SILICON VALLEY GROUP INC
SC 13G/A, 2000-10-12
SPECIAL INDUSTRY MACHINERY, NEC
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                      SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549



                                  SCHEDULE 13G
                    UNDER THE SECURITIES EXCHANGE ACT OF 1934
                                 (AMENDMENT NO.4)

                           SILICON VALLEY GROUP, INC.
            ------------------------------------------------------
                                (NAME OF ISSUER)

                     COMMON STOCK, $1.00 PAR VALUE PER SHARE
             ------------------------------------------------------
                         (TITLE OF CLASS OF SECURITIES)

                                    827066101
            ------------------------------------------------------
                                 (CUSIP NUMBER)

The  remainder  of this cover page shall be filled out for a reporting  person's
initial filing on this form with respect to the subject class of securities, and
for any  subsequent  amendment  containing  information  which  would  alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the  Securities  Exchange  Act of
1934 ("Act") or otherwise  subject to the liabilities of that section of the Act
but  shall be  subject  to all other  provisions  of the Act  (however,  see the
notes).


<PAGE>



--------------------------------------------------------------
  1   NAME OF REPORTING PERSONS
      S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

      EQSF ADVISERS, INC.

      (EIN 13-3354359)
--------------------------------------------------------------
--------------------------------------------------------------
  2   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
       (a)  [  ]
       (b)  [  ]
--------------------------------------------------------------
--------------------------------------------------------------
  3   SEC USE ONLY

--------------------------------------------------------------
--------------------------------------------------------------
  4   CITIZENSHIP OR PLACE OF ORGANIZATION

          NEW YORK CORPORATION
--------------------------------------------------------------
--------------------------------------------------------------
                    5 SOLE VOTING POWER

                                    4,950,900
   NUMBER OF     ---------------------------------------------
                 ---------------------------------------------
     SHARES        6  SHARED VOTING POWER
  BENEFICIALLY
    OWNED BY
                 ---------------------------------------------
                 ---------------------------------------------
      EACH         7  SOLE DISPOSITIVE POWER
   REPORTING
     PERSON                4,950,900
                 ---------------------------------------------
                 ---------------------------------------------
      WITH        8   SHARED DISPOSITIVE POWER

--------------------------------------------------------------
--------------------------------------------------------------
 9    AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING
      PERSON

           4,950,900
--------------------------------------------------------------
--------------------------------------------------------------
 10   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
      CERTAIN SHARES*
             [    ]

--------------------------------------------------------------
--------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
 11
           14.57%

--------------------------------------------------------------
--------------------------------------------------------------
      TYPE OF REPORTING PERSON*
 12
           IA

--------------------------------------------------------------

           *SEE INSTRUCTIONS BEFORE FILLING OUT!


<PAGE>



--------------------------------------------------------------
  1   NAME OF REPORTING PERSONS
      S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

      M.J. WHITMAN ADVISERS, INC.

      (EIN 13-3686379)

--------------------------------------------------------------
--------------------------------------------------------------
  2   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
       (a)  [  ]
       (b)  [  ]
--------------------------------------------------------------
--------------------------------------------------------------
  3   SEC USE ONLY

--------------------------------------------------------------
--------------------------------------------------------------
  4   CITIZENSHIP OR PLACE OF ORGANIZATION

         NEW YORK CORPORATION

--------------------------------------------------------------
--------------------------------------------------------------
                   5 SOLE VOTING POWER

                          485,800
   NUMBER OF     ---------------------------------------------
                 ---------------------------------------------
     SHARES        6  SHARED VOTING POWER
  BENEFICIALLY
    OWNED BY               NONE
                 ---------------------------------------------
                 ---------------------------------------------
      EACH         7  SOLE DISPOSITIVE POWER
   REPORTING
     PERSON                485,800
                 ---------------------------------------------
                 ---------------------------------------------
      WITH        8   SHARED DISPOSITIVE POWER

                            NONE
--------------------------------------------------------------
--------------------------------------------------------------
 9    AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING
      PERSON

           485,800
--------------------------------------------------------------
--------------------------------------------------------------
 10   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
      CERTAIN SHARES*
             [  ]

--------------------------------------------------------------
--------------------------------------------------------------
      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
 11
           1.43%
--------------------------------------------------------------
--------------------------------------------------------------
      TYPE OF REPORTING PERSON*
 12
           IA
--------------------------------------------------------------

           *SEE INSTRUCTIONS BEFORE FILLING OUT!


<PAGE>



--------------------------------------------------------------
  1   NAME OF REPORTING PERSONS
      S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

           MARTIN J. WHITMAN

           (###-##-####)

--------------------------------------------------------------
--------------------------------------------------------------
  2   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
      (a)  [  ]
      (b)  [  ]
--------------------------------------------------------------
--------------------------------------------------------------
  3   SEC USE ONLY

--------------------------------------------------------------
--------------------------------------------------------------
  4   CITIZENSHIP OR PLACE OF ORGANIZATION

           USA
--------------------------------------------------------------
--------------------------------------------------------------
                 5 SOLE VOTING POWER

   NUMBER OF               NONE  (SEE ITEM 4)
                 ---------------------------------------------
                 ---------------------------------------------
                 6 SHARED VOTING POWER

     SHARES                NONE
  BENEFICIALLY
    OWNED BY     ---------------------------------------------
                 ---------------------------------------------
      EACH         7  SOLE DISPOSITIVE POWER

   REPORTING               NONE  (SEE ITEM 4)

                 ---------------------------------------------
                 ---------------------------------------------
  PERSON WITH     8   SHARED DISPOSITIVE POWER

                                      NONE
--------------------------------------------------------------
--------------------------------------------------------------
 9    AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING
      PERSON

           -0-    (SEE ITEM 4)
--------------------------------------------------------------
--------------------------------------------------------------
 10   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES
      CERTAIN SHARES*
             [  ]

--------------------------------------------------------------
--------------------------------------------------------------
 11   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

           -0-

--------------------------------------------------------------
--------------------------------------------------------------
 12   TYPE OF REPORTING PERSON*

           IN

--------------------------------------------------------------
           *SEE INSTRUCTIONS BEFORE FILLING OUT!




ITEM 1.

     (A) NAME OF ISSUER:

         Silicon Valley Group, Inc. (the "Issuer").

     (B) ADDRESS OF ISSUER'S  PRINCIPAL  EXECUTIVE OFFICES
OR, IF NONE, RESIDENCE:

               2240 Ringwood Avenue, San Jose, California

95131

ITEM 2.

     (A) NAME OF PERSON FILING:

         This  schedule  is  being  jointly  filed  by EQSF
Advisers,   Inc.  ("EQSF"),  M.J.  Whitman  Advisers,  Inc.
("MJWA")  and  Martin  J.  Whitman,   the  Chief  Executive
Officer  of EQSF and MJWA and  controlling  person  of EQSF
and MJWA.  (EQSF,  MJWA and Martin J. Whitman are sometimes
collectively   referred   to   hereinafter   as   "Filer").
Attached  hereto  as an  exhibit  is a copy  of  the  joint
Schedule 13G filing agreement among the reporting persons.

     (B) ADDRESS OF PRINCIPAL BUSINESS OFFICE:

         The address of the principal  executive  office of
EQSF,  MJWA and Mr.  Whitman  is:  767  Third  Avenue,  New
York, New York 10017-2023.

     (C) CITIZENSHIP:

         The  citizenship  or place  of  organization  of each of the  reporting
persons is as follows:

         EQSF

         New York State Corporation.

         MJWA

         New York State Corporation.

         MARTIN J. WHITMAN

         United States Citizen.

     (D) TITLE OF CLASS OF SECURITIES:

         Common Stock, $1.00 par value per share.

     (E) CUSIP NUMBER:

         827066101

ITEM 3. IF THIS  STATEMENT  IS  BEING  FILED  PURSUANT  TO  RULES  13D-1(B),  OR
13D-2(B), CHECK WHETHER THE PERSON FILING IS A:

         (E) Investment  Adviser  registered under section 203 OF THE INVESTMENT
ADVISERS ACT OF 1940 (EQSF and MJWA).

ITEM 4.  OWNERSHIP.

         (a) & (b) EQSF  beneficially  owns 4,950,900  shares,  or 14.57% of the
class of securities of the issuer.  MJWA  beneficially  owns 485,800 shares,  or
1.43% of the class of securities of the issuer.

         (c)  (i) EQSF: 4,950,900
                  MJWA: 485,800

             (ii) Not applicable.

            (iii) EQSF: 989,200
                  MJWA: 485,800

             (iv) Not applicable.

     Mr.  Whitman  disclaims  beneficial  ownership  of all
such shares.

ITEM 5.  OWNERSHIP OF FIVE PERCENT OR LESS OF A CLASS.

         Not applicable.


ITEM 6.  OWNERSHIP  OF MORE THAN FIVE PERCENT ON BEHALF OF ANOTHER PERSON.

         Third Avenue Value Fund, an  investment  company  registered  under the
Investment Company Act of 1940, has the right to receive dividends from, and the
proceeds  from the sale of,  4,504,100  of the shares  reported  by EQSF,  Third
Avenue  Small-Cap  Value  Fund,  an  investment  company  registered  under  the
Investment Company Act of 1940, has the right to receive dividends from, and the
proceeds from the sale of, 114,000 of the shares reported by EQSF,  Third Avenue
Value Portfolio of the WRL Series Fund, an investment  company  registered under
the Investment Company Act of 1940, has the right to receive dividends from, and
the  proceeds  from the sale of,  72,100 of the shares  reported by EQSF,  Style
Select Series Small-Cap Value Portfolio,  an investment company registered under
the Investment Company Act of 1940, has the right to receive dividends from, and
the  proceeds  from the sale of,  25,000 of the shares  reported by EQSF,  Third
Avenue Value  Portfolio of the Third Avenue Variable Series Trust, an investment
company  registered  under the Investment  Company Act of 1940, has the right to
receive  dividends from, and the proceeds from the sale of, 25,000 of the shares
reported by EQSF and Style Select Series Focused Value Portfolio,  an investment
company  registered  under the Investment  Company Act of 1940, has the right to
receive dividends from, and the proceeds from the sale of, 210,700 of the shares
reported by EQSF.  Various clients for whom MJWA acts as investment advisor have
the right to receive dividends from, and the proceeds of the sale of, the shares
reported by MJWA.

ITEM 7. IDENTIFICATION AND CLASSIFICATION OF THE SUBSIDIARY WHICH ACQUIRED THE
        SECURITY BEING REPORTED ON BY THE PARENT HOLDING COMPANY.

         Not Applicable.

ITEM 8.  IDENTIFICATION  AND  CLASSIFICATION OF MEMBERS OF THE GROUP.

         Not applicable.

ITEM 9.  NOTICE OF DISSOLUTION OF GROUP.

         Not applicable.

ITEM 10. CERTIFICATION.

         By  signing  below I  certify  that,  to the best of my  knowledge  and
belief, the securities referred to above were acquired in the ordinary course of
business  and were not acquired for the purpose of and do not have the effect of
changing or  influencing  the control of the issuer of such  securities and were
not acquired in connection  with or as a participant in any  transaction  having
such purposes or effect.


<PAGE>





                                    SIGNATURE

         After reasonable  inquiry and to the best of my knowledge and belief, I
certify that the information  set forth in this statement is true,  complete and
correct.

                                  OCTOBER 12, 2000
                           --------------------------------
        (Date)




                           EQSF ADVISERS, INC.

                           BY:/S/ MARTIN J. WHITMAN
                              ------------------------
                              Martin J. Whitman
                              Chairman, President and Chief Executive Officer

                           M.J. WHITMAN ADVISERS, INC.

                           BY:/S/  MARTIN J. WHITMAN
                              ----------------------
                              Martin J. Whitman
                              Chairman and Chief Executive Officer

                           S/  MARTIN J. WHITMAN
                           -----------------------
                               Martin J. Whitman, President


<PAGE>


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