AMTECH SYSTEMS INC
DEF 14A, 2000-02-10
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                  SCHEDULE 14A
                                 (Rule 14a-101)

                    INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION
                Proxy Statement Pursuant to Section 14(a) of the
                         Securities Exchange Act of 1934

Filed by the Registrant [X]
Filed by a Party other than the Registrant [ ]

Check the appropriate box:
[ ]  Preliminary Proxy Statement             [ ]  Confidential, For Use of the
[X]  Definitive Proxy Statement                   Commission Only (as permitted
[ ]  Definitive Additional Materials              by Rule 14a-6(e)(2))
[ ]  Soliciting Material Pursuant to
     Rule 14a-11(c) or Rule 14a-12

                              AMTECH SYSTEMS, INC.
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)

- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)

Payment of Filing Fee (Check the appropriate box):
[X]  No fee required.
[ ]  Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

1)   Title of each class of securities to which transaction applies:

- --------------------------------------------------------------------------------
2)   Aggregate number of securities to which transaction applies:

- --------------------------------------------------------------------------------
3)   Per unit price or other underlying value of transaction  computed  pursuant
     to Exchange  Act Rule 0-11 (set forth the amount on which the filing fee is
     calculated and state how it was determined):

- --------------------------------------------------------------------------------
4)   Proposed maximum aggregate value of transaction:

- --------------------------------------------------------------------------------
5)   Total fee paid:

- --------------------------------------------------------------------------------
[ ] Fee paid previously with preliminary materials:

[ ] Check box if any part of the fee is offset as provided  by  Exchange  Act
    Rule  0-11(a)(2)  and identify the filing for which the  offsetting fee was
    paid  previously.  Identify the previous filing by  registration  statement
    number, or the form or schedule and the date of its filing.

    1)   Amount previously paid:
                                ------------------------------------------
    2)   Form, Schedule or Registration Statement No.:
                                                      --------------------
    3)   Filing Party:
                      ----------------------------------------------------
    4)   Date Filed:
                    ------------------------------------------------------
<PAGE>
                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281

                    ----------------------------------------
                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                         TO BE HELD ON FEBRUARY 25, 2000
                    ----------------------------------------

To Our Shareholders:

     The 2000 Annual Meeting of Shareholders of AMTECH SYSTEMS, INC., an Arizona
corporation (the  "Company"),  will be held at the Hilton Phoenix Airport Hotel,
2435 South 47th Street,  Phoenix,  Arizona, on February 25, 2000, at 10:00 a.m.,
Mountain Standard time, for the following purposes:

     1.   To elect five (5) directors to serve for one year terms; and

     2.   To  transact  such other  business  as may  properly  come  before the
          meeting or any postponement(s) or adjournment(s)  thereof.  Management
          is presently aware of no other business to come before the meeting.

     The Board of Directors has fixed the close of business on January 21, 2000,
as the record date (the "Record  Date") for the  determination  of  shareholders
entitled  to  notice  of and to  vote  at the  meeting  or any  postponement  or
adjournment thereof.  Shares of Common Stock can be voted at the meeting only if
the holder is present at the meeting in person or by valid proxy.  A copy of the
Company's 1999 Annual Report, which includes audited financial  statements,  was
mailed with this Notice and Proxy Statement to all shareholders of record on the
Record Date.

     Management  of the  Company  cordially  invites  you to attend  the  Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing proposals and the reasons why the Board of Directors
encourages you to vote for approval of such proposals.

                                        By Order of the Board of Directors


                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary

Tempe, Arizona
February 4, 2000


IMPORTANT:  IT IS  IMPORTANT  THAT YOUR  SHAREHOLDINGS  BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.
<PAGE>
                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281

                                 ---------------
                                 PROXY STATEMENT
                                 ---------------

     This Proxy  Statement is being furnished to shareholders of AMTECH SYSTEMS,
INC.,  an  Arizona   corporation  (the   "Company"),   in  connection  with  the
solicitation  of proxies by the Board of  Directors  for use at the 2000  Annual
Meeting of Shareholders of the Company to be held on February 25, 2000, at 10:00
a.m.,  Mountain Standard Time, and any adjournment or postponement  thereof (the
"Annual  Meeting").  A copy of the Notice of the Meeting  accompanies this Proxy
Statement.  This Proxy  Statement  and the  accompanying  form of Proxy Card are
being mailed on or about January 29, 2000.

SOLICITATION AND VOTING OF PROXIES

     Only  shareholders  of record at the close of  business on January 21, 2000
(the "Record  Date") are entitled to notice of and to vote at the Annual Meeting
or any adjournment or postponement thereof. On the Record Date, 2,108,679 shares
of  Common  Stock,  $.01  par  value  (the  "Common  Stock"),  were  issued  and
outstanding. Each holder of Common Stock is entitled to one vote, exercisable in
person or by proxy,  for each share of the Company's Common Stock held of record
on the Record Date.

     At the Annual Meeting,  five (5) directors are to be elected to serve for a
term of one  year  or  until  they're  respective  successors  are  elected  and
qualified.  Each shareholder present at the Annual Meeting,  either in person or
by proxy,  will have an  aggregate  number of votes in the election of directors
equal to five (the  number of  persons  nominated  for  election  as  directors)
multiplied  by the number of shares of Common  Stock of the Company held by each
such shareholder on the Record Date. The resulting aggregate number of votes may
be cast by the  shareholder  for the  election  of any  single  nominee,  or the
shareholder  may distribute  such votes among any number or all of the nominees.
The five nominees  receiving the highest  number of votes will be elected to the
Board of Directors.

     All valid proxies  received  before the Annual Meeting and not revoked will
be  exercised.  All  shares  represented  by proxy  will be  voted,  and where a
shareholder  specifies by means of his or her proxy a choice with respect to any
matter  to be acted  upon,  the  shares  will be voted  in  accordance  with the
specifications so made. If the signed proxy is returned without instructions and
authority to vote is not specifically  withheld,  the persons named in the proxy
solicited  by the  Board of  Directors  intend to vote for the  election  of the
nominees for director  listed below.  Abstentions  and broker  non-votes will be
included in the determination of the number of shares  represented for a quorum.
Proxies  may be  revoked  at any time  prior to the time they are voted by:  (a)
delivering  to the  Secretary of the Company a written  instrument of revocation
bearing a date  later  than the date of the  proxy;  or (b) duly  executing  and
delivering to the Secretary a subsequent  proxy relating to the same shares;  or
(c)  attending the meeting and voting in person,  provided that the  shareholder
notifies the  Secretary of the meeting of his or her intention to vote in person
at any time prior to the voting of the proxy.  In order to vote their  shares in
person at the meeting,  shareholders that own their shares in "street name" must
obtain a special proxy card from their broker.

     The cost of soliciting proxies, including the cost of preparing and mailing
the Notice and Proxy Statement,  will be paid by the Company.  Solicitation will
be  primarily by mailing this Proxy  Statement to all  shareholders  entitled to
vote at the meeting.  Proxies may be solicited by officers and  directors of the
Company   personally   or  by  telephone  or   facsimile,   without   additional
compensation. The Company may reimburse brokers, banks and others holding shares
in their  names  for  others  for the cost of  forwarding  proxy  materials  and
obtaining proxies from beneficial owners.
<PAGE>
     The Board of Directors does not know of any matters other than the election
of directors that are expected to be presented for  consideration  at the Annual
Meeting. However, if other matters properly come before the meeting, the persons
named in the accompanying  proxy intend to vote thereon in accordance with their
judgment.

                              ELECTION OF DIRECTORS

GENERAL INFORMATION

     The present terms of the Company's current directors, Jong S. Whang, Robert
T. Hass,  Donald F.  Johnston,  Alvin Katz and Bruce R.  Thaw,  expire  upon the
election and  qualification  of their  successors at the  Company's  2000 Annual
Meeting  of  Shareholders.  The Board of  Directors  has  nominated  each of the
current  directors  as nominees  for election as directors in the election to be
held at the Annual Meeting.

     The Board of Directors  intends to vote its proxies for the election of its
nominees,  for a term to expire at the next Annual Meeting.  In that regard, the
Board of Directors solicits authority to cumulate such votes.

     If any nominee should become unavailable for any reason, which the Board of
Directors  does not  anticipate,  the  proxy  will be voted  for any  substitute
nominee or nominees who may be selected by the Board of Directors prior to or at
the Annual  Meeting,  or, if no substitute is selected by the Board of Directors
prior to or at the Annual Meeting, for a motion to reduce the present membership
of the Board to the number of  nominees  available  and to create an  additional
vacancy to be filled by the Board of Directors.  The information  concerning the
nominees and their share  holdings in the Company has been  furnished by them to
the Company.

INFORMATION CONCERNING DIRECTORS, NOMINEES AND OFFICERS

     The  following  table  sets  forth  information   regarding  the  officers,
directors and director nominees of the Company,  including biographical data for
at least the last five years.

     NAME                 AGE   POSITION WITH THE COMPANY
     ----                 ---   -------------------------
     Jong S. Whang        54    President, Chief Executive Officer and Director
                                Vice President-Finance, Chief Financial Officer,
     Robert T. Hass       49    Treasurer, Secretary and Director
     Donald F. Johnston   74    Director
     Alvin Katz           70    Director
     Bruce R. Thaw        47    Director

     JONG S. WHANG has been President, Chief Executive Officer and a Director of
the  Company  since  its  inception  and was one of its  founders.  Mr.  Whang's
responsibilities  as  President  include  the  sales  effort  for the  Company's
semiconductor  equipment  business and  development of new products and business
opportunities  in that industry.  He has  twenty-six  years of experience in the
semiconductor   industry,   including   time  spent  in  both   processing   and
manufacturing of equipment components and systems.  From 1973 until 1979, he was
employed by Siltronics,  Inc.,  initially as a technician  working with chemical
vapor deposition (CVD) and later as manager of the quartz fabrication plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

     ROBERT T. HASS has been Vice  President-Finance,  Chief Financial  Officer,
Treasurer and  Secretary of the Company since June 3, 1992.  Mr. Hass has served
as a Director of the Company since February 29, 1996.  From 1991 until May 1992,
he operated a financial  consulting  practice  under the name of Hass  Financial
Consulting Services,  a sole proprietorship.  From 1985 to 1991, Mr. Hass served
as Director of Accounting  Services and then  Controller for  Lifeshares  Group,
Inc., a holding  company  which owned and operated real estate  development  and
insurance  subsidiaries,  and from 1988 to 1991 served as  Controller  and Chief
Accounting Officer of some of those  subsidiaries.  From 1984 to 1985, he served
as Vice  President-Finance  and Treasurer of The Victorio  Company,  a privately
owned holding company which owned and operated agriculture, chemical, commercial
real estate  brokerage,  marketing  research and commodities  futures  brokerage

                                        2
<PAGE>
businesses.  From 1977 to 1984, he was employed in various capacities  including
Vice President,  Chief Financial  Officer and Treasurer by Altamil  Corporation,
then  a  public  company,   which  manufactures   truck  equipment,   wire-bound
containers,  and precision aluminum forgings. From 1972 to 1977, he was employed
as an auditor with Ernst & Ernst,  now known as Ernst & Young. He is a Certified
Public Accountant.

     DONALD F.  JOHNSTON has been a Director of the Company since April 9, 1994,
and also  served as a  Director  from  March 1983 to  December  1992.  He is not
otherwise  employed  by the  Company.  From  1985 to March  1993,  he  served as
President  and Chief  Executive  Officer of JAI,  Inc., a  management-consulting
firm.  From 1985 to March  1993,  when he  retired,  he acted as  marketing  and
management  consultant to companies in the electronics  industry.  From November
1983 until October 1985,  he was  President of Process  Control,  Inc. of Tempe,
Arizona. He has held senior management  positions with Montgomery Ward & Co. and
the Hotpoint Division of the General Electric Company. He has also served as the
Vice-President of B.F. Goodrich,  Vice-President of Marketing of the Philco Ford
Division of the Ford Motor  Company and  Executive  Vice-President  of CTV.  Mr.
Johnston  also  served  as  President  and  Chief  Executive  Officer  of  Mirco
Electronics, Amstar Electronics and Hera Investment Co.

     ALVIN  KATZ has been a Director  of the  Company  since May 1, 1995.  Since
1981,  he has been an adjunct  professor of business  management  at the Florida
Atlantic University in Boca Raton, Florida. From 1991 until the company was sold
in September 1992, he was Chief Executive Officer of Odessa Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976,  Mr.  Katz was  employed  by  United  Parcel  Service  holding  various
managerial  positions,  including  District  Manager  and  Corporate  Manager of
Operations Planning,  Research and Development. He is also a Director of Blimpie
International,  a fast food franchiser,  Nastech Pharmaceutical Company, Inc., a
company  engaged in research,  development  and  marketing of nasally  delivered
pharmaceuticals,  and President of BMAC, a biomedical automation company, all of
which are publicly held corporations.

     BRUCE R. THAW has been a Director  of the  Company  since May 1, 1995.  Mr.
Thaw has been a practicing  attorney since 1978. Since 1995, Mr. Thaw has been a
self-employed  attorney, and from 1984 to 1995, he was a partner in the law firm
of  Abrams  &  Thaw.  Mr.  Thaw  is  also a  Director  of  Information  Resource
Engineering,  Inc., a publicly  traded  company that designs,  manufactures  and
markets   computer   network   security   systems  and  products,   and  Nastech
Pharmaceutical Company, Inc., a publicly traded company engaged in the research,
marketing and development of pharmaceutical  products.  Mr. Thaw does not render
legal services to the Company.

BOARD AND COMMITTEE MEETINGS

     During the 1999 fiscal  year,  there were four (4) meetings of the Board of
Directors.  No  director  attended  less  than 75% of the Board  meetings  while
serving as such director or less than 75% of all committee  meetings on which he
served as a committee member.

     The Audit Committee,  the Compensation and Option Committee and the Finance
Committee  are  the  standing  committees  of  the  Board  of  Directors.  These
committees are comprised as follows:

                                  COMPENSATION
         AUDIT                     AND OPTION                   FINANCE
         -----                     ----------                   -------
       B. R. Thaw                D.F. Johnston                  A. Katz
     D.F. Johnston                  A. Katz                   B. R. Thaw

     The Audit  Committee held two (2) meetings during the 1999 fiscal year. The
Audit Committee is responsible for maintaining  communication between the Board,
the  Company's  independent  auditors and members of financial  management  with
respect to the  Company's  financial  affairs in  general,  including  financial
statements and audits,  the adequacy and effectiveness of the Company's internal
accounting  controls  and  systems  and the  retention  and  termination  of the
independent auditors.

                                        3
<PAGE>
     The Compensation and Option Committee held two (2) meetings during the 1999
fiscal  year.  The  Compensation  and  Option  Committee  makes  recommendations
concerning officer compensation, employee benefit programs and retirement plans.

     The Finance  Committee  held two (2) meetings  during the 1999 fiscal year.
The Finance  Committee is responsible for  communication  between the Board, the
Company's  lender or  prospective  lender(s)  and other  financial  sources  and
members of financial management.

     All current  committee members are expected to be nominated for re-election
at a Board meeting to be held following the Annual Meeting of Shareholders.

COMPENSATION OF DIRECTORS

     Directors who are full-time  employees of the Company receive no additional
compensation for serving as directors.  Non-employee  directors  receive fees of
$700 per Board meeting  attended and $250 per  committee  meeting  attended.  In
addition,  under the Company's  Non-Employee  Directors  Stock Option Plan, each
outside director receives an annual grant of options to purchase 3,000 shares of
Common  Stock.  The  exercise  price of the options is the fair market  value of
Common  Stock on the date of grant and each  option  has a term of ten years and
becomes  exercisable  in  three  equal  installments  commencing  on  the  first
anniversary  of the  date  of  grant  and  continuing  for  the  two  successive
anniversaries thereafter. In the event of disability (as defined in the plan) or
death of an outside  director,  all options remain  exercisable  for a period of
twelve months  following the date such person ceased to be a director,  but only
to the extent such option was  exercisable on the date the director ceased to be
a director.

     During  fiscal  year  1999,  Mr.  Johnston  received  a fee of  $1,500  for
consulting  services  provided to the Company in connection with a review of its
Carlisle Pennsylvania operation.

COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

     The Compensation  and Option Committee is composed of Messrs.  Johnston and
Katz, neither of whom is an officer or employee of the Company.

SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

     The  following  table  sets  forth  certain   information   concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 21, 2000, by
(i) each director and each nominee for director of the Company,  (ii) certain of
the Company's executive officers (the "Named Executive Officers"), and (iii) all
executive  officers and directors as a group.  There are no persons known to the
Company  who  beneficially  own  five  percent  (5%) or  more  of the  Company's
outstanding  Common Stock.  This  information  was determined in accordance with
Rule 13d-3 under the Securities  Exchange Act of 1934, as amended,  and is based
upon the information  furnished by the persons listed below. Except as otherwise
indicated,  each  shareholder  listed possesses sole voting and investment power
with respect to the shares indicated as being beneficially owned.

                                             NUMBER OF SHARES       PERCENT OF
     NAME AND ADDRESS (1)(2)               BENEFICIALLY HELD (3)   OWNERSHIP (3)
     -----------------------               ---------------------   -------------
     Jong S. Whang                               114,463(4)             5.3%
     Robert T. Hass                                8,250(5)              *
     Donald F. Johnston                           10,625(6)              *
     Alvin Katz                                   87,500(6)             4.1%
     Bruce R. Thaw                                21,500(6)             1.0%

     Directors and Executive Officers of
     the Company as a group (5  persons)         242,338(7)            11.5%

- ----------
* Less than 1%.

                                        4
<PAGE>
(1)  The  address for each  person  listed in this table is c/o Amtech  Systems,
     Inc., 131 South Clark Drive, Tempe, Arizona 85281.

(2)  Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is the
     Vice President-Finance, Chief Financial Officer, Treasurer, Secretary and a
     director. Messrs. Johnston, Katz and Thaw are presently directors.

(3)  The  shares  and  percentages  shown  include  the  shares of Common  Stock
     actually  owned as of January 17, 2000, and the shares of Common Stock with
     respect to which the person had the right to acquire  beneficial  ownership
     within 60 days of such date pursuant to options or warrants.  All shares of
     Common Stock that the identified  person had the right to acquire within 60
     days of January  21,  2000 upon the  exercise  of options or  warrants  are
     deemed to be  outstanding  when  computing the percentage of the securities
     owned by such person,  but are not deemed to be outstanding  when computing
     the percentage of the securities owned by any other person.

(4)  Includes (i) 9,488 shares held  jointly  with Mr.  Whang's  spouse and (ii)
     62,775 shares issuable upon the exercise of presently  exercisable options;
     62,275  shares  issuable  at an  exercise  price of $1.126 per  share;  the
     balance of 500 shares issuable at an exercise price of $1.50 per share.

(5)  Includes  1,750 shares  issuable  upon  exercise of  presently  exercisable
     options with an exercise price of $1.126 per share.

(6)  Includes  10,000 shares  issuable  upon  exercise of presently  exercisable
     options;  9000 shares issuable at an exercise price of $1.126 per share and
     the  balance of 1000  shares  issuable  at an  exercise  price of $1.50 per
     share.

(7)  Includes  94,525 shares  issuable  upon  exercise of presently  exercisable
     options;  91,025 shares  issuable at an exercise  price of $1.126 per share
     and the balance of 3,500 shares  issuable at an exercise price of $1.50 per
     share.

COMPLIANCE WITH SECTION 16(a) OF THE SECURITIES EXCHANGE ACT OF 1934

     Section 16(a) of the Securities Exchange Act of 1934, as amended,  requires
the Company's directors and executive officers,  as well as persons beneficially
owning more than 10% of the Company's  outstanding Common Stock, to file certain
reports of ownership  with the Securities  and Exchange  Commission  (the "SEC")
within  specified time periods.  Such officers,  directors and  shareholders are
also  required by SEC rules to furnish  the  Company  with copies of all Section
16(a) forms they file.

     Based  solely  on its  review of such  forms  received  by it,  or  written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October  1,  1998 and  September  30,  1999 all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied  with,  except that  reports  were not timely filed with respect to the
automatic  option grant to directors  arising under the  Company's  Non-employee
Directors Stock Option Plan and the options grants reflected on the next page.

                                        5
<PAGE>
                             EXECUTIVE COMPENSATION

     The  following  table sets  forth  annual and  long-term  compensation  for
services in all  capacities to the Company for the fiscal years ended  September
30, 1999, 1998 and 1997 of the Company's Chief Executive Officer,  and the other
most highly  compensated  executive  officer of the Company who received  annual
compensation  exceeding  $100,000  during such  periods  (the  "Named  Executive
Officers").

                           SUMMARY COMPENSATION TABLE

<TABLE>
<CAPTION>
                                                                          LONG-TERM
                                           ANNUAL COMPENSATION           COMPENSATION
                                 --------------------------------------  ------------
      NAME AND         FISCAL                            OTHER ANNUAL     RESTRICTED       ALL OTHER
 PRINCIPAL POSITION     YEAR     SALARY    BONUS (1)   COMPENSATION (2)  STOCK AWARDS   COMPENSATION (3)
 ------------------     ----     ------    ---------   ----------------  ------------   ----------------
<S>                     <C>     <C>        <C>              <C>             <C>             <C>
Jong S. Whang           1999    $130,200   $ 12,292           --              --            $    0

President and Chief     1998     167,147          0           --              --             3,037
Executive Officer       1997     139,615     33,994(1)        --              --             3,693

Robert T. Hass          1999    $ 85,500   $      0           --              --            $     0
Vice President-         1998      96,105      7,245           --              --              2,123
Finance                 1997      89,838     10,771           --              --              1,935
</TABLE>

- ----------
(1)  On  February  24,  1989,  the  Board of  Directors  approved  an  incentive
     compensation  plan for Mr. Whang,  which  provides for an annual cash bonus
     equal  to 2% of  the  annual  profits  of  the  Company  before  taxes  and
     extraordinary  items;  plus 2% of the amount by which the  revenues  of the
     Company'  s  semiconductor  equipment  business  in each year  exceed  such
     revenues  for the  previous  year.  It is a condition to the payment of any
     bonus that Mr. Whang have been continually employed by the Company and that
     the  Company  have  realized a profit  after the  payment of the bonus.  On
     February 28, 1997,  Mr. Whang entered into an employment  contract with the
     Company,  which contract  incorporated Mr. Whang's  incentive  compensation
     plan and added  additional  bonus  eligibility  criteria.  See  "Employment
     Contracts with Executive  Officers," below.  Effective October 4, 1998, Mr.
     Whang voluntarily initiated a 20% reduction in his salary to $130,200.

(2)  Other  compensation to Messrs.  Whang and Hass,  consisting of the use of a
     Company car, vacation pay and other perquisites,  did not exceed $50,000 or
     10% of base compensation during any fiscal year covered by this table.

(3)  Amounts for Mr. Whang include annual insurance  premiums paid on whole-life
     insurance for the benefit of Mr.  Whang's spouse of $225 in fiscal 1997 and
     Company matching contributions in the Amtech Systems, Inc. 401(k) Plan (the
     "Amtech 401(k) Plan") for Mr. Whang of $0, $3,037 and $3,438 in 1999,  1998
     and 1997,  respectively.  Amounts for Mr. Hass represent  Company  matching
     contributions  in the Amtech 401(k) Plan.  Effective  October 4, 1998,  Mr.
     Hass' annual salary was reduced to $85,500.

OPTION GRANTS

     The table  shown  below  contains  information  on grants of stock  options
during the 1999 fiscal year to the Named Executive Officers.

                                        6
<PAGE>
                       OPTIONS GRANTS IN LAST FISCAL YEAR

<TABLE>
<CAPTION>
                                        INDIVIDUAL GRANTS                          POTENTIAL REALIZABLE VALUE
                              --------------------------------------               AT ASSUMED ANNUAL RATES OF
                 SECURITIES     % OF TOTAL                  STOCK                   STOCK PRICE APPRECIATION
                 UNDERLYING       OPTIONS                  PRICE ON                           FOR
                  OPTIONS       GRANTED TO      EXERCISE    DATE OF                      OPTION TERM (4)
                  GRANTED        EMPLOYEES       PRICE       GRANT     EXPIRATION   -------------------------
      NAME          (#)       IN FISCAL 1999   ($/SHARE)   ($/SHARE)      DATE       0%        5%       10%
      ----          ---       --------------   ---------   ---------      ----      -----    ------    ------
<S>               <C>              <C>          <C>          <C>        <C>         <C>      <C>       <C>
Jong S. Whang     2,500(1)          8%          $1.50(3)     $1.50      10/01/08     -0-     $2,358    $5,977
Robert T. Hass    5,000(2)         15%          $1.13(3)     $1.13       2/26/09     -0-     $3,541    $8,973
</TABLE>

- ----------
(1)  All  options  were  granted to Mr.  Whang on  February  26,  1999 under the
     applicable  Stock Option Plan. The options  granted  become  exercisable as
     follows:  20% on February 26, 2000,  and an additional 20% on each one year
     anniversary thereafter. To the extent not already exercisable,  the options
     become immediately  exercisable upon: (i) the dissolution or liquidation of
     the Company or a  reorganization,  merger or  consolidation in which all or
     substantially  all prior  shareholders do not continue to own more than 60%
     of the outstanding shares of common stock and voting  securities;  (ii) the
     sale of all or substantially all of the assets of the Company; or (iii) the
     occurrence of a change in control of the Company.

(2)  All  options  were  granted  to Mr.  Hass on  October  1,  1998  under  the
     applicable  Stock Option Plan. The options  granted  become  exercisable as
     follows:  20% on  October  1, 1999 and an  additional  20% on each one year
     anniversary thereafter.

(3)  The exercise price was set at 100% of closing price of the Company's Common
     Stock on grant day, (February 26, 1999 for options granted to Mr. Whang and
     October 1, 1998 for options granted to Mr. Hass), as reported on the NASDAQ
     SmallCap Market.  The options granted to Mr. Hass were re-priced on October
     14,  1998,  along with all other  outstanding  stock  options to the market
     price on that date, ($1.126).

(4)  Reflects  the value of the stock  option on the date of grant  assuming (i)
     for the 0% column,  no  appreciation  in the Company's stock price from the
     date of grant over the term of the option,  (ii) for the 5% column,  a five
     percent annual rate of  appreciation  in the Company's stock price over the
     term of the option, and (iii) for the 10% column, a ten percent annual rate
     of  appreciation  in the Company's stock price over the term of the option,
     in each case without any discounting to present value. The actual gains, if
     any, on stock option exercises are dependent upon the future performance of
     the Company's  Common  Stock.  Accordingly,  the amounts  reflected in this
     table may not necessarily be indicative of the actual results obtained.

OPTION EXERCISES

     There were no exercises  of stock  options  during  fiscal year 1999 by the
Named Executive Officers.

BOARD REPORT ON REPRICING

     The Board believes that the Company has taken constructive steps to improve
its  performance and believes that hiring and retaining key employees is central
to implementing these measures.  In furtherance of these goals, in October 1998,
the Board reduced the per share exercise price of options  previously granted to
Jong S. Whang and Robert T. Hass. The Board concluded that the results  achieved
by these executives were the basis for the repricing of options granted to them.
No other provisions of these options were altered.

     In  accordance  with the rules of the  Securities  and Exchange  Commission
("SEC"),  this Option Repricing Report of the Board of Directors is not intended
to be "filed" or "soliciting  material" or subject to Regulations  14A or 14C or
Section 18 of the Securities Exchange Act 1934, as amended, or incorporated into
any other filing by the Company with the SEC.

                                        7
<PAGE>
AMENDMENT OR RE-PRICING OF OPTIONS

     The table below  setsforth  information  for all  executive  officers  with
respect to re-pricing of options for the 10 years preceding September 30, 1999.

                       TEN YEAR OPTION/SAR REPRICINGS (1)

<TABLE>
<CAPTION>
                                                                                             LENGTH OF
                                     NUMBER OF                                                ORIGINAL
                                    SECURITIES    MARKET PRICE   EXERCISE PRICE             OPTION TERM
                                    UNDERLYING    OF STOCK AT      OF STOCK AT              REMAINING AT
                                      OPTIONS       TIME OF          TIME OF       NEW        DATE OF
                                    REPRICED OR   REPRICING OR    REPRICING OR   EXERCISE   REPRICING OR
NAME                     DATE         AMENDED      AMENDMENT        AMENDMENT      PRICE      AMENDMENT
- ----                     ----         -------      ---------        ---------      -----      ---------
<S>                 <C>               <C>            <C>              <C>         <C>         <C>
Jong S. Whang       Oct. 14, 1998     103,792        $1.126           $5.00       $1.126      8 3/8 years
President and CEO

Robert T. Hass      Oct. 14, 1998       1,250        $1.126           $5.00       $1.126      8 3/8 years
VP-Finance          Oct. 14, 1998       5,000        $1.126           $1.50       $1.126         10 years
</TABLE>

- ----------
(1)  The number of shares and the  prices  per share have all been  restated  to
     give effect for the two-for-one reverse split that took effect on March 15,
     1999.

EMPLOYMENT CONTRACTS WITH EXECUTIVE OFFICERS

     On February 28, 1997, the Company  entered into a five (5) year  employment
agreement with its President,  Jong S. Whang.  Under the terms of the agreement,
Mr. Whang is entitled to an annual  salary of $170,900 on October 1, 1998,  with
annual  increases of at least 5% to be  determined  by the Board of Directors at
the end of each year of the  agreement.  Effective  October 4, 1998,  Mr.  Whang
voluntarily initiated a 20% reduction in his salary to $130,200. In addition, he
is entitled to receive annual  incentive cash  compensation  of up to 50% of his
base salary, to be calculated as follows:  (i) a bonus equal to 2% of the annual
earnings of the Company before taxes and  extraordinary  items, and (ii) a bonus
equal to 2% of the amount by which the revenues of the  Company's  semiconductor
equipment  business in each year exceeds such revenues for the previous year. It
is a condition  to the payment of any cash bonus that Mr.  Whang shall have been
continuously  employed  by the  Company and that the total of all cash and stock
bonuses is  limited  to 10% of the  Company's  pre-tax  earnings  for that year.
Profits are determined without taking into account the first $3,200,000 expended
or invested by the Company in the development of the proposed photo-assisted CVD
product,  which has been suspended.  In addition,  Mr. Whang was granted 207,584
stock options pursuant to the agreement.  These options were granted on February
28,  1997 and vest at the rate of 20% per full year of service  over a five-year
period. To the extent not already  exercisable,  the options become  immediately
exercisable  upon:  (i) the  dissolution  or  liquidation  of the  Company  or a
reorganization,  merger or consolidation in which all or substantially all prior
shareholders do not continue to own more than 60% of the then outstanding shares
of Common Stock and voting securities, (ii) the sale of all or substantially all
of the assets of the Company,  or (iii) the occurrence of a change in control of
the  Company  as  discussed  in  the  agreement.  The  agreement  also  contains
confidentiality  and non-compete  provisions.  If Mr. Whang is terminated  other
than for "cause," he is entitled to receive as severance  pay salary,  incentive
compensation  and  vacation  accrued  through the date of  termination  plus the
greater of his then annual salary or the balance of his  compensation to the end
of the term of the employment  agreement  computed  using the latest  applicable
salary rate without  consideration of any salary  reductions.  Mr. Whang is also
entitled to participate in any benefit plans generally available to employees of
the Company.

                                        8
<PAGE>
COMPENSATION AND OPTION COMMITTEE REPORT ON EXECUTIVE COMPENSATION

     The  Compensation  and Option Committee of the Company's Board of Directors
(the "Committee), which is composed entirely of independent,  outside directors,
establishes  the general  compensation  policies  of the  Company  and  specific
compensation  for each executive  officer of the Company,  and  administers  the
Company's  stock  option  program.   The  Committee's  intent  is  to  make  the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective
incentives to motivate and reward Company executives for achieving the financial
and strategic goals of the Company essential to the Company's  long-term success
and to growth in shareholder value. The Company's executive compensation package
consists of three main components:  (1) base salary, (2) incentive cash bonuses,
and (3) stock options.

BASE COMPENSATION

     The Committee's  approach is to offer executives salaries  competitive with
those of other executives in the industry in which the Company operates. To that
end, the  Committee  evaluates the  competitiveness  of its base salary based on
information drawn from a variety of sources, including published and proprietary
survey  data  and  the  Company's  own   experience   recruiting  and  retaining
executives,   although  complete  information  is  not  easily  obtainable.  The
Company's  base salary  levels are intended to be  consistent  with  competitive
practice  and  level  of  responsibility,   with  salary  increases   reflecting
competitive  trends,  the overall  financial  performance of the Company and the
performance of the individual executive.

BONUSES

     In  addition  to  base  salary,   executives  are  eligible  to  receive  a
discretionary annual bonus. At the beginning of each year, the Committee and the
Chief  Executive  Officer (the "CEO")  review each  individual  executive's  job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the  Company.  In  addition,  for all  executives,  the  Committee  reviews  the
Company's  actual  financial   performance   against  its  internally   budgeted
performance in determining year-end bonuses, if any. However, the Committee does
not set  objective  performance  targets for  executives  other than the CEO and
sales and marketing personnel.

STOCK OPTION AND RESTRICTED STOCK GRANTS

     The  Company,  from  time to time,  grants  stock  options  and  shares  of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  Grants of stock options and
restricted stock are designed to align the executive's interest with that of the
shareholders  of the Company.  In awarding  option  grants,  the Committee  will
consider,  among other things, the amount of stock and options presently held by
the executive,  the  executive's  past  performance and  contributions,  and the
executive's anticipated future contributions and responsibilities.

1999 CEO COMPENSATION

     The base  salary to which  the CEO for the  fiscal  year 1999 was  entitled
increased  from $162,750 in fiscal 1998 to $170,900 in fiscal 1999,  pursuant to
the terms of the  February  28, 1997  employment  agreement  entered into by the
Company  and the  CEO.  The  CEO's  increased  base  salary  is  based  upon the
compensation  of  executives  in  comparable   positions  in  the  semiconductor
industry,  adjusted  for the size of the Company  (total  assets and  revenues).
However,  effective  October 4, 1998,  Mr.  Whang  voluntarily  initiated  a 20%
reduction  in his base  salary to  $130,200,  which  continued  in effect  until
September 30, 1999.

     On  February  24,  1989,  the  Board of  Directors  approved  an  incentive
compensation  plan for the CEO, which provides for an annual cash bonus equal to
2% of the annual  profits of the Company before taxes and  extraordinary  items;
plus 2% of the  amount  by which the  revenues  of the  Company's  semiconductor
equipment  business in each year exceed such revenues for the previous  year. It
is a condition  to the  payment of any bonus that the CEO have been  continually
employed by the  Company  and that the total of such cash  bonuses is limited to
10% of the Company's  pre-tax  earnings for that year. The CEO earned a bonus of
$12,292  in 1999  pursuant  to  such  incentive  compensation  plan.  The  CEO's
employment  agreement with the Company  incorporates the incentive  compensation
plan described above. See "Employment Contracts With Executive Officers," above.

                                        Compensation and Option Committee

                                        Donald F. Johnston
                                        Alvin Katz

                                        9
<PAGE>
                 CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

     The  Company  did not have any  transactions  during  fiscal  1999 with any
director,  director  nominee,  executive  officer,  security holder known to the
Company to own of record or  beneficially  more than 5% of the Company's  Common
Stock, or any member of the immediate family of any of the foregoing persons, in
which the amount involved exceeded $60,000.

COMPARISON OF STOCK PERFORMANCE

     The  following  graph  assumes that $100 was invested on October 1, 1993 in
each of the following:  the Company's  Common Stock,  the NASDAQ Composite Index
and the NASDAQ Industrial Index.

CRSP TOTAL
RETURNS INDEX FOR:         9/30/94  9/29/95  9/30/96  9/30/97  9/30/98  9/30/99
- ------------------         -------  -------  -------  -------  -------  -------
Amtech Systems, Inc.       100.00    260.71   271.43   153.57    42.86    57.14
NASDAQ Composite Index     100.00    136.54   160.53   220.56   221.62   359.31
NASDAQ Industrial Index    100.00    126.26   135.17   176.89   132.70   207.00

                                  OTHER MATTERS

INDEPENDENT AUDITORS

     Arthur Andersen LLP has been selected as the Company's independent auditors
for the current fiscal year, which ends September 30, 2000. That firm has served
as the Company's  independent  auditors since 1983. During the fiscal year ended
September 30, 1999,  Arthur Andersen LLP provided audit services to the Company.
Representatives  of that firm are  expected to be present at the Annual  Meeting
with the  opportunity  to make a  statement  if they  desire  to do so and to be
available to respond to appropriate questions.

ANNUAL REPORT

     The  Annual  Report of the  Company  for the fiscal  year  ended  September
30,1999, is enclosed herewith.

                                       10
<PAGE>
VOTING BY PROXY

     In order to ensure  that your  shares  will be  represented  at the  Annual
Meeting,  please sign and return the enclosed Proxy in the envelope provided for
that purpose,  whether or not you expect to attend. Any shareholder may, without
affecting any vote previously taken,  revoke a written proxy by giving notice of
revocation  to the  Company in writing or by  executing  and  delivering  to the
Company a later dated proxy.

SHAREHOLDER PROPOSALS FOR ACTION AT THE COMPANY'S NEXT ANNUAL MEETING

     Any shareholder  who wishes to present any proposal for shareholder  action
at the next Annual Meeting of  Shareholders to be held in 2001, must be received
by the Company's Secretary,  at the Company's offices, not later than October 4,
2000, in order to be included in the Company's proxy statement and form of proxy
for that meeting. Such proposals should be addressed to the Corporate Secretary,
Amtech  Systems,  Inc.,  131 South  Clark  Drive,  Tempe,  Arizona  85281.  If a
shareholder  proposal is introduced at the 2001 Annual  Meeting of  Shareholders
without any discussion of the proposal in the Company's proxy statement, and the
shareholder  does not notify the  Company on or before  December  17,  2000,  as
required by SEC Rule 14(a)-4(c)(1),  of the intent to raise such proposal at the
Annual  Meeting of  Shareholders,  then proxies  received by the Company for the
2001 Annual  Meeting will be voted by the persons named in such proxies in their
discretion with respect to such proposal.  Notice of such proposal is to be sent
to the above address.

                                        By Order of the Board of Directors


                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary
Tempe, Arizona
February 4, 2000

                                       11
<PAGE>
                              AMTECH SYSTEMS, INC.

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
         OF AMTECH SYSTEMS, INC. FOR THE ANNUAL MEETING OF SHAREHOLDERS

     The undersigned shareholder of Amtech Systems, Inc., an Arizona corporation
(the "Company"),  hereby acknowledges receipt of the Notice of Annual Meeting of
Shareholders  dated February 4, 2000 and hereby appoints Jong S. Whang or Robert
T. Hass and each of them,  proxies  and  attorneys-in-fact,  with full  power of
substitution,  on behalf and in the name of the  undersigned,  to represent  the
undersigned at the Annual Meeting of Shareholders of AMTECH SYSTEMS,  INC. to be
held at the Hilton  Phoenix  Airport  Hotel,  2435 South 47th  Street,  Phoenix,
Arizona on February 25, 2000 at 10:00 a.m.,  Mountain  Standard time, and at any
adjournment(s)  or  postponement(s)  thereof,  and to vote all  shares of Common
Stock  that  the  undersigned  would  be  entitled  to vote if  then  and  there
personally present, on the matters set forth below.

1.   ELECTION OF DIRECTORS [ ] FOR all nominees  listed below  (except as marked
     to the contrary  below):  Jong S. Whang  Robert T. Hass Donald F.  Johnston
     Alvin Katz Bruce R. Thaw

     [ ]  WITHHOLD AUTHORITY to vote for all nominees listed above

     INSTRUCTIONS:  To withhold  authority to vote for any  individual  nominee,
     write that nominee's name in the space provided below:

     ---------------------------------------------

     The  undersigned  agrees that the proxy  holder is  authorized  to cumulate
     votes in the  election  of  directors  and to vote for less than all of the
     nominees.

     THIS  PROXY WHEN  PROPERLY  EXECUTED  WILL BE VOTED IN THE MANNER  DIRECTED
HEREIN BY THE UNDERSIGNED SHAREHOLDER.  IF NO DIRECTION IS MADE, THIS PROXY WILL
BE VOTED FOR THE ELECTION OF THE  NOMINEES  NAMED ABOVE AND AS SAID PROXIES DEEM
ADVISABLE ON SUCH MATTERS AS MAY COME BEFORE THE MEETING.

Dated: ___________________, 2000

                                   Please  sign  exactly  as your  name  appears
                                   above.  When  shares are held in common or in
                                   joint tenancy, both should sign. When signing
                                   as  attorney,  as  executor,   administrator,
                                   trustee or  guardian,  please give full title
                                   as  such.  If a  corporation,  sign  in  full
                                   corporate   name  by   President   or   other
                                   authorized officer. If a partnership,  please
                                   sign in  partnership  name  by an  authorized
                                   person.

SIGNATURES:
            -------------------------------

            -------------------------------

            -------------------------------

              Please return in the enclosed, postage-paid envelope.

                   I [ ] Will [ ] Will not attend the Meeting.


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