PERKIN ELMER CORP
SC 13D/A, 1996-07-03
LABORATORY ANALYTICAL INSTRUMENTS
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                               UNITED STATES
                    SECURITIES AND EXCHANGE COMMISSION
                          Washington, D.C.  20549


                               SCHEDULE 13D


                 Under the Securities Exchange Act of 1934
                        (Amendment No.      1    )*

                            ETEC Systems, Inc.
                             (Name of Issuer)

                         Common Shares, par value $0.01 per share
                      (Title of Class of Securities)

                                26922C 10 3
                              (CUSIP Number)

 William B. Sawch, The Perkin-Elmer Corporation, 761 Main Avenue, Norwalk,
                        CT  06859 ph. (203)761-2900
(Name, Address and Telephone Number of Person Authorized to Receive Notices
                            and Communications)

                              June 28, 1996
          (Date of Event which Requires Filing of this Statement)


If  the  filing person has previously filed a statement on Schedule 13G  to
report  the acquisition which is the subject of this Schedule 13D,  and  is
filing  this  schedule  because  of Rule  13d-1(b)(3)  or  (4),  check  the
following box [ ].

Check the following box if a fee is being paid with the statement [  ].  (A
fee  is  not  required only if the reporting person:  (1)  has  a  previous
statement on file reporting beneficial ownership of more than five  percent
of  the  class  of  securities described in Item 1; and (2)  has  filed  no
amendment subsequent thereto reporting beneficial ownership of five percent
or less of such class.) (See Rule 13d-7.)

Note: Six copies of this statement, including all exhibits, should be filed
with Commission.  See Rule 13d-1(a) for other parties to whom copies are to
be sent.

*The  remainder  of  this cover page shall be filled out  for  a  reporting
person's  initial filing on this form with respect to the subject class  of
securities,  and for any subsequent amendment containing information  which
would alter disclosures provided in a prior cover page.

The  information required on the remainder of this cover page shall not  be
deemed  to  be  "filed"  for the purpose of Section 18  of  the  Securities
Exchange  Act  of 1934 ("Act") or otherwise subject to the  liabilities  of
that section of the Act but shall be subject to all other provisions of the
Act (however, see the Notes).


                     Page 1 of 10
<PAGE>

                        SCHEDULE 13D

CUSIP No.   26922C 10 3        Page 2 of 10 Pages


1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

     The Perkin-Elmer Corporation
     06-0490270

2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*   (a)

                                                         (b)

3    SEC USE ONLY

4    SOURCE OF FUNDS*

5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(D) OR 2(E)



6    CITIZENSHIP OR PLACE OF ORGANIZATION

     New York

     Number of Shares Beneficially Owned By Each Reporting Person With

7    SOLE VOTING POWER
     1,494,534 Common Shares

8    SHARED VOTING POWER
     0 Common Shares

9    SOLE DISPOSITIVE POWER
     1,494,534 Common Shares

10   SHARED DISPOSITIVE POWER
     0 Common Shares

11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     1,494,534

12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN
     SHARES*


13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     8.0%

14   TYPE OF REPORTING PERSON
     CO

            *SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDES BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
   (INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE
                         ATTESTATION

                     Page 2 of 10

<PAGE>

Item 1.   Security and Issuer.

     This Statement relates to Common Shares par value $0.01
per  share  (the "Common Shares") of ETEC Systems,  Inc.,  a
Nevada corporation ("ETEC"), the principal executive offices
of  which  are  located at 26460 Corporate Avenue,  Hayward,
California  94545.

Item 2.   Identity and Background.

      The  person  filing this Statement is The Perkin-Elmer
Corporation,   a   New  York  corporation  ("Perkin-Elmer").
Perkin-Elmer is a manufacturer of biochemical and analytical
instruments and systems.  The principal business and offices
of  Perkin-Elmer are located at 761 Main Avenue, Norwalk, CT
06859.   The  name,  residence or business address,  present
principal occupation or employment and citizenship  of  each
executive officer or director of Perkin-Elmer are set  forth
in Schedule I hereto and incorporated herein by reference.

      During the past five years, neither Perkin-Elmer  nor,
to  the knowledge of Perkin-Elmer, any of the persons listed
on  Schedule  I,  (i)  has  been  convicted  in  a  criminal
proceeding   (excluding   traffic  violations   or   similar
misdemeanors) or (ii) has been a party to a civil proceeding
of   a   judicial  or  administrative  body   of   competent
jurisdiction and as a result of such proceeding  was  or  is
subject  to  a  judgment, decree or  final  order  enjoining
future violations of, or prohibiting or mandating activities
subject to, federal or state securities laws or finding  any
violation with respect to such laws.

Item 3.   Source and Amount of Funds or Other Consideration.

      As of October 27, 1995, Perkin-Elmer was the holder of
115,390   shares  of  Series  B  Cumulative,   Participating
Convertible   Preferred  Shares  of  ETEC  (the   "Preferred
Shares").   Pursuant  to  the  Sixth  Amended  and  Restated
Articles of Incorporation of ETEC, the Preferred Shares,  at
the  option  of ETEC, became convertible into Common  Shares
upon  the consummation of ETEC's sale of Common Shares in  a
public  offering.   On October 27, 1995, ETEC  completed  an
initial  public offering of its Common Shares.  On  November
8,  1995,  Perkin-Elmer received a written notice from  ETEC
dated November 3, 1995, stating that ETEC had exercised  its
option  to  convert the Preferred Shares  to  Common  Shares
effective October 27, 1995, the consummation date of  ETEC's
initial public offering of Common Shares.

Item 4.   Purpose of Transaction.

      The Common Shares were obtained upon conversion of the
Preferred Shares, and the Common Shares are being  held  for
investment.   Perkin-Elmer reserves the right  in  its  sole
discretion  to  increase or decrease the  number  of  Common
Shares it holds.

                     Page 3 of 10

<PAGE>

      Neither Perkin-Elmer nor, to the knowledge of  Perkin-
Elmer,  any of the persons listed on Schedule I hereto,  has
any  present  plans or intentions which would result  in  or
relate to any of the transactions described in subparagraphs
(a)  through  (j) of Item 4 of Schedule 13D.   Perkin-Elmer,
however,  expects  to  evaluate on an ongoing  basis  ETEC's
financial condition, business, operations and prospects  and
Perkin-Elmer's interest in, and intentions with respect  to,
ETEC.   Accordingly,  Perkin-Elmer  reserves  the  right  to
change  its  plans and intentions at any time, as  it  deems
appropriate.

Item 5.   Interest in Securities of the Issuer.

(a)  Perkin-Elmer owns 1,494,534 or 8.0% of the
     Common Shares

(b)  Shares that Perkin-Elmer has sole power to
     vote or to direct the vote:                  1,494,534


     Shares that Perkin-Elmer has shared power
     to vote or to direct the vote:                    -0-

     Shares that Perkin-Elmer has sole power to
     dispose of or to direct the disposition:     1,494,534


     Shares that Perkin-Elmer has the shared
     power to dispose of or direct the                 -0-
     disposition:

(c)  Neither Perkin-Elmer nor, to the knowledge
     of Perkin-Elmer, any of the persons listed
     on Schedule I hereto, has been party to any
     transaction in the Common Shares during the
     sixty day period ending on the date of this
     Statement on Schedule 13D other than the sale
     of 872,437 shares of ETEC Systems, Inc. Common
     Shares at $20.00/share on June 28, 1996.

(d)  No other person has the right to receive or
     the power to direct the receipt of
     dividends from, or the proceeds of the sale
     of, any Common Shares beneficially owned by
     Perkin-Elmer.

Item 6.   Contracts, Arrangements, Understandings or
          Relationships with Respect to Securities of the
          Issuer.

     Perkin-Elmer and ETEC are parties to a Shareholders
Agreement dated as of March 16, 1990, as amended, which
provides for (i) demand registration rights if certain other
shareholders consent and (ii) the right to require ETEC to
include Perkin-Elmer's Common Shares in any other
registration of ETEC Common Shares.  Both types of
registration rights are subject to volume limitations based
upon ETEC's right to include its Common Shares in any such
registration.

     There is a further volume limitation on the number of
shares Perkin-Elmer may include in the next public offering
of ETEC Common Shares, and Perkin-Elmer is further
restricted from disposing of any Common Shares until January
20, 1997.

                     Page 4 of 10

<PAGE>

Item 7.   Material to be Filed as Exhibits.

                              None.

                     Page 5 of 10

<PAGE>

                          SIGNATURE

     After reasonable inquiry and to the best of my
knowledge and belief, I certify that the information set
forth in this statement is true, complete and correct.


Dated:  July 3, 1996

                         THE PERKIN-ELMER CORPORATION

                         By:/s/ Stephen O. Jaeger
                            Stephen O. Jaeger
                            Vice President,
                            Chief Financial Officer and Treasurer


                     Page 6 of 10

<PAGE>

                         SCHEDULE I

     The following table sets forth the name, residence or
business address, present principal occupation or employment
of each of the executive officers and directors of Perkin-Elmer.
Unless otherwise indicated, the address of each person listed
below is the business address of Perkin-Elmer, 761 Main Avenue,
Norwalk, Connecticut 06859, and, unless otherwise indicated, each
person listed below is a citizen of the United States of America.


Directors

Mr. Joseph F. Abely, Jr.
Retired Chairman and
Chief Executive Officer
Sea-Land Corporation
1210 Corbin Street
Elizabeth, New Jersey  07207

Mr. Richard H. Ayers
Chairman and Chief Executive Officer
The Stanley Works
1000 Stanley Drive
New Britain, Connecticut  06053

Jean-Luc Belingard
Director General
F. Hoffmann-La Roche, Ltd.
Roche Diagnostics Systems
Postfach - Grenzacherstrasse 124
4002  Basel, Switzerland
Mr. Belingard is a French citizen.

Dr. Robert H. Hayes
Professor
Harvard Business School
Morgan Hall T-35
Boston, Massachusetts  02163

Mr. Donald R. Melville
Retired Chairman and Chief Executive Officer
Norton Company
4 Paul Revere Road
Worcester, Massachusetts  01609

                     Page 7 of 10

<PAGE>


Mr. Burnell R. Roberts
Chairman
Sweetheart Holding Inc.
2340 Kettering Tower
Dayton, Ohio  45423

Mr. John R. Scott
Retired Chairman of the Board
Richardson-Vicks, Inc.
1191 Smith Ridge Road
New Canaan, Connecticut  06840

Dr. Carolyn W. Slayman
Deputy Dean for Academic and Scientific Affairs
Yale University School of Medicine
Department of Genetics, I-310 SHM
333 Cedar Street
New Haven, Connecticut  06520

Mr. Georges C. St. Laurent, Jr.
Chief Executive Officer
Western Bank
12655 S.W. Center Street, Suite 500
Beaverton, OR  97005

Mr. Orin R. Smith
Chairman and Chief Executive Officer
Engelhard Corporation
101 Wood Avenue
Iselin, New Jersey  08830-0770

Mr. Richard F. Tucker
Retired Vice Chairman
Mobil Corporation
11 Over Rock Lane
Westport, Connecticut  06880

Mr. Tony L. White
Chairman, President and
Chief Executive Officer
The Perkin-Elmer Corporation



                     Page 8 of 10

<PAGE>

Executive Officers

Mr. Manuel A. Baez
Senior Vice President and President,
  Analytical Instruments
The Perkin-Elmer Corporation

Dr. Peter Barrett
Vice President
The Perkin-Elmer Corporation

Dr. David P. Binkley
Vice President
The Perkin-Elmer Corporation

Dr. Michael W. Hunkapiller
Vice President
The Perkin-Elmer Corporation
Applied Biosystems Division
850 Lincoln Centre Drive
Foster City, California  94404

Mr. Stephen O. Jaeger
Vice President, Chief Financial Officer, and Treasurer
The Perkin-Elmer Corporation

Mr. Joseph E. Malandrakis
Vice President
The Perkin-Elmer Corporation

Mr. John B. McBennett
Corporate Controller
The Perkin-Elmer Corporation

Mr. Michael J. McPartland
Vice President
The Perkin-Elmer Corporation

Dr. Mark C. Rogers
Senior Vice President, Corporate Development
  and Chief Technology Officer
The Perkin-Elmer Corporation

                     Page 9 of 10

<PAGE>


Mr. William B. Sawch
Vice President, General Counsel
and Secretary
The Perkin-Elmer Corporation

Mr. Tony L. White
Chairman, President and
Chief Executive Officer
The Perkin-Elmer Corporation

                     Page 10 of 10



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