ELECTRO SCIENTIFIC INDUSTRIES INC
10-K405, 1997-08-19
MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES
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<PAGE>

                      SECURITIES AND EXCHANGE COMMISSION
                            WASHINGTON, D.C. 20549

    
                                   FORM 10-K
                                 ANNUAL REPORT



(Mark One)
(X) Annual report pursuant to section 13 or 15(d) of the Securities Exchange
    Act of 1934 for the fiscal year ended May 31, 1997 or
( ) Transition report pursuant to section 13 or 15(d) of the Securities
    Exchange Act of 1934 for the transition period from ______________ to
    _______________ 

                           Commission File Number:  0-12853

                         ELECTRO SCIENTIFIC INDUSTRIES, INC.
                 (Exact name of registrant as specified in its charter)

    Oregon                                            93-0370304
    (State or other jurisdiction of                   (I.R.S. Employer
    incorporation or organization)                    Identification No.)

    13900 NW Science Park Drive
    Portland, Oregon                                  97229
    (Address of principal executive offices)          (Zip Code)

          Registrant's telephone number, including area code: (503) 641-4141
                                           
             Securities registered pursuant to Section 12(b) of the Act: 
                                         None

             Securities registered pursuant to Section 12(g) of the Act: 
                           Common Stock, without par value
                           Preferred Stock Purchase Rights
                                           
Indicate by check mark whether the Registrant (1) has filed all reports required
to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during
the preceding 12 months (or for such shorter period that the registrant was
required to file such reports), and (2) has been subject to such filing
requirements for the past 90 days.  Yes  X   No      
                                       ----    ----

Indicate by check mark if disclosure of delinquent filers pursuant to Item 405
of Regulation S-K is not contained herein, and will not be contained, to the
best of registrant's knowledge, in definitive proxy or information statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K. X
          ---

The aggregate market value of Common Stock held by nonaffiliates of the
Registrant at July 15, 1997: $471,712,000.

The number of shares of Common Stock outstanding at July 15, 1997: 9,853,000.

                         Documents Incorporated by Reference
                         -----------------------------------
                                                     Part of Form 10-K into
Document                                             which is incorporated
- - --------                                             ----------------------
1997 Annual Report to Shareholders                    Part II

Proxy Statement for 1997 Annual Meeting               Part III
of Shareholders

<PAGE>

                               TABLE OF CONTENTS

Item of Form 10-K                                                       Page
- - -----------------                                                       ----
PART I

Item 1 -    Business................................................       3

Item 2 -    Properties..............................................      13

Item 3 -    Legal Proceedings.......................................      13

Item 4 -    Submission of Matters to a Vote of Security Holders.....      13

Item 4(a) - Executive Officers of the Registrant....................      14

PART II

Item 5 -    Market for the Registrant's Common Equity and
            Related Shareholder Matters.............................      17

Item 6 -    Selected Financial Data.................................      17

Item 7 -    Management's Discussion and Analysis of Financial
            Condition and Results of Operations.....................      18

Item 8 -    Financial Statements and Supplementary Data.............      22

Item 9 -    Changes in and Disagreements with Accountants on
            Accounting and Financial Disclosure.....................      40

PART III

Item 10 -   Directors and Executive Officers of the Registrant......      40

Item 11 -   Executive Compensation..................................      40

Item 12 -   Security Ownership of Certain Beneficial
            Owners and Management...................................      40

Item 13 -   Certain Relationships and Related Transactions..........      40

PART IV

Item 14 -   Exhibits, Financial Statement Schedules, and
            Reports on Form 8-K.....................................      41

SIGNATURES..........................................................      43

<PAGE>

                                        PART I
ITEM 1.  BUSINESS

ESI provides electronics manufacturers with equipment necessary to produce 
key components used in wireless telecommunications, computers, automotive 
electronics, and many other electronic products. ESI believes it is the 
leading supplier of advanced laser systems used to adjust (trim) electronic 
circuitry and to improve the yield of semiconductor memory devices. ESI 
believes it is the leading producer of high-speed test and termination 
equipment used in the high-volume production of miniature capacitors. ESI 
produces a family of mechanical and laser drilling systems for production of 
printed circuit boards and advanced electronic packaging.  Additionally, ESI 
designs and manufactures machine vision products for manufacturers of 
semiconductors, electronics and other products. ESI's products enable these 
manufacturers to reduce production costs, increase yields and improve the 
quality of their products. ESI's customers include manufacturers of: wireless 
telecommunication products (Ericsson, Motorola and Siemens); automotive 
electronics (Delco, Ford, Nippon-Denso and Siemens); miniature capacitors 
(Kemet, Kyocera/AVX, Murata, Philips, Samsung and TDK) and semiconductor 
memory devices (Fujitsu, Hitachi, Hyundai, IBM, Samsung and Texas 
Instruments).

ELECTRONICS INDUSTRY OVERVIEW

The electronic content of telecommunications products, automobiles and 
personal computers continues to increase.  For example, automobile 
manufacturers now routinely include electronic ignition, anti-lock brakes, 
electronic fuel injection and other electronic systems in place of components 
that in the past were predominantly mechanical. In addition, markets for 
consumer-oriented electronic products such as cellular telephones, facsimile 
machines, pagers, camcorders and personal computers have developed rapidly as 
increasingly affordable products have been introduced. 

Demand for electronics manufacturing equipment is driven by the demand for 
electronic devices and circuits. Electronic components are used in virtually 
all electronic products, from inexpensive consumer electronics to the most 
sophisticated computers. These components are produced in very large unit 
volumes.

The demands upon manufacturers to supply increasing quantities of electronic 
components have been accompanied by demands for increased complexity, reduced 
size and improved quality. As electronic products become more powerful and 
portable, the devices and circuits in these products must be faster, smaller 
and more reliable. To achieve these attributes of higher performance, the 
electronic device manufacturers increase densities and tune the devices to 
precise electrical values. Manufacturers of cellular telephones, for example, 
must use miniaturized circuits to accommodate the size limitations of the 
finished product. These circuits must also operate within precise frequency 
specifications, typically requiring component values with less than 0.5 
percent tolerance, in order for the existing cellular frequency bands to 
accommodate the expanding number of cellular users without interchannel 
interference.

As electronic device densities and performance demands have increased, the 
manufacturers of capacitors and resistors, which are basic components of 
assembled electronic devices, have been compelled to reduce size and to 
improve performance of these individual components. The increasing 
miniaturization of these components makes production, testing and termination 
difficult.

                                      3

<PAGE>

In addition to quantity, size and performance demands, a trend throughout the 
electronics industry is cost reduction. The highly competitive markets for 
electronic products create cost limitations at the consumer level, and result 
in cost pressure on component manufacturers. The manufacturers continuously 
seek to reduce device costs by improving throughput, yield and quality in 
device production.

OVERVIEW OF MARKETS, PRODUCTS AND STRATEGY

Pagers, cellular telephones, personal computers and automotive electronics 
represent the largest end-market applications for electronic devices and 
circuits that are produced using ESI's systems. ESI's customers also serve a 
wide range of other electronic applications. 

ESI believes it is critical that each of its products provide the customer 
with measurable production benefits, such as improved yield, increased 
throughput, greater reliability, or increased flexibility, resulting in a 
high return on investment. ESI also designs its production systems with a 
migration path for system upgrade, thereby providing its customers 
flexibility to add capacity or improve product performance at a reasonable 
incremental cost.

ESI believes it is the leading merchant equipment supplier to three 
specialized markets: laser trimming, miniature capacitor testing and 
production and semiconductor memory yield improvement.  ESI also serves the 
machine vision and electronic packaging markets.

LASER TRIMMING SYSTEMS.  ESI's laser trimming systems are used to tune the 
precise frequency of electronic circuits that receive and transmit signals in 
pagers, cellular telephones and other wireless devices. ESI's laser trimming 
systems are also used to tune automotive electronic assemblies such as engine 
control circuits.

ESI's laser systems are used by manufacturers supplying the 
telecommunications, automotive, and consumer markets. Customers include 
Delco, Ericsson, Ford, IBM, Motorola, Nippon-Denso, Siemens, and Kyocera.

The laser adjusts the electrical performance of an electrical product or 
assembly containing many circuits. The laser removes a precise amount of 
material from one or more components in the circuit to achieve the desired 
electrical specification for the entire product. This process is called 
"functional trimming," and is performed while the product or assembly is 
under power. For example, in pagers, laser trimming of a few selected 
components in the product is used to tune the electrical performance of the 
entire product to the desired frequency specification. 

ESI's systems also adjust the electrical performance of individual devices 
such as film resistors, resistor networks, capacitors and hybrid circuits. 
Laser trimming is required because the screening process used to manufacture 
resistors cannot cost effectively deposit material precisely enough to 
provide consistent electrical values. The trimming system can also be rapidly 
reprogrammed to trim devices of different values.

                                      4

<PAGE>

The following chart summarizes the models, typical applications and key 
features of ESI's current laser trimming products: 

                             ESI LASER TRIMMING PRODUCTS

<TABLE>
<CAPTION>
                                                                    BEAM
                                                                 POSITIONING  THROUGHPUT      WORK
                                                                 RESOLUTION   (TRIMS PER      AREA
PRODUCT                     TYPICAL APPLICATION                   (MICRONS)     SECOND)      (INCHES)
- - -------                     -------------------                  -----------  ----------     --------
<S>           <C>                                                <C>          <C>            <C>
Model 4300    Surface mount capacitor and resistor trimming           2.50        50          4 x 4
Model 977     Test intensive, thick film, functional trimming         1.55        50          3 x 3
Model 4990    Thick film functional trimming                          1.27        50          3 x 3
Model 907V    Chip resistor trimming                                  1.27       100          3 x 3
Model 4410    Thick/thin film functional trimming                     1.01        15          3 x 3
</TABLE>


TEST AND PRODUCTION SYSTEMS FOR SURFACE MOUNT CERAMIC CAPACITORS.  ESI's 
product offering consists of automated test, production and handling 
equipment for manufacture of miniature multi-layer ceramic capacitors (MLCCs) 
which are used in very large numbers in nearly all types of electronic 
circuits. Large numbers of MLCCs are used in circuits that process analog 
signals or operate at high frequencies such as in video products (VCRs and 
camcorders), voice communication products, wireless telecommunication 
products and computers. Principal customers for ESI's MLCC test and 
production equipment are Kemet, Kyocera/AVX, Murata, Philips, Samsung and TDK.

The worldwide miniature surface mount capacitor market is estimated to be 
approximately $4.5 billion (240 billion units) in 1996. Most of the leading 
producers are in Japan, led by Kyocera, Murata and TDK. ESI believes it is 
the leading merchant supplier of equipment to the MLCC industry for test and 
termination of miniature capacitors. Production demands imposed by 
miniaturization are leading capacitor manufacturers to increasingly consider 
merchant equipment suppliers as an alternative to internal development of 
manufacturing equipment.

As circuit sizes have shrunk, the size of commonly used miniature capacitors 
has also shrunk to as small as .04" x .02" x .01". These minute sizes and the 
high unit volumes place extraordinary demands on manufacturers. ESI's 
products combine high-speed, small parts handling technology with 
microprocessor-based systems to provide highly automated solutions for MLCC 
manufacturers. ESI's test and termination equipment and specialty handling 
tools perform a broad range of functions in the manufacturing process. 

TEST.  Virtually all capacitors are tested and sorted by capacitance 
(electrical energy storage) and dissipation (electrical energy leakage). 
ESI's equipment employs high-speed handling and positioning techniques to 
precisely load, test and sort capacitors based upon these electrical values. 

                                      5

<PAGE>

TERMINATION.  MLCCs are manufactured in a lamination process, layering 
conductive and insulation materials. ESI's microprocessor-based termination 
systems apply conductive material to the ends of surface mountable MLCCs, 
permitting connection of the device in a circuit.  Chip Star, Inc., a 
subsidiary purchased on June 26, 1997, produces a fully automated product 
line for termination of MLCCs and capacitor arrays.  These products, the 
CS 325A and CS 750, are capable of processing the smallest sized (.04 x .02) 
parts available on the commercial market.

HANDLING TOOLING.  ESI offers a wide range of specialized production fixtures 
and tools for various stages of the manufacturing process, including a series 
of patented carrier plates capable of handling up to 8,000 devices per plate 
for termination application. The decreasing size and growing volumes of MLCCs 
produced cause manufacturers to continuously seek new tools and fixtures to 
improve throughput and handling efficiency.


                                      6

<PAGE>

The following chart summarizes the models, typical applications and key
features of ESI's current miniature capacitor test and production products:

                 ESI MINIATURE CAPACITOR TEST AND PRODUCTION PRODUCTS

<TABLE>
<CAPTION>
      PRODUCT                          APPLICATION                                   KEY FEATURES
      -------                          -----------                                   ------------
<S>                          <C>                                          <C>
TEST SYSTEMS
Models 16A and 18            Tests capacitance, dissipation factor and    High speed rotary tester with
                             voltage capability for small (Model 18)      throughput of up to 50,000 parts/hour.
                             and medium (Model 16A) size MLCCs            
                                                                          

Models 3002 and 3001 IR      Tests insulation resistance (IR)             High speed parallel tester with                
                             of MLCCs                                     throughput of up to 50,000 parts/hour.         
                                                                          Model 3001 IR includes automatic bulk loading. 
                                                                          
Model 3300                   Tests capacitance dissipation factor and     High speed rotary tester with          
                             voltage capability for small and medium      throughput of up to 180,000 parts/hour.
                             size MLCCs; tests insulation resistance      
                                                                          
TERMINATION SYSTEMS
Models 2001 and 2020         Electrical contact attachment                Microprocessor controlled surface       
                             on MLCCs                                     mount termination system with           
                                                                          throughput up to 130,000 parts/hour.    
                                                                          Model 2020 includes an integrated kiln. 
                                                                          

Model 2007                   Electrical contact attachment                High productivity microprocessor     
                             on MLCCs                                     controlled surface mount termination 
                                                                          system with throughput up to 470,000 
                                                                          parts/hour.                          
                                                                          
 
CS 325A                      Electrical contact attachment                Automated termination of smallest size    
                             on MLCCs                                     capacitors with throughput up to 100,000 parts/hour.

                                                                          
 
CS 750                       Electrical contact attachment                Automated termination of smallest size         
                             on MLCC arrays                               capacitor arrays with throughput up to 50,000 parts/hour. 
                                                                          
HANDLING TOOLING
Carrier Plates               Plates to batch handle MLCCs for             Patented composite carriers to handle  
                             test and termination                         the full range of MLCC sizes and up to 
                                                                          8,000 pieces per batch.                
                                                                          
 
Test Tooling                 Test fixtures for use with                   Permits precise location and positioning 
                             ESI systems                                  of MLCCs during the test operation.      
                                                                          
</TABLE>


                                       7

<PAGE>

MEMORY YIELD IMPROVEMENT SYSTEMS.  Memory yield improvement systems are used 
by nearly all manufacturers of dynamic random access memories (DRAMs) to 
increase production yields. Personal computers and high performance 
workstations are the largest market for semiconductor memory, although 
photocopiers, facsimile machines and telecommunications equipment represent 
products requiring increasing amounts of memory. Customers of ESI's memory 
systems include Fujitsu, LG Semiconductor, Hitachi, Hyundai, IBM, NEC, 
Samsung, Siemens, and Texas Instruments. 

Memory device manufacturers use a laser process that removes defective 
circuit elements while programming spare elements to be replacements and 
thereby salvaging a memory device.  Cost reductions and demand for higher 
capacity memory devices have lead manufacturers to reduce the size of circuit 
elements while increasing the number of circuit elements per device.  This 
increased density in memory devices has required leading edge semiconductor 
processes, resulting in lower initial manufacturing yields.

The yield enhancement process begins with circuit designers adding extra or 
spare elements to the memory array.  During the manufacturing process each 
device is tested to determine yield.  When a defective element is identified, 
its location or address is recorded and given to ESI's laser system to effect 
a replacement or repair.  The laser system positions a laser beam over 
connecting links to the defective element and cuts or breaks the electrical 
path. Replacements are added by programming the failed address into a new or 
spare element.  Redundancy is used by every significant manufacturer of DRAMs 
and is increasingly being used by manufacturers of other semiconductor memory 
applications, such as SRAMs, DSPs, and other logic devices.  

ESI began shipments of the Model 9300 Laser Repair system in August 1996. 
This system features a patented laser system technology operating at a 1.3 
micron wavelength that enables manufacturers to use metal links which are 
required for advanced memory devices.  This system is recognized as the new 
industry standard for future laser repair systems.  

ESI also offers the Model 1225ci and Model 9250 series systems.  The Model 
1225ci uses patented stage plus galvanometer beam positioning to provide 
throughput benefits, a small footprint, and a high cost performance ratio.  
It is used by manufacturers requiring increased capacity of four and sixteen 
megabit devices.  The ESI Model 9250 series provides high throughput and high 
reliability for those manufacturers using poly-link materials, even for 
advanced memory devices.

VISION SYSTEMS.  ESI's vision systems combine advanced computer technology, 
proprietary software and optical equipment to reduce application development 
time and provide machine vision inspection that facilitates quality products 
and fast throughput. ESI's vision systems are integrated in ESI's laser 
systems and are also marketed independently to electronic and semiconductor 
industry customers for general purpose inspection, part position verification 
for manufacturing processes, wafer identification using OCR, measurement, 
alignment, machine guidance and assembly verification. Customers for ESI's 
vision products include Hewlett Packard and IBM.

                                      8

<PAGE>

ELECTRONIC PACKAGING SYSTEMS.  ESI provides a cost effective method for 
forming vias, which are the basis for creating electrical connections in a 
multiple layer printed circuit board and electronic packages.  Applications 
in this market include new generations of integrated circuit packages, multi 
chip modules, and high density circuit boards. The primary advantage of the 
technology is the ability to process very small vias in a wide variety of 
materials.  Electronic industry materials include ceramic, traditional glass 
reinforced circuit boards, copper, and new organic compounds. Customers 
include Automata, Erricson, IBM, Johnson-Matthey/ACI, Sheldahl, Siemens and 
W.L. Gore.

DRILLING PRODUCTS.  The Model 5100, introduced in June 1996, is the current 
laser-based product offering, and features the capability to drill up to 
10,000 micro-vias per minute.  The Model 5100 includes a proprietary laser, 
operating in the ultraviolet region of the light spectrum, which can cleanly 
cut copper and glass-reinforcement without damaging or burning organic 
materials. The system can form blind or through holes in all of the common 
circuit board materials and uses a unique real-time inner layer alignment to 
deliver high placement accuracy.  In this way, the user can achieve the 
smallest pad dimensions enabling the production of today's emerging high 
density packages.

Dynamotion, a subsidiary purchased on June 9, 1997, produces 
computer-controlled mechanical drilling equipment which is sold to 
manufacturers of printed circuit boards (PCBs) and semiconductor packages.  
The drilling machines are used to produce thousands of very small holes, 
sometimes as small as .004" in diameter, which is the diameter of a human hair.

 
Four product lines of computer-controlled drilling equipment are produced by 
Dynamotion: (1) DM 9400/9500 with a patented vacuum pre-load air bearing 
guiding design for the high-dynamic stability necessary for micro-drilling; 
(2) Six-PAK-TM- with its new innovative design is economical, accurate, compact
and extremely productive for the commercial, high-volume PCB market; (3) 
Modular Systems offer the same characteristics as the DM 9400/9500 to the 
prototype and quick-turn market; and (4) Smart DrillTM with its patented 
vision optimization capability offers a fast, highly accurate method of 
optimizing and drilling for the most sophisticated multilayer board 
manufacturers.

ROUTING PRODUCTS.  Dynamotion produces computer-controlled routers which are 
sold to computer manufacturers and manufacturers of PCBs.  Routers are used 
to cut and shape individual PCBs out of panels.  Currently, the two primary 
machining processes required to produce a PCB are routing and drilling.  In 
contrast to a drill, which makes thousands of tiny holes on a PCB, the router 
cuts the shape of the PCB, as well as the larger holes and special cavities 
for mounting of semiconductor die.  The computer-controlled cuts made by the 
router can be very complex since the position of the cuts are pre-programmed 
in three axes.

A newly emerging PCB chip carrier technology creates unusual demands on the 
routing process.  Perfect registration of routed edges with respect to the 
circuitry features and the internal layers are required to successfully 
produce chip carriers.  Very accurate depth control is necessary for cavity 
routing. Dynamotion produces two product lines of computer controlled 
routers: the SMART-TM- Driller/Router and the Six-PAK-TM- Router Drill.

                                      9

<PAGE>

SALES, MARKETING AND SERVICE

ESI sells its products worldwide through direct sales and service offices 
located in or near: Boston, Massachusetts, Dallas, Texas, Portland, Oregon, 
San Diego and Santa Ana, California in the United States; Tokyo and Nagoya, 
Japan, Seoul, Korea, and Taipei, China in Asia; and Munich, Germany, London, 
England and Leiderdorp, Netherlands in Europe. ESI serves customers in 
approximately 30 additional countries through manufacturers representatives. 

ESI has a substantial base of installed products in use by leading worldwide 
electronics manufacturers. ESI emphasizes strong working relationships with 
these leading manufacturers in order to meet their needs for additional 
systems and to facilitate the successful development and sale of new products 
to these customers.

ESI maintains service personnel wherever it has a significant installed base 
and provides service anywhere its equipment is installed. New systems are 
tested to ensure they meet requirements and acceptance criteria as specified 
in customer orders. ESI also offers a variety of maintenance contracts and 
parts replacement programs. 

ESI has an OEM contract with Advantest Ltd. to supply memory yield improvement
systems in Japan. Sales to Advantest amounted to 10.5%, 6.8% and 7.2% of net
sales for the fiscal years 1997, 1996, and 1995.  ESI maintains a presence in
Korea through a wholly-owned subsidiary. 

Sales outside the U.S. accounted for 71.0%, 66.8% and 70.9% of ESI's net sales
for fiscal years 1997, 1996 and 1995.

One customer accounted for 10.5% of sales in fiscal 1997.  In fiscal year 1996,
no one customer exceeded 10% of sales.  One customer accounted for 12.4% of
ESI's sales in fiscal 1995.

BACKLOG

Backlog consists of written purchase orders for products for which ESI has 
assigned shipment dates within the following twelve months. Backlog also 
includes written purchase orders for spare parts and service to be delivered 
or performed within the next twelve months. Backlog was $25 million at May 
31, 1997 versus $35 million at May 31, 1996 and $26 million at May 31, 1995. 
ESI expects all of its existing backlog to ship within the next twelve months.

                                     10

<PAGE>

RESEARCH, DEVELOPMENT AND TECHNOLOGY

ESI believes that its ability to compete effectively depends, in part, on 
whether it can maintain and expand its expertise in core technologies and 
product applications. The primary emphasis of ESI's research and development 
is to advance ESI's capabilities in: 

    -    Lasers and laser/material interaction 
    -    High speed, sub-micron motion control systems 
    -    Precision optics 
    -    High speed, small parts handling 
    -    Image processing and optical character recognition 
    -    Real-time production line electronic measurement 
    -    Real-time software 
    -    Systems integration 

ESI's research and development expenditures for fiscal years 1997, 1996, and 
1995 were $16.5 million (11.0% of net sales), $16.3 million (10.2% of net 
sales), and $13.7 million (12.7% of net sales), respectively. The foregoing 
figures do not include the effect of research and development expenditures 
funded by the Advanced Research Projects Agency (ARPA) of the U.S. Government.

In addition, research and development expenditures for the year ended May 31, 
1996 do not include the acquired in-process research and development expense 
of $6.0 million incurred in connection with the purchase price allocation of 
XRL, Inc. 

COMPETITION

ESI's markets are competitive. The principal competitive factors in the 
industry are product performance, reliability, service and technical support, 
product improvements, price, established relationships with customers and 
product familiarity. ESI believes that its products compete favorably with 
respect to these factors. Some of ESI's competitors have greater financial, 
engineering and manufacturing resources than ESI and larger service 
organizations. In addition, certain of ESI's customers develop, or have the 
ability to develop, similar manufacturing equipment. There can be no 
assurance that competition in ESI's markets will not intensify or that ESI's 
technological advantages may not be reduced or lost as a result of 
technological advances by competitors or customers or changes in electronic 
device processing technology.

                                     11

<PAGE>

For laser trimming systems, major competitors are NEC and General Scanning. 
In miniature capacitor test and production equipment, ESI's competition comes 
mainly from manufacturers that develop systems for internal use, and in 
Japan, from test equipment manufactured by Tokyo Weld and Humo, among others. 
ESI's major competitors for memory repair systems are Nikon and General 
Scanning.  ESI also competes with stand alone vision suppliers such as Cognex 
and Robotic Vision Systems, and with robotics and factory automation 
companies, such as Allen Bradley. There are also numerous other vision 
companies and captive vendors in Japan, North America and Europe.  ESI's 
electronic packaging systems compete with mechanical drilling manufacturers 
such as Hitachi-Seiko, Excellon and laser system provider, Lumonics.

MANUFACTURING AND SUPPLY

ESI's laser system manufacturing operations consist of electronic 
subassembly, laser production and final system assembly. Principal production 
facilities are headquartered in Portland, Oregon. Miniature capacitor test 
and production systems are manufactured by ESI's Palomar and Chip Star 
subsidiaries near San Diego, California.  Dynamotion drilling and routing 
products are produced in Santa Ana, California.  ESI also uses qualified 
manufacturers to supply many components of its products.

ESI's laser systems use high performance computers, peripherals, lasers and 
other components from various vendors.  Some components used by ESI are 
obtained from a single source or a limited group of suppliers. An 
interruption in the supply of a particular component could require 
substitutions which would have a temporary adverse impact on ESI. ESI 
believes it has good relationships with its suppliers.

EMPLOYEES

As of May 31, 1997, ESI employed 649 persons, including 195 in engineering, 
research and development, 251 in manufacturing and 203 in marketing, sales, 
customer service and administration.  Many of ESI's employees are highly 
skilled, and ESI's success will depend in part upon its ability to attract 
and retain such employees, who are in great demand. ESI has never had a work 
stoppage or strike and no employees are represented by a labor union or 
covered by a collective bargaining agreement. ESI considers its employee 
relations to be good.

PATENTS AND OTHER INTELLECTUAL PROPERTY

ESI has a policy of seeking patents, when appropriate, on inventions relating 
to new products and improvements which are discovered or developed as part of 
ESI's on-going research, development and manufacturing activities. ESI owns 
40 United States patents and has applied for 16 patents in the United States. 
In addition, ESI has 35 foreign patents and has applied for 40 additional 
foreign patents. Although ESI's patents are important, ESI believes that the 
success of its business depends to a greater degree on the technical 
competence and innovation of its employees.

                                     12

<PAGE>

ESI relies on copyright protection for its proprietary software. ESI also 
relies upon trade secret protection for its confidential and proprietary 
information. There can be no assurance that others will not independently 
develop substantially equivalent proprietary information and techniques, or 
that ESI can meaningfully protect its trade secrets. 

Some customers using certain products of ESI have received a notice of 
infringement from Jerome H. Lemelson, alleging that equipment used in the 
manufacture of semiconductor products infringes patents issued to Mr. 
Lemelson relating to "machine vision" or "barcode reader" technologies. 
Certain of these customers have notified ESI that they may be seeking 
indemnification from ESI for any damages and expenses resulting from this 
matter. One of ESI's customers has settled litigation with Mr. Lemelson, and 
several other customers are currently engaged in litigation involving Mr. 
Lemelson's patents. While ESI cannot predict the outcome of this or similar 
litigation or its effect upon ESI, ESI believes that it will not have a 
material adverse effect on its financial condition or results of operations. 

ITEM 2.  PROPERTIES

The Company's executive and administrative offices, and principal laser 
system manufacturing facilities are located in a two-building complex located 
on 16 acres in Sunset Science Park, in Portland, Oregon. The buildings are 
owned by ESI, and contain approximately 134,000 square feet of floor space.  
Palomar is located in a 64,000 square foot plant on ten acres of land, all 
owned by ESI, in Escondido, California.

In addition, approximately 15,000 square feet of industrial space is leased 
in Canton, Massachusetts.  The Company also leases 7,000 square feet of 
office space in Portland, Oregon for its Vision Products Division, 8,000 
square feet of office and industrial space in San Marcos, California for its 
Chip Star subsidiary, 30,000 square feet of office and industrial space in 
Santa Ana, California for its Dynamotion subsidiary, and office and service 
space in several additional locations in the United States, and in seven 
foreign countries.

ITEM 3.  LEGAL PROCEEDINGS

On December 26, 1996, ESI filed a lawsuit against General Scanning, Inc. in 
the United States District Court for the Northern District of California for 
patent infringement.  The complaint alleges that General Scanning is 
infringing two of ESI's patents used in the Model 9300 laser repair systems 
(patent numbers 5,265,114 "System and Method for Selectively Laser Processing 
a Target Structure of One of More Materials of a Multimaterial, Multilayer 
Device" and 5,473,624 "Laser System and Method for Selectively Severing 
Links").  ESI is seeking damages and an injunction against further 
infringement.  General Scanning has filed counterclaims alleging that certain 
ESI patents are invalid and unenforceable and that ESI has interfered with 
General Scanning's business reputation.  General Scanning is seeking damages 
and declaratory judgments that the ESI patents are not infringed, are invalid 
and are unenforceable. While ESI cannot predict the outcome of this or 
similar litigation or its effect upon ESI, ESI believes that it will not have 
a material adverse effect on its financial condition or results of 
operations. 

ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS. 

No matters were submitted to a vote of the security holders of the Company
during the fourth quarter ended May 31, 1997.

                                     13

<PAGE>

ITEM 4(A):    EXECUTIVE OFFICERS OF THE REGISTRANT.

The executive officers of the Company, and their ages and positions as of
June 30, 1997, are as follows:

 NAME                        AGE                               POSITION
 ----                        ---                               --------
 Donald R. VanLuvanee        53      Chief Executive Officer, President and 
                                      Director
 Robert E. Belter            56      Vice President
 Robert C. Cimino            52      Director of Human Resources
 Barry L. Harmon             43      Chief Financial Officer and 
                                      Senior Vice President 
 Jon R. Hopper               37      Vice President
 Jonathan C. Howell          43      Vice President
 Mark W. Klug                58      Vice President
 John R. Kurdock             52      Vice President
 Larry T. Rapp               57      Corporate Secretary and Vice President 
 Joseph L. Reinhart          38      Vice President
 Joseph Z. Rivlin            62      Vice President
 Vernon R. Swearingen        57      Vice President
 Edward J. Swenson           58      Senior Vice President


Mr. VanLuvanee joined the Company in 1992 as Chief Executive Officer, 
President and a Director. From July 1991 to July 1992, Mr. VanLuvanee was 
President, Chief Executive Officer and a Director at Mechanical Technology 
Inc., a supplier of contract research and development services and a 
manufacturer of technologically advanced equipment. From 1990 to 1991, he was 
President and Chief Executive Officer of BCT Spectrum, Inc., a supplier of 
vacuum deposition systems. From 1984 to 1990, he was President, Chief 
Operating Officer and a Director of Kulicke and Soffa Industries, Inc., a 
supplier of capital equipment and consumables to the microelectronics 
industry.  Mr. VanLuvanee is also a Director of Micro Component Technology, 
Inc., a leading manufacturer of automated test handling equipment, and FEI 
Company, which designs, manufactures and markets focused ion beam 
workstations and both ion and electron emitter and focusing column components.

Mr. Belter joined ESI in May, 1997 and was elected President and General 
Manager of the Palomar subsidiary and a Corporate Vice President.  Mr. Belter 
is responsible for the ceramic capacitor production equipment business unit, 
including the Palomar and Chip Star subsidiaries.  Prior to joining ESI, Mr. 
Belter served as a consultant to the Company in marketing and product 
development for one year. Mr. Belter has extensive prior experience in the 
electronic component industry, including four years as President and General 
Manager of Johanson Dielectrics, and ten years as President and General 
Manager of Kyocera Northwest, North American Electronic Components.

Mr. Cimino joined ESI in 1993 as Director of Human Resources.  Mr. Cimino was 
employed by Eastman Kodak prior to joining ESI.  He held management positions 
at Kodak in human resources, customer service, sales, and real estate asset 
management.

                                     14

<PAGE>

Mr. Harmon joined the Company in 1992 and has served the Company in various 
financial management positions. In January 1995, he was elected Chief 
Financial Officer and Senior Vice President. Mr. Harmon held various financial 
management positions with the Global Private Banking Group of Citibank from 
1985 to 1991. He was employed by Arthur Andersen LLP from 1976 until 1983. 
Mr. Harmon is a licensed CPA.

Mr. Hopper joined ESI as a Group Vice President in the Electronic Packaging 
Business Unit upon Dynamotion's merger with the Company on June 9, 1997. 
Previously, he was Chairman, President and Chief Executive Officer of 
Dynamotion from April 1995.  Mr. Hopper's experience includes several 
management positions in high technology businesses during the period from 
1990 to 1994.

Mr. Howell joined ESI in April 1993 as Director of MIS.  In June 1995, he was 
appointed Managing Director of the Vision Products Division. In September 
1995, Mr. Howell was elected Vice President.  Since July 1996, Mr. Howell is 
responsible for the Company's technical staff and resources.  Mr. Howell has 
extensive management experience from Citibank, Gulf and Western and Arthur 
Young & Co.

Mr. Klug joined Palomar Systems, Inc. in August 1992 and in April 1993 was 
elected a Corporate Vice President.  Mr. Klug is responsible for the test 
segment of the capacitor equipment business unit. From 1988 to 1992, Mr. Klug 
was Vice President of Engineering for Symtek Systems, Inc., and between 1983 
and 1988 he held senior management positions with Kulicke and Soffa 
Industries, Inc., including Senior Vice President of U.S. Operations and Vice 
President of Engineering.

Mr. Kurdock joined ESI in February 1997 as Group Vice President and General 
Manager of Portland Operations.  Prior to joining ESI, Mr. Kurdock served as 
Vice President of the Surface Mount Division for Universal Instruments.  He 
has also held senior operating positions with the Silicon Valley Group and 
Perkin Elmer.

Mr. Rapp joined the Company in 1966 and has served in various capacities in 
engineering. In 1982 he became the Government Relations and Patent Manager. 
He served as Assistant Secretary from 1988 to 1991, and in January 1992 was 
elected Corporate Secretary and Legal Manager.  In September 1995, Mr. Rapp 
was elected Vice President.

Mr. Reinhart joined ESI in 1993 as Communications and Contracts Manager and 
was promoted to Director of Business Development in April 1995. He was 
elected a Vice President in September 1996. His experience includes finance, 
venture funding, mergers and acquisitions and administration in 
high-technology businesses.

Mr. Rivlin, who joined the Company in 1994, was elected Vice President of 
Sales in February 1995.   Prior to joining ESI, Mr. Rivlin was Vice President 
of Sales and Service for Solbourne Computer, and President and CEO of XRL, 
Inc.  He has held other management positions at GenRad, Fairchild Camera and 
Instrument Corp., and Veeco Instruments, Inc.

                                      15

<PAGE>

Mr. Swearingen joined the Company in November 1992 as Director of Laser 
Systems Business Unit and was elected Vice President in April 1993.  From 
1990 to 1991, Mr. Swearingen was President of Quantum Engineering, Inc., a 
project engineering firm, and from 1988 to 1990 he held a management position 
with Kulicke and Soffa Industries, Inc.  

Mr. Swenson joined the Company in 1961 as a project and applications 
engineer. In 1970, he initiated the manufacture of computer-controlled laser 
systems for trimming and scribing microcircuits. He became Manager of the 
Systems Business Unit in 1978, Vice President, Advanced Development in 1979, 
Vice President, Advanced Technology Division in 1985 and Senior Vice 
President, Advanced Technology Group in 1987.

                                    16

<PAGE>

                                   PART II

ITEM 5.  MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED SHAREHOLDER
         MATTERS


COMMON STOCK PRICES/DIVIDENDS

The Company's Common Stock trades on the NASDAQ National Market under the 
symbol ESIO.  The following table sets forth, for the fiscal quarters 
indicated, the high, low and closing sales prices for the Common Stock as 
reported on the NASDAQ National  Market.

FISCAL QUARTER                   1997                           1996
- - --------------                   ----                           ----
                       HIGH      LOW      CLOSING     HIGH      LOW     CLOSING
                       ----      ---      -------     ----      ---     -------
1st Quarter. . . . .  $27-1/4   $15-1/2   $18-1/4   $39-3/4   $24-5/8   $33-3/4
2nd Quarter. . . . .   26        17-1/4    24-1/4    41-1/2    24-1/2    28-1/2
3rd Quarter. . . . .   31-3/4    22-1/2    27        30-1/2    18-3/4    21-1/2
4th Quarter. . . . .   39-1/4    23-3/4    38        28-3/4    16-3/4    26-1/2


The Company has not paid any cash dividends on its Common Stock during the last
five fiscal years.  The Company currently intends to retain its earnings for its
business and does not anticipate paying any cash dividends on its Common Stock
in the foreseeable future.

The approximate number of shareholders of record at May 31, 1997 was 336.


ITEM 6.  SELECTED FINANCIAL DATA

<TABLE>
<CAPTION>
                                                              FISCAL YEARS ENDED MAY 31,
                                                              --------------------------
(THOUSANDS OF DOLLARS EXCEPT PER SHARE)      1997           1996           1995           1994           1993
- - -------------------------------------------------------------------------------------------------------------
<S>                                      <C>            <C>            <C>             <C>            <C>
Net sales                                $150,159       $159,705       $108,215        $72,550        $67,851
   Laser systems and service              104,535        108,577         66,045         41,985         36,742
   Capacitor manufacturing equipment       40,457         47,531         39,115         23,961         20,393
   Vision systems                           5,167          3,597          3,055          2,562          2,736
   Divested product lines(1)                   --             --             --          4,042          7,980
Net income(2)                              18,952         19,894         11,517          7,874          2,244
Net income per share(2)                      2.19           2.31           1.53           1.23           0.37
Working capital                           113,201         92,901         74,419         36,247         28,883
Net property, plant and equipment          16,185         16,662         15,616         14,592         16,696
Total assets                              148,886        132,525        110,598         62,366         61,161
Long-term debt                                 --             --             --             --          4,809
Shareholders' equity                      135,212        114,916         94,444         53,547         43,950
</TABLE>

(1)   See Management's Discussion and Analysis.
(2)   Fiscal 1996 excludes the $6.0 million In-Process Research and Development
      write off associated with the acquisition of XRL.

                                      17

<PAGE>

ITEM 7.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND
         RESULTS OF OPERATIONS.

FISCAL YEAR ENDED MAY 31, 1997 COMPARED TO FISCAL YEAR ENDED MAY 31, 1996

Revenue for fiscal 1997 was $150.2 million, which was 6.0% or $9.5 million 
lower than for fiscal 1996.  The decline was due to lower shipments of 
capacitor production equipment during the first half of fiscal 1997, as 
customers absorbed capacity added in the prior year, and lower sales of 
circuit fine tuning systems throughout the year.  These declines were 
partially offset by an increase from $4.8 million to $10.8 million in 
laser-based electronics packaging systems and smaller increases in the sales 
of semiconductor memory yield improvement and vision systems.

Gross margin of 53.6% for the year ended May 31, 1997 was slightly below the  
54.4% gross margin for fiscal 1996. The sales decline in capacitor production 
equipment increased manufacturing overhead cost per unit sold was the most 
significant factor causing the decrease in margin. Increased sales of higher 
margin semiconductor yield improvement systems, electronic packaging 
equipment and machine vision systems positively affected gross margin.

Selling, service and administrative expenses were $3.3 million lower for the 
year ended May 31, 1997. The decrease is a result of lower selling 
commissions associated with decreased sales volumes and lower incentive 
compensation.  Selling, service and administrative expenses decreased as a 
percentage of sales, to 24.4% from 25.0% from year to year.

Research, development and engineering expenses for the year ended May 31, 
1997 were $0.3 million higher than the prior year. Research, development and 
engineering expenses increased, as a percentage of sales, to 11.0% for 1997 
from 10.2% for the prior year.  The comparison between spending of the 
current year and the prior year does not include the acquired in-process 
research and development charge of $6.0 million incurred in connection with 
the purchase price allocation of XRL, Inc in fiscal 1996.

The effective tax rate of 34.1% for the year ended May 31, 1997 decreased 
from 36.5% as a result of an increased benefit recognized on foreign sales.  

Net income for the year ended May 31, 1997 was $19.0 million or $2.19 per 
share compared to $16.1. million or $1.87 per share for the same period of 
the prior year.

FISCAL YEAR ENDED MAY 31, 1996 COMPARED TO FISCAL YEAR ENDED MAY 31, 1995

Net sales increased 47.6% or $51.5 million.  The increasing electronics 
content, complexity and decreasing size of consumer communication devices, 
automotive components and computers is directly related to the increased 
demand for ESI's products.  Sales of semiconductor yield improvement systems 
more than doubled. The acquisition of  XRL, Inc. in July 1995 contributed 
$18.9 million toward the increase in semiconductor yield improvement sales.  
Increased volume and more favorable product mix of capacitor manufacturing 
products and circuit fine tuning systems also contributed significantly to 
the revenue growth.  ESI's emerging electronic packaging business reported 
modest growth.

                                      18

<PAGE>

Gross margin increased from 52.5% for fiscal 1995 to 54.4% as a result of 
increased volume of semiconductor yield improvement equipment sold, increased 
sales of higher margin circuit fine tuning systems, and productivity 
improvements in the capacitor carrier plate manufacturing process.

Selling, service and administrative expenses decreased, as a percentage of 
sales, to 25.0% from 25.5% for fiscal 1996 compared to the same period of the 
prior year.  Selling, service and administrative expenses increased $12.2 
million compared to the prior year as a result of higher selling commissions 
and travel associated with increased sales levels, salaries and incentive 
compensation.

Research, development and engineering expenses increased $3.1 million for the 
year ended May 31, 1996 compared to the prior year.  Increased product 
development efforts resulted in additional project material costs and 
compensation related to new hires.  Engineering costs associated with XRL 
also contributed to the increase.  Research, development and engineering 
expenses declined, as a percentage of sales, to 10.2% for fiscal 1996 from 
12.1% for the prior year as sales grew faster than spending increases.   

The acquired in-process research and development expense of $6.0 million 
occurred in connection with the purchase price allocation of XRL, Inc.  ESI 
obtained an appraisal of the intangible assets which indicated that 
substantially all of the acquired intangible assets consisted of research and 
development in process.  In accordance with generally accepted accounting 
principles, the acquired in-process research and development was expensed 
during the first quarter ended August 31, 1995.

The effective tax rate of  36.5% for the year ended May 31, 1996 increased 
from 30.0% for the prior year as a result of utilizing tax loss and credit 
carryovers in fiscal 1995.

Net income for the year ended May 31, 1996 was $16.1 million or $1.87 per 
share compared to $11.5 million or $1.53 per share for the prior year.  Net 
income per share, excluding the effect of the acquired in-process research 
and development charge of $6.0 million, was $2.31 in fiscal 1996, a 51% 
increase over the prior year.

FINANCIAL CONDITION AND LIQUIDITY

The Company's principal sources of liquidity are existing cash, cash 
equivalents and marketable debt securities of $43.2 million, accounts 
receivable of $48.9 million, and a $7.0 million line of credit, none of which 
was outstanding at May 31, 1997.  ESI has no debt and a current ratio of 
9.3:1. Working capital increased to $113.2 million at May 31, 1997, from 
$92.9 million at May 31, 1996. Accounts receivable increased as product 
payment terms are longer for the recently introduced models 9300, 5100 and 
3300. Current liabilities decreased from May 31, 1996 due to acceleration of 
income tax payments and reduced incentive compensation accruals.

In June 1997, the Company closed two mergers, Dynamotion / ATI Corp. and Chip 
Star, Inc. Both of these companies operate from a single location in Southern 
California and develop and sell capital equipment that is complementary to 
existing ESI markets and customers.  Refer to Business Environment in the Notes 
to Consolidated Financial Statements for additional information.

                                      19

<PAGE>

The total consideration for both mergers was 1,047,000 shares of ESI stock. 
In addition, Dynamotion debt liabilities of approximately $11.0 million were 
liquidated immediately after the merger was closed with ESI's existing 
resources.  Debt liabilities are not expected to be used to finance future 
Dynamotion working capital requirements.  

Production capacity for these acquired businesses is expected to be satisfied 
from existing facilities, which are leased, or their replacement. In 
connection with ESI's Portland based operations, the Company is undertaking 
renovations to improve space utilization and may consider the lease or 
purchase of additional facilities to satisfy growth potential.  The fiscal 
1998 capital expenditures are expected to increase approximately 50.0% over 
the level incurred during the past three years due to these renovations and 
will be satisfied with existing cash resources.  The Company may acquire or 
invest in other complementary businesses, product lines or technologies.  
These acquisitions or investments may require additional debt or equity 
capital to fund such activities.

A summary of cash flow activities is as follows (in thousands):

                                                    1997      1996       1995
                                                    ----      ----       ----
Cash flows provided by (used in):
    Operating activities...................      $  8,529   $10,888   $     96
    Investing activities (1)...............       (13,621)   (4,897)   (21,456)
    Financing activities (2)...............         1,796     1,246     24,524
                                                 --------   -------   --------
Increase (decrease) in cash and cash
    equivalents (3)..................            $ (3,296)  $ 7,237   $  3,164
                                                 --------   -------   --------

(1) Reflects the net purchase of $9.5 million, $1.1 million, and $17.0 million
    in marketable debt securities during fiscal 1997, 1996, and 1995,
    respectively.
(2) Reflects net proceeds from stock offering in fiscal 1995.
(3) Total cash and securities increased from $37.0 million on May 31, 1996 to
    $43.2 million on May 31, 1997.

OPERATING ACTIVITIES:  Operating activities provided $8.5 million in cash. 
The increase in trade receivables of $10.2 million is due to longer product 
payment terms for the recently introduced models 9300, 5100 and 3300.  
Collection of receivables in June 1997 reduced this balance by approximately 
$10.0 million. The decrease in accrued liabilities of $4.8 million is a 
function of lower incentive compensation and an acceleration of income tax 
payments.

INVESTING ACTIVITIES:  Net cash of $13.6 million was used in investing 
activities.  The Company made purchases in the amount of $3.4 million to 
upgrade computing resources and improve manufacturing capabilities by 
investing in equipment that will decrease costs and improve quality.  In 
addition, net purchases of highly liquid marketable debt securities utilized 
$9.5 million.

FINANCING ACTIVITIES:  Net cash of  $1.8 million was generated from financing 
activities in the form of stock option exercises and the related tax benefit. 

                                     20

<PAGE>

FACTORS THAT MAY AFFECT FUTURE RESULTS

The Company's business depends in large part upon the capital expenditures
of manufacturers of electronic devices, including miniature capacitors,
semiconductor memory devices, and circuits used in wireless telecommunications
equipment, including pagers and cellular phones, automotive electronics and
computers. The markets for products manufactured by the Company's customers are
cyclical and have historically experienced periodic downturns, which often have
had a negative effect on the demand for capital equipment such as that sold by
the Company. Several large, multinational electronics companies constituted
47.1% of the Company's fiscal 1997 sales and therefore, the loss of any of these
customers would be significant.

The market for the Company's products is characterized by rapidly changing 
technology and evolving industry standards. The Company believes that its 
future success will depend on its ability to develop and manufacture new 
products and product enhancements and to introduce them successfully into the 
market. Failure to do so in a timely fashion could harm the Company's 
competitive position. The announcements or introductions of new products by 
the Company or its competitors may adversely affect the Company's operating 
results, since these announcements may cause customers to defer or forego 
ordering products from the Company's existing product lines.

International shipments accounted for 71.0% of sales for fiscal 1997 compared 
to 66.8% of sales for fiscal 1996. The Company expects that international 
shipments will continue to represent a majority of net sales in the future. 
As a result, a significant portion of the Company's net sales will be subject 
to certain risks, including changes in demand resulting from fluctuations in 
interest and currency exchange rates, as well as factors such as government 
financed competition, changes in trade policies, tariff regulations, 
difficulties in obtaining US export licenses and the difficulties of staffing 
and managing foreign operations.

Most of the Company's sales are transacted in dollars and the Company's 
products are made in the United States. Many Japanese customers pay in yen; 
therefore, ESI hedges these sales transactions to mitigate currency risks. 
The European and Asian sales subsidiaries' operating expenses are denominated 
in their respective local currencies. These transactions represent 
approximately 15.6% of fiscal 1997 consolidated operating expenses and are 
equally split between Europe and Asia. Changes in the value of the local 
currency, as measured in US dollars, will commensurably increase or decrease 
operating expenses.

ESI believes that it has the product offerings and resources needed for 
continuing success; however, future revenue and margin trends cannot be 
reliably predicted and may cause the Company to adjust its operations. 
Factors external to the Company can result in volatility of the Company's 
common stock price. Because of the foregoing factors, recent trends should 
not be considered reliable indicators of future stock prices or financial 
results.

                                      21

<PAGE>

ITEM 8.  FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA.

              ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES
                          CONSOLIDATED BALANCE SHEETS
                                    ASSETS

                                                               MAY 31,
                                                               -------
                                                          1997          1996
                                                          ----          ----
                                                           (IN THOUSANDS)

 CURRENT ASSETS:
  Cash and cash equivalents....................        $  15,326     $  18,622 
  Securities available for sale................           27,860        18,363
                                                       ---------     ---------
      Total cash and securities................           43,186        36,985
  Trade receivables, less allowance for doubtful
    accounts of $230 and $314 at May 31, 1997
    and 1996...................................           48,870        39,792
  Inventories -
    Finished goods.............................            4,322         2,979
    Work-in-process............................            6,757         6,188
    Raw materials and purchased parts..........           20,794        21,000
                                                       ---------     ---------
      Total inventories........................           31,873        30,167

  Deferred income taxes........................            2,366         2,747
  Other current assets.........................              580           819
                                                       ---------     ---------
    Total current assets.......................          126,875       110,510


PROPERTY AND EQUIPMENT, AT COST                           40,631       38,853 
  Less-Accumulated depreciation................          (24,446)      (22,191)
                                                       ---------     ---------
   Net property and equipment..................           16,185        16,662


DEFERRED INCOME TAXES..........................            1,042         1,137

OTHER ASSETS...................................            4,784         4,216
                                                       ---------     ---------
                                                        $148,886      $132,525
                                                       ---------     ---------
                                                       ---------     ---------

                             LIABILITIES AND SHAREHOLDERS' EQUITY

CURRENT LIABILITIES:
  Accounts payable.............................         $  6,219      $  5,142
  Accrued liabilities -
    Payroll related............................            3,457         3,433
    Commissions................................            1,933         1,890
    Income taxes...............................              245         2,463
    Other......................................            1,742         4,405
                                                       ---------     ---------
    Total accrued liabilities..................            7,377        12,191
  Deferred revenue.............................               78           276
                                                       ---------     ---------
    Total current liabilities..................           13,674        17,609
                                                       ---------     ---------

SHAREHOLDERS' EQUITY:
  Preferred stock, without par value; 1,000 shares
   authorized; no shares issued.................              --            --
  Common stock, without par value; 40,000 shares
   authorized; 8,768 and 8,655 shares issued and
   outstanding at May 31, 1997 and 1996.........          57,586        55,790
  Retained earnings.............................          77,626        59,126
                                                       ---------     ---------
    Total shareholders' equity..................         135,212       114,916
                                                       ---------     ---------
                                                        $148,886      $132,525
                                                       ---------     ---------
                                                       ---------     ---------

           The accompanying notes are an integral part of these statements.

                                      22

<PAGE>

            ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES

                      CONSOLIDATED STATEMENTS OF INCOME

                                                   YEAR ENDED MAY 31,
                                            1997           1996         1995
                                            ----           ----         ----

                                         (IN THOUSANDS, EXCEPT PER SHARE DATA)

Net sales................................ $150,159       $159,705      $108,215
Cost of sales............................   69,676         72,754        51,413
                                          --------       --------      --------
  Gross margin...........................   80,483         86,951        56,802
Operating expenses:
  Selling, service and administrative....   36,593         39,858        27,635
  Research, development and engineering..   16,538         16,243        13,108
  Acquired in-process research and
   development...........................       --          6,000            --
                                           --------       --------      --------
   Total operating expenses..............   53,131         62,101        40,743
Operating income.........................   27,352         24,850        16,059
Interest income..........................    1,460          1,185           565
Other expense, net.......................      (75)          (719)         (167)
                                           --------       --------      --------
Income before income taxes...............   28,737         25,316        16,457
Provision for income taxes...............    9,785          9,234         4,940
                                           --------       --------      --------
Net income............................... $ 18,952      $  16,082     $  11,517
                                           --------       --------      --------
Net income  per share.................... $   2.19      $    1.87     $    1.53
                                           --------       --------      --------
Weighted average number of shares
  used in computing per share amounts....    8,673          8,606         7,510

         The accompanying notes are an integral part of these statements.


                                      23

<PAGE>

              ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES
                CONSOLIDATED STATEMENTS OF SHAREHOLDERS' EQUITY
                FOR THE YEARS ENDED MAY 31, 1995, 1996 AND 1997

<TABLE>
<CAPTION>
                                                                  COMMON STOCK
                                                                  ------------
                                                             NUMBER OF                     RETAINED
                                                               SHARES        AMOUNT        EARNINGS     TOTAL
                                                             ---------       ------        --------     -----
<S>                                                          <C>             <C>           <C>          <C>
                                                                                  (IN THOUSANDS)
 BALANCE AT MAY 31, 1994....................................    6,420        $22,097        $31,450    $  53,547
    Net income..............................................       --             --         11,517       11,517
    Non-employee directors stock incentive plan.............       --             19             --           19
    Stock plans:
        Employee stock plans................................      241          2,104             --        2,104
        Tax benefit of stock options exercised..............       --          1,068             --        1,068
    Shares issued for acquisition of Chicago Laser..........      333          1,939             --        1,939
    Shares issued in stock offering.........................    1,380         22,535             --       22,535
    Unrealized gain on securities...........................       --             --             60           60
    Cumulative translation adjustment.......................       --             --          1,655        1,655
                                                                -----        -------        -------     --------
 BALANCE AT MAY 31, 1995....................................    8,374         49,762         44,682       94,444
    Net income..............................................       --             --         16,082       16,082
    Stock plans:
        Employee stock plans................................       85            706             --          706
        Tax benefit of stock options exercised..............       --            540             --          540
    Shares issued for acquisitions..........................      196          4,782             --        4,782
    Unrealized loss on securities...........................       --             --            (42)         (42)
    Cumulative translation adjustment.......................       --             --         (1,596)      (1,596)
                                                                -----        -------        -------     --------

 BALANCE AT MAY 31, 1996....................................    8,655         55,790         59,126      114,916
    Net income..............................................       --             --         18,952       18,952
    Stock plans:
        Employee stock plans................................      113          1,235             --        1,235
        Tax benefit of stock options exercised..............       --            561             --          561
    Unrealized loss on securities...........................       --             --            (19)         (19)
    Cumulative translation adjustment.......................       --             --           (433)        (433)
                                                                -----        -------        -------     --------

 BALANCE AT MAY 31, 1997....................................    8,768        $57,586        $77,626     $135,212
                                                                -----        -------        -------     --------
</TABLE>

       The accompanying notes are an integral part of these statements.

                                      24

<PAGE>

              ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES
                    CONSOLIDATED STATEMENTS OF CASH FLOWS

<TABLE>
<CAPTION>
                                                                               YEAR ENDED MAY 31,
                                                                               ------------------
                                                                          1997           1996         1995
                                                                          ----           ----         ----
<S>                                                                     <C>            <C>          <C>
                                                                                  (IN THOUSANDS)
CASH FLOWS FROM OPERATING ACTIVITIES
   Net income........................................................   $18,952        $16,082      $11,517
Adjustments to reconcile net income to cash provided by (used in)
   operating activities:
   Acquired in-process research and development......................        --          6,000           --
   Depreciation and amortization.....................................     3,070          2,759        2,618
   Other non-cash charges (credits)..................................        --             --         (414)
   Deferred income taxes.............................................       476           (770)      (1,626)
  Changes in operating accounts:
     Increase in trade receivables...................................   (10,219)        (6,680)     (13,913)
     Increase in inventories.........................................      (940)        (3,138)      (2,795)
     Decrease (increase) in other current assets.....................       239             15         (347)
     (Decrease) increase in current liabilities......................    (3,049)        (3,380)       5,056
                                                                        -------        -------      -------
   Net cash provided by operating activities.........................     8,529         10,888           96
                                                                        -------        -------      -------
CASH FLOWS FROM INVESTING ACTIVITIES
   Purchase of XRL subsidiary, net of cash acquired (1)..............        --           (492)          --
   Purchase of Chicago Laser subsidiary, net of cash acquired (2)....        --             --         (707)
   Purchase of property and equipment................................    (3,370)        (3,635)      (2,989)
   Proceeds from the sale of property and equipment..................        --             --          648
   Purchase of securities............................................   (42,316)       (30,986)     (20,950)
   Proceeds from sales of securities and maturing securities.........    32,800         29,850        4,000
   (Increase) decrease in other assets...............................      (735)           366       (1,458)
                                                                        -------        -------      -------
   Net cash used in investing activities.............................   (13,621)        (4,897)     (21,456)
                                                                        -------        -------      -------
CASH FLOWS FROM FINANCING ACTIVITIES
   Payments to retire debt...........................................        --             --       (1,183)
   Proceeds from secondary stock offering............................        --             --       22,535
   Proceeds from exercise of stock options and stock plans and 
      related tax benefits...........................................     1,796          1,246        3,172
                                                                        -------        -------      -------
   Net cash provided by financing activities.........................     1,796          1,246       24,524
                                                                        -------        -------      -------
NET CHANGE IN CASH AND CASH EQUIVALENTS..............................    (3,296)         7,237        3,164
CASH AND CASH EQUIVALENTS AT JUNE 1..................................    18,622         11,385        8,221
                                                                        -------        -------      -------
CASH AND CASH EQUIVALENTS AT MAY 31..................................   $15,326        $18,622      $11,385
                                                                        -------        -------      -------
</TABLE>

       The accompanying notes are an integral part of these statements.


                                     25

<PAGE>

(1)    Acquisition of XRL subsidiary:

       Assets less liabilities acquired, net of cash acquired           $(5,073)
       Issuance of common stock                                           4,581
                                                                        -------
       Net cash used to acquire business                                $  (492)


(2)    Acquisition of Chicago Laser subsidiary:

       Assets less liabilities acquired, net of cash acquired           $(2,646)
       Issuance of common stock                                           1,939
                                                                        -------
       Net cash used to acquire business                                $  (707)


Cash payments for interest were not significant in 1997, 1996 or 1995.


                                     26

<PAGE>

                      NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                        (IN THOUSANDS, EXCEPT PER SHARE DATA)

BUSINESS ENVIRONMENT

The accompanying consolidated financial statements include the accounts of 
Electro Scientific Industries, Inc. and its subsidiaries (the Company), all 
of which are wholly owned.  The Company designs and manufactures 
sophisticated products used around the world in electronics manufacturing 
including: laser manufacturing systems for semiconductor yield improvement, 
production and test equipment for the manufacture of surface mount ceramic 
capacitors, circuit fine tuning systems, precision laser and mechanical 
electronic packaging production systems and machine vision systems.  The 
Company serves the global electronics market from its headquarters in 
Portland, Oregon and through subsidiaries located in the United States, 
Europe and Asia.

CONCENTRATIONS OF CREDIT RISK

The Company uses financial instruments that potentially subject it to 
concentrations of credit risk. Such instruments include cash equivalents, 
securities held for sale, trade receivables and financial instruments used in 
hedging activities.  The Company invests its cash in cash deposits, money 
market funds, commercial paper, certificates of deposit and readily 
marketable debt securities.  The Company places its investments with high 
credit quality financial institutions and limits the credit exposure from any 
one institution or instrument.  To date, the Company has not experienced 
losses on any of these investments.  The Company sells a significant portion 
of its products to a small number of  electronics manufacturers: 47.1% of 
fiscal 1997 revenues were derived from ten customers.  The Company's 
operating results could be adversely affected if the financial condition and 
operations of these key customers decline.

CONCENTRATIONS OF OTHER RISKS

The Company's operations involve a number of other risks and uncertainties 
including but not limited to the cyclicality of the electronics market, 
rapidly changing technology, international operations and hedging exposures.  
Refer to Management's Discussion and Analysis for additional commentary.

SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

PRINCIPLES OF CONSOLIDATION

All material intercompany accounts and transactions have been eliminated.

USE OF ESTIMATES

The preparation of financial statements in conformity with generally 
accepted accounting principles requires management to make estimates and 
assumptions that affect the reported amounts of assets and liabilities and 
disclosure of contingent assets and liabilities at the date of the financial 
statements and the reported amounts of revenues and expenses during the 
reporting period. Actual results may differ from those estimates and such 
differences could be material to the financial statements.

                                     27

<PAGE>

RECLASSIFICATIONS

Certain reclassifications have been made in the accompanying consolidated 
financial statements for 1995 and 1996 to conform with the 1997 presentation.

REVENUE RECOGNITION

The Company generally recognizes revenue at the time of shipment.

PRODUCT WARRANTY

The Company generally warrants its systems for a period of up to 12 months 
for material and labor to repair and service the system.  A provision for the 
estimated cost related to warranty is recorded upon shipment.

RESEARCH AND DEVELOPMENT

Research and development costs are expensed as incurred. 

TAXES ON INCOME

Deferred income taxes have not been provided on unremitted earnings of 
foreign subsidiaries as the Company believes any U.S. tax on such earnings 
would be substantially offset by associated foreign tax credits.

NET INCOME PER SHARE

Net income per share is computed using the weighted average number of 
common shares and common stock equivalents (stock options) outstanding, if 
significant.

CASH EQUIVALENTS

The Company considers all highly liquid investments with a maturity of 
three months or less at date of purchase to be cash equivalents. 

INVENTORIES

Inventories are principally valued at standard costs which approximate the 
lower of cost (first-in, first-out) or market. Costs utilized for inventory 
valuation purposes include material, labor and manufacturing overhead. 

DEPRECIATION AND CAPITALIZATION POLICIES

Depreciation is determined on the declining balance and straight-line methods 
based on the following useful lives: buildings: 25 to 40 years; building 
improvements: 5 to 15 years; and machinery and equipment: 3 to 10 years.

                                     28

<PAGE>

Expenditures for maintenance, repairs and minor improvements are charged to 
expense. Major improvements and additions are capitalized. When property is 
sold or retired, the cost and related accumulated depreciation are removed 
from the accounts and the resulting gain or loss is included in other expense.

FOREIGN CURRENCY TRANSLATION

The Company accounts for foreign currency translation in accordance with 
Statement of Financial Accounting Standards No. 52. The total cumulative 
translation adjustment included in retained earnings is $(4), $429 and $2,025 
at May 31, 1997, 1996 and 1995, respectively. Foreign currency transaction 
losses were $176 and $227 for the years ended May 31, 1997 and 1995, 
respectively, with a gain of $380 for the year ended May 31, 1996. These 
amounts are included in other expense in the accompanying Consolidated 
Statements of Income. 

PROPERTY AND EQUIPMENT

Major classes of property and equipment consist of the following: 

                                                       MAY 31,
                                                       -------
                                                1997              1996
                                                ----              ----
 Land......................................   $ 3,419           $ 3,419
 Buildings and improvements................    13,060            12,957
 Machinery and equipment...................    23,883            22,135
 Construction in progress..................       269               342
                                              -------           -------
                                              $40,631           $38,853
                                              -------           -------

LINE OF CREDIT

The Company has a short-term revolving line of credit with a large foreign 
bank totaling $7,000. This line expires in September 1997.  Management 
expects to renew the revolver under similar terms or secure alternate 
financing.  At the Company's option, the interest rate is either prime or 
LIBOR plus 1.25 percent. There were no borrowings outstanding under the line 
at anytime during fiscal 1997.

EMPLOYEE BENEFIT PLANS

The Company has an employee savings plan under the provisions of section 
401(k) of the Internal Revenue Code. The Company contributed $406, $462 and 
$334 to the plan for the years ended May 31, 1997, 1996 and 1995, 
respectively.

                                     29

<PAGE>

INCOME TAXES

The Company accounts for income taxes in accordance with Statement of 
Financial Accounting Standards No. 109, "Accounting for Income Taxes" (SFAS 
109).  Under the liability method specified by SFAS 109, the deferred tax 
assets and liabilities are determined based on the temporary differences 
between the financial statement and tax bases of assets and liabilities as 
measured by the enacted tax rates for the years in which the taxes are 
expected to be paid.

The net deferred tax asset as of May 31, 1997 and May 31, 1996 consists of 
the following tax effects relating to temporary differences and 
carryforwards:

                                                              MAY 31,
                                                              -------
                                                      1997              1996
                                                      ----              ----

     Deferred tax assets:
       Inventory valuation........................   $1,385            $1,129
       Vacation pay...............................      629               560
       Warranty costs.............................      440               350
       Accrued compensation.......................      443               392
                                                     ------            ------ 
    
                                                      2,897             2,431
       Tax loss and credit carryforwards..........    1,405             1,874
                                                     ------            ------ 
              Total deferred tax assets...........    4,302             4,305
     
     Deferred tax liabilities.....................     (894)             (421)
                                                     ------            ------ 
     Net deferred tax asset.......................   $3,408            $3,884
                                                     ------            ------ 

At May 31, 1997, there was a net operating loss carryforward of $4,015 
available for U.S. federal income tax purposes.  These losses were acquired 
as part of the XRL acquisition and expire through 2008.

The components of income before income taxes and the provision for income 
taxes are as follows:

                                                  YEAR ENDED MAY 31,
                                                  ------------------
                                           1997           1996           1995
                                           ----           ----           ----
Income before income taxes:
  Domestic............................   $24,225        $23,679         $13,369
  Foreign.............................     4,512          1,637           3,088
                                         -------        -------         -------
                                         $28,737        $25,316         $16,457
                                         -------        -------         -------
Provision for income taxes:
  Current:
    U.S. Federal and State............   $ 6,845       $  8,577        $  3,762
    Foreign...........................     1,903            887           1,736
                                         -------        -------         -------
                                           8,748          9,464           5,498
  Deferred............................       476           (770)         (1,626)
  Income tax effect of stock 
    options exercised.................       561            540           1,068
                                         -------        -------         -------
                                         $ 9,785       $  9,234        $  4,940
                                         -------        -------         -------

In accordance with SFAS 109, the tax benefit related to stock option exercises
has been recorded as an increase to Common Stock rather than a reduction to the
provision for income taxes.

                                      30

<PAGE>

A reconciliation of the provision for income taxes at the federal statutory
income tax rate to the provision for income taxes as reported is as follows: 

<TABLE>
<CAPTION>
                                                                               YEAR ENDED MAY 31,
                                                                               ------------------
                                                                        1997              1996           1995
                                                                        ----              ----           ----
  <S>                                                                 <C>                <C>            <C>
  Provision computed at federal statutory rate.....................   $10,059            $8,861         $5,595
  Higher than U.S. tax rates in foreign jurisdictions..............       323               314            753
  Impact of U.S. tax loss and credit carryforwards utilization.....        --              (434)        (1,236)
  Impact of state taxes............................................       878               711            273
  Benefit of foreign sales corporation (FSC).......................    (1,468)             (137)          (217)
  Other, net.......................................................        (7)              (81)          (228)
                                                                      -------             -----         ------
                                                                      $ 9,785             $9,234        $4,940
                                                                      -------             -----         ------
</TABLE>

Consolidated income tax payments amounted to $11,020, $7,968 and $4,388 for
the years ended May 31, 1997, 1996 and 1995, respectively.

EARNINGS PER SHARE

In March 1997, the Financial Accounting Standards Board issued Statement 128, 
EARNINGS PER SHARE ("SFAS 128"), superseding APB Opinion 15.  SFAS 128 is 
required to be adopted for periods ending after December 15, 1997.  When 
adopted, all prior earnings per share ("EPS") calculations will be restated 
to conform to SFAS 128.  The pro forma effects of applying SFAS 128 to EPS 
are as follows:

                                                YEAR ENDED MAY 31,
                                                ------------------
                                        1997           1996              1995
                                      -------        -------           -------
Primary EPS as reported                $2.19          $1.87             $1.53
Effect of SFAS 128                      0.00           0.00              0.00
                                       -----          -----             -----
Basic EPS as restated                  $2.19          $1.87             $1.53
                                       -----          -----             -----

Fully diluted EPS as reported          $2.19          $1.87             $1.53
Effect of SFAS 128                     (0.06)         (0.04)            (0.03)
                                       -----          -----             -----
Diluted EPS as restated                $2.13          $1.83             $1.50
                                       -----          -----             -----

COMMITMENTS AND CONTINGENCIES

The Company has limited involvement with derivative financial instruments and
does not use them for trading purposes.  Derivatives are used to manage well
defined foreign currency risks:  the Company enters into forward exchange
contracts to hedge the value of accounts receivable denominated in a foreign
currency.  Foreign exchange contracts have gains and losses that are recognized
at the settlement date.  At May 31, 1997 and 1996, the Company had forward
exchange contracts totaling $5,470 and $7,460, respectively.  These contracts
generally mature in less than one year and the counterparty is a large, widely
recognized international bank; therefore, risk of credit loss as a result of
nonperformance by the bank is minimal.  The use of derivatives does not have a
significant effect on the Company's results of operations or its financial
position.

                                      31

<PAGE>

The Company leases equipment and office space under operating leases which 
are non-cancelable and expire on various dates through 2002.  The aggregate 
minimum commitment for rentals under operating leases beyond May 31, 1997 is 
not significant.

The Company is a party to various legal proceedings. Management believes that 
the outcome of such proceedings will not have a material effect on the 
business, financial position or results of operations of the Company.

SECURITIES AVAILABLE FOR SALE

The Company accounts for securities in accordance with Statement of Financial
Accounting Standards No. 115, "Accounting for Certain Investments in Debt and
Equity Securities" (SFAS 115).  The Company classifies its marketable debt
securities as Securities Available for Sale in the accompanying Consolidated
Balance Sheets. The fair market value of these securities at May 31, 1997 and
1996 is $27,860 and $18,363, respectively.  All of the Company's marketable debt
securities are invested in high-credit quality tax advantaged securities with
maturities of less than one year from the date of purchase; the amortized cost
of these securities approximates fair market value.

During fiscal 1997 and 1996, proceeds of $32,800 and $29,850, respectively, 
resulted from the sales or maturities of securities; there were no realized 
gains or losses associated with these sales or maturities.

SHAREHOLDER RIGHTS PLAN

In May 1989, the Company adopted a Shareholder Rights Plan and declared a 
dividend distribution of one Right for each outstanding share of Common 
Stock, payable to holders of record on June 23, 1989. Under certain 
conditions, each Right may be exercised to purchase 1/100 of a share of 
Series A No Par Preferred Stock at a purchase price of $55, subject to 
adjustment. The Rights are not presently exercisable and will only become 
exercisable following the occurrence of certain specified events. If these 
specified events occur, each Right will be adjusted to entitle its holder to 
receive, upon exercise, Common Stock (or, in certain circumstances, other 
assets of the Company) having a value equal to two times the exercise price 
of the Right or each Right will be adjusted to entitle its holder to receive, 
upon exercise, common stock of the acquiring company having a value equal to 
two times the exercise price of the Right, depending on the circumstances. 
The Rights expire on May 12, 1999 and may be redeemed by the Company for 
$0.01 per Right. The Rights do not have voting or dividend rights, and until 
they become exercisable, have no dilutive effect on the earnings of the 
Company.

                                      32

<PAGE>

STOCK PLANS

The Company has stock option and restricted stock grant plans for officers 
and employees. During fiscal 1997, ESI recorded $475 of compensation expense 
related to stock grants earned in April 1997.  Awards under these plans are 
determined by the Compensation Committee of the Board of Directors. Stock 
appreciation rights may be granted in connection with options, although no 
options have been granted that include stock appreciation rights. Option 
prices are at fair market value at the date of the grant and all expire ten 
years from the date of grant.

The Company has an employee stock purchase plan which allows qualified 
employees to direct up to 15% of base pay for purchases of stock. The 
purchase price for shares purchased under the Plan is 85% of the fair market 
value of stock.

The Company accounts for its stock option plans and its employee stock 
purchase plan in accordance with the provisions of the Accounting Principles 
Board's Opinion No. 25 (APB 25), "Accounting For Stock Issued to Employees."  
In 1995, the Financial Accounting Standards Board released Statement of 
Financial Accounting Standard No. 123 (SFAS 123), "Accounting For Stock Based 
Compensation."  SFAS 123 provides an alternative to APB 25 and was effective 
beginning with the Company's 1996 fiscal year.  The Company will continue to 
account for its employee stock plans in accordance with the provisions of APB 
25.  Accordingly, the Company has elected to provide pro forma disclosures as 
required by SFAS 123.

The Company has computed, for pro forma disclosure purposes, the value of all 
options granted under the stock option plan to be $16.04 and $13.26 for 1997 
and 1996.  The pro forma value of options granted under the employee stock 
purchase plan is immaterial for both 1997 and 1996.  These computations were 
made using the Black-Scholes option-pricing model, as prescribed by SFAS 123, 
with the following weighted average assumptions for grants in 1997 and 1996:

  Risk-free interest rate                       7.5%
  Expected dividend yield                         0%
  Expected life stock option plan            7 years
  Expected volatility                          48.5%

The total value of options granted would be amortized on a pro rata basis 
over the vesting period of the options. Options  generally vest equally over 
four years.  If the Company had  accounted for these plans in accordance with 
SFAS 123, the Company's net income and net income per share would have 
decreased as reflected in the following pro forma amounts:

                                       YEAR ENDED MAY 31,
                                    -----------------------
                                       1997          1996
                                       ----          ----
     NET INCOME:
       As reported................   $18,952        $16,082
       Pro forma..................   $18,216        $15,831

     NET INCOME PER SHARE:
       As reported................   $  2.19        $  1.87
       Pro forma..................   $  2.13        $  1.86


                                      33

<PAGE>

The following table summarizes activity in the stock plans for the years
ended May 31, 1997 and 1996:

<TABLE>
                                                     YEAR ENDED MAY 31,
                                                     ------------------
                                                1997                   1996
                                       ----------------------  ----------------------
                                                  WEIGHTED-               WEIGHTED-
                                                   AVERAGE                 AVERAGE
                                       SHARES  EXERCISE PRICE  SHARES  EXERCISE PRICE
                                       ------  --------------  ------  --------------
<S>                                    <C>     <C>             <C>     <C>
Options outstanding at beginning
  of year............................    835        $20.60          675     $17.61
   Granted...........................    230         25.95          277      22.20
   Exercised.........................     93         16.47           73       9.05
   Canceled..........................     55         20.93           44      20.35
                                         ---        ------          ---     ------
Options outstanding at end of year...    917         22.83          835      20.60
                                         ---        ------          ---     ------
Exercisable at end of year...........    355        $18.27          260     $15.03
                                         ---        ------          ---     ------
</TABLE>

The following table sets forth the exercise price range, number of shares 
outstanding at May 31, 1997, weighted average remaining contractual life, 
weighted average exercise price, number of exercisable shares and weighted 
average exercise price of exercisable options by groups of similar price and 
grant date:

<TABLE>
<CAPTION>
           OPTIONS OUTSTANDING                          OPTIONS EXERCISABLE
- - ---------------------------------------------  --------------------------------------------
                                   WEIGHTED-
                                    AVERAGE 
                   OUTSTANDING     REMAINING       WEIGHTED-    EXERCISABLE    WEIGHTED-
RANGE OF EXERCISE     AS OF       CONTRACTUAL       AVERAGE        AS OF        AVERAGE
     PRICES        MAY 31, 1997   LIFE (YEARS)  EXERCISE PRICE  MAY 31, 1997  EXERCISE PRICE
- - -----------------  ------------   ------------  --------------  ------------  --------------
<S>                <C>            <C>           <C>             <C>           <C>
   $ 2.63-$ 9.88        267           5.76         $  8.86           217          $ 8.53
   $ 9.88-$18.00        210           8.60           17.46            51           16.58
   $18.01-$24.00        183           7.96           23.62            75           23.75
   $24.01-$33.00        243           9.59           28.22             9           32.80
   $33.01-$39.38         14           8.25           38.36             3           38.36
                        ---           ----          ------           ---          ------
                        917           8.18          $22.83           355          $18.27
</TABLE>

                                      34

<PAGE>

GEOGRAPHIC REPORTING

The Company operates in the capital equipment segment of the electronics 
industry with geographic operations in the United States, Europe and Asia. 
Transfers between geographic areas are made at prevailing market prices. 
Operating income is total revenue less operating expenses. In computing 
operating income, none of the following items have been added or deducted: 
interest income, other expense or the provision for income taxes. 
Identifiable assets are those assets of the Company that are identified with 
the operations in each geographic location. Corporate assets are primarily 
cash and cash equivalents and securities available for sale.

Export sales included in United States sales to unaffiliated customers for 
the years ended May 31, 1997, 1996 and 1995 were as follows: 

                          EUROPE          ASIA        TOTAL
                          ------          ----        -----
 May 31, 1997...........  $2,595        $54,250      $56,845
 May 31, 1996...........   1,532         64,446       65,978
 May 31, 1995...........   3,741         33,890       37,631


In fiscal year 1997, one customer accounted for 10.5% of consolidated net 
sales.  In fiscal 1996, there were no sales to any one customer in excess of 
10% of consolidated net sales.  During fiscal 1995, one customer accounted 
for 12.4% of consolidated net sales.

                                     35

<PAGE>

The following data represents segment information for the years ending May 31:

<TABLE>
<CAPTION>
                                                                               ADJUSTMENTS
                                          UNITED                                   AND
1997                                      STATES       EUROPE       ASIA       ELIMINATIONS   CONSOLIDATED
- - ----                                      ------       ------       ----       ------------   ------------
<S>                                       <C>          <C>          <C>        <C>            <C>
 Sales to unaffiliated customers......... $100,328     $28,872      $20,959      $  --          $150,159
 Transfers between geographic areas......   35,986          --          427       (36,413)            --
                                          --------     -------      -------      --------       --------
 Total revenue........................... $136,314     $28,872      $21,386      $(36,413)      $150,159
                                          --------     -------      -------      --------       --------
 Operating income........................ $ 22,968     $ 2,899      $ 1,623      $   (138)      $ 27,352
                                          --------     -------      -------      --------       --------
 Identifiable assets at May 31, 1997..... $ 92,847     $11,374      $ 9,480      $ (8,001)      $105,700
                                          --------     -------      -------      --------      
 Corporate assets........................                                                         43,186
                                                                                                --------
 Total assets at May 31, 1997............                                                       $148,886
                                                                                                --------
                                                                                                --------

 1996
 ----
 Sales to unaffiliated customers......... $119,064     $18,329      $22,312      $     --       $159,705
 Transfers between geographic areas......   28,009           8          543       (28,560)            --
                                          --------     -------      -------      --------       --------
 Total revenue........................... $147,073     $18,337      $22,855      $(28,560)      $159,705
                                          --------     -------      -------      --------       --------
 Operating income (1).................... $ 22,861     $   260      $ 1,965      $   (236)      $ 24,850
                                          --------     -------      -------      --------       --------
 Identifiable assets at May 31, 1996..... $ 99,442     $ 8,624      $ 8,049      $(20,575)      $ 95,540
                                          --------     -------      -------      --------       
 Corporate assets........................                                                         36,985
                                                                                                --------
 Total assets at May 31, 1996............                                                       $132,525
                                                                                                --------
                                                                                                --------

 1995
 ----
 Sales to unaffiliated customers......... $ 69,168     $15,869      $23,178      $     --       $108,215
 Transfers between geographic areas......   24,631           9          434       (25,074)            --
                                          --------     -------      -------      --------       --------
 Total revenue........................... $ 93,799     $15,878      $23,612      $(25,074)      $108,215
                                          --------     -------      -------      --------       --------
 Operating income........................ $ 12,415     $   791      $ 2,605      $    248       $ 16,059
                                          --------     -------      -------      --------       --------
 Identifiable assets at May 31, 1995..... $ 82,774     $ 7,994      $10,922      $(19,746)      $ 81,944
                                          --------     -------      -------      --------       
 Corporate assets........................                                                         28,654
                                                                                                --------
 Total assets at May 31, 1995............                                                       $110,598
                                                                                                --------
                                                                                                --------
</TABLE>

(1)   Includes the $6,000 in-process research and development charge associated
with the acquisition of XRL, Inc.

ACQUISITIONS

XRL, INC.

In July 1995, the Company acquired all of the outstanding stock of XRL, Inc., 
a privately held company based in Canton, Massachusetts.  XRL provides 
capital equipment for semiconductor yield improvement.  The purchase 
consideration consisted of 179 shares of ESI stock.  The transaction was 
accounted for as a purchase.

                                     36

<PAGE>

In connection with the purchase price allocation, the Company obtained an 
appraisal of the intangible assets which indicated that substantially all of 
the acquired intangible assets consisted of research and development projects 
in process.  The development of these projects had not reached technological 
feasibility and the technology has no alternative future use.  In accordance 
with generally accepted accounting principles, the acquired in-process 
research and development of $6,000 was charged to expense during the quarter 
ended August 31, 1995 and is reflected in the accompanying Consolidated 
Statements of Income.

Pro forma combined income statement data for the years ended May 31, 1996 and 
1995 was not materially different from results presented in the accompanying 
Consolidated Statements of Income.

SUBSEQUENT EVENT - CHIP STAR, INC.

In June 1997, ESI merged with Chip Star, Inc. (Chip Star), a privately-held 
company based in San Marcos, California.  Chip Star provides capital 
equipment for producers of surface mount ceramic capacitors. Consideration 
paid to Chip Star was 700 shares of ESI stock.  The merger will be accounted 
for as a pooling-of-interests.  On May 31, 1997, Chip Star's total assets 
were $5,927 and shareholders' equity was $3,902.

PRO FORMA QUARTERLY FINANCIAL INFORMATION
(UNAUDITED)

<TABLE>
<CAPTION>
                                     1ST      2ND     3RD       4TH 
PRO FORMA YEAR ENDED MAY 31, 1997  QUARTER  QUARTER  QUARTER  QUARTER   TOTAL
- - ---------------------------------  -------  -------  -------  -------   -----
<S>                                <C>      <C>      <C>      <C>      <C>
Net sales........................  $36,199  $37,415  $40,347  $46,188  $160,149
Gross margin.....................   20,690   20,932   22,160   23,270   87,052
Net income.......................    4,603    5,103    5,758    5,786   21,250
Net income per share.............  $  0.49  $  0.54  $  0.61  $  0.62  $ 2.27
</TABLE>


SUBSEQUENT EVENT - DYNAMOTION CORP.

In June 1997, ESI acquired all of the equity of Dynamotion/ATI Corp. 
(Dynamotion), a publicly-held company based in Santa Ana, California. 
Dynamotion provides mechanical drilling equipment for printed circuit board 
manufacturers.  The preliminary purchase consideration was $11,950 (347 
shares of ESI stock) and assumption of $14,352 of liabilities.  The purchase 
consideration includes the fair market value of all Dynamotion stock options. 
The purchase price allocation includes $2,361 of goodwill which will be 
amortized over seven years.  The Company is still obtaining certain data 
related to the acquisition, and accordingly, the purchase price allocation 
remains open. The transaction was accounted for as a purchase.

                                     37

<PAGE>

In connection with the purchase price allocation, the Company obtained an 
appraisal of the intangible assets which indicated that substantially all of 
the acquired intangible assets consisted of research and development projects 
in process.  The development of these projects had not reached technological 
feasibility and the technology has no alternative future use.  In accordance 
with generally accepted accounting principles, the acquired in-process 
research and development of $9,000 will be charged to expense during the 
quarter ended August 31, 1997.  The Company currently believes that the 
research and development efforts will result in commercially feasible 
products in the next 24 months at an estimated additional cost of $2,000.

Pro forma combined income statement data, excluding any impact of the 
previously discussed pooling-of-interests merger with Chip Star, Inc. for the 
years ended May 31, 1997 and 1996 are as follows:

                                               1997      1996
                                             --------  --------
Sales.....................................   $162,797  $173,208
Income from continuing operations.........   $ 12,958  $ 12,696
Net income per share......................   $   1.44  $   1.42


QUARTERLY FINANCIAL INFORMATION
(UNAUDITED)

<TABLE>
<CAPTION>
                                  1ST      2ND      3RD     4TH
YEAR ENDED MAY 31, 1997         QUARTER  QUARTER  QUARTER  QUARTER   TOTAL
- - -----------------------         -------  -------  -------  -------  --------
<S>                             <C>      <C>      <C>      <C>      <C>
Net sales.....................  $34,856  $35,101  $37,202  $43,000  $150,159
Gross margin..................   19,812   19,395   20,072   21,204   80,483
Net income....................    4,379    4,587    4,862    5,124   18,952
Net income per share..........  $  0.51  $  0.53  $  0.56  $  0.59  $  2.19

<CAPTION>
                                  1ST      2ND      3RD     4TH
YEAR ENDED MAY 31, 1996         QUARTER  QUARTER  QUARTER  QUARTER   TOTAL
- - -----------------------         -------  -------  -------  -------  --------
Net sales.....................  $35,975  $40,836  $41,626  $41,268  $159,705 
Gross margin..................   19,208   22,113   22,592   23,038    86,951
Net income....................     540(1)  4,881    5,244    5,417    16,082
Net income per share..........  $  0.06  $  0.57  $  0.61  $  0.63  $   1.87
</TABLE>

(1)   Includes the $6,000 in-process research and development charge associated
      with the acquisition of XRL, Inc. 

                                     38

<PAGE>

                       REPORT OF INDEPENDENT PUBLIC ACCOUNTANTS

To the Board of Directors and Shareholders of
Electro Scientific Industries, Inc.:

We have audited the accompanying consolidated balance sheets of Electro 
Scientific Industries, Inc. (an Oregon corporation) and subsidiaries as of 
May 31, 1997 and 1996, and the related consolidated statements of income, 
shareholders' equity and cash flows for each of the three years in the period 
ended May 31, 1997.  These financial statements are the responsibility of the 
Company's management. Our responsibility is to express an opinion on these 
financial statements based on our audits. 

We conducted our audits in accordance with generally accepted auditing 
standards. Those standards require that we plan and perform the audit to 
obtain reasonable assurance about whether the financial statements are free 
of material misstatement. An audit includes examining, on a test basis, 
evidence supporting the amounts and disclosures in the financial statements. 
An audit also includes assessing the accounting principles used and 
significant estimates made by management, as well as evaluating the overall 
financial statement presentation. We believe that our audits provide a 
reasonable basis for our opinion.

In our opinion, the financial statements referred to above present fairly, in 
all material respects, the financial position of Electro Scientific 
Industries, Inc. and subsidiaries as of May 31, 1997 and 1996, and the 
results of their operations and their cash flows for each of the three years 
in the period ended May 31, 1997 in conformity with generally accepted 
accounting principles.

                                       ARTHUR ANDERSEN LLP

Portland, Oregon
July 3, 1997

                                     39

<PAGE>

ITEM 9.  CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
         FINANCIAL DISCLOSURE.

None.

                                 PART III


ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT. 

The information required by this item is included under "Election of Directors"
in the Company's Proxy Statement for its 1997 Annual Meeting of Shareholders and
is incorporated herein by reference. 

Information with respect to executive officers of the Company is included under
Item 4(a) of Part I of this Report.  No information is required to be included
for Item 405 of Regulation S-K for 1997.


ITEM 11. EXECUTIVE COMPENSATION.

The information required by this item is included under "Board Compensation,"
"Executive Compensation" (excluding the performance graph) and "Compensation
Committee Interlocks and Insider Participation" in the Company's Proxy Statement
for its 1997 Annual Meeting of Shareholders and is incorporated herein by
reference. 


ITEM 12. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT.

Information with respect to security ownership of certain beneficial owners and
management is included under "Voting Securities and Principal Shareholders" in
the Company's Proxy Statement for its 1997 Annual Meeting of Shareholders and is
incorporated herein by reference.


ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS.

None.

                                     40

<PAGE>

                                  PART IV


ITEM 14. EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K. 

(a) Financial Statements and Schedules.

The following financial statements are included in this Annual Report on Form
10-K on the pages indicated.


Electro Scientific Industries, Inc.                               
and Subsidiaries:                                                  Page
    Consolidated Balance Sheets as of                              ----
         May 31, 1997 and 1996                                       22
    Consolidated Statements of
         Income for the Years Ended
         May 31, 1997, 1996, and 1995                                23
    Consolidated Statements of
         Shareholders' Equity for the Years Ended
         May 31, 1997, 1996, and 1995                                24
    Consolidated Statements of 
         Cash Flows for the Years Ended
         May 31, 1997, 1996, and 1995                                25
    Notes to Consolidated Financial Statements                       27-38
    Report of Independent Public Accountants                         39


All schedules are omitted as the required information is inapplicable or not
significant.

                                     41

<PAGE>

(a)(3)  Exhibits.

    3-A.   Restated Articles of Incorporation of the Company.  
           Incorporated by reference to Exhibit 3-A of the Company's Annual 
           Report on Form 10-K for the fiscal year ended May 31, 1991.

    3-B.   Bylaws of the Company.  Incorporated by reference 
           to Exhibit 3-B of the Company's Annual Report on Form 10-K for 
           the fiscal year ended May 31, 1994.

    4-A.   Rights Agreement, dated as of May 12, 1989, between 
           the Company and United States National Bank of Oregon relating to 
           rights issued to all holders of Company Common Stock.  
           Incorporated by reference to Exhibit 1 to the Company's Report on 
           Form 8-K dated May 12, 1989. 

    10-A.  ESI 1983 Stock Option Plan, as amended.  
           Incorporated by reference to Exhibit 10-E of the Company's Annual 
           Report on Form 10-K for the fiscal year ended May 31, 1986. (1)

    10-B.  ESI 1989 Stock Option Plan, as amended. (1)

    10-C.  Form of Indemnity Agreement between the Company and 
           each of its Directors.  Incorporated by reference to Appendix C 
           to the Company's definitive Proxy Statement for its 1986 Annual 
           Meeting of Shareholders. (1) 

    10-D.  Form of Severance Agreement between the Company and 
           each of its executive officers.  Incorporated by reference to 
           Exhibit 10-H of the Company's Annual Report on Form 10-K for the 
           fiscal year ended May 31, 1992. (1)

    10-E.  ESI 1996 Stock Incentive Plan.

    11.    Statement of Calculation of Earnings Per Share. 

    21.    Subsidiaries of the Company.

    23.    Consent of Independent Public Accountants.

    27.    Financial Data Schedule.

(b) Reports on Form 8-K.  No reports on Form 8-K were filed by the 
    Company during the last quarter of fiscal year 1997.  However, a Form 
    8-K was filed on July 7, 1997.


- - -------------------
    (1)   Management contract or compensatory plan or arrangement.

                                     42

<PAGE>

                                 SIGNATURES

Pursuant to the requirements of Section 13 or 15(d) of the Securities 
Exchange Act of 1934, the Registrant has duly caused this report to be signed 
on its behalf by the undersigned, thereunto duly authorized.

Date:  August 1, 1997                  ELECTRO SCIENTIFIC INDUSTRIES, INC.

                                       By /s/ Donald R. VanLuvanee
                                          ----------------------------------
                                       Donald R. VanLuvanee
                                       President and Chief Executive Officer

Pursuant to the requirements of the Securities Exchange Act of 1934, this 
report has been signed below by the following persons on behalf of the 
Registrant and in the capacities indicated on August 1, 1997.

Signature                                               Title

(1) Principal Executive, Financial and
    Accounting Officers

/s/ Donald R. VanLuvanee                  President and Chief Executive Officer
- - ------------------------------
Donald R. VanLuvanee

/s/ Barry L. Harmon                       Senior Vice President and Chief 
- - ------------------------------              Financial Officer
Barry L. Harmon

(2) Directors

/s/ David F. Bolender                     Chairman of the Board
- - ------------------------------
David F. Bolender

/s/ Douglas C. Strain                     Vice Chairman of the Board
- - ------------------------------
Douglas C. Strain

/s/ Larry L. Hansen                       Director
- - ------------------------------
Larry L. Hansen 

/s/ W. Arthur Porter                      Director
- - ------------------------------
W. Arthur Porter

/s/ Vernon B. Ryles                       Director
- - ------------------------------
Vernon B. Ryles

/s/ Keith L. Thomson                      Director
- - ------------------------------
Keith L. Thomson

                                     43

<PAGE>

                               EXHIBIT INDEX

 EXHIBIT NO.                      EXHIBIT DESCRIPTION
 -----------                      -------------------
   3-A.           Restated Articles of Incorporation of the Company.  
                  Incorporated by reference to Exhibit 3-A of the 
                  Company's Annual Report on Form 10-K for the fiscal
                  year ended May 31, 1991.

   3-B.           Bylaws of the Company.  Incorporated by reference to 
                  Exhibit 3-B of the Company's Annual Report on Form 
                  10-K for the fiscal year ended May 31, 1994.

   4-A            Rights Agreement, dated as of May 12, 1989, between 
                  the Company and United States National Bank of 
                  Oregon relating to rights issued to all holders of
                  Company Common Stock.  Incorporated by reference to
                  Exhibit 1 to the Company's Report on Form 8-K dated
                  May 12, 1989. 

   10-A.          ESI 1983 Stock Option Plan, as amended.  Incorporated 
                  by reference to Exhibit 10-E of the Company's Annual 
                  Report on Form 10-K for the fiscal year ended May 31, 1986.

   10-B.          ESI 1989 Stock Option Plan, as amended.

   10-C.          Form of Indemnity Agreement between the Company and 
                  each of its Directors.  Incorporated by reference to 
                  Appendix C to the Company's definitive Proxy Statement
                  for its 1986 Annual Meeting of Shareholders. 

   10-D.          Form of Severance Agreement between the Company and 
                  each of its executive officers. Incorporated by reference to 
                  Exhibit 10-H of the Company's Annual Report on Form 10-K 
                  for the fiscal year ended May 31, 1992.

   10-E.          ESI 1996 Stock Incentive Plan.

   11.            Statement of Calculation of Earnings Per Share.   

   21.            Subsidiaries of the Company.

   23.            Consent of Independent Public Accountants.

   27.            Financial Data Schedule.


                                     44

<PAGE>


                                                                  EXHIBIT 1O-B
                                           
                         ELECTRO SCIENTIFIC INDUSTRIES, INC.
                                1989 STOCK OPTION PLAN
                        (as amended as of September 20, 1996)
                                           


         PURPOSE.  The purpose of this 1989 Stock Option Plan (the "Plan") is 
to enable Electro Scientific Industries, Inc. (the "Company") to attract and 
retain people of training, experience, and ability, and to provide additional 
incentive to employees and non-employee directors by giving them an 
opportunity to participate in the ownership of the Company, thereby 
stimulating their efforts on the Company's behalf and strengthening their 
desire to remain with the Company.

         SHARES SUBJECT TO THE PLAN.  Except as provided in Paragraph 15, the 
total number of shares of the Company's Common Stock, without par value 
("Common Stock"), covered by all options granted under the Plan shall not 
exceed 1,700,000 authorized but unissued or reacquired shares.  In the event 
any option under the Plan expires or is cancelled or terminated and is 
unexercised in whole or in part, the shares allocable to the unexercised 
portion shall again become available for options under the Plan.

         DURATION OF THE PLAN.  The Plan shall continue in effect until 
options have been granted and exercised with respect to all of the shares 
available for the Plan under paragraph 2 (subject to any adjustments under 
paragraph 15), unless sooner terminated by action of the Board of Directors 
of the Company (the "Board of Directors").  The Board of Directors shall have 
the right to suspend or terminate the Plan at any time except with respect to 
options then outstanding under the Plan.

         ADMINISTRATION.  The Plan shall be administered by the Board of 
Directors of the Company, which shall determine and designate from time to 
time the employees to whom options shall be granted and the number of shares, 
the option price, the period of each option, and the time or times at which 
options may be exercised.  Subject to the provisions of the Plan, the Board 
of Directors may from time to time adopt rules and regulations relating to 
administration of the Plan, and the interpretation and construction of the 
provisions of the Plan by the Board of Directors shall be final and 
conclusive.  No director who holds or is eligible to hold an option under the 
Plan, other than an option under Paragraph 16, shall vote upon any action 
taken by the Board of Directors involving such matter.  The Board of 
Directors, if it so determines, may delegate to a committee of the Board of 
Directors, or specified officers of the Company, or both (the "Committee") 
any or all authority for administration of the Plan.  If authority is 
delegated to a Committee, all references to the Board of Directors in the 
Plan shall mean and relate to the Committee except (i) as otherwise provided 
by the Board of Directors, and (ii) that only the Board of Directors  may 
terminate or amend the Plan as provided in paragraphs 3 and 19.

         GRANTS.  

         (a)  Options granted under the Plan may be Incentive Stock Options, 
as defined in Section 422 of the Internal Revenue Code of 1986, as amended 
(the "Code"), or Non-Statutory Stock Options.  For the purpose of the Plan, a 
Non-Statutory Stock Option means an option other than an Incentive Stock 
Option. The Board of Directors or Committee, as the case may be, has the sole 
discretion to determine which options shall be Incentive Stock Options and 
which options shall be Non-Statutory Stock Options, and shall specifically 

<PAGE>

designate each option granted under the Plan as an Incentive Stock Option or 
Non-Statutory Stock Option.  No Incentive Stock Option may be granted under 
the Plan on or after the tenth anniversary of the last action by the Board of 
Directors approving an increase in the number of shares available for 
issuance under the Plan, which action was subsequently approved within 12 
months by the shareholders.

         (b)  No employee may be granted Incentive Stock Options under the Plan
such that the aggregate fair market value, on the date of grant, of the stock
with respect to which Incentive Stock Options are exercisable for the first time
by the employee during any calendar year under the Plan and under any other
incentive stock option plan (within the meaning of Section 422 of the Code) of
the Company or any parent or subsidiary of the Company exceeds $100,000.

         (c)  No employee may be granted options under the Plan for more than
250,000 shares of Common Stock in any fiscal year.

         ELIGIBILITY.  Incentive Stock Options and Non-Statutory Stock Options
may be granted under the Plan to employees of the Company or any parent or
subsidiary of the Company (including employees who are directors).  Directors
who are not employees shall only be eligible to receive options granted pursuant
to paragraph 16.

         OPTION PRICE.  The option price per share under each option granted
under the Plan shall be determined by the Board of Directors at the time of
grant.  Except as provided in paragraph 9, the option price shall be not less
than 100 percent of the fair market value of the shares covered by the option on
the date the option is granted.  The fair market value of shares covered by an
option shall be deemed to be the last price for the Common Stock as reported to
NASDAQ and published in the Wall Street Journal for the day preceding the date
of grant, or such other value of the Common Stock as shall be determined by the
Board of Directors of the Company.

         DURATION OF OPTIONS.  Subject to paragraphs 9 and 13, each option
granted under the Plan shall continue in effect for the period fixed by the
Board of Directors, except that no Incentive Stock Option shall be exercisable
after ten years from the date it is granted and no Non-Statutory Stock Option
shall be exercisable after the expiration of 10 years plus seven days from the
date it is granted.

         LIMITATIONS ON GRANTS TO 10 PERCENT SHAREHOLDERS.  An Incentive Stock
Option may be granted under the Plan to an employee possessing more than 10
percent of the total combined voting power of all classes of stock of the
Company or of any parent or subsidiary of the Company only if the option price
is at least 110 percent of the fair market value of the stock subject to the
option on the date it is granted, as described in paragraph 7, and the Incentive
Stock Option by its terms is not exercisable after the expiration of five years
from the date it is granted.

         EXERCISE OF OPTIONS.  Options granted under the Plan may be exercised
from time to time over the period stated in each option in such amounts and at
such times as shall be prescribed by the Board of Directors.  If the optionee
does not exercise an option in any one year with respect to the full number of
shares to which the optionee is entitled in that year, the optionee's rights
shall be cumulative and the optionee may purchase those shares in any subsequent
year during the term of the option.

<PAGE>

         LIMITATION ON RIGHTS TO EXERCISE.  Except as provided in paragraph 13
or as otherwise approved by the Board of Directors, no option granted under the
Plan may be exercised unless at the time of such exercise the optionee is
employed by or a director of the Company or any parent or subsidiary of the
Company and shall have been so employed or engaged continuously since the date
such option was granted.  Absence on leave or on account of illness or
disability under rules established by the Board of Directors shall not, however,
be deemed an interruption of employment for this purpose.

         NONASSIGNABILITY.  Each option granted under the Plan by its terms
shall be nonassignable and nontransferable by the optionee except by will or by
the laws of descent and distribution of the state or country of the optionee's
domicile at the time of death, and each such option by its terms shall be
exercisable during the optionee's domicile at the time of death, and each such
option by its terms shall be exercisable during the optionee's lifetime only by
the optionee.

1.       TERMINATION OF EMPLOYMENT.

         (a)  In the event the employment of an optionee by the Company or by
any parent or subsidiary of the Company is terminated by retirement or for any
reason, voluntarily or involuntarily with or without cause, other than in the
circumstances specified in subsection (b) or (c) below, any option held by such
optionee may be exercised at any time prior to its expiration date or the
expiration of three months after the date of such termination of employment,
whichever is the shorter period, but only if and to the extent the optionee was
entitled to exercise the option on the date of such termination.

         (b)  In the event an optionee's employment by the Company or by any
parent or subsidiary of the Company is terminated because of death or physical
disability (within the meaning of Section 22(e)(3) of the Code), any option held
by such optionee may be exercised with respect to all remaining shares subject
thereto, free of any limitation on the number of shares with respect to which
the option may be exercised in any one year, at any time prior to its expiration
date or the expiration of one year after the date of such termination, whichever
is the shorter period.  If an optionee's employment is terminated by death, any
option held by the optionee shall be exercisable only by the person or persons
to whom such optionee's rights under such option shall pass by the optionee's
will or by the laws of descent and distribution of the state or country of the
optionee's domicile at the time of death.

         (c)  In the event an optionee's employment by the Company or by any
parent or subsidiary of the Company terminates within one year after a change in
control of the Company for any reason other than retirement, death, or physical
disability (within the meaning of Section 22(e)(3) of the Code), any option held
by such optionee may be exercised with respect to all remaining shares subject
thereto, free of any limitation on the number of shares with respect to which
the option may be exercised in any one year, at any time prior to its expiration
date or the expiration of three months after the date of such termination of
employment, whichever is the shorter period.  A "change in control of the
Company" shall mean a change in control of a nature that would be required to be
reported in response to item 6(e) of Schedule 14A of Regulation 14A promulgated
under the Securities Exchange Act of 1934, as amended ("Exchange Act"); provided
that, without limitation, such a change in control shall be deemed to have
occurred if (1) any "person" (as such term is used in Sections 13(d) or 14(d)(2)
of the Exchange Act) is or becomes the beneficial owner, directly or indirectly,
of securities of the Company representing 20 percent or more of the combined
voting power of the Company's then outstanding securities; or (2) during any
period of two 

<PAGE>

consecutive years, individuals who at the beginning such period constitute 
the Board of Directors of the Company cease for any reason to constitute at 
least a majority thereof unless the election, or the nomination for election 
by the Company's shareholders, of each new director was approved by a vote of 
at least two-thirds of the directors then still in office who were directors 
at the beginning of the period.  A change in control of the Company shall not 
include any change in control pursuant to a written agreement between the 
Company and another person, which agreement is approved and adopted by the 
Board of Directors of the Company or pursuant to any tender offer or exchange 
offer which the Board of Directors has in any manner recommended acceptance 
of to the shareholders of the Company.

         (d)  Unless otherwise approved by the Board of Directors, to the
extent an option held by any deceased optionee or by any optionee whose
employment is terminated shall not have been exercised within the limited
periods provided above, all further rights to purchase shares pursuant to such
option shall cease and terminate at the expiration of such periods.

         PURCHASE OF SHARES.  Shares may be purchased or acquired pursuant to
an option granted under the Plan only upon receipt by the Company of notice in
writing from the optionee of the optionee's intention to exercise, specifying
the number of shares as to which the optionee desires to exercise the option and
the date on which the optionee desires to complete the transaction, which shall
not be more than 30 days after receipt of the notice, and, unless in the opinion
of counsel for the Company such a representation is not required in order to
comply with the Securities Act of 1933, as amended, containing a representation
that it is the optionee's present intention to acquire the shares for investment
and not with a view to distribution.  On or before the date specified for
completion of the purchase of shares pursuant to an option, the optionee must
have paid the Company the full purchase price of such shares in cash (including
cash which may be the proceeds of a loan from the Company), in shares of Common
Stock of the Company previously acquired and held for not less than one year by
the optionee, valued at fair market value as defined in paragraph 7, or in any
combination of cash and shares of Common Stock of the Company.  No shares shall
be issued until full payment therefor has been made, and an optionee shall have
none of the rights of a shareholder until a certificate for shares is issued to
such optionee.  Each optionee who has exercised an option shall, upon
notification of the amount due, if any, and prior to or concurrently with
delivery of the certificates representing the shares with respect to which the
option was exercised, pay to the Company amounts necessary to satisfy any
applicable federal, state and local withholding tax requirements.  If additional
withholding becomes required beyond any amount deposited before delivery of the
certificates, the optionee shall pay such amount to the Company on demand.

         CHANGES IN CAPITAL STRUCTURE.  In the event that the outstanding
shares of Common Stock of the Company are hereafter increased or decreased or
changed into or exchanged for a different number or kind of shares or other
securities of the Company or another corporation, by reason of any
reorganization, merger, consolidation, recapitalization, reclassification, stock
split-up, combination of shares, or dividend payable in shares, appropriate
adjustment shall be made by the Board of Directors in the number and kind of
shares for the purchase of which options may be granted under the Plan.  In
addition, the Board of Directors shall make appropriate adjustment in the number
and kind of shares as to which outstanding options, or portions thereof then
unexercised, shall be exercisable, to the end that each optionee's proportionate
interest shall be maintained as before the occurrence of such event.  Such
adjustment in outstanding options shall be made without change in the total
price applicable to the unexercised portion of any option and with a
corresponding adjustment in the option price per share.  Any such adjustment
made by the Board of Directors shall be conclusive.  In the event of dissolution
or liquidation of the Company or a merger or 

<PAGE>

consolidation in which the Company is not the surviving corporation, in lieu 
of providing for options as provided for above in this paragraph 15, the 
Board of Directors may, in its sole discretion, provide a 30-day period 
immediately prior to such event during which optionees shall have the right 
to exercise options in whole or in part without any limitation on 
exercisability.

1.       OPTION GRANTS TO NON-EMPLOYEE DIRECTORS.

         (a)  ANNUAL GRANTS.  Each Non-Employee Director shall be 
automatically granted an option to purchase 3,000 shares of Common Stock on 
July 31 of each year, provided the Non-Employee Director is a director on 
such date.  A "Non-Employee Director" is a director who is not a full-time 
employee of the Company or any of its subsidiaries and has not been a 
full-time employee of the Company or any of its subsidiaries within one year 
of any date as of which a determination of eligibility is made.  The increase 
in the number of shares covered by options automatically granted under this 
paragraph 16 as of July 31, 1996 from 1,000 to 3,000 shares shall be subject 
to and conditioned upon approval by the shareholders at the 1996 annual 
meeting of shareholders of the amendment to this paragraph 16 to the Plan.

         (b)  EXERCISE PRICE.  The exercise price of the options granted
pursuant to this paragraph 16 shall be equal to 100 percent of the fair market
value of the Common Stock determined pursuant to paragraph 7.

         (c)  TERM OF OPTION.  The term of each option granted pursuant to this
paragraph 16 shall be 10 years from the date of grant.

         (d)  EXERCISABILITY.  Until an option expires or is terminated and
except as provided in paragraphs 16(e) and 15, an option granted under this
paragraph 16 shall be exercisable according to the following schedule:

       Period of Non-Employee
    Directors' Continuous Service
        as a Director of the
        Company from the Date            Portion of Total Option
        the Option is Granted              Which is Exercisable
- - -----------------------------------------------------------------
           Less than 1 year                         0%
           After 1 year                            25%
           After 2 years                           50%
           After 3 years                           75%
           After 4 years                          100%


         (e)  TERMINATION AS A DIRECTOR.  If an optionee ceases to be a 
director of the Company for any reason, other than death or physical 
disability (within the meaning of Section 22(e)(3) of the Code), the option 
may be exercised at any time prior to the expiration date of the option or 
the expiration of three months after the last day the optionee served as a 
director, whichever is the shorter period, but only if and to the extent the 
optionee was entitled to exercise the option as of the last day the optionee 
served as a director.  If an optionee ceases to be a director of the Company 
as a result of death or physical disability (within the meaning of Section 
22(e)(3) of the Code), the option may be exercised with respect to all 
remaining shares subject thereto, free of any limitation on the number of 
shares with respect to which the option may be exercised in any one year, at 
any time prior to the expiration date of the option 

<PAGE>

or the expiration of one year after the last day the optionee served as a 
director, whichever is the shorter period. 

         (f)  EXERCISE OF OPTIONS.  Options may be exercised upon payment of
cash or shares of Common Stock of the Company in accordance with paragraph 14.

         STOCK APPRECIATION RIGHTS.

         (a)  GRANT.  Stock appreciation rights may be granted under the Plan
by the Board of Directors, subject to such rules, terms and conditions as the
Board of Directors may prescribe; provided, however, that stock appreciation
rights may only be granted in connection with an option grant or in connection
with an outstanding option previously granted under the Plan and shall not be
assignable other than in conjunction with assignment of the related option
pursuant to paragraph 12.

         (b)  EXERCISE.

              (i)  A stock appreciation right shall be exercisable only at the
time or times established by the Board of Directors and only to the extent and
on the same conditions that the related option could be exercised.  Upon
exercise of a stock appreciation right, the option or portion thereof to which
the stock appreciation right relates must be surrendered.  No stock appreciation
right may be exercised during the six-month period following the date it is
granted.  Option shares with respect to which a stock appreciation right has
been exercised may not again be subjected to options under the Plan.

              (ii) The Board of Directors may withdraw any stock appreciation
right granted under the Plan at any time and may impose any conditions upon the
exercise of a stock appreciation right or adopt rules and regulations from time
to time affecting the rights of holders of stock appreciation rights.  Such
rules and regulations may govern the right to exercise stock appreciation rights
prior to the adoption or amendment of such rules and regulations as well as
stock appreciation rights granted thereafter.

              (iii)     Each stock appreciation right shall entitle the holder,
upon exercise, to receive from the Company in exchange therefor an amount equal
in value to the excess of the fair market value on the date of exercise of one
share of Common Stock of the Company over the option price per share to which
the stock appreciation right relates, times the number of shares covered by the
option, or portion thereof, which is surrendered.  No stock appreciation right
shall be exercisable at a time that the amount determined under this
subparagraph is negative.  Payment upon exercise of a stock appreciation right
by the Company may be made in Common Stock valued at its fair market value, or
in cash, or partly in shares and partly in cash, all as shall be determined by
the Board of Directors.

              (iv) The fair market value of the Common Stock shall be
determined as specified in paragraph 7.

              (v)  Shares issued upon exercise of a stock appreciation right
may consist either in whole or in part of authorized and unissued Common Stock
or issued Common Stock held as treasury shares.  No fractional shares shall be
issued upon exercise of a stock appreciation right.  In lieu thereof, cash may
be paid in an amount equal to the value of the 

<PAGE>

fraction or, if the Board of Directors shall determine, the number of shares 
may be rounded downward to the next whole share.

              (vi) In the event of any adjustment, pursuant to paragraph 15, in
the number of shares of Common Stock subject to an option granted under the
Plan, the stock appreciation rights granted hereunder in connection with such
option shall be proportionately adjusted.

         CORPORATE MERGERS, ACQUISITION, ETC.  The Board of Directors may also
grant options and stock appreciation rights having terms and provisions which
vary from those specified in this Plan provided that any options and stock
appreciation rights granted pursuant to this section are granted in substitution
for, or in connection with the assumption of, existing options and stock
appreciation rights granted by another corporation and assumed or otherwise
agreed to be provided for by the Company pursuant to or by reason of a
transaction involving a corporate merger, consolidation, acquisition of property
or stock, separation, reorganization or liquidation to which the Company or a
subsidiary is a party.

         AMENDMENT OF PLAN.  The Board of Directors may at any time and from
time to time modify or amend the Plan in such respects as it shall deem
advisable because of changes in the law while the Plan is in effect or for any
other reason.  Except as provided in paragraph 15, however, no change in an
option already granted to an employee shall be made without the written consent
of such employee.  Furthermore, unless approved by the shareholders at an annual
meeting or a special meeting, no amendment or change shall be made in the Plan
(a) increasing the total number of shares which may be purchased under the Plan,
(b) changing the minimum option price specified in the Plan, (c) increasing the
maximum option period, or (d) materially modifying the requirements for
eligibility for participation in the Plan.

         APPROVALS.  The obligations of the Company under the Plan shall be
subject to the approval of such state or federal authorities or agencies, if
any, as may have jurisdiction in the matter.  The Company will use its best
efforts to take such steps as may be required by state or federal law or
applicable regulations, including rules and regulations of the Securities and
Exchange Commission and any stock exchange in which the Company's shares may
then be listed, in connection with the granting of any option under the Plan,
the issuance or sale of any shares purchased upon exercise of any option under
the Plan, or the listing of such shares on said exchange.  The foregoing
notwithstanding, the Company shall not be obligated to issue or deliver shares
of Common Stock under the Plan if the Company is advised by the legal counsel
that such issuance or delivery would violate applicable state of federal
securities laws.

         EMPLOYMENT RIGHTS.  Nothing in the Plan or any option granted pursuant
to the Plan shall confer upon any optionee any right to be continued in the
employment of the Company or any parent or subsidiary of the Company, or to
interfere in any way with the right of the Company or any parent or subsidiary
of the Company by whom such optionee is employed to terminate such optionee's
employment at any time, with or without cause.


<PAGE>

                                                                   EXHIBIT 10-E
                                           
                         ELECTRO SCIENTIFIC INDUSTRIES, INC.
                              1996 STOCK INCENTIVE PLAN
                                           
                                           
    1.   PURPOSE.  The purpose of this Stock Incentive Plan (the "Plan") is to
enable Electro Scientific Industries, Inc. (the "Company") to attract and retain
the services of selected employees, officers and directors of the Company or of
any subsidiary of the Company.

    2.   SHARES SUBJECT TO THE PLAN.  Subject to adjustment as provided below
and in paragraph 9, the shares to be offered under the Plan shall consist of
Common Stock of the Company, and the total number of shares of Common Stock that
may be issued under the Plan shall not exceed 150,000 shares.  The shares issued
under the Plan may be authorized and unissued shares or reacquired shares.  If a
Performance-based Award granted under the Plan expires, terminates or is
cancelled, the unissued shares subject to such Performance-based Award shall
again be available under the Plan.  If shares sold or issued as a bonus or
Performance-based Award under the Plan are forfeited to the Company or
repurchased by the Company, the number of shares forfeited or repurchased shall
again be available under the Plan.

    3.   EFFECTIVE DATE AND DURATION OF PLAN.

         (a)  EFFECTIVE DATE.  The Plan shall become effective as of April 12,
1996.  However, all awards under the Plan shall be conditioned on and subject to
approval of the Plan by the shareholders of the Company.  Subject to this
limitation, Performance-based Awards may be granted and shares may be awarded as
bonuses or sold under the Plan at any time after the effective date and before
termination of the Plan.

         (b)  DURATION.  The Plan shall continue in effect until all shares
available for issuance under the Plan have been issued and all restrictions on
such shares have lapsed.  The Board of Directors may suspend or terminate the
Plan at any time except with respect to Performance-based Awards and shares
subject to restrictions then outstanding under the Plan.  Termination shall not
affect any right of the Company to repurchase shares or the forfeitability of
shares issued under the Plan.

    4.   ADMINISTRATION.

         (a)  BOARD OF DIRECTORS.  The Plan shall be administered by the Board
of Directors of the Company, which shall determine and designate from time to
time the individuals to whom awards shall be made, the amount of the awards and
the other terms and conditions of the awards.  Subject to the provisions of the
Plan, the Board of Directors may from time to time adopt and amend rules and
regulations relating to administration of the Plan, advance the lapse of any
waiting period, accelerate any exercise date, waive or modify any restriction
applicable to shares (except those restrictions imposed by law) and make all
other determinations in the judgment of the Board of Directors necessary or
desirable for the administration of the Plan.  The interpretation and
construction of the provisions of the Plan and related agreements by the Board
of Directors shall be final and conclusive.  The Board of Directors may correct
any defect or supply any omission or reconcile any inconsistency in the 

<PAGE>

Plan or in any related agreement in the manner and to the extent it shall 
deem expedient to carry the Plan into effect, and it shall be the sole and 
final judge of such expediency.

         (b)  COMMITTEE.  The Board of Directors may delegate to a committee of
the Board of Directors or specified officers of the Company, or both (the
"Committee") any or all authority for administration of the Plan.  If authority
is delegated to a Committee, all references to the Board of Directors in the
Plan shall mean and relate to the Committee except (i) as otherwise provided by
the Board of Directors, and (ii) that only the Board of Directors may amend or
terminate the Plan as provided in paragraphs 3 and 10. 

    5.   TYPES OF AWARDS; ELIGIBILITY.  The Board of Directors may, from time 
to time, take the following action, separately or in combination, under the 
Plan:  (i) award stock bonuses as provided in paragraph 6; (ii) sell shares 
subject to restrictions as provided in paragraph 7; and (iii) grant 
Performance-based Awards as provided in paragraph 8.  An award may be made to 
any employee, officer or director of the Company or any subsidiary of the 
Company.  The Board of Directors shall select the individuals to whom awards 
shall be made and shall specify the action taken with respect to each 
individual to whom an award is made.  At the discretion of the Board of 
Directors, an individual may be given an election to surrender an award in 
exchange for the grant of a new award.

    6.   STOCK BONUSES.  The Board of Directors may award shares under the Plan
as stock bonuses.  Shares awarded as a bonus shall be subject to the terms,
conditions, and restrictions determined by the Board of Directors.  The
restrictions may include restrictions concerning transferability and forfeiture
of the shares awarded, together with such other restrictions as may be
determined by the Board of Directors.  The Board of Directors may require the
recipient to sign an agreement as a condition of the award, but may not require
the recipient to pay any monetary consideration other than amounts necessary to
satisfy tax withholding requirements.  The agreement may contain any terms,
conditions, restrictions, representations and warranties required by the Board
of Directors.  The certificates representing the shares awarded shall bear any
legends required by the Board of Directors.  The Company may require any
recipient of a stock bonus to pay to the Company in cash upon demand amounts
necessary to satisfy any applicable federal, state or local tax withholding
requirements.  If the recipient fails to pay the amount demanded, the Company
may withhold that amount from other amounts payable by the Company to the
recipient, including salary or fees for services, subject to applicable law. 
With the consent of the Board of Directors, a recipient may deliver Common Stock
to the Company to satisfy this withholding obligation.  The number of shares
reserved for issuance under the Plan shall be reduced by the number of shares
issued as a stock bonus, less the number of shares surrendered or withheld to
satisfy withholding obligations.

    7.   RESTRICTED STOCK.  The Board of Directors may issue shares under the
Plan for such consideration (including promissory notes and services) as
determined by the Board of Directors.  Shares issued under the Plan shall be
subject to the terms, conditions and restrictions determined by the Board of
Directors.  The restrictions may include restrictions concerning
transferability, repurchase by the Company and forfeiture of the shares issued,
together with such other restrictions as may be determined by the Board of
Directors.  All Common Stock issued pursuant to this paragraph 7 shall be
subject to a purchase agreement, which shall be executed by the Company and the
prospective recipient of the shares prior to the delivery of certificates
representing such shares to the recipient.  The purchase agreement may 

<PAGE>

contain any terms, conditions, restrictions, representations and warranties 
required by the Board of Directors.  The certificates representing the shares 
shall bear any legends required by the Board of Directors.  The Company may 
require any purchaser of restricted stock to pay to the Company in cash upon 
demand amounts necessary to satisfy any applicable federal, state or local 
tax withholding requirements.  If the purchaser fails to pay the amount 
demanded, the Company may withhold that amount from other amounts payable by 
the Company to the purchaser, including salary, subject to applicable law.  
With the consent of the Board of Directors, a purchaser may deliver Common 
Stock to the Company to satisfy this withholding obligation.  The number of 
shares reserved for issuance under the Plan shall be reduced by the number of 
shares issued as restricted stock, less the number of shares surrendered or 
withheld to satisfy withholding obligations.

    8.   PERFORMANCE-BASED AWARDS.  The Board of Directors may grant awards
intended to qualify as performance-based compensation under Section 162(m) of
the Internal Revenue Code of 1986, as amended, and the regulations thereunder
("Performance-based Awards").  Performance-based Awards shall be denominated at
the time of grant either in Common Stock ("Stock Performance Awards") or in
dollar amounts ("Dollar Performance Awards").  Payment under a Stock Performance
Award or a Dollar Performance Award shall be made, at the discretion of the
Board of Directors, in Common Stock ("Performance Shares"), or in cash or in any
combination thereof.  Performance-based Awards shall be subject to the following
terms and conditions:

         (a)  AWARD PERIOD.  The Board of Directors shall determine the period
of time for which a Performance-based Award is made (the "Award Period").

         (b)  PERFORMANCE GOALS AND PAYMENT.  The Board of Directors shall
establish in writing objectives ("Performance Goals") that must be met by the
Company or any subsidiary, division or other unit of the Company ("Business
Unit") during the Award Period as a condition to payment being made under the
Performance-based Award.  The Performance Goals for each award shall be one or
more targeted levels of performance with respect to one or more of the following
objective measures with respect to the Company or any Business Unit:  earnings,
earnings per share, stock price increase, total shareholder return (stock price
increase plus dividends), return on equity, return on assets, return on capital,
economic value added, revenues, operating income, inventories, inventory turns,
cash flows or any of the foregoing before the effect of acquisitions,
divestitures, accounting changes, and restructuring and special charges
(determined according to criteria established by the Board of Directors).  The
Board of Directors shall also establish the number of Performance Shares or the
amount of cash payment to be made under a Performance-based Award if the
Performance Goals are met or exceeded, including the fixing of a maximum payment
(subject to paragraph 8(d)).  The Board of Directors may establish other
restrictions to payment under a Performance-based Award, such as a continued
employment requirement, in addition to satisfaction of the Performance Goals. 
Some or all of the Performance Shares may be issued at the time of the award as
restricted shares subject to forfeiture in whole or in part if Performance Goals
or, if applicable, other restrictions are not satisfied.

         (c)  COMPUTATION OF PAYMENT.  During or after an Award Period, the 
performance of the Company or Business Unit, as applicable, during the period 
shall be measured against the Performance Goals.  If the Performance Goals 
are not met, no payment shall be made under a Performance-based Award.  If 
the Performance Goals are met or 

<PAGE>

exceeded, the Board of Directors shall certify that fact in writing and 
certify the number of Performance Shares earned or the amount of cash payment 
to be made under the terms of the Performance-based Award. 

         (d)  MAXIMUM AWARDS.  No participant may receive Stock Performance
Awards in any fiscal year under which the maximum number of shares of Common
Stock issuable under the award exceeds 100,000 shares or Dollar Performance
Awards in any fiscal year under which the maximum amount of cash payable under
the award exceeds $750,000.

         (e)  TAX WITHHOLDING.  Each participant who has received Performance
Shares shall, upon notification of the amount due, pay to the Company in cash
amounts necessary to satisfy any applicable federal, state and local tax
withholding requirements.  If the participant fails to pay the amount demanded,
the Company may withhold that amount from other amounts payable by the Company
to the participant, including salary, subject to applicable law.  With the
consent of the Board of Directors, a participant may satisfy this obligation, in
whole or in part, by having the Company withhold from any shares to be issued
that number of shares that would satisfy the withholding amount due or by
delivering  shares of Common Stock to the Company to satisfy the withholding
amount.

         (f)  EFFECT ON SHARES AVAILABLE.  The payment of a Performance-based
Award in cash shall not reduce the number of shares of Common Stock reserved for
issuance under the Plan.  The number of shares of Common Stock reserved for
issuance under the Plan shall be reduced by the number of shares issued upon
payment of an award, less the number of shares surrendered or withheld to
satisfy withholding obligations.

    9.   CHANGES IN CAPITAL STRUCTURE.  If the outstanding Common Stock of 
the Company is hereafter increased or decreased or changed into or exchanged 
for a different number or kind of shares or other securities of the Company 
by reason of any stock split, combination of shares or dividend payable in 
shares, recapitalization or reclassification, appropriate adjustment shall be 
made by the Board of Directors in the number and kind of shares available for 
grants under the Plan.  In addition, the Board of Directors shall make 
appropriate adjustment in the number and kind of shares subject to 
outstanding Performance-based Awards so that the recipient's proportionate 
interest before and after the occurrence of the event is maintained.  
Notwithstanding the foregoing, the Board of Directors shall have no 
obligation to effect any adjustment that would or might result in the 
issuance of fractional shares, and any fractional shares resulting from any 
adjustment may be disregarded or provided for in any manner determined by the 
Board of Directors.  Any such adjustments made by the Board of Directors 
shall be conclusive.
         
    10.  AMENDMENT OF PLAN.  The Board of Directors may at any time, and from
time to time, modify or amend the Plan in such respects as it shall deem
advisable because of changes in the law while the Plan is in effect or for any
other reason.  Except as provided in paragraph 9, however, no change in an award
already granted shall be made without the written consent of the holder of such
award.

    11.  APPROVALS.  The obligations of the Company under the Plan are subject
to the approval of state and federal authorities or agencies with jurisdiction
in the matter.  The Company will use its best efforts to take steps required by
state or federal law or applicable regulations, including rules and regulations
of the Securities and Exchange Commission and any stock exchange on which the
Company's shares may then be listed, in connection with the 

<PAGE>

grants under the Plan.  The foregoing notwithstanding, the Company shall not 
be obligated to issue or deliver Common Stock under the Plan if such issuance 
or delivery would violate applicable state or federal securities laws.

    12.  EMPLOYMENT AND SERVICE RIGHTS.  Nothing in the Plan or any award
pursuant to the Plan shall (i) confer upon any employee any right to be
continued in the employment of the Company or any subsidiary or interfere in any
way with the right of the Company or any subsidiary by whom such employee is
employed to terminate such employee's employment at any time, for any reason,
with or without cause, or to decrease such employee's compensation or benefits,
or (ii) confer upon any person engaged by the Company any right to be retained
or employed by the Company or to the continuation, extension, renewal, or
modification of any compensation, contract, or arrangement with or by the
Company.

    13.  RIGHTS AS A SHAREHOLDER.  The recipient of any award under the Plan
shall have no rights as a shareholder with respect to any Common Stock until the
date of issue to the recipient of a stock certificate for such shares.  Except
as otherwise expressly provided in the Plan, no adjustment shall be made for
dividends or other rights for which the record date occurs prior to the date
such stock certificate is issued.


<PAGE>

                                                                     EXHIBIT 11

                         ELECTRO SCIENTIFIC INDUSTRIES, INC.
                                   AND SUBSIDIARIES
                                           
                          CALCULATION OF EARNINGS PER SHARE
                   (thousands of dollars except per share amounts)
                                           

<TABLE>
<CAPTION>
                                                          Number of Shares
                                                          ----------------
                                                         Years Ended May 31,
                                                         -------------------
                                                       1997       1996       1995
                                                       ----       ----       ----
<S>                                                 <C>        <C>        <C>
Weighted average number of shares of 
common stock outstanding                            8,673,287  8,605,782  7,510,191
                                                    ---------  ---------  ---------
Common stock equivalents:
  Application of the treasury stock method
  to the stock option plan                                 --         --         --
                                                    ---------  ---------  ---------
Weighted average number of shares used 
in net income per share                             8,673,287  8,605,782  7,510,191
                                                    ---------  ---------  ---------
Net income                                          $  18,952  $  16,082  $  11,517
                                                    ---------  ---------  ---------
Net income per share (primary and fully
diluted) 1 :                                        $    2.19  $   1.87   $    1.53
                                                    ---------  ---------  ---------
</TABLE>

1.  No additional shares related to outstanding options are included in the
    primary and fully diluted calculations for the years ended May 31, 1997,
    1996 and 1995, as the differences were not significant.

                                     45

<PAGE>
                                                                     EXHIBIT 21

                         ELECTRO SCIENTIFIC INDUSTRIES, INC.
                                   AND SUBSIDIARIES
                                           
                            SUBSIDIARIES OF THE REGISTRANT
                                  AS OF MAY 31, 1997


                                                               Percentage of
                                      State and Country        Voting Securities
Subsidiaries                          Of Incorporation         Owned (1)
- - ------------                          -----------------        -----------------

Chicago Laser Systems, Inc.            Oregon                   100%
CHINT, Ltd.                            U.S. Virgin Islands      100%
CLS GmbH                               Germany                  100%
CLS Ltd                                England                  100%
Dynamotion Merger Corp.                New York                 100%
ESI BV                                 The Netherlands          100%
ESI Foreign Sales Corporation          Guam                     100%
ESI GmbH                               Germany                  100%
ESI International (DISC)               Oregon                   100%
ESI KK                                 Japan                    100%
ESI Korea                              Korea                    100%
ESI Ltd                                England                  100%
ESI SARL                               France                   100%
ESI SRL                                Italy                    100%
Palomar Systems, Inc.                  Oregon                   100%
XRL Corporation                        Oregon                   100%

(1) Other than qualifying shares, where applicable.

                                     46

<PAGE>
                                                                     EXHIBIT 23


              CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS


              As independent public accountants, we hereby consent to the 
incorporation of our reports included in this Form 10-K, into Electro 
Scientific Industries, Inc. and subsidiaries previously filed Form S-8 and 
Form S-3 Registration Statements File Nos., 2-91731, 33-2623, 33-2624, 
33-34098, 33-37148, 33-46970, 33-58292, 33-70584, 33-63705, 33-65477, 
333-16485, 333-16487 and 333-29513.

                                       ARTHUR ANDERSEN LLP


Portland, Oregon
August 1, 1997

                                     47

<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
       
<S>                             <C>
<PERIOD-TYPE>                   YEAR
<FISCAL-YEAR-END>                          MAY-31-1997
<PERIOD-END>                               MAY-31-1997
<CASH>                                          15,326
<SECURITIES>                                    27,860
<RECEIVABLES>                                   49,100
<ALLOWANCES>                                       230
<INVENTORY>                                     31,873
<CURRENT-ASSETS>                               126,875
<PP&E>                                          40,631
<DEPRECIATION>                                  24,446
<TOTAL-ASSETS>                                 148,886
<CURRENT-LIABILITIES>                           13,674
<BONDS>                                              0
                                0
                                          0
<COMMON>                                        57,586
<OTHER-SE>                                      77,626
<TOTAL-LIABILITY-AND-EQUITY>                   148,886
<SALES>                                        150,159
<TOTAL-REVENUES>                               150,159
<CGS>                                           69,676
<TOTAL-COSTS>                                   69,676
<OTHER-EXPENSES>                                53,131
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                                   0
<INCOME-PRETAX>                                 28,737
<INCOME-TAX>                                     9,785
<INCOME-CONTINUING>                                  0
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                    18,952
<EPS-PRIMARY>                                     2.19
<EPS-DILUTED>                                     2.19
        

</TABLE>


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