ZYGO CORP
PRE 14A, 1995-08-31
OPTICAL INSTRUMENTS & LENSES
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            SCHEDULE 14A INFORMATION

Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934
                                (Amendment No. )

Filed by the Registrant /X/
Filed by a Party other than the Registrant /_/

Check the appropriate box:

/X/ Preliminary Proxy Statement
/_/ Definitive Proxy Statement
/_/ Definitive Additional Materials
/_/ Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                                Zygo Corporation
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)

                                Zygo Corporation
- --------------------------------------------------------------------------------
                   (Name of Person(s) Filing Proxy Statement)

Payment of Filing Fee (Check the appropriate box):

/X/ $125 per Exchange Act Rule 0-11(c)(1)(ii), 14a-6(i)(1) or 14a-6(j)(2).
/_/ $500 per each party to the controversy pursuant to
    Exchange Act Rule 14a-6(i)(3).
/_/ Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

1) Title of each class of securities to which transaction applies:

   _____________________________________________________________________________

2) Aggregate number of securities to which transaction applies:

   _____________________________________________________________________________

3) Per unit price or other underlying value of transaction computed
   pursuant to Exchange Act Rule 0-11:*

   _____________________________________________________________________________

4) Proposed maximum aggregate value of transaction:

   _____________________________________________________________________________

/_/ Check box if any part of the fee is offset as provided by
    Exchange Act Rule 0-11(a)(2) and identify the filing for which
    the offsetting fee was paid previously.  Identify the previous
    filing by registration statement number, or the form or schedule
    and the date of its filing.

    1) Amount previously paid: _________________________________________________

    2) Form, Schedule or Registration No. ______________________________________

    3) Filing party: ___________________________________________________________

    4) Date filed: _____________________________________________________________

___________
*Set forth the amount on which the filing fee is calculated and state how it was
 determined.

<PAGE>

                                ZYGO CORPORATION
                                Laurel Brook Road
                         Middlefield, Connecticut 06455

                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS

                          To Be Held November 16, 1995


     The Annual Meeting of Stockholders of Zygo  Corporation will be held at the
offices of the Company, Laurel Brook Road, Middlefield, Connecticut, on November
16, 1995, at 10:00 a.m. local time, for the following purposes:

     1. To elect eight directors for the ensuing year.

     2. To  consider  and vote upon a proposal to amend the  Company's  Restated
Certificate  of  Incorporation  to increase the number of shares of Common Stock
authorized for issuance from 10,000,000 to 15,000,000 shares.

     3. To consider and vote upon a proposal to amend the Company's  Amended and
Restated  Non-Qualified  Stock  Option Plan to increase  the number of shares of
Common Stock  authorized  for issuance  under the Plan from 975,000 to 1,425,000
shares.

     4. To consider and approve the Company's entering into indemnity agreements
with its directors and officers.

     5. To act upon any other matter that may  properly  come before the meeting
or any adjournment thereof.

     Stockholders  of record at the close of business on September 22, 1995, are
entitled to notice of and to vote at the meeting.


                                  By Order of the Board of Directors


                                  Paul Jacobs,
                                  Secretary

October 10, 1995

- --------------------------------------------------------------------------------
                             YOUR VOTE IS IMPORTANT
- --------------------------------------------------------------------------------

     Please fill in, date,  sign, and return your proxy promptly in the enclosed
stamped envelope  whether or not you plan to be present at the meeting.  You may
still vote in person if you attend the meeting.

<PAGE>

                                ZYGO CORPORATION
                                Laurel Brook Road
                         Middlefield, Connecticut 06455

                                 Proxy Statement

           Annual Meeting of Stockholders To Be Held November 16, 1995


Proxy Solicitation

     This Proxy Statement is furnished to the holders of Common Stock, par value
$.10 per share (the "Common  Stock"),  of Zygo  Corporation  (the  "Company") in
connection  with the  solicitation  by the Board of  Directors of the Company of
proxies for use at the Annual Meeting of Stockholders to be held on November 16,
1995, or at any  adjournment  thereof,  pursuant to the  accompanying  Notice of
Annual Meeting of  Stockholders.  The purposes of the meeting and the matters to
be acted  upon are set forth in the  accompanying  Notice of Annual  Meeting  of
Stockholders. The Board of Directors is not currently aware of any other matters
which will come before the meeting.

     Proxies for use at the Annual  Meeting are being  solicited by the Board of
Directors of the Company.  Proxies  will be mailed to  stockholders  on or about
October  10,  1995,  and will be  solicited  chiefly by mail;  however,  certain
officers,  directors,  and  employees of the Company,  none of whom will receive
additional compensation therefor, may solicit proxies by telephone, telegram, or
other personal contact. All solicitation expenses, including costs of preparing,
assembling, and mailing proxy material, will be borne by the Company.


Revocability and Voting of Proxy

     A form of proxy for use at the Annual Meeting of Stockholders  and a return
envelope  for the proxy are  enclosed.  Stockholders  may revoke  the  authority
granted  by their  execution  of  proxies  at any time  before  their  effective
exercise  by filing  with the  Secretary  of the  Company  a  written  notice of
revocation or a duly executed proxy bearing a later date, or by voting in person
at the meeting. Shares of the Company's Common Stock represented by executed and
unrevoked  proxies will be voted in accordance  with the choice or  instructions
specified  thereon.  If no specifications  are given, the proxies intend to vote
the shares  represented  thereby to approve  Proposal  Nos. 1, 2, 3 and 4 as set
forth herein and in the  accompanying  Notice of Annual Meeting of  Stockholders
and in  accordance  with  their best  judgment  on any other  matters  which may
properly come before the meeting.

<PAGE>

Record Date and Voting Rights

     Only stockholders of record at the close of business on September 22, 1995,
are  entitled  to notice  of and to vote at the  Annual  Meeting  or any and all
adjournments  thereof.  On September 22, 1995,  there were  _________  shares of
Common Stock outstanding; each such share is entitled to one vote on each of the
matters to be presented at the Annual Meeting.  The holders of a majority of the
outstanding shares of Common Stock present in person or by proxy and entitled to
vote will constitute a quorum at the Annual Meeting.

     On July 20, 1995, the Company's Board of Directors declared a 3 for 2 stock
split effected in the form of a 50% stock  dividend,  payable on August 21, 1995
to  stockholders of record at the close of business on August 1, 1995. All share
and option  information  included in this Proxy Statement has been adjusted,  to
the extent necessary, to reflect such stock split as if it had occurred prior to
the date as of which the information is given.


                 Proposal No. 1 - Election of Board of Directors

     Eight  directors  (constituting  the entire Board) are to be elected at the
Annual Meeting. The enclosed proxy, unless otherwise specified, will be voted to
elect as directors  the eight  nominees  named below,  all of whom are presently
directors of the Company.  Each director elected will hold office until the next
Annual Meeting of Stockholders.

     All nominees have consented to serve as directors.  If a nominee should not
be available for election as contemplated,  the shares  represented by the proxy
will be  voted  for the  person,  if any,  who is  designated  by the  Board  of
Directors  to  replace  the  nominee.  The Board of  Directors  has no reason to
believe that any of the nominees will be unable to serve.

                                       -2-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                       <C>                                       <C>          <C>             <C>                <C> 
Paul F. Forman            Chairman from June 1970 and,              61           1970            273,060 (b)        6.9%
                          from  June  1970  to  August
                          1993,     Chief    Executive
                          Officer  and from  June 1970
                          to November 1993, Treasurer;
                          from June  1991 to  February
                          1992, acting President; and,
                          from    February   1992   to
                          November 1993,  Secretary of
                          the Company.

Michael R. Corboy         President  and  Chief Execu-              65           1993             21,000 (c)        0.5%
                          tive   Officer   of   Corboy
                          Investment   Company   since
                          January  1992;  Chairman and
                          Chief  Executive  Officer of
                          Amtech    Corporation   from
                          December 1987 until December
                          1991;  Director of The Kirby
                          Foundation;    the   Aquinas
                          Funds,  Networth,  Inc., and
                          Wyle Electronics.

Seymour E.                Senior    Vice     President              46           1993              7,500 (d)        0.2%
Liebman                   Finance and General  Counsel
                          Canon  U.S.A.,   Inc.  since
                          January  1992;  from January
                          1990  until  December  1991,
                          Vice  President  Finance and
                          General Counsel Canon U.S.A.
                          Inc.

Robert G.                 Chairman,  President, George              58           1983             53,100 (e)        1.3%
McKelvey                  McKelvey      Co.,      Inc.
                          (Investment    Advisor   and
                          Securities    Broker-Dealer)
                          for more  than the last five
                          years.
</TABLE>

                                       -3-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                       <C>                                       <C>          <C>             <C>                <C> 
Paul W. Murrill           Professional   Engineer  for              61           1993             14,250 (f)        0.4%
                          more   than  the  last  five
                          years;  Director  of Entergy
                          Corporation,      Tidewater,
                          Inc.,   First    Mississippi
                          Corporation, FirstMiss Gold,
                          Inc., Piccadilly Cafeterias,
                          Inc.,  Howell   Corporation,
                          various    foundations   and
                          public               service
                          organizations.

Robert B. Taylor          Vice President and Treasurer              48           1988              9,750 (g)        0.2%
                          of Wesleyan University since
                          April   1985;   Director  of
                          Middlesex  Mutual  Assurance
                          Co.    and    Farmers    and
                          Mechanics Bank.

Gary K. Willis            President      and     Chief              50           1992            155,250 (h)        3.9%
                          Executive    Officer   since
                          August 1993;  from  February
                          1992  until   August   1993,
                          President      and     Chief
                          Operating   Officer  of  the
                          Company;  from  October 1990
                          until      January     1992,
                          independent consultant.

Carl A. Zanoni            Vice  President,   Research,              54           1970            289,110 (i)        7.3%
                          Development  and Engineering
                          of the  Company  since April
                          1992;   from  February  1989
                          until   March   1992,   Vice
                          President,    Research   and
                          Development, Chief Scientist
                          and,  from June  1970  until
                          February     1989,      Vice
                          President,   Engineering  of
                          the Company.
</TABLE>

                                       -4-

<PAGE>

<TABLE>
<CAPTION>
                                                                                                    Common Stock deemed
                                                                                                   beneficially owned at
                                                                                                    August 31, 1995 (a)
                              Principal occupation                                               -------------------------
                             during past five years                                              Number             % of
                               and certain other                               Director            of              Common
Name                             directorships                     Age          since            shares             Stock
- --------------------------------------------------------------------------------------------------------------------------------

<S>                                                                                              <C>                <C> 
All directors and
officers as a
group, including
those named
above (10 in all)
(d)(e)                                                                                           852,270 (j)        20.6%
</TABLE>

     (a)  The persons  named and all  directors  and  officers as a group in the
          table have sole voting and investment power with respect to all shares
          of Common Stock shown as beneficially owned by them, except for shares
          which can be acquired by the exercise of stock options.

     (b)  Includes  options to purchase  39,000 shares of Common Stock which are
          exercisable within 60 days.

     (c)  Includes  options to purchase  13,500 shares of Common Stock which are
          exercisable within 60 days.

     (d)  Consists of options to purchase 7,500 shares of Common Stock which are
          exercisable  within 60 days.  Does not include 786,000 shares owned by
          Canon Inc.

     (e)  Includes  options to purchase  7,500  shares of Common Stock which are
          exercisable within 60 days.

     (f)  Includes  options to purchase  13,500 shares of Common Stock which are
          exercisable within 60 days.

     (g)  Includes  options to purchase  7,500  shares of Common Stock which are
          exercisable  within 60 days.  Does not include 397,500 shares owned by
          Wesleyan University.

     (h)  Includes  options to purchase  56,250 shares of Common Stock which are
          exercisable within 60 days.

     (i)  Includes  options to purchase  36,450 shares of Common Stock which are
          exercisable within 60 days.

     (j)  Includes  options to purchase 202,950 shares of Common Stock which are
          exercisable within 60 days.

     Eight  meetings  of the Board of  Directors  were held in fiscal  1995.  In
addition, the Board acted twice by unanimous written consent.

                                       -5-

<PAGE>

     The Board of  Directors  has an Audit  Committee,  Compensation  Committee,
Amended  and   Restated   Non-Qualified   Stock  Option  Plan   Committee   (the
"Non-Qualified Plan Committee"),  and a Nominating Committee to assist it in the
discharge of its responsibilities.

     The Audit  Committee  reviews  the scope,  plan,  and results of the annual
audit, any non-audit  services provided by the independent  public  accountants,
the procedures and policies with respect to internal  accounting  controls,  and
recommends  the firm to be employed as independent  auditors.  Three meetings of
the Audit Committee were held in fiscal 1995.  Effective  November 1994, Messrs.
Murrill and Taylor are the members of the Audit Committee.

     The  Compensation  Committee  determines the  compensation of the executive
officers,  recommends to the Board and the  Non-Qualified  Plan Committee awards
under the Company's  Amended and Restated  Non-Qualified  Stock Option Plan (the
"Non-Qualified  Plan"),  and  recommends  to the Board  amendments  to  existing
employee  benefit plans and adoption of any new benefit plans.  Messrs.  Corboy,
Liebman and McKelvey are the members of the Compensation  Committee.  There were
three meetings of the Compensation Committee held in fiscal 1994.

     The Non-Qualified Plan Committee is empowered to grant stock options to key
employees and directors of the Company under the Company's  Non-Qualified  Plan.
Messrs.  Liebman  and  McKelvey  are  the  members  of  the  Non-Qualified  Plan
Committee. The Non-Qualified Plan Committee met one time during fiscal 1995 and,
in addition, acted twice by unanimous written consent during the year.

     The Nominating  Committee considers  candidates (and potential  candidates)
for the office of director of the Company, who are brought to its attention from
whatever  source,  and  recommends to the full Board the names of those persons,
willing to serve,  whom they  believe it will be in the  Company's  overall best
interest  to have fill any  available  vacancy  or  vacancies.  Messrs.  Willis,
Liebman,  and McKelvey are the members of the  Nominating  Committee.  No formal
meetings of the Nominating  Committee were held during fiscal 1995 as the entire
Board addressed this task at its meetings.

     Each director  attended at least 75% of the total number of meetings of the
Board and Committees on which he served.

     Pursuant to the Zygo  Corporation  Non-Employee  Director Stock Option Plan
(the "Non-Employee Director Plan"), each director who was not an employee of, or
consultant  to, the Company (a  "Non-Employee  Director")  was granted in August
1994 an option to  purchase  37,500  shares of Common  Stock,  vesting  at 7,500
shares per year, exercisable at the fair market value of a share of Common Stock
on the date of grant.  The  Non-Employee  Director  Plan further  provides  that
options to purchase an additional  37,500  shares of Common Stock  automatically
will be granted to each  Non-Employee  Director on the fifth  anniversary of the
date on which an option was  previously  granted to the  Non-Employee  Director,

                                       -6-

<PAGE>

provided that he has  continuously  served as a director of the Company  through
such fifth anniversary.  Until November 1993, each Non-Employee Director who was
a designee of either Canon Inc.  ("Canon") or Wesleyan  University  ("Wesleyan")
pursuant  to the terms of a  stockholders'  agreement,  received a yearly fee of
$5,500 (subsequently  increased to $13,000 effective December 1, 1993) plus $500
for each Board of Directors' meeting attended.  Prior to August 1994, each other
Non-Employee  Director received an alternative  package of, at the option of the
director,  (i) a yearly  fee of $13,000  plus $500 for each Board of  Directors'
meeting  attended,  (ii) an option to purchase  30,000  shares of Common  Stock,
vesting at 6,000  shares per year,  exercisable  at the fair  market  value of a
share of Common Stock on the date of grant,  or (iii) a combination of these two
alternatives.  Each  Non-Employee  Director also is and was  reimbursed  for his
out-of-pocket  expenses.  No  additional  fees are or were  paid  for  committee
participation  or special  assignments.  Effective July 1, 1994,  Paul F. Forman
receives an annual  retainer of $20,000  for his  participation  on the Board of
Directors.

           Compensation Committee Interlocks and Insider Participation

     During the fiscal  year ended June 30,  1995,  the  Compensation  Committee
consisted  of Messrs.  Seymour E.  Liebman,  Michael  R.  Corboy,  and Robert G.
McKelvey.  Mr. Liebman was a director-designee of Canon, a principal stockholder
of the Company.  Canon Sales Co.,  Inc., a  subsidiary  of Canon,  serves as the
exclusive  distributor  of the Company's  products in Japan.  Sales to Canon and
Canon Sales Co.,  Inc.  aggregated  approximately  $9,550,000  for fiscal  1995.
Selling  prices were  based,  generally,  on the normal  terms given to domestic
distributors.  In addition,  the Company and Canon have entered into  agreements
providing  for  confidential  exchanges of certain  technology.  The Company has
received  royalty payments from Canon under certain of those  agreements,  which
payments,  in the  aggregate,  are not  material.  In addition,  the Company has
entered into certain research and development  contracts with Canon, pursuant to
which the Company has received funding.  See "Certain  Relationships and Related
Transactions" later in this Proxy Statement.


                             Executive Compensation

     The following table contains  information  concerning the cash compensation
paid or to be paid by the Company, as well as certain other compensation paid or
accrued,  during the fiscal years indicated,  to the Chief Executive  Officer of
the Company  during the 1995  fiscal year and the other most highly  compensated
executive  officers of the Company ("named  executives") whose cash compensation
exceeded  $100,000  for the  year  ended  June 30,  1995,  for  services  in all
capacities to the Company.

                                       -7-

<PAGE>

<TABLE>
<CAPTION>
                                                     Summary Compensation Table

                                                                                                      Long-Term
                                                       Annual Compensation                          Compensation
                                                       -------------------                          ------------
Name                                                                                Other (1)                          All(2)(3)
& Principal Position                                                                 Annual           Number of         Other
Held During Fiscal 1995                  Year        Salary           Bonus       Compensation      Stock Options   Compensation
- -----------------------                  ----        ------           -----       ------------      -------------   ------------
<S>                                      <C>        <C>              <C>             <C>                <C>             <C>    
Gary K. Willis                           1995       $186,923         $45,600         $10,800            45,000          $ 5,900
President and Chief Executive            1994       $175,673         $35,000         $ 7,200            15,000          $ 4,680
Officer, Director                        1993       $168,942         $     0         $ 7,200             7,500     (4)  $ 9,600

Mark J. Bonney                           1995       $133,742         $32,400         $10,800            30,000          $ 4,573
Vice President, Finance and              1994       $126,946         $25,600         $ 7,200            10,500          $ 2,579
Administration, Treasurer,          (5)  1993       $ 41,292         $ 5,000         $ 2,400            22,500     (6)  $15,526
Chief Financial Officer

Carl A. Zanoni                           1995       $153,317         $37,080         $10,800            30,000          $ 5,816
Vice President, Research,                1994       $146,263         $29,500         $ 7,200            10,500          $ 4,300
Development and Engineering,             1993       $138,338         $ 5,000         $ 7,200             7,500          $ 4,581
Director
</TABLE>


     (1)  Amounts paid as automobile allowances.

     (2)  Includes aggregate amounts of $4,100, $2,974 and $4,023 in fiscal 1995
          and $2,808,  $1,000 and $2,481 in fiscal 1994 paid or  contributed  on
          behalf of Messrs. Willis, Bonney and Zanoni, respectively,  and $1,000
          and  $2,828 in fiscal  1993 paid or  contributed  on behalf of Messrs.
          Willis  and  Zanoni,   respectively,   under  the  Company's   Defined
          Contribution Profit Sharing Plan.  Contributions made under the profit
          sharing component of the Plan are determined  annually by the Board of
          Directors, based on each employee's compensation, and vest at the rate
          of 20% per year of service to the Company.  Employees are fully vested
          in  contributions  made in the  discretion  of the  Company  under the
          401(k) component of the Plan.

     (3)  Includes $1,800,  $1,599 and $1,793 in fiscal 1995, $1,872, $1,579 and
          $1,819 in fiscal 1994 and  $1,872,  $526 and $1,753 in fiscal 1993 for
          Messrs.  Willis,  Bonney and Zanoni,  respectively,  representing  the
          value of life insurance provided to the named executives.

     (4)  Includes $6,728 of relocation costs paid on behalf of Mr. Willis.

     (5)  Mr. Bonney joined the Company on March 1, 1993.

     (6)  Includes $15,000 paid to Mr. Bonney for relocation expenses.

                                       -8-

<PAGE>

<TABLE>
<CAPTION>
                                                  Option Grants in Last Fiscal Year


                                                                                                  Potential Realized Value
                                              % of                                               At Assumed Annual Rates of
                                          Total Options                                           Stock Price Appreciation
                                           Granted to                                                For Option Term
                           Options         Employees       Exercise Price   Expiration          ----------------------------
Name                     Granted (1)     in Fiscal Year     Per Share (2)      Date                5%                 10%
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                        <C>              <C>                <C>            <C>               <C>                <C>     
Gary K. Willis             45,000           20.83%             $4.00          8/24/04           $113,201           $286,874

Mark J. Bonney             30,000           13.89%             $4.00          8/24/04           $ 75,467           $191,249

Carl A. Zanoni             30,000           13.89%             $4.00          8/24/04           $ 75,467           $191,249
</TABLE>

     (1)  Options vest ratably over four years on the  anniversary of the grant.
          In connection  with the issuance of these  options,  option grants for
          the  next  two  years  were  foregone.   See   "Committee   Report  to
          Stockholders -- 1995 Compensation to Chief Executive Officer" later in
          this Proxy Statement.

     (2)  The exercise price of all options granted during fiscal 1995 was equal
          to the market value of the  underlying  Common Stock on the day of the
          grant.


<TABLE>
<CAPTION>
                                           Aggregated Option Exercises in Last Fiscal Year
                                                  and Fiscal Year-End Option Values

                                                                          Number of                     Value of Unexercised
                                                                   Unexercised Options at               In-the-Money Options
                                                                        June 30, 1995                   at June 30, 1995 (1)
                                                              ----------------------------------------------------------------------
                         Shares Acquired        Value
Name                       on Exercise         Realized       Exercisable        Unexercisable     Exercisable       Unexercisable
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                             <C>                <C>           <C>                <C>            <C>                <C>       
Gary K. Willis                  0                  0             41,250             71,250         $  730,001         $1,307,501

Mark J. Bonney                  0                  0             11,625             51,375         $  221,066         $  959,442

Carl A. Zanoni                  0                  0             26,325             43,425         $  508,982         $  806,089
</TABLE>

     (1)  Zygo  Corporation  Common  Stock  price  at June 30,  1995 was  $22.50
          (adjusted  for the  effect  of the 3 for 2  stock  split  referred  to
          earlier in this Proxy Statement).

                                       -9-

<PAGE>

                        Committee Report to Stockholders

     The report of the Compensation  Committee shall not be deemed  incorporated
by  reference by any general  statement  incorporating  by reference  this proxy
statement  into any filing  under the  Securities  Act of 1933,  as amended (the
"Securities Act"), or under the Securities Exchange Act of 1934, as amended (the
"Exchange Act"), except to the extent that the Company specifically incorporates
this  information  by  reference,  and shall not otherwise be deemed filed under
such Acts.

     The Compensation Committee is comprised of three non-employee directors. As
members of the Compensation Committee, it is our responsibility to determine the
most  effective  total  executive  compensation  strategy based on the Company's
business and consistent with stockholders' interests. Our specific duties entail
reviewing the Company's compensation practices and recommending compensation for
executives and key employees.


Compensation Philosophy

     The Company  believes  that a strong,  explicit  link should exist  between
executive compensation and the value delivered to stockholders.  This belief has
been adhered to by  developing  both  short-term  and  long-term  incentive  pay
programs which provide competitive  compensation and mirror Company performance.
The  overall  objectives  of this  strategy  are to attract  and retain the best
possible  executive  talent,  to motivate these  executives to achieve the goals
inherent in the Company's strategy,  to link executive and stockholder interests
through equity-based plans and to provide a compensation package that recognizes
individual contributions as well as overall business results.

     Pay Mix and Measurement.  The Company's executive  compensation is based on
three components,  base salary, short-term incentives, and long-term incentives,
each of which is  intended  to serve the  overall  compensation  philosophy.  In
awarding salary increases and bonuses, the Compensation Committee did not relate
the various  elements of  corporate  performance  to each  element of  executive
compensation.   Rather,  the  Compensation   Committee  considered  whether  the
compensation  package as a whole  adequately  compensated each executive for the
Company's performance and an executive's contribution to such performance.

     Base Salary. Base salaries for executive officers are initially  determined
by evaluating  the  responsibilities  of the position held and the experience of
the individual,  and by reference to the  competitive  marketplace for executive
talent,  including a comparison  to base  salaries for  comparable  positions at
other companies.  Annual salary adjustments are determined by evaluating overall
Company  performance and the  performance of each executive  officer taking into
account new responsibilities.  Individual  performance ratings take into account
such factors as  achievement  of the operating  plan and  attainment of specific
individual objectives.

                                      -10-

<PAGE>

     Short-Term  Incentives.  At the start of each fiscal year, target levels of
financial performance are established by senior management of the Company during
the budgeting process and approved by the Board of Directors. An incentive award
opportunity  is established  for each employee based on the employee's  level of
responsibility,   potential  contribution,  the  success  of  the  Company,  and
competitive considerations.

     The  employee's  actual award is  determined  at the end of the fiscal year
based on the Company's achievement of its pretax profit and revenue goals and an
assessment of the employee's individual performance,  including contributions in
a number of specific areas, such as quality, customer satisfaction,  innovation,
and  efficiency.  All  awards  made to senior  executives  are  approved  by the
Compensation Committee.

     Long-Term Incentives. Stock options are granted from time to time to reward
key employees'  contributions.  The grant of options is based primarily on a key
employee's  potential  contribution to the Company's  growth and  profitability.
Options are granted at the prevailing market value of the Company's Common Stock
and will only have value if the  Company's  stock  price  increases.  Generally,
grants  of  options  vest in  equal  amounts  over  four or five  years  and the
individual must continue to be employed by the Company for such options to vest.
All option grants are approved by the Non-Qualified Plan Committee.


1995 Compensation to Chief Executive Officer

     The compensation of Mr. Willis, the Chief Executive Officer of the Company,
has been determined and adjusted on the same basis as used for all executives as
described  above.  During  fiscal 1995,  Mr.  Willis  received  salary  payments
totaling $186,923, a 6.4% increase over that received in fiscal 1994. Mr. Willis
voluntarily  froze his base  compensation in fiscal 1994, and did not accept his
total  contractual  salary of $175,000 in fiscal 1993.  Mr. Willis also earned a
$45,600  bonus  under the  Company's  Management  Incentive  Plan for  attaining
certain  predetermined  financial  and  nonfinancial  objectives in fiscal 1995.
During  fiscal  1995,  Mr.  Willis was granted  non-qualified  stock  options to
purchase 45,000 shares of the Company's  Common Stock in line with the Company's
long-term incentive program whereby stock options are granted as an incentive to
certain key employees. The Non-Qualified Plan Committee, in order to incentivize
management to aggressively  pursue increased  shareholder  value,  determined to
grant  options to senior  management,  including  Mr.  Willis,  for an increased
number of shares of Common Stock in fiscal 1995,  and to forgo option  grants to
these  individuals  for the next two  years.  See  "Other  Agreements  and Other
Matters" later in this Proxy Statement.

     The Compensation  Committee believes that linking executive compensation to
corporate  performance  results  in a  better  alignment  of  compensation  with
corporate  business goals and stockholder value. As performance goals are met or
exceeded, resulting in increased value to stockholders,  executives are rewarded

                                      -11-

<PAGE>

commensurately.  The Compensation  Committee  believes that compensation  levels
during 1995 adequately reflect the Company's compensation goals and policies.

                                         COMPENSATION COMMITTEE

                                         Michael R. Corboy

                                         Seymour E. Liebman

                                         Robert G. McKelvey


                                Performance Graph

     The Stock Price Performance graph below shall not be deemed incorporated by
reference  by any  general  statement  incorporating  by  reference  this  proxy
statement  into any filing under the  Securities  Act or under the Exchange Act,
except to the extent the Company  specifically  incorporates this information by
reference, and shall not otherwise be deemed filed under such Acts.

     The graph below compares  cumulative  total return of the Company's  Common
Stock with the  cumulative  total  return of (i) the NASDAQ  Stock Market - U.S.
Index and (ii) an  industry  peer  group  index (the  "Peer  Index").  The graph
assumes  $100 was  invested  on July 1, 1990,  in each of the  Company's  Common
Stock, the stocks comprising the NASDAQ Index and the stocks comprising the Peer
Index,  and the  reinvestment of dividends.  The industry peer group consists of
companies included by NASDAQ in the Company's principal SIC Code Classification,
namely SIC Code No. 3832.

        [THE TABLE BELOW WAS REPRESENTED IN THE PRINTED BOOK AS A GRAPH]

               COMPARISON OF FIVE YEAR CUMULATIIVE TOTAL RETURN*
  AMONG ZYGO CORPORATION, THE NASDAQ STOCK MARKET -- US INDEX AND A PEER GROUP

Date      ZYGO CORPORATION         PEER GROUP          NASDAQ STOCK MARKET -- US
- ----      ----------------         ----------          -------------------------
6/90            100                   100                        100
6/91            150                   125                        106
6/92            105                   107                        127
6/93            125                    86                        160
6/94            118                    67                        162
6/95            614                   132                        215

*  $100 INVESTED ON 06/30/90 IN STOCK OR INDEX --
   INCLUDING REINVESTMENT OF DIVIDENDS.
   FISCAL YEAR ENDING JUNE 30.


                       Other Agreements and Other Matters

     In March  1995,  Mr.  Willis's  employment  agreement  with the Company was
amended,  effective  October 1994, to increase the annual salary  payable to Mr.
Willis to  $190,000  from  $175,000,  and to  increase  the  monthly  automobile
allowance from $600 to $900.  The amendment  further  automatically  extends the
term of the employment agreement for successive one year periods,  unless either
the Company or Mr. Willis gives the other notice of termination at least 30 days
prior to the end of that  contract  year,  and  provides  for certain  severance
payments.

     The amended  employment  agreement grants to Mr. Willis a severance package
to cover him in the event the  Company terminates his employment (other than for

                                      -12-

<PAGE>

justifiable cause, disability, or death) with the Company. Under the package, he
would  be  provided  with  his base  salary  from  the  time of his  involuntary
termination  to 12 months  thereafter.  In  addition,  in the  event Mr.  Willis
resigns within 90 days of a "Change in Control," as defined, of the Company, the
amendment  provides  for the  continued  payment  of Mr.  Willis'  salary  for a
one-year  period.  This  amended  severance  coverage  is in addition to (i) the
automatic vesting of all stock options to purchase shares of the Company's stock
then held by Mr. Willis and (ii) the continuation, for a period of the lesser of
three years or until covered by another plan, of all existing health  insurance,
dental coverage, life insurance, AD&D, and long-term disability coverage then in
effect for Mr.  Willis  (provided  that  during the  applicable  period in which
benefits  are  being  paid by the  Company,  Mr.  Willis  agrees to  maintain  a
consulting  relationship  with the Company which will not  interfere  with other
obligations of Mr. Willis),  previously provided for in the event of a Change in
Control in the Company.

     In August 1993, the Company entered into a Services  Agreement with each of
Paul F. Forman and Sol F. Laufer,  a former Vice  President of the Company and a
beneficial  owner of greater than five percent of the  Company's  Common  Stock,
providing  for the retention of Mr. Forman or Mr.  Laufer,  respectively,  as an
executive  officer of the  Company  through  the end of the 1994 fiscal year and
thereafter as a consultant to the Company for an additional  five years,  in the
case of Mr.  Forman,  and an  additional  four years in the case of Mr.  Laufer.
Pursuant to his Agreement,  Mr. Forman  received salary payments of $148,271 for
the year of employment, a one-time payment of $149,500 upon his termination from
active  employment,  and will receive a $20,000  retainer for board  service for
each of the five years of his  consultancy  plus 80%,  60%,  40%, and 20% of his
salary at June 30,  1994,  for each of the  first  through  fourth  years of his
consultancy, respectively. Pursuant to his Agreement, Mr. Laufer received salary
payments of $133,586 for the year of employment,  a one-time payment of $135,000
upon his termination of employment,  and will receive payments of 80%, 60%, 40%,
and 20% of his  salary  at June 30,  1994,  for  each of the  four  years of his
consultancy, respectively. Each of the Services Agreements further provided that
Mr.  Forman or Mr.  Laufer,  as the case may be, would have all his  outstanding
unvested  stock options from the Company  vested  effective at the conclusion of
the fiscal year ended June 30, 1994  (options for 20,475  shares of Common Stock
in the case of Mr.  Forman and 24,487  shares of Common Stock in the case of Mr.
Laufer,  as of June 30, 1994).  The Agreements are terminable  (with all payment
obligations thereunder terminating) by Mr. Forman or Mr. Laufer, as the case may
be, at any time,  and by the Company upon the death or  disability of Mr. Forman
or Mr. Laufer or for justifiable  cause (as defined in the  Agreements);  except
that if an Agreement  terminates  as a result of the death or  disability of Mr.
Forman or Mr. Laufer,  he (or his estate) will be entitled to receive the lesser
of twice his June 30,  1994,  salary  or the  aggregate  remaining  compensation
payments otherwise required to be made under the Agreement.

     The Services  Agreements,  which contain certain restrictions on soliciting
employees and others and are coexistent with certain Non-Competition  Agreements
between Mr.  Forman or Mr. Laufer and the Company,  replace the  Confidentiality

                                      -13-

<PAGE>

and Non-Competition Agreements, dated October 25, 1983, entered into between Mr.
Forman and Mr.  Laufer and the Company.  Pursuant to these  Confidentiality  and
Non-Competition  Agreements,  upon the involuntary termination of his employment
by the Company without cause,  Mr. Forman or Mr. Laufer was entitled to receive,
for each of the five years from the  termination  of his  employment,  an amount
equal to the highest annual compensation  (salary plus bonus) received by him at
any time during  that  termination  year or any of the three  years  immediately
preceding  his  termination,  increasing  each of the five  years by 12% or,  if
greater, the consumer price index increase for that year.


                 Certain Relationships and Related Transactions

     Canon Sales Co.,  Inc.,  a  subsidiary  of Canon,  serves as the  exclusive
distributor of the Company's  products in Japan.  (See  "Compensation  Committee
Interlocks and Insider  Participation"  earlier in this Proxy  Statement.) Canon
does not  manufacture or sell  interferometers  which compete with the Company's
products.  Canon has  advised  the Company  that it does not  presently  plan to
manufacture  or sell  interferometers  which would  compete  with the  Company's
current products.

     On November 30,  1993,  in  connection  with the  termination  of a certain
Stockholders'  Agreement,  Canon,  Wesleyan University,  Paul F. Forman, Carl A.
Zanoni,  Sol F.  Laufer,  and the Company  entered  into a  Registration  Rights
Agreement. In general, the Registration Rights Agreement grants to each of these
stockholders  the right,  until  November 30, 1998, to have his or its shares of
Common  Stock  included  in any  registered  public  offering  of the  Company's
securities.


                             Principal Stockholders

     The only  stockholders who, as of August 31, 1995, have advised the Company
that they  beneficially  own  (because  of sole or shared  voting or  investment
power)  more than 5% of the  Company's  outstanding  Common  Stock are set forth
below. Such beneficial owners have sole voting and investment power with respect
to the shares of Common  Stock shown as owned by them,  except for shares  which
can be acquired by the exercise of options.

                                                                  Percent of
Name and Address                          Number of Shares       Common Stock
- --------------------------------------------------------------------------------
Canon Inc.                                   786,000                20.0%
Shinjuku Dai-Ichi Seimei Building
Tokyo 160, Japan

                                      -14-

<PAGE>

                                                                  Percent of
Name and Address                          Number of Shares       Common Stock
- --------------------------------------------------------------------------------
Wesleyan University                          397,500                10.1%
Middletown, Connecticut 06457

Paul F. Forman                               273,060(1)              6.9%
15 Flying Point Road
Stony Creek, Connecticut 06405

Sol F. Laufer                                213,810(2)              5.4%
730 Arbutus Street
Middletown, Connecticut 06457

Carl A. Zanoni                               289,110(3)              7.3%
99 Long Hill Road
Middlefield, Connecticut 06457

     (1)  Includes  options to purchase  39,000 shares of Common Stock which are
          exercisable within 60 days.

     (2)  Includes  options to purchase  45,750 shares of Common Stock which are
          exercisable within 60 days.

     (3)  Includes  options to purchase  36,450 shares of Common Stock which are
          exercisable within 60 days.


                Proposal No. 2 - Adoption of an Amendment to the
                 Company's Restated Certificate of Incorporation

     The Board of Directors has approved and recommends that the stockholders of
the Company  approve an amendment to Article  FOURTH of the  Company's  Restated
Certificate  of  Incorporation   (the  "Charter")  to  increase  the  number  of
authorized  shares of Common Stock from 10,000,000 to 15,000,000  shares. Of the
10,000,000 shares of Common Stock presently authorized,  ______ shares have been
issued and are  outstanding  as of September 22, 1995.  An additional  1,275,000
shares in the aggregate are reserved for issuance under the  Non-Qualified  Plan
and the Zygo  Corporation  Non-Employee  Director  Stock Option Plan  (1,725,000
shares  in  the  aggregate  in  the  event  Proposal  No.  3 is  adopted  by the
stockholders).

     The additional  shares of Common Stock would be available for issuance from
time to time,  as  determined by the Board of  Directors,  for  acquisitions  of
properties or securities of other  companies,  employee  benefit  plans,  equity
financings, stock dividends or splits, and other general corporate purposes. The
Company  has in the past  sought and  continues  to  actively  seek  acquisition
candidates  intended to increase  stockholder values of the Company.  Several of
the proposed  acquisitions  reviewed by the Company contemplated the issuance of

                                      -15-

<PAGE>

the Company's Common Stock as partial consideration for the acquired businesses.
The Board of Directors  therefore considers it important that the Company have a
sufficient number of authorized  shares available for possible  acquisitions and
other corporate purposes. No further action or authorization by the stockholders
would be necessary  prior to the issuance of additional  shares unless  required
for a particular  transaction by applicable law or regulatory agencies or by the
rules of any  stock  exchange  on which  the  Company's  securities  may then be
listed.  Stockholders  of the  Company  have no  preemptive  rights to  purchase
additional shares when issued.

     Accordingly,  the Board of Directors  has adopted and  recommends  that the
stockholders approve the following resolution:

          RESOLVED,   that  the   Certificate  of   Incorporation   of  the
     Corporation  be amended to  authorize  the  issuance  of up to Fifteen
     Million (15,000,000) shares of Common Stock, so that Article Fourth of
     the  Corporation's   Certificate  of  Incorporation  be  amended  (the
     "Amendment") to read in its entirety as follows:

               "FOURTH:  The total number of shares of stock which the
          corporation shall have authority to issue is Fifteen Million
          (15,000,000).  The par  value of each of such  shares is Ten
          Cents  ($.10).  All such  shares  are of one  class  and are
          shares of Common Stock."

     Although  not a factor in the Board of  Directors'  decision to propose the
amendment,  one of the effects of the  amendment to the Charter may be to enable
the Board to render more difficult or to discourage an attempt to obtain control
of the Company,  since the issuance of these additional  shares could be used to
dilute the stock  ownership  of persons  seeking to obtain  control or otherwise
increase the cost of obtaining control of the Company. As of September 22, 1995,
the Company's  executive officers and directors,  through their affiliation with
certain  stockholders,  may be deemed to beneficially own approximately 53.9% of
the then outstanding shares of Common Stock.


Vote Required.

     The  affirmative  vote of the holders of a majority of the shares of Common
Stock outstanding and entitled to vote at the Annual Meeting is required for the
adoption of the proposed  amendment to the  Company's  Restated  Certificate  of
Incorporation.

     The Board of Directors  deems Proposal No. 2 to be in the best interests of
the Company and its stockholders and recommends that the stockholders vote "FOR"
the approval thereof.


           Proposal No. 3 - Adoption of an Amendment to the Company's

                                      -16-

<PAGE>

              Amended and Restated Non-Qualified Stock Option Plan

     By unanimous  written consent on September 17, 1992, the Board of Directors
adopted, subject to stockholder approval, the Amended and Restated Non-Qualified
Stock Option Plan. The  Non-Qualified  Plan, as presently in existence,  permits
the  granting  of options to  purchase  an  aggregate  of 975,000  shares of the
Company's  Common  Stock to present or future key  employees of the Company or a
subsidiary  of the Company and to directors of the Company,  whether or not they
are  employees  of the  Company.  A "key  employee"  is defined as an officer or
employee who has substantial  responsibility  in the direction and management of
the Company or any division,  branch or subsidiary of the Company.  The Board of
Directors has unanimously adopted, subject to stockholder approval, an amendment
to the  Non-Qualified  Plan which would  increase the number of shares of Common
Stock which may be issued thereunder from 975,000 shares to 1,425,000 shares. As
of September 1, 1995, the number of shares available for future grants under the
Non-Qualified Plan was 43,170.

     The Board of Directors  believes that approval of the amendment to increase
the number of shares which may be issued under the Non-Qualified Plan will serve
the best  interests  of the  Company  and its  stockholders  by  permitting  the
Non-Qualified   Plan   Committee   to  exercise   needed   flexibility   in  the
administration of the Non-Qualified Plan and the granting of options thereunder.
In addition,  the Board  believes that the ability to grant  additional  options
will help  attract,  motivate and retain key  employees who are in a position to
contribute to the successful  conduct of the business and affairs of the Company
as well as stimulate in such  individuals an increased  desire to render greater
service to the Company.

     The  Non-Qualified  Plan is  administered  by a  committee  of at least two
members  of the  Board of  Directors,  chosen  by the  Board of  Directors.  The
Committee  presently  consists of Messrs.  Corboy,  Liebman and  McKelvey.  Each
member of the Committee must be a "disinterested  person" in accordance with the
applicable provisions of Rule 16b-3, which requires, among other things, that no
member of the  Committee  may  receive an option  under the  Non-Qualified  Plan
within  one year  prior to his  becoming  a member or at any time  while he is a
member.  Subject to the provisions of the  Non-Qualified  Plan the Committee has
the  authority  to  determine  the  individuals  to whom stock  options  will be
granted,  the number of shares to be covered by each option,  the option  price,
the  option  period,  the  vesting  restrictions,  if any,  with  respect to the
exercise of the option, and other terms and conditions.

     The terms and  conditions of each option  granted  under the  Non-Qualified
Plan must be set forth in a Stock Option  Agreement issued by the Company to the
optionee.  Any such Stock  Option  Agreement  must include  certain  provisions,
including that (i) the full purchase price of shares  purchased under the option
will be paid upon  exercise  thereof,  (ii) the option expire not later than ten
years from the date the option is granted,  or prior  thereto,  if the  optionee
ceases to be employed by the Company or a subsidiary  thereof (otherwise than by
reason of the optionee's  death) unless extended by the Committee  acting in its

                                      -17-

<PAGE>

sole  discretion  (provided  that no such  extension  shall  result in an option
having a term  greater  than ten  years),  and  (iii)  the  option  shall not be
transferrable  other than by will or by the laws of descent and distribution and
is exercisable during the lifetime of the optionee only by him or her.

     The Board may amend or terminate the Non-Qualified  Plan, provided that any
amendment which would increase the aggregate number of shares of Common Stock as
to  which  options  may  be  granted  under  the   Non-Qualified   Plan  (except
anti-dilution   adjustments),   materially   increase  the  benefits  under  the
Non-Qualified  Plan, or modify the class of persons  eligible to receive options
under  the  Non-Qualified   Plan  shall  be  subject  to  the  approval  of  the
stockholders.  No option  may be  granted  under the  Non-Qualified  Plan  after
September 2, 1997.

     The table below  indicates stock options which have been granted during the
1995 fiscal year under the  Non-Qualified  Plan to (i) each person  named in the
Summary  Compensation Table appearing earlier in this Proxy Statement,  (ii) all
current  executive  officers  of the  Company  as a  group,  (iii)  all  current
directors  of the  Company  who are not  executive  officers of the Company as a
group and (iv) all employees of the Company,  including all current  officers of
the Company who are not executive officers of the Company, as a group:


                         Non-Qualified Stock Option Plan
                       Benefits Granted During Fiscal 1995

Name and Position                     Dollar Value ($)      Number of Shares
- -----------------                     ----------------      ----------------
Gary K. Willis
President and Chief
Executive Officer, Director                  $0                  45,000

Mark J. Bonney                                       
Vice President, Finance                              
and Administration,                                  
Treasurer, Chief Financial                           
Officer                                       0                  30,000

Carl A. Zanoni                                       
Vice President, Research,                            
Development and                                      
Engineering, Director                         0                  30,000

Executive Officers as a                              
Group                                         0                 105,000

Non-Executive Officer                                
Director Group                                0                       0

                                      -18-

<PAGE>

Name and Position                     Dollar Value ($)      Number of Shares
- -----------------                     ----------------      ----------------
Non-Executive Officer                                
Employee Group                                0                 219,000



Federal Income Tax Consequences

     An optionee does not realize taxable income upon the grant of an option. In
general,  an optionee  realizes  ordinary  income  when the option is  exercised
(assuming  the  stock  acquired  is either  transferrable  or not  subject  to a
substantial  risk of  forfeiture)  equal to the excess of the value of the stock
over the exercise price (i.e.,  the option spread),  and the Company  receives a
corresponding  deduction if applicable withholding  requirements are met. (If an
option  is  exercised  within  six  months  after  the date of grant  and if the
optionee is subject to the six-month  restrictions on sale of Common Stock under
Section 16(b) of the  Securities  Exchange Act of 1934,  the optionee  generally
recognizes  ordinary income on the date the restrictions  lapse, unless an early
income  recognition  election  is made.)  Upon a later  sale of the  stock,  the
optionee  realizes  capital  gain or loss equal to the  difference  between  the
selling  price and the value of the stock at the time the option  was  exercised
(or, if later,  the time  ordinary  income was  recognized  with  respect to the
exercise.)

     Accordingly,  the  Board of  Directors  recommends  that  the  stockholders
approve the following resolution:

          RESOLVED,  that the total  number of shares of the  Corporation's
     Common Stock which may be issued under the  Corporation's  Amended and
     Restated  Non-Qualified  Stock Plan (the  "Non-Qualified  Stock Plan")
     shall be increased to 1,425,000  shares, so that the first sentence of
     Section 2 of the Plan be amended to read in its entirety as follows:

          "Except  as  otherwise  permitted  pursuant  to  paragraph 6
          hereof,  the total number of shares of the Company's  Common
          Stock,  par value $.10 per share,  which may be issued under
          the  Non-Qualified  Plan shall not exceed  1,425,000  (after
          giving effect to the three for two stock split authorized by
          the  Company's  Board of Directors on July 20, 1995) and may
          be authorized  and unissued  shares or issued and reacquired
          shares,  as the  Board of  Directors  may from  time to time
          determine."


Vote Required

     The  affirmative  vote of the holders of a majority of the shares of Common
Stock of the Company present or represented by proxy and entitled to vote at the
Annual  Meeting is required for the  adoption of the  proposed  amendment to the
Non-Qualified Plan.

                                      -19-

 
<PAGE>

     The Board of Directors  deems Proposal No. 3 to be in the best interests of
the Company and its stockholders and recommends that the stockholders vote "FOR"
the approval thereof.


                      PROPOSAL NO. 4 - Indemnity Agreements
                           with Directors and Officers

     The Board of Directors has unanimously approved a proposal to authorize the
Company to enter into Indemnity  Agreements  ("Indemnity  Agreements")  with its
directors and officers.  The Board of Directors  believes that it is in the best
interests  of  the  Company  and  its   stockholders   to  provide  the  maximum
indemnification allowed by law to its directors and officers. The directors have
a direct personal  interest in the approval of the form of Indemnity  Agreements
and in any potential  payments under the Indemnity  Agreements  arising from any
judgment or  settlement  of a derivative  suit.  The full text of the  Indemnity
Agreement, in substantially the form the Company proposes to enter into with its
directors and  officers,  is attached as Appendix A.  Stockholders  are urged to
read the  provisions of the proposed  form of Indemnity  Agreement in Appendix A
and the  following  discussion  of the  Indemnity  Agreements  is  qualified  by
reference thereto.


Description and Effect of Indemnity Agreements

     Section  145  of the  Delaware  General  Corporation  Law  provides  that a
director,  officer,  employee or agent of a corporation (i) shall be indemnified
by the  corporation for all expenses of such litigation when he is successful on
the  merits,  (ii)  may be  indemnified  by the  corporation  for the  expenses,
judgments, fines and amounts paid in settlement of such litigation (other than a
derivative suit) even if he is not successful on the merits, if he acted in good
faith and in a manner he reasonably believed to be in or not opposed to the best
interests of the corporation (and in the case of a criminal  proceeding,  had no
reason to believe his conduct was  unlawful),  and (iii) may be indemnified by a
corporation for expenses of a derivative suit (a suit by a stockholder  alleging
a breach by a director or officer of a duty owed to the corporation), even if he
is not  successful  on the  merits,  if he  acted in good  faith in a manner  he
reasonably  believed  to be in or not  opposed  to  the  best  interests  of the
corporation,  provided  that no such  indemnification  may be made in accordance
with clause (iii) if he is adjudged  liable to the  corporation,  unless a court
determines that, despite such adjudication but in view of all the circumstances,
he is entitled to indemnification. The indemnification described in clauses (ii)
and (iii)  above may be made only upon  determination,  by (i) a  majority  of a
quorum of disinterested  directors,  (ii) independent legal counsel or (iii) the
stockholders,  that indemnification is proper because the applicable standard of
conduct  has been met.  A  corporation  may  advance  litigation  expenses  to a
director or officer prior to the final  disposition  of such action upon receipt
of an  undertaking  by such  director or officer to repay such expenses if it is
ultimately  determined  that he is not  entitled  to be  indemnified  for  them.
Section 145 also provides that the  indemnification  and advancement of expenses
provided by that Section are not  exclusive of any other rights to which persons

                                      -20-

<PAGE>

seeking  indemnification  or  advancement  of expenses may be entitled under any
by-law, agreement, vote of stockholders or disinterested directors or otherwise.

     The  statutory  indemnification  scheme set forth in Section  145 has three
major limitations which are addressed by the Indemnity Agreements: (i) it is not
clear  that a  director  or  officer  may be  indemnified  for  amounts  paid in
settlement  of a derivative  action;  (ii) the Company is under no obligation to
advance litigation  expenses to a director or officers;  and (iii) except in the
case of  litigation  in which a director or officer is successful on the merits,
indemnification of a director or officer is discretionary rather than mandatory.

     The Indemnity Agreements are based on the indemnification  scheme set forth
in Section 145 of the Delaware General  Corporation Law, with certain changes or
additions. The principal changes or additions are as follows:

          First,  the Indemnity  Agreements  establish the presumption that
     the  director  or officer has met the  applicable  standard of conduct
     required for indemnification.  Indemnification will be made unless the
     Board  of  Directors  or  independent   counsel  determines  that  the
     applicable standard of conduct has not been met.

          Second, the Indemnity Agreements provide that litigation expenses
     shall be advanced  to a director  or officer at his  request  provided
     that he  undertakes  to repay the amount  advanced if it is ultimately
     determined  that  he is  not  entitled  to  indemnification  for  such
     expense.

          Third,  the  Indemnity  Agreements  explicitly  provide  that the
     indemnification  provisions  applicable  to a  derivative  suit  cover
     amounts paid in settlement.

          Fourth, in the event of a determination by the Board of Directors
     or  independent  legal counsel that a director or officer did not meet
     the standard of conduct  required for  indemnification,  the Indemnity
     Agreements   allow  such   director   or   officer  to  contest   this
     determination   by   petitioning  a  court  to  make  an   independent
     determination  of whether  such  director  or officer is  entitled  to
     indemnification under the Indemnity Agreements.

          Fifth, the Indemnity  Agreements  explicitly  provide for partial
     indemnification  of costs and expenses in the event that a director or
     officer is not entitled to full indemnification under the terms of the
     Indemnity Agreement.

          Finally, no indemnification  will be provided under the Indemnity
     Agreements  if: (i) a final court  adjudication  determines  that such

                                    -21-

<PAGE>

     indemnification  is  not  lawful  or  the  indemnitee's   conduct  was
     knowingly  fraudulent,  deliberately  dishonest or constituted willful
     misconduct,  (ii) in respect of any suit in which judgment is rendered
     against  the  indemnitee  for an  accounting  of  profits  made from a
     purchase or sale of  securities of the Company in violation of Section
     16(b) of the  Securities  Exchange  Act of 1934 (the "1934 Act") or of
     any similar statutory  provision,  or (iii) in connection with certain
     actions  by the  indemnitee  against  the  Company  or its  directors,
     officers  or  employees.   The  Indemnity   Agreements   also  contain
     provisions   designed  to  protect  the  Company   from   unreasonable
     settlements or redundant legal expenditures.

     The SEC  takes the  position  that  indemnification  of  directors  against
violations  of  the  Securities  Act  of  1933  is  against  public  policy  and
unenforceable,  and any time the Company  registers  securities  with the SEC it
must  execute  an  undertaking  to submit to a court any  indemnification  claim
arising with respect to the registered  securities for a  determination  whether
the clause is enforceable and to be bound by the court's decision.  Accordingly,
any claim made by an  indemnitee  of the  Company for  indemnification  under an
Indemnity Agreement with respect to a claim subject to the Company's undertaking
to the  SEC  will  have  to be  submitted  to a court  before  a  final  payment
thereunder would be made to the indemnitee.

     By entering into Indemnity  Agreements,  directors and officers are assured
that indemnification will be provided by the Company as a contractual obligation
despite  future  changes in the By-laws or Charter of the Company.  In addition,
the execution of Indemnity Agreements will provide to directors and officers the
additional  benefits  set forth above which are not  explicitly  provided for in
Section 145 of the Delaware General  Corporation Law or in the Company's By-laws
or Charter.  The Indemnity Agreements will be applicable only to claims asserted
after  their  effective  dates.  The  Company  knows of no  recent,  pending  or
threatened litigation which might result in claims for indemnification under the
Indemnity  Agreements or which would have resulted in claims for indemnification
had the Indemnity Agreements been in effect at the time of the litigation.

     The Indemnity Agreements may have certain  disadvantages to the Company and
its  stockholders.  The  Company  currently  carries  officers'  and  directors'
liability  insurance  in the  amount of  $6,000,000.  Accordingly,  any  amounts
required to be paid under the  Indemnity  Agreements  in excess of the amount of
coverage,  will be paid out of the Company's  funds,  thus placing the Company's
assets and equity at risk and  potentially  adversely  affecting a stockholder's
investment in the Company.

     The  Board  of  Directors  is  advancing  the  proposal  on  the  Indemnity
Agreements,  and the Indemnity Agreements will be entered into, in reliance upon
that  provision  of  the  Delaware   indemnification  statute  which  authorizes
indemnification  beyond that  expressly  specified in the statute.  The Board of
Directors will designate the directors and officers of the Company with whom the
Company will enter into such Indemnity Agreements. It is expected that Indemnity
Agreements  will be  entered  into  with  each of the  Company's  directors  and

                                      -22-

<PAGE>

executive officers. If the Company's entering into Indemnity Agreements with its
directors and officers is approved,  it is anticipated  that similar  agreements
may be entered,  from time to time,  with future  directors  and officers of the
Company.


Submission to Stockholders for Approval

     Stockholder  approval  is not  required  for the  Company to enter into the
Indemnity Agreements as proposed.  The Board of Directors is seeking stockholder
approval  because the directors  would  potentially  benefit by entering into an
Indemnity  Agreement  with  the  Company.  Approval  of  this  proposal  by  the
stockholders will insulate the Indemnity Agreements against a challenge to their
legality in most instances.  However, the Indemnity Agreements may not be upheld
if a court finds fraud,  waste or other  contravention  of public  policy in the
particular circumstances.

     THE BOARD OF DIRECTORS  DEEMS PROPOSAL NO. 4 TO BE IN THE BEST INTERESTS OF
THE COMPANY AND ITS STOCKHOLDERS AND RECOMMENDS A VOTE "FOR" APPROVAL THEREOF.

     THE DIRECTORS HAVE A DIRECT  PERSONAL  INTEREST IN THE APPROVAL OF THE FORM
OF INDEMNITY AGREEMENT AT THE POTENTIAL EXPENSE OF THE COMPANY'S STOCKHOLDERS.


                Relationship With Independent Public Accountants

     KPMG Peat Marwick LLP (KPMG) has been selected as the Company's independent
auditors for fiscal 1996. A representative  of KPMG is expected to be present at
the Annual Meeting with the opportunity to make a statement if he so desires and
to be available to respond to appropriate questions.


                              Stockholder Proposals

     All  stockholder  proposals  which are intended to be presented at the 1996
Annual Meeting of Stockholders of the Company must be received by the Company no
later  than  June 13,  1996,  for  inclusion  in the Board of  Directors'  proxy
statement and form of proxy relating to that meeting.


                     Other Matters Coming Before The Meeting

     As of the date of this Proxy  Statement,  the Board of  Directors  does not
know of any matters to be  presented  to the meeting  other than the matters set
forth in the attached  Notice of Annual  Meeting.  If any other matter  properly
comes  before the meeting,  it is intended  that the holders of the proxies will

                                      -23-

<PAGE>

vote thereon in their discretion.


                                        By Order of the Board of Directors



                                        Paul Jacobs,
                                        Secretary

October 10, 1995

                                      -24-

<PAGE>




                                      PROXY

                                ZYGO CORPORATION
                Annual Meeting of Stockholders, November 16, 1995
           This Proxy is solicited on behalf of the Board of Directors


     The  undersigned  hereby appoints Mr. Mark J. Bonney and Mr. Gary K. Willis
as Proxies,  and each of them acting singly, with power of substitution to each,
and hereby authorizes them to represent and to vote, as designated below, all of
the shares of Common Stock of Zygo Corporation held of record by the undersigned
on  September  22, 1995,  at the annual  meeting of  stockholders  to be held on
November 16, 1995, at 10:00 a.m., or any adjournments thereof.

     This  proxy when  properly  executed  will be voted in the manner  directed
herein by the  undersigned  stockholder(s).  If no direction is made, this Proxy
will be voted for Proposal Nos. 1, 2, 3 and 4. In their  discretion  the Proxies
are  authorized to vote upon such other business as may properly come before the
meeting.


Please mark,  sign, date, and return this proxy card promptly using the enclosed
envelope.

     I PLAN TO ATTEND THE MEETING IN MIDDLEFIELD,  CONNECTICUT,  ON NOVEMBER 16,
1995.


             (Continued and to be dated and signed on reverse side)

<PAGE>


     Proposal No. 1.  Election of Directors:  The eight  nominees are Michael R.
     Corboy,  Paul F. Forman,  Seymour E. Liebman,  Robert G. McKelvey,  Paul W.
     Murrill, Robert B. Taylor, Gary K. Willis, and Carl A. Zanoni.


For all listed      Withhold authority           For all listed Nominees, except
Nominees            for all listed Nominees      withhold for the following
                                                 Nominees (write name(s)
                                                 below)


                                                 -------------------------------

Proposal No. 2. Adoption of an amendment to the Company's  Restated  Certificate
     of Incorporation

         For                       Against                     Abstain

Proposal No. 3. Adoption of an amendment to the  Company's  Amended and Restated
     Non-Qualified Stock Option Plan.

         For                       Against                     Abstain

Proposal No. 4. Approval of the Company's  entering  into  indemnity  agreements
     with its directors and officers

         For                       Against                     Abstain


                                              Please   sign   exactly   as  name
                                              appears  hereon.  All joint owners
                                              should   sign.   When  signing  as
                                              attorney, executor, administrator,
                                              trustee, guardian or custodian for
                                              a minor, please give full title as
                                              such.  If  a  corporation,  please
                                              sign  full   corporate   name  and
                                              indicate the signer's office. If a
                                              partnership,    please   sign   in
                                              partnership   name  by  authorized
                                              person.


                                              Date: ______________________, 1995


                                              ----------------------------------
                                                          Signature


                                              ----------------------------------
                                                  Signature if held jointly

                                              PLEASE  MARK YOUR CHOICE LIKE THIS
                                              |X| IN BLUE OR BLACK INK.

                                       -2-


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