SILICON VALLEY GROUP INC
SC 13G/A, 1998-10-09
SPECIAL INDUSTRY MACHINERY, NEC
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          CUSIP No.                                13G         Page 1 of 9 Pages
          827066101
                                           



                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                                                              

                                  SCHEDULE 13G

                    Under the Securities Exchange Act of 1934

                                (Amendment No.1 )


                           Silicon Valley Group, Inc.
                                (Name of issuer)

                     Common Stock, $.01 par value per share
                         (Title of class of securities)

                                    827066101
                                 (CUSIP number)


     The  remainder  of this  cover  page  shall be filled  out for a  reporting
person's  initial  filing on this  form with  respect  to the  subject  class of
securities,  and for any subsequent amendment containing information which would
alter the disclosures provided in a prior cover page.

     The  information  required in the remainder of this cover page shall not be
deemed to be "filed"  for the purpose of Section 18 of the  Securities  Exchange
Act of 1934 ("Act") or otherwise  subject to the  liabilities of that section of
the Act but shall be subject to all other  provisions of the Act  (however,  see
the notes).
<PAGE>

- --------------------------------------------------------------------------------
  1      NAME OF REPORTING PERSONS
         S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

         EQSF Advisers, Inc.
         (EIN 13-3354359)

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  2      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*            (a)  [   ]
                                                                      (b)  [   ]
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  3      SEC USE ONLY

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  4      CITIZENSHIP OR PLACE OF ORGANIZATION

                     New York Corporation

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
                                 5      SOLE VOTING POWER

                                                 4,273,100

          NUMBER OF
                               -------------------------------------------------
                               -------------------------------------------------
            SHARES               6      SHARED VOTING POWER
         BENEFICIALLY
           OWNED BY                                     None
                               -------------------------------------------------
                               -------------------------------------------------
             EACH                7      SOLE DISPOSITIVE POWER
          REPORTING
            PERSON                               4,273,100

                               -------------------------------------------------
                               -------------------------------------------------
             WITH               8       SHARED DISPOSITIVE POWER

                                                         None
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 9       AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

                    4,273,100

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 10      CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
         CERTAIN SHARES*                                                  [    ]

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
         PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
 11
                  13.11%

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
         TYPE OF REPORTING PERSON*
 12
                  IA

- --------------------------------------------------------------------------------

*SEE INSTRUCTIONS BEFORE FILLING OUT!
<PAGE>

- --------------------------------------------------------------------------------
  1      NAME OF REPORTING PERSONS
         S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

         M.J. Whitman Advisers, Inc.
         (EIN 13-3686379)

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  2      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*            (a)  [   ]
                                                                      (b)  [   ]
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  3      SEC USE ONLY

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  4      CITIZENSHIP OR PLACE OF ORGANIZATION

                     New York Corporation

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
                                 5      SOLE VOTING POWER

                                                 632,284

          NUMBER OF
                               -------------------------------------------------
                               -------------------------------------------------
            SHARES               6      SHARED VOTING POWER
         BENEFICIALLY
           OWNED BY                                   None
                               -------------------------------------------------
                               -------------------------------------------------
             EACH                7      SOLE DISPOSITIVE POWER
          REPORTING
            PERSON                               632,284

                               -------------------------------------------------
                               -------------------------------------------------
             WITH               8       SHARED DISPOSITIVE POWER

                                                      None
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 9       AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

                  632,284

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 10      CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
         CERTAIN SHARES*                                                  [    ]

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
         PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
 11
                  1.94%

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
         TYPE OF REPORTING PERSON*
 12
                  IA

- --------------------------------------------------------------------------------

                      *SEE INSTRUCTIONS BEFORE FILLING OUT!
<PAGE>


- --------------------------------------------------------------------------------
  1      NAME OF REPORTING PERSONS
         S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

                  Martin J. Whitman


- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  2      CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*           ( a)  [   ]
                                                                     (b)   [   ]
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  3      SEC USE ONLY

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
  4      CITIZENSHIP OR PLACE OF ORGANIZATION

                  USA

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
                                 5      SOLE VOTING POWER

          NUMBER OF                              None  (See Item 4)
                               -------------------------------------------------
                               -------------------------------------------------
                                 6      SHARED VOTING POWER
            SHARES
                                                 None
         BENEFICIALLY

           OWNED BY
                               -------------------------------------------------
                               -------------------------------------------------
             EACH                7      SOLE DISPOSITIVE POWER

          REPORTING                              None  (See Item 4)

                               -------------------------------------------------
                               -------------------------------------------------
         PERSON WITH            8       SHARED DISPOSITIVE POWER

                                                 None

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 9       AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

                  -0-    (See Item 4)

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 10      CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
         CERTAIN SHARES*                                                    [  ]

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 11      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

                  -0-

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 12      TYPE OF REPORTING PERSON*

                  IN

- --------------------------------------------------------------------------------
                      *SEE INSTRUCTIONS BEFORE FILLING OUT!

<PAGE>



Item 1.
         (a)      Name of Issuer:
                  Silicon Valley Group, Inc. (the "Issuer").

         (b)      Address of Issuer's Principal Executive Offices:
                   101 Metro Dr., Suite 400, San Jose, CA 95110
Item 2.
         (a)      Name of Person Filing:
     This schedule is being jointly filed by EQSF Advisers,  Inc. ("EQSF"), M.J.
Whitman  Advisers,  Inc.  ("MJWA") and Martin J.  Whitman,  the Chief  Executive
Officer of EQSF and MJWA and controlling  person of EQSF and MJWA.  (EQSF,  MJWA
and Martin J. Whitman are  sometimes  collectively  referred to  hereinafter  as
"Filer").  Attached  hereto as an  exhibit is a copy of the joint  Schedule  13G
filing agreement among the reporting persons.
        
         (b)      Address of Principal Business Office:
     The address of the principal executive office of EQSF, MJWA and Mr. Whitman
     is: 767 Third Avenue, New York, New York 10017-2023.
         
          (c)      Citizenship:

     The citizenship or place of  organization of each of the reporting  persons
     is as follows:

                  EQSF

                  New York State corporation.

                  MJWA

                  New York State corporation.

                  Martin J. Whitman

                  United States citizen.

         (d)      Title of Class of Securities:

                  Common Stock, $.01 par value per share.

         (e)      CUSIP Number:
                  827066101
<PAGE>
 
 


     Item 3. If this  statement is being filed  pursuant to Rules  13d-1(b),  or
13d-2(b), check whether the person filing is a:

     (e)  Investment  Adviser  registered  under  section 203 of the  Investment
Advisers Act of 1940 (EQSF and MJWA).
 
Item 4.  Ownership.
     (a) & (b) EQSF  beneficially  owns 4,273,100 shares, or 13.11% of the class
of securities of the issuer.  MJWA beneficially owns 632,284 shares, or 1.94% of
the class of securities of the issuer.

                  (c)  (i) EQSF:  4,273,100
                           MJWA:  632,284

                        (ii) Not applicable.

                       (iii) EQSF:  4,273,100
                           MJWA:  632,284

                       (iv) Not applicable.

         Mr. Whitman disclaims beneficial ownership of all such shares.

Item 5.  Ownership of Five Percent or Less of a Class.
                Not applicable.

<PAGE>


Item 6.  Ownership of More than Five Percent on Behalf of Another Person.
     Third  Avenue  Value  Fund,  an  investment  company  registered  under the
     Investment  Company Act of 1940, has the right to receive  dividends  from,
and the  proceeds  from the sale of  4,057,800  of the shares  reported by EQSF;
Third Avenue  Small-Cap Value Fund, an investment  company  registered under the
Investment Company Act of 1940, has the right to receive dividends from, and the
proceeds  from the sale of  164,200 of the shares  reported  by EQSF;  and Third
Avenue Value Portfolio of the WRL Series Fund, an investment  company registered
under the Investment company Act of 1940, has the right to receive the dividends
from,  and the proceeds from the sale of 51,100 of the shares  reported by EQSF.
Various  clients  for whom MJWA  acts as  investment  advisor  have the right to
receive  dividends from, and the proceeds of the sale of, the shares reported by
MJWA.

     Item 7.  Identification and Classification of the Subsidiary Which Acquired
the Security Being Reported on By the Parent Holding Company.
                  Not Applicable.

Item 8.  Identification and Classification of Members of the Group.
                  Not applicable.

Item 9.  Notice of Dissolution of Group.
                  Not applicable.

Item 10. Certification.
     By signing  below I certify  that,  to the best of my knowledge and belief,
the  securities  referred  to above  were  acquired  in the  ordinary  course of
business  and were not acquired for the purpose of and do not have the effect of
changing or  influencing  the control of the issuer of such  securities and were
not acquired in connection  with or as a participant in any  transaction  having
such purposes or effect.
 

<PAGE>


                                    SIGNATURE

     After  reasonable  inquiry and to the best of my  knowledge  and belief,  I
certify that the information  set forth in this statement is true,  complete and
correct.


                                                               October 9, 1998 
      (Date)

 
 

                                            EQSF ADVISERS, INC.

                                            By:/s/   MARTIN J. WHITMAN 
                                            Martin J. Whitman
                                            Chairman and Chief Executive Officer




                                            M.J. WHITMAN ADVISERS, INC.
 
                                            By:/s/  MARTIN J. WHITMAN
                                            Martin J. Whitman
                                            Chairman and Chief Executive Officer

                                            /s/ MARTIN J. WHITMAN
                                            Martin J. Whitman


 


                                                                      Exhibit 1




                             JOINT FILING AGREEMENT


     In  accordance  with Rule 13d-1 (f) under the  Securities  Exchange  Act of
1934,  as amended,  the  undersigned  hereby  agree to the joint filing with all
other Reporting Entities (as such term is defined in the Schedule 13G) on behalf
of each of them of a statement on Schedule 13G  (including  amendments  thereto)
with respect to the Common Stock,  $.01 par value per share,  of Silicon  Valley
Group,  Inc.,  and that this  Agreement  be included as an Exhibit to such joint
filing.  This  Agreement  may be executed in any number of  counterparts  all of
which taken together shall constitute one and the same instrument.


     IN WITNESS WHEREOF,  the undersigned hereby execute this Agreement this 9th
day of October, 1998.



                                            EQSF ADVISERS, INC.

                                            By:/s/   MARTIN J. WHITMAN 
                                            Martin J. Whitman
                                            Chairman and Chief Executive Officer




                                            M. J. WHITMAN ADVISERS, INC.

                                            By:/s/  MARTIN J. WHITMAN
                                            Martin J. Whitman
                                            Chairman and Chief Executive Officer
                                           



                                             /s/MARTIN J. WHITMAN               
                                             Martin J. Whitman
 



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