NOVELLUS SYSTEMS INC
DEF 14A, 1996-04-22
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>
                            SCHEDULE 14A INFORMATION
 
                  Proxy Statement Pursuant to Section 14(a) of
            the Securities Exchange Act of 1934 (Amendment No.    )
 
    Filed by the Registrant /X/
    Filed by a Party other than the Registrant / /
 
    Check the appropriate box:
    / /  Preliminary Proxy Statement
    / /  Confidential, for Use of the Commission Only (as permitted by Rule
         14a-6(e)(2))
    /X/  Definitive Proxy Statement
    / /  Definitive Additional Materials
    / /  Soliciting  Material  Pursuant  to  Section  240.14a-11(c)  or  Section
         240.14a-12
 
                                      NOVELLUS SYSTEMS, INC.
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)
 
                                      NOVELLUS SYSTEMS, INC.
- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)
 
Payment of Filing Fee (Check the appropriate box):
 
/X/  $125 per  Exchange Act  Rules 0-11(c)(1)(ii),  14a-6(i)(1), 14a-6(i)(2)  or
     Item 22(a)(2) of Schedule 14A.
/ /  $500  per  each party  to  the controversy  pursuant  to Exchange  Act Rule
     14a-6(i)(3).
/ /  Fee  computed  on   table  below   per  Exchange   Act  Rules   14a-6(i)(4)
     and 0-11.
     1) Title of each class of securities to which transaction applies:
        ------------------------------------------------------------------------
     2) Aggregate number of securities to which transaction applies:
        ------------------------------------------------------------------------
     3) Per unit price or other underlying value of transaction computed
        pursuant to Exchange Act Rule 0-11 (Set forth the amount on which the
        filing fee is calculated and state how it was determined):
        ------------------------------------------------------------------------
     4) Proposed maximum aggregate value of transaction:
        ------------------------------------------------------------------------
     5) Total fee paid:
        ------------------------------------------------------------------------
/ /  Fee paid previously with preliminary materials.
/ /  Check box if any part of the fee is offset as provided by Exchange Act Rule
     0-11(a)(2)  and identify the  filing for which the  offsetting fee was paid
     previously. Identify the previous filing by registration statement  number,
     or the Form or Schedule and the date of its filing.
     1) Amount Previously Paid:
        ------------------------------------------------------------------------
     2) Form, Schedule or Registration Statement No.:
        ------------------------------------------------------------------------
     3) Filing Party:
        ------------------------------------------------------------------------
     4) Date Filed:
        ------------------------------------------------------------------------
<PAGE>
                                     [LOGO]
 
                             NOVELLUS SYSTEMS, INC.
 
                                                                  April 22, 1996
 
To the Shareholders of Novellus Systems, Inc.
 
    You  are cordially invited  to attend the Annual  Meeting of Shareholders of
Novellus Systems, Inc. (the "Company") on May 17, 1996 at 9:00 a.m.,  California
time.  The  Annual Meeting  will be  held at  the Company's  principal executive
offices, 3970 North First Street, San Jose, California 95134.
 
    A description of the business to be  conducted at the Annual Meeting is  set
forth  in  the  attached Notice  of  Annual  Meeting and  Proxy  Statement. Also
enclosed is a copy of our Annual Report to Shareholders.
 
    Whether or not  you plan to  attend the Annual  Meeting, PLEASE MARK,  SIGN,
DATE  AND RETURN THE ENCLOSED PROXY  CARD PROMPTLY IN THE ACCOMPANYING ENVELOPE.
If you attend the Annual Meeting and wish to change your proxy vote, you may  do
so simply by voting in person at the Annual Meeting.
 
                                          Richard S. Hill
                                          CHIEF EXECUTIVE OFFICER
<PAGE>
                             NOVELLUS SYSTEMS, INC.
 
                               ------------------
 
                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                            ------------------------
 
                           TO BE HELD ON MAY 17, 1996
 
    NOTICE  IS HEREBY GIVEN that the  Annual Meeting of Shareholders of Novellus
Systems, Inc.  (the "Company")  will  be held  on May  17,  1996 at  9:00  a.m.,
California  time, at the Company's principal executive offices, 3970 North First
Street, San Jose, California 95134, for the following purposes:
 
    1.  To elect six directors of the Company to serve for the ensuing year  and
       until their successors are elected and qualified.
 
    2.   To ratify and  approve an amendment to  the Company's 1992 Stock Option
       Plan (the "Option Plan")  to increase the number  of shares reserved  for
       issuance thereunder from 2,000,000 shares to 2,680,000 shares.
 
    3.   To ratify and approve an amendment to the Company's 1992 Employee Stock
       Purchase Plan  to increase  the number  of shares  reserved for  issuance
       thereunder from 250,000 shares to 290,000 shares.
 
    4.   To  ratify and  approve the  appointment of  Ernst &  Young LLP  as the
       independent auditors for the Company for the fiscal year ending  December
       31, 1996.
 
    5.  To transact such other business as may properly come before the meeting.
 
    The  foregoing items of business, including  the nominees for directors, are
more fully described in the  Proxy Statement which is  attached and made a  part
hereof.
 
    Shareholders  of  record at  the  close of  business  on April  3,  1996 are
entitled to vote at the Annual Meeting.
 
                                          FOR THE BOARD OF DIRECTORS
 
                                          William J. Wall
                                          SECRETARY
 
San Jose, California
April 22, 1996
 
                   YOUR VOTE IS IMPORTANT
    TO ENSURE YOUR  REPRESENTATION AT THE  MEETING, YOU  ARE
URGED  TO MARK, SIGN, DATE AND  RETURN THE ENCLOSED PROXY AS
PROMPTLY AS POSSIBLE  IN THE ACCOMPANYING  ENVELOPE. IF  YOU
ATTEND  THE  MEETING, YOU  MAY VOTE  IN  PERSON EVEN  IF YOU
RETURNED A PROXY.
<PAGE>
                             NOVELLUS SYSTEMS, INC.
 
                               ------------------
 
                                PROXY STATEMENT
                            ------------------------
 
GENERAL
 
    The  enclosed proxy  is solicited  on behalf  of the  Board of  Directors of
Novellus Systems,  Inc.  (the  "Company")  for use  at  the  Annual  Meeting  of
Shareholders  to be  held on  May 17,  1996 at  9:00 a.m.,  California time (the
"Annual Meeting"), or  at any  adjournment or postponement  thereof. The  Annual
Meeting  will be held  at the Company's principal  executive offices, 3970 North
First Street, San Jose, California 95134.
 
    This Proxy  Statement, the  form of  proxy, and  the Company's  1995  Annual
Report are first being mailed to shareholders on or about April 22, 1996.
 
REVOCABILITY OF PROXIES
 
    Any  proxy given pursuant to this solicitation  may be revoked by the person
giving it  at any  time before  its use  by delivering  to the  Company (to  the
attention  of William J. Wall) a written notice of revocation or a duly executed
proxy bearing a later date or by attending the meeting and voting in person.
 
RECORD DATE, SHARE OWNERSHIP AND QUORUM
 
    Shareholders of  record  at the  close  of business  on  April 3,  1996  are
entitled to vote at the Annual Meeting. At the record date, 16,003,049 shares of
the  Company's common  stock ("Common Stock")  were issued  and outstanding. The
presence of a majority of these shares of Common Stock will constitute a  quorum
for the transaction of business at the Annual Meeting.
 
VOTING AND SOLICITATION
 
    Each share outstanding on the record date is entitled to one vote. Under the
cumulative  voting provisions in the Company's Bylaws, each shareholder may cast
for a single nominee for director, or  distribute among up to seven nominees,  a
number  of votes equal to seven multiplied by  the number of shares held by such
shareholder. However, cumulative voting  will not be  available unless at  least
one shareholder has given notice of his intention to cumulate votes prior to the
voting,  and will apply only to those candidates whose names have been placed in
nomination prior to the voting.
 
    The costs of soliciting proxies will be borne by the Company. Proxies may be
solicited by certain of the Company's directors, officers and regular employees,
without additional compensation, in person or by telephone or telegram.
 
    An automated  system  administered  by the  Company's  transfer  agent  will
tabulate votes cast by proxy at the Annual Meeting and an officer of the Company
will  tabulate votes cast  in person. Abstentions and  broker non-votes are each
included in the determination  of the number of  shares present and voting,  and
each  is  tabulated  separately.  In determining  whether  a  proposal  has been
approved or a nominee has been elected as a director, abstentions are counted as
votes against a  proposal or  nominee and broker  non-votes are  not counted  as
votes for or against a proposal or nominee.
 
DEADLINE FOR RECEIPT OF SHAREHOLDER PROPOSALS
 
    Proposals  of shareholders of the Company  that are intended to be presented
at the Company's  Annual Meeting  of Shareholders  to be  held in  1997 must  be
received  by the Company no  later than December 19, 1996  to be included in the
proxy statement and form of proxy relating to that meeting.
 
                                       1
<PAGE>
                                 PROPOSAL NO. 1
                             ELECTION OF DIRECTORS
 
    As set  by the  Board of  Directors (the  "Board" or  "Board of  Directors")
pursuant to the Bylaws of the Company, the authorized number of directors is set
at  seven. Six directors  will be elected  at the Annual  Meeting. Following the
Annual Meeting there will be one vacancy due to the retirement of Mr. Robert  F.
Graham.  The six nominees receiving the highest number of affirmative votes will
be elected as  directors. Unless  otherwise instructed, the  proxy holders  will
vote  the proxies they  receive for the  six nominees of  the Board of Directors
named below. In the event that any nominee of the Board is unable or declines to
serve as a director at the time of the Annual Meeting, the proxies will be voted
for any  nominee  designated by  the  present Board  of  Directors to  fill  the
vacancy.  It is not expected that any nominee  will be unable or will decline to
serve as a  director. In  the event that  additional persons  are nominated  for
election  as directors, the proxy holders intend to vote all proxies received by
them in such a manner  in accordance with cumulative  voting as will assure  the
election  of as many of the nominees listed below as possible, with any required
selection among such nominees to be determined by the proxy holders.
 
    THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR THE NOMINEES LISTED BELOW.
 
<TABLE>
<CAPTION>
                                                                              DIRECTOR
       NAME OF NOMINEE          AGE           PRINCIPAL OCCUPATION              SINCE
- ------------------------------  --- ----------------------------------------  ---------
<S>                             <C> <C>                                       <C>
Richard S. Hill                 44  President and Chief Executive Officer of    1993
                                     the Company
D. James Guzy                   60  President, Arbor Company, a limited         1990
                                     partnership engaged in the electronics
                                     and computer industries
Tom Long                        64  Director of Programs, Planar Advance,       1995
                                     Inc., a flat panel company engaged in
                                     the electronics industry
Glen Possley                    55  President, SubMicron Technology, Inc., a    1991
                                     company engaged in the manufacturing of
                                     semiconductors
Robert H. Smith                 59  Industry Consultant                         1995
Joseph Van Poppelen             68  President, Van Poppelen Company, a          1993
                                     consulting firm focused on marketing
                                     and business strategies for high
                                     technology companies
</TABLE>
 
    The term of office of each person elected as a director will continue  until
the  next Annual Meeting of Shareholders or until his successor has been elected
and qualified. The Company's Bylaws provide that no person may be elected or run
for reelection to the  Board of Directors  after having attained  the age of  70
years.  There  is no  family  relationship between  any  director and  any other
director or executive officer of the Company.
 
    MR. HILL has been  the President and Chief  Executive Officer and member  of
the Board of Directors of the Company since December 1993. Since August 1994 Mr.
Hill  has served on the  Board of Directors of  Maxtek Corporation. From 1981 to
1993, Mr. Hill was employed by Tektronix, Inc., an electronics company, where he
held such  positions as  President of  the Tektronix  Development Company,  Vice
President of the Test & Measurement Group, and President of Tektronix Components
Corporation.  Prior to joining  Tektronix, Mr. Hill  held engineering management
positions at General Electric, Motorola and Hughes Aircraft Company.
 
    MR. GUZY  joined  the  Board of  Directors  in  January 1990.  He  has  been
President of the Arbor Company, a limited partnership engaged in the electronics
and computer industries, since 1969.
 
                                       2
<PAGE>
Mr.  Guzy is  also a  director of Intel  Corporation, Cirrus  Logic, Inc., Micro
Component Technology, Inc., Frame Technology Corporation, New York Venture Fund,
Venture Income  Plus Fund,  Venture  Muni Fund,  Retirement Planning  Funds  and
Alliance Capital Management Technology Fund.
 
    MR.  LONG joined the Board  of Directors in May  1995. Mr. Long currently is
the Director  of  Programs for  Planar  Advance, Inc.  In  this position  he  is
responsible  for  the management  of product  development.  From August  1991 to
October 1994 Mr. Long retired from  business to pursue personal goals. Prior  to
August 1991 Mr. Long served as the Vice President and Chief Technical Officer of
Tektronix, Inc. for seven years.
 
    DR.  POSSLEY  joined  the Board  of  Directors  in July  1991.  He  has been
President of SubMicron  Technology, Inc., a  semiconductor company, since  March
1994.   From  April  1992  to  March  1994  he  was  Senior  Vice  President  of
Manufacturing at Ramtron  International, a semiconductor  company. From  January
1991  to April 1992, he was Vice  President, Operations at Sundisk Technology, a
manufacturer of  solid state  memory systems.  From 1986  to January  1991,  Dr.
Possley  was  Vice President,  Manufacturing Operations  for Signetics,  Inc., a
semiconductor company. Prior to joining Signetics, Inc., he was Vice  President,
Wafer  Fabrication and Research  and Development at  United Technologies Mostek,
and held engineering  positions with Texas  Instruments, Inc., Fairchild  Camera
and  Instrument Corporation and  the semiconductor division  of General Electric
Company.
 
    MR. SMITH joined the Board of Directors in May 1995. Mr. Smith has been  has
been an industry consultant since 1990. From June of 1994 through September 1994
Mr.  Smith  was  the Chairman  of  the  Board of  Directors  of  Micro Component
Technology, Inc., a semiconductor test equipment manufacturer. From 1988 through
1990, Mr. Smith was the President of Maxwell Graphics, Inc., a printing company.
From 1982 through 1988,  Mr. Smith held Chief  Financial Officer positions  with
Maxwell Communications of North America Corporation and R.R. Donnelley and Sons,
printing  companies. Mr. Smith also  serves on the Board  of Directors of Cirrus
Logic, Inc.
 
    MR. VAN POPPELEN  joined the Board  of Directors  in May 1993.  He has  been
President  of Van Poppelen  Company, a consulting firm  focused on marketing and
business strategies  for high  technology companies,  since 1989.  From 1975  to
1989, Mr. Van Poppelen was employed by National Semiconductor Corporation, where
he  last served as Senior Vice President, Worldwide Marketing and Sales. Mr. Van
Poppelen also serves on the Board of Directors of GaSonics International, Inc.
 
BOARD MEETINGS AND COMMITTEES
 
    The Board of Directors of the Company held six meetings during 1995.  During
the  last year, no incumbent director attended fewer than 75% of the meetings of
the Board of  Directors and its  committees on  which he served  that were  held
during  the period  in which he  was a director.  The Board of  Directors has an
Audit Committee, Compensation Committee and Stock Option Committee. It does  not
have  a  nominating  committee or  a  committee  performing the  functions  of a
nominating committee. Although there are  no formal procedures for  shareholders
to  recommend nominations, the Board  will consider shareholder recommendations.
Such recommendations  should be  addressed  to William  J. Wall,  the  Company's
Secretary, at the Company's principal executive offices.
 
    During  1995,  Messrs. Guzy,  Van  Poppelen and  Smith  served on  the Audit
Committee. The Audit  Committee held  four meetings  during the  last year.  The
Audit   Committee  recommends  the  engagement   of  the  Company's  independent
accountants and is primarily responsible for approving the services performed by
the Company's  independent  accountants and  for  reviewing and  evaluating  the
Company's accounting principles and its system of internal accounting controls.
 
    During  1995, Messrs. Graham (who is retiring from the Board of Directors at
this Annual Meeting),  Guzy, Hill and  Van Poppelen served  on the  Compensation
Committee. The Compensation Committee held one meeting during the last year. The
principal  functions of the Compensation Committee are to review and approve the
Company's executive compensation policy.
 
                                       3
<PAGE>
    During 1995, Messrs. Guzy, Long, Smith and Van Poppelen served on the  Stock
Option  Committee. The Stock Option Committee  held two meetings during the last
year. The Stock Option Committee administers the issuance of stock and the grant
of options to  purchase stock  of the Company  pursuant to  the Company's  stock
plans and, in accordance with the term of the respective stock plans, determines
the terms and conditions of such issuances and grants.
 
    Directors  are reimbursed for out-of-pocket  travel expenses associated with
their attendance at  meetings of the  Board. In addition,  during 1995,  Messrs.
Guzy,  Smith, Van Poppelen,  Long and Dr.  Possley received a  fee of $3,000 for
each quarter, $1,000 for each Board meeting attended and $300 for each Committee
meeting attended which was not held on the same day as a Board meeting.
 
                                 PROPOSAL NO. 2
                RATIFICATION AND APPROVAL OF AN AMENDMENT TO THE
                        COMPANY'S 1992 STOCK OPTION PLAN
 
    The Company's shareholders are being asked to act upon a proposal to approve
the action of the  Board of Directors amending  the Company's 1992 Stock  Option
Plan  (the "Option Plan"). Ratification of the proposal requires the affirmative
vote of a  majority of  the shares  of Common Stock  voting on  the proposal  in
person or by proxy.
 
    The  Board of Directors  amended the Option  Plan in March  1996, subject to
shareholder approval, to  increase the  number of shares  reserved for  issuance
under the Option Plan from 2,000,000 shares to 2,680,000 shares.
 
    The  Board of Directors  believes that the attraction  and retention of high
quality personnel are essential  to the Company's  continued growth and  success
and  that an incentive plan such as the Option Plan is necessary for the Company
to  remain  competitive  in  its  compensation  practices.  In  the  absence  of
shareholder  approval of  this increase in  the available  shares, no additional
shares will be available for future option grants under the Option Plan,  except
to  the extent that shares become  available upon termination or cancellation of
outstanding options.
 
    THE BOARD OF DIRECTORS RECOMMENDS A  VOTE FOR THE RATIFICATION AND  APPROVAL
OF THE AMENDMENT TO THE COMPANY'S 1992 STOCK OPTION PLAN.
 
GENERAL DESCRIPTION OF OPTION PLAN
 
    The  following summary of the Option Plan, including the proposed amendment,
is subject in its entirety to the  specific language of the Option Plan, a  copy
of which is available to any shareholder upon request.
 
    The  Option Plan  was adopted by  the Board  of Directors in  April 1992 and
approved by the shareholders in May 1992.  The purpose of the Option Plan is  to
attract  and retain qualified personnel and  to provide additional incentives to
the Company's employees, officers, directors and consultants. In November  1993,
the  Board of Directors approved, and in  May 1994 the shareholders ratified, an
amendment to the  Option Plan  to increase the  number of  shares available  for
grants  thereunder from 550,000 shares to 1,300,000 shares. In January 1995, the
Board of  Directors approved,  and in  May 1995  the shareholders  ratified,  an
amendment  to the  Option Plan  to increase the  number of  shares available for
granting thereunder  from 1,300,000  shares to  2,000,000 shares.  The Board  of
Directors  and Shareholders  also adopted  an amendment  allowing for Restricted
Shares and Bonuses. As of March 31, 1996, options to purchase 1,986,248 had been
granted under  the Option  Plan  of which  options  to purchase  1,748,639  were
outstanding.
 
    The  Option Plan provides for the  granting to employees (including officers
and employee  directors) of  "incentive  stock options"  within the  meaning  of
Section  422 of the Internal Revenue Code  of 1986, as amended, (the "Code") and
for the granting to employees, non-employee directors ("Outside Directors")  and
consultants  of nonstatutory stock options. As of  March 31, 1996, the number of
executive officers, employees, consultants and directors of the Company and  its
subsidiaries that were
 
                                       4
<PAGE>
eligible  to receive grants under the Option Plan was approximately 927 persons.
The Company cannot grant an incentive stock  option if as a result of the  grant
the optionee would have the right in any calendar year to exercise for the first
time  one or more  incentive stock options  for shares having  an aggregate fair
market value (under all plans of the Company and determined for each share as of
the date the option to purchase the share was granted) in excess of $100,000.
 
    The Option Plan currently is administered  by the Stock Option Committee  of
the  Board of  Directors (the "Stock  Option Committee"), which,  subject to the
terms of the Option Plan, determines the terms of the options granted under  the
Option  Plan, including the exercise price, the  number of shares subject to the
option and exercisability.  No employee may  be granted options  to purchase  in
excess  of  100,000 shares  per fiscal  year,  except new  hires may  be granted
options for up to  200,000 shares. Generally, options  granted under the  Option
Plan  in connection with the commencement  of employment with the Company become
exercisable at the  rate of 25%  of the shares  subject to the  option one  year
after  grant  and thereafter,  25%  of the  shares  subject to  the  option each
subsequent year. Options granted after such  initial grant generally vest as  to
50%  of the shares subject to such option at the end of the third year after the
grant date and the remaining  50% of the shares subject  to such option vest  at
the end of the fourth year after the grant date. No option may be transferred by
the optionee other than by will or the laws of descent or distribution.
 
    The  exercise price of all stock options  granted under the Option Plan must
equal at least the fair market value of  the Common Stock of the Company on  the
date  of grant. The  fair market value  of the Common  Stock on a  given date is
determined by the  Board of  Directors based  upon the  last sale  price of  the
Common  Stock on the Nasdaq National Market  System as of such date. On December
31, 1995, the fair market  value of the Company's  Common Stock was $54.00.  The
exercise  price of any  incentive stock option  granted to an  optionee who owns
stock possessing more than 10% of the voting power of the Company's  outstanding
capital  stock must equal at  least 110% of the fair  market value of the Common
Stock on the date of grant. Although the Option Plan may provide that payment of
the exercise price may be  made in cash, promissory  notes, other shares of  the
Company's   Common  Stock  (subject   to  certain  conditions)   or  such  other
consideration determined by the Board of Directors, options granted to date  may
be exercised only for cash.
 
    In  March of 1996 the  Board approved an amendment  to the Option Plan which
provides that the Stock  Option Committee may not,  without further approval  of
the  shareholders of  the Company,  authorize the  amendment of  any outstanding
option to reduce the option price or authorize the amendment of any  outstanding
stock  appreciation right  ("SAR") to  reduce the  base price.  In addition, the
Company may not, without the approval  of the shareholders, cancel an option  or
SAR  and replace it with an award having  a lower price or base price unless the
vesting period is restarted to the period designated for new options or SARs.
 
    The Option  Plan  provides for  automatic  and non-discretionary  grants  of
options  to  Outside  Directors.  Pursuant  to  the  Option  Plan,  on  the  day
immediately following the  date of each  annual meeting of  shareholders of  the
Company,  each  Outside  Director will  be  automatically granted  an  option to
purchase 6,000 shares (the "Director  Options"). Shares subject to the  Director
Options are immediately exercisable.
 
    The  Option Plan provides  that, in the event  of a proposed  sale of all or
substantially all of the  assets of the  Company, or the  merger of the  Company
with  or into  another corporation, outstanding  options shall be  assumed or an
equivalent option or right shall be substituted by the successor corporation  or
a  parent  or  subsidiary  of  such  successor  corporation,  unless  the  Board
determines, in  the  exercise  of  its  sole discretion  and  in  lieu  of  such
assumption  or substitution, that the optionee  shall have the right to exercise
the option as to all shares of stock subject to such option, including shares as
to which the option would not otherwise be exercisable.
 
    RESTRICTED SHARES.  A grant of Restricted  Shares consists of the sale of  a
specified  number of  shares of Common  Stock which are  contingently awarded in
amounts determined by the Stock Option Committee to those employees,  directors,
and consultants selected by the Stock Option Committee.
 
                                       5
<PAGE>
Outside  Directors are not eligible for a grant of Restricted Shares. Restricted
Shares are subject to certain restrictions on transfer, forfeiture,  repurchase,
and vesting as the Stock Option Committee may determine pursuant to the terms of
a  Restricted  Stock  Purchase Agreement.  An  individual who  has  been awarded
Restricted Shares has  the right  to vote  and receive  dividends on  Restricted
Shares,  but  can  not  sell, assign,  transfer,  pledge  or  otherwise encumber
Restricted Shares  except  in  accordance with  the  Restricted  Stock  Purchase
Agreement.  The purchase price of Restricted Shares  is at least the fair market
value of the Common Stock of the Company on the date of grant of the  Restricted
Shares.  Payment for  Restricted Shares  is made in  any combination  of cash or
Common Stock as determined by the Stock Option Committee.
 
    STOCK BONUSES.  A grant of a  Stock Bonus consists of a specified number  of
shares  of Common  Stock which  are awarded in  amounts determined  by the Stock
Option Committee to those employees, directors, and consultants selected by  the
Stock  Option Committee. Outside Directors are  not eligible for awards of Stock
Bonuses. Shares  awarded  as  Stock  Bonuses  are  subject  to  restrictions  on
transfer,  forfeiture, repurchase, and vesting as the Stock Option Committee may
determine pursuant  to the  terms of  a Restricted  Stock Bonus  Agreement.  The
individual  receiving a Stock  Bonus does not  pay for the  shares received as a
Stock Bonus, although  the fair market  value of the  shares received is  deemed
compensation to the individual upon the lapsing of any restrictions.
 
CERTAIN FEDERAL INCOME TAX CONSEQUENCES
 
    The  following summarizes only the federal  income tax consequences of stock
options granted under  the Option  Plan. State  and local  tax consequences  may
differ.
 
    STOCK  OPTIONS.  The grant  of a nonqualified stock  option under the Option
Plan will not result in any federal  income tax consequences to the optionee  or
to  the Company. Upon exercise  of a nonqualified stock  option, the optionee is
subject to income taxes at the  rate applicable to ordinary compensation  income
on  the difference  between the option  price and  the fair market  value of the
shares on  the date  of exercise.  This  income is  subject to  withholding  for
federal income and employment tax purposes. The Company is entitled to an income
tax  deduction in the amount of the  income recognized by the optionee. Any gain
or loss on the optionee's subsequent disposition of the shares will receive long
or short-term capital gain or loss treatment depending on whether the shares are
held for more or not more than twelve months, respectively, following  exercise.
The  Company does not receive  a tax deduction for  any such gain. Capital gains
currently are  taxed at  the same  rates  as ordinary  income, except  that  the
maximum  marginal  rate at  which  ordinary income  is  taxed to  individuals is
currently 39.6% and the maximum rate at which long-term capital gains are  taxed
is  28%. Special considerations apply to optionees who are reporting persons for
purposes of Section 16(a) of the Exchange Act and such optionees should  consult
their tax advisors with respect to the tax treatment of such options.
 
    The  grant of an incentive  stock option ("ISO") under  the Option Plan will
not result in  any federal income  tax consequences  to the optionee  or to  the
Company. An optionee recognizes no federal taxable income upon exercising an ISO
(subject  to the alternative minimum tax rules discussed below), and the Company
receives no deduction at the time of exercise. In the event of a disposition  of
stock  acquired upon exercise  of an ISO,  the tax consequences  depend upon how
long the optionee has held the shares.  If the optionee does not dispose of  the
shares within two years after the ISO was granted, nor within one year after the
ISO  was  exercised and  shares were  purchased, the  optionee will  recognize a
long-term capital gain (or loss) equal to the difference between the sale  price
of  the  shares and  the  exercise price.  The Company  is  not entitled  to any
deduction under these circumstances.
 
    If the optionee fails to satisfy either of the foregoing holding periods, he
or she must recognize ordinary income  in the year of the disposition  (referred
to  as  a  "disqualifying  disposition"). The  amount  of  such  ordinary income
generally is the  lesser of (i)  the difference between  the amount realized  on
disposition  and the  exercise price,  or (ii)  the difference  between the fair
market value of the stock on the exercise date and the exercise price. Any  gain
in  excess of the amount taxed as ordinary  income will be treated as a long- or
short-term  capital   gain,   depending   on  whether   the   stock   was   held
 
                                       6
<PAGE>
for  more or not more than twelve months, respectively. The Company, in the year
of the disqualifying disposition, is entitled to a deduction equal to the amount
of ordinary income recognized by the optionee.
 
    The "spread" under an  ISO -- i.e., the  difference between the fair  market
value  of the shares at  exercise and the exercise price  -- is classified as an
item of tax preference in the year  of exercise for purposes of the  alternative
minimum tax.
 
    Effective  January 1,  1994, the  Code was  amended to  impose a  cap on the
amount of executive compensation recognized  by a corporation's Chief  Executive
Officer  and its four other most  highly compensated executive officers that the
corporation may  deduct, set  at  $1,000,000 per  such  executive per  year.  To
facilitate  the Company's ability to  continue to deduct in  full all amounts of
income recognized by  such executive officers  of the Company  upon exercise  of
stock options, the Board of Directors adopted, and the shareholders approved, an
amendment  to  the Option  Plan to  impose  a per  employee share  limitation of
100,000 shares per fiscal  year, with a 200,000  share limitation for grants  to
new hires.
 
    The  following  summarizes  only  the  federal  income  tax  consequences to
participants and the Company  of the acquisition  and disposition of  Restricted
Shares and Stock Bonuses under the Plan.
 
    RESTRICTED  SHARES.    A  participant who  receives  Restricted  Shares will
generally  recognize  ordinary   income  at   the  time   the  restrictions   on
transferability  lapse. The amount of ordinary  income so recognized will be the
fair market value of the Common Stock at the time the income is recognized  less
the  amount the participant  paid for the  Restricted Shares, determined without
regard to any  restrictions other than  restrictions which by  their terms  will
never  lapse. This amount is  deductible for federal income  tax purposes by the
Company. Dividends paid  with respect  to Common Stock  that is  nontransferable
will   be  ordinary  compensation  income  to  the  participant  (and  generally
deductible by the Company).
 
    In lieu of the treatment described above, a participant may elect  immediate
recognition  of  income under  Section 83(b)  of  the Code.  In such  event, the
participant will recognize  as income the  fair market value  of the  Restricted
Shares  at  the time  of  grant less  the amount  the  participant paid  for the
Restricted Shares,  determined without  regard to  any restrictions  other  than
restrictions  which by  their terms  will never lapse,  and the  Company will be
entitled to a corresponding deduction. Dividends paid with respect to shares  as
to which a proper Section 83(b) election has been made will not be deductible to
the  Company. If a Section 83(b) election  is made and the Restricted Shares are
subsequently forfeited, the participant will  not be entitled to any  offsetting
tax deduction.
 
    STOCK  BONUSES.    With  respect  to Stock  Bonuses  under  the  Option Plan
described above, generally, when a participant receives a Stock Bonus, the  fair
market  value of  the Common  Stock on  the date  the restrictions,  if any, are
removed will be ordinary  income to such  participant and will  be allowed as  a
deduction for federal income purposes to the Company.
 
    PAYMENT  OF  WITHHOLDING TAXES.    The Company  may  withhold, or  require a
participant to  remit  to the  Company,  an  amount sufficient  to  satisfy  any
federal,  state  or local  withholding tax  requirements associated  with awards
under the Option Plan.
 
    SPECIAL RULES.  Special rules may apply  to a participant who is subject  to
Section  16(b)  of the  Securities Exchange  Act  of 1934  (generally directors,
executive officers and 10% shareholders).
 
                                       7
<PAGE>
                                 PROPOSAL NO. 3
                        APPROVAL OF AN AMENDMENT TO THE
                       1992 EMPLOYEE STOCK PURCHASE PLAN
 
    The Company's shareholders are being asked to act upon a proposal to approve
the action of the Board of Directors amending the Company's 1992 Employee  Stock
Purchase  Plan (the "Purchase Plan"). Ratification  of the proposal requires the
affirmative vote of  a majority  of the  shares of  Common Stock  voting on  the
proposal in person or by proxy.
 
    The  Board of Directors  of the Company  amended the Purchase  Plan in March
1996, to effect the following, subject to shareholder approval: to increase  the
number  of shares  reserved for  issuance under  the Purchase  Plan from 250,000
shares to 290,000 shares.
 
    The Board of Directors  believes that the attraction  and retention of  high
quality  personnel are essential  to the Company's  continued growth and success
and that  an incentive  plan such  as the  Purchase Plan  is necessary  for  the
Company  to remain competitive in its  compensation practices. In the absence of
an increase in the available shares, no additional shares will be available  for
purchase  under the  Purchase Plan,  except to  the extent  that shares  are not
purchased during the  current offering period  due to the  withdrawal of a  plan
participant.
 
    THE  BOARD OF DIRECTORS RECOMMENDS A  VOTE FOR THE RATIFICATION AND APPROVAL
OF THE AMENDMENT TO THE COMPANY'S 1992 EMPLOYEE STOCK PURCHASE PLAN.
 
GENERAL DESCRIPTION OF THE PURCHASE PLAN
 
    The  following  summary  of  the  Purchase  Plan,  including  the   proposed
amendment, is qualified in its entirety by the specific language of the Purchase
Plan, a copy of which is available to any shareholder upon request.
 
    In  May 1992 the Board of  Directors adopted, and the shareholders approved,
the Purchase Plan. In January  1995 the Board of  Directors adopted, and in  May
1995  the shareholders ratified and approved an increase in the number of shares
available for issuance under the Purchase Plan from 150,000 to 250,000 shares of
Common Stock. The purpose of  the Purchase Plan is  to provide employees of  the
Company who participate in the Plan with an opportunity to purchase Common Stock
of  the Company through payroll deductions. The  Purchase Plan, and the right of
participants to  make purchases  thereunder, is  intended to  qualify under  the
provisions  of Sections 421 and 423 of  the Code. The Board of Directors amended
the Purchase Plan in  March 1996, subject to  shareholder approval, to  increase
the number of shares reserved for issuance thereunder by 40,000 shares; bringing
the  total number  of shares  reserved for issuance  under the  Purchase Plan to
290,000 shares. As of March  31, 1996, 191,522 shares  of Common Stock had  been
sold  pursuant to the  Purchase Plan at  a weighted average  price of $23.20 per
share, with 58,478 shares available for future issuance under the Purchase Plan.
 
    Any person who  is employed  by the Company  (or any  of its  majority-owned
subsidiaries  for whom the appropriate regulatory filings have been made) for at
least 20 hours per week and more than five months in a calendar year is eligible
to participate in the  Purchase Plan provided that  the employee is employed  on
the  first day of an offering period  and subject to certain limitations imposed
by Section 423(b)  of the Code.  Eligible employees become  participants in  the
Purchase  Plan by delivering to the Company a subscription agreement authorizing
payroll deductions prior to  the applicable offering date,  unless a later  time
for filing the subscription agreement has been set by the Board of Directors for
all eligible employees with respect to a given offering.
 
    The  Purchase  Plan may  be  administered by  the  Board of  Directors  or a
committee appointed by  the Board, and  is currently being  administered by  the
Board  of Directors.  All questions of  interpretation of the  Purchase Plan are
determined by the Board of Directors or its committee, whose decisions are final
and binding upon all participants.
 
                                       8
<PAGE>
    The Purchase  Plan is  implemented  by one  offering during  each  six-month
period  of the Purchase  Plan. The first  offering period commenced  on or about
January 1, 1989. The Board of Directors  may alter the duration of the  offering
periods without shareholder approval.
 
    The  price per  share at which  shares are  sold under the  Purchase Plan is
equal to the lower of (i)  85% of the fair market  value of the Common Stock  on
the  date of commencement of  the six-month offering period  and (ii) 85% of the
fair market value of the  Common Stock on the last  day of the offering  period.
The  fair market value of the Common Stock  on a given date is determined by the
Board of Directors based  upon the last  sale price of the  Common Stock on  the
Nasdaq National Market System as of such date.
 
    The purchase price of the shares is accumulated by payroll deductions during
the  offering period. The deductions  may not exceed the lesser  of (i) 15% of a
participant's eligible compensation, which  is defined in  the Purchase Plan  to
include the regular straight time gross salary in effect at the beginning of the
offering period, exclusive of any payments for overtime, shift premium, bonuses,
commissions,  incentive compensation, incentive  payments, or other compensation
or (ii) $5,000 for  each offering period. A  participant may discontinue his  or
her  participation in the Purchase  Plan or may decrease,  but not increase, the
rate of  payroll deductions  at any  time during  the offering  period.  Payroll
deductions  shall commence on the first  payday following the offering date, and
shall continue at  the same rate  until the  end of the  offering period  unless
terminated sooner as provided in the Purchase Plan.
 
    The  maximum number  of shares  placed under option  to a  participant in an
offering is that number determined by  dividing the amount of the  participant's
total payroll deductions to be accumu-
lated  during the offering period  (not to exceed an amount  equal to 15% of the
participant's actual eligible  compensation during the  offering period) by  the
lower  of 85% of the fair  market value of the Common  Stock at the beginning or
end of the  offering period. Unless  a participant withdraws  from the  Purchase
Plan,  such participant's  option for the  purchase of shares  will be exercised
automatically at the end of the offering period for the maximum number of shares
at the applicable price.
 
    Notwithstanding  the  foregoing,  (i)  no  employee  will  be  permitted  to
subscribe  for shares under the Purchase Plan if, immediately after the grant of
the option, the employee would  own 5% or more of  the voting power or value  of
all classes of stock of the Company or of a parent or of any of its subsidiaries
(including  stock which may be purchased under  the Purchase Plan or pursuant to
any other options), and (ii) no employee shall be granted an option which  would
permit the employee to buy pursuant to the Purchase Plan more than $25,000 worth
of  stock (determined  at the fair  market value of  the shares at  the time the
option is granted) in any calendar year.
 
    A participant's interest in a given offering may be terminated in whole, but
not in part, by  signing and delivering  to the Company  a notice of  withdrawal
from  the Purchase Plan. Such withdrawal may be elected at any time prior to the
end  of  the  applicable  six-month  offering  period.  Any  withdrawal  by  the
participant of accumulated payroll deductions for a given offering automatically
terminates the participant's interest in that offering. The failure to remain in
the  continuous employ of the  Company for at least 20  hours per week during an
offering period will be deemed to be a withdrawal from that offering.
 
    Participation in the Purchase Plan by officers and directors of the  Company
subject  to Section 16(b) of  the Exchange Act is  subject to certain additional
conditions or restrictions as may be  required under Rule 16b-3 of the  Exchange
Act.
 
    In  the event any change is made  in the Company's capitalization, such as a
stock split or stock dividend, which results  in an increase or decrease in  the
number of outstanding shares of Common Stock without receipt of consideration by
the  Company, appropriate adjustments will be made  by the Board of Directors to
the shares subject to purchase under the Purchase Plan and in the purchase price
per share.
 
                                       9
<PAGE>
    No rights  or accumulated  payroll  deductions of  a participant  under  the
Purchase  Plan may be  pledged, assigned or  transferred for any  reason and any
such attempt may be treated by the  Company as an election to withdraw from  the
Purchase Plan.
 
    The Board of Directors may at any time amend or terminate the Purchase Plan,
except  that such termination shall not  affect options previously granted prior
thereto which adversely affects the rights of any participant. No amendment  may
be  made to the Purchase Plan without  prior approval of the shareholders of the
Company if such amendment would increase the number of shares reserved under the
Purchase Plan, permit payroll deductions in  excess of 15% of the  participant's
compensation,  materially  modify  the  eligibility  requirements  or materially
increase the benefits which may accrue under the Purchase Plan.
 
CERTAIN FEDERAL TAX CONSEQUENCES
 
    The following  summarizes  only  the  federal  income  tax  consequences  of
participation  under the  Purchase Plan.  State and  local tax  consequences may
differ.
 
    The  Purchase  Plan,  and  the  right  of  participants  to  make  purchases
thereunder,  is intended to qualify under the  provisions of Section 421 and 423
of the Code. Under these provisions, no income will be taxable to a  participant
at  the time of grant  of the option or purchase  of shares. Upon disposition of
the shares, the participant will generally be  subject to tax and the amount  of
the  tax will depend upon  the participant's holding period.  If the shares have
been held by the participant  for more than two years  after the date of  option
grant,  the lesser of  (i) the difference  between the fair  market value of the
shares on the date  the option was  granted and the purchase  price or (ii)  the
difference  between the fair market value of the shares on the purchase date and
the purchase price will be treated as ordinary income, and any further gain will
be treated as long-term capital gain. If  the shares are disposed of before  the
expiration  of this holding period,  the excess of the  fair market value of the
shares on the exercise date  over the option price  will be treated as  ordinary
income,  and any further gain  or loss on such  disposition will be long-term or
short-term capital  gain or  loss, depending  on the  holding period.  Different
rules  may  apply with  respect to  optionees  subject to  Section 16(b)  of the
Exchange Act. The Company is  not entitled to a  deduction for amounts taxed  as
ordinary  income  or capital  gain  to a  participant  except to  the  extent of
ordinary income reported by participants  upon disposition of shares within  two
years from date of grant.
 
                                 PROPOSAL NO. 5
        RATIFICATION AND APPROVAL OF APPOINTMENT OF INDEPENDENT AUDITORS
 
    The Board of Directors has selected Ernst & Young LLP, independent auditors,
to  audit the financial statements  of the Company for  1996 and recommends that
the shareholders ratify  such selection.  In the event  that a  majority of  the
outstanding  shares  are not  voted  in favor  of  ratification, the  Board will
reconsider its selection.  Unless otherwise instructed,  the proxy holders  will
vote  the proxies they receive for the ratification  of Ernst & Young LLP as the
independent auditors for  1996. Representatives  of Ernst  & Young  LLP will  be
present  at the Annual Meeting, will have the opportunity to make a statement if
they so desire and will be available to respond to appropriate questions.
 
    Ernst & Young LLP (or one of its predecessor firms, Arthur Young &  Company)
has audited the Company's financial statements since the year ended December 31,
1986.
 
    THE  BOARD OF DIRECTORS  RECOMMENDS A VOTE  FOR THE RATIFICATION  OF ERNST &
YOUNG LLP AS THE COMPANY'S INDEPENDENT AUDITORS FOR 1996.
 
                                       10
<PAGE>
                               OTHER INFORMATION
 
EXECUTIVE OFFICERS
 
    In addition to Messrs. Hill and Graham, the other executive officers of  the
Company as of April 19, 1996, were as follows:
 
<TABLE>
<CAPTION>
                  NAME                    AGE                      POSITION
- ----------------------------------------  --- --------------------------------------------------
<S>                                       <C> <C>
Jeffrey Benzing                           39  Vice President, Engineering
John Chenault                             47  Vice President, Operations
Linus Cordes                              58  Vice President, Human Resources
Peter Hanley                              56  Executive Vice President, Sales and Marketing
Alain Harrus                              40  Vice President and Chief Technical Officer
Wilbert van den Hoek                      39  Vice President and General Manager, HDP Products
                                               Business Group
Robert Wagner                             39  Vice President, Customer Satisfaction
William J. Wall                           49  Vice President, Finance and Administration, Chief
                                               Financial Officer and Secretary
</TABLE>
 
    MR.  BENZING  joined the  Company  in October  1988  as Director  of Special
Projects. From June 1992 through April 1995 he served as Vice President, Product
Development and is currently its Vice President, Engineering. From 1984 to  1988
he  was co-founder  and Vice President  of Engineering  of Benzing Technologies,
Inc., a  semiconductor equipment  company. From  1979 to  1984 he  held  various
positions at Hewlett Packard Company.
 
    MR.  CHENAULT  joined  the  Company in  September  1991  as  Vice President,
Operations. From April  1993 through  April 1996  he served  as Vice  President,
Customer  Satisfaction  and is  currently its  Vice President,  Operations. From
October 1988 to July 1991 he was the Vice President and General Manager of Veeco
Instruments, an electronics company. From 1986 to October 1988 Mr. Chenault  was
Vice  President and General  Manager for Carroll  Touch, an electronics company.
Mr. Chenault has also  held various positions with  Texas Instruments, Inc.  and
Recognition Equipment, Inc.
 
    DR.  CORDES joined  the Company  in November  1995 as  Vice President, Human
Resources. From 1992 to 1995 he served as assistant director of the Microsystems
Technology Laboratories of the Massachusetts  Institute of Technology. Prior  to
that  he was a member of the Corporate Engineering Staff of Raytheon Company, an
electronics company,  and  also  served  as  the  General  Manager  of  Raytheon
Company's  Advanced Device  Center and  Microelectronics Center.  Dr. Cordes has
also held  various  research  and management  positions  with  General  Electric
Company.
 
    DR.  HANLEY  joined  the  Company as  Executive  Vice  President,  Sales and
Marketing in  June  1992.  From 1985  to  June  1992, Dr.  Hanley  held  various
positions  at  Applied  Materials,  Inc.,  most  recently  Group  Vice President
responsible for  sales, service  and process  for all  North American  accounts.
Previously,  Dr. Hanley was President of Tegal, a division of Motorola, Inc., an
electronics company, and held positions at Varian, Inc.
 
    DR. HARRUS  joined  the Company  in  April  1994 as  Director  of  Strategic
Marketing  and is currently is Vice  President and Chief Technical Officer. From
March 1993 to  April 1994  he was  Director of  CVD Technology  at Lam  Research
Corporation.  From 1989 to 1993 he was  Director of Dielectric Technology at the
Company. Prior to joining the Company, Dr. Harrus spent five years at AT&T  Bell
Laboratories,  where he  was responsible  for the  development of  materials and
processes for CMOS applications, with an emphasis on CVD.
 
    DRS. VAN DEN HOEK joined the Company  in May 1990 as Director of  Technology
of  Nippon  Novellus Systems  and is  currently the  Vice President  and General
Manager of the Company's HDP Product
 
                                       11
<PAGE>
Business Unit. From  1980 to  May 1990  he held a  variety of  positions at  the
Philips  Research  Laboratories  in Eindhoven,  the  Netherlands  and Sunnyvale,
California. The  last position  Drs. van  den  Hoek held  at Philips  was  group
manager of the Si Technology Research group.
 
    MR.  WAGNER joined  the Company  in October  1987 as  Account Executive, was
promoted to Director of  Global Accounts in November  1991 and is currently  its
Vice  President  of Customer  Satisfaction. From  1983 to  1987 he  held several
Marketing positions at  Applied Materials including  Manager, Product  Marketing
Etch  Product Division. From 1978  to 1982 Mr. Wagner  held various positions at
General Electric, Nuclear Business Group in San Jose, California.
 
    MR. WALL joined the Company in November 1992 as Vice President, Finance  and
Administration,  Chief  Financial Officer  and  Secretary of  the  Company. From
January 1991 to November 1992 he was Vice President, Finance and Chief Financial
Officer of Resumix, Inc., a software company. From January 1990 to January  1991
he was Vice President, Finance and Chief Financial Officer of Power Integration,
Inc.,  a  semiconductor company.  From July  1988  to January  1990 he  was Vice
President, Finance  and  Chief  Financial Officer  of  CareLink  Corporation,  a
medical instruments company. Mr. Wall has also served as Chief Financial Officer
of Actel Corporation and Monolithic Memories, Inc., semiconductor companies.
 
                                       12
<PAGE>
EXECUTIVE COMPENSATION
 
                           SUMMARY COMPENSATION TABLE
 
    The  following table sets forth  certain information concerning compensation
of (i) each person that served  as the Company's Chief Executive Officer  during
the last fiscal year of the Company, (ii) the four other most highly compensated
executive  officers of the  Company, and (iii) each  former executive officer of
the Company  who  would  have  been  one  of  the  Company's  four  most  highly
compensated  executive officers had such executive  officer been serving as such
at the end of the Company's last fiscal year (collectively, the "named executive
officers"):
 
<TABLE>
<CAPTION>
                                                                                        LONG-TERM
                                                                                       COMPENSATION
                                                                                       ------------
                                                             ANNUAL COMPENSATION          AWARDS
                                                          --------------------------     OPTIONS/          ALL OTHER
           NAME AND PRINCIPAL POSITION              YEAR  SALARY ($)    BONUS ($)(1)   SARS (#)(2)    COMPENSATION ($)(3)
- --------------------------------------------------  ----  -----------   ------------   ------------   -------------------
<S>                                                 <C>   <C>           <C>            <C>            <C>
Richard S. Hill                                     1995  $328,327      $443,021          35,000         $ 5,000(4)(5)
 President and Chief Executive Officer              1994   315,000       603,750(6)       35,000          27,726(4)(7)
                                                    1993    12,115(8)      --            200,000          --
 
Peter Hanley                                        1995   228,461       302,790(9)       20,000          --
 Executive Vice President Sales and Marketing       1994   218,462       316,999(9)       21,000           1,440
                                                    1993   208,462       170,740(9)       45,000             922
 
William J. Wall                                     1995   183,000       242,841          16,000           3,850(4)(5)
 Vice President, Finance and Administration, Chief  1994   170,154       344,000          14,500           1,357(4)
 Financial Officer and Secretary                    1993   160,000       160,000          15,000           1,557
 
John Chenault                                       1995   163,846       198,421           8,500             850(4)
 Vice President, Operations                         1994   156,692       265,000           4,125           1,357(4)
                                                    1993   151,135       142,500          20,000             557
 
Eliot Broadbent                                     1995   154,538       132,732(11)       5,000           3,000(5)
 Vice President, Technology (10)                    1994   151,692       137,024(11)       3,000             211
                                                    1993   147,115       143,599(11)       5,000          --
 
Jeffrey Benzing                                     1995   152,308       251,301(12)      13,500           3,000(5)
 Vice President, Engineering                        1994   141,769       174,826(12)      19,626           1,211
                                                    1993   133,461        99,097(12)       5,000          --
</TABLE>
 
- ------------------------
 (1) Includes amounts earned in 1995 and paid in 1996.
 
 (2) Amounts represent stock option grants. See Option/SAR Grants in Last Fiscal
    Year Table.
 
 (3) Amounts include life  insurance premiums paid by  the Company on behalf  of
    the named executive officers.
 
 (4) Includes tax preparation fees paid for by the Company.
 
 (5) Includes financial advice fees paid for by the Company.
 
 (6)  Bonus amount of $603,750  represents a $350,000 cash  bonus awarded to Mr.
    Hill under  the Company's  bonus policy  and a  stock bonus  award of  5,000
    shares  of the  Company's Common Stock  valued at  the time of  the award at
    $253,750. Mr. Hill's  stock bonus  award provides  that the  shares will  be
    forfeited  and transferred to the Company should he terminate his employment
    with the Company prior to December 10, 1996.
 
 (7) Includes $18,000 relocation expenses and $6,600 furniture allowance.
 
                                       13
<PAGE>
 (8) Mr. Hill joined the  Company in December 1993,  and his annual base  salary
    was established at $315,000.
 
 (9)  Includes commission based compensation in  the amount of $164,158, $96,999
    and $55,520 in 1995, 1994 and 1993 respectively.
 
(10) Mr. Broadbent  ceased being  an executive officer  of the  Company in  June
    1995.
 
(11)  Includes commission based  compensation in the  amount of $55,232, $26,524
    and $13,599 in 1995, 1994 and 1993 respectively.
 
(12) Includes commission based  compensation in the  amount of $55,670,  $26,089
    and $13,959 in 1995, 1994 and 1993 respectively.
 
                     OPTION/SAR GRANTS IN LAST FISCAL YEAR
 
    The  following  table provides  certain  information with  respect  to stock
options granted to the named executive officers in 1995:
 
<TABLE>
<CAPTION>
                                                                     INDIVIDUAL GRANTS                     POTENTIAL REALIZABLE
                                                    ----------------------------------------------------          VALUE
                                                                    % OF TOTAL                            AT ASSUMED ANNUAL RATE
                                                                   OPTIONS/SARS                               OF STOCK PRICE
                                                                    GRANTED TO                                 APPRECIATION
                                                     UNDERLYING     EMPLOYEES     EXERCISE                 FOR OPTION TERM (1)
                                                    OPTIONS/SARS    IN FISCAL     PRICE PER   EXPIRATION  ----------------------
NAME                                                GRANTED (#)        YEAR         SHARE        DATE       5% ($)     10% ($)
- --------------------------------------------------  ------------   ------------   ---------   ----------  ----------  ----------
<S>                                                 <C>            <C>            <C>         <C>         <C>         <C>
Richard S. Hill...................................     35,000          4.65        $55.00      12/15/05   $1,210,622  $3,067,954
Peter Hanley......................................     20,000          2.66        $55.00      12/15/05      691,784   1,753,117
William J. Wall...................................     16,000          2.13        $55.00      12/15/05      553,427   1,402,493
John Chenault.....................................      8,500          1.13        $55.00      12/15/05      294,008     745,075
Eliot Broadbent...................................      5,000          0.67        $55.75      12/21/05      175,304     444,256
Jeffrey Benzing...................................     13,500          1.80        $55.00      12/15/05      466,954   1,183,354
</TABLE>
 
- ------------------------
(1) The potential realizable  value portion of  the foregoing table  illustrates
    value  that might be realized upon exercise of the options immediately prior
    to the expiration of their terms, assuming the specified compounded rates of
    appreciation on the  Company's Common Stock  over the term  of the  options.
    Actual  gains, if any, on stock option  exercise are dependent upon a number
    of factors, including the  future performance of  the Common Stock,  overall
    stock  market conditions, and the timing  of option exercises, if any. There
    can be no assurance that amounts reflected in this table will be achieved.
 
                                       14
<PAGE>
              AGGREGATED OPTION/SAR EXERCISES IN LAST FISCAL YEAR
                     AND FISCAL YEAR-END OPTION/SAR VALUES
 
    The  following table  sets forth certain  information with  respect to stock
options exercised by  the named  executive officers during  1995, including  the
aggregate  value of gains on  the date of exercise.  In addition, the table sets
forth the number of shares covered by stock options as of December 31, 1995, and
the value of "in-the-money" stock options, which represents the positive  spread
between  the exercise price of a stock option and the market price of the shares
subject to such option on December 31, 1995.
 
<TABLE>
<CAPTION>
                                                                                   NUMBER OF
                                                                             SECURITIES UNDERLYING         VALUE OF UNEXERCISED
                                                                           UNEXERCISED OPTIONS/SARS      IN-THE-MONEY OPTIONS/SARS
                                                                           AT FISCAL YEAR END (#)(1)     AT FISCAL YEAR END (#)(1)
                                         SHARES ACQUIRED      VALUE       ---------------------------   ---------------------------
NAME                                     ON EXERCISE (#)   REALIZED ($)   EXERCISABLE   UNEXERCISABLE   EXERCISABLE   UNEXERCISABLE
- ---------------------------------------  ---------------   ------------   -----------   -------------   -----------   -------------
<S>                                      <C>               <C>            <C>           <C>             <C>           <C>
Richard S. Hill........................      43,420         $ 1,456,940     56,580         170,000      $ 1,711,545    $  3,138,750
Peter Hanley...........................      10,000             657,000     48,928          87,072        2,075,778       1,479,348
William J. Wall........................       1,875              53,906     18,125          58,000          692,344         971,500
John Chenault..........................      20,999           1,286,328     19,000          52,626          701,563       1,464,389
Eliot Broadbent........................       7,000             381,500      8,021          28,480          339,775         884,619
Jeffrey Benzing........................      10,000             511,000     16,500          49,626          716,094         984,566
</TABLE>
 
- ------------------------
(1) Calculated on the basis  of the last reported sale  price per share for  the
    Company's  Common Stock  on The Nasdaq  National Market System  of $54.00 on
    December 31, 1995.
 
COMPENSATION COMMITTEE AND STOCK OPTION COMMITTEE REPORT ON EXECUTIVE
COMPENSATION
 
    Notwithstanding anything to the contrary set  forth in any of the  Company's
previous filings under the Securities Act of 1933 or the Securities Exchange Act
of  1934 that might incorporate future  filings, including this Proxy Statement,
in whole  or in  part, the  following  report and  the Performance  Graph  which
follows  shall  not be  deemed  to be  filed  with the  Securities  and Exchange
Commission nor incorporated by reference into any such filings.
 
    COMPENSATION PHILOSOPHY
 
    The  Company  applies  a  consistent  philosophy  to  compensation  for  all
employees, including senior management. The premise of this philosophy is to pay
for  performance.  The  Company  sets aggressive  goals  and  objectives  at the
beginning  of  each  year  and  makes  a  significant  percentage  of  executive
compensation  dependent on  performance against  these goals  and objectives. By
linking a significant  percentage of pay  to performance, the  Company seeks  to
ensure  that  the  interests of  its  employees, including  the  named executive
officers, are closely aligned with those of its shareholders.
 
    The Company strives to be in a leadership position within the  semiconductor
industry  for overall  compensation. Competition for  qualified personnel within
the semiconductor industry is intense and a leadership position in  compensation
is necessary to attract, hire and retain persons of the highest caliber.
 
    COMPENSATION VEHICLES
 
    Compensation  at the Company  has three principal  components: Salary, Bonus
and Stock Options.
 
    1.  SALARY
 
       The salary program  is structured to  position the Company  in up to  the
       seventy-fifth  percentile  within the  semiconductor industry.  To ensure
       this position,  the Company  consults surveys  that track  other  leading
       companies  in the  semiconductor and  semiconductor equipment industries,
       many of whom are included in the Hambrecht & Quist Technology Index  used
       to compare five year stock price history.
 
                                       15
<PAGE>
    2.  BONUS
 
       Bonuses  are designed to  be a significant  part of compensation. Bonuses
       are based on  achievement of corporate  goals and individual  objectives.
       Corporate   goals   are  expressed   in   a  financial   plan  containing
       profitability targets; individual objectives depend  on the role of  each
       employee, and include such matters as sales within a particular market or
       to  specific customers,  inventory turns  and technological achievements.
       Upon the achievement of profitability goals, the Board of Directors  will
       approve  the allocation  of a certain  percentage of pre-tax  income to a
       bonus pool. This pool is distributed to the named executive officers  and
       all other employees based on their individual performance.
 
       In  addition to  cash bonuses, the  Company intends to  utilize grants of
       Restricted Shares  and  awards of  Stock  Bonuses to  provide  additional
       incentives  for the named executive officers  and other employees, and to
       provide additional  incentives  to  such  persons in  a  manner  that  is
       consistent  with  the Company's  long-term  goals and  objectives through
       equity ownership.
 
    3.  STOCK OPTIONS
 
       The Company grants stock options to the majority of employees upon hiring
       to allow everyone  to achieve an  ownership position in  the Company  and
       thus  provide  employees  the  opportunity  to  share  in  the  Company's
       achievements. Yearly, additional stock options are granted to those named
       executive officers and other employees who have done an exemplary job  of
       meeting their objectives or have had other accomplishments of note.
 
PERFORMANCE MEASURES AND CEO COMPENSATION
 
    In  1995, the  Company's profits exceeded  the performance goals  set by the
Compensation Committee at the beginning of the year. Accordingly, Richard  Hill,
the Company's Chief Executive Officer, received an annual bonus equal to 135% of
his  base  salary. The  other  named executives  received  bonuses based  on the
Company's performance and on  their performance against  the specific goals  and
objectives established for them at levels ranging from 50% to 133% of their base
salaries.
 
COMPENSATION POLICY REGARDING DEDUCTIBILITY
 
    The  Company does not  expect cash compensation paid  to officers subject to
Section 162(m)  of the  Code to  exceed the  limitations of  Section 162(m)  for
fiscal 1995, and therefore expects all such cash compensation to be deductible.
 
STOCK OPTION COMMITTEE        COMPENSATION COMMITTEE
 
    D. James Guzy                 Robert F. Graham
    Tom Long                      D. James Guzy
    Robert Smith                  Richard S. Hill
    Joseph Van Poppelen           Joseph Van Poppelen
 
                                       16
<PAGE>
PERFORMANCE GRAPH
 
    The  following line graph  compares the yearly percentage  change in (i) the
cumulative total shareholder return on the Company's Common Stock since December
31, 1990 with (ii) cumulative total  shareholder return on (a) the Nasdaq  Stock
Market  --  U.S. Index  and  (b) the  Hambrecht  & Quist  Technology  Index. The
comparison assumes an investment of $100  on December 31, 1990 and  reinvestment
of  dividends, if  any. The stock  price performance  shown on the  graph is not
necessarily indicative of future price performance.
 
EDGAR REPRESENTATION OF DATA POINTS USED IN PRINTED GRAPHIC
 
<TABLE>
<CAPTION>
           NOVELLUS SYSTEMS    H&O TECHNOLOGY    NASDAQ
<S>        <C>                <C>               <C>
1990                  100.00            100.00     100.00
1991                  184.78            147.83     160.55
1992                  158.70            170.04     186.85
1993                  297.83            185.56     214.50
1994                  434.78            215.39     209.67
1995                  469.57            323.40     296.51
</TABLE>
 
EMPLOYMENT AGREEMENTS
 
    In June 1992, the  Company entered into an  employment agreement with  Peter
Hanley  pursuant to which the Company retained  Dr. Hanley as its Executive Vice
President, Sales and Marketing for an  annual salary (subject to adjustment)  of
$200,000  plus a bonus to be determined by  the Board of Directors. In the event
the Company terminates  Dr. Hanley's  employment without cause,  the Company  is
required  to pay Dr. Hanley up to 12 months of salary after the six-month notice
period and provide continued life,  disability and medical benefits during  such
period. In the event Dr. Hanley voluntarily terminates his employment, unless he
commences  employment  with a  competitor, the  Company is  required to  pay his
salary and provide continued benefits during the six-month notice period. In the
event of termination of Dr. Hanley's employment certain adjustments will be made
to the vesting schedule for Dr. Hanley's options.
 
    In December  1993, the  Company entered  into an  employment agreement  with
Richard  S. Hill pursuant  to which the  Company retained Mr.  Hill as its Chief
Executive Officer  for  an  annual  salary  of $315,000,  plus  a  bonus  to  be
determined  by the  Board of  Directors. In  connection with  the agreement, the
Company granted Mr. Hill options to  purchase 200,000 shares of Common Stock  at
an  exercise price of $23.75. Such options vest at the rate of 25% per year over
a four year period. Commencing in January 1994, the Company agreed to  establish
a  deferred bonus  program for  Mr. Hill. Interest  on such  program will accrue
monthly using the month-end  closing weekly average interest  rate of five  year
treasury  notes  plus  2%. The  deferred  bonus  amount will  be  earned  over a
four-year period. If  Mr. Hill  is terminated prior  to the  conclusion of  such
four-year  period,  the  Company  and  Mr. Hill  will  enter  into  a consulting
agreement to cover the duration of such four-year period. In the event of death,
the entire balance owed Mr.  Hill will be paid to  his estate. In addition,  the
Company  has agreed to guarantee a  loan to Mr. Hill of  up to $1,000,000, at an
interest rate not to exceed 6%, in connection with the acquisition of Mr. Hill's
residence.
 
                                       17
<PAGE>
    In January 1994, the Company and Robert F. Graham entered into a  consulting
agreement  pursuant to which the Company retained Mr. Graham as a consultant for
a three-year period commencing January 1,  1994. Pursuant to the agreement,  the
Company  agreed to pay $236,000 to Mr. Graham for the first year of the term and
$118,000 in each of the second and third years of the term.
 
SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT
 
    The following table sets forth the  beneficial ownership of Common Stock  as
of  April 3, 1996 as to (a) each  director and nominee, (b) each named executive
officer, (c) all  directors and officers  as a  group, and (d)  for each  person
known  by the Company, as of December 31, 1995, to beneficially own more than 5%
of the outstanding shares of its Common Stock.
 
<TABLE>
<CAPTION>
                                                                             BENEFICIAL OWNERSHIP (1)
                                                                       ------------------------------------
BENEFICIAL OWNER                                                       NUMBER OF SHARES   PERCENT OF TOTAL
- ---------------------------------------------------------------------  -----------------  -----------------
<S>                                                                    <C>                <C>
AIM Management Group Inc. (2)
 11 Greenway Plaza, Suite 1919
 Houston, TX 77046...................................................        1,409,000              8.8%
J.&W. Seligman & Co. Incorporated (3)
 100 Park Avenue
 New York, NY 10017..................................................        1,164,900              7.3%
State Street Bank and Trust Company, Trustee (4)
 225 Franklin Street
 Boston, MA 02110....................................................          927,200              5.8%
Peter Hanley (5).....................................................           57,758            *
Richard S. Hill (6)..................................................           55,000            *
D. James Guzy (7)....................................................           36,000            *
John Chenault (8)....................................................           20,156            *
Jeffrey Benzing (9)..................................................           19,229            *
Joseph Van Poppelen (10).............................................           17,500            *
Eliot Broadbent (11).................................................           13,561            *
Robert F. Graham (12)................................................            8,366            *
William J. Wall (13).................................................            8,233            *
Glen Possley (14)....................................................            6,000            *
Tom Long (15)........................................................            6,000            *
Robert H. Smith (16).................................................            4,000            *
All officers and directors as a group (17 persons) (17)..............          285,165              1.8%
</TABLE>
 
- ------------------------
 *  Less than one percent
 
 (1) Beneficial ownership  is determined  in accordance  with the  rules of  the
    Securities  and  Exchange  Commission.  In computing  the  number  of shares
    beneficially owned by a person and the percentage ownership of that  person,
    shares  of Common  Stock subject  to options  held by  that person  that are
    currently exercisable or  exercisable within 60  days of April  3, 1996  are
    deemed outstanding. Such shares, however, are not deemed outstanding for the
    purposes  of  computing  the  percentage  ownership  of  each  other person.
    Applicable percentages are based on  16,003,049 shares outstanding on  April
    3,  1996, adjusted  as required  by the  rules. To  the Company's knowledge,
    except as set forth in the footnotes to this table and subject to applicable
    community property laws, each person named in the table has sole voting  and
    investment power with respect to the shares set forth opposite such person's
    name.
 
                                       18
<PAGE>
 (2)  As reported in a Schedule 13G filed by AIM Management Group, Inc. ("AIM"),
    as of  December 31,  1995, includes  1,409,000 shares  as to  which AIM  has
    shared voting and investment power.
 
 (3)  As reported in a  Schedule 13G filed by  J.&W. Seligman & Co. Incorporated
    ("J.&W. Seligman"), as of December 31, 1995, includes 1,164,900 shares as to
    which J.&W. Seligman has sole voting and investment power.
 
 (4) As reported in a Schedule 13G filed by State Street Bank and Trust  Company
    ("State  Street Bank and Trust"), as  of December 31, 1995, includes 787,700
    shares as to which State  Street Bank and Trust  has sole voting power,  and
    927,200  shares of  which State  Street Bank  and Trust  has sole investment
    power.
 
 (5) Includes options to  purchase an aggregate of  56,071 shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
 (6)  Includes options to purchase  an aggregate of 41,580  shares which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
 (7) Includes options to  purchase an aggregate of  10,000 shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
 (8)  Includes options to purchase  an aggregate of 19,000  shares which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
 (9) Includes options to  purchase an aggregate of  19,000 shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(10)  Includes options to purchase  an aggregate of 15,500  shares which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(11) Includes options to  purchase an aggregate of  13,021 shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(12) Mr. Graham is retiring from the Board following this Annual Meeting.
 
(13)  Includes options to  purchase an aggregate  of 8,125 shares  which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(14) Includes options  to purchase an  aggregate of 4,000  shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(15)  Includes options to  purchase an aggregate  of 4,000 shares  which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(16) Includes options  to purchase an  aggregate of 4,000  shares which will  be
    fully vested and exercisable within 60 days of April 3, 1996.
 
(17)  Includes options to purchase an aggregate  of 224,172 shares which will be
    fully vested and exercisable within 60 days of April 3, 1996.
 
COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION
 
    During 1995, Messrs. Graham and Hill served on the Compensation Committee of
the Board of Directors. Mr.  Hill serves as the  Chief Executive Officer of  the
Company and Mr. Graham serves as the Chairman of the Board of Directors.
 
COMPLIANCE WITH SECTION 16(A) OF THE EXCHANGE ACT
 
    Section  16(a) of the Exchange Act requires the Company's executive officers
and directors, and persons who own more  than ten percent of a registered  class
of  the Company's equity securities,  to file an initial  report of ownership on
Form 3 and changes in ownership on Form 4 or 5 with the Securities and  Exchange
Commission  (the "SEC") and the Nasdaq National Market. Such officers, directors
and ten-percent  shareholders are  also required  by SEC  rules to  furnish  the
Company with copies of all Section 16(a) forms they file.
 
    Based  solely on its review  of the copies of such  forms received by it, or
written representations  from certain  reporting persons  that no  Forms 5  were
required for such persons, the Company believes
 
                                       19
<PAGE>
that  its executive  officers, directors  and ten-percent  shareholders complied
with all  Section  16(a)  filing  requirements applicable  to  them,  except  as
follows:  Mr. Robert  Graham, Chairman  of the Board,  and Mr.  Richard S. Hill,
President and Chief Executive Officer, each  filed one late Form 4 with  respect
to one transaction.
 
                                 OTHER MATTERS
 
    The Company knows of no other matters to be submitted to the meeting. If any
other  matters properly  come before  the meeting,  it is  the intention  of the
persons named in the enclosed form of proxy to vote the shares they represent as
the Board of Directors may recommend.
 
                                          THE BOARD OF DIRECTORS
 
Dated: April 22, 1996
 
                                       20
<PAGE>

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                             NOVELLUS SYSTEMS, INC.

                         ANNUAL MEETING OF SHAREHOLDERS
                                  May 17, 1996

     The undersigned hereby appoints Richard S. Hill and William J. Wall and
each of them, as proxies, each with the power to appoint his substitute, and
hereby authorizes them to represent and to vote as designated below all of the
shares of Common Stock of Novellus Systems, Inc. that the undersigned is
entitled to vote at the Annual Meeting of Shareholders to be held at 9:00 a.m.,
local time on May 17, 1996, at the Company's principal executive offices, 3970
North First Street San Jose, California, 95134, or any adjournment or
postponement thereof.

     THIS PROXY WHEN PROPERLY EXECUTED WILL BE VOTED AS DIRECTED BY THE
UNDERSIGNED SHAREHOLDERS. IF NO SUCH DIRECTIONS ARE MADE, THIS PROXY WILL BE
VOTED FOR THE ELECTION OF THE NOMINEES LISTED ON THE REVERSE SIDE FOR THE BOARD
OF DIRECTORS AND FOR PROPOSALS 2, 3, and 4.



                   CONTINUED AND TO BE SIGNED ON REVERSE SIDE

                                                                     -----------
                                                                     See Reverse
                                                                         Side   
                                                                     -----------
<PAGE>

                                                                    PLEASE MARK 
                                                               /X/  YOUR CHOICES
                                                                    LIKE THIS   

       --------------    ---------------
/  /   ACCOUNT NUMBER         COMMON


                                             WITHHOLD   
                                             AUTHORITY  
                              FOR ALL        FOR ALL    
                              NOMINEES       NOMINEES   
 
1. Election of Directors:       /  /           /  /

If you wish to withhold authority to vote for any individual nominee,
strike a line through that nominee's name in the list below:

Richard S. Hill, D. James Guzy, Glen Possley, Joseph Van Poppelen, 
Robert H. Smith, Tom Long


Item 2.   Proposal to ratify and approve an amendment to the Company's 1992
Stock Option Plan (the "Option Plan") to increase the number of shares reserved
for issuance thereunder from 2,000,000 shares to 2,680,000.

               FOR             AGAINST            ABSTAIN
               /  /              /  /               /  /

Item 3.   Proposal to ratify and approve an amendment to the Company's 1992
Employee Stock Purchase Plan to increase the number of shares reserved for
issuance thereunder form 250,000 to 290,000 shares.

               FOR             AGAINST            ABSTAIN
               /  /              /  /               /  /

Item 4.   Proposal to ratify the appointment of Ernst & Young LLP as the
independent auditors for the Company for the fiscal year ending December 31,
1996.

               FOR             AGAINST            ABSTAIN
               /  /              /  /               /  /


Item 5.   Authority is hereby given to the proxies identified on the front of
this card to vote in their discretion upon such other business as may properly
come before the meeting.

               FOR             AGAINST            ABSTAIN
               /  /              /  /               /  /


PLAN TO ATTEND THE MEETING       /  /

(Please sign your name exactly as it appears on this proxy card. If shares are
held jointly, each holder should sign. When signing as attorney, executor,
administrator, corporation, trustee or guardian, please give full title as such.
If a corporation please sign in full corporate name by President or other
authorized officer. If a partnership, please sign in partnership name by
authorized person.)

Date:__________, 1996


________________________________________
Printed Name of Shareholder


________________________________________
Signature


________________________________________
Signature


PLEASE MARK, SIGN, DATE AND RETURN THIS PROXY CARD PROMPTLY USING THE ENCLOSED
REPLY ENVELOPE.
 


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