AMTECH SYSTEMS INC
10-K405, EX-23, 2000-12-22
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1

                    CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS



As independent public accountants, we hereby consent to the incorporation of our
report included in this Form 10-K, into the Company's previously filed
Registration Statements on Forms S-3 (File Numbers 333-09917, 333-10117 and
333-37098) and Forms S-8 (File Numbers 333-09911, 333-09909 and 333-46086).


                                                    /S/  ARTHUR   ANDERSEN  LLP
                                                    ---------------------------
                                                    ARTHUR   ANDERSEN  LLP


Phoenix, Arizona
  December 15, 2000.



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