<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THERMAWAVE,
INC'S FINANCIAL STATEMENTS FOR THE TWELVE MONTH PERIOD ENDED APRIL 2, 2000 AND
IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 12-MOS
<FISCAL-YEAR-END> APR-02-2000
<PERIOD-START> APR-05-1999
<PERIOD-END> APR-02-2000
<CASH> 75,200
<SECURITIES> 0
<RECEIVABLES> 25,872
<ALLOWANCES> 1,472
<INVENTORY> 23,689
<CURRENT-ASSETS> 125,009
<PP&E> 17,806
<DEPRECIATION> 12,807
<TOTAL-ASSETS> 133,694
<CURRENT-LIABILITIES> 30,900
<BONDS> 16
0
0
<COMMON> 236
<OTHER-SE> 99,249
<TOTAL-LIABILITY-AND-EQUITY> 133,694
<SALES> 115,679
<TOTAL-REVENUES> 115,679
<CGS> 60,320
<TOTAL-COSTS> 42,577
<OTHER-EXPENSES> 34,057
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 13,178
<INCOME-PRETAX> (2,151)
<INCOME-TAX> 0
<INCOME-CONTINUING> (2,151)
<DISCONTINUED> 0
<EXTRAORDINARY> (18,404)
<CHANGES> 0
<NET-INCOME> (20,555)
<EPS-BASIC> (0.25)
<EPS-DILUTED> (1.72)
</TABLE>