AMTECH SYSTEMS INC
DEF 14A, 1996-01-29
HELP SUPPLY SERVICES
Previous: FIDELITY ADVISOR SERIES VI, NSAR-B, 1996-01-29
Next: AMC ENTERTAINMENT INC, SC 13G/A, 1996-01-29





                Proxy Statement Pursuant to Section 14(a) of the
                        Securities Exchange Act of 1934
                                (Amendment No. )

Filed by the Registrant [X]

Filed by a Party other than the Registrant [ ]

Check the appropriate box:

     [ ]   Preliminary Proxy Statement
     [ ]   Confidential, for Use of the Commission Only (as permitted by Rule
           14a-6(e)(2))
     [X]   Definitive Proxy Statement
     [ ]   Definitive Additional Materials
     [ ]   Soliciting Material Pursuant to Sec. 240.14a-11(c) or Sec. 240.14a-12

                              AMTECH SYSTEMS, INC.
                    ----------------------------------------
                (Name of Registrant as Specified in Its Charter)

                                  Robert Hass
- --------------------------------------------------------------------------------
                   (Name of Person(s) Filing Proxy Statement)

Payment of Filing Fee (Check the appropriate box):

[X] $125 per Exchange Act Rules 0-1l(c)(1)(ii), 14a-6(i)(1), 14a-6(j)(2)
    or Item 22(a)(2) of Schedule 14A.

[ ] $500 per each  party to the  controversy  pursuant  to  Exchange  Act Rule
    14a-6(i)(3).

[ ] Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

     1) Title of each class of securities to which transaction applies:

     2) Aggregate number of securities to which transaction applies:

     3) Per unit  price  or  other  underlying  value  of  transaction  computed
        pursuant  to  Exchange Act Rule 0-11 (Set forth the amount on  which the
        filing fee is calculated and state how it was determined):

     4) Proposed maximum aggregate value of transaction:

     5) Total fee paid:

[ ] Fee paid previously with preliminary materials.

[ ] Check box if any part of the fee is offset as  provided  by  Exchange  Act
    Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
    paid  previously.  Identify the previous  filing by  registration  statement
    number, or the Form or Schedule and the date of its filing.

     1) Amount Previously Paid:

     2) Form, Schedule or Registration Statement No.:

     3) Filing Party:

     4) Date Filed:




<PAGE>

                              AMTECH SYSTEMS, INC.
                              131 South Clark Drive
                              Tempe, Arizona 85281

- --------------------------------------------------------------------------------

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                        TO BE HELD ON FEBRUARY 29, 1996

- --------------------------------------------------------------------------------

To Our Shareholders:

         The 1996 Annual Meeting of  Shareholders  of AMTECH  SYSTEMS,  INC., an
Arizona  corporation  (the "Company"),  will be held at the Doubletree  Paradise
Valley Resort, 5401 North Scottsdale Road, Scottsdale,  Arizona, on February 29,
1996, at 3:00 p.m., Mountain Standard Time, for the following purposes:

    1.       To elect five (5) directors to serve for one year terms;

    2.       To ratify the adoption of the Amtech Systems, Inc. Amended and 
             Restated 1995 Stock Option Plan under which 160,000 shares of the
             Company's Common Stock would be reserved for grants of stock 
             options to employees of the Company;

    3.       To ratify the adoption of the Amtech Systems, Inc. 1995 Stock Bonus
             Plan under which shares of the Company's Common Stock would be 
             reserved for grants of stock bonuses to employees of the Company;

    4.       To ratify the adoption of the Amtech Systems, Inc. Non-Employee 
             Directors Stock Option Plan under which 100,000 shares of the 
             Company's Common Stock would be reserved for grants of stock 
             options to non-employee directors of the Company; and

    5.       To transact such other business as may properly come before the 
             meeting or any adjournment(s) thereof.  Management is presently
             aware of no other business to come before the meeting.

         The Board of  Directors  has fixed the close of business on January 25,
1996,  as the record  date for the  determination  of  Shareholders  entitled to
notice of and to vote at the meeting or any adjournment(s)  thereof (the "Record
Date"). Shares of Common Stock can be voted at the meeting only if the holder is
present at the meeting in person or by valid proxy. A copy of the Company's 1995
Annual Report, which includes audited financial statements, was mailed with this
Notice and Proxy Statement to all Shareholders of record on the Record Date.

         Management  of the Company  cordially  invites you to attend the Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing proposals and the reasons why the Board of Directors
encourages you to vote for approval of such proposals..

                            By Order of the Board of Directors


                            Robert T. Hass, Secretary
Tempe, Arizona
January 29, 1996


- --------------------------------------------------------------------------------
IMPORTANT:  IT IS  IMPORTANT  THAT YOUR SHARE  HOLDINGS BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.
- --------------------------------------------------------------------------------

<PAGE>


                              AMTECH SYSTEMS, INC.
                             131 South Clark Drive
                              Tempe, Arizona 85281


                                 ---------------
                                 PROXY STATEMENT
                                 ---------------

         This Proxy Statement is being  furnished to the  Shareholders of AMTECH
SYSTEMS,  INC., an Arizona  corporation (the "Company"),  in connection with the
solicitation  of proxies by the Board of  Directors  for use at the 1996  Annual
Meeting of the  Shareholders  of the Company to be held on February 29, 1996, at
3:00 P.M.,  Mountain Standard Time, and any adjournment or postponement  thereof
(the "Annual  Meeting").  A copy of the Notice of the Meeting  accompanies  this
Proxy Statement. It is anticipated that the mailing of this Proxy Statement will
commence on January 29, 1996.

                       SOLICITATION AND VOTING OF PROXIES

         Only  shareholders  of record at the close of  business  on January 25,
1996 (the  "Record  Date") are  entitled  to notice of and to vote at the Annual
Meeting  or  any  adjournment  or  postponement  thereof.  On the  Record  Date,
2,152,851  shares of Common  Stock,  $.01 par value (the "Common  Stock"),  were
issued and  outstanding.  Each  holder of Common  Stock is entitled to one vote,
exercisable in person or by proxy,  for each share of the Company's Common Stock
held of record on the Record Date.

         THE PROPOSALS FOR WHICH SHAREHOLDER  APPROVAL IS BEING SOUGHT CANNOT BE
APPROVED WITHOUT THE AFFIRMATIVE VOTE OF THE HOLDERS OF A MAJORITY OF THE SHARES
PRESENT,  IN PERSON OR BY PROXY,  AT THE ANNUAL  MEETING.  BROKERS  CANNOT  VOTE
"STREET NAME" STOCK ON BEHALF OF BENEFICIAL OWNERS UNLESS THE BROKER RECEIVES AN
EXECUTED  PROXY FROM THE  BENEFICIAL  OWNER.  THEREFORE,  PLEASE SIGN,  DATE AND
RETURN YOUR PROXY CARD IN THE ENCLOSED RETURN ENVELOPE.

         At the Annual  Meeting of  Shareholders,  five (5)  directors are to be
elected to serve for a term of one year or until their respective successors are
elected and qualified. Each Shareholder present at the Annual Meeting, either in
person or by proxy,  will have an  aggregate  number of votes in the election of
directors  equal to five (the  number  of  persons  nominated  for  election  as
directors)  multiplied  by the number of shares of Common  Stock of the  Company
held by each such shareholder on the Record Date. The resulting aggregate number
of votes may be cast by the  Shareholder for the election of any single nominee,
or the  Shareholder  may  distribute  such votes  among any number or all of the
nominees.  The five  nominees  receiving  the  highest  number of votes  will be
elected to the Board of Directors.

         All valid proxies  received  before the Annual  Meeting and not revoked
will be exercised.  All shares  represented by proxy will be voted,  and where a
shareholder  specifies by means of his or her proxy a choice with respect to any
matter  to be acted  upon,  the  shares  will be voted  in  accordance  with the
specifications  so made. If no choice is indicated on the proxy, the shares will
be voted in accordance with the  recommendations of the Board of Directors as to
such  matters.  Abstentions  and  broker  non-votes  will  be  included  in  the
determination of the number of shares  represented for a quorum.  Proxies may be
revoked at any time prior to the time they are voted by: (a)  delivering  to the
Secretary of the Company a written instrument of revocation bearing a date later
than  the  date of the  proxy;  or (b)  duly  executing  and  delivering  to the
Secretary a subsequent  proxy relating to the same shares;  or (c) attending the
meeting  and  voting in  person,  provided  that the  shareholder  notifies  the
Secretary  of the meeting of his or her  intention to vote in person at any time
prior to the voting of the

                                        1

<PAGE>



proxy. In order to vote their shares in person at the meeting,  shareholders who
own their  shares in "street  name" must obtain a special  proxy card from their
broker.

         The cost of  soliciting  proxies,  including  the cost of preparing and
mailing  the  Notice  and  Proxy  Statement,   will  be  paid  by  the  Company.
Solicitation   will  be  primarily  by  mailing  this  Proxy  Statement  to  all
shareholders  entitled  to vote at the  meeting.  Proxies  may be  solicited  by
officers,  directors and the investment  advisor of the Company personally or by
telephone  or  facsimile,  without  additional  compensation.  The  Company  may
reimburse brokers, banks and others holding shares in their names for others for
the cost of forwarding  proxy  materials and obtaining  proxies from  beneficial
owners.

         The Board of  Directors  does not know of any  matters  other  than the
election of directors  and the proposals to ratify the adoption of the Company's
Amended  and  Restated  1995  Stock  Option  Plan,  1995  Stock  Bonus  Plan and
Non-Employee Directors Stock Option Plan (collectively, the "Stock Plans"), that
are expected to be presented for consideration at the meeting. However, if other
matters properly come before the meeting,  the persons named in the accompanying
proxy intend to vote thereon in accordance with their judgment.

         All proxies received pursuant to this solicitation will be voted except
as to matters as to which  authority to vote is specifically  withheld;  where a
choice is specified as to the proposal,  they will be voted in  accordance  with
such specification.  Where authority to vote is not specifically withheld and no
voting  instructions  are given, the persons named in the proxy solicited by the
Board of Directors  intend to vote for the election of the nominees for director
listed below and for approval of the Company's Stock Plans.

                              ELECTION OF DIRECTORS

General Information

         The present terms of the Company's  current  directors,  Jong S. Whang,
Eugene R. Hartman, Donald F. Johnston, Alvin Katz and Bruce R. Thaw, expire upon
the election and  qualification of their successors at the Company's 1996 Annual
Meeting  of  Shareholders.  Messrs.  Katz and Thaw are  being  nominated  at the
request of Barber & Bronson,  Incorporated,  the  Underwriter  of the  Company's
public  offering of Common Stock and Common Stock Purchase  Warrants on December
15,  1994.  The  Underwriter's  right to nominate two  directors  was one of the
provisions of the Underwriting  Agreement.  The Board of Directors has nominated
each of the current  directors  as nominees  for  election as  directors  in the
election to be held at the Annual  Meeting.  In January 1996,  Eugene R. Hartman
resigned  as an  officer  of  the  Company  in  connection  with  the  Company's
disposition  of its  remaining  technical  contract  personnel  business  to Mr.
Hartman.  See  "Certain  Relationships  and Related  Transactions,"  below.  Mr.
Hartman will resign as a director  effective  upon the election of his successor
at the Annual Meeting.  The Board of Directors has nominated Robert T. Hass, the
Company's Chief Financial Officer, to replace Mr. Hartman.

         The Board of Directors  intends to vote its proxies for the election of
its nominees,  for a term to expire at the next Annual Meeting.  In that regard,
the Board of Directors solicits authority to cumulate such votes.

         If any nominee  should  become  unavailable  for any reason,  which the
Board of  Directors  does  not  anticipate,  the  proxy  will be  voted  for any
substitute  nominee or nominees  who may be  selected by the Board of  Directors
prior to or at the Annual Meeting, or, if no substitute is selected by the Board

                                        2

<PAGE>



of  Directors  prior to or at the  Annual  Meeting,  for a motion to reduce  the
present  membership  of the Board to the  number of  nominees  available  and to
create  an  additional  vacancy  to be filled  by the  Board of  Directors.  The
information  concerning the nominees and their share holdings in the Company has
been furnished by them to the Company.

Information Concerning Directors, Nominees and Officers

         The  following  table sets forth  information  regarding  the officers,
directors and director nominees of the Company.


Name                        Age         Positions with the Company
- ----                        ---         --------------------------

Jong S. Whang               50          President, Chief Executive Officer and 
                                        Director

Robert T. Hass              45          Vice President-Finance, Chief Financial
                                        Officer, Treasurer and Secretary; 
                                        Director Nominee

Donald F. Johnston          70          Director

Alvin Katz                  66          Director

Bruce R. Thaw               43          Director


         JONG S.  WHANG  has  been  President,  Chief  Executive  Officer  and a
Director  since the  inception of the Company and was one of its  founders.  Mr.
Whang's responsibilities as President include the sales effort for the Company's
semiconductor  equipment  business and  development of new products and business
opportunities  in that industry.  He has  twenty-two  years of experience in the
semiconductor industry including time spent in both processing and manufacturing
of equipment  components  and systems.  From 1973 until 1979, he was employed by
Siltronics,  Inc.,  initially  as  a  technician  working  with  chemical  vapor
deposition  (CVD) and later as  manager  of the  quartz  fabrication  plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

         ROBERT  T.  HASS  has  been  Vice  President-Finance,  Chief  Financial
Officer,  Treasurer and  Secretary of the Company since June 3, 1992.  From 1991
until May, 1992, he operated a financial  consulting  practice under the name of
Hass Financial Consulting Services, a sole proprietorship. From 1985 to 1991, he
served as Director of Accounting  Services and then  Controller  for  Lifeshares
Group,  Inc., a holding company which owned and operated real estate development
and insurance subsidiaries, and from 1988 to 1991 served as Controller and Chief
Accounting Officer of some of those  subsidiaries.  From 1984 to 1985, he served
as Vice  President-Finance  and Treasurer of The Victorio  Company,  a privately
owned holding company which owned and operated agriculture, chemical, commercial
real estate brokerage,  marketing  research,  and commodities  futures brokerage
businesses.  From 1977 to 1984, he was employed in various capacities  including
Vice President,  Chief Financial  Officer and Treasurer by Altamil  Corporation,
then a public company, which manufactures truck equipment, wirebound containers,
and precision aluminum  forgings.  From 1972 to 1977, was employed as an auditor
with  Ernst & Ernst,  now  known as  Ernest & Young.  He is a  Certified  Public
Accountant.

         DONALD F.  JOHNSTON has been a Director  since April 9, 1994,  and also
served as a Director  from March,  1983 to December  1992.  He is not  otherwise
employed by the Company.  He was President and Chief  Executive  Officer of JAI,
Inc. a management consulting firm from 1985 to March

                                        3

<PAGE>



1993.  From 1985 to March  1993,  when he  retired,  he acted as  marketing  and
management consultant to companies in the electronics  industry.  From November,
1983 until October,  1985, he was President of Process  Control,  Inc. of Tempe,
Arizona. He has held senior management  positions with Montgomery Ward & Co. and
the Hotpoint Division of the General Electric Company. He has also served as the
Vice-President  of B.F.  Goodrich and the Philco Ford Division of the Ford Motor
Company. Mr. Johnston also served as President of Mirco, Amstar Electronics, and
Hera Investment Co.

         ALVIN  KATZ has been a Director  since May 1,  1995.  Since 1981 he has
been an  adjunct  professor  of  business  management  at the  Florida  Atlantic
University  in  Boca  Raton,  Florida.  From  1991  until  the  company  sold in
September,  1992, he was Chief Executive Officer of Odessa  Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976,  Mr.  Katz was  employed  by  United  Parcel  Service  holding  various
managerial  positions,  including  District  Manager  and  Corporate  Manager of
Operations, Planning, Research and Development. He is also a Director of Blimpie
International,  a fast food franchisor,  Nastech Pharmaceutical Company, Inc., a
company  engaged in research,  development  and  marketing of nasally  delivered
pharmaceuticals,  Foremost Industries,  which is engaged in the distribution and
repair of commercial refrigeration, and Miller Industries, a real estate holding
company, all of which are publicly held corporations.

         BRUCE R. THAW has been a Director  since May 1, 1995. Mr. Thaw has been
a practicing  attorney  since 1978 and, from 1984 to the present,  he has been a
partner  in the law  firm of  Abrams  & Thaw.  Mr.  Thaw is also a  Director  of
Information Resource Engineering,  Inc., a publicly traded company that designs,
manufactures and markets  computer  network  security  systems and products.  In
addition,  he is also a Director  of Nastech  Pharmaceutical  Company,  Inc.,  a
publicly  traded company  engaged in the research,  development and marketing of
nasally  delivered  pharmaceuticals.  Mr. Thaw does not render legal services to
the Company.

Board and Committee Meetings

         During the 1995 fiscal year,  there were four (4) meetings of the Board
of Directors.  No director  attended less than 75% of the Board  meetings  while
serving as such director or less than 75% of all committee  meetings on which he
served as a committee member.

         There  are  three  committees  of the  Board of  Directors:  the  Audit
Committee, the Compensation and Option Committee and the Finance Committee.

         The Audit Committee,  which held one (1) meeting during the 1995 fiscal
year, was comprised of Messrs.  Bruce R. Thaw and Donald F. Johnston.  The Audit
Committee is responsible for maintaining  communication  between the Board,  the
Company's  independent auditors and members of financial management with respect
to the Company's financial affairs in general,  including  financial  statements
and audits, the adequacy and effectiveness of the Company's internal  accounting
controls and systems,  and the  retention  and  termination  of the  independent
auditors.

         The  Compensation and Option  Committee,  which held three (3) meetings
during the 1995 fiscal year,  was  comprised of Messrs.  Donald F.  Johnston and
Alvin  Katz.  The  Compensation  and  Option  Committee  makes   recommendations
concerning officer compensation, employee benefit programs and retirement plans.

         The Finance  Committee,  which held no meetings  during the 1995 fiscal
year,  was  comprised  of  Messrs.  Alvin Katz and Bruce R.  Thaw.  The  Finance
Committee is responsible for communication

                                        4

<PAGE>



between the Board,  the  Company's  lender or  prospective  lender(s)  and other
financial sources and members of financial management.

         All  current  committee  members  are  expected  to  be  nominated  for
re-election  at a Board  meeting  to be held  following  the  Annual  Meeting of
Shareholders.

Compensation of Directors

         Directors  who  are  full-time  employees  of the  Company  receive  no
additional compensation for serving as directors. Non-employee directors receive
fees of $700 per Board meeting attended and $250 per committee meeting attended.

Compensation Committee Interlocks and Insider Participation

         The  Compensation  and Option  Committee  is composed of Mr.  Donald F.
Johnston  and Mr.  Alvin Katz,  neither of whom is an officer or employee of the
Company.


         SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

Security Ownership of Management

         The  following  table sets forth  certain  information  concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 22, 1996, by
(i) each  director  and each  nominee  for  director of the  Company,  (ii) each
officer of the Company,  and (iii) all officers and  directors as a group.  This
information  was determined in accordance with Rule 13(d)-3 under the Securities
Exchange Act of 1934, as amended, and is based upon the information furnished by
the persons listed below. Except as otherwise indicated, each shareholder listed
possesses sole voting and investing  power with respect to the shares  indicated
as being beneficially owned.

                                                  Shares of Common Stock
                                                    Beneficially Owned
                                                  ----------------------

                                       Number of Shares              Percent of
Name and Address                      Beneficially Held(1)          Ownership(2)
- ----------------                     ---------------------          ------------

Jong S. Whang                            69,488(1)(3)                   3.2%
131 South Clark Drive
Tempe, AZ  85281

Bruce R. Thaw                            25,500(1)(4)                   1.1%
45 Banfi Plaza
Farmingdale, NY  11735

Donald F. Johnston                        5,625(1)(5)                      *
13615 N. Robertson Drive
Sun City West, AZ  85375

Robert T. Hass                            4,500(1)(6)                      *
131 South Clark Drive
Tempe, AZ  85281


                                        5

<PAGE>



                                                  Shares of Common Stock
                                                    Beneficially Owned
                                                  ----------------------

                                       Number of Shares              Percent of
Name and Address                      Beneficially Held(1)          Ownership(2)
- ----------------                      --------------------          ------------

Alvin Katz                               65,000(1)(7)                   2.9%
3707 Bridgewood
Boca Raton, FL  33434

Directors and Officers of the 
Company as a group (1)(2)(3)(4)(6)(7)    170,113(8)                     7.7%
- ------------------------

*        Less than 1%.

(1)      Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is
         the Vice  President-Finance,  Chief  Financial  Officer,  Treasurer and
         Secretary. Messrs. Johnston, Katz and Thaw are presently directors. Mr.
         Hass is a director nominee.

(2)      The percentages shown include the shares of Common Stock actually owned
         as of December 31, 1995, and the shares of Common Stock with respect to
         which the person had the right to acquire  beneficial  ownership within
         60 days of such date  pursuant to options.  All shares of Common  Stock
         that the  identified  person had the right to acquire within 60 days of
         December  31,  1995 upon the  exercise  of  options,  are  deemed to be
         outstanding  when computing the  percentage of the securities  owned by
         such person,  but are not deemed to be  outstanding  when computing the
         percentage of the securities owned by any other person.

(3)      Includes (i) 9,488 shares held jointly with Mr. Whang's spouse and (ii)
         7,500  shares  issuable  upon the  exercise  of  presently  exercisable
         options, with an exercise price of $3.52 per share.

(4)      Includes 5,000 shares  issuable upon exercise of presently  exercisable
         options  with an  exercise  price of $4.47 per share,  and  warrants to
         purchase 4,500 shares of Common Stock at an exercise price of $5.50 per
         share.

(5)      Includes   5,000  shares   issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $3.50 per share.
         
(6)      Includes   4,000  shares   issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $1.25 per share.
         

(7)      Includes   5,000  shares   issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $4.47 per share.


(8)      Includes 26,500 shares issuable upon exercise of presently  exercisable
         options  and  4,500  shares   issuable  upon  exercise  of  outstanding
         warrants.


Security Ownership of Certain Beneficial Owners

         There are no persons known to the Company to beneficially own more than
5% of the outstanding Common Stock of the Company.

                                        6

<PAGE>



                             EXECUTIVE COMPENSATION

         The following  table sets forth annual and long-term  compensation  for
services in all  capacities to the Company for the fiscal years ended  September
30, 1995, 1994 and 1993, of the Company's Chief Executive  Officer,  who was the
only executive officer of the Company to receive annual  compensation  exceeding
$100,000 during such periods.

<TABLE>

                                       SUMMARY COMPENSATION TABLE


                                          Annual Compensation
                                          -------------------
<CAPTION>

     Name and           Fiscal                                 Other Annual      All Other
Principal Position       Year          Salary    Bonus(1)     Compensation(2)   Compensation(3)
- ------------------      ------         ------    --------     ---------------   ---------------

<S>                       <C>       <C>         <C>                  <C>         <C>
Jong S. Whang            1995       $  95,000   $  48,657            -           $  2,815

President and Chief      1994          76,000      35,699            -              2,801

Executive Officer        1993          76,004      46,649            -              2,790

</TABLE>
                     

(1)      On February  24,  1989,  the Board of  Directors  approved an incentive
         compensation  plan for Mr.  Whang,  which  provides  for an annual cash
         bonus equal to 2% of the annual profits of the Company before taxes and
         extraordinary items; plus 2% of the amount by which the revenues of the
         Company' s  semiconductor  equipment  business in each year exceed such
         revenues for the previous year. It is a condition to the payment of any
         bonus that Mr. Whang have been continually  employed by the Company and
         that the Company have realized a profit after the payment of the bonus.
         On October 1, 1995, Mr. Whang entered into an employment  contract with
         the  Company,   which  contract   incorporated  Mr.  Whang's  incentive
         compensation plan and added additional bonus eligibility criteria.  See
         Employment Contracts with Executive Officers, below.
        
(2)      Other compensation to Mr. Whang, consisting of car allowance,  vacation
         pay and other  perquisites,  did not exceed  $50,000 or 10% of his base
         compensation during any fiscal year.

(3)      Represents  insurance  premiums  paid on  whole-life  insurance for the
         benefit of Mr. Whang's spouse.

Option Grants

         During 1995 fiscal year, no stock options were granted to any executive
officer of the Company.

Option Exercises

         The  following  table shows the stock  options  exercised  by the Chief
Executive  Officer of the Company during fiscal year 1995 and the value of stock
options held by him, as of the end of fiscal year 1995.



                                        7

<PAGE>

<TABLE>

                   AGGREGATED OPTION EXERCISES IN FISCAL 1995
                    AND OPTION VALUE AS OF SEPTEMBER 30, 1995



<CAPTION>
                                                                   Number of Unexercised                  Value of Unexercised
                                                                          Options                              In-the-Money
                                                                   at September 30, 1995             Options at September 30, 1995
                                                                   ---------------------             -----------------------------
                            Shares
                         Acquired on           Value
Name                     Exercise (#)    Realized ($)        Exercisable       Unexerciseable       Exercisable       Unexerciseable
- ----                     ------------    ------------        -----------       --------------       -----------       --------------
<S>                           <C>                <C>            <C>                  <C>              <C>                   <C>


Jong S. Whang                 -                  -              7,500                -                $41,400               -

</TABLE>

Amendment or Repricing of Options

         During  fiscal  year 1995,  the Company did not amend or reprice any of
its stock options held by executive officers of the Company.

Employment Contracts with Executive Officers

         On October 1, 1994,  the Company  entered into a  employment  agreement
with its  President,  Jong S. Whang.  Mr.  Whang is  employed  as the  Company's
President  for a period of five years  with an annual  salary of  $95,000,  with
annual  increases of up to 5% to be  determined by the Board of Directors at the
end of each year under the agreement.  He is to receive the following additional
incentive  cash  compensation:  (i) a bonus equal to 2% of the annual profits of
the Company before taxes and  extraordinary  items;  (ii) a bonus equal to 2% of
the  amount by which  the  revenues  of the  Company's  semiconductor  equipment
business in each year exceeds such revenues for the previous  year,  and (iii) a
bonus of $14,000 upon the  occurrence  of the  following  events:  the Company's
secondary  public  offering  closes  during  fiscal  year 1995 or the Company is
profitable during fiscal years 1995, 1996, 1997 or 1998,  provided that upon the
occurrence of such events,  Mr. Whang has exercised at least 2,500 shares of his
presently  exercisable  stock options to purchase  7,500 shares of the Company's
Common  Stock at $3.52 per share.  During  fiscal year 1995,  Mr. Whang earned a
cash bonus of $48,657  pursuant to the foregoing  formula.  It is a condition to
the  payment  of any cash  bonus that Mr.  Whang  shall  have been  continuously
employed by the Company and that the total of all cash bonuses is limited to 10%
of the Company's  pre-tax earnings for that year (except for the bonus triggered
by the first event described in (iii), above).  Profits shall also be determined
without  taking into  account the first  $3,200,000  expended or invested by the
Company in the  development  of the proposed  photo-assisted  CVD  product.  The
agreement also contains confidentiality and non-compete provisions. Mr. Whang is
entitled to one year's salary as severance  pay if he is  terminated  other than
for "cause."  Mr. Whang is also  entitled to  participate  in any benefit  plans
generally available to employees of the Company.

Compensation and Option Committee Report on Executive Compensation

         The  Compensation  and  Option  Committee  of the  Company's  Board  of
Directors (the "Committee),  which is composed entirely of independent,  outside
directors,  establishes  the  general  compensation  policies of the Company and
specific compensation for each executive officer of the Company, and administers
the  Company's  stock  option  program.  The  Committee's  intent is to make the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective
incentives to motivate and reward Company

                                        8
<PAGE>



executives  for  achieving  the  financial  and  strategic  goals of the Company
essential to the Company's long-term success and to growth in shareholder value.
The Company's executive  compensation package consists of three main components:
(1) base salary; (2) incentive cash and/or stock bonuses; and (3) stock options.

         Base Compensation

         The Committee's  approach is to offer executives  salaries  competitive
with those of other executives in the industry in which the Company operates. To
that end, the Committee  evaluates the  competitiveness of its base salary based
on  information  drawn  from a  variety  of  sources,  including  published  and
proprietary  survey  data  and  the  Company's  own  experience  recruiting  and
retaining  executives,  although complete  information is not easily obtainable.
The Company's base salary levels are intended to be consistent with  competitive
practice  and  level  of  responsibility,   with  salary  increases   reflecting
competitive  trends,  the overall  financial  performance of the Company and the
performance of the individual executive.

         Bonuses

         In  addition  to base  salary,  executives  are  eligible  to receive a
discretionary  annual bonus. At the beginning of each year, the Compensation and
Option   Committee  and  the  CEO  review  each   individual   executive's   job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the Company.  In  addition,  for all  executives,  the  Compensation  and Option
Committee  reviews  the  Company's  actual  financial  performance  against  its
internally  budgeted  performance  in  determining  year-end  bonuses,  if  any.
However,   the   Compensation  and  Option  Committee  does  not  set  objective
performance  targets for  executives  other than the CEO and sales and marketing
personnel.

         Stock Option and Restricted Stock Grants

         The  Company,  from time to time,  grants  stock  options and shares of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  The Company's  former Stock
Option Plan terminated prior to the 1995 fiscal year. In October 1995, the Board
of Directors adopted the Amended and Restated 1995 Stock Option Plan, which will
be administered by the Compensation and Option Committee.  See "Proposal No. 1,"
below,  for a description  of the Plan.  Grants of stock options and  restricted
stock  are  designed  to  align  the  executive's  interest  with  that  of  the
shareholders of the Company.  In awarding option grants,  the  Compensation  and
Option  Committee  will  consider,  among other things,  the amount of stock and
options  presently held by the executive,  the executive's  past performance and
contributions  ,  and  the  executive's  anticipated  future  contributions  and
responsibilities.

         1995 CEO Compensation

         The base salary for the Chief Executive  Officer ("CEO") for the fiscal
year 1995 was increased from $76,000 in 1994 to $95,000 in 1995, pursuant to the
employment  agreement  entered  into by the  Company  and  the  CEO.  The  CEO's
increased base salary is based upon the compensation of executives in comparable
positions in the  semiconductor  industry,  adjusted for the size of the Company
(total assets and revenues).


                                        9

<PAGE>



         On February  24,  1989,  the Board of  Directors  approved an incentive
compensation  plan for the CEO, which provides for an annual cash bonus equal to
2% of the annual  profits of the Company before taxes and  extraordinary  items;
plus 2% of the  amount  by which the  revenues  of the  Company's  semiconductor
equipment  business in each year exceed such revenues for the previous  year. In
addition,  such incentive compensation plan specifies that the CEO shall receive
a bonus  of  $14,000  upon  the  occurrence  of the  following  events:  (i) the
Company's public offering of securities  closing during fiscal 1995, or (ii) the
Company is profitable  during fiscal 1995, 1996, 1997 or 1998. It is a condition
to the payment of any bonus that the CEO have been  continually  employed by the
Company  and that the  total  of such  cash  bonuses  is  limited  to 10% of the
Company's  pre-tax  earnings  for that year  (except the bonus  triggered in the
event of (i), above).  The CEO earned $48,657 in 1995 pursuant to such incentive
compensation  plan, $14,000 of which was earned as a result of the completion of
the Company's  public  offering.  The CEO's new  employment  agreement  with the
Company  incorporates  the incentive  compensation  plan  described  above.  See
"Employment Contracts with Executive Officers," above.

                                               COMPENSATION AND OPTION COMMITTEE

                                               Donald F. Johnston
                                               Alvin Katz


Compliance with Section 16(a) of the Securities Exchange Act of 1934

         Section  16(a) of the  Securities  Exchange  Act of 1934  requires  the
Company's  directors  and  executive  officers  as well as persons  beneficially
owning more than 10% of the Company's  Common Stock,  to file certain reports of
ownership  with the  Securities  and  exchange  Commission  (the  "SEC")  within
specified  time periods.  Such  officers,  directors and  shareholders  are also
required by SEC rules to furnish the  Company  with copies of all Section  16(a)
forms they file.

         Based  solely on its  review of such forms  received  by it, or written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October 1, 1994 and  September  30,  1995,  all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied with.


                 CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

         In December  1995,  the Company  executed an  agreement  with Eugene R.
Hartman,  a Vice  President  and  director of the Company and the  President  of
Echelon Service Company, a wholly-owned  subsidiary of the Company,  to sell all
of the stock of Echelon to Mr.  Hartman in exchange for 98,016  shares of Amtech
Common Stock held by Mr. Hartman and additional  cash  consideration.  The total
consideration for the Echelon stock was valued at approximately $1.2 million. Of
that consideration,  approximately  $800,000 was attributed to the Amtech Common
Stock and  approximately  $400,000 in the form of a cash distribution by Echelon
to Amtech prior to the sale. The parties closed the transaction in January 1996,
and Mr. Hartman resigned as an officer of the Company.

         Prior to entering  into the  agreement  with Mr.  Hartman,  the Company
sought and negotiated offers from third parties.  However, in the opinion of the
Board, the best offer was tendered by Mr.

                                       10

<PAGE>



Hartman.  The transaction was conducted at arms' length, and management does not
believe that a better deal could have been made with unrelated third parties.

Comparison of Stock Performance

         The  following  graph assumes that $100 was invested on October 1, 1990
in each of the following: the Company's Common Stock, the Nasdaq Composite Index
and the Nasdaq Industrial Index.


                              (SEPTEMBER 30)

               1991      1992      1993      1994      1995
               ----      ----      ----      ----      ----

COMPANY        100       62.5     187.5     168.75    443.75

NASDAQ
COMPOSITE
INDEX           52.9    168.5     221.4     221.8     302.9

NASDAQ
INDUSTRIAL
INDEX          160      169.3     211.7     211       266.4









                                       11

<PAGE>



                                 PROPOSAL NO. 1
                       TO APPROVE THE AMTECH SYSTEMS, INC.
                   AMENDED AND RESTATED 1995 STOCK OPTION PLAN

         At the Annual Meeting,  the Company will seek shareholder  ratification
of the Amended and Restated 1995 Stock Option Plan (the "1995  Plan").  The 1995
Plan was  adopted by the Board of  Directors  on October  20,  1995,  subject to
shareholder  approval.  In adopting the 1995 Plan, the Board recognized that the
Company's 1983 Incentive  Stock Option Plan terminated in 1993 and no additional
options  could be granted after such date.  The Board  believes that in order to
attract  and retain  officers  and  employees  of the highest  caliber,  provide
increased incentive for such persons to strive to attain the Company's long-term
goal of increasing  shareholder value, and to continue to promote the well being
of the Company,  it is in the best interests of the Company and its shareholders
to provide officers and employees of the Company,  through the granting of stock
options,  the  opportunity to participate  in the  appreciation  in value of the
Company's Common Stock. THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO
VOTE "FOR" THE APPROVAL OF THE AMENDED AND RESTATED 1995 STOCK OPTION PLAN.

Reason for Approval

         The grant of stock  options  pursuant to a plan which has been approved
by  shareholders  and meets certain  conditions is exempt from the  "short-swing
profits"  liability  provisions of Section 16(b) of the  Securities and Exchange
Act of 1934,  as amended  (the  "Act").  Section  16(b)  provides  that upon the
purchase and sale (or sale and  purchase) of the  Company's  Common Stock within
any six month period by a principal  officer,  director or  beneficial  owner of
more than 10% of the  Company's  Common  Stock,  any  "profit"  realized by such
person is recoverable by the Company.  As a result of the  complexities  of this
rule,  optionees may unwittingly fall within its scope and be forced to disgorge
gains to the  Company,  thereby  frustrating  the  Company's  intent to  provide
incentive  to officers  and  employees  under the 1995 Plan.  Thus,  shareholder
approval  of the 1995  Plan is  sought  in order to  exempt  from the  liability
provisions  of Section  16(b) the grant of options to officers and directors who
are eligible to participate in the 1995 Plan. In addition,  shareholder approval
of the 1995 Plan is  necessary in order that  incentive  stock  options  granted
under the 1995 will qualify for  treatment  as such under the  Internal  Revenue
Code of 1986, as amended (the "Code").  Unless shareholder approval is obtained,
options granted under the 1995 Plan will have less value and, consequently, will
not provide the incentive to the recipient intended by the Board.

Summary of the 1995 Plan

         The following summary of the 1995 Plan does not purport to be complete,
and is subject to and  qualified in its entirety by reference to the text of the
1995 Plan, which is attached hereto as Exhibit "A."

         Administration. The 1995 Plan shall be administered by the Compensation
and Option Committee of the Company's Board of Directors. The Committee has full
authority,  subject to the provisions of the 1995 Plan to award  incentive stock
options and nonstatutory stock options ("Options").

         Subject to the provisions of the 1995 Plan, the Committee determines in
its  discretion,  among  other  things,  the  persons  to whom from time to time
Options may be granted  ("Participants"),  the number of shares  subject to each
Option,  exercise prices under the Options,  any  restrictions or limitations on
such Option including any vesting, exchange, deferral, surrender,  cancellation,
acceleration, termination, or forfeiture provisions related to such Options. The
interpretation and

                                       12

<PAGE>



construction by the Committee of any provisions of, or the  determination of any
questions arising under, the 1995 Plan or any rule or regulation  established by
the Committee pursuant to the 1995 Plan, shall be final,  conclusive and binding
on all persons interested in the 1995 Plan.

         Shares Subject to the 1995 Plan. The 1995 Plan  authorizes the granting
of Options the  exercise of which would allow up to a maximum of 160,000  shares
of the Common Stock to be acquired by the Participants of said Options. In order
to prevent the dilution or enlargement of the rights of the  Participants  under
the 1995 Plan, the number of shares of Common Stock  authorized by the 1995 Plan
and the  number  of  shares  subject  to  outstanding  options  are  subject  to
adjustment  in the event of any  increase or decrease in the number of shares of
outstanding  Common  Stock  resulting  from  a  stock  dividend,   stock  split,
combination of shares, merger, reorganization,  consolidation,  recapitalization
or other change in the  corporate  structure  affecting  the  Company's  capital
stock. If any Option granted under the 1995 Plan is forfeited or terminated, the
shares of Common Stock that were underlying such Option shall again be available
for distribution in connection with Options  subsequently granted under the 1995
Plan.

         Eligibility. Subject to the provisions of the 1995 Plan, Options may be
granted to full-time employees of the Company or its subsidiaries. Directors who
are not salaried  employees of the Company or its  subsidiaries are not eligible
to be granted Options under the 1995 Plan. In addition, members of the Committee
shall  not be  eligible  to be  granted  Options  during  their  service  on the
Committee.

         Effective  Date and Term of 1995 Plan.  If  approved  by the  Company's
shareholders,  the 1995 Plan will be deemed  effective on October 20, 1995,  the
date on which it was adopted by the Board of Directors. No option may be granted
after  October 20, 2005.  The 1995 Plan will  terminate ten (10) years after the
effective date of the 1995 Plan, subject to earlier termination by the Board. No
Option  may be  granted  under the 1995 Plan  after the  termination  date,  but
Options previously granted may extend beyond such date.

         Nature of  Options.  The 1995 Plan  provides  for the grant of options,
which may be non-qualified options,  incentive stock options, or any combination
of the  foregoing.  In  general,  options  granted  under  the 1995 Plan are not
transferable  and expire eleven (11) years after the date of grant (ten years in
the  case of  incentive  stock  options).  The per  share  exercise  price of an
incentive stock option granted under the 1995 Plan may not be less than the fair
market value of the Common Stock on the date of grant.  Incentive  stock options
granted to persons who have  voting  control  over 10% or more of the  Company's
capital  stock are  granted at 110% of the fair market  value of the  underlying
shares on the date of grant and expire five years after the date of grant.

         Exercise of Options.  The 1995 Plan provides the Committee or the Board
of Directors with the discretion to determine  when options  granted  thereunder
will become exercisable. Generally, such options may be exercised after a period
of time  specified by the  Committee or the Board of Directors at any time prior
to  expiration,  so long as the optionee  remains  employed by the  Company.  No
option granted under the 1995 Plan is transferable by the optionee other than by
will or the laws of descent and  distribution,  and each  option is  exercisable
during the lifetime of the optionee only by the optionee.

         Agreements.  Options  granted  under the 1995 Plan will be evidenced by
agreements  consistent  with the 1995  Plan in such  form as the  Committee  may
prescribe.  Neither the 1995 Plan nor agreements  thereunder confer any right to
continued employment upon any Participant.


                                       13

<PAGE>



         Amendments to the 1995 Plan.  The Board may at any time,  and from time
to time, amend,  modify or terminate any of the provisions of the 1995 Plan, but
no amendment,  modification or termination  shall be made which would impair the
rights of a Participant under any agreement theretofore entered into pursuant to
an Option grant, without the Participant's consent.

         Outstanding Options.  No options have been issued under the 1995 Plan.

Federal Income Tax Considerations

         The  discussion  that follows is a summary,  based upon current law, of
some of the  significant  federal income tax  considerations  relating to awards
under the 1995 Plan. The following  discussion does not address state,  local or
foreign tax consequences.

         If the Plan is approved by the shareholders,  a Participant in the 1995
Plan  will not  recognize  taxable  income  upon the  grant  or  exercise  of an
incentive  stock option  except under  certain  circumstances  when the exercise
price is paid  with  already-owned  shares of Common  Stock  that were  acquired
through the previous  exercise of an incentive stock option.  However,  upon the
exercise of an incentive  stock  option,  the excess of the fair market value of
the shares  received  on the date of  exercise  over the  exercise  price of the
shares will be treated as a tax preference  item for purposes of the alternative
minimum tax. In order for the  exercise of an incentive  stock option to qualify
for the foregoing tax treatment,  the Participant  generally must be an employee
of the Company from the date the incentive  stock option is granted  through the
date three months  before the date of  exercise,  except in the case of death or
disability,  where special rules apply.  The Company will not be entitled to any
deduction with respect to the grant or exercise of an incentive stock option.

         If shares  acquired upon exercise of an incentive  stock option are not
disposed of by the Participant within two years from the date of grant or within
one year after the transfer of such shares to the Participant  (the "ISO Holding
Period"),  then (i) no amount will be reportable as ordinary income with respect
to such shares by the  Participant or recipient and (ii) the Company will not be
allowed a deduction in connection with such incentive stock option or the Common
Stock acquired pursuant to the exercise of the incentive stock option. If a sale
of such Common Stock occurs after the ISO Holding  Period has expired,  then any
amount  recognized  in excess of the  exercise  price  will be  reportable  as a
long-term  capital gain, and any amount recognized below the exercise price will
be reportable as a long-term  capital loss. The exact amount of tax payable on a
long-term  capital  gain will depend upon the tax rates in effect at the time of
the sale. The ability of a Participant to utilize a long-term  capital loss will
depend upon the Participant's other tax attributes and the statutory limitations
on capital loss deductions not discussed  herein. To the extent that alternative
minimum taxable income was recognized on exercise of the incentive stock option,
the basis in the Common Stock acquired may be higher for determining a long-term
capital gain or loss for alternative minimum tax purposes.

         A "disqualifying disposition" will result if Common Stock acquired upon
the exercise of an  incentive  stock option  (except in the  circumstances  of a
decedent's  incentive  stock option as  described  below) is sold before the ISO
Holding  Period  has  expired.  In such  case,  at the  time of a  disqualifying
disposition  (except  in  the  case  of a  Participant  subject  to  Section  16
restrictions  of the  Exchange  Act,  as  noted  below),  the  Participant  will
recognize  ordinary income in the amount of the difference  between the exercise
price and the lesser of (i) the fair  market  value on the date of  exercise  or
(ii) the amount realized on  disposition.  If the amount realized on the sale is
less than the exercise price,  then the  Participant  will recognize no ordinary
income, and the recognized loss will be reportable as a short-term capital loss.
The  Participant  will report as a short-term  capital gain, as applicable,  any
amount

                                       14

<PAGE>



recognized  in excess of the fair market value on the date of exercise,  and the
Company will be allowed a deduction on its federal income tax return in the year
of the disqualifying  disposition equal to the ordinary income recognized by the
Participant.   To  the  extent  that  alternative  minimum  taxable  income  was
recognized  on exercise of the incentive  stock option,  the basis in the Common
Stock acquired may be higher for  determining a short-term  capital gain or loss
for alternative minimum tax purposes.

         The general  rules  discussed  above are  different if the  Participant
disposes of the shares of Common Stock in a disqualifying disposition in which a
loss,  if  actually  sustained,  would  not be  recognized  by the  Participant.
Examples of these dispositions include gifts or sales to related parties such as
members of the  Participant's  family and  corporations or entities in which the
Participant  owns  a  majority  equity  interest.  In  such  circumstances,  the
Participant would recognize  ordinary income equal to the difference between the
exercise price of the Common Stock and the fair market value of the Common Stock
on the date of exercise.  The amount of ordinary  income would not be limited by
the price at which the Common Stock was actually sold by the Participant.

         If the Participant retires or otherwise terminates  employment with the
Company,  other than by reason of death or permanent  and total  disability,  an
incentive stock option must be exercised within three months of such termination
in order to be eligible for the tax  treatment of the  incentive  stock  options
described  above,  provided the ISO Holding  Period  requirements  are met. If a
Participant  terminates  employment because of a permanent and total disability,
the  incentive  stock  option  will be  eligible  for  such  treatment  if it is
exercised within one year of the date of termination of employment, provided the
ISO Holding Period requirements are met. In the event of a Participant's  death,
the incentive  stock option will be eligible for such  treatment if exercised by
the Participant's legatees,  personal representatives or distributees within one
year  from  the date of  death,  provided  that the  death  occurred  while  the
Participant  was  employed,  within three months of the date of  termination  of
employment or within one year  following the date of  termination  of employment
because of permanent and total disability.

         In general, a Participant to whom a nonqualified option is granted will
recognize  no  taxable  income  at the time of the  grant.  Upon  exercise  of a
nonqualified option, the Participant will recognize ordinary income in an amount
equal to the amount by which the fair  market  value of the Common  Stock on the
date of exercise exceeds the exercise price of the nonqualified  option, and the
Company will generally be entitled to a deduction  equal to the ordinary  income
recognized by the  Participant in the year the participant  recognizes  ordinary
income, subject to the limitations of Section 162(m) of the Code.

         For  purposes  of  the   "alternative   minimum  tax"   applicable   to
individuals,  the exercise of an  incentive  stock option is treated in the same
manner as the exercise of a nonqualified  option.  Thus, a Participant  must, in
the year of option exercise,  include the difference  between the exercise price
and the fair market  value of the stock on the date of  exercise in  alternative
minimum  taxable  income.  The  alternative  minimum  tax  is  imposed  upon  an
individual's  alternative  minimum  taxable  income  currently,  but only to the
extent that such tax exceeds the taxpayer's regular income tax liability for the
taxable year.

         The  Company  is  required  to  withhold   certain  income  taxes  from
Participants  upon  exercises  of  nonqualified  options.  The  Company  will be
entitled  to a business  expense  deduction  for both  financial  statement  and
federal  income tax purposes  equal to the  ordinary  income  recognized  by the
Participant  in the year the  Participant  recognizes  ordinary  income from the
exercise of nonqualified options.


                                       15

<PAGE>



         In addition to the foregoing  federal tax  consequences,  the exercise,
ultimate sale or other disposition of options by Participants will in most cases
be subject to state income taxation.

Vote Required

         Assuming a quorum  consisting  of a majority of all of the  outstanding
shares of Common Stock is present, in person or by proxy, at the Annual Meeting,
the  affirmative  vote of the  holders of a majority of the shares  present,  in
person or by proxy, at the Annual Meeting, is required to approve the 1995 Plan.
If you  abstain or if you hold your  shares in  "street  name" and fail to sign,
date and return the enclosed  proxy card, it will have the same effect as a vote
against this proposal.

         THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO VOTE "FOR" THE
APPROVAL OF THE AMENDED AND RESTATED 1995 STOCK OPTION PLAN. BARBER AND BRONSON,
THE COMPANY'S INVESTMENT ADVISOR, HAS STATED THAT THEY SUPPORT THE BOARD IN THAT
RECOMMENDATION.



                                 PROPOSAL NO. 2
                       TO APPROVE THE AMTECH SYSTEMS, INC.
                              1995 STOCK BONUS PLAN

         At the Annual Meeting,  the Company will seek shareholder  ratification
of the 1995 Stock Bonus Plan (the "Bonus  Plan").  The Bonus Plan was adopted by
the Board of Directors on February 10, 1995. The Board believes that in order to
attract and retain persons of  outstanding  ability as employees of the Company,
provide  increased  incentive for such persons to strive to attain the Company's
long-term goal of increasing  shareholder  value, and to continue to promote the
well being of the  Company,  it is in the best  interests of the Company and its
shareholders   to  provide  such  employees  of  the  Company  with   additional
compensation for services which they have rendered or will render in the future,
through the granting of bonuses in the form of the  Company's  Common Stock (the
"Shares").  THE BOARD OF DIRECTORS  RECOMMENDS  AND ENCOURAGES YOU TO VOTE "FOR"
THE APPROVAL OF THE 1995 STOCK BONUS PLAN.

Reason for Approval

         The  grant of stock  pursuant  to a plan  which  has been  approved  by
shareholders  and  meets  certain  conditions  is exempt  from the  "short-swing
profits"  liability  provisions of Section 16(b) of the  Securities and Exchange
Act of 1934,  as amended  (the  "Act").  Section  16(b)  provides  that upon the
purchase and sale (or sale and  purchase) of the  Company's  Common Stock within
any six month period by a principal  officer,  director or  beneficial  owner of
more than 10% of the  Company's  Common  Stock,  any  "profit"  realized by such
person is recoverable by the Company.  As a result of the  complexities  of this
rule,  Bonus  Recipients may unwittingly  fall within its scope and be forced to
disgorge  gains to the Company,  thereby  frustrating  the  Company's  intent to
provide  incentive  to  officers  and  employees  under  the Bonus  Plan.  Thus,
shareholder  approval  of the Bonus  Plan is sought in order to exempt  from the
liability  provisions  of  Section  16(b)  the  grant of  options  to  principal
officers,  directors and beneficial  owners of 10% of the Company's Common Stock
who are eligible to participate in the Bonus Plan. Unless  shareholder  approval
is  obtained,  Bonuses  granted  under the Bonus  Plan will have less value and,
consequently,  will not provide the incentive to the  recipient  intended by the
Board.


                                       16

<PAGE>



Summary of the Bonus Plan

         The  following  summary  of the  Bonus  Plan  does  not  purport  to be
complete,  and is subject to and  qualified  in its entirety by reference to the
text of the Bonus Plan, which is attached hereto as Exhibit "B."

         Administration.   The  Bonus   Plan  shall  be   administered   by  the
Compensation  and Option  Committee of the  Company's  Board of  Directors.  The
Committee  has full  authority,  subject to the  provisions of the Bonus Plan to
award stock bonuses ("Bonuses").

         Subject to the provisions of the Bonus Plan,  the Committee  determines
in its  discretion,  among other  things,  the persons to whom from time to time
Bonuses may be granted  ("Bonus  Recipients"),  the number of Shares  subject to
each Bonus,  any  restrictions  or  limitations  on such Shares,  including  any
vesting, exchange, deferral, surrender, cancellation, acceleration, termination,
or  forfeiture  provisions  related  to  such  Shares.  The  interpretation  and
construction by the Committee of any provisions of, or the  determination of any
questions arising under, the Bonus Plan or any rule or regulation established by
the Committee pursuant to the Bonus Plan, shall be final, conclusive and binding
on all persons interested in the Bonus Plan.

         Shares  Subject  to the Bonus  Plan.  The  Bonus  Plan  authorizes  the
granting of up to 160,000 shares of the Common Stock, less that number of shares
of Common Stock issued or issuable  pursuant to options  granted  under the 1995
Plan.  Accordingly,  the Bonus Plan and the 1995 Plan effectively share the same
pool of reserved Common Stock. The maximum number of shares of Common Stock that
may be issued under the 1995 Plan and the Bonus Plan is 160,000 shares. In order
to prevent the  dilution or  enlargement  of the rights of the Bonus  Recipients
under the Bonus Plan,  the number of shares of Common  Stock  authorized  by the
Bonus Plan is subject to  adjustment in the event of any increase or decrease in
the  number  of  shares  of  outstanding  Common  Stock  resulting  from a stock
dividend,   stock  split,   combination  of  shares,   merger,   reorganization,
consolidation,  recapitalization  or other  change  in the  corporate  structure
affecting the Company's capital stock.

         Eligibility.  Subject to the provisions of the Bonus Plan,  Bonuses may
be granted to full-time employees of the Company or its subsidiaries. Members of
the Committee  shall not be eligible to be granted  Bonuses during their service
on the Committee.

         Effective  Date and Term of Bonus Plan.  If  approved by the  Company's
shareholders,  the Bonus Plan will be deemed effective on February 10, 1995, the
date on which it was  adopted  by the Board of  Directors.  The Bonus  Plan will
terminate ten (10) years after the effective date of the Bonus Plan,  subject to
earlier  termination by the Board.  No Bonus may be granted under the Bonus Plan
after the termination date.

         Amendments to the Bonus Plan.  The Board may at any time, and from time
to time, amend, modify or terminate any of the provisions of the Bonus Plan, but
no amendment,  modification or termination  shall be made which would impair the
rights of a Bonus Recipient without the Recipient's consent.



                                       17

<PAGE>



Federal Income Tax Consequences

         Under the Bonus Plan,  employees  may be granted a specified  number of
Shares.  However,  vested  rights  to  such  stock  may be  subject  to  certain
restrictions  or may be  conditioned  on the  attainment of certain  performance
goals.  If the  employee  violates  any of the  restrictions  during  the period
specified by the Committee or the  performance  standards  fail to be satisfied,
the Shares may be forfeited.

         A Bonus  Recipient  will  recognize  ordinary  income equal to the fair
market  value of the  Shares at the time the Bonus is  granted,  if there are no
restrictions,  or at the time the restrictions lapse. The Company is entitled to
a tax deduction equal to the amount of income recognized by the recipient in the
year in which the Bonus is granted or the Share restrictions lapse.

         Instead of postponing the income tax consequences of a Bonus, the Bonus
Recipient  may elect to include the fair market value of the Shares in income in
the year the Bonus is granted.  This election is made under Section 83(b) of the
Code.  This Section 83(b)  election is made by filing a written  notice with the
Internal  Revenue Service office with which the Bonus Recipient files his or her
federal income tax return.

         The tax  treatment  of the  subsequent  disposition  of the Shares will
depend upon whether the Bonus  Recipient  has made a Section  83(b)  election to
include the value of the Shares in income when awarded.  If the Bonus  Recipient
makes a Section 83(b)  election,  any  disposition  thereafter  will result in a
capital gain or loss equal to the  difference  between the selling  price of the
Shares  and the fair  market  value of the  Shares  on the date of  grant.  Such
capital  gain or loss will be a long-term  or  short-term  capital  gain or loss
depending  upon the period the Shares are held. If no Section 83(b)  election is
made, any disposition  thereafter will result in a capital gain or loss equal to
the difference between the selling price of the Shares and the fair market value
of the  Shares  on the  date  or  grant  of the  Bonus  or  the  date  that  any
restrictions  lapsed.  Again,  such  capital gain or loss will be a long-term or
short-term capital gain or loss depending upon the period the Shares are held.

         The  Compensation and Option Committee may, as it has done in the past,
afford limited or full tax protection to the Bonus  Recipient by granting a cash
bonus in connection with the Bonus.

Vote Required

         Assuming a quorum  consisting  of a majority of all of the  outstanding
shares of Common Stock is present, in person or by proxy, at the Annual Meeting,
the  affirmative  vote of the  holders of a majority of the shares  present,  in
person or by proxy,  at the Annual  Meeting,  is  required  to approve the Bonus
Plan.  If you  abstain or if you hold your  shares in "street  name" and fail to
sign, date and return the enclosed proxy card, it will have the same effect as a
vote against this proposal.

         THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO VOTE "FOR" THE
APPROVAL  OF THE BONUS  PLAN.  BARBER  AND  BRONSON,  THE  COMPANY'S  INVESTMENT
ADVISOR, HAS STATED THAT THEY SUPPORT THE BOARD IN THAT RECOMMENDATION.



                                       18

<PAGE>



                                 PROPOSAL NO. 3
                       TO APPROVE THE AMTECH SYSTEMS, INC.
                    NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN

         At the Annual Meeting,  the Company will seek shareholder  ratification
of a  Non-Employee  Directors  Stock  Option  Plan (the  "Directors  Plan") that
authorizes  the  issuance of up to 100,000  shares of Common  Stock  pursuant to
option grants. The Directors Plan is intended to provide non-employee  directors
with an incentive to actively  direct and contribute to the Company's  growth by
enabling  them to acquire a proprietary  interest in the Company.  The Company's
Board of Directors  adopted the  Directors  Plan on December  21, 1995,  and has
directed  that the  Directors  Plan be submitted  as a proposal for  Shareholder
adoption at the Annual Meeting. THE BOARD OF DIRECTORS RECOMMENDS AND ENCOURAGES
YOU TO VOTE "FOR" THE APPROVAL OF THE NON- EMPLOYEE DIRECTORS STOCK OPTION PLAN.

Reason for Approval

         The grant of stock  options  pursuant to a plan which has been approved
by  shareholders  and meets certain  conditions is exempt from the  "short-swing
profits"  liability  provisions of Section 16(b) of the  Securities and Exchange
Act of 1934,  as amended  (the  "Act").  Section  16(b)  provides  that upon the
purchase and sale (or sale and  purchase) of the  Company's  Common Stock within
any six month period by a principal  officer,  director or  beneficial  owner of
more than 10% of the  Company's  Common  Stock,  any  "profit"  realized by such
person is recoverable by the Company.  As a result of the  complexities  of this
rule,  directors may unwittingly fall within its scope and be forced to disgorge
gains to the  Company,  thereby  frustrating  the  Company's  intent to  provide
incentive to directors under the Directors Plan. Thus,  shareholder  approval of
the Directors Plan is sought in order to exempt from the liability provisions of
Section 16(b) the grant of options to directors who are eligible to  participate
in the Directors Plan. Unless shareholder approval is obtained,  options granted
under  the  Directors  Plan will have less  value  and,  consequently,  will not
provide the incentive to the recipient intended by the Board.

Summary of the Directors Plan

         The  following  summary of the  Directors  Plan does not  purport to be
complete,  and is subject to and  qualified  in its entirety by reference to the
text of the Directors Plan, which is attached hereto as Exhibit "C."

         Administration.  The  Directors  Plan  shall  be  administered  by  the
Compensation  and Option  Committee of the  Company's  Board of  Directors.  The
interpretation  and  construction  by the Committee of any provisions of, or the
determination of any questions  arising under, the Directors Plan or any rule or
regulation established by the Committee pursuant to the Directors Plan, shall be
final, conclusive and binding on all persons interested in the Directors Plan.

         Shares Subject to the Directors Plan. The Directors Plan authorizes the
granting of Options the exercise of which would allow up to a maximum of 100,000
shares of the Common Stock to be acquired by the  Participants  of said Options.
In  order  to  prevent  the  dilution  or  enlargement  of  the  rights  of  the
Participants  under the  Directors  Plan,  the number of shares of Common  Stock
authorized by the Directors Plan and the number of shares subject to outstanding
options are subject to  adjustment  in the event of any  increase or decrease in
the  number  of  shares  of  outstanding  Common  Stock  resulting  from a stock
dividend,   stock  split,   combination  of  shares,   merger,   reorganization,
consolidation,  recapitalization  or other  change  in the  corporate  structure
affecting the Company's capital stock. If any

                                       19

<PAGE>



Option granted under the Directors  Plan is forfeited or terminated,  the shares
of Common Stock that were  underlying  such Option shall again be available  for
distribution in connection with Options subsequently granted under the Directors
Plan.

         Effective Date and Term of Directors Plan. If approved by the Company's
shareholders,  the Directors Plan will be deemed effective on December 21, 1995,
the date on which it was  adopted  by the Board of  Directors.  No option may be
granted  after  December 21, 2005.  The Directors  Plan will  terminate ten (10)
years  after the  effective  date of the  Directors  Plan,  subject  to  earlier
termination  by the Board.  No Option may be granted  under the  Directors  Plan
after the  termination  date, but Options  previously  granted may extend beyond
such date.

         Nature   of   Options.    The   Directors   Plan   provides   for   the
non-discretionary   grant  of  nonstatutory   stock  options  to  the  Company's
non-employee  directors.  Each  non-employee  director  who  joins  the Board of
Directors  after  December  21, 1995,  will  receive an option to acquire  6,000
shares of the Company's Common Stock. In addition to the foregoing option grant,
a grant of options to purchase  3,000 shares of the Company's  Common Stock will
be made  annually  to each  non-employee  director  on the  first  business  day
following the Company's Annual Meeting of Shareholders each year,  commencing in
January  1997;  provided  that such  director  has  attended at least 75% of the
meetings of the Board of  Directors  and of the Board  Committees  of which such
non-employee director was a member in the preceding fiscal year.

         Exercise of Options.  Pursuant to the terms of the Directors Plan, each
option granted will vest one-third on the first anniversary of the option grant,
an additional  one-third on the second  anniversary  of the option grant and the
remaining  one-third on the third anniversary of the option grant,  provided the
optionee remains an Eligible Director (as defined in the Directors Plan) at such
vesting  dates.  Accordingly,  each option grant will be vested and  exercisable
with respect to the 33-1/3% of the underlying shares on the first anniversary of
the date of grant,  66-2/3% of the underlying shares on the second  anniversary,
and 100% of the underlying shares on the third  anniversary.  The exercise price
of all options granted under the Directors Plan will be the Fair Market Value of
the  Company's  Common Stock on the grant date.  All options  granted  under the
Directors  Plan will  expire ten (10) years from the date of grant.  Options are
not   transferrable   other  than  by  will,  under  the  laws  of  descent  and
distribution,  or pursuant to a qualified  domestic  relations  order,  and each
option is exercisable  during the lifetime of the optionee only by the optionee.
Unexercised  options terminate one year from the date an individual ceases to be
a director of the Company due to death or disability  and thirty (30) days after
an individual ceases to be a director for any other reason.

         Agreements.  Options granted under the Directors Plan will be evidenced
by agreements  consistent  with the Directors Plan in such form as the Committee
may prescribe.

         Amendments to the Directors  Plan.  The Board may at any time, and from
time to time, amend,  modify or terminate any of the provisions of the Directors
Plan, but no amendment,  modification  or termination  shall be made which would
impair the rights of a Participant under any agreement  theretofore entered into
pursuant to an Option grant, without the Participant's consent.

         Outstanding Options.  Presently, there are no outstanding options under
the Directors Plan.



                                       20

<PAGE>



Federal Income Tax Consequences for Nonstatutory Stock Options

         The Directors Plan will not be a "qualified plan" as defined in Section
401(a)  of  the  Internal  Revenue  Code  of  1986,  as  amended  (the  "Code").
Nonstatutory  stock options ("NSOs") do not qualify as "incentive stock options"
under Section 422 of the Code.

         An Optionee does not realize any compensation  income upon the grant of
an NSO.  Additionally,  the Company may not take a tax  deduction at the time of
the grant.  Upon  exercise of an NSO, an  Optionee  realizes  and must report as
compensation income in an amount equal to the difference between the fair market
value of the Common Stock on the date of exercise and the  exercise  price.  The
Company is entitled to take a deduction  at the same time and in the same amount
as the Optionee reports as compensation  income,  provided the Company withholds
federal  income  tax  in  accordance  with  the  Code  and  applicable  Treasury
regulations.

         Special rules apply with respect to shares of Common Stock  transferred
directly to or acquired  upon  exercise of an NSO by a director  pursuant to the
"short-swing  profits"  provisions of the  Securities  Exchange Act of 1934 (the
"Exchange Act").  With respect to Common Stock acquired by an Insider,  the date
six (6) months after the date of exercise of an option is generally the relevant
date for determining when the Insider recognizes compensation income, the amount
of such compensation  income (and the Company's  corresponding  deduction),  for
establishing  the Insider's basis in the shares of Common Stock acquired and the
start of the  holding  period of such  shares for tax  purposes.  An Insider may
elect to accelerate  the  recognition of income under Section 83(b) of the Code.
Such an  election  must be made  within  thirty  (30) days after  exercise of an
Option and results in the  inclusion  of the excess of the fair market  value of
the Common Stock at exercise over the exercise price of the option in income.

         When an Optionee  disposes of the shares of Common Stock  received upon
exercise of an NSO,  he or she will  realize  capital  gain income if the amount
realized  on the  sale  exceeds  the  Optionee's  basis  in the  shares.  If the
Optionee's  basis in the shares  exceeds the amount  realized  on the sale,  the
Optionee will realize a capital loss. An Optionee's basis in the optioned shares
is equal to the exercise price plus any additional  compensation income realized
by the Optionee upon exercise of the option.  A disposition  of shares of Common
Stock  which  results  in a net  long-term  capital  gain  will be  taxed at the
ordinary  income rate (but not at a rate in excess of 28%).  Capital  losses are
currently  deductible  for  individuals  to the extent of capital  gains plus an
amount not exceeding $3,000 ($1,500 for married  individuals filing separately).
There  is no tax  impact  to the  Company  upon  the  sale of the  shares  by an
Optionee.

         In addition to the foregoing federal tax  considerations,  the exercise
of an Option and the ultimate sale or other  disposition of the shares of Common
Stock acquired thereby will in most cases be subject to state income taxation.

Vote Required

         Assuming a quorum  consisting  of a majority of all of the  outstanding
shares of Common Stock is present, in person or by proxy, at the Annual Meeting,
the  affirmative  vote of the  holders of a majority of the shares  present,  in
person or by proxy, at the Annual Meeting,  is required to approve the Directors
Plan.  If you  abstain or if you hold your  shares in "street  name" and fail to
sign, date and return the enclosed proxy card, it will have the same effect as a
vote against this proposal.


                                       21

<PAGE>



         THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO VOTE "FOR" THE
APPROVAL OF THE  NON-EMPLOYEE  DIRECTORS STOCK OPTION PLAN.  BARBER AND BRONSON,
THE COMPANY'S INVESTMENT ADVISOR, HAS STATED THAT THEY SUPPORT THE BOARD IN THAT
RECOMMENDATION.


                                  OTHER MATTERS

Independent Auditors

         Arthur  Andersen LLP, has been  selected as the  Company's  independent
auditors for the current fiscal year,  which ends September 30, 1996.  That firm
has served as the Company's  independent  auditors since 1983. During the fiscal
year ended  September 30, 1995,  Arthur  Andersen LLP provided audit services to
the  Company.  Representatives  of that firm are  expected  to be present at the
Annual Meeting with the  opportunity to make a statement if they desire to do so
and to be available to respond to appropriate questions.

Annual Report

         The Annual  Report of the Company  for the fiscal year ended  September
30, 1995, is enclosed herewith.

Shareholder Proposals for Action At the Company's Next Annual Meeting

         Any  shareholder  who wishes to present any  proposal  for  shareholder
action at the  Company's  next Annual  Meeting,  expected to be held on or about
March 1, 1997,  must be received by the  Company's  Secretary,  at the Company's
offices,  not later than  November  15,  1996,  in order to be  included  in the
Company's proxy statement and form of proxy for that meeting.

                                              BY ORDER OF THE BOARD OF DIRECTORS



                                              Robert T. Hass, Secretary

Tempe, Arizona
January 29, 1996


                                       22
<PAGE>

                                   EXHIBIT "A"

                              AMTECH SYSTEMS, INC.

                              AMENDED AND RESTATED
                             1995 STOCK OPTION PLAN


         Purpose of the Plan.  The purposes of this  Amended and  Restated  1995
         -------------------
Stock Option Plan are to advance the  interests  of Amtech  Systems,  Inc.  (the
"Company") by inducing persons of outstanding  ability and potential to join and
remain with the Company,  by encouraging,  motivating and enabling  employees to
acquire  stock  ownership in the Company,  and by  providing  the  participating
employees  with an  additional  incentive  to promote the success of the Company
through the grant of options to purchase  shares of the Company's  Common Stock.
Options granted hereunder may be either "Incentive Stock Options," as defined in
Section 422 of the Internal  Revenue Code or 1986, as amended,  or "Nonstatutory
Stock  Options," at the discretion of the Board or a Committee  appointed by the
Board and as reflected  in the terms of the written  option  agreement  ("Option
Agreement").

         1. Definitions.  As used herein, the following definitions shall apply:
            -----------

                   (a) "Board"  shall mean the Board of Directors of the Company
                        -----
or the Committee, if one has been appointed.

                   (b) "Code" shall mean the Internal  Revenue Code of 1986,  as
                        ----
amended, and the rules and regulations promulgated thereunder.

                   (c) "Common Stock" shall mean the common stock of the Company
                        ------------
described in the Company's Certificate of Incorporation, as amended.

                   (d)  "Company"  shall mean Amtech  Systems,  Inc., a Delaware
                         -------
corporation,  and shall  include  any parent or  subsidiary  corporation  of the
Company as defined in Sections 424(e) and (f), respectively, of the Code.

                   (e)  "Committee"  shall mean the  Committee  appointed by the
                         ---------
Board in  accordance  with  paragraph  (a) of  Section 4 of the Plan,  if one is
appointed.

                   (f) "Employee" shall mean any person,  including officers and
                        --------
directors,  employed  by the  Company.  The payment of a  director's  fee by the
Company shall not be sufficient to constitute "employment" by the Company.

                   (g) "Exchange Act" shall mean the Securities and Exchange Act
                        ------------
of 1934, as amended.

                   (h) "Fair Market Value" shall mean,  with respect to the date
                        -----------------
a given Option is granted or exercised, the value of the Common Stock determined
by the Board or the  Committee in such manner as it may deem  equitable for Plan
purposes but, in the case of an Incentive Stock Option, no less than is required
by applicable  laws or  regulations;  provided,  however,  that where there is a
public market for the Common Stock, the Fair Market Value per Share shall be the
average of the bid and asked

                                        1

<PAGE>



prices  of the  Common  Stock on the date of grant if the  Common  Stock is then
included for quotation on the NASDAQ  SmallCap  Market or, the Fair Market Value
per Share shall be the closing  price of the Common Stock if the Common Stock is
then included on the NASDAQ National Market or listed on the New York,  American
or Pacific Stock Exchange.  The Board or a Committee  appointed by the Board may
rely upon  published  quotations  in The Wall  Street  Journal  or a  comparable
                                     -------------------------   
publication  for purposes of the  calculation of the Fair Market Value per Share
as set forth above.

                   (i)  "Incentive  Stock  Option" shall mean an Option which is
                         ------------------------
intended to qualify as an incentive  stock option  within the meaning of Section
422 of the Code.

                   (j)  "Option"  shall mean a stock  option  granted  under the
                         ------
Plan.

                   (k)  "Optioned  Stock" shall mean the Common Stock subject to
                         ---------------
an Option.

                   (l) "Optionee"  shall mean an Employee of the Company who has
                        --------
been granted one or more Options.

                   (m) "Parent" shall mean a "parent  corporation,"  whether now
                        ------
or hereafter existing, as defined in Section 424(e) of the Code.

                   (n) "Plan" shall mean this Stock Option Plan.
                        ----

                   (o)  "Share"  shall  mean a share  of the  Common  Stock,  as
                         -----
adjusted in accordance with Section 11 of the Plan.

                   (p)  "Subsidiary"  shall  mean  a  "subsidiary  corporation,"
                         ----------
whether now or hereafter existing, as defined in Section 424(f) of the Code.

                   (q) "Tax Date" shall mean the date an Optionee is required to
                        --------
pay the  Company  an amount  with  respect  to tax  withholding  obligations  in
connection with the exercise of an option.

         2.  Common  Stock  Subject to the Plan.  Subject to the  provisions  of
             ----------------------------------
Section 11 of the Plan,  the  maximum  aggregate  number of shares  which may be
optioned and sold under the Plan is 160,000  Shares of Common Stock.  The Shares
may be authorized,  but unissued,  or previously issued Shares acquired or to be
acquired by the Company and held in treasury.

                  If an Option  should  expire or become  unexercisable  for any
reason without having been exercised in full, the unpurchased  Shares covered by
such Option shall, unless the Plan shall have been terminated,  be available for
future grants of Options.

         3.  Administration of the Plan.
             --------------------------

                  (a)      Procedure.
                           ---------

                          (1)  The Plan  shall be  administered  by the Board in
accordance  with  Securities and Exchange  Commission Rule 16b-3 ("Rule 16b-3");
provided, however, that the Board may appoint a Committee to administer the Plan
at any time or from time to time and, provided  further,  that if members of the
Board are not "disinterested" within the meaning of Securities and Exchange

                                        2

<PAGE>



Commission Rule 16b-3,  then any  participation by directors in the Plan must be
administered by a Committee appointed by the Board.

                          (2)  The  Committee  shall consist of at least two (2)
members  of the Board,  each of whom is  "disinterested"  within the  meaning of
Securities and Exchange  Commission  Rule 16b-3 to administer the Plan on behalf
of the Board,  subject to such terms and  conditions as the Board may prescribe.
Once appointed,  the Committee shall continue to serve until otherwise  directed
by the Board. From time to time the Board may increase the size of the Committee
and appoint additional members thereof,  remove members (with or without cause),
and appoint new members in substitution therefor, fill vacancies however caused,
or remove all members of the Committee and  thereafter  directly  administer the
Plan;  provided,  however,  that  at  no  time  may  any  director  who  is  not
"disinterested"  within the meaning of Securities and Exchange  Commission  Rule
16b-3 serve on the  Committee nor shall a Committee of less than two (2) members
administer the Plan.

                  (b) Powers of the  Board.  Subject  to the  provisions  of the
                      --------------------
Plan, the Board or a Committee  appointed by the Board shall have the authority,
in its  discretion:  (i) to grant  Incentive  Stock Options,  in accordance with
Section 422 of the Code,  and to grant  "nonstatutory  stock  options;"  (ii) to
determine,  upon review of relevant information and in accordance with Section 2
of the Plan,  the Fair Market Value of the Common Stock;  (iii) to determine the
exercise price per Share of Options to be granted, which exercise price shall be
determined  in accordance  with Section 8(a) of the Plan;  (iv) to determine the
Employees to whom,  and the time or times at which  Options shall be granted and
the number of shares to be  represented  by each Option;  (v) to  interpret  the
Plan; (vi) to prescribe, amend and rescind rules and regulations relating to the
Plan;  (vii) to determine the terms and provisions of each Option granted (which
need not be identical) and, with the consent of the Optionee thereof,  modify or
amend  each  Option;  (viii) to  accelerate  or defer  (with the  consent of the
Optionee)  the  exercise  date of any Option;  (ix) to  authorize  any person to
execute on behalf of the Company any instrument required to effectuate the grant
of an Option  previously  granted by the Board or a Committee  appointed  by the
Board;  (x) to accept or reject the  election  made by an  Optionee  pursuant to
Section  18 of the  Plan;  and  (xi) to make  all  other  determinations  deemed
necessary or advisable for the administration of the Plan.

                  (c) Effect of Board's Decision. All decisions,  determinations
                      --------------------------
and interpretations of the Board or a Committee appointed by the Board, shall be
final and binding on all Optionees and any other holders of any Options  granted
under the Plan.

         4.  Eligibility.
             -----------

                  (a)  Consistent  with  the  Plan's  purposes,  Options  may be
granted  only to  Employees  of the  Company  as  determined  by the  Board or a
Committee  appointed  by the Board.  An Employee  who has been granted an Option
may, if he is otherwise  eligible,  be granted an additional  Option or Options.
Incentive  Stock  Options may be granted  only to those  Employees  who meet the
requirements applicable under Section 422 of the Code.

                  (b) With respect to Incentive  Stock Options granted under the
Plan,  the  aggregate  fair market value  (determined  at the time the Incentive
Stock  Option is granted) of the Common  Stock with  respect to which  Incentive
Stock  Options are  exercisable  for the first time by the  employee  during any
calendar  year  (under all plans of the  Company  and its parent and  subsidiary
corporations) shall not exceed One Hundred Thousand Dollars ($100,000).


                                        3

<PAGE>



                  The Plan shall not  confer  upon any  Optionee  any right with
respect to continuation  of employment with the Company,  nor shall it interfere
in any way with his right or the Company's  right to terminate his employment at
any time.

         5.  Effective  Date.  The Plan shall take effect on July 10, 1995,  the
             ---------------
date on which the Board  approved the Plan.  No Option may be granted after July
10, 2005 (ten years from the  effective  date of the Plan);  provided,  however,
that the Plan and all  outstanding  Options  shall  remain in effect  until such
Options  have  expired or until such  Options  are  canceled.  The Plan shall be
submitted for  shareholder  approval at the next meeting of  shareholders of the
Company;  provided,  however,  that  failure to obtain such  approval  shall not
affect the effectiveness of the Plan.

         6. Term of Option.  Unless otherwise  provided in the Option Agreement,
            --------------
the term of each Incentive Stock Option shall be ten (10) years from the date of
grant thereof.  Unless otherwise  provided in the Option Agreement,  the term of
each Option  which is not an  Incentive  Stock Option shall be eleven (11) years
from the date of grant.  Notwithstanding  the above, in the case of an Incentive
Stock Option granted to an Employee who, at the time the Incentive  Stock Option
is granted, owns ten percent (10%) or more of the Common Stock as such amount is
calculated under Section 422(b)(6) of the Code ("Ten Percent Shareholder"),  the
term of the  Incentive  Stock  Option  shall be five (5) years  from the date of
grant thereof or such shorter time as may be provided in the Option Agreement.

         7. Exercise Price and Payment.
            --------------------------

                  (a)  Exercise  Price.  The per  Share  exercise  price for the
                       ---------------
Shares to be issued pursuant to exercise of an Option shall be determined by the
Board or a Committee  appointed  by the Board,  but in the case of an  Incentive
Stock Option shall be no less than one hundred percent (100%) of the Fair Market
Value per Share on the date of grant; provided,  further, that in the case of an
Incentive  Stock Option  granted to an Employee who, at the time of the grant of
such  Incentive  Stock  Option,  is a Ten  Percent  Shareholder,  the per  Share
exercise  price shall be no less than one hundred ten percent (110%) of the Fair
Market Value per Share on the date of grant.  In no event may the exercise price
in the case of a nonstatutory stock option be less than eighty-five (85%) of the
Fair Market Value per share on the date of grant.

                          The  Company  will pay any  documentary  stamp  taxes,
handling or certificate  issuance fees  attributable to the initial  issuance of
shares of Common Stock upon the exercise of any Option under the Plan; provided,
however,  that the Company  shall not be required to pay any fees or taxes which
may be payable with respect to any transfer involved in the issuance or delivery
of any  certificates  for  shares in a name  other than that of the holder of an
Option.

                  (b) Payment.  The price of an  exercised  Option and any taxes
                      -------
attributable to the delivery of Common Stock under the Plan, or portion thereof,
shall be paid:

                           (1) In  United  States  dollars  in cash or by check,
bank draft or money order payable to the order of the Company; or

                           (2) At the  discretion  of the  Board or a  Committee
appointed by the Board,  through the delivery of shares of Common Stock, with an
aggregate Fair Market Value, equal to the option price; or


                                        4

<PAGE>



                           (3) By a combination of (1) and (2) above.

                  The  Board  or  a  Committee  appointed  by  the  Board  shall
determine acceptable methods for tendering Common Stock as payment upon exercise
of an Option and may impose  such  limitations  and  prohibitions  on the use of
Common  Stock to exercise  an Option as it deems  appropriate,  with  respect to
nonstatutory  options,  at the election of the Optionee  pursuant to Section 18,
the Company may satisfy its withholding  obligations by retaining such number of
shares of Common Stock subject to the  exercised  Option which have an aggregate
Fair Market value on the exercise date equal to the Company's aggregate federal,
state,  local and foreign tax  withholding  and FICA and FUTA  obligations  with
respect to income generated by the exercise of the Option by Optionee.

         8.  Exercise of Option.
             ------------------

                  (a)  Procedure  for  Exercise;  Rights as a  Shareholder.  Any
                       ---------------------------------------------------
Option  granted  hereunder  shall be  exercisable  at such  times and under such
conditions  as  determined  by the Board or a Committee  appointed by the Board,
including  performance criteria with respect to the Company and/or the Optionee,
and as shall be  permissible  under  the  terms of the  Plan.  Unless  otherwise
determined  by the Board or a  Committee  appointed  by the Board at the time of
grant,  an Option may be exercised  in whole or in part,  but in no case may any
option be exercised as to less than One Hundred (100) shares at any one time (or
the  remaining  shares  covered  by the  option if less than One  Hundred  (100)
shares)). An Option may not be exercised for a fraction of a Share.

                           An  Option  shall  be  deemed  to be  exercised  when
written  notice of such  exercise has been given to the Company at its principal
office to the attention of the  Secretary of the Company in accordance  with the
terms of the  Option by the  person  entitled  to  exercise  the Option and full
payment for the Shares with  respect to which the Option is  exercised  has been
received by the  Company.  Full  payment  may, as  authorized  by the Board or a
Committee  appointed by the Board,  consist of any  consideration  and method of
payment  allowable  under  Section  8(b) of the  Plan.  Until the  issuance  (as
evidenced  by the  appropriate  entry on the books of the  Company  or of a duly
authorized  transfer agent of the Company) of the stock  certificate  evidencing
such  Shares,  no right to vote or receive  dividends  or any other  rights as a
shareholder shall exist with respect to the Optioned Stock,  notwithstanding the
exercise of the Option. No adjustment will be made for a dividend or other right
for which the record date is prior to the date the stock  certificate is issued,
except as provided in Section 11 of the Plan.

                           Exercise of an Option in any manner shall result in a
decrease in the number of Shares which  thereafter  may be  available,  both for
purposes of the Plan and for sale under the Option by the number of Shares as to
which the Option is exercised.

                           Notwithstanding  anything  contained  in this Plan to
the  contrary,  the Board or a Committee  appointed  by the Board may  establish
certain  restrictions  on the times at which an Option may be exercised  after a
number of elapsed years together with cumulative  exercise rights and may retain
certain rights with respect to a fixed  repurchase price for the Option Stock if
the Employee  voluntarily  terminates his  employment  with the Company within a
certain  period of time  after  exercising  the  Option or whose  employment  is
involuntarily  terminated  for gross  misconduct,  fraud,  embezzlement,  theft,
breach  of any  fiduciary  duty owed to the  Company  or for  nonperformance  of
duties.


                                        5

<PAGE>



                  (b)      Termination of Status as an Employee.
                           ------------------------------------

                           (1)  Termination  of  Employment.   Unless  otherwise
                                ---------------------------
provided in an Option  Agreement  relating to an Option that is not an Incentive
Stock Option, if an Employee's employment by the Company is terminated,  whether
voluntary or for cause,  except if such  termination  occurs due to  retirement,
death or disability, the Option, to the extent not exercised, shall cease on the
date on which Employee's  employment by the Company is terminated.  For purposes
of this Section 9, an employee who leaves the employ of the Company to become an
employee of a subsidiary or parent  corporation  of the Company or a corporation
which  has  assumed  the  option  of the  Company  as a  result  of a  corporate
reorganization, etc., shall not be considered to have terminated his employment.
For purposes of this Section 9, the  employment  relationship  of an employee or
the Company or of a  subsidiary  corporation  of the Company  will be treated as
continuing intact while he is on military or sick leave or other bona fide leave
of absence (such as temporary  employment by the  government) if such leave does
not exceed ninety (90) days, or, if longer, so long as his right to reemployment
is guaranteed either by statute or by contract.

                           (2)  Retirement.   For  purposes  of  the  Plan,  the
                                ----------
retirement of an  individual  either  pursuant to a pension or  retirement  plan
adopted by the Company or at the normal  retirement date prescribed from time to
time by the Company,  shall be deemed to be a termination  of such  individual's
employment  other than voluntary or for cause.  If an Employee's  termination is
due to retirement, then the Employee may, but only within ninety (90) days after
the date he ceases to be an Employee of the Company,  exercise his Option to the
extent that he was entitled to exercise it at the date of such  termination.  To
the extent that he was not  entitled to exercise  the Option at the date of such
termination,  or if he does not exercise  such Option  (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.

                           (3)  Disability.  Unless  otherwise  provided  in  an
                                ----------
Option  Agreement  relating to an Option that is not an Incentive  Stock Option,
notwithstanding  the provisions of Section 9(b) above,  in the event an Employee
is  unable  to  continue  his  employment  with the  Company  as a result of his
permanent and total  disability (as defined in Section 22(e)(3) of the Code), he
may,  but only within one (1) year from the date of  termination,  exercise  his
Option  to the  extent  he was  entitled  to  exercise  it at the  date  of such
termination.  To the extent that he was not  entitled to exercise  the Option at
the date of  termination,  or if he does not exercise  such Option (which he was
entitled  to  exercise)  within the time  specified  herein,  the  Option  shall
terminate.

                           (4) Death of Optionee.  Unless otherwise  provided in
                               -----------------
an Option Agreement relating to an Option that is not an Incentive Stock Option,
if  Optionee  dies during the term of the Option and is at the time of his death
an  Employee  of the  Company  who shall  have been in  continuous  status as an
Employee  since the date of grant of the Option,  the Option may be exercised at
any time within one (1) year  following  the date of death (or such other period
of time as is determined by the Board or a Committee appointed by the Board), by
the  Optionee's  estate or by a person who  acquired  the right to exercise  the
Option by  bequest or  inheritance,  but only to the extent  that  Optionee  was
entitled  to  exercise  the  Option on the date of  death.  To the  extent  that
decedent was not entitled to exercise the Option on the date of death, or if the
Optionee's  estate,  or person who  acquired the right to exercise the Option by
bequest or inheritance,  does not exercise such Option (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.


                                        6

<PAGE>



         9.  Non-Transferability  of Option. An Option may not be sold, pledged,
             -------------------
assigned, hypothecated,  transferred, or disposed of in any manner other than by
will or by the laws of descent or distribution and may be exercised,  during the
lifetime of the Optionee, only by the Optionee.

         10.  Adjustments Upon Changes in Capitalization  or Merger.  Subject to
              -----------------------------------------------------
any required action by the shareholders of the Company,  the number of shares of
Common Stock  covered by each  outstanding  Option,  and the number of shares of
Common Stock which have been  authorized  for issuance  under the Plan but as to
which no Options have yet been  granted or which have been  returned to the Plan
upon cancellations or expiration of an Option, as well as the price per share of
Common Stock covered by each such outstanding  Option,  shall be proportionately
adjusted for any  increase or decrease in the number of issued  shares of Common
Stock  resulting  from a stock  split,  reverse  stock  split,  stock  dividend,
combination or  reclassification  of the common stock,  or any other increase or
decrease in the number of issued shares of Common Stock effected without receipt
of  consideration  by the Company;  provided,  however,  that  conversion of any
convertible securities of the Company shall not be deemed to have been "effected
without receipt of consideration." Such adjustment shall be made by the Board or
a Committee appointed by the Board, whose determination in that respect shall be
final, binding and conclusive.  Except as expressly provided herein, no issuance
by the Company of shares of stock of any class, or securities  convertible  into
shares of stock of any class shall affect,  and no adjustment by reason thereof,
shall be made with  respect  to the  number  or price of shares of Common  Stock
subject to an Option.

                  In the event of the proposed dissolution or liquidation of the
Company, the Option will terminate immediately prior to the consummation of such
proposed action, unless otherwise provided by the Board or a Committee appointed
by the  Board.  The Board or a  Committee  appointed  by the Board  may,  in the
exercise of its sole discretion in such instances, declare that any Option shall
terminate as of a date fixed by the Board or a Committee  appointed by the Board
and give each Optionee the right to exercise his Option as to all or any part of
the Optioned Stock,  including Shares as to which the Option would not otherwise
be exercisable.  In the event of a proposed sale of all or substantially  all of
the assets of the  Company,  or the merger of the Company  with or into  another
corporation,  the  Option  shall be  assumed or an  equivalent  option  shall be
substituted  by such  successor  corporation  or a parent or  subsidiary of such
successor  corporation,  unless the Board or a Committee  appointed by the Board
determines,  in the  exercise  of  its  sole  discretion  and in  lieu  of  such
assumption or  substitution,  that the Optionee shall have the right to exercise
the Option as to all of the  Optioned  Stock,  including  Shares as to which the
Option would not otherwise be exercisable. If the Board or a Committee appointed
by the  Board  makes  an  Option  fully  exercisable  in lieu of  assumption  or
substitution  in the  event  of a  merger  or sale of  assets,  the  Board  or a
Committee appointed by the Board shall notify the Optionee that the Option shall
be fully  exercisable  for a period  of  thirty  (30) days from the date of such
notice (but not later than the  expiration  of the term of the Option  under the
Option  Agreement),  and the Option will  terminate  upon the expiration of such
period.

         11. Time of Granting Options. The date of grant of an Option shall, for
             ------------------------
all  purposes,  be the date on which the Board or a Committee  appointed  by the
Board makes the determination  granting such Option. Notice of the determination
shall  be  given to each  Employee  to whom an  Option  is so  granted  within a
reasonable time after the date of such grant.


                                        7

<PAGE>



         12.      Amendment and Termination of the Plan.
                  -------------------------------------

                  (a)  Amendment  and  Termination.   The  Board  may  amend  or
                       ---------------------------
terminate  the Plan  from  time to time in such  respect  as the  Board may deem
advisable;  provided,  however, that the following revisions or amendments shall
require  approval of the holders of a majority of the outstanding  Shares of the
Company entitled to vote:

                         (1)  Any  increase  in the number of Shares  subject to
the Plan,  other than in connection  with an adjustment  under Section 11 of the
Plan;

                         (2)  Any  change  in the  designation  of the  class of
employees eligible to be granted Options; or

                         (3)  If the  Company  has a class  of  equity  security
registered  under Section 12 of the Exchange Act at the time of such revision or
amendment,  any material increase in the benefits accruing to participants under
the Plan.

                  (b)  Effect of Amendment or Termination. Any such amendment or
                       ----------------------------------
termination  of the Plan  shall not  affect  Options  already  granted  and such
Options  shall  remain  in full  force  and  effect as if this Plan had not been
amended or terminated, unless mutually agreed otherwise between the Optionee and
the Board, which agreement must be in writing and signed by the Optionee and the
Company.

         13.  Conditions  Upon  Issuance of Shares.  Shares  shall not be issued
              ------------------------------------
pursuant to the  exercise of an Optionee  unless the exercise of such Option and
the issuance and delivery of such Shares pursuant  thereto shall comply with all
relevant provisions of law, including, without limitation, the Securities Act of
1933,  as amended,  the  Exchange  Act,  the rules and  regulations  promulgated
thereunder, and the requirements of any stock exchange upon which the Shares may
then be listed,  and shall be further subject to the approval of counsel for the
Company with respect to such compliance.

                  As a condition to the  exercise of an Option,  the Company may
require the person  exercising  such Option to represent and warrant at the time
of any such exercise that the Shares are being purchased only for investment and
without  any  present  intention  to sell or  distribute  such Shares if, in the
opinion of counsel for the Company,  such a representation is required by any of
the aforementioned relevant provisions of law.

                  In the case of an  Incentive  Stock  Option,  any Optionee who
disposes of Shares of Common Stock acquired on the exercise of an Option by sale
or exchange  (a) either  within two (2) years after the date of the grant of the
Option  under  which the Common  Stock was  acquired  or (b) within one (1) year
after the acquisition of such Shares of Common Stock shall notify the Company of
such disposition and of the amount realized upon such disposition.

                  Stock  certificates  evidencing  unregistered  shares acquired
upon  the  exercise  of  Options  shall  bear a  restrictive  securities  legend
substantially as follows:

                  "THE SHARES REPRESENTED BY THIS CERTIFICATE HAVE NOT BEEN
                  REGISTERED UNDER THE SECURITIES ACT OF 1933, AS AMENDED,
                  OR UNDER THE SECURITIES LAWS OF ANY STATE OR OTHER

                                        8

<PAGE>



                  JURISDICTION.  THE  SECURITIES  MAY NOT BE SOLD OR OFFERED FOR
                  SALE IN THE ABSENCE OF AN EFFECTIVE REGISTRATION STATEMENT FOR
                  THE  SECURITIES  UNDER THE SECURITIES ACT OF 1933, AS AMENDED,
                  AND  APPLICABLE   SECURITIES   LAWS  OF  ANY  STATE  OR  OTHER
                  JURISDICTION,  OR AN OPINION OF  COUNSEL  SATISFACTORY  TO THE
                  COMPANY THAT SUCH REGISTRATION IS NOT REQUIRED."

         14.  Change in Control.  Each Option that is  outstanding  on a Control
              -----------------
Change Date, as hereinafter defined, shall be exercisable in whole or in part on
that date and thereafter during the remainder of the Option period stated in the
Option Agreement. A "Change in Control" occurs if, after the date of the initial
Agreement, (1) any person, including a "group" as defined in Section 13(d)(3) of
the  Exchange  Act,  becomes  the  owner or  beneficial  owner of the  Company's
securities  having  20% or  more  of  the  combined  voting  power  of the  then
outstanding  Company's  securities  that  may be cast  for the  election  of the
Company's  directors  (other  than as a  result  of an  issuance  of  securities
initiated  by the  Company,  or open market  purchases  approved by the Board of
Directors  as long  as a  majority  of the  Board  of  Directors  approving  the
purchases is in the majority at the time the purchases are made);  or (2) as the
direct or indirect  result of, or in connection  with, a cash tender or exchange
offer, a merger or other  business  combination,  a sale of assets,  a contested
election,  or any  combination  of  these  transactions,  the  persons  who were
directors  of the  Company  before  such  transactions  ceased to  constitute  a
majority of the Company's  Board of Directors or any successor's  board,  within
two years of the last of such  transactions.  For purposes of this Section,  the
"Control  Change  Date" is the date on  which an event  described  in (1) or (2)
occurs.  If a Change of Control  occurs on account of a series of  transactions,
the Control Change Date is the date of the last of such transactions.

         15.  Reservation of Shares;  Issuance and Sale of Shares.  The Company,
              ---------------------------------------------------
during the term of this Plan,  will at all times reserve and keep available such
number of Shares as shall be sufficient to satisfy the requirements of the Plan.
Inability of the Company to obtain  authority  from any  regulatory  body having
jurisdiction, which authority is deemed by the Company's counsel to be necessary
to the lawful  issuance  and sale of any Shares  hereunder,  shall  relieve  the
Company of any  liability in respect of the failure to issue or sell such Shares
as to which such requisite authority shall not have been obtained.

         16.  Option  Agreement.  Options  shall be evidenced by written  option
              -----------------
agreements in such form as the Board shall approve.

         17. Withholding Taxes. Subject to Section 4(b)(x) of the Plan and prior
             -----------------
to the Tax Date,  the  Optionee  may make an  irrevocable  election  to have the
Company  withhold  from those Shares that would  otherwise be received  upon the
exercise of any  nonstatutory  stock  option,  a number of Shares  having a Fair
Market  Value equal to the minimum  amount  necessary  to satisfy the  Company's
federal,  state, local and foreign tax withholding obligations and FICA and FUTA
obligations with respect to the exercise of such Option by the Optionee.

                  An Optionee  who is also an officer of the  Company  must make
the above-described election:

                  (a) at least six months  after the date of grant of the Option
(except in the event of death or disability); and


                                        9

<PAGE>

                  (b) either:

                           (1) six months prior to the Tax Date, or

                           (2)  prior  to the Tax  Date and  during  the  period
beginning on the third  business day following the date of the Company  releases
its  quarterly  or annual  statement  of sales and  earnings  and  ending on the
twelfth business day following such date.

         18.      Miscellaneous Provisions.
                  ------------------------

                  (a) Not a Contract of  Employment.  Nothing  contained  in the
                      -----------------------------
Plan or in any Option Agreement executed pursuant to the Plan shall be deemed to
confer upon any individual to whom an Option may be granted  hereunder any right
to remain in the  employ or service  of the  Company  or a parent or  subsidiary
corporation of the Company.

                  (b) Plan Expenses. Any expenses of administering this Plan
                      -------------                         
shall be borne by the Company.

                  (c)  Use of  Exercise  Proceeds.  The  payment  received  from
                       --------------------------
Optionees  from the exercise of Options shall be used for the general  corporate
purposes of the Company.

                  (d) Construction of Plan. The place of  administration  of the
                      --------------------
Plan  shall  be in  the  State  of  Arizona,  and  the  validity,  construction,
interpretation,  administration  and  effect  of the Plan and of its  rules  and
regulations,  and rights relating to the Plan, shall be determined in accordance
with the laws of the State of Arizona and where  applicable,  in accordance with
the Code.

                  (e) Taxes.  The  Company  shall be entitled  if  necessary  or
                      -----
desirable to pay or withhold the amount of any tax  attributable to the delivery
of Common Stock under the Plan from other amounts  payable to the Employee after
giving the person entitled to receive such Common Stock notice as far in advance
as practical,  and the Company may defer making delivery of such Common Stock if
any such tax may be pending unless and until indemnified to its satisfaction.

                  (f)  Indemnification.  In  addition  to such  other  rights of
                       ---------------
indemnification  as they  may  have  as  members  of the  Board  or a  Committee
appointed  by the  Board,  the  members  of the  Board or a  Committee  shall be
indemnified by the Company against all costs and expenses reasonably incurred by
them in connection  with any action,  suit or proceeding to which they or any of
them may be a party by reason of any action  taken or failure to act under or in
connection with the Plan or any Option,  and against all amounts paid by them in
settlement  thereof  (provided such settlement is approved by independent  legal
counsel  selected by the Company) or paid by them in  satisfaction of a judgment
in any such action,  suit or proceeding,  except a judgment based upon a finding
of bad faith;  provided that upon the  institution  of any such action,  suit or
proceeding a Board or Committee member shall, in writing give the Company notice
thereof and an  opportunity,  at its own expense,  to handle and defend the same
before such Board or Committee member  undertakes to handle and defend it on her
or his own behalf.

                  (g)  Gender.  For  purposes  of this  Plan,  words used in the
                       ------
masculine  gender shall include the feminine and neuter,  and the singular shall
include the plural and vice versa, as appropriate.

                                       10

<PAGE>



                                   EXHIBIT "B"

                              AMTECH SYSTEMS, INC.
                              1995 STOCK BONUS PLAN


         1.  Purpose.  The purpose of this 1995 Stock Bonus Plan  ("Plan)" is to
             -------
advance the interest of Amtech Systems, Inc. (the "Company") by inducing persons
of  outstanding  ability  to remain as  employees  of the  Company  by  granting
additional  compensation for services which they have rendered or will hereafter
render.  This is  accomplished  by providing  for the issuance of the  Company's
common stock, $.01 par value (the "Common Stock"), to qualified employees.

         2.  Administration.  The Plan shall be administered by the Compensation
             --------------
and Option  Committee of the  Company's  Board of Directors  (the  "Committee").
Except as specifically  provided,  the  interpretation  and  construction by the
Committee  of any  provision of the Plan or of any Common Stock issued under the
Plan shall be final,  conclusive and binding upon all persons. The Committee may
delegate  non-discretionary  administrative  duties  to  such  employees  of the
Company as it shall deem proper,  but only the  Committee can issue Common Stock
bonuses under the Plan.

         3. Shares  Subject to the Plan. The stock subject to issuance under the
            ---------------------------
Plan shall be shares of the  Company's  Common  Stock,  whether  authorized  but
unissued or held in the  Company's  treasury.  The  maximum  number of shares of
Common Stock which may be issued  pursuant to the Plan shall not exceed  160,000
shares,  less the number of options outstanding or exercised under the Company's
Amended and Restated 1995 Stock Option Plan.

         4. Eligibility. The class of persons which shall be eligible to receive
            -----------
stock  bonuses  under the Plan  shall be  salaried  full-time  employees  of the
Company or any subsidiary corporation of the Company who either (i) are officers
of the Company or a  subsidiary  corporation  of the  Company,  or (ii)  perform
duties of a supervisory  nature for the Company or a subsidiary  corporation  of
the Company.

         5. Grant of Stock Bonuses. Bonuses may be granted under the Plan at any
            ----------------------
time and from time to time before  termination  of the Plan.  Each Common  Stock
bonus  granted  under the Plan shall be authorized by the Committee and shall be
evidenced by a duly adopted  resolution of either the Committee or the Company's
Board of Directors.

         6. Conditions of Grant. The Company shall not be obligated to issue any
            -------------------
shares of Common  Stock  upon the grant of a stock  bonus  unless  the shares of
Common Stock have been  registered  with the Securities and Exchange  Commission
pursuant to the Securities  Act of 1933, as amended (the "Act"),  and applicable
State  securities laws, or are exempt from  registration  under the Act and such
laws,  and the  sale and  issuance  of such  shares  is in  compliance  with all
applicable  State or local  securities  laws. If shares are not registered under
the Act or such laws,  but are exempt from  registration,  the  employee to whom
such stock bonus has been granted shall represent to the Company that the shares
are  being  acquired  for  investment  and  not  with a view  to the  resale  or
distribution  thereof or provide such other  documentation as may be required by
the Company unless in the opinion of counsel to the Company such  representation
or documentation is not necessary

                                        1

<PAGE>



to comply with the Act.  Stock  certificates  evidencing  shares of Common Stock
issued  upon the  grant of a stock  bonus  hereunder  shall  bear a  restrictive
securities legend substantially as follows:

                  "THE  SHARES  REPRESENTED  BY THIS  CERTIFICATE  HAVE NOT BEEN
                  REGISTERED  UNDER THE SECURITIES  ACT OF 1933, AS AMENDED,  OR
                  UNDER THE SECURITIES LAWS OF ANY STATE OR OTHER  JURISDICTION.
                  THE  SECURITIES  MAY NOT BE SOLD OR  OFFERED  FOR  SALE IN THE
                  ABSENCE  OF  AN  EFFECTIVE   REGISTRATION  STATEMENT  FOR  THE
                  SECURITIES  UNDER THE SECURITIES ACT OF 1933, AS AMENDED,  AND
                  APPLICABLE SECURITIES LAWS OF ANY STATE OR OTHER JURISDICTION,
                  OR AN OPINION OF COUNSEL SATISFACTORY TO THE COMPANY THAT SUCH
                  REGISTRATION IS NOT REQUIRED."

         7. Termination, Modification and Amendment.
            ---------------------------------------

                  (a) The Plan shall terminate on a date which is ten (10) years
from the date of its adoption by the Board of Directors or sooner as provided in
subparagraph  (b) of this  Section 7 (the  "Termination  Date").  No stock bonus
shall be granted after the Termination Date.

                  (b) The Board of Directors  may at any time,  on or before the
Termination   Date,   terminate  the  Plan  or  from  time  to  time  make  such
modifications or amendments to the Plan as it may deem advisable.

                  (c) No  termination,  modification  or  amendment  of the Plan
shall adversely affect any previously issued shares of Common Stock granted as a
stock bonus under the Plan.

         8. Not a Contract of Employment. Nothing contained in the Plan shall be
            ----------------------------
deemed to  confer  upon any  individual  to whom a stock  bonus  may be  granted
hereunder  any right to remain  the  employ or  service  of the  Company  or any
subsidiary corporation of the Company.

         9.  Indemnification  of Committee.  In addition to such other rights of
             -----------------------------
indemnification  as they  may  have,  the  members  of the  Committee  shall  be
indemnified by the Company to the extent  permitted under applicable law against
all  costs and  expenses  reasonably  incurred  by them in  connection  with any
action, suit or proceeding to which they or any of them amy be a party by reason
of any action taken or failure to act upon or in connection with the Plan or any
rights  granted  thereunder  and against all amounts paid by them in  settlement
thereof or paid by them in satisfaction  of a judgment of any such action,  suit
or  proceeding,  except a judgment  based on a finding  of bad  faith.  Upon the
institution  of any such action,  suit or  proceeding,  the Committee  member or
members shall notify the Company in writing,  giving the Company an  opportunity
at its own cost to defend  the same  before  such  Committee  member or  members
undertake to defend the same on their own behalf.

         10. Definitions.  For purposes of the Plan, the term "subsidiary" shall
             -----------
have the same  meaning as  "subsidiary  corporation"  as such term is defined in
Section 424(f) of the Code.

                                        2

<PAGE>



         11.  Governing  Law. The Plan shall be governed  by, and all  questions
              --------------
arising  hereunder shall be determined in accordance with, the laws of the State
of Arizona.

         Adopted by the Board of Directors on February 10, 1995



                                        3

<PAGE>



                                   EXHIBIT "C"

                              AMTECH SYSTEMS, INC.

                    NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN


         Purposes  of the Plan.  The  purposes  of this Plan are to attract  and
         ---------------------
retain the best available  individuals to serve as  non-employee  members of the
Board of Directors  of Amtech  Systems,  Inc.  (the  "Company"),  to reward such
directors for their  contributions to the profitable growth of the Company,  and
to maximize the identity of interest  between such  directors  and  stockholders
generally.

    1.   Definitions.  As used herein, the following definitions shall apply:
         -----------

                  (a) "Board" shall mean the Board of Directors of the Company.
                       -----

                  (b)  "Company"  shall mean Amtech  Systems,  Inc.,  an Arizona
                        -------
corporation.

                  (c)  "Effective  Date"  shall  be the date  that the  Board of
                        ---------------
Directors of the Company adopts this Plan.

                  (d) "Eligible  Director" shall mean (i) those  individuals who
                       ------------------
are serving as non-employee  members of the Board on the Effective Date, or (ii)
those  individuals who are elected or appointed as  non-employee  members of the
Board after the Effective  Date,  whether  through  appointment  by the Board or
election of the Company's stockholders.

                  (e)  "Exercise  Price"  shall mean,  with respect to Shares of
                        ---------------
Optioned Stock, the Fair Market Value of such Shares on the date of grant of the
Option.

                  (f) "Fair Market Value" shall mean, with respect to the date a
                       -----------------
given Option is granted or exercised,  the value of the Common Stock  determined
by the  Board  in such  manner  as it may  deem  equitable  for  Plan  purposes;
provided, however, that where there is a public market for the Common Stock, the
Fair Market Value per Share shall be the mean of the bid and asked prices of the
Common Stock on the date of grant,  as reported in the Wall Street  Journal (or,
                                                       --------------------
if not reported, as otherwise reported by the National Association of Securities
Dealers Automated  Quotation System) or, in the event the Common Stock is listed
on the New York Stock Exchange or the American Stock  exchange,  the Fair Market
Value per Share shall be the closing price on such exchange on the date of grant
of the Option, as reported in the Wall Street Journal.
                                  -------------------

                  (g)  "Option"  shall mean a right to purchase  Stock,  granted
                        ------
pursuant to the Plan.


                                        1

<PAGE>



                  (h)  "Optioned  Stock"  shall  mean the  Stock  subject  to an
                        ---------------
Option.

                  (i)  "Optionee"  shall  mean a  non-employee  director  of the
                        --------
Company who has been granted an Option.

                  (j) "Plan" shall mean this Non-Employee Directors Stock Option
                       ----
Plan.

                  (k) "Share" shall mean a share of the Stock.
                       -----

                  (l)  "Stock"  shall  mean  the  Common  Stock  of the  Company
                        -----
described in the Certificate of Incorporation of the Company.

                  (m) "Stock Option  Agreement" shall mean the written agreement
                       -----------------------
evidencing the grant of an Option.

                  (n)  "Trading  Day" shall mean a day on which the Fair  Market
                        ------------
Value of the Stock can be determined.

         2.  Common  Stock  Subject  to  the  Plan.  Subject  to  increases  and
             -------------------------------------
adjustments pursuant to Section 9 of the Plan, the number of Shares reserved and
available  for  distribution  under  the  Plan  shall  be one  hundred  thousand
(100,000).  If an Option  shall  expire or become  unexercisable  for any reason
without having been exercised in full,  the  unauthorized  Shares covered by the
Option  shall,  unless the Plan shall have  terminated,  be available for future
grants of Options.

         3.  Option Grants.
             -------------

                  (a) Each  individual  who first  becomes an Eligible  Director
         after the Effective Date,  whether through election by the stockholders
         or appointment of the Board, shall automatically be granted at the time
         of such initial  election or  appointment,  an Option to purchase 6,000
         shares of Stock.

                  (b) On the first  business day following the Company's  Annual
         Meeting of Shareholders each year (the "Annual Grant Date"),  beginning
         with March 1, 1997,  each  individual  who is at that time an  Eligible
         Director  shall  automatically  be granted an Option  under the Plan to
         purchase an additional 3,000 shares of Stock;  provided such individual
                                                        --------
         (i) has  attended  75% of the  meetings  of the Board  held  during the
         12-month period immediately preceding the Annual Grant Date, or (ii) if
         such  individual  was  appointed  or elected as a director  during such
         12-month  period,  he or she has  attended  75% of the  meetings of the
         Board held during his of her term as a director, and (iii) has attended
         75% of the  meetings  of any  Committee  of the  Board  to  which  such
         individual has been appointed as a member during such 12-month period.


                                        2

<PAGE>



                  (c) The purchase price of Shares subject to an Option shall be
          the Fair Market Value on the date of grant.

                  (e) Each Option  granted  pursuant to this Plan shall vest and
         become exercisable  according to the following schedule,  provided that
         the Optionee remains an Eligible Director at such vesting date:


                  Vesting Date               Percentage of Shares Vesting
                  ------------               ----------------------------

                  First Anniversary of Grant           33-1/3%
                  Second Anniversary of Grant          66-2/3%
                  Third Anniversary of Grant              100%

         4.  Stockholder  Approval.  This  Plan  was  adopted  by the  Board  of
             ---------------------
Directors of the Company on December 21, 1995 (the  "Effective  Date").  Options
may be granted under the Plan on and after the Effective Date. The Plan shall be
submitted  for  stockholder  approval at the next  annual or special  meeting of
stockholders.  However, the failure to obtain such approval shall not affect the
effectiveness  of the Plan. No Option may be granted after the expiration of ten
(10) years from the effective date of the Plan; provided, however, that the Plan
                                                --------  -------
and all outstanding Options shall remain in effect until such Options shall have
been exercised, shall have expired or shall otherwise be terminated.

         5.  Term; Exercise; Rights as a Stockholder.
             ---------------------------------------

                  (a) The term of each  Option  shall be ten (10) years from the
         date of grant thereof. To the extent vested the Option may be exercised
         in whole or in part at any time and during the term of the  Option.  No
         fractional  Shares will be issued  upon  exercise of the Option and, if
         the exercise results in a fractional  interest,  an amount will be paid
         in cash  equal to the value of such  fractional  interest  based on the
         Fair Market Value of the Shares on the date of exercise.

                  (b) An Option shall be deemed to be exercised  upon receipt by
         the Company from the Optionee of written notice of such exercise.  Such
         notice shall be  accompanied  by full payment for the Shares subject to
         such exercise.

         6. Payment.  The Exercise Price shall be paid:
            -------

                  (a) In United  States  dollars in cash or by check  payable to
          the order of the Company; or

                  (b)  Subject to the  approval  of the Board,  by  delivery  of
          Shares  with an  aggregate  Fair Market  Value  equal to the  Exercise
          Price; or

                  (c) By any combination of (a) and (b) above.

                                        3

<PAGE>



                  The Board shall  determine  acceptable  methods for  tendering
Stock as payment upon exercise of an Option and may impose such  limitations and
prohibitions on the use of Stock to exercise an Option as it deems appropriate.

         7.  Transferability  of Options.  The Option may not be sold,  pledged,
             ---------------------------
assigned, hypothecated,  transferred, or disposed of in any manner other than by
will or by the laws of descent and  distribution  to the limited extent provided
herein or pursuant to a "qualified  domestic  relations order" as defined by the
Internal  Revenue Code or the  Employee  Retirement  Income  Security Act or the
rules thereunder. Except as permitted herein, an Option may be exercised, during
the lifetime of the  Optionee,  only by the Optionee or by his guardian or legal
representative.

                  In the event of the Optionee's  death, his or her Option shall
be exercisable,  prior to the expiration of the Option, by the person or persons
to whom his or her  accrued  and  vested  rights  pass by will or by the laws of
descent and distribution.

         8. Adjustments Upon Changes in Capitalization or Merger. Subject to any
            ----------------------------------------------------
required action by the stockholders of the Company, the number of Shares covered
by each outstanding  Option, and the number of Shares which have been authorized
for issuance  under the Plan but as to which no Options have yet been granted or
which have been  returned  to the Plan upon  cancellation  or  expiration  of an
Option, as well as the price per Share covered by each such outstanding  Option,
shall be proportionately  adjusted for any increase or decrease in the number of
issued Shares resulting from a stock split, reverse stock split,  consolidation,
subdivision,  stock dividend,  combination or reclassification of the Shares, or
any other increase or decrease in the number of issued Shares  effected  without
receipt of consideration by the Company;  provided,  however, that conversion of
                                          --------   -------
any  convertible  securities  of the  Company  shall  not be deemed to have been
"effected  without receipt of  consideration."  Such adjustment shall be made by
the Board,  whose  determination  in that  respect  shall be final,  binding and
conclusive.  Except as expressly  provided herein, no issuance by the Company of
shares of stock of any class, or securities  convertible into shares of stock of
any class, shall affect, and no adjustment by reason thereof shall be made, with
respect to the number or price of Shares subject to an Option.

                  In the event of the proposed dissolution or liquidation of the
Company,  all Options will terminate  immediately  prior to the  consummation of
such proposed action,  unless otherwise provided by the Board. The Board may, in
the exercise of its sole discretion in such  instances,  declare that any Option
shall  terminate  as of a date fixed by the Board and give each holder the right
to exercise  the Option as to all or any part  thereof,  including  Shares as to
which the Option would not otherwise be exercisable.  In the event of a proposed
sale of all or substantially all of the assets of the Company,  or the merger of
the Company with or into another corporation,  the Option shall be assumed or an
equivalent Option shall be substituted by such successor corporation or a parent
or subsidiary of such successor corporation, unless the Board determines, in the
exercise of its sole discretion and in lieu of such assumption or  substitution,
that the  holder  shall have the right to  exercise  the Option as to all of the
Shares, including Shares as to which the Option would not otherwise be

                                        4

<PAGE>



exercisable.  If the Board makes an Option  exercisable in lieu of assumption or
substitution in the event of a merger or sale of assets,  the Board shall notify
the holder that the Option  shall be fully  exercisable  for a period of 30 days
from the date of such notice (but not later than the  expiration  of the term of
the Option), and the Option will terminate upon the expiration of such period.

         9. Amendment and  Termination of the Plan. The Board may amend the Plan
            --------------------------------------
from time to time in such respects as the Board may deem  advisable or terminate
the Plan; provided, however, that amendments to the Plan relating to the amount,
          --------  -------
price or  timing of  Option  grants  shall not be made more than once in any six
month  period,  other than  amendments  necessary  to comply with changes in the
Internal Revenue Code, the Employee Retirement Income Security Act, or the rules
thereunder.  Any amendment or  termination  of the Plan shall not affect Options
already  granted and such  Options  shall  remain in full force and effect as if
this Plan had not been amended or terminated.

                  Notwithstanding  the foregoing,  revisions or amendments  that
accomplish any of the following  shall require  approval of the  stockholders of
the Company, to the extent required by law, rule or regulation:

                  (a) Materially  increase the benefits accruing to participants
          under the Plan;

                  (b)  Materially  increase  the  number of Shares  which may be
          issued under the Plan;

                  (c)  Materially   modify  the  Plan  as  to  eligibility   for
          participation in the Plan; or

                  (d)  Otherwise  cause  the  Plan to lose its  exemption  under
         Section 16(b) of the Securities  Exchange Act of 1934, as amended,  and
         the rules and regulations promulgated thereunder.

         10.  Conditions  Upon  Issuance of Shares.  Shares  shall not be issued
              ------------------------------------
pursuant to the exercise of an Option unless the exercise of such Option and the
issuance  and  delivery of such Shares  pursuant  thereto  shall comply with all
relevant provisions of law, including,  without limitation the Securities Act of
1933, as amended, the Securities Exchange Act of 1934, as amended, the rules and
regulations promulgated  thereunder,  and the requirements of any stock exchange
or market  system  upon which the  Shares  may be  listed,  and shall be further
subject  to the  approval  of  counsel  for the  Company  with  respect  to such
compliance.

                  As a condition to the  exercise of an Option,  the Company may
require the Optionee to represent  and warrant at the time of any such  exercise
that the Shares are being  purchased only for investment and without any present
intention  to sell or  distribute  such Shares if, in the opinion of counsel for
the Company, such a representation is required or advisable.

                                        5

<PAGE>



                  Inability of the Company to obtain authority from a regulatory
body having jurisdiction,  which authority is deemed by the Company's counsel to
be  necessary  or  advisable  to the  lawful  issuance  and  sale of any  Shares
hereunder,  shall relieve the Company of any liability in respect of the failure
to issue or sell such Shares as to which such requisite authority shall not have
been obtained.

         11. Termination of Option.
              ---------------------

                  (a)  Termination as a Director.  If an Optionee ceases to be a
                       -------------------------
         director, unless such cessation occurs due to death or disability, then
         the Option  shall  terminate on the date thirty days after the date the
         Optionee ceases to be a director.

                  (b) Disability.  Unless otherwise provided in the Stock Option
                      ----------
         Agreement,  in the event an  Optionee  is unable  to  continue  to be a
         member of the Board as a result of his permanent  and total  disability
         (as defined in Section  22(e)(3) of the Internal  Revenue Code of 1986,
         as amended),  he may exercise the Option at any time within twelve (12)
         months  following the date he ceased to be a director,  but only to the
         extent he was  entitled  to  exercise  it on the date he ceased to be a
         director. To the extent that he was not entitled to exercise the Option
         on the date he ceased to be a director, or if he does not exercise such
         Option  (which he was entitled to exercise)  within the time  specified
         herein, the Option shall terminate.

                  (c)  Death.  Unless  otherwise  provided  in the Stock  Option
                       -----
         Agreement,  if an  Optionee  dies  during the term of the  Option,  the
         Option may be exercised at any time within twelve (12) months following
         the date of death, but only to the extent that an Optionee was entitled
         to  exercise  the  Option  on the date of  death.  To the  extent  that
         decedent  was not entitled to exercise the Option on the date of death,
         or if the  Optionee's  estate,  or  person  who  acquired  the right to
         exercise the Option by bequest or  inheritance,  does not exercise such
         Option  (which he was entitled to exercise)  within the time  specified
         herein, the Option shall terminate.

          12.  Option  Agreement.  Options  shall be  evidenced  by Stock Option
               -----------------
Agreements in such form as the Board shall approve.

          13. Miscellaneous Provisions.
              ------------------------

                   (a) Plan  Expense.  Any expenses of  administering  this Plan
                       -------------
          shall be borne by the Company.

                   (b) Construction of Plan. The validity, construction,
                       --------------------
          interpretation, administration and effect of the Plan and of its rules
          and regulations, and rights

                                        6

<PAGE>


         relating to the Plan,  shall be  determined  by the Board in accordance
         with the laws of the State of Arizona.

                  (c) Taxes.  The  Company  shall be entitled  if  necessary  or
                      -----
         desirable to pay or withhold the amount of any tax  attributable to the
         delivery  of Common  Shares  under the Plan  after  giving  the  person
         entitled to receive such Shares  notice as far in advance as practical,
         and the  Company may defer  making  delivery of such Shares if any such
         tax may be pending unless and until indemnified to its satisfaction.

                  (d)  Gender.  For  purposes  of this  Plan,  words used in the
                       ------
         masculine gender shall include the female and neuter,  and the singular
         shall include the plural and vice versa, as appropriate.



                                        7

<PAGE>

                              AMTECH SYSTEMS, INC.
                               COMMON STOCK PROXY

         The  undersigned  hereby appoints Jong S. Whang or Robert T. Hass, with
full  power  of  substitution,  to  represent  and  to  vote  on  behalf  of the
undersigned all of the shares of AMTECH SYSTEMS,  INC., an Arizona  corporation,
which the  undersigned is entitled to vote at the Annual Meeting of Shareholders
of the  Corporation to be held at the Doubletree  Paradise  Valley Resort,  5401
North Scottsdale Road,  Scottsdale,  Arizona on Thursday,  February 29, 1996, at
3:00 p.m.,  Mountain  Standard  Time,  and at any  adjournment  or  postponement
thereof,  hereby  revoking  all proxies  heretofore  given with  respect to such
stock,  upon the following  proposals more fully  described in the Notice of and
Proxy  Statement  for the  Annual  Meeting,  the  receipt  of  which  is  hereby
acknowledged.

Please mark boxes with an X in blue or black ink.

The Board of Directors recommends a vote FOR each of the proposals listed below.

1. ELECTION OF DIRECTORS           [ ] FOR all nominees listed below
                                       (except as marked to the contrary):

     Jong S. Whang          Robert T. Hass           Donald F. Johnson   
                          Alvin Katz           Bruce R. Thaw

[ ] WITHHOLD AUTHORITY to vote for all nominees listed above
INSTRUCTIONS:  To withhold authority to vote for any individual nominee, write
that nominee's name in the space provided below:

                 ----------------------------------------------

The undersigned agrees that the proxy holder is authorized to  cumulate votes in
the election of directors and to vote for less than all of the nominees.

2.  PROPOSAL NO. 1:  Ratification  of the adoption of the Amtech  Systems,  Inc.
    Amended  and  Restated  1995 Stock  Option  Plan as  described  in the Proxy
    Statement. (Mark only one.)

          [ ] FOR         [ ] AGAINST        [ ] WITHHELD

3.  PROPOSAL NO. 2:  Ratification  of the adoption of the Amtech  Systems,  Inc.
    Amended  and  Restated  1995 Stock  Bonus Plan,  as  described  in the Proxy
    Statement. (Mark only one.)

          [ ] FOR         [ ] AGAINST        [ ] WITHHELD

4.  PROPOSAL NO. 3:  Ratification  of the adoption of the Amtech  Systems,  Inc.
    Non-Employee  Directors  Stock  Option  Plan,  as  described  in  the  Proxy
    Statement. (Mark only one.)

          [ ] FOR         [ ] AGAINST        [ ] WITHHELD

<PAGE>

                          (Continued from other side)

THIS PROXY WILL BE VOTED IN ACCORDANCE WITH THE DIRECTIONS  INDICATED HEREIN. IF
NO SPECIFIC  DIRECTIONS  ARE GIVE,  THIS PROXY WILL BE VOTED FOR APPROVAL OF ALL
NOMINEES  LISTED HEREIN,  FOR APPROVAL OF THE PROPOSALS  LISTED HEREIN AND, WITH
RESPECT TO ANY OTHER  BUSINESS  AS MAY  PROPERLY  COME  BEFORE THE  MEETING,  IN
ACCORDANCE WITH THE DISCRETION OF THE PROXIES.

DATED:                        , 1996    When signing as executor, administrator,
      -----------------------           attorney,  trustee or  guardian,  please
                                        give   full   title   as   such.   If  a
                                        corporation,   please   sign   in   full
                                        corporate  name by  president  or  other
                                        authorized  officer.  If a  partnership,
                                        please  sign  in  partnership   name  by
                                        authorized  person.  If a joint tenancy,
                                        please have both joint tenants sign.

                                        SIGNATURES:

                                        ----------------------------------------

                                        ----------------------------------------

                                        ----------------------------------------

     PLEASE PROMPTLY MARK, DATE, SIGN AND RETURN IN THE ENCLOSED ENVELOPE.





© 2022 IncJournal is not affiliated with or endorsed by the U.S. Securities and Exchange Commission