
         Common Stock for issuance thereunder.

                         [ ] FOR [ ] AGAINST [ ] ABSTAIN

ITEM 3.  Proposal to approve the adoption of the Company's  2000 Director  Stock
         Option  Plan and the  reservation  of 250,000  shares of the  Company's
         Common Stock for issuance thereunder.

                         [ ] FOR [ ] AGAINST [ ] ABSTAIN

ITEM 4.  Proposal  to approve  an  amendment  to the  Company's  Employee  Stock
         Purchase Plan to increase the number of shares of the Company's  Common
         Stock reserved for future issuance by 150,000.

                         [ ] FOR [ ] AGAINST [ ] ABSTAIN

ITEM 5.  Proposal  to  ratify  the  appointment  of  Deloitte  &  Touche  LLP as
         Independent Auditors of the Company for the 2000 fiscal year.

                         [ ] FOR [ ] AGAINST [ ] ABSTAIN

                  (Continued and to be signed, on reverse side)


<PAGE>


                           (Continued from other side)

         In their  discretion the Proxies are authorized to vote upon such other
business as may properly come before the meeting.

         THIS BALLOT WILL BE VOTED AS DIRECTED  OR, IF NO CONTRARY  DIRECTION IS
INDICATED,  WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS  NAMED  HEREIN,  "FOR"
EACH PROPOSAL  LISTED,  AND AS SAID PROXIES DEEM ADVISABLE ON SUCH OTHER MATTERS
AS MAY COME BEFORE THE MEETING.

                                             Typed or Printed Name(s)

                                             ___________________________________
                                                          Signature

                                             ___________________________________
                                                          Signature

                                             ___________________________________
                                                     Title, if applicable

                                             ___________________________________
                                              Type and number of shares owned

                                             Dated: ______________________, 2000


                                             This proxy should be marked, dated,
                                             signed   by   the    shareholder(s)
                                             exactly as his or her name  appears
                                             hereon and returned promptly in the
                                             enclosed envelope.  Persons signing
                                             in a fiduciary  capacity  should so
                                             indicate.  If  shares  are  held by
                                             joint   tenants  or  as   community
                                             property, both should sign.



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