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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM
THERMA-WAVE, INC.'S FORM 10-Q AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO
SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 3-MOS
<FISCAL-YEAR-END> APR-01-2001
<PERIOD-START> APR-03-2000
<PERIOD-END> JUL-02-2000
<CASH> 74,363
<SECURITIES> 0
<RECEIVABLES> 33,124
<ALLOWANCES> 602
<INVENTORY> 29,147
<CURRENT-ASSETS> 137,829
<PP&E> 5,342
<DEPRECIATION> 661
<TOTAL-ASSETS> 147,009
<CURRENT-LIABILITIES> 36,156
<BONDS> 16
0
0
<COMMON> 237
<OTHER-SE> 107,764
<TOTAL-LIABILITY-AND-EQUITY> 147,009
<SALES> 41,586
<TOTAL-REVENUES> 41,586
<CGS> 20,552
<TOTAL-COSTS> 20,552
<OTHER-EXPENSES> 13,400
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 60
<INCOME-PRETAX> 8,625
<INCOME-TAX> 949
<INCOME-CONTINUING> 7,676
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> 7,676
<EPS-BASIC> 0.33
<EPS-DILUTED> 0.31
</TABLE>
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