ZYGO CORP
DEF 14A, 1995-10-10
OPTICAL INSTRUMENTS & LENSES
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            SCHEDULE 14A INFORMATION

Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934
                                (Amendment No. )

Filed by the Registrant /X/
Filed by a Party other than the Registrant /_/

Check the appropriate box:

/_/ Preliminary Proxy Statement
/X/ Definitive Proxy Statement
/_/ Definitive Additional Materials
/_/ Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                                Zygo Corporation
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)

                                Zygo Corporation
- --------------------------------------------------------------------------------
                   (Name of Person(s) Filing Proxy Statement)

Payment of Filing Fee (Check the appropriate box):

/_/ $125 per Exchange Act Rule 0-11(c)(1)(ii), 14a-6(i)(1) or 14a-6(j)(2).
/_/ $500 per each party to the controversy pursuant to
    Exchange Act Rule 14a-6(i)(3).
/_/ Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

1) Title of each class of securities to which transaction applies:

   _____________________________________________________________________________

2) Aggregate number of securities to which transaction applies:

   _____________________________________________________________________________

3) Per unit price or other underlying value of transaction computed
   pursuant to Exchange Act Rule 0-11:*

   _____________________________________________________________________________

4) Proposed maximum aggregate value of transaction:

   _____________________________________________________________________________

/x/ Fee paid previously with preliminary materials.

/_/ Check box if any part of the fee is offset as provided by
    Exchange Act Rule 0-11(a)(2) and identify the filing for which
    the offsetting fee was paid previously.  Identify the previous
    filing by registration statement number, or the form or schedule
    and the date of its filing.

    1) Amount previously paid: _________________________________________________

    2) Form, Schedule or Registration No. ______________________________________

    3) Filing party: ___________________________________________________________

    4) Date filed: _____________________________________________________________

___________
*Set forth the amount on which the filing fee is calculated and state how it was
 determined.

<PAGE>

                                ZYGO CORPORATION
                                Laurel Brook Road
                         Middlefield, Connecticut 06455

                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS

                          To Be Held November 16, 1995


     The Annual Meeting of Stockholders of Zygo  Corporation will be held at the
offices of the Company, Laurel Brook Road, Middlefield, Connecticut, on November
16, 1995, at 10:00 a.m. local time, for the following purposes:

     1. To elect eight directors for the ensuing year.

     2. To  consider  and vote upon a proposal to amend the  Company's  Restated
Certificate  of  Incorporation  to increase the number of shares of Common Stock
authorized for issuance from 10,000,000 to 15,000,000 shares.

     3. To consider and vote upon a proposal to amend the Company's  Amended and
Restated  Non-Qualified  Stock  Option Plan to increase  the number of shares of
Common Stock  authorized  for issuance  under the Plan from 975,000 to 1,425,000
shares.

     4. To consider and approve the Company's entering into indemnity agreements
with its directors and officers.

     5. To act upon any other matter that may  properly  come before the meeting
or any adjournment thereof.

     Stockholders  of record at the close of business on September 22, 1995, are
entitled to notice of and to vote at the meeting.


                                  By Order of the Board of Directors


                                  Paul Jacobs,
                                  Secretary

October 10, 1995

- --------------------------------------------------------------------------------
                             YOUR VOTE IS IMPORTANT
- --------------------------------------------------------------------------------

     Please fill in, date,  sign, and return your proxy promptly in the enclosed
stamped envelope  whether or not you plan to be present at the meeting.  You may
still vote in person if you attend the meeting.

<PAGE>

                                ZYGO CORPORATION
                                Laurel Brook Road
                         Middlefield, Connecticut 06455

                                 Proxy Statement

           Annual Meeting of Stockholders To Be Held November 16, 1995


Proxy Solicitation

     This Proxy Statement is furnished to the holders of Common Stock, par value
$.10 per share (the "Common  Stock"),  of Zygo  Corporation  (the  "Company") in
connection  with the  solicitation  by the Board of  Directors of the Company of
proxies for use at the Annual Meeting of Stockholders to be held on November 16,
1995, or at any  adjournment  thereof,  pursuant to the  accompanying  Notice of
Annual Meeting of  Stockholders.  The purposes of the meeting and the matters to
be acted  upon are set forth in the  accompanying  Notice of Annual  Meeting  of
Stockholders. The Board of Directors is not currently aware of any other matters
which will come before the meeting.

     Proxies for use at the Annual  Meeting are being  solicited by the Board of
Directors of the Company.  Proxies  will be mailed to  stockholders  on or about
October  10,  1995,  and will be  solicited  chiefly by mail;  however,  certain
officers,  directors,  and  employees of the Company,  none of whom will receive
additional compensation therefor, may solicit proxies by telephone, telegram, or
other personal contact. All solicitation expenses, including costs of preparing,
assembling, and mailing proxy material, will be borne by the Company.


Revocability and Voting of Proxy

     A form of proxy for use at the Annual Meeting of Stockholders  and a return
envelope  for the proxy are  enclosed.  Stockholders  may revoke  the  authority
granted  by their  execution  of  proxies  at any time  before  their  effective
exercise  by filing  with the  Secretary  of the  Company  a  written  notice of
revocation or a duly executed proxy bearing a later date, or by voting in person
at the meeting. Shares of the Company's Common Stock represented by executed and
unrevoked  proxies will be voted in accordance  with the choice or  instructions
specified  thereon.  If no specifications  are given, the proxies intend to vote
the shares  represented  thereby to approve  Proposal  Nos. 1, 2, 3 and 4 as set
forth herein and in the  accompanying  Notice of Annual Meeting of  Stockholders
and in  accordance  with  their best  judgment  on any other  matters  which may
properly come before the meeting.

<PAGE>

Record Date and Voting Rights

     Only stockholders of record at the close of business on September 22, 1995,
are  entitled  to notice  of and to vote at the  Annual  Meeting  or any and all
adjournments  thereof.  On September 22, 1995,  there were  3,933,886  shares of
Common Stock outstanding; each such share is entitled to one vote on each of the
matters to be presented at the Annual Meeting.  The holders of a majority of the
outstanding shares of Common Stock present in person or by proxy and entitled to
vote will constitute a quorum at the Annual Meeting.

     On July 20, 1995, the Company's Board of Directors declared a 3 for 2 stock
split effected in the form of a 50% stock  dividend,  payable on August 21, 1995
to  stockholders of record at the close of business on August 1, 1995. All share
and option  information  included in this Proxy Statement has been adjusted,  to
the extent necessary, to reflect such stock split as if it had occurred prior to
the date as of which the information is given.


                 Proposal No. 1 - Election of Board of Directors

     Eight  directors  (constituting  the entire Board) are to be elected at the
Annual Meeting. The enclosed proxy, unless otherwise specified, will be voted to
elect as directors  the eight  nominees  named below,  all of whom are presently
directors of the Company.  Each director elected will hold office until the next
Annual Meeting of Stockholders.

     All nominees have consented to serve as directors.  If a nominee should not
be available for election as contemplated,  the shares  represented by the proxy
will be  voted  for the  person,  if any,  who is  designated  by the  Board  of
Directors  to  replace  the  nominee.  The Board of  Directors  has no reason to
believe that any of the nominees will be unable to serve.

                                       -2-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                       <C>                                       <C>          <C>             <C>                <C> 
Paul F. Forman            Chairman from June 1970 and,              61           1970            273,060 (b)        6.9%
                          from  June  1970  to  August
                          1993,     Chief    Executive
                          Officer  and from  June 1970
                          to November 1993, Treasurer;
                          from June  1991 to  February
                          1992, acting President; and,
                          from    February   1992   to
                          November 1993,  Secretary of
                          the Company.

Michael R. Corboy         President  and  Chief Execu-              65           1993             21,000 (c)        0.5%
                          tive   Officer   of   Corboy
                          Investment   Company   since
                          January  1992;  Chairman and
                          Chief  Executive  Officer of
                          Amtech    Corporation   from
                          December 1987 until December
                          1991;  Director of The Kirby
                          Foundation;    the   Aquinas
                          Funds,  Networth,  Inc., and
                          Wyle Electronics.

Seymour E.                Senior    Vice     President              46           1993              7,500 (d)        0.2%
Liebman                   Finance and General  Counsel
                          Canon  U.S.A.,   Inc.  since
                          January  1992;  from January
                          1990  until  December  1991,
                          Vice  President  Finance and
                          General Counsel Canon U.S.A.
                          Inc.

Robert G.                 Chairman,  President, George              58           1983             53,100 (e)        1.3%
McKelvey                  McKelvey      Co.,      Inc.
                          (Investment    Advisor   and
                          Securities    Broker-Dealer)
                          for more  than the last five
                          years.
</TABLE>

                                       -3-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                       <C>                                       <C>          <C>             <C>                <C> 
Paul W. Murrill           Professional   Engineer  for              61           1993             14,250 (f)        0.4%
                          more   than  the  last  five
                          years;  Director  of Entergy
                          Corporation,      Tidewater,
                          Inc.,   First    Mississippi
                          Corporation, FirstMiss Gold,
                          Inc., Piccadilly Cafeterias,
                          Inc.,  Howell   Corporation,
                          various    foundations   and
                          public               service
                          organizations.

Robert B. Taylor          Vice President and Treasurer              48           1988              9,750 (g)        0.2%
                          of Wesleyan University since
                          April   1985;   Director  of
                          Middlesex  Mutual  Assurance
                          Co.    and    Farmers    and
                          Mechanics Bank.

Gary K. Willis            President      and     Chief              50           1992            155,250 (h)        3.9%
                          Executive    Officer   since
                          August 1993;  from  February
                          1992  until   August   1993,
                          President      and     Chief
                          Operating   Officer  of  the
                          Company;  from  October 1990
                          until      January     1992,
                          independent consultant.

Carl A. Zanoni            Vice  President,   Research,              54           1970            289,110 (i)        7.3%
                          Development  and Engineering
                          of the  Company  since April
                          1992;   from  February  1989
                          until   March   1992,   Vice
                          President,    Research   and
                          Development, Chief Scientist
                          and,  from June  1970  until
                          February     1989,      Vice
                          President,   Engineering  of
                          the Company.
</TABLE>

                                       -4-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                                                                                              <C>                <C> 
All directors and
officers as a
group, including
those named
above (10 in all)
(d)(e)                                                                                           852,270 (j)        20.6%
</TABLE>

     (a)  The persons  named and all  directors  and  officers as a group in the
          table have sole voting and investment power with respect to all shares
          of Common Stock shown as beneficially owned by them, except for shares
          which can be acquired by the exercise of stock options.

     (b)  Includes  options to purchase  39,000 shares of Common Stock which are
          exercisable within 60 days.

     (c)  Includes  options to purchase  13,500 shares of Common Stock which are
          exercisable within 60 days.

     (d)  Consists of options to purchase 7,500 shares of Common Stock which are
          exercisable  within 60 days.  Does not include 786,000 shares owned by
          Canon Inc.

     (e)  Includes  options to purchase  7,500  shares of Common Stock which are
          exercisable within 60 days.

     (f)  Includes  options to purchase  13,500 shares of Common Stock which are
          exercisable within 60 days.

     (g)  Includes  options to purchase  7,500  shares of Common Stock which are
          exercisable  within 60 days.  Does not include 397,500 shares owned by
          Wesleyan University.

     (h)  Includes  options to purchase  56,250 shares of Common Stock which are
          exercisable within 60 days.

     (i)  Includes  options to purchase  36,450 shares of Common Stock which are
          exercisable within 60 days.

     (j)  Includes  options to purchase 202,950 shares of Common Stock which are
          exercisable within 60 days.

     Eight  meetings  of the Board of  Directors  were held in fiscal  1995.  In
addition, the Board acted twice by unanimous written consent.

                                       -5-

<PAGE>

     The Board of  Directors  has an Audit  Committee,  Compensation  Committee,
Amended  and   Restated   Non-Qualified   Stock  Option  Plan   Committee   (the
"Non-Qualified Plan Committee"),  and a Nominating Committee to assist it in the
discharge of its responsibilities.

     The Audit  Committee  reviews  the scope,  plan,  and results of the annual
audit, any non-audit  services provided by the independent  public  accountants,
the procedures and policies with respect to internal  accounting  controls,  and
recommends  the firm to be employed as independent  auditors.  Three meetings of
the Audit Committee were held in fiscal 1995.  Effective  November 1994, Messrs.
Murrill and Taylor are the members of the Audit Committee.

     The  Compensation  Committee  determines the  compensation of the executive
officers,  recommends to the Board and the  Non-Qualified  Plan Committee awards
under the Company's  Amended and Restated  Non-Qualified  Stock Option Plan (the
"Non-Qualified  Plan"),  and  recommends  to the Board  amendments  to  existing
employee  benefit plans and adoption of any new benefit plans.  Messrs.  Corboy,
Liebman and McKelvey are the members of the Compensation  Committee.  There were
three meetings of the Compensation Committee held in fiscal 1994.

     The Non-Qualified Plan Committee is empowered to grant stock options to key
employees and directors of the Company under the Company's  Non-Qualified  Plan.
Messrs.  Liebman  and  McKelvey  are  the  members  of  the  Non-Qualified  Plan
Committee. The Non-Qualified Plan Committee met one time during fiscal 1995 and,
in addition, acted twice by unanimous written consent during the year.

     The Nominating  Committee considers  candidates (and potential  candidates)
for the office of director of the Company, who are brought to its attention from
whatever  source,  and  recommends to the full Board the names of those persons,
willing to serve,  whom they  believe it will be in the  Company's  overall best
interest  to have fill any  available  vacancy  or  vacancies.  Messrs.  Willis,
Liebman,  and McKelvey are the members of the  Nominating  Committee.  No formal
meetings of the Nominating  Committee were held during fiscal 1995 as the entire
Board addressed this task at its meetings.

     Each director  attended at least 75% of the total number of meetings of the
Board and Committees on which he served.

     Pursuant to the Zygo  Corporation  Non-Employee  Director Stock Option Plan
(the "Non-Employee Director Plan"), each director who was not an employee of, or
consultant  to, the Company (a  "Non-Employee  Director")  was granted in August
1994 an option to  purchase  37,500  shares of Common  Stock,  vesting  at 7,500
shares per year, exercisable at the fair market value of a share of Common Stock
on the date of grant.  The  Non-Employee  Director  Plan further  provides  that
options to purchase an additional  37,500  shares of Common Stock  automatically
will be granted to each  Non-Employee  Director on the fifth  anniversary of the
date on which an option was  previously  granted to the  Non-Employee  Director,

                                       -6-

<PAGE>

provided that he has  continuously  served as a director of the Company  through
such fifth anniversary.  Until November 1993, each Non-Employee Director who was
a designee of either Canon Inc.  ("Canon") or Wesleyan  University  ("Wesleyan")
pursuant  to the terms of a  stockholders'  agreement,  received a yearly fee of
$5,500 (subsequently  increased to $13,000 effective December 1, 1993) plus $500
for each Board of Directors' meeting attended.  Prior to August 1994, each other
Non-Employee  Director received an alternative  package of, at the option of the
director,  (i) a yearly  fee of $13,000  plus $500 for each Board of  Directors'
meeting  attended,  (ii) an option to purchase  30,000  shares of Common  Stock,
vesting at 6,000  shares per year,  exercisable  at the fair  market  value of a
share of Common Stock on the date of grant,  or (iii) a combination of these two
alternatives.  Each  Non-Employee  Director also is and was  reimbursed  for his
out-of-pocket  expenses.  No  additional  fees are or were  paid  for  committee
participation  or special  assignments.  Effective July 1, 1994,  Paul F. Forman
receives an annual  retainer of $20,000  for his  participation  on the Board of
Directors.

           Compensation Committee Interlocks and Insider Participation

     During the fiscal  year ended June 30,  1995,  the  Compensation  Committee
consisted  of Messrs.  Seymour E.  Liebman,  Michael  R.  Corboy,  and Robert G.
McKelvey.  Mr. Liebman was a director-designee of Canon, a principal stockholder
of the Company.  Canon Sales Co.,  Inc., a  subsidiary  of Canon,  serves as the
exclusive  distributor  of the Company's  products in Japan.  Sales to Canon and
Canon Sales Co.,  Inc.  aggregated  approximately  $9,550,000  for fiscal  1995.
Selling  prices were  based,  generally,  on the normal  terms given to domestic
distributors.  In addition,  the Company and Canon have entered into  agreements
providing  for  confidential  exchanges of certain  technology.  The Company has
received  royalty payments from Canon under certain of those  agreements,  which
payments,  in the  aggregate,  are not  material.  In addition,  the Company has
entered into certain research and development  contracts with Canon, pursuant to
which the Company has received funding.  See "Certain  Relationships and Related
Transactions" later in this Proxy Statement.


                             Executive Compensation

     The following table contains  information  concerning the cash compensation
paid or to be paid by the Company, as well as certain other compensation paid or
accrued,  during the fiscal years indicated,  to the Chief Executive  Officer of
the Company  during the 1995  fiscal year and the other most highly  compensated
executive  officers of the Company ("named  executives") whose cash compensation
exceeded  $100,000  for the  year  ended  June 30,  1995,  for  services  in all
capacities to the Company.

                                       -7-

<PAGE>

<TABLE>
<CAPTION>
                                                     Summary Compensation Table

                                                                                                      Long-Term
                                                       Annual Compensation                          Compensation
                                                       -------------------                          ------------
Name                                                                                Other (1)                          All(2)(3)
& Principal Position                                                                 Annual           Number of         Other
Held During Fiscal 1995                  Year        Salary           Bonus       Compensation      Stock Options   Compensation
- -----------------------                  ----        ------           -----       ------------      -------------   ------------
<S>                                      <C>        <C>              <C>             <C>                <C>             <C>    
Gary K. Willis                           1995       $186,923         $45,600         $10,800            45,000          $ 5,900
President and Chief Executive            1994       $175,673         $35,000         $ 7,200            15,000          $ 4,680
Officer, Director                        1993       $168,942         $     0         $ 7,200             7,500     (4)  $ 9,600

Mark J. Bonney                           1995       $133,742         $32,400         $10,800            30,000          $ 4,573
Vice President, Finance and              1994       $126,946         $25,600         $ 7,200            10,500          $ 2,579
Administration, Treasurer,          (5)  1993       $ 41,292         $ 5,000         $ 2,400            22,500     (6)  $15,526
Chief Financial Officer

Carl A. Zanoni                           1995       $153,317         $37,080         $10,800            30,000          $ 5,816
Vice President, Research,                1994       $146,263         $29,500         $ 7,200            10,500          $ 4,300
Development and Engineering,             1993       $138,338         $ 5,000         $ 7,200             7,500          $ 4,581
Director
</TABLE>


     (1)  Amounts paid as automobile allowances.

     (2)  Includes aggregate amounts of $4,100, $2,974 and $4,023 in fiscal 1995
          and $2,808,  $1,000 and $2,481 in fiscal 1994 paid or  contributed  on
          behalf of Messrs. Willis, Bonney and Zanoni, respectively,  and $1,000
          and  $2,828 in fiscal  1993 paid or  contributed  on behalf of Messrs.
          Willis  and  Zanoni,   respectively,   under  the  Company's   Defined
          Contribution Profit Sharing Plan.  Contributions made under the profit
          sharing component of the Plan are determined  annually by the Board of
          Directors, based on each employee's compensation, and vest at the rate
          of 20% per year of service to the Company.  Employees are fully vested
          in  contributions  made in the  discretion  of the  Company  under the
          401(k) component of the Plan.

     (3)  Includes $1,800,  $1,599 and $1,793 in fiscal 1995, $1,872, $1,579 and
          $1,819 in fiscal 1994 and  $1,872,  $526 and $1,753 in fiscal 1993 for
          Messrs.  Willis,  Bonney and Zanoni,  respectively,  representing  the
          value of life insurance provided to the named executives.

     (4)  Includes $6,728 of relocation costs paid on behalf of Mr. Willis.

     (5)  Mr. Bonney joined the Company on March 1, 1993.

     (6)  Includes $15,000 paid to Mr. Bonney for relocation expenses.

                                       -8-

<PAGE>

<TABLE>
<CAPTION>
                                                  Option Grants in Last Fiscal Year


                                                                                                  Potential Realized Value
                                              % of                                               At Assumed Annual Rates of
                                          Total Options                                           Stock Price Appreciation
                                           Granted to                                                For Option Term
                           Options         Employees       Exercise Price   Expiration          ----------------------------
Name                     Granted (1)     in Fiscal Year     Per Share (2)      Date                5%                 10%
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                        <C>              <C>                <C>            <C>               <C>                <C>     
Gary K. Willis             45,000           20.83%             $4.00          8/24/04           $113,201           $286,874

Mark J. Bonney             30,000           13.89%             $4.00          8/24/04           $ 75,467           $191,249

Carl A. Zanoni             30,000           13.89%             $4.00          8/24/04           $ 75,467           $191,249
</TABLE>

     (1)  Options vest ratably over four years on the  anniversary of the grant.
          In connection  with the issuance of these  options,  option grants for
          the  next  two  years  were  foregone.   See   "Committee   Report  to
          Stockholders -- 1995 Compensation to Chief Executive Officer" later in
          this Proxy Statement.

     (2)  The exercise price of all options granted during fiscal 1995 was equal
          to the market value of the  underlying  Common Stock on the day of the
          grant.


<TABLE>
<CAPTION>
                                           Aggregated Option Exercises in Last Fiscal Year
                                                  and Fiscal Year-End Option Values

                                                                          Number of                     Value of Unexercised
                                                                   Unexercised Options at               In-the-Money Options
                                                                        June 30, 1995                   at June 30, 1995 (1)
                                                              ----------------------------------------------------------------------
                         Shares Acquired        Value
Name                       on Exercise         Realized       Exercisable        Unexercisable     Exercisable       Unexercisable
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                             <C>                <C>           <C>                <C>            <C>                <C>       
Gary K. Willis                  0                  0             41,250             71,250         $  730,001         $1,307,501

Mark J. Bonney                  0                  0             11,625             51,375         $  221,066         $  959,442

Carl A. Zanoni                  0                  0             26,325             43,425         $  508,982         $  806,089
</TABLE>

     (1)  Zygo  Corporation  Common  Stock  price  at June 30,  1995 was  $22.50
          (adjusted  for the  effect  of the 3 for 2  stock  split  referred  to
          earlier in this Proxy Statement).

                                       -9-

<PAGE>

                        Committee Report to Stockholders

     The report of the Compensation  Committee shall not be deemed  incorporated
by  reference by any general  statement  incorporating  by reference  this proxy
statement  into any filing  under the  Securities  Act of 1933,  as amended (the
"Securities Act"), or under the Securities Exchange Act of 1934, as amended (the
"Exchange Act"), except to the extent that the Company specifically incorporates
this  information  by  reference,  and shall not otherwise be deemed filed under
such Acts.

     The Compensation Committee is comprised of three non-employee directors. As
members of the Compensation Committee, it is our responsibility to determine the
most  effective  total  executive  compensation  strategy based on the Company's
business and consistent with stockholders' interests. Our specific duties entail
reviewing the Company's compensation practices and recommending compensation for
executives and key employees.


Compensation Philosophy

     The Company  believes  that a strong,  explicit  link should exist  between
executive compensation and the value delivered to stockholders.  This belief has
been adhered to by  developing  both  short-term  and  long-term  incentive  pay
programs which provide competitive  compensation and mirror Company performance.
The  overall  objectives  of this  strategy  are to attract  and retain the best
possible  executive  talent,  to motivate these  executives to achieve the goals
inherent in the Company's strategy,  to link executive and stockholder interests
through equity-based plans and to provide a compensation package that recognizes
individual contributions as well as overall business results.

     Pay Mix and Measurement.  The Company's executive  compensation is based on
three components,  base salary, short-term incentives, and long-term incentives,
each of which is  intended  to serve the  overall  compensation  philosophy.  In
awarding salary increases and bonuses, the Compensation Committee did not relate
the various  elements of  corporate  performance  to each  element of  executive
compensation.   Rather,  the  Compensation   Committee  considered  whether  the
compensation  package as a whole  adequately  compensated each executive for the
Company's performance and an executive's contribution to such performance.

     Base Salary. Base salaries for executive officers are initially  determined
by evaluating  the  responsibilities  of the position held and the experience of
the individual,  and by reference to the  competitive  marketplace for executive
talent,  including a comparison  to base  salaries for  comparable  positions at
other companies.  Annual salary adjustments are determined by evaluating overall
Company  performance and the  performance of each executive  officer taking into
account new responsibilities.  Individual  performance ratings take into account
such factors as  achievement  of the operating  plan and  attainment of specific
individual objectives.

                                      -10-

<PAGE>

     Short-Term  Incentives.  At the start of each fiscal year, target levels of
financial performance are established by senior management of the Company during
the budgeting process and approved by the Board of Directors. An incentive award
opportunity  is established  for each employee based on the employee's  level of
responsibility,   potential  contribution,  the  success  of  the  Company,  and
competitive considerations.

     The  employee's  actual award is  determined  at the end of the fiscal year
based on the Company's achievement of its pretax profit and revenue goals and an
assessment of the employee's individual performance,  including contributions in
a number of specific areas, such as quality, customer satisfaction,  innovation,
and  efficiency.  All  awards  made to senior  executives  are  approved  by the
Compensation Committee.

     Long-Term Incentives. Stock options are granted from time to time to reward
key employees'  contributions.  The grant of options is based primarily on a key
employee's  potential  contribution to the Company's  growth and  profitability.
Options are granted at the prevailing market value of the Company's Common Stock
and will only have value if the  Company's  stock  price  increases.  Generally,
grants  of  options  vest in  equal  amounts  over  four or five  years  and the
individual must continue to be employed by the Company for such options to vest.
All option grants are approved by the Non-Qualified Plan Committee.


1995 Compensation to Chief Executive Officer

     The compensation of Mr. Willis, the Chief Executive Officer of the Company,
has been determined and adjusted on the same basis as used for all executives as
described  above.  During  fiscal 1995,  Mr.  Willis  received  salary  payments
totaling $186,923, a 6.4% increase over that received in fiscal 1994. Mr. Willis
voluntarily  froze his base  compensation in fiscal 1994, and did not accept his
total  contractual  salary of $175,000 in fiscal 1993.  Mr. Willis also earned a
$45,600  bonus  under the  Company's  Management  Incentive  Plan for  attaining
certain  predetermined  financial  and  nonfinancial  objectives in fiscal 1995.
During  fiscal  1995,  Mr.  Willis was granted  non-qualified  stock  options to
purchase 45,000 shares of the Company's  Common Stock in line with the Company's
long-term incentive program whereby stock options are granted as an incentive to
certain key employees. The Non-Qualified Plan Committee, in order to incentivize
management to aggressively  pursue increased  shareholder  value,  determined to
grant  options to senior  management,  including  Mr.  Willis,  for an increased
number of shares of Common Stock in fiscal 1995,  and to forgo option  grants to
these  individuals  for the next two  years.  See  "Other  Agreements  and Other
Matters" later in this Proxy Statement.

     The Compensation  Committee believes that linking executive compensation to
corporate  performance  results  in a  better  alignment  of  compensation  with
corporate  business goals and stockholder value. As performance goals are met or
exceeded, resulting in increased value to stockholders,  executives are rewarded

                                      -11-

<PAGE>

commensurately.  The Compensation  Committee  believes that compensation  levels
during 1995 adequately reflect the Company's compensation goals and policies.

                                         COMPENSATION COMMITTEE

                                         Michael R. Corboy

                                         Seymour E. Liebman

                                         Robert G. McKelvey


                                Performance Graph

     The Stock Price Performance graph below shall not be deemed incorporated by
reference  by any  general  statement  incorporating  by  reference  this  proxy
statement  into any filing under the  Securities  Act or under the Exchange Act,
except to the extent the Company  specifically  incorporates this information by
reference, and shall not otherwise be deemed filed under such Acts.

     The graph below compares  cumulative  total return of the Company's  Common
Stock with the  cumulative  total  return of (i) the NASDAQ  Stock Market - U.S.
Index and (ii) an  industry  peer  group  index (the  "Peer  Index").  The graph
assumes  $100 was  invested  on July 1, 1990,  in each of the  Company's  Common
Stock, the stocks comprising the NASDAQ Index and the stocks comprising the Peer
Index,  and the  reinvestment of dividends.  The industry peer group consists of
companies included by NASDAQ in the Company's principal SIC Code Classification,
namely SIC Code No. 3832.

        [THE TABLE BELOW WAS REPRESENTED IN THE PRINTED BOOK AS A GRAPH]

               COMPARISON OF FIVE YEAR CUMULATIIVE TOTAL RETURN*
  AMONG ZYGO CORPORATION, THE NASDAQ STOCK MARKET -- US INDEX AND A PEER GROUP

Date      ZYGO CORPORATION         PEER GROUP          NASDAQ STOCK MARKET -- US
- ----      ----------------         ----------          -------------------------
6/90            100                   100                        100
6/91            150                   125                        106
6/92            105                   107                        127
6/93            125                    86                        160
6/94            118                    67                        162
6/95            614                   132                        215

*  $100 INVESTED ON 06/30/90 IN STOCK OR INDEX --
   INCLUDING REINVESTMENT OF DIVIDENDS.
   FISCAL YEAR ENDING JUNE 30.


                       Other Agreements and Other Matters

     In March  1995,  Mr.  Willis's  employment  agreement  with the Company was
amended,  effective  October 1994, to increase the annual salary  payable to Mr.
Willis to  $190,000  from  $175,000,  and to  increase  the  monthly  automobile
allowance from $600 to $900.  The amendment  further  automatically  extends the
term of the employment agreement for successive one year periods,  unless either
the Company or Mr. Willis gives the other notice of termination at least 30 days
prior to the end of that  contract  year,  and  provides  for certain  severance
payments.

     The amended  employment  agreement grants to Mr. Willis a severance package
to cover him in the event the  Company terminates his employment (other than for

                                      -12-

<PAGE>

justifiable cause, disability, or death) with the Company. Under the package, he
would  be  provided  with  his base  salary  from  the  time of his  involuntary
termination  to 12 months  thereafter.  In  addition,  in the  event Mr.  Willis
resigns within 90 days of a "Change in Control," as defined, of the Company, the
amendment  provides  for the  continued  payment  of Mr.  Willis'  salary  for a
one-year  period.  This  amended  severance  coverage  is in addition to (i) the
automatic vesting of all stock options to purchase shares of the Company's stock
then held by Mr. Willis and (ii) the continuation, for a period of the lesser of
three years or until covered by another plan, of all existing health  insurance,
dental coverage, life insurance, AD&D, and long-term disability coverage then in
effect for Mr.  Willis  (provided  that  during the  applicable  period in which
benefits  are  being  paid by the  Company,  Mr.  Willis  agrees to  maintain  a
consulting  relationship  with the Company which will not  interfere  with other
obligations of Mr. Willis),  previously provided for in the event of a Change in
Control in the Company.

     In August 1993, the Company entered into a Services  Agreement with each of
Paul F. Forman and Sol F. Laufer,  a former Vice  President of the Company and a
beneficial  owner of greater than five percent of the  Company's  Common  Stock,
providing  for the retention of Mr. Forman or Mr.  Laufer,  respectively,  as an
executive  officer of the  Company  through  the end of the 1994 fiscal year and
thereafter as a consultant to the Company for an additional  five years,  in the
case of Mr.  Forman,  and an  additional  four years in the case of Mr.  Laufer.
Pursuant to his Agreement,  Mr. Forman  received salary payments of $148,271 for
the year of employment, a one-time payment of $149,500 upon his termination from
active  employment,  and will receive a $20,000  retainer for board  service for
each of the five years of his  consultancy  plus 80%,  60%,  40%, and 20% of his
salary at June 30,  1994,  for each of the  first  through  fourth  years of his
consultancy, respectively. Pursuant to his Agreement, Mr. Laufer received salary
payments of $133,586 for the year of employment,  a one-time payment of $135,000
upon his termination of employment,  and will receive payments of 80%, 60%, 40%,
and 20% of his  salary  at June 30,  1994,  for  each of the  four  years of his
consultancy, respectively. Each of the Services Agreements further provided that
Mr.  Forman or Mr.  Laufer,  as the case may be, would have all his  outstanding
unvested  stock options from the Company  vested  effective at the conclusion of
the fiscal year ended June 30, 1994  (options for 20,475  shares of Common Stock
in the case of Mr.  Forman and 24,487  shares of Common Stock in the case of Mr.
Laufer,  as of June 30, 1994).  The Agreements are terminable  (with all payment
obligations thereunder terminating) by Mr. Forman or Mr. Laufer, as the case may
be, at any time,  and by the Company upon the death or  disability of Mr. Forman
or Mr. Laufer or for justifiable  cause (as defined in the  Agreements);  except
that if an Agreement  terminates  as a result of the death or  disability of Mr.
Forman or Mr. Laufer,  he (or his estate) will be entitled to receive the lesser
of twice his June 30,  1994,  salary  or the  aggregate  remaining  compensation
payments otherwise required to be made under the Agreement.

     The Services  Agreements,  which contain certain restrictions on soliciting
employees and others and are coexistent with certain Non-Competition  Agreements
between Mr.  Forman or Mr. Laufer and the Company,  replace the  Confidentiality

                                      -13-

<PAGE>

and Non-Competition Agreements, dated October 25, 1983, entered into between Mr.
Forman and Mr.  Laufer and the Company.  Pursuant to these  Confidentiality  and
Non-Competition  Agreements,  upon the involuntary termination of his employment
by the Company without cause,  Mr. Forman or Mr. Laufer was entitled to receive,
for each of the five years from the  termination  of his  employment,  an amount
equal to the highest annual compensation  (salary plus bonus) received by him at
any time during  that  termination  year or any of the three  years  immediately
preceding  his  termination,  increasing  each of the five  years by 12% or,  if
greater, the consumer price index increase for that year.


                 Certain Relationships and Related Transactions

     Canon Sales Co.,  Inc.,  a  subsidiary  of Canon,  serves as the  exclusive
distributor of the Company's  products in Japan.  (See  "Compensation  Committee
Interlocks and Insider  Participation"  earlier in this Proxy  Statement.) Canon
does not  manufacture or sell  interferometers  which compete with the Company's
products.  Canon has  advised  the Company  that it does not  presently  plan to
manufacture  or sell  interferometers  which would  compete  with the  Company's
current products.

     On November 30,  1993,  in  connection  with the  termination  of a certain
Stockholders'  Agreement,  Canon,  Wesleyan University,  Paul F. Forman, Carl A.
Zanoni,  Sol F.  Laufer,  and the Company  entered  into a  Registration  Rights
Agreement. In general, the Registration Rights Agreement grants to each of these
stockholders  the right,  until  November 30, 1998, to have his or its shares of
Common  Stock  included  in any  registered  public  offering  of the  Company's
securities.


                             Principal Stockholders

     The only  stockholders who, as of August 31, 1995, have advised the Company
that they  beneficially  own  (because  of sole or shared  voting or  investment
power)  more than 5% of the  Company's  outstanding  Common  Stock are set forth
below. Such beneficial owners have sole voting and investment power with respect
to the shares of Common  Stock shown as owned by them,  except for shares  which
can be acquired by the exercise of options.

                                                                  Percent of
Name and Address                          Number of Shares       Common Stock
- --------------------------------------------------------------------------------
Canon Inc.                                   786,000                20.0%
Shinjuku Dai-Ichi Seimei Building
Tokyo 160, Japan

                                      -14-

<PAGE>

                                                                  Percent of
Name and Address                          Number of Shares       Common Stock
- --------------------------------------------------------------------------------
Wesleyan University                          397,500                10.1%
Middletown, Connecticut 06457

Paul F. Forman                               273,060(1)              6.9%
15 Flying Point Road
Stony Creek, Connecticut 06405

Sol F. Laufer                                213,810(2)              5.4%
730 Arbutus Street
Middletown, Connecticut 06457

Carl A. Zanoni                               289,110(3)              7.3%
99 Long Hill Road
Middlefield, Connecticut 06457

     (1)  Includes  options to purchase  39,000 shares of Common Stock which are
          exercisable within 60 days.

     (2)  Includes  options to purchase  45,750 shares of Common Stock which are
          exercisable within 60 days.

     (3)  Includes  options to purchase  36,450 shares of Common Stock which are
          exercisable within 60 days.


                Proposal No. 2 - Adoption of an Amendment to the
                 Company's Restated Certificate of Incorporation

     The Board of Directors has approved and recommends that the stockholders of
the Company  approve an amendment to Article  FOURTH of the  Company's  Restated
Certificate  of  Incorporation   (the  "Charter")  to  increase  the  number  of
authorized  shares of Common Stock from 10,000,000 to 15,000,000  shares. Of the
10,000,000  shares of Common Stock presently  authorized,  3,933,886 shares have
been  issued  and are  outstanding  as of  September  22,  1995.  An  additional
1,275,000   shares  in  the  aggregate  are  reserved  for  issuance  under  the
Non-Qualified Plan and the Zygo Corporation  Non-Employee  Director Stock Option
Plan  (1,725,000  shares in the aggregate in the event Proposal No. 3 is adopted
by the stockholders).

     The additional  shares of Common Stock would be available for issuance from
time to time,  as  determined by the Board of  Directors,  for  acquisitions  of
properties or securities of other  companies,  employee  benefit  plans,  equity
financings, stock dividends or splits, and other general corporate purposes. The
Company  has in the past  sought and  continues  to  actively  seek  acquisition
candidates  intended to increase  stockholder values of the Company.  Several of
the proposed  acquisitions  reviewed by the Company contemplated the issuance of

                                      -15-

<PAGE>

the Company's Common Stock as partial consideration for the acquired businesses.
The Board of Directors  therefore considers it important that the Company have a
sufficient number of authorized  shares available for possible  acquisitions and
other corporate purposes. No further action or authorization by the stockholders
would be necessary  prior to the issuance of additional  shares unless  required
for a particular  transaction by applicable law or regulatory agencies or by the
rules of any  stock  exchange  on which  the  Company's  securities  may then be
listed.  Stockholders  of the  Company  have no  preemptive  rights to  purchase
additional shares when issued.

     Accordingly,  the Board of Directors  has adopted and  recommends  that the
stockholders approve the following resolution:

          RESOLVED,   that  the   Certificate  of   Incorporation   of  the
     Corporation  be amended to  authorize  the  issuance  of up to Fifteen
     Million (15,000,000) shares of Common Stock, so that Article Fourth of
     the  Corporation's   Certificate  of  Incorporation  be  amended  (the
     "Amendment") to read in its entirety as follows:

               "FOURTH:  The total number of shares of stock which the
          corporation shall have authority to issue is Fifteen Million
          (15,000,000).  The par  value of each of such  shares is Ten
          Cents  ($.10).  All such  shares  are of one  class  and are
          shares of Common Stock."

     Although  not a factor in the Board of  Directors'  decision to propose the
amendment,  one of the effects of the  amendment to the Charter may be to enable
the Board to render more difficult or to discourage an attempt to obtain control
of the Company,  since the issuance of these additional  shares could be used to
dilute the stock  ownership  of persons  seeking to obtain  control or otherwise
increase the cost of obtaining control of the Company. As of September 22, 1995,
the Company's  executive officers and directors,  through their affiliation with
certain  stockholders,  may be deemed to beneficially own approximately 53.9% of
the then outstanding shares of Common Stock.


Vote Required.

     The  affirmative  vote of the holders of a majority of the shares of Common
Stock outstanding and entitled to vote at the Annual Meeting is required for the
adoption of the proposed  amendment to the  Company's  Restated  Certificate  of
Incorporation.

     The Board of Directors  deems Proposal No. 2 to be in the best interests of
the Company and its stockholders and recommends that the stockholders vote "FOR"
the approval thereof.


           Proposal No. 3 - Adoption of an Amendment to the Company's

                                      -16-

<PAGE>

              Amended and Restated Non-Qualified Stock Option Plan

     By unanimous  written consent on September 17, 1992, the Board of Directors
adopted, subject to stockholder approval, the Amended and Restated Non-Qualified
Stock Option Plan. The  Non-Qualified  Plan, as presently in existence,  permits
the  granting  of options to  purchase  an  aggregate  of 975,000  shares of the
Company's  Common  Stock to present or future key  employees of the Company or a
subsidiary  of the Company and to directors of the Company,  whether or not they
are  employees  of the  Company.  A "key  employee"  is defined as an officer or
employee who has substantial  responsibility  in the direction and management of
the Company or any division,  branch or subsidiary of the Company.  The Board of
Directors has unanimously adopted, subject to stockholder approval, an amendment
to the  Non-Qualified  Plan which would  increase the number of shares of Common
Stock which may be issued thereunder from 975,000 shares to 1,425,000 shares. As
of September 1, 1995, the number of shares available for future grants under the
Non-Qualified Plan was 43,170.

     The Board of Directors  believes that approval of the amendment to increase
the number of shares which may be issued under the Non-Qualified Plan will serve
the best  interests  of the  Company  and its  stockholders  by  permitting  the
Non-Qualified   Plan   Committee   to  exercise   needed   flexibility   in  the
administration of the Non-Qualified Plan and the granting of options thereunder.
In addition,  the Board  believes that the ability to grant  additional  options
will help  attract,  motivate and retain key  employees who are in a position to
contribute to the successful  conduct of the business and affairs of the Company
as well as stimulate in such  individuals an increased  desire to render greater
service to the Company.

     The  Non-Qualified  Plan is  administered  by a  committee  of at least two
members  of the  Board of  Directors,  chosen  by the  Board of  Directors.  The
Committee  presently  consists of Messrs.  Corboy,  Liebman and  McKelvey.  Each
member of the Committee must be a "disinterested  person" in accordance with the
applicable provisions of Rule 16b-3, which requires, among other things, that no
member of the  Committee  may  receive an option  under the  Non-Qualified  Plan
within  one year  prior to his  becoming  a member or at any time  while he is a
member.  Subject to the provisions of the  Non-Qualified  Plan the Committee has
the  authority  to  determine  the  individuals  to whom stock  options  will be
granted,  the number of shares to be covered by each option,  the option  price,
the  option  period,  the  vesting  restrictions,  if any,  with  respect to the
exercise of the option, and other terms and conditions.

     The terms and  conditions of each option  granted  under the  Non-Qualified
Plan must be set forth in a Stock Option  Agreement issued by the Company to the
optionee.  Any such Stock  Option  Agreement  must include  certain  provisions,
including that (i) the full purchase price of shares  purchased under the option
will be paid upon  exercise  thereof,  (ii) the option expire not later than ten
years from the date the option is granted,  or prior  thereto,  if the  optionee
ceases to be employed by the Company or a subsidiary  thereof (otherwise than by
reason of the optionee's  death) unless extended by the Committee  acting in its

                                      -17-

<PAGE>

sole  discretion  (provided  that no such  extension  shall  result in an option
having a term  greater  than ten  years),  and  (iii)  the  option  shall not be
transferrable  other than by will or by the laws of descent and distribution and
is exercisable during the lifetime of the optionee only by him or her.

     The Board may amend or terminate the Non-Qualified  Plan, provided that any
amendment which would increase the aggregate number of shares of Common Stock as
to  which  options  may  be  granted  under  the   Non-Qualified   Plan  (except
anti-dilution   adjustments),   materially   increase  the  benefits  under  the
Non-Qualified  Plan, or modify the class of persons  eligible to receive options
under  the  Non-Qualified   Plan  shall  be  subject  to  the  approval  of  the
stockholders.  No option  may be  granted  under the  Non-Qualified  Plan  after
September 2, 1997.

     The table below  indicates stock options which have been granted during the
1995 fiscal year under the  Non-Qualified  Plan to (i) each person  named in the
Summary  Compensation Table appearing earlier in this Proxy Statement,  (ii) all
current  executive  officers  of the  Company  as a  group,  (iii)  all  current
directors  of the  Company  who are not  executive  officers of the Company as a
group and (iv) all employees of the Company,  including all current  officers of
the Company who are not executive officers of the Company, as a group:


                         Non-Qualified Stock Option Plan
                       Benefits Granted During Fiscal 1995

Name and Position                     Dollar Value ($)      Number of Shares
- -----------------                     ----------------      ----------------
Gary K. Willis
President and Chief
Executive Officer, Director                  $0                  45,000

Mark J. Bonney                                       
Vice President, Finance                              
and Administration,                                  
Treasurer, Chief Financial                           
Officer                                       0                  30,000

Carl A. Zanoni                                       
Vice President, Research,                            
Development and                                      
Engineering, Director                         0                  30,000

Executive Officers as a                              
Group                                         0                 105,000

Non-Executive Officer                                
Director Group                                0                       0

                                      -18-

<PAGE>

Name and Position                     Dollar Value ($)      Number of Shares
- -----------------                     ----------------      ----------------
Non-Executive Officer                                
Employee Group                                0                 219,000



Federal Income Tax Consequences

     An optionee does not realize taxable income upon the grant of an option. In
general,  an optionee  realizes  ordinary  income  when the option is  exercised
(assuming  the  stock  acquired  is either  transferrable  or not  subject  to a
substantial  risk of  forfeiture)  equal to the excess of the value of the stock
over the exercise price (i.e.,  the option spread),  and the Company  receives a
corresponding  deduction if applicable withholding  requirements are met. (If an
option  is  exercised  within  six  months  after  the date of grant  and if the
optionee is subject to the six-month  restrictions on sale of Common Stock under
Section 16(b) of the  Securities  Exchange Act of 1934,  the optionee  generally
recognizes  ordinary income on the date the restrictions  lapse, unless an early
income  recognition  election  is made.)  Upon a later  sale of the  stock,  the
optionee  realizes  capital  gain or loss equal to the  difference  between  the
selling  price and the value of the stock at the time the option  was  exercised
(or, if later,  the time  ordinary  income was  recognized  with  respect to the
exercise.)

     Accordingly,  the  Board of  Directors  recommends  that  the  stockholders
approve the following resolution:

          RESOLVED,  that the total  number of shares of the  Corporation's
     Common Stock which may be issued under the  Corporation's  Amended and
     Restated  Non-Qualified  Stock Plan (the  "Non-Qualified  Stock Plan")
     shall be increased to 1,425,000  shares, so that the first sentence of
     Section 2 of the Plan be amended to read in its entirety as follows:

          "Except  as  otherwise  permitted  pursuant  to  paragraph 6
          hereof,  the total number of shares of the Company's  Common
          Stock,  par value $.10 per share,  which may be issued under
          the  Non-Qualified  Plan shall not exceed  1,425,000  (after
          giving effect to the three for two stock split authorized by
          the  Company's  Board of Directors on July 20, 1995) and may
          be authorized  and unissued  shares or issued and reacquired
          shares,  as the  Board of  Directors  may from  time to time
          determine."


Vote Required

     The  affirmative  vote of the holders of a majority of the shares of Common
Stock of the Company present or represented by proxy and entitled to vote at the
Annual  Meeting is required for the  adoption of the  proposed  amendment to the
Non-Qualified Plan.

                                      -19-

 
<PAGE>

     The Board of Directors  deems Proposal No. 3 to be in the best interests of
the Company and its stockholders and recommends that the stockholders vote "FOR"
the approval thereof.


                      PROPOSAL NO. 4 - Indemnity Agreements
                           with Directors and Officers

     The Board of Directors has unanimously approved a proposal to authorize the
Company to enter into Indemnity  Agreements  ("Indemnity  Agreements")  with its
directors and officers.  The Board of Directors  believes that it is in the best
interests  of  the  Company  and  its   stockholders   to  provide  the  maximum
indemnification allowed by law to its directors and officers. The directors have
a direct personal  interest in the approval of the form of Indemnity  Agreements
and in any potential  payments under the Indemnity  Agreements  arising from any
judgment or  settlement  of a derivative  suit.  The full text of the  Indemnity
Agreement, in substantially the form the Company proposes to enter into with its
directors and  officers,  is attached as Appendix A.  Stockholders  are urged to
read the  provisions of the proposed  form of Indemnity  Agreement in Appendix A
and the  following  discussion  of the  Indemnity  Agreements  is  qualified  by
reference thereto.


Description and Effect of Indemnity Agreements

     Section  145  of the  Delaware  General  Corporation  Law  provides  that a
director,  officer,  employee or agent of a corporation (i) shall be indemnified
by the  corporation for all expenses of such litigation when he is successful on
the  merits,  (ii)  may be  indemnified  by the  corporation  for the  expenses,
judgments, fines and amounts paid in settlement of such litigation (other than a
derivative suit) even if he is not successful on the merits, if he acted in good
faith and in a manner he reasonably believed to be in or not opposed to the best
interests of the corporation (and in the case of a criminal  proceeding,  had no
reason to believe his conduct was  unlawful),  and (iii) may be indemnified by a
corporation for expenses of a derivative suit (a suit by a stockholder  alleging
a breach by a director or officer of a duty owed to the corporation), even if he
is not  successful  on the  merits,  if he  acted in good  faith in a manner  he
reasonably  believed  to be in or not  opposed  to  the  best  interests  of the
corporation,  provided  that no such  indemnification  may be made in accordance
with clause (iii) if he is adjudged  liable to the  corporation,  unless a court
determines that, despite such adjudication but in view of all the circumstances,
he is entitled to indemnification. The indemnification described in clauses (ii)
and (iii)  above may be made only upon  determination,  by (i) a  majority  of a
quorum of disinterested  directors,  (ii) independent legal counsel or (iii) the
stockholders,  that indemnification is proper because the applicable standard of
conduct  has been met.  A  corporation  may  advance  litigation  expenses  to a
director or officer prior to the final  disposition  of such action upon receipt
of an  undertaking  by such  director or officer to repay such expenses if it is
ultimately  determined  that he is not  entitled  to be  indemnified  for  them.
Section 145 also provides that the  indemnification  and advancement of expenses
provided by that Section are not  exclusive of any other rights to which persons

                                      -20-

<PAGE>

seeking  indemnification  or  advancement  of expenses may be entitled under any
by-law, agreement, vote of stockholders or disinterested directors or otherwise.

     The  statutory  indemnification  scheme set forth in Section  145 has three
major limitations which are addressed by the Indemnity Agreements: (i) it is not
clear  that a  director  or  officer  may be  indemnified  for  amounts  paid in
settlement  of a derivative  action;  (ii) the Company is under no obligation to
advance litigation  expenses to a director or officers;  and (iii) except in the
case of  litigation  in which a director or officer is successful on the merits,
indemnification of a director or officer is discretionary rather than mandatory.

     The Indemnity Agreements are based on the indemnification  scheme set forth
in Section 145 of the Delaware General  Corporation Law, with certain changes or
additions. The principal changes or additions are as follows:

          First,  the Indemnity  Agreements  establish the presumption that
     the  director  or officer has met the  applicable  standard of conduct
     required for indemnification.  Indemnification will be made unless the
     Board  of  Directors  or  independent   counsel  determines  that  the
     applicable standard of conduct has not been met.

          Second, the Indemnity Agreements provide that litigation expenses
     shall be advanced  to a director  or officer at his  request  provided
     that he  undertakes  to repay the amount  advanced if it is ultimately
     determined  that  he is  not  entitled  to  indemnification  for  such
     expense.

          Third,  the  Indemnity  Agreements  explicitly  provide  that the
     indemnification  provisions  applicable  to a  derivative  suit  cover
     amounts paid in settlement.

          Fourth, in the event of a determination by the Board of Directors
     or  independent  legal counsel that a director or officer did not meet
     the standard of conduct  required for  indemnification,  the Indemnity
     Agreements   allow  such   director   or   officer  to  contest   this
     determination   by   petitioning  a  court  to  make  an   independent
     determination  of whether  such  director  or officer is  entitled  to
     indemnification under the Indemnity Agreements.

          Fifth, the Indemnity  Agreements  explicitly  provide for partial
     indemnification  of costs and expenses in the event that a director or
     officer is not entitled to full indemnification under the terms of the
     Indemnity Agreement.

          Finally, no indemnification  will be provided under the Indemnity
     Agreements  if: (i) a final court  adjudication  determines  that such

                                    -21-

<PAGE>

     indemnification  is  not  lawful  or  the  indemnitee's   conduct  was
     knowingly  fraudulent,  deliberately  dishonest or constituted willful
     misconduct,  (ii) in respect of any suit in which judgment is rendered
     against  the  indemnitee  for an  accounting  of  profits  made from a
     purchase or sale of  securities of the Company in violation of Section
     16(b) of the  Securities  Exchange  Act of 1934 (the "1934 Act") or of
     any similar statutory  provision,  or (iii) in connection with certain
     actions  by the  indemnitee  against  the  Company  or its  directors,
     officers  or  employees.   The  Indemnity   Agreements   also  contain
     provisions   designed  to  protect  the  Company   from   unreasonable
     settlements or redundant legal expenditures.

     The SEC  takes the  position  that  indemnification  of  directors  against
violations  of  the  Securities  Act  of  1933  is  against  public  policy  and
unenforceable,  and any time the Company  registers  securities  with the SEC it
must  execute  an  undertaking  to submit to a court any  indemnification  claim
arising with respect to the registered  securities for a  determination  whether
the clause is enforceable and to be bound by the court's decision.  Accordingly,
any claim made by an  indemnitee  of the  Company for  indemnification  under an
Indemnity Agreement with respect to a claim subject to the Company's undertaking
to the  SEC  will  have  to be  submitted  to a court  before  a  final  payment
thereunder would be made to the indemnitee.

     By entering into Indemnity  Agreements,  directors and officers are assured
that indemnification will be provided by the Company as a contractual obligation
despite  future  changes in the By-laws or Charter of the Company.  In addition,
the execution of Indemnity Agreements will provide to directors and officers the
additional  benefits  set forth above which are not  explicitly  provided for in
Section 145 of the Delaware General  Corporation Law or in the Company's By-laws
or Charter.  The Indemnity Agreements will be applicable only to claims asserted
after  their  effective  dates.  The  Company  knows of no  recent,  pending  or
threatened litigation which might result in claims for indemnification under the
Indemnity  Agreements or which would have resulted in claims for indemnification
had the Indemnity Agreements been in effect at the time of the litigation.

     The Indemnity Agreements may have certain  disadvantages to the Company and
its  stockholders.  The  Company  currently  carries  officers'  and  directors'
liability  insurance  in the  amount of  $6,000,000.  Accordingly,  any  amounts
required to be paid under the  Indemnity  Agreements  in excess of the amount of
coverage,  will be paid out of the Company's  funds,  thus placing the Company's
assets and equity at risk and  potentially  adversely  affecting a stockholder's
investment in the Company.

     The  Board  of  Directors  is  advancing  the  proposal  on  the  Indemnity
Agreements,  and the Indemnity Agreements will be entered into, in reliance upon
that  provision  of  the  Delaware   indemnification  statute  which  authorizes
indemnification  beyond that  expressly  specified in the statute.  The Board of
Directors will designate the directors and officers of the Company with whom the
Company will enter into such Indemnity Agreements. It is expected that Indemnity
Agreements  will be  entered  into  with  each of the  Company's  directors  and

                                      -22-

<PAGE>

executive officers. If the Company's entering into Indemnity Agreements with its
directors and officers is approved,  it is anticipated  that similar  agreements
may be entered,  from time to time,  with future  directors  and officers of the
Company.


Submission to Stockholders for Approval

     Stockholder  approval  is not  required  for the  Company to enter into the
Indemnity Agreements as proposed.  The Board of Directors is seeking stockholder
approval  because the directors  would  potentially  benefit by entering into an
Indemnity  Agreement  with  the  Company.  Approval  of  this  proposal  by  the
stockholders will insulate the Indemnity Agreements against a challenge to their
legality in most instances.  However, the Indemnity Agreements may not be upheld
if a court finds fraud,  waste or other  contravention  of public  policy in the
particular circumstances.

     THE BOARD OF DIRECTORS  DEEMS PROPOSAL NO. 4 TO BE IN THE BEST INTERESTS OF
THE COMPANY AND ITS STOCKHOLDERS AND RECOMMENDS A VOTE "FOR" APPROVAL THEREOF.

     THE DIRECTORS HAVE A DIRECT  PERSONAL  INTEREST IN THE APPROVAL OF THE FORM
OF INDEMNITY AGREEMENT AT THE POTENTIAL EXPENSE OF THE COMPANY'S STOCKHOLDERS.


                Relationship With Independent Public Accountants

     KPMG Peat Marwick LLP (KPMG) has been selected as the Company's independent
auditors for fiscal 1996. A representative  of KPMG is expected to be present at
the Annual Meeting with the opportunity to make a statement if he so desires and
to be available to respond to appropriate questions.


                              Stockholder Proposals

     All  stockholder  proposals  which are intended to be presented at the 1996
Annual Meeting of Stockholders of the Company must be received by the Company no
later  than  June 13,  1996,  for  inclusion  in the Board of  Directors'  proxy
statement and form of proxy relating to that meeting.


                     Other Matters Coming Before The Meeting

     As of the date of this Proxy  Statement,  the Board of  Directors  does not
know of any matters to be  presented  to the meeting  other than the matters set
forth in the attached  Notice of Annual  Meeting.  If any other matter  properly
comes  before the meeting,  it is intended  that the holders of the proxies will

                                      -23-

<PAGE>

vote thereon in their discretion.


                                        By Order of the Board of Directors



                                        Paul Jacobs,
                                        Secretary

October 10, 1995

                                      -24-

<PAGE>

                                                                      APPENDIX A

                            INDEMNIFICATION AGREEMENT


     This INDEMNITY AGREEMENT made and entered into as of ________, 1995, by and
between  Zygo  Corporation,   a  Delaware   corporation  (the  "Company"),   and
_________________________ (the "Indemnitee");

     WHEREAS,  highly  competent  persons are becoming  more  reluctant to serve
corporations  as  directors,  officers  or in other  capacities  unless they are
provided with adequate protection through insurance and indemnification  against
inordinate risks of claims and actions against them arising out of their service
to and activities on behalf of the Company; and

     WHEREAS,  the current  difficulties  of obtaining  adequate  insurance have
increased the difficulty of attracting and retaining such persons; and

     WHEREAS,  the Board of  Directors  has  determined  that the  inability  to
attract and retain such  persons is  detrimental  to the best  interests  of the
Company's  stockholders  and that the Company  should act to assure such persons
that there will be increased certainty of such protection in the future; and

     WHEREAS, the Certificate of Incorporation and the bylaws of the Corporation
(collectively,  the "Charter  Documents") provide for the indemnification of the
officers and directors of the Corporation to the fullest extent permitted by the
General Corporation Law of the State of Delaware (the "GCL"); and

     WHEREAS,  in  recognition  of the  foregoing,  and in part to  provide  the
Indemnitee with specific  contractual  assurance that the protection promised by
such Charter Documents will be available to the Indemnitee (regardless of, among
other things,  any  amendment to or revocation of such Charter  Documents or any
change in the composition of the Corporation's Board of Directors or acquisition
of the Corporation), the Corporation wishes to provide in this Agreement for the
indemnification  of and the advancing of expenses to the  Indemnitee to the full
extent permitted by law and as set forth in this Agreement; and

     WHEREAS,  the GCL specifically  contemplates that agreements may be entered
into between the Corporation and its directors or officers with respect to their
indemnification; and

     WHEREAS,   it  is  reasonable,   prudent  and  necessary  for  the  Company
contractually to obligate itself to indemnify such persons to the fullest extent
permitted  by  applicable  law so that they will serve or  continue to serve the
Company free from undue concern that they will not be so indemnified; and

<PAGE>

     WHEREAS, the Indemnitee is willing to serve,  continue to serve and take on
additional  service for or on behalf of the Company on the condition  that he or
she be so indemnified.

     NOW,  THEREFORE,  in  consideration  of  the  premises  and  the  covenants
contained herein, the Company and the Indemnitee do hereby covenant and agree as
follows:

     SECTION 1.  Indemnification.  The Company shall indemnify the Indemnitee to
the fullest  extent  permitted by applicable law in effect on the date hereof or
to such  greater  extent as such laws may  thereafter  from time to time permit.
Without diminishing the scope of the indemnification provided by this Section 1,
the rights of indemnification of the Indemnitee provided hereunder shall include
but shall not be limited to those rights  hereinafter set forth,  except that no
indemnification shall be paid to the Indemnitee:

          (a) on account of any suit in which  judgment is rendered  against the
     Indemnitee  for an  accounting of profits made from the purchase or sale by
     the  Indemnitee of securities of the Company  pursuant to the provisions of
     Section 16(b) of the Securities Exchange Act of 1934 and amendments thereto
     or similar provisions of any federal, state or local statutory law;

          (b) on account of the  Indemnitee's  conduct which is finally adjudged
     to  have  been  knowingly  fraudulent  or  deliberately  dishonest,  or  to
     constitute willful misconduct;

          (c) to the extent expressly prohibited by applicable law;

          (d) for which payment is actually made to the Indemnitee under a valid
     and collectible insurance policy or under a valid and enforceable indemnity
     clause,  Charter  Document  or  agreement,  except in respect of any excess
     beyond payment under such insurance, clause, Charter Document or agreement;

          (e) if a final decision by a court having  jurisdiction  in the matter
     shall  determine  that such  indemnification  is not lawful  (and,  in this
     respect,  both the Company and the  Indemnitee  have been  advised that the
     Securities  and  Exchange  Commission  believes  that  indemnification  for
     liabilities  arising under the federal  securities  laws is against  public
     policy and is, therefore, unenforceable and that claims for indemnification
     should be submitted to the appropriate court for adjudication); or

          (f) in connection  with any proceeding (or part thereof)  initiated by
     the Indemnitee,  or any proceeding by the Indemnitee against the Company or
     its directors,  officers,  employees or other Indemnitees,  unless (i) such
     indemnification  is  expressly  required  to  be  made  by  law,  (ii)  the

                                       -2-

<PAGE>

     proceeding was  authorized by the Board of Directors of the Company,  (iii)
     such  indemnification  is provided by the Company,  in its sole discretion,
     pursuant to the powers vested in the Company under  applicable law, or (iv)
     except as provided in Sections 11 and 12 hereof.

     SECTION 2. Action or Proceeding  Other Than an Action by or in the Right of
the Company.  The  Indemnitee  shall be entitled to the  indemnification  rights
provided in this Section if he or she is a party or is  threatened  to be made a
party to any  threatened,  pending  or  completed  action,  suit or  proceeding,
whether civil,  criminal,  administrative or investigative in nature, other than
an action by or in the  right of the  Company,  by reason of the fact that he or
she is or was a director,  officer, employee, agent or fiduciary of the Company,
or is or was  serving at the  request of the  Company  as a  director,  officer,
employee, agent or fiduciary of any other entity, including, but not limited to,
another corporation, partnership, joint venture, trust, or by reason of anything
done or not done by him or her in any such  capacity.  Pursuant to this Section,
the Indemnitee shall be indemnified against all expenses  (including  attorneys'
fees),  costs,  judgments,  penalties,  fines  and  amounts  paid in  settlement
actually and reasonably  incurred by him or her in connection  with such action,
suit or proceeding (including, but not limited to, the investigation, defense or
appeal  thereof),  if he or she  acted in good  faith  and in a manner he or she
reasonably  believed  to be in or not  opposed  to  the  best  interests  of the
Company,  and  with  respect  to  any  criminal  action  or  proceeding,  had no
reasonable cause to believe his or her conduct was unlawful.

     SECTION 3. Actions by or in the Right of the Company.  The Indemnitee shall
be entitled to the indemnification  rights provided in this Section if he or she
is a  person  who was or is a party or is  threatened  to be made a party to any
threatened, pending or completed action, suit or proceeding brought by or in the
right of the  Company to  procure a judgment  in its favor by reason of the fact
that he or she is or was a director,  officer,  employee,  agent or fiduciary of
the  Company,  or is or was serving at the request of the Company as a director,
officer,  employee,  agent or fiduciary of another  entity,  including,  but not
limited to, another corporation, partnership, joint venture, trust, or by reason
of  anything  done or not done by him or her in any such  capacity.  Pursuant to
this  Section,   the  Indemnitee  shall  be  indemnified  against  all  expenses
(including  attorneys' fees), costs and amounts paid in settlement  actually and
reasonably  incurred  by him or her in  connection  with  such  action,  suit or
proceeding (including, but not limited to, the investigation,  defense or appeal
thereof)  if he or she acted in good faith and in a manner he or she  reasonably
believed to be in or not opposed to the best interests of the Company; provided,
however,  that no such  indemnification  shall be made in  respect of any claim,
issue,  or  matter  as  to  which   applicable  law  expressly   prohibits  such
indemnification  by reason of any adjudication of liability of the Indemnitee to
the Company,  unless and only to the extent  that,  the Court of Chancery of the
State of Delaware  or the court in which such  action or suit was brought  shall
determine upon  application  that,  despite the adjudication of liability but in
view  of all the  circumstances  of the  case,  the  Indemnitee  is  fairly  and
reasonably  entitled to indemnity  for such  expenses and costs which such court
shall deem proper.

                                       -3-

<PAGE>

     SECTION 4.  Indemnification  for Costs,  Charges and Expenses of Successful
Party.  Notwithstanding  the other  provisions of this Agreement,  to the extent
that the Indemnitee has served as a witness on behalf of the Company or has been
successful,  on the  merits or  otherwise,  in defense  of any  action,  suit or
proceeding  referred to in Sections 2 and 3 hereof,  or in defense of any claim,
issue or matter therein,  including,  without  limitation,  the dismissal of any
action  without  prejudice,  he or she shall be  indemnified  against all costs,
charges  and  expenses  (including  attorneys'  fees)  actually  and  reasonably
incurred by him in connection therewith.

     SECTION 5. Partial Indemnification. If the Indemnitee is entitled under any
provision  of this  Agreement  to  indemnification  by the Company for some or a
portion of the expenses (including attorneys' fees), costs, judgments, fines and
amounts paid in  settlement  actually and  reasonably  incurred by him or her in
connection with the investigation,  defense,  appeal or settlement of such suit,
action, investigation or proceeding described in Section 2 or 3 hereof, but not,
however,  for all of the total amount  thereof,  the Company shall  nevertheless
indemnify the Indemnitee for the portion of such expenses (including  reasonable
attorneys'  fees),  costs,  judgments,  penalties,  fines  and  amounts  paid in
settlement  actually  and  reasonably  incurred  by  him or  her  to  which  the
Indemnitee is entitled.

     SECTION 6.  Determination of Entitlement to  Indemnification.  Upon written
request by the Indemnitee for indemnification pursuant to Section 2 or 3 hereof,
the  entitlement of the Indemnitee to  indemnification  pursuant to the terms of
this Agreement shall be determined by the following  person or persons who shall
be  empowered  to make such  determination:  (a) the Board of  Directors  of the
Company by a majority vote of a quorum consisting of Disinterested Directors (as
defined in Section 17 below); (b) if such a quorum is not obtainable or, even if
obtainable,  if the Board of  Directors by the  majority  vote of  Disinterested
Directors so directs, by Independent Counsel (as defined in Section 17 below) in
a written opinion to the Board of Directors,  a copy of which shall be delivered
to the Indemnitee, or (c) by the stockholders. Such Independent Counsel shall be
selected by the Board of Directors and approved by the Indemnitee.  Upon failure
of the  Board to so select  such  Independent  Counsel  or upon  failure  of the
Indemnitee  to so approve,  such  Independent  Counsel  shall be selected by the
Chancellor of the State of Delaware or such other person as the Chancellor shall
designate  to  make  such  selection.   Such  determination  of  entitlement  to
indemnification  shall be made  not  later  than 45 days  after  receipt  by the
Company of a written  request for  indemnification.  Such request  shall include
documentation or information which is necessary for such determination and which
is  reasonably  available to the  Indemnitee.  Any costs or expenses  (including
attorneys'  fees)  incurred  by the  Indemnitee  in  connection  with his or her
request for indemnification hereunder shall be borne by the Company. The Company
hereby  indemnifies  and  agrees  to  hold  the  Indemnitee  harmless  therefrom
irrespective of the outcome of the determination of the Indemnitee's entitlement
to indemnification. If the person making such determination shall determine that
the  Indemnitee  is  entitled  to  indemnification  as part (but not all) of the
application  for  indemnification,  such person  shall  reasonably  prorate such
partial indemnification among such claims, issues or matters.

                                       -4-

<PAGE>

     SECTION 7. Presumptions and Effect of Certain Proceedings. The Secretary of
the  Company  shall,  promptly  upon  receipt of the  Indemnitee's  request  for
indemnification,  advise in writing the Board of  Directors or such other person
or persons empowered to make the determination as provided in Section 6 that the
Indemnitee has made such request for  indemnification.  Upon making such request
for  indemnification,  the  Indemnitee  shall  be  presumed  to be  entitled  to
indemnification  hereunder and the Company shall have the burden of proof in the
making of any  determination  contrary  to such  presumption.  If the  person or
persons so  empowered to make such  determination  shall have failed to make the
requested  indemnification  within 45 days after  receipt by the Company of such
request, the requisite  determination of entitlement to indemnification shall be
deemed to have been made and the Indemnitee shall be absolutely entitled to such
indemnification,   absent   actual  and  material   fraud  in  the  request  for
indemnification.   The  termination  of  any  action,  suit,   investigation  or
proceeding described in Section 2 or 3 hereof by judgment,  order, settlement or
conviction,  or upon a plea of nolo contendere or its equivalent,  shall not, of
itself:  (a) create a presumption  that the Indemnitee did not act in good faith
and in a manner which he or she  reasonably  believed to be in or not opposed to
the best interests of the Company,  and, with respect to any criminal  action or
proceeding,  that the Indemnitee had reasonable cause to believe that his or her
conduct  was  unlawful;  or (b)  otherwise  adversely  affect  the rights of the
Indemnitee to indemnification except as may be provided herein.

     SECTION 8. Advancement of Expenses and Costs.  All reasonable  expenses and
costs  incurred by the  Indemnitee  (including  attorneys'  fees,  retainers and
advances  of  disbursements  required  of the  Indemnitee)  shall be paid by the
Company in advance of the final  disposition of such action,  suit or proceeding
at the  request of the  Indemnitee  within  twenty days after the receipt by the
Company of a statement or statements from the Indemnitee requesting such advance
or advances from time to time.  The  Indemnitee's  entitlement  to such expenses
shall include those incurred in connection with any proceeding by the Indemnitee
seeking an adjudication or award in arbitration pursuant to this Agreement. Such
statement  or  statements  shall  reasonably  evidence  the  expenses  and costs
incurred  by  him or  her  in  connection  therewith  and  shall  include  or be
accompanied  by an  undertaking  by or on behalf of the Indemnitee to repay such
amount if it is ultimately  determined that the Indemnitee is not entitled to be
indemnified  against such  expenses and costs by the Company as provided by this
Agreement or otherwise.

     SECTION 9.  Remedies of the  Indemnitee  in Cases of  Determination  not to
Indemnify or to Advance Expenses. In the event that a determination is made that
the  Indemnitee is not entitled to  indemnification  hereunder or if payment has
not been timely made following a determination of entitlement to indemnification
pursuant  to  Sections 6 and 7, or if  expenses  are not  advanced  pursuant  to
Section  8, the  Indemnitee  shall be  entitled  to a final  adjudication  in an
appropriate  court of the  State of  Delaware  or any other  court of  competent
jurisdiction  of his or her  entitlement  to such  indemnification  or  advance.
Alternatively,  the  Indemnitee  at his or her  option  may  seek  an  award  in
arbitration to be conducted by a single arbitrator  pursuant to the rules of the
American  Arbitration  Association,  such  award to be made  within  sixty  days

                                       -5-

<PAGE>

following the filing of the demand for arbitration. The Company shall not oppose
the Indemnitee's  right to seek any such adjudication or award in arbitration or
any other claim.  Such judicial  proceeding or arbitration shall be made de novo
and the Indemnitee  shall not be prejudiced by reason of a determination  (if so
made) that he or she is not entitled to  indemnification.  If a determination is
made or deemed to have been made pursuant to the terms of Section 6 or Section 7
hereof that the Indemnitee is entitled to indemnification,  the Company shall be
bound  by  such   determination  and  is  precluded  from  asserting  that  such
determination   has  not  been  made  or  that  the   procedure  by  which  such
determination  was made is not  valid,  binding  and  enforceable.  The  Company
further agrees to stipulate in any such court or before any such arbitrator that
the Company is bound by all the  provisions  of this  Agreement and is precluded
from making any  assertions  to the contrary.  If the court or arbitrator  shall
determine that the Indemnitee is entitled to any indemnification  hereunder, the
Company shall pay all reasonable expenses (including  attorneys' fees) and costs
actually  incurred by the  Indemnitee in connection  with such  adjudication  or
award in arbitration (including, but not limited to, any appellant proceedings).

     SECTION 10.  Notification  and Defense of Claim.  Promptly after receipt by
the Indemnitee of notice of the commencement of any action,  suit or proceeding,
the  Indemnitee  will,  if a claim in respect  thereof is to be made against the
Company under this Agreement,  notify the Company in writing of the commencement
thereof;  but the omission to so notify the Company will not relieve it from any
liability that it may have to the Indemnitee otherwise than under this Agreement
or, to the extent such failure has not  materially  prejudiced the rights of the
Company to defend any such  claim,  under this  Agreement.  Notwithstanding  any
other  provision of this  Agreement,  with  respect to any such action,  suit or
proceeding as to which the Indemnitee  notifies the Company of the  commencement
thereof:

          (a) The Company  will be entitled  to  participate  therein at its own
     expense; and

          (b) Except as otherwise  provided in this Section 10(b), to the extent
     that it may wish, the Company,  jointly with any other  indemnifying  party
     similarly notified,  shall be entitled to assume the defense thereof,  with
     counsel  satisfactory to the  Indemnitee.  After notice from the Company to
     the  Indemnitee  of its  election  to so assume the  defense  thereof,  the
     Company shall not be liable to the Indemnitee  under this Agreement for any
     legal  or  other  expenses  subsequently  incurred  by  the  Indemnitee  in
     connection  with  the  defense  thereof  other  than  reasonable  costs  of
     investigation or as otherwise provided below. The Indemnitee shall have the
     right to employ his or her own counsel in such action,  suit or proceeding,
     but the fees and expense of such  counsel  incurred  after  notice from the
     Company of its assumption of the defense thereof shall be at the expense of
     the  Indemnitee  unless (i) the employment of counsel by the Indemnitee has
     been authorized by the Company,  (ii) the Indemnitee  shall have reasonably
     concluded that there may be a conflict of interest  between the Company and
     the  Indemnitee  in the  conduct of the defense of such action or (iii) the

                                       -6-

<PAGE>

     Company  shall not in fact have  employed  counsel to assume the defense of
     the action,  in each of which cases the fees and expenses of counsel  shall
     be at the  expense of the  Company.  The  Company  shall not be entitled to
     assume  the  defense of any  action,  suit or  proceeding  brought by or on
     behalf of the  Company  or as to which the  Indemnitee  shall have made the
     conclusion provided for in (ii) above.

          (c) The Company shall not be liable to indemnify the Indemnitee  under
     this  Agreement  for any amounts paid in  settlement of any action or claim
     effected  without its  written  consent.  The Company  shall not settle any
     action or claim in any manner that would  impose any penalty or  limitation
     on the Indemnitee  without the Indemnitee's  written  consent.  Neither the
     Company nor the Indemnitee will unreasonably  withhold their consent to any
     proposed settlement.

     SECTION  11.  Other  Rights to  Indemnification.  The  indemnification  and
advancement of expenses  (including  attorneys' fees) and costs provided by this
Agreement  shall  not be  deemed  exclusive  of any  other  rights  to which the
Indemnitee may now or in the future be entitled under any provision of a Charter
Document, agreement, vote of stockholders or Disinterested Directors,  provision
of law or otherwise.

     SECTION 12. Attorneys' Fees and Other Expenses to Enforce Agreement. In the
event that the Indemnitee is subject to or intervenes in any proceeding in which
the  validity  or  enforceability  of this  Agreement  is at  issue  or seeks an
adjudication  or award in arbitration to enforce his or her rights under,  or to
recover  damages for breach of, this  Agreement,  the  Indemnitee,  if he or she
prevails in whole or in part in such  action,  shall be entitled to recover from
the Company and shall be indemnified by the Company  against any actual expenses
for attorneys' fees and disbursements reasonably incurred by him or her.

     SECTION 13. Duration of Agreement.  This Agreement shall continue until and
terminate  upon the later of: (a) ten years after the  Indemnitee  has ceased to
occupy any of the  positions or have any  relationships  described in Sections 2
and 3 of this  Agreement;  and (b)  the  final  termination  of all  pending  or
threatened actions, suits, proceedings or investigations to which the Indemnitee
may be  subject  by  reason  of the  fact  that he or she is or was a  director,
officer, employee, agent or fiduciary of the Company or is or was serving at the
request of the Company as a director,  officer,  employee, agent or fiduciary of
any  other  entity,   including,   but  not  limited  to,  another  corporation,
partnership,  joint venture or trust,  or by reason of anything done or not done
by him or her in any such  capacity.  The  indemnification  provided  under this
Agreement  shall  continue as to the  Indemnitee  even though he or she may have
ceased to be a director  or  officer of the  Company.  This  Agreement  shall be
binding upon the Company and its  successors  and assigns and shall inure to the
benefit  of the  Indemnitee  and his or her  spouse,  assigns,  heirs,  devises,
executors,  administrators  or  other  legal  representatives.  Nothing  in this
Agreement  shall confer upon the  Indemnitee the right to continue in the employ

                                       -7-

<PAGE>

of the Company or affect the right of the Company to terminate the  Indemnitee's
employment at any time in the sole  discretion  of the Company,  with or without
cause.

     SECTION 14. Severability.  If any provision or provisions of this Agreement
shall be held invalid,  illegal or unenforceable for any reason whatsoever,  (a)
the validity,  legality and  enforceability of the remaining  provisions of this
Agreement (including, without limitation, all portions of any paragraphs of this
Agreement  containing  any  such  provision  held  to  be  invalid,  illegal  or
unenforceable,  that are not themselves invalid, illegal or unenforceable) shall
not in any way be affected or impaired  thereby,  and (b) to the fullest  extent
possible, the provisions of this Agreement (including,  without limitation,  all
portions of any paragraph of this  Agreement  containing any such provision held
to be  invalid,  illegal  or  unenforceable,  that are not  themselves  invalid,
illegal or unenforceable)  shall be construed so as to give effect to the intent
manifest by the provision held invalid, illegal or unenforceable.

     SECTION 15. Identical  Counterparts.  This Agreement may be executed in one
or more  counterparts,  each of which shall for all  purposes be deemed to be an
original but all of which together shall  constitute one and the same Agreement.
Only one such  counterpart  signed by the party against whom  enforceability  is
sought needs to be produced to evidence the existence of this Agreement.

     SECTION 16. Headings.  The headings of the paragraphs of this Agreement are
inserted for convenience only and shall not be deemed to constitute part of this
Agreement or to affect the construction thereof.

     SECTION 17. Definitions. For purposes of this Agreement:

          (a) "Disinterested  Director" shall mean a director of the Company who
     is not or was not a party to the action, suit,  investigation or proceeding
     in respect of which indemnification is being sought by the Indemnitee.

          (b)  "Independent  Counsel" shall mean a law firm or a member of a law
     firm that neither is presently nor in the past five years has been retained
     to represent:  (i) the Company or the Indemnitee in any matter  material to
     either  such  party,  or  (ii)  any  other  party  to  the  action,   suit,
     investigation  or  proceeding  giving  rise to a claim for  indemnification
     hereunder.  Notwithstanding the foregoing,  the term "Independent  Counsel"
     shall not  include  any  person  who,  under the  applicable  standards  of
     professional conduct then prevailing,  would have a conflict of interest in
     representing either the Company or the Indemnitee in an action to determine
     the Indemnitee's right to indemnification under this Agreement.

     SECTION  18.  Modification  and  Waiver.  No  supplement,  modification  or
amendment of this Agreement shall be binding unless executed in  writing by both

                                       -8-

<PAGE>

parties  hereto.  No waiver of any of the provisions of this Agreement  shall be
deemed or shall constitute a waiver of any other  provisions  hereof (whether or
not similar) nor shall such waiver constitute a continuing waiver.

     SECTION 19. Subrogation.  In the event of payment under this Agreement, the
Corporation  shall be subrogated to the extent of such payment to all the rights
of recovery of the  Indemnitee,  who shall execute all instruments and documents
required  and shall do  everything  that may be necessary to secure such rights,
including the execution of such instruments and documents as may be necessary to
enable the Corporation effectively to bring suit to enforce such rights.

     SECTION 20. No Duplicative  Payment.  The  Corporation  shall not be liable
under this  Agreement  to make any  payment of amounts  otherwise  indemnifiable
hereunder  if and to the  extent  that the  Indemnitee  has  otherwise  actually
received  such  payment  under any  insurance  policy,  contract,  agreement  or
otherwise.

     SECTION 21. Notices. All notices, requests, demands or other communications
hereunder shall be in writing and shall be deemed to have been duly given if (i)
delivered  by hand or  courier,  on the date of  delivery,  or (ii) if mailed by
certified or registered  mail with postage  prepaid,  on the third  business day
after the date on which it is so mailed:

          (a) If to the Indemnitee, to:

                    ____________________
                    ____________________
                    ____________________
                    ____________________

          (b) If to the Company, to:

                    Zygo Corporation
                    Laurel Brook Road
                    P.O. Box 448
                    Middlefield, Connecticut  06455-0448
                    Attention: President

                    with a copy to:

                    Paul Jacobs, Esq.
                    Fulbright & Jaworski L.L.P.
                    666 Fifth Avenue
                    New York, New York 10103

or to such other address as may be furnished to the Indemnitee by the Company or
to the Company by the Indemnitee, as the case may be.

                                       -9-

<PAGE>

     SECTION 22.  Governing  Law. The parties  hereto agree that this  Agreement
shall be governed by, construed and enforced in accordance with, the Laws of the
State of Delaware.

     IN WITNESS WHEREOF,  the parties hereto have executed this Agreement on the
day and year first above written.


                                     ZYGO CORPORATION


                                     By:____________________________



                                                INDEMNITEE


                                     -------------------------------




                                      -10-

<PAGE>

     Written Plan  document  relating to the Zygo  Corporation  (the  "Company")
Amended and Restated  Non-Qualified Stock Option Plan which is to be acted on at
the Company's 1995 Annual Meeting of Stockholders.  The Written Plan document is
filed as an Appendix to the Company's Proxy Statement but is not a part thereof.
Copies of this document will not be sent to Stockholders.

<PAGE>



                               ZYGO CORPORATION
                       AMENDED AND RESTATED NON-QUALIFIED
                                STOCK OPTION PLAN

1. Purpose

     The  purpose of the Zygo  Corporation  Amended and  Restated  Non-Qualified
Stock Option Plan (the "Non-Qualified  Plan") is to aid Zygo Corporation and its
subsidiaries  (the "Company") in attracting and retaining  people of exceptional
ability by enabling selected  individuals to purchase a proprietary  interest in
the business,  thereby  stimulating in such  individuals an increased  desire to
render  greater  service,  which will  contribute  to the  continued  growth and
success of the Company.

2. Amount and Source of Stock

     Except as otherwise  permitted  pursuant to  paragraph 6 hereof,  the total
number of shares of the Company's Common Stock, par value $.10 per share,  which
may be issued under the Non-Qualified Plan shall not exceed 1,425,000 and may be
authorized and unissued shares or issued and reacquired  shares, as the Board of
Directors  may  from  time to time  determine.  If an  option  shall  expire  or
terminate for any reason without having been exercised in full, the  unpurchased
shares  covered  thereby  shall be added to the shares  otherwise  available for
options under the Non-Qualified Plan.

3. Effective Date and Term of Plan

     The  Non-Qualified  Plan became effective on September 3, 1987, the date on
which it was initially approved by affirmative vote of the Board of Directors of
the  Company.   The  term  during  which   options  may  be  granted  under  the
Non-Qualified  Plan commenced on its effective date and, subject to the approval
of the  stockholders  of the  Company,  shall  continue  as hereby  amended  and
restated until the tenth anniversary of such date.

4. Administration and Eligibility

     (a)  The  Non-Qualified  Plan  will be  administered  by a  committee  (the
"Committee")  consisting of at least two  directors  appointed by and serving at
the pleasure of the Board. If a Committee is not so established,  the Board will
perform the duties and functions  ascribed herein to the Committee.  Each member
of the  Committee  shall be a  "disinterested  person"  in  accordance  with the
applicable  provisions of Rule 16b-3 under the Securities  Exchange Act of 1934.
Subject to the provisions of the  Non-Qualified  Plan, the Committee,  acting in
its sole and absolute  discretion,  will have full power and  authority to grant
options  under the  Non-Qualified  Plan,  to  interpret  the  provisions  of the
Non-Qualified  Plan and  option  agreements  under the  Non-Qualified  Plan,  to
supervise the  administration of the Non-Qualified  Plan, and to take such other
action as may be necessary or desirable in order to carry out the  provisions of
the  Non-Qualified  Plan.  A  majority  of the  members  of the  Committee  will
constitute  a quorum.  The  Committee  may act by the vote of a majority  of its


<PAGE>



members present at a meeting at which there is a quorum or by unanimous  written
consent.  The decision of the Committee as to any disputed  question,  including
questions of construction,  interpretation and administration, will be final and
conclusive on all persons.  The Committee will keep a record of its  proceedings
and acts and will keep or cause to be kept  such  books  and  records  as may be
necessary in  connection  with the proper  administration  of the  Non-Qualified
Plan.

     (b)  Options  may be  granted  under the  Non-Qualified  Plan to present or
future key  employees  of the  Company or a  subsidiary  of the  Company  and to
directors of the Company,  whether or not they are  employees of the Company.  A
"key employee" is an officer or employee who has substantial  responsibility  in
the  direction  and  management  of the  Company  or  any  division,  branch  or
subsidiary.

5. Options

     The terms and  conditions of each option  granted  under the  Non-Qualified
Plan shall be set forth in a Stock Option Agreement issued by the Company to the
optionee.  Such terms and conditions shall include the following as well as such
other  provisions,  not  inconsistent  with the provisions of the  Non-Qualified
Plan, as may be deemed advisable:

          (a)  The number of shares subject to the option.

          (b)  The purchase price per share.

          (c)  A  provision  that the full  purchase  price of shares  purchased
               under the option shall be paid upon exercise thereof.

          (d)  A provision  permitting exercise of the option either in whole or
               from time to time in part, but only for full shares.

          (e)  The dates after which the option may be exercised, in whole or in
               part.

          (f)  A provision for the termination of the option, not later than ten
               years from the date the option is granted,  or prior thereto,  if
               the  optionee  ceases to be a director of the Company or employed
               by the Company or a subsidiary  thereof (otherwise than by reason
               of the optionee's  death) unless extended by the Committee acting
               in its sole  discretion  (provided that no such  extension  shall
               result in an option having a term greater than ten years).

          (g)  A provision that the option shall not be transferrable other than
               by  will  or by the  laws  of  descent  and  distribution  and is
               exercisable  during the lifetime of the optionee,  only by him or
               her.

                                       -2-


<PAGE>



          (h)  A provision  that the  Company's  obligation  to sell and deliver
               stock under the option is subject to such compliance with federal
               and  state   laws,   rules  and   regulations   applying  to  the
               authorization,  issuance  or sale of  securities  as the  Company
               deems necessary or advisable.

6. Adjustments Upon Changes in Stock

     If (i) the  Company  shall at any time be involved in a complete or partial
liquidation or  reorganization,  including a merger,  consolidation,  or sale or
distribution  of assets,  (ii) the  Company  shall  declare a stock  dividend or
subdivide  or combine  its Common  Stock,  or (iii) any other  event shall occur
which in the  judgment of the Board of Directors  necessitates  action by way of
adjusting the terms of the option,  the Board of Directors  shall forthwith take
any such  action  as in its  judgment  shall be  necessary  to  preserve  to the
optionee rights substantially proportionate to the rights existing prior to such
event or, in the case of a liquidation or  reorganization,  terminate the option
upon notice given at least thirty (30) days prior to the  effective  date of the
transaction,  or provide for its assumption by any surviving,  consolidated,  or
successor  corporation;   provided,  that  in  the  event  that  the  option  is
terminated,  the option shall be  exercisable  until the effective  date of such
liquidation or  reorganization in whole or in part as to all shares then subject
thereto, without regard to any installment exercise provisions.  Notwithstanding
the foregoing,  the right to exercise  options without regard to any installment
exercise  provisions  shall not apply to any  option  holder who  initiated  the
transaction  resulting in the application of this paragraph 6 unless such person
initiated  the  transaction  pursuant  to  instructions  or  authority  from the
Company. For the purpose of the foregoing, actions taken by members of an option
holder's family shall be deemed to have been taken by him.

7. Amendment and Termination of the Plan

     The  Board  may  amend or  terminate  the  Non-Qualified  Plan.  Except  as
otherwise provided in the Non-Qualified Plan with respect to equity changes, any
amendment which would increase the aggregate number of shares of Common Stock as
to which  options  may be  granted  under  the  Non-Qualified  Plan,  materially
increase  the  benefits  under the  Non-Qualified  Plan,  or modify the class of
persons  eligible  to  receive  options  under the  Non-Qualified  Plan shall be
subject to the approval of the  stockholders.  No amendment or  termination  may
affect  adversely  any  outstanding  option  without the written  consent of the
optionee.

8. Definition

     The term "parent" and "subsidiary"  shall have the meaning ascribed to such
terms by Section 424 of the Internal Revenue Code of 1986, as amended.

                                       -3-


<PAGE>



                                ZYGO CORPORATION

                      NON-QUALIFIED STOCK OPTION AGREEMENT

1.       Stock Option granted to (Employee #                   ).

2.       The date of this option grant is                                 .

3.       The total aggregate number of shares of Zygo Corporation common stock,
         $.10 par value, that can be purchased pursuant to this option is     .

4.       The purchase price per share which may be purchased pursuant to this 
         option is $            .

5.       This option can be exercised according to the following schedule:

                           25% of the total shares given in #3 above, may be
                           exercised after each anniversary date of the option
                           grant, beginning with the first anniversary.

6.       The last day on which any option granted hereby may be exercised is 
         November 19, 2002.

7.       The stock option granted hereby is subject to all of the provisions 
         set forth in pages 1 through 4 annexed.

                                              ZYGO CORPORATION

                                              By:______________________________
                                                 Paul F. Forman, Chairman & CEO

ATTEST:

____________________________
G.K. Willis, President & COO

                                             ACCEPTED:


                                             _______________________________
                                             Name                      Date



<PAGE>



                                ZYGO CORPORATION

                PROVISIONS RELATING TO NON-QUALIFIED STOCK OPTION

     1. This  option  may be  exercised  by written  notice to Zygo  Corporation
("Zygo")  stating the number of full  shares  with  respect to which it is being
exercised,  and  accompanied  by payment  of the option  price for the number of
shares so purchased and payment or arrangement for payment of any federal, state
or local  income or other taxes  incurred by reason of the exercise and required
to be withheld by Zygo.  This option is not an incentive stock option within the
meaning of Section 422 of the Internal Revenue Code of 1986.

     2.  Zygo's  obligation  to sell and deliver  shares  upon  exercise of this
option is subject to such  compliance  with  federal and state  laws,  rules and
regulations  applying to the  authorization,  issuance or sale of  securities as
Zygo deems necessary or advisable. If at the time of any exercise of this option
a  Registration  Statement  under the  Securities  Act of 1933,  as amended (the
"Act") shall not be effective  with respect to the shares to be acquired on such
exercise,  then, as a condition to such exercise and the delivery of the shares,
the Optionee shall deliver to Zygo a written statement, satisfactory in form and
substance  to  counsel  for  Zygo,  confirming  (a)  the  financial  information
pertaining  to Zygo as to which the  Optionee had access and (b) that any shares
acquired by the  Optionee  upon  exercise of this option will be acquired by the
Optionee  for his or her own account for  investment  and not with a view to the
distribution  or resale of any such shares.  Any  certificate  for shares issued
upon the exercise of this option,  may at Zygo's  option,  bear a legend stating
that  the  shares  represented  by such  certificate  were  purchased  only  for
investment and may be transferred  only if counsel for Zygo is satisfied that no



<PAGE>


violation of the Act is involved. Zygo shall be entitled to further postpone the
time of  delivery  of  certificates  for  shares  of its  common  stock for such
additional  time as Zygo shall deem  necessary  or desirable to enable it (i) to
file a  Registration  Statement  under the Act with the  Securities and Exchange
Commission with respect,  among others,  to the shares of common stock which may
be purchased under this option, or (ii) to comply with the listing  requirements
of any securities exchange upon which the common stock of Zygo may be listed.

     3. This option shall during the Optionee's  lifetime be exercisable only by
him or her, and neither it nor any right hereunder shall be transferable  except
by will or the laws of descent and  distribution,  or be subject to  attachment,
execution or other similar process.  In the event of any attempt by the Optionee
to alienate,  assign, pledge, hypothecate or otherwise dispose of this option or
of any right  hereunder,  except as provided for herein,  or in the event of any
levy of any  attachment,  execution  or  similar  process  upon  the  rights  or
interests  hereby  conferred,  Zygo may  terminate  this option by notice to the
Optionee and it shall thereupon become null and void.

     4. If, prior to the  termination  date,  the  Optionee  shall cease to be a
director  of Zygo or  employed  by Zygo,  or a  parent  or  subsidiary,  thereof
(otherwise  than by reason of the death of the Optionee),  this option,  and all
rights  hereunder to the extent that this option shall not have been theretofore
exercised shall terminate and become null and void.

     5. In the  event of the  death of the  Optionee,  prior to the  termination
date, while employed by Zygo or a parent or subsidiary  thereof,  this option to
the extent that is shall not have been theretofore exercised may be exercised at

                                       -2-


<PAGE>


any time up to sixty  (60)  days  following  the date of death by the  person or
persons to whom the Optionee's rights under this option shall pass by will or by
applicable laws of descent and distribution,  and to the extent that such rights
shall not have been exercised  within such sixty (60) day period shall terminate
and become  null and void.  Notwithstanding  the  foregoing,  in the case of the
death of the Optionee,  this option may be exercised  only to the extent that it
could have been exercised by the Optionee under its terms on the date of death.

     6. If (a) Zygo  shall at any time be  involved  in a  complete  or  partial
liquidation  or  reorganization,  including a merger,  consolidation  or sale or
distribution of assets,  (b) Zygo shall declare a stock dividend or subdivide or
combine its common stock, or (c) any other event shall occur which  necessitates
action by way of adjusting the terms of the option, the Board of Directors shall
forthwith take any such action as shall be necessary to preserve to the Optionee
rights  substantially  proportionate to the rights existing prior to such event,
or, in the case of a liquidation  or  reorganization,  terminate the option upon
notice  given at least  thirty  (30)  days  prior to the  effective  date of the
transaction,  or provide for its  assumption by any surviving,  consolidated  or
successor  corporation;   provided,  that  in  the  event  that  the  option  is
terminated,  the option shall be  exercisable  until the effective  date of such
liquidation or  reorganization in whole or in part as to all shares then subject
thereto, without regard to any installment exercise provisions.  Notwithstanding
the foregoing,  the right to exercise  options without regard to any installment
exercise  provisions  shall not apply to any  option  holder who  initiated  the
transaction  resulting in the application of this paragraph 6 unless such person

                                       -3-


<PAGE>



initiated  the  transaction  pursuant  to  instructions  or  authority  from the
Company.  For the  purpose  of the  foregoing,  actions  taken by members of any
option holder's family shall be deemed to have been taken by him.

     7. Neither the granting of this option nor the  exercise  thereof  shall be
construed as granting to the Optionee any right with respect to  continuance  of
employment by Zygo or any parent or subsidiary of Zygo. Neither the Optionee nor
any person  entitled  to  exercise  his or her rights in the event of his or her
death shall have any of the rights of a  stockholder  with respect to the shares
subject to this option,  except to the extent that  certificates for such shares
shall have been issued upon the exercise of this option as provided for herein.

     8. For the purposes of this  option,  the terms  "parent" and  "subsidiary"
shall have the meaning  described  to such terms by Section 424 of the  Internal
Revenue Code of 1986.

     9.  This  option is  granted  pursuant  to the Zygo  Amended  and  Restated
Non-Qualified  Stock Option Plan (the "Plan"),  and is governed by the terms and
conditions  of that  Plan.  The  Optionee  agrees  to be bound by the  terms and
conditions  of this  Agreement  and the  Plan (a  copy  of  which  the  Optionee
acknowledges  the Optionee has received)  and any future  amendments to the Plan
which do not alter or impair the Optionee's rights hereunder.  In the event that
any controversy  shall arise with respect to the nature,  scope or extent of any
one or more rights  conferred by this Agreement,  the  determination of the Plan
Committee, or if a Plan Committee is not established,  of the Board of Directors
of Zygo,  of the  rights of the  Optionee  shall be final and  binding  upon the

                                       -4-



<PAGE>


Optionee  and any other  person  who shall  assert  any  right  based  upon this
Agreement.

     10. This option shall be wholly void and of no effect after the termination
date.

                                       -5-


<PAGE>


                                      PROXY

                                ZYGO CORPORATION
                Annual Meeting of Stockholders, November 16, 1995
           This Proxy is solicited on behalf of the Board of Directors


     The  undersigned  hereby appoints Mr. Mark J. Bonney and Mr. Gary K. Willis
as Proxies,  and each of them acting singly, with power of substitution to each,
and hereby authorizes them to represent and to vote, as designated below, all of
the shares of Common Stock of Zygo Corporation held of record by the undersigned
on  September  22, 1995,  at the annual  meeting of  stockholders  to be held on
November 16, 1995, at 10:00 a.m., or any adjournments thereof.

     This  proxy when  properly  executed  will be voted in the manner  directed
herein by the  undersigned  stockholder(s).  If no direction is made, this Proxy
will be voted for Proposal Nos. 1, 2, 3 and 4. In their  discretion  the Proxies
are  authorized to vote upon such other business as may properly come before the
meeting.


Please mark,  sign, date, and return this proxy card promptly using the enclosed
envelope.

     I PLAN TO ATTEND THE MEETING IN MIDDLEFIELD,  CONNECTICUT,  ON NOVEMBER 16,
1995.


             (Continued and to be dated and signed on reverse side)

<PAGE>


     Proposal No. 1.  Election of Directors:  The eight  nominees are Michael R.
     Corboy,  Paul F. Forman,  Seymour E. Liebman,  Robert G. McKelvey,  Paul W.
     Murrill, Robert B. Taylor, Gary K. Willis, and Carl A. Zanoni.


For all listed      Withhold authority           For all listed Nominees, except
Nominees            for all listed Nominees      withhold for the following
                                                 Nominees (write name(s)
                                                 below)


                                                 -------------------------------

Proposal No. 2. Adoption of an amendment to the Company's  Restated  Certificate
     of Incorporation

         For                       Against                     Abstain

Proposal No. 3. Adoption of an amendment to the  Company's  Amended and Restated
     Non-Qualified Stock Option Plan.

         For                       Against                     Abstain

Proposal No. 4. Approval of the Company's  entering  into  indemnity  agreements
     with its directors and officers

         For                       Against                     Abstain


                                              Please   sign   exactly   as  name
                                              appears  hereon.  All joint owners
                                              should   sign.   When  signing  as
                                              attorney, executor, administrator,
                                              trustee, guardian or custodian for
                                              a minor, please give full title as
                                              such.  If  a  corporation,  please
                                              sign  full   corporate   name  and
                                              indicate the signer's office. If a
                                              partnership,    please   sign   in
                                              partnership   name  by  authorized
                                              person.


                                              Date: ______________________, 1995


                                              ----------------------------------
                                                          Signature


                                              ----------------------------------
                                                  Signature if held jointly

                                              PLEASE  MARK YOUR CHOICE LIKE THIS
                                              |X| IN BLUE OR BLACK INK.

                                       -2-


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