AMTECH SYSTEMS INC
S-3, 1996-08-09
SPECIAL INDUSTRY MACHINERY, NEC
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  As filed  with the  Securities  and  Exchange  Commission  on  August 9,  1996
                                                  Registration No.
================================================================================

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                               ------------------

                                    FORM S-3
                          REGISTRATION STATEMENT UNDER
                           THE SECURITIES ACT OF 1933
                                 --------------

                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)

         Arizona                                                   86-0411215
(State or other jurisdiction of                                 (I.R.S. Employer
incorporation or organization)                                    I.D. Number)

                   131 South Clark Drive, Tempe, Arizona 85281
                                 (602) 967-5146
    (Address, including zip code, and telephone number, including area code,
                  of registrant's principal executive offices)

                                  Jong S. Whang
                              Amtech Systems, Inc.
                              131 South Clark Drive
                              Tempe, Arizona 85281
                                 (602) 967-5146

            (Name, address, including zip code, and telephone number,
                   including area code, of agent for service)
                            -------------------------

      The Commission is requested to send copies of all communications to:

                             Christopher D. Johnson
                            Squire, Sanders & Dempsey
                       40 North Central Avenue, Suite 2600
                             Phoenix, Arizona 85004
                                 (602) 528-4000


Approximate  date of  commencement  of proposed  sale to the public:  As soon as
practicable from time to time after the date of this Registration Statement.

If the only securities  being registered on this Form are being offered pursuant
to dividend or interest reinvestment plans, please check the following box. | |

If any of the  securities  being  registered on this Form are to be offered on a
delayed or continuous  basis  pursuant to Rule 415 under the  Securities  Act of
1933, other than securities offered only in connection with dividend or interest
reinvestment plans, check the following box.  |X|
<PAGE>
If this Form is filed to register additional securities for an offering pursuant
to Rule 462(b) under the Securities Act, please check the following box and list
the  Securities  Act  registration  statement  number of the  earlier  effective
registration statement for the same offering.

If this Form is a  post-effective  amendment filed pursuant to Rule 462(c) under
the  Securities  Act,  check  the  following  box and  list the  Securities  Act
registration  statement number of the earlier effective  registration  statement
for the same offering. | |

If delivery  of the  prospectus  is  expected  to be made  pursuant to Rule 434,
please check the following box. | |

                         CALCULATION OF REGISTRATION FEE
<TABLE>
<CAPTION>
=================================================================================================================================
                                                                    Proposed              Proposed
                                                                     Maximum               Maximum
                                                                    Aggregate             Aggregate
      Title of Each Class of                Amount to be             Price Per             Offering                Amount of
    Securities to be Registered             Registered(1)            Share(2)                Price             Registration Fee
- ---------------------------------------------------------------------------------------------------------------------------------
<S>                                         <C>                      <C>                  <C>                       <C>   
Common Stock                                2,835,000                $2.75                $7,796,250                $2,688
=================================================================================================================================
</TABLE>

(1)  This  Registration  Statement covers up to 2,415,000 shares of Common Stock
     to be issued upon  exercise  of issued and  outstanding  Redeemable  Common
     Stock Purchase Warrants (the "Redeemable Warrants") issued in the Company's
     December 15, 1994 public offering of Units (the "Unit Offering"), each Unit
     consisting of six shares of Common Stock and three Redeemable Warrants (the
     "Units");  each  Redeemable  Warrant  exercisable  for two shares of Common
     Stock.  This  Registration  Statement  also covers up to 210,000  shares of
     Common Stock issuable as components of up to 35,000 Units that are issuable
     upon exercise of a warrant  granted to the underwriter of the Unit Offering
     (the"Representative's  Warrant"), as well as 210,000 shares of Common Stock
     underlying the Redeemable  Warrants  issuable as components of Units issued
     upon exercise of the Representative's  Warrant. This Registration Statement
     covers, in addition to the shares of Common Stock being registered  hereby,
     a presently  indeterminate number of additional shares of Common Stock that
     may become  issuable  in certain  events upon  exercise  of the  Redeemable
     Warrants  pursuant to  adjustments  in the number of shares of Common Stock
     for which a Redeemable  Warrant is  exercisable.  The foregoing  amounts of
     shares of Common  Stock have been  adjusted  to  reflect a 2-for-1  forward
     stock split of the Company's  outstanding  Common Stock  effected March 29,
     1996.

(2)  Based upon the exercise price of the Redeemable Warrants.
================================================================================
Pursuant  to Rule 429  under  the  Securities  Act of  1933,  as  amended,  this
Registration  Statement relates to the Registration  Statement on Form S-1 (File
No. 33-77368), as amended.
================================================================================

     The Registrant  hereby amends this  Registration  Statement on such date or
dates as may be necessary to delay its effective date until the Registrant shall
file a further  amendment  which  specifically  states  that  this  Registration
Statement shall  thereafter  become effective in accordance with Section 8(a) of
the  Securities  Act of 1933,  as amended (the  "Securities  Act") or until this
Registration  Statement  shall become  effective on such date as the Commission,
acting pursuant to said Section 8(a), may determine.

================================================================================
<PAGE>
INFORMATION   CONTAINED  HEREIN  IS  SUBJECT  TO  COMPLETION  OR  AMENDMENT.   A
REGISTRATION  STATEMENT  RELATING  TO THESE  SECURITIES  HAS BEEN FILED WITH THE
SECURITIES  AND EXCHANGE  COMMISSION.  THESE  SECURITIES MAY NOT BE SOLD NOR MAY
OFFERS TO BUY BE ACCEPTED PRIOR TO THE TIME THE REGISTRATION  STATEMENT  BECOMES
EFFECTIVE.  THIS  PROSPECTUS  SHALL  NOT  CONSTITUTE  AN  OFFER  TO  SELL OR THE
SOLICITATION OF AN OFFER TO BUY NOR SHALL THERE BE ANY SALE OF THESE  SECURITIES
IN ANY STATE IN WHICH SUCH OFFER,  SOLICITATION  OR SALE WOULD BE UNLAWFUL PRIOR
TO REGISTRATION OR QUALIFICATION UNDER THE SECURITIES LAWS OF ANY SUCH STATE.

                   SUBJECT TO COMPLETION, DATED AUGUST 9, 1996
Prospectus


                              AMTECH SYSTEMS, INC.

                        2,835,000 Shares of Common Stock


     This  Prospectus  relates to 2,415,000  shares of the $.01 par value common
stock (the "Common Stock"), of AMTECH SYSTEMS,  INC. ("Amtech" or the "Company")
which may be issued  upon  exercise  of the  Redeemable  Common  Stock  Purchase
Warrants (the  "Redeemable  Warrants")  issued in connection  with the Company's
public offering of Units on December 15, 1994 (the "Unit Offering"), each "Unit"
consisting  of six shares of Common Stock and three  Redeemable  Warrants.  This
Registration Statement also covers up to 210,000 shares of Common Stock issuable
as components of up to 35,000 Units that are issuable upon exercise of a warrant
granted to the underwriter of the Unit Offering (the"Representative's Warrant"),
and 210,000 shares of Common Stock underlying the Redeemable  Warrants  issuable
as  components of Units issued upon  exercise of the  Representative's  Warrant.
Each Redeemable  Warrant entitles the registered  holder thereof to purchase two
shares of Common  Stock at a price of $2.75 per share until  December  15, 1999,
subject to adjustment  in certain  circumstances.  The Warrants are  redeemable,
subject  to the  Company's  option,  at $.05 per  Redeemable  Warrant on 30 days
written  notice,  if the market price for the Common Stock for the 20 days ended
not more  than 10 days  prior to the date that  such  notice is given  equals or
exceeds $3.25 per share. See "PLAN OF DISTRIBUTION."

     The Common Stock and Redeemable  Warrants are traded on the Nasdaq SmallCap
Market under the Symbols  "ASYS" and "ASYSW",  respectively.  On August 5, 1996,
the closing  price for the Common  Stock was $4.4375 per share,  and the closing
price for the Redeemable Warrants was $3.625 per warrant.

     FOR  A  DISCUSSION  OF  CERTAIN   FACTORS  THAT  SHOULD  BE  CONSIDERED  BY
PROSPECTIVE INVESTORS, SEE "RISK FACTORS."

                             ----------------------

          THESE SECURITIES HAVE NOT BEEN APPROVED OR DISAPPROVED BY THE
           SECURITIES AND EXCHANGE COMMISSION OR ANY STATE SECURITIES
             AGENCY NOR HAS THE COMMISSION OR ANY SUCH AGENCY PASSED
              UPON THE ACCURACY OR ADEQUACY OF THIS PROSPECTUS. ANY
              REPRESENTATION TO THE CONTRARY IS A CRIMINAL OFFENSE.

                             ----------------------



              The date of this Prospectus is _______________, 1996.
<PAGE>
                              AVAILABLE INFORMATION

     The Company is subject to the informational  requirements of the Securities
Exchange Act of 1934 (the "Exchange  Act") and, in accordance  therewith,  files
reports, proxy statements and other information with the Securities and Exchange
Commission  (the  "Commission").   Such  reports,  proxy  statements  and  other
information filed by the Company with the Commission can be inspected and copied
at the public  reference  facilities  maintained by the  Commission at 450 Fifth
Street, N.W., Room 1024,  Washington,  D.C. 20549, and at the following Regional
Offices of the  Commission:  Northeast  Regional  Office,  7 World Trade Center,
Suite 1300,  New York,  New York  10048;  and Midwest  Regional  Office,  500 W.
Madison Street, Suite 1400, Chicago, Illinois 60661. Copies of such material can
be obtained from the Public  Reference  Section of the  Commission at Room 1024,
450 Fifth  Street,  N.W.,  Washington,  D.C.  20549,  upon payment of prescribed
rates.

     The  Company  has  filed  with  the  Securities  and  Exchange  Commission,
Washington,  D.C.  20549,  a  Registration  Statement  on  Form  S-3  under  the
Securities Act with respect to the Common Stock offered hereby.  This Prospectus
does not contain all the information set forth in the Registration Statement and
the exhibits and the schedules thereto.  For further information with respect to
the  Company  and the  Common  Stock,  reference  is  made  to the  Registration
Statement  including the exhibits and schedules thereto,  copies of which may be
inspected  at  the  Public   Reference  Room  of  the  Securities  and  Exchange
Commission, Judiciary Plaza, 450 Fifth Street, N.W., Washington, D.C. 20549, and
copies of any part thereof may be obtained from the office of the Securities and
Exchange Commission in Washington,  D.C. upon the payment of the prescribed fee.
The statements  contained in this Prospectus and the contents of any contract or
other document filed as an exhibit are of necessity brief descriptions  thereof,
are not  necessarily  complete and the full text of such statements is qualified
in its entirety by reference to such contract or document.
                                        2
<PAGE>
                 INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE

     The following  documents have been filed with the Commission by the Company
and are hereby incorporated by reference into this Prospectus: (i) the Company's
Annual Report on Form 10-K for the fiscal year ended  September  30, 1995;  (ii)
the Company's  Quarterly  Report on Form 10-Q for the quarter ended December 31,
1995;  (iii) the Company's  Quarterly  Report on Form 10-Q for the quarter ended
March 31, 1996, (iv) the description of the Company's  Common Stock contained in
the  Company's  Registration  Statement  on Form 8-A filed  with the  Commission
pursuant to Section  12(g) of the Exchange Act, and (v) the  description  of the
Company's  Redeemable Common Stock Purchase Warrants  contained in the Company's
Registration Statement on Form 8-A filed with the Commission pursuant to Section
12(g) of the Exchange Act. All other  documents  and reports  filed  pursuant to
Sections  13(a),  13(c),  14 or 15(d) of the  Exchange Act from the date of this
Prospectus  and prior to the  termination  of the  offering of the Common  Stock
shall be deemed to be incorporated by reference herein and shall be deemed to be
a part hereof from the date of the filing of such reports and documents.

     Any  statement  contained  in a  document  incorporated  or  deemed  to  be
incorporated  by reference  herein shall be deemed to be modified or  superseded
for purposes of this Prospectus to the extent that a statement  contained herein
or in  any  subsequently  filed  document  which  also  is or  is  deemed  to be
incorporated by reference herein modifies or supersedes such statement. Any such
statement so modified or superseded  shall not be deemed,  except as so modified
or superseded, to constitute a part of this Prospectus.

     The Company  will provide  without  charge to each person to whom a copy of
this Prospectus is delivered,  on written or oral request of such person, a copy
of any or  all  documents  which  are  incorporated  herein  by  reference  (not
including the exhibits to such documents,  unless such exhibits are specifically
incorporated by reference in the document which this  Prospectus  incorporates).
Requests  should be directed to the Secretary,  Amtech  Systems,  Inc. 131 South
Clark Drive, Tempe,  Arizona 85281,  telephone number (602) 967-5146,  facsimile
number (602) 968-7363.
                                        3
<PAGE>
                               PROSPECTUS SUMMARY

     The following  summary of selected portions of this Prospectus is qualified
in every respect by the more detailed  information  contained  elsewhere herein,
including the financial  statements and related notes  incorporated by reference
herein.  The  risks  of an  investment  in the  Securities  offered  hereby  are
described under RISK FACTORS.  Each  prospective  investor is urged to read this
Prospectus in its entirety.

The Company

     Amtech Systems,  Inc. is engaged primarily in the manufacture and marketing
of  several  items of  capital  equipment,  one of which  is  patented,  used by
customers in the manufacture of semiconductors. The Company's Processing/Loading
products are designed to permit its  customers to increase the degree of control
over their  semiconductor chip manufacturing  environment and to reduce exposure
to  contaminants  by limiting  human contact  during the process.  The Company's
wholly-owned subsidiary, Tempress Systems, Inc., is engaged in the complementary
business  of  manufacturing  and  selling  horizontal   diffusion  furnaces  for
semiconductor fabrication. The Company also has a 45% ownership interest and 50%
voting  interest in Seil Semicon,  Inc., a South Korean  start-up  joint venture
that plans to develop and operate a silicon test wafer reclaiming  business.  In
addition,  the Company recently obtained a U.S. patent on technology on which it
expects to base a proposed new photo chemical vapor  deposition  ("CVD") product
for use in semiconductor  manufacturing facilities.  The Company has engaged the
University  of  California,  Santa  Cruz,  to conduct a study to  determine  the
feasibility of such a product.  If the results of the study are  favorable,  the
Company  intends  to  commence  to  design,  manufacture  and market a photo CVD
product. See "THE COMPANY -- CVD Technology."

     Until  recently,  the Company  also was engaged in the  technical  contract
personnel business through a subsidiary,  Echelon Service Company ("Echelon") in
Baltimore,  Maryland.  In December  1995,  the Company  disposed of the stock of
Echelon  in order  to  allow  the  Company  to  focus on its core  semiconductor
equipment business.

     Written  requests  for  further  information  should  be  directed  to  the
Secretary,  Amtech Systems,  Inc., 131 South Clark Drive, Tempe,  Arizona 85281;
Facsimile Number (602) 968- 7363.

The Offering

Securities Offered:                     2,835,000   shares   of   Common   Stock
                                        issuable   upon  the   exercise  of  the
                                        Redeemable      Warrants     and     the
                                        Representative's Warrant.

Common Stock Outstanding:               4,109,668 shares  outstanding as of July
                                        19, 1996.

Estimated Proceeds                      If all of the  Redeemable  Warrants  and
                                        the    Representative's    Warrant   are
                                        exercised, the estimated proceeds to the
                                        4
<PAGE>
                                        Company     will    be     approximately
                                        $7,691,250. The Company will not receive
                                        any of the proceeds from the  subsequent
                                        sale of the Common Stock.

Use of Proceeds                         Any  proceeds  received  by the  Company
                                        from time to time upon  exercise  of the
                                        Redeemable      Warrants      or     the
                                        Representative's  Warrant  will be added
                                        to the  Company's  working  capital  and
                                        will  be  used  for  general   corporate
                                        purposes.  The Company  will not receive
                                        any of the proceeds from the  subsequent
                                        sale of the Common Stock.

NASDAQ Symbols                          Common Stock:                 ASYS
                                        Redeemable Warrants:          ASYSW
                                        5
<PAGE>
                                   THE COMPANY

     Amtech Systems,  Inc. is engaged primarily in the manufacture and marketing
of  several  items of  capital  equipment,  one of which  is  patented,  used by
customers in the manufacture of semiconductors. The Company's Processing/Loading
product  line  (Atmoscan(R),  IBAL and load  stations) is designed to permit its
customers  to  increase  the degree of control  over  their  semiconductor  chip
manufacturing  environment  and to reduce  exposure to  contaminants by limiting
human  contact  during  the  process.  The  Company's  wholly-owned  subsidiary,
Tempress Systems,  Inc., is engaged in the  complementary  business of producing
and selling  horizontal  diffusion furnaces for semiconductor  fabrication.  The
Company  also has a 45%  ownership  interest  and 50%  voting  interest  in Seil
Semicon,  Inc., a South Korean  start-up joint venture that plans to develop and
operate a silicon  test wafer  reclaiming  business.  In  addition,  the Company
recently  obtained  a U.S.  patent on  technology  on which it expects to base a
proposed  new  photo  chemical  vapor  deposition  ("CVD")  product  for  use in
semiconductor  manufacturing facilities.  The Company has engaged the University
of  California,  Santa Cruz, to conduct a study to determine the  feasibility of
such a product.  If the results of the study are favorable,  the Company intends
to  commence  to  design,  manufacture  and  market  a photo  CVD  product.  See
"SEMICONDUCTOR EQUIPMENT BUSINESS," below.

     Until  recently,  the Company  also was engaged in the  technical  contract
personnel business through a subsidiary,  Echelon Service Company ("Echelon") in
Baltimore,  Maryland.  In December  1995,  the Company  disposed of the stock of
Echelon  in order  to  allow  the  Company  to  focus on its core  semiconductor
equipment business.  See "RECENT EVENTS -- Sale of Contract Personnel Business,"
below.


                        SEMICONDUCTOR EQUIPMENT BUSINESS

General

     The  Company is engaged  primarily  in the  manufacture  and  marketing  of
several  items of capital  equipment  used by  customers in the  manufacture  of
semiconductors.  Semiconductors,  or semiconductor  "chips," are made of silicon
and are part of the  circuitry  of  electronic  computers.  The  manufacture  of
semiconductors involves many complex operations during which silicon wafers (the
substrates  from which chips are made) are  inserted in a diffusion  furnace and
subjected to the precise flow of gases under very intense  heat.  The  Company's
Processing/Loading product line is intended to permit customers using horizontal
diffusion  furnaces to  increase  the degree of control  over the  manufacturing
environment  and to reduce  exposure to  contaminants  by reducing the amount of
human  contact  during the  process.  Following an industry  trend,  the size of
individual  chips has tended to  decrease  and the size of the wafers from which
chips are made has tended to increase.  As a result, the value of each wafer has
increased  because  each is the source of an increased  number of chips.  As the
value of  wafers  increase,  so too  does the  importance  of  control  over the
manufacturing  environment.  In  addition  to the  Company's  Processing/Loading
product line, through its wholly owned subsidiary,  Tempress Systems,  Inc., the
Company manufactures and sells horizontal diffusion furnaces.
                                        6
<PAGE>
     There is also a trend in the  industry,  related  to the  trend to  smaller
chips,  to the  use in  new  semiconductor  manufacturing  facilities  of  newer
technology,  vertical diffusion  furnaces,  which are more efficient to use than
older  technology   horizontal  diffusion  furnaces  in  certain   manufacturing
processes of smaller chips on larger wafers.  Vertical  diffusion  furnaces are,
however,  significantly  more  expensive to purchase than  horizontal  diffusion
furnaces.  The  Company's   Processing/Loading  product  line  is  useable  with
horizontal  diffusion  furnaces  only. The Company's  target market  consists of
customers who wish to increase the  efficiency of their  existing  semiconductor
manufacturing  facilities equipped with horizontal  diffusion systems.  With the
addition of Tempress'  operations,  the Company  also can provide its  customers
with efficient  integrated  horizontal  diffusion furnace systems. The Company's
target  market  also  includes  customers  who  build new  facilities  but whose
operations do not require the higher priced vertical  diffusion furnace systems.
Based on market information  obtained through customer and market contacts,  the
Company  believes  that a  majority  of  worldwide  semiconductor  manufacturing
facilities are equipped with  horizontal  diffusion  furnaces,  as compared with
vertical  diffusion  furnaces.  While  the  Company  estimates  that in the next
several years the  percentage of facilities in the world equipped with each type
of system  will become  equal,  it believes  that a  significant  demand for its
present product line will continue to exist,  although there can be no assurance
in that  regard.  The  Company  plans to  increase  its  share of the  market by
expanding its manufacture and sales of horizontal  diffusion furnaces.  Tempress
recently acquired a 9,900 square foot facility in Heerde,  The Netherlands,  for
its European  operations.  Tempress  expects to move its operations into the new
facility in the fall of 1996.

Processing/Loading Equipment

Atmoscan(R)

     The Company's  "Atmoscan(R)"  is a patented  controlled  environment  wafer
processing system for use with horizontal diffusion furnaces. It is comprised of
a flanged quartz tube and several metal parts.  When in use, the flanged tube is
loaded with wafers and  inserted  into the  diffusion  furnace  under a nitrogen
controlled  environment.  The technology protected by the Company's  Atmoscan(R)
patents is a  processing  method that  includes a  cantilever  tube that carries
wafers  and  through  which a purging  inert gas flows  during the  loading  and
unloading of wafers into and out of the diffusion furnace.

     The  Company  believes  that  among the major  advantages  afforded  by the
Atmoscan(R)  product  are  increased  control of the  environment  of the wafers
during the gaseous and heating process, thereby increasing yields and decreasing
manufacturing  costs, and a decreased need for the cleaning of diffusion furnace
tubes, which ordinarily  involves  substantial  expense and equipment down time.
Additional  significant economies in the manufacturing process are also believed
to result.

     The  Company  has  manufactured   and  sold  Atmoscan(R)   units  to  major
semiconductor  manufacturers  in the United States,  the Pacific Rim and Europe,
including  at  various  times  to   International   Business   Machines,   Intel
Corporation,  Samsung,  Digital  Equipment  Corp.,  Motorola,  SGS-Thompson  and
others. During fiscal 1995, Atmoscan(R) units were sold in a price
                                        7
<PAGE>
range of  approximately  $26,000  (for simpler  models  without  accessories  or
ancillary  items)  to  approximately  $70,000  (for  more  complex  models).  As
discussed elsewhere, sales of Atmoscan(R) have declined from their peak in 1989,
due to an industry trend toward use of vertical diffusion furnaces.

     The Company has designed and sells an open  cantilever  paddle system as an
alternative to the closed  processing  method of the  Atmoscan(R).  The per unit
price  is   approximately   $13,000-$18,000,   depending   upon  the  customer's
specifications.

IBAL

     "IBAL" is an acronym for "Individual  Boats with Automated  Loading." Boats
are quartz  trays that hold  silicon  wafers  while they are being  processed in
diffusion furnaces.  IBAL is a device,  including software,  which automatically
places boats into Atmoscan(R)  tubes or on open cantilever paddle systems before
they are inserted in the diffusion furnace and  automatically  removes the trays
after  completion  of the  process.  The  Company has sold units of the IBAL for
approximately   $20,000  to  $25,000  each,  not  including  the  price  of  the
Atmoscan(R) or open cantilever  paddle system.  Use of the IBAL products reduces
human handling and, therefore, reduces exposure of wafers to contaminants during
the loading and unloading of the process tubes.

     The IBAL Butler is a robotics device which further automates the loading of
wafers into the diffusion furnace by automatically  transferring  wafer carriers
onto the IBAL for loading into the Atmoscan(R) for the appropriate furnace tube.
The unit price for the IBAL Butler is approximately $40,000.

     The IBAL Queue provides a convenient staging area for the operator to place
boats on a load station and  automates  the loading of those boats onto the IBAL
Butler.  IBAL  Queue was first  developed  and  offered  for sale in the  fourth
quarter of 1993 and the first  unit was  shipped  during  the second  quarter of
fiscal 1994. The unit price for the IBAL Queue is $27,000.

Load Stations

     The products  described  above are offered and sometimes sold as a complete
system,  mounted on a device  called a "load  station,"  which also  includes an
ultra-clean  environment for wafer loading by filtering and controlling the flow
of air. The Company began  shipping load stations in fiscal 1992.  The price for
the load  station  alone (in  addition  to the price for the  component  systems
described  above) is approximately  $60,000,  depending upon the complexity of a
customer's requirements.  Depending on configuration, which varies from order to
order, complete load stations with loaders and IBAL automation have been sold at
prices between $150,000 and $320,000.
                                        8
<PAGE>
Diffusion Furnaces

     Through its wholly owned subsidiary,  Tempress  Systems,  Inc., the Company
produces and sells horizontal diffusion furnaces with the Tempress(R)  trademark
under  the  Amtech/Tempress  name.  These  furnaces  utilize  existing  industry
technology for sale to customers who do not require the advanced  automation of,
or cannot incur the major expense of  acquiring,  vertical  diffusion  furnaces.
While the major advantage of vertical diffusion furnaces is their susceptibility
to increased automation, which decreases the degree of human intervention in the
manufacturing  process,  the use of  horizontal  diffusion  furnaces,  with less
automation,   is  more   economical  for  larger  size  chips  and   multi-model
semiconductor   manufacturing.   While  overall  market  demand  for  horizontal
diffusion  furnaces is declining,  the Company believes that a niche market will
persist. The price range of automated diffusion furnace systems is approximately
$100,000 to $850,000, depending on the customer's requirements.

     The  Company  has  transitioned  from  being a  distributor  of  horizontal
diffusion furnaces substantially assembled by suppliers to being a manufacturer.
The  Company  continues  to acquire  the frames  and  covers for  furnaces  from
subcontractors.  This  transition has resulted in an increase in both the number
and variety of  products  offered by the Company and is part of a plan to expand
its sales,  marketing and manufacturing  capabilities.  The Company has expended
substantial sums to acquire assets and to fund the start-up and operation of the
horizontal  diffusion  furnace  business.  The Company  acquired  certain assets
previously  owned  by  a  bankrupt  company,   Tempress  B.V.,  located  in  The
Netherlands.  That business involved the development,  manufacture and sale of a
number of different  products,  including a horizontal  diffusion  furnace.  The
Company also acquired  from the bankrupt  estate the right to use the trade name
"Tempress"  in  connection  with such  furnaces.  The right to use the tradename
"Tempress"  is also held by three  subsidiaries  of the former  Tempress B.V. in
connection  with the sale of other Tempress  products and services  unrelated to
the  horizontal  diffusion  furnace.  The  Company  has hired a number of former
Tempress  technical and sales personnel to design,  manufacture and sell its own
furnace products under the "Tempress" name. The Company believes that the causes
of  the  Tempress  bankruptcy  were  related  to  the  fact  that  Tempress  was
undercapitalized and that large expenditures were incurred in the development of
other products, and was not related to the quality or reputation of the Tempress
products.  Accordingly,  the Company  believes that a diffusion  furnace product
designed by former Tempress product engineers and sold under the "Tempress" name
will be accepted by the Company's targeted market.

     There is, of course,  no assurance of success in the  Company's  efforts to
design  and market  horizontal  diffusion  furnace  products.  If the  Company's
efforts do not succeed, the Company may suffer significant losses. The Company's
ability  to carry  out its plan is  subject  to risk,  arising  in part from the
cyclical  nature of the business.  There is a further risk that, as is estimated
by at least one market research firm, the installation of new vertical diffusion
furnaces  will  increase at a faster rate than is estimated  by the Company.  In
that  case,  the  demand  for and sales of the  Company's  horizontal  diffusion
furnaces may be below the Company's estimates, its revenue and possible earnings
may not increase as expected and the
                                        9
<PAGE>
period of losses for The  Netherlands  operation  may extend for a period longer
than the start-up phase.

CVD Technology

     The Company has  patented a certain  invention  which it believes may be of
significant  importance to the semiconductor  manufacturing  industry. It is now
having a research  study  conducted to determine the  feasibility  of developing
semiconductor   manufacturing  equipment  using  this  patented  invention.  The
invention  relates to an improvement to the  photo-assisted  CVD process used in
the  manufacture of certain  semiconductors.  The improvement  uses  ultraviolet
light to activate the deposition  reactions  rather than thermal heat or plasma,
which  are  presently  the  common  means in  commercial  CVD  processing.  This
photo-assisted  CVD process is separate and distinct from the diffusion  process
in which the Company's  existing products are used and its use is not limited to
horizontal diffusion furnace facilities as are the Company's existing products.

     A photo-assisted CVD process is potentially  attractive for the manufacture
of semiconductors because it allows a less severe processing environment. First,
the  photo-assisted  CVD  processes  occur at lower  temperatures  and the lower
temperature  reduces  the risk of defects in the  deposited  materials.  In this
process,  ultraviolet  or UV light is used as the  energy  source to effect  the
deposition of chemicals on the wafers.  The  photo-assisted  CVD processes  also
avoid  radiation  damage  which can occur with  currently  prevalent  processes.
Furthermore, photo-assisted CVD processes based on the Company's patented method
are more readily  adaptable to the use of larger wafers (the silicon  substrates
from which  semiconductor  chips are made) than other CVD  processes now in use.
The trend in the  industry is to the use of larger size wafers and smaller  size
chips.

     The Company has not determined whether a commercially  feasible product can
be  developed  from this  technology.  The Company  has entered  into a Research
Agreement  with the  Regents  of the  University  of  California  ("University")
whereunder a feasibility  study is being  undertaken by the University under the
direction of Roger W. Anderson,  Ph.D. It is anticipated that, if the results of
the  University  study are  favorable,  the  Company  will  design  and  develop
specifications  for an initial  photo-assisted CVD device. The initial device is
expected to have one "chamber,"containing a number of light pipes and a pedestal
(called a  susceptor)  to hold wafers and would be sold to academic and industry
research  facilities.  If use by such  facilities  results in  acceptance of the
technology  by the  industry,  the  Company  will  attempt  to  develop  a fully
automatic   multi-chamber,   multi-wafer   product   for  mass   production   of
semiconductors.  The  automation  (or  robotic)  components  of the  product are
expected to be procured from other manufacturers.

     The  Company's  current  plans for the  proposed  new photo CVD product are
conceptual  only.  Detailed  planning is expected to be done if, as and when the
University  study  demonstrates  the  product's  commercial   feasibility.   The
development  of first a  research  laboratory  product  and  then an  industrial
product is expected to take a period of approximately two to three years.
                                       10
<PAGE>
      The total cost of the  photo-assisted  CVD product  development  effort is
expected to be approximately $3,200,000,  expended in stages over a two to three
year period. All of the Company's plans and estimates are subject to significant
uncertainties.

Wafer Reclaiming Venture

     In  November  1995,  the Company  entered  into a joint  venture  agreement
pursuant to which it acquired a 45% ownership interest and a 50% voting interest
in Seil Semicon,  Inc. Seil Semicon,  Inc., which is in the preliminary start-up
phase intends to develop and operate a silicon test wafer  reclaiming  business.
The Company agreed to invest $500,000 in the venture, $425,000 of which has been
paid and up to $75,000 of which may be called at the time Seil  Semicon  obtains
$3 million in third party financing. Seil Semicon has acquired real property for
construction of the reclamation  facility.  The ultimate  success of the venture
depends on a number of factors,  including securing adequate financing, of which
there can be no assurances.

Sales & Marketing

     The Company markets its products by participation in trade shows, by direct
customer  contact  by the  Company's  sales  personnel  (the  President  and two
salesmen in the United States and two sales and marketing  personnel  located in
The Netherlands) and through independent sales representatives and distributors.
The  Company  is  dependent  on  its  President,   J.S.  Whang,  for  continuing
relationships  with key customers.  There are presently eight  independent sales
representatives,  each  covering a specified  geographical  area on an exclusive
basis. The areas now covered by  representatives  are the State of Florida,  the
New England area, Northern Europe,  Central Europe (including Germany),  France,
India, Italy, Korea, Taiwan, and the People's Republic of China. Representatives
are paid a commission as specified from time to time in the Company's commission
schedule,  which at  present is higher  for  complete  units and lower for spare
parts and accessories.

     During fiscal 1995, two customers  accounted for 28% and 11%  respectively,
of  equipment  sales.  No  other  customers  accounted  for  10% or more of this
segment's sales.

     Semiconductor equipment sales generally fluctuate with the level of capital
spending in the semiconductor industry. The semiconductor business is cyclical.

Competition

     The Company is not aware of any significant product which directly competes
with the Atmoscan(R),  however, there are several processing systems and various
configurations  of existing  manufacturing  products  which  provide  advantages
similar  to  those  that  the  Company  believes  the  Atmoscan(R)  provides  to
semiconductor  manufacturers.  Notwithstanding  the industry trend to the use of
vertical diffusion furnaces (with which Atmoscan(R) is not useable), the Company
believes  that a number of customers  are and will continue to be willing to buy
Atmoscan(R)  units  for use  with  horizontal  diffusion  furnaces  because  the
Atmoscan(R)  provides better results in terms of more uniform wafer  temperature
and dispersion of heated gases in the semiconductor  manufacturing process, less
exposure of semiconductor wafers to contaminants, and other
                                       11
<PAGE>
technical advantages which afford to its users a higher yield and, therefore,  a
lower per item cost in the manufacture of  semiconductors.  The Company believes
that there are several  products in the market which perform the same  functions
as the IBAL automation products,  IBAL Atmoscan(R),  IBAL Butler and IBAL Queue,
but they are more complex and more expensive. The IBAL products are intended for
customers who do not require the more complex systems. Load stations are sold to
customers that are upgrading  their existing  facilities  with other products of
the Company.  These load stations  provide a cleaner  environment  to those they
replace and can reduce the down-time for the upgrade as these load stations were
specifically   designed  to  accept  the  Company's   products  without  further
modification.  Products  competitive with the Company's load station are sold by
several  well-established  firms, larger than the Company. The Company believes,
however,  that there is a niche market for its load stations because Atmoscan(R)
and IBAL are included as components.  The cantilever system is designed for easy
assembly and disassembly to minimize down-time during  maintenance.  The Company
currently sells its horizontal diffusion furnaces to customers who purchase them
in small  quantities  and expects that it will maintain a  competitive  position
through its policy of providing  competitive prices and product support services
designed for the customer's specific requirements.

Employees

     The Company presently  employs 44 people (including the corporate  officers
and four contract  employees) in its  semiconductor  equipment  business;  16 in
manufacturing,  14 in engineering,  seven in administration,  and seven in sales
positions.  Of these,  27 are  employed  at the  Company's  offices and plant in
Tempe, Arizona, and 17 at Tempress' facility in The Netherlands.


           FINANCIAL INFORMATION ABOUT FOREIGN AND DOMESTIC OPERATIONS
                                AND EXPORT SALES

     The  following  table  shows the  amounts  of revenue  attributable  to the
Company's  foreign  sales for the past three  fiscal  years (the  United  States
equipment  sales  being  included  in the table for  comparison  purposes).  All
foreign  sales  were  associated  with  the  Company's  semiconductor  equipment
business and none were to affiliates.
<TABLE>
<CAPTION>
                                        1995                                1994                                1993
                          ---------------------------------   ---------------------------------   --------------------------------
<S>                               <C>                <C>              <C>                <C>             <C>                  <C>  
United States (1)                 $2,462,852          (36%)           $2,472,176          (51%)          $2,003,064           (49%)
Far East (2)                       3,483,419          (51%)            1,136,432          (26%)           1,798,670           (44%)
Europe (3)                           493,786           (7%)              222,376           (5%)             286,152            (7%)
India                                424,011           (6%)              500,095          (12%)              -                 (0%)
                                   ---------          -----            ---------         ------           ---------          -----
Total                             $6,864,068         (100%)           $4,331,079         (100%)          $4,087,886          (100%)
</TABLE>

- ----------
(1) Includes sales in Canada, which are not material.
(2) Includes Korea, Singapore, Taiwan, Japan and the People's Republic of China.
(3) Includes sales in Israel, which are not material.
                                       12
<PAGE>
                                  RISK FACTORS

     Any investment in the securities  offered hereby will involve a high degree
of risk.  Prospective  investors  should  carefully  consider the following risk
factors before making an investment decision.


     1. New  Horizontal  Diffusion  Furnace  Product.  The Company has  invested
approximately  $1.6 million in cash in the acquisition of assets  currently used
by Tempress in the manufacture and sale of horizontal  diffusion furnaces and to
fund the start-up  losses and operation of that  business.  Those assets include
certain items purchased from another  company which had previously  acquired the
entire  business  of  a  bankrupt  company,   Tempress  B.V.,   located  in  The
Netherlands.  The Company  recently  acquired a facility in The  Netherlands for
Tempress'  operations.  The Company also acquired  from the bankrupt  estate the
right to use the trade name  "Tempress" in connection  with such  furnaces.  The
Company has also hired a number of former Tempress technical and sales personnel
with a view to  designing,  manufacturing  and selling its own furnace  products
under the "Tempress"  name. The Company believes that the causes of the Tempress
bankruptcy were related to the fact that Tempress was  undercapitalized and that
large  expenditures  were  incurred in the  development  of other  products  and
unrelated to the quality and  customer  acceptance  of the  Tempress  horizontal
diffusion  furnace.  The Company further believes that employing  certain former
Tempress  personnel  and using  that trade name will  facilitate  the  Company's
efforts to sell its furnace  products.  While the expenses  associated with this
new  expansion are expected to result in an initial  period of operating  losses
for the  Company,  such losses are expected to be  recovered  during  subsequent
periods if the  expansion  is  successful.  There is of course no  assurance  of
success in this effort and if the Company's efforts do not succeed,  the Company
may suffer the permanent loss of  approximately  $1,600,000.  There is a further
risk  that,  as  is  estimated  by  at  least  one  market  research  firm,  the
installation of new vertical  diffusion  furnaces will increase at a faster rate
than is estimated by the Company.  In that case, the demand for and sales of the
Company's  horizontal  diffusion furnaces may be below the Company's  estimates,
its revenue and possible earnings may not increase as expected and the period of
losses for The Netherlands  operation may extend beyond the start up phase.  See
"THE COMPANY" and RISK FACTOR NO. 5, below.

     2. Proposed New Photo CVD Product.  A substantial  portion of the Company's
cash has been and will continue to be applied to the  development  of a proposed
new  photo-assisted  CVD product based on patented  technology which has not yet
been shown to be functionally or  economically  feasible.  On March 2, 1994, the
Company entered into an agreement with the University of California,  Santa Cruz
("University"),  whereunder the University is conducting certain research with a
view to determining the feasibility of a successful development effort. Although
the Company  plans to terminate the research and  development  at any time if it
does not appear to be  commercially  feasible,  termination  would result in the
incurrence of substantial  losses.  The Company's  management  estimates that it
will need to expend approximately $3.2 million to develop marketable models of a
photo-assisted CVD product.  However,  actual expenditures may materially exceed
the Company's present estimates because of unexpected  technical  engineering or
manufacturing requirements, general price increases, etc. The estimated
                                       13
<PAGE>
expenditures  for the development of the proposed new product do not include any
provision  for the  expansion  of  facilities  for the  manufacture  of such new
product. Since operating revenues are unlikely to result in sufficient cash flow
to provide such  additional  funds,  the source of such funds may be  additional
capital investment which, if available when required, would dilute the ownership
percentage of shareholders of the Company.

     3. Adequacy of Financing.  Additional  financing is expected to be required
for the  implementation  of the  Company's  plans  for  expansion.  There  is no
assurance that any additional  financing will be available if and when required,
or,  even if  available,  that it would  not  materially  dilute  the  ownership
percentage of the then existing shareholders.

     4.  Assumptions.  The Company's  plans for the financing and development of
its proposed business expansion are based on the experience,  market information
and  judgment  of  Management   and  upon  certain   assumptions.   Management's
assumptions include in particular,  the Company's ability to obtain the share of
the horizontal  diffusion furnace market formerly held by Tempress,  the success
of its expanded sales and marketing  force,  the feasibility of its proposed new
photo-assisted CVD product, the development of a market for the new product, the
sufficiency of funds  available for its  development and marketing and, if those
assumptions  prove to be invalid,  the availability of other  opportunities  for
expansion.  Management  also  assumes  that  sales  for the  Company's  existing
products will continue at current levels for approximately three years. There is
no  assurance  that the  Company's  plans  will be  realized  or that any of the
assumptions  made will prove to be correct.  Even if the assumptions  underlying
its plans prove to be correct,  there can be no assurance  that the Company will
not  incur  substantial  operating  losses  in  attaining  its  goals.  See "THE
COMPANY."

              Management  believes that the Company's future  profitability  and
long term growth will depend on the continued introduction of new products which
embody either newly developed  technology or improvements of existing  products.
There is no assurance of any short term or long term success in any  development
or acquisition  effort or in penetrating  any market.  Since its present product
line  consists  of  equipment  suitable  only  for  semiconductor  manufacturing
facilities using horizontal furnace technology,  the most significant market for
the  Company's  existing  products  is most  likely to be  limited  to  existing
horizontal  furnace  facilities  or  new  facilities  which,   because  of  cost
considerations, are likely to continue to buy new horizontal furnaces.

     5.  Demand  for  Horizontal  Diffusion  Furnace  Equipment.  Demand for the
Company's  existing  products,  which are used in  conjunction  with  horizontal
diffusion furnaces, has declined in recent years because of a trend to competing
newer  vertical  diffusion  furnace   technology  in  the  industry.   Based  on
Management's  market  information,  the  Company  expects  the  market  for such
products to remain relatively stable for a period of approximately  three years,
although there is no assurance in that regard. Rather than expecting to increase
sales as the  result of a growing  market,  therefore,  the  Company  expects to
achieve that result by increasing its share of an existing  market.  Realization
of that  expectation  will depend on the success of its plan to expand its sales
and marketing  force and its product line.  Such expansion is expected to result
in more complete  sales  coverage in Europe and in the ability of the Company to
offer a more complete product mix, which will result in an increase in sales and
revenue. Among the
                                       14
<PAGE>
uncertainties  affecting  the  Company's  plan is the reaction of other  capital
equipment manufacturers competing for greater shares of the same market.

     6.  Cyclical  Nature  of  the  Semiconductor  Manufacturing  Industry.  The
semiconductor  industry  in which  the  Company  sells  its  products  is highly
cyclical and has historically  experienced periodic downturns,  which often have
had a severe  effect on the demand for  semiconductor  manufacturing  equipment.
Prior semiconductor  industry downturns have resulted in significant  reductions
in the Company's net sales, gross margin and net income. Moreover, this business
will  continue to be  dependent  on the capital  expenditures  of  semiconductor
manufacturers,  which in turn  will be  largely  dependent  on the  current  and
anticipated  market  demand  for  integrated  circuits  and  products  utilizing
integrated circuits.  Semiconductor  manufacturers are currently  experiencing a
significant   decrease  in  order   bookings.   In  addition,   the  prices  for
semiconductors have declined  dramatically,  squeezing  manufacturers'  margins.
These  factors may affect  semiconductor  manufacturers'  decisions  to purchase
capital equipment such as the Company's products.  Further price declines due to
increased  supply of  semiconductors  may have a material  adverse effect on the
Company's business and results of operations.

     7. Dependence on Certain  Foreign  Markets;  Risks  Associated with Foreign
Operations. During its most recent fiscal year, ended on September 30, 1995, 64%
of the Company's  equipment sales were made to foreign customers in the Far East
(51%),  Europe (7%) and in India (6%).  Foreign  sales are  expected to increase
significantly  as  the  result  of  the  Company's  proposed  expansion  of  its
horizontal  diffusion  business in Europe.  While the Company's business has not
been  adversely  affected in the past by its foreign  business,  there is a risk
that it may be adversely  affected in the future.  Such risk  includes  possible
losses on  account of  currency  exchange  rate  fluctuations,  possible  future
prohibitions against  repatriation of earnings,  or proceeds from disposition of
investments,  and from possible  social and military  instability in the case of
India, South Korea and possibly elsewhere.

     The Company's wholly owned subsidiary, Tempress Systems, Inc., conducts its
operations in The Netherlands.  As a result,  such operations are subject to the
taxation policies, employment and labor laws, transportation regulations, import
and export regulations and tariffs, foreign exchange restrictions, international
monetary fluctuations,  and other political, economic and legal policies of that
nation,  the European  Economic Union and the other European nations in which it
conducts  business.   Consequently,  the  Company  may  encounter  unforseen  or
unfamiliar  difficulties in conducting its European operations.  Changes in such
laws and  regulations  may  have a  material  adverse  effect  on the  Company's
operations.

     8. Competition. The semiconductor equipment industry is competitive and the
Company  is  relatively  small  in size and  resources  in  comparison  with its
competitors. There is risk that larger, better financed competitors will develop
and market more advanced products than those now proposed by the Company or that
competitors with greater financial resources may decrease prices thereby putting
the Company under financial pressure.

     9. Dependence on President. The company is now dependent for its management
and important business  relationships on the active participation of Mr. Jong S.
Whang, its
                                       15
<PAGE>
President.  The loss of his services would  materially and adversely  affect the
business of the Company and its future prospects.  There is presently  insurance
on the life of Mr.  Whang  for the  benefit  of the  Company,  in the  amount of
$1,000,000  (which may be  increased to  $2,000,000),  but there is no assurance
that such  amount will be  sufficient  to cover the cost of finding and hiring a
suitable  replacement for Mr. Whang. It may not be feasible for any successor to
maintain the same relationships.

     10.  Joint  Venture.  In November  1995,  the Company  entered into a joint
venture agreement  pursuant to which it acquired a 45% ownership  interest and a
50% voting interest in Seil Semicon,  Inc. Seil Semicon,  Inc.,  which is in the
preliminary  start-up  phase intends to develop and operate a silicon test wafer
reclaiming  business.  The Company  agreed to invest  $550,000  in the  venture,
$425,000  of which has been paid and  $125,000  of which will be due at the time
Seil  Semicon  obtains $3 million in third  party  financing.  Seil  Semicon has
acquired  real  property  for  construction  of the  reclamation  facility.  The
ultimate  success  of the  venture  depends  on a number of  factors,  including
securing adequate financing, of which there can be no assurances. If the venture
is unable to obtain third party  financing,  or experiences  delays in obtaining
third party financing, the Company may be required to invest additional funds in
the  venture,  terminate  the  venture or attempt to divest its  interest in the
venture,  any of which could result in significant losses to the Company.  There
can be no assurance that the venture ever becomes operational or profitable.

     11. Possible  Disputes.  The Company has entered into a research  agreement
with the  University  whereunder a feasibility  study is to be undertaken by the
University  to develop a prototype  model of a product  embodying  the Company's
patented photo-assisted CVD technology.  The University claims rights in certain
pre-existing intellectual property related to certain photo-assisted CVD designs
and processes.  While it is understood that the Company's patented technology is
to be the primary focus of the study, it is recognized that inventions  based on
the  University's  own claims may result from the study. If so, the Company will
have a period of 90 days after  disclosure  to it by the  University  of such an
invention in which to elect to obtain an exclusive,  royalty-bearing  license to
make, use and sell any such invention first actually  reduced to practice in the
performance  of the study.  If the Company  elects to obtain such a license,  it
will have 120 days to negotiate the terms of a license agreement. It is possible
that the Company and the  University may fail to agree on the terms of a license
agreement  within that  120-day  period.  If the  company  fails to enter into a
license  agreement,  the Company  will no longer have any rights with respect to
such inventions. Furthermore, the royalty rate under any license agreement is to
be between .5% and 2% depending on the relative  contribution  of the parties to
the development of any such invention.  Disputes could arise between the parties
as to such  contributions or to the time when the invention was first reduced to
practice,  which disputes may cause delays in negotiating the terms of a license
agreement and could result in litigation.

     12.  Product  Protection  and  Infringement.  The Company has been issued a
number of patents  covering some of its products.  The issuance of those patents
do not,  however,  provide assurance that any of them will protect the Company's
products from infringement or otherwise enhance their value. Furthermore,  while
the  Company  does not believe  that its  products  infringe on the  proprietary
rights of any other parties, there can be no assurance that
                                       16
<PAGE>
the  Company  will,  in the future,  have all the  patents or other  proprietary
rights necessary for the conduct of its business; or that other parties will not
assert infringement claims against the Company.

     13. Possible Loss of NASDAQ  Eligibility.  While the Company's Common Stock
and Warrants are now included on the Nasdaq  SmallCap Market  ("Nasdaq"),  their
continued  inclusion  will  depend  on the  Company's  ability  to meet  certain
eligibility  requirements  established for the Nasdaq SmallCap  System.  Loss of
Nasdaq  eligibility  could  result if the Company  sustains  material  operating
losses or if the market price of the  securities  falls below certain  specified
levels  (below $1.00 per share in the case of the Common  Stock).  If any of the
Company's  securities  are  ineligible  for trading on the Nasdaq  system,  such
securities  may be subject to a rule under the  Securities  Exchange Act of 1934
that imposes  additional sales practice  requirements on broker-dealers who sell
such  securities to persons  other than  established  customers  and  accredited
investors  (generally  institutions  with  assets  in excess  of  $5,000,000  or
individuals  with a net worth in excess of $1,000,000 or annual income exceeding
$200,000 or $300,000 jointly with their spouse). For transactions covered by the
rule, the broker-dealer  must make a special  suitability  determination for the
purchaser and receive the purchaser's  written consent to the transaction  prior
to the sale. The rule may adversely affect the ability of broker-dealers to sell
the Company's  securities,  and consequently may limit the public market for and
the trading price of the securities.

     14.  State  and  Federal  Registration  Requirements  for the  Exercise  of
Redeemable  Warrants.  Holders  of the  Redeemable  Warrants  have the  right to
exercise  them  only if at the time of  exercise  the  offering  and sale of the
underlying  shares of Common Stock are qualified or registered for sale pursuant
to an effective  registration  statement  under the  Securities  Act of 1933, as
amended, and under applicable securities laws of the states in which they reside
(if not exempt from such  qualification or registration  requirements).  It is a
further   requirement  that  the  Company  maintain  the  effectiveness  of  the
Registration  Statement of which this  Prospectus  is a part for the term of the
Redeemable  Warrants.  Holders of Redeemable  Warrants  residing in states where
such  shares are not  qualified  or  registered  or  otherwise  exempt from such
requirements may be denied the right to exercise them.

     15.  Redemption of Redeemable  Warrants.  The  Redeemable  Warrants will be
redeemable  by the  Company at a rate of $.05 per  underlying  share at any time
after one year from the date of this Prospectus,  provided that the market price
for the  Common  Stock for each of the 20 days ended not more than 10 days prior
to the date that such notice is given  equals or exceeds  $3.25 per share.  Such
redemption  may force the holders to exercise such  Redeemable  Warrants and pay
the exercise price at a time when it may be  disadvantageous  for them to do so,
or to sell their warrants at the current market price when they might  otherwise
hold them for possible additional  appreciation.  If a Redeemable Warrant is not
exercised prior to its expiration or redemption,  as the case may be, the holder
thereof will forfeit the right to purchase the shares of the  underlying  Common
Stock. The Company does not intend to call for any such redemption  unless there
is then in effect a current  registration  statement  as  discussed  under  RISK
FACTOR NO. 14, above.
                                       17
<PAGE>
     16. No Dividends.  The Company has never paid cash  dividends on its Common
Stock and has no plans to do so in the foreseeable  future.  The Company intends
to retain earnings, if any, for business use.

     17.   Authorization  of  Preferred   Stock.   The  Company's   Articles  of
Incorporation  authorizes the issuance of up to 100,000,000  shares of preferred
stock with such rights and preferences as may be determined from time to time by
the  Board of  Directors.  Accordingly,  the  Board of  Directors  may,  without
shareholder  approval,   issue  preferred  stock  with  dividend,   liquidation,
conversion, voting or other rights which could adversely affect the voting power
or other rights of the holders of the Company's  Common Stock. In addition,  the
issuance of such preferred stock may have the effect of rendering more difficult
or  discouraging  an  acquisition  of the  company  or changes in control of the
Company.  Although the Company does not currently  intend to issue any shares of
its preferred stock there can be no assurance that the Company will not do so in
the future.

     18.  Technological  Change.   Semiconductor   manufacturing  equipment  and
processes are subject to rapid  technological  change. The Company believes that
its future  success  will depend in part upon its ability to continue to enhance
its  existing  products  and  their  process  capabilities  and to  develop  and
manufacture  new  products  with  improved  process   capabilities  that  enable
semiconductor  manufacturers to fabricate  semiconductors more efficiently.  New
product  introductions  could contribute to quarterly  fluctuations in operating
results as orders for new products  commence  and orders for  existing  products
decline. Failure to introduce new products successfully in a timely manner could
result in loss of competitive  position and reduced sales of existing  products.
Furthermore,  the  inability to produce such  products or any failure to achieve
market acceptance could have a material adverse effect on the Company's business
and results of operations.

     19. Litigation and Contract  Disputes.  From time to time, the Company is a
party to  litigation  and disputes  incidental  to its  business and  commercial
transactions generally. The Company currently is not engaged in litigation,  but
a  certain  semiconductor  manufacturer  has  threatened  to  assert a breach of
contract claim against the Company. The Company does not believe it breached any
obligations  to such  party and,  if a claim is filed,  the  Company  intends to
assert defenses against such claim.

                                 USE OF PROCEEDS

     Assuming that the Representative's  Warrant and all the Redeemable Warrants
are exercised, the net proceeds to the Company are estimated to be approximately
$7,691,250.  The proceeds will be allocated to the Company's working capital for
Company  operations.  The Company will not receive any of the proceeds  from the
subsequent sale of the Common Stock.

                         DETERMINATION OF OFFERING PRICE

     The offering price of the Common Stock subject to this  Prospectus has been
contractually  established at $2.75 per share,  or $5.50,  the exercise price of
the  Redeemable  Warrants for the purchase of two shares.  The offering price of
the Units issuable upon exercise of the
                                       18
<PAGE>
Representative's Warrant has been contractually  established at $13.50 per Unit.
This Prospectus may be used from time to time by the Company to issue the shares
of Common Stock covered  herein upon the exercise of Redeemable  Warrants or the
Representative's Warrant by holders thereof.

                              PLAN OF DISTRIBUTION

     The  Company  will  cause the  issuance  of the  shares of Common  Stock to
Redeemable  Warrant holders or to the Representative or its designee upon proper
exercise of the Redeemable Warrants or the Representative's Warrant, as the case
may be. The Common Stock issuable on exercise of the warrants, when issued, will
be  included  in the  outstanding  shares of the  Company  quoted on the  Nasdaq
SmallCap Market.

     The  Company  will pay the  expenses  incident to the  registration  of the
securities offered hereby. The Company will not pay any expenses incident to the
offering and sale of the Common Stock by the holders thereof.

Transfer Agent and Warrant Agent

     The  Transfer  Agent for the Common  Stock and the  Redeemable  Warrants is
American  Securities  Transfer,  Incorporated,  of 938 Quail Street,  Suite 101,
Lakewood, Colorado 80202-1817.

                                  RECENT EVENTS

     Sale of  Contract  Personnel  Business.  In  October  1995,  the  Board  of
Directors  of the  Company  determined  to  dispose  of the  contract  personnel
business  in order  to  allow  the  Company  to focus on its core  semiconductor
equipment  business.  On December 29, 1995, Amtech entered into an Agreement and
Plan of Reorganization  and Corporate  Separation with Eugene R. Hartman, a Vice
President and director of Amtech and the President of Echelon (the "Agreement"),
to split-off the contract personnel business operated by Amtech through Echelon.
On  January  29,  1996,  the  parties  closed  the  split-off  transaction  (the
"Split-Off")  effective as of December 31, 1995. The Company  transferred all of
the stock of Echelon held by it to Mr.  Hartman in exchange for 98,016 shares of
Amtech Common Stock held by Mr. Hartman. The total consideration for the Echelon
stock was valued at  approximately  $800,000.  A cash  dividend in the amount of
$393,368 was distributed by Echelon to Amtech prior to the Spilt-Off in order to
equalize  values.  Pursuant to the Agreement,  Mr.  Hartman  acquired all of the
assets and assumed all of the liabilities of Echelon.

     Prior to entering into the Echelon Agreement with Mr. Hartman,  the Company
sought and negotiated offers from third parties.  However, in the opinion of the
Board, the best offer was tendered by Mr. Hartman. The transaction was conducted
at arms' length,  and management  does not believe that a better deal could have
been made with unrelated third parties.
                                       19
<PAGE>
     As of January 26, 1996, Mr. Hartman resigned as an officer of Amtech and as
of February 29, 1996,  Mr.  Hartman  ceased to be a director of the Company upon
election of his successor at the Company's annual meeting of shareholders.

     Industry Slowdown. Semiconductor manufacturers currently are experiencing a
significant   decrease  in  order   bookings.   In  addition,   the  prices  for
semiconductors have declined  dramatically,  squeezing  manufacturers'  margins.
These  factors may affect  semiconductor  manufacturers'  decisions  to purchase
capital equipment such as the Company's products.  Further price declines due to
increased  supply of  semiconductors  may have a material  adverse effect on the
Company's business and results of operations.

     Increased Backlog. During recent periods, the Company has been experiencing
a  significantly  greater order backlog than prior periods.  The increase in the
backlog is due in substantial part to a substantial  multi-year order,  expanded
product line and customers'  requested  delays in deliveries from that scheduled
in the  original  purchase  orders.  Also,  the  Company  has  experienced  long
lead-times  in purchasing  certain  components  from  suppliers of quartz parts,
which has and is  resulting  in the  Company  taking up to six months to deliver
equipment that contains such quartz parts.

                                     EXPERTS

     The financial  statements of the Company as of September 30, 1995,  and for
each of the three years in the period ended September 30, 1995,  incorporated by
reference herein and in the registration statement,  have been audited by Arthur
Andersen LLP,  independent public accountants,  as indicated in the reports with
respect  thereto,  in  reliance  upon the  authority  of said firm as experts in
giving said reports.


                                  LEGAL MATTERS

     The legality of the securities  offered hereby has been passed upon for the
Company by Squire, Sanders & Dempsey, Phoenix, Arizona.
                                       20
<PAGE>
========================================  ======================================

NO PERSON  HAS BEEN  AUTHORIZED  TO GIVE
ANY   INFORMATION   OR   TO   MAKE   ANY
REPRESENTATIONS    OTHER    THAN   THOSE
CONTAINED  IN  THIS  PROSPECTUS  OR  ANY
RELATED  PROSPECTUS  SUPPLEMENT  AND, IF
GIVEN  OR  MADE,  SUCH   INFORMATION  OR
REPRESENTATIONS  MUST NOT BE RELIED UPON
AS HAVING BEEN AUTHORIZED.  NEITHER THIS
PROSPECTUS NOR ANY PROSPECTUS SUPPLEMENT
CONSTITUTES  AN  OFFER  TO  SELL  OR THE
SOLICITATION  OF AN  OFFER  TO  BUY  ANY
SECURITIES  OTHER  THAN  THE  SECURITIES
DESCRIBED IN THIS PROSPECTUS AND RELATED
PROSPECTUS  SUPPLEMENT  OR AN  OFFER  TO
SELL OR THE  SOLICITATION OF AN OFFER TO
BUY SUCH SECURITIES IN ANY CIRCUMSTANCES
IN WHICH SUCH OFFER OR  SOLICITATION  IS           AMTECH SYSTEMS, INC.       
UNLAWFUL.  NEITHER THE  DELIVERY OF THIS                                     
PROSPECTUS  OR  ANY  RELATED  PROSPECTUS                                     
SUPPLEMENT  NOR ANY SALE MADE  HEREUNDER     2,835,000 Shares of Common Stock 
SHALL, UNDER ANY  CIRCUMSTANCES,  CREATE              ___________           
ANY  IMPLICATION  THAT THERE HAS BEEN NO          
CHANGE  IN THE  AFFAIRS  OF THE  COMPANY
SINCE  THE  DATE   HEREOF  OR  THAT  THE
INFORMATION  CONTAINED HEREIN OR THEREIN
IS CORRECT AS OF ANY TIME  SUBSEQUENT TO
ITS DATE.





          --------------------                 ---------------------------


                                                        PROSPECTUS


           TABLE OF CONTENTS                   ----------------------------


                                     Page
                                     ----


Available Information..................2
Incorporation of Certain Documents
  by Reference.........................3
Prospectus Summary.....................4
The Company............................6
Risk Factors..........................13
Use of Proceeds.......................18
Determination of Offering Price.......18
Plan of Distribution..................19
Recent Events.........................19
Experts...............................20
Legal Matters.........................20

========================================  ======================================
<PAGE>
                                     PART II

                     INFORMATION NOT REQUIRED IN PROSPECTUS


Item 14.  Other Expenses of Issuance and Distribution.

     The estimated  expenses in connection with the issuance and distribution of
the securities being registered,  other than underwriting  compensation,  are as
follows:

SEC registration fee.....................................................$ 2,489
Legal fees and disbursements.............................................$10,000
Accounting fees and disbursements........................................$ 2,000
Blue Sky fees and expenses...............................................$ 7,500
Miscellaneous............................................................$ 7,511
                                                                         -------

Total....................................................................$29,500


     The foregoing expenses will be borne by the Company.

Item 15.  Indemnification of Directors and Officers.

     The  right  of the  shareholders  to sue any  director  for  misconduct  in
conducting  the affairs of the Company is limited by Article 14 of the Company's
Articles  of  Incorporation  and  Arizona  statutory  law to actions for damages
resulting  from a breach of a  director's  fiduciary  duty of  loyalty,  acts or
omissions  not in good  faith or  involving  intentional  misconduct  or knowing
violations of the law, the unlawful payment of dividends or stock repurchases or
transactions in which a director receives an improper personal benefit. Ordinary
negligence is not a ground for such a suit.

     The Company  also has the right,  pursuant  to Article 11 of the  Company's
Articles  of  Incorporation,  to  indemnify  any  present or former  director or
officer of the Company for all expenses  incurred by them in connection with any
legal action brought or threatened  against such person for or on account of any
action or omission alleged to have been committed while acting in the course and
scope of the person's duties,  if the person acted in good faith and in a manner
which  the  person  reasonably  believed  to be in or not  opposed  to the  best
interests  of  the  Company,  and  with  respect  to  criminal  actions,  had no
reasonable  cause to believe the person's  conduct was  unlawful,  provided that
such  indemnification  is made pursuant to then  existing  provisions of Arizona
statutory  law at the time of any such  indemnification.  The  statute  does not
limit the  liability of directors  or officers  for monetary  damages  under the
Federal securities laws.

     Insofar as indemnification for liabilities arising under the Securities Act
may be permitted to directors,  officers or persons controlling the Company, the
Company has been informed that
                                      II-1
<PAGE>
in the opinion of the Commission such  indemnification  is against public policy
as expressed in the Securities Act and is therefore unenforceable.

Item 16.  Exhibits.
<TABLE>
<CAPTION>
                                                                                                        Method
   Exhibit No.      Description                                                                       of Filing
   -----------      -----------                                                                       ---------
<S>                 <C>                                                                                   <C>
       3.1          Articles of Incorporation                                                             A

       3.2          Articles of Amendment to Articles of Incorporation, dated                             A
                    April 27, 1983

       3.3          Articles of Amendment to Articles of Incorporation, dated                             B
                    May 19, 1987

       3.4          Articles of Amendment to Articles of Incorporation, dated                             C
                    May 2, 1988

       3.5          Articles of Amendment to Articles of Incorporation, dated                             G
                    May 28, 1993

       3.6          Amended and Restated Bylaws                                                           D

        5           Opinion of legal counsel                                                              *

       10.1         Amended and Restated 1995 Stock Option Plan                                           H

       10.2         1995 Stock Bonus Plan                                                                 H

       10.3         Non-Employee Director Stock Option Plan                                               I

       10.4         Employment Agreement with Robert T. Hass, dated May                                   F
                    19, 1992

       10.5         Registration Rights Agreement with J.S. Whang, dated                                  G
                    January 24, 1994

       10.6         J.S. Whang Stock Option Agreement                                                     A

       10.7         Employment Agreement with J.S. Whang, dated October                                   G
                    1, 1994

       10.8         Research Agreement with The Regents of the University                                 E
                    of California dated March 1, 1994, together with
                    amendments thereto dated March 1, 1994, March 30,
                    1994, March 7, 1995, June 26, 1995, October 16, 1995,
                    November 29, 1995, and December 4, 1995.

       10.9         Amendment to Research Agreement with the Regents of                                   *
                    the University of California dated July 8, 1996.

       10.10        Contract of Sale (Real Property) dated June 21, 1996                                  *
                    between Tempress Systems, Inc. and Orgelmakerij Gedr.
                    Rell B.V.
</TABLE>
                                      II-2
<PAGE>
<TABLE>
<CAPTION>
                                                                                                        Method
   Exhibit No.      Description                                                                       of Filing
   -----------      -----------                                                                       ---------
<S>     <C>         <C>                                                                             <C>          
        21          Consent of accountants                                                                *

        22          Subsidiaries of the Registrant                                                        E

        24          Powers of Attorney                                                              See Signature
                                                                                                         Page
</TABLE>


- ----------

*    Filed herewith.
A    Incorporated by reference to the Company's Form S-18 Registration Statement
     No. 2-83934-LA
B    Incorporated  by reference to the Company's  Annual Report on Form 10-K for
     the fiscal year ended September 30, 1987
C    Incorporated  by reference to the Company's  Annual Report on Form 10-K for
     the fiscal year ended September 30, 1988
D    Incorporated  by reference to the Company's  Annual Report on Form 10-K for
     the fiscal year ended September 30, 1991
E    Incorporated  by reference to the Company's  Annual Report on Form 10-K for
     the fiscal year ended September 30, 1995
F    Incorporated  by reference to the Company's  Annual Report on Form 10-K for
     the fiscal year ended September 30, 1993
G    Incorporated by reference to the Company's Form S-1 Registration  Statement
     No. 33-77368
H    Incorporated  by  reference to Company's  Form S-8  Registration  Statement
     relating to the Amended and  Restated  1995 Stock  Option Plan and the 1995
     Stock  Bonus Plan filed with the  Securities  and  Exchange  Commission  on
     August 8, 1996
I    Incorporated  by  reference to Company's  Form S-8  Registration  Statement
     relating to the  Non-Employee  Directors  Stock  Option Plan filed with the
     Securities and Exchange Commission on August 8, 1996




Item 17.  Undertakings.

     The undersigned registrant hereby undertakes:

     (1)     To file, during any period in which offers or sales are being made,
             a post-effective amendment to this registration statement;

             (i)     To include  any  prospectus required by Section 10(a)(3) of
                     the Securities Act of 1933;

             (ii)    To reflect in  the  prospectus  any facts or events arising
                     after the effective  date of the registration statement (or
                     the most  recent  post-effective  amendment thereof) which,
                     individually  or in the aggregate,  represent a fundamental
                     change in  the  information  set forth in the  registration
                     statement;
                                      II-3
<PAGE>
             (iii)   To  include any  material  information  with respect to the
                     plan  of  distribution  not  previously  disclosed  in  the
                     registration  statement  or any  material  change  to  such
                     information in the registration statement;

provided,  however,  that  paragraphs  (1)(i)  and  (1)(ii)  do not apply if the
registration statement is on Form S-3, Form S-8, and the information required to
be included in a  post-effective  amendment by those  paragraphs is contained in
periodic reports filed by the registrant  pursuant to Section 13 or 15(d) of the
Securities  Exchange  Act of 1934  that are  incorporated  by  reference  in the
registration statement.

     (2)      That,  for the  purpose of  determining  any  liability  under the
              Securities Act of 1933, each such  post-effective  amendment shall
              be  deemed  to be a new  registration  statement  relating  to the
              securities offered therein, and the offering of such securities at
              that time  shall be deemed to be the  initial  bona fide  offering
              thereof.

     (3)      To remove from registration by means of a post-effective amendment
              any of the securities  being registered which remain unsold at the
              termination of the offering.

     (4)      That,  for  purposes  of  determining   any  liability  under  the
              Securities  Act of 1933,  each filing of the  registrant's  annual
              report   pursuant  to  Section  13(a)  or  Section  15(d)  of  the
              Securities  Exchange  Act of 1934  (and,  where  applicable,  each
              filing of an employee  benefit  plan's annual  report  pursuant to
              Section  15(d) of the  Securities  Exchange  Act of 1934)  that is
              incorporated by reference in the  registration  statement shall be
              deemed  to  be  a  new  registration  statement  relating  to  the
              securities offered therein, and the offering of such securities at
              that time  shall be deemed to be the  initial  bona fide  offering
              thereof.
                                      II-4
<PAGE>
                                   SIGNATURES

     Pursuant to the requirements of the Securities Act of 1933, Amtech Systems,
Inc.  certifies that it has  reasonable  grounds to believe that it meets all of
the requirements for filing on Form S-3 and has duly caused this to Registration
Statement on Form S-3 to be signed on its behalf by the  undersigned,  thereunto
duly   authorized,   in  the   City  of  Tempe   and   State   of   Arizona   on
August 7, 1996.

                                                 AMTECH SYSTEMS, INC.
                                                 an Arizona corporation


                                                 By /s/ Jong S. Whang
                                                   -----------------------------
                                                       Jong S. Whang
                                                       President


                                POWER OF ATTORNEY

     KNOW  ALL MEN BY THESE  PRESENTS,  that the  undersigned,  constitutes  and
appoints JONG S. WHANG and ROBERT T. HASS, and each of them, his true and lawful
attorney-in-fact  and agent with full power of substitution and  resubstitution,
for him and in his name, place and stead, in any and all capacities, to sign any
and all  amendments  (including  post-effective  amendments)  to this  Form  S-3
Registration  Statement and to file the same with all exhibits thereto,  and all
documents in connection therewith,  with the Securities and Exchange Commission,
granting such  attorneys-in-fact  and agents,  and each of them,  full power and
authority to do and perform each and every act and thing requisite and necessary
to be done in and about the  premises,  as fully and to all intents and purposes
as he might or could do in person, hereby ratifying and confirming all that such
attorneys-in-fact  and agents,  or each of them,  may lawfully do or cause to be
done by virtue hereof.

     Pursuant to the  requirements of the Securities  Exchange Act of 1934, this
report on Form S-3 Registration Statement has been signed below by the following
persons  on  behalf of the  registrant  and in the  capacities  and on the dated
indicated:
<TABLE>
<CAPTION>

Signature                                  Title                                          Date
- ---------                                  -----                                          ----

<S>                                        <C>                                            <C>
/s/ Jong S. Whang                          Chairman of the Board,                         August 7, 1996
- ------------------------------             President (Chief Executive Officer)
Jong S. Whang                              

/s/ Robert T. Hass                         Vice President-Finance                         August 7, 1996
- ------------------------------             (Chief Financial & Accounting 
Robert T. Hass                             Officer); Director            
                                           

/s/ Donald F. Johnston                     Director                                       August 7, 1996
- ------------------------------
Donald F. Johnston

/s/ Alvin Katz                             Director                                       August 7, 1996
- ------------------------------
Alvin Katz

/s/ Bruce R. Thaw                          Director                                       August 7, 1996
- ------------------------------
Bruce R. Thaw
</TABLE>
                                       S-1

                                 August 7, 1996


Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C. 20549

         Re:      Amtech Systems, Inc.
                  Redeemable Common Stock Purchase Warrants

Ladies and Gentlemen:

         We  have  acted  as  counsel  to  Amtech  Systems,   Inc.,  an  Arizona
corporation  (the "Company"),  in connection with its Registration  Statement on
Form S-3 (the  "Registration  Statement") filed under the Securities Act of 1933
relating to the  registration of 2,835,000 shares of the Company's Common Stock,
$.01 par value (the  "Common  Stock"),  consisting  of (i)  2,415,000  shares of
Common Stock  issuable  upon the exercise of issued and  outstanding  Redeemable
Common  Stock  Purchase  Warrants  (the  "Redeemable  Warrants")  issued  in the
Company's December 15, 1994 public offering of Units (the "Unit Offering"), each
Unit  consisting  of six shares of Common Stock and three  Redeemable  Warrants;
each Redeemable Warrant exercisable for two shares of Common Stock; (ii) 210,000
shares of Common  Stock  issuable  as  components  of up to  35,000  Units  (the
"Representative's  Units") that are issuable upon exercise of a warrant  granted
to the underwriter of the Unit Offering (the  "Representative's  Warrant");  and
(iii) 210,000 shares of Common Stock underlying the Redeemable Warrants issuable
as  components  of  the  Representative's  Units  issued  upon  exercise  of the
Representative's Warrant.

         In that connection, we have examined such documents,  corporate records
and other instruments as we have deemed necessary or appropriate for purposes of
this  opinion,  including  the Articles of  Incorporation,  as amended,  and the
Bylaws of the Company.

         Based upon the foregoing, we are of the opinion that:

         1. The Company  has been duly  organized  and is validly  existing as a
corporation under the laws of the State of Arizona.
<PAGE>
Securities and Exchange Commission
August 7, 1996
Page 2
- --------------------------------------------------------------------------------

         2. The 2,415,000  shares of Common Stock  issuable upon the exercise of
the issued and outstanding Redeemable Warrants issued in the Unit Offering, when
issued and sold in accordance with the terms of the Redeemable Warrants, will be
validly issued, fully paid and nonassessable.

         3. The 210,000  shares of Common Stock  issuable as  components  of the
Representative's  Units that are issuable upon exercise of the  Representative's
Warrant;  and the  210,000  shares of Common  Stock  underlying  the  Redeemable
Warrants  issuable  as  components  of the  Representatives  Units  issued  upon
exercise of the  Representative's  Warrant,  when issued and sold in  accordance
with the terms of the Representative's  Units, the Representative's  Warrant and
the Redeemable Warrants, will be validly issued, fully paid and nonassessable.

         We hereby  consent  to the use of this  opinion  as an  exhibit  to the
Registration Statement.

                                                     Very truly yours,

                                                     SQUIRE, SANDERS & DEMPSEY

July 8, 1996



Mr. Mark S. Coburn
University of California, Santa Cruz
Contracts and Grants Office
399C Applied Sciences Building
Santa Cruz, California 95064


Dear Mr. Coburn:

The purpose of this letter is to confirm and to reduce to writing the  agreement
of Amtech  Systems,  Inc.  ("Sponsor")  and The  Regents  of The  University  of
California ("University") to modify the Research Agreement ("Agreement") between
them dated March 2, 1994, as provided in Article 1.1 and below.

Because of delays in the performance of this project,  and to provide sufficient
time for the  University  to  complete  Phase  II of the  Photo-CVD  Project  as
contained in the report and proposal of Roger Anderson,  Ph.D dated February 27,
1996,  including but not limited to completion  of the work to  demonstrate  the
potential of the NIQ and excimer lamps in various Photo-CVD  processes,  process
development, investigation of alternative process chemistries for the deposition
of  silicon  oxide,  silicon  nitride,  and  other  materials  such as  tantalum
penta-oxide  using  Excimer  laser  activated  CVD  and to  possibly  facilitate
augmentation of the budget beyond the NIQ lamp,  excimer lamp, and excimer laser
phases,  the Sponsor and the University  hereby agree to extend the Agreement to
the later of October 31, 1996, or the  completion of the proposed work for Phase
II.

NOW,  THEREFORE,  the first sentence of Article 2.1 is hereby  modified to read,
"The period of  performance of this Agreement is March 1, 1994 through the later
of October 31, 1996 or the date on which the work  contemplated  by the February
27, 1996 proposal for Phase II of the Photo-CVD Project has been completed and a
report thereon provided to the Sponsor."

FURTHERMORE, the first sentence of Article 4.1 is hereby modified as follows: It
is agreed to and  understood by the parties  hereto that,  subject to Article 2,
the total  cost to the  Sponsor  shall not  exceed  $599,148,"  an  increase  of
$243,743 over the initial contract amount, to complete and report on the work of
Phase II of the

                                                   Continued on next page.......
<PAGE>
Mr. Mark S. Coburn
University of California, Santa Cruz
July 8, 1996
Page 2

Photo-CVD  Project as contained  in the report and  proposal of Roger  Anderson,
PhD. dated February 27, 1996,  including but not limited to complete the work to
demonstrate  the  potential  of the NIQ and excimer  lamps in various  Photo-CVD
processes,  process  development,  and an investigation  of alternative  process
chemistries  for the deposition of silicon  oxide,  silicon  nitride,  and other
materials such as tantalum  penta-oxide using Excimer laser activated CVD. It is
expressly  understood  that this  increase  includes  salaries of support  staff
through the later of October 31, 1996 or the  completion  of the work and report
on Phase II of the Photo-CVD  Project and 3 months of salary for Roger Anderson,
Ph.D for the summer months of calendar  year 1996.  It is  understood  that this
extension  involves no additional  cost to Amtech  Systems,  Inc.,  the Sponsor,
beyond the increase  stated above,  even if the University  requires time beyond
October 31, 1996 to complete and report on Phase II.

There are now commercially  available  excimer lamps that are not based upon the
disclosed designs of Roger W. Anderson, Ph.D.

THEREFORE,  the first  paragraph  of  Article  8.2 is hereby  replaced  with the
following:  "Unless it is determined by a court of competent  jurisdiction  that
University  is unable to do so and  provided  that Sponsor pays its share of the
costs of the  research  project  supported  by this  Agreement  as set  forth in
Article 4.1, as amended,  Sponsor shall be given a  time-limited  first right to
negotiate  an  exclusive,  royalty-bearing  license  to  make,  use and sell any
patentable  invention which is either 1) both (a) included in Method B or Method
C and (b) first  actually  reduced to  practice in the  performance  of research
under this Agreement  ("Research  Invention") or 2) conceived and first actually
reduced to practice in the  performance of research under this  Agreement.  This
license  right  shall  exclude  those  patentable  inventions  using laser light
sources which are the disclosed methods of Roger W. Anderson,  Ph.D. The license
right shall also  exclude  those  patentable  inventions  using rare gas halogen
excimer light  sources  which are based upon the  disclosed  designs of Roger W.
Anderson,  Ph.D, unless they are commercially  available in the market place. It
is understood and agreed that the Sponsor already has the right to make, use and
sell products that include commercially  available excimer lamp(s) and Method A,
without  requiring a license  from the  University.  It is also  understood  and
agreed that Method A shall be the primary focus of this Research."

Nothing in this letter in any way  modifies any of the other  provisions  of the
Research Agreement.

                                                   Continued on next page.......
<PAGE>
Mr. Mark S. Coburn
University of California, Santa Cruz
July 8, 1996
Page 3


If the foregoing  accurately  reflects your  understanding  and you agree as set
forth  above,  please  have a copy of this  letter  signed by a duly  authorized
person and return it to us, whereupon it will become a binding  amendment to the
Research Agreement.

Very truly yours,

/s/ J.S. Whang

J.S. Whang
President


JSW:rh





ACCEPTED AND AGREED TO:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA



By:  /s/ Mark Coburn
   -----------------------------------------------


Their:  Director, Office of Sponsored Projects
      --------------------------------------------


                                CONTRACT OF SALE

Today, the twenty-first of June, nineteen hundred and ninety-six,  the following
parties appeared before me, Mr Eric Feijen, junior civil-law notary, residing in
Heerde,  deputizing for the civil-law notary  practicing in Heerde,  Mr Johannes
Willibrordus Jozef Maria Schurink: --

 ..---------

1. Mr Wicher Albertus Reil, organ builder, residing at Korte Soerelseweg 2, 8181
AM  Heerde,  born in  Heerde  on the  sixteenth  of July  nineteen  hundred  and
forty-two, married, passport number L 060054, acting in his capacity as managing
director of the private limited company  Orgelmakerij Gebrs. Reil B.V., with its
registered office in Heerde and its principal place of business at Postweg 50/B,
8181 VJ Heerde,  and as authorized  representative  of the sole deputy  managing
director of the aforementioned  private limited company,  Mr Johann Ludwig Reil,
organ builder,  residing at Soerelseweg 8, 8181 AK Heerde, born in Heerde on the
twenty-first of April nineteen hundred and thirty-nine, married, passport number
L 060045 and legally  representing said company in this capacity,  which company
is acting for itself and as  authorized  representative  of the private  limited
company Rood Technology Nederland B.V., at the time having its registered office
in Heerde; -----------------


2. Mr Fokko Pentinga, sales manager,  residing at Lisztstraat 1, 6815 CN Arnhem,
the Netherlands,  born in Slochteren,  the  Netherlands,  on the twenty-fifth of
February  nineteen  hundred and  fifty-five,  married,  driving  licence  number
0070021978,  acting in his capacity as authorized  representative of Mr Jong Soo
Whang,  company  director,  residing at South Maple 831,  Mesa,  Arizona  85205,
United States of America,  born in Seoul,  Korea on the twenty-second of October
nineteen hundred and forty-five, married, who has granted this power of attorney
as president of Tempress  Systems Inc., in his capacity as legal  representative
of the company  under the laws of the state of Texas,  United States of America:
Tempress Systems Inc., having its registered office in Austin, Texas, the United
States of  America,  and a place of  business at De  Lavelstraat  la,  Hoogeveen
(future address: Brugstraat 2, 8181 VH Heerde) --------
- ------   ------------------------



The power of attorney for the private limited company  Orgelmakerij  Gebrs. Reil
B.V. is  demonstrated  by a deed of transfer  of  economic  ownership,  executed
before the  aforementioned  civil-law  notary
<PAGE>
Schurink  on  the   fifteenth  of  June   nineteen   hundred  and   ninety-four.
- --------------

The other powers of attorney are  demonstrated  by two private  deeds which have
been  attached to this deed.  The  existence  of the powers of attorney has been
sufficiently demonstrated to me, deputy civil- law notary. ----------------

The  party   appearing  under  1  declared  that  the  private  limited  company
Orgelmakerij  Gebrs.  Reil B.V.  purchased  the  private  limited  company  Rood
Technology  Nederland B.V. by virtue of the  aforementioned  deed of transfer of
economic ownership, but did not receive ownership of the same. - ------------- -
 .------------------

The commercial  property at Brugstraat 2 in Heerde,  seventeen  areas and thirty
centiares in size, recorded in the land register as Heerde Municipality, Section
B, number 3088,  which plot is partially  encumbered with a restricted  right as
referred to in the Public Works (Removal of Impediments in Private Law) Act, for
the benefit of the company limited by shares N.V. NUON Energie- Onderneming voor
Gelderland,  Friesland en Flevoland, having its registered office in Arnhem, for
the purpose of laying,  owning,  maintenance,  repair, and (where necessary) the
replacement and removal of an underground high-voltage cable, as shown in ground
plan number 4063-447,  attached to the deed by means of which the aforementioned
right was established.  A copy of the aforementioned drawing is attached to this
deed. -- 
The purchase price has been paid in full.

Ownership  of the  aforementioned  immoveable  property  was -  acquired  by the
private limited company Rood Testhuis B.V.;

- - inasmuch  as derived  from number 2484  through the  registration  at the land
registry  in  Arnhem on the  twenty-fifth  of  September  nineteen  hundred  and
seventy-nine,  in part  5751,  number  65 of the  copy of the  deed of  transfer
executed on the preceding  twenty-fourth of September before civil-law notary Mr
A. Bok, practicing at the time in Heerde;---------------------------------------

inasmuch  as  derived  from  number  2484  through  the   registration   at  the
aforementioned  land  registry on the  sixteenth  of June  nineteen  hundred and
eighty-three,  in part  6346,  number  92 of the  copy of the  deed of  transfer
executed on the preceding fifteenth of June before the aforementioned  civil-law
notary Bok.  -------------  Contained  in these  deeds was a  discharge  for the
purchase  price,  and a waiver  to the right to demand  the  dissolution  of the
agreement  on the grounds of the  provisions  of  Sections  1302 and 1303 of the
Dutch Civil Code. ------------------------------------

The name Rood Testhouse B.V. was changed on the twenty-first of January nineteen
hundred and ninety-two to Rood Technology Nederland B.V. by deed executed before
the aforementioned civil-law notary Schurink.-----------------------------------
<PAGE>
The party  appearing  under 1 declared that he had sold to the company under the
laws of Texas,  United  States of America,  Tempress  Systems  Inc.,  having its
registered  office in Austin,  Texas,  the United  States of America,  which the
party appearing under 2 declared to have bought: --------------------------
- ----------------

The right to delivery of the aforementioned immoveable

The parties appearing declared that this purchase agreement was entered into for
a purchase price of five hundred and fifty-seven thousand guilders (NLS 557,500.
The purchase price has been paid in full by the purchaser to the  aforementioned
civil-law notary Schurink.------------------------------------------------------

In  performance  of the  obligation  to  deliver,  the party  appearing  under 1
declared on behalf of the private limited company Rood Technology Nederland B.V.
that ownership of the aforementioned  immoveable  property be transferred to the
company under the laws of the state of Texas, United States of America, Tempress
Systems Inc.,  having its registered office in Austin,  Texas,  United States of
America,  for which the party  appearing  under 2  declared  the  acceptance  of
ownership of said immoveable property. -------------

The parties have agreed that the share of the  purchase  price to be paid to the
seller  shall be retained by the  civil-law  notary  acting as custodian of this
deed until such a time as it is clear to the latter that the  transfer has taken
place  without  registrations  which were not known at the time of  execution of
this deed.  ------- This sum will be paid  immediately  to the seller after this
time. -- The following stipulations have been laid down:  -------------------

1. The  property  sold will be  transferred  in the  condition  it was in at the
moment the  purchase  agreement  was signed,  with all rights and  burdens.  The
seller  is  authorized  to carry  out the sale and  delivery.  The  transfer  of
ownership  is  unconditional.  The  purchaser  will use the  property  sold as a
commercial property.  -------------- 

The  seller is not aware of any  grounds  under  private  or public law why this
should not be permitted. ------------------

2. The property  sold is free of mortgage and  attachment.  The property sold is
not  encumbered  with  qualitative  obligations,  easements or other burdens and
contractual stipulations other than those listed below.-------------------------

3. A copy of this deed will be recorded in the public registers.

4. The  purchaser  can accept the property sold free from rental or other rights
of enjoyment and completely vacant, as of today. ----

The risk is transferred to the purchaser today.
<PAGE>
5. All  property  charges on the  property  sold shall be at the  expense of the
purchaser as of today. ----------------------------

Settlement has taken place. --------------------------------------

6. No claims are permitted on the grounds of a difference in size.

7. The seller guarantees that it has not been notified by the state or utilities
companies of any improvement or repair work which have not yet been carried out,
or not yet carried out to acceptable standards. -

8. All claims  which the seller can and will  enforce in respect of the property
sold against third parties, including builders, (sub)contractors, installers and
suppliers are  transferred  to the  purchaser.  Inasmuch as these claims are not
enforceable as  qualitative  rights as referred to in Section 251, Book 6 of the
Dutch Civil Code,  the seller  shall  cooperate  in the transfer of these at the
purchaser's first request. -------------------------- The seller shall also hand
over all proofs of guarantee  relating to the property sold to the purchaser and
to take all steps necessary to transfer these to the purchaser's name. -- 

9. The  seller is not  subject to any  obligations  vis-a-vis  third  parties by
virtue of a priority right or right of option.

No legal  proceedings,  binding advice or arbitration  are pending in respect of
the property sold. ------------------------------------

10. As far as is known by the seller, there are no facts which may indicate that
the property sold contains any pollution  which may be detrimental to the use by
the  purchaser  as  described  above or which  results  in or may  result  in an
obligation   to   decontaminate   the   property   sold,   or  to   take   other
measures.----------------------

11. As far as is known by the seller, the property also has no underground tanks
for the storage of liquids. --------------------

12. The seller is not aware of any  materials in the property  which may contain
asbestos, other than the asbestos cement wall cladding of which the purchaser is
aware.

13. Inasmuch as this deed has not deviated therefrom, that which has been agreed
between the parties before the execution of this deed in respect of the purchase
agreement shall remain in effect.

14. The parties cannot dissolve this agreement nor order its dissolution. --

15. The costs of this deed, the  registration  fees and transfer tax,  including
the transfer tax on five hundred and fifty-seven  thousand five hundred guilders
(NLG 557,500) levied on previous  acquisitions in the six months before this day
are at the expense
<PAGE>
of purchaser.

16. The  provision  of  Section  204c,  Book 2 of the Dutch  Civil Code does not
apply. ---

17. All risks  concerning the  functioning of the systems are transferred to the
purchaser. ------------------------------------

18.  The  seller  shall  ensure  closure  of the  boundary  to the  north of the
building,  at the  boundary  between  the plots  known as  Heerde  Municipality,
Section B, numbers 3087 and -

19. The purchaser has applied for the required  permission from the Municipality
of Heerde in accordance  with the  Municipality of Heerde 1977 General Terms and
Conditions of Sale for Building Sites. ------

20. a. For the benefit and to the  detriment  of the plots  recorded in the land
registry as Heerde Municipality,  section B, numbers;3087 and 3088, the easement
is established  reciprocally  whereby the communal wall on the boundary  between
the two plots be tolerated.-----------------------------------------------------

b. For the benefit of the plot sold by means of this deed,  recorded in the land
registry as Heerde Municipality,  section B, number 3088 and to the detriment of
the plot belonging to the seller recorded in the land registry as number 3087 of
the same municipality and section, the following easement is established:

- - to tolerate and continue to tolerate the presence of the heat  exchangers  for
the  air-conditioning  unit on the property  sold and the plot  belonging to the
seller recorded in the land registry as Heerde  Municipality,  section B, number
3087. These heat exchangers belong to the property sold.  ----------------  
This  easement   lapses  if  these  heat   exchangers  are  moved  or  replaced.
- --------------------

- - that in the context of any laying of cables on the part of the purchaser,  the
purchaser  may  make  use  of  the   transformer  on  the  seller's  plot;  such
cable-laying must take place in the manner that causes the least  inconvenience.
All costs  relating  to the  laying  and  connection  of cables  shall be at the
purchaser's   expense.  Any  cooperation  provided  by  NUON  shall  be  at  the
purchaser's risk. --
21. The  partition  wall between the property  sold and the part of the building
still owned by the seller will, in full consultation and at the instructions and
expense of the purchaser, be modified to meet fire safety requirements as set or
to be set by the authorized bodies.--------------------------------  

In the event that these modifications  affect the emergency exit and door of the
property  still  owned by the  seller,  these  shall also be at the  purchaser's
expense. ------------------------------------ --

These  modifications may not have any fundamental effect on the 
<PAGE>
functionality  of the on-site  exit and  emergency  exit of the  seller,  on the
understanding  that the existing  emergency exit door may, in consultation  with
the seller, be made slightly narrower than is currently the case, as long as the
functionality  is  not  affected.  All  modifications  shall  be  fully  at  the
purchaser's expense. -----

22. All goods  currently  present in the property sold are deemed to be included
in the property sold. --------------------------------

23. Inasmuch as has not yet taken effect,  this delivery is subject to the "1977
General Terms and Conditions of Sale for Building
These  conditions  were laid down in a deed executed  before the  aforementioned
civil-law  notary  Bok  on  the  eighteenth  of  October  nineteen  hundred  and
seventy-seven  and  registered  in  the  aforementioned  land  registry  on  the
nineteenth  of  October of that  year,  under  Part  4997,  Number 34. The party
appearing  under 1 declared that it imposed the provisions of Articles 9, 13, 15
through  20 and 22  through  30 of these  General  Terms and  Conditions  on the
purchaser.-

The party  appearing under 2 declared that it would bind the purchaser to fulfil
these provisions.-

The party  appearing  under 1, acting in the  interests of the  Municipality  of
Heerde,  declared  the  acceptance  of the above on behalf of the  municipality.
- -------------------------

The  purchaser  declared  that he had  received a copy of the General  Terms and
Conditions of Sale.

The party  appearing  under 2  declared  the  acceptance  of the  aforementioned
burdens and restrictions on behalf of the purchaser.  The parties grant power of
attorney to Mr Mannes  Vlieger,  bookkeeper,  Mr Hendrik Jan Kamphuis,  notary's
clerk,  Ms Grietje van den Brink,  notarial  assistant,  Ms Diana Alia  Liefers,
notarial assistant and Ms Hendrika Wilhelmina van den Brink, notarial assistant,
all residing in Heerde,  and Ms Johanna  Aarentina Witman,  notarial  assistant,
residing in Vaassen, the Netherlands, both jointly and each separately, to waive
mortgage  rights on their behalf,  inasmuch as these may be  registered  for the
property sold encumbering persons other than the purchaser. --

For the implementation of this deed, the parties elect domicile at the office of
the civil-law notary acting as custodian of this deed.

The  identity  of the  parties  appearing  has been  determined  by means of the
aforementioned documents intended for this purpose. --

The parties  appearing are known to me, deputy civil-law  notary.  -- IN WITNESS
WHEREOF the parties hereunto set their hands in Heerde, the Netherlands,  on the
date first hereinbefore written. ---------
<PAGE>
After a limited reading of the contents of this deed to the parties, the parties
declared  unanimously  that they had taken note of the contents of this deed and
did not require the deed to be read out in full.--------------------------------

Immediately  following  a limited  reading,  this deed was signed by the parties
appearing  and me,  deputy  civil-law  notary,  at  sixteen  hundred  hours  and
thirty-five minutes. (signed): W.A. Reil; F. Pentinga; E. Feijen. --For the true
copy

[signature]

The undersigned, Mr Eric Feijen, junior civil-law notary, residing in Heerde, as
deputy  for  the  civil-law   notary   practicing  in  that  place  Mr  Johannes
Willibrordus  Jozef  Maria  Schurink,  declares  that  the  immoveable  property
alienated  by virtue of this  deed  within  the  meaning  of the  Municipalities
(Preferential Rights) Act is not included in a designation by virtue of Sections
2 or 8 nor in a proposal by virtue of Section 6 of that act.

[signature]

OFFICES OF CIVIL--LAW NOTARY

J . W . J . M . SCHURINK

PRACTICING IN HEERDE

OWNERSHIP TITLE FOR

Tempress Systems Inc., having its registered office in Austin, Texas, the United
States of America, and a place of business in Hoogeveen, the
Netherlands.

OR

the commercial property at Brugstraat 2 in Heerde,
the Netherlands.

Deed of 21 June 1996.


                    CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS
                    -----------------------------------------


As independent  public  accountants,  we hereby consent to the  incorporation by
reference in this  Registration  Statement of our report dated  December 6, 1995
included in Amtech  Systems  Inc.'s Form 10-K for the year ended  September  30,
1995 and to all references to our firm included in this Registration Statement.


                                                     ARTHUR ANDERSEN LLP


Phoenix, Arizona
    July 30, 1996


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