THERMA WAVE INC
S-1/A, 1999-06-14
INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL
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<PAGE>


   As filed with the Securities and Exchange Commission on June 14, 1999
                                                      Registration No. 333-76019
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                                ----------------
                                 PRE-EFFECTIVE

                              AMENDMENT NO. 2
                                       to
                                    FORM S-1
                             REGISTRATION STATEMENT
                                     UNDER
                           THE SECURITIES ACT OF 1933
                                ----------------
                               THERMA-WAVE, INC.
             (Exact name of registrant as specified in its charter)
<TABLE>
 <S>                               <C>                              <C>
             DELAWARE                            3823                          94-3000561
 (State or other jurisdiction of     (Primary Standard Industrial           (I.R.S. Employer
  incorporation or organization)     Classification Code Number)          Identification No.)
</TABLE>
                  1250 Reliance Way, Fremont, California 94539
                                 (510) 668-2200
  (Address, including zip code, and telephone number, including area code, of
                   registrant's principal executive offices)
                                ----------------
                              DR. ALLAN ROSENCWAIG
                      Chairman and Chief Executive Officer
                               Therma-Wave, Inc.
                  1250 Reliance Way, Fremont, California 94539
                                 (510) 668-2200
 (Name, address, including zip code, and telephone number, including area code,
                             of agent for service)
                                ----------------
    Copies of all communications, including communications sent to agent for
                          service, should be sent to:

<TABLE>
<S>                                              <C>
             Eva Herbst Davis, Esq.                            David B. Walek, Esq.
                Kirkland & Ellis                                   Ropes & Gray
             300 South Grand Avenue                          One International Place
                   Suite 3000                              Boston, Massachusetts 02110
         Los Angeles, California 90071                            (617) 951-7000
                 (213) 680-8400
</TABLE>

   Approximate date of commencement of proposed sale to the public: As soon as
practicable after this Registration Statement becomes effective.
                                ----------------
   If any of the securities being registered on this Form are to be offered on
a delayed or continuous basis pursuant to Rule 415 under the Securities Act of
1933, check the following box. [_]

   If this Form is filed to register additional securities for an offering
pursuant to Rule 462(b) under the Securities Act, please check the following
box and list the Securities Act registration statement number of the earlier
effective registration statement for the same offering. [_]

   If this Form is a post-effective amendment filed pursuant to Rule 462(c)
under the Securities Act, check the following box and list the Securities Act
registration statement number of the earlier effective registration statement
for the same offering. [_]

   If delivery of the prospectus is expected to be made pursuant to Rule 434,
please check the following box. [_]
                                ----------------
   The registrant hereby amends this Registration Statement on such date or
dates as may be necessary to delay its effective date until the registrant
shall file a further amendment which specifically states that this Registration
Statement shall thereafter become effective in accordance with Section 8(a) of
the Securities Act of 1933 or until this Registration Statement shall become
effective on such date as the Commission, acting pursuant to said Section 8(a),
may determine.

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
<PAGE>

++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
+The information in this prospectus is not complete and may be changed without +
+notice. Therma-Wave may not sell these securities until the registration      +
+statement filed with the Securities and Exchange Commission is effective.     +
+This prospectus is not an offer to sell these securities, and Therma-Wave is  +
+not soliciting offers to buy these securities in any state where the offer or +
+sale of these securities is not permitted.                                    +
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
Subject To Completion,

Dated June 14, 1999

                                        Shares

                               [Therma-Wave Logo]

                                  Common Stock

  Therma-Wave, Inc. is offering shares of stock in a firmly underwritten
offering. This is Therma-Wave's initial public offering, and no public market
currently exists for Therma-Wave's shares. Therma-Wave anticipates that the
initial public offering price for its shares will be between $[   ] and $[   ]
per share. After the offering, the market price for Therma-Wave's shares may be
outside of this range.

                                  -----------

  The common stock has been approved for quotation on the Nasdaq National
Market under the symbol "TWAV," subject to official notice of issuance.


                                  -----------

  Investing in the common stock involves a high degree of risk. See "Risk
Factors" beginning on page 9.

                                  -----------

<TABLE>
<CAPTION>
                                              Per Share Total
                                              --------- -----
   <S>                                        <C>       <C>
   Offering Price                                $       $
   Discounts and Commissions to Underwriters     $       $
   Offering Proceeds to Company                  $       $
</TABLE>

  Neither the Securities and Exchange Commission nor any state securities
commission has approved or disapproved these securities or determined if this
prospectus is truthful or complete. Any representation to the contrary is a
criminal offense.

  Therma-Wave has granted the underwriters the right to purchase up to an
additional        shares of common stock to cover over-allotments. The
underwriters can exercise this right at any time within thirty days after the
offering.

  Banc of America Securities LLC expects to deliver the shares of common stock
to investors on       , 1999.

Banc of America Securities LLC                                   Lehman Brothers

                                  -----------

                  The date of this prospectus is       , 1999.
<PAGE>

       [pictures of an Opti-Probe(R) system and a Therma-Probe(R) system]

                                       2
<PAGE>


   You should rely only on the information contained in this prospectus. We
have not authorized anyone to provide you with information different from that
contained in this prospectus. We are offering to sell, and seeking offers to
buy, shares of common stock only in jurisdictions where offers and sales are
permitted. The information contained in this prospectus is accurate only as of
the date of this prospectus, regardless of the time of delivery of this
prospectus or of any sale of our common stock.

   Our fiscal year is a 52 to 53 week year ending on the Sunday on or nearest
preceding March 31 for periods prior to 1997 and the Sunday on or following
March 31 of each year for periods thereafter. Fiscal years 1997, 1998 and 1999
ended on April 6, 1997, April 5, 1998 and April 4, 1999, respectively. Fiscal
years are identified in this prospectus according to the calendar year in which
they end. For example, the fiscal year ended April 4, 1999 is referred to
herein as "fiscal 1999." For convenience, the financial information included in
this prospectus has been presented as ending on the last day of the nearest
calendar month.

                               TABLE OF CONTENTS

<TABLE>
<CAPTION>
                                                                          Page
<S>                                                                       <C>
Prospectus Summary.......................................................   4
Risk Factors.............................................................   9
Use of Proceeds..........................................................  19
The Reclassification.....................................................  19
Capitalization...........................................................  20
Dividend Policy..........................................................  21
Dilution.................................................................  21
Selected Historical Financial Data.......................................  22
Management's Discussion and Analysis of Financial Condition and Results
 of Operations...........................................................  24
Business.................................................................  33
Management...............................................................  48
Principal Stockholders...................................................  58
Certain Relationships and Related Transactions...........................  59
Description of Certain Indebtedness......................................  66
Description of Capital Stock.............................................  70
Shares Eligible for Future Sale..........................................  74
Underwriting.............................................................  76
Experts..................................................................  78
Legal Matters............................................................  78
Change in Independent Accountants........................................  78
Where You Can Find More Information......................................  78
Index to Financial Statements............................................ F-1
</TABLE>

   Therma-Wave(R), Therma-Probe(R), Opti-Probe(R) and Meta-Probe(R) are
registered trademarks of Therma-Wave. Fab Productivity Enhancement(TM), AE(TM),
BPE(TM) and BPR(TM) are trademarks of Therma-Wave. This prospectus contains
trademarks, service marks and trade names of companies and organizations other
than Therma-Wave.

                                       3
<PAGE>

                               PROSPECTUS SUMMARY

   This summary highlights information contained elsewhere in this prospectus.
This summary is not complete and may not contain all of the information that
you should consider before investing in our common stock. You should read the
entire prospectus carefully. This prospectus contains forward-looking
statements, which involve risks and uncertainties. Our actual results could
differ materially from those anticipated in these forward-looking statements as
a result of certain factors, including those set forth in "Risk Factors" and
elsewhere in this prospectus. Unless otherwise stated, the information
contained in this prospectus: (1) assumes no exercise of the underwriters'
over-allotment option and (2) reflects the reclassification of all of our
classes of common stock into a single class of common stock.

                               Therma-Wave, Inc.

   We are a worldwide leader in the development, manufacture, marketing and
service of process control metrology systems used in the manufacture of
semiconductors. Process control metrology is used to monitor process parameters
in order to help enable semiconductor manufacturers to reduce the size of the
circuit patterns or features imprinted on the semiconductor, increase the size
of the raw silicon wafer from which semiconductors are manufactured, increase
their equipment productivity and improve the performance of the semiconductor
device. Our current product families, the Therma-Probe and Opti-Probe, use
proprietary and patented technology to provide precise, non-contact, non-
destructive measurement of two of the most critical and pervasive process steps
in semiconductor manufacturing:

  .  ion implantation--implanting ions, usually boron, phosphorus or arsenic,
     into selected areas of the silicon wafer to alter its electrical
     properties; and

  .  thin film deposition and removal--depositing and removing layers of
     conductive or insulating films from the silicon wafer in order to give
     the semiconductor the desired performance characteristics.

   The demand for semiconductors has continually increased as the use of
semiconductors has expanded beyond personal computers and computer systems to a
wide array of additional applications, including telecommunications and data
communications systems, automotive systems, consumer electronics, medical
products and household appliances. Additionally, the Internet has stimulated
the need for more high performance semiconductor devices. As a result,
semiconductors have become increasingly complex, with smaller feature sizes and
shorter product life cycles, resulting in a more costly and complex
manufacturing process. Increasingly, process control metrology has been used by
semiconductor manufacturers to effectively monitor these complex manufacturing
processes. The semiconductor industry experienced downturns in 1998 and 1996,
during which industry revenues declined by an estimated 8.4% and 6.4%,
respectively, as reported by Dataquest. Dataquest forecasts that sales of
semiconductor capital equipment will decrease by approximately 1.7% in calendar
1999 as compared to calendar 1998. Despite periodic downturns as a result of
the cyclicality of the semiconductor device industry, from 1992 to 1998,
Dataquest reports that sales of process control metrology systems and
instruments have increased at a compound annual growth rate of 20.8% and are
expected to grow at a compound annual growth rate of 22.9% through 2002.

   Historically, semiconductor manufacturers have achieved an approximate 25%
to 30% annual reduction in the cost per chip function through productivity
improvements including reduced feature size, increased wafer size and increased
equipment productivity. Although increasing wafer size and yields will continue
to be sources of productivity gains for semiconductor manufacturers,
increasingly, we believe, gains will come from reduced feature size and non-
yield related equipment productivity enhancements, including increased
equipment uptime, reduced manufacturing space requirements, reduced use of
wafers for testing purposes and lower tool maintenance costs. Our strategy,
which we refer to as Fab Productivity Enhancement(TM), is to be a leader in
providing semiconductor manufacturers with enabling technologies to improve
productivity within semi-conductor fabrication facilities. Our current Fab
Productivity Enhancement(TM) solutions, the Therma-Probe and Opti-Probe
systems, enhance fab productivity by helping to enable semiconductor
manufacturers to reduce feature size, increase wafer size and increase
equipment productivity by providing non-contact, non-destructive

                                       4
<PAGE>

enabling technologies extendable over multiple process generations. Our future
Fab Productivity Enhancement(TM) solutions are expected to include:

  .  Combining separate metrology systems into one tool;

  .  Implementing in-situ systems to improve the direct control of process
     equipment and to provide real-time measurement of product wafers; and

  .  Networking these systems together.

   In-situ systems allow us to measure product wafers and monitor process
equipment during the semiconductor fabrication process.

   We believe we are a technology leader in process control metrology and one
of the first companies to pioneer the usage of non-contact, non-destructive
process control metrology technology. We have focused heavily on the
development and protection of our proprietary technology as we hold 51 U.S. and
foreign patents. In addition, we have filed applications for 22 additional U.S.
and foreign patents. We believe we have superior technical resources including
a staff of 46 Ph.Ds, which represents over 13% of our employees. We have
accomplished a number of significant innovations including the development of
patented technologies for:

  .  the most widely accepted metrology system for measuring the critical ion
     implantation process on product wafers;

  .  a state-of-the-art metrology system for measuring thin films on product
     wafers;

  .  the successful combination of thin film measurement technologies in one
     system; and

  .  metrology software providing for advanced signal processing and data
     analysis.

   We believe we can leverage our strong intellectual property position and our
core technological expertise in non-contact based process control metrology
systems to provide additional Fab Productivity Enhancement(TM) solutions to
semiconductor manufacturers.

   We believe we have achieved leading market share positions in our two
principal markets. We estimate we have over 95% of the market for the non-
destructive measurement of ion implantation on product wafers and over 30% of
the thin film measurement market. We sell our products worldwide to leading
semiconductor manufacturers including: Advanced Micro Devices, Inc., Chartered
Semiconductor, Ltd., Intel Corporation, Lucent Technologies, Samsung America,
Inc., Siemens AG, STMicroelectronics N.V., Toshiba Corporation and the UMC
Group. International sales represented approximately 52% and 69% of our net
revenues in fiscal 1998 and 1999, respectively. We have sold our products to
over 70 semiconductor manufacturers located in 14 different countries. We
provide our customers with a worldwide network of sales and support personnel.
We intend to continue to invest in our sales and support network, as we believe
it is an increasingly important competitive factor in today's global
semiconductor capital equipment market.

   Therma-Wave was established in 1982 by Dr. Allan Rosencwaig, our current
Chairman and CEO and the principal developer of the field of thermal wave
physics. In fiscal 1992, Therma-Wave was acquired by Toray Industries, Inc. and
Shimadzu Corporation. Through a recapitalization effected in May 1997, Bain
Capital, Inc., Sutter Hill Ventures and our senior management team collectively
acquired securities representing approximately 87% of our outstanding voting
power. Our senior management team currently owns approximately 21% of our
outstanding common stock and holds options to acquire an additional 12% of the
common stock. Such equity ownership represents a significant economic
commitment to, and participation in, the continued success of Therma-Wave.

   Therma-Wave is a Delaware corporation organized in October 1990. Our
principal executive offices are located at 1250 Reliance Way, Fremont,
California 94539, and our telephone number is (510) 668-2200. We maintain a
website on the Internet at www.thermawave.com. Our website, and the information
contained therein, is not a part of this prospectus.

                                       5
<PAGE>

                                  The Offering

<TABLE>
<S>                                              <C>
Common Stock offered by Therma-Wave.............     shares

Common Stock to be outstanding after this
 offering.......................................     shares

Use of proceeds................................. To redeem a portion of our 10 5/8% senior
                                                 notes. See "Use of Proceeds."

Proposed Nasdaq National Market symbol.......... "TWAV"
</TABLE>

   The common stock to be outstanding after this offering is based on shares
outstanding as of March 31, 1999 and excludes: (1) 1,778,086 shares of common
stock issuable upon the exercise of outstanding options granted under our stock
option plans, of which 1,196,403 were then exercisable, at exercise prices
ranging from $6.00 to $15.89 per share; (2)        additional shares of common
stock expected to be reserved for future grants, awards or sale under the 1999
Equity Incentive Plan or sale under the 1999 Employee Stock Purchase Plan; and
(3) 748,739 shares of common stock issuable upon the conversion of our
mandatorily redeemable convertible preferred stock. See "Management--Stock
Plans."

                                       6
<PAGE>

                       Summary Historical Financial Data
                     (in thousands, except per share data)

<TABLE>
<CAPTION>
                                               Fiscal Year
                                ----------------------------------------------
                                 1995     1996      1997      1998      1999
                                -------  -------  --------  --------  --------
<S>                             <C>      <C>      <C>       <C>       <C>
Statement of Operations Data
 (1):
Net revenues..................  $55,675  $79,293  $109,493  $115,459  $ 66,207
Gross margin..................   30,651   44,266    59,698    59,776    29,380
Operating income (loss).......    9,498   13,578    23,369    11,942    (4,677)
Income (loss) before income
 taxes........................    7,487   11,965    22,108      (429)  (18,080)
Net income (loss).............  $ 7,487  $ 7,281  $ 13,101  $ (1,033) $(15,730)
Net income (loss) attributable
 to common stockholders (2)...  $ 7,487  $ 7,281  $ 13,101  $ (1,771) $(16,562)

Net income (loss) per share
 (3):
 Basic........................  $  0.25  $  0.16  $   0.29  $  (0.27) $  (1.86)
 Diluted......................  $  0.24  $  0.16  $   0.29  $  (0.27) $  (1.86)
Weighted average number of
 shares outstanding:
 Basic........................   30,412   45,515    45,515    13,540     9,397
 Diluted......................   31,497   45,515    45,515    13,540     9,397

Pro Forma Statement of
 Operations Data (4):
Pro forma net income (loss)...                              $         $
Pro forma net income (loss)
 per share:
 Basic........................                              $         $
 Diluted......................                              $         $
Pro forma weighted average
 common shares outstanding:
 Basic........................
 Diluted......................

Other Financial Data:
EBITDA (excluding non-
 recurring charges) (5).......  $12,496  $17,185  $ 27,113  $ 19,723  $    974
Cash provided by operating
 activities...................    1,876    5,867    11,860     8,113       745
Cash used in investing
 activities...................   (2,048)  (4,965)   (1,575)   (2,900)   (1,389)
Cash provided by (used in)
 financing activities.........    5,701   (1,541)   (1,234)   (1,532)      467
Capital expenditures..........    1,616    4,361     1,091     2,900       862
</TABLE>

<TABLE>
<CAPTION>
                                                    March 31,
                                    -------------------------------------------
                                     1997     1998      1999    As Adjusted (6)
                                    ------- --------  --------  ---------------
<S>                                 <C>     <C>       <C>       <C>
Balance Sheet Data:
Cash and cash equivalents.........  $16,741 $ 20,422  $ 20,245     $ 20,245
Working capital...................   38,720   43,348    31,394       32,204
Total assets......................   68,620   89,762    72,352       70,973
Long-term debt....................   23,100  115,000   115,000       95,258
Mandatorily redeemable convertible
 preferred stock (2)..............      --    14,515    15,347       15,347
Stockholders' equity (net capital
 deficiency)......................   20,145  (70,990)  (86,971)     (67,797)
</TABLE>

   Our fiscal year refers to the 52/53 week period ending on the Sunday on or
nearest preceding March 31 of each year for periods prior to 1997 and the
Sunday on or following March 31 of each year for periods thereafter.

                               Footnotes to table appear on following page.

                                       7
<PAGE>

- --------

Footnotes to table on previous page.

(1) On May 16, 1997, we effected the recapitalization. We issued $115 million
    in aggregate principal amount of 10 5/8% senior notes in connection with
    the recapitalization.

(2) We issued shares of mandatorily redeemable convertible preferred stock as
    part of the recapitalization. The fair value of the preferred stock at
    March 31, 1999 of $15,347 represents the liquidation value plus accrued
    dividends. Dividends on the preferred stock accrue at a rate of 6.0% per
    annum. The preferred stock has a scheduled redemption date of May 17, 2004
    and is otherwise redeemable by us at any time at our sole discretion. See
    "Description of Capital Stock--Preferred Stock."

(3) For the calculation of net loss per share for the years ended March 31,
    1998 and 1999: (a) net loss represents the loss attributable to the
    weighted average number of shares of Class A common stock, Class B common
    stock and, prior to the recapitalization, common stock outstanding after
    giving effect to the 12% yield on Class L common stock and (b) weighted
    average number of shares outstanding excludes unvested Class B common
    stock.

(4) The pro forma statement of operations data gives pro forma effect to: (1)
    the reclassification of our three classes of common stock into a single
    class and (2) this offering and the application of the net proceeds
    therefrom as described under "Use of Proceeds," as if each had occurred as
    of the beginning of the periods presented. The unaudited pro forma
    statement of operations data does not purport to represent what our results
    of operations actually would have been if such transactions had actually
    occurred as of the beginning of the periods presented, or what such results
    will be for any future periods.

(5) "EBITDA" is defined herein as income (loss) before income taxes, plus
    depreciation, amortization, interest expense, interest income and other
    non-operating (income) expenses, net. "EBITDA (excluding non-recurring
    charges)" in the fiscal years ended March 31, 1998 and 1999 does not
    include $4,188 and $1,057 in recapitalization and other non-recurring
    expenses, respectively. Including such non-recurring charges, EBITDA for
    the period would have been reduced to $15,537 and $(83) for fiscal 1998 and
    1999, respectively. We believe EBITDA and EBITDA (excluding non-recurring
    charges) are widely accepted financial indicators of a company's historical
    ability to service and/or incur indebtedness. However, EBITDA and EBITDA
    (excluding non-recurring charges) should not be considered as an
    alternative to net income as a measure of operating results or to cash
    flows as a measure of liquidity in accordance with generally accepted
    accounting principles. Additionally, EBITDA and EBITDA (excluding non-
    recurring charges) as defined herein may not be comparable to similarly
    titled measures reported by other companies.

(6) Adjusted to reflect the sale of     shares of common stock and the
    application of the net proceeds as described under "Use of Proceeds."

                                       8
<PAGE>

                                  RISK FACTORS

   You should carefully consider the following factors in addition to the other
information set forth in this prospectus in analyzing an investment in the
common stock offered hereby. The risks and uncertainties described below are
not the only ones facing us. Additional risks and uncertainties that we do not
presently know about or that we currently believe are immaterial may also
adversely impact our business operations. If any of the following risks
actually occur, our business, financial condition or results of operations
would likely suffer. In such case, the trading price of our common stock could
fall, and you may lose all or part of the money you paid to buy our common
stock.

   This prospectus contains forward-looking statements that involve risks and
uncertainties. Actual results could differ materially from those discussed
herein. Factors that could cause or contribute to such differences include, but
are not limited to, those identified below as well as those discussed elsewhere
in this prospectus.

We have had significant net losses and we anticipate losses to continue.

   We have not reported net income since the first quarter of fiscal 1998. We
reported a net loss for fiscal 1999 of $15.7 million and for fiscal 1998 of
$1.0 million. Due to the current downturn in the semiconductor industry and the
related downturn in the semiconductor capital equipment industry, weak economic
conditions in the Asia Pacific region, including Japan, and other factors, we
expect to remain unprofitable at least through the end of calendar 1999. We
cannot predict how long we will continue to experience significant net losses
or when we will become profitable.

Our performance is affected by the cyclicality of the semiconductor device
industry which may, from time to time, lead to decreased demand for our
products.

   The current downturn in the semiconductor industry has had a material
adverse effect on our recent operating results. Our business depends upon the
capital expenditures of semiconductor manufacturers, which, in turn, depend
upon the current and anticipated market demand for semiconductors and products
utilizing semiconductors. The semiconductor industry is cyclical and has
historically experienced periodic downturns, which have often resulted in a
decrease in the semiconductor industry's demand for capital equipment,
including process control metrology systems. There is typically a six to twelve
month lag between changes in the semiconductor industry and the related impact
on the level of capital expenditures. In most cases, the resulting decrease in
capital expenditures has been more pronounced than the precipitating downturn
in semiconductor industry revenues. The semiconductor industry experienced
downturns in 1998 and 1996, during which industry revenues declined by an
estimated 8.4% and 6.4%, respectively, as reported by Dataquest. Dataquest
forecasts that sales of semiconductor capital equipment will decrease by
approximately 1.7% in calendar 1999 as compared to calendar 1998. Although
there are indications that the semiconductor industry is beginning to recover,
there can be no assurance that:

  .  the semiconductor industry will improve;

  .  the semiconductor industry will not experience other, possibly more
     severe and prolonged, downturns in the future; or

  .  any such recovery will result in increased demand for capital equipment
     by the semiconductor industry.

   The continuation of the current downturn or any future downturn in the
semiconductor industry will have a material adverse effect on our business,
financial condition and results of operations.


                                       9
<PAGE>

Our quarterly operating results have historically and may, in the future, vary
significantly. This may result in volatility in the market price for our
shares.

   Our quarterly operating results have historically and may, in the future,
vary significantly. Some of the factors that may influence our operating
results in a given quarter include:

  .  customer demand, which is influenced by economic conditions in the
     semiconductor industry, demand for products that use semiconductors,
     market acceptance of our products and those of our customers,
     seasonality, changes in product mix, and the timing, cancellation or
     delay of customer orders and shipments;

  .  competition, such as competitive pressures on prices of our products,
     the introduction or announcement of new products by us or our
     competitors and discounts that may be granted to certain customers;

  .  fluctuations in the availability and cost of components, subassemblies
     and production capacity;

  .  expenses incurred in connection with litigation;

  .  product development costs, such as increased research, development,
     engineering and marketing expenses associated with new products or
     product enhancements, and the effect of transitioning to new or enhanced
     products; and

  .  levels of fixed expenses relative to revenue levels, including research
     and development costs associated with product development.

   During a given quarter, a significant portion of our revenue may be derived
from the sale of a relatively small number of systems. Accordingly, a small
change in the number of systems actually shipped may cause significant changes
in operating results. In addition, because of the significantly different gross
margins attributable to our two product lines, changes in product mix may cause
fluctuations in operating results.

Our largest customers have historically accounted for a significant portion of
our revenues. Accordingly, our business may be adversely affected by the loss
of, or reduced purchases by, one or more of our large customers.

   If, for any reason, any of our key customers were to purchase significantly
less of our products in the future, such decreased level of purchases could
have a material adverse effect on our business, financial condition and results
of operations. During fiscal 1999, sales to Intel Corporation and Advanced
Micro Devices, Inc. accounted for approximately 23% and 18% of our net
revenues, respectively, and sales to our top five customers in the aggregate
accounted for approximately 53% of our net revenues. During fiscal 1998, sales
to Intel Corporation accounted for approximately 23% of our net revenues, and
sales to our top five customers in the aggregate accounted for approximately
45% of our net revenues. As customers seek to establish closer relationships
with their suppliers, we expect that our customer base will continue to become
more concentrated with a limited number of customers accounting for a
significant portion of our revenues. See "Business--Customers."

We operate in the highly competitive semiconductor capital equipment industry
and compete against larger companies.

   We operate in the highly competitive semiconductor capital equipment
industry and face competition from a number of competitors, some of which have
greater financial, engineering, manufacturing and marketing resources and
broader product offerings than Therma-Wave. We cannot assure you that our
products will be able to compete successfully with the products of our
competitors. Many of our competitors are investing heavily in the development
of new products aimed at applications we currently serve. Our competitors in
each product area can be expected to continue to improve the design and
performance of their products and to introduce new products with competitive
prices and performance characteristics. In addition, we believe that

                                       10
<PAGE>

our competitors sometimes provide demonstration systems to semiconductor
manufacturers at no cost. We could be required to employ similar promotions in
order to remain competitive if this practice becomes more pervasive in the
industry.

Competitive conditions in our industry may require us to reduce our prices.

   Due to competitive conditions in our industry, we have reduced prices on
certain of our products in order to maintain our market share. There can be no
assurance that competitive pressures will not necessitate further price
reductions. Maintaining technological advantages to mitigate the adverse effect
of pricing pressures will require a continued high level of investment by us in
research and development and sales and marketing. There can be no assurance
that we will have sufficient resources to continue to make such investments or
that we will be able to make the technological advances necessary to maintain
such competitive advantages. To the extent our products do not provide
technological advantages over products offered by our competitors, we are
likely to experience increased price competition or loss of market share with
respect to such products.

We encounter difficulties in soliciting customers of our competitors because of
high switching costs in the markets in which we operate.

   We believe that once a device manufacturer has selected a particular
vendor's capital equipment, that manufacturer generally relies upon that
vendor's equipment for that specific production line application and, to the
extent possible, subsequent generations of that vendor's systems. Accordingly,
it may be difficult to achieve significant sales to a particular customer once
another vendor's capital equipment has been selected by that customer unless
there are compelling reasons to do so, such as significant performance or cost
advantages.

Our business may be adversely impacted as a result of our substantial leverage,
which requires the use of a substantial portion of our excess cash flow and may
limit our access to additional capital.

   We incurred substantial indebtedness in connection with our
recapitalization, which occurred on May 16, 1997. We currently are required to
make annual cash interest payments totaling $12.2 million relating to our
outstanding $115.0 million 10 5/8% senior notes which represented approximately
96% of our operating cash flows during fiscal 1999. Interest payments as a
percentage of operating cash flows can be expected to fluctuate in the future
depending primarily upon our net income (loss) and outstanding debt balance. At
March 31, 1999, on a pro forma basis giving effect to this offering and the
application of the net proceeds therefrom, our total indebtedness would have
been approximately $95.3 million and our net capital deficiency would have been
$67.8 million. In addition, as of March 31, 1999, we had unused borrowing
capacity of $17.0 million under our bank credit facility. Furthermore, subject
to the restrictions in our senior bank credit facility and the indenture
relating to our 10 5/8% senior notes, we may incur additional indebtedness,
including secured indebtedness, from time to time to finance acquisitions,
capital expenditures and working capital, redeem our Preferred Stock, make
certain deferred bonus payments to our executive officers or for other
purposes.

   The level of our indebtedness could have important consequences for us. The
following summarizes the material consequences:

  .  a substantial portion of our cash flow from operations must be dedicated
     to the repayment of indebtedness and will not be available for other
     purposes;

  .  our future ability to obtain additional debt financing for working
     capital, capital expenditures, acquisitions or other purposes may be
     limited; and

  .  our level of indebtedness has in the past, and could in the future,
     limit our flexibility in reacting to changes in the industry, general
     economic conditions and our ability to withstand a prolonged downturn in
     the semiconductor and/or semiconductor capital equipment industries.

   Most of our competitors currently operate on a less leveraged basis and have
significantly greater operating and financing flexibility than we do.

                                       11
<PAGE>


A breach of any of the restrictive covenants in our senior notes indenture or
our bank credit facility could result in a default under our senior note
indenture and/or our bank credit facility. If the bank accelerates all amounts
owing under the bank credit facility because of a default under the bank credit
facility and we are unable to pay such amounts, the bank has the right to
foreclose on our assets, including the capital stock pledged as security under
our bank credit facility.

   The indenture relating to our senior notes and our bank credit facility
contain restrictive covenants. In addition, our bank credit facility requires
us to maintain specified financial ratios and satisfy financial condition tests
at the end of each fiscal quarter. In June 1998, we amended our bank credit
facility to adjust the financial tests requiring us to maintain minimum levels
of EBITDA during each six-month period ending on the last day of each fiscal
quarter and minimum levels of cumulative EBITDA from April 7, 1996 to the last
day of each fiscal quarter. These amendments were effected in light of the
impact of the downturn in the semiconductor industry on our operating results.
Without these amendments to our bank credit facility, on June 30, 1998, we
would have violated the financial test relating to the maintenance of minimum
levels of EBITDA for the six-month period ending on such date. These
adjustments relate to periods prior to March 31, 2000. For periods after that
time, the financial tests and covenants contained in the original agreement
will apply. Our ability to meet those financial ratios and tests can be
affected by events beyond our control, and there can be no assurance that we
will meet those tests. A breach of any of these covenants could result in a
default under our bank credit facility and/or the indenture relating to our
senior notes. Substantially all of our assets and those of our subsidiaries,
together with all of the capital stock of any domestic subsidiary and 65% of
the capital stock of each of our first-tier foreign subsidiaries, are pledged
as security under our bank credit facility. If the bank accelerates all amounts
owing under the bank credit facility because of a default under the bank credit
facility and we are unable to pay such amounts, the bank has the right to
foreclose on our assets, including the capital stock pledged as security under
our bank credit facility. See "Description of Certain Indebtedness."

Our future growth depends on our ability to develop new and enhanced products
for the semiconductor industry. We cannot assure you that we will be successful
in our product development efforts or that our new products will gain general
market acceptance.

   Our future growth will depend, in part, on our ability to design, develop,
manufacture, assemble, test, market and support new products and enhancements
on a timely and cost-effective basis. Our failure to successfully identify new
product opportunities or to develop, manufacture, assemble or introduce new
products could have a material adverse effect on our growth prospects. For
example, we expect our product development efforts to include combining
separate metrology systems into one tool, implementing in-situ systems and
networking these systems together. In-situ systems allow us to measure product
wafers and monitor process equipment during the semiconductor fabrication
process. We are also developing the Meta-Probe system, which is a thin film
metrology system specifically designed to measure the thickness and material
properties of opaque and metallic thin films. We cannot assure you that we will
not experience difficulties or delays in our development efforts with respect
to these products or that we will be successful in developing these products.
In addition, we cannot assure you that these products will gain market
acceptance or that we will not experience reliability or quality problems.

Rapid technological changes in our industry will require us to continually
develop new and enhanced products.

   Our industry is characterized by rapid technological changes and the need to
develop and introduce new products to meet customers' expanding needs and
evolving industry standards. There can be no assurance that we will
successfully develop and bring new products to market in a timely and cost-
effective manner, that any product enhancement or new product developed by us
will gain market acceptance, or that products or technologies developed by
others will not render our products or technologies obsolete or noncompetitive.
A fundamental shift in technology in our product markets could have a material
adverse effect on us, particularly in light of the fact that we currently
derive substantially all of our revenues from sales of our two product
families, the Opti-Probe and Therma-Probe.

                                       12
<PAGE>

Our business could be adversely affected if we are unable to protect our
proprietary technology or if we infringe on the proprietary technology of
others.

   Our future success and competitive position depend in part upon our ability
to obtain and maintain proprietary technology used in our principal product
families, and we rely, in part, on patent, trade secret and trademark law to
protect that technology. We have obtained a number of patents relating to our
two key product families, the Opti-Probe and Therma-Probe, and have filed
applications for additional patents. There can be no assurance that any of our
pending patent applications will be approved, that we will develop additional
proprietary technology that is patentable, that any patents owned by or issued
to us will provide us with competitive advantages or that these patents will
not be challenged by any third parties. Furthermore, there can be no assurance
that third parties will not design around our patents. Any of the foregoing
results could have a material adverse effect on our business, financial
condition or results of operations.

   In addition to patent protection, we rely upon trade secret protection for
our confidential and proprietary information and technology. We routinely enter
into confidentiality agreements with our employees. However, there can be no
assurance that these agreements will not be breached, that we will have
adequate remedies for any breach or that our confidential and proprietary
information and technology will not be independently developed by or become
otherwise known to third parties.

   Our commercial success will also depend, in part, on our ability to avoid
infringing or misappropriating any patents or other proprietary rights owned by
third parties. If we are found to infringe or misappropriate a third party's
patent or other proprietary rights, we could be required to pay damages to such
third party, alter our products or processes, obtain a license from the third
party or cease certain activities, including making or selling certain
products. If we are required to do any of the foregoing, there can be no
assurances that we will be able to do so on commercially favorable terms, if at
all. Our inability to do any of the foregoing on commercially favorable terms
could have a material adverse impact on our business, financial condition or
results of operations.

Protection of our intellectual property rights, or third parties seeking to
enforce their own intellectual property rights against us, may result in
litigation, the cost of which could be substantial. We are currently involved
in litigation regarding our thin-film thickness measuring technology.

   We may be required to initiate litigation in order to enforce any patents
issued to or licensed to us or to determine the scope and/or validity of a
third party's patent or other proprietary rights. In addition, we may be
subject to lawsuits by third parties seeking to enforce their own intellectual
property rights. Any such litigation, regardless of outcome, could be expensive
and time consuming and, as discussed above in the prior risk factor, could
subject us to significant liabilities or require us to cease using certain
technology and, consequently, could have a material adverse effect on our
business, financial condition or results of operations. We are currently
involved in litigation with KLA-Tencor Corporation regarding our thin-film
thickness measuring technology. See "Business--Legal Proceedings."

We will need to be able to attract and retain key personnel with knowledge of
instruments used in semiconductor manufacturing processes to help support our
future growth. Competition for such personnel in our industry is high.

   Our success depends to a significant degree upon the continued contributions
of key management, engineering, sales and marketing, customer support, finance
and manufacturing personnel. The loss of the services of certain personnel, who
would be extremely difficult to replace, could have a material adverse effect
on us. There can be no assurance that the services of such personnel will
continue to be available to us. We have employment agreements with certain
members of our senior management team, including Messrs. Rosencwaig, Schwartz,
Christie, Smith, Opsal and Willenborg. In addition, we maintain and are the
named beneficiary under key-man life insurance policies for Messrs. Rosencwaig,
Willenborg and Opsal in the amounts of $500,000, $100,000 and $250,000,
respectively. To support our future growth, we will need to attract and retain
additional

                                       13
<PAGE>

qualified employees. Competition for such personnel in our industry is high,
and we cannot be certain that we will be successful in attracting and retaining
such personnel. See "Management--Employment Agreements."

Our operations are characterized by the need for continued investment in
research and development and, as a result, our ability to reduce costs is
limited.

   Our operations are characterized by the need for continued investment in
research and development and extensive ongoing customer service and support
capability. As a result, our operating results could be materially adversely
affected if our level of revenues are below expectations. In addition, because
of our emphasis on research and development and technological innovation, there
can be no assurance that our operating costs will not increase in the future.
We expect the level of research and development expenses to increase in the
near future in both absolute dollar terms and as a percentage of our revenues.

We obtain some of the components and subassemblies included in our systems from
a single source or limited group of suppliers, the partial or complete loss of
which could have at least a temporary adverse effect on our operations.

   Some of the components and subassemblies included in our systems are
obtained from a single source or a limited group of suppliers. From time to
time, we have experienced temporary difficulties in receiving orders from some
of these suppliers. Although we seek to reduce dependence on these sole and
limited source suppliers, the partial or complete loss of these sources could
have at least a temporary adverse effect on our results of operations and
damage customer relationships. Further, a significant increase in the price of
one or more of these components or subassemblies could materially adversely
affect our results of operations.

We are subject to risks associated with manufacturing all of our products at a
single facility. Any prolonged disruption in the operations of that facility
could have a material adverse effect on our business.

   We produce all of our products in our manufacturing facility located in
Fremont, California. Our manufacturing processes are highly complex, require
sophisticated and costly equipment and a specially designed facility. As a
result, any prolonged disruption in the operations of our manufacturing
facility, whether due to technical or labor difficulties, destruction of or
damage to this facility as a result of an earthquake, fire or any other reason,
could have a material adverse effect on our business, financial condition or
results of operations.

We rely upon manufacturers' sales representatives for a significant portion of
our sales. A disruption in our relationship with any sales representative could
have a material adverse effect on our business.

   Approximately 50% of our sales have historically been made through
manufacturers' sales representatives. The activities of these representatives
are not within our control, and they may sell products manufactured by other
manufacturers. In addition, in some locations our manufacturing sales
representatives also provide field service to our customers. A reduction in the
sales efforts or financial viability of such manufacturers' sales
representatives, or a termination of our relationship with such
representatives, could have a material adverse effect our sales, financial
results and ability to support our customers. Although we believe that we
maintain good relations with our sales representatives, there can be no
assurance that such relationships will continue.

Our net sales and results of operations can be adversely affected by the
instability of Asian economies, from which we derive a significant portion of
our revenues.

   Our sales to customers in Asian markets represented approximately 40% and
33% of total net revenues for fiscal 1998 and 1999, respectively. Companies in
the Asia Pacific region, including Japan, Korea and Taiwan, each of which
accounts for a significant portion of our business in that region, have
experienced weaknesses in their currency, banking and equity markets over the
last 18 months. These weaknesses began to adversely affect our sales to
semiconductor device and capital equipment manufacturers located in these
regions in the

                                       14
<PAGE>

fourth quarter of calendar 1997 and have continued to adversely affect them in
1998. Although we have recently received an increased level of orders from
customers in the Asia Pacific region, we expect that turbulence in the Asian
markets could adversely affect our sales at least through the end of calendar
1999.

We are subject to certain operational, financial, political and foreign
exchange risks due to our significant level of international sales.

   International sales accounted for approximately 52% and 69% of our total
revenues for fiscal 1998 and 1999, respectively. We anticipate that
international sales will continue to account for a significant portion of our
revenue in the foreseeable future. Due to the significant level of our
international sales, we are subject to material risks which include:

  .  unexpected changes in regulatory requirements;

  .  tariffs and other market barriers;

  .  political and economic instability;

  .  potentially adverse tax consequences;

  .  outbreaks of hostilities;

  .  difficulties in accounts receivable collection;

  .  extended payment terms;

  .  difficulties in managing foreign sales representatives; and

  .  difficulties in staffing and managing foreign branch operations.

In addition, the laws of certain countries in which our products are or may be
sold may not provide our products and intellectual property rights with the
same degree of protection as the laws of the United States.

   A substantial portion of our international sales are denominated in U.S.
dollars. As a result, changes in the values of foreign currencies relative to
the value of the U.S. dollar can render our products comparatively more
expensive. Such conditions could negatively impact our international sales.

Our failure to identify and remediate all material Year 2000 risks could
significantly disrupt our business if we are forced to devote substantial
resources to Year 2000 remediation efforts, or if Year 2000 problems among our
suppliers or customers cause delays in shipping or receiving products.

   We have implemented a multi-phase Year 2000 project consisting of assessment
and remediation, and testing following remediation. We cannot, however, be
certain that we have identified all of the potential risks. Failure by us to
identify and remediate all material Year 2000 risks could adversely affect our
business, financial condition and results of operations. We have identified the
following risks you should be aware of:

  .  we cannot be certain that the entities on whom we rely for certain goods
     and services that are important for our business will be successful in
     addressing all of their software and systems problems in order to
     operate without disruption in the year 2000 and beyond;

  .  our customers or potential customers may be affected by Year 2000 issues
     that may, in part:

     -- cause a reduction, delay or cancellation of customer orders

     -- cause a delay in payments for products shipped

     -- cause customers to expend significant resources on Year 2000
        compliance matters, rather than investing in our products; and

  .  we have not developed a contingency plan related to a failure of our, or
     a third-party's, Year 2000 remediation efforts and may not be prepared
     for such an event.

                                       15
<PAGE>

   Further, while we have made efforts to notify our customers who have
purchased potentially non-compliant products, we cannot be sure that such
customers will not assert claims against us alleging that such products should
have been Year 2000 compliant at the time of purchase, which could result in
costly litigation and divert management's attention.

We expect to use all of the net proceeds of this offering to repay indebtedness
and, as a result, we may be unable to meet our future capital and liquidity
requirements.

   We expect to use all of the net proceeds of this offering to repay
indebtedness. As a result, none of the net proceeds will be available to fund
future operations. We expect that our principal sources of funds following this
offering will be cash generated from operating activities and, if necessary,
borrowings under our senior bank credit facility. We believe that these funds
will provide us with sufficient liquidity and capital resources for us to meet
our current and future financial obligations, as well as to provide funds for
our working capital, capital expenditures and other needs for the foreseeable
future. No assurance can be given, however, that this will be the case. We may
require additional equity or debt financing to meet our working capital
requirements or to fund our research and development efforts. There can be no
assurance that additional financing will be available when required or, if
available, will be on terms satisfactory to us.

One of our stockholders, Bain Capital, Inc., will continue to have significant
influence over our business after this offering, and could delay, deter or
prevent a change of control or other business combination.

   Upon completion of this offering, investment funds affiliated with Bain
Capital, Inc. will hold approximately  % of our outstanding common stock. If
the underwriters' over-allotment is exercised in full, these funds will hold
approximately   % of our outstanding common stock. In addition, three of the
seven directors that will serve on our board following this offering will be
representatives of Bain Capital, Inc. By virtue of such stock ownership and
board representation, Bain Capital, Inc. will continue to have a significant
influence over all matters submitted to our stockholders, including the
election of our directors, and to exercise significant control over our
business, policies and affairs. Such concentration of voting power could have
the effect of delaying, deterring or preventing a change of control of Therma-
Wave or other business combination that might otherwise be beneficial to
stockholders.

Certain provisions of our charter documents and Delaware law could discourage
potential acquisition proposals and could delay, deter or prevent a change in
control.

   Certain provisions of our certificate of incorporation and by-laws may
inhibit changes in control of Therma-Wave not approved by our board of
directors and would limit the circumstances in which a premium may be paid for
the common stock in proposed transactions, or a proxy contest for control of
the board may be initiated. These provisions provide for:

  .  a classified board of directors;

  .  a prohibition on stockholder action through written consents;

  .  a requirement that special meetings of stockholders be called only by
     our chief executive officer or the board of directors;

  .  advance notice requirements for stockholder proposals and nominations;

  .  limitations on the ability of stockholders to amend, alter or repeal the
     by-laws; and

  .  the authority of the board to issue, without stockholder approval,
     preferred stock with such terms as the board may determine.

   We will also be afforded the protections of Section 203 of the Delaware
General Corporation Law, which could have similar effects. See "Description of
Capital Stock."


                                       16
<PAGE>


Trading in our shares could be subject to extreme price fluctuations.

   The market for our shares may be subject to extreme price and volume
fluctuations. We believe that a number of factors, both within and outside our
control, could cause the price of our common stock to fluctuate, perhaps
substantially. The material factors that could cause our common stock to
fluctuate include:

  .  announcements of developments related to our business or our
     competitors' or customers' businesses;

  .  fluctuations in our financial results;

  .  general conditions or developments in the semiconductor and/or
     semiconductor capital equipment industries;

  .  potential sales of our common stock into the marketplace by Therma-Wave
     or our stockholders;

  .  announcements of technological innovations or new or enhanced products
     by us or our competitors or customers;

  .  a shortfall in revenue, gross margin, earnings or other financial
     results or changes in research analysts' expectations; and

  .  the limited number of shares of our common stock traded on a daily
     basis.

   We cannot be certain that the market price of our common stock will not
experience significant fluctuations in the future, including fluctuations that
are material, adverse and unrelated to our performance.

You will experience an immediate and significant dilution in the book value of
your investment.

   Because the initial public offering price is substantially higher than the
book value per share of common stock, purchasers of the common stock in this
offering will be subject to immediate and substantial dilution of $   per
share. See "Dilution."

Future sales by our existing stockholders could adversely affect the market
price of our common stock.

   Future sales of the shares of common stock held by existing stockholders
could have a material adverse effect on the market price of our common stock.
Upon completion of this offering, we expect that:

  .  the     shares of common stock, or    shares if the underwriters' over-
     allotment option is exercised in full, sold in this offering will be
     freely tradeable without restriction under the Securities Act, except
     any such shares which may be acquired by an "affiliate" of Therma-Wave;
     and

  .      shares of common stock held by our existing stockholders will be
     eligible for sale into the public market, subject to compliance with the
     resale volume limitations and other restrictions of Rule 144 under the
     Securities Act, beginning 180 days after the date of this prospectus.

   Beginning 180 days after the completion of this offering, the holders of an
aggregate of approximately    shares of common stock will have certain rights
to require us to register their shares of common stock under the Securities Act
at our expense.


                                       17
<PAGE>

The forward-looking statements contained in this prospectus are based on our
predictions of future performance. As a result, you should not place undue
reliance on these forward-looking statements.

   This prospectus contains certain forward-looking statements, including,
without limitation, statements concerning the conditions in the semiconductor
and semiconductor capital equipment industries, our operations, economic
performance and financial condition, including in particular statements
relating to our business and growth strategy and product development efforts.
The words "believe," "expect," "anticipate," "intend" and other similar
expressions generally identify forward-looking statements. Potential investors
are cautioned not to place undue reliance on these forward-looking statements,
which speak only as of their dates. These forward-looking statements are based
largely on our current expectations and are subject to a number of risks and
uncertainties, including, without limitation, those identified under "Risk
Factors" and elsewhere in this prospectus and other risks and uncertainties
indicated from time to time in our filings with the SEC. Actual results could
differ materially from these forward-looking statements. In addition, important
factors to consider in evaluating such forward-looking statements include
changes in external market factors, changes in our business or growth strategy
or an inability to execute our strategy due to changes in our industry or the
economy generally, the emergence of new or growing competitors and various
other competitive factors. In light of these risks and uncertainties, there can
be no assurance that the matters referred to in the forward-looking statements
contained in this prospectus will in fact occur.

                                       18
<PAGE>

                                USE OF PROCEEDS

   We estimate that our net proceeds from the sale of    shares of common stock
in this offering will be approximately $22.7 million. If the underwriters'
over-allotment option is exercised in full, our net proceeds will be
approximately $26.1 million assuming an initial public offering price of $
per share, the midpoint of the range set forth on the cover page of this
prospectus. We intend to use all of the net proceeds to redeem or repurchase
senior notes and to pay the redemption premium, if any, and accrued and unpaid
interest thereon.

   Our senior notes mature on May 15, 2004, and bear interest at the rate of 10
5/8% per annum. Under the terms of the indenture relating to the senior notes,
we are required to use the net proceeds from this offering, assuming we receive
net proceeds equal to or in excess of $25.0 million, to make an offer to redeem
up to 35% of the aggregate principal amount of the senior notes outstanding at
a price equal to 110.625% of the principal amount thereof plus accrued and
unpaid interest thereon. If we are not required to make this redemption offer
because we receive less than $25.0 million in net proceeds from this offering,
we will repurchase the senior notes either through privately-negotiated
transactions, open market purchases or a combination of the foregoing. Market
conditions at the time of our voluntary repurchases will dictate the premium
that we will pay. The amount of senior notes we redeem or repurchase will be
equal to the aggregate amount of net proceeds we receive in the offering
divided by the premium associated with such redemption or repurchase. Pending
such use, we will invest such proceeds in short-term, interest-bearing,
investment-grade securities. See "Description of Certain Indebtedness--Senior
Notes."

                              THE RECLASSIFICATION

   We currently have three classes of common stock, designated as Class A
common stock, Class B common stock and Class L common stock. The Class A common
stock and Class B common stock are identical, except that the Class B common
stock is non-voting and is convertible on a share-for-share basis into Class A
common stock at any time following this offering. The Class L common stock is
identical to the Class A common stock, except that each share of Class L common
stock is entitled to a preferential payment upon any distribution by us to
holders of our capital stock, whether by dividend, liquidating distribution or
otherwise, equal to the original cost of such share ($19.085) plus an amount
which accrues on a daily basis at a rate of 12.0% per annum, compounded
annually. This preferential amount is referred to herein as the "Preference
Amount." As of March 31, 1999, the Preference Amount was $23.65 per share of
Class L common stock issued at the time of the recapitalization.

   Immediately prior to the completion of this offering, we will amend our
certificate of incorporation in order to reclassify:

  .  all of the outstanding shares of Class A common stock and Class B common
     stock into a single class of common stock on a share-for-share basis and

  .  all of the outstanding shares of Class L common stock into one share of
     common stock plus an additional number of shares of common stock
     determined by dividing the Preference Amount by the value of a share of
     common stock based on the initial public offering price.

   The foregoing is referred to in this prospectus as the "Reclassification."

   Assuming an initial public offering price of $   per share, the mid-point of
the range set forth on the cover page of this prospectus, and a closing date of
     , 1999 for this offering, an aggregate of    shares of common stock will
be issued in exchange for the outstanding shares of Class L common stock in
connection with the Reclassification. The actual number of shares of common
stock that will be issued as a result of the Reclassification is subject to
change based on the actual offering price and the closing date of this
offering. Fractional shares otherwise issuable as a result of the
Reclassification will be rounded to the nearest whole number. See "Description
of Capital Stock."

                                       19
<PAGE>

                                 CAPITALIZATION

   The following table sets forth the cash and cash equivalents and the
capitalization of Therma-Wave as of March 31, 1999 on an actual basis and on an
as adjusted basis to reflect: (1) the Reclassification and (2) the sale by us
of     shares of common stock pursuant to this offering, assuming an offering
price of $    per share, the midpoint of the range set forth on the cover page
of this prospectus, and the application of the net proceeds therefrom as
described under "Use of Proceeds." This table should be read in conjunction
with the "Selected Historical Financial Data" included elsewhere in this
prospectus.

<TABLE>
<CAPTION>
                                                             March 31, 1999
                                                          ----------------------
                                                           Actual    As Adjusted
                                                          ---------  -----------
                                                             (in thousands)
<S>                                                       <C>        <C>
Cash and cash equivalents...............................  $  20,245   $ 20,245
                                                          =========   ========
Long-term obligations:
  Bank Credit Facility..................................  $     --    $    --
  Senior Notes (1)......................................    115,000     95,258
  Other long-term obligations...........................      2,817      2,817
                                                          ---------   --------
    Total long-term obligations.........................    117,817     98,075
Mandatorily redeemable convertible preferred stock (2)..     15,347     15,347
Stockholders' equity (net capital deficiency):
  Preferred stock, $0.01 par value, 5,000,000 shares
   authorized; no shares issued on an actual and as
   adjusted basis.......................................        --         --
  Common stock, $0.01 par value, 35,000,000 shares
   authorized; no shares issued on an actual basis;
   shares issued and outstanding on an as adjusted
   basis (3)............................................        --         --
  Class A common stock, $0.01 par value, 20,000,000
   shares authorized; 9,073,532 shares issued and
   outstanding on an actual basis and no shares
   authorized, issued and outstanding on an as adjusted
   basis................................................         91        --
  Class B common stock, $0.01 par value, 4,000,000
   shares authorized; 1,118,092 shares issued and
   outstanding on an actual basis and no shares
   authorized, issued and outstanding on an as adjusted
   basis................................................         11        --
  Class L common stock, $0.01 par value, 2,000,000
   shares authorized; 1,008,170 shares issued and
   outstanding on an actual basis and no shares
   authorized, issued and outstanding on an as adjusted
   basis................................................         10        --
  Additional paid-in capital (3)........................     19,754     42,516
  Accumulated deficit (4)...............................   (105,416)  (108,892)
  Other.................................................     (1,421)    (1,421)
                                                          ---------   --------
    Total stockholders' equity (net capital
     deficiency)........................................    (86,971)   (67,797)
                                                          ---------   --------
    Total capitalization................................  $  46,193   $ 45,625
                                                          =========   ========
</TABLE>
- --------
(1) Assumes all net proceeds are used to redeem senior notes at a redemption
    price of 110.625% of the aggregate principal amount thereof.

(2) We issued shares of preferred stock as part of the recapitalization. The
    fair value of the preferred stock at March 31, 1999 of $15,347 represents
    the liquidation value plus accrued dividends. Dividends on the preferred
    stock accrue at a rate of 6.0% per annum. The preferred stock has a
    scheduled redemption date of May 17, 2004 and is otherwise redeemable by us
    at any time at our sole discretion. See "Description of Capital Stock--
    Preferred Stock."

(3) Par value of common stock on an as adjusted basis has not been presented as
    the number of shares to be sold in this offering has not yet been
    determined. Consequently, the value which would have otherwise been
    ascribed to the common stock on an as adjusted basis has been included in
    additional paid-in capital.

(4) The As Adjusted, Accumulated deficit balance at March 31, 1999 includes an
    extraordinary charge of $3,476 relating to the redemption of a portion of
    our senior notes (assuming a redemption premium of 110.625%) and the pro
    rata portion of deferred financing costs.

                                       20
<PAGE>

                                DIVIDEND POLICY

   We have not in the past paid, and do not expect for the foreseeable future
to pay, dividends on our common stock. Instead, we anticipate that all of our
earnings in the foreseeable future will be used for working capital purposes
and to reduce indebtedness. The payment of dividends by us to holders of our
common stock is prohibited by our bank credit facility and is restricted by our
indenture relating to the senior notes. Any future determination to pay
dividends will be at the discretion of our board of directors and will depend
upon, among other factors, our results of operations, financial condition,
capital requirements and contractual restrictions.

                                    DILUTION

   Our pro forma net tangible book value as of March 31, 1999 was $    million,
or $    per share of common stock. Pro forma net tangible book value
(deficiency) per share is determined by dividing our tangible net capital
deficiency by the aggregate number of shares of common stock outstanding,
assuming the Reclassification had taken place on March 31, 1999. For purposes
of the foregoing, we calculated our net capital deficiency by subtracting our
intangible assets and total liabilities from our total assets. After giving
effect to the sale of the shares of common stock offered hereby, at an assumed
offering price of $  per share, the midpoint of the range set forth on the
cover page of this prospectus, and the receipt and application of the net
proceeds therefrom, pro forma net tangible book value as of March 31, 1999
would have been approximately $    million, or $    per share. This represents
an immediate increase in pro forma net tangible book value of $    per share to
the current stockholders and an immediate dilution in pro forma net tangible
book value of $    per share to purchasers of common stock in the offering. The
following table illustrates this per share dilution:

<TABLE>
<S>                                                                   <C>  <C>
Assumed initial public offering price per share......................      $
  Pro forma net tangible book value (deficiency) per share at March
   31, 1999.......................................................... $
  Increase per share attributable to new investors...................
                                                                      ----
Pro forma net tangible book value per share after this offering......
                                                                           ----
Net tangible book value dilution per share to new investors (1)......      $
                                                                           ====
</TABLE>
- --------
(1) Dilution is determined by subtracting pro forma net tangible book value per
    share after the offering from the offering price per share.

   The following table summarizes, on a pro forma basis, as of March 31, 1999,
the number of shares purchased, the total consideration paid (or to be paid)
and the average price per share paid (or to be paid) by the existing
stockholders and the purchasers of common stock in the offering, at an assumed
offering price of $   per share, the midpoint of the range set forth on the
cover page of this prospectus, before deducting the estimated offering expenses
and underwriting discounts and commissions:

<TABLE>
<CAPTION>
                                         Shares         Total      Average Price
                                       Purchased    Consideration    Per Share
                                     -------------- -------------- -------------
                                     Number Percent Amount Percent
                                     ------ ------- ------ -------
<S>                                  <C>    <C>     <C>    <C>     <C>
Existing stockholders...............              %  $           %     $
New investors.......................                                   $
                                      ---    -----   ----   -----
  Total.............................         100.0%  $      100.0%
                                      ===    =====   ====   =====
</TABLE>

   As of March 31, 1999, there were an aggregate of: (1) 1,778,086 shares of
common stock issuable upon the exercise of outstanding options granted under
our stock plans, of which 1,196,403 were then exercisable, at exercise prices
ranging from $6.00 to $15.89 per share; (2)    additional shares of common
stock expected to be reserved for grants, awards or sale under the 1999 Equity
Incentive Plan or sale under the 1999 Employee Stock Purchase Plan; and (3)
748,739 shares of common stock issuable upon the conversion of our preferred
stock. See "Management--Stock Plans."

                                       21
<PAGE>

                       SELECTED HISTORICAL FINANCIAL DATA
                     (in thousands, except per share data)

   The following selected historical financial data as of March 31, 1998 and
1999, and for the fiscal years ended March 31, 1997, 1998 and 1999 have been
derived from our audited consolidated financial statements and notes thereto,
which are included elsewhere in this prospectus. The selected historical
financial data as of March 31, 1995, 1996 and 1997 and for the fiscal years
ended March 31, 1995 and 1996 were derived from our audited consolidated
financial statements, which do not appear elsewhere in this prospectus. Our
fiscal year refers to the 52/53 week period ending on the Sunday on or nearest
preceding March 31 of each year for periods prior to 1997 and the Sunday on or
following March 31 of each year for periods thereafter. The selected historical
financial data should be read in conjunction with "Management's Discussion and
Analysis of Financial Condition and Results of Operations" and the Consolidated
Financial Statements and accompanying notes thereto included elsewhere in this
prospectus.

<TABLE>
<CAPTION>
                                               Fiscal Year
                                ----------------------------------------------
                                 1995     1996      1997      1998      1999
                                -------  -------  --------  --------  --------
<S>                             <C>      <C>      <C>       <C>       <C>
Statement of Operations Data
 (1):
Net revenues..................  $55,675  $79,293  $109,493  $115,459  $ 66,207
Cost of revenues..............   25,024   35,027    49,795    55,683    36,827
                                -------  -------  --------  --------  --------
Gross margin..................   30,651   44,266    59,698    59,776    29,380
Operating expenses:
 Research and development.....    5,942   10,072    13,050    19,057    15,130
 Selling, general and
  administrative..............   13,299   18,704    22,004    24,589    17,870
 Amortization of goodwill and
  purchased intangibles.......    1,912    1,912     1,275       --        --
 Recapitalization and other
  non-recurring expenses......      --       --        --      4,188       --
 Expenses relating to
  operating cost
  improvements................      --       --        --        --      1,057
                                -------  -------  --------  --------  --------
  Total operating expenses....   21,153   30,688    36,329    47,834    34,057
                                -------  -------  --------  --------  --------
Operating income (loss).......    9,498   13,578    23,369    11,942    (4,677)
Interest expense..............    1,998    1,722     1,621    12,930    14,060
Interest income...............     (102)    (247)     (346)     (753)     (651)
Other (income) expense, net...      115      138       (14)      194        (6)
                                -------  -------  --------  --------  --------
Income (loss) before provision
 for income taxes.............    7,487   11,965    22,108      (429)  (18,080)
Provision (benefit) for income
 taxes........................      --     4,684     9,007       604    (2,350)
                                -------  -------  --------  --------  --------
Net income (loss).............  $ 7,487  $ 7,281  $ 13,101  $ (1,033) $(15,730)
                                =======  =======  ========  ========  ========
Net income (loss) attributable
 to common stockholders (2)...  $ 7,487  $ 7,281  $ 13,101  $ (1,771) $(16,562)
                                =======  =======  ========  ========  ========
Net income (loss) per
 share (3):
 Basic........................  $  0.25  $  0.16  $   0.29  $  (0.27) $  (1.86)
 Diluted......................  $  0.24  $  0.16  $   0.29  $  (0.27) $  (1.86)
Weighted average common shares
 outstanding:
 Basic........................   30,412   45,515    45,515    13,540     9,397
 Diluted......................   31,497   45,515    45,515    13,540     9,397

Pro Forma Statement of
 Operations Data (4):
Pro forma net income..........
Pro forma net income per
 share:
 Basic........................
 Diluted......................
Pro forma weighted average
 common shares outstanding:
 Basic........................
 Diluted......................

Other Financial Data:
EBITDA (excluding non-
 recurring charges) (5).......  $12,496  $17,185  $ 27,113  $ 19,723  $    974
Cash provided by (used in)
 operating activities.........    1,876    5,867    11,860     8,113       745
Cash used in investing
 activities...................   (2,048)  (4,965)   (1,575)   (2,900)   (1,389)
Cash provided by (used in)
 financing activities.........    5,701   (1,541)   (1,234)   (1,532)      467
Capital expenditures..........    1,616    4,361     1,091     2,900       862
</TABLE>

                                       22
<PAGE>

<TABLE>
<CAPTION>
                                               March 31,
                         ---------------------------------------------------------
                                                                           As
                          1995     1996    1997     1998      1999    Adjusted (6)
                         -------  ------- ------- --------  --------  ------------
<S>                      <C>      <C>     <C>     <C>       <C>       <C>
Balance Sheet Data:
Cash and cash
 equivalents............ $ 8,329  $ 7,690 $16,741 $ 20,422  $ 20,245    $ 20,245
Working capital.........  17,240   23,740  38,720   43,348    31,394      32,204
Total assets............  45,081   53,056  68,620   89,762    72,352      70,973
Long-term debt..........  23,100   23,100  23,100  115,000   115,000      95,258
Mandatorily redeemable
 convertible preferred
 stock (2)..............     --       --      --    14,515    15,347      15,347
Stockholders' equity
 (net capital
 deficiency)............    (379)   6,903  20,145  (70,990)  (86,971)    (67,797)
</TABLE>
- --------

(1) On May 16, 1997, we effected the recapitalization. We issued $115 million
    in aggregate principal amount of 10 5/8% senior notes in connection with
    the recapitalization.

(2) We issued shares of preferred stock as part of the recapitalization. The
    fair value of the preferred stock at March 31, 1999 of $15,347 represents
    the liquidation value plus accrued dividends. Dividends on the preferred
    stock accrue at a rate of 6.0% per annum. The preferred stock has a
    scheduled redemption date of May 17, 2004 and is otherwise redeemable by us
    at any time at our sole discretion. See "Description of Capital Stock--
    Preferred Stock."

(3) For the calculation of net loss per share for the years ended March 31,
    1998 and 1999: (a) net loss represents the loss attributable to the
    weighted average number of shares of Class A common stock, Class B common
    stock and, prior to the recapitalization, common stock outstanding after
    giving effect to the 12% yield on Class L common stock and (b) weighted
    average number of shares outstanding excludes unvested Class B common
    stock.

(4) The pro forma statement of operations data give pro forma effect to: (1)
    the reclassification of our three classes of common stock into a single
    class and (2) this offering and the application of the net proceeds
    therefrom as described under "Use of Proceeds," as if each had occurred as
    of the beginning of the periods presented. The unaudited pro forma
    statement of operations data does not purport to represent what our results
    of operations actually would have been if such transactions had actually
    occurred as of the beginning of the periods presented or what such results
    will be for any future periods.

(5) "EBITDA" is defined herein as income before income taxes, plus
    depreciation, amortization, interest expense, interest income and other
    non-operating (income) expenses, net. "EBITDA (excluding non-recurring
    charges)" in the fiscal year ended March 31, 1998 and 1999 does not include
    $4,188 and $1,057 in recapitalization and other non-recurring expenses,
    respectively. Including such non-recurring charges, EBITDA would have been
    reduced to $15,537 and $(83) for fiscal 1998 and 1999, respectively. We
    believe EBITDA and EBITDA (excluding non-recurring charges) are widely
    accepted financial indicators of a company's historical ability to service
    and/or incur indebtedness. However, EBITDA and EBITDA (excluding non-
    recurring charges) should not be considered as an alternative to net income
    as a measure of operating results or to cash flows as a measure of
    liquidity in accordance with generally accepted accounting principles.
    Additionally, EBITDA and EBITDA (excluding non-recurring charges) as
    defined herein may not be comparable to similarly titled measures reported
    by other companies.

(6) Adjusted to reflect the sale of     shares of common stock and the
    application of the net proceeds as described under "Use of Proceeds."

                                       23
<PAGE>

                      MANAGEMENT'S DISCUSSION AND ANALYSIS
                OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS

General

   We are a worldwide leader in the development, manufacture, marketing and
service of process control metrology systems for use in the manufacture of
semiconductors. Process control metrology is used to monitor process parameters
in order to enable semiconductor manufacturers to reduce feature size, increase
wafer size, increase equipment productivity and improve device performance. Our
current process control metrology systems are principally used to measure ion
implantation and thin film deposition and removal. We have developed two
product families of process control metrology systems: Therma-Probe systems and
Opti-Probe systems.

   Therma-Probe Product Family. Therma-Probe systems utilize our proprietary
thermal wave technology and are the predominant non-destructive process control
metrology systems used to measure the critical ion implantation process on
product wafers in the fabrication of semiconductors.

   Opti-Probe Product Family. Opti-Probe systems significantly improve upon
existing thin film metrology systems by successfully integrating different
measurement technologies and utilizing our proprietary optical technologies.

   We derive our revenues from system sales, sales of replacement and spare
parts, and service contracts. During the year ended March 31, 1999, we derived
approximately 78% of our revenues from system sales, 12% from sales of
replacement and spare parts, including associated labor, and 10% from service
contracts. In fiscal 1998, we derived approximately 89% of our revenues from
system sales, 6% from sales of replacement and spare parts, including
associated labor, and 5% from service contracts. Revenue from system sales,
replacement and spare parts is generally recognized at the time of shipment.
Revenue on service contracts is deferred and recognized on a straight-line
basis over the period of the contract. During fiscal 1998 and 1999, our two
largest customers were U.S. based companies. These companies contributed to
system, replacement and spare parts, and service contract revenues.

   International sales accounted for approximately 52% and 69% of our total
revenues for fiscal 1998 and 1999, respectively. We anticipate that
international sales will continue to account for a significant portion of our
revenue in the foreseeable future. A substantial portion of our international
sales are denominated in U.S. dollars. As a result, changes in the values of
foreign currencies relative to the value of the U.S. dollar can render our
products comparatively more expensive. Although we have not been negatively
impacted in the past by foreign currency changes in Japan, Korea, Taiwan and
Europe, such conditions could negatively impact our international sales in
future periods.

   We were acquired by Toray and Shimadzu in fiscal 1992. As a result, we
incurred substantial interest expense and amortization expense from goodwill
and purchased intangibles in periods prior to the recapitalization. In May
1997, we effected the recapitalization. We incurred significant indebtedness in
connection with the recapitalization.

   On June 22 and September 24, 1998, we announced and implemented an operating
cost improvement program aimed at bringing operating expenses in line with our
current operating environment. These efforts were in response to the continued
cutbacks in capital equipment investment by semiconductor manufacturers. As a
result of the implementation of this program, we recorded a charge of $1.1
million in fiscal 1999, which consisted principally of severance and other
related charges.

   If this offering is completed with net proceeds resulting therefrom of
approximately $22.7 million, we may incur in the first quarter of fiscal 2000 a
non-recurring extraordinary charge for early debt extinguishment of a maximum
of $3.5 million, net of tax, relating primarily to the redemption premium on
our senior notes.

                                       24
<PAGE>

Results of Operations

   The following table summarizes our historical results of operations as a
percentage of net revenues for the periods indicated. The historical financial
data for fiscal 1997, 1998 and 1999 were derived from our audited consolidated
financial statements included elsewhere in this prospectus. The information
contained in this table should be read in conjunction with "Selected Historical
Financial Data," and the Consolidated Financial Statements and accompanying
notes thereto included elsewhere in this prospectus.

<TABLE>
<CAPTION>
                                                            Fiscal Year
                                                         ---------------------
                                                         1997    1998    1999
                                                         -----   -----   -----
<S>                                                      <C>     <C>     <C>
Statement of Operations Data (1):
Net revenues............................................ 100.0%  100.0%  100.0%
Cost of revenues........................................  45.5    48.2    55.6
                                                         -----   -----   -----
Gross margin............................................  54.5    51.8    44.4
Operating expenses:
  Research and development expenses.....................  11.9    16.5    22.9
  Selling, general and administrative expenses..........  20.1    21.3    27.0
  Amortization of goodwill and purchased intangibles....   1.2     --      --
  Recapitalization and other non-recurring expenses.....   --      3.6     --
  Expenses relating to operating cost improvements......   --      --      1.6
                                                         -----   -----   -----
    Total operating expenses............................  33.2    41.4    51.5
                                                         -----   -----   -----
Operating income (loss).................................  21.3    10.4    (7.1)
Interest expense........................................   1.5    11.2    21.2
Interest income.........................................  (0.4)   (0.6)   (1.0)
Other expense, net......................................   --      0.2     --
                                                         -----   -----   -----
Income (loss) before provision for income taxes.........  20.2    (0.4)  (27.3)
Provision (benefit) for income taxes....................   8.2     0.5    (3.5)
                                                         -----   -----   -----
Net income (loss).......................................  12.0%   (0.9%) (23.8%)
                                                         =====   =====   =====
Other Financial Data:
EBITDA (excluding non-recurring charges) (2)............  24.8%   17.1%   (1.5%)
Cash provided by operating activities...................  10.8%    7.0%    1.1%
Cash used in investing activities.......................  (1.4%)  (2.5%)  (2.1%)
Cash provided by (used in) financing activities.........  (1.1%)  (1.3%)   0.7%
Capital expenditures....................................   1.0%    2.5%    1.3%
</TABLE>
- --------

(1) On May 16, 1997, we effected the recapitalization. We issued $115 million
    in aggregate principal amount of 10 5/8% senior notes in connection with
    the recapitalization.

(2) "EBITDA" is defined herein as income before taxes, plus depreciation,
    amortization, interest expense, interest income and other (income)
    expenses, net. "EBITDA (excluding non-recurring charges)" as a percent of
    sales for the fiscal year ended March 31, 1998 and 1999 does not include
    recapitalization and other non-recurring expenses. Including such non-
    recurring charges, EBITDA as a percent of sales would have been 13.5% and
    (0.1%) for fiscal 1998 and 1999, respectively.

Fiscal Year Ended March 31, 1999 Compared to Fiscal Year Ended March 31, 1998

   Net Revenues. Net revenues for the fiscal year ended March 31, 1999 and 1998
were $66.2 million and $115.5 million, respectively. Compared to the
corresponding period of fiscal 1998, net revenues decreased $49.3 million or
42.7%. The decline in revenues is attributable to the current downturn in the
global semiconductor industry due primarily to excess dynamic random access
memory ("DRAM") capacity and a slowdown in product demand as a result of lower
than expected sales of high-end personal computers and the economic conditions
in the Asia Pacific region. This slowdown has caused the semiconductor industry
to reduce or delay both purchases of semiconductor manufacturing equipment and
construction of new fabrication

                                       25
<PAGE>


facilities. As a result of these industry factors, both the Therma-Probe and
Opti-Probe products experienced lower unit sales and average selling prices
attributing to a decline in system sales from fiscal 1998 to 1999. The decline
in system sales is primarily attributable to decreased Opti-Probe sales as a
result of these industry factors. Therma-Probe sales decreased at a lesser rate
as such systems sales began decreasing during fiscal 1998 from the decrease in
the number of new semiconductor manufacturing facilities being constructed.
Revenue from spare parts and service contracts increased slightly as our
customer base continued to expand and require servicing.

   Net revenues attributable to international sales for the fiscal years ended
March 31, 1998 and 1999 accounted for 52% and 69% of our total revenues for
such periods, respectively. Revenue from the U.S. decreased approximately 60%
from fiscal 1998 to 1999. This decrease was primarily caused by the slowdown in
the personal computer market and increased capital investments in European fab
facilities, thereby resulting in an increase in our European revenues. Revenue
from Asia decreased approximately 53% from fiscal 1998 to 1999 as a result of
the economic conditions in the Asia Pacific region. Our sales to customers in
Asian markets represented approximately 40% and 33% of total net revenues for
fiscal 1998 and 1999, respectively. No single customer in Asia accounted for
more than 10% of our total net revenues in fiscal 1998 or 1999.

   Historically, we have experienced volatility from Asian markets. Over the
last 18 months, countries in the Asia Pacific region, including Japan, Korea
and Taiwan, have experienced weaknesses in their currency, banking and equity
markets. These weaknesses began to adversely affect our sales to semiconductor
device and capital equipment manufacturers located in these regions in the
fourth quarter of calendar 1997 and have continued to adversely affect them in
calendar 1999. Although we have recently received an increased level of orders
from customers in the Asia Pacific region, turbulence in the Asian markets
could adversely affect our sales at least through the end of calendar 1999.

   Gross Margin. Gross margin decreased 50.8% from $59.8 million in fiscal 1998
to $29.4 million in fiscal 1999. As a percentage of net revenues, gross margin
decreased from 51.8% in fiscal 1998 to 44.4% in fiscal 1999. The decrease in
gross margin was primarily attributable to the decline in revenues. System
gross margins were reduced as a result of lower average selling prices and
relatively fixed manufacturing overhead costs. Replacement and spare parts and
service contract gross margins were reduced as a result of our expanded service
organization. The results of our operating cost improvement program did not
wholly offset the decline in revenues we experienced.

   Research and Development ("R&D") Expenses. R&D expenses were $19.1 million
and $15.1 million for fiscal 1998 and 1999, respectively. Compared to the
corresponding period of fiscal 1998, R&D expenses decreased $4.0 million, or
20.6% for fiscal 1999. R&D expenses as a percentage of net revenues for fiscal
1999 increased to 22.9% from 16.5% for fiscal 1998. R&D expenses relating to
the new Opti-Probe 5000 series and 300 millimeter products have decreased from
prior periods as these projects near completion. Although we are currently in a
downturn, we believe that technical leadership is essential to our success and
expect to continue to commit significant resources to R&D projects. In the near
term, we expect our R&D expenses to increase in both absolute dollar terms and
as a percentage of our net revenues.

   Selling, General and Administrative ("SG&A") Expenses. SG&A expenses were
$24.6 million and $17.9 million for fiscal 1998 and 1999, respectively.
Compared to the corresponding period of fiscal 1998, SG&A expenses decreased
$6.7 million, or 27.3%. SG&A expenses as a percentage of net revenues increased
to 27.0% in fiscal 1999 from 21.3% in fiscal 1998 primarily due to lower
revenue levels. The decrease in SG&A expenses was due primarily to the decrease
in sales commissions as a result of lower revenues and the decrease in
headcount because of the operating cost improvement program. During fiscal
1999, the decline in overall revenues exceeded the benefits generated from the
operating cost improvement program.

   Recapitalization and Other Non-Recurring Expenses. Recapitalization and
other non-recurring expenses were $4.2 million, which consisted mainly of non-
cash charges related to the arrangements for our executive officers in
connection with the recapitalization.

                                       26
<PAGE>

   Expenses Relating to Operating Cost Improvements. On June 22 and September
24, 1998, we announced and implemented an operating cost improvement program
aimed at bringing operating expenses in line with our current operating
environment. All terminated employees were notified at the time the program was
announced. Certain leased facilities and fixed assets were consolidated. Total
cash outlays for fiscal 1999 were $832,000. Non-cash charges of $100,000 were
primarily for asset write-offs. The balance of $125,000 at March 31, 1999
primarily represents cash payments and will be utilized in fiscal 2000.

   Interest Expense. Interest expense for fiscal 1998 and 1999 were
$12.9 million and $14.1 million, respectively. As a percentage of net revenues,
interest expense increased from 11.2% in fiscal 1998 to 21.2% in fiscal 1999.
The increased interest expense from the prior fiscal year is attributable to
the additional debt incurred as part of the recapitalization.

   Provision for Income Taxes. For fiscal 1998 and 1999, we recorded a
provision for income taxes of $0.6 million and a benefit for income taxes of
$2.4 million, respectively. Our tax benefit for fiscal 1999 reflects a tax
benefit rate of 13% based upon our loss carryback potential.

   Net Loss. Net loss for fiscal 1998 and 1999 were $1.0 million and $15.7
million, respectively, for the reasons described above.

Fiscal Year Ended March 31, 1998 Compared to Fiscal Year Ended March 31, 1997

   Net Revenues. Net revenues for the fiscal year ended March 31, 1998
increased by $6.0 million, or 5.4%, to $115.5 million from $109.5 million for
the fiscal year ended March 31, 1997. This is primarily attributed to higher
Opti-Probe sales and increased service revenues, partially offset by a decrease
in Therma-Probe sales. Therma-Probe sales decreased as a result of the decrease
in the number of new semiconductor manufacturing facilities being constructed.
International sales, primarily export sales from the United States to foreign
countries, accounted for approximately 52.3% and 59.7% of our total revenues
for fiscal 1998 and 1997, respectively.

   Gross Margin. Gross margin for the fiscal year ended March 31, 1998
increased by $0.1 million to $59.8 million from $59.7 million for the fiscal
year ended March 31, 1997. As a percentage of net revenues, gross margin for
the fiscal year ended March 31, 1998 decreased to 51.8% from 54.5% for the
comparable period ended March 31, 1997. This decrease is primarily attributable
to increased investment in our service organization. As our customer base
expanded, our service organization grew to support a rapid increase in the
number of systems in the field in order to maintain a high level of customer
service. This directly affected replacement and spare part, and service
contract gross margins. Gross margins in product sales remained relatively
constant from year to year.

   Research and Development Expenses. R&D expenses were $19.1 million and $13.1
million for the fiscal years ended March 31, 1998 and 1997, respectively.
Compared to fiscal year 1997, R&D expenses increased $6.0 million, or 46.0%.
R&D expenses as a percentage of net revenues for the fiscal year ended March
31, 1998 increased to 16.5% from 11.9% for the comparable period ended March
31, 1997. The increase in R&D expenses is due to the increased headcount and
increases in project expense related to new product development. We believe
that technical leadership is essential to our success and expect to continue to
commit significant resources to research and development projects.

   Selling, General and Administrative Expenses. SG&A expenses were $24.6
million and $22.0 million and, as a percentage of net revenues, were 21.3% and
20.1% for the fiscal years ended March 31, 1998 and 1997, respectively. The
increase is a result of increased spending in marketing and related expenses
for new products, slightly offset by a decrease in sales commissions.

   Amortization of Goodwill and Purchased Intangibles. Amortization of goodwill
and purchased intangibles decreased $1.3 million from the prior year as such
intangibles related to the acquisition of Therma-Wave by Toray and Shimadzu in
December 1991 were fully amortized in fiscal year 1997.


                                       27
<PAGE>

   Recapitalization and Other Non-Recurring Expenses. Recapitalization and
other non-recurring expenses for the year ended March 31, 1998 was $4.2
million. Such charges were primarily non-cash charges related to the
arrangements for our executive officers in connection with the
recapitalization.

   Operating Income. Operating income for the fiscal year ended March 31, 1998
decreased by $11.5 million, or 48.9%, to $11.9 million from $23.4 million for
the fiscal year ended March 31, 1997. As a percentage of net revenues,
operating income for the fiscal year ended March 31, 1998 decreased to 10.4%
from 21.3% for the comparable period ended March 31, 1997.

   Interest Expense. Interest expense for the fiscal year ended March 31, 1998
increased by $11.3 million to $12.9 million from $1.6 million for the year
ended March 31, 1997. As a percentage of net revenues, interest expense for the
fiscal year ended March 31, 1998 was 11.2% as compared to 1.5% for the year
ended March 31, 1997. The increased interest expense is attributed to the
additional debt incurred as part of the recapitalization.

   Provisions for Income Taxes. Income taxes for the fiscal year ended March
31, 1998 decreased by $8.4 million, or 93.3%, to $0.6 million from $9.0 million
for the year ended March 31, 1997. The effective tax rate increased to 140.8%
from 40.7%, primarily due to the increase in the valuation allowance and other
items, offset by the benefit from our foreign sales corporation.

   Net (Loss) Income. For the reasons stated above, earnings for the fiscal
year ended March 31, 1998 decreased to a net loss of $1.0 million from $13.1
million of net income for the fiscal year ended March 31, 1997.

Quarterly Results of Operations

   We have experienced, and expect to continue to experience, significant
fluctuations in our quarterly results. Our expense levels are based, in part,
on expectations of future revenues. If revenue levels in a particular quarter
do not meet expectations, operating results are adversely affected. A variety
of factors could have an influence on the level of our revenues in a particular
quarter. These factors include:

  .  product and customer mix,
  .  mix of domestic and international sales,
  .  specific economic conditions in the semiconductor and/or semiconductor
     capital equipment industries,
  .  the timing of the receipt of orders from major customers,
  .  customer cancellations or postponement of shipments,
  .  specific feature requests by customers,
  .  production delays or manufacturing inefficiencies,
  .  exchange rate fluctuations,
  .  management decisions to commence or discontinue product lines,
  .  our ability to design, introduce and manufacture new products on a cost
     effective and timely basis,
  .  the introduction of new products by us or our competitors,
  .  the timing of research and development expenditures,
  .  acquisitions, strategic alliances and the future development of
     marketing and service capabilities, and
  .  increased price competition.

                                       28
<PAGE>

   The following table sets forth our unaudited operating results for our last
eight quarters. The information for each of the quarters is unaudited but
includes all adjustments, consisting only of normal recurring adjustments,
which management considers necessary for the basic presentation thereof.

<TABLE>
<CAPTION>
                                Fiscal Year 1998                    Fiscal Year 1999
                         ----------------------------------  ----------------------------------
                           Q1       Q2       Q3       Q4       Q1       Q2       Q3       Q4
                         -------  -------  -------  -------  -------  -------  -------  -------
                                                 (in thousands)
<S>                      <C>      <C>      <C>      <C>      <C>      <C>      <C>      <C>
Statement of Operations Data:
Net revenues............ $28,205  $28,286  $29,664  $29,304  $15,246  $15,196  $17,161  $18,604
Gross margin............  14,942   15,148   15,091   14,595    6,267    6,313    8,204    8,596
Operating income
 (loss).................   2,540    2,313    3,168    3,921   (3,546)  (2,586)     608      847
Net income (loss).......     311     (671)    (186)    (487)  (6,090)  (5,010)  (2,281)  (2,349)

Other Financial Data:
EBITDA (excluding non-
 recurring charges)
 (1).................... $ 6,257  $ 4,149  $ 4,385  $ 4,936  $(1,876) $  (992) $ 1,823  $ 2,019
Cash provided by (used
 in):
 Operating activities...    (969)   4,817     (506)   4,771   (3,533)    (370)  (3,752)   8,400
 Investing activities...  (1,939)    (936)    (818)     793     (250)    (222)    (279)    (638)
 Financing activities...     184     (284)     404   (1,836)     (30)      69      593     (165)
</TABLE>
- --------
(1) EBITDA (excluding non-recurring charges) in the first, second and third
    quarters of fiscal 1998 does not include $2,888, $1,000 and $300,
    respectively, in recapitalization and other non-recurring expenses.
    Including such non-recurring charges, EBITDA for such periods would have
    been reduced to $3,369, $3,149 and $4,085, respectively. EBITDA (excluding
    non-recurring charges) in the first and second quarters of fiscal 1999 do
    not include $582 and $475, respectively, in expenses relating to operating
    cost improvements. Including such non-recurring charges, EBITDA for such
    periods would have been reduced to $(2,458) and $(1,467), respectively.

Backlog

   At March 31, 1999, our backlog was $16.0 million compared to $36.5 million
at March 31, 1999. Our backlog consists of product orders for which a customer
purchase order has been received and accepted and which is scheduled for
shipment within six months. Orders that are scheduled for shipment beyond the
six-month window are not included in backlog until they fall within the six-
month window. Orders are subject to rescheduling or cancellation by the
customer, usually without penalty. Backlog also consists of recurring fees
payable under support contracts with our customers and orders for spare parts
and billable service. Because of possible changes in product delivery schedules
and cancellation of product orders and because our sales will sometimes reflect
orders shipped in the same quarter that they are received, our backlog at any
particular date is not necessarily indicative of actual sales for any
succeeding period.

Liquidity and Capital Resources

   Our principal liquidity requirements are for working capital, consisting
primarily of accounts receivable, inventories, capital expenditures and debt
service. Since the recapitalization, we have funded our operating activities
principally from funds generated from operations.

   Cash flow provided by operating activities was $11.9 million, $8.1 million
and $0.7 million for the years ended March 31, 1997, 1998 and 1999,
respectively. The decrease in cash flow provided by operating activities from
fiscal 1997 to 1999 is mainly due to the increased R&D expenses and decreased
gross margins. This decrease was partially offset by a lower investment in
working capital and by the increase in non-cash recapitalization and other non-
recurring expenses.

   Purchases of property and equipment were $1.1 million, $2.9 million and $0.9
million for the years ended March 31, 1997, 1998 and 1999, respectively.
Capital expenditures for fiscal 2000 are expected to be approximately $1.2
million.

   In May 1997, we issued $115.0 million in aggregate principal amount of
senior notes that, together with a $20.1 million equity contribution, was used
to finance the recapitalization. In the recapitalization, we used $26.9 million
to repay outstanding borrowings, $96.9 million to redeem a portion of our
common stock, $11.0 million to pay related fees and expenses and $0.3 million
for general working capital purposes.

                                       29
<PAGE>

   In conjunction with the recapitalization, we entered into a senior credit
facility with various lending institutions, and Bankers Trust Company, as
agent. The bank credit facility bears interest, at our option, at (1) the base
rate plus 1.75% or (2) the eurodollar rate plus 3.00%. Our borrowings under the
bank credit facility are secured by substantially all of our assets, a pledge
of all of the capital stock of any domestic subsidiaries and a pledge of 65% of
the capital stock of our first-tier foreign subsidiaries. The bank credit
facility matures on May 16, 2002.

   During the quarter ended June 30, 1998, we amended the bank credit facility
to have our borrowing availability subject to a borrowing base formula, which
provides a maximum revolving credit facility of $30.0 million, and to adjust
the financial covenants requiring us to maintain minimum levels of EBITDA
during each six-month period ending on the last day of each fiscal quarter and
minimum levels of cumulative EBITDA from April 7, 1996 to the last day of each
fiscal quarter. The adjustments to the financial tests and covenants relate to
periods prior to March 31, 2000. For periods after that time, the financial
tests and covenants contained in the original agreement will apply. These
amendments were effected in light of the impact of the downturn in the
semiconductor industry on our operating results. Without these amendments to
our bank credit facility, on June 30, 1998, we would have violated the
financial test relating to the maintenance of minimum levels of EBITDA for the
six-month period ending on such date. We may borrow amounts under the amended
bank credit facility to finance our working capital requirements and other
general corporate purposes. The amended bank credit facility requires us to
meet certain financial tests and contains covenants customary for this type of
financing. At March 31, 1999, there was $3.5 million outstanding under a letter
of credit and $17.0 million of unused borrowing capacity under the amended bank
credit facility.

   Our principal sources of funds following the offering are anticipated to be
cash on hand ($20.2 million as of March 31, 1999), cash flows from operating
activities and, if necessary, borrowings under the bank credit facility. In
addition, we expect to receive a significant tax refund of $7.4 million in the
early part of fiscal 2000. We believe that these funds will provide us with
sufficient liquidity and capital resources for us to meet our current and
future financial obligations, as well as to provide funds for our working
capital, capital expenditures and other needs for at least the next 12 months
and, assuming continued improvement in the semiconductor industry, through the
next 24 months. No assurance can be given, however, that this will be the case.
We may require additional equity or debt financing to meet our working capital
requirements or to fund our research and
development activities. There can be no assurance that additional financing
will be available when required or, if available, will be on terms satisfactory
to us.

Disclosure Relating to Market Risks

 Interest Rate Risk

   As of March 31, 1999, our cash included money market securities. Due to the
short duration of our investment portfolio, an immediate 10% change in interest
rates would not have a material effect on the fair market value of our
portfolio, therefore, we would not expect our operating results or cash flows
to be affected to any significant degree by the effect of a sudden change in
market interest rates on its securities portfolio.

   The fair market value of long-term fixed interest rate debt is subject to
interest rate risk. Generally, the fair market value of fixed interest rate
debt will increase as interest rates fall and decrease as interest rates rise.
The interest rate changes affect the fair market value but do not impact
earnings or cash flows. The estimated fair value of our long-term debt at March
31, 1999 was $69.2 million. The effect of an immediate 10% change in interest
rates would not have a material impact on our future operating results or cash
flows. Fair values were determined from quoted market prices.

 Foreign Currency Exchange Risk

   A substantial portion of our sales are denominated in U.S. dollars and as a
result, we have relatively little exposure to foreign currency exchange risk
with respect to sales made. We do not use forward exchange contracts to hedge
exposures denominated in foreign currencies or any other derivative financial
instruments for trading or speculative purposes. The effect of an immediate 10%
change in exchange rates would not have a material impact on our future
operating results or cash flows.

                                       30
<PAGE>

Year 2000

   Many computer systems used by us and our suppliers may not properly
recognize a date using "00" as the year 2000. This could result in
system/program failure or logic errors that could disrupt normal business
activities. We have established a formal project with a project office and
project team to address this issue and achieve year 2000 readiness.

   The project is focused on four key readiness areas:

  .  Internal Infrastructure Readiness, addressing internal hardware,
     software and non-information technology systems;

  .  Supplier Readiness, addressing the preparedness of those suppliers
     providing material incorporated into our products;

  .  Product Readiness, addressing product functionality; and

  .  Customer Readiness, addressing customer support and transactional
     activity.

   For each readiness area, we are systematically performing a global risk
assessment, conducting testing and remediation (renovation and implementation),
developing contingency plans to mitigate unknown risk, and communication with
employees, suppliers and customers to raise awareness of the Year 2000 problem.

   Internal Infrastructure Readiness Program. We are conducting an assessment
of internal applications and computer hardware. Some software applications have
been made Year 2000 compliant, and resources have been assigned to address
other applications based on their criticality and the time required to make
them Year 2000 compliant. All software remediation is scheduled to be completed
no later than September 30, 1999. The Year 2000 compliance evaluation of
hardware, including network fabric, telecommunications equipment, workstations
and other items is nearing completion.

   In addition to applications and information technology hardware, we are
testing and developing remediation plans for facilities and other operations.

   Supplier Readiness Program. This program focuses on minimizing the risks
associated with suppliers in two areas: (1) a supplier's business capability to
continue providing products and services; and (2) a supplier's product
integrity. We have identified and contacted key suppliers based on their
relative risks in these two areas. To date, we have received responses from
more than 95% of our key suppliers, most of which indicate that they are in the
process of developing and implementing remediation plans. Based on our
assessment of each supplier's progress to adequately address the Year 2000
issue, we have developed a supplier action list and contingency plans. We will
revisit key suppliers during the third calendar quarter of 1999 to ensure that
supplier commitments have been met. Alternate sources are being investigated
for those few vendors that we have identified as high risk, and such
alternative sources are expected to be in place by November 1, 1999. We have
identified certain key components of our products and will increase our
inventory level of these items during the fourth calendar quarter of this year.
We anticipate all of these items to be usable in our products, and therefore we
do not expect such additional inventory purchases to have a material adverse
effect on our financial condition.

   Product Readiness Program. This program focuses on identifying and resolving
Year 2000 issues existing in our products. The program encompasses a number of
activities including testing, evaluation, engineering and manufacturing
implementation. Sematech is a consortium of integrated circuit manufacturers
that provides guidelines to equipment suppliers to the semiconductor industry.
We have adopted the Sematech guidelines known as Year 2000 readiness testing
scenarios as the baseline for our product testing. We believe that the use of
these scenarios should enable our products to meet standards that we believe
are generally accepted across the computer industry for Year 2000 readiness.
The testing, and subsequent remediation, of our products to meet the Sematech
guidelines has not had a material adverse impact on our operations. As of the
fourth calendar quarter of 1998, we believe that all of our products then in
production met the Sematech guidelines for Year 2000 readiness.

                                       31
<PAGE>

   Our customers were notified of known risks and remediation plans in the
third calendar quarter of 1998. All customer equipment that is covered by
warranty or contract will be retrofitted by the third calendar quarter of 1999.

   Customer Readiness Program. This program is focused on customer support,
including the coordination of retrofit activity, and developing contingency
plans where appropriate, as well as the ability of our customers to continue to
conduct business with us. We are actively working with our customers in this
effort and anticipate completing this program in the third calendar quarter of
1999.

   In addition to the above programs, we have identified "worst case" scenarios
and developed appropriate contingency plans. The most reasonably likely worst
case scenario is a breakdown of general infrastructure, such as widespread
power failures. We have investigated most of our exposure in this area and do
not consider the foregoing a high risk. However, we have prepared for short-
term public service interruptions as part of our existing disaster recovery
plan. The plan consists of utilizing emergency power supplies, employing remote
storage facilities for copies of our vital records and using off-site backup
computer systems provided by an independent service supplier. To aid our
customers, emergency response teams are being formed within our organization to
respond to any unexpected product issues that may arise as a result of our or
any third party's failure to be Year 2000 compliant. We are selecting people
for these teams who were trained in troubleshooting all aspects of our
products. We expect these teams to be formed by November 1, 1999.

   We estimate that total Year 2000 incremental costs will be approximately
$200,000. Through March 31, 1999, we have spent approximately $110,000 to
address the Year 2000 issue. We are continuing our assessments and developing
alternatives that will necessitate refinement of this estimate over time. There
can be no assurance, however, that there will not be a delay in, or increased
costs associated with, the programs described in this section.

   Since the programs described in this section are ongoing, all potential Year
2000 complications may not have yet been identified. Therefore, the potential
impact of these complications on our financial condition and results of
operations cannot be determined at this time. If computer systems used by us or
our suppliers, products provided to us by our suppliers, or the software
applications of hardware used in systems manufactured or sold by us, fail or
experience significant difficulties related to the Year 2000 issue, our results
of operations and financial condition could be materially adversely affected.
We could incur delays in producing and delivering products to our customers,
which could result in order cancellations and lost revenue and profits. We
believe the likelihood of losing revenue and profits from difficulties
resulting from Year 2000 issues is low.

Inflation

   The impact of inflation on our business has not been material for the fiscal
years ended March 31, 1997, 1998 and 1999.

Recently Issued Accounting Pronouncements

   In June 1998, the FASB issued Statement on Financial Accounting Standards
No. 133, "Accounting for Derivative Instruments and Hedging Activities" ("SFAS
No. 133"). SFAS No. 133 establishes a new model for accounting for derivatives
and hedging activities and supersedes and amends a number of existing
accounting standards. SFAS No. 133 requires that all derivatives be recognized
in the balance sheet at their fair market value, and the corresponding
derivative gains or losses be either reported in the statement of operations or
as a deferred item depending on the type of hedge relationship that exists with
respect to such derivative. We currently do not hold any derivative instruments
that will be affected by the adoption of SFAS No. 133.

                                       32
<PAGE>

                                    BUSINESS

   Market data used throughout this prospectus were obtained from internal
surveys and from industry publications, including a report generated by
Dataquest. This industry publication generally indicates that the information
contained therein has been obtained from sources believed to be reliable, but
that the accuracy and completeness of such information is not guaranteed. We
have not independently verified such market data. This publication was not
commissioned by, or prepared at the request of, us or any of our affiliates.
Similarly, internal surveys, while believed to be reliable, have not been
verified by any independent source. Our belief as to our share of both the ion
implantation market generally and the non-destructive implantation market
specifically derives from internal estimates of the size of such market and
internal records as to our sales in such market. Our belief as to our share of
the thin film measurement market is derived from industry data as to the size
of such market and internal records as to our sales in such market.

Overview

   We are a worldwide leader in the development, manufacture, marketing and
service of process control metrology systems used in the manufacture of
semiconductors. Process control metrology is used to monitor process parameters
in order to help enable semiconductor manufacturers to reduce the size of the
circuit patterns or features imprinted on the semiconductor, increase the size
of the raw silicon wafer from which semiconductors are manufactured, increase
their equipment productivity and improve the performance of the semiconductor
device. Our current product families, the Therma-Probe and Opti-Probe, use
proprietary and patented technology to provide precise, non-contact, non-
destructive measurement of two of the most critical and pervasive process steps
in semiconductor manufacturing:

  .  ion implantation--implanting ions, usually boron, phosphorus or arsenic,
     into selected areas of the silicon wafer to alter its electrical
     properties; and

  .  thin film deposition and removal--depositing and removing layers of
     conductive or insulating films from the silicon wafer in order to give
     the semiconductor the desired performance characteristics.

Industry Background

   The demand for semiconductors has continually increased as the use of
semiconductors has expanded beyond personal computers and computer systems to a
wide array of additional applications, including telecommunications and data
communications systems, automotive systems, consumer electronics, medical
products and household appliances. Additionally, the Internet has stimulated
the need for more high performance semiconductor devices. As a result,
semiconductors have become more complex, requiring:

  .  decreases in feature line width, for example, from .25 microns to .18
     microns;

  .  as many as 500 process steps; and

  .  an increase in the number of metal layers.

Additionally, the life cycle for these devices has compressed from four years
in the early 1990s to approximately two years today. The increase in device
complexity and reduction in product life cycles have led to a more costly and
complex manufacturing process. At the same time, semiconductor manufacturers
have continued to face significant price pressure due to competitive conditions
in the industry. These factors have led semiconductor manufacturers to
intensify efforts to improve fab productivity, including the increased use of
process control metrology. Despite periodic downturns as a result of the
cyclicality of the semiconductor device industry, from 1992 to 1998, Dataquest
reports that sales of process control metrology systems and instruments have
increased at a compound annual growth rate of 20.8% to approximately $1.8
billion in 1998 and are expected to increase at a compound annual growth rate
of 22.9% to approximately $4.1 billion in 2002.

   Process control metrology is used to monitor process parameters in order to
enable semiconductor manufacturers to reduce costs and improve device
performance. Historically, semiconductor manufacturers have achieved an
approximate 25% to 30% annual reduction in cost per chip function through
productivity

                                       33
<PAGE>

improvements including reduced feature size, increased wafer size and increased
equipment productivity. Although increasing wafer size and yields will continue
to be sources of productivity gains by semiconductor manufacturers,
increasingly, we believe, gains will come from reduced feature size and non-
yield manufacturing productivity enhancements, including increased equipment
uptime, reduced manufacturing space requirements, reduced use of wafers for
testing purposes and lower tool maintenance costs. According to Sematech, a
consortium of integrated circuit manufacturers that provides research, analysis
and guidelines to equipment suppliers to the semiconductor industry, as
summarized in the following table, the greatest potential for future
productivity gains are expected to come primarily from gains in equipment
productivity and continuing reduction of feature sizes:

                        Key Drivers of Fab Productivity*

<TABLE>
<CAPTION>
     Factor                                                1980  Present Future
     ------                                               ------ ------- -------
     <S>                                                  <C>    <C>     <C>
     Reduced feature sizes...............................    12% 12-14%   12-14%

     Increased wafer sizes...............................     8%     4%      <2%

     Improved yields.....................................     5%     2%      <1%

     Other gains in equipment productivity...............     3%  7-10%  >10-13%
</TABLE>

    --------
    * Percentages reflect the annual reduction in the cost per chip
      function.
    Source: Sematech

   To continue to improve fab productivity, semiconductor manufacturers must
increase equipment and overall fab productivity. The following diagram sets
forth the principal areas on which we will focus to enhance semiconductor
manufacturer productivity. Those items in bold correspond to our existing Fab
Productivity Enhancement(TM) solutions. We believe planned new additions to our
Fab Productivity Enhancement(TM) solutions (italics) will significantly enhance
the productivity gains provided by our existing Fab Productivity
Enhancement(TM) solutions (bold) and, in addition, will provide new areas of
productivity gains for semiconductor manufacturers.

                             [GRAPHIC APPEARS HERE]

                                       34
<PAGE>

The Therma-Wave Solution

   We are a worldwide leader in the development, manufacture, marketing and
service of process control metrology systems used in the manufacture of
semiconductors. Our patented solutions help enable semiconductor manufacturers
to reduce feature size, increase wafer size, increase equipment productivity
and improve device performance by providing non-contact, non-destructive,
enabling technologies extendable over multiple process generations. We believe
that our technological capabilities, proven track record in process control
metrology systems and our Fab Productivity Enhancement(TM) initiatives will
allow us to continue to provide industry-leading fab productivity solutions for
semiconductor manufacturers.

 Current Industry Leading Metrology Solutions

   We have successfully developed Fab Productivity Enhancement(TM) metrology
solutions for two critical and pervasive process steps in semiconductor
manufacturing: ion implantation and thin film deposition and removal.

 Ion Implant Metrology

   A key process step in the fabrication of semiconductor devices is the
implantation of ions, usually boron, phosphorous or arsenic, into selective
areas of the silicon wafer to alter its electrical properties. Control of the
accuracy and uniformity of the ion implant dose is critical to device
performance and yield. Ion implantation is generally performed several times
during the early phases of the fabrication cycle. As a result, there is
typically a time lag of several weeks between these implant steps and the first
electrical measurements that indicate whether the ion implantation process was
properly executed. Failure to identify improper ion implantation can be
extremely costly to a semiconductor manufacturer if the fabrication cycle is
permitted to continue. To test on a more timely basis whether the ion
implantation was properly executed, semiconductor manufacturers historically
used a four-point probe to perform test wafer monitoring (i.e., testing a non-
production blank wafer that has no devices on it), which measured electrical
resistance and required physical contact between the probe and the silicon
wafer surface. As a result of the high probability of contamination of the
silicon wafer from contact with the probe, this procedure was only used on a
limited number of test wafers. As compared to test wafer monitoring, product
wafer monitoring using our Therma-Probe systems decreases manufacturing costs
by reducing the need for test wafers and shortening the cycle time between the
implant and monitoring steps. In addition, our systems detect implant
processing problems inherent in product wafers that are often missed when
utilizing test wafer monitoring alone.

   Therma-Probe Product Family. Therma-Probe systems are the predominant non-
destructive process control metrology system used to measure the critical ion
implantation process in the fabrication of semiconductors. The Therma-Probe
systems employ proprietary thermal wave technology which uses highly focused
but low power laser beams to generate and detect thermal wave signals in the
silicon wafer. Proprietary software correlates the signals to the ion implant
dose. Unlike previous ion implant metrology systems, the Therma-Probe systems
utilize a totally non-contact, non-damaging technology and thus can be used to
monitor product wafers immediately after the ion implantation process. These
features have been integrated into an easy-to-use and reliable package with
automated wafer handling and statistical data processing. Since their
introduction, we believe the Therma-Probe systems have captured over 50% of the
market for ion implant measurement in general and over 95% of the market for
non-destructive ion implantation measurement of product wafers.

 Thin Film Measurement

   The majority of the 100 to 500 process steps required to fabricate
semiconductors on a silicon wafer involve the deposition and removal of a
variety of insulating and conducting thin films. Thin film metrology measures
the thickness and material properties of these thin films and, because it is
used to measure a large number of process steps, is one of the most important
metrology systems utilized at semiconductor fabrication facilities. The most
widely used technologies to measure the thickness and properties of thin films
have

                                       35
<PAGE>

historically been reflection spectrometry and ellipsometry. Reflection
spectrometers obtain an optical spectrum as a function of wavelength for light
reflected from the surface of a wafer. This spectrum is then analyzed with
appropriate algorithms to obtain film thickness and, in some cases, other
properties of the film. In ellipsometry, the change of polarization of the
reflected light is measured. The polarization change is analyzed with
appropriate algorithms to obtain film thickness, and, in some cases, other
properties of the film.

   Increasingly, these systems have been unable to meet the process control
metrology demands of the semiconductor industry. For example, the industry is
rapidly moving toward measuring product wafers rather than test wafers, both
because of the inability to adequately control the manufacturing process using
test wafers alone, and the costs associated with the processing of non-
productive test wafers. Measurements on product wafers, however, must be
performed in small areas, and both spectrometers and ellipsometers generally
require fairly large measurement areas. Additionally, increasing demands for
improved precision and repeatability require the ability to measure thicknesses
that range from extremely thin films, which generally measure below 20
angstroms, to films that are hundreds of thousands times thicker. An angstrom
is equal to one hundred millionth of a centimeter. Reflection spectrometers are
most suitable for measuring thicker films, whereas ellipsometers are most
suitable for measuring very thin films. Thus, neither system alone is capable
of accurate and reliable measurements over the full range of film thicknesses.
Further, the industry is now using film stacks composed of several layers of
different films and many films whose optical properties are functions of the
actual deposition conditions. Generally, spectrometers and ellipsometers alone
generate insufficient data to simultaneously determine the thicknesses and
properties of these film stacks and new films with the precision that
semiconductor manufacturers require. Reflection spectrometers and most
ellipsometers have very limited capabilities for such simultaneous measurements
of both thickness and optical parameters.

   Opti-Probe Product Family. Opti-Probe systems significantly improve upon
existing thin film metrology systems by successfully integrating up to five
distinct film measurement technologies, three of which are patented by Therma-
Wave. By combining the measured data from these multiple technologies and
correlating it by using our proprietary software, Opti-Probe systems provide
increased measurement capability, speed and productivity on both test and
product wafers. These techniques of combining optical measurement technologies
and correlating the results have also been patented by Therma-Wave. We believe
Opti-Probe systems have captured over 30% of the thin film measurement market.

 New Initiatives to Further Fab Productivity Enhancement(TM)

   We believe our process control metrology tools have already significantly
improved fab productivity. We believe our technological capabilities will
enable semiconductor manufacturers to address a broader range of issues that
impact fab productivity. We expect new product developments to come from
combining separate metrology systems into one tool, implementing in-situ
systems to improve the direct control of process equipment and to provide real-
time measurement of product wafers, and networking these systems together.

   In light of the industry's drive to reduce costs and improve productivity,
we believe combination products will be of considerable benefit to
semiconductor manufacturers. We believe that combination metrology tools will
significantly reduce capital expenditure requirements, floorplan footprint,
wafer handling and tool maintenance costs. Additionally, semiconductor
manufacturers use in-situ systems to provide real-time measurement of product
wafers and monitoring of process equipment. Although this market is in its
infancy, the industry's need to improve process tool productivity through
increased uptime and higher equipment utilization is expected to bring rapid
growth to this industry sector. We believe we can leverage our core
competencies of strong intellectual property and technological expertise to
develop a wide range of in-situ systems. In addition, by linking together our
metrology tools, both stand-alone and combination, and in-situ monitoring
systems, we believe we can offer a significant competitive advantage by
allowing manufacturers to address overall fab productivity in addition to the
productivity of individual tools.

   We are also developing the Meta-Probe system, which is a thin film metrology
system specifically designed to measure the thickness and material properties
of opaque and metallic thin films. These materials are increasingly being used
by semiconductor manufacturers as the industry moves to 0.25 micron and 0.18
micron

                                       36
<PAGE>

feature sizes with an increase in the number and complexity of the metal
layers. In addition, the accelerated drive towards the use of copper rather
than aluminum layers produces a need for better metal metrology products. We
believe that existing metal film metrology systems are unable to perform the
required measurements with the required precision and repeatability.

Competitive Strengths

  .  Technologically Advanced Capabilities and Products. We have focused
     heavily on the development and protection of our proprietary technology
     and currently hold 51 U.S. and foreign patents. In addition, we have
     filed applications for 22 additional U.S. and foreign patents. We
     believe we have superior technical resources, including a staff of 46
     Ph.Ds, which represents over 13% of our employees. We believe that our
     expertise in engineering, research and development enables us to offer
     process control metrology systems with more advanced technical
     capabilities and features than those offered by our competitors. Our
     systems provide superior measurement capabilities, including resolution,
     accuracy, repeatability and reliability. The Therma-Probe product family
     employs a patented optically-based thermal wave technology to provide
     the industry's only non-contact, non-contaminating ion implant
     measurement capability on product wafers. We believe a combination of
     measurement technologies is critical to perform advanced thin film
     metrology. We are a pioneer in providing products that possess
     combination film measurement technologies. We believe we will continue
     to be the industry leader as the need for combinations of technologies
     grows. Our Opti-Probe systems combine up to five distinct measurement
     technologies, three of which we have patented. Additionally, we hold
     patents on the use of many of the combinations of these thin film
     measurement technologies.

  .  Leading Market Share. We are one of the world's leading manufacturers of
     process control metrology equipment and systems. We believe we are the
     largest provider of non-destructive ion implant process control
     metrology systems worldwide with over 95% of the market. Our Therma-
     Probe systems have become the industry standard for ion implant process
     control metrology and are installed in virtually every major
     semiconductor fabrication facility. We are also a leading supplier of
     thin film measurement metrology systems worldwide. We believe that our
     Opti-Probe systems have captured over 30% of the market as a result of
     technological superiority and lower cost of ownership to our customers.

  .  Strong and Diverse Customer Base. We market and sell our products
     worldwide to virtually all of the major semiconductor manufacturers,
     including: Advanced Micro Devices, Inc., Chartered Semiconductor, Ltd.,
     Intel Corporation, Lucent Technologies, Samsung America, Inc., Siemens
     AG, STMicroelectronics N.V., Toshiba Corporation and the UMC Group. We
     believe our top customers are among the fastest growing manufacturers in
     the semiconductor industry. In addition, we have a diverse customer base
     in terms of both geographic location and the types of semiconductor
     devices manufactured. In the aggregate, we serve more than 70 customers
     located in 14 different countries.

  .  Worldwide Distribution and Strong Customer Support Capabilities. We have
     expended considerable resources to create a high-quality worldwide
     distribution network with highly trained sales and support personnel.
     International sales represented approximately 52%, and 69% of our net
     revenues in fiscal 1998 and 1999, respectively. We provide our customers
     with comprehensive support before, during and after delivery of our
     systems. Our engineers have extensive experience and provide valuable
     assistance to our customers, thereby strengthening our relationships
     with them. We anticipate we will continue to strengthen and expand our
     distribution and customer support organizations worldwide, particularly
     in Asia.

  .  Experienced and Successful Management Team. We are led by an experienced
     senior management team whose members average more than 10 years in the
     semiconductor capital equipment manufacturing industry. Dr. Allan
     Rosencwaig has over 17 years of experience in the industry. Our senior
     management team currently owns approximately 21% of the outstanding
     common stock and holds options to acquire an additional 12% of such
     common stock. Such equity ownership represents a significant economic
     commitment to and participation in our continued success.

                                       37
<PAGE>

Business and Growth Strategy

   Our objective is to be a leader in providing Fab Productivity
Enhancement(TM) solutions to semiconductor manufacturers. Our business and
growth strategy includes the following key initiatives:

  .  Focus on Fab Productivity Enhancement(TM). We plan to continue to
     develop products which enable semiconductor manufacturers to reduce
     feature size, increase wafer size and increase equipment productivity.
     Although increasing wafer size and yields will continue to be sources of
     fab productivity gains by semiconductor manufacturers, increasingly, we
     believe, gains will come from reduced feature size and non-yield related
     equipment productivity enhancements, including increased equipment
     uptime, reduced fab floor footprint requirements, reduced use of test
     wafers and lower tool maintenance costs. We believe our technological
     capabilities will enable semiconductor manufacturers to address a
     broader range of issues that impact fab productivity. We expect our new
     product development efforts to include combining separate metrology
     systems into one tool, implementing in-situ systems to improve the
     direct control of process equipment and provide real-time measurement of
     product wafers, and networking these systems together.

  .  Continue to Focus on Technological Innovation. We intend to continue to
     emphasize engineering and research and development in our effort to
     anticipate and address technological advances in semiconductor
     manufacturing. We currently have a staff of 46 Ph.Ds, which represents
     more than 13% of our employees. Our current product development efforts
     include combining separate metrology systems into one tool, implementing
     in-situ systems and networking all of these systems together.
     Additionally, we are developing Meta-Probe, a thin film metrology system
     specifically designed to measure the thickness and material properties
     of opaque and metallic films. The Meta-Probe system, as a non-contact,
     non-destructive metrology system, will reduce the quantity of test
     wafers, thereby decreasing the costs of the semiconductor manufacturing
     process. We believe that continued product innovation and investment in
     research and development will help us strengthen our leadership
     position.

  .  Maintain and Leverage Strong Customer Relationships. We expect to
     continue to strengthen our existing customer relationships and foster
     working partnerships by providing technologically superior systems and
     high levels of customer support. We believe we are the dominant supplier
     of ion implant metrology systems to virtually all major semiconductor
     manufacturers and have become the primary supplier of thin film
     metrology systems to many of our customers. Furthermore, we intend to
     continue to capitalize on our strong customer relationships, which have
     enabled us to develop new products and applications through close
     collaboration with customers. Such collaboration has often resulted in
     products and applications which have a broader market appeal.

  .  Leverage Existing Infrastructure. To support our worldwide growth, we
     have expended considerable resources in establishing our infrastructure,
     including a worldwide customer support organization and a state-of-the-
     art manufacturing facility. We believe we have the opportunity to
     improve our operating margins by leveraging our existing infrastructure
     through increased sales.

Products and Technology

   Our Fab Productivity Enhancement(TM) solutions currently consist of two
major product families of in-line process control metrology systems. Our
Therma-Probe product family was introduced in 1985 as our initial product line,
and our Opti-Probe product family was introduced in 1992. Both product families
feature our proprietary and patented measurement technologies and offer robotic
wafer handling, advanced vision processing, sophisticated but user-friendly
software and high throughput and reliability. The modular design of the
hardware and software enables continuous product enhancement as new advances
are made.

                                       38
<PAGE>

 Therma-Probe Product Family

   Our Therma-Probe systems are the predominant non-contact, non-contaminating
ion implant metrology systems capable of measuring ion implant dose and its
uniformity across the wafer with a high degree of precision and repeatability.
In addition, Therma-Probe systems have unparalleled sensitivity for the most
critical implants. By the end of March 1999, 389 Therma-Probe systems had been
installed in virtually every major semiconductor fab worldwide. A typical
semiconductor fab uses Therma-Probe systems to monitor and control critical ion
implant steps. In addition, all major manufacturers of ion implant equipment
utilize Therma-Probe systems to help develop and qualify their ion implanters.
We believe Therma-Probe systems have captured over 50% of the market for ion
implant measurement in general and over 95% of the market for non-destructive
measurement of ion implantation of product wafers. The selling prices for
Therma-Probe systems range from approximately $650,000 to $900,000.

   We believe that our Therma-Probe systems offer technological advantages and
features that distinguish them from the ion implant metrology systems offered
by our competitors:

   Proprietary Technology. To provide non-contact, non-contaminating ion
implant measurements on product wafers, our Therma-Probe systems employ
proprietary thermal wave technology, which uses highly focused but low power
laser beams to generate and detect thermal wave signals in the silicon wafer
that can be correlated to the ion implant dose. The thermal wave technology
used to measure the ion implant dose in the silicon wafer is a highly
proprietary and extensively patented technology of ours. We believe that these
patents help to maintain our competitive position.

   Ease of Use and Reliability. We believe we have integrated our thermal wave
technology into easy-to-use and reliable process control metrology systems.
These systems are configured specifically for use by semiconductor device
manufacturers and feature automated wafer handling, automated data collection,
statistical data processing and data management.

   Installed Base. Virtually all major semiconductor manufacturers use Therma-
Probe systems to monitor and control their ion implant processes. In addition,
virtually all major manufacturers of ion implant equipment utilize Therma-Probe
systems to help develop and qualify their implanters. Additionally, our
engineers have extensive experience in addressing many different types of ion
implant applications and provide valuable assistance to our customers, thereby
strengthening our relationships with them. We believe our significant installed
base of Therma-Probe systems acts as a barrier to entry for current and
potential competitors in the ion implant measurement market.

   Continuous Improvement. We continue to develop, manufacture and market new
and improved Therma-Probe systems to enhance system capability and to lower the
cost of ownership to the customer. For example, we recently introduced the TP-
630, which possesses state of the art ion implant measurement technology for
wafer sizes up to 300 millimeters.

   The following table summarizes our improvements to the Therma-Probe product
family:

<TABLE>
<CAPTION>
           Year
 System Introduced               Description of Innovation/Advancement
 ------ ----------               -------------------------------------
 <C>    <C>        <S>
 TP-200    1985    Introduced first non-destructive process control metrology system
                   to measure ion implantation.
 TP-300    1987    Added cassette-to-cassette wafer handling and automation software
                   to the capability of the TP-200.
 TP-400    1992    Significantly improved repeatability and added second cassette
                   station for tool calibration.
 TP-500    1996    Built on the same platform as the OP-2600, added pattern
                   recognition and improved reliability and throughput.
 TP-630    1998    Expanded wafer measurement capability to 300 millimeters.
</TABLE>


                                       39
<PAGE>

 Opti-Probe Product Family

   Our Opti-Probe systems were developed to address the limitations of
conventional thin film metrology systems. Opti-Probe systems combine the thin
film metrology capabilities of spectrometers, reflectometers and ellipsometers
into a single integrated system. We believe a combination of measurement
technologies is critical to perform advanced thin film processes. We are a
pioneer in providing products that possess combination film measurement
technologies. We believe we will continue to be the industry leader as the need
for combinations of technologies grows. By March 31, 1999, 642 Opti-Probe
systems have been installed in major semiconductor fabrication facilities
worldwide. By March 31, 1999, we believe Opti-Probe systems had captured over
30% of the thin film measurement market. The selling prices for Opti-Probe
systems range from approximately $450,000 to $900,000.

   We believe our Opti-Probe systems offer technological advantages and
features that distinguish them from thin film metrology systems offered by our
competitors:

   Proprietary Technology. Conventional spectrometers and ellipsometers are
unable to meet the current and future requirements of semiconductor fabrication
facilities. These requirements include the ability to measure in very small
areas on product wafers, high precision and repeatability for very thin as well
as thick films, and the ability to simultaneously determine thickness and
optical parameters on one or more films. Our Opti-Probe systems combine up to
five distinct measurement technologies, three of which we have patented.
Additionally, we hold patents on the use of many of the combinations of these
thin film measurement technologies. Because of the wealth of data that can be
obtained from these combined optical technologies, it is possible to determine
the thickness and optical parameters of one or more films simultaneously. In
addition, since our proprietary technologies employ a highly focused laser
beam, Opti-Probe systems can perform measurements with a spot size that is the
smallest in the industry. Although our competitors have now introduced systems
that contain both spectrometers and ellipsometers in one tool, we have patented
the technique of combining the measurement data from these technologies. We
believe our patented technologies, and the patented combinations thereof,
result in a superior product.

   Ease of Use and Reliability. We believe our Opti-Probe systems are regarded
as easy-to-use and highly reliable. These systems are configured specifically
for semiconductor device manufacturers and feature automated wafer handling,
advanced image processing, automated data collection, statistical data
processing and data management.

   Proprietary Software. We believe our proprietary software incorporated into
Opti-Probe systems is superior to that of the competition. During the
fabrication of semiconductors, many different films and film stacks, consisting
of several layers of different films, are deposited and selectively removed
from the silicon wafer. This, in turn, means that hundreds of film measurement
data analysis algorithms, or recipes, must be developed and stored in the
computer of a thin film metrology system. Thus, the full benefit of a thin film
metrology system to the customer is a result of a combination of superior
measurement capability and superior recipe development. We have a staff of over
fifty experienced applications scientists and engineers stationed worldwide
near all major customers that provides full applications support to develop new
recipes as device manufacturing processes change.

   Continuous Improvement. While we have achieved rapid market share growth in
the thin film metrology market with our current Opti-Probe systems, we continue
to develop, manufacture and market new and improved systems. We believe we
provide the semiconductor industry with thin film metrology systems that
operate with greater reliability in the deep ultra-violet region of the optical
spectrum. This is of paramount importance since device manufacturers are now
developing patterning technology utilizing optical radiation in this ultra-
violet region.

   In 1998, we introduced the Opti-Probe 5000 series, which integrates up to
two additional measurement technologies into the Opti-Probe product family. As
a result, the Opti-Probe 5000 series has up to five independent, yet fully
integrated measurement technologies. We believe current competitive products
include

                                       40
<PAGE>

no more than two independent measurement technologies. The two additional
technologies that have been integrated into the 5000 series are spectroscopic
ellipsometry and absolute laser ellipsometry, each of which has expanded the
Opti-Probe's measurement capabilities and improved measurement integrity.

   Spectroscopic ellipsometry has long been recognized as a powerful thin film
characterization technology. However, we believe that spectroscopic
ellipsometry, by itself, still suffers from slow measurement time and poor
measurement integrity. The poor measurement integrity arises from high
sensitivity to small process changes due to the difficulties in measuring
thickness and material parameters simultaneously with only wavelength dependent
technologies. The Opti-Probe 5000 series has been designed to overcome these
limitations by integrating spectroscopic ellipsometry with up to four other
independent measurement technologies to accelerate the ability to determine the
correct thin film solution. Furthermore, by integrating spectroscopic
ellipsometry, a wavelength dependent measurement, with our proprietary beam
profile reflectometry, or BPR(TM), an angle dependent measurement, we believe
the Opti-Probe 5000 series will overcome the excessive sensitivity to small
process changes.

   The addition of absolute laser ellipsometry, or AE(TM), to Opti-Probe
systems enable stable, reference-free absolute measurements on ultra-thin films
with high precision and repeatability. Integrating absolute laser ellipsometry
with our proprietary beam profile ellipsometry, or BPE(TM), provides fast,
precise and small spot size film measurements. We believe the successful market
transition to the Opti-Probe 5000 series will further strengthen our
technological capabilities in the thin film measurement market. We sold our
first Opti-Probe 5000 series system in April 1998 and, as of March 31, 1999,
have sold 18 Opti-Probe 5000 series systems.

   The following table summarizes our improvements to the Opti-Probe product
family:

<TABLE>
<CAPTION>
                   Year
  System        Introduced                       Description of Innovation/Advancement
  ------        ----------                       -------------------------------------
 <C>            <S>          <C>
 OP-1000           1992      Introduced a new patented optical technology, BPR(TM), to measure thin film
                             deposition and removal.

 OP-2000           1993      Integrated BPR(TM) with a new patented optical technology, BPE(TM), to enhance
                             measurement capabilities.

 OP-2600           1994      Integrated BPR(TM), BPE(TM) and Spectrometry to further enhance
                             measurement capabilities.

 OP-2600 DUV       1996      Integrated deep ultra-violet reflectance with the existing system to expand
                             measurement range.

 OP-3260           1996      Increased throughput of Opti-Probe.

 OP-3260 DUV       1996      Integrated OP-3260 system with deep ultra-violet reflectance.

 OP-5200 Series    1998      Integrated up to five measurement technologies (BPR(TM), BPE(TM) and
                             deep ultra-violet reflectance with Spectroscopic Ellipsometry and AE(TM)).

 OP-5300 Series    1998      Expanded OP-5200 series wafer measurement capability to 300 millimeters.
</TABLE>

 New Product Initiatives

   We are currently pursuing several new Fab Productivity Enhancement(TM)
product initiatives. We are combining separate metrology systems into one tool.
In addition, we are developing in-situ systems to improve the direct control of
process equipment. Semiconductor manufacturers use in-situ metrology systems in
their process equipment to improve the direct control of process equipment and
to provide real-time measurement of product wafers. Although this market is in
its infancy, the industry's need to improve process tool productivity through
increased uptime and higher equipment utilization is expected to bring rapid
growth to this industry sector. We are also developing solutions to network
these systems.

                                       41
<PAGE>

Additionally, we are developing the Meta-Probe system, a thin film metrology
system specifically designed to measure the thickness and material properties
of opaque and metallic films. These materials are increasingly being used by
semiconductor manufacturers as the industry moves to 0.25 micron and 0.18
micron feature sizes with an increase in the number and complexity of the metal
layers. In addition, the accelerated drive towards the use of copper rather
than aluminum layers produces a need for better metal metrology products. The
Meta-Probe system, as a non-contact, non-destructive metrology system, will
reduce the quantity of test wafers thereby decreasing the cost of the
semiconductor manufacturing process. Most existing metal film metrology systems
cannot perform tests on product wafers, and thus, we believe, our Meta-Probe
system will be even more cost effective for the next generation 300 millimeter
wafer size.

Customers

   Therma-Wave sells its products to leading semiconductor and semiconductor
equipment manufacturers throughout the world. Certain of our top customers are
listed below:

<TABLE>
   <S>                                    <C>
   Advanced Micro Devices, Inc. (AMD)     Siemens AG
   Chartered Semiconductor Ltd.           STMicroelectronics N.V.
   Intel Corporation                      Taiwan Semiconductor Manufacturing Corp. (TSMC)
   Lucent Technologies                    Toshiba Corporation
   Samsung America, Inc.                  UMC Group
</TABLE>

   Sales to Intel and AMD represented approximately 23% and 18% of our net
revenues for fiscal 1999. Sales to Intel represented approximately 23% of our
net revenues for fiscal 1998. Sales to Samsung and Intel represented
approximately 10% and 13%, respectively, for fiscal 1997. Our top five
customers accounted for approximately 41%, 45% and 53% of our net revenues in
fiscal 1997, 1998 and 1999.

Sales and Marketing

   We maintain sales offices and regional sales representatives throughout the
world. In the United States, we maintain sales offices in California, Florida
and Texas. We also utilize manufacturers' sales representatives to cover those
regions of the United States with too few customers to support a direct sales
effort. In Asia, we maintain sales offices in Japan, Korea, Singapore and
Taiwan. The Japan, Singapore and Taiwan offices work with manufacturers' sales
representatives to sell our products to customers in Japan and Taiwan, while
the Korean office sells to customers directly. We also work with manufacturers'
sales representatives in Singapore, Malaysia, Thailand and China. In Europe, we
maintain a sales office in the United Kingdom and work with manufacturers'
sales representatives throughout the rest of Europe.

   In addition, we provide direct customer support in most parts of the world.
In some locations, field service is still provided by the same manufacturers'
sales representative that handles the sales function, but applications support
is provided by our employees in that territory. In the United States, we have
field service and applications engineers located in Arizona, California,
Florida, Massachusetts, New Mexico, Oregon and Texas. Certain customers, such
as Intel, contract dedicated site-specific field service and applications
engineers. In Asia, we provide customer support in Japan, Taiwan, Korea and
Singapore. In Europe, we maintain a customer support office in the United
Kingdom to support customers there and to assist the field service engineers of
our European manufacturers, sales representatives in the rest of Europe.
Applications personnel supporting continental Europe are located in France,
Germany and Italy.

   We provide our customers with comprehensive support before, during and after
delivery of our systems. Prior to shipment, our support personnel typically
assist the customer in site preparation and inspection and typically provide
customers with training at our facilities or at the customer's location. Our
customer training programs include instructions in the maintenance of our
systems and in system hardware and software tools for optimizing the
performance of our systems. Our field support personnel work with the
customers' employees to install the system and demonstrate system readiness. In
addition, we maintain a group of highly skilled

                                       42
<PAGE>

applications scientists to respond to customers' process needs worldwide when a
higher level of technical expertise is required.

   We generally warrant our products for a period of up to 12 months from
system acceptance. Installation and initial training are customarily included
in the price of the system. After the warranty period, customers may enter into
support agreements covering both field service and field applications support.
Our field service engineers may also provide customers with repair and
maintenance services on a fee basis. Our applications engineers and scientists
are also available to work with the customers on recipe development.
Additionally, for a fee, we train customers to perform routine maintenance on
their purchased systems. We also provide a 24-hour telephone help-line.

   See Note 11 to Notes to Consolidated Financial Statements for a summary of
our operations in certain geographic areas.

Research and Development and Engineering

   The process control metrology market is characterized by continuous
technological development and product innovations. We believe that continued
and timely development of new products and enhancements to existing products is
necessary to maintain our competitive position. Accordingly, we devote a
significant portion of our personnel and financial resources to engineering and
research and development programs. As of March 31, 1999, our research,
development and engineering staff was comprised of 69 persons. We seek to
maintain our close relationships with customers to make improvements in our
products which respond to customers' needs. For example, several of the
improvements relating to the Opti-Probe product family were developed in
cooperation with some of our major customers to address the need for more
capable thin film measurement systems.

   Software development accounts for a significant portion of our research and
development efforts. We are currently transitioning all of our software
applications from DOS to the Microsoft NT operating system in order to better
serve our customers.

   Our ongoing engineering and research and development efforts can be
classified into three categories: new products; feature enhancements, such as
features to improve precision, speed and automation; and customer-driven
product enhancements, such as new measurement recipes or algorithms. We have
research and development and engineering staffs which work both on developing
new products and features and on responding to the particular needs of
customers.

   Engineering and research and development expenses were $15.1 million in
fiscal 1999, $19.1 million in fiscal 1998, and $13.1 million in fiscal 1997, or
23%, 17%, and 12% of net revenues for those periods, respectively. We expect
engineering and research and development expenditures will continue to
represent a substantial percentage of our revenues for the foreseeable future.

Manufacturing

   Our manufacturing strategy is to produce high quality, cost effective
assemblies and systems. We currently perform the majority of our system
assembly activities in-house. In order to lower production costs in the future,
we intend to perform only those manufacturing activities that add significant
value or that require unique technology or specialized knowledge. As a result,
we expect to rely increasingly on subcontractors and turnkey suppliers to
fabricate components, build assemblies and perform other activities in a cost
effective manner.

   Our principal manufacturing activities include assembly and test work, both
of which are conducted at our facility in Fremont, California. Assembly
activities include inspection, subassembly and final assembly. Test activities
include modular testing, system integration and final test. Components and
subassemblies, such as lasers, robots and stages, are acquired from third party
vendors and integrated into our finished systems. These

                                       43
<PAGE>


components and subassemblies are obtained from a limited group of suppliers,
and occasionally from a single source supplier. While we use standard
components and subassemblies wherever possible, most mechanical parts, metal
fabrications and critical components are engineered and manufactured to our
specifications. We have not entered into any formal agreements with such
limited source suppliers, other than long-term purchase orders and, in some
cases, volume pricing agreements. Those parts coming from a limited group of
suppliers are monitored by management to ensure that adequate supplies are
available to maintain manufacturing schedules and to reduce our dependence on
these suppliers should supply lines become interrupted. The partial or complete
loss of such suppliers could increase our manufacturing costs or delay product
shipments while we qualify new suppliers. Additionally, any such loss could
require us to redesign products, thereby having a material adverse effect on
our business or customer relationships. Furthermore, a significant increase in
the price of one or more of these components could adversely affect our
financial condition or results of operations.

   We schedule production based upon firm customer commitments and anticipated
orders. We have structured our production process and facility to be driven by
both orders and forecasts and have adopted a modular system architecture to
increase assembly efficiency and test flexibility. Cycle times for our products
are currently two to four months. We believe these cycle times will improve as
we continue to emphasize manufacturability in our new product designs.

   We conduct the assembly of certain optical components and final testing of
our systems in clean-room environments. This procedure is intended to (1)
reduce the amount of particulates and other contaminants in the final assembled
system; and (2) test our products against our customers' acceptance criteria
prior to shipment. Following the final test, the completed system is packaged
within triple vacuum sealed bags to maintain a high level of cleanliness during
shipment and installation. As part of our ongoing quality program, all systems
are monitored during the installation process.

Competition

   The market for semiconductor capital equipment is highly competitive. We
face substantial competition from established companies in each of the markets
that we serve. Some of our competitors have greater financial, engineering,
manufacturing and marketing resources and broader product offerings than
Therma-Wave. Significant competitive factors in the market for metrology
systems include system performance, ease of use, reliability, cost of ownership
to the customer, technical support and customer relationships. We believe we
compete favorably on the basis of these factors in each of our served markets.
We compete with both larger and smaller United States and Japanese companies in
the markets we serve. European companies are generally not significant
competitors in markets we serve.

   Our Therma-Probe systems compete primarily with other metrology systems
designed to measure ion implant dose, such as contact and destructive four-
point probe measurement systems, including those manufactured by KLA-Tencor
Corporation, Kokusai Electric Ltd. and Bio-Rad Semiconductor Systems. Our
Therma-Probe systems are the semiconductor industry's predominant non-contact,
non-destructive ion implant metrology systems for product wafers. Several years
ago, Jenoptik GmbH introduced a competitive product to our Therma-Probe
systems, which utilized thermal wave technology. In November 1997, we received
a favorable verdict for patent infringement by Jenoptik in the United States.
As a result of the settlement of this litigation, Jenoptik has agreed not to
sell any of such products in the United States and to pay us a royalty fee for
systems sold in Japan. To date, the sale of these products by Jenoptik has not
had a material impact on our market position. Our Opti-Probe systems primarily
compete with thin film metrology systems manufactured by KLA-Tencor, Rudolph
Technologies, Nanometrics and Dai Nippon Screen.

   In recent years, there has been significant merger and acquisition activity
among our competitors and potential competitors. Acquisitions by our
competitors and potential competitors could allow them to expand their product
offerings, which could afford such competitors and potential competitors an
advantage in meeting

                                       44
<PAGE>

customers' demands. The greater resources, including financial, marketing and
support resources, of competitors engaged in these acquisitions could permit
them to accelerate the development and commercialization of new products and
the marketing of existing products to their larger installed bases.
Accordingly, such business combinations and acquisitions could have a
detrimental impact on both our market share and the pricing of our products,
which could result in a material adverse effect on our business and results of
operations.

Patents and Proprietary Rights

   We believe the success of our business depends as much on the technical
competence, creativity and marketing abilities of our employees as on the
protection derived from our patents and other proprietary rights. Nevertheless,
our success will depend, at least in part, on our ability to obtain and
maintain patents and proprietary rights to protect our technology.

   We have a policy of seeking patents where appropriate on inventions
concerning new products and improvements as part of our ongoing engineering and
research and development activities. We have acquired a number of patents
relating to our two key product families, the Opti-Probe and Therma-Probe
systems. As of March 31, 1999, we owned 26 U.S. patents with expiration dates
ranging from 2004 to 2017 and had filed applications for eleven additional U.S.
patents. In addition, we owned 25 foreign patents with expiration dates ranging
from 2004 to 2017 and had filed applications for eleven additional foreign
patents.

   There can be no assurance that any of our pending patent applications will
be approved, that we will develop additional proprietary technology that is
patentable, that any patents owned by or issued to us will provide us with
competitive advantages or that these patents will not be challenged by any
third parties. Furthermore, there can be no assurance that third parties will
not design around our patents. Any of the foregoing results could have a
material adverse effect on our business, financial condition or results of
operations.

   In addition to patent protection, we rely upon trade secret protection for
our confidential and proprietary information and technology. We routinely enter
into confidentiality agreements with our employees. However, there can be no
assurance that these agreements will not be breached, that we will have
adequate remedies for any breach or that our confidential and proprietary
information and technology will not be independently developed by, or become
otherwise known, to third parties.

   As of March 31, 1999, we owned five registered trademarks in the U.S. and
one in Japan and had filed 11 trademark registration applications in the U.S.
and one in Japan.

Facilities

   Our executive offices and manufacturing, engineering, research and
development operations are located in a 102,000 square foot building in
Fremont, California with approximately 800 square feet of Class 100 clean rooms
for customer demonstrations and approximately 10,000 square feet of Class 1000
clean rooms for manufacturing. This facility is occupied under a lease expiring
in 2006 at an aggregate annual rental expense of approximately $1.0 million. We
have the option of extending this lease for another 15 years after 2006. We own
substantially all of the equipment used in our facilities. We believe that our
existing facilities and capital equipment are adequate to meet our current
requirements and that suitable additional or substitute space is readily
available if needed.

   We also lease sales and customer support offices in California, Florida,
Texas, Japan, Korea, Taiwan and the United Kingdom.

                                       45
<PAGE>

Employees

   As of March 31, 1999, we employed 338 persons, including 69 in engineering,
research and development, 83 in manufacturing, 138 in customer support, 21 in
sales and marketing and 27 in executive and administrative functions. Many of
our employees are highly trained and hold advanced post-graduate degrees in
science and engineering. None of our employees are represented by a labor union
or covered by a collective bargaining agreement. We consider our employee
relations to be good. We believe we have low employee turnover relative to our
industry and have been able to attract and retain a highly talented group of
managers, designers and engineers which enables us to continually improve our
products and customer support.

Legal Proceedings

   On July 19, 1994, we filed a patent infringement suit against Jenoptik in
the United States District Court for the Northern District of California. We
alleged that the manufacture and sale by Jenoptik of its TWIN and TWIN SC
systems infringed six of our United States patents that are related to our
Therma-Probe ion implant metrology systems. Jenoptik denied infringement and
claimed that our patents were invalid and unenforceable.

   On February 1, 1996, we filed a patent infringement suit against Jenoptik in
the Patent Court in Dusseldorf, Germany. We alleged that the manufacture and
sale by Jenoptik of its TWIN and TWIN SC systems infringed our German
counterpart to one of our United States patents being asserted against Jenoptik
in the United States lawsuit. This German counterpart patent was found to be
invalid by a patent court in Munich, Germany.

   On November 26, 1997, we received a favorable jury verdict in our United
States patent infringement suit against Jenoptik. The jury found all six of our
patents valid and concluded that Jenoptik infringed all thirty-one claims at
issue from these patents. As a result of the settlement of this litigation,
Jenoptik has agreed not to sell any of such products in the United States and
to pay us a royalty fee for systems sold in Japan. To date, the sale of these
products by Jenoptik has not had a material impact on our market position. This
settlement resolved all outstanding legal claims and pending appeals relating
to these matters.

   On June 5, 1998, at our request, the United States Patent Office initiated
an interference proceeding between Therma-Wave and Rudolph Technologies. The
subject matter of the interference relates to ellipsometer technology which
Rudolph employs in its commercial devices. We believe we developed and patented
this technology prior to Rudolph. The interference proceedings will determine
ownership of the technology. A successful outcome of the interference
proceeding may result in Rudolph being required to pay us licensing fees. Since
we have not commercialized this technology, an unsuccessful outcome in the
interference proceeding would not have a material adverse effect on us.

   On September 3, 1998, we were named in a patent infringement suit filed by
KLA-Tencor. KLA-Tencor alleged that it patented an aspect of the thin film
thickness measuring technology that we use in our Opti-Probe product family.
KLA-Tencor is seeking damages and an injunction to stop the sale of the
equipment they allege uses this aspect. We believe none of our products
infringe any of the claims of KLA-Tencor's patent and that their infringement
allegations are unfounded. We intend to vigorously defend our position, and we
expect to prevail.

   On January 14, 1999, we commenced an action against KLA-Tencor for patent
infringement with respect to one of our fundamental thin film technology
combination patents. The suit seeks damages for patent infringement and a
permanent injunction against any future activities undertaken by KLA-Tencor or
any third party working in conjunction with them, which infringe on our patent.
The suit was filed as a counterclaim in the infringement action initiated by
KLA-Tencor and also seeks a declaratory judgment that KLA-Tencor's patent,
which we were alleged of infringing, is invalid and not infringed by any of our
systems.

   There can be no assurances, however, that we will prevail in any ongoing
patent litigation described above. We believe, however, the litigation
described above will not have a material adverse effect on our business,
financial condition or results of operations.

                                       46
<PAGE>

   We are also involved in various legal proceedings from time to time arising
in the ordinary course of business, none of which are expected to have a
material adverse effect on our business or financial condition.

Environmental Matters

   Therma-Wave, like all manufacturing companies, is subject to various
federal, state and local environmental statutory requirements. We believe we
are in material compliance with existing applicable environmental laws and
regulations and possess all permits and licenses necessary to conduct our
business.

                                       47
<PAGE>

                                   MANAGEMENT

Executive Officers, Directors and Key Employees

   Executive officers, directors and certain key employees of Therma-Wave are
as follows:

<TABLE>
<CAPTION>
           Name             Age                       Position
           ----             ---                       --------
   <S>                      <C> <C>
   Allan Rosencwaig........ 57  Chairman of the Board and Chief Executive Officer

   Martin M. Schwartz...... 54  President, Chief Operating Officer and Director

   L. Ray Christie......... 55  Vice President, Chief Financial Officer and Secretary

   David Mak............... 41  Vice President, Factory Operations

   Jon L. Opsal............ 57  Vice President, Research and Development

   Raymond Osofsky......... 48  Vice President, Engineering

   W. Lee Smith............ 49  Vice President, Strategic Marketing

   David Willenborg........ 48  Vice President, Marketing/Software Projects

   G. Leonard Baker, Jr ... 55  Director

   David Dominik........... 41  Director

   Adam W. Kirsch.......... 37  Director
</TABLE>

   We anticipate that two additional directors will be appointed to the board
of directors following the completion of this offering.

   Allan Rosencwaig co-founded Therma-Wave in January 1982 and has served as
its Chairman and Chief Executive Officer since that time. In addition, Dr.
Rosencwaig served as President from January 1982 to April 1998 and from May
1994 to August 1998. Prior to founding Therma-Wave, Dr. Rosencwaig was a Group
Leader at the Lawrence Livermore National Laboratory from 1977 to 1982 and a
Member of Technical Staff at AT&T Bell Laboratories from 1969 to 1977. Dr.
Rosencwaig holds Bachelor of Science, Master of Science and Ph.D. degrees in
physics from the University of Toronto.

   Martin M. Schwartz joined Therma-Wave in August 1998 as its President, Chief
Operating Officer and Director. Mr. Schwartz served as a director, President
and Chief Executive Officer of Southwall Technologies Inc. from May 1994 to
March 1998. From April 1988 to May 1994, he served as Vice President,
Operations of Southwall. From July 1974 to April 1988, Mr. Schwartz served in
various positions at Raychem Corporation, including Director of Operations.
From 1967 to 1974, he served in various positions at Standard Oil of
California. Mr. Schwartz holds a Bachelor of Science in engineering and a
Master of Science in chemical engineering from Cornell University and a Masters
of Business Administration degree in management and finance from California
State University, San Francisco.

   L. Ray Christie joined Therma-Wave in August 1998 as its Vice President,
Chief Financial Officer and Secretary. From April 1996 to July 1998, Mr.
Christie has served as the Vice President, Chief Financial Officer and
Secretary of Southwall, and from February 1990 to November 1993, as controller
for Southwall. From November 1993 to March 1996, he served in various positions
with a subsidiary of California Microwave, Inc., including Vice President
Finance and Administration. From June 1981 to January 1990, he served as
controller of the Farinon Division of Harris Corporation. From May 1969 to June
1981, he served in various positions of Potlatch Corporation, including
controller of their Packaging Division.

   David Mak joined Therma-Wave in October 1992 and has served as its Vice
President, Factory Operations since November 1996. Mr. Mak has also served as
the Manufacturing Manager and Director of Manufacturing. Prior to joining
Therma-Wave, Mr. Mak served in a variety of positions at Tencor Instruments,
including Manufacturing Engineering Manager, Mechanical Design Engineering
Manager, and Project Manager. Mr. Mak also served as Senior Mechanical Engineer
for Priam Corp., Advisory Engineer for Optimem, and Product Engineer for
Memorex Corp. Mr. Mak holds a Bachelor of Science degree in mechanical
engineering from the Polytechnic Institute of New York.

                                       48
<PAGE>

   Jon L. Opsal joined Therma-Wave in September 1982 and has served as its Vice
President, Research and Development since June 1994. Mr. Opsal has served in
several research and management positions since that time, including Senior
Scientist, Manager of Analytical Software, Manager of the Physics Department,
Manager of Research and Development Director of Research and Development. Prior
to joining Therma-Wave, Dr. Opsal was a physicist at the Lawrence Livermore
National Laboratory from 1978 to 1982 and a Research Associate and Assistant
Professor at Michigan State University from 1974 to 1978. Dr. Opsal holds a
Bachelor of Arts degree in physics and mathematics from Eastern Washington
University and Master of Science and Ph.D. degrees in physics from Michigan
State University.

   Ray Osofsky joined Therma-Wave in 1993 and has served as Vice President,
Engineering since November 1998. Mr. Osofsky has also served as the Director of
Engineering, Director of Opti-Probe Engineering and Opti-Probe Manager. From
1985 to 1993, Mr. Osofsky was employed by KLA Instruments Corp., most recently
as Director of Engineering. Mr. Osofsky holds a Bachelor of Science in
electrical engineering from the University of California at Davis and a Master
of Science in computer engineering from Santa Clara University.

   W. Lee Smith joined Therma-Wave in March 1983 and has served as its Vice
President, Strategic Marketing since June 1995. Mr. Smith has also served as
its Research Group Leader, Applications Manager, Director of Applications, Vice
President, Product Development and Vice President, Marketing. From 1976 to
1983, Dr. Smith was a physicist and Nonlinear Optics Group Leader at the
Lawrence Livermore National Laboratory. Dr. Smith holds a Bachelor of Science
degree in physics from North Carolina State University and a Ph.D. in physics
from Harvard University.

   David Willenborg co-founded Therma-Wave with Dr. Rosencwaig in January 1982
and has served as its Vice President, Marketing/Software Projects since October
1998. Mr. Willenborg has also served as Director of Engineering, Vice
President, Engineering, Vice President, Technology and Vice President,
Marketing. Prior to founding Therma-Wave, Mr. Willenborg was an engineer at the
Lawrence Livermore National Laboratory from 1975 to 1982 and at McDonnell-
Douglas Aerospace from 1972 to 1973. Mr. Willenborg holds Bachelor of Science
and Master of Science degrees in electrical engineering from the University of
Illinois.

   G. Leonard Baker, Jr. has served as a Director of Therma-Wave since May
1997. Mr. Baker has been a Managing Director of the General Partner of Sutter
Hill Ventures since 1974. Mr. Baker joined Sutter Hill Ventures in 1973, and,
prior to that time, was Manager of Product Planning for Europe, Africa and
India at Cummins Engine Company, where he also held various manufacturing
positions. He serves on the board of several companies primarily in the high-
technology area.

   David Dominik has served as a Director of Therma-Wave since May 1997. Mr.
Dominik has been a General Partner of Information Partners, L.P. since January
1990 and Managing Director of Information Partners, Inc. since June 1993. In
addition, Mr. Dominik has been a Managing Director of Bain Capital, Inc. ("Bain
Capital") since May 1993. Mr. Dominik also serves as a director of Oasis
Healthcare Inc., Dynamic Details, Incorporated, Integrated Circuit Systems,
Inc., OneSource Information Services, Inc. and several privately held
companies.

   Adam W. Kirsch has served as a Director of Therma-Wave since May 1997. Mr.
Kirsch has been a Managing Director of Bain Capital since May 1993 and a
general partner of Bain Venture Capital since 1990. Mr. Kirsch joined Bain
Venture Capital in 1985 as an associate and, prior to joining Bain Venture
Capital, Mr. Kirsch was a consultant at Bain & Company where he worked in
mergers and acquisitions. He serves on the board of several companies including
Brookstone, Inc., Dade Behring Inc. and Wesley Jessen VisionCare, Inc.

   At present, all directors are elected and serve until a successor is duly
elected and qualified or until his or her earlier death, resignation or
removal. All members of the board of directors set forth herein were elected
pursuant to a stockholders agreement that was entered into in connection with
the recapitalization. See "Certain Relationships and Related Transactions."
There are no family relationships between any of our directors or executive
officers. Our executive officers are elected by, and serve at the discretion
of, the board of directors.

                                       49
<PAGE>

   Prior to the completion of this offering, our board will be divided into
three classes, as nearly equal in number as possible, with each director
serving a three-year term and one class being elected at each year's annual
meeting of stockholders. The two additional directors anticipated to be
appointed by the board will be in the class of directors whose term expires at
the 2000 annual meeting of our stockholders. Messrs. Schwartz and Dominik will
be in the class of directors whose term expires at the 2001 annual meeting of
our stockholders. Messrs. Rosencwaig, Kirsch and Baker will be in the class of
directors whose term expires at the 2002 annual meeting of our stockholders. At
each annual meeting of our stockholders, successors to the class of directors
whose term expires at such meeting will be elected to serve for three-year
terms or until their respective successors are elected and qualified.

Compensation of Executive Officers

   The following table sets forth information concerning the compensation for
fiscal 1999, 1998 and 1997 for our chief executive officer and our four other
most highly compensated executive officers at the end of our last fiscal year.
For ease of reference, we collectively refer to these executive officers
throughout this section as our "named executive officers."

                           Summary Compensation Table

<TABLE>
<CAPTION>
                                                                    Long-Term
                                      Annual                       Compensation
                                   Compensation                       Awards
                                 -----------------                 ------------
                                                      Other Annual  Securities
                          Fiscal           Bonus      Compensation  Underlying     All Other
Name and Position          Year   Salary    ($)         ($) (1)     Options #   Compensation ($)
- -----------------         ------ -------- --------    ------------ ------------ ----------------
<S>                       <C>    <C>      <C>         <C>          <C>          <C>
Allan Rosencwaig........   1999  $429,236 $    --         --             --         $63,245(2)
 Chairman and              1998   417,508  318,623(3)     --         671,875         54,679(2)
 Chief Executive Officer   1997   332,846  243,989(4)     --             --           1,898(5)

Martin M. Schwartz (6)..   1999  $161,042      --         --         200,000            --
 President and
 Chief Operating Officer

Jon L. Opsal............   1999  $192,532 $    --         --             --         $ 1,262(7)
 Vice President,           1998   186,482   68,247(3)     --         127,656          1,107(7)
 Research and              1997   168,184   56,637(4)     --             --             --
  Development

David Willenborg........   1999  $164,592 $    --         --             --         $ 6,910(7)
 Vice President,           1998   160,368   52,930(3)     --         100,781          6,063(7)
 Marketing                 1997   154,479   50,778(4)     --             --             --

David Mak...............   1999  $164,739 $    --         --             --             --
 Vice President,           1998   154,830   58,767(3)     --          38,650            --
 Factory Operations        1997   143,453   47,523(3)     --             --             --
</TABLE>
- --------
(1) None of the perquisites and other benefits paid to each named executive
    officer exceeded the lesser of $50,000 or 10% of the total annual salary
    and bonus received by each named executive officer. Does not include
    amounts received by the named executive officers during fiscal 1998 from
    our prior owner. See "Certain Relationships and Related Transactions--
    Payments to Executive Officers."
(2) Includes insurance premiums paid by us on behalf of Dr. Rosencwaig of
    $9,669 and $7,671 for fiscal 1998 and fiscal 1999, respectively. The
    balance represents imputed interest on outstanding borrowings from Therma-
    Wave.
(3) Reflects bonuses paid to Messrs. Rosencwaig, Opsal, Willenborg and Mak in
    fiscal 1998 as a result of Therma-Wave achieving certain performance
    targets in fiscal 1998.
(4) Reflects bonuses paid to Messrs. Rosencwaig, Opsal, Willenborg and Mak in
    fiscal 1997 as a result of Therma-Wave achieving certain performance
    targets in fiscal 1997.
(5) Reflects insurance premiums paid by us on behalf of Dr. Rosencwaig.
(6) Mr. Schwartz joined Therma-Wave in August 1998.
(7) Reflects imputed interest on outstanding borrowings from Therma-Wave.


                                       50
<PAGE>

Option Grants in Last Fiscal Year

   The following table sets forth information regarding stock options granted
by us to the named executive officers during our last fiscal year. Stock
options are generally granted at 100% of the fair value of Therma-Wave's common
stock as determined by the board of directors on the date of grant. In reaching
the determination of fair value at the time of each grant, the board of
directors considers a range of factors, including Therma-Wave's current
financial position, its recent revenues, results of operations and cash flows,
its assessment of Therma-Wave's competitive position in its markets and
prospects for the future, the status of Therma-Wave's product development and
marketing efforts, current valuations for comparable companies and the
illiquidity of an investment in Therma-Wave's common stock.

<TABLE>
<CAPTION>
                          Number of
                          Securities % of Total                                   Potential Realizable
                          Underlying  Options                Market                 Value at Assumed
                           Options   Granted in Exercise or Price on              Annual Rate of Stock
                           Granted     Fiscal   Base Price   Date of  Expiration Price Appreciation for
          Name               (a)        Year     ($/Share)  Grant (b)  Date (c)      Option Term (d)
          ----            ---------- ---------- ----------- --------- ---------- -----------------------
                                                                                   5%($)       10%($)
                                                                                 ---------- ------------
<S>                       <C>        <C>        <C>         <C>       <C>        <C>        <C>
Allan Rosencwaig........       --        --          --         --         --           --           --
Martin M. Schwartz (e)..   200,000      62.5%      $4.00      $4.00     8/3/08     $504,000   $1,275,000
Jon L. Opsal............       --        --          --         --         --           --           --
David Willenborg........       --        --          --         --         --           --           --
David Mak...............       --        --          --         --         --           --           --
</TABLE>
- --------
(a) All options listed in the table vest in five equal installments beginning
    on the first anniversary of their grant date.
(b) Market price on the date of grant was determined by our board of directors
    based upon a good faith estimate.
(c) Options will expire on the earlier of 90 days after the date of termination
    of employment or the date indicated above.
(d) Amounts reflect certain assumed rates of appreciation set forth in the
    executive compensation disclosure rules of the SEC. Actual gains, if any,
    on stock option exercises depend on future performance of our stock and
    overall market conditions. At an annual rate of appreciation of 5% per year
    for the option term, the price of the Class B common stock would be
    approximately $6.52 per share. At an annual rate of appreciation of 10% per
    year for the option term, the price of the Class B common stock would be
    approximately $10.37 per share.
(e) Mr. Schwartz joined Therma-Wave in August 1998.

Option Exercises in Last Fiscal Year and Fiscal Year End Option Values

   The following table sets forth information for the named executives officers
concerning stock option exercises during our last fiscal year and options
outstanding at the end of the last fiscal year:

<TABLE>
<CAPTION>
                                                             Number of        Value of Unexercised
                                                       Securities Underlying      In-the-Money
                                                        Unexercised Options        Options at
                                                        at Fiscal Year End   Fiscal Year End ($) (a)
                                                       --------------------- -----------------------
                          Shares Acquired    Value        Unexercisable/         Unexercisable/
       Name                 on Exercise   Realized ($)      Exercisable            Exercisable
       ----               --------------- ------------ --------------------- -----------------------
<S>                       <C>             <C>          <C>                   <C>
Allan Rosencwaig........        --            --             0/671,875                    0/0
Martin M. Schwartz (b)..        --            --             200,000/0             $600,000/0
Jon L. Opsal............        --            --             0/127,656                    0/0
David Willenborg........        --            --             0/100,781                    0/0
David Mak...............        --            --              0/38,650                    0/0
</TABLE>
- --------
(a) Based on an estimated fair market value of the Class B common stock at
    March 31, 1999.
(b) Mr. Schwartz joined Therma-Wave in August 1998.


                                       51
<PAGE>

Compensation Committee Interlocks and Insider Participation

   We currently do not have a compensation committee. The compensation
arrangements for each of our executive officers was established pursuant to the
terms of the respective employment agreements between us and each executive
officer. The terms of the employment agreements were established pursuant to
arms-length negotiations between representatives of Bain Capital and each
executive officer, except those agreements relating to Messrs. Schwartz and
Christie, which were negotiated with Therma-Wave and approved by the board of
directors. On a going forward basis, any changes in the compensation
arrangements of our executive officers will be determined by the board of
directors.

Committees of the Board of Directors

   Prior to this offering, our board of directors had one committee, the audit
committee. Immediately prior to the completion of this offering, the board of
directors will establish an additional committee, the compensation committee.

   The audit committee makes recommendations to the board of directors
regarding the independent auditors to be nominated for election by the
stockholders and reviews the independence of such auditors, approves the scope
of the annual audit activities of the independent auditors, approves the audit
fee payable to the independent auditors and reviews such audit results with the
independent auditors. The audit committee is currently comprised of Messrs.
Dominik and Baker and, following this offering, will be comprised of a majority
of directors not otherwise affiliated with us or any of our principal
stockholders. PricewaterhouseCoopers LLP presently serves as our independent
auditors.

   The duties of the compensation committee will be to provide a general review
of our compensation and benefit plans to ensure that they meet corporate
objectives. In addition, the compensation committee will review the chief
executive officer's recommendations on (1) compensation of all of our officers
and (2) adopting and changing major compensation policies and practices, and
report its recommendations to the whole board of directors for approval and
authorization. The compensation committee will administer our stock plans and
is expected to be comprised of at least two non-employee directors (as defined
in Rule 16b-3 under the Exchange Act). The board may also establish other
committees to assist in the discharge of its responsibilities.

Employment Agreements

   In connection with the recapitalization, we entered into an employment
agreement with Dr. Allan Rosencwaig. The employment agreement provides that Dr.
Rosencwaig will serve as the Chairman of the Board, President and Chief
Executive Officer for a period that will end on the fifth anniversary of the
consummation of the recapitalization. In August 1998, however, the board and
Dr. Rosencwaig agreed that Mr. Schwartz would be appointed to the position of
President. The employment period established under the employment agreement
will automatically terminate upon Dr. Rosencwaig's resignation, death or
disability or termination for good reason, or upon termination by us, with or
without cause. Under the employment agreement, Dr. Rosencwaig will receive:

  .  an annual base salary of at least $400,000, subject to annual review by
     the board and certain annual increases beginning in 1998;

  .  an annual bonus based upon our achievement of certain operating targets
     and the attainment of certain individual goals by Dr. Rosencwaig, each
     to be determined by the board on an annual basis; and

  .  certain fringe benefits.

   In addition, Dr. Rosencwaig is also entitled to receive a deferred payment
in the event we achieve certain operating results. See "Certain Relationships
and Related Transactions--Management Equity Purchases."


                                       52
<PAGE>


   If the employment period is terminated by us without cause, by Dr.
Rosencwaig for good reason or as a result of his disability, Dr. Rosencwaig
will be entitled to receive his then current base salary, a bonus equal to 50%
of his base salary and fringe benefits for 30 months following such
termination. This 30-month period is referred to herein as the "severance
period." If the employment period is terminated by us for cause or if
Dr. Rosencwaig resigns without good reason, Dr. Rosencwaig will be entitled to
receive his then current base salary through the date of termination. Under the
employment agreement, Dr. Rosencwaig has agreed not to:

  .  compete with us during the period in which he is employed by us;

  .  disclose any confidential information during the period in which he is
     employed by us and for five years thereafter;

  .  solicit any customer, supplier, licensee, licensor, franchisee or other
     business relation of ours while he is employed by us, during the
     severance period and for a period of 30 months thereafter; and

  .  solicit or hire any of our management employees for a period of 30
     months following the date of termination.

   In addition, Dr. Rosencwaig has agreed to disclose to us any and all
inventions, as defined in such employment agreement, relating to our business
conceived or learned by him during his employment and acknowledge that such
inventions will be our property.

   We also entered into substantially similar employment agreements with
Messrs. Willenborg, Smith, Opsal and Lin at the time of the recapitalization
and with Messrs. Schwartz and Christie in August 1998. Mr. Lin's employment
agreement was terminated in July 1998 in connection with his voluntary
resignation. Each of the employment agreements provide that such executive will
serve with Therma-Wave in his current position for a period that will end on
the fifth anniversary of the consummation of the recapitalization or, in the
case of Messrs. Schwartz and Christie, August 2003; provided, however, that
each executive's employment period will automatically terminate upon such
executive's resignation, death or disability or termination for good reason (as
defined therein), or upon termination by Therma-Wave, with or without cause (as
defined therein). Under their respective employment agreement, Messrs.
Schwartz, Christie, Willenborg, Smith and Opsal will receive:

  .  an annual base salary of at least the following, subject to review by
     the board and our president or chief executive officer:

<TABLE>
<CAPTION>
       Name                                                  Annual Base Salary
       ----                                                  ------------------
       <S>                                                   <C>
       Martin M. Schwartz...................................      $265,000
       L. Ray Christie......................................      $155,000
       David Willenborg.....................................      $168,480
       W. Lee Smith.........................................      $143,859
       Jon L. Opsal.........................................      $197,077
</TABLE>

  .  an annual bonus based upon our achievement of certain operating targets
     and the attainment of certain individual goals by such executive, each
     to be determined by the board and our president or chief executive
     officer on an annual basis; and

  .  certain fringe benefits.

   In addition, each executive other than Messrs. Schwartz and Christie is also
entitled to receive a deferred payment in the event we achieve certain
operating results. See "Certain Relationships and Related Transactions--
Management Equity Purchases."

   If the executive's employment is terminated by us without cause, by such
executive for good reason or as a result of his disability, the executive will
be entitled to receive his then current base salary, a bonus equal to 30% to
37.5% of base salary and fringe benefits for 15 months or, in the case of Mr.
Christie, 6 months

                                       53
<PAGE>


following such termination and, in the case of Mr. Schwartz, 15 months if he is
terminated after August 3, 2000 and 12 months if he is terminated before such
time. Such 6-month, 15-month and 12-month periods are each referred to herein
as an "executive severance period." If the executive's employment is terminated
by us for cause or if such executive resigns without good reason, such
executive will be entitled to receive his then current base salary through the
date of termination. Under these employment agreements, each executive has
agreed not to:

  .  compete with us during the period in which he is employed by us;

  .  disclose any confidential information during the period in which he is
     employed by us and for all times thereafter;

  .  solicit any customer, supplier, licensee, licensor, franchisee or other
     business relation of ours while he is employed by us, during the
     applicable executive severance period and for two years thereafter; and

  .  solicit or hire any of our employees for a period of five years
     following the date of termination.

   In addition, each executive has agreed to disclose to us any and all
inventions, as defined in such employment agreement, relating to our business
conceived or learned by him during his employment with us and acknowledge that
such inventions will be our property.

Compensation of Directors

   Directors serving on the board of directors are currently not entitled to
receive any compensation for serving on the board. Directors are reimbursed for
their out-of-pocket expenses incurred in connection with such services.
Following this offering, directors who are not employees of Therma-Wave or who
are not otherwise affiliated with our principal stockholders will receive an
annual fee of $   .

Stock Plans

 1997 Stock Purchase and Option Plan

   In connection with the recapitalization, our board of directors adopted the
Therma-Wave, Inc. 1997 Stock Purchase and Option Plan, or the "1997 Stock
Plan," which authorizes the granting of stock options and the sale of Class A
common stock or Class B common stock to current or future employees, directors,
consultants or advisors of Therma-Wave or its subsidiaries. Under the 1997
Stock Plan, the board is authorized to sell or otherwise issue any class or
classes of common stock at any time prior to the termination of the 1997 Stock
Plan in such quantity, at such price, on such terms and subject to such
conditions as established by board up to an aggregate of 3,000,000 shares of
Class A common stock and 3,000,000 shares of Class B common stock, including
shares of common stock with respect to which options may be granted, subject to
adjustment upon the occurrence of certain events to prevent any dilution or
expansion of the rights of participants that might otherwise result from the
occurrence of such events. As of March 31, 1999, an aggregate of 1,118,092
shares of Class B common stock, a portion of which is subject to repurchase,
were outstanding, and options to purchase an aggregate of 1,354,831 shares of
Class B common stock were outstanding, with exercise prices ranging from $4.00
to $15.89 per share, under the 1997 Stock Plan.

 1997 Employee Stock Purchase and Option Plan

   On October 31, 1997, the Board of Directors approved the 1997 Employee Stock
Purchase and Option Plan, or the "1997 Employee Stock Plan," which authorizes
the granting of stock options and the sale of Class A common stock or Class B
common stock to current or future employees, directors, consultants or advisors
of Therma-Wave or its subsidiaries. The 1997 Employee Stock Plan authorizes the
granting of stock options up to an aggregate of 689,375 shares of Class A
common stock and 689,375 shares of Class B common stock, subject to adjustment
upon the occurrence of certain events to prevent any dilution or expansion of
the rights of participants that might otherwise result from the occurrence of
such events.

                                       54
<PAGE>

   Options to purchase an aggregate of 376,255 shares of Class B common stock
were outstanding as of March 31, 1999 under the 1997 Employee Stock Plan. Such
options will vest and become exercisable in four equal installments beginning
on the first anniversary of the grant date and continuing thereafter on an
annual basis. Unvested options will terminate in the event that the optionee
ceases to be employed with Therma-Wave and vested but unexercised options will
terminate immediately if the optionee is terminated for cause or after 30 days,
or such other period as may be specified in any particular option agreement, if
the optionee ceases to be employed by Therma-Wave for any other reason. As of
the date of this prospectus, most of our option agreements provide that options
will immediately terminate after 90 days if the optionee ceases to be employed
by Therma-Wave for any reason other than cause. All of the options granted have
an exercise price equal to the fair market value of the Class B common stock on
the date of grant.

 1997 Special Employee Stock Purchase and Option Plan

   On October 31, 1997, our board of directors approved the 1997 Special
Employee Stock Purchase and Option Plan, or the "1997 Special Employee Stock
Plan," which authorizes the granting of stock options and the sale of Class A
common stock or Class B common stock to current or future employees, directors,
consultants or advisors of Therma-Wave or its subsidiaries. The 1997 Special
Employee Stock Plan authorizes the granting of stock options up to an aggregate
of 53,125 shares of Class A common stock and 53,125 shares of Class B common
stock, subject to adjustment upon the occurrence of certain events to prevent
any dilution or expansion of the rights of participants that might otherwise
result from the occurrence of such events.

   Options to purchase an aggregate of 47,000 shares of Class B common stock
were outstanding as of March 31, 1999 under the 1997 Special Employee Stock
Plan. Such options will vest and become exercisable in four equal installments
beginning on the first anniversary of the grant date and continuing thereafter
on an annual basis. Unvested options will terminate in the event that the
optionee ceases to be employed by Therma-Wave and vested but unexercised
options will terminate immediately if the optionee is terminated for cause or
after 30 days, or such other period as may be specified in any particular
option agreement, if the optionee ceases to be employed by Therma-Wave for any
other reason. As of the date of this prospectus, most of our option agreements
provide that options will immediately terminate after 90 days if the optionee
ceases to be employed by Therma-Wave for any reason other than cause. All of
the options granted have an exercise price equal to the fair market value of
the Class B common stock on the date of grant.

   The 1997 Special Employee Stock Plan and the 1997 Employee Stock Plan are
referred to herein as the "1997 Plans."

 1999 Equity Incentive Plan

   The 1999 Equity Incentive Plan, or the "1999 Plan," is expected to be
adopted by our board of directors and approved by our stockholders prior to the
completion of this offering. As of the date of this prospectus, no awards have
been made under the 1999 Plan. The 1997 Plans will be terminated and no future
grants will be made thereunder upon the effectiveness of the 1999 Plan.

   The 1999 Plan provides for the grant of incentive stock options to our
employees (including officers and employee directors) and for the grant of
nonstatutory stock options and to our employees, directors and consultants. A
total of (1)     shares of common stock, (2) any shares returned to the 1997
Plans as a result of termination of options and (3) annual increases to be
added on the date of each annual meeting of stockholders of Therma-Wave
commencing in 2000 equal to  % of the outstanding shares of common stock, or
such lesser amount as may be determined by the board of directors, are
currently reserved for issuance pursuant to the 1999 Plan.

   The administrator of the 1999 Plan has the power to determine the terms of
the options granted, including the exercise price of the option, the number of
shares subject to each option, the exercisability thereof, and the form of
consideration payable upon such exercise. In addition, our board of directors
has the authority to amend, suspend or terminate the 1999 Plan, provided that
no such action may affect any share of common stock previously issued and sold
or any option previously granted under the 1999 Plan.

                                       55
<PAGE>

   Options granted under the 1999 Plan are generally not transferable by the
optionee, and each option is exercisable during the lifetime of the optionee
and only by such optionee. Options granted under the 1999 Plan must generally
be exercised within 3 months after the end of an optionee's status as an
employee, director or consultant of Therma-Wave, or within 18 months after such
optionee's termination by death or disability, but in no event later than the
expiration of the option term.

   The exercise price of all incentive stock options granted under the 1999
Plan must be at least equal to the fair market value of the common stock on the
date of grant. The exercise price of nonstatutory stock options granted under
the 1999 Plan is determined by the administrator, but with respect to
nonstatutory stock options intended to qualify as "performance-based
compensation" within the meaning of Section 162(m) of the Code, the exercise
price must be at least equal to the fair market value of the common stock on
the date of grant. With respect to any participant who owns stock possessing
more than 10% of the voting power of all classes of the outstanding capital
stock of Therma-Wave, the exercise price of any incentive stock option granted
must be at least equal to 110% of the fair market value on the grant date and
the term of such incentive stock option must not exceed five years. The term of
all other options granted under the 1999 Plan may not exceed ten years.

   The 1999 Plan provides that in the event of a merger of Therma-Wave with or
into another corporation, or a sale of substantially all of our assets, each
option shall be assumed or an equivalent option substituted for by the
successor corporation. If the outstanding options are not assumed or
substituted for by the successor corporation, the administrator shall provide
for the optionee to have the right to exercise the option as to all of the
optioned stock, including shares as to which it would not otherwise be
exercisable. If the administrator makes an option exercisable in full in the
event of a merger or sale of assets, the administrator shall notify the
optionee that the option shall be fully exercisable for a period of fifteen
(15) days from the date of such notice, and the option will terminate upon the
expiration of such period.

Employee Stock Purchase Plan

   The 1999 Employee Stock Purchase Plan, or the "Stock Purchase Plan," will be
adopted by our board of directors and our stockholders prior to the completion
of this offering. The Stock Purchase Plan will be established to give employees
desiring to do so a convenient means of purchasing shares of common stock
through payroll deductions. The Stock Purchase Plan provides an incentive to
participate by permitting purchases at a discounted price. We believe that
ownership of stock by employees will foster greater employee interest in the
success, growth and development of Therma-Wave.

   Subject to certain restrictions, each of our employees is eligible to
participate in the Stock Purchase Plan if he or she has been employed by us for
more than six months. Participation is discretionary with each eligible
employee. We have reserved     shares of common stock for issuance in
connection with the Stock Purchase Plan. Each eligible employee is entitled to
purchase a maximum of     shares per year. Elections to participate and
purchases of stock will be made on a quarterly basis. Each participating
employee contributes to the Stock Purchase Plan by choosing a payroll deduction
in any specified amount. A participating employee may increase or decrease the
amount of such employee's payroll deduction, including a change to a zero
deduction as of the beginning of any calendar quarter. Elected contributions
will be credited to participants' accounts at the end of each calendar quarter.
In addition, employees may make lump sum contributions at the end of the year
to enable them to purchase the maximum number of shares available for purchase
during the plan year.

   Set forth below is a summary of how the Stock Purchase Plan will operate:

  .  Each participating employee's contributions will be used to purchase
     shares for the employee's share account within 15 days after the last
     day of each calendar quarter.

  .  The cost per share is 85% of the lower of the closing price of our
     common stock on the Nasdaq National Market on the first or the last day
     of the calendar quarter.

                                       56
<PAGE>

  .  The number of shares purchased on each employee's behalf and deposited
     in his/her share account is based on the amount accumulated in such
     participant's cash account and the purchase price for shares with
     respect to any calendar quarter.

  .  Shares purchased under the Stock Purchase Plan carry full rights to
     receive dividends declared from time to time.

  .  Any dividends attributable to shares in the employee's share account are
     automatically used to purchase additional shares for such employee's
     share account.

  .  Share distributions and share splits will be credited to the
     participating employee's share account as of the record date and
     effective date, respectively.

  .  A participating employee has full ownership of all shares in his/her
     share account and may withdraw them for sale or otherwise by written
     request to the committee following the close of each calendar quarter.

   Subject to applicable federal securities and tax laws, the board of
directors has the right to amend or to terminate the Stock Purchase Plan.
Amendments to the Stock Purchase Plan will not affect a participating
employee's right to the benefit of the contributions made by such employee
prior to the date of any such amendment. In the event the Stock Purchase Plan
is terminated, the committee is required to distribute all shares held in each
participating employee's share account plus an amount of cash equal to the
balance in each participating employee's cash account.

                                       57
<PAGE>

                            PRINCIPAL STOCKHOLDERS

   The following table sets forth certain information regarding our beneficial
ownership as of March 31, 1999 by:

  .  each person or entity known to us to own more than 5% of any class of
     outstanding voting securities; and

  .  each of our directors, each named executive officer and all of our
     directors and executive officers as a group.

All of the outstanding shares of Class A common stock, Class B common stock
and Class L common stock will be reclassified into a single class of common
stock in the Reclassification. The actual number of shares of common stock to
be issued to each holder of Class L common stock in the Reclassification is
subject to change based upon changes in the initial public offering price and
the completion date of this offering. See "The Reclassification." To our
knowledge, each of such stockholders has sole voting and investment power as
to the shares shown unless otherwise noted. Beneficial ownership of the
securities listed in the table has been determined in accordance with the
applicable rules and regulations promulgated under the Securities Exchange Act
of 1934.

<TABLE>
<CAPTION>
                                                Shares Beneficially Owned
                              --------------------------------------------------------------
                              Class A Common Stock Class B Common Stock Class L Common Stock
                              -------------------- -------------------- --------------------
                              Number of Percentage Number of Percentage Number of Percentage
Name and Address               Shares    of Class   Shares    of Class   Shares    of Class
- ----------------              --------- ---------- --------- ---------- --------- ----------
<S>                           <C>       <C>        <C>       <C>        <C>       <C>
Principal Stockholders:
Bain Capital Funds (1)......  5,536,948    61.0%         --       --%    615,217     61.0%
 c/o Bain Capital, Inc.
 Two Copley Place
 Boston, Massachusetts 02116
Sutter Hill Ventures (2)....  1,642,382    18.1          --      --      182,487     18.1
 755 Page Mill Road
 Palo Alto, California 94304
Toray Industries, Inc. (3)..    980,818    10.8          --      --       44,630      4.4
 8-1, Mihama 1-chome
 Urayasu, Chiba 279, Japan
Shimadzu Corporation (4)....    287,207     3.2          --      --       13,069      1.3
 1, Nishinokyo-Kuwabaracho
 Nakagyo-ku, Kyoto 604,
 Japan

Directors and Executive
 Officers:
Allan Rosencwaig (5)........    993,279    10.9    1,343,750    75.1     110,364     10.9
Martin M. Schwartz (6)......        --      --           --      --          --       --
Jon L. Opsal (7)............     23,427       *      255,312    20.5       2,603        *
David Willenborg (8)........    128,299     1.4      201,562    16.5      14,255      1.4
David Mak (9)...............        --      --        77,298     6.7         --       --
G. Leonard Baker, Jr. (10)..  1,642,382    18.1          --      --      182,487     18.1
David Dominik (11)..........  1,629,806    18.0          --      --      181,090     18.0
Adam W. Kirsch (11).........  1,629,806    18.0          --      --      181,090     18.0
All directors and executive
 officers as a group
 (11 persons)...............  4,457,931    49.1    2,105,250    96.9     495,325     49.1
</TABLE>
- --------
 *  Less than one percent.
 (1) Includes: 1,084,115 shares of Class A common stock and 120,457 shares of
     Class L common stock held by Bain Capital Fund V, L.P. ("Fund V");
     2,823,028 shares of Class A common stock and 313,670 shares of Class L
     common stock held by Bain Capital Fund V-B, L.P. ("Fund V-B"); 648,340
     shares of Class A common stock and 49,155 shares of Class L common stock
     held by BCIP Associates ("BCIP"); and 981,466 shares of Class A common
     stock and 131,935 shares of Class L common stock held by BCIP Trust
     Associates, L.P. ("BCIP Trust" and Fund V, Fund V-B and BCIP have been
     defined herein as the "Bain Capital Funds"). Does not include shares
     subject to the stockholders agreement or the voting agreement. See
     "Certain Relationships and Related Transactions--Stockholders Agreement"
     and "Certain Relationships and Related Transactions--Voting Agreement."
 (2) Also includes shares held by certain affiliates and related parties of
     Sutter Hill.
 (3) The 980,818 shares of Class A common stock included in the table
     represent: (i) 401,668 shares of Class A common stock; and
     (ii) 579,150 shares of preferred stock, which are immediately convertible
     into an equal number of shares of Class A common stock at the option of
     the holder thereof. A portion of each class of the listed shares are held
     by Toray Industries (America), Inc., a wholly owned subsidiary of Toray
     Industries, Inc.

                                      58
<PAGE>

 (4) The 287,207 shares of Class A common stock included in the table
     represent: (i) 117,618 shares of Class A common stock; and
     (ii) 169,589 shares of preferred stock, which are immediately convertible
     into an equal number of shares of Class A common stock at the option of
     the holder thereof.
 (5) The 1,343,750 shares of Class B common stock included in the table
     represent: (i) 671,875 shares of Class B common stock, which are subject
     to vesting; and (ii) 671,875 shares of Class B common stock that can be
     acquired upon the exercise of outstanding options. The address of Dr.
     Rosencwaig is c/o Therma-Wave, Inc., 1250 Reliance Way, Fremont,
     California 94539.
 (6) Mr. Schwartz joined Therma-Wave in August 1998.
 (7) The 255,312 shares of Class B common stock included in the table
     represent: (i) 127,656 shares of Class B common stock, which are subject
     to vesting; and (ii) 127,656 shares of Class B common stock that can be
     acquired upon the exercise of outstanding options.
 (8) The 201,562 shares of Class B common stock included in the table
     represent: (i) 100,781 shares of Class B common stock, which are subject
     to vesting; and (ii) 100,781 shares of Class B common stock that can be
     acquired upon the exercise of outstanding options.
 (9) The 77,298 shares of Class B common stock included in the table represent:
     (i) 38,649 shares of Class B common stock, which are subject to vesting;
     and (ii) 38,649 shares of Class B common stock that can be acquired upon
     the exercise of outstanding options.
(10) Mr. Baker is a Managing Director of the General Partner of Sutter Hill. As
     a result, the shares of Class A common stock and Class L common stock
     acquired by Sutter Hill may be deemed to be beneficially owned by Mr.
     Baker, who disclaims beneficial ownership of any such shares in which he
     will not have a pecuniary interest. The address of Mr. Baker is c/o Sutter
     Hill Ventures, 755 Page Mill Road, Palo Alto, California 94304.
(11) Messrs. Dominik and Kirsch are each general partners of BCIP and BCIP
     Trust and, accordingly, may be deemed to beneficially own shares owned by
     such funds. Each such person disclaims beneficial ownership of any such
     shares in which he does not have a pecuniary interest. The address of such
     persons is c/o Bain Capital, Inc., Two Copley Place, Boston, Massachusetts
     02116.

                 CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

Recapitalization Agreement

   On December 18, 1996, the Bain Capital Funds and Toray Industries, Inc.,
Toray Industries (America), Inc. and Shimadzu Corporation and Therma-Wave
entered into a recapitalization agreement. Toray Industries (America) and
Shimadzu Corporation are collectively referred to herein as the "Existing
Stockholders." The recapitalization was effected on May 16, 1997. Pursuant to
the recapitalization agreement:

  .  we redeemed from the Existing Stockholders approximately 86.6% of their
     existing shares of the common stock of Therma-Wave for approximately
     $96.9 million in cash;

  .  the Bain Capital Funds and Sutter Hill purchased shares of our common
     stock for an aggregate purchase price of $16.8 million in cash;

  .  the Existing Stockholders converted all of their shares of common stock
     not otherwise redeemed for newly authorized and issued shares of our
     preferred stock, Class L common stock and Class A common stock; and

  .  the Bain Capital Funds and Sutter Hill converted all of their shares of
     common stock for newly authorized and issued shares of Class L common
     stock and Class A common stock.

   As part of the recapitalization, we also repaid substantially all of our
outstanding borrowings under existing loan agreements and paid fees and
expenses related to the financing of the recapitalization. We used
approximately $150.0 million to complete the recapitalization, including the
payment of related fees and expenses. In order to finance the recapitalization,
we:

  .  issued $115.0 million in aggregate principal amount of 10 5/8% senior
     notes due 2004;

  .  received an equity contribution of $20.0 million in cash from the Bain
     Capital Funds, Sutter Hill and members of our senior management team,
     including Dr. Allan Rosencwaig, Anthony W. Lin, W. Lee Smith, David
     Willenborg and Jon L. Opsal; and

  .  converted equity securities received from the Existing Stockholders
     having a value of $15.0 million for purposes of the recapitalization
     into shares of preferred stock and common stock.


                                       59
<PAGE>


   The Existing Stockholders have jointly agreed to indemnify Therma-Wave, the
Bain Capital Funds and Sutter Hill for any and all losses with respect to taxes
for all taxable periods prior to March 31, 1996 and any breach of the
representation relating to taxes in the recapitalization agreement, subject to
the limitations set forth in the recapitalization agreement. In addition, we
agreed to indemnify the Existing Stockholders against any and all losses
arising out of:

  .  any employee benefit plan of Therma-Wave;

  .  the severance of any employee of Therma-Wave or its subsidiaries on or
     after the closing date; and

  .  subject to certain exceptions, violations of environmental laws.

   In addition, the Existing Stockholders have agreed for a period of three
years after the closing date of the recapitalization not to compete with us in
the business of manufacturing, marketing or selling:

  .  measuring equipment used for material characterization, such as ion
     implantation monitoring or measurements in metal films;

  .  thin film measurement equipment; or

  .  equipment that utilizes our intellectual property.

   The Existing Stockholders have also agreed for a period of two years after
the closing date not to solicit the employment of our employees without the
prior written consent of the Bain Capital Funds.

Management Equity Purchases

   Bain Capital's investment strategy includes providing senior management with
the opportunity to acquire a significant equity interest in its acquired
businesses. Bain Capital believes that significant equity ownership increases
management's commitment and better aligns the two parties' interests.
Accordingly, at the time of the recapitalization, each of our executive
officers was given the opportunity to participate in the recapitalization. To
do so, each was required to enter into an executive stock agreement with us. In
general, the terms of the stock agreements establish the relative rights and
obligations between Therma-Wave, the management investors and Bain Capital and
the other investors. Pursuant to these stock agreements, we:

  .  sold shares of Class L common stock and Class A common stock to the
     executives at the same price per share as paid by the Bain Capital
     Funds, which are referred to herein as the "Rollover Stock";

  .  sold shares of Class B common stock to the executives at the same price
     per share as paid by the Bain Capital Funds, which are subject to
     vesting over a five year period and are referred to herein as the "Time
     Vesting Stock"; and

  .  granted options to the executives to acquire shares of Class B common
     stock, which were divided into five equal tranches with the exercise
     prices of $8.93, $10.68, $12.43, $14.18 and $15.89 per share,
     respectively.


                                       60
<PAGE>


   The following table summarizes the shares of capital stock purchased by, and
the number of options granted to, our executive officers under the stock
agreements:

<TABLE>
<CAPTION>
                              No. of Shares Purchased
                              -----------------------
                              Class A Class B Class L                    No. of
                              Common  Common  Common  Aggregate Purchase Options
   Name                        Stock   Stock   Stock        Price        Granted
   ----                       ------- ------- ------- ------------------ -------
<S>                           <C>     <C>     <C>     <C>                <C>
Allan Rosencwaig............. 993,279 671,875 110,364     $2,497,608     671,875
Anthony W. Lin (1)...........  40,588 127,656   4,510        125,611     127,656
Jon L. Opsal.................  23,427 127,656   2,603         85,183     127,656
W. Lee Smith.................  40,738 100,781   4,526        119,636     100,781
David Willenborg............. 128,299 100,781  14,255        325,890     100,781
</TABLE>
- --------

(1) Mr. Lin purchased 25,531 shares of vested Class B common stock upon his
    resignation from Therma-Wave. We repurchased the remainder of his unvested
    shares and cancelled all of his outstanding options. As of March 31, 1999,
    Mr. Lin also holds 40,588 and 4,510 shares of Class A common stock and
    Class L common stock, respectively.

   Substantially all of the purchase price for such shares was funded by cash
payments received by each executive officer from Toray in satisfaction of
Toray's obligations under a pre-existing equity incentive arrangement with such
executive officer. See "Certain Relationships and Related Transactions--
Payments to Executive Officers."

   Set forth below is a summary of the material terms of the stock agreements:

   Exercisability and Vesting. The options granted under the stock agreements
were immediately exercisable at the exercise prices listed above. The shares of
Class B common stock issuable upon the exercise of such options will vest,
regardless of whether the option has been exercised, on May 16, 2002 provided
that the executive officer has been continuously employed by Therma-Wave during
such period. The shares of Class B common stock that are issuable upon the
exercise of the options are referred to herein as the "Option Shares." In
addition, some or all of such shares of Class B common stock are subject to
earlier vesting upon certain events, including all of such shares vesting
immediately on a sale of Therma-Wave.

   Exercise Price and Form of Payment. The aggregate exercise price for all the
options granted to these executives under the stock agreements is approximately
$16.6 million. To date, none of the options granted under the stock agreements
have been exercised. Under the stock agreements, each executive officer is
entitled to pay the exercise price for his options through the issuance of a
promissory note to us. Under the terms of their respective employment
agreements, each of the executive officers is entitled to receive a deferred
payment in an amount that is sufficient to repay the outstanding principal of
such promissory note if our cumulative earnings before interest, taxes,
depreciation and amortization from May 16, 1997 through May 16, 2002 is equal
to or greater than $177 million. In the event an executive officer elects to
pay the exercise price for his options with a promissory note, the promissory
note will be full recourse and the executive's obligation will not be in any
way altered if we do not achieve the operating results referred to in the
preceding sentence. The promissory note will be repayable upon the earliest of:

  .  the consummation of a sale of Therma-Wave;

  .  the later of (a) the fifth anniversary of its date and (b) the date
     which is two weeks after the effectiveness of a registration statement
     filed under the Securities Act as a result of the exercise of demand
     registration rights granted to such executive officers;

  .  the termination of the executive officer's employment with Therma-Wave;

  .  the tenth anniversary of its date; or

  .  the date such executive officer violates the non-competition provision
     of his employment agreement.

The promissory note will bear interest at the lesser of:

  .  the applicable federal rate at such time or

  .  the highest rate permitted by applicable law, and will be payable at
     such time as the principal under the note is due.


                                       61
<PAGE>


The executive officer will be required to immediately repay the promissory note
to the extent of any net proceeds received from:

  .  any cash dividends on the Option Shares;

  .  any proceeds from the transfer of the Option Shares; and

  .  any deferred payments under such executive officer's employment
     agreement.

   Repurchase Option. The stock agreements grant us the right to repurchase the
shares of common stock held by the executive officer, including shares received
upon the exercise of options, in the event that the executive officer ceases to
be employed by us. The Bain Capital Funds are granted a similar right under the
stock agreements in the event that we do not elect to exercise our option with
respect to all of such executive's shares. Following this offering, this
repurchase option will only be applicable to an executive's unvested Option
Shares and unvested Time Vesting Stock at a repurchase price equal to the
original cost of such shares. The repurchase option terminates upon the earlier
of a sale of Therma-Wave or May 16, 2002. This repurchase option is designed to
help us to retain our executive officers by conditioning their equity
participation on their continued employment.

   Other Provisions. The stock agreements also:

  .  restrict the transfer of the executive officers' securities, subject to
     limited exceptions;

  .  grant each executive officer the right to participate on a pro rata
     basis in any sale or other transfer made by the Bain Capital Funds of
     their shares of common stock to an unaffiliated third party; and

  .  require each executive officer to consent to a sale of Therma-Wave
     approved by holders representing a majority of the shares of common
     stock held by the Bain Capital Funds.

   The transfer restrictions referenced above terminate upon the earlier of a
sale of Therma-Wave or May 16, 2002. The other provisions referenced above will
terminate upon the completion of this offering.

Loans to Executive Officers

   In connection with the recapitalization, we made loans in an aggregate
principal amount of $297,931.55 to certain of our executive officers in
connection with their purchase of shares of capital stock under the stock
agreements. These loans are secured by a pledge of the shares of common stock
owned by such executive officers and bear interest at a rate equal to the
applicable federal rate at the time of the recapitalization. The loans are
payable upon a sale of Therma-Wave or earlier under other similar
circumstances.

   In addition, we made loans in May 1997 to such executive officers to pay
certain tax liabilities associated with the distribution they received from
Toray. Such loans do not bear interest and mature upon the consummation of an
"approved sale" of Therma-Wave, which is defined in the stock agreements to
include a sale of all or substantially all of our assets determined on a
consolidated basis or a sale of all of our capital stock to an independent
third party or group of independent third parties, which has been approved by
the holders of a majority of the shares of common stock held by the Bain Group,
as defined in the stock agreements to include the Bain Capital Funds and
Randolph Street Partners. Each loan must be prepaid in the event that such
executive officer receives any cash dividends or distributions on the Rollover
Stock or any proceeds from the transfer of the Rollover Stock. The loans are
secured by a pledge of the Rollover Stock.

   The following table sets forth the amount of each of these loans to the
following executive officers:

<TABLE>
<CAPTION>
                                                               Amount of Loan
                                                             -------------------
   Name                                                      Stock Loan Tax Loan
   ----                                                      ---------- --------
   <S>                                                       <C>        <C>
   Allan Rosencwaig.........................................  $151,172  $874,000
   Anthony W. Lin...........................................  $ 28,723  $ 35,663
   Jon L. Opsal.............................................  $ 28,723  $ 20,583
   W. Lee Smith.............................................  $ 22,676  $ 35,790
   David Willenborg.........................................  $ 22,676  $112,723
</TABLE>

   All of the foregoing loans were outstanding as of March 31, 1999, except the
loans to Mr. Lin, which were repaid in August 1998 in connection with his
resignation.


                                       62
<PAGE>

Advisory Agreement

   In connection with the recapitalization, we entered into an Advisory
Agreement with Bain Capital, pursuant to which Bain Capital agreed to provide:

  .  general executive and management services;

  .  identification, support, negotiation and analysis of acquisitions and
     dispositions;

  .  support, negotiation and analysis of financial alternatives;

  .  finance, marketing and human resource functions; and

  .  other services agreed upon by Therma-Wave and Bain Capital.

   In exchange for such services, Bain Capital receives:

  .  an annual management fee of $1.0 million, plus reasonable out-of-pocket
     expenses (payable quarterly); and

  .  a transaction fee in connection with the consummation of each additional
     acquisition by us of an additional business in an amount equal to 1% of
     the aggregate transaction value.

In connection with the recapitalization, Bain Capital received a transaction
fee of $1.8 million. We paid fees to Bain Capital under the Advisory Agreement
of $750,000 in fiscal 1998 and $1.0 million in fiscal 1999. The Advisory
Agreement has an initial term of ten years, subject to automatic one-year
extensions unless we or Bain Capital provides written notice of termination.

Stockholders Agreement

   In connection with the recapitalization, Therma-Wave, the Bain Capital
Funds, Sutter Hill and the Existing Stockholders entered into a stockholders
agreement. Bain Capital Funds and their designees that execute a counterpart to
the stockholders agreement, including Randolph Street Partners, are referred to
herein as the "Bain Group." The stockholders agreement:

  .  requires that each of the parties thereto vote all of his voting
     securities and to take all other necessary or desirable actions to cause
     the size of the board of directors to be established at five members and
     to cause five designees of the Bain Capital Funds to be elected to the
     board of directors;

  .  grants Therma-Wave and the Bain Group a right of first refusal on any
     proposed transfer of shares held by the Existing Stockholders;

  .  grants the Existing Stockholders and Sutter Hill certain participation
     rights in connection with certain transfers made by the Bain Group; and

  .  requires the Existing Stockholders and Sutter Hill to consent to a sale
     of Therma-Wave to an independent third party if such sale is approved by
     holders representing a majority of the shares held by the Bain Group.

   In addition, we agreed not to issue, sell or otherwise transfer for
consideration to any member of the Bain Group or Sutter Hill or any affiliates
thereof at any time prior to a registered initial public offering, any shares
of common stock, or securities convertible into or otherwise exercisable or
exchangeable for common stock or securities containing any profit participation
features or options, unless each of the Existing Stockholders is given the
opportunity to subscribe for and purchase their pro rata portion of such
additional shares at the same price and on the same terms.

   All of the foregoing provisions of the Stockholders Agreement will terminate
upon the consummation of an initial public offering registered under the
Securities Act.


                                       63
<PAGE>

Interests of Certain Experts

   Randolph Street Partners purchased 84,906 shares of Class A common stock and
9,434 shares of Class L common stock in the recapitalization. In connection
therewith, Randolph Street Partners entered into the stockholders agreement and
is considered part of the Bain Group under the stock agreements and the
registration agreement. Certain partners of Kirkland & Ellis are partners in
Randolph Street Partners. Kirkland & Ellis has provided legal services to
Therma-Wave and Bain Capital from time to time and expects to continue to do so
in the foreseeable future.

Payments to Executive Officers

   In connection with the recapitalization, our executive officers received the
following amounts of cash from Toray in satisfaction of Toray's obligations
under a pre-existing equity incentive arrangement with such executive officers:

<TABLE>
<CAPTION>
     Name                                                                Cash
     ----                                                             ----------
     <S>                                                              <C>
     Allan Rosencwaig................................................ $2,339,718
     Anthony W. Lin..................................................     95,612
     Jon L. Opsal....................................................     55,183
     W. Lee Smith....................................................     95,952
     David Willenborg................................................    302,207
</TABLE>

Voting Agreement

   In connection with the recapitalization, Therma-Wave, the Bain Group, Sutter
Hill and certain key employees of Therma-Wave, including our named executive
officers, entered into a voting agreement pursuant to which each party thereto
agreed to vote his or its voting securities and to take all necessary or
desirable actions to cause the size of the board to be set at five directors
and to cause three designees of the Bain Group and Dr. Rosencwaig, as long as
he is employed by Therma-Wave, and another management employee of Therma-Wave
designated by Dr. Rosencwaig to be elected to the board of directors. The
voting agreement terminates by its terms upon the completion of an initial
public offering and sale of common stock pursuant to an effective registration
statement under the Securities Act.

Option Agreements Among Investors

   At the time of the recapitalization, the Bain Group, Sutter Hill, Antares
International Partners, Inc. entered into an option agreement with each of our
executive officers that participated in the recapitalization. Bain Group,
Sutter Hill and Antares International Partners are referred to herein as the
"Investors." Pursuant to these option agreements, the Investors granted these
executive officers options to purchase an aggregate of 2,669,750 shares of the
Investors' Class A common stock at an exercise price equal to $0.235 per share.
Such options become exercisable upon:

  .  any sale by the Investors of all or a portion of the shares of Class A
     common stock or Class L common stock issued to the Investors pursuant to
     the recapitalization, and

  .  the fifth anniversary of the date of the option agreement.

   The number of options exercisable upon an Investor sale described in the
first bullet point or on the fifth anniversary of the option agreements is
dependent upon the fair market value of the Investors' investment in shares of
Class A common stock or Class L common stock issued pursuant to the
recapitalization and the shares of common stock issued to such executive
officers in the recapitalization. No options are exercisable until the fair
market value of such shares is equal to or greater than $500 million.


                                       64
<PAGE>

Development License Agreement

   In 1992, we entered into a development license agreement with Toray and
Shimadzu. The purpose of the development license agreement was to allow the
parties to share patents and technology related to:

  .  the entire field of thermal wave technology;

  .  the field of laser technology related to thin film metrology;

  .  the field of optical processing; and

  .  any other fields designated by a research and development committee to
     be formed by the parties, which are collectively referred to herein as
     the "Field of Research."

   Under the development license agreement:

  .  we granted to each of Toray and Shimadzu a royalty-free, non-exclusive
     license to use our patents and technology related to the Field of
     Research for the purpose of conducting research and new product
     development activities in Japan; and

  .  Toray and Shimadzu granted to Therma-Wave a royalty-free, non-exclusive
     license to use those of Toray's and Shimadzu's patents and technology
     determined to be useful in connection with certain development projects
     for the purpose of conducting research and new product development
     activities in the U.S. and Japan.

   The development license agreement requires the parties to take certain steps
to coordinate their research and development activities. All enhancements,
modifications and improvements to certain of our products existing at the time
the agreement was entered into will be owned by us, regardless of which party
creates such enhancements, modifications and improvements. However, to the
extent any such enhancements, modifications and improvements are based upon
patents and technology owned by Toray or Shimadzu, we will have to pay a
development fee or royalty to those parties. New developments will be jointly
owned by the party or parties who created the new development and the party or
parties whose patents or technology were used in such new development. The
commercialization, marketing and other use of each new development will be
governed by the terms of a separate agreement to be entered into by the
relevant parties on a case-by-case basis. To date, only one new development
agreement has been entered into between the parties, which relates to certain
film measurement equipment for a non-semiconductor application.

                                       65
<PAGE>

                      DESCRIPTION OF CERTAIN INDEBTEDNESS

Bank Credit Facility

   In connection with the recapitalization, we entered into our bank credit
facility with Bankers Trust Company. We may borrow amounts under the bank
credit facility to finance our working capital requirements and other general
corporate purposes. All revolving loans incurred under the bank credit
facility will mature on May 16, 2002. During the quarter ended June 30, 1998,
we amended the bank credit facility to have our borrowing availability subject
to a borrowing base formula, which provides a maximum revolving credit
facility of $30.0 million, and to adjust the financial covenants requiring us
to maintain minimum levels of EBITDA during each six-month period ending on
the last day of each fiscal quarter and minimum levels of cumulative EBITDA
from April 7, 1996 to the last day of each fiscal quarter. These amendments
were effected in light of the impact of the downturn in the semiconductor
industry on our operating results. Without these amendments to our bank credit
facility, on June 30, 1998, we would have violated the financial test relating
to the maintenance of minimum levels of EBITDA for the six-month period ending
on such date. At March 31, 1999, there was $3.5 million of an outstanding
letter of credit and $17.0 million of unused borrowing capacity under the
amended bank credit facility.

   The bank credit facility provides that all of our indebtedness be secured
by:

  .  a first priority security interest in all of our receivables, contracts,
     contract rights, equipment, intellectual property, inventory and all
     other tangible and intangible assets and each of our domestic
     subsidiaries, subject to certain customary exceptions;

  .  a pledge of all capital stock of any direct and indirect domestic
     subsidiaries; and

  .  a pledge of 65% of the capital stock of each of our first-tier foreign
     subsidiaries.

   Our borrowings under the bank credit facility bear interest at a floating
rate and may be maintained as base rate loans or, at our option, as eurodollar
loans. Base rate loans bear interest at the base rate plus 1.75%. Eurodollar
loans bear interest at the eurodollar rate applicable for one, two, three, six
or twelve month periods, in each case plus 3.00%. Base rate loans, eurodollar
loans and eurodollar rate are defined in the bank credit facility. The base
rate equals the higher of:

  .  the applicable prime lending rate of Bankers Trust Company, and

  .  the Federal Reserve reported certificate of deposit rate plus 1%.

   Amounts borrowed under the bank credit facility may be repaid and
reborrowed. We are required to pay to the lenders under the bank credit
facility a commitment fee equal to .50% per annum, payable in arrears on a
quarterly basis, on the average unused portion of the bank credit facility
during such quarter; provided, however, that such commitment fee increases to
 .75% per annum if during any quarterly payment period the daily average
outstanding borrowings were less than 1/2 of the total revolving loan
commitment. We are also required to pay to the lenders a letter of credit fee
with respect to each letter of credit outstanding equal to 3.00% per annum of
the average daily stated amount of such letter of credit and an additional
fronting fee of .25% on such average daily stated amount to the lender issuing
such letter of credit, in each case payable in arrears on a quarterly basis.
The agent and the lenders will receive and continue to receive such other fees
as have been separately agreed upon with the agent.

   The bank credit facility requires us to meet financial tests, including,
without limitation, minimum levels of EBITDA, minimum interest coverage,
maximum leverage ratio and maximum amount of capital expenditures. The
adjustments to the financial tests and covenants in the June 1998 amendment
relate to periods prior to March 31, 2000. For periods after that time, the
financial tests and covenants contained in the original agreement will apply.
The bank credit facility contains covenants which limit the incurrence of
additional indebtedness, investments, dividends, transactions with affiliates,
asset sales, acquisitions, mergers and consolidations, prepayments of other
indebtedness (including the senior notes), liens and encumbrances and other
matters customarily restricted in such agreements.


                                      66
<PAGE>

   The bank credit facility contains customary events of default, including
without limitation, payment defaults, breaches of representations and
warranties, covenant defaults, cross-defaults to certain other indebtedness in
excess of $1.5 million, certain events of bankruptcy and insolvency, judgment
defaults in excess of $1.5 million that are otherwise not covered by insurance,
failure of any guaranty or security document supporting the bank credit
facility to be in full force and effect and change of control of Therma-Wave.

   The foregoing summary of the material provisions of the bank credit
facility, as amended, is qualified in its entirety by reference to all of the
provisions of the bank credit facility, which has been filed as an exhibit to
the registration statement of which this prospectus forms a part. See "Where
You Can Find More Information."

Senior Notes

   The senior notes were issued pursuant to an indenture, dated as of May 15,
1997, by and between us and IBJ Schroder Bank & Trust Company, as trustee. The
senior notes are limited in aggregate principal amount to $115,000,000 and will
mature on May 15, 2004. Interest on the senior notes accrues at the rate of 10
5/8% per annum and is payable semiannually in cash on each May 15 and November
15, to the persons who are registered holders of the senior notes at the close
of business on the May 1 and November 1, respectively, immediately preceding
the applicable interest payment date. The senior notes are not entitled to the
benefit of any mandatory sinking fund. The senior notes are senior unsecured
obligations of Therma-Wave, ranking pari passu in right of payment with all
other senior unsecured obligations of Therma-Wave.

   The senior notes are redeemable, at our option, in whole at any time or in
part from time to time, on and after May 15, 2001, upon not less than 30 nor
more than 60 days' notice, at the following redemption prices, expressed as
percentages of the principal amount thereof, if redeemed during the twelve-
month period commencing on May 15 of the year set forth below, plus, in each
case, accrued interest to the date of redemption:

<TABLE>
<CAPTION>
     Year                                                             Percentage
     ----                                                             ----------
     <S>                                                              <C>
     2001............................................................  105.313%
     2002............................................................  102.656
     2003............................................................  100.000
</TABLE>

   At any time, or from time to time, on or prior to May 15, 2000, we may, at
our option, use the net cash proceeds of one or more equity offerings to redeem
up to 35% of the aggregate principal amount of senior notes originally issued
at a redemption price equal to 110.625% of the principal amount thereof plus
accrued and unpaid interest thereon, if any, to the date of such redemption;
provided that at least $69.0 million aggregate principal amount of senior notes
originally issued remains outstanding immediately after any such redemption.

   If we consummate an initial public offering prior to May 15, 2000 in which
we receive net proceeds equal to or greater than $25.0 million, we are required
to apply the net cash proceeds relating to such initial public offering to make
an offer to purchase from all holders on a pro rata basis that amount of senior
notes equal to the net cash proceeds from such initial public offering at a
price equal to 110.625% of the aggregate principal amount of senior notes to be
repurchased, plus accrued and unpaid interest thereon, if any, to the date of
purchase. The aggregate amount of net cash proceeds required to be applied
pursuant to this provision is reduced dollar-for-dollar:

  .  to the extent such net cash proceeds are used to prepay indebtedness
     under our bank credit facility and effect a permanent reduction in the
     availability thereunder; and

  .  by the aggregate amount of net cash proceeds of one or more equity
     offerings consummated prior to the consummation of the initial public
     offering to the extent used to redeem senior notes.

We are not required pursuant to this provision to redeem an aggregate principal
amount of senior notes in excess of 35% of the aggregate principal amount of
senior notes originally issued. We will be required to use the net proceeds of
this offering to make the repurchase offer described above if we receive net
proceeds in excess of $25.0 million. See "Use of Proceeds."

                                       67
<PAGE>


   The indenture provides that, upon the occurrence of a change of control,
each holder will have the right to require that we purchase all or a portion of
such senior notes, at a purchase price equal to 101% of the principal amount
thereof plus accrued interest thereon to the date of purchase. The term "change
of control" is defined under the indenture to include one or more of the
following events:

  .  any sale, lease, exchange or other transfer, in one transaction or a
     series of related transactions, of all or substantially all of our
     assets to any person or group of related persons, together with any
     affiliates thereof;

  .  the approval by the holders of our capital stock of any plan or proposal
     for the liquidation or dissolution of Therma-Wave, whether or not
     otherwise in compliance with the provisions of the indenture;

  .  any person or group of related person, other than the Bain Capital
     Funds, Sutter Hill or their respective related parties, shall become the
     owner, directly or indirectly, beneficially or of record, of shares
     representing more than 50% of the aggregate ordinary voting power
     represented by our issued and outstanding capital stock; or

  .  the first day within any two-year period on which a majority of the
     members of the board of directors are not continuing directors.

   The following events are defined in the indenture as "events of default":

  .  the failure to pay interest on any senior notes and such default
     continues for a period of 30 days;

  .  the failure to pay the principal on any senior notes;

  .  a default in the observance or performance of any other covenant or
     agreement contained in the Indenture which default continues for a
     period of 30 days;

  .  the failure to pay at final stated maturity the principal amount of any
     indebtedness of Therma-Wave or any restricted subsidiary of Therma-Wave
     and such failure continues for a period of 20 days or more, if the
     aggregate principal amount of such indebtedness, together with the
     principal amount of any other such indebtedness in default for failure
     to pay principal at final maturity or which has been accelerated,
     aggregates $5.0 million or more at any time;

  .  one or more judgments in an aggregate amount in excess of $5.0 million
     shall have been rendered against us or any of our significant
     subsidiaries and such judgments remain undischarged, unpaid or unstayed
     for a period of 60 days after such judgment or judgments become final
     and non-appealable; and

  .  events of bankruptcy affecting us or any of our significant
     subsidiaries.

   The indenture contains covenants for the benefit of the holders of the
senior notes that, among other things, limit our ability and any of our
restricted subsidiaries to:

  .  enter into transactions with affiliates;

  .  pay dividends or make certain other restricted payments;

  .  consummate asset sales;

  .  incur indebtedness that is senior in right of payment to the senior
     notes;

  .  incur liens;

  .  impose restrictions on the ability of a subsidiary to pay dividends or
     make payments to Therma-Wave and its subsidiaries;

                                       68
<PAGE>

  .  merge or consolidate with any other person; or

  .  sell, assign, transfer, lease, convey or otherwise dispose of all or
     substantially all of the assets of Therma-Wave.

   The foregoing summary of the material provisions of the indenture is
qualified in its entirety by reference to all of the provisions of the
indenture, which has been filed as an exhibit to the registration statement, of
which this prospectus forms a part. See "Where You Can Find More Information."

                                       69
<PAGE>

                          DESCRIPTION OF CAPITAL STOCK

General Matters

   Upon completion of this offering, the total amount of our authorized capital
stock will consist of 35,000,000 shares of common stock, 1,000,000 shares of
Series A convertible preferred stock and 5,000,000 shares of one or more
additional series of preferred stock. As of March 31, 1999, we had outstanding
9,073,532 shares of Class A common stock, 1,118,092 shares of Class B common
stock, 1,008,170 shares of Class L common stock and 748,739 shares of Series A
convertible preferred stock. Prior to the completion of this offering, all of
the outstanding shares of Class A common stock, Class B common stock and Class
L common stock will be reclassified into a single class of common stock in the
Reclassification. See "The Reclassification."

   After giving effect to this offering, we will have     shares of common
stock (     shares if the underwriters' over-allotment option is exercised in
full), 748,739 shares of Series A convertible preferred stock and no other
shares of any series of preferred stock outstanding. As of March 31, 1999, we
had 37 stockholders of record with respect to our common stock and two
stockholders of record with respect to our Series A convertible preferred
stock. The following summary of certain provisions of our capital stock
describes all material provisions of, but does not purport to be complete and
is subject to, and qualified in its entirety by, our restated certificate of
incorporation and our amended and restated by-laws, which are included as
exhibits to the registration statement of which this prospectus forms a part,
and by the provisions of applicable law.

   The restated certificate and by-laws contain certain provisions that are
intended to enhance the likelihood of continuity and stability in the
composition of the board of directors and which may have the effect of
delaying, deferring or preventing a future takeover or change in control of
Therma-Wave unless such takeover or change in control is approved by our board
of directors.

Common Stock

   The issued and outstanding shares of common stock are, and the shares of
common stock to be issued by us in connection with the offering will be,
validly issued, fully paid and nonassessable. Subject to the prior rights of
the holders of any series of preferred stock, the holders of outstanding shares
of common stock are entitled to receive dividends out of assets legally
available therefor at such time and in such amounts as the board of directors
may from time to time determine. See "Dividend Policy." The shares of common
stock are not convertible and the holders thereof have no preemptive or
subscription rights to purchase any of our securities. Upon liquidation,
dissolution or winding up of Therma-Wave, the holders of common stock are
entitled to receive pro rata our assets which are legally available for
distribution, after payment of all debts and other liabilities and subject to
the prior rights of any holders of any series of preferred stock then
outstanding. Each outstanding share of common stock is entitled to one vote on
all matters submitted to a vote of stockholders. There is no cumulative voting.
Except as otherwise required by law or the restated certificate, the holders of
common stock and the holders of Series A convertible preferred stock vote
together as a single class on all matters submitted to a vote of stockholders.

   The common stock has been approved for inclusion on the Nasdaq National
Market under the symbol "TWAV," subject to official notice of issuance.

Series A Convertible Preferred Stock

   The Series A convertible preferred stock has a liquidation preference of
$18.40 per share and is convertible into one share of common stock at the
option of the holder thereof. Dividends on the Series A convertible preferred
stock accrue at a rate of 6.0% per annum. The Series A convertible preferred
stock has a scheduled redemption date of May 17, 2004 and is otherwise
redeemable by us at any time in our sole discretion. The Series A convertible
preferred stock entitles the holder thereof to one vote for each share of

                                       70
<PAGE>


common stock issuable upon conversion of such Series A convertible preferred
stock on all matters submitted to a vote of stockholders. All of the shares of
Series A convertible preferred stock are held by Toray and Shimadzu. The terms
of the Series A convertible preferred stock can not be amended, modified or
waived without the prior written consent of the holders of a majority of the
Preferred Stock outstanding at the time such action is taken.

   If any of the following occur:

  .  any member of the Bain Group receives any proceeds in respect of common
     stock owned by such member in connection with any registered public
     offering of our shares of common stock ;

  .  the Bain Group sells or transfers 25% of the common stock acquired by
     the Bain Group pursuant to the Recapitalization Agreement; or

  .  Therma-Wave or any of its subsidiaries engages in any transaction or
     series of transactions which would result in the sale of all or
     substantially all of our assets on a consolidated basis,

then the holders of a majority of the Series A convertible preferred stock then
outstanding may require us, upon written notice, to redeem all of the
outstanding shares of Series A convertible preferred stock at a price of $18.40
per share (plus all accrued and unpaid dividends thereon). Any redemptions by
us of the Series A convertible preferred stock for the reasons described in the
bullets listed above does not extinguish our obligation to redeem shares of
such stock pursuant to the preceding paragraph.

Other Preferred Stock

   Our board of directors may, without further action by our stockholders, from
time to time, direct the issuance of shares of preferred stock in a series and
may, at the time of issuance, determine the rights, preferences and limitations
of each series. Satisfaction of any dividend preferences of outstanding shares
of preferred stock would reduce the amount of funds available for the payment
of dividends on shares of common stock. Holders of shares of preferred stock
may be entitled to receive a preference payment in the event of any
liquidation, dissolution or winding-up of Therma-Wave before any payment is
made to the holders of shares of common stock. Under certain circumstances, the
issuance of shares of preferred stock may render more difficult or tend to
discourage a merger, tender offer or proxy contest, the assumption of control
by a holder of a large block of our securities or the removal of incumbent
management. Upon the affirmative vote of a majority of the total number of
directors then in office, the board of directors, without stockholder approval,
may issue shares of preferred stock with voting and conversion rights which
could adversely affect the holders of shares of common stock. Except for the
Series A convertible preferred stock described above, there are no other shares
of preferred stock outstanding, and we have no present intention to issue any
additional shares of preferred stock.

Certain Provisions of the Restated Certificate of Incorporation and By-laws

   The restated certificate provides for the board to be divided into three
classes, as nearly equal in number as possible, serving staggered terms.
Approximately one-third of the board will be elected each year. See
"Management." Under the Delaware General Corporation Law, directors serving on
a classified board can only be removed for cause. The provision for a
classified board could prevent a party who acquires control of a majority of
the outstanding voting stock from obtaining control of the board until the
second annual stockholders meeting following the date the acquiror obtains the
controlling stock interest. The classified board provision could have the
effect of discouraging a potential acquiror from making a tender offer or
otherwise attempting to obtain control of Therma-Wave and could increase the
likelihood that incumbent directors will retain their positions.

   The restated certificate provides that stockholder action can be taken only
at an annual or special meeting of stockholders and cannot be taken by written
consent in lieu of a meeting. The restated certificate and the by-laws provide
that, except as otherwise required by law, special meetings of the stockholders
can only be called pursuant to a resolution adopted by a majority of the board
of directors or by our chief executive officer. Stockholders will not be
permitted to call a special meeting or to require the board to call a special
meeting.

                                       71
<PAGE>

   The by-laws establish an advance notice procedure for stockholder proposals
to be brought before an annual meeting of our stockholders, including proposed
nominations of persons for election to the board. Stockholders at an annual
meeting may only consider proposals or nominations specified in the notice of
meeting or brought before the meeting by or at the direction of the board or by
a stockholder who was a stockholder of record on the record date for the
meeting, who is entitled to vote at the meeting and who has given to our
secretary timely written notice, in proper form, of such stockholder's
intention to bring that business before the meeting. Although the by-laws do
not give the board the power to approve or disapprove stockholder nominations
of candidates or proposals regarding other business to be conducted at a
special or annual meeting, the by-laws may have the effect of precluding the
conduct of certain business at a meeting if the proper procedures are not
followed or may discourage or defer a potential acquiror from conducting a
solicitation of proxies to elect its own slate of directors or otherwise
attempting to obtain control of Therma-Wave.

   The restated certificate and by-laws provide that the affirmative vote of
holders of at least 66 2/3% of the total votes eligible to be cast in the
election of directors is required to amend, alter, change or repeal certain of
their provisions, unless such amendment or change has been approved by a
majority of the directors not affiliated or associated with any person or
entity holding 20% or more of the voting power of our outstanding capital
stock, other than the Bain Capital Funds. This requirement of a super-majority
vote to approve amendments to the restated certificate and by-laws could enable
a minority of our stockholders to exercise veto power over any such amendments.

Certain Provisions of Delaware Law

   Following the consummation of this offering, we will be subject to the
"Business Combination" provisions of the Delaware General Corporation Law. In
general, such provisions prohibit a publicly held Delaware corporation from
engaging in various "business combination" transactions with any "interested
stockholder" for a period of three years after the date of the transaction in
which the person became an "interested stockholder," unless:

  .  the transaction is approved by the board of directors prior to the date
     the "interested stockholder" obtained such status;

  .  upon consummation of the transaction which resulted in the stockholder
     becoming an "interested stockholder," the "interested stockholder,"
     owned at least 85% of the voting stock of the corporation outstanding at
     the time the transaction commenced, excluding for purposes of
     determining the number of shares outstanding those shares owned by (a)
     persons who are directors and also officers and (b) employee stock plans
     in which employee participants do not have the right to determine
     confidentially whether shares held subject to the plan will be tendered
     in a tender or exchange offer; or

  .  on or subsequent to such date the "business combination" is approved by
     the board of directors and authorized at an annual or special meeting of
     stockholders by the affirmative vote of at least 66 2/3% of the
     outstanding voting stock which is not owned by the "interested
     stockholder."

   A "business combination" is defined to include mergers, asset sales and
other transactions resulting in financial benefit to a stockholder. In general,
an "interested stockholder" is a person who, together with affiliates and
associates, owns 15% or more of a corporation's voting stock or within three
years did own 15% or more of a corporation's voting stock. The statute could
prohibit or delay mergers or other takeover or change in control attempts with
respect to Therma-Wave and, accordingly, may discourage attempts to acquire
Therma-Wave.

Limitations on Liability and Indemnification of Officers and Directors

   The restated certificate limits the liability of directors to the fullest
extent permitted by the Delaware General Corporation Law. In addition, the
restated certificate provides that we will indemnify our directors and

                                       72
<PAGE>

officers to the fullest extent permitted by such law. We expect to enter into
indemnification agreements with our current directors and executive officers
prior to the completion of the offering and expect to enter into a similar
agreement with any new directors or executive officers.

Transfer Agent and Registrar

   The transfer agent and registrar for our common stock is BankBoston, N.A.

                                       73
<PAGE>

                        SHARES ELIGIBLE FOR FUTURE SALE

   Prior to this offering, there was no market for our common stock. We can
make no predictions as to the effect, if any, that sales of shares or the
availability of shares for sale will have on the market price prevailing from
time to time. Nevertheless, sales of significant amounts of our common stock in
the public market, or the perception that such sales may occur, could adversely
affect prevailing market prices.

Sale of Restricted Shares

   Upon completion of this offering, we will have     shares of common stock
outstanding. In addition,     shares of common stock are issuable upon the
exercise of outstanding stock options. Of the shares outstanding after the
offering,     shares of common stock, or     shares if the underwriters' over-
allotment is exercised in full, are freely tradeable without restriction under
the Securities Act, except for any such shares which may be held or acquired by
an "affiliate" of Therma-Wave, as that term is defined in Rule 144 promulgated
under the Securities Act, which shares will be subject to the volume
limitations and other restrictions of Rule 144 described below. An aggregate of
    shares of common stock held by our existing stockholders upon completion of
the offering will be "restricted securities," as that phrase is defined in Rule
144, and may not be resold in the absence of registration under the Securities
Act or pursuant to an exemption from such registration, including among others,
the exemptions provided by Rule 144 under the Securities Act.

   In general, under Rule 144 as currently in effect, beginning 90 days after
the date of this prospectus, if a period of at least one year has elapsed since
the later of the date the "restricted securities" were acquired from us or the
date they were acquired from an affiliate, then the holder of such restricted
securities, including an affiliate, is entitled to sell in the public market a
number of shares within any three-month period that does not exceed the greater
of 1% of the then outstanding shares of the common stock or the average weekly
reported volume of trading of the common stock on the Nasdaq National Market
during the four calendar weeks preceding such sale. The holder may only sell
such shares through "brokers' transactions" or in transactions directly with a
"market maker," as such terms are defined in Rule 144. Sales under Rule 144 are
also subject to certain requirements regarding providing notice of such sales
and the availability of current public information concerning us. Affiliates
may sell shares not constituting restricted securities in accordance with the
foregoing volume limitations and other requirements but without regard to the
one-year holding period.

   Under Rule 144(k), if a period of at least two years has elapsed between the
later of the date restricted securities were acquired from us or the date they
were acquired from an Affiliate, as applicable, a holder of such restricted
securities who is not an Affiliate at the time of the sale and has not been an
Affiliate for at least three months prior to the sale would be entitled to sell
the shares in the public market without regard to the volume limitations and
other restrictions described above. Beginning 90 days after the date of this
prospectus, approximately     shares of common stock will be eligible for sale
in the public market pursuant to Rule 144(k).

   Securities issued in reliance on Rule 701, such as shares of common stock
acquired upon exercise of certain options granted under Therma-Wave stock
plans, are also restricted and, beginning 90 days after the effective date of
this prospectus, may be sold by stockholders other than affiliates of Therma-
Wave subject only to the manner of sale provisions of Rule 144 and by
affiliates under Rule 144 without compliance with its one-year holding period
requirement.

Options

   We intend to file registration statements on Form S-8 under the Securities
Act to register approximately     shares of common stock issuable under our
stock plans. These registration statements are expected to be filed within six
months of the effective date of the registration statement of which this
prospectus is a part and will be effective upon filing. Shares issued upon the
exercise of stock options after the effective date of the Form S-8 registration
statements will be eligible for resale in the public market without
restriction, subject to Rule 144 limitations applicable to Affiliates and the
lock-up agreements described below.

                                       74
<PAGE>

Lock-Up Agreements

   Notwithstanding the foregoing, Therma-Wave, our executive officers,
directors and substantially all of our existing stockholders and certain of our
optionholders have agreed not to offer, sell, contract to sell or otherwise
dispose of any common stock for a period of 180 days after the date of this
prospectus without the prior written consent of Banc of America Securities LLC,
except, in the case of Therma-Wave, for the shares of common stock to be issued
in connection with the offering or pursuant to employee benefit plans existing
on the date of this prospectus or upon the conversion of the Preferred Stock,
sales or dispositions to Therma-Wave, certain permitted transfers to related
parties that agree to be bound by the foregoing restrictions and certain
permitted sales of shares acquired in the open market following the completion
of the offering.

Registration Agreement

   Pursuant to the recapitalization, Therma-Wave, the Bain Group, Sutter Hill,
the Existing Stockholders and our executive officers that participated in the
recapitalization entered into a registration agreement. Under the registration
agreement, the holders of a majority of the registerable securities owned by
the Bain Group have the right at any time, subject to certain conditions, to
require us to register any or all of their shares of common stock under the
Securities Act on Form S-1, a "Long-Form Registration," on three occasions at
our expense or on Form S-2 or Form S-3, a "Short-Form Registration," on six
occasions at our expense. In addition, at any time after a Public Offering, the
holders of a majority of the registrable securities owned by the Existing
Stockholders have the right, subject to certain conditions, to require either a
Long-Form Registration or a Short-Form Registration on one occasion at our
expense. Further, at any time after the later of the fifth anniversary of the
closing of the recapitalization and 180 days after a public offering, the
executive officers have the right, subject to certain conditions, to require
either a Long-Form Registration or a Short-Form Registration, at our expense,
with respect to a number of shares of common stock the proceeds of which,
subject to certain limitations, would be sufficient to pay taxes incurred by
them upon receipt of the deferred bonuses under their employment contracts. See
"Management--Employment Agreements." We are not required, however, to effect
any such Long-Form Registration or Short-Form Registration within six months
after the effective date of a prior demand registration and may postpone the
filing of such registration for up to six months if we believe that such a
registration would reasonably be expected to have an adverse effect on any
proposal or plan by us or any of our subsidiaries to engage in an acquisition,
merger or similar transaction.

   In addition, all holders of registerable securities are entitled to request
the inclusion of any shares of common stock subject to the registration
agreement in any registration statement at our expense whenever we propose to
register any of our securities under the Securities Act. Such right to request
inclusion of shares is not permitted:

  .  in connection with a public offering, unless any holders of registrable
     securities are permitted to participate in the public offering;

  .  pursuant to a demand registration; or

  .  pursuant to a registration on Form S-4 or S-8.

In connection with all such registrations, we have agreed to indemnify all
holders of registerable securities against certain liabilities, including
liabilities under the Securities Act. In addition, all the parties to the
registration agreement have agreed not to make any public sales of their
registerable securities for a period beginning seven days prior to the
effective date of any registration statement and continuing for a period of
180 days thereafter, other than registerable securities included in such
registration statement. Beginning 180 days after the completion of the
offering, the holders of an aggregate of     shares of common stock will have
certain rights to require us to register their shares of common stock under the
Securities Act at our expense.

                                       75
<PAGE>

                                  UNDERWRITING

   Therma-Wave is offering the shares of common stock described in this
prospectus through a number of underwriters. Banc of America Securities LLC and
Lehman Brothers Inc. are the representatives of the underwriters. Therma-Wave
has entered into an underwriting agreement with the representatives. Subject to
the terms and conditions of the underwriting agreement, Therma-Wave has agreed
to sell to the underwriters, and each underwriter has severally agreed to
purchase, the number of shares of common stock listed next to its name in the
following table.

<TABLE>
<CAPTION>
                                                                       Number of
     Underwriter                                                        Shares
     -----------                                                       ---------
     <S>                                                               <C>
     Banc of America Securities LLC...................................
     Lehman Brothers Inc. ............................................
                                                                          ---
       Total..........................................................
                                                                          ===
</TABLE>

   Shares sold by the underwriters to the public will initially be offered on
the terms set forth on the cover page of this prospectus. The underwriters may
allow to selected dealers a concession of not more than $    per share, and the
underwriters may also allow, and any other dealers may reallow, a concession of
not more than $    per share to certain other dealers. If all the shares are
not sold at the initial public offering price, the underwriters may change the
offering price and the other selling terms. The common stock is offered subject
to receipt and acceptance by the underwriters and certain other conditions,
including the right to reject orders in whole or in part.

   If the underwriters sell more shares than the total number set forth in the
table above, they have an option to buy up to a maximum of     additional
shares from Therma-Wave to cover such sales. The underwriters have 30 days to
exercise this option. If any shares are purchased pursuant to this option, the
underwriters will severally purchase shares in approximately the same
proportion as set forth in the table above. If purchased, the underwriters will
offer such additional shares on the same terms as those on which the     shares
are being offered. The following table sets forth the per share and total
underwriting discounts and commissions to be paid to the underwriters assuming
both no exercise and full exercise of the underwriters' option to purchase
additional shares.

<TABLE>
<CAPTION>
                                                       No Exercise Full Exercise
                                                       ----------- -------------
     <S>                                               <C>         <C>
     Per share........................................    $            $
                                                          ----         ----
     Total............................................    $            $
                                                          ====         ====
</TABLE>

   Therma-Wave, our executive officers, directors and substantially all of our
existing stockholders as well as certain holders of options to purchase common
stock have agreed with the underwriters not to dispose of or hedge any of their
common stock or securities convertible into or exchangeable for shares of
common stock during the period from the date of this prospectus continuing
through the date 180 days after the date of this prospectus without the prior
written consent of Banc of America Securities LLC. At any time and without
notice, Banc of America Securities LLC may, in its sole discretion, release all
or any portion of the securities from these lock-up agreements.

   The underwriting agreement provides that Therma-Wave will indemnify the
underwriters against certain liabilities, including civil liabilities under the
Securities Act, or will contribute to payments the underwriters may be required
to make in respect thereof.

   At our request, the underwriters have reserved up to     shares of common
stock offered by this prospectus for sale at the initial public offering price
to certain eligible employees and persons having business relationships with
us. The number of shares of common stock available to the general public will
be reduced to

                                       76
<PAGE>

the extent that these persons purchase the reserved shares. Any reserved
shares of common stock that are not so purchased by such employees at the
closing of the initial public offering, will be offered by the underwriters to
the general public on the same terms as the other shares in the initial public
offering.

   In connection with this offering, the underwriters may purchase and sell
shares of common stock in the open market. These transactions may include:

  .  short sales

  .  stabilizing transactions

  .  purchases to cover positions created by short sales

   Short sales involve the sale by the underwriters of a greater number of
shares than they are required to purchase in this offering. Stabilizing
transactions consist of certain bids or purchases made for the purpose of
preventing or retarding a decline in the market price of the common stock
while this offering is in progress.

   The underwriters also may impose a penalty bid. This occurs when a
particular underwriter repays to the underwriters a portion of the
underwriting discount received by it because the representatives have
repurchased shares sold by or for the account of such underwriter in
stabilizing or short covering transactions.

   The underwriters may engage in activities that stabilize, maintain or
otherwise affect the price of the common stock, including:

  .  over-allotment

  .  stabilization

  .  syndicate covering transactions

  .  imposition of penalty bids

   As a result of these activities, the price of the common stock may be
higher than the price that otherwise might exist in the open market. If the
underwriters commence these activities, they may discontinue them at any time.
The underwriters may carry out these transactions on the Nasdaq National
Market, in the over-the-counter market or otherwise.

   The underwriters do not expect sales to discretionary accounts to exceed 5%
of the total number of shares of common stock offered by this prospectus.

   Prior to this offering, there has been no public market for the common
stock of Therma-Wave. The initial public offering price will be negotiated
among Therma-Wave and the underwriters. Among the factors to be considered in
such negotiations are:

  .  the history of, and prospects for, Therma-Wave and the industry in which
     it competes

  .  the past and present financial performance of Therma-Wave

  .  an assessment of Therma-Wave's management

  .  the present state of Therma-Wave's development

  .  the prospects for Therma-Wave's future earnings

  .  the prevailing market conditions of the applicable U.S. securities
     market at the time of this offering

  .  market valuations of publicly traded companies that Therma-Wave and the
     representatives believe to be comparable to Therma-Wave

  .  other factors deemed relevant

   The total expenses related to this initial public offering of our common
stock are estimated to be $   .

                                      77
<PAGE>

                                    EXPERTS

   The consolidated financial statements as of March 31, 1999 and for the year
ended March 31, 1999 appearing in this Prospectus have been so included in
reliance on the report of PricewaterhouseCoopers LLP, independent accountants,
given on the authority of said firm as experts in auditing and accounting.

   Ernst & Young LLP, independent auditors, have audited our consolidated
financial statements at March 31, 1998, and for each of the two fiscal years in
the period ended March 31, 1998, as set forth in their report. We have included
our financial statements in the prospectus and elsewhere in the registration
statement in reliance on Ernst & Young LLP's report, given on their authority
as experts in accounting and auditing.

                                 LEGAL MATTERS

   The validity of the common stock offered hereby will be passed upon for
Therma-Wave by Kirkland & Ellis (a partnership that includes professional
corporations), Chicago, Illinois. Certain partners of Kirkland & Ellis are
partners in Randolph Street Partners, which owns 84,906 shares of Class A
common stock and 9,434 shares of Class L common stock. Certain legal matters in
connection with this offering will be passed upon for the underwriters by Ropes
& Gray, Boston, Massachusetts. Kirkland & Ellis and Ropes & Gray have, from
time to time, represented, and may continue to represent, certain of the
underwriters in connection with various legal matters and the Bain Capital
Funds and certain of their affiliates (including Therma-Wave) in connection
with certain legal matters.

                       CHANGE IN INDEPENDENT ACCOUNTANTS

   Effective July 16, 1998, we dismissed Ernst & Young LLP as our independent
accountants. Concurrent with such dismissal, we engaged PricewaterhouseCoopers
LLP as our independent accountants. The decision to dismiss Ernst & Young LLP
as our independent accountants was approved by Therma-Wave's board of
directors.

   The reports of Ernst & Young LLP on our consolidated financial statements
for each of the two fiscal years in the period ended March 31, 1998 did not
contain an adverse opinion or a disclaimer of opinion and were not qualified or
modified as to uncertainty, audit scope or accounting principles.

   In connection with the audits of our consolidated financial statements for
each of the two fiscal years in the period ended March 31, 1998, and through
July 16, 1998, there were no disagreements between us and Ernst & Young LLP on
any matters of accounting principles or practices, financial statement
disclosure, or auditing scope and procedures which, if not resolved to the
satisfaction of Ernst & Young LLP, would have caused them to make reference to
the matter in their reports.

                      WHERE YOU CAN FIND MORE INFORMATION

   We are currently subject to the informational requirements of the Exchange
Act, and in accordance therewith we are required to file periodic reports and
other information with the SEC. The reports and other information filed by us
with the SEC may be inspected and copied at the public reference facilities
maintained by the SEC as described below.

   We have filed with the SEC a registration statement on Form S-1 (the
"Registration Statement," which term shall encompass all amendments, exhibits,
annexes and schedules thereto) pursuant to the Securities Act, and the rules
and regulations promulgated thereunder, with respect to the shares of common
stock offered hereby. This prospectus, which constitutes part of the
Registration Statement, does not contain all the information set forth in the
Registration Statement, certain parts of which are omitted in accordance with
the

                                       78
<PAGE>

rules and regulations of the SEC. For further information with respect to us
and the common stock offered hereby, reference is made to the Registration
Statement. Statements made in this Prospectus as to the contents of any
contract, agreement or other document referred to are not necessarily complete.
With respect to each such contract, agreement or other document filed as an
exhibit to the Registration Statement, reference is made to the exhibit for a
more complete description of the document or matter involved, and each such
statement shall be deemed qualified in its entirety by such reference.

   The Registration Statement, including the exhibits thereto, can be inspected
and copied at the public reference facilities maintained by the SEC at Room
1024, 450 Fifth Street, N.W., Washington, D.C. 20549 (telephone number: 1-800-
SEC-0330), at the Regional Offices of the SEC at 7 World Trade Center, 13th
Floor, New York, New York 10048 and at Citicorp Center, 500 West Madison
Street, Suite 1400, Chicago, Illinois 60661. Copies of such materials can be
obtained from the Public Reference Section of the SEC at 450 Fifth Street,
N.W., Washington, D.C. 20549, at prescribed rates. The SEC maintains a website
that contains reports, proxy and information statements and other information
regarding registrants that file electronically with the SEC. The address of
such site is http://www.sec.gov.

   We intend to furnish our stockholders with annual reports containing
financial statements audited by an independent accounting firm, and to make
available quarterly reports containing unaudited financial information for the
first three quarters of each fiscal year.

                                       79
<PAGE>

                         INDEX TO FINANCIAL STATEMENTS

<TABLE>
<S>                                                                         <C>
Therma-Wave, Inc. Audited Consolidated Financial Statements

  Report of Independent Accountants........................................ F-2

  Report of Ernst & Young, LLP, Independent Auditors....................... F-3

  Consolidated Balance Sheets as of March 31, 1998 and 1999................ F-4

  Consolidated Statements of Operations for the years ended March 31, 1997,
   1998 and 1999........................................................... F-5

  Consolidated Statements of Mandatorily Redeemable Convertible Preferred
   Stock and Stockholders' Equity (Net Capital Deficiency) for the years
   ended March 31, 1997, 1998 and 1999..................................... F-6

  Consolidated Statements of Cash Flows for the years ended March 31, 1997,
   1998 and 1999........................................................... F-7

  Notes to Consolidated Financial Statements............................... F-8
</TABLE>

                                      F-1
<PAGE>

                       REPORT OF INDEPENDENT ACCOUNTANTS

To The Board of Directors and Stockholders of
Therma-Wave, Inc.

   In our opinion, the accompanying consolidated balance sheet and the related
consolidated statements of operations, of mandatorily redeemable convertible
preferred stock and stockholders' equity (net capital deficiency) and of cash
flows present fairly, in all material respects, the financial position of
Therma-Wave, Inc. and its subsidiaries at March 31, 1999, and the results of
their operations and their cash flows for the year then ended March 31, 1999 in
conformity with generally accepted accounting principles. These financial
statements are the responsibility of the Company's management; our
responsibility is to express an opinion on these financial statements based on
our audit. We conducted our audit of these statements in accordance with
generally accepted auditing standards which require that we plan and perform
the audit to obtain reasonable assurance about whether the financial statements
are free of material misstatement. An audit includes examining, on a test
basis, evidence supporting the amounts and disclosures in the financial
statements, assessing the accounting principles used and significant estimates
made by management, and evaluating the overall financial statement
presentation. We believe that our audit provides a reasonable basis for the
opinion expressed above.

PricewaterhouseCoopers LLP
San Jose, California
April 27, 1999

                                      F-2
<PAGE>

               REPORT OF ERNST & YOUNG, LLP, INDEPENDENT AUDITORS

The Board of Directors and Stockholders
Therma-Wave, Inc.

   We have audited the accompanying consolidated balance sheet of Therma-Wave,
Inc. as of March 31, 1998, and the related consolidated statements of
operations, mandatorily redeemable convertible preferred stock and
stockholders' equity (net capital deficiency), and cash flows for each of the
two years in the period ended March 31, 1998. These financial statements are
the responsibility of the Company's management. Our responsibility is to
express an opinion on these financial statements based on our audits.

   We conducted our audits in accordance with generally accepted auditing
standards. Those standards require that we plan and perform the audit to obtain
reasonable assurance about whether the financial statements are free of
material misstatement. An audit includes examining, on a test basis, evidence
supporting the amounts and disclosures in the financial statements. An audit
also includes assessing the accounting principles used and significant
estimates made by management, as well as evaluating the overall financial
statement presentation. We believe that our audits provide a reasonable basis
for our opinion.

   In our opinion, the consolidated financial statements referred to above
present fairly, in all material respects, the consolidated financial position
of Therma-Wave, Inc. at March 31, 1998 and the consolidated results of its
operations and its cash flows for each of the two years in the period ended
March 31, 1998, in conformity with generally accepted accounting principles.

                                          Ernst & Young LLP

San Jose, California
May 1, 1998

                                      F-3
<PAGE>

                               THERMA-WAVE, INC.

                          CONSOLIDATED BALANCE SHEETS
               (in thousands, except share and per share amounts)
<TABLE>
<CAPTION>
                                                                     Pro Forma
                                                                   Stockholders'
                                                                      Equity
                                                                   (Net Capital
                                                  March 31,         Deficiency)
                                              -------------------  at March 31,
                                                1998      1999         1999
                                              --------  ---------  -------------
                                                                    (Unaudited)
<S>                                           <C>       <C>        <C>
ASSETS
Current assets:
 Cash and cash equivalents..................  $ 20,422  $  20,245
 Accounts receivable, net of allowance for
  doubtful accounts of $3,016 and $1,911 at
  March 31, 1998 and 1999, respectively.....    22,098     12,180
 Inventory..................................    21,292     15,369
 Deferred income taxes......................     7,693      2,254
 Other current assets.......................       245      7,505
                                              --------  ---------
  Total current assets......................    71,750     57,553
 Property and equipment, net................     6,241      4,513
 Deferred financing costs, net..............     9,956      8,349
 Other assets...............................     1,815      1,937
                                              --------  ---------
  Total assets..............................  $ 89,762  $  72,352
                                              ========  =========
LIABILITIES, MANDATORILY REDEEMABLE
 CONVERTIBLE PREFERRED STOCK AND
 STOCKHOLDERS' EQUITY (NET CAPITAL
 DEFICIENCY)
Current liabilities:
 Accounts payable...........................  $  4,019  $   4,034
 Accrued liabilities........................    22,198     20,495
 Deferred revenue ..........................     2,111      1,556
 Capital lease obligations, current
  portion...................................        74         74
                                              --------  ---------
  Total current liabilities.................    28,402     26,159
Long term debt..............................   115,000    115,000
Capital lease obligations, long-term
 portion....................................       315        201
Deferred income taxes.......................     1,716      2,254
Deferred rent and other.....................       804        362

Commitments and contingencies (Note 7)

Mandatorily redeemable convertible preferred
 stock, $.01 par value; 1,000,000 shares
 authorized; 748,739 shares issued and
 outstanding at March 31, 1998 and 1999
 (aggregate liquidation preference of
 $15,347)...................................    14,515     15,347

Stockholders' equity (net capital
 deficiency)
 Common stock, no shares issued and
  outstanding at March 31, 1998 and 1999;
  $.01 par value, 35,000,000 shares
  authorized,     shares issued or
  outstanding at March 31, 1999 on a pro
  forma basis (unaudited)...................       --         --
 Class A common stock, $.01 par value;
  20,000,000 shares authorized;
  9,073,532 shares issued and outstanding at
  March 31, 1998 and 1999, and    shares
  issued and outstanding at March 31, 1999
  on a pro forma basis (unaudited)..........        91         91
 Class B common stock, $.01 par value;
  4,000,000 shares authorized; 1,289,785 and
  1,118,092 shares issued and outstanding at
  March 31, 1998 and 1999, respectively; no
  shares authorized, issued or outstanding
  at March 31, 1999 on a pro forma basis
  (unaudited)...............................        13         11
 Class L common stock, $.01 par value;
  2,000,000 shares authorized;
  1,008,170 shares issued and outstanding at
  March 31, 1998 and 1999; no shares
  authorized, issued or outstanding at March
  31, 1999 on a pro forma basis
  (unaudited)...............................        10         10
 Additional paid-in capital.................    20,625     19,754
 Accumulated deficit........................   (89,686)  (105,416)   $(105,416)
 Notes receivable from stockholders.........      (288)      (241)        (241)
 Accumulated other comprehensive loss.......    (1,755)    (1,180)      (1,180)
                                              --------  ---------    ---------
  Total stockholders' equity (net capital
  deficiency)...............................   (70,990)   (86,971)
                                              --------  ---------    =========
  Total liabilities and stockholders' equity
  (net capital deficiency)..................  $ 89,762  $  72,352
                                              ========  =========
</TABLE>

          See accompanying notes to consolidated financial statements.

                                      F-4
<PAGE>

                               THERMA-WAVE, INC.

                     CONSOLIDATED STATEMENTS OF OPERATIONS
                     (in thousands, except per share data)

<TABLE>
<CAPTION>
                                                   Fiscal Year Ended March
                                                             31,
                                                  ----------------------------
                                                    1997      1998      1999
                                                  --------  --------  --------
<S>                                               <C>       <C>       <C>
Net revenues....................................  $109,493  $115,459  $ 66,207
Cost of revenues................................    49,795    55,683    36,827
                                                  --------  --------  --------
Gross margin....................................    59,698    59,776    29,380
Operating expenses:
  Research and development......................    13,050    19,057    15,130
  Selling, general and administrative...........    22,004    24,589    17,870
  Amortization of goodwill and purchased
   intangibles..................................     1,275       --        --
  Recapitalization and other non-recurring
   expenses.....................................       --      4,188       --
  Expenses relating to operating cost
   improvements.................................       --        --      1,057
                                                  --------  --------  --------
Total operating expenses........................    36,329    47,834    34,057
                                                  --------  --------  --------
Operating income (loss).........................    23,369    11,942    (4,677)
Other (income) expense:
  Interest expense..............................     1,621    12,930    14,060
  Interest income...............................      (346)     (753)     (651)
  Other (income) expense........................       (14)      194        (6)
                                                  --------  --------  --------
                                                    (1,261)  (12,371)  (13,403)
                                                  --------  --------  --------
Income (loss) before provision for income
 taxes..........................................    22,108      (429)  (18,080)
Provision (benefit) for income taxes............     9,007       604    (2,350)
                                                  --------  --------  --------
Net income (loss)...............................  $ 13,101    (1,033)  (15,730)
                                                  ========
Preferred stock dividends.......................                 738       832
                                                            --------  --------
Net loss attributable to common stockholders....            $ (1,771) $(16,562)
                                                            ========  ========
Net income (loss) per share:
  Basic.........................................  $   0.29  $  (0.27) $  (1.86)
  Diluted.......................................  $   0.29  $  (0.27) $  (1.86)
Weighted average number of shares outstanding:
  Basic.........................................    45,515    13,540     9,397
  Diluted.......................................    45,515    13,540     9,397
Pro forma basic and diluted net loss per share
 (unaudited)....................................                      $
Weighted average number of shares outstanding in
 pro forma basic and diluted net loss per share
 calculation (unaudited)........................
</TABLE>

          See accompanying notes to consolidated financial statements.

                                      F-5
<PAGE>

                               THERMA-WAVE, INC.
<TABLE>
<CAPTION>

CONSOLIDATED STATEMENTS OF MANDATORILY REDEEMABLE CONVERTIBLE PREFERRED STOCK AND
                 STOCKHOLDERS' EQUITY (NET CAPITAL DEFICIENCY)
                       (in thousands, except share data)

                                                              Class A          Class B            Class L
                   Preferred Stock      Common Stock        Common Stock     Common Stock       Common Stock   Additional
                   ----------------  -------------------  ---------------- -----------------  ----------------  Paid-In
                   Shares   Amount     Shares     Amount   Shares   Amount  Shares    Amount   Shares   Amount  Capital
                   -------  -------  -----------  ------  --------- ------ ---------  ------  --------- ------ ----------
<S>                <C>      <C>      <C>          <C>     <C>       <C>    <C>        <C>     <C>       <C>    <C>
Balance at March
31, 1996.........      --   $   --    45,515,339  $  45         --  $ --         --   $ --          --  $ --    $ 60,465
Net income.......      --       --           --     --          --    --         --     --          --    --         --
Currency
translation
adjustments......      --       --           --     --          --    --         --     --          --    --         --
 Comprehensive
 income..........
Repayment of
notes receivable
from
shareholders.....      --       --           --     --          --    --         --     --          --    --         --
                   -------  -------  -----------  -----   --------- -----  ---------  -----   --------- -----   --------
Balance at March
31, 1997.........      --       --    45,515,339     45         --    --         --     --          --    --      60,465
Net loss.........      --       --           --     --          --    --         --     --          --    --         --
Currency
translation
adjustments......      --       --           --     --          --    --         --     --          --    --         --
 Comprehensive
 loss............
Recapitalization
Transactions:....      --       --     8,614,997      9         --    --         --     --          --    --      17,102
Conversion of
outstanding
Common Stock into
shares of Class A
and Class L
Common Stock.....      --       --    (8,614,997)    (9)  7,264,236    73        --     --      807,138     8        (72)
Conversion of
outstanding
common stock into
shares of
Preferred Stock,
Class A and Class
L Common Stock...  750,000   13,800   (6,101,252)    (6)    509,433     5        --     --       56,604     1     (8,100)
Redemption of
Common Stock.....      --       --   (39,414,087)   (39)        --    --         --     --          --    --     (52,835)
Issuances of
Class A, B and L
Common Stock.....      --       --           --     --    1,290,010    13  1,334,875     13     143,333     1      3,328
Conversion of
Preferred Stock
into Class A
Common Stock.....   (1,261)     (23)         --     --        9,853   --         --     --        1,095   --          23
Recapitalization
related expenses
paid by Toray and
Shimadzu.........      --       --           --     --          --    --         --     --          --    --       2,888
Forgiveness of
receivable from
Toray and
Shimadzu.........      --       --           --     --          --    --         --     --          --    --      (1,425)
Preferred stock
dividends........      --       738          --     --          --    --         --     --          --    --        (738)
Repurchased
shares...........      --       --           --     --          --    --     (45,090)   --          --    --         (11)
                   -------  -------  -----------  -----   --------- -----  ---------  -----   --------- -----   --------
Balance at March
31, 1998.........  748,739   14,515          --     --    9,073,532    91  1,289,785     13   1,008,170    10     20,625
Net loss.........      --       --           --     --          --    --         --     --          --    --         --
Currency
translation
adjustments......      --       --           --     --          --    --         --     --          --    --         --
 Comprehensive
 loss............
Preferred stock
dividends........      --       832          --     --          --    --         --     --          --    --        (832)
Repurchased
shares...........      --       --           --     --          --    --    (171,693)    (2)        --    --         (39)
                   -------  -------  -----------  -----   --------- -----  ---------  -----   --------- -----   --------
Balance at March
31, 1999.........  748,739  $15,347          --   $ --    9,073,532 $  91  1,118,092  $  11   1,008,170 $  10   $ 19,754
                   =======  =======  ===========  =====   ========= =====  =========  =====   ========= =====   ========
<CAPTION>
                                            Accumu-
                                             lated
                                             Other
                                  Notes     Compre-            Compre-
                                Receivable  hensive            hensive
                   Accumulated     from     Income              Income
                     Deficit   Stockholders (Loss)    Total     (Loss)
                   ----------- ------------ -------- --------- ---------
<S>                <C>         <C>          <C>      <C>       <C>
Balance at March
31, 1996.........   $ (52,028)    $(524)    $(1,055) $  6,903
Net income.......      13,101       --          --     13,101  $ 13,101
Currency
translation
adjustments......         --        --         (383)     (383)     (383)
                                                               ---------
 Comprehensive
 income..........                                              $ 12,718
                                                               =========
Repayment of
notes receivable
from
shareholders.....         --        524         --        524
                   ----------- ------------ -------- ---------
Balance at March
31, 1997.........     (38,927)      --       (1,438)   20,145
Net loss.........      (1,033)      --          --     (1,033) $ (1,033)
Currency
translation
adjustments......         --        --         (317)     (317)     (317)
                                                               ---------
 Comprehensive
 loss............                                              $ (1,350)
                                                               =========
Recapitalization
Transactions:....         --        --          --     17,111
Conversion of
outstanding
Common Stock into
shares of Class A
and Class L
Common Stock.....         --        --          --        --
Conversion of
outstanding
common stock into
shares of
Preferred Stock,
Class A and Class
L Common Stock...      (5,700)      --          --    (13,800)
Redemption of
Common Stock.....     (44,026)      --          --    (96,900)
Issuances of
Class A, B and L
Common Stock.....         --       (299)        --      3,056
Conversion of
Preferred Stock
into Class A
Common Stock.....         --        --          --         23
Recapitalization
related expenses
paid by Toray and
Shimadzu.........         --        --          --      2,888
Forgiveness of
receivable from
Toray and
Shimadzu.........         --        --          --     (1,425)
Preferred stock
dividends........         --        --          --       (738)
Repurchased
shares...........         --         11         --        --
                   ----------- ------------ -------- ---------
Balance at March
31, 1998.........     (89,686)     (288)     (1,755)  (70,990)
Net loss.........     (15,730)      --          --    (15,730) $(15,730)
Currency
translation
adjustments......         --        --          575       575       575
                                                               ---------
 Comprehensive
 loss............                                              $(15,155)
                                                               =========
Preferred stock
dividends........         --        --          --       (832)
Repurchased
shares...........         --         47         --          6
                   ----------- ------------ -------- ---------
Balance at March
31, 1999.........   $(105,416)    $(241)    $(1,180) $(86,971)
                   =========== ============ ======== =========
</TABLE>

         See accompanying notes to consolidated financial statements.

                                      F-6
<PAGE>

                               THERMA-WAVE, INC.

                     CONSOLIDATED STATEMENTS OF CASH FLOWS
                                 (in thousands)

<TABLE>
<CAPTION>
                                                     Year Ended March 31,
                                                   ---------------------------
                                                    1997      1998      1999
                                                   -------  --------  --------
<S>                                                <C>      <C>       <C>
Operating activities:
 Net income (loss)...............................  $13,101  $ (1,033) $(15,730)
Adjustments to reconcile net income (loss) to net
 cash provided by operating activities:
  Depreciation...................................    1,382     2,102     2,590
  Amortization...................................    2,362     1,493     2,004
  Amortization of deferred financing costs.......      --      1,385     1,607
  Deferred income taxes..........................   (2,214)   (2,106)    5,977
  Noncash recapitalization and related expenses..      --      3,888       --
  Loss on disposal of property, plant and
   equipment.....................................      --        400       --
  Changes in assets and liabilities:
   Accounts receivable...........................   (1,277)   (1,991)    9,918
   Inventories...................................   (5,006)   (4,956)    4,310
   Other assets..................................      (44)       78    (4,136)
   Accounts payable..............................      732       (57)       15
   Accrued and other liabilities.................    2,572     8,497    (5,368)
   Other long-term liabilities...................      252       413      (442)
                                                   -------  --------  --------
    Net cash provided by operating activities....   11,860     8,113       745
                                                   -------  --------  --------
Investing activities:
  Purchases of property and equipment............   (1,091)   (2,900)     (862)
  Other..........................................     (484)      --       (527)
                                                   -------  --------  --------
    Net cash used in investing activities........   (1,575)   (2,900)   (1,389)
                                                   -------  --------  --------
Financing activities:
  Issuance of Senior Notes.......................      --    115,000       --
  Proceeds from notes payable....................      250       --        --
  Repayment of notes payable.....................   (1,435)  (26,934)      --
  Principal payments under capital lease
   obligations...................................     (190)     (128)     (114)
  Redemption of common stock.....................      --    (96,900)      --
  Proceeds from issuance of common stock.........      --     20,169       --
  Deferred financing costs.......................      --    (11,341)      --
  Other..........................................      141    (1,398)      581
                                                   -------  --------  --------
    Net cash (used in) provided by financing
     activities..................................   (1,234)   (1,532)      467
                                                   -------  --------  --------
Net (decrease)/increase in cash and cash
 equivalents.....................................    9,051     3,681      (177)
Cash and cash equivalents at beginning of
 period..........................................    7,690    16,741    20,422
                                                   -------  --------  --------
Cash and cash equivalents at end of period.......  $16,741  $ 20,422  $ 20,245
                                                   =======  ========  ========
Supplementary disclosures:
  Cash paid for interest.........................  $ 2,059  $  6,323  $ 12,469
                                                   =======  ========  ========
  Cash paid for income taxes.....................  $10,661  $  2,764  $    293
                                                   =======  ========  ========
</TABLE>

           See accompanying notes to consolidated financial statements.

                                      F-7
<PAGE>

                               THERMA-WAVE, INC.

                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

1. ORGANIZATION AND SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

 Description of Business

   Therma-Wave, Inc. (the "Company") was incorporated in California on March
11, 1986 and reincorporated in Delaware on October 16, 1990 and subsequently
amended its certificate of incorporation on May 16, 1997. The Company develops,
manufactures, and markets process control metrology systems for use in the
manufacture of semiconductors. These systems are based on the Company's
proprietary thermal wave and optical technologies. The Company markets and
sells its products worldwide to major semiconductor manufacturers.

 Basis of Presentation

   The Company's fiscal year is a 52 to 53-week year ending on the Sunday on or
following March 31 of each year. Fiscal years 1997, 1998 and 1999 ended on
April 6, 1997, April 5, 1998 and April 4, 1999, respectively. For convenience,
the accompanying financial statements have been presented as ending on the last
day of the nearest calendar month.

   Certain items previously reported in specific financial statement captions
have been reclassified to conform with the March 31, 1999 presentation.

 Principles of Consolidation

   The accompanying consolidated financial statements include the accounts of
Therma-Wave, Inc. and its wholly owned subsidiaries. All significant
intercompany transactions and balances are eliminated in consolidation.

 Recapitalization

   In December 1996, the Board of Directors approved the Recapitalization
Agreement (the "Recapitalization Agreement"). Pursuant to the Recapitalization
Agreement, which closed on May 16, 1997, the Company: (i) redeemed from Toray
Industries, Inc., ("Toray") and Shimadzu Corporation ("Shimadzu") approximately
86.6% of its outstanding capital stock for $96.9 million; (ii) converted its
remaining outstanding capital stock of 6.1 million shares to newly issued
shares of preferred stock and common stock; (iii) repaid substantially all of
its outstanding borrowings of approximately $26.9 million; (iv) canceled its
receivable from Toray and Shimadzu of $1.4 million which was recorded as a
reduction of additional paid-in capital; and (v) paid the estimated fees and
expenses of approximately $11.3 million related to the Recapitalization. In
order to finance the transactions effected by the Recapitalization Agreement,
the Company: (i) issued $115.0 million in aggregate principal amount of senior
notes in a private debt offering; (ii) received an equity contribution of
approximately $20.0 million in cash from an investor group, including
investment funds associated with Bain Capital, Inc. ("Bain"), and members of
the Company's senior management team; and (iii) converted equity securities of
Toray and Shimadzu having a value of $15.0 million into newly issued shares of
preferred stock and common stock.

 Revenue Recognition

   Revenue from system sales and spare parts is generally recognized at the
time of shipment. Revenue on service contracts is deferred and recognized on a
straight-line basis over the period of the contract. Estimated contractual
warranty obligations are recorded when related sales are recognized.

                                      F-8
<PAGE>

                               THERMA-WAVE, INC.

            NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


 Concentration of Credit Risk/Major Customers

   The Company sells its products to major semiconductor manufacturing
companies throughout the world. The Company performs continuing credit
evaluations of its customers and, generally, does not require collateral.
Letters of credit may be required from its customers in certain circumstances.

   Sales to customers representing 10% or more of net revenues were as
follows:

<TABLE>
<CAPTION>
                                                                    Year Ended
                                                                    March 31,
                                                                  ----------------
   Customer                                                       1997  1998  1999
   --------                                                       ----  ----  ----
   <S>                                                            <C>   <C>   <C>
   A.............................................................  13%   23%   23%
   B.............................................................  10%   --    --
   C.............................................................  --    --    18%
</TABLE>

   Certain of the components and subassemblies included in the Company's
systems are obtained from a single source or a limited group of suppliers.
Although the Company seeks to reduce dependence on those sole and limited
source suppliers, the partial or complete loss of certain of these sources
could have at least a temporary adverse effect on the Company's results of
operations and damage customer relationships. Further, a significant increase
in the price of one or more of these components could adversely affect the
Company's results of operations.

   Accounts receivable from three customers accounted for approximately 31%,
10% and 9% of total accounts receivable at March 31, 1998. Accounts receivable
from three customers accounted for approximately 26%, 12% and 11% of total
accounts receivable at March 31, 1999.

 Risks and Uncertainties

   The preparation of financial statements in conformity with generally
accepted accounting principles requires management to make estimates and
assumptions that affect the reported amounts of assets and liabilities,
disclosures of contingent assets and liabilities at the date of the financial
statements and the reported amounts of revenues and expenses during the
reported period. Actual results could differ from those estimates, and such
differences could affect the results of operations reported in future periods.

 Foreign Currency Translations and Transactions

   The Company has determined that the functional currency of its foreign
operations is the local foreign currency. The accumulated effects of foreign
translation rate changes related to net assets located outside the United
States are included as a component of stockholders' equity (net capital
deficiency). Foreign currency transaction gains (losses) are included in other
income and expense in the accompanying consolidated statements of operations
and amounted to $74,000, $(275,000) and $(23,000) for the years ended
March 31, 1997, 1998 and 1999.

 Cash and Cash Equivalents

   The Company maintains its cash and cash equivalents in depository accounts,
money market accounts and certificates of deposit with several financial
institutions. The Company considers all highly liquid investments purchased
with original maturities of three months or less to be cash equivalents.

 Inventories

   Inventories are stated at the lower of cost or market. Cost is determined
by the first-in, first-out method.

                                      F-9
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


 Property and Equipment

   Property and equipment are stated at cost, net of accumulated depreciation
and amortization. Depreciation and amortization are provided on the straight-
line basis over the estimated useful lives of the respective assets, generally
three to five years. Leasehold improvements and assets recorded under capital
leases are amortized on the straight-line basis over the shorter of the assets'
useful lives or lease terms. Depreciation and amortization expense for fiscal
years 1997, 1998 and 1999 are $1,382,000, $2,102,000, and $2,590,000,
respectively.

 Long-lived Assets

   The Company reviews for the impairment of long-lived assets whenever events
or changes in circumstances indicate that the carrying amount of an asset may
not be recoverable. An impairment loss would be recognized when estimated
future cash flows expected to result from the use of the asset and its eventual
disposition is less than its carrying amount. No such impairment losses have
been identified by the Company.

 Deferred Financing Costs

   Deferred financing costs represent the costs incurred in connection with the
issuance of the Senior Notes. These amounts are stated net of accumulated
amortization and amortized on the straight-line basis over the term of the
related notes.

 Research and Development Expenses

   Expenditures for research and development are expensed as incurred.

 Stock-Based Compensation

   In October 1995, the Financial Accounting Standards Board issued Statement
of Financial Accounting Standards No. 123, "Accounting for Stock-Based
Compensation" ("SFAS No. 123"). The Company accounts for employee stock options
in accordance with Accounting Principles Board Opinion No. 25 and has adopted
the "disclosure only" alternative described in SFAS No. 123.

 Income Taxes

   The Company accounts for income taxes under the asset and liability method.
Under this method, deferred tax assets and liabilities are recognized for the
future tax consequences attributable to temporary differences between the
financial statement carrying amounts and the tax basis of existing assets and
liabilities measured using enacted tax rates expected to apply to taxable
income in the years in which the temporary differences are expected to be
recovered or settled. The measurement of deferred tax assets is reduced, if
necessary, by the amount of any tax benefits that, based on available evidence,
are not expected to be realized.

 Unaudited Pro Forma Stockholders' Equity (Net Capital Deficiency)

   Prior to the closing of the Company's initial public offering, each
outstanding share of Class L common stock (the "Class L Stock") will be
reclassified into one share of Class A common stock (the "Class A Stock") plus
an additional number of shares of Class A Stock (determined by dividing the
preference amount for such share by the assumed initial public offering price
of $    per share) and each share of Class B common stock (the "Class B Stock")
will be reclassified into one share of Class A Stock. In addition, the Company
will file a Restated Certificate of Incorporation which will authorize
35,000,000 shares of Common Stock.

                                      F-10
<PAGE>

                               THERMA-WAVE, INC.

            NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


 Net Income (Loss) Per Share and Unaudited Pro Forma Net Loss Per Share

   The Company had adopted the provisions of Statement of Financial Accounting
Standards No. 128, "Earnings per Share" ("SFAS No. 128"). SFAS No. 128
requires the Company to report both basic net income (loss) per share, which
is based on the weighted-average number of common shares outstanding excluding
contingently issuable or returnable shares such as unvested Class B Stock or
shares that contingently convert into Common Stock upon certain events, and
diluted net income (loss) per share, which is based on the weighted average
number of common shares outstanding and dilutive potential common shares
outstanding. Class A Stock, Class B Stock and Class L Stock share ratably in
the net income (loss) remaining after giving effect to the 12% yield on Class
L Stock. Net loss for the years ended March 31, 1998 and 1999 used in the net
loss per share calculation represents the loss attributable to the weighted
average number of shares of Class A Stock, Class B Stock and Common Stock
outstanding after giving effect to the 12% yield on Class L Stock. As a result
of the losses incurred by the Company during fiscal years 1998 and 1999, all
potential common shares were anti-dilutive and excluded from the diluted net
income (loss) per share calculation.

   Unaudited pro forma basic and diluted net loss per share for the year ended
March 31, 1999 have been calculated based on net loss applicable to all
classes of Common Stock and assuming the reclassification of the Company's
Class B and L Stock prior to the completion of this offering, as if such
reclassification had occurred at the beginning of the period, or the issuance
of the stock, if later. Each share of Class L Stock will be reclassified into
one share of Class A Stock plus an additional number of shares of Class A
Stock (determined by dividing the preference amount for such share by the
assumed initial public offering price of $    per share). Each share of Class
B Stock will then be reclassified into one share of Class A Stock.

 Advertising Costs

   The Company expenses advertising and promotional costs, which are not
material, as they are incurred.

 Recently Issued Accounting Standards

   In June 1998, the FASB issued Statement on Financial Accounting Standards
No. 133 ("SFAS No. 133"), "Accounting for Derivative Instruments and Hedging
Activities." SFAS No. 133 establishes a new model for accounting for
derivatives and hedging activities and supercedes and amends a number of
existing accounting standards. SFAS No. 133 requires that all derivatives be
recognized in the balance sheet at their fair market value, and the
corresponding derivative gains or losses be either reported in the statement
of operations or as a deferred item depending on the type of hedge
relationship that exists with respect to such derivative. The Company
currently does not hold any derivative instruments that will be affected by
the adoption of SFAS No. 133.

                                     F-11
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)

2. BALANCE SHEET COMPONENTS

<TABLE>
<CAPTION>
                                                             March 31,
                                                         ------------------
                                                           1998      1999
                                                         --------  --------
                                                            (in thousands)
<S>                                                      <C>       <C>       <C>
Inventory:
 Purchased materials.................................... $  9,958  $  6,678
 Systems in process.....................................    7,146     5,302
 Finished systems.......................................    4,188     3,389
                                                         --------  --------
                                                         $ 21,292  $ 15,369
                                                         ========  ========
Property and equipment:
 Laboratory and test equipment.......................... $  3,786  $  4,096
 Office furniture and equipment.........................    5,423     5,766
 Machinery and equipment................................    1,766     1,816
 Leasehold improvements.................................    3,145     3,154
                                                         --------  --------
                                                           14,120    14,832
 Accumulated depreciation and amortization..............   (7,879)  (10,319)
                                                         --------  --------
                                                         $  6,241  $  4,513
                                                         ========  ========
Accrued liabilities:
 Interest payable....................................... $  5,074  $  4,932
 Accrued compensation and related expenses..............    4,051     2,313
 Accrued warranty costs.................................    6,671     4,733
 Commissions payable....................................    1,389     1,311
 Other accrued liabilities..............................    5,013     7,206
                                                         --------  --------
                                                         $ 22,198  $ 20,495
                                                         ========  ========
</TABLE>

3. NET INCOME (LOSS) PER SHARE

   The following tables set forth the computation of net income (loss) per
share of common stock:

<TABLE>
<CAPTION>
                                                      Year Ended March 31,
                                                    -------------------------
                                                     1997    1998      1999
                                                    ------- -------  --------
<S>                                                 <C>     <C>      <C>
Numerator (in thousands):
Net income (loss).................................. $13,101 $(1,033) $(15,730)
Less: Preferred stock dividend.....................     --     (738)     (832)
Less: Income attributable to Class L Stock.........     --   (1,947)     (944)
                                                    ------- -------  --------
                                                    $13,101 $(3,718) $(17,506)
                                                    ======= =======  ========
Denominator (in thousands):
Common Stock.......................................  45,515   5,563       --
Class A Stock......................................     --    7,939     9,074
Class B Stock (vested).............................     --       38       323
                                                    ------- -------  --------
Weighted average shares outstanding used for basic
 and diluted income (loss) per share...............  45,515  13,540     9,397
                                                    ======= =======  ========
</TABLE>

                                      F-12
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   The following table summarizes securities outstanding as of each period end
which were not included in the calculation of diluted net loss per share since
their inclusion would be anti-dilutive.

<TABLE>
<CAPTION>
                                                              March 31,
                                                       ------------------------
                                                       1997   1998      1999
                                                       ---- --------- ---------
<S>                                                    <C>  <C>       <C>
Class B Stock Subject to Repurchase (unvested)........  --  1,189,004   767,084
Mandatorily Redeemable Convertible Preferred Stock....  --    748,739   748,739
Stock Options.........................................  --  1,765,458 1,778,086
</TABLE>

   The stock options outstanding at March 31, 1998 and 1999, had a weighted
average exercise price of $10.69, and $9.64, respectively. Upon the completion
of an initial public offering, Class L Stock is convertible into one share of
Class A Stock plus an additional number of shares of Class A Stock (determined
by dividing the preference amount for such share by the assumed initial public
offering price).

4. FINANCING ARRANGEMENTS

 Senior Notes

   The $115.0 million of senior notes ("Senior Notes") issued to finance the
Recapitalization are senior unsecured obligations of the Company and will
mature on May 15, 2004. Interest on the Senior Notes will accrue at the rate of
10 5/8% per annum and is payable semiannually in cash on each May 15 and
November 15 to registered holders at the close of business on May 1 and
November 1, respectively, immediately preceding the applicable interest payment
date. The Senior Notes are not entitled to the benefit of any mandatory sinking
fund and are redeemable at the Company's option in whole at any time or in part
from time to time, on and after May 15, 2001, upon not less than 30 nor more
than 60 days notice, at specified redemption prices. If the Company completes
an initial public offering, with net proceeds equal to or in excess of $25.0
million, the Company is required to make an offer to redeem up to 35% of the
aggregate principal amount of the Senior Notes outstanding at a price equal to
110.625% of the principal amount thereof plus accrued and unpaid interest
thereon. At any time, or from time to time, if the Company completes one or
more equity offerings (not considered an initial public offering) on or prior
to May 15, 2000, the Company may, at its option, use the net cash proceeds to
redeem up to 35% of the aggregate principal amount of Senior Notes originally
issued at a redemption price equal to 110.625% of the principal amount thereof
plus accrued and unpaid interest.

   Based upon the terms of the original notes, the Company issued new notes
with substantially identical terms as the old notes except that the new notes
are registered under the Securities Act and therefore do not bear legends
restricting their transfer.

 Bank Credit Facility

   In conjunction with the Recapitalization, the Company entered into the
Credit Agreement among Therma-Wave, Inc., various lending institutions, and
Bankers Trust Company, as Agent (the "Bank Credit Facility"), which provided
for a revolving credit facility of $30.0 million. During the quarter ended June
30, 1998, the Company entered into the First Amendment to the Credit Agreement
among Therma-Wave, Inc., various lending institutions, and Bankers Trust
Company, as Agent (the "Amended Bank Credit Facility"), to have its borrowing
availability subject to a borrowing base formula, which provides a maximum
revolving credit facility of $30.0 million, and to make certain necessary
adjustments to the financial tests and covenants contained therein in light of
current market conditions. The Company may borrow amounts under the Amended
Bank Credit Facility to finance its working capital requirements and other
general corporate purposes. The Amended Bank Credit Facility requires the
Company to meet certain financial tests and contains covenants customary for
this type of financing. At March 31, 1999, there was $3.5 million of an
outstanding letter of credit and unused borrowing capacity under the Amended
Bank Credit Facility of $17.0 million. The interest rate under the Amended Bank
Credit Facility is at the lenders base rate plus 1.25% (9.5% at March 31,
1999).

                                      F-13
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   At March 31, 1997, the Company had a credit agreement with a Japanese bank
for an unsecured, renewable note payable with an outstanding principal balance
of $3.8 million and $23.1 million of unsecured long-term debt under four
separate loan agreements with banks. These notes payable were repaid in
conjunction with the Recapitalization Agreement.

   The fair value of the Company's long-term debt is based on quoted market
prices. The estimated fair value of long-term debt is $69,162,000 at March 31,
1999.

5. INCOME TAXES

   The domestic and foreign components of income (loss) before provision
(benefit) for income taxes are as follows (in thousands):

<TABLE>
<CAPTION>
                                                     Fiscal Year Ended March
                                                               31,
                                                     --------------------------
                                                      1997     1998      1999
                                                     -------  -------  --------
   <S>                                               <C>      <C>      <C>
   Domestic......................................... $19,419  $  (436) $(19,016)
   Foreign..........................................   2,689        7       936
                                                     -------  -------  --------
     Total.......................................... $22,108  $  (429) $(18,080)
                                                     =======  =======  ========

   The components of the provision (benefit) for income taxes are as follows
(in thousands):

<CAPTION>
                                                     Fiscal Year Ended March
                                                               31,
                                                     --------------------------
                                                      1997     1998      1999
                                                     -------  -------  --------
   <S>                                               <C>      <C>      <C>
   Current:
    Federal......................................... $ 9,696  $ 2,314  $ (8,344)
    State...........................................   1,525      396         4
    Foreign.........................................     --       --         13
                                                     -------  -------  --------
                                                      11,221    2,710    (8,327)
   Deferred:
    Federal.........................................  (1,921)  (1,710)    5,807
    State...........................................    (293)    (396)      --
    Foreign.........................................     --       --        170
                                                     -------  -------  --------
                                                      (2,214)  (2,106)    5,977
                                                     -------  -------  --------
                                                     $ 9,007  $   604  $ (2,350)
                                                     =======  =======  ========
</TABLE>

                                      F-14
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   A rate reconciliation between income tax provisions at the U.S. federal
statutory rate and the effective rate reflected in the statements of operations
is as follows:

<TABLE>
<CAPTION>
                                                           Fiscal Year
                                                         Ended March 31,
                                                         -------------------
                                                         1997  1998    1999
                                                         ----  -----   -----
   <S>                                                   <C>   <C>     <C>
   Provision at statutory rate.......................... 35.0% (35.0)% (35.0)%
   State taxes, net of federal benefit..................  3.6    --      --
   Amortization of goodwill and purchased intangibles...  2.0    --      --
   Utilization of net operating loss and credit
    carryforwards....................................... (3.2)   --     (5.5)
   Foreign sales corporations........................... (0.9) (40.5)    --
   Other changes in valuation allowances................  --   195.4    26.1
   Other................................................  4.2   20.9     1.4
                                                         ----  -----   -----
                                                         40.7% 140.8%  (13.0)%
                                                         ====  =====   =====
</TABLE>

   For the year ended March 31, 1999 the Company realized an income tax benefit
from the carryback of its net operating loss to recover substantially all
income taxes paid during the carryback period. At March 31, 1999, the Company
recorded an income tax receivable of $7,351,000 which is included in other
current assets.

   The tax effects of temporary differences that give rise to significant
portions of the deferred tax assets and deferred tax liabilities are presented
below (in thousands):

<TABLE>
<CAPTION>
                                                                  March 31,
                                                               ----------------
                                                                1998     1999
                                                               -------  -------
   <S>                                                         <C>      <C>
   Deferred tax assets:
    Accrued costs and expenses................................ $ 5,935  $ 3,241
    State taxes...............................................     117        1
    Other.....................................................   2,441    3,156
    Net operating loss and tax credits........................     491    1,866
                                                               -------  -------
    Total gross deferred tax assets...........................   8,984    8,264
   Less: valuation allowance..................................  (1,291)  (6,010)
                                                               -------  -------
    Total gross deferred tax assets...........................   7,693    2,254
                                                               -------  -------
   Deferred tax liabilities:
    Deferred revenue on foreign sales.........................  (1,281)  (1,139)
    Depreciation and amortization.............................     --      (834)
    Other.....................................................    (435)    (281)
                                                               -------  -------
    Net deferred tax liabilities..............................  (1,716)  (2,254)
                                                               -------  -------
    Total net deferred tax assets............................. $ 5,977  $   --
                                                               =======  =======
</TABLE>

   The net changes in the total valuation allowance for the years ended March
31, 1998 and 1999 were $800,000 and $4,719,000, respectively. The change in
valuation allowance for the year ended March 31, 1998 is primarily due to state
income tax temporary differences and foreign net operating losses. At March 31,
1999, management believes it is more likely than not that the net deferred tax
assets will not be fully realizable and has provided a full valuation against
its net deferred tax assets.

   At March 31, 1999, the Company has net operating loss carryforwards for
foreign income tax purposes of approximately $390,000, which expire in varying
amounts through 2003.

                                      F-15
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


6. EXPENSES RELATING TO OPERATING COST IMPROVEMENTS

   On June 22 and September 24, 1998, the Company announced and implemented an
operating cost improvement program aimed at bringing operating expenses in line
with the Company's current operating environment. All terminated employees were
notified of their severance and related benefits at the time the program was
announced. This program resulted in a reduction of approximately 100 employees
primarily involved in customer service and manufacturing positions. Certain
leased facilities and fixed assets were consolidated. Total cash outlays for
fiscal 1999 were $832,000. Non-cash charges of $100,000 are primarily for asset
write-offs. The balance of $125,000 at March 31, 1999 primarily represents cash
payments and will be utilized in fiscal 2000. Expenses relating to operating
cost improvements are summarized as follows:

<TABLE>
<CAPTION>
                                            Provision
                                            Year Ended               Balance
                                          March 31, 1999 Utilized March 31, 1999
                                          -------------- -------- --------------
   <S>                                    <C>            <C>      <C>
   Severance.............................     $  837       $762        $ 75
   Facilities............................        120         70          50
   Other.................................        100        100         --
                                              ------       ----        ----
                                              $1,057       $932        $125
                                              ======       ====        ====
</TABLE>

7. COMMITMENTS AND CONTINGENCIES

   The Company leases its facilities under noncancellable operating leases
which require the Company to pay maintenance and operating expenses, such as
taxes, insurance and utilities. The Company is required pursuant to the terms
of a facility lease to maintain a $3,500,000 standby letter of credit.

   Property and equipment includes equipment recorded under capital leases of
approximately $895,000 and related accumulated amortization of $506,000 and
$620,000 at March 31, 1998 and 1999 respectively.

   Rent expense was approximately $1,524,000, $1,629,000 and $1,661,000 for the
fiscal years ended March 31, 1997, 1998 and 1999, respectively.

   At March 31, 1999, future minimum lease payments under capital and
noncancellable operating leases are as follows (in thousands):

<TABLE>
<CAPTION>
                                                               Capital Operating
                                                               Leases   Leases
                                                               ------- ---------
   <S>                                                         <C>     <C>
   Fiscal Year
   2000.......................................................  $  90   $1,378
   2001.......................................................     88    1,165
   2002.......................................................    212    1,180
   2003.......................................................    --     1,229
   2004.......................................................    --     1,191
   Thereafter.................................................    --     2,184
                                                                -----   ------
   Future Minimum Lease Payments..............................    390   $8,327
                                                                        ======
   Less: Amounts Representing Interest........................   (115)
                                                                -----
   Present Value of Minimum Lease Payments....................    275
   Less: Current Portion......................................    (74)
                                                                -----
                                                                $ 201
                                                                =====
</TABLE>

                                      F-16
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


 Deferred Bonus Arrangements

   Pursuant to the terms of certain management bonus arrangements, the Company
may be obligated to pay up to an aggregate of $12.4 million after May 16, 2002
based upon achieving certain operating results and each employee's continued
employment. The Company must achieve a minimum cumulative EBITDA (as defined in
such bonus agreements) of $177.0 million for the five year period ended May 15,
2002 in order for the deferred bonus of $12.4 million to be payable. If the
Company achieves cumulative EBITDA levels from $133.3 million to $177.0 million
for the five year period ended May 15, 2002, a fraction of the deferred bonus
is payable based on the amount EBITDA exceeds $133.3 million, up to the maximum
deferred bonus amount of $12.4 million. No amounts have been accrued to date as
the achievement of the required operating results is not considered probable as
of March 31, 1999.

 Legal Proceedings

   On September 3, 1998, the Company was named in a patent infringement suit
filed by KLA-Tencor Corporation ("KLA-Tencor"). KLA-Tencor alleged that it
patented an aspect of the thin film thickness measuring technology that the
Company uses in its Opti-Probe product family. KLA-Tencor is seeking damages
and an injunction to stop the sale of the equipment they allege uses this
aspect. The Company believes none of its products infringe any of the claims of
KLA-Tencor's patent and that their infringement allegations are unfounded. The
Company intends to vigorously defend its position and expects to prevail.

   On January 14, 1999, the Company commenced an action against KLA-Tencor for
patent infringement with respect to one of the Company's fundamental thin film
technology combination patents. The suit seeks damages for patent infringement
and a permanent injunction against any future activities undertaken by KLA-
Tencor or any third party working in conjunction with them, which infringes on
the Company's patent. The suit was filed as a counterclaim in the infringement
action initiated by KLA-Tencor and also seeks a declaratory judgment that KLA-
Tencor's patent, which the Company was alleged of infringing, is invalid and
not infringed by any of the Company's systems.

   There can be no assurances, however, that the Company will prevail in any
patent litigation. The Company believes that the outcome of any resultant
litigation will not have a material adverse effect on the Company's financial
condition or results of operations.

   The Company is involved in various other legal proceedings from time to time
arising in the ordinary course of business, none of which management expects to
have a material adverse effect on the Company's results of operations or
financial condition.

8. MANDATORILY REDEEMABLE CONVERTIBLE PREFERRED STOCK AND STOCKHOLDERS' EQUITY
  (NET CAPITAL DEFICIENCY)

 Mandatorily Redeemable Convertible Preferred Stock

   The Series A Mandatorily Redeemable Convertible Voting Preferred Stock
("Preferred Stock") has a liquidation preference of $18.40 and is convertible
at any time into one share of Class A Common Stock at the option of the holder.
Dividends on each share of the Preferred Stock shall be cumulative and accrue
at the rate of 6% per annum. The Preferred Stock has a scheduled redemption on
May 17, 2004, and is otherwise redeemable by the Company at any time from time
after the earlier of (a) June 30, 1998 or (b) an initial public offering. Each
share of Preferred Stock is convertible into one share of Class A Common Stock
(as adjusted for stock splits, stock dividends, recapitalizations and similar
transactions). The Preferred Stock entitles the holder to one vote for each
share of Class A Common Stock issuable upon conversion of the Preferred Stock.
Upon any liquidation, dissolution or winding up of the Company, each holder of
the Preferred Stock shall be entitled to be paid before any distribution or
payment is made upon any capital stock or other equity securities of the
Company.

                                      F-17
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   We issued shares of Preferred Stock as part of the Recapitalization. The
fair value of the Preferred Stock at March 31, 1999 of $15,347 represents the
liquidation value plus accrued dividends.

 Common Stock

   Immediately after the Recapitalization, the outstanding equity securities of
the Company consisted of 9,073,532 shares of Class A Common; 1,334,875 shares
of Class B Common; 1,008,170 shares of Class L Common; and 748,739 shares of
Preferred Stock. The shares of Class A Stock and Class L Stock each entitle the
holder to one vote per share on all matters to be voted upon by the
stockholders of the Company and are otherwise identical, except that the shares
of Class L Stock are entitled to a preference over Class A Stock with respect
to any distribution by the Company to holders of its capital stock equal to the
original cost of such share ($19.085) plus an amount which accrues on a daily
basis at a rate of 12% per annum, compounded annually. The Class B Stock is
identical to the Class A Stock except that the Class B Stock is non-voting and
is convertible into Class A Stock at any time following an initial public
offering by the Company at the option of the holder.

   All unvested shares of Class B Stock are subject to repurchase by the
Company if the holder is no longer employed by the Company. Such shares vest
over five years from the date of issuance. During the fiscal year ended March
31, 1999, 171,693 shares of Class B Stock were repurchased by the Company. As
of March 31, 1999, 351,008 shares of Class B Stock were vested and
767,084 shares of Class B Stock were subject to repurchase by the Company at
the paid-in amount.

 Stock Based Compensation

   The Company has elected to follow Accounting Principles Board Opinion No.
25, "Accounting for Stock Issued to Employees" ("APB No. 25") and related
interpretations in accounting for its employee stock awards because, as
discussed below, the alternative fair value accounting provided for under
Statement of Financial Accounting Standards No. 123, "Accounting for Stock-
Based Compensation" ("SFAS No. 123") requires use of option valuation models
for use in valuing employee stock options. Under APB No. 25, when the exercise
price of the Company's employee stock options equals the market price of the
underlying stock on the date of grant, no compensation expense is recognized.

   During fiscal year 1998, the Company adopted several stock option plans (the
"Plans") whereby the Board of Directors may grant incentive stock options and
nonstatutory stock options to employees, directors or consultants. The Company
has reserved 3,742,500 shares of Class A Stock and 3,742,500 shares of Class B
Stock for issuance under the Plans. Unless terminated sooner, the Plans will
terminate automatically in May 2007. Vesting provisions for stock options
granted under the Plans are determined by the Board of Directors. Unless the
Board of Directors specifically determines otherwise at the time of the grant,
the option shall vest 25% on each of the first four anniversaries from the date
of grant. Stock options expire no later than ten years from the date of grant.
Common shares issued on exercise of options prior to vesting are subject to
repurchase by the Company if the holder is no longer employed by the Company.

                                      F-18
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   A summary of the Company's stock option activity, and related information
for the years ended March 31, 1998 and 1999 are as follows:

<TABLE>
<CAPTION>
                                                        Options Outstanding
                                                     ---------------------------
                                                                Weighted Average
                                           Shares    Number of   Exercise Price
                                         Available    Shares       per Share
                                         ----------  ---------  ----------------
   <S>                                   <C>         <C>        <C>
   Balance at March 31, 1997............        --         --        $  --
    Authorized..........................  7,485,000        --           --
    Granted............................. (1,836,384) 1,836,384        10.67
    Exercised...........................        --         --           --
    Canceled............................     70,926    (70,926)       10.08
                                         ----------  ---------
   Balance at March 31, 1998............  5,719,542  1,765,458        10.69
    Granted.............................   (320,100)   320,100         4.44
    Exercised...........................        --         --           --
    Canceled............................    307,472   (307,472)       10.28
                                         ----------  ---------
   Balance at March 31, 1999............  5,706,914  1,778,086       $ 9.64
                                         ==========  =========
</TABLE>

   The following table summarizes information about stock options outstanding
as of March 31, 1999:

<TABLE>
<CAPTION>
                                                    Options Outstanding
                                              --------------------------------
                                                           Weighted
                                                            Average   Weighted
                                                           Remaining  Average
                                                Number    Contractual Exercise
                                              Outstanding    Life      Price
                                              ----------- ----------- --------
   <S>                                        <C>         <C>         <C>
   Range of exercise prices:
    $4.00....................................    270,000     9.32      $ 4.00
    $6.00-$7.00..............................    423,255     8.75      $ 6.10
    $8.93-$15.89.............................  1,084,831     8.13      $12.42
                                               ---------
                                               1,778,086
                                               =========
</TABLE>

   At March 31, 1999, there were 111,572 vested shares and 1,196,403 shares
were exercisable.

   Pro forma information regarding net loss and net loss per share is required
by FAS 123, which also requires that the information be determined as if the
Company has accounted for its employee stock options granted subsequent to
March 31, 1996 under the fair value method. The fair value for these options
was estimated using the Black-Scholes option pricing model.

   The Black-Scholes option valuation model was developed for use in estimating
the fair value of traded options that have no vesting restrictions and are
fully transferable. In addition, option valuation models require the input of
highly subjective assumptions, including the expected stock price volatility.
Because the Company's options have characteristics significantly different from
those of options of publicly traded companies and because changes in the
subjective input assumptions can materially affect the fair value estimate, in
the opinion of management, the existing models do not necessarily provide a
reliable single measure of the fair value of its options.

   For the years ended March 31, 1998 and 1999, the fair value of each option
grant was estimated on the date of the grant using the Black-Scholes option-
pricing model using a dividend yield of 0% for both periods and the following
additional weighted-average assumptions: volatility of zero and expected life
of an option of 5 years and a risk-free interest rate of 7.0% and 5.0%,
respectively. For purposes of pro forma disclosures, the estimated fair value
of the options is amortized to expense over the option's vesting period.

                                      F-19
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   Had compensation costs been determined based upon the fair value at the
grant date for awards under these plans, consistent with the methodology
prescribed under SFAS No. 123, the Company's pro forma net loss attributable to
common stockholders and pro forma basic and diluted net loss per share under
SFAS No. 123 would have been $(1,856,000) and $(0.28) for the year ended March
31, 1998 and $(16,717,000) and $(1.88) for the year ended March 31, 1999,
respectively.

   The weighted average fair value of options granted during the years ended
March 31, 1998 and 1999 with exercise prices equal to the market price at the
date of grant is $0.45 and $0.96 per share, respectively.

9. RELATED PARTY TRANSACTIONS

   Transactions with Toray & Shimadzu are as follows (in thousands):

<TABLE>
<CAPTION>
                                                                  Fiscal Year
                                                                     Ended
                                                                   March 31,
                                                                 --------------
                                                                 1997 1998 1999
                                                                 ---- ---- ----
   <S>                                                           <C>  <C>  <C>
   Revenue...................................................... $590 $ 82 $ 31
   Purchases of inventories.....................................   94  --   --
</TABLE>

   The Company incurred expenses of approximately $559,000, $75,000 and
$118,000 for the fiscal years ended March 31, 1997, 1998 and 1999,
respectively, for employees loaned to the Company by Toray and Shimadzu.

   On March 31, 1999, the Company had loans to management of $241,000 used to
acquire the Company's capital stock (notes receivable from stockholders) and
$1,043,000 used to pay certain tax liabilities incurred by certain executives
in connection with the Recapitalization (the Tax Notes). The notes receivable
from stockholders bear interest at the applicable federal rate in effect at the
time of the Recapitalization. The Tax Notes do not bear interest. The
executives have pledged their stock as security for the notes.

   In connection with the Recapitalization, the Company entered into an
Advisory Agreement with Bain Capital, a majority stockholder, pursuant to which
Bain Capital agreed to provide management services. The management fees
incurred, excluding out-of pocket expenses, during the fiscal years ended March
31, 1998 and 1999 were $750,000 and $1,000,000, respectively.

10. RETIREMENT PLAN

   The Company has a retirement plan under Section 401(k) of the Internal
Revenue Code covering substantially all employees. Discretionary company
contributions, which are based on achieving certain operating profit goals,
were $540,000, $566,000 and $0 in fiscal 1997, 1998 and 1999, respectively.

11. SEGMENT INFORMATION

   The Company operates in one segment as it manufactures, markets and services
process control metrology systems within the semiconductor equipment market.
All products and services are marketed within the geographic regions in which
the Company operates. The Company's current product offerings qualify for
aggregation under SFAS No. 131 as its products are manufactured and distributed
in the same manner, have similar long-term gross margins and are sold to the
same customer base.

                                      F-20
<PAGE>

                               THERMA-WAVE, INC.

             NOTES TO CONSOLIDATED FINANCIAL STATEMENTS (continued)


   The following is a summary of operations in geographic areas (in thousands):

<TABLE>
<CAPTION>
                                              Other
                             U.S.     Japan  Foreign Eliminations Consolidation
                           --------  ------- ------- ------------ -------------
<S>                        <C>       <C>     <C>     <C>          <C>
Fiscal year ended March
 31, 1997
Sales to unaffiliated
 customers...............  $ 97,237  $ 9,730 $2,526    $   --       $109,493
Transfers between
 geographic locations....     3,859    1,261  2,028     (7,148)          --
                           --------  ------- ------    -------      --------
Total net sales..........  $101,096  $10,991 $4,554    $(7,148)     $109,493
Operating income (loss)..  $ 21,965  $ 1,633 $  136    $  (365)     $ 23,369
Long-lived assets........  $  5,732  $   739 $  510    $   --       $  6,981
All other identifiable
 assets..................    54,868    6,758  2,869     (2,856)       61,639
                           --------  ------- ------    -------      --------
Total assets.............  $ 60,600  $ 7,497 $3,379    $(2,856)     $ 68,620
                           ========  ======= ======    =======      ========

Fiscal year ended March
 31, 1998
Sales to unaffiliated
 customers...............  $110,098  $ 2,645 $2,716    $   --       $115,459
Transfers between
 geographic locations....    (1,929)   1,706  2,572     (2,349)          --
                           --------  ------- ------    -------      --------
Total net sales..........  $108,169  $ 4,351 $5,288    $(2,349)     $115,459
Operating income (loss)..  $ 11,661  $   103 $  458    $  (280)     $ 11,942
Long-lived assets........  $ 16,974  $   624 $  414    $   --       $ 18,012
All other identifiable
 assets..................    69,237    2,841  3,030     (3,358)       71,750
                           --------  ------- ------    -------      --------
Total assets.............  $ 86,211  $ 3,465 $3,444    $(3,358)     $ 89,762
                           ========  ======= ======    =======      ========
Fiscal year ended March
 31, 1999
Sales to unaffiliated
 customers...............  $ 60,355  $ 2,542 $3,310    $   --       $ 66,207
Transfers between
 geographic locations....    (2,811)   1,047  3,620     (1,856)          --
                           --------  ------- ------    -------      --------
Total net sales..........  $ 57,544  $ 3,589 $6,930    $(1,856)     $ 66,207
Operating income (loss)..  $ (5,652) $   338 $  634    $     3      $ (4,677)
Long-lived assets........  $ 13,893  $   555 $  351    $   --       $ 14,799
All other identifiable
 assets..................    53,645    2,482  3,775     (2,349)       57,553
                           --------  ------- ------    -------      --------
Total assets.............  $ 67,538  $ 3,037 $4,126    $(2,349)     $ 72,352
                           ========  ======= ======    =======      ========
</TABLE>


   Other foreign areas include the United Kingdom, Taiwan and Korea, each of
which are individually not material for separate disclosure.

   Revenue in each geographic area is recognized upon shipment from the
locations within a designated geographic region. Transfers and commission
arrangements between geographic areas are at prices sufficient to recover a
reasonable profit. Export sales were $54,390,000, $56,006,000 and $39,892,000
of the net sales in fiscal 1997, 1998 and 1999, respectively.


                                      F-21
<PAGE>

- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------

                                        Shares

                               [Therma-Wave Logo]

                               ----------------

                                   Prospectus

                                       , 1999

                               ----------------

                         Banc of America Securities LLC

                                Lehman Brothers


- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
<PAGE>

                                    PART II

                     INFORMATION NOT REQUIRED IN PROSPECTUS

Item 13. Other Expenses of Issuance and Distribution.

   The following is a statement of estimated expenses, to be paid solely by
Therma-Wave, of the issuance and distribution of the securities being
registered hereby:

<TABLE>
   <S>                                                                <C>
   Securities and Exchange Commission registration fee............... $  8,896
   NASD filing fee...................................................    3,700
   Nasdaq National Market listing fee................................    5,000
   Blue Sky fees and expenses (including attorneys' fees and
    expenses)........................................................   10,000
   Printing expenses.................................................    *
   Accounting fees and expenses......................................  375,000
   Transfer agent's fees and expenses................................    3,000
   Legal fees and expenses...........................................  350,000
   Miscellaneous expenses............................................    *
                                                                      --------
     Total........................................................... $   *
                                                                      ========
</TABLE>
- --------
*  To be provided by Amendment.

Item 14. Indemnification of Directors and Officers.

 General Corporation Law

   We are incorporated under the laws of the State of Delaware. Section 145
("Section 145") of the General Corporation Law of the State of Delaware, as the
same exists or may hereafter be amended (the "General Corporation Law"), inter
alia, provides that a Delaware corporation may indemnify any persons who were,
are or are threatened to be made, parties to any threatened, pending or
completed action, suit or proceeding, whether civil, criminal, administrative
or investigative (other than an action by or in the right of such corporation),
by reason of the fact that such person is or was an officer, director, employee
or agent of such corporation, or is or was serving at the request of such
corporation as a director, officer, employee or agent of another corporation or
enterprise. The indemnity may include expenses (including attorneys' fees),
judgments, fines and amounts paid in settlement actually and reasonably
incurred by such person in connection with such action, suit or proceeding,
provided such person acted in good faith and in a manner he reasonably believed
to be in or not opposed to the corporation's best interests and, with respect
to any criminal action or proceeding, had no reasonable cause to believe that
his conduct was illegal. A Delaware corporation may indemnify any persons who
are, were or are threatened to be made, a party to any threatened, pending or
completed action or suit by or in the right of the corporation by reasons of
the fact that such person was a director, officer, employee or agent of such
corporation, or is or was serving at the request of such corporation as a
director, officer, employee or agent of another corporation or enterprise. The
indemnity may include expenses (including attorneys' fees) actually and
reasonably incurred by such person in connection with the defense or settlement
of such action or suit, provided such person acted in good faith and in a
manner he reasonably believed to be in or not opposed to the corporation's best
interests, provided that no indemnification is permitted without judicial
approval if the officer, director, employee or agent is adjudged to be liable
to the corporation. Where an officer, director, employee or agent is successful
on the merits or otherwise in the defense of any action referred to above, the
corporation must indemnify him against the expenses which such officer or
director has actually and reasonably incurred.

   Section 145 further authorizes a corporation to purchase and maintain
insurance on behalf of any person who is or was a director, officer, employee
or agent of the corporation, or is or was serving at the request of the
corporation as a director, officer, employee or agent of another corporation or
enterprise, against any liability

                                      II-1
<PAGE>

asserted against him and incurred by him in any such capacity, arising out of
his status as such, whether or not the corporation would otherwise have the
power to indemnify him under Section 145.

 Certificate of Incorporation and By-Laws

   Our Certificate of Incorporation and By-laws provides for the
indemnification of officers and directors to the fullest extent permitted by
the General Corporation Law.

Item 15. Recent Sales of Unregistered Securities.

   During the last three years, Therma-Wave has issued the following securities
without registration under the Securities Act of 1933 as amended (the
"Securities Act"):

(1) Therma-Wave completed the recapitalization on May 16, 1997. In connection
    with the recapitalization, Therma-Wave issued:

  (a) an aggregate of 6,960,035 shares of Old Common Stock to the Bain
      Capital Funds and Sutter Hill (which were later converted into an
      aggregate of 7,264,236 shares of Class A Common and an aggregate of
      807,138 shares of Class L Common) for an aggregate of $17.1 million;

  (b) an aggregate of (i) 1,226,331 shares of Class A Common; (ii) 136,258
      shares of Class L Common; and (iii) 1,128,749 shares of Class B Common
      to the Management Investors for an aggregate of $2.9 million;

  (c) an aggregate of (i) 509,433 shares of Class A Common; (ii) 56,604
      shares of Class L Common; and (iii) 750,000 shares of Preferred Stock
      to the Existing Stockholders in exchange for their 6,101,252 shares of
      Old Common Stock;

  (d) an aggregate of (i) 9,853 shares of Class A Common and (ii) 1,095
      shares of Class L Common to the Existing Stockholders in exchange for
      an aggregate of 1,261 shares of Preferred Stock; and

  (e) 63,679 shares of Class A Common and 7,075 shares of Class L Common to
      Antares International Partners for an aggregate of $150,000.

(2) To finance a portion of the recapitalization, Therma-Wave sold an aggregate
    of $115.0 million aggregate principal amount of 10 5/8% Senior Notes due
    2004 to BT Securities Corporation pursuant to a Purchase Agreement, dated
    May 16, 1997.

(3) On July 15, 1997, Therma-Wave sold an aggregate of 206,126 shares of Class
    B Common to certain employees of Therma-Wave for an aggregate of $48,440.

   The sales and issuances listed above in paragraphs (1)(a), (1)(b), (1)(e),
(2) and (3) were deemed exempt from registration under the Securities Act by
virtue of Section 4(2) thereof, as transactions not involving a public
offering. The issuance of securities listed in paragraphs (1)(c) and(1)(d) were
deemed exempt from registration under the Securities Act by virtue of Section
3(a)(9). Certain defined terms used herein not otherwise defined have the
meanings ascribed to them in the prospectus, which forms a part of this
Registration Statement.


                                      II-2
<PAGE>

Item 16. Exhibits and Financial Statement Schedules.

   (a) Exhibits.

<TABLE>
<CAPTION>
 Exhibit
   No.   Description
 ------- -----------
 <C>     <S>
 **1.1   Form of Underwriting Agreement.

  *2.1   Recapitalization Agreement, dated as of December 18, 1996, by and
         among Bain Capital Fund V, L.P., Bain Capital Fund V-B, L.P., BCIP
         Associates, BCIP Trust Associates, L.P., Toray Industries, Inc., Toray
         Industries (America), Inc. and Shimadzu Corporation as amended by
         Amendment No. 1 and Supplement to Recapitalization Agreement, dated
         May 16, 1997, by and among Therma-Wave, Inc., Toray Industries, Inc.,
         Toray Industries (America), Inc., Shimadzu Corporation and Bain
         Capital Fund V, L.P., Bain Capital Fund V-B, L.P., BCIP Trust
         Associates and BCIP Trust Associates, L.P.

  *3.1   Restated Certificate of Incorporation of Therma-Wave.

  *3.2   Amended and Restated By-Laws of Therma-Wave.

 **3.3   Form of Restated Certificate of Incorporation of Therma-Wave.

 **3.4   Form of Amended and Restated By-Laws of Therma-Wave.

  *4.1   Purchase Agreement, dated as of May 16, 1997, by and among Therma-Wave
         and BT Securities Corporation.

  *4.2   Indenture, dated as of May 15, 1997, by and among Therma-Wave and IBJ
         Schroder Bank & Trust Company, as trustee.

  *4.3   Form of 10 5/8% Senior Notes.

  *4.4   Form of Series B 10 5/8% Senior Notes.

  *4.5   Registration Rights Agreement, dated as of May 15, 1997, by and among
         Therma-Wave and BT Securities Corporation, as Initial Purchaser.

 **4.6   Form of certificate representing shares of Common Stock.

   5.1   Opinion of Kirkland & Ellis.

 *10.1   Employment Agreement, dated as of May 16, 1997, by and between Therma-
         Wave and Dr. Allan Rosencwaig.

 *10.2   Employment Agreement, dated as of May 16, 1997, by and between Therma-
         Wave and David L. Willenborg.

 *10.3   Employment Agreement, dated as of May 16, 1997, by and between Therma-
         Wave and W. Lee Smith.

 *10.4   Employment Agreement, dated as of May 16, 1997, by and between Therma-
         Wave and Jon L. Opsal.

 *10.5   Employment Agreement, dated as of May 16, 1997, by and between Therma-
         Wave and Anthony W. Lin.

 *10.6   Executive Stock Agreement, dated as of May 16, 1997, by and between
         Therma-Wave and Dr. Allan Rosencwaig.

 *10.7   Executive Stock Agreement, dated as of May 16, 1997, by and between
         Therma-Wave and David L. Willenborg.

 *10.8   Executive Stock Agreement, dated as of May 16, 1997, by and between
         Therma-Wave and W. Lee Smith.

 *10.9   Executive Stock Agreement, dated as of May 16, 1997, by and between
         Therma-Wave and Jon L. Opsal.

 *10.10  Executive Stock Agreement, dated as of May 16, 1997, by and between
         Therma-Wave and Anthony W. Lin.

 *10.11  Stockholders Agreement, dated as of May 16, 1997, by and among Therma-
         Wave and certain stockholders named therein.
</TABLE>

                                      II-3
<PAGE>

<TABLE>

<CAPTION>
 Exhibit
   No.   Description
 ------- -----------
 <C>     <S>
  *10.12 Development License Agreement, dated June 12, 1992, by and among
         Therma-Wave and Therma-Wave K.K., Toray Industries, Inc. and Shimadzu
         Corporation.

  *10.13 New Development Agreement, dated December 22, 1995, by and between
         Therma-Wave and Toray Industries, Inc.

  *10.14 Lease Agreement, dated as of May 26, 1995, by and between Therma-Wave
         and Sobrato Interests.

  *10.15 Advisory Agreement, dated as of May 16, 1996, between Therma-Wave and
         Bain Capital, Inc.

  *10.16 Voting Agreement, dated as of May 16, 1997, between Therma-Wave and
         certain stockholders named therein.

  *10.17 Credit Agreement, dated as of May 16, 1997, between Therma-Wave and
         Bankers Trust Company, as agent, and certain financial institutions
         named therein.

  *10.18 Pledge Agreement, dated as of May 16, 1997, between Therma-Wave and
         Bankers Trust Company, as agent.

  *10.19 Security Agreement, dated as of May 16, 1997, between Therma-Wave and
         Bankers Trust Company, as agent.

  *10.20 Therma-Wave, Inc. 1997 Stock Purchase and Option Plan.

  *10.21 Registration Agreement, dated as of May 16, 1997, between Therma-Wave
         and the stockholders named therein.

  *10.22 Stock Repurchase Agreement, dated as of January 26, 1996, between
         Toray Industries, Inc. and the key employees of Therma-Wave named
         therein.

  *10.23 Key Employee Stock Agreement, dated as of October 30, 1991 and amended
         as of December 16, 1994, by and among Toray Industries, Inc., TS
         Subsidiary Corp., Therma-Wave, Inc. and the key employees named
         therein.

 **10.24 Therma-Wave, Inc. 1999 Equity Incentive Plan.

 **10.25 First Amendment to Credit Agreement, dated as of June 30, 1998,
         between Therma-Wave and Bankers Trust Company, as agent, incorporated
         by reference to Exhibit 10.1 of Therma-Wave's Quarterly Report on Form
         10-Q for the quarter ended July 5, 1998.

 **10.26 Employment Agreement, dated as of August 3, 1998, by and between
         Therma-Wave and Martin M. Schwartz.

 **10.27 Employment Agreement, dated as of August 10, 1998, by and between
         Therma-Wave and L. Ray Christie.

 **10.28 1999 Employee Stock Purchase Plan.

  *21.1  Subsidiaries of Therma-Wave.

   23.1  Consent of Ernst & Young, LLP, Independent Auditors.

   23.2  Consent of Independent Accountants.

   23.3  Consent of Kirkland & Ellis (included in Exhibit 5.1).

   24.1  Powers of Attorney (included in Part II to the Registration Statement
         previously filed).

   27.1  Financial Data Schedule.
</TABLE>
- --------
 * Incorporated herein by reference to the same numbered exhibit to Therma-
   Wave's Registration Statement on Form S-4 (Registration No. 333-29871).
** To be filed by Amendment.
 + Therma-Wave agrees to furnish supplementally to the Commission a copy of any
   omitted schedule or exhibit to such agreement upon request by the
   Commission.

                                      II-4
<PAGE>

    (b) Financial Statement Schedule.

<TABLE>
<CAPTION>
                                                                          Index
                                                                          -----
     <S>                                                                  <C>
     Report of Independent Accountants on Financial Statement Schedule..   S-1
     Schedule II--Valuation and Qualifying Accounts.....................   S-2
</TABLE>

   All other schedules for which provision is made in the applicable accounting
regulations of the Commission are not required under the related instructions,
are inapplicable or not material, or the information called for thereby is
otherwise included in the financial statements and therefore has been omitted.

Item 17. Undertakings.

   The undersigned registrant hereby undertakes to provide to the underwriters
at closing specified in the underwriting agreement certificates in such
denominations and registered in such manner as requested by the underwriters to
permit prompt delivery to each purchaser.

   The undersigned registrants hereby undertake:

   (1) For purposes of determining any liability under the Securities Act of
1933 (the "Securities Act"), the information omitted from the form of
prospectus filed as part of this registration statement in reliance upon Rule
430A and contained in a form of prospectus filed by the registrants pursuant to
Rule 424(b)(1) or (4) or 497(h) under the Securities Act shall be deemed to be
part of this registration statement as of the time it was declared effective.

   (2) For the purpose of determining any liability under the Securities Act,
each post-effective amendment that contains a form of prospectus shall be
deemed to be a new registration statement relating to the securities offered
therein, and the offering of such securities at that time shall be deemed to be
the initial bona fide offering thereof.

   Insofar as indemnification for liabilities arising under the Securities Act
may be permitted to directors, officers and controlling persons of the
registrants pursuant to the provisions described under Item 20 or otherwise,
the registrants have been advised that in the opinion of the Securities and
Exchange Commission such indemnification is against public policy as expressed
in the Securities Act and is, therefore, unenforceable. In the event that a
claim for indemnification against such liabilities (other than the payment by
the registrants of expenses incurred or paid by a director, officer or
controlling person of the registrants in the successful defense of any action,
suit or proceeding) is asserted by such director, officer or controlling person
in connection with the securities being registered, the registrants will,
unless in the opinion of their counsel the matter has been settled by
controlling precedent, submit to a court of appropriate jurisdiction the
question whether such indemnification by it is against public policy as
expressed in the Securities Act and will be governed by the final adjudication
of such issue.

                                      II-5
<PAGE>

                                  SIGNATURES

   Pursuant to the requirements of the Securities Act of 1933, Therma-Wave,
Inc. has duly caused this Pre-Effective Amendment No. 2 to Registration
Statement on Form S-1 to be signed on its behalf by the undersigned, thereunto
duly authorized, in the City of Fremont, State of California, on June 14,
1999.

                                          Therma-Wave, Inc.

                                                    /s/ Allan Rosencwaig
                                          By: _________________________________
                                                      Allan Rosencwaig
                                                  Chief Executive Officer

                                    * * * *

   Pursuant to the requirements of the Securities Act of 1933, this Pre-
Effective Amendment No. 2 to Registration Statement on Form S-1 has been
signed by the following persons in the capacities and on the dates indicated:

<TABLE>
<CAPTION>
              Signature                          Title                   Date
              ---------                          -----                   ----

<S>                                    <C>                        <C>
      /s/ Allan Rosencwaig             Chairman of the Board and     June 14, 1999
______________________________________  Chief Executive Officer
           Allan Rosencwaig             (Principal Executive
                                        Officer)

                  *                    President, Chief Operating    June 14, 1999
______________________________________  Officer and Director
          Martin M. Schwartz

                  *                    Vice President and Chief      June 14, 1999
______________________________________  Financial Officer
           L. Ray Christie              (Principal Financial and
                                        Accounting Officer)

                  *                    Director                      June 14, 1999
______________________________________
        G. Leonard Baker, Jr.

                  *                    Director                      June 14, 1999
______________________________________
            David Dominik

                  *                    Director                      June 14, 1999
______________________________________
            Adam W. Kirsch
</TABLE>

* The undersigned, by signing his name hereto, does hereby sign and execute
this Pre-Effective Amendment No. 2 to Registration Statement on Form S-1 on
behalf of the above named officers and directors of Therma-Wave pursuant to
the Power of Attorney executed by such officer and/or director and previously
filed with the SEC.

By    /s/ Allan Rosencwaig
- -----------------------------------                               June 14,
       Allan Rosencwaig                                        1999
        Attorney-in-Fact

                                     II-6
<PAGE>

                      REPORT OF INDEPENDENT ACCOUNTANTS ON
                          FINANCIAL STATEMENT SCHEDULE

To the Board of Directors
of Therma-Wave, Inc.

Our audit of the consolidated financial statements as of March 31, 1999 and for
the year then ended referred to in our report dated April 27, 1999 appearing on
page F-2 of the consolidated financial statements in this Registration
Statement on Form S-1 also included an audit of the Financial Statement
Schedule for the year ended March 31, 1999 listed in Item 16(b) in this
Registration Statement on Form S-1. In our opinion, this Financial Statement
Schedule presents fairly, in all material respects, the information set forth
therein when read in conjunction with the related consolidated financial
statements.

PricewaterhouseCoopers LLP

San Jose, California
April 27, 1999

                                      S-1
<PAGE>

                 SCHEDULE II--VALUATION AND QUALIFYING ACCOUNTS
                               THERMA-WAVE, INC.
                                 (in thousands)

<TABLE>
<CAPTION>
                                          Additions
                                    ---------------------
                                               Charged to
                         Balance at Charged to   Other
                         Beginning  Costs and  Accounts-- Deductions--  Balance at
Description              of Period   Expenses   Describe    Describe   End of Period
- -----------              ---------- ---------- ---------- ------------ -------------
<S>                      <C>        <C>        <C>        <C>          <C>
Year ended March 31,
 1999:
 Reserves and allowances
  deducted from asset
  accounts; Allowance
  for Doubtful
  Accounts..............   $3,016     $ (631)    $ --        $ 474        $1,911

Year ended March 31,
 1998:
 Reserves and allowances
  deducted from asset
  accounts; Allowance
  for Doubtful
  Accounts..............   $1,622     $1,394     $ --        $ --         $3,016

Year ended March 31,
 1997:
 Reserves and allowances
  deducted from asset
  accounts; Allowance
  for Doubtful
  Accounts..............   $  284     $1,338     $ --        $ --         $1,622
</TABLE>

                                      S-2

<PAGE>

                                                                     EXHIBIT 5.1
                                                                     -----------

                                KIRKLAND & ELLIS
                PARTNERSHIPS INCLUDING PROFESSIONAL CORPORATIONS

                            200 East Randolph Drive
                            Chicago, Illinois 60601

To Call Writer Direct:           312 861-2000                       Facsimile:
    312 861-2000                                                   312 861-2200



                                 June 14, 1999



Therma-Wave, Inc.
1250 Reliance Way
Fremont, California 94539


                    Re:  Therma-Wave, Inc.
                         Registration Statement on Form S-1
                         Registration No. 333-76019
                         ----------------------------------


Ladies and Gentlemen:

          We are acting as special counsel to Therma-Wave, Inc., a Delaware
corporation (the "Company"), in connection with the proposed registration by the
Company of _________ shares of its Common Stock, par value $.01 per share (the
"Common Stock"), plus up to an additional _____ shares (all such shares,
together with any additional shares registered pursuant to Rule 462(b) under the
Securities Act of 1933, as amended (the "Act"), the "Shares") of its Common
Stock to cover over-allotments, if any, pursuant to a Registration Statement on
Form S-1 (Registration No. 333-76019), filed with the Securities and Exchange
Commission (the "Commission") under the Act (such Registration Statement, as
amended or supplemented, is hereinafter referred to as the "Registration
Statement").  The Shares are to be sold pursuant to an underwriting agreement
(the "Underwriting Agreement") between the Company and Banc of America
Securities LLC and Lehman Brothers Inc., as representatives of the several
Underwriters.

          In that connection, we have examined such corporate proceedings,
documents, records and matters of law as we have deemed necessary to enable us
to render this opinion.

          For purposes of this opinion, we have assumed the authenticity of all
documents submitted to us as originals, the conformity to the originals of all
documents submitted to us as copies and the authenticity of the originals of all
documents submitted to us as copies.  We have also
<PAGE>

                               KIRKLAND & ELLIS

Therma-Wave, Inc.
June 14, 1999
Page 2


assumed the legal capacity of all natural persons, the genuineness of the
signatures of persons signing all documents in connection with which this
opinion is rendered, the authority of such persons signing on behalf of the
parties thereto other than the Company and the due authorization, execution and
delivery of all documents by the parties thereto other than the Company. As to
any facts material to the opinions expressed herein, we have relied upon the
statements and representations of officers and other representations of the
Company and others.

          Our opinion expressed below is subject to the qualifications that we
express no opinion as to the applicability of, compliance with, or effect of any
laws except the internal laws of the State of New York, the General Corporation
Law of the State of Delaware (the "DGCL") and the federal law of the United
States of America.

          Based upon and subject to the foregoing qualifications, assumptions
and limitations and the further limitations set forth below, we hereby advise
you that, in our opinion, upon the effectiveness of the Restated Certificate of
Incorporation of the Company (the "Restated Certificate"), the Shares will be
duly authorized for issuance, and, when (i) the Registration Statement becomes
effective under the Act, (ii) the Board of Directors of the Company has taken
all necessary action to approve the issuance and sale of the Shares, (iii) the
Shares have been duly executed and delivered on behalf of the Company and
countersigned by the Company's transfer agent/registrar and (iv) the Shares are
issued in accordance with the terms of the Underwriting Agreement upon receipt
of the consideration to be paid therefor, the Shares will be validly issued,
fully paid and nonassessable.

          We hereby consent to the filing of this opinion with the Commission as
Exhibit 5.1 to the Registration Statement.  We also consent to the reference to
our firm under the heading "Legal Matters" in the Registration Statement.  In
giving this consent, we do not thereby admit that we are in the category of
persons whose consent is required under Section 7 of the Act or the rules and
regulations of the Commission.  This opinion and consent may be incorporated by
reference in a subsequent registration statement on Form S-1 filed pursuant to
Rule 462(b) under the Act with respect to the registration of additional
securities for sale in the offering contemplated by the Registration Statement.

          We do not find it necessary for the purposes of this opinion, and
accordingly we do not purport to cover herein, the application of the securities
or "Blue Sky" laws of the various states to the issuance and sale of the Shares.
<PAGE>

                               KIRKLAND & ELLIS

Therma-Wave, Inc.
June 14, 1999
Page 3


          This opinion is limited to the specific issues addressed herein, and
no opinion may be inferred or implied beyond that expressly stated herein.  We
assume no obligation to revise or supplement this opinion should the present
laws of the State of New York, the DGCL or the federal law of the United States
be changed by legislative action, judicial decision or otherwise.

          This opinion is furnished to you pursuant to the applicable rules and
regulations promulgated under the Act in connection with the filing of the
Registration Statement.


                                    Very truly yours,

                                    /s/ Kirkland & Ellis

                                    KIRKLAND & ELLIS

<PAGE>

                                                                    EXHIBIT 23.1

            CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS

We consent to the reference to our firm under the caption "Experts" and to the
use of our report dated May 1, 1998, in the Pre-effective Amendment No. 2 to
the Registration Statement (Form S-1 No. 333-76019) and related Prospectus of
Therma-Wave, Inc. for the registration of common stock.

Our audits also included the financial statement schedule of Therma-Wave, Inc.
listed in Item 16(b). This schedule is the responsibility of the Company's
management. Our responsibility is to express an opinion based on our audits. In
our opinion, the financial statement schedule referred to above, when
considered in relation to the basic financial statements taken as a whole,
presents fairly in all material respects the information set forth therein.

                                        /s/ Ernst & Young LLP

San Jose, California

June 14, 1999

<PAGE>

                                                                    EXHIBIT 23.2

                       CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the use in this Registration Statement on Form S-1 of our
reports dated April 27, 1999, relating to the financial statements and
financial statement schedules of Therma-Wave, Inc., which appears in such
Registration Statement. We also consent to the reference to us under the
heading "Experts" in such Prospectus.

PricewaterhouseCoopers LLP

San Jose, California

June 14, 1999

<TABLE> <S> <C>

<PAGE>

<ARTICLE> 5
<MULTIPLIER> 1,000

<S>                             <C>
<PERIOD-TYPE>                   12-MOS
<FISCAL-YEAR-END>                          MAR-31-1999
<PERIOD-START>                             APR-01-1998
<PERIOD-END>                               MAR-31-1999
<CASH>                                          20,245
<SECURITIES>                                         0
<RECEIVABLES>                                   14,091
<ALLOWANCES>                                     1,911
<INVENTORY>                                     15,369
<CURRENT-ASSETS>                                57,553
<PP&E>                                          14,832
<DEPRECIATION>                                  10,319
<TOTAL-ASSETS>                                  72,352
<CURRENT-LIABILITIES>                           26,159
<BONDS>                                        115,000
                           15,347
                                          0
<COMMON>                                        19,866
<OTHER-SE>                                       1,421
<TOTAL-LIABILITY-AND-EQUITY>                    72,352
<SALES>                                         66,207
<TOTAL-REVENUES>                                66,207
<CGS>                                           36,827
<TOTAL-COSTS>                                   70,884
<OTHER-EXPENSES>                                   (6)
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                              14,060
<INCOME-PRETAX>                               (18,080)
<INCOME-TAX>                                   (2,350)
<INCOME-CONTINUING>                           (15,730)
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                  (15,730)
<EPS-BASIC>                                   (1.86)
<EPS-DILUTED>                                   (1.86)


</TABLE>


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