AMTECH SYSTEMS INC
DEF 14A, 1997-01-30
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            SCHEDULE 14A INFORMATION

Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934

Filed by the Registrant [X]
Filed by a Party other than the Registrant [  ]

Check the appropriate box:

[ ] Preliminary Proxy Statement
[ ] Confidential,  for  Use  of  the  Commission  Only  (as  permitted  by  Rule
    14a-6(e)(2))
[X] Definitive Proxy Statement
[ ] Definitive Additional Materials
[ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12

                              Amtech Systems, Inc.
- - --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)

- - --------------------------------------------------------------------------------
                   (Name of Person(s) Filing Proxy Statement)

Payment of Filing Fee (Check the appropriate box):

[X] No fee required.
[ ] Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

1) Title of each class of securities to which transaction applies:

- - --------------------------------------------------------------------------------

2) Aggregate number of securities to which transaction applies:

- - --------------------------------------------------------------------------------

3) Per unit price or other underlying value of transaction  computed pursuant to
   Exchange  Act Rule 0-11  (set  forth the  amount on which the  filing  fee is
   calculated and state how it was determined):

- - --------------------------------------------------------------------------------

4) Proposed maximum aggregate value of transaction:

- - --------------------------------------------------------------------------------

5) Total fee paid:

- - --------------------------------------------------------------------------------

[ ] Fee paid previously with preliminary materials.

[ ] Check box if any part of the fee is offset as provided by Exchange  Act Rule
    0-11(a)(2)  and  identify the filing for which the  offsetting  fee was paid
    previously.  Identify the previous filing by registration  statement number,
    or the form or schedule and the date of its filing.

    1) Amount previously paid:

    ----------------------------------------------------------------------------

    2) Form, Schedule or Registration No.
 
    ----------------------------------------------------------------------------

    3) Filing party:

    ----------------------------------------------------------------------------

    4) Date filed:

    ----------------------------------------------------------------------------
<PAGE>
                              AMTECH SYSTEMS, INC.
                              131 South Clark Drive
                              Tempe, Arizona 85281

- - --------------------------------------------------------------------------------
                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                        TO BE HELD ON FEBRUARY 28, 1997
- - --------------------------------------------------------------------------------


To Our Shareholders:

         The 1997 Annual Meeting of  Shareholders  of AMTECH  SYSTEMS,  INC., an
Arizona  corporation  (the "Company"),  will be held at the Doubletree  Paradise
Valley Resort, 5401 North Scottsdale Road, Scottsdale,  Arizona, on February 28,
1997, at 3:00 p.m., Mountain Standard Time, for the following purposes:

         1.       To elect five (5) directors to serve for one year terms; and

         2.       To transact  such other  business as may properly  come before
                  the  meeting  or any  adjournment(s)  thereof.  Management  is
                  presently  aware  of no  other  business  to come  before  the
                  meeting.

         The Board of  Directors  has fixed the close of business on January 15,
1997,  as the record  date for the  determination  of  Shareholders  entitled to
notice of and to vote at the meeting or any adjournment(s)  thereof (the "Record
Date"). Shares of Common Stock can be voted at the meeting only if the holder is
present at the meeting in person or by valid proxy. A copy of the Company's 1996
Annual Report, which includes audited financial statements, was mailed with this
Notice and Proxy Statement to all Shareholders of record on the Record Date.

         Management  of the Company  cordially  invites you to attend the Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing proposals and the reasons why the Board of Directors
encourages you to vote for approval of such proposals.

                                             By Order of the Board of Directors



                                             Robert T. Hass, Secretary
Tempe, Arizona
January 29, 1997


- - --------------------------------------------------------------------------------
IMPORTANT:  IT IS  IMPORTANT  THAT YOUR  SHAREHOLDINGS  BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.
- - --------------------------------------------------------------------------------
<PAGE>
                              AMTECH SYSTEMS, INC.
                              131 South Clark Drive
                              Tempe, Arizona 85281

                             ----------------------
                                 PROXY STATEMENT
                             ----------------------


         This Proxy  Statement  is being  furnished  to  Shareholders  of AMTECH
SYSTEMS,  INC., an Arizona  corporation (the "Company"),  in connection with the
solicitation  of proxies by the Board of  Directors  for use at the 1997  Annual
Meeting of  Shareholders of the Company to be held on February 28, 1997, at 3:00
P.M.,  Mountain  Standard Time, and any adjournment or  postponement(s)  thereof
(the "Annual  Meeting").  A copy of the Notice of the Meeting  accompanies  this
Proxy Statement. It is anticipated that the mailing of this Proxy Statement will
commence on or about January 29, 1997.

                       SOLICITATION AND VOTING OF PROXIES

         Only  shareholders  of record at the close of  business  on January 15,
1997 (the  "Record  Date") are  entitled  to notice of and to vote at the Annual
Meeting  or  any  adjournment  or  postponement  thereof.  On the  Record  Date,
4,151,668  shares of Common  Stock,  $.01 par value (the "Common  Stock"),  were
issued and  outstanding.  Each  holder of Common  Stock is entitled to one vote,
exercisable in person or by proxy,  for each share of the Company's Common Stock
held of record on the Record Date.

         At the Annual  Meeting of  Shareholders,  five (5)  directors are to be
elected to serve for a term of one year or until their respective successors are
elected and qualified. Each Shareholder present at the Annual Meeting, either in
person or by proxy,  will have an  aggregate  number of votes in the election of
directors  equal to five (the  number  of  persons  nominated  for  election  as
directors)  multiplied  by the number of shares of Common  Stock of the  Company
held by each such shareholder on the Record Date. The resulting aggregate number
of votes may be cast by the  Shareholder for the election of any single nominee,
or the  Shareholder  may  distribute  such votes  among any number or all of the
nominees.  The five  nominees  receiving  the  highest  number of votes  will be
elected to the Board of Directors.

         All valid proxies  received  before the Annual  Meeting and not revoked
will be exercised.  All shares  represented by proxy will be voted,  and where a
shareholder  specifies by means of his or her proxy a choice with respect to any
matter  to be acted  upon,  the  shares  will be voted  in  accordance  with the
specifications  so made. If no choice is indicated on the proxy, the shares will
be voted in accordance with the  recommendations of the Board of Directors as to
such  matters.  Abstentions  and  broker  non-votes  will  be  included  in  the
determination of the number of shares  represented for a quorum.  Proxies may be
revoked at any time prior to the time they are voted by: (a)  delivering  to the
Secretary of the Company a written instrument of revocation bearing a date later
than  the  date of the  proxy;  or (b)  duly  executing  and  delivering  to the
Secretary a subsequent  proxy relating to the same shares;  or (c) attending the
meeting  and  voting in  person,  provided  that the  shareholder  notifies  the
Secretary  of the meeting of his or her  intention to vote in person at any time
prior to the voting of the proxy. In order to vote their shares in person at the
meeting,  shareholders  who own their  shares in  "street  name"  must  obtain a
special proxy card from their broker.

         The cost of  soliciting  proxies,  including  the cost of preparing and
mailing  the  Notice  and  Proxy  Statement,   will  be  paid  by  the  Company.
Solicitation will be primarily by mailing this Proxy
<PAGE>
Statement to all  shareholders  entitled to vote at the meeting.  Proxies may be
solicited by officers and directors of the Company personally or by telephone or
facsimile,  without additional compensation.  The Company may reimburse brokers,
banks and  others  holding  shares in their  names  for  others  for the cost of
forwarding proxy materials and obtaining proxies from beneficial owners.

         The Board of  Directors  does not know of any  matters  other  than the
election of directors that are expected to be presented for consideration at the
meeting. However, if other matters properly come before the meeting, the persons
named in the accompanying  proxy intend to vote thereon in accordance with their
judgment.

         All proxies received pursuant to this solicitation will be voted except
as to matters as to which  authority to vote is specifically  withheld;  where a
choice is specified as to the proposal,  they will be voted in  accordance  with
such specification.  Where authority to vote is not specifically withheld and no
voting  instructions  are given, the persons named in the proxy solicited by the
Board of Directors  intend to vote for the election of the nominees for director
listed below.

                              ELECTION OF DIRECTORS

General Information

         The present terms of the Company's  current  directors,  Jong S. Whang,
Robert T. Hass,  Donald F. Johnston,  Alvin Katz and Bruce R. Thaw,  expire upon
the election and  qualification of their successors at the Company's 1997 Annual
Meeting  of  Shareholders.  Messrs.  Katz and Thaw are  being  nominated  at the
request of Barber & Bronson,  Incorporated,  the  underwriter  of the  Company's
public  offering of Common Stock and Common Stock Purchase  Warrants on December
15, 1994 (the  "Underwriter").  The  Underwriter  has the right to nominate  two
directors  pursuant to the provisions of the Underwriting  Agreement between the
Company and the  Underwriter.  The Board of Directors has nominated  each of the
current  directors  as nominees  for election as directors in the election to be
held at the Annual Meeting.

         The Board of Directors  intends to vote its proxies for the election of
its nominees,  for a term to expire at the next Annual Meeting.  In that regard,
the Board of Directors solicits authority to cumulate such votes.

         If any nominee  should  become  unavailable  for any reason,  which the
Board of  Directors  does  not  anticipate,  the  proxy  will be  voted  for any
substitute  nominee or nominees  who may be  selected by the Board of  Directors
prior to or at the Annual Meeting, or, if no substitute is selected by the Board
of  Directors  prior to or at the  Annual  Meeting,  for a motion to reduce  the
present  membership  of the Board to the  number of  nominees  available  and to
create  an  additional  vacancy  to be filled  by the  Board of  Directors.  The
information  concerning the nominees and their share holdings in the Company has
been furnished by them to the Company.

Information Concerning Directors, Nominees and Officers

         The  following  table sets forth  information  regarding  the officers,
directors and director nominees of the Company.
                                        2
<PAGE>
Name                    Age     Positions with the Company
- - ----                    ---     --------------------------

Jong S. Whang           51      President, Chief Executive Officer and Director

Robert T. Hass          46      Vice President-Finance, Chief Financial Officer,
                                Treasurer, Secretary and Director

Donald F. Johnston      71      Director

Alvin Katz              67      Director

Bruce R. Thaw           44      Director


         JONG S.  WHANG  has  been  President,  Chief  Executive  Officer  and a
Director  since the  inception of the Company and was one of its  founders.  Mr.
Whang's responsibilities as President include the sales effort for the Company's
semiconductor  equipment  business and  development of new products and business
opportunities in that industry.  He has twenty-three  years of experience in the
semiconductor industry including time spent in both processing and manufacturing
of equipment  components  and systems.  From 1973 until 1979, he was employed by
Siltronics,  Inc.,  initially  as  a  technician  working  with  chemical  vapor
deposition  (CVD) and later as  manager  of the  quartz  fabrication  plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

         ROBERT  T.  HASS  has  been  Vice  President-Finance,  Chief  Financial
Officer, Treasurer and Secretary of the Company since June 3, 1992. Mr. Hass has
been a Director of the Company  since  February 29,  1996.  From 1991 until May,
1992,  he  operated  a  financial  consulting  practice  under  the name of Hass
Financial  Consulting  Services,  a sole  proprietorship.  From 1985 to 1991, he
served as Director of Accounting  Services and then  Controller  for  Lifeshares
Group,  Inc., a holding company which owned and operated real estate development
and insurance subsidiaries, and from 1988 to 1991 served as Controller and Chief
Accounting Officer of some of those  subsidiaries.  From 1984 to 1985, he served
as Vice  President-Finance  and Treasurer of The Victorio  Company,  a privately
owned holding company which owned and operated agriculture, chemical, commercial
real estate brokerage,  marketing  research,  and commodities  futures brokerage
businesses.  From 1977 to 1984, he was employed in various capacities  including
Vice President,  Chief Financial  Officer and Treasurer by Altamil  Corporation,
then a public company, which manufactures truck equipment, wirebound containers,
and  precision  aluminum  forgings.  From 1972 to 1977,  he was  employed  as an
auditor with Ernst & Ernst, now known as Ernst & Young. He is a Certified Public
Accountant.

         DONALD F.  JOHNSTON has been a Director  since April 9, 1994,  and also
served as a Director  from March,  1983 to December  1992.  He is not  otherwise
employed by the Company.  He was President and Chief  Executive  Officer of JAI,
Inc. a management  consulting  firm from 1985 to March 1993.  From 1985 to March
1993,  when he retired,  he acted as  marketing  and  management  consultant  to
companies in the electronics industry.  From November, 1983 until October, 1985,
he was President of Process Control,  Inc. of Tempe, Arizona. He has held senior
management positions with Montgomery Ward & Co. and the Hotpoint Division of the
General  Electric  Company.  He has also  served as the  Vice-President  of B.F.
Goodrich and the Philco Ford Division of the Ford Motor  Company.  Mr.  Johnston
also served as President of Mirco, Amstar Electronics, and Hera Investment Co.
                                        3
<PAGE>
         ALVIN  KATZ has been a Director  since May 1,  1995.  Since 1981 he has
been an  adjunct  professor  of  business  management  at the  Florida  Atlantic
University  in Boca  Raton,  Florida.  From 1991 until the  company  was sold in
September,  1992, he was Chief Executive Officer of Odessa  Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976,  Mr.  Katz was  employed  by  United  Parcel  Service  holding  various
managerial  positions,  including  District  Manager  and  Corporate  Manager of
Operations, Planning, Research and Development. He is also a Director of Blimpie
International,  a fast food franchisor,  Nastech Pharmaceutical Company, Inc., a
company  engaged in research,  development  and  marketing of nasally  delivered
pharmaceuticals, BCT International, Inc., a franchisor of wholesale thermography
printing plants, OZO Diversified Technology,  Inc., a manufacturer of depaneling
equipment  for the  semiconductor  industry,  and Micron  Instruments,  Inc.,  a
manufacturer  of  infrared  temperature  measurement  devices,  all of which are
publicly held corporations.

         BRUCE R. THAW has been a Director  since May 1, 1995. Mr. Thaw has been
a practicing  attorney since 1978. Since 1995, Mr. Thaw has been a self-employed
attorney,  and from 1984 to 1995,  he was a partner  in the law firm of Abrams &
Thaw. Mr. Thaw is also a Director of Information Resource  Engineering,  Inc., a
public traded company that designs,  manufactures  and markets  computer network
security  systems and products.  Mr. Thaw does not render legal  services to the
Company.

Board and Committee Meetings

         During the 1996 fiscal year,  there were four (4) meetings of the Board
of Directors.  No director  attended less than 75% of the Board  meetings  while
serving as such director or less than 75% of all committee  meetings on which he
served as a committee member.

         There  are  three  committees  of the  Board of  Directors:  the  Audit
Committee, the Compensation and Option Committee and the Finance Committee.

         The Audit Committee, which held two (2) meetings during the 1996 fiscal
year, was comprised of Messrs.  Bruce R. Thaw and Donald F. Johnston.  The Audit
Committee is responsible for maintaining  communication  between the Board,  the
Company's  independent auditors and members of financial management with respect
to the Company's financial affairs in general,  including  financial  statements
and audits, the adequacy and effectiveness of the Company's internal  accounting
controls and systems,  and the  retention  and  termination  of the  independent
auditors.

         The  Compensation  and Option  Committee,  which  held one (1)  meeting
during the 1996 fiscal year,  was  comprised of Messrs.  Donald F.  Johnston and
Alvin  Katz.  The  Compensation  and  Option  Committee  makes   recommendations
concerning officer compensation, employee benefit programs and retirement plans.

         The Finance  Committee,  which held no meetings  during the 1996 fiscal
year,  was  comprised  of  Messrs.  Alvin Katz and Bruce R.  Thaw.  The  Finance
Committee is  responsible  for  communication  between the Board,  the Company's
lender or  prospective  lender(s)  and other  financial  sources  and members of
financial management.

         All  current  committee  members  are  expected  to  be  nominated  for
re-election  at a Board  meeting  to be held  following  the  Annual  Meeting of
Shareholders.
                                        4
<PAGE>
Compensation of Directors

         Directors  who  are  full-time  employees  of the  Company  receive  no
additional compensation for serving as directors. Non-employee directors receive
fees of $700 per Board meeting attended and $250 per committee meeting attended.

Compensation Committee Interlocks and Insider Participation

         The  Compensation  and Option  Committee  is composed of Mr.  Donald F.
Johnston  and Mr.  Alvin Katz,  neither of whom is an officer or employee of the
Company.

         SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

Security Ownership of Management

         The  following  table sets forth  certain  information  concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 15, 1997, by
(i) each  director  and each  nominee  for  director of the  Company,  (ii) each
officer of the Company,  and (iii) all officers and  directors as a group.  This
information  was determined in accordance with Rule 13(d)-3 under the Securities
Exchange Act of 1934, as amended, and is based upon the information furnished by
the persons listed below. Except as otherwise indicated, each shareholder listed
possesses sole voting and investing  power with respect to the shares  indicated
as being beneficially owned.
<TABLE>
<CAPTION>
                                                                  Shares of Common Stock
                                                                    Beneficially Owned
                                                    -------------------------------------------------
                                                      Number of Shares                    Percent of
Name and Address                                    Beneficially Held(1)                 Ownership(2)
- - ----------------                                    --------------------                 ------------
<S>                                                      <C>                                       <C> 
Jong S. Whang                                            138,976(1)(3)                             3.3%
131 South Clark Drive
Tempe, AZ  85281

Bruce R. Thaw                                              51,000(1)(4)                            1.2%
45 Banfi Plaza
Farmingdale, NY  11735

Donald F. Johnston                                         11,250(1)(5)                               *
13615 N. Robertson Drive
Sun City West, AZ  85375

Robert T. Hass                                             15,500(1)(6)                               *
131 South Clark Drive
Tempe, AZ  85281

Alvin Katz                                                130,000(1)(7)                            3.1%
301 N. Birch Road
Fort Lauderdale, FL  33303-4211

Directors and Officers of the Company as a group          346,726(8)                               8.4%
(1)(2)(3)(4)(6)(7)
</TABLE>
                                        5
<PAGE>
- - ------------------------

 *       Less than 1%.

(1)      Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is
         the  Vice  President-  Finance,  Chief  Financial  Officer,  Treasurer,
         Secretary and a director. Messrs. Johnston, Katz and Thaw are presently
         directors.

(2)      The percentages shown include the shares of Common Stock actually owned
         as of December 31, 1996, and the shares of Common Stock with respect to
         which the person had the right to acquire  beneficial  ownership within
         60 days of such date  pursuant  to options or  warrants.  All shares of
         Common Stock that the identified person had the right to acquire within
         60 days of December  31, 1996 upon the exercise of options or warrants,
         are deemed to be  outstanding  when  computing  the  percentage  of the
         securities  owned by such person,  but are not deemed to be outstanding
         when  computing  the  percentage of the  securities  owned by any other
         person.

(3)      Includes (i) 18,976  shares held jointly  with Mr.  Whang's  spouse and
         (ii) 5,000 shares  issuable upon the exercise of presently  exercisable
         options, with an exercise price of $1.76 per share.

(4)      Includes 10,000 shares issuable upon exercise of presently  exercisable
         options  with an  exercise  price of $2.24 per share,  and  warrants to
         purchase 4,000 shares of Common Stock at an exercise price of $2.25 per
         share. Also includes 9,000 shares outstanding and 5,000 shares issuable
         upon exercise of warrants, all of which are held by Mr. Thaw's spouse.

(5)      Includes   10,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $1.75 per share.

(6)      Includes   10,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $.63 per share. Excludes
         stock bonus  grants for 4,000 shares that do not vest within 60 days of
         December 31, 1996.

(7)      Includes   10,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $2.24 per share.

(8)      Includes 45,000 shares issuable upon exercise of presently  exercisable
         options and 4,000  shares of  issuable  upon  exercise  of  outstanding
         warrants.


Security Ownership of Certain Beneficial Owners

         There are no persons known to the Company to beneficially own more than
5% of the outstanding Common Stock of the Company.

                             EXECUTIVE COMPENSATION

         The following  table sets forth annual and long-term  compensation  for
services in all  capacities to the Company for the fiscal years ended  September
30, 1996, 1995 and 1994, of the Company's Chief Executive  Officer,  who was the
only executive officer of the Company to receive annual  compensation  exceeding
$100,000 during such periods.
                                        6
<PAGE>
                           SUMMARY COMPENSATION TABLE
<TABLE>
<CAPTION>
                                                                   Annual Compensation
                                                      -----------------------------------------------
       Name and                         Fiscal                                         Other Annual          All Other
  Principal Position                     Year           Salary           Bonus(1)    Compensation(2)      Compensation(3)
  ------------------                     ----           ------           --------    ---------------      ---------------
<S>                                      <C>           <C>              <C>                   <C>               <C>   
Jong S. Whang                            1996          $100,000         $  59,870             -                  $3,106
President and Chief                      1995            95,000            48,657             -                   2,815
Executive Officer                        1994            76,000            35,699             -                   2,801
</TABLE>

- - ---------------------

(1)      On February  24,  1989,  the Board of  Directors  approved an incentive
         compensation  plan for Mr.  Whang,  which  provides  for an annual cash
         bonus equal to 2% of the annual profits of the Company before taxes and
         extraordinary items; plus 2% of the amount by which the revenues of the
         Company' s  semiconductor  equipment  business in each year exceed such
         revenues for the previous year. It is a condition to the payment of any
         bonus that Mr. Whang have been continually  employed by the Company and
         that the Company have realized a profit after the payment of the bonus.
         On October 1, 1995, Mr. Whang entered into an employment  contract with
         the  Company,   which  contract   incorporated  Mr.  Whang's  incentive
         compensation plan and added additional bonus eligibility criteria.  See
         Employment Contracts with Executive Officers, below.

(2)      Other compensation to Mr. Whang, consisting of car allowance,  vacation
         pay and other  perquisites,  did not exceed  $50,000 or 10% of his base
         compensation during any fiscal year.

(3)      Represents  insurance  premiums  paid on  whole-life  insurance for the
         benefit of Mr. Whang's spouse.

Option Grants

         During the 1996  fiscal  year,  no stock  options  were  granted to any
executive officer of the Company.

Option Exercises

         The  following  table shows the stock  options  exercised  by the Chief
Executive  Officer of the Company during fiscal year 1996 and the value of stock
options held by him, as of the end of fiscal year 1996.

                   AGGREGATED OPTION EXERCISES IN FISCAL 1996
                    AND OPTION VALUE AS OF SEPTEMBER 30, 1996
<TABLE>
<CAPTION>

                                                                   Number of Unexercised             Value of Unexercised
                                                                          Options                        In-the-Money
                                                                    at September 30, 1996       Options at September 30, 1996
                                                             ---------------------------------  -----------------------------

                             Shares
                           Acquired on            Value
Name                      Exercise (#)      Realized ($)     Exercisable        Unexerciseable  Exercisable        Unexerciseable
- - ---------------------   -----------------   ------------     -----------        --------------  -----------        --------------
<S>                             <C>               <C>         <C>                    <C>          <C>                     <C> 
Jong S. Whang                   -                 -           15,000                 -            $44,850                 -
</TABLE>
                                        7
<PAGE>
Amendment or Repricing of Options

         During  fiscal  year 1996,  the Company did not amend or reprice any of
its stock options held by executive officers of the Company.

Employment Contracts with Executive Officers

         On October 1, 1994,  the Company  entered into an employment  agreement
with its  President,  Jong S. Whang.  Mr.  Whang is  employed  as the  Company's
President  for a period of five years with an annual  salary of  $100,000,  with
annual  increases of up to 5% to be  determined by the Board of Directors at the
end of each year under the agreement.  He is to receive the following additional
incentive  cash  compensation:  (i) a bonus equal to 2% of the annual profits of
the Company before taxes and  extraordinary  items;  (ii) a bonus equal to 2% of
the  amount by which  the  revenues  of the  Company's  semiconductor  equipment
business in each year exceeds such revenues for the previous  year,  and (iii) a
bonus of $14,000 if the Company is profitable  during fiscal years 1996, 1997 or
1998,  provided that upon the occurrence of such events, Mr. Whang has exercised
at least 5,000 shares of his  presently  exercisable  stock  options to purchase
15,000  shares of the Company's  Common Stock at $1.76 per share.  During fiscal
year 1996,  Mr. Whang earned a cash bonus of $59,870  pursuant to the  foregoing
formula. It is a condition to the payment of any cash bonus that Mr. Whang shall
have been  continuously  employed  by the Company and that the total of all cash
bonuses is  limited  to 10% of the  Company's  pre-tax  earnings  for that year.
Profits  shall  also  be  determined  without  taking  into  account  the  first
$3,200,000  expended  or  invested  by the  Company  in the  development  of the
proposed photo-assisted CVD product. The agreement also contains confidentiality
and  non-compete  provisions.  Mr.  Whang is  entitled  to one year's  salary as
severance  pay if he is  terminated  other than for  "cause."  Mr. Whang is also
entitled to participate in any benefit plans generally available to employees of
the Company.

Compensation and Option Committee Report on Executive Compensation

         The  Compensation  and  Option  Committee  of the  Company's  Board  of
Directors (the "Committee),  which is composed entirely of independent,  outside
directors,  establishes  the  general  compensation  policies of the Company and
specific compensation for each executive officer of the Company, and administers
the  Company's  stock  option  program.  The  Committee's  intent is to make the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective
incentives to motivate and reward Company executives for achieving the financial
and strategic goals of the Company essential to the Company's  long-term success
and to growth in shareholder value. The Company's executive compensation package
consists of three main components:  (1) base salary; (2) incentive cash bonuses;
and (3) stock options.

         Base Compensation

         The Committee's  approach is to offer executives  salaries  competitive
with those of other executives in the industry in which the Company operates. To
that end, the Committee  evaluates the  competitiveness of its base salary based
on  information  drawn  from a  variety  of  sources,  including  published  and
proprietary  survey  data  and  the  Company's  own  experience  recruiting  and
retaining  executives,  although complete  information is not easily obtainable.
The Company's base salary levels are intended to be consistent with  competitive
practice and level of responsibility, with
                                        8
<PAGE>
salary  increases   reflecting   competitive   trends,   the  overall  financial
performance of the Company and the performance of the individual executive.

         Bonuses

         In  addition  to base  salary,  executives  are  eligible  to receive a
discretionary  annual bonus. At the beginning of each year, the Compensation and
Option   Committee  and  the  CEO  review  each   individual   executive's   job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the Company.  In  addition,  for all  executives,  the  Compensation  and Option
Committee  reviews  the  Company's  actual  financial  performance  against  its
internally  budgeted  performance  in  determining  year-end  bonuses,  if  any.
However,   the   Compensation  and  Option  Committee  does  not  set  objective
performance  targets for  executives  other than the CEO and sales and marketing
personnel.

         Stock Option and Restricted Stock Grants

         The  Company,  from time to time,  grants  stock  options and shares of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  Grants of stock options and
restricted stock are designed to align the executive's interest with that of the
shareholders of the Company.  In awarding option grants,  the  Compensation  and
Option  Committee  will  consider,  among other things,  the amount of stock and
options  presently held by the executive,  the executive's  past performance and
contributions,   and  the  executive's   anticipated  future  contributions  and
responsibilities.

         1996 CEO Compensation

         The base salary for the Chief Executive  Officer ("CEO") for the fiscal
year 1996 was  increased  from $95,000 in 1995 to $100,000 in 1996,  pursuant to
the  employment  agreement  entered  into by the Company and the CEO.  The CEO's
increased base salary is based upon the compensation of executives in comparable
positions in the  semiconductor  industry,  adjusted for the size of the Company
(total assets and revenues).

         On February  24,  1989,  the Board of  Directors  approved an incentive
compensation  plan for the CEO, which provides for an annual cash bonus equal to
2% of the annual  profits of the Company before taxes and  extraordinary  items;
plus 2% of the  amount  by which the  revenues  of the  Company's  semiconductor
equipment  business in each year exceed such revenues for the previous  year. In
addition,  such incentive compensation plan specifies that the CEO shall receive
a bonus of $14,000 if the Company is  profitable  during  fiscal  1996,  1997 or
1998.  It is a  condition  to the  payment  of any bonus  that the CEO have been
continually  employed by the Company and that the total of such cash  bonuses is
limited to 10% of the Company's  pre-tax  earnings for that year. The CEO earned
$59,870  in 1996  pursuant  to  such  incentive  compensation  plan.  The  CEO's
employment  agreement with the Company  incorporates the incentive  compensation
plan described above. See "Employment Contracts With Executive Officers," above.

                                               COMPENSATION AND OPTION COMMITTEE

                                               Donald F. Johnston
                                               Alvin Katz

                                        9
<PAGE>
Compliance with Section 16(a) of the Securities Exchange Act of 1934

         Section  16(a) of the  Securities  Exchange  Act of 1934  requires  the
Company's  directors  and  executive  officers  as well as persons  beneficially
owning more than 10% of the Company's  Common Stock,  to file certain reports of
ownership  with the  Securities  and  Exchange  Commission  (the  "SEC")  within
specified  time periods.  Such  officers,  directors and  shareholders  are also
required by SEC rules to furnish the  Company  with copies of all Section  16(a)
forms they file.

         Based  solely on its  review of such forms  received  by it, or written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October 1, 1995 and  September  30,  1996,  all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied with; provided,  however,  that Robert Hass received a grant of a stock
bonus subject to forfeiture  in the second  quarter of fiscal 1995,  which award
was not reported  until January 1997  following the vesting and issuance of such
stock.


                 CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

         In December  1995,  the Company  executed an  agreement  with Eugene R.
Hartman,  who at the time was a Vice  President  and director of the Company and
the  President of Echelon  Service  Company,  a  wholly-owned  subsidiary of the
Company,  to sell all of the stock of Echelon to Mr.  Hartman  in  exchange  for
98,016 shares of Amtech  Common Stock held by Mr.  Hartman and  additional  cash
consideration.  The total  consideration  for the  Echelon  stock was  valued at
approximately $1.2 million.  Of that consideration,  approximately  $800,000 was
attributed to the Amtech Common Stock and approximately  $400,000 in the form of
a cash  distribution  by Echelon to Amtech prior to the sale. The parties closed
the  transaction in January 1996, and Mr. Hartman  resigned as an officer of the
Company.

         Prior to entering  into the  agreement  with Mr.  Hartman,  the Company
sought and negotiated offers from third parties.  However, in the opinion of the
Board, the best offer was tendered by Mr. Hartman. The transaction was conducted
at arms' length,  and management  does not believe that a better deal could have
been made with unrelated third parties.
                                       10
<PAGE>
Comparison of Stock Performance

         The  following  graph assumes that $100 was invested on October 1, 1991
in each of the following: the Company's Common Stock, the Nasdaq Composite Index
and the Nasdaq Industrial Index.

                          TOTAL RETURN TO STOCKHOLDERS
                      (Assume $100 Investment on 9/30/91)

                    9/30/91   9/30/92   9/30/93   9/30/94   9/30/95   9/30/96

Company              $100        69      188        175       456       475
NASDAQ Composite     $100       111      145        145       198       233
NASDAQ Industrial    $100       105      132        132       166       178

                                       11
<PAGE>
                                  OTHER MATTERS

Independent Auditors

         Arthur  Andersen LLP, has been  selected as the  Company's  independent
auditors for the current fiscal year,  which ends September 30, 1997.  That firm
has served as the Company's  independent  auditors since 1983. During the fiscal
year ended  September 30, 1996,  Arthur  Andersen LLP provided audit services to
the  Company.  Representatives  of that firm are  expected  to be present at the
Annual Meeting with the  opportunity to make a statement if they desire to do so
and to be available to respond to appropriate questions.

Annual Report

         The Annual  Report of the Company  for the fiscal year ended  September
30, 1996, is enclosed herewith.

Voting By Proxy

         In order to ensure that your shares will be  represented  at the Annual
Meeting,  please sign and return the enclosed Proxy in the envelope provided for
that purpose,  whether or not you expect to attend. Any Shareholder may, without
affecting any vote previously taken,  revoke a written proxy by giving notice of
revocation  to the  Company in writing or by  executing  and  delivering  to the
Company a later dated proxy.

Shareholder Proposals for Action At the Company's Next Annual Meeting

         Any  Shareholder  who wishes to present any  proposal  for  shareholder
action at the  Company's  next Annual  Meeting,  expected to be held on or about
February 27, 1998, must be received by the Company's Secretary, at the Company's
offices,  not later than  November  15,  1997,  in order to be  included  in the
Company's proxy statement and form of proxy for that meeting.

                                              BY ORDER OF THE BOARD OF DIRECTORS



                                              Robert T. Hass, Secretary

Tempe, Arizona
January 29, 1997
                                       12
<PAGE>
                              AMTECH SYSTEMS, INC.
                               Common Stock Proxy

         The  undersigned  hereby appoints Jong S. Whang or Robert T. Hass, with
full  power  of  substitution,  to  represent  and  to  vote  on  behalf  of the
undersigned all of the shares of AMTECH SYSTEMS,  INC., an Arizona  corporation,
which the  undersigned is entitled to vote at the Annual Meeting of Shareholders
of the  Corporation to be held at the Doubletree  Paradise  Valley Resort,  5401
North  Scottsdale Road,  Scottsdale,  Arizona on February 28, 1997 at 3:00 p.m.,
Mountain Standard Time, and at any adjournment or postponement thereof, upon the
following  proposals more fully  described in the Notice of and Proxy  Statement
for the  Annual  Meeting,  the  receipt  of which is  hereby  acknowledged.  The
undersigned  hereby  revokes all proxies  heretofore  given with respect to such
stock, if any.

Please mark boxes with an X in blue or black ink.

The Board of Directors recommends a vote FOR each of the proposals listed below.

1.  ELECTION OF DIRECTORS

    ___ VOTE FOR all nominees listed below (except as marked to the contrary):

    Jong S. Whang  Robert T. Hass  Donald F. Johnston  Alvin Katz  Bruce R. Thaw

    ___ WITHHOLD AUTHORITY to vote for all nominees listed above

    INSTRUCTIONS: To  withhold  authority  to  vote for any individual nominee,
    write that nominee's name in the space provided below:

    _______________________________________________________

    The undersigned agrees that the proxy holder is authorized to cumulate votes
    in the election of directors and to vote for less than all of the nominees.

THIS PROXY WILL BE VOTED IN ACCORDANCE WITH THE DIRECTIONS  INDICATED HEREIN. IF
NO SPECIFIC  DIRECTIONS ARE GIVEN,  THIS PROXY WILL BE VOTED FOR APPROVAL OF ALL
NOMINEES  LISTED HEREIN,  FOR APPROVAL OF THE PROPOSALS  LISTED HEREIN AND, WITH
RESPECT TO ANY OTHER  BUSINESS  AS MAY  PROPERLY  COME  BEFORE THE  MEETING,  IN
ACCORDANCE WITH THE DISCRETION OF THE PROXIES.

    Dated:  ______________, 1997          ______________________________________
                                          (Signature)
                                          ______________________________________
                                          (Signature)

                                          When      signing     as     executor,
                                          administrator,  attorney,  trustee  or
                                          guardian,  please  give full  title as
                                          such. If a corporation, please sign in
                                          full  corporate  name by  president or
                                          other   authorized   officer.   If   a
                                          partnership,     please     sign    in
                                          partnership name by authorized person.
                                          If a joint  tenancy,  please have both
                                          joint tenants sign.

     PLEASE PROMPTLY MARK, DATE, SIGN AND RETURN IN THE ENCLOSED ENVELOPE.
Please indicate the number of people that plan to attend the Annual Meeting:____


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