AMTECH SYSTEMS INC
S-8, 1996-08-09
SPECIAL INDUSTRY MACHINERY, NEC
Previous: DYNAMIC HEALTHCARE TECHNOLOGIES INC, 8-B12G, 1996-08-09
Next: AMTECH SYSTEMS INC, S-8, 1996-08-09



          As filed with the Securities and Exchange Commission on August 9, 1996
                                                   Registration No. 33-_________
================================================================================
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                              --------------------

                                    FORM S-8
                          REGISTRATION STATEMENT UNDER
                           THE SECURITIES ACT OF 1933
                              --------------------


                              AMTECH SYSTEMS, INC.
- --------------------------------------------------------------------------------
             (Exact name of Registrant as specified in its charter)

           Arizona                                             86-0411215
- --------------------------------------------------------------------------------
 (State or other jurisdiction of                             (I.R.S. Employer
 incorporation or organization)                              Identification No.)

131 South Clark Drive, Tempe, Arizona                                 85281
- --------------------------------------------------------------------------------
     (Address of Principal Executive Offices)                        (Zip Code)

        Amended and Restated 1995 Stock Option Plan/1995 Stock Bonus Plan
- --------------------------------------------------------------------------------
                            (Full title of the plan)

                                  Jong S. Whang
                                    President
                              Amtech Systems, Inc.
                              131 South Clark Drive
                              Tempe, Arizona 85281
- --------------------------------------------------------------------------------
                     (Name and address of agent for service)

                                 (602) 967-5146
- --------------------------------------------------------------------------------
          (Telephone number, including area code, of agent for service)

                                  With copy to:

                          Christopher D. Johnson, Esq.
                            Squire, Sanders & Dempsey
                       40 North Central Avenue, Suite 2700
                             Phoenix, Arizona 85004
                                 (602) 528-4000

Approximate Date of Commencement of Proposed Sale: As soon as practicable  after
the Registration Statement becomes effective.

<PAGE>
                         CALCULATION OF REGISTRATION FEE

================================================================================

                                      Proposed    Proposed
    Title of                      Maximum      Maximum
   Securities       Amount        Offering    Aggregate     Amount of
      To Be         To Be          Price      Offering     Registration
   Registered     Registered    Per Share *    Price *         Fee
   ----------     ----------    -----------  ----------    ------------

Common Stock,      320,000        $4.375     $1,400,000         $483
$.01 par value



- -------------------------

*    Estimated  solely  for  the  purpose  of  calculating  the  amount  of  the
     registration fee, pursuant to Rules 457(c) and 457(h) of the Securities Act
     of 1933, on the basis of the average of the bid and asked prices for shares
     of Common Stock on August 6, 1996.

================================================================================
                                        2
<PAGE>
                                EXPLANATORY NOTE

         The  Amended and  Restated  1995 Stock  Option  Plan (the "1995  Plan")
authorizes  the grant of up to 320,000  shares of Common Stock  (adjusted  for a
two-for-one  stock split of the Company's Common Stock effected March 29, 1996).
The 1995  Stock  Bonus Plan (the  "Bonus  Plan")  authorizes  the grant of up to
320,000  shares of the Common Stock  (adjusted for a two-for-one  stock split of
the Company's Common Stock effected March 29, 1996),  less that number of shares
of Common Stock issued or issuable  pursuant to options  granted  under the 1995
Plan.  Accordingly,  the Bonus Plan and the 1995 Plan effectively share the same
pool of reserved Common Stock. The maximum number of shares of Common Stock that
may be issued under the 1995 Plan and the Bonus Plan is 320,000 shares.


                                     PART I

              INFORMATION REQUIRED IN THE SECTION 10(A) PROSPECTUS


         The documents  containing the information  specified in Part I, Items 1
and 2, will be delivered to employees in accordance with Form S-8 and Securities
Act Rule 428.
                                        3
<PAGE>
                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT



Item 3.       Incorporation of Certain Documents by Reference.
              ------------------------------------------------

              The following  documents are hereby incorporated by reference into
this Registration Statement: (a) the Registrant's Annual Report on Form 10-K for
the  fiscal  year ended  September  30,  1995;  (b) all  reports  filed with the
Securities  and Exchange  Commission  pursuant to Section  13(a) or 15(d) of the
Securities  Exchange Act of 1934  subsequent to September 30, 1995;  and (c) the
description  of the  Registrant's  capital stock  contained in the  Registrant's
Registration  Statement  on Form 8-A  filed  with the  Securities  and  Exchange
Commission pursuant to Section 12(g) of the Securities Exchange Act of 1934.

              All documents  subsequently  filed by the  Registrant  pursuant to
Sections 13(a), 13(c), 14 or 15(d) of the Securities Exchange Act of 1934, prior
to the filing of a post-effective amendment to this Registration Statement which
indicates that all securities  offered have been sold or which  deregisters  all
securities  then  remaining  unsold,  shall  be  deemed  to be  incorporated  by
reference in this  Registration  Statement and to be a part hereof from the date
of filing such documents.

Item 4.       Description of Securities.  Not applicable.
              --------------------------                  

Item 5.       Interests of Named Experts and Counsel.  Not applicable.
              ---------------------------------------                 

Item 6.       Indemnification of Directors and Officers.
              ------------------------------------------

              The right of the  shareholders  to sue any director for misconduct
in  conducting  the  affairs  of the  Company  is  limited  by Article 14 of the
Company's  Articles of  Incorporation  and Arizona  statutory law to actions for
damages resulting from a breach of a director's fiduciary duty of loyalty,  acts
or omissions  not in good faith or involving  intentional  misconduct or knowing
violations of the law, the unlawful payment of dividends or stock repurchases or
transactions in which a director receives an improper personal benefit. Ordinary
negligence is not a ground for such a suit.

              The  Company  also has the  right,  pursuant  to Article 11 of the
Company's Articles of Incorporation, to indemnify any present or former director
or officer of the Company for all expenses  incurred by them in connection  with
any legal action brought or threatened  against such person for or on account of
any action or omission alleged to have been committed while acting in the course
and scope of the  person's  duties,  if the person  acted in good faith and in a
manner which the person reasonably  believed to be in or not opposed to the best
interests  of  the  Company,  and  with  respect  to  criminal  actions,  had no
reasonable  cause to believe the person's  conduct was  unlawful,  provided that
such  indemnification  is made pursuant to then  existing  provisions of Arizona
statutory law at the time of any such indemnification. The statute does
                                        4
<PAGE>
not limit the liability of directors or officers for monetary  damages under the
Federal securities laws.

              Insofar  as  indemnification  for  liabilities  arising  under the
Securities  Act of 1933 may be  permitted  to  directors,  officers  or  persons
controlling  the Company  pursuant to the foregoing  provision,  the Company has
been informed that in the opinion of the Securities and Exchange Commission such
indemnification  is  against  public  policy  as  expressed  in such  Act and is
therefore unenforceable.

Item 7.       Exemption from Registration Claimed.  Not applicable.
              ------------------------------------                 

Item 8.       Exhibits.
              ---------

              Exhibit Index located at Page 8.

Item 9.       Undertakings.
              -------------

              (a)     The undersigned Registrant hereby undertakes:

                      (1) To file,  during any  period in which  offers or sales
are being made, a post-effective amendment to this registration statement:

                               (i) To include any prospectus required by Section
                      10(a)(3) of the Securities Act of 1933;

                               (ii) To  reflect in the  prospectus  any facts or
                      events   arising   after   the   effective   date  of  the
                      registration  statement (or the most recent post-effective
                      amendment   thereof)   which,   individually   or  in  the
                      aggregate,   represent   a   fundamental   change  in  the
                      information set forth in the registration statement;

                               (iii) To include any  material  information  with
                      respect  to  the  plan  of  distribution   not  previously
                      disclosed  in the  registration  statement or any material
                      change to such information in the registration statement;

provided, however, that paragraphs (i) and (ii) do not apply if the registration
statement is on Form S-3 or Form S-8 and the information required to be included
in a  post-effective  amendment  by those  paragraphs  is  contained in periodic
reports filed by the  Registrant  pursuant to Section 13 or Section 15(d) of the
Securities  Exchange  Act of 1934  that are  incorporated  by  reference  in the
registration statement.

                      (2) That,  for the purpose of  determining  any  liability
under the Securities Act of 1933,  each such  post-effective  amendment shall be
deemed to be a new  registration  statement  relating to the securities  offered
therein,  and the offering of such securities at that time shall be deemed to be
the initial bona fide offering thereof.

                      (3)  To   remove   from   registration   by   means  of  a
post-effective  amendment any of the securities  being  registered  which remain
unsold at the termination of the offering.
                                        5
<PAGE>
              (b)  The  undersigned   Registrant  hereby  undertakes  that,  for
purposes of determining  any liability  under the  Securities Act of 1933,  each
filing of the  Registrant's  annual report  pursuant to Section 13(a) or Section
15(d) of the Securities Exchange Act of 1934 (and, where applicable, each filing
of an employee  benefit  plan's annual  report  pursuant to Section 15(d) of the
Securities  Exchange  Act of 1934)  that is  incorporated  by  reference  in the
registration  statement  shall  be  deemed  to be a new  registration  statement
relating to the securities offered therein,  and the offering of such securities
at that time shall be deemed to be the initial bona fide offering thereof.

              (c) Insofar as indemnification  for liabilities  arising under the
Securities Act of 1933 may be permitted to directors,  officers and  controlling
persons of the Registrant  pursuant to the foregoing  provisions,  or otherwise,
the  Registrant  has been  advised  that in the  opinion of the  Securities  and
Exchange  Commission such  indemnification is against public policy as expressed
in the Act and is,  therefore,  unenforceable.  In the  event  that a claim  for
indemnification  against  such  liabilities  (other  than  the  payment  by  the
Registrant of expenses  incurred or paid by a director,  officer or  controlling
person of the  Registrant  in the  successful  defense  of any  action,  suit or
proceeding)  is  asserted by such  director,  officer or  controlling  person in
connection with the securities being registered,  the Registrant will, unless in
the opinion of its counsel the matter has been settled by controlling precedent,
submit to a court of  appropriate  jurisdiction  the  question  of whether  such
indemnification  by it is against public policy as expressed in the Act and will
be governed by the final adjudication of such issue.
                                        6
<PAGE>
                                   SIGNATURES

              Pursuant to the  requirements  of the  Securities Act of 1933, the
Registrant certifies that it has reasonable grounds to believe that it meets all
of the requirements for filing on Form S-8 and has duly caused this Registration
Statement  to be  signed  on its  behalf  by  the  undersigned,  thereunto  duly
authorized,   in  the   City  of   Tempe,   and  the   State  of   Arizona,   on
August 7, 1996.

                              AMTECH SYSTEMS, INC.
                              an Arizona corporation



                              By /s/ Jong S. Whang
                                 -----------------------------------------------
                                     Jong  S. Whang, President

                            SPECIAL POWER OF ATTORNEY

         KNOW ALL MEN BY THESE PRESENTS,  that the undersigned,  constitutes and
appoints Jong S. Whang and Robert T. Hass, and each of them, his true and lawful
attorney-in-fact  and agent with full power of substitution and  resubstitution,
for him and in his name, place and stead, in any and all capacities, to sign any
and all  amendments  (including  post-effective  amendments)  to this  Form  S-8
Registration Statement,  and to file the same with all exhibits thereto, and all
documents in connection therewith,  with the Securities and Exchange Commission,
granting such  attorneys-in-fact  and agents,  and each of them,  full power and
authority to do and perform each and every act and thing requisite and necessary
to be done in and about the  premises,  as fully and to all intents and purposes
as he might or could do in person, hereby ratifying and confirming all that such
attorneys-in-fact  and agents,  or each of them,  may lawfully do or cause to be
done by virtue hereof.

         Pursuant  to the  requirements  of the  Securities  Act of  1933,  this
Registration  Statement  has been signed below by the  following  persons in the
capacities and on the date indicated.


Signature                          Title                          Date
- ---------                          -----                          ----

/s/ Jong S. Whang       Chairman of the Board,                   August 7, 1996
- -----------------       President (Chief Executive Officer)
Jong S. Whang        


/s/ Robert T. Hass      Vice President-Finance                   August 7, 1996
- ------------------      (Chief Financial & Accounting  
Robert T. Hass          Officer) and Director          
                     

/s/ Donald F. Johnston  Director                                 August 7, 1996
- ----------------------  
Donald F. Johnston


/s/ Alvin Katz          Director                                 August 7, 1996
- -------------- 
Alvin Katz


/s/ Bruce R. Thaw       Director                                 August 7, 1996
- -----------------       
Bruce R. Thaw
                                        7
<PAGE>
                                  EXHIBIT INDEX
<TABLE>
<CAPTION>
    Exhibit                                                                                       Page or
    Number                                 Description                                        Method of Filing
    ------                                 -----------                                        ----------------
<S>                <C>                                                                       <C>
      4.1          Amended and Restated 1995 Stock Option Plan,                                      *
                   as amended

      4.2          Form of Incentive Stock Option Agreement                                          *

      4.3          Form of Non-Statutory Stock Option Agreement                                      *

      4.4          1995 Stock Bonus Plan                                                             *

       5           Form of opinion rendered by Squire, Sanders &                                     *
                   Dempsey, counsel for the Registrant (including
                   consent)

      23.1         Consent of Arthur Andersen LLP                                                    *

      23.2         Consent of Counsel                                                          See Exhibit 5

       24          Powers of Attorney                                                        See Signature Page
</TABLE>
- ------------------

*  Filed herewith.
                                        8

                                   EXHIBIT 4.1

                              AMTECH SYSTEMS, INC.

                              AMENDED AND RESTATED
                             1995 STOCK OPTION PLAN



         1. Purpose of the Plan.  The purposes of this Amended and Restated 1995
Stock Option Plan are to advance the  interests  of Amtech  Systems,  Inc.  (the
"Company") by inducing persons of outstanding  ability and potential to join and
remain with the Company,  by encouraging,  motivating and enabling  employees to
acquire  stock  ownership in the Company,  and by  providing  the  participating
employees  with an  additional  incentive  to promote the success of the Company
through the grant of options to purchase  shares of the Company's  Common Stock.
Options granted hereunder may be either "Incentive Stock Options," as defined in
Section 422 of the Internal  Revenue Code of 1986, as amended,  or "Nonstatutory
Stock  Options," at the discretion of the Board or a Committee  appointed by the
Board and as reflected  in the terms of the written  option  agreement  ("Option
Agreement").

         2. Definitions. As used herein, the following definitions shall apply:

                  (a) "Board"  shall mean the Board of  Directors of the Company
or the Committee, if one has been appointed.

                  (b) "Code"  shall mean the Internal  Revenue Code of 1986,  as
amended, and the rules and regulations promulgated thereunder.

                  (c) "Common  Stock" shall mean the common stock of the Company
described in the Company's Certificate of Incorporation, as amended.

                  (d)  "Company"  shall mean Amtech  Systems,  Inc.,  a Delaware
corporation,  and shall  include  any parent or  subsidiary  corporation  of the
Company as defined in Sections 424(e) and (f), respectively, of the Code.

                  (e)  "Committee"  shall mean the  Committee  appointed  by the
Board in  accordance  with  paragraph  (a) of  Section 4 of the Plan,  if one is
appointed.

                  (f) "Employee" shall mean any person,  including  officers and
directors,  employed  by the  Company.  The payment of a  director's  fee by the
Company shall not be sufficient to constitute "employment" by the Company.

                  (g) "Exchange  Act" shall mean the Securities and Exchange Act
of 1934, as amended.

                  (h) "Fair Market Value" shall mean, with respect to the date a
given Option is granted or exercised,  the value of the Common Stock  determined
by the Board or the
<PAGE>
Committee in such manner as it may deem  equitable for Plan purposes but, in the
case of an Incentive  Stock Option,  no less than is required by applicable laws
or regulations;  provided,  however, that where there is a public market for the
Common  Stock,  the Fair Market  Value per Share shall be the average of the bid
and asked prices of the Common Stock on the date of grant if the Common Stock is
then  included for quotation on the NASDAQ  SmallCap  Market or, the Fair Market
Value per Share  shall be the  closing  price of the Common  Stock if the Common
Stock is then included on the NASDAQ  National Market or listed on the New York,
American or Pacific Stock  Exchange.  The Board or a Committee  appointed by the
Board  may rely  upon  published  quotations  in The Wall  Street  Journal  or a
comparable  publication for purposes of the calculation of the Fair Market Value
per Share as set forth above.

                  (i)  "Incentive  Stock  Option"  shall mean an Option which is
intended to qualify as an incentive  stock option  within the meaning of Section
422 of the Code.

                  (j) "Option" shall mean a stock option granted under the Plan.

                  (k) "Optioned Stock" shall mean the Common Stock subject to an
Option.

                  (l)  "Optionee"  shall mean an Employee of the Company who has
been granted one or more Options.

                  (m) "Parent" shall mean a "parent corporation," whether now or
hereafter existing, as defined in Section 424(e) of the Code.

                  (n) "Plan" shall mean this Stock Option Plan.

                  (o)  "Share"  shall  mean a  share  of the  Common  Stock,  as
adjusted in accordance with Section 11 of the Plan.

                  (p)  "Subsidiary"  shall  mean  a  "subsidiary   corporation,"
whether now or hereafter existing, as defined in Section 424(f) of the Code.

                  (q) "Tax Date"  shall mean the date an Optionee is required to
pay the  Company  an amount  with  respect  to tax  withholding  obligations  in
connection with the exercise of an option.

         3.  Common  Stock  Subject to the Plan.  Subject to the  provisions  of
Section 11 of the Plan,  the  maximum  aggregate  number of shares  which may be
optioned and sold under the Plan is 320,000  Shares of Common Stock.  The Shares
may be authorized,  but unissued,  or previously issued Shares acquired or to be
acquired by the Company and held in treasury.

                  If an Option  should  expire or become  unexercisable  for any
reason without having been exercised in full, the unpurchased  Shares covered by
such Option shall, unless the Plan shall have been terminated,  be available for
future grants of Options.
                                        2
<PAGE>
         4.       Administration of the Plan.

                  (a)      Procedure.

                           (1) The Plan  shall be  administered  by the Board in
accordance  with  Securities and Exchange  Commission Rule 16b-3 ("Rule 16b-3");
provided, however, that the Board may appoint a Committee to administer the Plan
at any time or from time to time and, provided  further,  that if members of the
Board are not  "disinterested"  within the meaning of  Securities  and  Exchange
Commission Rule 16b-3,  then any  participation by directors in the Plan must be
administered by a Committee appointed by the Board.

                           (2) The  Committee  shall consist of at least two (2)
members  of the Board,  each of whom is  "disinterested"  within the  meaning of
Securities and Exchange  Commission  Rule 16b-3 to administer the Plan on behalf
of the Board,  subject to such terms and  conditions as the Board may prescribe.
Once appointed,  the Committee shall continue to serve until otherwise  directed
by the Board. From time to time the Board may increase the size of the Committee
and appoint additional members thereof,  remove members (with or without cause),
and appoint new members in substitution therefor, fill vacancies however caused,
or remove all members of the Committee and  thereafter  directly  administer the
Plan;  provided,  however,  that  at  no  time  may  any  director  who  is  not
"disinterested"  within the meaning of Securities and Exchange  Commission  Rule
16b-3 serve on the  Committee nor shall a Committee of less than two (2) members
administer the Plan.

                  (b) Powers of the  Board.  Subject  to the  provisions  of the
Plan, the Board or a Committee  appointed by the Board shall have the authority,
in its  discretion:  (i) to grant  Incentive  Stock Options,  in accordance with
Section 422 of the Code,  and to grant  "nonstatutory  stock  options;"  (ii) to
determine,  upon review of relevant information and in accordance with Section 2
of the Plan,  the Fair Market Value of the Common Stock;  (iii) to determine the
exercise price per Share of Options to be granted, which exercise price shall be
determined  in accordance  with Section 8(a) of the Plan;  (iv) to determine the
Employees to whom,  and the time or times at which  Options shall be granted and
the number of shares to be  represented  by each Option;  (v) to  interpret  the
Plan; (vi) to prescribe, amend and rescind rules and regulations relating to the
Plan;  (vii) to determine the terms and provisions of each Option granted (which
need not be identical) and, with the consent of the Optionee thereof,  modify or
amend  each  Option;  (viii) to  accelerate  or defer  (with the  consent of the
Optionee)  the  exercise  date of any Option;  (ix) to  authorize  any person to
execute on behalf of the Company any instrument required to effectuate the grant
of an Option  previously  granted by the Board or a Committee  appointed  by the
Board;  (x) to accept or reject the  election  made by an  Optionee  pursuant to
Section  18 of the  Plan;  and  (xi) to make  all  other  determinations  deemed
necessary or advisable for the administration of the Plan.

                  (c) Effect of Board's Decision. All decisions,  determinations
and interpretations of the Board or a Committee appointed by the Board, shall be
final and binding on all Optionees and any other holders of any Options  granted
under the Plan.
                                        3
<PAGE>
         5.       Eligibility.

                  (a)  Consistent  with  the  Plan's  purposes,  Options  may be
granted  only to  Employees  of the  Company  as  determined  by the  Board or a
Committee  appointed  by the Board.  An Employee  who has been granted an Option
may, if he is otherwise  eligible,  be granted an additional  Option or Options.
Incentive  Stock  Options may be granted  only to those  Employees  who meet the
requirements applicable under Section 422 of the Code.

                  (b) With respect to Incentive  Stock Options granted under the
Plan,  the  aggregate  fair market value  (determined  at the time the Incentive
Stock  Option is granted) of the Common  Stock with  respect to which  Incentive
Stock  Options are  exercisable  for the first time by the  employee  during any
calendar  year  (under all plans of the  Company  and its parent and  subsidiary
corporations) shall not exceed One Hundred Thousand Dollars ($100,000).

                  The Plan shall not  confer  upon any  Optionee  any right with
respect to continuation  of employment with the Company,  nor shall it interfere
in any way with his right or the Company's  right to terminate his employment at
any time.

         6. Effective  Date. The Plan shall take effect on October 20, 1995, the
date on which the Board  approved  the Plan.  No  Option  may be  granted  after
October  20,  2005 (ten years from the  effective  date of the Plan);  provided,
however,  that the Plan and all outstanding Options shall remain in effect until
such Options have expired or until such Options are canceled.  The Plan shall be
submitted for  shareholder  approval at the next meeting of  shareholders of the
Company;  provided,  however,  that  failure to obtain such  approval  shall not
affect the effectiveness of the Plan.

         7. Term of Option.  Unless otherwise  provided in the Option Agreement,
the term of each Incentive Stock Option shall be ten (10) years from the date of
grant thereof.  Unless otherwise  provided in the Option Agreement,  the term of
each Option  which is not an  Incentive  Stock Option shall be eleven (11) years
from the date of grant.  Notwithstanding  the above, in the case of an Incentive
Stock Option granted to an Employee who, at the time the Incentive  Stock Option
is granted, owns ten percent (10%) or more of the Common Stock as such amount is
calculated under Section 422(b)(6) of the Code ("Ten Percent Shareholder"),  the
term of the  Incentive  Stock  Option  shall be five (5) years  from the date of
grant thereof or such shorter time as may be provided in the Option Agreement.

         8.       Exercise Price and Payment.

                  (a)  Exercise  Price.  The per  Share  exercise  price for the
Shares to be issued pursuant to exercise of an Option shall be determined by the
Board or a Committee  appointed  by the Board,  but in the case of an  Incentive
Stock Option shall be no less than one hundred percent (100%) of the Fair Market
Value per Share on the date of grant; provided,  further, that in the case of an
Incentive  Stock Option  granted to an Employee who, at the time of the grant of
such  Incentive  Stock  Option,  is a Ten  Percent  Shareholder,  the per  Share
exercise  price shall be no less than one hundred ten percent (110%) of the Fair
Market Value per Share on the date of grant.  In no event may the exercise price
in the case of a nonstatutory stock option be less than eighty-five (85%) of the
Fair Market Value per share on the date of grant.
                                        4
<PAGE>
                       The  Company  will  pay  any  documentary   stamp  taxes,
handling or certificate  issuance fees  attributable to the initial  issuance of
shares of Common Stock upon the exercise of any Option under the Plan; provided,
however,  that the Company  shall not be required to pay any fees or taxes which
may be payable with respect to any transfer involved in the issuance or delivery
of any  certificates  for  shares in a name  other than that of the holder of an
Option.

                  (b) Payment.  The price of an  exercised  Option and any taxes
attributable to the delivery of Common Stock under the Plan, or portion thereof,
shall be paid:

                           (1) In  United  States  dollars  in cash or by check,
bank draft or money order payable to the order of the Company; or

                           (2) At the  discretion  of the  Board or a  Committee
appointed by the Board,  through the delivery of shares of Common Stock, with an
aggregate Fair Market Value, equal to the option price; or

                           (3) By a combination of (1) and (2) above.

                  The  Board  or  a  Committee  appointed  by  the  Board  shall
determine acceptable methods for tendering Common Stock as payment upon exercise
of an Option and may impose such limitations and conditions on the use of Common
Stock to  exercise  an Option as it deems  appropriate.  At the  election of the
Optionee  pursuant  to Section  18, the  Company  may  satisfy  its  withholding
obligations  by retaining  such number of shares of Common Stock  subject to the
exercised  Option which have an aggregate Fair Market value on the exercise date
equal  to  the  Company's  aggregate  federal,  state,  local  and  foreign  tax
withholding and FICA and FUTA  obligations  with respect to income  generated by
the exercise of the Option by Optionee.

         9.       Exercise of Option.

                  (a)  Procedure  for  Exercise;  Rights as a  Shareholder.  Any
Option  granted  hereunder  shall be  exercisable  at such  times and under such
conditions  as  determined  by the Board or a Committee  appointed by the Board,
including  performance criteria with respect to the Company and/or the Optionee,
and as shall be  permissible  under  the  terms of the  Plan.  Unless  otherwise
determined  by the Board or a  Committee  appointed  by the Board at the time of
grant,  an Option may be exercised  in whole or in part,  but in no case may any
option be exercised as to less than One Hundred (100) shares at any one time (or
the  remaining  shares  covered  by the  option if less than One  Hundred  (100)
shares)). An Option may not be exercised for a fraction of a Share.

                       An Option  shall be deemed to be  exercised  when written
notice of such exercise has been given to the Company at its principal office to
the attention of the  Secretary of the Company in  accordance  with the terms of
the Option by the person  entitled to exercise  the Option and full  payment for
the Shares with  respect to which the Option is exercised  has been  received by
the  Company.  Full  payment  may,  as  authorized  by the Board or a  Committee
appointed  by the  Board,  consist  of any  consideration  and method of payment
allowable  under  Section 8(b) of the Plan.  Until the issuance (as evidenced by
the appropriate entry on the books
                                        5
<PAGE>
of the Company or of a duly  authorized  transfer  agent of the  Company) of the
stock certificate  evidencing such Shares, no right to vote or receive dividends
or any other  rights as a  shareholder  shall exist with respect to the Optioned
Stock,  notwithstanding  the exercise of the Option.  No adjustment will be made
for a dividend or other right for which the record date is prior to the date the
stock certificate is issued, except as provided in Section 11 of the Plan.

                       Exercise  of an Option in any  manner  shall  result in a
decrease in the number of Shares which  thereafter  may be  available,  both for
purposes of the Plan and for sale under the Option by the number of Shares as to
which the Option is exercised.

                       Notwithstanding  anything  contained  in this Plan to the
contrary,  the Board or a Committee appointed by the Board may establish certain
restrictions  on the times at which an Option may be exercised after a number of
elapsed years together with  cumulative  exercise  rights and may retain certain
rights  with  respect to a fixed  repurchase  price for the Option  Stock if the
Employee voluntarily terminates his employment with the Company within a certain
period of time after  exercising the Option or whose employment is involuntarily
terminated  for gross  misconduct,  fraud,  embezzlement,  theft,  breach of any
fiduciary duty owed to the Company or for nonperformance of duties.

                  (b)      Termination of Status as an Employee.

                           (1)  Termination  of  Employment.   Unless  otherwise
provided in an Option  Agreement  relating to an Option that is not an Incentive
Stock Option, if an Employee's employment by the Company is terminated,  whether
voluntary or for cause,  except if such  termination  occurs due to  retirement,
death or disability, the Option, to the extent not exercised, shall cease on the
date on which Employee's  employment by the Company is terminated.  For purposes
of this Section 9, an employee who leaves the employ of the Company to become an
employee of a subsidiary or parent  corporation  of the Company or a corporation
which  has  assumed  the  option  of the  Company  as a  result  of a  corporate
reorganization, etc., shall not be considered to have terminated his employment.
For purposes of this Section 9, the  employment  relationship  of an employee or
the Company or of a  subsidiary  corporation  of the Company  will be treated as
continuing intact while he is on military or sick leave or other bona fide leave
of absence (such as temporary  employment by the  government) if such leave does
not exceed ninety (90) days, or, if longer, so long as his right to reemployment
is guaranteed either by statute or by contract.

                           (2)  Retirement.   For  purposes  of  the  Plan,  the
retirement of an  individual  either  pursuant to a pension or  retirement  plan
adopted by the Company or at the normal  retirement date prescribed from time to
time by the Company,  shall be deemed to be a termination  of such  individual's
employment  other than voluntary or for cause.  If an Employee's  termination is
due to retirement, then the Employee may, but only within ninety (90) days after
the date he ceases to be an Employee of the Company,  exercise his Option to the
extent that he was entitled to exercise it at the date of such  termination.  To
the extent that he was not  entitled to exercise  the Option at the date of such
termination,  or if he does not exercise  such Option  (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.
                                        6
<PAGE>
                           (3)  Disability.  Unless  otherwise  provided  in  an
Option  Agreement  relating to an Option that is not an Incentive  Stock Option,
notwithstanding  the provisions of Section 9(b) above,  in the event an Employee
is  unable  to  continue  his  employment  with the  Company  as a result of his
permanent and total  disability (as defined in Section 22(e)(3) of the Code), he
may,  but only within one (1) year from the date of  termination,  exercise  his
Option  to the  extent  he was  entitled  to  exercise  it at the  date  of such
termination.  To the extent that he was not  entitled to exercise  the Option at
the date of  termination,  or if he does not exercise  such Option (which he was
entitled  to  exercise)  within the time  specified  herein,  the  Option  shall
terminate.

                           (4) Death of Optionee.  Unless otherwise  provided in
an Option Agreement relating to an Option that is not an Incentive Stock Option,
if  Optionee  dies during the term of the Option and is at the time of his death
an  Employee  of the  Company  who shall  have been in  continuous  status as an
Employee  since the date of grant of the Option,  the Option may be exercised at
any time within one (1) year  following  the date of death (or such other period
of time as is determined by the Board or a Committee appointed by the Board), by
the  Optionee's  estate or by a person who  acquired  the right to exercise  the
Option by  bequest or  inheritance,  but only to the extent  that  Optionee  was
entitled  to  exercise  the  Option on the date of  death.  To the  extent  that
decedent was not entitled to exercise the Option on the date of death, or if the
Optionee's  estate,  or person who  acquired the right to exercise the Option by
bequest or inheritance,  does not exercise such Option (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.

        10.  Non-Transferability  of Option. An Option may not be sold, pledged,
assigned, hypothecated,  transferred, or disposed of in any manner other than by
will or by the laws of descent or distribution and may be exercised,  during the
lifetime of the Optionee, only by the Optionee.

         11.  Adjustments Upon Changes in Capitalization  or Merger.  Subject to
any required action by the shareholders of the Company,  the number of shares of
Common Stock  covered by each  outstanding  Option,  and the number of shares of
Common Stock which have been  authorized  for issuance  under the Plan but as to
which no Options have yet been  granted or which have been  returned to the Plan
upon cancellations or expiration of an Option, as well as the price per share of
Common Stock covered by each such outstanding  Option,  shall be proportionately
adjusted for any  increase or decrease in the number of issued  shares of Common
Stock  resulting  from a stock  split,  reverse  stock  split,  stock  dividend,
combination or  reclassification  of the common stock,  or any other increase or
decrease in the number of issued shares of Common Stock effected without receipt
of  consideration  by the Company;  provided,  however,  that  conversion of any
convertible securities of the Company shall not be deemed to have been "effected
without receipt of consideration." Such adjustment shall be made by the Board or
a Committee appointed by the Board, whose determination in that respect shall be
final, binding and conclusive.  Except as expressly provided herein, no issuance
by the Company of shares of stock of any class, or securities  convertible  into
shares of stock of any class shall affect,  and no adjustment by reason thereof,
shall be made with  respect  to the  number  or price of shares of Common  Stock
subject to an Option.
                                        7
<PAGE>
                  In the event of the proposed dissolution or liquidation of the
Company, the Option will terminate immediately prior to the consummation of such
proposed action, unless otherwise provided by the Board or a Committee appointed
by the  Board.  The Board or a  Committee  appointed  by the Board  may,  in the
exercise of its sole discretion in such instances, declare that any Option shall
terminate as of a date fixed by the Board or a Committee  appointed by the Board
and give each Optionee the right to exercise his Option as to all or any part of
the Optioned Stock,  including Shares as to which the Option would not otherwise
be exercisable.  In the event of a proposed sale of all or substantially  all of
the assets of the  Company,  or the merger of the Company  with or into  another
corporation,  the  Option  shall be  assumed or an  equivalent  option  shall be
substituted  by such  successor  corporation  or a parent or  subsidiary of such
successor  corporation,  unless the Board or a Committee  appointed by the Board
determines,  in the  exercise  of  its  sole  discretion  and in  lieu  of  such
assumption or  substitution,  that the Optionee shall have the right to exercise
the Option as to all of the  Optioned  Stock,  including  Shares as to which the
Option would not otherwise be exercisable. If the Board or a Committee appointed
by the  Board  makes  an  Option  fully  exercisable  in lieu of  assumption  or
substitution  in the  event  of a  merger  or sale of  assets,  the  Board  or a
Committee appointed by the Board shall notify the Optionee that the Option shall
be fully  exercisable  for a period  of  thirty  (30) days from the date of such
notice (but not later than the  expiration  of the term of the Option  under the
Option  Agreement),  and the Option will  terminate  upon the expiration of such
period.

         12. Time of Granting Options. The date of grant of an Option shall, for
all  purposes,  be the date on which the Board or a Committee  appointed  by the
Board makes the determination  granting such Option. Notice of the determination
shall  be  given to each  Employee  to whom an  Option  is so  granted  within a
reasonable time after the date of such grant.

         13.      Amendment and Termination of the Plan.

                  (a)  Amendment  and  Termination.   The  Board  may  amend  or
terminate  the Plan  from  time to time in such  respect  as the  Board may deem
advisable;  provided,  however, that the following revisions or amendments shall
require  approval of the holders of a majority of the outstanding  Shares of the
Company entitled to vote:

                           (1) Any  increase in the number of Shares  subject to
the Plan,  other than in connection  with an adjustment  under Section 11 of the
Plan;

                           (2) Any  change  in the  designation  of the class of
employees eligible to be granted Options; or

                           (3) If the  Company  has a class of  equity  security
registered  under Section 12 of the Exchange Act at the time of such revision or
amendment,  any material increase in the benefits accruing to participants under
the Plan.

                  (b) Effect of Amendment or Termination.  Any such amendment or
termination  of the Plan  shall not  affect  Options  already  granted  and such
Options  shall  remain  in full  force  and  effect as if this Plan had not been
amended or terminated, unless mutually agreed otherwise between the Optionee and
the Board, which agreement must be in writing and signed by the Optionee and the
Company.
                                        8
<PAGE>
         14.  Conditions  Upon  Issuance of Shares.  Shares  shall not be issued
pursuant to the  exercise of an Optionee  unless the exercise of such Option and
the issuance and delivery of such Shares pursuant  thereto shall comply with all
relevant provisions of law, including, without limitation, the Securities Act of
1933,  as amended,  the  Exchange  Act,  the rules and  regulations  promulgated
thereunder, and the requirements of any stock exchange upon which the Shares may
then be listed,  and shall be further subject to the approval of counsel for the
Company with respect to such compliance.

                  As a condition to the  exercise of an Option,  the Company may
require the person  exercising  such Option to represent and warrant at the time
of any such exercise that the Shares are being purchased only for investment and
without  any  present  intention  to sell or  distribute  such Shares if, in the
opinion of counsel for the Company,  such a representation is required by any of
the aforementioned relevant provisions of law.

                  In the case of an  Incentive  Stock  Option,  any Optionee who
disposes of Shares of Common Stock acquired on the exercise of an Option by sale
or exchange  (a) either  within two (2) years after the date of the grant of the
Option  under  which the Common  Stock was  acquired  or (b) within one (1) year
after the acquisition of such Shares of Common Stock shall notify the Company of
such disposition and of the amount realized upon such disposition.

                  Stock  certificates  evidencing  unregistered  shares acquired
upon  the  exercise  of  Options  shall  bear a  restrictive  securities  legend
substantially as follows:

                  "THE  SHARES  REPRESENTED  BY THIS  CERTIFICATE  HAVE NOT BEEN
                  REGISTERED  UNDER THE SECURITIES  ACT OF 1933, AS AMENDED,  OR
                  UNDER THE SECURITIES LAWS OF ANY STATE OR OTHER  JURISDICTION.
                  THE  SECURITIES  MAY NOT BE SOLD OR  OFFERED  FOR  SALE IN THE
                  ABSENCE  OF  AN  EFFECTIVE   REGISTRATION  STATEMENT  FOR  THE
                  SECURITIES  UNDER THE SECURITIES ACT OF 1933, AS AMENDED,  AND
                  APPLICABLE SECURITIES LAWS OF ANY STATE OR OTHER JURISDICTION,
                  OR AN OPINION OF COUNSEL SATISFACTORY TO THE COMPANY THAT SUCH
                  REGISTRATION IS NOT REQUIRED."

         15.  Change in Control.  Each Option that is  outstanding  on a Control
Change Date, as hereinafter defined, shall be exercisable in whole or in part on
that date and thereafter during the remainder of the Option period stated in the
Option Agreement. A "Change in Control" occurs if, after the date of the initial
Agreement, (1) any person, including a "group" as defined in Section 13(d)(3) of
the  Exchange  Act,  becomes  the  owner or  beneficial  owner of the  Company's
securities  having  20% or  more  of  the  combined  voting  power  of the  then
outstanding  Company's  securities  that  may be cast  for the  election  of the
Company's  directors  (other  than as a  result  of an  issuance  of  securities
initiated  by the  Company,  or open market  purchases  approved by the Board of
Directors  as long  as a  majority  of the  Board  of  Directors  approving  the
purchases is in the majority at the time the purchases are made);  or (2) as the
direct or indirect  result of, or in connection  with, a cash tender or exchange
offer, a merger or other
                                        9
<PAGE>
business combination, a sale of assets, a contested election, or any combination
of these transactions, the persons who were directors of the Company before such
transactions ceased to constitute a majority of the Company's Board of Directors
or any successor's board, within two years of the last of such transactions. For
purposes of this  Section,  the  "Control  Change  Date" is the date on which an
event  described in (1) or (2) occurs.  If a Change of Control occurs on account
of a series of transactions,  the Control Change Date is the date of the last of
such transactions.

         16.  Reservation of Shares;  Issuance and Sale of Shares.  The Company,
during the term of this Plan,  will at all times reserve and keep available such
number of Shares as shall be sufficient to satisfy the requirements of the Plan.
Inability of the Company to obtain  authority  from any  regulatory  body having
jurisdiction, which authority is deemed by the Company's counsel to be necessary
to the lawful  issuance  and sale of any Shares  hereunder,  shall  relieve  the
Company of any  liability in respect of the failure to issue or sell such Shares
as to which such requisite authority shall not have been obtained.

         17.  Option  Agreement.  Options  shall be evidenced by written  option
agreements in such form as the Board shall approve.

         18. Withholding Taxes. Subject to Section 4(b)(x) of the Plan and prior
to the Tax Date,  the  Optionee  may make an  irrevocable  election  to have the
Company  withhold  from those Shares that would  otherwise be received  upon the
exercise of any  nonstatutory  stock  option,  a number of Shares  having a Fair
Market  Value equal to the minimum  amount  necessary  to satisfy the  Company's
federal,  state, local and foreign tax withholding obligations and FICA and FUTA
obligations with respect to the exercise of such Option by the Optionee.

                  An Optionee  who is also an officer of the  Company  must make
the above-described election:

                  (a) at least six months  after the date of grant of the Option
(except in the event of death or disability); and

                  (b) either:

                           (1) six months prior to the Tax Date, or

                           (2)  prior  to the Tax  Date and  during  the  period
beginning on the third  business day following the date of the Company  releases
its  quarterly  or annual  statement  of sales and  earnings  and  ending on the
twelfth business day following such date.

         19. Miscellaneous Provisions.

                  (a) Not a Contract of  Employment.  Nothing  contained  in the
Plan or in any Option Agreement executed pursuant to the Plan shall be deemed to
confer upon any individual to whom an Option may be granted  hereunder any right
to remain in the  employ or service  of the  Company  or a parent or  subsidiary
corporation of the Company.
                                       10
<PAGE>
                  (b) Plan  Expenses.  Any expenses of  administering  this Plan
shall be borne by the Company.

                  (c)  Use of  Exercise  Proceeds.  The  payment  received  from
Optionees  from the exercise of Options shall be used for the general  corporate
purposes of the Company.

                  (d) Construction of Plan. The place of  administration  of the
Plan  shall  be in  the  State  of  Arizona,  and  the  validity,  construction,
interpretation,  administration  and  effect  of the Plan and of its  rules  and
regulations,  and rights relating to the Plan, shall be determined in accordance
with the laws of the State of Arizona and where  applicable,  in accordance with
the Code.

                  (e) Taxes.  The  Company  shall be entitled  if  necessary  or
desirable to pay or withhold the amount of any tax  attributable to the delivery
of Common Stock under the Plan from other amounts  payable to the Employee after
giving the person entitled to receive such Common Stock notice as far in advance
as practical,  and the Company may defer making delivery of such Common Stock if
any such tax may be pending unless and until indemnified to its satisfaction.

                  (f)  Indemnification.  In  addition  to such  other  rights of
indemnification  as they  may  have  as  members  of the  Board  or a  Committee
appointed  by the  Board,  the  members  of the  Board or a  Committee  shall be
indemnified by the Company against all costs and expenses reasonably incurred by
them in connection  with any action,  suit or proceeding to which they or any of
them may be a party by reason of any action  taken or failure to act under or in
connection with the Plan or any Option,  and against all amounts paid by them in
settlement  thereof  (provided such settlement is approved by independent  legal
counsel  selected by the Company) or paid by them in  satisfaction of a judgment
in any such action,  suit or proceeding,  except a judgment based upon a finding
of bad faith;  provided that upon the  institution  of any such action,  suit or
proceeding a Board or Committee member shall, in writing give the Company notice
thereof and an  opportunity,  at its own expense,  to handle and defend the same
before such Board or Committee member  undertakes to handle and defend it on her
or his own behalf.

                  (g)  Gender.  For  purposes  of this  Plan,  words used in the
masculine  gender shall include the feminine and neuter,  and the singular shall
include the plural and vice versa, as appropriate.
                                       11

                                   EXHIBIT 4.2

                        INCENTIVE STOCK OPTION AGREEMENT


         BY THIS INCENTIVE STOCK OPTION AGREEMENT ("Agreement") made and entered
into this _____ day of  _______________,  19__ ("Grant  Date"),  AMTECH  SYTEMS,
INC., an Arizona corporation (the "Company), and ___________________________, an
employee of the Company  (the  "Optionee")  hereby  state,  confirm,  represent,
warrant and agree as follows:

                                        I

                                    RECITALS
                                    --------

         1.1 The Company,  through its Board of  Directors  (the  "Board"),  has
determined to advance the interests of Amtech  Systems,  Inc. (the "Company") by
inducing  persons of  outstanding  ability and potential to join and remain with
the Company, by encouraging,  motivating and enabling employees to acquire stock
ownership in the Company,  and by providing the participating  employees with an
additional  incentive to promote the success of the Company through the grant of
options to purchase shares of the Company's Common Stock.

         1.2 The Company adopted the Amended and Restated 1995 Stock Option Plan
(the "Plan") on October 20, 1995.

         1.3 By this Agreement, the Company and the Optionee desire to establish
the terms upon which the Company is willing to grant to the  Optionee,  and upon
which the Optionee is willing to accept from the Company,  an option to purchase
shares of common stock of the Company ("Common Stock").

                                       II

                                   AGREEMENTS
                                   ----------

         2.1  Grant  of  Incentive  Stock  Option.  Subject  to  the  terms  and
conditions  hereinafter  set  forth  and  those  provisions  set forth and those
contained in the Plan,  the Company  grants to the Optionee the right and option
(the  "Option")  to purchase  from the  Company all or any part of an  aggregate
number  of  _______________  (______)  shares of Common  Stock,  authorized  but
unissued or, at the option of the  Company,  treasury  stock if  available  (the
"Optioned Shares").

         2.2  Exercise of Option.  Subject to the terms and  conditions  of this
Agreement and those of the Plan,  the Option may be exercised only by completing
and signing a written notice in substantially the following form:

                  I hereby  exercise the Option granted to me by AMTECH SYSTEMS,
                  INC.  and  elect to  purchase  _____  shares of $.01 par value
                  Common Stock
<PAGE>
                  of  AMTECH  SYSTEMS,   INC.  for  the  purchase  price  to  be
                  determined  under Paragraph 2.3 of this Incentive Stock Option
                  Agreement.

         2.3 Purchase  Price.  The price to be paid for the Optioned Shares (the
"Purchase Price") shall be $_______ per share,  which was not less than the Fair
Market  Value of the  Optioned  Shares as  determined  by the Board on the Grant
Date, or, in the case of an Option granted to an employee who, on the Grant Date
owns ten percent (10%) or more of the Common Stock, as such amount is calculated
under Section  422A(b)(6) of the Internal  Revenue Code of 1986, as amended (the
"Code")  not less than one  hundred  and ten  percent  (110%) of the Fair Market
Value of the Optioned Shares.

         2.4 Payment of Purchase  Price.  Payment of the  Purchase  Price may be
made as follows:

                  (a) In United States  dollars in cash or by check,  bank draft
         or money order payable to the Company; or

                  (b) At the  discretion  of the Board,  through the delivery of
         shares of Common Stock with an aggregate  fair market value at the date
         of such delivery, equal to the Purchase Price; or

                  (c) By a combination of both (a) and (b) above.

The Board or a  Committee  appointed  by the Board  shall  determine  acceptable
methods for tendering Common Stock as payment upon exercise of an Option and may
impose such limitations and conditions on the use of Common Stock to exercise an
Option as it deems  appropriate.  At the  election of the  Optionee  pursuant to
Section 18 of the Plan,  and subject to the  acceptance  of such election by the
Board  or  a  Committee  appointed  by  the  Board,  to  satisfy  the  Company's
withholding  obligations,  it may retain such  number of shares of Common  Stock
subject to the  exercised  Option which have an aggregate  Fair Market Value (as
defined in the Plan) on the date of exercise  equal to the  Company's  aggregate
federal,  state, local and foreign tax withholding and FICA and FUTA obligations
with respect to the exercise of the Option by the Optionee.

         2.5  Exercisability  of Option.  Subject to the provisions of Paragraph
2.6,  and except as  otherwise  provided  in  Paragraph  2.8,  the Option may be
exercised by the Optionee while in the employ of Company which shall include any
parent  ("Parent") or subsidiary  ("Subsidiary")  corporation  of the Company as
defined in Sections  424(e) and (f),  respectively,  of the Code, in whole or in
part from time to time  prior to  expiration,  but only in  accordance  with the
following schedule:
                                        2
<PAGE>
                                               Cumulative Percentage of
      Elapsed Number of Years               Shares Subject To Options As To
         After Grant Date                    Which Option May be Exercised
      -----------------------                -----------------------------








In no case may any Option be exercised as to less than One Hundred  (100) shares
at any one time, or the remaining  shares covered by the Option if less than One
Hundred (100) shares. An Option may not be exercised for a fraction of a share.

         2.6 Termination of Option.  Except as otherwise  provided  herein,  the
Option, to the extent not heretofore  exercised,  shall terminate upon the first
to occur of the following dates:

                  (a) The date on which the Optionee's employment by the Company
         is  terminated,   whether  voluntary  or  for  cause,  except  if  such
         termination  is due to  retirement,  death  or  disability  within  the
         meaning of Section 22(e)(3) of the Code;

                  (b) Ninety (90) days after termination due to retirement;

                  (c) One (1) year after  termination  due to disability  within
         the meaning of Section 22(e)(3) of the Code; or

                  (d) One (1) year  after the  Optionee's  death (or such  other
         period of time as determined by the Board).

         2.7 Adjustments.  In the event of any stock split, reverse stock split,
stock divided,  combination or reclassification of shares of Common Stock or any
other  increase  or  decrease  in the  number of issued  shares of Common  Stock
effected without receipt of consideration by the Company, the number and kind of
Optioned  Shares   (including  any  Option   outstanding  after  termination  of
employment or death) and the Purchase  Price per share shall be  proportionately
and appropriately adjusted without any change in the aggregate Purchase Price to
be paid therefor upon exercise of the Option.  The determination by the Board as
to the  terms  of any of the  foregoing  adjustments  shall  be  conclusive  and
binding.

         2.8 Liquidation,  Sale of Assets or Merger.  In the event of a proposed
dissolution or liquidation of the Company, the Option will terminate immediately
prior to the consummation of such proposed action,  unless otherwise provided by
the Board.  In the event of a proposed sale of all or  substantially  all of the
assets  of the  Company,  or the  merger  of the  Company  with or into  another
corporation,  the  option  shall be  assumed or an  equivalent  option  shall be
substituted by such successor corporation,  unless the Board determines that the
Optionee  shall  have the right to  exercise  the Option as to all of the Common
Stock subject to the Option,  including  shares as to which the Option would not
otherwise be exercisable. If the Board makes
                                        3
<PAGE>
an Option fully exercisable, the Board shall notify the Optionee that the Option
shall be fully  exercisable  for a period of  thirty  (30) days from the date of
such  notice  (but not  later  than the  expiration  of the  Option  term  under
Paragraph 2.6, above), and the Option will terminate upon the expiration of such
period.

         2.9 Change in Control. In the event of a Change in Control, each Option
that is outstanding  on a Control Change Date, as defined in the Plan,  shall be
exercisable in whole or in part on that date and thereafter during the remainder
of the Option  period  stated in the  Option  Agreement.  A "Change in  Control"
occurs if, after the date of the initial Agreement,  (1) any person, including a
"group" as defined in Section 13(d)(3) of the Exchange Act, becomes the owner or
beneficial owner of the Company's  securities having 20% or more of the combined
voting power of the then outstanding  Company's  securities that may be cast for
the election of the Company's  directors  (other than as a result of an issuance
of securities initiated by the Company, or open market purchases approved by the
Board of Directors as long as a majority of the Board of Directors approving the
purchases is in the majority at the time the purchases are made);  or (2) as the
direct or indirect  result of, or in connection  with, a cash tender or exchange
offer, a merger or other  business  combination,  a sale of assets,  a contested
election,  or any  combination  of  these  transactions,  the  persons  who were
directors  of the  Company  before  such  transactions  ceased to  constitute  a
majority of the Company's  Board of Directors or any successor's  board,  within
two years of the last of such  transactions.  For purposes of this Section,  the
"Control  Change  Date" is the date on  which an event  described  in (1) or (2)
occurs.  If a Change of Control  occurs on account of a series of  transactions,
the Control Change Date is the date of the last of such transactions.

         2.10  Notices.  Any notice to be given under the terms of the Agreement
("Notice")  shall be  addressed  to the Company in care of its  Secretary at 131
South Clark  Drive,  Tempe,  Arizona  85281,  or at its then  current  corporate
headquarters.  Notice to be given to the  Optionee  shall be addressed to him or
her at his or her then current  residential  address as appearing on the payroll
records.  Notice shall be deemed duly given when  enclosed in a properly  sealed
envelope and deposited by certified mail,  return receipt  requested,  in a post
office  or  branch  post  office  regularly  maintained  by  the  United  States
Government.

         2.11  Notification  of  Disposition  of  Shares.  The  Optionee  hereby
acknowledges  that a  disposition  of shares of Common Stock  acquired  upon the
exercise  of the  Option  within two (2) years from the Grant Date or within one
(1) year after the  transfer of such shares of Common  Stock to him or her would
result in  detrimental  income tax  consequences  to the Optionee.  The Optionee
hereby  agrees to promptly  notify the Company of any  disposition  of shares of
Common Stock within either of the above time limitations.

         2.12 Modification of Agreement. With the consent of Optionee, the Board
may at any time and from time to time direct that the  Agreement  be modified in
such  respects  deemed  advisable in order that the Option shall  constitute  an
incentive stock option pursuant to Section 422A of the Code.

         2.13 Transferability of Option. The Option shall not be transferable by
the Optionee otherwise than by the will or the laws of descent and distribution,
and may be exercised during the life of the Optionee only by the Optionee.
                                        4
<PAGE>
         2.14 Optionee Not A  Shareholder.  The Optionee shall not be deemed for
any  purposes  to be a  shareholder  of the Company  with  respect to any of the
Optioned  Shares except to the extent that the Option herein  granted shall have
been exercised with respect thereto and a stock certificate issued therefor.

         2.15 Not a Contract of Employment.  Nothing contained in the Plan or in
any Option  Agreement  executed  pursuant  to the Plan shall be deemed to confer
upon any  individual  to whom an Option  may be granted  hereunder  any right to
remain in the  employ  or  service  of the  Company  or a parent  or  subsidiary
corporation of the Company.

         2.16 Disputes or  Disagreements.  As a condition of the granting of the
Option  herein  granted,  the  Optionee  agrees,  for himself  and his  personal
representatives, that any disputes or disagreement which may arise under or as a
result of or pursuant to this Agreement  shall be determined by the Board in its
sole discretion,  and that any  interpretation by the Board of the terms of this
Agreement shall be final, binding and conclusive.

         2.17  Shareholder  Approval.  If  the  Plan  is  not  approved  by  the
stockholders  of the  Company  within  one  year of its  date of  adoption,  the
Optionee  acknowledges that the Option granted hereunder shall,  without further
action on behalf of the Company, become a nonstatutory option under the Plan.

         IN WITNESS  WHEREOF,  the  Company  has caused  this  instrument  to be
executed by its duly authorized  officer,  and the Optionee has hereunto affixed
his or her signature.

                                       AMTECH SYSTEMS, INC.,
                                       an Arizona corporation



                                       By ______________________________________

                                             Its _______________________________

                                                                       "COMPANY"




                                       _________________________________________
                                                                      "OPTIONEE"
                                        5


                                   EXHIBIT 4.3

                      NON-STATUTORY STOCK OPTION AGREEMENT


         BY THIS STOCK OPTION AGREEMENT ("Agreement") made and entered into this
_____ day of  ________________,  19___ ("Grant Date"),  AMTECH SYSTEMS,  INC., a
Delaware corporation (the "Company"),  and ____________________,  a key employee
of the Company (the "Optionee") hereby state,  confirm,  represent,  warrant and
agree as follows:

                                        I

                                    RECITALS

         1.1 The Company,  through its Board of  Directors  (the  "Board"),  has
determined that in order to attract and retain the best available  personnel for
positions of substantial  responsibility to provide successful management of the
Company's  business,  it must offer a  compensation  package  that  provides key
employees of the Company a chance to  participate  financially in the success of
the Company by developing an equity interest in it.

         1.2 The Company adopted the Amended and Restated 1995 Stock Option Plan
(the "Plan") on October 20, 1995.

         1.3 By this Agreement, the Company and the Optionee desire to establish
the terms upon which the Company is willing to grant to the  Optionee,  and upon
which the Optionee is willing to accept from the Company,  an option to purchase
shares of common stock of the Company ("Common Stock").

                                       II

                                   AGREEMENTS

         2.1  Grant of  Non-Statutory  Stock  Option.  Subject  to the terms and
conditions  hereinafter  set  forth  and  those  provisions  set forth and those
contained in the Plan,  the Company  grants to the Optionee the right and option
(the  "Option")  to purchase  from the  Company all or any part of an  aggregate
number of __________  (_______) shares of Common Stock,  authorized but unissued
or, at the option of the Company,  treasury  stock if available  (the  "Optioned
Shares").

         2.2  Exercise of Option.  Subject to the terms and  conditions  of this
Agreement and those of the Plan,  the Option may be exercised only by completing
and signing a written notice in substantially the following form:

         I hereby exercise the Option granted to me by AMTECH SYSTEMS,  INC. and
         elect to purchase _______________ shares of $.01 par value Common Stock
         of AMTECH SYSTEMS,  INC. for the purchase price to be determined  under
         Paragraph 2.3 of this Stock Option Agreement.
<PAGE>
         2.3 Purchase  Price.  The price to be paid for the Optioned Shares (the
"Purchase Price") shall be $__________ per share.

         2.4 Payment of Purchase  Price.  Payment of the  Purchase  Price may be
made as follows:

                  (a) In United States  dollars in cash or by check,  bank draft
         or money order payable to the Company; or

                  (b) At the  discretion  of the Board,  through the delivery of
         shares of Common Stock with an aggregate  fair market value at the date
         of such delivery, equal to the Purchase Price; or

                  (c) By a combination of both (a) and (b) above.

The Board shall  determine  acceptable  methods for  tendering  Common  Stock as
payment  upon  exercise  of an  Option  and  may  impose  such  limitations  and
conditions  on the use of  Common  Stock  to  exercise  an  Option  as it  deems
appropriate. At the election of the Optionee pursuant to Section 17 of the Plan,
and subject to the  acceptance  of such  election  by the Board,  to satisfy the
Company's withholding obligations, it may retain such number of shares of Common
Stock subject to the exercised  Option which have an aggregate Fair Market Value
(as  defined  in the  Plan)  on the  date of  exercise  equal  to the  Company's
aggregate  federal,  state,  local and foreign tax withholding and FICA and FUTA
obligations with respect to the exercise of the Option by the Optionee.

         2.5  Exercisability  of Option.  Subject to the provisions of Paragraph
2.6,  and except as  otherwise  provided  in  Paragraph  2.8,  the Option may be
exercised by the Optionee while in the employ of Company which shall include any
parent  ("Parent") or subsidiary  ("Subsidiary")  corporation  of the Company as
defined in Sections 424(e) and (f),  respectively,  of the Internal Revenue Code
of 1986, as amended ("Code"), in whole or in part from time to time, but only in
accordance with the following schedule:

                                                    Cumulative Percentage of
Elapsed Number of Years                          Shares Subject To Options As To
   After Grant Date                               Which Option May be Exercised
- ----------------------                           -------------------------------







In no case may any Option be exercised as to less than One Hundred  (100) shares
at any one time, or the remaining  shares covered by the Option if less than One
Hundred (100) shares.  An Option may not be exercised for a fraction of a share.
For purposes of the foregoing schedule,
                                        2
<PAGE>
a year is measured from the grant date to the  anniversary of the grant date and
between anniversary dates thereof.

         2.6 Termination of Option.  Except as otherwise  provided  herein,  the
Option, to the extent not heretofore  exercised,  shall terminate upon the first
to occur of the following dates:

                  (a) The date on which the Optionee's employment by the Company
         is  terminated,   whether  voluntary  or  for  cause,  except  if  such
         termination  is due to  retirement,  death  or  disability  within  the
         meaning of Section 22(e)(3) of the Code;

                  (b) Ninety (90) days after termination due to retirement;

                  (c) One (1) year after  termination  due to disability  within
         the meaning of Section 22(e)(3) of the Code; or

                  (d) One (1) year  after the  Optionee's  death (or such  other
         period of time as determined by the Board).

         2.7 Adjustments.  In the event of any stock split, reverse stock split,
stock divided,  combination or reclassification of shares of Common Stock or any
other  increase  or  decrease  in the  number of issued  shares of Common  Stock
effected without receipt of consideration by the Company, the number and kind of
Optioned  Shares   (including  any  Option   outstanding  after  termination  of
employment or death) and the Purchase  Price per share shall be  proportionately
and appropriately adjusted without any change in the aggregate Purchase Price to
be paid therefor upon exercise of the Option.  The determination by the Board as
to the  terms  of any of the  foregoing  adjustments  shall  be  conclusive  and
binding.

         2.8 Liquidation,  Sale of Assets or Merger.  In the event of a proposed
dissolution or liquidation of the Company, the Option will terminate immediately
prior to the consummation of such proposed action,  unless otherwise provided by
the Board.  In the event of a proposed sale of all or  substantially  all of the
assets  of the  Company,  or the  merger  of the  Company  with or into  another
corporation,  the  option  shall be  assumed or an  equivalent  option  shall be
substituted by such successor corporation,  unless the Board determines that the
Optionee  shall  have the right to  exercise  the Option as to all of the Common
Stock subject to the Option,  including  shares as to which the Option would not
otherwise be exercisable.  If the Board makes an Option fully  exercisable,  the
Board shall notify the Optionee that the Option shall be fully exercisable for a
period of thirty  (30) days from the date of such notice (but not later than the
expiration of the Option term under Paragraph 2.6,  above),  and the Option will
terminate upon the expiration of such period.

         2.9 Change in Control. In the event of a Change in Control, each Option
that is outstanding  on a Control Change Date, as defined in the Plan,  shall be
exercisable in whole or in part on that date and thereafter during the remainder
of the Option  period  stated in the  Option  Agreement.  A "Change in  Control"
occurs if, after the date of the initial Agreement,  (1) any person, including a
"group" as defined in Section 13(d)(3) of the Exchange Act, becomes the owner or
beneficial owner of the Company's  securities having 20% or more of the combined
voting power of the then outstanding  Company's  securities that may be cast for
the election of
                                        3
<PAGE>
the  Company's  directors  (other than as a result of an issuance of  securities
initiated  by the  Company,  or open market  purchases  approved by the Board of
Directors  as long  as a  majority  of the  Board  of  Directors  approving  the
purchases is in the majority at the time the purchases are made);  or (2) as the
direct or indirect  result of, or in connection  with, a cash tender or exchange
offer, a merger or other  business  combination,  a sale of assets,  a contested
election,  or any  combination  of  these  transactions,  the  persons  who were
directors  of the  Company  before  such  transactions  ceased to  constitute  a
majority of the Company's  Board of Directors or any successor's  board,  within
two years of the last of such  transactions.  For purposes of this Section,  the
"Control  Change  Date" is the date on  which an event  described  in (1) or (2)
occurs.  If a Change of Control  occurs on account of a series of  transactions,
the Control Change Date is the date of the last of such transactions.

         2.10  Notices.  Any notice to be given under the terms of the Agreement
("Notice")  shall be  addressed  to the Company in care of its  Secretary at 131
South Clark  Drive,  Tempe,  Arizona  85281,  or at its then  current  corporate
headquarters.  Notice to be given to the  Optionee  shall be addressed to him or
her at his or her then current  residential  address as appearing on the payroll
records.  Notice shall be deemed duly given when  enclosed in a properly  sealed
envelope and deposited by certified mail,  return receipt  requested,  in a post
office  or  branch  post  office  regularly  maintained  by  the  United  States
Government.

         2.11 Transferability of Option. The Option shall not be transferable by
the Optionee otherwise than by the will or the laws of descent and distribution,
and may be exercised during the life of the Optionee only by the Optionee.

         2.12 Optionee Not A  Shareholder.  The Optionee shall not be deemed for
any  purposes  to be a  shareholder  of the Company  with  respect to any of the
Optioned  Shares except to the extent that the Option herein  granted shall have
been exercised with respect thereto and a stock certificate issued therefor.

         2.13 Not a Contract of Employment.  Nothing contained in the Plan or in
any Option  Agreement  executed  pursuant  to the Plan shall be deemed to confer
upon any  individual  to whom an Option  may be granted  hereunder  any right to
remain in the  employ  or  service  of the  Company  or a parent  or  subsidiary
corporation of the Company.

         2.14 Disputes or  Disagreements.  As a condition of the granting of the
Option  herein  granted,  the  Optionee  agrees,  for himself  and his  personal
representatives, that any disputes or disagreement which may arise under or as a
result of or pursuant to this Agreement  shall be determined by the Board in its
sole discretion,  and that any  interpretation by the Board of the terms of this
Agreement shall be final, binding and conclusive.
                                        4
<PAGE>
         IN WITNESS  WHEREOF,  the  Company  has caused  this  instrument  to be
executed by its duly authorized  officer,  and the Optionee has hereunto affixed
his or her signature.

                                       AMTECH SYSTEMS, INC.,
                                       an Arizona corporation



                                       By ______________________________________
                                            Its ________________________________

                                                                       "COMPANY"




                                       _________________________________________
                                                                      "OPTIONEE"
                                        5

                                   EXHIBIT 4.4

                              AMTECH SYSTEMS, INC.
                              1995 STOCK BONUS PLAN


      1. Purpose. The purpose of this 1995 Stock Bonus Plan ("Plan)" is to
advance the interest of Amtech Systems, Inc. (the "Company") by inducing persons
of  outstanding  ability  to remain as  employees  of the  Company  by  granting
additional  compensation for services which they have rendered or will hereafter
render.  This is  accomplished  by providing  for the issuance of the  Company's
common stock, $.01 par value (the "Common Stock"), to qualified employees.

         2.  Administration.  The Plan shall be administered by the Compensation
and Option  Committee of the  Company's  Board of Directors  (the  "Committee").
Except as specifically  provided,  the  interpretation  and  construction by the
Committee  of any  provision of the Plan or of any Common Stock issued under the
Plan shall be final,  conclusive and binding upon all persons. The Committee may
delegate  non-discretionary  administrative  duties  to  such  employees  of the
Company as it shall deem proper,  but only the  Committee can issue Common Stock
bonuses under the Plan.

         3. Shares  Subject to the Plan. The stock subject to issuance under the
Plan shall be shares of the  Company's  Common  Stock,  whether  authorized  but
unissued or held in the  Company's  treasury.  The  maximum  number of shares of
Common Stock which may be issued  pursuant to the Plan shall not exceed  320,000
shares,  less the number of options outstanding or exercised under the Company's
Amended and Restated 1995 Stock Option Plan.

         4. Eligibility. The class of persons which shall be eligible to receive
stock  bonuses  under the Plan  shall be  salaried  full-time  employees  of the
Company or any subsidiary corporation of the Company who either (i) are officers
of the Company or a  subsidiary  corporation  of the  Company,  or (ii)  perform
duties of a supervisory  nature for the Company or a subsidiary  corporation  of
the Company.

         5. Grant of Stock Bonuses. Bonuses may be granted under the Plan at any
time and from time to time before  termination  of the Plan.  Each Common  Stock
bonus  granted  under the Plan shall be authorized by the Committee and shall be
evidenced by a duly adopted  resolution of either the Committee or the Company's
Board of Directors.

         6. Conditions of Grant. The Company shall not be obligated to issue any
shares of Common  Stock  upon the grant of a stock  bonus  unless  the shares of
Common Stock have been  registered  with the Securities and Exchange  Commission
pursuant to the Securities  Act of 1933, as amended (the "Act"),  and applicable
State  securities laws, or are exempt from  registration  under the Act and such
laws,  and the  sale and  issuance  of such  shares  is in  compliance  with all
applicable  State or local  securities  laws. If shares are not registered under
the Act or such laws,  but are exempt from  registration,  the  employee to whom
such stock bonus has been granted shall represent to the Company that the shares
are  being  acquired  for  investment  and  not  with a view  to the  resale  or
distribution  thereof or provide such other  documentation as may be required by
the Company unless in the opinion of counsel to the Company such  representation
or
<PAGE>
documentation  is not  necessary  to  comply  with the Act.  Stock  certificates
evidencing  shares  of  Common  Stock  issued  upon the  grant of a stock  bonus
hereunder shall bear a restrictive securities legend substantially as follows:

                  "THE  SHARES  REPRESENTED  BY THIS  CERTIFICATE  HAVE NOT BEEN
                  REGISTERED  UNDER THE SECURITIES  ACT OF 1933, AS AMENDED,  OR
                  UNDER THE SECURITIES LAWS OF ANY STATE OR OTHER  JURISDICTION.
                  THE  SECURITIES  MAY NOT BE SOLD OR  OFFERED  FOR  SALE IN THE
                  ABSENCE  OF  AN  EFFECTIVE   REGISTRATION  STATEMENT  FOR  THE
                  SECURITIES  UNDER THE SECURITIES ACT OF 1933, AS AMENDED,  AND
                  APPLICABLE SECURITIES LAWS OF ANY STATE OR OTHER JURISDICTION,
                  OR AN OPINION OF COUNSEL SATISFACTORY TO THE COMPANY THAT SUCH
                  REGISTRATION IS NOT REQUIRED."

         7.       Termination, Modification and Amendment.

                  (a) The Plan shall terminate on a date which is ten (10) years
from the date of its adoption by the Board of Directors or sooner as provided in
subparagraph  (b) of this  Section 7 (the  "Termination  Date").  No stock bonus
shall be granted after the Termination Date.

                  (b) The Board of Directors  may at any time,  on or before the
Termination   Date,   terminate  the  Plan  or  from  time  to  time  make  such
modifications or amendments to the Plan as it may deem advisable.

                  (c) No  termination,  modification  or  amendment  of the Plan
shall adversely affect any previously issued shares of Common Stock granted as a
stock bonus under the Plan.

         8. Not a Contract of Employment. Nothing contained in the Plan shall be
deemed to  confer  upon any  individual  to whom a stock  bonus  may be  granted
hereunder  any right to remain  the  employ or  service  of the  Company  or any
subsidiary corporation of the Company.

         9.  Indemnification  of Committee.  In addition to such other rights of
indemnification  as they  may  have,  the  members  of the  Committee  shall  be
indemnified by the Company to the extent  permitted under applicable law against
all  costs and  expenses  reasonably  incurred  by them in  connection  with any
action, suit or proceeding to which they or any of them may be a party by reason
of any action taken or failure to act upon or in connection with the Plan or any
rights  granted  thereunder  and against all amounts paid by them in  settlement
thereof or paid by them in satisfaction  of a judgment of any such action,  suit
or  proceeding,  except a judgment  based on a finding  of bad  faith.  Upon the
institution  of any such action,  suit or  proceeding,  the Committee  member or
members shall notify the Company in writing,  giving the Company an  opportunity
at its own cost to defend  the same  before  such  Committee  member or  members
undertake to defend the same on their own behalf.
                                        2
<PAGE>
         10. Definitions.  For purposes of the Plan, the term "subsidiary" shall
have the same  meaning as  "subsidiary  corporation"  as such term is defined in
Section 424(f) of the Code.

         11.  Governing  Law. The Plan shall be governed  by, and all  questions
arising  hereunder shall be determined in accordance with, the laws of the State
of Arizona.

         Adopted by the Board of Directors on February 10, 1995
                                        3

                                                      August 7, 1996


Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C. 20549

    Re:      Amtech Systems, Inc.
             Amended and Restated 1995 Stock Option Plan & 1995 Stock Bonus Plan

Ladies and Gentlemen:

             We have  acted as  counsel  to Amtech  Systems,  Inc.,  an  Arizona
corporation  (the "Company"),  in connection with its Registration  Statement on
Form S-8 (the  "Registration  Statement") filed under the Securities Act of 1933
relating to the  registration  of 320,000  shares of its Common Stock,  $.01 par
value (the "Shares"),  issuable  pursuant to the Company's  Amended and Restated
1995 Stock Option Plan and the 1995 Stock Bonus Plan (the "Plans").

             In that  connection,  we have  examined such  documents,  corporate
records and other  instruments as we have deemed  necessary or  appropriate  for
purposes of this opinion,  including the Articles of Incorporation,  as amended,
and the Bylaws of the Company.

             Based upon the foregoing, we are of the opinion that:

             1. The Company has been duly organized and is validly existing as a
corporation under the laws of the State of Arizona.

             2. The Shares, when issued and sold in accordance with the terms of
the Plans, will be validly issued, fully paid and nonassessable.

             We hereby  consent to the use of this  opinion as an exhibit to the
Registration Statement.

                                                Very truly yours,

                                                SQUIRE, SANDERS & DEMPSEY

                    CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS
                    -----------------------------------------


As independent  public  accountants,  we hereby consent to the  incorporation by
reference in this  Registration  Statement of our report dated  December 6, 1995
included in Amtech  Systems  Inc.'s Form 10-K for the year ended  September  30,
1995 and to all references to our firm included in this Registration Statement.


                                                     ARTHUR ANDERSEN LLP


Phoenix, Arizona
    July 30, 1996


© 2022 IncJournal is not affiliated with or endorsed by the U.S. Securities and Exchange Commission