ZYGO CORP
S-3, 2001-01-05
OPTICAL INSTRUMENTS & LENSES
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<PAGE>
    AS FILED WITH THE SECURITIES AND EXCHANGE COMMISSION ON JANUARY 5, 2001.
                                                      REGISTRATION NO. 333-
--------------------------------------------------------------------------------
--------------------------------------------------------------------------------

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            ------------------------

                                    FORM S-3
                             REGISTRATION STATEMENT
                                     UNDER
                           THE SECURITIES ACT OF 1933

                            ------------------------

                                ZYGO CORPORATION
             (Exact name of registrant as specified in its charter)

<TABLE>
<S>                                                      <C>
                       DELAWARE                                                06-0864500
   (State or other jurisdiction of incorporation or              (I.R.S. Employer Identification Number)
                     organization)
</TABLE>

                               LAUREL BROOK ROAD
                      MIDDLEFIELD, CONNECTICUT 06455-0448
                                 (860) 347-8506
   (Address, including zip code and telephone number, including area code, of
                   registrant's principal executive offices)

                               J. BRUCE ROBINSON
                     PRESIDENT AND CHIEF EXECUTIVE OFFICER
                               LAUREL BROOK ROAD
                      MIDDLEFIELD, CONNECTICUT 06455-0448
                                 (860) 347-8506
(Name, address, including zip code and telephone number, including area code, of
                               agent for service)

                         ------------------------------

                                   COPIES TO:

<TABLE>
<S>                                         <C>
            PAUL JACOBS, ESQ.                         STEVEN R. FINLEY, ESQ.
        SHELDON G. NUSSBAUM, ESQ.                  Gibson, Dunn & Crutcher LLP
       Fulbright & Jaworski L.L.P.                       200 Park Avenue
             666 Fifth Avenue                        New York, New York 10166
         New York, New York 10103                         (212) 351-4000
              (212) 318-3000
</TABLE>

                           --------------------------

    APPROXIMATE DATE OF COMMENCEMENT OF PROPOSED SALE TO THE PUBLIC: From time
to time after the effective date of this Registration Statement.

    If the only securities being registered on this Form are being offered
pursuant to dividend or interest reinvestment plans, please check the following
box. / /

    If any of the securities being registered on this Form are to be offered on
a delayed or continuous basis pursuant to Rule 415 under the Securities Act of
1933, as amended, other than securities offered only in connection with dividend
or interest reinvestment plans, check the following box. / /

    If this Form is filed to register additional securities for an offering
pursuant to Rule 462(b) under the Securities Act, please check the following box
and list the Securities Act registration statement number of the earlier
effective registration statement for the same offering. / /

    If this Form is a post-effective amendment filed pursuant to Rule 462(c)
under the Securities Act, check the following box and list the Securities Act
registration statement number of the earlier effective registration statement
for the same offering. / /

    If delivery of the prospectus is expected to be made pursuant to Rule 434,
please check the following box. / /

                           --------------------------

                        CALCULATION OF REGISTRATION FEE

<TABLE>
<CAPTION>
                                                                    PROPOSED MAXIMUM     PROPOSED MAXIMUM
                                                 AMOUNT TO BE           AGGREGATE            AGGREGATE            AMOUNT OF
      TITLE OF SHARES TO BE REGISTERED            REGISTERED       PRICE PER UNIT (1)     OFFERING PRICE      REGISTRATION FEE
<S>                                           <C>                  <C>                  <C>                  <C>
Common Stock, $.10 par value per share......       3,750,000            $30.84375          $115,664,062            $28,916
</TABLE>

(1) The price is estimated in accordance with Rule 457(c) under the Securities
    Act of 1933, as amended, solely for the purpose of calculating the
    registration fee and is $30.84375, the average of the high and low prices of
    the common stock of Zygo Corporation as reported on the Nasdaq National
    Market on January 4, 2001.

                           --------------------------

    THE REGISTRANT HEREBY AMENDS THIS REGISTRATION STATEMENT ON SUCH DATE OR
DATES AS MAY BE NECESSARY TO DELAY ITS EFFECTIVE DATE UNTIL THE REGISTRANT SHALL
FILE A FURTHER AMENDMENT WHICH SPECIFICALLY STATES THAT THIS REGISTRATION
STATEMENT SHALL THEREAFTER BECOME EFFECTIVE IN ACCORDANCE WITH SECTION 8(A) OF
THE SECURITIES ACT OF 1933 OR UNTIL THE REGISTRATION STATEMENT SHALL BECOME
EFFECTIVE ON SUCH DATE AS THE COMMISSION, ACTING PURSUANT TO SAID SECTION 8(A),
MAY DETERMINE.

--------------------------------------------------------------------------------
--------------------------------------------------------------------------------
<PAGE>
                  SUBJECT TO COMPLETION, DATED JANUARY 5, 2001
THE INFORMATION IN THIS PROSPECTUS IS NOT COMPLETE AND MAY BE CHANGED. A
REGISTRATION STATEMENT RELATING TO THESE SECURITIES HAS BEEN FILED WITH THE
SECURITIES AND EXCHANGE COMMISSION. THESE SECURITIES MAY NOT BE SOLD NOR MAY
OFFERS TO BUY BE ACCEPTED BEFORE THE REGISTRATION STATEMENT BECOMES EFFECTIVE.
THIS PROSPECTUS IS NOT AN OFFER TO SELL SECURITIES AND IS NOT SOLICITING AN
OFFER TO BUY THESE SECURITIES IN ANY STATE WHERE THE OFFER OR SALE IS NOT
PERMITTED.
<PAGE>
PROSPECTUS

                                         SHARES

                                ZYGO CORPORATION

                                  COMMON STOCK

                            ------------------------

    We are offering         shares of our common stock and the selling
stockholders are selling an additional         shares of our common stock. We
will not receive any proceeds from the sale of shares by the selling
stockholders.

    Our common stock is traded on the Nasdaq National Market under the symbol
"ZIGO." The last reported sale price of our common stock on the Nasdaq National
Market on          , 2001 was $       per share.

    SEE "RISK FACTORS" BEGINNING ON PAGE 5 TO READ ABOUT THE RISKS YOU SHOULD
CONSIDER BEFORE BUYING SHARES OF OUR COMMON STOCK.

    NEITHER THE SECURITIES AND EXCHANGE COMMISSION NOR ANY OTHER REGULATORY BODY
HAS PASSED UPON THE ADEQUACY OR ACCURACY OF THIS PROSPECTUS. ANY REPRESENTATION
TO THE CONTRARY IS A CRIMINAL OFFENSE.

                            ------------------------

<TABLE>
<CAPTION>
                                                                PER SHARE          TOTAL
                                                              --------------   --------------
<S>                                                           <C>              <C>
Public offering price.......................................  $                $

Underwriting discounts and commissions......................  $                $

Proceeds, before expenses, to us............................  $                $

Proceeds, before expenses, to the selling stockholders......  $                $
</TABLE>

    We have granted the underwriters a 30-day option to purchase up to an
additional         shares of our common stock to cover any over-allotments.

                            ------------------------

BEAR, STEARNS & CO. INC.                                         LEHMAN BROTHERS

                             C.E. UNTERBERG, TOWBIN

                                            ING BARINGS

               The date of this Prospectus is             , 2001.
<PAGE>
                               TABLE OF CONTENTS

<TABLE>
<CAPTION>
                                                                PAGE
                                                              --------
<S>                                                           <C>
Prospectus Summary..........................................      1
Summary Financial Data......................................      4
Risk Factors................................................      5
Special Note Regarding Forward-Looking Statements...........     15
Use of Proceeds.............................................     15
Dividend Policy.............................................     16
Price Range of Common Stock.................................     16
Capitalization..............................................     17
Selected Financial Data.....................................     18
Management's Discussion And Analysis of Financial Condition
  and Results of Operations.................................     20
Business....................................................     25
Management..................................................     45
Transactions with Related Parties...........................     47
Selling Stockholders........................................     47
Underwriting................................................     48
Legal Matters...............................................     51
Experts.....................................................     51
Available Information.......................................     51
Incorporation of Certain Documents by Reference.............     52
</TABLE>
<PAGE>
                               PROSPECTUS SUMMARY

    THIS SUMMARY HIGHLIGHTS INFORMATION MORE FULLY DESCRIBED ELSEWHERE IN THIS
PROSPECTUS. THIS SUMMARY IS NOT COMPLETE AND DOES NOT CONTAIN ALL THE
INFORMATION YOU SHOULD CONSIDER BEFORE BUYING SHARES OF OUR COMMON STOCK IN THIS
OFFERING. YOU SHOULD READ THIS ENTIRE PROSPECTUS CAREFULLY, INCLUDING "RISK
FACTORS" AND OUR CONSOLIDATED FINANCIAL STATEMENTS AND THE RELATED NOTES
INCORPORATED BY REFERENCE IN THIS PROSPECTUS, BEFORE DECIDING TO INVEST IN
SHARES OF OUR COMMON STOCK.

                                ZYGO CORPORATION

    We are an emerging supplier of optical components and modules for the
telecommunications market and a leading designer, developer and manufacturer of
optics and on-line yield enhancement solutions for the semiconductor and
industrial manufacturing markets. We intend to leverage our knowledge and
expertise in on-line yield enhancement, namely metrology and automation, to
provide innovative solutions and advanced optical components and modules to
telecommunications customers. Because we are vertically integrated and have
advanced yield enhancement equipment, we believe our fiber optics components
will be manufactured reliably with high throughput. Selected telecommunications
customers include Agilent, Axsun, Cidra, Coherent, Corning Rochester Photonics,
Lightchip, Lucent, Nortel Networks, Tyco and Vytran. Selected semiconductor and
industrial manufacturing customers include Bosch, Canon, Caterpillar, Cummins
Engine, IBM, KLA-Tencor, Nikon and SVG.

    In May 2000, we acquired Firefly Technologies, Inc., renamed Zygo TeraOptix,
which develops optical components and modules for the telecommunications market.
Our telecommunications products include fiber and lens arrays, switches and
modules that are used in specific products and systems for optical networks,
such as dense wave division multiplexers, or DWDMs. Our optics unit also designs
high performance macro-optics components and assemblies that are used in
applications such as laser fusion research, semiconductor manufacturing
equipment and aerospace optical systems. These components and assemblies are
also an integral part of our own yield enhancement solutions.

    Network service providers are increasingly deploying next-generation optical
networks to address the demand for high speed communications and the increased
need for bandwidth. According to a leading market research consultant, industry
demand for fiber optic components will exceed $23 billion in the year 2003, up
from $6.6 billion in 1999. Fiber optic network providers need suppliers who can
deliver consistent supplies of reliable critical components and modules at
significant volumes in a timely, cost-effective manner.

    Historically, the focus of our business has been metrology and automation.
Our metrology unit manufactures noncontact optical measurement instruments and
products. We are one of the largest and most experienced manufacturers of
interferometric products that inspect and analyze surfaces of objects. Our
automation solutions unit designs, develops, manufactures and markets
comprehensive automated system solutions to enhance operational efficiencies and
product yields by building metrology into the production process. These
automation systems are used in the manufacture of high precision equipment.

    Advancing technologies have required manufacturers in a variety of
industries to produce smaller products with more precise tolerances and
increased complexity. The trend towards miniaturization and tighter tolerances
creates new challenges as manufacturers are forced to handle, measure and test
ever smaller components. As a result, "nanotechnology scale" precision is
necessary and, to a greater extent than ever, manufacturers require automated
measurement and control. While the semiconductor market is rather mature in its
use of these types of tools, the industrial manufacturing markets' use of
on-line automated metrology solutions is at an early stage.

                                       1
<PAGE>
    Our objective is to:

    - become a significant provider of cost-effective optical components,
      optical assemblies, fiber optic modules and precision optics on a volume
      basis for next-generation optical networks and precision semiconductor and
      industrial applications; and

    - continuously improve our customers' competitiveness by providing on-line
      yield enhancement metrology and automation solutions for the
      telecommunications, semiconductor and other high precision markets.

    Our strategy to accomplish these objectives includes the following:

    - INCREASE INVESTMENTS IN THE TELECOMMUNICATIONS MARKET. We intend to focus
      more of our research and development resources on the high growth
      telecommunications market.

    - MAINTAIN VERTICAL MANUFACTURING CAPABILITY IN THE OPTICS BUSINESS. Since
      we are vertically integrated and have advanced yield enhancement
      equipment, we believe our fiber optics components will be manufactured
      reliably with high throughput.

    - CONTINUE TO DIVERSIFY CUSTOMERS AND PRODUCTS. Our products are used in a
      broad range of applications which reduces our reliance on sales to any
      particular industry.

    - DEVELOP LONG-TERM AND SIGNIFICANT CUSTOMER RELATIONSHIPS. We seek to enter
      into collaborative arrangements with existing and potential customers in
      attractive end-user markets in order to optimize our products for their
      use.

    - PURSUE A SELECTIVE ACQUISITION AND INVESTMENT STRATEGY. We seek to access
      additional technological capabilities and complementary product lines
      through selective acquisitions and strategic investments.

    We believe that our telecommunication solutions, combined with over
30 years of experience in on-line yield enhancement, enable us to deliver
high-performance, cost-effective components and modules to our
telecommunications customers and to quickly develop and commercialize the next
generation of optical components and modules.

    We were incorporated in 1970 under the laws of the State of Delaware. The
address of our principal executive offices is Laurel Brook Road, Middlefield,
Connecticut 06455-0448. Our telephone number at that address is (860) 347-8506.
Our Web site address is www.zygo.com. The information on our Web site is not a
part of this prospectus.

                                       2
<PAGE>
                                  THE OFFERING

<TABLE>
<S>                                         <C>
Common stock offered by Zygo..............  shares

Common stock offered by the selling         shares
  stockholders............................

Common stock to be outstanding after this
  offering................................  shares

Use of proceeds...........................  For capital expenditures relating to new manufacturing facilities,
                                            expenditures relating to purchase of coating equipment for our
                                            optics business, increased research and development and general
                                            corporate purposes. See "Use of Proceeds."

Nasdaq National Market symbol.............  "ZIGO"
</TABLE>

    The table set forth above is based on shares of our common stock outstanding
as of September 30, 2000. This table excludes:

    - 4,850,000 shares of our common stock reserved for issuance under our
      Amended and Restated Non-Qualified Stock Option Plan, of which 1,557,174
      shares are issuable upon exercise of outstanding options at a weighted
      average exercise price of $51.21 per share as of September 30, 2000; and

    - 620,000 shares of our common stock reserved for issuance under our 1994
      Non-Employee Director Stock Option Plan, of which 257,000 shares are
      issuable upon exercise of outstanding options at a weighted average
      exercise price of $8.11 per share as of September 30, 2000.

                                       3
<PAGE>
                             SUMMARY FINANCIAL DATA

    The summary financial data presented below as of and for the years ended
June 30, 1996, 1997, 1998, 1999 and 2000 have been derived from our consolidated
financial statements, which have been audited by KPMG LLP, independent auditors,
whose report for the three years ended June 30, 2000 is incorporated by
reference in this prospectus. The summary financial data as of and for the three
months ended September 30, 2000 have been derived from our unaudited
consolidated financial statements included in this prospectus. You should read
the summary financial data set forth below with the consolidated financial
statements and related notes incorporated by reference in this prospectus and
with the "Management's Discussion and Analysis of Financial Condition and
Results of Operations," which are included elsewhere in this prospectus. As
adjusted results give effect to the net proceeds from this offering, after
deducting underwriting discounts and commissions and the estimated offering
expenses payable by us, and the application of net proceeds from this offering.

<TABLE>
<CAPTION>
                                                                                                                 THREE MONTHS
                                                                                                                     ENDED
                                                                 YEARS ENDED JUNE 30,                            SEPTEMBER 30,
                                              ----------------------------------------------------------      -------------------
                                                1996     1997(1)       1998(1)       1999(1)    2000(1)         1999       2000
                                              --------   --------      --------      --------   --------      --------   --------
                                                                     (IN THOUSANDS, EXCEPT PER SHARE DATA)
<S>                                           <C>        <C>           <C>           <C>        <C>           <C>        <C>
CONSOLIDATED STATEMENT OF OPERATIONS DATA:
Net Sales...................................  $57,374    $87,220       $99,084       $63,382     $87,243      $18,603    $23,932
Cost of goods sold..........................   31,508     45,395        57,635        40,997      54,688       11,007     13,963
Gross profit................................   25,866     41,825        41,449        22,385      32,555(4)     7,596      9,969
Operating profit (loss).....................   10,828      9,203        10,168        (7,691)    (18,322)         707      1,124
Net earnings (loss).........................  $ 7,799    $ 2,877       $ 7,029       $(3,876)   $(16,047)     $   572    $   817
Earnings (loss) per common and common
  equivalent share:
  Basic(3)..................................     0.84       0.28          0.61         (0.33)      (1.28)        0.05       0.06
  Diluted(3)................................     0.72       0.24          0.55         (0.33)      (1.28)        0.04       0.05
Weighted average common shares and common
  dilutive equivalents outstanding:
  Basic.....................................    9,323     10,403        11,480        11,780      12,511       11,872     14,300
  Diluted...................................   10,878     11,998        12,877        11,780      12,511       12,947     15,209
Before non-recurring expenses:
  Operating income..........................   10,828     20,286(2)     12,088(2)     (7,691)      6,246(2)       707      1,124
  Net income................................    7,799     13,960(2)      8,949(2)     (3,876)      4,798(2)       572        817
  Earnings (loss) per common and common
    equivalent share:
    Basic...................................     0.84       1.34(2)       0.78(2)      (0.33)       0.38(2)      0.05       0.06
    Diluted.................................     0.72       1.16(2)       0.69(2)      (0.33)       0.34(2)      0.04       0.05
</TABLE>

<TABLE>
<CAPTION>
                                                                AS OF SEPTEMBER 30, 2000
                                                              ----------------------------
                                                               ACTUAL          AS ADJUSTED
                                                              --------         -----------
                                                                     (IN THOUSANDS)
<S>                                                           <C>              <C>
BALANCE SHEET DATA:
Cash and cash equivalents...................................  $ 8,031
Working capital.............................................   54,896
Total assets................................................   98,376
Long-term debt (excluding current portion)..................       82
Stockholders' equity........................................   81,872
</TABLE>

------------------------------

(1) The results of Firefly Technologies, Inc., which is being accounted for as a
    pooling-of-interests, are included as of July 1, 1997. The results of Sight
    Systems, Inc. ("SSI"), which is being accounted for as an immaterial
    pooling-of-
    interests, are included from July 1, 1997; the results of Syncotec Neue
    Technologien and Instrumente GmbH ("Syncotec") are included from
    September 1, 1997 when the acquisition of the remaining 50% of Syncotec was
    completed; and the results of Technical Instrument Company ("TIC") are
    included in our consolidated results from August 8, 1996 when that
    acquisition was effective. Both Syncotec and TIC were accounted for as
    purchases.

(2) Nonrecurring charges include: acquisition-related charges of $14,001,
    $1,585, and $11,083 for the three months ended June 30, 2000, and
    September 30, 1997 and 1996, respectively; our West Coast operations
    reorganization cost of $10,567 for the three months ended June 30, 2000; and
    failed merger costs of $335 for the three months ended September 30, 1997.

(3) The difference between basic shares outstanding and diluted shares
    outstanding is the assumed conversion of common stock equivalents (stock
    options) in the amounts of 1,555,000; 1,595,000; 1,397,000; 0 and 0 in the
    years ended June 30, 1996, 1997, 1998, 1999 and 2000, respectively and
    1,075,000 and 909,000 for the three month periods ended September 30, 1999
    and 2000, respectively.

(4) Includes nonrecurring charges of $4,214 related to a write-off of inventory
    during the three months ended June 30, 2000 as part of our West Coast
    operations reorganization.

                                       4
<PAGE>
                                  RISK FACTORS

    BEFORE YOU INVEST IN OUR COMMON STOCK, YOU SHOULD CAREFULLY CONSIDER THE
FOLLOWING FACTORS AND CAUTIONARY STATEMENTS, AS WELL AS THE OTHER INFORMATION
SET FORTH HEREIN. IF ANY OF THE FOLLOWING RISKS ACTUALLY OCCUR, OUR BUSINESS,
FINANCIAL CONDITION OR RESULTS OF OPERATIONS MAY SUFFER. AS A RESULT, THE
TRADING PRICE OF OUR COMMON STOCK COULD DECLINE, AND YOU COULD LOSE A
SUBSTANTIAL PORTION OF THE MONEY YOU PAID TO BUY OUR COMMON STOCK.

IF WE ARE UNSUCCESSFUL IN OUR EFFORTS TO BECOME A SIGNIFICANT PROVIDER OF
OPTICAL PRODUCTS TO THE TELECOMMUNICATIONS MARKET, OUR REVENUES WILL NOT GROW AS
EXPECTED OR MAY DECREASE AND WE MAY INCUR SIGNIFICANT OPERATING LOSSES.

    We may be unsuccessful in making the transition from a company primarily
involved in the design and manufacture of on-line yield enhancement products and
solutions, to a larger and more complex organization, which will also focus on
the design and manufacture of optical components and modules for the
telecommunications industry. If we fail to make this transition successfully,
our revenues may not grow as expected or may decrease and we may incur
significant operating losses. This transition may require that we, among other
things:

    - make significant capital expenditures and incur expenses;

    - expand and refocus our global sales and marketing force to sell optical
      components and modules for the telecommunications industry;

    - successfully integrate our recent acquisition of Firefly Technologies;

    - enhance our financial and management controls and systems;

    - develop a customer base for our new products; and

    - develop and market new products and services.

    We cannot provide any assurance that we will succeed in managing this
transition. In addition, we have limited expertise in the design and manufacture
of optical components and modules for the telecommunications industry, and have
a limited history of shipping products to this industry. Therefore, we may fail
to generate sufficient revenues from our sale of optical components and modules
for the telecommunications industry and we may incur significant operating
losses. For the three months ended September 30, 2000, revenues from our
micro-optics business accounted for less than 2% of our net sales and revenues
from the telecommunications market accounted for less than 6% of our net sales.

IF THE OPTICAL NETWORKING MARKET DOES NOT DEVELOP AND EXPAND AS WE ANTICIPATE,
DEMAND FOR OUR OPTICAL COMMUNICATIONS COMPONENTS AND MODULES MAY BE LESS THAN
EXPECTED, WHICH WOULD NEGATIVELY IMPACT OUR NET SALES AND OPERATING RESULTS.

    A significant portion of our business growth strategy is dependent on the
deployment of our optical communications components and modules. Our future
success in the optical communications market depends on the continued deployment
of optical networks, continued growth of the Internet as a widespread
communication and commerce medium, the continuing increase in the amount of data
transmitted over communications networks and the growth of optical networks to
meet the increased demand for bandwidth. Future demand for our optical
communications products is uncertain and will depend to a great degree on the
speed of the widespread adoption and upgrading of optical networks and the
acceptance of fiber optics as the replacement for copper wire. If the transition
to optical communications occurs too slowly or capital expenditures within the
industry are less than expected, the market for our optical communications
products and the growth of our business will be significantly limited.

    In addition, many of our optical components customers are early stage
telecommunication companies. If these companies are unable to obtain financing
to allow them to grow, they may not be able to purchase optical components from
us and our sales may suffer.

                                       5
<PAGE>
    The optical communications market is new and characterized by rapid
technological change, frequent new product introductions, changes in customer
requirements, unpredictable rates of product deployment and evolving industry
standards. Because this market is new, it is difficult to predict its future
size or growth rate. Our success in generating net sales in this emerging market
will depend on:

    - developing, maintaining and enhancing relationships with customers;

    - the awareness of potential end-user customers and network service
      providers about the benefits of optical networks; and

    - our ability to accurately predict market demand, develop our products to
      meet industry needs and comply with industry standards.

    If we fail to address changing market conditions, the sales of our optical
communications products may not materialize, which would harm our net sales. In
addition, since we have and will continue to make an investment in the
development of products for this market, the failure of optical networks to gain
widespread acceptance may significantly negatively impact our operating results.

BECAUSE WE HAVE ONLY RECENTLY BEGUN SELLING PRODUCTS TO THE OPTICAL NETWORKING
INDUSTRY, REVENUES FROM THESE PRODUCTS MAY BE DIFFICULT TO PREDICT, NET REVENUES
AND RESULTS OF OPERATIONS MAY FLUCTUATE AND OUR STOCK PRICE MAY BE MORE
VOLATILE.

    We have only recently begun selling our fiber optic components and modules
to the telecommunications industry. We may be unable to accurately forecast our
revenues of these products, and we have limited meaningful historical financial
data upon which to plan future operating expenses. In addition, many of our
expenses are fixed, and we may not be able to quickly reduce spending if our
revenue is lower than we project. New product introductions will also result in
increased operating expenses in advance of generating revenues, if any.
Therefore, net losses in a given quarter could be greater than expected. We may
not be able to address the risks associated with our limited operating history
in an emerging market and our business strategy in this market may not be
sustainable. Resulting quarterly fluctuations in our net revenues could result
in volatility or a decline in our stock price.

INTEGRATION OF FIREFLY TECHNOLOGIES WITH OUR BUSINESS MAY PROVE DIFFICULT.

    On May 5, 2000, we purchased all of the capital stock and other outstanding
securities of Firefly Technologies for approximately 20% of our outstanding
capital stock. We cannot give assurances that the integration of Firefly, now
our Zygo TeraOptix division, with our business will be successful. Failure to
successfully integrate Firefly may also adversely affect our ability to expand
our micro-optics sales to the telecommunications industry.

WE MAY NOT BE ABLE TO CONTINUE TO ATTRACT AND RETAIN QUALIFIED EMPLOYEES.

    Our future success depends on our ability to attract and retain qualified
personnel in the following areas:

    - engineering;

    - management;

    - manufacturing;

    - research and development;

    - sales and marketing; and

    - support.

    Competition for these individuals from a variety of employers, including our
competitors and companies in computer or technology-related industries, is
intense. We cannot assure you that we will be able to retain our existing
personnel or attract and retain additional personnel.

                                       6
<PAGE>
IF WE ARE UNABLE TO COMMIT TO DELIVER SUFFICIENT QUANTITIES OF OUR PRODUCTS TO
SATISFY CUSTOMERS' NEEDS, WE MAY NOT ATTRACT NEW ORDERS AND CUSTOMERS AND WE MAY
LOSE CURRENT ORDERS AND CUSTOMERS.

    Communications service providers and equipment manufacturers typically
require that suppliers commit to provide specified quantities of products over a
given period of time. If we are unable to commit to deliver sufficient
quantities of our products to satisfy a customer's anticipated needs, we may
lose the order and the opportunity for significant sales to that customer for a
lengthy period of time. We will be unable to pursue many large orders if we do
not have sufficient manufacturing capacity to enable us to commit to providing
customers with specified quantities of products. Since we have only recently
decided to focus on optical communications products, we have limited
manufacturing capacity and experience in this field. This limited capacity
combined with our limited experience in predicting demand in this area increases
the risk that we may be unable to satisfy product supply commitments.

OUR LENGTHY AND VARIABLE QUALIFICATION AND SALES CYCLE MAKES IT DIFFICULT TO
PREDICT THE TIMING OF A SALE OR WHETHER A SALE WILL BE MADE, WHICH MAY CAUSE US
TO HAVE EXCESS MANUFACTURING CAPACITY OR INVENTORY AND NEGATIVELY IMPACT OUR
OPERATING RESULTS.

    As is typical in the industry, our customers generally expend significant
efforts in evaluating and qualifying our products and manufacturing process.
This evaluation and qualification process frequently results in a lengthy sales
cycle, typically ranging from three to six months and sometimes longer. While
our customers are evaluating our products and before they place an order with
us, we may incur substantial sales, marketing and research and development
expenses, expend significant management efforts, increase manufacturing capacity
and order long-lead-time supplies prior to receiving an order. Even after this
evaluation process, it is possible that a potential customer will not purchase
our products. In addition, product purchases are frequently subject to unplanned
processing and other delays, particularly with respect to larger customers for
which our products represent a very small percentage of their overall purchase
activity.

    If we increase capacity and order supplies in anticipation of an order that
does not materialize, our gross margins will decline and we will have to carry
or write off excess inventory. Even if we receive an order, the additional
manufacturing capacity that we add to service the customer's requirements may be
underutilized in a subsequent quarter. Either situation could cause our results
of operations to be below the expectations of investors and public market
analysts, which would, in turn, cause the price of our common stock to decline.
Our long sales cycles, as well as the practice of companies in the
telecommunications industry to sporadically place large orders with short lead
times, may cause our revenues and operating results to vary significantly and
unexpectedly from quarter to quarter.

BECAUSE WE ARE DEPENDENT ON A SMALL NUMBER OF SUPPLIERS FOR RAW MATERIALS, WE
MAY SUFFER DELAYS AND INCREASED EXPENSES IF THESE SUPPLIERS DO NOT PERFORM THEIR
OBLIGATIONS.

    We are dependent on suppliers for raw materials and various electrical,
mechanical and optical supplies, including fiber and electronic components and
modules. If any relationship with a key supplier is terminated or if a supplier
fails or is unable to provide reliable services or equipment and we are unable
to reach suitable alternative solutions quickly, we may experience significant
delays and additional costs in the manufacturing of our products. If our key
suppliers cease manufacturing the supplies we require, if their manufacturing
operations are interrupted for any significant amount of time, or if they are
unwilling to supply us for any other reason, including capacity restraints, then
we may be at least temporarily unable to obtain these supplies, thus exposing us
to significant delays and additional costs. In the fourth quarter of fiscal 2000
and the first quarter of fiscal 2001, a supplier of electronics components that
we needed for our manufacture of displacement measurement interferometry was
unable to meet our scheduled demand, adversely affecting our revenues and
margins.

    Although we enter, either directly or through our contract manufacturers,
into purchase orders with our suppliers based on our forecasts, we do not have
any guaranteed supply arrangements with these suppliers. Moreover, as our demand
for supplies increases, we may not be able to obtain these

                                       7
<PAGE>
supplies in a timely manner. If we are unable to obtain, either directly or
through contract manufacturers, a sufficient amount of supplies, or if we
experience any interruption in delivery of supplies, we could experience
difficulties in obtaining alternative sources or in altering product designs to
use alternative supplies.

    Currently there are only a limited number of companies that are capable of
supplying optical materials in the quantity and of the quality we require. If
any of these companies cease manufacturing optical materials, if their
manufacturing operations are interrupted for any significant amount of time, or
if they are unable or unwilling to supply us for any other reason, including
capacity constraints, then we may be at least temporarily unable to obtain
sufficient supplies of optical materials, thus exposing us to significant delays
and additional costs and adversely affecting our net sales.

IF WE FAIL TO PREDICT OUR MANUFACTURING REQUIREMENTS ACCURATELY, WE COULD INCUR
ADDITIONAL COSTS OR EXPERIENCE MANUFACTURING DELAYS, WHICH COULD CAUSE US TO
LOSE ORDERS OR CUSTOMERS AND RESULT IN LOWER NET SALES.

    We currently use a rolling 12-month forecast based primarily on our
anticipated product orders and, in the telecommunications field, our limited
product order history to help determine our requirements for components and
materials. It is very important that we accurately predict both the demand for
our products and the lead time required to obtain the necessary components and
raw materials. Lead times for materials and components that we order vary
significantly and depend on factors such as the specific supplier, the size of
the order, contract terms and demand for each component at a given time. If we
underestimate our requirements, we may have inadequate manufacturing capacity or
inventory, which could interrupt manufacturing of our products and result in
delays in shipments and net sales. If we overestimate our requirements, we could
have excess inventory of parts. We also may experience shortages of components
from time to time, which also could delay the manufacturing of our products and
could cause us to lose orders or customers.

IF OUR NEW MANAGEMENT TEAM DOES NOT OPERATE EFFECTIVELY TOGETHER, OUR BUSINESS
AND RESULTS OF OPERATION MAY BE MATERIALLY AND ADVERSELY AFFECTED.

    Nearly all of our management team joined us since 1999. Accordingly, the
members of the team have worked together for only a brief period of time. Our
ability to effectively execute our business strategy depends in large part on
our new management team's ability to operate effectively together. If our
executives are unable to do so, our business and results of operation may be
materially and adversely affected.

OUR BACKLOG MAY NOT RESULT IN FUTURE SALES.

    We schedule the production of our systems based in part upon order backlog.
Due to possible customer changes in delivery schedules and cancellations of
orders, our backlog at any particular date is not necessarily indicative of
actual sales for any succeeding period. There can be no assurance that amounts
included in backlog will ultimately result in future sales. A reduction in
backlog during any particular period, or the failure of our backlog to result in
future sales, could adversely affect our results of operations.

CYCLICALITY IN OUR BUSINESS HAS HISTORICALLY LED TO SUBSTANTIAL DECREASES IN
DEMAND FOR OUR PRODUCTS AND MAY FROM TIME TO TIME CONTINUE TO DO SO.

    Our business has historically been significantly dependent on capital
expenditures by manufacturers of components for the semiconductor industry. This
industry is cyclical and historically experiences periods of oversupply, which
result in significantly reduced demand for capital equipment, including the
products manufactured and marketed by us. For the foreseeable future, our
operations will continue to be dependent on the capital expenditures in this
industry, which, in turn, is largely dependent on the market demand for products
containing integrated circuits. Our net sales and results of operations may

                                       8
<PAGE>
be materially adversely affected if downturns or slowdowns in the semiconductor
market occur in the future.

WE FACE RISKS RELATING TO OUR INTERNATIONAL SALES AND OUR FOREIGN OPERATIONS.

    Our products are sold internationally, including to customers in Japan and
throughout the Pacific Rim. Customers outside the United States accounted for
44%, 44%, and 43% of our net sales in each of the fiscal years ended June 30,
2000, 1999, and 1998, respectively and 39% for the three months ended
September 30, 2000, and are expected to continue to account for a substantial
percentage of our net sales. International sales and foreign operations are
subject to inherent risks. These risks include:

    - exposure to currency exchange fluctuations;

    - longer payment cycles;

    - greater difficulty in accounts receivable collection;

    - compliance with foreign laws;

    - changes in regulatory requirements;

    - tariffs or other barriers;

    - difficulties in obtaining export licenses;

    - difficulties in staffing and managing foreign operations;

    - reduced protection for, and enforcement of, intellectual property rights;

    - political and economic instability;

    - transportation delays; and

    - potentially adverse tax consequences.

    Even that portion of our international sales, which are negotiated for and
paid in U.S. dollars, are subject to currency risks, since changes in the values
of foreign currencies relative to the value of the U.S. dollar can render our
products comparatively more expensive. These exchange rate fluctuations could
negatively impact international sales of our products and our foreign
operations, as could changes in the general economic conditions in those
markets. Although we do not currently hedge against exchange rate fluctuations,
any measures we take to hedge against exchange rate fluctuations may not
adequately protect us from their potential harm.

WE WILL NEED TO RELOCATE OUR OPTICS UNIT TO NEW FACILITIES IN THE FUTURE.

    We intend to move our micro-optics manufacturing operations to a new
facility in the near future. If our micro-optics business does not grow as
quickly as we expect, our new manufacturing facility might in part represent
excess capacity for which we may not recover the cost; in that circumstance, our
revenues may be inadequate to support our committed costs and our planned
growth, and our profitability and business strategy would suffer. If we
encounter delays in moving to our new manufacturing facility, in obtaining and
installing the necessary equipment or in hiring and training personnel to
commence manufacturing on a large scale basis, we will be delayed in our efforts
to obtain and fill customer orders or profitably manufacture our various fiber
optic components and modules. In addition, our financial position may be
adversely affected if any of our optics equipment, which is highly fragile and
calibrated, is damaged or otherwise affected during our relocation due to both
the delay and the cost and an expense to us and the delay or the decline in net
sales or customers while we replace or repair the equipment.

                                       9
<PAGE>
OUR QUARTERLY AND ANNUAL OPERATING RESULTS MAY FLUCTUATE AND THE PRICE OF OUR
COMMON STOCK MAY CHANGE IN RESPONSE TO THOSE FLUCTUATIONS.

    Our quarterly and annual operating results have varied in the past and may
in the future vary significantly depending on factors such as:

    - the effect of our acquisitions and consequent integration;

    - the size, timing and recognition of revenue from significant orders;

    - increased competition;

    - our ability to develop innovative products;

    - the timing of new product releases by us or our competitors;

    - market acceptance of our products;

    - changes in our and our competitors' pricing policies;

    - budgeting cycles of our customers;

    - changes in operating expenses and personnel changes;

    - changes in our business strategy; and

    - general economic factors.

    Due to these and other factors we believe that quarter-to-quarter
comparisons of our operating results may not be meaningful. You should not rely
on our results for one quarter as any indication of our future performance. In
future periods our operating results may be below the expectations of public
market analysts or investors. If this occurs, the price of our common stock
would likely decrease.

WE MAY EXPAND OUR BUSINESS THROUGH NEW ACQUISITIONS THAT COULD DISRUPT OUR
BUSINESS AND HARM OUR FINANCIAL CONDITION.

    Our growth strategy includes expanding our products and services, and we may
seek acquisitions to expand our business. We regularly review potential
acquisitions of businesses, technologies or products complementary to our
business and periodically engage in discussions regarding such possible
acquisitions. Acquisitions involve numerous risks, including some or all of the
following:

    - substantial cash expenditures;

    - potentially dilutive issuance of equity securities;

    - incurrence of debt and contingent liabilities;

    - amortization of expenses related to goodwill and other intangible assets;

    - difficulties in assimilating the operations and products of the acquired
      companies;

    - diverting our management's attention away from other business concerns;

    - risks of entering markets in which we have limited or no direct
      experience; and

    - potential loss of key employees of the acquired companies in the process
      of integrating personnel with disparate business backgrounds and combining
      different corporate cultures.

    We cannot assure you that any acquisition will result in long-term benefits
to us or that our management will be able to effectively manage the acquired
businesses. We may also incorrectly judge the value or worth of an acquired
company or business. In addition, our future success will depend in part on our
ability to manage the rapid growth associated with these acquisitions. We may
not be able

                                       10
<PAGE>
to successfully combine our business with the businesses of an acquired company.
Furthermore, the development or expansion of our business or any acquired
business may require substantial capital investment. We may not have the
necessary funds nor may they be readily available to us on acceptable terms or
at all. We may also seek to raise funds by selling shares of our stock, which
could dilute your ownership interest in our company.

IF WE FAIL TO MANAGE OUR GROWTH EFFECTIVELY, OUR BUSINESS MAY NOT SUCCEED.

    We are experiencing a period of rapid growth and expansion due to both
acquisitions and internal growth. Our growth and expansion has placed, and could
continue to place, a significant strain on our management, personnel and other
resources.

    To accommodate our recent growth and to compete effectively and manage
future growth we will be required to continue to implement and improve our
operational, financial and management information systems, procedures and
controls on a timely basis and to expand, train, motivate and manage our
workforce. Our inability to satisfy customer orders in a timely fashion, or at
all, could result in termination of customer relationships or cause customers to
seek alternative sources for their products. In addition, our financial control
systems and infrastructure may not be adequate to maintain and effectively
monitor our future growth. We cannot assure you that our personnel, systems,
procedures and controls will be adequate to support our existing and future
operations.

SALES TO OUR LARGEST CUSTOMER ACCOUNT FOR A SIGNIFICANT PORTION OF OUR NET
SALES.

    During fiscal 1998, 1999 and 2000, sales to Canon Sales Co., Inc., our
largest customer in those periods, accounted for approximately 18%, 21% and 19%,
respectively, of our net sales. During the three months ended September 30,
2000, sales to Canon accounted for approximately 25% of our net sales. We expect
that sales to Canon, an affiliate of which owns approximately 8.5% of our
outstanding common stock and is a distributor of some of our products in the
Japanese market, will continue to represent a significant percentage of our net
sales for the foreseeable future. Our customers, including Canon, generally do
not enter into long-term agreements obligating them to purchase our products. A
reduction or delay in orders from this customer, including reductions or delays
due to market, economic, or competitive conditions in the semiconductor
industry, could have a material adverse effect upon our results of operations.

WE MAY BE UNABLE TO EFFECTIVELY RESPOND TO TECHNOLOGICAL CHANGE.

    The market for our products is characterized by rapidly changing technology.
Our future success will depend upon our ability to enhance our current products
and to develop and introduce new products that keep pace with technological
developments and evolving industry standards, respond to changes in customer
requirements and achieve market acceptance. If we fail to anticipate or respond
adequately to technological developments and customer requirements, or
experience significant delays in product development or introduction, our
business, results of operations, financial condition and liquidity will be
negatively affected.

    In order to develop new products successfully, we depend on close
relationships with our customers and their willingness to share proprietary
information about their requirements and participate in collaborative efforts
with us. We cannot assure you that our customers will continue to provide us
with timely access to such information. We may also fail to successfully develop
and market new products and services or product and service enhancements on a
timely basis, including in the optical communications market where we have very
limited experience, and we may not respond effectively to technological changes
or new product announcements by others.

                                       11
<PAGE>
ENVIRONMENTAL REGULATIONS APPLICABLE TO OUR MANUFACTURING OPERATIONS COULD LIMIT
OUR ABILITY TO EXPAND OR SUBJECT US TO SUBSTANTIAL COSTS.

    We are subject to a variety of environmental regulations relating to the
use, storage, discharge and disposal of hazardous chemicals used during our
manufacturing processes. Any failure by us to comply with present and future
regulations could subject us to future liabilities or the suspension of
production. In addition, such regulations could restrict our ability to expand
our facilities or could require us to acquire costly equipment or to incur other
significant expenses to comply with environmental regulations.

WE FACE INTENSE COMPETITION, AND IF WE ARE UNABLE TO COMPETE SUCCESSFULLY, WE
WILL LOSE MARKET SHARE AND OUR BUSINESS WILL SUFFER.

    We face competition from a number of companies in all of our markets, some
of which have greater manufacturing and marketing capabilities and experience,
and greater financial, technological and personnel resources. We also compete
with current and prospective customers' attempts to become vertically
integrated. Our business requires us to continue to invest in research and
development, sales, marketing and service. We cannot assure you that we will
have sufficient resources to continue to make these investments or that we will
be able to make the technological advances necessary to maintain any competitive
advantages.

OUR PRODUCTS ARE DEPLOYED IN LARGE AND COMPLEX SYSTEMS AND MAY CONTAIN DEFECTS
THAT ARE NOT DETECTED UNTIL AFTER OUR PRODUCTS HAVE BEEN INSTALLED, WHICH COULD
DAMAGE OUR REPUTATION AND CAUSE US TO LOSE CUSTOMERS.

    We design some of our products for deployment in large and complex optical
networks. Because of the nature of these products, they can only be fully tested
for reliability when deployed in networks for long periods of time. Our fiber
optic products may contain undetected defects when first introduced or as new
versions are released, and our customers may discover defects in our products
only after they have been fully deployed and operated under peak stress
conditions. In addition, our products are combined with products from other
vendors. As a result, should problems occur, it may be difficult to identify the
source of the problem. These conditions increase the risk that we could
experience, among other things:

    - loss of customers;

    - damage to our brand reputation;

    - failure to attract new customers or achieve market acceptance;

    - diversion of development and engineering resources; and

    - legal actions by our customers.

    The occurrence of any one or more of the foregoing factors could cause us to
experience losses, incur liabilities and cause our net sales to decline.

NECESSARY LICENSES OF THIRD-PARTY TECHNOLOGY MAY NOT BE AVAILABLE TO US OR MAY
BE VERY EXPENSIVE, WHICH COULD ADVERSELY AFFECT OUR ABILITY TO MANUFACTURE AND
SELL OUR PRODUCTS.

    From time to time we may be required to license technology from third
parties to develop new products or product enhancements. We cannot assure you
that third-party licenses will be available to us on commercially reasonable
terms, or at all. The inability to obtain any third-party license required to
develop new products and product enhancements could require us to obtain
substitute technology of lower quality or performance standards or at greater
cost, either of which could seriously harm our ability to manufacture and sell
our products.

                                       12
<PAGE>
IF WE FAIL TO ADEQUATELY PROTECT OUR INTELLECTUAL PROPERTY, WE MAY NOT BE ABLE
TO COMPETE.

    Our success is heavily dependent upon our proprietary technology. We cannot
assure you that the steps we have taken to protect our proprietary technology
will be adequate to prevent misappropriation of our technology by third parties
or will be adequate under the laws of some foreign countries, including those
countries where we ship significant product, which may not protect our
proprietary rights to the same extent as do laws of the United States. Also,
others may "reverse engineer" our products in order to determine their method of
operation and introduce competing products or others may develop competing
technology independently. Furthermore, our existing or future patents may be
challenged, invalidated or circumvented. Any such adverse circumstances could
have a material adverse effect on our results of operations.

    We rely on trade secret protection for our technology, in part through
confidentiality agreements with our employees, consultants and third parties.
However, these agreements may be breached and we may not have adequate remedies
for any breach. In any case, others may come to discover or duplicate our trade
secrets through a variety of methods.

IN THE EVENT OUR PRODUCTS INFRINGE ON THE INTELLECTUAL PROPERTY RIGHTS OF THIRD
PARTIES, OUR BUSINESS MAY SUFFER IF WE ARE SUED FOR INFRINGEMENT OR CANNOT
OBTAIN LICENSES TO THESE RIGHTS ON COMMERCIALLY ACCEPTABLE TERMS.

    We are subject to the risk of adverse claims and litigation alleging
infringement by us of the intellectual property rights of others. Although we
believe our services and products do not infringe the intellectual property
rights of others, it is possible that claims could be asserted against us in the
future. Many participants in the technology industry have an increasing number
of patents and patent applications and have frequently demonstrated a readiness
to take legal action based on allegations of patent and other intellectual
property infringement. Further, as the number of our products increase, the
markets in which our products are sold expand and the functionality of our
products grows and overlaps with products offered by our competitors, we believe
that we may become increasingly subject to infringement claims. If infringement
claims are brought against us, we may have to expend potentially significant
funds and resources to defend or settle such claims and, if we were found to
infringe on the intellectual property rights of others, we could be forced to
pay significant license fees or damages for infringement.

WE HAVE BROAD DISCRETION IN HOW TO USE THE PROCEEDS FROM THIS OFFERING AND A
SIGNIFICANT PERCENTAGE OF NET PROCEEDS HAS NOT BEEN ALLOCATED.

    A significant percentage of the net proceeds from this offering has not been
allocated to any particular growth plan. As a result, our management will have
significant flexibility in applying the net proceeds of this offering. The
failure of management to use such funds effectively could have a material
adverse effect on our financial position, liquidity and results of operations.

OUR EXECUTIVE OFFICERS AND DIRECTORS, TOGETHER WITH THEIR AFFILIATES,
BENEFICIALLY OWN APPROXIMATELY 17.1% OF OUR COMMON STOCK AS OF NOVEMBER 1, 2000
AND THEY MAY BE IN A POSITION TO INFLUENCE OUR AFFAIRS AND BUSINESS.

    Our executive officers and directors, through their affiliation with certain
stockholders and their stock option holdings, may be deemed to beneficially own
approximately 17.1% as of November 1, 2000 of our outstanding shares of common
stock. As a result, these individuals may have the ability to influence our
management and affairs of our business.

                                       13
<PAGE>
WE EXPECT TO EXPERIENCE VOLATILITY IN OUR SHARE PRICE, WHICH COULD NEGATIVELY
AFFECT YOUR INVESTMENT, AND YOU MAY NOT BE ABLE TO RESELL YOUR SHARES AT OR
ABOVE THE OFFERING PRICE.

    The price you pay in this offering may vary from the market price of our
common stock after the offering. If you purchase shares of common stock, you may
not be able to resell those shares at or above the offering price. The market
price of our common stock has fluctuated significantly since our initial public
offering and we expect that our common stock price will fluctuate significantly
in the future due to:

    - any deviations in our net revenues, gross margins or net losses from
      levels expected by securities analysts;

    - changes in financial estimates by securities analysts;

    - changes in market valuations of other companies in the same or similar
      markets; and

    - future sales of common stock or other securities.

    In addition, the Nasdaq National Market has experienced extreme volatility
that has often been unrelated to the performance of particular companies. Future
market fluctuations may cause our stock price to fall regardless of our
performance.

FUTURE SALES OF OUR COMMON STOCK MAY ADVERSELY AFFECT OUR COMMON STOCK PRICE.

    If our stockholders sell a large number of shares of common stock, or if we
issue a large number of shares of our common stock in connection with future
acquisitions, financings, or other circumstances, the market price of our common
stock could decline significantly. Moreover, the perception in the public market
that our stockholders might sell shares of common stock could depress the market
price of the common stock. Immediately following this offering, an aggregate of
      shares of our currently outstanding common stock (      shares if the
underwriters' over-allotment option is fully exercised) will be freely tradable
without restriction or registration under the Securities Act, except to the
extent held by our affiliates. An additional       restricted shares (      if
the underwriters' over-allotment option is fully exercised) will be eligible for
sale subject to compliance with volume and other limitations under Rule 144 of
the Securities Act. As of September 30, 2000, an additional 1,814,174 shares are
subject to issue upon the exercise of vested stock options previously granted by
us, all of which would be freely tradable if issued subject to compliance with
Rule 144 in the case of our affiliates.

                                       14
<PAGE>
               SPECIAL NOTE REGARDING FORWARD-LOOKING STATEMENTS

    This prospectus and the documents incorporated by reference contain
forward-looking statements, including, without limitation, statements concerning
the future of the industry, product development, business strategy, continued
acceptance and growth of our products and dependence on significant customers.
These statements can be identified by the use of forward-looking terminology
such as "may," "will," "should," "potential," "intend," "expect," "endeavor,"
"seek," "anticipate," "estimate," "overestimate," "underestimate," "believe,"
"could," "project," "predict," "continue" or other similar words. These
statements discuss future expectations, contain projections of results of
operations or of financial condition or state other forward-looking information.
When considering forward-looking statements, you should keep in mind the risk
factors and other cautionary statements in this prospectus. Readers are
cautioned not to place undue reliance on any of these forward-looking
statements, which reflect our management's views as of the date of this
prospectus. The "Risk Factors" and other factors noted throughout this
prospectus could cause our actual results to differ significantly from those
contained in any forward-looking statement.

    Although we believe that the expectations reflected in the forward-looking
statements are reasonable, we cannot guarantee future results, levels of
activity, performance or achievements. Moreover, neither we nor any other person
assumes responsibility for the accuracy and complements of these statements. We
are under no duty to update any of the forward-looking statements after the date
of this prospectus to conform these statements to actual results.

                                USE OF PROCEEDS

    We estimate that the net proceeds from our sale of the             shares of
our common stock in this offering, at an assumed public offering price of $  per
share, and after deducting underwriting discounts and commissions and other
estimated offering expenses payable by us, will be approximately $   million or
approximately $   million if the underwriters exercise their over-allotment
option in full.

    We expect to use the net proceeds from this offering in the following ways:

    - approximately $  million to fund capital expenditures relating to new
      manufacturing facilities for the micro-optics business;

    - approximately $  million to purchase coating equipment for the optics
      business; and

    - approximately $  million to fund our increased research and development
      expenditures relating to optical components and modules and automation in
      the areas of micro-optics.

    We may also use a portion of the net proceeds to acquire or to invest in
complementary businesses, technologies, products or services, but we have no
current plans or commitments to do so. Amounts of net proceeds, which are not
otherwise expended, will be used for general corporate purposes. Our management
will retain broad discretion in the allocation of the net proceeds of this
offering.

    Actual expenditures may vary substantially from these estimates. The amounts
and timing of our actual expenditures will depend on numerous factors, including
the status of our research and product development efforts, marketing and sales
activities, and the growth of our manufacturing and distribution arrangements.
We may find it necessary to use portions of the net proceeds for other purposes.

    Pending these uses, we intend to invest our net proceeds in short-term,
investment grade securities, at prevailing market rates of interest.

                                       15
<PAGE>
                                DIVIDEND POLICY

    We have never declared or paid any dividends on our common stock. We
currently anticipate that we will retain all future earnings to support our
growth strategy. Accordingly, we do not anticipate paying cash dividends on our
common stock in the foreseeable future. The payment of any future dividends will
be at the discretion of our board of directors and will depend upon, among other
things, future earnings, operations, capital requirements, our financial
condition and business conditions.

                          PRICE RANGE OF COMMON STOCK

    Our common stock is quoted on the Nasdaq National Market under the symbol
"ZIGO." The following table sets forth, for the periods indicated, the high and
low reported sale prices per share for our common stock as reported on the
Nasdaq National Market, which prices are believed to represent actual
transactions.

<TABLE>
<CAPTION>
                                                                HIGH       LOW
                                                              --------   --------
<S>                                                           <C>        <C>
YEAR ENDED JUNE 30, 1999:

      First quarter.........................................    $15 3/8    $ 6 3/8

      Second quarter........................................    $12 3/4    $ 5

      Third quarter.........................................    $15 3/4    $ 8 1/2

      Fourth quarter........................................    $13 1/8    $ 7 1/4

YEAR ENDED JUNE 30, 2000:

      First quarter.........................................    $14 5/8    $ 9 1/4

      Second quarter........................................    $25 1/16   $13

      Third Quarter.........................................    $74 5/16   $19 3/8

      Fourth Quarter........................................    $94        $20 3/4

YEAR ENDED JUNE 30, 2001:

      First quarter.........................................    $98 3/8    $50 1/2

      Second quarter........................................    $88 1/2    $20

      Third quarter through          , 2001.................
</TABLE>

    The number of stockholders of record of our common stock on December 1, 2000
was approximately 466. The last reported sale price of our common stock on the
Nasdaq National Market on         , 2001 was $      .

                                       16
<PAGE>
                                 CAPITALIZATION

    The following table sets forth our capitalization as of September 30, 2000,
(i) on a historical basis and (ii) on a historical basis, as adjusted, to
reflect our sale of the shares of common stock offered in this offering assuming
the underwriting over-allotment option is not exercised. You should read the
following table with "Management's Discussion and Analysis of Financial
Condition and Results of Operations" and the financial statements and notes
incorporated by reference in this prospectus.

<TABLE>
<CAPTION>
                                                                 SEPTEMBER 30, 2000
                                                              -------------------------
                                                               ACTUAL    AS ADJUSTED(1)
                                                              --------   --------------
                                                                   (IN THOUSANDS)
<S>                                                           <C>        <C>
Long-term Debt:.............................................  $    82       $
                                                              -------       -------
Stockholders' Equity:
  Treasury Stock............................................     (301)
  Common Stock--$.10 par value; authorized 40,000,000
    shares; issued and outstanding: 14,532,431 shares, as
    adjusted -- [      ] shares.............................    1,453

  Net Unrealized (loss) on Marketable Securities............      (91)
  Additional Paid-in Capital................................   69,958
  Retained Earnings.........................................   11,330
                                                              -------       -------
  Currency Translation......................................     (477)
                                                              -------       -------
    Total Stockholders' Equity..............................   81,872
                                                              -------       -------
    Total Capitalization....................................   81,954
                                                              =======       =======
</TABLE>

------------------------

(1) The above information is based on shares outstanding as of September 30,
    2000. This information excludes:

    -  4,850,000 shares of our common stock reserved for issuance under our
       Amended and Restated Non-Qualified Stock Option Plan, of which 1,557,174
       shares are issuable upon exercise of outstanding options at a weighted
       average exercise price of $51.21 per share as of September 30, 2000; and

    -  620,000 shares of our common stock reserved for issuance under our 1994
       Non-Employee Director Stock Option Plan, of which 257,000 shares are
       issuable upon exercise of outstanding options at a weighted average
       exercise price of $8.11 per share as of September 30, 2000.

                                       17
<PAGE>
                            SELECTED FINANCIAL DATA

    The selected financial data presented below as of and for the years ended
June 30, 1996, 1997, 1998, 1999 and 2000 have been derived from our consolidated
financial statements, which have been audited by KPMG LLP, independent auditors,
whose report for the three years ended June 30, 2000 is incorporated by
reference in this prospectus. The selected financial data as of and for the
three months ended September 30, 2000 have been derived from our unaudited
consolidated financial statements included in this prospectus. You should read
the selected financial data set forth below with the consolidated financial
statements and related notes incorporated by reference in this prospectus and
with the "Management's Discussion and Analysis of Financial Condition and
Results of Operations," which are included elsewhere in this prospectus.

<TABLE>
<CAPTION>
                                                                                                THREE MONTHS
                                                                                                    ENDED
                                                   FISCAL YEAR ENDED JUNE 30,                   SEPTEMBER 30,
                                      ----------------------------------------------------   -------------------
                                        1996     1997(1)    1998(1)    1999(1)    2000(1)      1999       2000
                                      --------   --------   --------   --------   --------   --------   --------
                                                   (DOLLARS IN THOUSANDS EXCEPT PER SHARE AMOUNTS)
<S>                                   <C>        <C>        <C>        <C>        <C>        <C>        <C>
Net sales...........................  $57,374    $87,220    $99,084    $63,382    $87,243    $18,603    $23,932
Gross profit........................   25,866     41,825     41,449     22,385     32,555(4)   7,596      9,969
Earnings before taxes and
  nonrecurring charges..............   11,558     21,121(2)  12,940(2)  (6,851)     7,256(2)     926      1,286

Earnings before nonrecurring
  charges...........................    7,799     13,960      8,949(2)  (3,876)     4,798(2)     572        817
Earnings per share before
  nonrecurring charges
  Basic.............................     0.84       1.34(2)    0.78(2)   (0.33)      0.38(2)    0.05       0.06
  Diluted...........................     0.72       1.16(2)    0.69(2)   (0.33)      0.34(2)    0.04       0.05

Net earnings........................    7,799      2,877      7,029     (3,876)   (16,047)       572        817
Net earnings per common share:
  Basic(3)..........................     0.84       0.28       0.61      (0.33)     (1.28)      0.05       0.06
  Diluted(3)........................     0.72       0.24       0.55      (0.33)     (1.28)      0.04       0.05
Weighted average number of shares:
  Basic.............................    9,323     10,403     11,480     11,780     12,511     11,872     14,300
  Diluted...........................   10,878     11,998     12,877     11,780     12,511     12,947     15,209

Research and development............    5,538      7,151      9,844      9,185     11,270      2,136      3,255
Capital expenditures................    2,864      4,723      9,126      4,372      6,513        989      4,433
Depreciation and amortization.......    1,477      2,612      3,412      4,448     11,318      1,274      1,146
</TABLE>

<TABLE>
<CAPTION>
                                                            JUNE 30,
                                      ----------------------------------------------------   SEPTEMBER 30,
                                        1996     1997(1)    1998(1)    1999(1)    2000(1)        2000
                                      --------   --------   --------   --------   --------   -------------
                                                             (DOLLARS IN THOUSANDS)
<S>                                   <C>        <C>        <C>        <C>        <C>        <C>
Working capital.....................  $47,148    $47,633    $50,246    $43,766    $56,550       $54,896
Total assets........................   65,895     78,799     91,444     82,442     95,162        98,376
Long-term debt (excluding current
  portion)..........................       --         --         65         36         84            82
Stockholders' equity................   54,087     62,408     72,382     68,712     78,229        81,872
</TABLE>

------------------------

(1) The results of Firefly Technologies, Inc., which is being accounted for as a
    pooling-of-interests, are included as of July 1, 1997. The results of SSI,
    which is being accounted for as an immaterial pooling-of interests, are
    included from July 1, 1997; the results of Syncotec are included from
    September 1, 1997 when the acquisition of the remaining 50% of Syncotec was
    completed; and the

                                       18
<PAGE>
    results of TIC are included in our consolidated results from August 8, 1996
    when that acquisition was effective. Both Syncotec and TIC were accounted
    for as purchases.

(2) Nonrecurring charges include: acquisition-related charges of $14,001,
    $1,585, and $11,083 for the three months ended June 30, 2000, and
    September 30, 1997 and 1996, respectively; our West Coast operations
    reorganization cost of $10,567 for the three months ended June 30, 2000; and
    failed merger costs of $335 for the three months ended September 30, 1997.

(3) The difference between basic shares outstanding and diluted shares
    outstanding is the assumed conversion of common stock equivalents (stock
    options) in the amounts of 1,555,000; 1,595,000; 1,397,000; 0 and 0 in the
    years ended June 30, 1996, 1997, 1998, 1999 and 2000, respectively and
    1,075,000 and 909,000 for the three month periods ended September 30, 1999
    and 2000, respectively.

(4) Includes nonrecurring charges of $4,214 related to a write-off of inventory
    during the three months ended June 30, 2000 as part of our West Coast
    operations reorganization.

                                       19
<PAGE>
          MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION
                           AND RESULTS OF OPERATIONS

OVERVIEW

    We are an emerging supplier of optical components and modules for the
telecommunications market and a leading designer, developer and manufacturer of
optics and on-line yield enhancement solutions for the semiconductor and
industrial manufacturing markets. We have achieved our leadership position
through 30 years of understanding, utilizing and developing applications related
to the physics of light. We intend to leverage this knowledge and expertise in
on-line yield enhancement, namely metrology and automation, to provide
innovative solutions and advanced optical components and modules to
telecommunications customers. We believe this knowledge of optics and associated
metrology and automation, combined with our vertical manufacturing capabilities,
positions us to become a volume, cost-effective provider of telecommunication
components.

RESULTS OF OPERATIONS

THREE MONTHS ENDED SEPTEMBER 30, 2000 COMPARED TO THREE MONTHS ENDED
  SEPTEMBER 30, 1999

    Net sales for the first quarter ended September 30, 2000 totaled
$23.9 million, an increase of $5.3 million or 28.7% from $18.6 million in the
three months ended September 30, 1999. The increase in sales is primarily due to
the increase in the number of units sold.

    Gross profit for the three months ended September 30, 2000, amounted to
$10.0 million, an increase of $2.4 million from the comparable prior year
period. Gross profit as a percentage of net sales for the quarter ended
September 30, 2000, amounted to 41.7%, an increase of one percent from gross
profit as a percentage of net sales of 40.8%, for the three months ended
September 30, 1999. The increases in gross profit and gross profit as a
percentage of net sales were primarily due to the increase in volume and related
operating leverage.

    Selling, general and administrative expenses ("SG&A") of $5.4 million, in
the three months ended September 30, 2000, increased by approximately
$1.0 million or 23.9%, from the same period the year earlier. During the current
quarter, the increases were primarily associated with three new operations: Zygo
TeraOptix, ZygoLOT GmbH, our German sales office, and Zygo Automation's
telecommunications operations, and three new sales offices: Chicago, Japan and
Taiwan. As a percentage of net sales, selling, general and administrative
expenses in the three-month periods ended September 30, 2000 and 1999, at 22.5%
and 23.4% of net sales, respectively.

    Research, development and engineering expenses ("R&D") amounted to
$3.3 million or 13.6% of net sales for the three months ended September 30,
2000. In the comparable three-month period in the prior year, R&D expenses
totaled $2.1 million or 11.5% of net sales. The investment in R&D was due to
increased expenditures related to original equipment manufacturer, or OEM,
opportunities in the semiconductor area and also to develop prototypes for
significant users in the optical module market.

    We recorded operating profit in the three months ended September 30, 2000
totaling $1.1 million, as compared to operating profit in the comparable prior
year period of $0.7 million.

    We recorded net income of $0.8 million in the three months ended
September 30, 2000, an increase of 42.8% to the net income of $0.6 million in
the three months ended September 30, 1999. This improvement in our profitability
was achieved in the quarter largely due to sales volume increases, which led to
improved gross and operating margins. The net earnings on a basic per share
basis was $.06 for the quarter ending September 30, 2000, compared with $.05 in
the comparable prior year period.

                                       20
<PAGE>
FISCAL YEAR ENDED JUNE 30, 2000 COMPARED TO FISCAL YEAR ENDED JUNE 30, 1999

    Net sales of $87.2 million for fiscal 2000 increased by $23.9 million or
37.6% from fiscal 1999 net sales of $63.4 million. Our sales were favorably
impacted by the increase in demand in the semiconductor market and from the
reorganization of our sales function.

    Our net sales outside of the United States amounted to $38.4 million in
fiscal 2000, an increase of $10.4 million or 37.0% from fiscal 1999 levels of
$28.0 million. Sales in Japan during fiscal 2000 amounted to $17.6 million, an
increase of $3.4 million or 24.4% from fiscal 1999 levels. Sales in the Pacific
Rim and Europe amounted to $11.7 million and $9.1 million, respectively,
representing 94.0% and 16.0% increases from fiscal 1999 sales levels.

    Gross profit in fiscal 2000 amounted to $32.6 million, an increase of
$10.2 million or 45.4% from gross profit of $22.4 million in fiscal 1999. As a
percentage of net sales, gross profit in fiscal 2000 was 37.3%, as compared to
35.3% in fiscal 1999. The increase in gross profit and gross profit as a
percentage of sales were primarily due to the increase in volume and related
operating leverage.

    SG&A expenses in fiscal 2000 amounted to $18.5 million, a decrease of
$1.1 million or 5.8% over fiscal 1999. During fiscal 2000, we recorded a
$1 million credit to the SG&A expenses as a result of a legal settlement. Absent
that credit, as a percentage of net sales, SG&A expenses decreased in fiscal
2000 to 22.4% as compared to 31.0% in fiscal 1999, as a result of the increase
in the volume of sales increase in efficiencies of the group, and the decrease
in the expense primarily as a result of the proceeds from the legal settlement.

    R&D in fiscal 2000 totaled $11.3 million and increased by $2.1 million from
fiscal 1999. Part of the increased R&D expenditures is due to increased funding
in prototype development in the telecommunications industry.

    We recorded nonrecurring charges in the amount of $24.6 million in fiscal
2000. This charge was a result of our acquisition of Firefly and our decision to
reorganize our West Coast operations. We recorded nonrecurring charges of
$14.0 million in fiscal 2000 as a result of the acquisition of Firefly. The
nonrecurring charge from the acquisition was $12.0 million for compensation
expense resulting from the difference in the Firefly stock option exercise price
and the deemed fair market value on the date of grant for financial statement
purposes and $2.0 million for the payment of professional fees related to the
transaction. We recorded a charge of $10.6 million as a result of our
reorganization of our West Coast operations, principally for the write off of
goodwill and inventory. We did not record any nonrecurring charges in fiscal
1999.

    Amortization expense of $7.1 million for fiscal 2000 increased by
$5.8 million or 464.5% from fiscal 1999 levels of $1.3 million. Substantially
all of the increase is associated with the West Coast operations write-off of
goodwill and other intangible assets and the amortization expense recorded on
our Atomic Force Microscope line of business.

    Our operating loss in fiscal 2000 was $18.3 million as compared to operating
loss of $7.7 million in fiscal 1999.

    Income tax benefits in fiscal 2000 totaled $1.5 million or 8.4% of pretax
losses, which compares with income tax benefit of $3.0 million or 43.4% of
pretax losses in fiscal 1999. The change from year to year relates primarily to
the tax benefits that could not be recorded for financial statement purposes
associated with the compensation charge in connection with the fiscal 2000
acquisition.

    We recorded a net loss for fiscal 2000 of $16.0 million or $(1.28) per
share, as compared to a net loss of $3.9 million or $(0.33) per share during
fiscal 1999.

    Backlog at June 30, 2000 was $45.9 million compared to $28.9 million at
June 30, 1999, an increase of $17.0 million or 58.8%.

                                       21
<PAGE>
FISCAL YEAR ENDED JUNE 30, 1999 COMPARED TO FISCAL YEAR ENDED JUNE 30, 1998

    Net sales of $63.4 million for fiscal 1999 decreased by $35.7 million or
36.0% from fiscal 1998 net sales of $99.1 million. Our sales were adversely
impacted by market conditions, which began with poor conditions in the Asian
economic environment, leading to weak conditions in the semiconductor and data
storage markets. These forces impacted net sales of our instruments and systems,
which decreased by 35.3% to $41.0 million. Net sales of modules and components
decreased by 35.1% to $22.4 million. The decrease in modules and components was
principally the result of reductions in revenue associated with the Lawrence
Livermore National Laboratory National Ignition Facility Project as fiscal 1998
results included $8.9 million of revenue associated with the facilitation of our
Middlefield, Connecticut plant. In addition, the decrease was attributable to
reduced motion and optical component sales to OEM customers.

    Our sales outside of the United States amounted to $28.0 million in fiscal
1999, a decrease of $15.0 million or 34.8% from fiscal 1998 levels of
$43.0 million. Sales in Japan during fiscal 1999 amounted to $14.1 million, a
decrease of $8.1 million or 36.5% from fiscal 1998 levels. Shortfalls were
caused by lower demand from Japanese customers due to market conditions,
including lower sales of motion control components to Canon for incorporation
into Canon's photolithography "steppers" used in the production of
semiconductors. Additional reductions occurred in mask metrology systems where
macroeconomic factors impacted sales levels. Sales in the Pacific Rim and Europe
amounted to $6.0 million and $7.8 million, respectively, representing 46.8% and
16.4% reductions from the fiscal 1998 sales levels. Our sales and costs are
primarily negotiated and paid in U.S. dollars. Significant changes in the values
of foreign currencies relative to the value of the U.S. dollar can impact the
sales of the our products in our export markets as would changes in the general
economic conditions in those markets.

    Gross profit in fiscal 1999 amounted to $22.4 million, a decrease of
$19.1 million or 46.0% from gross profit of $41.4 million in fiscal 1998. As a
percentage of net sales, gross profit in fiscal 1999 was 35.3%, as compared to
41.8% in fiscal 1998. The decreases in gross profit and gross profit as a
percentage of sales were primarily due to volume shortfalls and the associated
underutilization of our manufacturing facilities as well as increased costs,
which were essentially non-recurring, incurred as we realigned our manufacturing
operations in response to lower demand. These actions led to the elimination of
manufacturing in our Newbury Park and Sunnyvale, California facilities.

    SG&A expenses in fiscal 1999 amounted to $19.6 million an increase of
$0.9 million or 4.9% over fiscal 1998. During fiscal 1999, we initiated
substantial cost reduction efforts as well as efforts associated with creating
additional sales and support infrastructure. Fiscal 1999 results were also
impacted by bad debt expenses, most notably with contracts associated with
StorMedia, Inc. Additional costs have been incurred for the creation of sales
infrastructure and the addition of atomic force microscopy technology to our
product portfolio. As a percentage of net sales, selling, general and
administrative expenses increased in fiscal 1999 to 31.0% as compared to 18.9%
in fiscal 1998, as a result of such increased expenses and lower sales volume
levels.

    Research and development expenses in fiscal 1999 totaled $9.2 million and
decreased by $0.7 million from fiscal 1998 primarily due to consolidation and
cost reduction efforts. Particular emphasis was given to the vision and confocal
product lines where the completion of certain R&D programs and the resulting
introduction of new products enabled these cost savings actions to move forward.
R&D costs as a percentage of net sales amounted to 14.5%, which compares with
9.9% of net sales in fiscal 1998.

    We recorded nonrecurring charges in the amount of $1.9 million in fiscal
1998, all which were incurred in the three months ended September 30, 1997. The
nonrecurring charges related to $0.7 million of expenses incurred to complete
our merger with Sight Systems, Inc. which was recorded as a pooling-of-interest,
the write-off of $0.9 million of in-process research and development costs in

                                       22
<PAGE>
conjunction with our acquisition of Syncotec and transaction expenses of
$0.3 million relating to our failed efforts to merge with Digital
Instruments, Inc. We did not record any nonrecurring charges in fiscal 1999.

    Amortization expense of $1.3 million for fiscal 1999 increased by
$0.5 million or 58.6% from fiscal 1998 levels of $0.8 million. Substantially all
of the increase is associated with the amortization expense recorded on the
atomic force microscope line of business.

    Our operating losses in fiscal 1999 were $7.7 million as compared to
operating profits of $10.2 million in fiscal 1998.

    Income tax benefits in fiscal 1999 totaled $3.0 million or 43.4% of pretax
losses which compares with income tax expense of $4.0 million or 36.2% of pretax
income in fiscal 1998.

    We recorded a net loss for fiscal 1999 of $3.9 million or $(0.33) per share,
as compared to net earnings of $7.0 million or $.55 per share during fiscal
1998.

    Backlog at June 30, 1999 was $28.9 million compared to $24.4 million at
June 30, 1998, an increase of $4.5 million. Our instruments and systems backlog
at June 30, 1999 increased $6.3 million largely due to increases in the
automation backlog. The components backlog fell by $1.7 million.

LIQUIDITY AND CAPITAL RESOURCES

    At September 30, 2000, working capital was $54.9 million, a decrease of
$1.7 million from the amount at June 30, 2000. We had cash and cash equivalents
of $8.0 million and marketable securities of $8.3 million for a total of
$16.3 million at September 30, 2000, a decrease of $7.6 million from June 30,
2000. Accounts receivable increased by $1.9 million and inventories increased by
$3.9 million. Accounts payable increased by $1.9 million and accrued liabilities
decreased by $2.7 million. As of September 30, 2000, there were no borrowings
outstanding under our $3.0 million bank line of credit. Unused amounts under the
line of credit are available for short-term working capital needs.

    At June 30, 2000, working capital was $56.6 million, an increase of
$12.8 million from the amount at June 30, 1999. The Company had cash and cash
equivalents of $15.6 million and marketable securities amounting to
$8.3 million for a total of $23.9 million. Accounts payable and accrued expenses
increased by $4.6 million, while accounts receivable increased by $7.6 million.
As of June 30, 2000, there were no borrowings outstanding under the Company's
$3.0 million bank line of credit. Stockholders equity at June 30, 2000 increased
by $9.5 million from the prior year to $78.2 million, largely as a result of
stock option exercises and the related tax benefit as well as the acquisition of
Firefly.

QUALITATIVE AND QUANTITATIVE DISCLOSURES REGARDING MARKET RISK

    We develop products in the United States and market our products in North
America, and to a lesser extent in the Asia Pacific and Europe regions. As a
result, our financial results could be affected by factors such as changes in
foreign currency exchange rates or weak economic conditions in foreign markets.
Because most of our revenues are currently denominated in U.S. dollars, a
strengthening of the dollar could make our products less competitive in foreign
markets. Our interest income is sensitive to changes in the general level of
U.S. interest rates, particularly since the majority of our investments are in
short-term instruments. Due to the short-term nature of our investments, we do
not believe that a material risk exposure exists.

RECENT ACCOUNTING PRONOUNCEMENTS

    In June 1998, the Financial Accounting Standards Board, or FASB, issued
Statement of Financial Accounting Standards No. 133, "Accounting for Derivative
Instruments and Hedging Activities," which

                                       23
<PAGE>
establishes accounting and reporting standards for derivative instruments,
including certain derivative instruments embedded in other contracts, and for
hedging activities. It requires that an entity recognize all derivatives as
either assets or liabilities in the statements of financial position and measure
those instruments at fair value. In addition, SFAS No. 133 permits hedge
accounting when certain conditions are met. SFAS No. 133, as amended by SFAS
No. 137 and No. 138, is effective for all fiscal quarters of fiscal years
beginning after June 15, 2000. This statement does not have a significant impact
on our results of operations or financial position.

    In December 1999, the Securities and Exchange Commission issued Staff
Accounting Bulletin No. 101, which summarizes views of the Commission staff in
applying accounting principles generally accepted in the United States to
revenue recognition in financial statements. Subsequently, the SEC issued SAB
No. 101A and SAB No. 101B, "Amendment: Revenue Recognition in Financial
Statements," that delays the implementation date of certain provisions of SAB
No. 101. Management currently is evaluating the impact, if any, that this SAB
will have on the results of operations or financial position.

    In March 2000, the Financial Accounting Standards Board issued
Interpretation No. 44, "Accounting for Certain Transactions Involving Stock
Compensation, an interpretation of APB Opinion No. 25." The Interpretation
answers questions dealing with APB No. 25 implementation practice issues.

    Interpretation No. 44 will be applied prospectively to new awards,
modifications to outstanding awards, and changes in employee status on or after
July 1, 2000, except as follows: (a) requirements related to the definition of
an employee apply to new awards granted after December 15, 1998;
(b) modifications that directly or indirectly reduce the exercise price of an
award apply to modifications made after December 15, 1998; and
(c) modifications to add a reload feature to an award apply to modifications
made after January 12, 2000. Financial statements for periods prior to July 1,
2000 will not be affected. The adoption of Interpretation No. 44 is not expected
to have a material impact on our results of operations or financial position.

                                       24
<PAGE>
                                    BUSINESS

OVERVIEW

    We are an emerging supplier of optical components and modules for the
telecommunications market and a leading designer, developer and manufacturer of
optics and on-line yield enhancement solutions for the semiconductor and
industrial manufacturing markets. We have achieved our leadership position
through 30 years of understanding, utilizing and developing applications related
to the physics of light. We intend to leverage this knowledge and expertise in
on-line yield enhancement, namely metrology and automation, to provide
innovative solutions and advanced optical components and modules to customers in
the telecommunications market. We believe this knowledge of optics and
associated metrology and automation, combined with our vertical manufacturing
capabilities, position us to become a volume, cost-effective provider of
telecommunication components. Selected semiconductor and industrial
manufacturing customers include Bosch, Canon, Caterpillar, Cummins Engine, IBM,
KLA-Tencor, Nikon and SVG. Selected telecommunications customers include
Agilent, Axsun, Cidra, Coherent, Corning Rochester Photonics, Lightchip, Lucent,
Nortel Networks, Tyco and Vytran.

    In May 2000, we acquired Firefly Technologies, Inc., renamed Zygo TeraOptix,
which develops optical components and modules for the telecommunications market.
As a result, our optics unit became a vertically integrated, manufacturer of
micro optic components and modules for the telecommunications industry. Our
telecommunication products include fiber and lens arrays, switches and modules
that are used in specific products and systems for optical networks, such as
dense wave division multiplexers, or DWDMs. These products are designed for use
in high capacity, high performance terrestrial long distance, metropolitan and
cable fiber optic systems and networks. Although sales to the telecommunications
market do not currently comprise a large portion of our net sales, we intend to
expend significant capital in this area and leverage our precision manufacturing
expertise to provide quality optical components and modules to the
telecommunications market. Our optics unit also designs high performance
macro-optics components and assemblies that are used in applications such as
laser fusion research, semiconductor manufacturing equipment and aerospace
optical systems. These components and assemblies are also an integral part of
our own yield enhancement solutions.

    Our metrology unit manufactures noncontact optical measurement instruments
and products. We are one of the largest and most experienced manufacturers of
interferometric products that inspect and analyze surfaces of objects. We are
also a leader in displacement interferometry, which is used to achieve highly
accurate distance measurement and motion control. These products enable
lithography tool and semiconductor chip manufacturers to increase yield and
semiconductor chip capacity. These interferometric measurement instruments are
sold to customers in the telecommunications, semiconductor and industrial
manufacturing markets and are used by us in our manufacture of optical
components and modules.

    Our automation solutions unit designs, develops, manufactures and markets
comprehensive automated system solutions to reduce downtime and to enhance
operational efficiencies and product yields by building metrology into the
production process. These automation systems are used in the manufacture of high
precision equipment. We are currently shipping to the semiconductor and
industrial manufacturing markets and are developing automation for use in the
telecommunications market.

                                       25
<PAGE>
INDUSTRY BACKGROUND AND SOLUTIONS

  THE TELECOMMUNICATIONS INDUSTRY

    The proliferation of the Internet and the increase in activities such as
electronic commerce, the transmission of large data files and telecommuting have
caused a significant increase in the volume of data traffic across the
communications infrastructure. According to Ryan, Hankin & Kent, a leading
market research and consulting firm, Internet data traffic will increase from
approximately 900,000 terabytes, or trillions of bytes, per month in 2000 to
over 15.9 million terabytes per month in 2003. According to International Data
Corporation, a market research company, this is primarily driven by an increase
in Internet users worldwide from 245 million in 1999 to approximately
643 million in 2003. The number of Internet users continues to grow, but their
bandwidth usage is growing even faster.

    To alleviate this potential bottleneck, network service providers are
increasingly deploying next-generation optical networks that address the demand
for high-speed communications. Optical networks help meet the increased need for
bandwidth and are expected to ultimately replace existing bandwidth-constrained
electrical-based systems as the backbone of the Internet by transporting and
processing information more quickly and more efficiently than traditional
communications networks. Both established and emerging companies are rushing to
create next-generation all-optical components, systems and networks. Given this
growth in the use of the Internet and the need and proliferation of high
bandwidth communication services there has been a worldwide expansion of the
telecommunications and data communications infrastructure. This build-out has
driven demand for optical components and modules. According to Ryan, Hankin &
Kent, industry demand for fiber optic components will exceed $23 billion in the
year 2003, up from $6.6 billion in 1999.

    The demand for critical components, optical equipment and fiber-optic
modules is presently pacing the growth of the telecommunications industry. In
addition, the industry has been consolidating in recent years, creating a
problem for customers who typically want multiple sources for critical
components and modules. Fiber optic network providers need suppliers who can
fill the void and deliver consistent supplies of reliable critical components
and modules at significant volumes and in a timely, cost-effective manner.

  OUR TELECOMMUNICATIONS SOLUTIONS

    We develop and manufacture micro-optic components and modules for the
telecommunications industry and macro-optical components for the
telecommunications, semiconductor and industrial manufacturing markets. A
significant problem facing the telecommunications industry today is a lack of
cost-effective, high quality components and modules developed on a timely basis.
We believe that we have a competitive advantage in addressing this problem
because of the following:

    VERTICAL INTEGRATION OF OUR OPTICAL BUSINESS.  Our optical business is
substantially vertically integrated. We purchase raw materials from a variety of
suppliers and manufacture in-house the optical components necessary to fabricate
modules and switches including critical coatings, filters, ball lenses,
collimator lenses, arrays and active devices such as micro-electro-mechanical
structures, or MEMS. As a result, we believe we are less subject to component
shortages that plague many component manufacturers and network suppliers in the
telecommunications industry. In addition, most facets of the design and
manufacturing processes are done in our own facilities which allows us to
rapidly respond to market demand. This also allows us to provide advanced
prototypes and application-specific solutions to our customers on an expedited
basis.

    LEVERAGED EXPERTISE IN BOTH OPTICS AND YIELD ENHANCEMENT.  Our micro-optic
development expertise coupled with our core automation and metrology
capabilities enables us to create and accurately test the performance of the
optical components that we manufacture. Having this measurement skill internally
enables us to more effectively tailor our manufacturing process at the
development stage to

                                       26
<PAGE>
meet desired specifications. As a result, we are able to deliver to our
customers in a timely manner a wide array of high quality, cost-effective and
reliable components and modules. For example, a key issue confronting
manufacturers of fiber-optic modules is the efficient and precise alignment of
optical components to achieve low insertion loss, which is the degradation of
light during the transmission process. Today, the method used by most
manufacturers is alignment through trial and error. Using our automation and
metrology capabilities, we have developed a proprietary automated alignment
system that uses wavefront feedback to deterministically align components
quickly. The result to our customers is increased quality and volume and greater
cost-efficiency through yield enhancement.

    STRONG AND SCALABLE MANUFACTURING CAPABILITIES.  We believe that our
advanced wafer fabrication facilities, our advanced prototyping capability and
our proprietary packaging technology allows us to manufacture a broad range of
optical components at increasing volumes. A number of our principal engineering
and manufacturing team members come from the optical and magnetic data storage
industry where low-cost and high-volume manufacturing were essential aspects of
their business. We believe that this experience, coupled with our metrology and
automation experience, will enable us to expand our optical manufacturing
capabilities, resulting in improved time to market and yield for our customers.

    We believe that our telecommunication solutions, combined with over
30 years of experience in on-line yield enhancement, enable us to deliver
high-performance, cost-effective components and modules to our
telecommunications customers and to quickly develop and commercialize the next
generation of optical components and modules.

  PRECISION MANUFACTURING INDUSTRY

    Manufacturers in semiconductor and industrial manufacturing industries
continue to redesign their processes in order to compete more effectively in an
increasingly competitive marketplace. These changes are necessitated by:

    - decreasing product geometries;

    - increasing complexity of manufacturing processes;

    - shortening product life cycles;

    - declining product prices; and

    - intensifying global competition.

    Precision metrology is an enabling technology for the semiconductor,
industrial and telecommunications industries. These pressures on manufacturers
to improve productivity and quality have fueled demand for precision noncontact
optical metrology, and required integration of high precision metrology directly
into the manufacturing process in order to increase yields and quality control.

    Advancing technologies have required manufacturers in a variety of
industries to produce smaller products with more precise tolerances and
increased complexity of design geometries. These components cannot be adequately
measured by the metrology devices and systems historically utilized. For
example, contact profilers and visual qualitative inspection systems are
inadequate for quantitative analysis of critical dimensions such as
semiconductor line widths, photomask surface quality and magnetic recording
disks. Additionally, precision machined part tolerances now required in high
performance automotive engines are approaching dimensions that require
manufacturers to implement sophisticated metrology and inspection tools.

    The trend towards miniaturization and tighter tolerances creates new
challenges for manufacturers as they are forced to handle, measure and test
ever-smaller components. As piece part dimensions and

                                       27
<PAGE>
tolerances become smaller, "nanotechnology scale" precision is necessary and, to
a greater extent than ever, manufacturers require automated measurement and
control.

    With on-line process control and yield improvement metrology solutions being
enabling factors for manufacturers of precision components, the growth for yield
enhancement solutions is expected to outpace the growth of the overall capital
equipment market. IC Insight Inc., a semiconductor market research company,
estimates that the global market demand for metrology solutions will reach
$10 billion in 2000, a 119% growth from 1999, and $18.3 billion in 2003. Our
growth is driven by both projected number of steppers to be sold, according to
Dataquest, a market research company, from 1,106 in 2000 to 1,407 in 2002 and an
increase in the number of axes per stepper as the need for precision
requirements and throughput increases. Shortening product lifecycles, increased
competition and declining product prices in these industries, have forced these
manufacturers to no longer depend solely on sales growth to fuel financial
performance improvement, but rather to focus greater attention on the need to
reduce production defects and significantly increase production yields. While
the semiconductor market is rather mature in its use of these types of tools,
the industrial manufacturing markets' requirement for on-line automated
metrology solutions is at an early stage of penetration, since manufacturers are
just beginning to measure critical dimensions and surface topography of smaller
parts to tighter tolerances.

  OUR HIGH PRECISION MANUFACTURING SOLUTIONS

    A significant problem facing the precision manufacturing industry today is
an increased requirement for in-production automated measurement systems. The
precision tolerances that are required today make historical methods of
measuring sample parts obsolete. We believe that we are able to address this
problem for our customers by virtue of the following:

    HISTORY OF INNOVATION AND COMMERCIALIZATION.  Throughout our history, we
have met our customers' requirements through innovation and commercialization.
Since we introduced the first optical interferometer in 1972, we have developed
93 United States patents, of which 67 are currently active, and 38 foreign
patents, and we have 63 United States patent applications and 60 foreign patent
applications pending. This wealth of intellectual property has led to an
introduction by us of our yield enhancement solutions over the last 30 years.

    We have received numerous achievement awards, including:

    - Laser Focus World Commercial Technology Award 2001 (selected in
      November 2000);

    - Photonics Spectra Circle of Excellence Awards in 1988, 1994, 1996, 1997,
      1998 and 2001 (selected in November 2000);

    - R&D Magazine 100 Awards in 1978, 1982, 1988, 1988, 1988, 1994, 1996, 1997
      and 1998;

    - American Machinist Excellence in Manufacturing Technology Achievement
      Award for Technology & Reliability in 2000;

    - 1997 R&D Magazine 100 and Photonics Spectra Circle of Excellence Award for
      ZMI 2001 Displacement Measuring Interferometer; and

    - 1998 R&D Magazine 100 and Photonics Spectra Circle of Excellence Award for
      MESA Interferometric System.

    INTEGRATION OF OUR METROLOGY AND AUTOMATION CAPABILITIES.  We can provide
yield enhancement solutions integrating our metrology and automation
capabilities. For example, our automation unit has built a system that enables a
manufacturer of fuel injector parts to rapidly, automatically and continuously
measure a stream of parts for flatness, thickness and parallelism in its
production line. As

                                       28
<PAGE>
a result, these manufacturers can now measure these components prior to
assembly, resulting in increased yields and cost-efficiencies.

INTEGRATED CORE COMPETENCIES

  OPTICAL COMPONENTS AND MODULES

    As illustrated in the following chart, we combine our expertise in optics,
our design and manufacturing capabilities and our expertise in automation and
metrology to manufacture next generation optical network components, modules and
semiconductor optics and assemblies.

                                   [DIAGRAM]

  YIELD ENHANCEMENT SOLUTIONS

    As illustrated in the following chart, the combination of our high precision
metrology systems and our parts handling automation solutions results in on-line
yield enhancement solutions for our customers. These solutions can be customized
to a customer's specific application.

                                   [DIAGRAM]

                                       29
<PAGE>
OUR STRATEGY

    Our objective is to:

    - become a significant provider of cost-effective optical components,
      optical assemblies, fiber optic modules and precision optics on a volume
      basis for next-generation optical networks and precision semiconductor and
      industrial applications; and

    - continuously improve our customers' competitiveness by providing on-line
      yield enhancement metrology and automation solutions for the
      telecommunications, semiconductor and other high precision markets.

    Our strategy to accomplish these objectives has the following elements:

    INCREASE INVESTMENTS IN THE TELECOMMUNICATIONS MARKET.  Our precision
measurement technology expertise enables us to focus on the high growth
telecommunications market. Due to the technological complexities of measuring
sub-micron features, fewer industry players are able to provide the needed
metrology effectively. We are able to compete in these markets because of our
skilled employee base, which encompasses a wide range of scientific disciplines
and technical capabilities. We intend to dedicate more of our research and
development resources and invest significant capital in our telecommunications
business.

    MAINTAIN VERTICAL MANUFACTURING CAPABILITY IN THE OPTICS BUSINESS.  In order
to compete effectively in the telecommunications industry, we believe that our
optics business must continue to be vertically integrated in the near term.
Increasing demand for products and the limited availability of reliable
component suppliers has created a shortage of quality critical fiber optics
components in the telecommunications industry. We purchase raw materials from
suppliers, but we do not have to rely on third party manufacturers to make our
critical components and modules. This vertical integration enables us to
minimize delays from component suppliers, thus decreasing our time to market.
Because we are vertically integrated and have the advanced yield enhancement
equipment, we believe our fiber optics components will be manufactured reliably
with high throughput using our proprietary wavefront guided assembly technology,
high-speed fiber placement techniques, self-packaging parts and knowledge of
high-volume processing methods. In addition, this capability allows us to
produce prototype components and modules for customers on an expedited basis. We
intend to maintain our vertical manufacturing capability until such time as we
believe that efficient, reliable sources of supply of components are and will
continue to be available. At that point, we would modify our comprehensive
vertical integration strategy in those areas that we believe make sense and
consider reallocation of our resources.

    CONTINUE TO DIVERSIFY CUSTOMERS AND PRODUCTS.  We believe that diversifying
the customers we serve as well as the products we produce will enable us to
minimize the traditional cyclical effects of the semiconductor industry on our
business. We have a significant market presence in North America, Asia and
Europe. Moreover, our products are used in a broad range of applications that
reduces reliance on sales to any particular industry. This ability to leverage
our intellectual property across markets allows us to diversify our investment
in research and design.

    DEVELOP LONG-TERM AND SIGNIFICANT CUSTOMER RELATIONSHIPS.  We seek to enter
into collaborative arrangements with existing and potential customers in
attractive end-user markets in order to jointly develop and optimize our
products for their use. We believe that our ability to provide technical
assistance to these companies in terms of the design and development of
solutions encourages the incorporation of our products in their devices. For
example, in July 2000, we entered into a development and supply agreement with
Lightchip in which we agreed to design, develop and supply components and
modules critical to Lightchip's DWDM.

                                       30
<PAGE>
    PURSUE A SELECTIVE ACQUISITION AND INVESTMENT STRATEGY.  We seek to access
additional technological capabilities and complementary product lines through
selective acquisitions and strategic investments. For example, through our
funded partnership with Vacuum Process Technology, we are jointly developing
high-yield chambers for specialty telecommunication coatings. We anticipate that
the resultant coatings design laboratory and production facility will be
combined with our scientific expertise to provide a competitive, quality product
to the telecommunications and semiconductor markets. In addition, we will
continue to look for technologies or other areas of expertise that will
complement our existing core competencies.

PRODUCTS AND APPLICATIONS

    We manufacture micro-optics components and modules such as lenses, filters,
fiber arrays and switches for the optical telecommunications industry and
macro-optical components, such as flats, spheres, waveplates and mirrors for the
semiconductor and industrial markets. We also manufacture, design and market
yield enhancement solutions for high performance manufacturers through optical
metrology and automation.

    Our products are based on our two core competencies:

    - optics--sold as components and assembled modules; and

    - yield enhancement--integration of automation and metrology.

                                       31
<PAGE>
                 HIGH PRECISION OPTICAL COMPONENTS AND MODULES

MICRO-OPTICS AND ASSEMBLIES:

<TABLE>
<CAPTION>
PRODUCT             DESCRIPTION          BENEFITS TO CUSTOMER  MARKET                  STATUS
-------             -----------          --------------------  ------                  ------
<S>                 <C>                  <C>                   <C>                     <C>
Fiber Arrays        Used to couple       - Low insertion loss  Telecommunications      Shipping
                    light into arrayed   - Precision spacing
                    devices like         - Low cost
                    arrayed waveguides

Microlens Arrays    Used to collimate    - Certified at        Telecommunications      Beta Test/
                    light from arrayed     communication                               Pilot
                    components like        wavelength                                  Production
                    fiber arrays or      - Low insertion loss
                    emitters into
                    optical subsystems
                    like DWDMs,
                    switches, and other
                    large channel count
                    devices

Fiber Optic         Used to collimate    - Low cost            Telecommunications      Beta Test/
Collimators         light from discrete  - High performance                            Pilot
                    components                                                         Production

All Optical MEMS    Optical cross        - Low insertion loss  Telecommunications      Development
Switch              connects,            - Low power to
                    configurable from      operate
                    32 I/O to 1024 I/O,
                    for core or edge
                    switching
                    applications

Custom Integrated   Customer-specific    - Low costs           Telecommunications      Beta test
Modules             modules that         - Leverages our
                    integrate discrete     optics, metrology
                    components to          and alignment
                    combine, split,        capabilities
                    deflect or filter
                    optical signals

Laser Diode         Used for mounting    - Low cost            Telecommunications      Shipping
Submounts           laser chips in       - High reliability
                    optical amplifier
                    systems

Optical Substrates  Used for thin-film   - Superior flatness   Telecommunications      Shipping
and Components      filters, dichroic      and thickness       Semiconductor
                    mirrors,             - Finish control
                    diffraction          - Customized to
                    gratings and           customer
                    polarization cubes     specifications
</TABLE>

                                       32
<PAGE>
  MICRO-OPTICS AND ASSEMBLIES

    Our micro-optics capability is enhanced by our measurement capability for
small, high performance optical elements and our proprietary batch processing
and wafer fabrication technologies that are resident within our
telecommunications optics division. Our micro-optics products include:

    FIBER ARRAYS.  Our fiber arrays are the interface for signal transmission
into wavelength division multiplexing systems and almost every kind of free
space optical switch. We pattern and etch silicon, polish the fibers, coat, and
position the fibers. We have the capability to etch fiber so that it can be
placed at pitches less than 60 microns, which is much less than the fiber
diameter itself. This is useful for integrated optical devices. We also apply
our automation expertise for the placement of the fibers which has been a
difficult, low-yielding and time consuming manual process for other optical
component suppliers.

    MICROLENS ARRAYS.  Fabricated using photo-patterning and other wafer
processing techniques, microlens arrays are comprised of closely and accurately
spaced microlens elements on a substrate. They are used for coupling light
between arrayed components, such as fiber arrays and arrayed MEMS switches. In
many cases, lens array quality is the limiting factor for large scale
all-optical switches.

    FIBER OPTIC COLLIMATORS.  Our fiber optic collimators integrate discrete
lens elements like spherical and bullet lenses with individual fibers and are
used in the telecommunications industry for collimating beams from lasers or
into other optical elements, while minimizing insertion loss. The end products
which employ these components include various optical modules filter-based
wavelength division multiplexers, beam combiners and switches.

    ALL OPTICAL MEMS SWITCHES.  MEMS devices are micromachined in silicon and
provide a technology platform that is widely used for optical switch devices.
Using our knowledge of materials science and wafer processing, we developed a
customized two dimensional electrostatic switch for a customer within ten weeks
from receipt of order. We are currently developing a three dimensional switch
based piezoelectric actuation. This three dimensional switch is targeted for
applications requiring optical cross connects from 32X32 to 1024X1024.

    CUSTOM INTEGRATED MODULES.  Our custom integrated modules involve packaging,
aligning and assembling optical elements into a larger module such as a DWDM, a
beam combiner, a switch or an optical add drop multiplexer. This custom
integration leverages our metrology capability for use in the critical alignment
of components in packaged assemblies. These assemblies can be of a generic
nature or may be tailored for a customer's unique need or capability.
Ultimately, a large number of discrete modules will be integrated within a
singular integrated package.

    LASER DIODE SUBMOUNTS.  These are metal-patterned ceramic components that
are used for mounting both passive and active optical elements such as laser
chips into optical modules. One of these parts has been shipping in volume to a
leader in submarine communication systems which produces an optical amplifier
module.

    OPTICAL SUBSTRATES AND COMPONENTS.  Our flat, high quality optical
substrates and components are used in the manufacture of high performance DWDM
filters, etalons, gratings and polarizers. Because of our experience in
precision machining of glasses and ceramic materials, we have a strong
capability for the production of these substrates and components. We recently
entered this market as a direct result of customer requests.

                                       33
<PAGE>
MACRO-OPTICS AND ASSEMBLIES:

<TABLE>
<CAPTION>
PRODUCT             DESCRIPTION              BENEFITS TO CUSTOMER  MARKET                  STATUS
-------             -----------              --------------------  ------                  ------
<S>                 <C>                      <C>                   <C>                     <C>
Prisms, Rhomboids,  High precision plano     - Low insertion loss  Telecommunications      Shipping
and Beamsplitters   optical components used  - High quality        Semiconductor
                    singly or in
                    combination to direct,
                    steer, combine, divide
                    and separate laser
                    beams

Filters             Wavelength-selective     - Low insertion loss  Telecommunications      Development
                    thin-film coatings used  - Low channel cross-
                    to separate or combine     talk
                    optical signals in DWDM
                    applications

Optical Coatings    Thin-film coatings used  - High efficiency     Telecommunications      Shipping
                    to reflect, minimize       energy transfer     Semiconductor
                    loss, separate or        - Reduced feedback
                    combine light              and noise
                                             - Low insertion loss

Reference Flat      Super-smooth flat        - Precise location    Semiconductor           Shipping
Mirrors             mirrors used as          of reference
                    reference surfaces with    surfaces
                    displacement             - High resolution
                    measurement sensors        lithography

Stage Mirrors       Lightweight wafer and    - High throughput     Semiconductor           Shipping
                    reticle stages used for
                    lithography and
                    metrology systems used
                    in semiconductor
                    manufacturing and
                    testing

Laser Optics        Mirrors, polarizers and  - Improved laser      Industrial              Shipping
                    laser and assemblies       performance and
                    disks used in high         damage resistence
                    energy laser systems
                    for alternative energy
                    research and nuclear
                    weapons simulation

Lenses and Lens     High precision           - High resolution     Telecommunications      Shipping
Systems             spherical and              optical             Semiconductor
                    aspherical lens            telecommunications
                    elements and assemblies    signal analysis
                    used in                  - High resolution
                    telecommunications and     lithography
                    semiconductor imaging
                    systems
</TABLE>

                                       34
<PAGE>
  MACRO-OPTICS AND ASSEMBLIES

    We manufacture and supply high precision optical components and modules to
customers as well as for use in our own instruments. Our macro-optic products
include:

    PRISMS, RHOMBOIDS, AND BEAMSPLITTERS.  Our high-precision plano optical
components are manufactured and supplied to our external customers for use in a
variety of modules and assemblies, including those used in fiber optic
telecommunications systems. In addition, they are also used internally as part
of our metrology and automation solutions. They are used individually or in
combination with one another to direct, steer, combine, divide, and separate
laser beams. These products are often coated with special optical films to meet
the highly demanding requirements for low insertion loss and cross-channel
isolation.

    FILTERS.  Our filters are made up of multiple layers of thin films whose
thickness and material properties are chosen for their ability to distinguish
among differing wavelengths. For example, narrow-bandpass filters are used to
separate or combine optical signals in DWDM applications. Our filters are also
used to separate optical telecommunication signals from amplifier pump radiation
at shorter wavelengths. The design and deposition technology for producing
filters employs vacuum coating chambers equipped with optical monitoring and
real-time control systems.

    OPTICAL COATINGS.  Reflective films are designed to minimize loss of optical
energy upon reflection from the coated surface. Anti-reflective films minimize
the loss of energy upon transmission through the coated surface. These coatings
are produced by vacuum deposition of thin dielectric films in sophisticated
coating chambers. Reflective and anti-reflective coatings are essential for
achieving low insertion losses through components and modules in optical
telecommunications applications. Polarization coatings are applied to prisms and
other plano optical components to separate or combine laser beams of orthogonal
polarization. Such coatings are essential for efficient pumping of optical fiber
amplifiers used in telecommunications systems.

    REFERENCE FLAT MIRRORS.  Our super-smooth flat mirrors serve as reference
surfaces when used in conjunction with displacement measurement interferometers.
These reference mirrors must be made of special materials to be insensitive to
temperature variation and non-uniformity. We produce a large quantity and
variety of reference flat mirrors used in semiconductor manufacturing and
metrology equipment. The flatness and smoothness of these mirrors are essential
for precise location of semiconductor wafers and exposure masks during
production and testing of integrated circuits.

    STAGE MIRRORS.  Our stage mirrors are lightweight structures, which serve as
both a mechanical support for a wafer or reticle and two orthogonal reference
flat mirror surfaces. Stage mirrors are used in high performance lithography and
metrology systems employing laser, electron-beam, or x-ray exposure sources.
They are made of low-expansion materials to reduce sensitivity to thermal
variations, and are machined to produce a lightweight but stiff mechanical
structure with excellent dimensional stability. Two adjacent sides of the stage
are finished using proprietary technology to serve as reference flat mirrors.
The combined optical and structural properties of such stage mirrors are
critical for achieving higher wafer throughput in advanced lithography and
metrology tools. We supply stage mirrors to a number of manufacturers of
semiconductor lithography and metrology equipment.

    LASER OPTICS.  Laser optics are mirrors, polarizers and solid-state laser
amplifiers used in high energy laser systems. Such components are used in laser
fusion research and nuclear weapons simulation. Such optical components must be
finished to the highest quality in terms of surface flatness, smoothness, and
surface cosmetics. Even the smallest defects can lead to catastrophic failure in
use. We are a leader in producing large plano laser optics, having supplied such
components to major laser fusion laboratories for nearly two decades. We are
under contract to the Lawrence Livermore National

                                       35
<PAGE>
Laboratory, to produce mirrors, polarizers and amplifier slabs for the National
Ignition Facility, also known as NIF. The NIF, when completed in 2007, is
expected to be the largest laser system ever built.

    LENSES AND LENS SYSTEMS.  Lenses are transmissive optical components with
spherical or aspherical surfaces. They are used individually or in combination
as lens systems to form and transfer images. We produce lenses and assemblies
for use in a wide variety of applications, ranging from spectrum analyzers for
optical telecom systems to semiconductor lithography. Such lenses are produced
using advanced computer numeric control manufacturing and metrology equipment.
We assemble lens systems in clean-room conditions using laser-based alignment
and centering equipment.

                          YIELD ENHANCEMENT SOLUTIONS

METROLOGY:

<TABLE>
<CAPTION>
PRODUCT                DESCRIPTION          BENEFITS TO CUSTOMER  MARKET                  STATUS
-------                -----------          --------------------  ------                  ------
<S>                    <C>                  <C>                   <C>                     <C>
Small Aperture         Used to analyze the  - Measures            Telecommunications      Shipping
Wavefront              surface shape of       performance of
Interferometer         transmitted            lenses
                       wavelengths and
                       optical components

Wavefront Analyzer     Used to align        - Decreases           Telecommunications      Internal Use
                       optical components     production time
                                              for optical
                                              components and
                                              modules

Interferometric        Used to do three-    - Improves analysis   Telecommunications      Shipping
Microscopes            dimensional            of various types    Semiconductor
                       analysis of the        of surfaces         Industrial
                       surface of an
                       object

Displacement           Used to measure and  - Improves            Telecommunications      Shipping
Measuring              control, while they    positioning         Semiconductor
Interferometers        are in motion, the     accuracy            Industrial
                       x, y and theta       - High Resolution
                       stages in photo      - High Velocity
                       lithography          - Low data age
                       equipment              uncertainty

Large Aperture         Used to analyze      - Precise process     Semiconductor           Shipping
Wavefront              surface shape and      control             Industrial
Inteferometer          transmitted
                       wavelength of
                       optical components
                       and modules

Photomask Critical     Used to measure and  - Allows superior     Semiconductor           Shipping
Dimension Metrology    analyze resist-        resolution,
System                 coated and             repeatability and
                       production masks       linearity
                                            - Available with
                                              defect
                                              printability
                                              analysis
</TABLE>

                                       36
<PAGE>

<TABLE>
<CAPTION>
PRODUCT                DESCRIPTION          BENEFITS TO CUSTOMER  MARKET                  STATUS
-------                -----------          --------------------  ------                  ------
<S>                    <C>                  <C>                   <C>                     <C>
Geometrically          Used to measure the  - Allows industrial   Industrial              Shipping
Desensitized           flatness of            surfaces to be
Interferometer         precision machined     measured quickly
                       parts                  and without
                                              contact

Digital Video Disk     Used to measure the  - Allows inspection   Industrial              Shipping
Interferometer         transmitted            of small,
                       wavefront quality      aspherical lenses
                       of small lenses      - Used in digital
                                              video disk optical
                                              devices

3-D Interferometer     Used to measure      - High throughput     Industrial              Beta Test
                       flatness,            - High yield
                       thickness, and
                       parallelism of
                       precision machined
                       parts
</TABLE>

  METROLOGY

    We offer a broad range of interferometry-based products. An interferometer
analyzes the number, shape and position of the lines in the fringe pattern of
bright and dark lines that result from the optical path difference between a
reference and a measurement beam. These interferometric instruments and systems
utilize highly sophisticated subsystems including precision optical components,
stable and long-life laser or other light sources, piece part positioning stages
and high-powered workstations or PCs for processing and analyzing fringe pattern
data. Our metrology products include:

    SMALL APERTURE WAVEFRONT INTERFEROMETER.  Our small aperture wavefront
interferometer is a compact interferometer that is designed for ease of use,
especially for applications that involve repetitive testing of similar
components. It has the ability to quickly and automatically characterize
microlenses as small as 20 microns to three millimeters in diameter. Its
integrated motion control and down facing orientation make it ideal for testing
lens arrays and picking and testing discrete lenses, molded aspherics, miniature
mirrors and filters.

    WAVEFRONT ANALYZER.  The wavefront analyzer program is a fully automated
micro-optic metrology system. The analyzer is used in the critical alignment of
optical elements where the objective is to minimize wavefront error or align to
a particular wavefront shape or target.

    INTERFEROMETRIC MICROSCOPES.  Our interferometric microscopes combine
advanced techniques of interferometry, microscopy and precision analysis
algorithms in an automated package. These instruments make high precision
surface analysis possible and are important because they provide surface
structure analysis. These microscopes use scanning white light interferometry to
measure nonspecular surfaces and build ultra-high z-axis resolution images. Our
patented Frequency Domain Analysis system and powerful workstations and personal
computers then combine for next-generation three-dimensional surface structure
analysis.

    DISPLACEMENT MEASURING INTERFEROMETERS.  Our displacement measuring
interferometer family of laser interferometer systems provides measurements that
control some of the world's most sophisticated machinery in the semiconductor,
flat panel display production and optical component manufacturing industries.
These products are used to measure the position of a tool relative to a part
under fabrication through the use of a directed laser beam reflecting from the
moving portion of a machine. Most of these systems are sold on an OEM basis into
the semiconductor photolithography market.

                                       37
<PAGE>
    LARGE APERTURE WAVEFRONT INTERFEROMETER.  Our large aperture wavefront
interferometer is used for large surface metrology. Our interferometers are used
extensively in the optics industry to measure glass or plastic optical
components such as flats, lenses and prisms. In addition, they are used to
measure other precision components such as hard disks, bearings and sealing
surfaces, polished ceramics and contact lens molds.

    PHOTOMASK CRITICAL DIMENSION METROLOGY SYSTEM.  Our photomask critical
dimension metrology system product lines hold a significant market share of the
photomask metrology market and constitute the majority of our confocal scanning
microscopy sales. They provide measurement in three axes and real observation in
color. The positioning, measurement and data collection functions of the
products can be custom configured to most networks.

    GEOMETRICALLY DESENSITIZED INTERFEROMETER.  Our geometrically desensitized
interferometer product is a patented interferometer which utilizes diffraction
gratings to measure surfaces that have roughness and departures 20 times greater
than those surfaces presently measurable with existing interferometer
technology. It is able to measure rougher, nonspecular surfaces, such as those
used in precision-machined parts applications, without sacrificing such
advantages of other interferometers, such as the ability to utilize high-speed
noncontact interferometry and to produce a full-field wide aperture view.

    DIGITAL VIDEO DISK INTERFEROMETER.  The digital disk interferometer measures
spherical and aspherical lenses for next-generation DVD players.

    3-D INTERFEROMETER.  The 3-D interferometer product family is a new concept
in interferometric metrology. They extend optical interferometric metrology to
the rapid measurement of dimensional relationships. While previous
interferometric metrology only measured one primary surface parameter such as
roughness or flatness, it simultaneously measures the flatness, thickness and
parallelism of industrial components. This patent pending technology combines
our scanning broadband interferometry and displacement interferometry into one
system. We expect industrial assemblies such as fuel injector systems to benefit
from this technology with both increased efficiency and improved production
yields.

AUTOMATION:

<TABLE>
<CAPTION>
PRODUCT              DESCRIPTION            BENEFITS TO CUSTOMER   MARKET                  STATUS
-------              -----------            --------------------   ------                  ------
<S>                  <C>                    <C>                    <C>                     <C>
Fiber Placement      Used to attach fibers  - High throughput      Telecommunications      Beta Test
Station              in the manufacturing   - High yield
                     process                - Reliable

ZARIS (Automated     Used to present        - Safely handles       Semiconductor           Shipping
reticle inspection   reticles to an           fragile reticles
system)              operator for           - High throughput
                     inspection,            - High yield
                     classification,        - Increased
                     cleaning and             cleanliness
                     subsequent sorting

Reticle Shuffler     Used to transfer       - Provides an          Semiconductor           Shipping
                     multiple types of        automated front end
                     reticles                 to many OEM
                                              customers
</TABLE>

                                       38
<PAGE>

<TABLE>
<CAPTION>
PRODUCT              DESCRIPTION            BENEFITS TO CUSTOMER   MARKET                  STATUS
-------              -----------            --------------------   ------                  ------
<S>                  <C>                    <C>                    <C>                     <C>
Auto KMS             Fully automated        - High throughput      Semiconductor           Shipping
                     system used to         - High yield
                     measure critical       - Process control
                     dimensions on
                     reticles

Inspection System    Used for automated     - High throughput      Semiconductor           Shipping
Loader               material handling for  - Quality control      Industrial
                     OEM inspection
                     systems

E-Beam Loading       Used for automatic     - High environmental   Semiconductor           Shipping
System               loading and reticle      control
                     control, in vacuum,    - High throughput
                     to an OEM direct
                     write mask maker
</TABLE>

  AUTOMATION

    Our Automation Systems division develops both products and custom automation
solutions across a broad range of industries.

    FIBER PLACEMENT STATION.  Our fiber placement stations automatically place
optical fibers in a silicon V-groove substrate. These stations eliminate the
dependency on human operators for micro-assembly of fiber arrays and greatly
increase the quality and throughput of the fiber array assembly process by an
order of magnitude. The station can handle glass fibers with less than 60
microns in diameter on a 55 micron pitch on the silicon substrate.

    ZARIS.  Our ZARIS tool is an automated reticle macro and micro inspection
and cleaning system. Reticles are presented for visual inspection either at a
bright light station or a microscope station. The tool's automated reticle
handling eliminates scratched reticles and punctured pellicle due to manual
handling. The ZARIS tool assists in cassette transfer procedures associated with
reticle use and can be configured to interface with most standard input/output
and stepper cassettes.

    RETICLE SHUFFLER.  The Reticle Shuffler is a family of fully automated
systems capable of transferring reticles in and out of various reticle carriers.
All of the handling tasks are performed by a high-precision robot in an ultra
clean mini-environment thereby reducing the risks normally associated with
manual handling. The system is equipped with three input/output stations to
accept manually delivered reticle carriers. The input/output stations can be
configured to accommodate most major reticle carriers, as well as bar code
identification to ensure proper routing.

    AUTO KMS.  This fully automated inspection system incorporates our KMS
microscope with a robotic material handling system. The system accepts an
individual reticle from a carrier, automatically presents it to a bar code
reader for identification, loads it to the microscope's inspection stage,
performs an automated inspection routine, and returns the reticle to the
original input location. A single graphical user interface provides the operator
with input to both the handling and inspection systems.

    INSPECTION SYSTEM LOADER.  This loader provides the automated material
handling interface between the operator and the automated optical mask
inspection equipment. As with our Reticle Shuffler, the loader is equipped with
three input/output stations to accept manually delivered reticle carriers. The
input/output stations can be configured to accommodate most major reticle
carriers, as well as bar code identification to ensure proper routing. The
loader has additional capabilities for orienting reticles and for placement onto
the inspection stage.

                                       39
<PAGE>
    E-BEAM LOADING SYSTEM.  Our E-beam loading system provides the automated
material handling interface between the fabrication shop or mask shop operator
and the mask writing equipment. The loader ensures product safety as well as
cleanliness and thermal stability throughout the loading and unloading process,
and provides production buffer by storing masks within the controlled
environment. Inputs to the loader include standard or custom interfaces. The
loader aligns the mask to a carrier using machine vision, loads the aligned pair
into an airlock under atmospheric pressure, and transfers the pair to and from
the E-beam stage under high vacuum. The system is integrated extensively with
the mask writer and includes the graphical user interface for executing the
loading process.

CUSTOMERS AND MARKETS

    The growing requirements for dimensional control to the subnanometer level
have created an escalating need for our yield enhancement instruments and
systems among both OEMs and end-users of microfabrication technology. We have
been able to meet these demands with on-line yield improvement instruments and
systems as well as with our off-line quality control instruments. Today, our
installed base of high precision metrology systems exceeds 6,500.

    Several of our customers purchase multiple product family types and multiple
technology platforms and employ our solutions at their facilities worldwide. The
following is a sampling of our customers in fiscal 2000:

                        SELECTED CUSTOMERS BY END MARKET

<TABLE>
<CAPTION>
TELECOMMUNICATIONS           SEMICONDUCTOR      INDUSTRIAL
------------------           -------------      ----------
<S>                          <C>                <C>
Agilent                      Applied Materials  Boeing
Axsun                        Canon              Bosch
Cidra                        Cyberoptics        Caterpillar
Coherent                     Electro            Cummins Engine
Corning Rochester Photonics  Scientific         Eastman Kodak
Dicon Fiber Optics           IBM                Elcan
JDS Uniphase                 KLA-Tencor         Hitachi
Lightchip                    Nanya              Lawrence Livermore National
Lucent                       Samsung            Laboratories
Nortel Networks              SVG                Lockheed Martin
Tyco                                            Nikon
Vytran                                          University of Rochester
Zenastra Photonics
</TABLE>

    In fiscal years 1998, 1999 and 2000, sales to our top customer, Canon,
accounted for approximately 18%, 21% and 19%, respectively, of our net sales.
Sales to the Lawrence Livermore National Laboratories accounted for 13%, 6% and
3% of our sales in 1998, 1999 and 2000. No other single customer accounted for
more than 10% of our sales in any of the 1998, 1999 or 2000 fiscal years.

PATENTS AND OTHER INTELLECTUAL PROPERTY

    Our success and ability to compete depend substantially upon our internally
developed technology. We have been developing a portfolio of intellectual
property for 30 years. We rely on a combination of patent, copyright, trademark
and trade secret laws and license agreements to establish and protect our
proprietary rights in our products. We believe, however, that our success
depends upon innovation, technological expertise and distribution strength.
Since our inception, we have been granted 93 United States patents, of which 67
are currently active, and 38 foreign patents. While we cannot guarantee that any
pending patent application will issue, we also have 63 United States patent
applications and 60 foreign patent applications that are pending. All of our
patents and applications were internally developed. In addition, we have
numerous registered and unregistered trademarks.

                                       40
<PAGE>
    While we rely on patent, copyright, trade secret and trademark law to
protect our technology, we also believe that factors such as the technological
and creative skills of our personnel, new product developments, frequent product
enhancements and reliable product maintenance are essential to establishing and
maintaining a technology leadership position.

RESEARCH AND DEVELOPMENT AND ENGINEERING OPERATIONS

    We operate in industries that are subject to rapid technological change and
engineering innovation. We dedicate substantial resources to research and
development. At September 30, 2000, we employed 115 individuals within our
research and development and engineering operations, including 45 individuals
with advanced degrees, of which 15 have earned doctoral degrees. Our strategy is
to form close technical working relationships with customers and OEM suppliers
in our markets to ensure that our products have relevancy when commercialized.
In connection with our research and development operations, we also maintain a
close working relationship with various research groups and academic
institutions in the United States as well as abroad such as University
Erlangen-Nurnberg in Germany, Zetetic Institute in Arizona, University of North
Carolina at Charlotte and Stanford University. We believe that continued
enhancement, development and commercialization of new and existing products and
systems is essential to maintaining and improving our leadership position.

COMPETITION

    The industries in which we participate are intensely competitive and are
characterized by price pressure and technological change. These markets are
further dominated by a few market leaders. The telecommunications components and
modules industry is characterized by lack of supply of telecommunications
components and modules and quality, on-time components and modules.

    We believe that we are one of a limited group of companies that develops and
markets yield enhancement solutions. Our primary yield enhancement competitors
in the semiconductor and telecommunications markets include Agilent's Laser
Interferometer Positioning Systems Division, ADE's Phase Shift Technology,
Leica's Mask Metrology Division, Veeco's Metrology Division, Berliner Glass and
Bond Optics. In the telecommunications market, we compete with: MEMS Optical,
Corning Rochester Photonics, Digital Optics Corporation, LINOS, NSG America, ACT
MicroDevices, O-E Land, AMP, Wave Optics, Nanostructures, Inc., JDS Uniphase,
Nitto Optics, Prisms Unlimited, Adept Technologies and Newport Corporation.

    The principal factors upon which we compete are:

    - performance and flexibility of solutions;

    - value;

    - on-time delivery;

    - responsive customer service and support; and

    - breadth of product line.

    We believe we compete favorably on each of these factors.

MARKETING AND SALES

    In the telecommunications market, we sell our optical components and modules
directly from our optics division to optical network system manufacturers and
suppliers. Generally, these customers have centralized purchasing and
qualifications divisions and do not require that we have a worldwide
organization for sales and distribution.

    In the semiconductor and industrial markets, our sales and marketing
strategy is to establish and/or solidify strategic relationships with leading
OEMs and end-users in targeted market sectors. The selling process for our
products is performed through our worldwide sales organization operating out of
six regional sales offices in California, Illinois, Connecticut, Germany,
Singapore and Japan. Supporting this core sales team are business development,
marketing, service, and engineering specialists

                                       41
<PAGE>
representing our various optics, metrology, and automation factories in
Connecticut, Massachusetts, Colorado, Florida, and Germany. Product promotion is
done through trade shows, printed and e-business advertising, and industry
technical organizations.

    The underlying focus of all our sales and marketing activities is to improve
the performance of our customers' products and process through value-added,
yield-enhancing solutions.

    The following table sets forth the percentage of our total sales by region
(including sales delivered through distributors) during the past three years:

<TABLE>
<CAPTION>
                                                                   YEAR ENDED JUNE 30,
                                                          --------------------------------------
                                                            1998           1999           2000
                                                          --------       --------       --------
<S>                                                       <C>            <C>            <C>
United States......................................         56.5%          55.8%          56.0%

Japan..............................................         22.5%          22.3%          20.2%

Pacific Rim........................................         11.4%           9.5%          13.4%

Other (primarily Europe)...........................          9.5%          12.4%          10.4%
</TABLE>

    Customer service is an essential and a growing part of our business, since
product up-time is critical given the effect on our customers' production
efficiency. As of June 30, 2000, our global sales customer support and service
organization consisted of over one hundred people skilled in sales, marketing,
optical and electro component repair, software, application and system
integration, diagnostics, and problem-solving capabilities.

MANUFACTURING, RAW MATERIALS AND SOURCES OF SUPPLY

    Our principal manufacturing activities are conducted at our facilities in
Middlefield, Connecticut; Longmont, Colorado; Holliston, Massachusetts and
Asslar, Germany. We maintain an advanced optical components manufacturing
facility in Middlefield, specializing in the fabrication, polishing, and coating
of plano, or flat, optics for sales to third parties, as well as the
manufacturing of a wide variety of optics that are used in our metrology
products. Our manufacturing activities for our metrology and system products
consist primarily of assembling and testing components and sub assemblies, some
of which are supplied by us and others are supplied by third-party vendors and
then integrated into our finished products.

    In our optical unit, our wafer fabrication facility at Holliston,
Massachusetts has a full complement of vacuum deposition, photolithography,
ion-milling, reactive ion etching, electroplating, wet chemistry and film
characterization machines. This enables us to fabricate a wide variety of
optical components. These include patterned substrates for microwave devices,
MEMS devices for high-speed switching, and various metal and dielectric
coatings, including those required for optical filters and anti-reflection.
Silicon baseplates, with built-in alignment and attachment features, are also
fabricated within the wafer fabrication facility. This vertically integrated
manufacturing capability reduces the necessity to rely on outside suppliers in a
supply contained market allowing faster development of products and faster
deliveries.

    Our capabilities in precision mechanical processing, spanning from lapping
and polishing to slicing and grinding, allows us to fabricate micro-optic and
opto-mechanical components, i.e. ball lenses, collimator lenses, polished
fibers, silicon baseplates, and platforms at Holliston. In addition, a fully
equipped model shop at the Holliston facility enables our optics division to
rapidly fabricate its own machined parts and tools for quick approval by
customers.

    Certain components and subassemblies incorporated into our systems are
obtained from a single source or a limited group of suppliers. We routinely
monitor single or limited source supply parts, and we endeavor to ensure that
adequate inventory is available to maintain manufacturing schedules should the
supply of any part be interrupted. Although we seek to reduce our dependence on
sole or limited

                                       42
<PAGE>
source suppliers, we have not qualified a second source for various of these
products and the partial or complete loss of certain of these sources could have
a negative impact on our results of operations and damage customer
relationships.

EMPLOYEES

    At September 30, 2000, we employed 567 people. Our employees are not
represented by a labor union or a collective bargaining agreement. We regard our
employee relations as good.

PROPERTIES

    We maintain manufacturing facilities in Middlefield, Connecticut; Holliston,
Massachusetts; Asslar, Germany and Longmont, Colorado. Our corporate
headquarters is on Laurel Brook Road in Middlefield, Connecticut. The
Middlefield facility consists of one 135,500 square-foot building on
approximately 80 acres. In 1998, this facility was expanded by 35,500 square
feet to provide additional optical fabrication capacity and a new office area
for sales, service, R&D and administrative personnel. All other facilities are
leased.

    We recently purchased an 87,000 square-foot facility in Westboro,
Massachusetts to expand production capacity for Zygo TeraOptix. Building
modifications and clean room construction is under way and expected to be fully
completed by Spring 2001. At that time, we will completely relocate Zygo
TeraOptix from Holliston and consolidate all of our micro-optics operations in
Westboro.

<TABLE>
<CAPTION>
                                                  SQUARE FEET
                                            ------------------------
OPERATION/LOCATION                          MANUFACTURING    TOTAL     OWNED/LEASED
------------------                          -------------   --------   ------------
<S>                                         <C>             <C>        <C>
Corporate Headquarters:                         80,000      135,500       Owned
  Eastern Regional Sales Office,
  Instrument Manufacturing,
  and Optics Manufacturing
Middlefield, Connecticut

Automation Systems Manufacturing                15,000       32,000      Leased
Longmont, Colorado

Zygo TeraOptix
Holliston, Massachusetts*                       10,000       16,000      Leased
Westboro, Massachusetts*+                       60,000       87,000       Owned

Zygo--Laser Technology (R&D)                         0        1,452      Leased
Watsonville, California

R&D Center                                           0       12,240      Leased
Newbury Park, California

Zygo Delray Beach                                    0       15,000      Leased
Delray Beach, Florida

Western Regional Sales Office                        0        7,400      Leased
Sunnyvale, California

Central Regional Sales Office                        0        3,283      Leased
Northbrook, Illinois

Zygo Engineering Office                              0        6,290      Leased
Simi Valley, California

European Regional Sales Office,                  1,500        4,000      Leased
  Confocal Manufacturing
Asslar, Germany
</TABLE>

                                       43
<PAGE>

<TABLE>
<CAPTION>
                                                  SQUARE FEET
                                            ------------------------
OPERATION/LOCATION                          MANUFACTURING    TOTAL     OWNED/LEASED
------------------                          -------------   --------   ------------
<S>                                         <C>             <C>        <C>
Zygo--Pacific Rim Sales Office                       0        2,350      Leased
Singapore

ZygoLOT                                              0        1,296      Leased
Damstad, Germany

Zygo KK                                              0        1,775      Leased
Japan
                                               -------      -------

Total                                          166,500      325,586
                                               =======      =======
</TABLE>

------------------------

*  Expected to be operational by Spring 2001; replaces Holliston facility

+  Possible space expansion up to 140,000 square feet

                                       44
<PAGE>
                                   MANAGEMENT

EXECUTIVE OFFICERS AND DIRECTORS

    The following table lists our current executive officers and directors:

<TABLE>
<CAPTION>
NAME                                  AGE                           POSITION
----                                  ---                           --------
<S>                                 <C>        <C>
J. Bruce Robinson.................     58      Chairman, Chief Executive Officer and President

Michael J. Auth...................     46      Vice President and Chief Financial Officer

William H. Bacon..................     51      Vice President, Metrology Manufacturing

John Berg.........................     38      Director and President and Chief Technical Officer
                                               of Zygo TeraOptix

Brian J. Monti....................     44      Vice President, Worldwide Sales and Marketing

Peter B. Mumola...................     56      Vice President, Optics Division

David J. Person...................     53      Vice President, Human Resources

Robert A. Smythe..................     49      Vice President, Engineering

Patrick Tan.......................     40      Director and Vice President, Business Operations of
                                               Zygo TeraOptix

Carl A. Zanoni....................     59      Director and Vice President, Technology

Paul F. Forman....................     66      Director, Chairman Emeritus

Clark Harris......................     63      Director

Seymour Liebman...................     51      Director

Robert G. McKelvey................     63      Director

Robert B. Taylor..................     53      Director
</TABLE>

    J. BRUCE ROBINSON serves as our Chairman, Chief Executive Officer and
President. Prior to joining us in February 1999, Mr. Robinson spent 25 years
with the Foxboro Company as Vice President, Business Development, from
December 1998 to February 1999, President, Worldwide Operations, from
November 1996 to December 1998 and President of Europe from 1990 to 1996.

    MICHAEL J. AUTH has served as the Chief Financial Officer, Vice President
Finance and Treasurer since March 2000. Previously Mr. Auth served as Vice
President, Finance and Information Systems for M/A-COM, the wireless division of
Tyco International from 1996 to 2000 and in various senior financial positions
with Comsat Corporation from 1987 to 1996.

                                       45
<PAGE>
    WILLIAM H. BACON has served as our Vice President, Manufacturing since
April 2000. Previously, Mr. Bacon served as our Vice President, Corporate
Quality from January 1996 to April 2000. From November 1993 to January 1996,
Mr. Bacon was our Director of Total Quality and also served as our Manager of
Instrument Manufacturing Engineering from June 1987 to November 1993.

    JOHN BERG serves on our Board of Directors and has served as the President
and Chief Technical Officer of Zygo TeraOptix since May 2000. Previously
Mr. Berg served as the President and Chief Technical Officer of Firefly
Technologies from 1997 to 2000 and was Vice-President of Engineering at Digital
Papyrus Corporation. Prior to that, John held senior management and technical
positions at Digital Equipment Corporation and Quantum Corporation from 1988 to
1995.

    BRIAN J. MONTI has served as our Vice President, Worldwide Sales and Service
since July 1999. Previously, Mr. Monti served as Vice President, Sales, Service
and Marketing for Radiometric Corporation and Vice President, Sales, Services
and Marketing for Honeywell Measurex DMC.

    PETER B. MUMOLA has served as our Vice President of Optics Division since
February 2000. From June 1999 to February 2000, he served as our General
Manager, Optics Business. From January 1996 until June 1999, Mr. Mumola was
President of IPEC-Precision Inc., a supplier of specialty silicon wafer
manufacturing and metrology equipment. Previously, Mr. Mumola served as the
Business Director for Diversification of Hughes Electronics, Danbury Optical
Systems.

    DAVID J. PERSON has served as our Vice President, Human Resources since
September 1998. Previously Mr. Person served in a number of senior human
resource management positions with Digital Equipment Corporation from 1972 to
September 1998.

    ROBERT A. SMYTHE has served as our Vice President, Engineering since
June 1998. From January 1996 to June 1998, he served as our Vice President,
Sales and Marketing. From June 1993 to January 1996, Mr. Smythe was our Director
of Sales and Marketing and from April 1992 to June 1993, he served as our
Manager, Industry Marketing.

    PATRICK TAN serves on our Board of Directors and has served as the Vice
President of Business Operations of Zygo TeraOptix since May 2000. Previously
Mr. Tan served as the Vice President of Business Operations of Firefly
Technologies from 1997 to 2000 and has held senior management and engineering
positions at Digital Equipment Corporation and Quantum Corporation from 1985 to
1997.

    CARL A. ZANONI has served as our Vice President, Technology since
June 1998. Previously, he served as our Vice President, Research, Development
and Engineering from April 1992 to June 1998. Dr. Zanoni is one of our
co-founders and has served as an executive officer since our inception in 1970.
He also serves on our Board of Directors.

    PAUL F. FORMAN is one of our co-founders and serves on our Board of
Directors and has served as Chairman Emeritus since November 1998. He also
served as our Chairman of the Board from June 1970 to November 1998 and as our
Chief Executive Officer from June 1970 to November 1993.

    R. CLARK HARRIS serves on our Board of Directors. Mr. Harris has been a
partner of North East Venturers since June 1998. From May 1995 to May 1998,
Mr. Harris served as President of Uniphase Telecommunication Products.
Mr. Harris is currently a director of New Focus, Inc.

    SEYMOUR LIEBMAN serves on our Board of Directors. He has worked as Executive
Vice President and General Counsel of Canon U.S.A., Inc. since February 1996 and
Senior Vice President Finance and General Counsel of Canon U.S.A., Inc. from
January 1992 until January 1996.

    ROBERT G. MCKELVEY serves on our Board of Directors. He has been the
Chairman and President of George McKelvey Co., Inc., an investment advisor and
securities broker-dealer, since 1976.

    ROBERT B. TAYLOR serves on our Board of Directors. He has served as Vice
President and Treasurer of Wesleyan University for more than the last five
years.

                                       46
<PAGE>
                       TRANSACTIONS WITH RELATED PARTIES

    Seymour Liebman who serves on our Board of Directors is the Executive Vice
President and General Counsel of Canon U.S.A., Inc., an affiliate of
Canon Inc., or Canon. Canon is one of our principal stockholders. Canon Sales
Co., Inc., a subsidiary of Canon, acts as exclusive distributor of some of our
products in Japan. Sales to Canon Sales Co., Inc. aggregated approximately
$16.5 million or 19% of our net sales, for fiscal 2000. Selling prices were
based, generally, on customary terms given to domestic distributors. In
addition, we have entered into agreements providing for confidential exchange of
proprietary technology with Canon.

                              SELLING STOCKHOLDERS

    The following table presents information regarding the selling stockholders'
beneficial ownership of our common stock as of November 1, 2000.

    The beneficial ownership is calculated based on 14,325,331 shares of our
common stock outstanding as of November 1, 2000 and           shares of common
stock after completion of this offering. Beneficial ownership is determined in
accordance with the rules of the Securities and Exchange Commission. In
computing the number of shares beneficially owned by a person and the percentage
ownership of that person, shares of common stock subject to options held by that
person that are currently exercisable or exercisable within 60 days after
November 1, 2000 are deemed outstanding. Such shares, however, are not deemed
outstanding for the purpose of computing the percentage ownership of each other
person. To our knowledge, except as indicated in the footnotes to this table and
pursuant to applicable community property laws, the persons named in the table
have sole voting and investment power with respect to the shares set forth
opposite such person's name. The address of each of the directors and executive
officers is c/o Zygo Corporation, Laurel Brook Road, Middlefield, Connecticut
06455. Each individual below has agreed not to sell any of our common stock
during the period ended   days after the effective date of this offering without
the prior written consent of Bear, Stearns & Co. Inc., subject to specified
exceptions, and except as set forth below.

<TABLE>
<CAPTION>
                                          NUMBER OF SHARES
                                          OF COMMON STOCK                          NUMBER OF SHARES
                                         BENEFICIALLY OWNED   NUMBER OF SHARES      OF COMMON STOCK
                                              PRIOR TO         OF COMMON STOCK    BENEFICIALLY OWNED
SELLING STOCKHOLDER                        THIS OFFERING      REGISTERED HEREIN   AFTER THIS OFFERING
-------------------                      ------------------   -----------------   -------------------
<S>                                      <C>                  <C>                 <C>
</TABLE>

                                       47
<PAGE>
                                  UNDERWRITING

    Subject to the terms and conditions of an Underwriting Agreement, dated
            , 2001, the underwriters named below, acting through their
representatives, Bear, Stearns & Co. Inc., Lehman Brothers Inc., C.E. Unterberg,
Towbin and ING Barings LLC have severally agreed with us and the selling
stockholders, subject to the terms and conditions of the Underwriting Agreement,
to purchase from us and the selling stockholders the number of shares of common
stock set forth below opposite their respective names.

<TABLE>
<CAPTION>
UNDERWRITER                                                   NUMBER OF SHARES
-----------                                                   ----------------
<S>                                                           <C>
Bear, Stearns & Co. Inc.....................................
Lehman Brothers Inc.........................................
C.E. Unterberg, Towbin......................................
ING Barings LLC.............................................
  Total.....................................................
</TABLE>

    The Underwriting Agreement provides that the obligations of the several
underwriters to purchase and accept delivery of the shares of common stock
offered by this prospectus are subject to approval by their counsel of legal
matters and to other conditions set forth in the Underwriting Agreement. The
underwriters are obligated to purchase and accept delivery of all the shares of
common stock offered hereby, other than those shares covered by the
over-allotment option described below, if any, are purchased.

    The representatives have advised us that the underwriters propose to offer
the shares of common stock to the public at the public offering price set forth
on the cover page of this prospectus and to certain dealers at that price less a
concession of not in excess of $           per share, of which $           may
be reallowed to other dealers. After this offering, the public offering price,
concession and reallowance to dealers may be reduced by the representatives. No
such reduction shall change the amount of proceeds to be received by us as set
forth on the cover page of this prospectus. The common stock is offered by the
underwriters as stated herein, subject to receipt and acceptance by them and
subject to their right to reject any order in whole or in part. The underwriters
do not intend to confirm sales to any accounts over which they exercise
discretionary authority.

    We have granted to the underwriters an option, exercisable within 30 days
after the date of this prospectus, to purchase from time to time up to an
aggregate of       shares of common stock to cover over-allotments, if any, at
the public offering price less underwriting discounts and commissions. If the
underwriters exercise their over-allotment option to purchase any of the
additional       shares of common stock, each underwriter, subject to certain
conditions, will become obligated to purchase its pro-rata portion of these
additional shares based on the underwriter's percentage underwriting commitment
in the offering as indicated in the preceding table. If purchased, these
additional shares will be sold by the underwriters on the same terms as those on
which the shares offered hereby are being sold. We will be obligated, pursuant
to the over-allotment option, to sell shares to the underwriters to the extent
the over-allotment option is exercised. The underwriters may exercise the
over-allotment option only to cover over-allotments made in connection with the
sale of the shares of common stock offered in this offering.

                                       48
<PAGE>
    The following table summarizes the compensation to be paid to the
underwriters by us and the selling stockholders. Such amounts are shown assuming
both no exercise and full exercise of the underwriters' over-allotment option to
purchase additional shares.

<TABLE>
<CAPTION>
                                                                            TOTAL
                                                                   -----------------------
                                                                     WITHOUT       WITH
                                                                      OVER-        OVER-
                                                       PER SHARE    ALLOTMENT    ALLOTMENT
                                                       ---------   -----------   ---------
<S>                                                    <C>         <C>           <C>
Underwriting discounts and commissions payable by
  us.................................................   $            $            $
Underwriting discounts and commissions payable by the
  selling stockholders...............................
</TABLE>

    We estimate expenses payable by us in connection with this offering, other
than the underwriting discounts and commissions referred to above, will be
approximately $            .

    We and the selling stockholders have agreed to indemnify the underwriters
against certain liabilities, including liabilities under the Securities Act,
liabilities arising from breaches of representations and warranties contained in
the Underwriting Agreement, or to contribute to payments that the underwriters
may be required to make in respect of those liabilities.

    Each of our executive officers and directors, including without limitation,
the selling stockholders, have agreed, subject to specified exceptions, not to:

    - offer to sell, contract to sell, or otherwise sell, dispose of, loan,
      pledge or grant any rights with respect to any shares of common stock or
      any options or warrants to purchase any shares of common stock, or any
      securities convertible into or exchangeable for shares of common stock
      owned as of the date of this prospectus or thereafter acquired directly by
      those holders or with respect to which they have the power of disposition;
      or

    - enter into any swap or other arrangement that transfers all or a portion
      of the economic consequences associated with the ownership of any common
      stock (regardless of whether any of these transactions are to be settled
      by the delivery of common stock, or such other securities, in cash or
      otherwise) for a period of 180 days after the date of this prospectus
      without the prior written consent of Bear, Stearns & Co. Inc. This
      restriction terminates after the close of trading of the common stock on
      and including the 180th day after the registration statement relating to
      the offering has been declared effective by the staff of the Securities
      and Exchange Commission. However, Bear, Stearns & Co. Inc. may, in its
      sole discretion and at any time or from time to time before the
      termination of the 180-day period, without notice, release all or any
      portion of the securities subject to lock-up agreements. There are no
      existing agreements between the representatives and any of our
      shareholders who have executed a lock-up agreement, other than the selling
      stockholders, providing consent to the sale of shares prior to the
      expiration of the lock-up period.

    In addition, during this period, certain affiliates of the selling
stockholders have agreed not to make any demand for, or exercise any right with
respect to, the registration of any shares of common stock or any securities
convertible into or exercisable or exchangeable for common stock without the
prior written consent of Bear, Stearns & Co. Inc.

    In addition, we have agreed that, subject to certain exceptions, during the
lock-up period we will not, without the prior written consent of Bear,
Stearns & Co. Inc., consent to the disposition of any shares held by
shareholders subject to lock-up agreements prior to the expiration of the
lock-up period, or issue, sell, contract to sell, or otherwise dispose of, any
shares of common stock, any options or warrants to purchase any shares of common
stock or any securities convertible into, exercisable for or exchangeable for
shares of common stock other than our sale of shares in this offering, the
issuance of

                                       49
<PAGE>
our common stock upon the exercise of outstanding options or warrants, and the
issuance of options under existing stock option and incentive plans provided
that those options do not vest prior to the expiration of the lock-up period.

    Other than in the United States, no action has been taken by us, the selling
stockholders or the Underwriters that would permit a public offering of the
shares of common stock offered by this prospectus in any jurisdiction where
action for that purpose is required. The shares of common stock offered by this
prospectus may not be offered or sold, directly or indirectly, nor may this
prospectus or any other offering material or advertisements in connection with
the offer and sale of any such shares of common stock be distributed or
published in any jurisdiction, except under circumstances that will result in
compliance with the applicable rules and regulations of that jurisdiction.
Persons into whose possession this prospectus comes are advised to inform
themselves about and to observe any restrictions relating to the offering and
the distribution of this prospectus. This prospectus does not constitute an
offer to sell or a solicitation of an offer to buy any shares of common stock
offered by this prospectus in any jurisdiction in which such an offer or a
solicitation is unlawful.

OUR COMMON STOCK IS TRADED ON THE NASDAQ NATIONAL MARKET UNDER THE SYMBOL
  "ZIGO."

    A prospectus in electronic format may be made available on the Internet
sites or through other online services maintained by one or more of the
underwriters of this offering, or by their affiliates. In those cases,
prospective investors may view offering terms online and, depending upon the
particular underwriter, prospective investors may be allowed to place orders
online. The underwriters may agree with us to allocate a specific number of
shares for sale to online brokerage account holders. Any such allocation for
online distributions will be made by the representatives on the same basis as
other allocations. Other than the prospectus in electronic format, the
information on any underwriter's web site and any information contained in any
other web site maintained by an underwriter is not part of the prospectus or the
registration statement of which this prospectus forms a part, has not been
approved and/or endorsed by us or any underwriter in its capacity as underwriter
and should not be relied upon by investors.

    The representatives have advised us that, pursuant to Regulation M under the
Securities Exchange Act, some participants in the offering may engage in
transactions, including stabilizing bids, syndicate covering transactions or the
imposition of penalty bids, that may have the effect of stabilizing or
maintaining the market price of the shares of common stock at a level above that
which might otherwise prevail in the open market. A "stabilizing bid" is a bid
for or the purchase of shares of common stock on behalf of the underwriters for
the purpose of fixing or maintaining the price of the common stock. A "syndicate
covering transaction" is the bid for or purchase of common stock on behalf of
the underwriters to reduce a short position incurred by the underwriters in
connection with the offering. A "penalty bid" is an arrangement permitting the
representatives to reclaim the selling concession otherwise accruing to an
underwriter or syndicate member in connection with this offering if the common
stock originally sold by such underwriter or syndicate member is purchased by
the representatives in a syndicate covering transaction and has therefore not
been effectively placed by such underwriter or syndicate member. The
representatives have advised us that such transactions may be effected on the
Nasdaq National Market or otherwise and, if commenced, may be discontinued at
any time.

    In connection with this offering and before the commencement of offers or
sales of the common stock, certain underwriters who are qualified market makers
on the Nasdaq National Market may engage in passive market making transactions
in the common stock on the Nasdaq National Market in accordance with Rule 103 of
Regulation M under the Securities Exchange Act, during the business day prior to
the pricing of the offering. Passive market makers must comply with applicable
volume and price limitations and must be identified as such. In general, a
passive market maker must display its bid

                                       50
<PAGE>
at a price not in excess of the highest independent bid for such security; if
all independent bids are lowered below the passive market maker's bid, however,
such bid must then be lowered when certain purchase limits are exceeded.

    Bear, Stearns & Co. Inc. and other representatives from time to time perform
investment banking and other financial services for us and our affiliates for
which they have received advisory or transaction fees, as applicable, plus
out-of-pocket expenses, of the nature and in amounts customary in the industry
for these financial services.

                                 LEGAL MATTERS

    The validity of the common stock offered by this prospectus will be passed
upon for us by Fulbright & Jaworski L.L.P., New York, New York. Paul Jacobs, a
partner in Fulbright & Jaworski L.L.P., is our Secretary and, as of
December 15, 2000, beneficially owned 4,000 shares of our common stock. Certain
legal matters will be passed upon for the underwriters by Gibson, Dunn &
Crutcher LLP, New York, New York.

                                    EXPERTS

    The consolidated financial statements as of June 30, 1998, 1999 and 2000 and
for each of the three years in the period ended June 30, 2000 included in this
prospectus have been so included in reliance on the report of KPMG LLP,
independent certified public accountants, on the authority of said firm as
experts in auditing and accounting.

                             AVAILABLE INFORMATION

    We are subject to the informational requirements of the Exchange Act, which
means we are required to file annual, quarterly and special reports, proxy
statements and other information with the Securities and Exchange Commission.
These reports, proxy statements and other information filed can be inspected and
copied at the Securities and Exchange Commission's Public Reference Room, 450
Fifth Street, N.W., Washington, D.C. 20549, and at the following regional
offices of the Securities and Exchange Commission: Seven World Trade Center,
13th Floor, New York, New York 10048 and 500 West Madison Street, Suite 1400,
Chicago, Illinois 60661-2511. Copies of such material can be obtained from the
Public Reference Section of the Securities and Exchange Commission, 450 Fifth
Street, N.W., Washington, D.C. 20549, at prescribed rates. You may call the
Securities and Exchange Commission Public Reference Room at 1-800-SEC-0330 for
further information on its operations. The Securities and Exchange Commission
maintains a Web site (http://www.sec.gov) containing reports, proxy and
information statements and other information of registrants, including ours,
that file electronically with the Securities and Exchange Commission. In
addition, our common stock is listed on the Nasdaq National Market and similar
information concerning us can be inspected and copied at the offices of the
National Association of Securities Dealers, Inc., 9513 Key West Avenue,
Rockville, Maryland 20850.

    We have filed with the Securities and Exchange Commission a registration
statement on Form S-3 (of which this prospectus is a part) under the Securities
Act, with respect to the shares of our common stock being offered by this
prospectus. This prospectus does not contain all of the information set forth in
this registration statement, some portions of which have been incorporated by
reference as permitted by the rules and regulations of the Securities and
Exchange Commission. Statements contained in this prospectus as to the contents
of any contract or other documents are not necessarily complete, and in each
instance reference is made to the copy of such contract or other document filed
as an exhibit to the registration statement. Each of these statements are
qualified in all respects by this reference and the exhibits and schedules
thereto. For further information regarding us and the shares of our common stock
being offered by this prospectus, reference is hereby made to the registration
statement and such exhibits and schedules which may be obtained from the
Securities and Exchange Commission at its

                                       51
<PAGE>
principal office in Washington, D.C. upon payment of the fees prescribed by the
Securities and Exchange Commission.

                INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE

    Our Annual Report on Form 10-K405 for the year ended June 30, 2000 and the
Report on Form 10-Q for the Quarterly Period Ended September 30, 2000, filed
with the SEC, are incorporated by reference in this prospectus. Any statement
contained in a document we incorporate by reference is deemed modified or
superceded to the extent that a later filed document, including this prospectus,
shall modify or supercede that statement. Any statement so modified or
superceded shall not be deemed, except as so modified or superceded, to
constitute part of this prospectus.

    We will furnish, without charge, to each person to whom a copy of this
prospectus is delivered, upon the written or oral request of such person, a copy
of the document referred to above which has been incorporated by reference in
this prospectus, other than exhibits to such documents (unless such exhibits are
specifically incorporated by reference in this prospectus). Requests for such
document should be directed to Michael J. Auth, Zygo Corporation, Laurel Brook
Road, Middlefield, Connecticut 06455, telephone (860) 347-8506.

                                       52
<PAGE>
                                    PART II
                     INFORMATION NOT REQUIRED IN PROSPECTUS

ITEM 14.  OTHER EXPENSES OF ISSUANCE AND DISTRIBUTION.

    The expenses payable by the Registrant in connection with the issuance and
distribution of the securities being registered (other than underwriting
accounts and commissions) are as follows:

<TABLE>
<S>                                                           <C>
SEC Registration Fee........................................  $    28,916
National Association of Securities Dealers, Inc. Filing
  Fee.......................................................       12,066
Accountants' Fees and Expenses*.............................      120,000
Legal Fees and Expenses*....................................      350,000
Printing Fees*..............................................
Miscellaneous*..............................................
                                                              -----------
  Total.....................................................  $
                                                              ===========
</TABLE>

------------------------

*   Estimated

ITEM 15.  INDEMNIFICATION OF DIRECTORS AND OFFICERS.

    Section 145 of the General Corporation Law of Delaware permits
indemnification of directors, officers and employees of a corporation under
certain conditions and subject to certain limitations. Article VI of the By-Laws
of the Registrant contains provision for the indemnification of directors,
officers and employees within the limitations permitted by Section 145. In
addition, the Company has entered into Indemnity Agreements with certain
directors and officers, which provide the maximum indemnification allowed by
Section 145. The officers and directors are insured against losses arising from
any claim against them as such for wrongful acts or omissions, subject to
certain limitations.

ITEM 16.  EXHIBITS AND FINANCIAL STATEMENT SCHEDULES.

    (A)  EXHIBITS

<TABLE>
<CAPTION>
NO.                                             DESCRIPTION
---                                             -----------
<C>                     <S>
         1.1            Form of Underwriting Agreement*

         5.1            Opinion of Fulbright & Jaworski L.L.P.*

        23.1            Consent of KPMG LLP

        23.2            Consent of Fulbright & Jaworski L.L.P. (included in Exhibit
                        5.1)*

        24.1            Power of Attorney (included on signature page to the
                        Registration Statement)
</TABLE>

*   To be filed by amendment.

    (B)  FINANCIAL STATEMENT SCHEDULES
       Not Applicable.

ITEM 17.  UNDERTAKINGS.

    Insofar as indemnification by the Company for liabilities arising under the
Securities Act may be permitted to directors, officers and controlling persons
of the Company pursuant to the provisions referenced in Item 15 of this
Registration Statement or otherwise, the Company has been advised that in the
opinion of the Securities and Exchange Commission such indemnification is
against public policy

                                      II-1
<PAGE>
as expressed in the Securities Act, and is, therefore, unenforceable. In the
event that a claim for indemnification against such liabilities (other than the
payment by the Company of expenses incurred or paid by a director, officer, or
controlling person of the Company in the successful defense of any action, suit
or proceeding) is asserted by such director, officer or controlling person in
connection with the securities being registered hereunder, the Company will,
unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether
such indemnification by it is against public policy as expressed in the
Securities Act and will be governed by the final adjudication of such issue.

    The undersigned Company hereby undertakes that:

        (1)  For purposes of determining any liability under the Securities Act,
    the information omitted from the form of prospectus filed as part of this
    Registration Statement in reliance upon Rule 430A and contained in a form of
    prospectus filed by the Company pursuant to Rule 424(b)(1) or (4) or 497(h)
    under the Securities Act shall be deemed to be part of this Registration
    Statement as of the time it was declared effective.

        (2)  For the purpose of determining any liability under the Securities
    Act, each post-effective amendment that contains a form of prospectus shall
    be deemed to be a new registration statement relating to the securities
    offered therein, and the offering of such securities at that time shall be
    deemed to be the initial BONA FIDE offering thereof.

    Insofar as indemnification for liabilities arising under the Securities Act
may be permitted to directors, officers and controlling persons of the
Registrant pursuant to the foregoing provisions, or otherwise, the Registrant
has been advised that in the opinion of the Commission such indemnification is
against public policy as expressed in the Securities Act and is, therefore
unenforceable. In the event that a claim for indemnification against such
liabilities (other than the payment by the Registrant of expenses incurred or
paid by a director, officer or controlling person of the Registrant in the
successful defense of any action, suit or proceeding) is asserted by such
director, officer or controlling person in connection with the securities being
registered, the Registrant will, unless in the opinion of its counsel the matter
has been settled by controlling precedent, submit to a court of appropriate
jurisdiction the question whether such indemnification by it is against public
policy as expressed in the Securities Act and will be governed by the final
adjudication of such issue.

                                      II-2
<PAGE>
                                   SIGNATURES

    Pursuant to the requirements of the Securities Act of 1933, the registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-3 and has duly caused this registration
statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Middlefield, State of Connecticut, on January 5,
2001.

<TABLE>
<S>                                                    <C>  <C>
                                                       ZYGO CORPORATION

                                                       By:            /s/ J. BRUCE ROBINSON
                                                            -----------------------------------------
                                                                        J. Bruce Robinson,
                                                                   CHAIRMAN, CEO AND PRESIDENT
</TABLE>

                               POWER OF ATTORNEY

    KNOW ALL MEN BY THESE PRESENTS, that each individual whose signature appears
below constitutes and appoints J. Bruce Robinson and Michael J. Auth, or either
of them, his true and lawful attorney-in-fact and agent with full power of
substitution and resubstitution, for him and in his name, place and stead, in
any and all capacities, to sign any and all amendments (including post-effective
amendments) to this Registration Statement and to file the same with all
exhibits thereto and all documents in connection therewith, with the Securities
and Exchange Commission, granting said attorney-in-fact and agent and each of
them, full power and authority to do and perform each and every act and thing
requisite and necessary to be done in and about the premises, as fully to all
intents and purposes as he or she might or could do in person, hereby ratifying
and confirming all that said attorney-in-fact and agent or any of them, or their
or his substitute or substitutes, may lawfully do or cause to be done by virtue
hereof. Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed below by the following persons in the
capacities and on the dates indicated:

<TABLE>
<CAPTION>
                        NAME                                      TITLE                   DATE
                        ----                                      -----                   ----
<C>                                                    <S>                          <C>
                                                       Chairman, Chief Executive
                /s/ J. BRUCE ROBINSON                    Officer and President
     -------------------------------------------         (Principal Executive        January 5, 2001
                  J. Bruce Robinson                      Officer)

                                                       Vice President, Finance,
                 /s/ MICHAEL J. AUTH                     Treasurer and Chief
     -------------------------------------------         Financial Officer           January 5, 2001
                   Michael J. Auth                       (Principal Financial and
                                                         Accounting Officer)

                    /s/ JOHN BERG
     -------------------------------------------       Director                      January 5, 2001
                      John Berg

                 /s/ PAUL F. FORMAN
     -------------------------------------------       Director                      January 5, 2001
                   Paul F. Forman
</TABLE>

                                      II-3
<PAGE>

<TABLE>
<CAPTION>
                        NAME                                      TITLE                   DATE
                        ----                                      -----                   ----
<C>                                                    <S>                          <C>
                 /s/ R. CLARK HARRIS
     -------------------------------------------       Director                      January 5, 2001
                   R. Clark Harris

               /s/ SEYMOUR E. LIEBMAN
     -------------------------------------------       Director                      January 5, 2001
                 Seymour E. Liebman

               /s/ ROBERT G. MCKELVEY
     -------------------------------------------       Director                      January 5, 2001
                 Robert G. McKelvey

                   /s/ PATRICK TAN
     -------------------------------------------       Director                      January 5, 2001
                     Patrick Tan

                /s/ ROBERT B. TAYLOR
     -------------------------------------------       Director                      January 5, 2001
                  Robert B. Taylor

                 /s/ CARL A. ZANONI
     -------------------------------------------       Director                      January 5, 2001
                   Carl A. Zanoni
</TABLE>

                                      II-4


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