<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THERMA-WAVE,
INC.'S FORM 10-Q AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH FINANCIAL
STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 6-MOS
<FISCAL-YEAR-END> APR-01-2001
<PERIOD-START> APR-03-2000
<PERIOD-END> OCT-01-2000
<CASH> 55,027
<SECURITIES> 9,482
<RECEIVABLES> 44,799
<ALLOWANCES> 573
<INVENTORY> 39,781
<CURRENT-ASSETS> 149,994
<PP&E> 6,657
<DEPRECIATION> 1,366
<TOTAL-ASSETS> 160,564
<CURRENT-LIABILITIES> 38,112
<BONDS> 16
0
0
<COMMON> 238
<OTHER-SE> 119,585
<TOTAL-LIABILITY-AND-EQUITY> 160,564
<SALES> 91,849
<TOTAL-REVENUES> 91,849
<CGS> 45,437
<TOTAL-COSTS> 45,437
<OTHER-EXPENSES> 28,973
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 112
<INCOME-PRETAX> 19,554
<INCOME-TAX> 1,173
<INCOME-CONTINUING> 18,381
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> 18,381
<EPS-BASIC> 0.79
<EPS-DILUTED> 0.74
</TABLE>