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<PAGE> 1
EXHIBIT 23.1
INDEPENDENT AUDITORS' CONSENT
We consent to the incorporation by reference in this Registration of Silicon
Valley Group, Inc. on Form S-8 of our report dated October 25, 1999 appearing in
the Annual Report on Form 10-K of Silicon Valley Group, Inc. for the year ended
September 30, 1999.
/s/ DELOITTE & TOUCHE LLP
-------------------------
Deloitte & Touche LLP
San Jose, California
June 14, 2000
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