GENUS INC
10-K, 1996-04-01
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                            WASHINGTON, D. C. 20549
 
                                   FORM 10-K
 
/X/  Annual  report pursuant to  Section 13 or 15(d)  of the Securities Exchange
     Act of 1934 for the fiscal year ended December 31, 1995, or
 
/ /   Transition  report  pursuant to  Section 13  or  15(d) of  the  Securities
Exchange Act of 1934
 
COMMISSION FILE NO. 0-17139
                                  GENUS, INC.
             (Exact name of registrant as specified in its charter)
 
<TABLE>
<S>                                           <C>
                 CALIFORNIA                                    94-2790804
      (State or other jurisdiction of                       (I.R.S. Employer
       incorporation or organization)                    Identification Number)
</TABLE>
 
                              1139 KARLSTAD DRIVE
                              SUNNYVALE, CA 94089
                    (Address of principal executive offices)
       Registrant's telephone number, including area code: (408) 747-7120
 
                            ------------------------
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(B) OF THE ACT:
 
                                      NONE
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(G) OF THE ACT:
 
                           COMMON STOCK, NO PAR VALUE
                          COMMON SHARE PURCHASE RIGHTS
                                (TITLE OF CLASS)
 
    Indicate  by check  mark whether  the Registrant  (1) has  filed all reports
required to be filed by  Section 13 or 15(d) of  the Securities Exchange Act  of
1934  during  the preceding  12  months (or  for  such shorter  period  that the
Registrant was required to file such reports), and (2) has been subject to  such
filing requirements for the past 90 days.
                             Yes X             No _
 
    Indicate  by check mark if disclosure  of delinquent filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of Registrant's  knowledge, in definitive  proxy or information  statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K.  / /
 
    The aggregate market value of the voting stock held by non-affiliates of the
Registrant,  based on the  closing sale price  of the Common  Stock on March 28,
1996, in the over-the-counter market as reported by the Nasdaq National  Market,
was  approximately $78,512,616. Shares of Common  Stock held by each officer and
director and by each person who owns 5% or more of the outstanding voting  stock
have  been excluded in  that such persons  may be deemed  to be affiliates. This
determination of affiliate status is not necessarily a conclusive  determination
for other purposes.
 
    As  of  March 28,  1996, Registrant  had 16,249,323  shares of  Common Stock
outstanding.
 
                      DOCUMENTS INCORPORATED BY REFERENCE
 
Parts of the following documents are incorporated by reference in Parts II,  III
and IV of this
Form 10-K Report:
 
(1) Registrant's  1995 Annual Report to Shareholders -- Items 5, 6, 7, 8 and 14;
    and
 
(2) Proxy Statement  for Registrant's  1995 Annual  Meeting of  Shareholders  --
    Items 10, 11, 12 and 13.
 
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<PAGE>
                                     PART I
 
ITEM 1.  BUSINESS
GENERAL
 
    Genus,  Inc. ("Genus"  or "the  Company") designs,  manufactures and markets
capital equipment and  processes for advanced  semiconductor manufacturing.  The
Company's  products  --  high  energy  MeV  (millions  of  electron  volts)  ion
implantation systems and  chemical vapor deposition  ("CVD") equipment are  used
worldwide  to  produce  integrated  circuits ("ICS")  for  the  data processing,
communications,  medical,  military,  transportation  and  consumer  electronics
industries.  Genus was the first to market  high energy MeV ion implantation and
the chemical vapor deposition of  tungsten silicide, which perform two  critical
steps in the manufacture of semiconductors.
 
    The  Company's global customer base  consists of semiconductor manufacturers
in the United States, Europe and Asia/Pacific including Japan, Korea and Taiwan.
 
PRODUCTS
 
    The primary products manufactured by Genus include two MeV ion  implantation
models  and three CVD models. Each of these products is available with a variety
of options and/or upgrades.
 
    MEV ION IMPLANTATION
 
    Ion implanters accelerate and drive  electrically charged atoms (ions)  into
the surface of a silicon wafer to convert silicon into semiconductor material as
part  of the  process of manufacturing  integrated circuits. The  market for ion
implanters consists of three primary segments: high current, medium current  and
high  energy (MeV).  Currently, high and  medium current ion  implanters make up
approximately 85  percent of  the total  ion implantation  market. However,  the
Company  believes  that  high energy  ion  implantation is  the  fastest growing
segment due to its use in emerging advanced technology applications and low cost
of ownership.
 
    CURRENT MEV ION IMPLANT PRODUCTS.
 
    TANDETRON-TM- 1520.   In November 1995,  Genus introduced the  Tandetron-TM-
1520,  a third-generation  MeV ion implanter  which evolved from  the Genus 1500
system, introduced  in 1988,  and the  Genus 1510  system, introduced  in  1992.
Although  specifically  designed  for high  energy  applications,  the Tandetron
implants with a wide range of energies from 10keV (thousands of electron  volts)
to  3 MeV. This  broad range allows  the system to  effectively meet both medium
current and high energy  application requirements. Key differentiating  features
of  the  Tandetron  are  its  small  footprint,  enhanced  performance  and  low
cost-of-ownership. The  system  also offers  significant  production  throughput
advantages for MeV applications including up to 50% higher throughput for single
implants  and up to 66%  increased throughput for chained  implants. Genus has a
patent application pending on the  Buried Implanted Layer for Lateral  Isolation
("BILLI")  structure. The Company believes that the BILLI technology may offer a
significant  competitive   advantage   for  process   simplification   and   epi
replacement, especially in logic applications.
 
    GENUS 1510.  The Company's G1510 MeV ion implantation system was designed to
meet  low and medium dose requirements in the  40 keV to 3 MeV range. Introduced
in September 1992, the  1510 is Genus' second  generation MeV ion implanter  and
incorporates  the  basic design  and field  experience  of its  predecessor, the
G1500. It  is a  fully automated,  highly reliable  implanter with  strong  beam
purity at specified throughput of up to 180 wafers per hour on 200mm wafers.
 
    Currently,  the Tandetron 1520 and the  Genus 1510 are the only commercially
viable implanters capable of performing the full range of implants required  for
the  BILLI structure,  which Genus  believes is  critical to  the future  of MeV
technology for advanced memory and logic applications.
 
    Ion  implant  customers  include:   Fujitsu,  LG,  Hitachi,  Hyundai,   IBM,
Mitsubishi, Samsung, SGS-Thomson, Sharp and Sony.
 
                                       2
<PAGE>
    THIN FILM (CVD)
 
    To  manufacture an IC,  there are a  series of steps  during which layers of
conductive and non-conductive materials are deposited onto the surface of wafers
made of semiconducting  material. Deposited  thin films include  those used  for
interconnect  layers  (conductors  of  electrical current)  and  those  used for
dielectrics (insulating  or nonconductive  layers).  The interconnect  or  metal
layer  is deposited  on the wafer  surface to provide  the electrical connection
between the various circuit  elements, while the  dielectric layer is  deposited
between  the  interconnect  layers  to  provide  electrical  insulation  between
conductive interconnect layers.
 
    CURRENT THIN FILM PRODUCTS
 
    Genus' CVD products are designed for the deposition of tungsten silicide  on
gate  interconnects to increase  speed. The Company  offers three basic hardware
architectures. The  most recent  hardware  architecture is  the 7000  series,  a
single  wafer, tungsten silicide cluster tool.  The Company's two other hardware
architectures, the  8700  Series and  the  6000 Series,  also  deposit  tungsten
silicide.
 
    GENUS  7000 SYSTEM.  To meet the advanced technology requirements of the 64M
DRAM generation and beyond, in December  1994, the Company introduced the  Genus
7000,  a single wafer, open architecture  cluster tool. The initial processes on
this platform are silane and DCS (dichlorosilane) tungsten silicide. The modular
design of the 7000 provides customers  with the flexibility of multiple  process
configurations   while  offering  standard  mechanical  interfaces,  statistical
process control, diagnostics and industry  standard interfaces for factory  host
computers.  The 7000 uses a small  volume, computer-modeled process chamber with
specialized gas distribution which  yields a high  productivity process and  low
downtime.
 
    GENUS  8700 SERIES.  A batch CVD  tungsten silicide product, the 8700 Series
incorporates six heated chucks in the batch chamber and six gas injection ports,
which enable  individual  wafer  process  adjustment  of  gas  flows  and  chuck
temperature  for superior  wafer-to-wafer repeatability. The  dual cassette load
lock system provides  continuous wafer loading  and unloading capability,  which
results in high system throughput (wafers per hour).
 
    The  cold  wall  reaction  chamber and  robotic  wafer  handling  system are
designed to ensure highly reliable operation with a minimum of foreign  material
generation.  The system's through-the-wall mounted  main frame design is ideally
suited for use in  Class 1 or above  cleanrooms. All models of  the 8700 can  be
configured to process from 100mm (4") to 200mm (8") wafers.
 
    GENUS 6000 SERIES.  Similar in design to the 8700 Series, the 6000 Series is
a third-generation tool incorporating new designs to ensure reliability and ease
of  maintenance. It  was designed  to meet the  factory automation  needs of the
industry. The 6000 Series consists of a closed architecture cluster system which
incorporates the 8700-style six-chuck batch CVD chamber. This system also offers
dual cassette load lock architecture which enables continuous batch  processing.
A    new   robotic   handling   system    allows   mechanical   set-up   through
computer-controlled recipes.  The  overall design  features  component  upgrades
which provide production-worthy processing of 100mm (4") to 200mm (8") wafers.
 
    Genus' thin film customers include: AMD, Fujitsu, LG, Hitachi, Hyundai, IBM,
Samsung, Sanyo, SGS-Thomson and Sharp.
 
MARKETING, SALES AND SERVICE
 
    Genus  sells  and supports  its ion  implantation  and CVD  products through
direct sales and customer support organizations in the U.S., Western Europe  and
Korea  and through six  exclusive sales representatives  and distributors in the
U.S., Japan, Korea,  Taiwan and  Hong Kong. Yarbrough  Southwest provides  sales
distribution  in the southwestern  region of the United  States, and Semifore in
the Northwest.  Innotech Corporation,  a value-added  distributor, offers  sales
distribution  and  field service  in Japan.  Genus  Korea, Ltd.,  established in
January 1996, provides in-country field service and support. Sales in the Korean
and Taiwanese markets are served by the representative organizations of Aju-Exim
and Spirox, respectively. Hong Kong, Singapore and the Peoples Republic of China
are
 
                                       3
<PAGE>
served by  Katech International,  LTD.,  based in  Hong Kong.  The  Asia/Pacific
organizations  provide sales and service, as well as distribution assistance for
spare parts.  Genus  distributes  spare  parts  from  several  worldwide  depots
including:  Sunnyvale, California;  Tokyo, Japan;  Seoul, Korea;  Hsin-Chu City,
Taiwan; and Evry, France. To facilitate its marketing efforts, the Company has a
clean room applications laboratory in Sunnyvale, California.
 
    Genus'  products  are  sold  primarily   to  domestic  and  foreign   device
manufacturers,  including  both  foundries  (companies  producing semiconductors
principally for  other  semiconductor  manufacturers)  and  companies  producing
semiconductors mainly for outside sales. Genus has sold, installed and supported
equipment to almost every major semiconductor manufacturer in the world.
 
    The  Company maintains sales, technical support and service personnel at its
principal  executive   offices  located   in  Sunnyvale,   California,  and   in
Newburyport,   Massachusetts.  Genus   has  also   established  several  foreign
subsidiaries to facilitate its sales and service activities abroad: Genus Korea,
Ltd. in Seoul Korea; Genus KK in Tokyo Japan; Genus Europa SARL in Evry, France;
Genus Europa Ltd. in Melbourn, Herts,  England; Genus Europa GmbH in  Stuttgart,
Germany;  and  Genus Europa  Srl. in  Milan,  Italy. These  subsidiaries provide
installation, field service,  and maintenance, as  well as additional  technical
support  to  assist  Genus'  customers in  effectively  utilizing  the Company's
products. Such  services are  also  provided by  the Company's  distributors  in
Tokyo,  Seoul, Taipei and  Hong Kong. The Company  warrants its products against
defects in material and workmanship for twelve months.
 
    In 1995, one customer  accounted for 63% of  the Company's net sales.  Three
customers  accounted for 33%, 19%  and 14% of net sales  in 1994. In 1993, three
customers accounted for 26%, 23% and 14% of  net sales. See Note 14 of Notes  to
Consolidated  Financial Statements. Although export sales are subject to certain
control  restrictions,  including   approval  by  the   Office  of  Export   and
Administration of the U.S. Department of Commerce, Genus has not experienced any
significant difficulties related to such limitations.
 
    BACKLOG.   The  Company's backlog  at December  31, 1995,  was approximately
$45.0 million, compared with approximately  $44.0 million at December 31,  1994.
Genus  includes in its backlog  only those orders for  which a customer purchase
order has  been received  and a  delivery  date within  twelve months  has  been
specified.  The  Company's backlog  at December  31,  1995 consisted  of product
shipments expected to be delivered  during calendar year 1996. However,  because
of the possibility of customer changes in delivery schedules or cancellations of
orders,   the  Company's  backlog   as  of  any  particular   date  may  not  be
representative of actual sales for any succeeding period.
 
RESEARCH AND DEVELOPMENT
 
    Constant technological  change,  fierce  competition  and  a  high  rate  of
technical  obsolescence are  key characteristics of  the semiconductor equipment
industry. Genus' future  prospects depend in  part on the  Company's ability  to
broaden  its market acceptance  by differentiating its products  on the basis of
production-worthiness, technical capability, productivity, particle control, and
customer support. To maintain close relationships with its customers and  remain
responsive  to their requirements,  continued investment is  needed for research
and development. In 1993, 1994 and 1995, the Company's research and  development
expenditures  were approximately $7.8  million, $9.0 million  and $12.3 million,
respectively.
 
    As part of its research and development program, the Company has established
technical research relationships with certain major semiconductor  manufacturers
to further enhance its products for advanced ULSI devices.
 
COMPETITION
 
    The   Company  believes  that  the  principal  competitive  factors  in  the
semiconductor equipment market are product performance, quality and reliability,
wafer  throughput,   customer   support,   equipment   automation,   price   and
relationships.
 
                                       4
<PAGE>
    Genus  competes with a number of companies which historically have had wider
name  recognition,   broader  product   acceptance  within   the  industry   and
substantially  greater resources. In  addition, the rapid  rate of technological
change in the industry creates opportunities for firms to enter this market  and
apply  new technologies to meet its  needs. Accordingly, the Company anticipates
that it will  face competition in  the domestic as  well as foreign  marketplace
from both well-established and new competitors.
 
    In  the  ion implantation  marketplace, the  Company's MeV  ion implantation
system competes with one  other MeV system. The  Company believes that its  high
energy  MeV  system  currently  has certain  technological  advantages  over the
competing MeV  system.  Genus has  new  applications for  MeV  ion  implantation
technology  which it believes will  see widespread use in  the future since they
enable significant manufacturing cost reduction and improved integrated  circuit
performance.  The Company faces  direct competition from  Eaton Corporation. The
presence of Eaton in the MeV market place has continued to increase during 1995.
There can  be no  assurance that  competition in  the Company's  particular  MeV
product market will not intensify or that Genus' technical advantages may not be
reduced or lost as a result of technical advances made by competitors or changes
in semiconductor processing technology.
 
    In  the CVD market, Genus  competes with other producers  of CVD systems, as
well as alternative methods  of deposition, such as  sputtering, and thin  films
other  than tungsten silicide. The Company  faces direct competition in tungsten
silicide from Applied  Materials, Inc. and  Tokyo Electron, Ltd.  The impact  of
their  presence in the CVD tungsten silicide market continued to increase during
1995. There can  be no  assurance that levels  of competition  in the  Company's
particular  CVD  product  market will  not  intensify or  that  Genus' technical
advantages may not be reduced or lost as a result of technical advances made  by
competitors or changes in semiconductor processing technology.
 
MANUFACTURING AND SUPPLIERS
 
    Most  of the components for the  Company's CVD tungsten silicide systems are
produced in subassemblies  by independent  domestic suppliers  according to  the
Company's   design  and  procurement  specifications.  Many  components  of  the
Company's MeV ion implantation systems  are also acquired as subassemblies  from
outside  domestic  vendors.  The  Company  anticipates  that  the  use  of  such
subassemblies  will  continue  to  increase  in  order  to  achieve   additional
manufacturing  efficiencies. The Company has alternate sources of supply for the
components and  parts  purchased  from outside  suppliers,  except  for  certain
components  used in its CVD tungsten and MeV ion implantation products which are
presently available only from single sources. To date, the Company has been able
to obtain adequate supplies of such components in a timely manner from  existing
sources.  However,  the  inability to  develop  alternate sources  or  to obtain
sufficient source components as required in  the future, could result in  delays
of product shipments which could have a material adverse affect on the Company's
operating results.
 
    The  Company's thin film CVD operation  is located in Sunnyvale, California,
while its MeV ion implantation technology manufacturing operation is located  in
Newburyport, Massachusetts.
 
INTELLECTUAL PROPERTY
 
    The  Company believes that because of  the rapid technological change in the
industry its  future prospects  will  depend primarily  upon the  expertise  and
creative skills of its personnel in process technology, new product development,
marketing,  application  engineering, and  product  engineering, rather  than on
patent protection. Nevertheless,  the Company  has a policy  to actively  pursue
domestic  and foreign  patent protection  to cover  technology developed  by the
Company. The Company's current patents include technology relating to cold  wall
CVD  of tungsten silicide, ion beam formation, high energy ion acceleration, ion
implant angle control, wafer cleaning, and wafer heating and handling in vacuum.
 
                                       5
<PAGE>
    In 1987, the Company's Ion Technology Division (formerly General Ionex)  and
Eaton  Corporation entered into  a licensing agreement  whereby the Company uses
certain ion implantation related technology.
 
EMPLOYEES
 
    As of December  31, 1995,  the Company employed  319 people  on a  full-time
basis.   The  Company  believes  that  its  relations  with  its  employees  are
satisfactory. None  of the  employees  are covered  by a  collective  bargaining
agreement.
 
ENVIRONMENTAL REGULATION
 
    Federal,  state and local regulations  impose various environmental controls
on the discharge of chemicals and  gases used in the manufacturing process.  The
Company   believes  that   its  activities  conform   to  present  environmental
regulations. Increasing  public  attention has,  however,  been focused  on  the
environmental  impact  of semiconductor  operations. While  the Company  has not
experienced any materially adverse effects  on its operations from  governmental
regulations, there can be no assurance that changes in such regulations will not
impose  the need  for additional  capital equipment  or other  requirements. Any
failure by  the  Company  to  adequately restrict  the  discharge  of  hazardous
substances   could  subject  it  to  future   liabilities  or  could  cause  its
manufacturing operations to be suspended.
 
ITEM 2. PROPERTIES
 
    The Company's executive offices and thin film manufacturing and research and
development operations  are  presently located  in  one building  in  Sunnyvale,
California,   totalling  approximately  100,500   square  feet.  The  California
facilities are occupied under a lease  expiring in October 2002, with a  current
annual  rental expense of approximately $650,000. Genus' Ion Technology Division
is located in Newburyport, Massachusetts. This facility, totalling approximately
25,000 square feet,  is occupied by  the Company under  a month-to-month  lease,
with  a current  annual rental expense  of approximately  $175,000. In September
1995, the Company entered into an agreement to lease a new facility for the  Ion
Technology  Division. The Division  expects to move  to the new  facility by May
1996. This  facility,  totalling  approximately  70,000  square  feet,  will  be
occupied  under a lease expiring  in May 2017, with  an annual rental expense of
approximately $805,000. The  Company also  leases sales and  support offices  in
Seoul,  South Korea; Tokyo,  Japan; Melbourn, Herts,  England; Evry, France; and
Rockville Center, New York. The Company owns substantially all of the  machinery
and equipment used in its facilities. See Notes 3 and 8 of Notes to Consolidated
Financial  Statements.  The Company  believes that  its existing  facilities and
capital equipment  are  adequate  to  meet its  current  requirements  and  that
suitable additional or substitute space will be available as needed.
 
ITEM 3.  LEGAL PROCEEDINGS
 
    None.
 
ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS
 
    None.
 
                                       6
<PAGE>
                                    PART II
 
ITEM 5.  MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED STOCKHOLDER
MATTERS.
 
    The  principal market in which the Company's  common stock is traded and the
related security holder matters  are set forth under  the caption "Common  Stock
Information"  on page  28 of the  Company's 1995 Annual  Report to Shareholders.
This information is incorporated  herein by this  reference thereto. The  market
value of the Company's common stock on March 28, 1996 was $5.75 per share.
 
ITEM 6.  SELECTED FINANCIAL DATA.
 
    Selected  financial data of the  Company for the years  1991 through 1995 is
included under the caption "Selected Consolidated Financial Data" on page 10  of
the   Company's  1995  Annual  Report   to  Shareholders.  This  information  is
incorporated herein by this reference thereto.
 
ITEM 7.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
OF OPERATIONS
 
    The information  required  by  this  Item  is  included  under  the  caption
"Management's  Discussion  and Analysis  of Financial  Condition and  Results of
Operations"  on  pages  11  to  13  of  the  Company's  1995  Annual  Report  to
Shareholders. This information is incorporated herein by this reference thereto.
 
ITEM 8.  FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA
 
    The  Company's consolidated financial statements  and related notes thereto,
together with the Report of  Independent Accountants and the selected  quarterly
financial  data of the Company are presented on  pages 14 to 27 of the Company's
1995 Annual Report to Shareholders.  This information is incorporated herein  by
this reference thereto.
 
ITEM 9.  CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
FINANCIAL DISCLOSURE
 
    None.
                            ------------------------
 
    With  the exception  of the information  incorporated by  reference from the
Company's 1995 Annual Report  to Shareholders in  Parts II and  IV of this  Form
10-K, the Company's 1995 Annual Report to Shareholders is not to be deemed filed
as a part of this Report.
                            ------------------------
 
                                       7
<PAGE>
                                    PART III
 
    Certain information required by Part III is omitted from this Report in that
the Registrant will file a definitive proxy statement pursuant to Regulation 14A
relating  to the  Registrant's 1996 Annual  Meeting of  Shareholders (the "Proxy
Statement") not later than 120 days after the end of the fiscal year covered  by
this  Report, and certain information included therein is incorporated herein by
reference.
 
ITEM 10.  DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT
 
    The information  regarding  directors  and nominees  for  directors  of  the
Company is incorporated by reference to the Company's Proxy Statement.
 
    The  executive officers of the Company, who  are elected by and serve at the
discretion of the Board of Directors, and  their ages at March 28, 1996, are  as
follows:
 
<TABLE>
<CAPTION>
                NAME                      AGE                                 POSITION
- ------------------------------------      ---      ---------------------------------------------------------------
<S>                                   <C>          <C>
William W. R. Elder.................          57   Chairman and Chief Executive Officer
Kent L. Robertson...................          54   Executive Vice President, Chief Financial Officer and Secretary
James M. Burns......................          49   Executive  Vice  President  and  General  Manager,  Thin  Films
                                                    Division
John E. Aldeborgh...................          39   Vice President and General Manager, Ion Division
William D. Cole.....................          41   Vice President, Sales
Kevin C. Conlon.....................          42   Vice President, Marketing
Thomas E. Seidel....................          60   Vice President, Chief Technical Officer
Ernest P. Quinones..................          36   Corporate Controller, Chief Accounting Officer, and Treasurer
Mario M. Rosati.....................          49   Assistant Secretary
</TABLE>
 
    Except as  set  forth  below,  all  of  the  executive  officers  have  been
associated  with the Company in their present  or other capacities for more than
the past five years. Officers are elected annually by the Board of Directors and
serve at the discretion  of the Board. There  are no family relationships  among
executive officers of the Company.
 
    Mr.  Elder, a founder of the Company,  served as President and as a director
of the Company  from its organization  in November 1981  through April 1990.  In
April  1990, he was named  Chairman of the Board,  President and Chief Executive
Officer. Mr. Elder currently serves as Chairman of the Board and Chief Executive
Officer of the Company.
 
    Mr. Robertson joined the Company in  June 1995 as Executive Vice  President,
Chief  Financial Officer and Secretary of the Company. From January 1994 to June
1995 and  from  February 1987  to  March 1992,  Mr.  Robertson was  Senior  Vice
President,   Chief  Financial  Officer  and   Secretary  of  Pyramid  Technology
Corporation, a manufacturer  of computer  servers. From March  1992 to  December
1993,  he was associated with RasterOps Corporation, a manufacturer of truecolor
photo realistic imaging  systems, as Executive  Vice President, Chief  Financial
Officer  and Secretary. From  September 1980 to  January 1987 he  served as Vice
President, Chief  Financial  Officer and  Secretary  of Telco  Systems  Inc.,  a
manufacturer of telecommunications equipment.
 
    Mr.  Burns joined the  Company in February 1995  as Executive Vice President
and General Manager of  the Company's Thin Films  Division. From August 1992  to
January  1995,  Mr. Burns  was with  Hughes Network  Systems, a  manufacturer of
advance commercial telecommunications, as Assistant Vice President,  Operations.
From December 1991 to July 1992, he was associated with Trimble Navigation, LTD,
a manufacturer of navigational systems, as Director of Customer Satisfaction and
Quality.  From  November 1990  to July  1991,  Mr. Burns  was Vice  President of
Operations with
 
                                       8
<PAGE>
Domestic  Automation  Company,  a  manufacturer  of  computerized  metering  and
communication  products. From  May 1972  to October  1990, he  served in various
positions  at   Hewlett-Packard   Company,  a   computer   and   instrumentation
manufacturer, most recently as Group Manufacturing Manager, Peripherals Group.
 
    Mr.  Aldeborgh joined the Company in June  1989 as Director of Operations of
the Company's  Ion  Technology  Division.  Mr.  Aldeborgh  has  served  as  Vice
President  and General  Manager of  this Division  since January  1993. Prior to
joining the Company, Mr. Aldeborgh was  with LTX Corporation, a manufacturer  of
semiconductor  test equipment, from May 1983  to May 1989, in various management
positions,  most  recently   as  Director  of   Manufacturing  for  its   Linear
Manufacturing Division.
 
    Mr. Cole joined the Company in January 1993 as Vice President of Sales. From
December  1984  to  December 1992,  he  was  associated with  Teradyne,  Inc., a
semiconductor equipment manufacturer, in various sales positions, most  recently
as National Sales Manager.
 
    Mr.  Conlon joined the Company in April 1992 as Vice President of Marketing.
From February  1990 to  April 1992,  Mr. Conlon  held marketing  and  operations
management  positions  at  Novellus  Systems,  Inc.,  a  semiconductor equipment
manufacturer, most recently  as Director  of Manufacturing. From  April 1980  to
February  1990, he  served in  various positions  at Applied  Materials, Inc., a
semiconductor  equipment  manufacturer,  most  recently  as  Product   Marketing
Manager, Implant Division.
 
    Mr.  Seidel joined the Company in January  1996, as Vice President and Chief
Technical Officer. From  July 1988 to  January 1996, Mr.  Seidel was  associated
with SEMATECH, a Semiconductor-Industry Consortium, in various senior management
positions,  most  recently  as  Chief  Technologist  and  Director  of Strategic
Technology. From March  1987 to July  1988, Mr. Seidel  was associated with  the
University  of  California at  Santa Barbara,  as  head of  the Microelectronics
department. From February 1985 to March 1987, Mr. Seidel was employed with  J.C.
Schumacher  Co., a semiconductor equipment manufacturer, most recently as Senior
Vice President of Technology.  From June 1966 to  February 1985, Mr. Seidel  was
associated   with  AT&T  Bell  Laboratories   in  various  technical  management
positions.
 
    Mr. Quinones joined the  Company in June 1989  as the Company's Director  of
Corporate  Finance. From  October 1991 through  February 1995, he  served as the
Company's Corporate  and  Thin  Films  Division  Controller.  Mr.  Quinones  was
appointed Genus' Corporate Controller, Chief Accounting Officer and Treasurer in
March  1995.  Prior to  joining the  Company,  Mr. Quinones  was with  Coopers &
Lybrand L.L.P., a public accounting firm, from July 1982 to May 1989, in various
audit positions, most recently as Audit Manager.
 
    Mr. Rosati has been Assistant Secretary and a director of the Company  since
the  Company's inception in  November 1981 to  June 1995. From  July 1995 to the
present, Mr. Rosati has been the  Company's Assistant Secretary. He is a  member
of Wilson, Sonsini, Goodrich & Rosati, P.C., general counsel to the Company.
 
ITEM 11.  EXECUTIVE COMPENSATION
 
    The  information required by  this Item is incorporated  by reference to the
Company's Proxy Statement.
 
ITEM 12.  SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT
 
    The information required by  this Item is incorporated  by reference to  the
Company's Proxy Statement.
 
ITEM 13.  CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS
 
    The  information required by  this Item is incorporated  by reference to the
Company's Proxy Statement.
 
                                       9
<PAGE>
                                    PART IV
 
ITEM 14.  EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K
 
    (a)  The following documents are filed as a part of this Report:
 
    1.  FINANCIAL STATEMENTS.   The following Consolidated Financial  Statements
of  Genus,  Inc.  and  Report of  Independent  Accountants  are  incorporated by
reference to  pages 14  through 27  of the  Registrant's 1995  Annual Report  to
Shareholders:
 
    Consolidated Balance Sheets - December 31, 1995 and 1994
 
    Consolidated Statements of Operations - Years Ended December 31, 1995, 1994
    and 1993
 
    Consolidated Statements of Shareholders' Equity - Years Ended December 31,
    1995, 1994 and 1993
 
    Consolidated Statements of Cash Flows - Years Ended December 31, 1995, 1994
    and 1993
 
    Notes to Consolidated Financial Statements
 
    Report of Independent Accountants
 
    2.    FINANCIAL  STATEMENT  SCHEDULES.   The  following  financial statement
schedules of Genus, Inc. for  the years ended December  31, 1995, 1994 and  1993
are  filed as  part of this  Report and should  be read in  conjunction with the
Consolidated Financial Statements of Genus, Inc.
 
<TABLE>
<CAPTION>
           SCHEDULE                                                      PAGE
           ---------------------------------------------------------     -----
<S>        <C>                                                        <C>
           Report of Independent Accountants........................         S-1
II --      Valuation and Qualifying Accounts........................         S-2
</TABLE>
 
    Schedules not listed above have been omitted because they are not applicable
or are not  required or  the information  required to  be set  forth therein  is
included in the Consolidated Financial Statements or Notes thereto.
 
    3.   EXHIBITS.   The Exhibits listed  on the accompanying  Index to Exhibits
immediately following the financial statement schedules are filed as part of, or
incorporated by reference into, this Report.
 
    4.  REPORTS ON FORM 8-K.  No  reports on Form 8-K were filed by the  Company
during the fiscal quarter ended December 31, 1995.
 
                                       10
<PAGE>
                                   SIGNATURES
 
    Pursuant  to  the requirements  of  Section 13  or  15(d) of  the Securities
Exchange Act of 1934, the Registrant has duly caused this Report to be signed on
its behalf  by  the undersigned,  thereunto  duly  authorized, in  the  City  of
Sunnyvale, State of California, on the 28th day of March, 1996.
 
                                          GENUS, INC.
 
                                          By:       /s/ WILLIAM W. R. ELDER
 
                                             -----------------------------------
                                                     William W. R. Elder
                                                  CHAIRMAN OF THE BOARD AND
                                                   CHIEF EXECUTIVE OFFICER
 
                               POWER OF ATTORNEY
 
    KNOW  ALL MEN  BY THESE PRESENTS,  that each person  whose signature appears
below constitutes  and appoints,  William W.  R. Elder  and Kent  L.  Robertson,
jointly   and  severally,  his   attorneys-in-fact,  each  with   the  power  of
substitution, for him in any and all capacities, to sign any amendments to  this
Report  on Form  10-K, and  to file  the same,  with exhibits  thereto and other
documents in connection therewith, with the Securities and Exchange  Commission,
hereby  ratifying and confirming all that each of said attorneys-in-fact, or his
substitute or substitutes, may do or cause to be done by virtue hereof.
 
    Pursuant to the requirements  of the Securities Exchange  Act of 1934,  this
Report  has  been  signed  below  by the  following  persons  on  behalf  of the
Registrant and in the capacities and on the dates indicated.
 
<TABLE>
<C>                                                     <S>                               <C>
                         NAME                                        TITLE                         DATE
- ------------------------------------------------------  --------------------------------  -----------------------
 
               /s/ WILLIAM W. R. ELDER                  Chairman, Chief Executive
     -------------------------------------------         Officer and Director (Principal      March 28, 1996
                 William W. R. Elder                     Executive Officer)
 
                /s/ KENT L. ROBERTSON                   Executive Vice President, Chief
     -------------------------------------------         Financial Officer, Secretary         March 28, 1996
                  Kent L. Robertson                      (Principal Financial Officer)
 
                                                        Corporate Controller, Chief
                  ERNEST P. QUINONES                     Accounting Officer and
     -------------------------------------------         Treasurer (Principal Accounting      March 28, 1996
                  Ernest P. Quinones                     Officer)
 
                  STEPHEN F. FISHER
     -------------------------------------------        Director                              March 25, 1996
                  Stephen F. Fisher
 
                 G. FREDERICK FORSYTH
     -------------------------------------------        Director                              March 28, 1996
                 G. Frederick Forsyth
 
                    TODD S. MYHRE
     -------------------------------------------        Director                              March 28, 1996
                    Todd S. Myhre
 
                   MARIO M. ROSATI
     -------------------------------------------        Director                              March 28, 1996
                   Mario M. Rosati
</TABLE>
 
                                       11
<PAGE>
                                                                    EXHIBIT 23.1
 
                       CONSENT OF INDEPENDENT ACCOUNTANTS
 
    We  consent to the incorporation by reference in the registration statements
of Genus, Inc. and subsidiaries on Form S-8 (File Nos. 33-28394 and 33-38657) of
our reports dated January 26, 1996, on our audits of the consolidated  financial
statements  and financial statement schedules of Genus, Inc. and subsidiaries as
of December 31, 1995  and 1994, and for  each of the three  years in the  period
ended  December 31, 1995,  which reports are  included in this  Annual Report on
Form 10-K.
 
                                           Coopers & Lybrand L.L.P.
 
San Jose, California
March 27, 1996
 
                                       12
<PAGE>
                                  GENUS, INC.
                           ANNUAL REPORT ON FORM 10-K
                          YEAR ENDED DECEMBER 31, 1995
                               INDEX TO EXHIBITS
 
<TABLE>
<CAPTION>
                                                                                                         SEQUENTIALLY
  EXHIBIT                                                                                                  NUMBERED
    NO.                                             DESCRIPTION                                              PAGE
- -----------  -----------------------------------------------------------------------------------------  ---------------
 
<C>          <S>                                                                                        <C>
       3.1   Restated Articles of Incorporation of Registrant(2)......................................            --
 
       3.2   By-laws of Registrant, as amended (4)....................................................            --
 
       4.1   Common Shares Rights Agreement, dated as of April 27, 1990, between Registrant and Bank
              of America, N.T. and S.A., as Rights Agent(6)...........................................            --
 
      10.3   Lease dated December 6, 1985 for Registrant's facilities at 4 Mulliken Way, Newburyport,
              Massachusetts, and amendment and extension of lease dated March 17, 1987(1).............            --
 
      10.6   Lease dated June 15, 1988 for Registrant's facilities at 100 Merrick Road, West Building,
              Rockville Center, New York (1)..........................................................            --
 
      10.7   Assignment of Lease dated April 1986 for Registrant's facilities at Unit 11A Melbourn
              Science Park, Melbourn, Hertz, England(1)...............................................            --
 
      10.8   Registrant's 1981 Incentive Stock Option Plan, as amended (3)............................            --
 
     10.10   Registrant's 1989 Employee Stock Purchase Plan, as amended (7)...........................            --
 
     10.11   International Distributor Agreement dated November 23, 1987 between General Ionex
              Corporation and Innotech Corporation(1).................................................            --
 
     10.12   Distributor/Representative Agreement dated August 1, 1984 between Registrant and Aju Exim
              (formerly Spirox Holding Co./You One Co. Ltd.)(1).......................................            --
 
     10.15   Exclusive Sales and Service Representative Agreement dated October 1, 1989 between
              Registrant and AVBA Engineering Ltd(5)..................................................            --
 
     10.16   Exclusive Sales and Service Representative Agreement dated as of April 1, 1990 between
              Registrant and Indosale PVT Ltd(5)......................................................            --
 
     10.18   License Agreement dated November 23, 1987 between Registrant and Eaton Corporation(1)....            --
</TABLE>
 
                                      I-1
<PAGE>
 
<TABLE>
<CAPTION>
                                                                                                         SEQUENTIALLY
  EXHIBIT                                                                                                  NUMBERED
    NO.                                             DESCRIPTION                                              PAGE
- -----------  -----------------------------------------------------------------------------------------  ---------------
 
<C>          <S>                                                                                        <C>
     10.21   EXCLUSIVE SALES AND SERVICE REPRESENTATIVE AGREEMENT DATED MAY 1, 1989 BETWEEN REGISTRANT
              AND SPIROX TAIWAN, LTD.(4)..............................................................            --
 
     10.22   LEASE DATED APRIL 7, 1992 BETWEEN REGISTRANT AND THE JOHN A. AND SUSAN R. SOBRATO 1979
              REVOCABLE TRUST FOR PROPERTY AT 1139 KARLSTAD DRIVE, SUNNYVALE, CALIFORNIA(8)...........            --
 
     10.24   TERM LOAN AGREEMENT DATED APRIL 17, 1992 BETWEEN THE REGISTRANT AND SILICON VALLEY
              BANK(8).................................................................................            --
 
     10.25   ASSET PURCHASE AGREEMENT, DATED MAY 28, 1992, BY AND BETWEEN THE REGISTRANT AND ADVANTAGE
              PRODUCTION TECHNOLOGY, INC.(9)..........................................................            --
 
     10.26   LICENSE AND DISTRIBUTION AGREEMENT, DATED SEPTEMBER 8, 1992, BETWEEN THE REGISTRANT AND
              SUMITOMO MUTUAL INDUSTRIES, LTD.(10).................................................. .            --
 
     10.28   MORTGAGE DATED FEBRUARY 1, 1993 WITH BAY BANK MIDDLESEX FOR REGISTRANT'S FACILITIES AT
              ONE MERRIMACK LANDING, UNIT 26, NEWBURYPORT, MASSACHUSETTS (11).........................            --
 
     10.29   REVOLVING LOAN AGREEMENT BETWEEN THE REGISTRANT AND SILICON VALLEY BANK DATED MAY 15,
              1994 (12)...............................................................................            --
 
     10.30   LEASE AGREEMENT DATED AS OF OCTOBER 1995 FOR REGISTRANT'S FACILITIES AT LOT 62 STANLEY
              TUCKER DRIVE, NEWBURYPORT, MASSACHUSETTS................................................            --
 
      11.1   COMPUTATION OF NET INCOME/LOSS PER SHARE.................................................            --
 
      13.1   ANNUAL REPORT TO SHAREHOLDERS FOR THE YEAR ENDED DECEMBER 31, 1995 (TO BE DEEMED FILED
              ONLY TO THE EXTENT REQUIRED BY THE INSTRUCTIONS TO EXHIBITS FOR REPORTS ON FORM 10-K)...            --
 
      22.1   SUBSIDIARIES OF REGISTRANT(10)...........................................................            --
 
      23.1   CONSENT OF INDEPENDENT ACCOUNTANTS (INCLUDED ON PAGE 12).................................            --
 
      24.1   POWER OF ATTORNEY (INCLUDED ON PAGE 11)..................................................            --
 
      27.1   FINANCIAL DATA SCHEDULE
</TABLE>
 
- ------------------------
 
(1)  Incorporated   by  reference   to  the  exhibit   filed  with  Registrant's
     Registration Statement on Form S-1 (No. 33-23861) filed August 18, 1988 and
     amended on September 21, 1988, October 5, 1988, November 3, 1988,  November
     10,  1988  and  December  15,  1988,  which  Registration  Statement became
     effective November 10, 1988.
 
(2)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1988.
 
(3)  Incorporated by  reference  to  the exhibit  filed  with  the  Registrant's
     Registration Statement on Form S-8 filed January 17, 1991.
 
(4)  Incorporated  by  reference  to  the exhibit  filed  with  the Registrant's
     Registration Statement on Form S-1 (No. 33-28755) filed on May 17, 1989 and
     amended May 24, 1989, which Registration Statement became effective May 24,
     1989.
 
(5)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1989.
 
(6)  Incorporated by  reference  to  the exhibit  filed  with  the  Registrant's
     Quarterly Report on Form 10-Q for the quarter ended September 30, 1990.
 
(7)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1990.
 
                                      I-2
<PAGE>
(8)  Incorporated  by  reference  to  the exhibit  filed  with  the Registrant's
     Quarterly Report on Form 10-Q for the quarter ended June 30, 1992.
 
(9)  Incorporated by reference to the exhibit filed with the Registrant's Report
     on Form 8-K dated June 12, 1992.
 
(10) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 21, 1992.
 
(11) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1993.
 
(12) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1994.
 
                                      I-3

<PAGE>
                                                                   EXHIBIT 10.30
 
                                     LEASE
 
    THIS   LEASE  is  made  this  30  day   of  October  1995,  by  and  between
BERKSHIRE-NEWBURY LIMITED PARTNERSHIP, a Massachusetts limited partnership  with
a  principal  office at  1500 Main  Street,  Springfield, Massachusetts,  or its
Assignee, ("Landlord"), and GENUS, INC.,  a California corporation with a  place
of business at 4 Mulliken Way, Newburyport, Massachusetts ("Tenant").
 
                              W I T N E S S E T H:
 
1.  PREMISES
    Landlord  hereby leases  to Tenant and  Tenant hereby  leases from Landlord,
upon and  subject  to the  terms  and provisions  of  this Lease,  the  building
premises  consisting of approximately Seventy Thousand (70,000) square feet (the
"Building") and the real estate on which the building is to be located, which is
Lot 62 Stanley  Tucker Drive,  Newburyport, Massachusetts  (the "Property"),  as
more particularly described on EXHIBIT A attached hereto and incorporated herein
(the Building and the Property are collectively called the "Premises").
 
2.  TERM OF LEASE
    The  primary term of this Lease ("Initial Term") shall be for seventeen (17)
years commencing on the Commencement Date (as hereinafter defined) and ending on
the day immediately preceding the 18th anniversary of the Commencement Date.
 
    Provided Tenant  is not  in default  under this  Lease at  the time  of  its
exercise  of any option to extend. Tenant shall have the option of extending the
term of this Lease for four (4)  additional periods of five (5) years each  upon
written  notice to  Landlord at least  nine (9) months  prior to the  end of the
Initial Term of  this Lease  and upon  not less  than three  (3) months  written
notice  prior to the expiration of each  option period hereunder. As used herein
the term "Lease Term" shall mean the Initial Term plus any extension of the term
of this Lease in accordance with this paragraph.
 
    If the  rent during  any extended  term is  determined by  appraisal and  if
Tenant  does not, in its sole  discretion, approve the rental amount established
by such  appraisal, Tenant  may rescind  its exercise  of the  Option by  giving
Landlord  written notice of such election to  rescind within ten (10) days after
receipt of all appraisals, but only if  all of the following are met: If  Tenant
rescinds  its exercise of the Option, then  (i) the Lease shall terminate on the
ninetieth (90th) day  after Tenant's  notice of rescission  or on  the date  the
Lease  would have otherwise  terminated absent Tenant's  exercise of the Option,
whichever date is later; and (ii) Tenant shall pay all costs and expenses of the
appraisal, and (iii) Tenant shall pay rent during that ninety (90) day period in
the amount Tenant would have paid for that period, had Tenant not rescinded  the
extension.
 
3.  RENT
    (a)   BASE RENT.  From and  after the Commencement Date (as defined herein),
Tenant agrees to  pay to Landlord  at the following  address: 1500 Main  Street,
Suite  2012, Springfield, MA 01115, or  as directed by Landlord, without notice,
demand, offset or deduction except as provided herein, on the Commencement  Date
and  thereafter, semiannually, in advance, on the  first day of January and July
of each and every calendar year during the Lease Term, prorated for any  partial
year,  one-half  of the  following sums  equal  to the  annual base  rent ("Base
Rent"):
 
<TABLE>
<CAPTION>
                      LEASE YEAR*
                      INITIAL TERM                                            ANNUAL BASE RENT
- --------------------------------------------------------  --------------------------------------------------------
<S>                                                       <C>
For Lease Years 1-5                                       $805,000 +/- (12.3846% times (Construction Cost** minus
                                                           $6,500,000))***
For Lease Years 6-10                                      $925,750 +/- (14.2423% times (Construction Cost** minus
                                                           $6,500,000))***
For Lease Years 11-15                                     $975,038 +/- (14.9544% times (Construction Cost** minus
                                                           $6,500,000))***
For Lease Years 16-17                                     $805,000 +/- (12.3846% times (Construction Cost** minus
                                                           $6,500,000))***
</TABLE>
 
<PAGE>
3.  RENT (CONTINUED)
 
<TABLE>
<CAPTION>
                      LEASE YEAR*
                      OPTION TERM                                             ANNUAL BASE RENT
- --------------------------------------------------------  --------------------------------------------------------
<S>                                                       <C>
For First Option Term (Lease Years 18-22)                 Greater of (a) 95% of fair market value****
For Second Option Term (Lease Years 23-27)
For Third Option Term (Lease Years 28-32)                 (as determined on the first day of each option term), or
For Fourth Option Term (Lease Years 33-37)                 (b) the Base Rent payable for the 1st year of the
                                                           Initial Term
</TABLE>
 
    As used  in  this Section  the  following  terms shall  have  the  following
meanings:
 
   *"LEASE  YEAR"  is  a  year  commencing  on  the  Commencement  Date  (or  an
    anniversary thereof) and ending on  the date immediately preceding the  next
    succeeding anniversary of the Commencement Date.
 
  **"CONSTRUCTION  COST"  is  defined  in  the  Improvement  Agreement  executed
    concurrently herewith by Landlord and Tenant.
 
 ***When the Construction Cost has been  determined, the total thereof shall  be
    compared  to $6,500,000 and  the Annual Rent  for the Initial  Term shall be
    adjusted  in  accordance  with  the   foregoing  formulas,  upward  if   the
    Construction Cost exceeds $6,500,000, and downward, if the Construction Cost
    is less than $6,500,000.
 
****"FAIR  MARKET VALUE" shall be determined at the time of Tenant's exercise of
    each option to extend.  Upon Tenant's written notice  of the exercise of  an
    option  to extend, Landlord and Tenant  shall attempt to determine and agree
    on fair market value rental for  the Premises. Fair market value shall  mean
    that  rental  rate  currently  being  charged  for  comparable manufacturing
    facilities in  the region,  exclusive of  the Specialized  Improvements,  as
    defined  in EXHIBIT B or as otherwise designated pursuant to the Improvement
    Agreement (which are constructed  by Landlord, but  amortized in the  Annual
    Rent  during the Initial  Term), and exclusive of  any other improvements in
    the Premises  that are  installed after  the Substantial  Completion of  the
    Improvements (as defined in the Improvements Agreement) at Tenant's cost. In
    the  event Landlord and Tenant cannot agree  on said fair market value, each
    party shall select a MAI appraiser with experience in commercial  valuations
    of this nature in the region who shall attempt to agree upon the fair market
    value  within  20 days  and, if  they  cannot agree  the two  (2) appraisers
    selected shall select a third. In such events the three (3) appraisers shall
    each determine fair market value rental for the Premises and the average  of
    the  three (3) shall constitute fair market  value for purposes of Base Rent
    during said option term. The costs of such appraisers shall be borne equally
    by each party.
 
    (b)  COMMENCEMENT  DATE.  Tenant's  obligation to pay  rent hereunder  shall
commence  on the earlier of  when Landlord delivers to  Tenant the Premises with
the Improvements Substantially Completed as defined in the Improvement Agreement
or Tenant actually  occupies the  Premises for  the purposes  of conducting  its
manufacturing business (herein the "Commencement Date").
 
    (c)   ADDITIONAL RENT.  Tenant shall pay all expenses related to the repair,
replacement (structural  or otherwise),  the operation  and maintenance  of  the
Premises,  including  without  limitation  real  property  taxes  and  insurance
premiums, as additional rent hereunder (the "Additional Rent").
 
    (d)  ABSOLUTE NET LEASE.  It is  the intention of the parties that the  rent
payable  hereunder shall be absolutely net to Landlord, so that this Lease shall
yield to Landlord the  net annual rent specified  herein during the Lease  Term,
and that all costs, expenses and obligations of every kind and nature whatsoever
relating  to the Premises and  its physical structures shall  be paid by Tenant.
Without limiting any other provision of  this Lease, it is expressly  understood
and  agreed  that  all  repairs,  replacements,  real  estate  taxes,  operating
expenses, insurance premiums, and all other  amounts that Tenant is required  to
pay hereunder, together with all interest and penalties that may accrue thereon,
shall be deemed to be Additional Rent, and in the event of nonpayment thereof by
Tenant, Landlord
 
                                       2
<PAGE>
3.  RENT (CONTINUED)
shall  have all of the rights and  remedies with respect thereto as would accrue
to Landlord for nonpayment  of Base Rent.  As used in  this Lease, "Rent"  shall
mean  the Base Rent plus Additional Rent.  It is expressly understood and agreed
that Landlord shall have no obligation  for any cost or expense associated  with
the Premises during the Initial Term of the Lease or any extensions thereof.
 
    (e)   LIMITATION ON  EXPENSES.  Notwithstanding anything  to the contrary in
this Lease or the Improvement Agreement, Landlord at its sole expense shall  pay
and be solely responsible for the following "Costs":
 
       (i)   LOSSES CAUSED BY OTHERS.   Costs occasioned by the act, omission or
       violation of Law by Landlord or its, agents, employees or contractors, or
    by the Landlord's or its contractor's violation of this Lease or any loan or
    construction contract relating to this Lease or the Improvements.
 
       (ii)  INSURANCE, CASUALTIES AND CONDEMNATIONS.   Except to the extent  of
       any  shortfall in  insurance proceeds  caused by  Tenant's breach  of its
    obligations under Section  11, Costs  occasioned by  fire, acts  of God,  or
    other  casualties  and Costs  occasioned  by the  exercise  of the  power of
    eminent domain.
 
       (iii)  CAPITAL IMPROVEMENTS.  The Construction Costs or any other cost or
       expenses incurred  by  the  Landlord to  construct  the  Improvements  in
    accordance with the Improvements Agreement.
 
       (iv)   REIMBURSABLE EXPENSES.   Costs for  which Landlord has  a right of
       reimbursement from others.
 
       (v)   LEASING EXPENSES.   Fees,  commissions, attorneys'  fees, Costs  or
       other  disbursements  incurred in  connection  with negotiations  of this
    Lease or any financing agreement  or construction agreement relating to  the
    Improvements.
 
       (vi)  RESERVES.  Depreciation, amortization or other expense reserves.
 
       (vii)   MORTGAGES.   Interest, charges, attorneys'  fees, fees, and other
       charges incurred  by Landlord  in connection  with the  financing of  the
    construction of the Improvements or on any other debt, payments on mortgages
    and rent under ground leases.
 
       (viii)   HAZARDOUS MATERIALS.  Costs incurred to investigate the presence
       of any Hazardous  Material, Costs to  respond to any  claim of  Hazardous
    Material  contamination or  damage, Costs  to remove  any Hazardous Material
    from the Premise, or  the soil, groundwater, air,  or building materials  of
    the  Improvements, and any  judgments or other  Costs incurred in connection
    with any Hazardous  Material exposure or  releases, but only  to the  extent
    caused  that the  Hazardous Material  present on  the Property  or the soil,
    groundwater, surface  water,  air  or  building  materials  thereof  on  the
    Commencement Date.
 
    (f)   LATE CHARGE.   In the event  any Annual Base Rent  payment is not paid
within fifteen (15)  days of  its due  date, Tenant  shall pay  Landlord a  late
charge  equal to two percent  (2%) of such payment  per month, which late charge
shall be deemed to be due and collectible as Additional Rent hereunder.
 
4.  ADDITIONAL RENT -- TAXES, UTILITIES
 
    (a)  Tenant shall  pay, as Additional Rent,  all general and special  taxes,
including  all real estate  taxes, assessments for  local improvements and other
governmental charges  which  may  be  charged, assessed,  or  imposed  upon  the
Premises.  Said payments  shall be  made directly  to the  taxing authority with
evidence of  payment submitted  to  Landlord within  thirty  (30) days  of  such
payment.  Any special assessments  by a governmental authority  may be paid over
time periods acceptable  to said governmental  authority, subject to  Landlord's
reasonable  consent. Landlord  shall forward  all tax  bills to  Tenant upon its
receipt of such bills.
 
                                       3
<PAGE>
4.  ADDITIONAL RENT -- TAXES, UTILITIES (CONTINUED)
    (b)   Tenant shall  pay  all license  fees which  may  be imposed  upon  the
business of Tenant conducted upon the Premises.
 
    (c)   Tenant shall pay, as Additional  Rent and before the same shall become
delinquent, for the maintenance and repair of all grounds, building, parking and
driveways or service roads within the  Premises and all of its requirements  for
utilities,  including, but not  limited to, heat,  electricity, telephone, water
and sewer use.  Tenant shall cause  all such  utility accounts to  be issued  or
transferred into its name immediately upon commencement of this Lease.
 
    (d)   Taxes and charges shall be  equitably adjusted for and with respect to
the first  and last  partial tax  year (if  any) of  the Lease  Term. Where  the
applicable  tax bills and computations are not available prior to the end of the
term hereof, a tentative computation shall be made on the basis of the  previous
year's  taxes payable  by Tenant,  with a  final adjustment  to be  made between
Landlord and Tenant promptly after all bills and computations are available  for
such period.
 
    (e)   Tenant will have the right to contest the amount or validity, in whole
or in part, of any tax  by appropriate proceedings diligently conducted in  good
faith.  Upon the termination of those proceedings, Tenant will pay the amount of
the tax or part of the tax as finally determined, the payment of which may  have
been  deferred  during the  prosecution of  the  proceedings, together  with any
costs, fees, interest,  penalties, or other  related liabilities. Landlord  will
not  be required to join in any  contest or proceedings unless the provisions of
any law or regulations then in effect require that the proceedings be brought by
or in the name of Landlord. In that event, Landlord will join in the proceedings
or permit  them  to be  brought  in its  name;  however, Landlord  will  not  be
subjected  to  any  liability  for  the payment  of  any  costs  or  expenses in
connection with any contest or  proceedings, and Tenant will indemnify  Landlord
against and save Landlord harmless from any of those costs and expenses.
 
    (f)   Tenant will not be obligated to pay local, state or federal net income
taxes assessed  against  Landlord;  local,  state or  federal  capital  levy  of
Landlord;  or sales, excise, franchise, gift, estate, succession, inheritance or
transfer taxes of Landlord.
 
5.  USE OF PROPERTY
 
    (a)   During the  term of  this Lease,  Tenant shall  use the  Premises  for
purposes  of  manufacturing of  components and  equipment for  the semiconductor
industry and  any other  use  permitted by  law  as a  matter  of right  and  in
compliance with all governmental regulations.
 
    (b)  Tenant agrees that during the Lease Term:
 
       (i) No  auction, fire  or bankruptcy  sales may  be conducted  within the
           Premises without the prior written consent of Landlord;
 
       (ii)Tenant shall provide at its expense  for the collection of trash  and
           refuse  on  a timely  basis and  all  refuse shall  be kept  in cans,
    dumpsters and similar appropriate storage at all times;
 
       (iii)
           Tenant shall at all times fully  and adequately heat the Premises  so
           as   to  prevent  damage  to  the  Premises,  the  Building  and  any
    structures, fixtures or equipment located at the Premises;
 
       (iv)Tenant may  place on  the exterior  of the  Premises (including,  but
           without  limitation, windows,  doors and entrance  lobbies) any signs
    provided they shall  be in  compliance with  all zoning,  building or  other
    regulations;
 
       (v) Tenant  shall not perform any act or  carry on any practice which may
           injure the Property or cause any offensive odors or loud noise  other
    than  those necessarily a  function of Tenant's  operations, or constitute a
    nuisance or menace to any other persons;
 
       (vi)Tenant shall  not use  or permit  the  Property to  be used  for  any
           unlawful  purpose and will  obtain all necessary  permits or licenses
    required for its use of the Property;
 
                                       4
<PAGE>
5.  USE OF PROPERTY (CONTINUED)
       (vii)
           Tenant has, at the  termination of this Lease,  the option to  remove
           its  possessions and  possessions of  others (including,  if there is
    then no uncured  Event of Default  under Section 14  hereof all of  Tenant's
    Specialized Improvements, as identified on EXHIBIT B or otherwise designated
    pursuant to the Improvement Agreement), as the same may be amended by Tenant
    from  time to time  and leave the Premises  in the same  condition as at the
    Commencement Date of  the Lease,  excepting only reasonable  wear and  tear,
    damage  by fire or casualty, eminent  domain, Hazardous Materials which were
    not placed on  the Premises by  Tenant, and alterations  which Landlord  has
    previously agreed in writing may be surrendered; and
 
       (viii)
            Tenant shall be responsible at its expense for snow removal from the
           walks, drives, entrances, exits and parking areas on a timely basis.
 
6.  HAZARDOUS SUBSTANCES
 
    (a)    Tenant shall  duly  comply with  the  requirements of  all applicable
environmental, health, safety and sanitation laws, ordinances, codes, rules  and
regulations  and  interpretations and  orders  of regulatory  and administrative
authority with respect to its use, storage, and release of Hazardous Materials.
 
    (b)  Tenant  shall not  use, handle  or store  or dispose  of any  Hazardous
Materials  in or  about the Premises  except as reasonably  required in Tenant's
business judgment  for  its operation  of  its  business and  then  strictly  in
accordance  with all applicable  laws and regulations. If  during the Lease Term
the release  or disposal  of Hazardous  Materials anywhere  on the  Premises  by
Tenant,  its agent, employee, contractor, invitee,  or any other person for whom
Tenant is legally responsible (including, without limitation, a third party  who
comes  onto the surface of  the Premises and releases  a Hazardous Material into
the soil, ground water, surface water, ambient air or building materials of  the
Premises  during  the Lease  Term), results  in (1)  contamination of  the soil,
ambient air, surface water or ground water with Hazardous Materials in excess of
legally permitted levels  ("Tenant's Contamination")  or (2) loss  or damage  to
person(s)  or property,  then Tenant  agrees to  respond in  accordance with the
following paragraph:
 
    Tenant shall (i) notify Landlord immediately of any contamination, claim  of
contamination,  loss  or damage,  and (ii)  after  consultation and  approval by
Landlord, Tenant shall at  its sole expense clean  up Tenant's Contamination  in
full  compliance  with all  applicable statutes,  regulations and  standards. No
consent or approval of Landlord shall in  any way be construed as imposing  upon
Landlord  any liability for the means, methods or manner of removal, containment
or other compliance with applicable law for and with respect to the foregoing.
 
    (c)  In the event that Tenant does not comply with the provisions of Section
6(b), and in  addition to its  other rights hereunder,  Landlord shall have  the
right  (but not the obligation), upon 30 calendar days advance notice to Tenant,
except in the case  of an emergency  (in which case  reasonable notice shall  be
given  to the extent  reasonably possible), to  cause the illegal  release to be
contained and/or  removed  on behalf  of  Tenant. The  contractors  selected  by
Landlord  shall have  the right  to enter upon  the Premises  with such persons,
machinery and equipment as they shall reasonably deem necessary for the  purpose
and  undertake  such  remedial containment  and  cleanup actions  as  they shall
reasonably deem appropriate, without thereby  incurring any liability to  Tenant
on  account thereof. Tenant shall reasonably cooperate with any such contractors
and render such assistance to such contractors as may be requested to facilitate
the remedial containment and cleanup actions. Tenant shall be liable to Landlord
for all costs and expenses, including all reasonable attorneys' fees  reasonably
incurred  on account of such remedial action  undertaken on Tenant's behalf as a
consequence of Tenant's default and shall reimburse Landlord therefor on demand.
 
    (d)  Tenant  shall indemnify,  defend and  hold harmless  Landlord from  and
against all loss, liability, damage and expense, including costs associated with
administrative  and judicial proceedings  and attorneys' fees,  ever suffered or
incurred by Landlord to the extent caused by
 
                                       5
<PAGE>
6.  HAZARDOUS SUBSTANCES (CONTINUED)
       (i) Tenant's failure at any time during the Lease Term to comply with any
           environmental, health, safety or sanitation laws, ordinances,  codes,
    rules   or  regulations  or  interpretations  or  orders  of  regulatory  or
    administrative authorities with respect thereto  as required by this  Lease;
    (ii)   any  release  of  Hazardous  Materials  in  violation  of  applicable
    Environmental Law on, upon or into the Property occurring during this  Lease
    by  Tenant, its  agent, employee, contractor,  or any other  person for whom
    Tenant is legally responsible (including, without limitation, a third  party
    who comes onto the surface of the Premises and releases a Hazardous Material
    into  the  soil,  ground  water,  surface  water,  ambient  air  or building
    materials of the Premises during the  Lease Term); (iii) any and all  damage
    to  natural  resources or  real property  and/or harm  or injury  to persons
    resulting or  alleged  to have  resulted  from  such failure  to  comply  as
    described  in subpart (i)  and/or such release as  described in subpart (ii)
    hereof, and  (iv)  any  release  of a  Hazardous  Material  into  the  soil,
    groundwater,  surface  water,  ambient  air  or  building  materials  of the
    Property during the Lease Term, whether  by Tenant, or its agent,  employee,
    contractor,  invitee,  or  any  other  person  for  whom  Tenant  is legally
    responsible (including, without limitation, a third party who comes onto the
    surface of the  Premises and releases  a Hazardous Material  into the  soil,
    ground  water,  surface  water, ambient  air  or building  materials  of the
    Premises during the Lease Term). Notwithstanding the foregoing and any other
    thing to the  contrary in this  Lease, Tenant  shall not be  liable for  any
    migration  of a  Hazardous Material  from other  property to  this Property.
    Tenant acknowledges that its obligations and liabilities under this  Section
    shall survive the expiration or earlier termination of this Lease. If Tenant
    fails to meet its obligations to Landlord under this Section, Landlord shall
    have the remedies provided in Section 14.
 
    (e)   Neither Landlord nor any employee or agent of Landlord or entity under
its control has or will generate, store or spill upon, dispose of or transfer to
or from the Premises any hazardous waste materials.
 
    Landlord shall  indemnify and  hold Tenant  (including any  successor to  or
assignee  of Tenant) harmless from and against all loss, cost, liability, damage
and expense, including reasonable  attorneys' fees and  the costs of  litigation
arising  from any  hazardous waste materials  in or  on the Premises  due to the
presence of any  Hazardous Material  in the  soil, groundwater,  ambient air  or
buildings  materials of the  Improvements on the Commencement  date, or any act,
omission or negligence  of Landlord,  or its employee,  contractor, invitee,  or
other  person for  whom Landlord  is legally  responsible. Landlord acknowledges
that its  obligations  and liabilities  under  this Section  shall  survive  the
expiration or earlier termination of this Lease.
 
    Within  the time  permitted by applicable  law, Landlord, at  its sole cost,
shall perform or cause to be performed, any investigation, remediation,  removal
action,  detoxification of the Premises, and shall comply with any Environmental
Law, relating to any Hazardous Material present  at on or about the Premises  or
the  soil, air, improvements, groundwater,  surface water, or building materials
thereof on the Commencement Date.
 
    (f)  Except  to the extent  of Tenant's failure  to perform its  obligations
under  this Lease  concerning Hazardous  Materials, Landlord,  for itself hereby
waives and releases all  Claims against Tenant and  each Tenant Indemnitee,  and
all  rights  to  join Tenant  or  any  Tenant Indemnitee  in  any  litigation or
proceeding (including without  limitation any  Claim arising  under CERCLA,  the
Resource   Conservation  and  Recovery  Act  or   any  other  state  or  federal
Environmental Law), arising out of or  in connection with any matter arising  in
connection  with a  Hazardous Material  on or about  the Premises  except to the
extent expressly provided in subsections 6(a) through 6(d) above,
 
    (g)  Except as disclosed in the  reports attached hereto as EXHIBIT D,  true
and  correct copies of which  have been delivered by  Landlord to Tenant, to the
best knowledge of Landlord: (i) no Hazardous Material is present on Premises, or
the soil,  surface water  or groundwater  thereof; (ii)  no underground  storage
tanks  or asbestos containing building materials are present on the Premise; and
(iii) no action,
 
                                       6
<PAGE>
6.  HAZARDOUS SUBSTANCES (CONTINUED)
proceeding, or claim is pending  or threatened regarding the Premise  concerning
any  Hazardous  Material  or pursuant  to  any Environmental  Law.  Landlord has
delivered to Tenant all  reports and environmental  assessments of the  Premises
conducted  at the request of or otherwise available to Landlord and Landlord has
complied with all environmental disclosure obligations imposed upon Landlord  by
applicable Law with respect to this transaction.
 
    (h)   As used  in this Lease,  the term "Hazardous  Material" shall mean any
material or substance that  is now or hereafter  prohibited or regulated by  any
statute,  law,  rule,  regulation  or  ordinance or  that  is  now  or hereafter
designated by any governmental authority to be radioactive, toxic, hazardous  or
otherwise  a danger to  health, reproduction or the  environment. As used herein
"Environmental Laws" shall  mean all  local, state, or  federal laws,  statutes,
ordinances,  rules, regulations, judgments,  injunctions, stipulations, decrees,
orders, permits, approvals,  treaties, or  protocols now  or hereafter  enacted,
issued  or  promulgated  by  any  governmental  authority  which  relate  to any
Hazardous  Material  or  to  the  use,  handling,  transportation,   production,
disposal,  discharge, release, emission, sale, or storage of, or the exposure of
any person to, a Hazardous Material.
 
7.  MAINTENANCE, REPAIR, ALTERATIONS AND REMOVALS
 
    (a)  Except as otherwise provided in  this Lease, Tenant shall, at its  sole
expense,  keep neat and clean  and maintain in good  order, condition and repair
the  Premises  and  every  part  thereof,  including,  without  limitation,  the
foundations,  roof  and  drains and  structural  portions of  the  Premises, the
exterior and interior portions of air conditioning, heating, sprinkler (if  any)
and  electrical systems,  all doors,  windows, plate  and glass  surrounding the
Premises, all plumbing and sewage  facilities within the Premises, fixtures  and
interior walls, floors, ceilings and signs.
 
    (b)   Subject to the express provisions of this Lease, Tenant shall keep the
Property in a clean, sanitary and safe condition in accordance with the laws  of
the Commonwealth of Massachusetts and ordinances of the Town of Newburyport, and
in  accordance with all directions, rules and regulations of the Health Officer,
Fire Marshall, Building Inspector and other proper officers of the  governmental
agencies having jurisdiction thereover.
 
    (c)   Except as  otherwise expressly provided in  this Lease, Landlord shall
not be responsible for maintaining or making any improvements or repairs of  any
kind upon the Property, but this paragraph is not intended to refer to damage by
fire  or other insured  risk to the  Premises, provision for  which is hereafter
made. Notwithstanding anything  to the  contrary in this  Lease, Landlord  shall
perform  and construct,  and Tenant shall  have no responsibility  to perform or
construct, any repair, maintenance or  improvement (i) necessitated by the  acts
or  omissions  of  Landlord,  or its  agents,  employees,  or  contractors, (ii)
required as a consequence of any violation of law, private servitude encumbering
the Premises, or construction defect in  the Improvements caused by Landlord  or
its  agent, employee or contractor, and (iii)  for which Landlord has a right of
reimbursement from others.  Tenant's obligation, if  any, to reimburse  Landlord
for the costs of such repairs, maintenance and improvements shall be governed by
the other provisions of this Lease.
 
    (d)   Tenant shall not  make any alterations or  other structural or capital
improvements or  additions  upon  the  Premises  ("Alterations")  without  first
obtaining,  in each instance, the written consent of Landlord which shall not be
unreasonably withheld.  Notwithstanding the  foregoing,  Tenant shall  have  the
right  to make any and all Alteration to  the interior space of the Premises, so
long as such Alterations do not impact the structural integrity of the Premises.
Notwithstanding anything to the contrary  in this Lease, all Alterations,  trade
fixtures  and personal  property installed in  the Premises  at Tenant's expense
("Tenant's Property") shall  at all  times remain Tenant's  property and  Tenant
shall  be entitled to all depreciation, amortization and other tax benefits with
respect  thereto.  Except  for  Alterations  which  cannot  be  removed  without
structural  injury  to the  Premises,  at any  time  Tenant may  remove Tenant's
Property from the Premises,  provided Tenant repairs all  damage caused by  such
removal.  Landlord shall have no  lien or other interest  whatsoever in any item
 
                                       7
<PAGE>
7.  MAINTENANCE, REPAIR, ALTERATIONS AND REMOVALS (CONTINUED)
of Tenant's Property, or any portion thereof or interest therein located in  the
Premises  or elsewhere, and Landlord hereby waives all such liens and interests.
Within  ten  (10)  days  following  Tenant's  request,  Landlord  shall  execute
documents  in form reasonably acceptable to Tenant to evidence Landlord's waiver
of any  right, title,  lien or  interest  in Tenant's  Property located  at  the
Premises.
 
    (e)   Except as expressly provided in  this Lease, Landlord has not made and
does not  make any  representation or  warranty as  to any  matter affecting  or
relating  to the Premises,  including but not limited  to the physical condition
thereof, and Tenant  acknowledges that  no such representation  or warranty  has
been  made and agrees to lease the Premises  in "AS IS" condition as of the date
of this Lease, subject to the completion of Landlord's construction and delivery
obligations and its  assignment of warranties  as set forth  in the  Improvement
Agreement, and subject to all of the Landlord's other obligations hereunder.
 
8.  [INTENTIONALLY DELETED.]
 
9.  LANDLORD'S ACCESS TO PREMISES
 
    (a)   Landlord  and its  designees shall  have the  right to  enter upon the
Premises at  all reasonable  hours  and upon  reasonable  notice (except  in  an
emergency) for the purpose of inspecting the same. If repairs are required to be
made  by Tenant pursuant to this Lease, Landlord may demand that Tenant make the
same forthwith, and if Tenant refuses  or neglects to commence such repairs  and
complete the same with reasonable dispatch, after such demand, Landlord may (but
shall  not be required  to) make or cause  such repairs to  be made. If Landlord
makes or causes  such repairs to  be made,  Tenant shall within  seven (7)  days
following  demand  of  Landlord  pay to  Landlord  the  cost  thereof reasonably
incurred by Landlord, and  if it shall default  in such payment, Landlord  shall
have the remedies provided in Section 14.
 
    (b)  For a period commencing nine (9) months prior to the termination of the
Lease  Term (including  any extension thereof),  upon written  notice to Tenant,
Landlord may  have  reasonable  access  to  the  Premises  for  the  purpose  of
exhibiting the same to prospective tenants.
 
10. INDEMNIFICATION; PUBLIC LIABILITY INSURANCE; WORKERS' COMPENSATION
INSURANCE
 
    (a)    Subject to  Section  10(e), below,  Tenant  shall indemnify  and save
harmless Landlord from and against all  claims of whatever nature to the  extent
arising  from  (i) any  act, omission  or negligence  occurring on  the Premises
during the Lease  Term, or  (ii) any  negligent act  or omission  by Tenant,  or
Tenant's  agents, employees,  contractors, invitees,  or other  persons for whom
Tenant is legally  responsible wherever  occurring during the  Lease Term.  This
indemnity and hold harmless agreement shall include indemnity against all costs,
expenses  and liabilities reasonably incurred in  or in connection with any such
claim or proceeding brought thereon, and the defense thereof.
 
    (b)  Tenant shall maintain in full  force during the Lease Term a policy  or
public  liability insurance insuring all  Tenant's indemnities described in this
Section 10. Under such policy Landlord (and such other persons as are in privity
of estate with Landlord as may be set out in notice from time to time  delivered
to Tenant) and Tenant shall be named as insureds. Each such policy shall be non-
cancellable  with  respect to  Landlord  and Landlord's  said  designees without
thirty (30) days' prior written notice to Landlord, and a duplicate original  or
certificate thereof shall be delivered to Landlord at the beginning of the Lease
Term  and  upon  request thereafter.  he  minimum  limits of  liability  of such
insurance shall  be  ONE  MILLION DOLLARS  ($1,000,000.00)  per  occurrence  for
personal  injury  (or death)  and  [THREE MILLION  DOLLARS  ($3,000,000.00)] per
occurrence with respect to damage to property.
 
                                       8
<PAGE>
10. INDEMNIFICATION; PUBLIC LIABILITY INSURANCE; WORKERS' COMPENSATION
INSURANCE (CONTINUED)
    In the event Tenant fails to  provide such insurance, Landlord may  purchase
such  insurance and Tenant agrees that within seven (7) days following demand of
Landlord it will pay to  Landlord the cost thereof, and  if it shall default  in
such payment, Landlord shall have the remedies provided in Section 14.
 
    (c)   Tenant shall maintain all workers' compensation and other insurance in
compliance with all applicable laws.
 
    (d)  Tenant shall use and occupy the Premises at its own risk, and  Landlord
shall  have no responsibility or liability for any loss of or damage to fixtures
or other personal property of Tenant.
 
    (e)  Notwithstanding anything  to the contrary in  this Lease, Tenant  shall
neither  release Landlord from, nor indemnify  Landlord with respect to: (i) the
negligence  or  willful  misconduct  of  Landlord,  or  its  employees,  agents,
contractors,  or other persons  for whom Landlord  is legally liable;  or (ii) a
breach of Landlord's obligations or representations under this Lease, or (iii) a
violation of any law, rule or  regulation by Landlord, its agents,  contractors,
employees,  or other persons for whom Landlord is legally liable. Landlord shall
indemnify and  save harmless  Tenant from  and against  all claims  of  whatever
nature  to the extent arising from (i) any act, omission or negligence occurring
on the Premises prior to or after the  Lease Term, or (ii) any negligent act  or
omission by Landlord, or Landlord's agents, employees, contractors, invitees, or
other persons for whom Landlord is legally responsible wherever occurring during
the  Lease  Term.  This  indemnity and  hold  harmless  agreement  shall include
indemnity against  all  costs,  expenses  and  liabilities  incurred  in  or  in
connection  with any such  claim or proceeding brought  thereon, and the defense
thereof.
 
11. PROPERTY INSURANCE
 
    (a)  Tenant  shall keep, at  its expense (which  shall be deemed  additional
rent),  the  Premises insured  against loss  or  damage by  fire with  the usual
extended coverage  endorsements in  amounts not  less than  one hundred  percent
(100%) of the full replacement value thereof above foundation walls.
 
    (b)   Tenant  shall keep  Tenant's own  fixtures, merchandise  and equipment
insured against  loss or  damage by  fire, vandalism  and theft  with the  usual
extended coverage endorsements, in such amounts and with such insurance carriers
as  Tenant shall determine. It is understood  and agreed that Tenant assumes all
risk of damage to its own property arising from any cause whatsoever, including,
without limitation, loss by theft or otherwise.
 
    (c)   Insofar as  and to  the extent  that the  following provision  may  be
effective  without  invalidating or  making  it impossible  to  secure insurance
coverage obtainable from responsible insurance  companies doing business in  the
Commonwealth  of Massachusetts (even though extra premium may result therefrom),
Landlord and  Tenant mutually  agree that  with  respect to  any loss  which  is
covered by insurance then being carried by them, respectively, or which would be
covered by a standard form of full replacement cost, extended coverage, all-risk
casualty  insurance,  each releases  the  other and  their  respective officers,
directors, employees, successors and assigns of and from any and all claims with
respect to such  loss; and  they further  mutually agree  that their  respective
insurance  policies  shall  provide that  the  insurer  waives its  right  to be
subrogated to the rights of the insured  against the other party or its  agents,
servants  or  employees for  any  loss payable  under  the policy  and  that the
insurance  shall  not  be  validated  by  reason  of  the  insured's  waiver  of
subrogation.  In the event that an extra premium is payable by either party as a
result of this provision, the other party shall reimburse the party paying  such
premium  for the  amount of  such extra  premium. If  either party  is unable to
obtain a waiver of subrogation from its  insurer, the said party shall name  the
other as an additional insured on their casualty insurance.
 
                                       9
<PAGE>
12. DAMAGE TO PROPERTY
 
    (a)   In case during the Lease Term the Premises shall be damaged by fire or
other casualty  Landlord  shall proceed  forthwith  to repair  such  damage  and
restore the Premises to substantially their condition at the time of such damage
subject  to  any  zoning laws  then  in  existence, but  Landlord  shall  not be
responsible for any  delay which  may result  from any  cause beyond  Landlord's
reasonable  control and  Landlord shall  not be  required to  commence such work
until it  receives  any proceeds  it  will receive  with  respect to  the  loss.
Landlord  and Tenant  shall use all  reasonable efforts to  obtain such proceeds
within a reasonable time. In no event shall Landlord be obligated to pay for any
such repairs or restoration in excess of available insurance proceeds.
 
    (b)  If damage  to the Premises  is not covered by  the insurance Tenant  is
required  to carry pursuant  to Section 11  and the cost  to restore such damage
exceeds 20% of the replacement cost of the Premises, then Landlord, within sixty
(60) days after the occurrence of such  event may give written notice to  Tenant
of  its election to terminate this Lease, unless Tenant agrees in its discretion
to reimburse the Landlord for  the amount of such  uncovered costs in excess  of
20% of the replacement cost of the Premises.
 
    (c)   If  the Premises are  damaged to  such an extent  that the restoration
thereof is not reasonably  estimated to be completed  within 180 days  following
the  destructive event or if  the restoration of the  Premises is for any reason
not actually completed  within 180  days following the  destructive event,  then
Tenant  shall have  the right  to terminate  this Lease  by delivery  of written
notice to Landlord.
 
    (d)  In the event that the provisions  of Section 12(a), (b ), or (c)  shall
become  applicable, the Base Rent shall  be abated or reduced proportionately to
the interference with the  Tenant's use of the  Premises caused by the  casualty
(and  Landlord shall return a  pro rata portion of  the semi-annual advance Base
Rent payment)  during  any  period  in  which,  by  reason  of  such  damage  or
destruction,  there  is  substantial  interference  with  the  operation  of the
business of Tenant in the Premises, having regard to the extent to which  Tenant
may  be required to discontinue its business in the Premises, and such abatement
or reduction shall continue for the  period commencing with such destruction  or
damage   and  ending  with  the  completion   by  Landlord  of  such  repair  or
reconstruction as Landlord is obligated to complete. In the event of termination
of this Lease pursuant to this Section 12, this Lease and the Lease Term  hereof
shall  cease  and  come to  an  end within  a  reasonable time  after  notice of
termination as is  required to  permit Tenant to  remove its  property from  the
Premises.
 
13. EMINENT DOMAIN
 
    (a)  If the Premises, or such portion thereof as to render the balance (when
reconstructed)  unsuitable  for  the  purposes  of  Tenant,  shall  be  taken by
condemnation or  right  of  eminent  domain,  Tenant,  upon  written  notice  to
Landlord,  shall be entitled to terminate  this Lease, provided that such notice
is given  not later  than sixty  (60) days  after Tenant  has been  deprived  of
possession. Should any part of the Premises be so taken or condemned, and should
this  Lease  not  be  terminated in  accordance  with  the  foregoing provision,
Landlord covenants and agrees  promptly after such  taking or condemnation,  and
the  determination of  Landlord's award  therein, to  expend so  much as  may be
necessary  of  the  net  amount  which  may  be  awarded  to  Landlord  in  such
condemnation  proceedings in restoring the Premises  to an architectural unit as
nearly like their condition prior to such taking as shall be practicable. Should
the net amount  so awarded  to Landlord  be insufficient  to cover  the cost  of
restoring  the Premises, as estimated by Landlord's architect, Landlord may, but
shall not be obligated to, supply  the amount of such insufficiency and  restore
said  Premises as above provided, with all reasonable diligence, or Landlord may
terminate this Lease, if Tenant does  not supply the necessary additional  funds
or  agree to a reduction in  the Landlord's restoration obligation. Where Tenant
has not already  exercised any  right of termination  accorded to  it under  the
foregoing  portion of this paragraph, Landlord shall notify Tenant of Landlord's
election not later than  ninety (90) days after  the final determination of  the
amount of the award.
 
                                       10
<PAGE>
13. EMINENT DOMAIN (CONTINUED)
    (b)    Out of  any award  for any  taking of  the Premises,  in condemnation
proceedings or by right of eminent domain, Landlord shall be entitled to receive
and retain the  amounts awarded  for such Premises  and for  Landlord's loss  of
Landlord's  estate in  this Lease. Tenant  shall (i) execute  any instruments of
assignment as may be reasonably required by Landlord, (ii) join in any  petition
for  recovery of damages as Landlord may reasonably request, and (iii) turn over
to Landlord any damages that  may be recovered in  any proceeding which are  the
property of Landlord under this Section. Tenant shall be entitled to receive and
retain  any  amounts  which  may  be specifically  awarded  to  it  in  any such
condemnation proceedings,  because  of  the  taking of  its  trade  fixtures  or
furniture  and its leasehold  improvements loss of  goodwill, severance damages,
and moving  costs to  the  extent Tenant  was not  reimbursed  for the  same  by
Landlord.
 
    (c)   In the event of any such taking of the Premises, the minimum rent or a
fair and just  proportion thereof,  according to the  nature and  extent of  the
damage  sustained, shall be suspended or abated, and Landlord shall return a pro
rata portion of the semiannual advance Base Rent payment to Tenant.
 
14. DEFAULT AND LANDLORD'S REMEDIES
 
    (a)  Any one of the following shall be deemed to be a "Default" or an "Event
of Default":
 
       (i) Failure on the part of  Tenant to make payment  of rent or any  other
           monetary  amount due under  this Lease within  thirty (30) days after
    written notice that such payment is past due.
 
       (ii)With respect to a non-monetary  default under this Lease, failure  of
           Tenant  to cure  the same  within thirty (30)  days from  the time of
    receipt of written notice of default from Landlord or such additional period
    reasonably required to cure the default. With respect to defaults  requiring
    more  than thirty (30) days  to cure, Tenant shall  be obligated to commence
    forthwith and to complete as soon as reasonably possible the curing of  such
    default;  and if Tenant  fails so to do,  the same shall be  deemed to be an
    Event of Default.
 
       (iii)
           The occurrence of any of the following events: (1) the estate  hereby
           created  being taken  on execution  or by  other process  of law; (2)
    Tenant being judicially declared bankrupt or insolvent according to law; (3)
    a general assignment being made of the property of Tenant for the benefit of
    creditors; (4)  a receiver,  guardian, conservator,  trustee in  involuntary
    bankruptcy or other similar officer being appointed to take charge of all or
    any   substantial  part  of  Tenant's  property  by  a  court  of  competent
    jurisdiction; or (5) Tenant executing a trust mortgage, or a petition  being
    filed  by  or against  Tenant in  bankruptcy, or  for reorganization  or for
    arrangements under any  provisions of  the Bankruptcy Act  now or  hereafter
    enacted, providing a plan for a debtor to settle, satisfy or extend the time
    for  the payment of debts,  and such petition shall  not have been dismissed
    within thirty (30) days.
 
    (b)  Should any Event of Default occur then, notwithstanding any license  of
any  former breach of covenant  or waiver of the benefit  hereof or consent in a
former instance, Landlord lawfully  may, in addition  to any remedies  otherwise
available to Landlord, immediately or at any time thereafter, upon ten (10) days
prior  written notice, enter into  and upon the Premises  or any part thereof in
the name of the whole and repossess the same as of Landlord's former estate, and
expel Tenant and  those claiming through  or under  it and remove  its or  their
effects  (forcibly as  permitted by applicable  law if  necessary) without being
deemed guilty of any manner of  trespass, and without prejudice to any  remedies
which  might  otherwise be  used  for arrears  of  rent or  preceding  breach of
covenant and/or Landlord may send written notice to Tenant terminating the Lease
Term; and  upon the  first to  occur of:  (i) entry  as aforesaid;  or (ii)  the
thirtieth (30th) day following mailing of such notice of termination, this Lease
shall terminate.
 
    (c)    Tenant  shall,  notwithstanding  any  termination  of  this  Lease as
aforesaid or any entry or re-entry by Landlord, whether by summary  proceedings,
termination or otherwise, pay and be liable for
 
                                       11
<PAGE>
14. DEFAULT AND LANDLORD'S REMEDIES (CONTINUED)
on  the days originally fixed  herein for the payment  thereof, amounts equal to
the several installments of rent and other charges reserved as they would, under
the terms of this Lease, become due if this Lease had not been terminated or  if
Landlord  had not entered or re-entered,  as aforesaid, and whether the Premises
be relet or remain vacant, in  whole or in part, or  for a period less than  the
remainder  of the Lease Term, and for  the whole thereof; but Landlord agrees to
use reasonable efforts to relet  the Premises and in  the event the Premises  be
relet  by Landlord, Tenant  shall be entitled to  a credit in  the net amount of
rent received  by  Landlord  in  reletting,  after  deduction  of  all  expenses
reasonably  incurred in  reletting the Premises  (including, without limitation,
remodeling costs, brokerage fees,  attorneys' fees, repairing, cleaning,  moving
and  storage costs,  and the  like), and  in collecting  the rent  in connection
therewith.
 
    Nevertheless, in case of such termination Landlord at its election which may
be made or changed at any time  without notice shall be entitled to collect  and
receive  from  Tenant such  sum or  sums to  which  it may  be entitled  as rent
hereunder for the balance of the Lease  Term, or demand and receive from  Tenant
indemnity  against loss of the  aforesaid rent hereunder for  the balance of the
Lease Term, or collect  and receive from  Tenant as damages a  sum which at  the
time of such termination represents the difference between the fair rental value
of  the Premises and the  rent herein stated for the  balance of the Lease Term,
which difference shall be  discounted to its present  value, or to enforce  such
other remedies as are available to it by law.
 
    In any event, in the event of default Tenant shall be liable to Landlord for
all  expenses  reasonably incurred  in connection  with such  default, including
those described in the first paragraph of this Section and including  reasonable
attorneys' fees.
 
    (d)   Landlord shall in no event be  in default in the performance of any of
Landlord's obligations hereunder unless and until Landlord shall have failed  to
perform  such obligations within thirty (30) days  or such additional time as is
reasonably required  to correct  any  such default  after  notice by  Tenant  to
Landlord  properly specifying  wherein Landlord has  failed to  perform any such
obligation. If Landlord is  in default under this  Lease, Landlord shall (i)  be
responsible  for its reasonable  costs and expenses which  relate to its default
(including court costs and Tenant's attorneys' fees), and (ii) return a pro rata
portion of the  semi-annual advance Base  Rent payment to  Tenant, if Tenant  is
permitted to terminate the Lease.
 
    (e)  If Tenant abandons or vacates the Premises, any property left by Tenant
shall  be deemed abandoned and Landlord shall  have the right to dispose thereof
without accountability to Tenant as permitted by law.
 
    (f)  Landlord shall use its  best efforts to mitigate any damages  resulting
from  any default by Tenant, and Tenant shall not in any event be liable for any
damages reasonably mitigable by Landlord.
 
15. REPRESENTATIONS OF TENANT
    Tenant represents and warrants to Landlord that it is a corporation which is
duly organized, validly  existing and  in good standing  under the  laws of  the
State of California, with all required power and authority to execute this Lease
and  perform its obligations hereunder and  such performance will not violate or
result in a  default under any  contract, mortgage, lien,  judgment or order  to
which Tenant is a party or by which Tenant is bound.
 
16. RIGHT OF FIRST REFUSAL
    In  the event Landlord shall receive an  offer to purchase, ground lease, or
otherwise  acquire  the  legal  and/or  beneficial  ownership  interest  in  the
Premises,  or any interest  therein, in whole  or in part  ("Offer of Purchase")
during the Lease Term, or any extension thereof, and the offer of purchase shall
be satisfactory  to  Landlord,  Landlord  shall give  Tenant  the  privilege  of
purchasing the Premises or the interest or portion thereof to be acquired at the
price and on the terms of the offer so made. This
 
                                       12
<PAGE>
16. RIGHT OF FIRST REFUSAL (CONTINUED)
privilege  shall  be  given  by a  notice  sent  to Tenant  at  the  Premises by
registered mail, requiring Tenant to accept the  offer in writing and to sign  a
suitable  contract to  purchase the Premises  within the period  of fifteen (15)
days after the mailing of the notice.
 
    The failure of Tenant  to accept the  offer to purchase  or sign a  contract
within  the period  provided shall waive  Tenant's rights under  this Section on
that occasion, but  shall not  waive Tenant's right  to first  refusal on  other
occasions,  and Landlord shall be  at liberty to sell  the Premises to any other
person, firm or  corporation. Any subsequent  sale, except to  Tenant, shall  be
subject  to this Lease and any renewals or extensions hereof and to this Section
18. The successor in interest to Landlord shall not disturb Tenant's  possession
under  this Lease if  Tenant is not  in default hereunder  and shall perform all
Landlord's unperformed obligations.
 
    This right of first refusal shall not  apply to any transfer by Landlord  of
the  property to any  person who controls,  is under common  control with, or is
controlled by Landlord or  to Landlord's spouse or  lineal descendants (or to  a
trust  or other legal entity exclusively  for their benefit) for estate planning
purposes, provided such transferees shall thereafter be subject to this  Section
18 with respect to subsequent transfers.
 
17. MISCELLANEOUS PROVISIONS
 
    (a)   SUBLEASE  AND ASSIGNMENT.   Tenant  shall not  sublease any  more than
thirty percent (30%) of the square footage of the Leased Premises or assign this
Lease or any of its rights hereunder without the express prior written  approval
of  Landlord, which consent may not be unreasonably withheld and shall be deemed
given if not reasonably withheld in writing within 10 days following delivery to
Landlord of a written request for consent. In the event Landlord consents to  an
assignment  or a sublease, Tenant shall  remain fully liable for the obligations
of Tenant hereunder, including,  without limitation, the  obligation to pay  the
rent  and other amounts  provided under this  Lease. Consent by  Landlord to any
such sublease shall not be deemed to  be a consent to a subsequent sublease  nor
shall any sublessee have any further right to sublease. Notwithstanding anything
to  the contrary in the Lease Form, Tenant may, without Landlord's prior written
consent and without any participation  by Landlord in assignment and  subletting
proceeds,  sublet  the  Premises  or  assign the  Lease  to:  (i)  a subsidiary,
affiliate, division or  corporation controlling, controlled  by or under  common
control  with  Tenant; or  (ii)  a successor  corporation  related to  Tenant by
merger, consolidation, nonbankruptcy reorganization,  or government action.  For
the  purpose of this  Lease, sale of  Tenant's capital stock  through any public
exchange shall not be deemed an assignment, subletting, or any other transfer of
the Lease or the Premises.
 
    (b)  WAIVER.  Failure on the part of either party to complain of any  action
or  non-action on the part of Tenant, no  matter how long the same may continue,
shall never be deemed to be a waiver by Landlord of any of its rights hereunder.
No waiver at any time of any of  the provisions hereof by either party shall  be
construed  as a waiver of  any of the other provisions  hereof, and no waiver at
any time of any of the provisions hereof  shall be construed as a waiver at  any
subsequent time of the same provisions. The consent or approval of a party to or
of  any action by Tenant  requiring Landlord's consent or  approval shall not be
deemed to  waive  or  render  unnecessary  consent or  approval  to  or  of  any
subsequent similar act.
 
    No  payment, or acceptance,  of a lesser  amount than shall  be due shall be
treated otherwise than as a payment on account. The acceptance of a check for  a
lesser  amount  with an  endorsement or  statement thereon,  or upon  any letter
accompanying such check, that  such lesser amount is  payment in full, shall  be
given  no effect,  and a party  may accept  such check without  prejudice to any
other rights or remedies which the party may have.
 
    (c)   COVENANT OF  QUIET ENVIRONMENT.    Tenant, subject  to the  terms  and
provisions  of this  Lease on  payment of  the rent  and observing,  keeping and
performing all of  the terms  and provisions  of this Lease  on its  part to  be
observed,  kept and performed, shall lawfully, peaceably and quietly have, hold,
 
                                       13
<PAGE>
17. MISCELLANEOUS PROVISIONS (CONTINUED)
occupy and  enjoy  the Premises  during  the  Lease Term  without  hindrance  or
ejection  by any persons lawfully claiming  under Landlord; but it is understood
and agreed  that this  covenant and  any  and all  other covenants  of  Landlord
contained in this Lease shall be binding upon Landlord and Landlord's successors
only  with  respect  to  breaches  occurring  during  Landlord's  and Landlord's
successors' respective ownership  of Landlord's interest  hereunder. Subject  to
Landlord's  duty  to complete  the Improvements,  it  is further  understood and
agreed that with respect  to any services to  be furnished, neither Landlord  or
Tenant  shall  in  no event  be  liable for  failure  to furnish  the  same when
prevented from  so  doing by  strike,  lockout, breakdown,  accident,  order  or
regulation  of  or  by any  governmental  authority,  or failure  of  supply, or
inability by the exercise of reasonable  diligence to obtain supplies, parts  or
employees  necessary  to  furnish such  services,  or  because of  war  or other
emergency, or for any  cause beyond their reasonable  control, or for any  cause
due to any act or neglect of the other party or its servants, agents, employees,
licensees,  contractors or  any person claiming  by, through or  under the other
party.
 
    (d)  STATUS REPORT.  Recognizing that both parties may find it necessary  to
establish to third parties, such as accountants, banks, mortgagees, or the like,
the  then current status of performance  hereunder, either party, on the written
request of the other  made from time  to time, will  promptly furnish a  written
statement  of the status of any matter pertaining to this Lease, which the other
party reasonably requests.
 
    (e)  NOTICE TO MORTGAGEE.   After receiving written notice from any  person,
firm  or other entity, that it holds a mortgage (which term shall include a deed
of trust) which includes as part of the mortgaged premises the Premises,  Tenant
shall,  so long  as such mortgage  is outstanding,  be required to  give to such
holder the same notice as is required to be given to Landlord under the terms of
this Lease, but such notice may be  given by Tenant to Landlord and such  holder
concurrently.  It  is  further  agreed  that such  holder  shall  have  the same
opportunity to cure any default, and the  same time within which to affect  such
curing,  as is available to  Landlord; and if necessary  to cure such a default,
such holder shall have access to the Premises.
 
    (f)  ASSIGNMENT OF RENTS.  With  reference to any assignment by Landlord  of
Landlord's  interest in this Lease, or  the rents payable hereunder, conditional
in nature or otherwise, which assignment is made to the holder of a mortgage  or
deed of trust on the Premises, Tenant agrees:
 
       (i) that the execution thereof by Landlord, and the acceptance thereof by
           such  holder, shall never  be deemed an assumption  by such holder of
    any of the obligations of Landlord  hereunder, unless such holder shall,  by
    written notice sent to Tenant, specifically otherwise elect;
 
       (ii)that,  except as  aforesaid, such holder  shall be  treated as having
           assumed Landlord's  obligations hereunder  only upon  foreclosure  of
    such  holder's mortgage or deed of trust and the taking of possession of the
    Premises by such holder; and
 
       (iii)
           Tenant shall, at the  request of Landlord, execute  a consent to  any
           such  assignment  of the  Lease and  an agreement  to attorn  to such
    mortgagee in the event of its exercise of its right under the assignment.
 
    (g)  LEASE SUBORDINATE TO MORTGAGE.  The rights and interest of Tenant under
this Lease shall be subject and subordinate  to any mortgages or deeds of  trust
that may hereafter be placed upon the Premises and to any and all advances to be
made  thereunder, and to the interest  thereon, and all renewals, modifications,
replacements and extensions thereof, if the  mortgagee or trustee named in  said
mortgages or deeds of trust shall elect by written notice delivered to Tenant at
the  time the encumbrance is  created to subject and  subordinate the rights and
interest of Tenant  under this  Lease to  the lien of  its mortgage  or deed  of
trust;  provided, however,  that said mortgagee  agrees to  execute an agreement
providing, in substance, that in consideration of Tenant's written agreement  to
continue  occupancy under  the same  terms and conditions  of this  Lease and to
attorn to mortgagee, the right of
 
                                       14
<PAGE>
17. MISCELLANEOUS PROVISIONS (CONTINUED)
possession of Tenant  to the Premises  and Tenant's rights  arising out of  this
Lease,  shall not be  disturbed by the  mortgagee in the  exercise of its rights
under the  mortgage  or  deed provided  that  Tenant  shall not  be  in  default
hereunder.  In  the  event  of  such election,  and  upon  notification  by such
mortgagee or trustee to Tenant to that effect and delivery of a recognition  and
non-disturbance  agreement in a form reasonably acceptable to Tenant, the rights
and interest of Tenant under this Lease shall be deemed to be subordinate to the
lien of said mortgage or deed of trust, whether this Lease is dated prior to  or
subsequent  to  the date  of  said mortgage  or deed  of  trust, and  no further
instrument of subordination shall be  necessary; provided, however, that  Tenant
shall  execute and  deliver whatever instruments  said mortgagee  or trustee may
reasonably require for such  purposes, and in  the event Tenant  fails so to  do
within  twenty  (20) days  after  demand in  writing,  Tenant does  hereby make,
constitute and irrevocably appoint Landlord  as its attorney-in-fact and in  its
name, place and stead so to do.
 
    (h)    MECHANICS'  LIENS.   Tenant  shall immediately  discharge  (either by
payment or  by filing  of  the necessary  bond,  or otherwise)  any  mechanic's,
materialmen's  or  other lien  against the  Property and/or  Landlord's interest
therein, which liens may arise  out of any payment due  for, or purported to  be
due  for, any labor, services, materials,  supplies or equipment alleged to have
been furnished to or for Tenant after completion of the Improvements in, upon or
about the Property. Landlord shall  immediately discharge (either by payment  or
by  filing of the necessary bond, or otherwise) any mechanic's, materialmen's or
other lien against the  Premises and/or Tenant's  interest therein, which  liens
may  arise out of  any payment due for,  or purported to be  due for, any labor,
services, materials, supplies or equipment alleged to have been furnished to  or
for Landlord in, upon or about the Premises.
 
    (i)  NO BROKERS.  Tenant and Landlord warrant and represent that neither has
dealt  with any broker in  connection with the consummation  of this Lease other
than Mr. Clifford Hurley of the Leggat Company, Inc., 1 Liberty Square,  Boston,
Massachusetts. Landlord shall pay any commission due to said broker.
 
    (j)   INVALIDITY OF PARTICULAR PROVISIONS.  If any term or provision of this
Lease, or the application  thereof to any person  or circumstance shall, to  any
extent,  be  invalid  or unenforceable,  the  remainder  of this  Lease,  or the
application of such  term or provision  to persons or  circumstances other  than
those  as to which  it is held  invalid or unenforceable,  shall not be affected
thereby, and  each term  and  provision of  this Lease  shall  be valid  and  be
enforced to the fullest extent permitted by law.
 
    (k)  PROVISIONS BINDING.  Except as herein otherwise expressly provided, the
terms  hereof shall be binding upon and shall inure to the benefit of the heirs,
executors, administrators, successors and assigns, respectively, of Landlord and
Tenant. The  reference contained  to successors  and assigns  of Tenant  is  not
intended  to constitute a consent to assignment  by Tenant not permitted by this
Lease, but as reference only to those instances permitted by this Lease.
 
    (l)  RECORDING.  Tenant  shall not record the  Lease, but the parties  shall
execute  and record a Notice  of Lease (and the rights  of first refusal and the
options  hereunder)   in  recordable   form   and  complying   with   applicable
Massachusetts  laws,  and  reasonably satisfactory  to  Tenant's  and Landlord's
attorneys. In no event shall such document set forth the rental or other charges
payable by Tenant under this Lease; and such document shall expressly state that
it is executed pursuant to  the provisions contained in  this Lease, and is  not
intended to vary the terms and conditions of this Lease.
 
                                       15
<PAGE>
17. MISCELLANEOUS PROVISIONS (CONTINUED)
    (m)   NOTICES.  All  notices shall be in  writing and delivered by certified
mail or personal delivery, to the parties  at the addresses set forth below,  or
to  such  other  address or  addresses  as the  parties  may from  time  to time
hereafter designate:
 
    Landlord:  G. Christopher Peznola
             Berkshire Acquisition Corporation
             1500 Main Street, Suite 2012
             Springfield, MA 01115
 
    With copy to:
 
Robinson Donovan Madden & Barry, P.C.
             1500 Main Street, Suite 1600
             Springfield, MA 01115
             Attn: Robert P. Cunningham, Esq.
 
    Tenant:  Division Controller
            Genus, Inc.
            Ion Technology Division
            4 Mulliken Way
            Newburyport, MA 01950
 
    With copies to:
 
Genus, Inc.
            1139 Karlstad Dr.
            Sunnyvale, CA 94089
            Attn: Chief Financial Officer
 
    and
 
Wilson, Sonsini, Goodrich & Rosati, P.C.
650 Page Mill Road
Palo Alto, CA 94304-1050
Attn: Real Estate Dept.
 
    (n)  HEADINGS.  The headings throughout this instrument are for  convenience
and  reference only, and the words contained therein  shall in no way be held to
explain, modify, amplify or aid  in the interpretation, construction or  meaning
of the provisions of this Lease.
 
    (o)  ENTIRE AGREEMENT.  All negotiations, consideration, representations and
understandings  between Landlord and Tenant are  incorporated in this Lease, the
Improvement Agreement, and  in the  schedules and exhibits  attached hereto  and
thereto,  all of which are hereby incorporated  herein by this reference and all
of which  may  be modified  or  altered only  by  agreement in  writing  between
Landlord  and Tenant. No  act or omission  of any employee  or agent of Landlord
shall alter, change or modify any of the provisions hereof.
 
    (p)   GOVERNING  LAW.   This  Lease shall  be  governed exclusively  by  the
provisions  hereof and by the laws of  the Commonwealth of Massachusetts, as the
same may from time to time exist.
 
18. ACQUISITION OF PROPERTY
    Concurrently herewith Landlord  shall forthwith  enter into  a Purchase  and
Sale  Agreement with the Newburyport Area Industrial Development Corporation, in
form and substance reasonably satisfactory to Tenant (the "Purchase Agreement"),
for the 10.62 acres of land in the Lord Dexter Industrial Park, known as Lot 62,
Stanley Tucker Drive, Newburyport, Massachusetts, as more particularly described
in EXHIBIT  A  to  this  Lease (the  "Property").  Landlord  shall  perform  its
obligations  under the Purchase Agreement  so that the purchase  may close on or
before September 30,
 
                                       16
<PAGE>
18. ACQUISITION OF PROPERTY (CONTINUED)
1995. Landlord hereby acknowledges that there are no conditions precedent to the
Landlord's obligation to  purchase the  Property under  the Purchase  Agreement,
other  than that  Landlord obtains record  and marketable title  to the Property
from the seller thereof,  with only those exceptions  to title permitted by  the
Purchase Agreement.
 
19. PREPAID RENT & SECURITY DEPOSIT
    Concurrently with the Landlord's acquisition of the Premises pursuant to the
Purchase  and Sale Agreement, the Tenant shall deposit into escrow, for delivery
to Landlord on  the Commencement  Date, (1)  good funds  in the  amount of  Five
Hundred  Thousand  Dollars ($500,000.00)  as prepayment  of  the last  Base Rent
payable during the Initial Term (the "Prepaid Rent") and (2) a letter of  credit
"Security  Deposit" or  evidence of a  cash "Security Deposit"  with a custodian
complying with  the  requirements  of  this paragraph.  Within  three  (3)  days
following  delivery of written notice to the escrow holder that the Commencement
Date has occurred,  the escrow  holder shall deliver  the Prepaid  Rent and  the
letter  of credit  Security Deposit or  evidence of the  cash custodial Security
Deposit, as the case may be, to the Landlord. Tenant shall promptly execute such
documents as the Landlord shall  reasonably request to accomplish such  delivery
of the Prepaid Rent and such Security Deposit items to the Landlord.
 
    The  Prepaid Rent shall be retained by  Landlord as a prepayment of the last
Base Rent payable during  the Initial Term of  this Lease. The Security  Deposit
shall  be  held by  the  Landlord or  the  custodian, as  security  for Tenant's
performance of its obligations hereunder, and not as prepayment of rent.
 
    Tenant shall provide the Security Deposit in one of the following forms,  or
combination thereof from time to time, at its option:
 
    (1)Tenant  shall  deliver  to  the  Landlord,  at  Tenant's  sole  cost,  an
       irrevocable letter of credit in the form attached hereto as EXHIBIT E (an
"ILC") which (i) is drawn upon a financial institution reasonably acceptable  to
Landlord,  (ii) is irrevocable, unconditional and  transferrable, (iii) is for a
term of at least twelve (12) months, and  (iv) may be drawn upon by Landlord  at
sight  upon submission of a declaration by an officer of Landlord, under penalty
of perjury, declaring that  the Landlord is  entitled to draw  upon the ILC.  If
Tenant  provides Landlord with  an ILC meeting  the foregoing requirements, then
any cash  being held  as a  Security Deposit  in excess  of the  total  Security
Deposit requirements stated below shall be returned to Tenant upon demand.
 
    (2)Tenant  shall deposit with a financial institution selected by Tenant and
       reasonably acceptable to Landlord, cash or federally insured bonds and/or
notes to be held by such institution  in accordance with a pledge and  custodial
agreement  in the form of attached EXHIBIT  C. All interest accruing on any such
deposit shall be paid to Tenant as earned.
 
    The Security Deposit shall be in the following amounts during the  following
time periods of the Lease Term:
 
<TABLE>
<S>                                            <C>
Commencement Date until the Fifth Anniversary
 of the Commencement Date                                       $ 2,800,000
Fifth Anniversary of the Commencement Date
 until the Tenth Anniversary of the
 Commencement Date                                              $ 1,850,000
Tenth Anniversary of the Commencement Date
 until the Thirteenth Anniversary of the
 Commencement Date                                              $   900,000
Thirteenth Anniversary of the Commencement
 Date until the Fourteenth Anniversary of the
 Commencement Date                                              $   500,000
After the Fourteenth Anniversary of the
 Commencement Date                                              $         0
</TABLE>
 
                                       17
<PAGE>
19. PREPAID RENT & SECURITY DEPOSIT (CONTINUED)
    Landlord  may from time to time draw upon the Security Deposit, if, but only
if, one of the following "Drawing Conditions" is satisfied:
 
    (1)  FIRST DRAWING CONDITION.  The Tenant fails to pay any Base Rent payable
under this Lease  within thirty (30)  days following notice  to Tenant that  the
amount  is past due, and as of the date  of the notice of such past due rent the
most recent public financial statement filing in Tenant's 10K or 10Q filed  with
the  Securities Exchange  Commission ("SEC")  reflects an  amount of shareholder
equity of less than Twenty-Five  Million Dollars ($25,000,000.00). In the  event
Tenant  becomes  a  private company  and  no  longer files  with  the  SEC, such
shareholder  equity  shall  be  measured  based  on  audited  annual   financial
statements prepared in accordance with generally accepted accounting principles.
 
    (2)    SECOND DRAWING  CONDITION.   The Tenant  fails to  pay any  Base Rent
payable under this Lease within thirty (30) days following notice to Tenant that
the amount is past due.
 
    (3)  THIRD DRAWING CONDITION.  Landlord  has not received a renewed ILC  nor
an  ILC commitment issued for a minimum of  an additional one (1) year period as
of the date which is fourteen (14) days prior to the then stated expiration date
of the ILC.
 
    In the event  of the  First Drawing Condition  set forth  above occurs,  the
Landlord  shall have the right  to draw upon the ILC  and retain the proceeds of
said ILC  or  other form  of  Security Deposit  held  hereunder as  payment  for
Tenant's  violation of  the security  provision set  forth herein.  In no event,
however, shall  any  payments  rendered hereunder  be  construed  as  liquidated
damages  and  Landlord shall  have all  rights  at law  and in  equity reserved;
provided, however, that  the amount  of the  Security Deposit  paid to  Landlord
shall  reduce, but not below  zero, the amount of damages  which may be owing by
Tenant to Landlord on account of the Event of Default.
 
    In the event the  Second Drawing Condition occurs,  the Landlord shall  have
the  right to draw upon the ILC and retain the amount of proceeds of said ILC or
other form of Security Deposit  held hereunder equal to  the amount of past  due
Base  Rent  payable  under the  terms  of  the Lease  plus  reasonable  costs of
collection thereof  with the  balance of  the  ILC proceeds  to be  remitted  to
Landlord's  lender,  Shawmut Bank,  N.A. (the  "Custodian"), as  custodian. Such
proceeds shall be  held by Custodian  in escrow under  the Pledge and  Custodial
Agreement  as required  for any  non-ILC Security  Deposit hereunder  unless and
until the ILC is replaced with another  ILC complying with this section. If  the
amount  of said past due Base Rent plus costs is not reimbursed by Tenant in the
form of a replacement ILC or additional Security Deposit to the Custodian for  a
period  of sixty (60)  days following notice  to Tenant that  the amount of Base
Rent is  past  due, then,  upon  written  notice from  Landlord,  the  remaining
proceeds of the ILC or other form of Security Deposit held by Custodian shall be
immediately  remitted  to  Landlord as  payment  for Tenant's  violation  of the
security provision set forth herein and treated in the manner described above as
if the First Drawing Condition occurred.
 
    If the Third Drawing Condition is satisfied, all of the proceeds of the  ILC
may  be drawn for immediate  remittance to Custodian and  such proceeds shall be
held by Custodian in escrow under the Pledge and Custodial Agreement as required
for any non-ILC Security Deposit hereunder, unless and until the ILC is replaced
with another ILC complying with this Section.
 
    In the  event the  Security Deposit  or any  portion thereof  is applied  by
Landlord  to cure any failure of the Tenant to pay Base Rent owing by the Tenant
hereunder, Tenant agrees to restore the deposit to the full amount thereof  upon
demand. The Security Deposit (or so much of it that has not been applied to cure
Tenant's  default in accordance with this paragraph) shall be returned to Tenant
within fourteen (14) days following the expiration of the Lease Term.
 
    If Landlord transfers  the Premises  during the Lease  Term, Landlord  shall
deliver  the Security Deposit to the transferee of Landlord's interest, in which
event the transferring  Landlord will  be released  from all  liability for  the
return of the Security Deposit.
 
                                       18
<PAGE>
19. PREPAID RENT & SECURITY DEPOSIT (CONTINUED)
    In  the event  Tenant fails to  pay any  Base Rent payable  under this Lease
within thirty (30) days following notice to Tenant that the amount is past  due,
but  Tenant's shareholder  equity is determined  in the  First Drawing Condition
stated above to  be greater than  Twenty-Five Million Dollars  ($25,000,000.00),
then the parties agree that the Security Deposit (including any ILC constituting
the Security Deposit) shall continue to be maintained and survive any Default by
Tenant under this Lease. In addition, if any such Default in a Base Rent payment
occurs, then the amortization of the amount of the Security Deposit as the Lease
Term  elapses, as specified above, shall be suspended for the time period of any
such Default. Upon cure of the Default,  the Security Deposit may be reduced  in
accordance with the foregoing schedule.
 
    The  obligations  of  this  Section  19  shall  survive  any  expiration  of
termination of this Lease.
 
20. [INTENTIONALLY DELETED.]
 
21. [INTENTIONALLY DELETED.]
 
22. ATTORNEYS' FEES
    Notwithstanding anything  to  the contrary  in  the Lease  Form,  if  either
Landlord  or Tenant shall  bring any action  or legal proceeding  for an alleged
breach of any provision of this Lease, to recover rent, to terminate this  Lease
or  otherwise to  enforce, protect  or establish  any term  or covenant  of this
Lease, the prevailing  party shall  be entitled  to recover  as a  part of  such
action  or  proceeding,  or  in  a separate  action  brought  for  that purpose,
reasonable attorneys' fees, court costs, and expert fees as may be fixed by  the
court.  "Prevailing  party"  as used  in  this  Paragraph includes  a  party who
dismisses an action for recovery hereunder  in exchange for sums allegedly  due,
performance  of  covenants  allegedly breached  or  considerations substantially
equal to the relief sought in the action.
 
23. TENANT'S RIGHTS ON TERMINATION
    Landlord acknowledges  that  the  Property  was  designated  by  Tenant  for
acquisition  by Landlord.  Accordingly, if  this Lease  terminates prior  to the
Commencement Date  because  Landlord is  unwilling  or unable  to  complete  the
Improvements  in accordance  with this Lease  and the  Improvement Agreement for
causes other than the Default  of Tenant, then Tenant  shall have the option  to
purchase  the  Premises  (including  the  Property  and  the  Improvements  then
existing) from Landlord. This  option may be exercised  at anytime prior to  the
twentieth  (20th) day following delivery of Landlord's notice to Tenant that the
Lease has terminated  and that  if Tenant does  not exercise  the option  herein
granted  within twenty  (20) days  following delivery  of said  notice then such
option shall be deemed waived. Upon exercise by Tenant of its option to purchase
the Landlord shall sell the Premises to the Tenant and the Tenant shall purchase
the Premises from the  Landlord. To facilitate such  purchase the parties  shall
execute  a purchase agreement memorializing their obligations and containing any
other provisions required to  complete the conveyance  in accordance with  local
custom;  provided, however that if the  parties cannot agree upon such customary
terms within ten (10)  days following either party's  request for an  agreement,
then the customary terms shall be determined by the presiding judge of the Essex
County   court  having   jurisdiction  over  the   Premises  in   the  State  of
Massachusetts. The purchase shall close on the forty-fifth (45th) day  following
delivery  to Landlord  of Tenant's  exercise notice.  The purchase  price of the
property shall be equal to that portion of the Construction Cost (as defined  in
the  Improvement Agreement) actually  paid or incurred by  the Landlord prior to
the date of  the closing of  the sale of  the Premises to  the Tenant, less  any
damages legally recoverable by Tenant on account of Landlord's default. Title to
the  Premises shall be delivered to Tenant in the condition received by Landlord
from the Seller, as evidenced by a  title insurance policy in the form  obtained
by Landlord when it purchased the Property from said seller.
 
                        [SIGNATURE BLOCKS ON NEXT PAGE]
 
                                       19
<PAGE>
    WITNESS  the  execution hereof,  under seal,  in  any number  of counterpart
copies, each of which counterpart copies shall  be deemed to be an original  for
all purposes as of the day and year first above written.
                                          BERKSHIRE-NEWBURYPORT LIMITED
                                          PARTNERSHIP, Landlord
 
<TABLE>
<S>                                            <C>
                                               By
 
- --------------------------------------------   -------------------------------------------
Witness                                        OSCAR N. PLOTKIN, President of
                                               Newburyport General Corp.,
                                               its general partner
</TABLE>
 
                                          GENUS, INC., Tenant
 
<TABLE>
<S>                                            <C>
                                               By
 
- --------------------------------------------   -------------------------------------------
Witness                                        Its
                                               --------------------------------------------
</TABLE>
 
          [ATTACH NOTARY ACKNOWLEDGMENTS AND SEAL AS REQUIRED BY LAW]
 
                                       20
<PAGE>
                                   EXHIBIT A
                                LEASED PREMISES
 
                                       21
<PAGE>
                                   EXHIBIT B
                      TENANT'S "SPECIALIZED IMPROVEMENTS"
 
  [NEED TO ATTACH INITIAL LIST -- LIST WILL BE AUGMENTED AT TENANT'S REQUEST,
                 IF CONSTRUCTION COST EXCEEDS [COST ESTIMATE]]
 
                                       22
<PAGE>
                                   EXHIBIT C
                 [ATTACH FORM OF PLEDGE & CUSTODIAL AGREEMENT]
 
                                       23
<PAGE>
                                   EXHIBIT D
                         [ATTACH ENVIRONMENTAL REPORTS]
 
                                       24
<PAGE>
                                   EXHIBIT E
                 [ATTACH FORM OF IRREVOCABLE LETTER OF CREDIT]
 
                                       25

<PAGE>
                                                                    EXHIBIT 11.1
 
                                  GENUS, INC.
                       COMPUTATION OF EARNINGS PER COMMON
                        AND COMMON EQUIVALENT SHARE (A)
                                 (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                                                     YEAR ENDED DECEMBER 31,
                                                                                 -------------------------------
                                                                                   1995       1994       1993
                                                                                 ---------  ---------  ---------
 
<S>                                                                              <C>        <C>        <C>
Average common shares outstanding..............................................     15,334     12,545     12,170
 
Computation of incremental outstanding shares
  Net effect of dilutive stock options based on treasury stock method..........        729        561     --
                                                                                 ---------  ---------  ---------
                                                                                    16,063     13,106     12,170
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
Net income (loss)..............................................................  $  19,282  $   4,177  $  (6,883)
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
Earnings (loss) per share (b)..................................................  $    1.20  $    0.32  $   (0.57)
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
</TABLE>
 
(a) See Note 1 of Notes to Consolidated Financial Statements.
 
(b) Primary and fully diluted earnings per share are materially the same for all
    years presented.
 
                                      S-1
<PAGE>
                                                                     SCHEDULE II
 
                                    GENUS, INC.
                         VALUATION AND QUALIFYING ACCOUNTS
                FOR THE YEARS ENDED DECEMBER 31, 1995, 1994 AND 1993
                                   (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                                    COLUMN B     COLUMN C                 COLUMN E
                                                                   -----------  -----------              -----------
COLUMN A                                                           BALANCE AT   CHARGED TO    COLUMN D     BALANCE
- -----------------------------------------------------------------   BEGINNING    COSTS AND   ----------    AT END
DESCRIPTION                                                         OF PERIOD    EXPENSES    DEDUCTIONS   OF PERIOD
- -----------------------------------------------------------------  -----------  -----------  ----------  -----------
<S>                                                                <C>          <C>          <C>         <C>
1995
Allowance for doubtful accounts..................................   $     250    $      --   $       --   $     250
Inventory reserves...............................................       2,665          995          389       3,271
Product warranty and installation accruals.......................       2,394        3,640        1,716       4,318
1994
Allowance for doubtful accounts..................................         250            0            0         250
Inventory reserves...............................................       3,250          947       (1,533)      2,665
Product warranty and installation accruals.......................       2,042        2,094       (1,742)      2,394
1993
Allowance for doubtful accounts..................................         270          475         (495)        250
Inventory reserves...............................................       4,766        1,419       (2,935)      3,250
Product warranty and installation accruals.......................       1,737        1,381       (1,076)      2,042
</TABLE>
 
                                      S-2

<PAGE>
                                                                    EXHIBIT 13.1
 
                              FINANCIAL HIGHLIGHTS
                     (IN THOUSANDS, EXCEPT PER SHARE DATA)
 
<TABLE>
<CAPTION>
                                                                                FOR THE YEARS ENDED DECEMBER 31,
                                                                                ---------------------------------
                                                                                   1995        1994       1993
                                                                                -----------  ---------  ---------
<S>                                                                             <C>          <C>        <C>
Net sales.....................................................................  $   100,350  $  63,616  $  44,236
Net income (loss).............................................................       19,282      4,177     (6,883)
Net income (loss) per share...................................................         1.20       0.32      (0.57)
Working capital...............................................................       50,061     23,201     22,162
Shareholders' equity..........................................................       75,361     36,986     31,751
</TABLE>
<PAGE>
To Our Shareholders
 
    Genus  achieved  considerable  success  during  1995  due  to  a substantial
increase in the shipments of our high energy (MeV) ion implantation and chemical
vapor deposition (CVD) systems. Our sales grew 58% over 1994 to $100.4  million.
In  addition,  our entire  product  line has  been  strengthened with  the first
production shipments of our  CVD cluster tool platform  and the introduction  of
our third-generation MeV ion implanter.
 
    Throughout  1995,  the  semiconductor  industry  continued  to  expand  at a
substantial pace.  A sizable  portion of  this  gain is  a result  of  increased
integrated  circuit (IC)  sales that  were fueled  primarily by  strong personal
computer and  telecommunications  demand. As  a  supplier of  capital  equipment
specifically  designed to  provide low-cost  production solutions  for both thin
films and ion implantation, Genus is  well positioned to take advantage of  this
market expansion.
 
    From  late 1994  through 1995,  we enhanced our  product line  and now offer
stronger and more competitive  systems than ever before.  These new products  --
the  Genus  7000  and  the  Tandetron-TM-  1520  --  build  upon  our technology
leadership and provide highly competitive  process results, high throughput  and
low cost-of-ownership.
 
    The  initial shipments of  our Genus 7000, a  single-wafer CVD cluster tool,
were installed  directly into  production at  one of  the world's  leading  DRAM
manufacturers. The rapid migration of these systems into production, rare in the
semiconductor industry, attests to the cost savings and reliability demonstrated
by the 7000 system.
 
    High  energy  ion  implantation continues  to  be  an area  of  great growth
potential for Genus. MeV ion implantation  demand is driven by the  technology's
ability to reduce manufacturing costs for memory and logic devices. Using Genus'
buried  implanted  layer  for  lateral  isolation  (BILLI)*  structure  and  our
Tandetron 1520  implanter, manufacturers  can  save up  to  20% on  total  wafer
fabrication costs.
 
    In  January of  1996, we strengthened  our technology  organization with the
addition of Thomas Seidel, formerly SEMATECH's director of strategic technology.
Dr. Seidel joins us as chief technical officer. During the last year, we further
broadened our management team with the addition of James Burns as executive vice
president and general manager  of our Thin Film  Division and Kent Robertson  as
executive  vice president and chief financial officer, and with the promotion of
John Ogawa Borland to the post of vice president of strategic technology.
 
    In 1995, the strengthening  of our customer support  program resulted in  an
award  for  exemplary  service  from  Samsung. We  are  building  on  this solid
foundation by  establishing locally  based service  centers such  as our  wholly
owned  Korean subsidiary, which opened  in January of 1996.  In addition, we are
supporting our existing customer base with ongoing product enhancements that add
value to their installed systems.
 
    I would like to thank all  Genus employees for their continuing  dedication.
Their  hard  work has  made it  possible for  us to  make the  important changes
necessary to position the Company for  future growth. We are confident that  the
significant  additions to  our product  line and  the expansion  of our customer
support capabilities  will enable  us to  maintain a  competitive edge.  We  are
continuing  to leverage our technology leadership  to adapt to the ever-changing
landscape of our dynamic market.
 
                                              William W. R. Elder
                                          Chairman and Chief Executive Officer
 
                                       2
<PAGE>
A CHANGING MARKET
 
    The  explosive  growth of  the semiconductor  industry  is nothing  short of
phenomenal. Even conservative industry forecasts  have been revised upward  with
many  analysts  now anticipating  a market  of  $350 billion  by the  year 2000.
Leading this tremendous growth is  the proliferation of computer technology  and
the  expanding range of  other electronic products  now incorporating integrated
circuits.
 
    The continued decrease  in IC  cost-per-function is the  engine driving  the
growth  of the semiconductor  industry. With higher  cost-effectiveness and more
capability on each chip, the electronics industry has created enormous and  very
challenging  market opportunities.  For semiconductor  manufacturers, this shift
has made cost reduction a vital objective.
 
    REDUCED PRODUCTION  COSTS   As  a  leader in  innovative  technologies  that
significantly  reduce the cost of fabricating semiconductors, Genus continues to
capitalize on  this  heightened  emphasis  on  cost  reduction.  Genus  MeV  ion
implantation  and  CVD products  break  new ground  by  enabling chip  makers to
simplify their IC production processes and lower their cost-of-ownership.
 
TECHNOLOGY LEADERSHIP
 
    In 1995,  Genus  demonstrated ongoing  technical  leadership in  its  served
markets  and strengthened its product offering  with the introduction of two new
systems. The  Company shipped  its first  integrated cluster  tool for  tungsten
silicide  thin-film deposition, the Genus  7000, directly into production. Later
in 1995, Genus took an important evolutionary step in MeV ion implantation  with
the introduction of the Tandetron 1520 MeV ion implantation system.
 
HIGH ENERGY ION IMPLANTATION
 
    MeV  ion  implantation, used  in the  fabrication of  both memory  and logic
devices, implants electrically  charged dopant  ions into  a silicon  substrate.
Driven   by  the  technology's   ability  to  simplify   processing  and  reduce
manufacturing costs by  up to 20%,  the MeV ion  implantation market tripled  in
1995 and is projected to grow another 50% in 1996. Analysts predict that MeV ion
implantation  will continue  to be  one of  the fastest-growing  segments of the
front-end capital equipment market.
 
    Genus' Tandetron  1520 MeV  ion implantation  system was  introduced in  the
fourth  quarter of  1995. Designed to  be a "production  workhorse," it provides
significant cost  savings for  both memory  and logic  IC production.  In  logic
devices  using Genus' BILLI structure, the  Tandetron 1520 replaces the need for
expensive silicon epitaxy. Eliminating this step can save manufacturers as  much
as  $229 per  8-inch wafer  according to  VLSI Research,  Inc. In  addition, the
process reduces cycle  time and  boosts capacity  by up  to 16%.  A "super  fab"
manufacturer  producing 40,000 wafer  starts per month can  gain savings of more
than $100 million per year.* The wide energy range of the Tandetron also enables
it to perform medium current implants that further reduce manufacturing costs by
increasing product utilization.
 
    THIN-FILM DEPOSITION  Tungsten silicide  CVD technology is commonly used  to
produce  faster memory devices. For more than 12 years, Genus has been a leading
supplier in this  market, a  position the  Company strengthened  with the  first
production  shipments  of  the  Genus 7000.  This  modular,  single-wafer system
provides  significantly  higher  throughput,  improved  reliability  and   lower
cost-of-ownership.  The benefits  of the 7000  were validated  when Samsung, the
world's leading DRAM  manufacturer, moved  its first  system shipments  directly
into  16-Mb DRAM production at 0.35  micron m. The system's dichlorosilane (DCS)
chemistry provides the higher throughput, step coverage, lower fluorine  content
and predictable device speed essential for advanced ICs.
 
    To  support both  its MeV  ion implantation  and CVD  advanced technologies,
Genus established  a local  service presence  and greatly  expanded its  support
organizations  in Korea and Japan. These efforts, and other strategies currently
under  development,   are  designed   to  strengthen   the  Company's   customer
satisfaction programs and capabilities throughout the world.
 
                                       3
<PAGE>
    Genus'  current  product offerings  represent the  leading edge  of industry
technology. Both MeV ion implantation and CVD products provide the  capabilities
essential  for the  most advanced devices  as well as  the cost-saving potential
vital to success in today's rapidly growing semiconductor market.
 
LOOKING TOWARD THE FUTURE
 
    Genus' current product line provides  a solid foundation for future  growth.
Through   continued   innovation   and  improvement   combined   with  strategic
partnerships, Genus will be  able to provide more  robust solutions for a  wider
range of semiconductor processing steps as technology advances into the future.
 
    NEW  FILMS  With the multimodule cluster  tool design of the Genus 7000, the
Company will offer a wider range of thin films in 1996. New innovative CVD films
are currently under  development in  joint programs  with leading  semiconductor
manufacturers.  In addition, Genus' DCS chemistry is also expected to gain wider
industry acceptance as  its improved  productivity and film  properties make  it
more attractive for submicron manufacturing.
 
    PIONEERING  FUNDAMENTAL CHANGE   During 1995, Genus  introduced new advanced
MeV ion  implantation  techniques that  promise  to  change the  way  many  CMOS
semiconductors  will be built. One of  these techniques, Genus' BILLI structure,
is expected to  gain in  usage as  more manufacturers  realize significant  cost
savings  as a result of the process' ability  to eliminate 20 - 40 steps in CMOS
memory  and  logic  device  production.  To  create  added  momentum  for  wider
acceptance  in the logic  market, Genus initiated  joint development programs to
use the BILLI structure for epi replacement with several key customers in  1995.
A  key milestone was achieved in January of  1996 when a major U.S. logic device
manufacturer announced the fabrication of the  world's first logic IC using  the
BILLI structure and a Genus MeV ion implanter to replace the epi layer.
 
    As the industry moves toward larger wafer sizes with 300-mm wafer production
as  early  as  1997, the  process  step  reduction made  possible  by  the BILLI
structure's  epi  replacement  capabilities  will  gain  in  importance.  Genus'
Tandetron  1520 MeV  ion implanter  is ideally suited  to take  advantage of the
economic opportunities created with this new technology.
 
    Through continuously pursuing technical leadership and anticipating industry
technology changes,  Genus  is  positioned  for  growth  in  tomorrow's  dynamic
semiconductor market.
 
                                       4
<PAGE>
                      SELECTED CONSOLIDATED FINANCIAL DATA
 
               (IN THOUSANDS, EXCEPT PER SHARE AND EMPLOYEE DATA)
 
<TABLE>
<CAPTION>
                                                                   FOR THE YEARS ENDED DECEMBER 31,
                                                      ----------------------------------------------------------
                                                         1995         1994        1993        1992       1991
                                                      -----------  -----------  ---------  ----------  ---------
 
<S>                                                   <C>          <C>          <C>        <C>         <C>
Net sales...........................................  $   100,350  $    63,616  $  44,236  $   40,079  $  51,528
Gross profit........................................       39,239       24,967     13,900       9,661     18,646
Gross profit as a percentage of sales...............           39%          39%        31%         24%        36%
Income (loss) from operations.......................  $     7,976  $     3,729  $  (6,974) $  (17,382) $  (5,130)
Net income (loss)...................................       19,282        4,177     (6,883)    (17,095)    (3,980)
Net income (loss) per share.........................  $      1.20  $      0.32  $   (0.57) $    (1.45) $   (0.35)
Cash and cash equivalents...........................  $    12,630  $    10,188  $  10,423  $    9,684  $  22,169
Total assets........................................       95,247       54,997     45,205      49,258     60,957
Long-term obligations, less current portion.........        1,034          523      1,042       2,342        168
Working capital.....................................       50,061       23,201     22,162      29,455     42,817
Shareholders' equity................................       75,361       36,986     31,751      37,771     54,390
Backlog.............................................       44,996       44,011     18,945       7,783     15,656
Number of employees.................................          319          264        212         246        259
</TABLE>
 
                                       5
<PAGE>
                    MANAGEMENT'S DISCUSSION AND ANALYSIS OF
                 FINANCIAL CONDITION AND RESULTS OF OPERATIONS
 
RESULTS OF OPERATIONS
 
1995 COMPARED TO 1994
 
    Genus'  net sales  in 1995 increased  58 percent  over net sales  in 1994 to
$100.4 million. The increase in net sales was primarily due to the  introduction
of  the Genus 7000  tungsten chemical vapor deposition  (CVD) system with higher
average selling prices  (ASP) and,  secondarily, to  greater unit  sales of  the
Company's  high energy (MeV) ion implantation  system. In addition, the increase
was driven by  continued strong  demand for capital  equipment by  semiconductor
manufacturers, particularly in Korea. The increase in net sales was made despite
the  continued competitiveness in the markets  the Company serves. Foreign sales
accounted for 88  percent of the  Company's net  sales in 1995,  compared to  89
percent  in 1994. Net sales from  the Company's customer support group increased
five percent when compared to the same period in 1994.
 
    Gross profit for the years ended 1995 and 1994 was 39 percent of net  sales.
While  there was no change in the Company's consolidated gross profit percentage
between 1995 and 1994, gross margins on products sold by the Company's Thin Film
Division (TFD)  and Ion  Technology Division  (ITD) in  1995 were  significantly
different.  During 1995, gross  margins at TFD  improved three percentage points
and eroded five percentage points at ITD. The improvement in gross margin at TFD
was as a result of  higher ASP on Genus  7000 system sales, improved  production
cycle times and manufacturing efficiencies due to increased volumes. The erosion
in  gross margins at ITD  was due principally to  increased service and warranty
costs, higher product transition costs  associated with the introduction of  the
division's  new  Tandetron  1520  MeV  ion  implantation  system,  manufacturing
inefficiencies related to  volume and product  transition and lower  ASP due  to
competitive pressures.
 
    In 1995, research and development (R&D) expenses were $12.3 million compared
to $9.0 million in 1994, a 36 percent increase. The $3.3 million increase in R&D
was  due to continued  investments made by the  Company in additional headcount,
higher new product development material costs and greater depreciation  expenses
associated with equipment purchased for new product development. As a percentage
of  net sales,  R&D expenses in  1995 and 1994  were 12 percent  and 14 percent,
respectively. The decrease  in R&D  expenses as a  percentage of  sales was  due
principally  to the  increased net sales  volume. The Company's  R&D expenses in
1995 and 1994 are net  of the capitalization of  software costs of $0.9  million
and  $0.8  million, respectively.  The Company  serves  markets that  are highly
competitive and rapidly changing. For  these reasons, the Company believes  that
it  must  continue to  maintain its  investment in  R&D to  develop competitive,
market driven products. In addition,  the Company continually evaluates its  R&D
investment in view of evolving competitive and market conditions.
 
    Selling,  general  and administrative  (S,G&A) expenses  as a  percentage of
sales were 19 percent  for both years  ended December 31, 1995  and 1994. On  an
absolute  dollar  basis, S,G&A  expenses for  the year  ended December  31, 1995
increased $6.8 million when  compared to the same  period in 1994. The  absolute
dollar  increase was  primarily due to  headcount additions  and related payroll
costs to  support  the  Company's  growth rate,  higher  sales  commissions  and
incentives and increased depreciation expense.
 
    During  the year ended  December 31, 1995,  the Company had  $0.3 million in
other income, compared to $0.7  million in other income  for the same period  in
1994.  The  decrease in  other  income was  due  to the  write-off  of leasehold
improvements in connection  with the  relocation of the  Company's ITD  facility
scheduled  for mid-1996 and  the gain on  the sale of  property and equipment in
1994, but not in 1995;  offset by higher interest  income earned on higher  cash
balances outstanding during 1995 when compared to the same period in 1994.
 
                                       6
<PAGE>
                    MANAGEMENT'S DISCUSSION AND ANALYSIS OF
                 FINANCIAL CONDITION AND RESULTS OF OPERATIONS
 
    The  effective  tax rate  for the  year  ended December  31, 1995  was (132)
percent compared to an effective  tax rate of 5 percent  for the same period  in
1994.  The significant change in the effective tax rate was due primarily to the
one-time recognition  of  deferred  tax  assets  in  accordance  with  Financial
Accounting  Standard No. 109, "Accounting for Income Taxes." As a result of this
one-time recognition in  1995, the  Company anticipates that  the effective  tax
rate in 1996 will approximate the statutory rate.
 
    The  Company  has  continued  to  experience  positive  order  and financial
performance in recent quarters. These results have been primarily due to  strong
market  conditions for the Company's products  in Korea, and one Korean customer
in  particular,  as   a  result  of   increased  investments  in   semiconductor
manufacturing  facilities in this  region. However, due  to the inconsistency in
the Company's order rate during the second half of 1995, the Company's  reliance
on  one  customer  for  a  significant  portion  of  its  orders,  the continued
competitive market environment for the  Company's products and the  historically
cyclical  nature  of the  semiconductor  equipment market,  the  Company remains
cautious about the short-term prospects for its business. The Company  continues
to  make  strategic investments  in  new product  development  and manufacturing
improvements with a view  to improving future  performance by enhancing  product
offerings;  however, such  investment may adversely  affect short-term operating
performance.  The  Company   is  also  continuing   its  efforts  to   implement
productivity improvements for future operating performance. The Company believes
that  the future economic  environment could continue to  lengthen the order and
sales cycles for its products, causing it to continue to simultaneously book and
ship some orders during the same quarter.
 
1994 COMPARED TO 1993
 
    Genus' net sales in 1994 were $63.6 million, an increase of 44 percent  over
net sales in 1993 of $44.2 million. This increase in net sales was primarily due
to  increased system  sales of  the Company's MeV  ion implantation  system as a
result  of  increased  market  acceptance   of  MeV  ion  implantation  in   the
semiconductor   manufacturing  process  and,  secondarily,  to  changes  in  the
Company's CVD product mix with higher ASP. In addition, the increase was  driven
by   continued   strong  demand   for   capital  equipment   from  semiconductor
manufacturers, particularly in Korea where significant investments were made  in
dynamic  random-access  memory  (DRAM) manufacturing  facilities.  Foreign sales
accounted for 89  percent of  the Company's  net sales  in 1994  compared to  84
percent  in 1993. Net sales from the Company's customer support group were $15.6
million in 1994 compared to $13.5 million in 1993, a 16 percent increase.
 
    Gross margin in  1994 was 39  percent compared  to 31 percent  in 1993.  The
improvement  in gross margin was due to increased unit sales volumes with higher
ASP, improved  manufacturing efficiencies  due to  increased sales  volumes  and
other gross margin improvement programs implemented by the Company. In 1994, the
Company  included all service expenses in cost of goods sold. Prior to 1994, the
Company included a portion of  service costs in S,G&A  expenses. As a result  of
this  reclassification,  the financial  statements for  prior periods  have been
reclassified to  conform  with the  presentation  in 1994.  Previously  reported
results were not affected by this reclassification.
 
    In  1994, R&D expenses were $9.0 million compared to $7.8 million in 1993, a
16 percent  increase. The  $1.2 million  increase  in R&D  expenses was  due  to
increased  investments made by the Company in new product development in both of
its divisions. As a percentage of net sales, R&D expenses in 1994 and 1993  were
14  percent and  18 percent,  respectively. The  decrease in  R&D expenses  as a
percentage of sales  was primarily due  to the increased  net sales volume.  The
Company's  R&D expenses in 1994 are net of software capitalization costs of $0.8
million.
 
    As a  percentage of  net sales,  S,G&A expenses  in 1994  and 1993  were  19
percent  and 28 percent, respectively. This significant change was primarily due
to increased net sales volumes. On  an absolute dollar basis, S,G&A expenses  in
1994 were marginally lower than 1993 levels.
 
                                       7
<PAGE>
                    MANAGEMENT'S DISCUSSION AND ANALYSIS OF
                 FINANCIAL CONDITION AND RESULTS OF OPERATIONS
 
    During  1994, the  Company earned $0.7  million in other  income compared to
$0.1 million in other income  in 1993. This increase  was primarily a result  of
the  gain on the  sale of property  and equipment of  approximately $0.5 million
during the second quarter of 1994.  During 1993, the Company incurred a  special
charge   of  $0.6   million  related  to   the  severance   packages  and  other
payroll-related costs associated with a reduction in work force during 1993.
 
    Effective January 1, 1993, the Company changed its method of accounting  for
income  taxes by  adopting Statement of  Financial Accounting  Standards No. 109
"Accounting for Income Taxes." The effective tax rate of 1994 was 5 percent  and
related primarily to alternative minimum tax. The low effective tax rate was due
to  the  Company's utilization  of net  operating  loss carryforwards  to offset
regular taxable income.
 
LIQUIDITY AND CAPITAL RESOURCES
 
    During the 12 months  ended December 31, 1995,  the Company's cash and  cash
equivalents  increased $2.4 million due principally  to issuance of common stock
of $18.3  million,  offset by  cash  used by  operations  of $4.1  million,  the
repayment of short-term bank borrowings of $3.8 million, repayments of long-term
debt of $1.4 million, the purchase of property and equipment of $5.6 million and
the capitalization of software development cost of $0.9 million.
 
    The  $4.1  million  decrease  in  cash  from  operating  activities resulted
primarily from an increase  of $11.6 million in  accounts receivable due to  the
inability  to collect  the receivables  from shipments  made late  in the fourth
quarter, an increase  in inventories of  $9.8 million as  a result of  inventory
purchases  received late in the fourth quarter to support shipments in the first
quarter of 1996, an increase in other  assets of $0.7 million related to  higher
long-term  deposits and an increase in deferred tax assets of $11.6 million. The
decrease in cash from operations was primarily offset by an increase in accounts
payable of $1.3  million as a  result of  inventory purchases made  late in  the
quarter  for fourth-quarter shipments  and the cash  management practices of the
Company, and an increase  of $4.4 million in  accrued expenses due to  increased
retrofit costs, increased warranty and commission accruals as a result of higher
sales  volumes, and  increased accruals  for profit  sharing and  incentives. In
addition,  the  decrease  in  cash  from  operating  activities  was  offset  by
depreciation and amortization of $4.2 million and net income of $19.3 million.
 
    At  December 31,  1995, the Company's  primary source of  funds consisted of
$12.6 million in  cash and cash  equivalents and funds  available under a  $10.0
million revolving line of credit. The line of credit is secured by substantially
all  of the assets of the Company and expires in May 1996. At December 31, 1995,
the Company had no borrowings outstanding under the line of credit.
 
    Capital expenditures during 1995 were $5.6 million and related primarily  to
acquisition  of machinery and  equipment for the  Company's R&D and Applications
Laboratories. In September 1995, the Company entered into an agreement to  lease
a  new facility in  Newburyport, Massachusetts for  its Ion Technology Division.
The Company  estimates  that  it  will expend  approximately  $3.0  million  for
leasehold  improvements  and equipment  associated  with the  new  facility. The
Company intends  to finance  these expenditures  through new  or existing  lease
lines.  Furthermore,  the  Company anticipates  that  it will  continue  to make
additional capital expenditures during 1996 that will be funded through existing
working capital or lease financing.
 
    On February 17,  1995, the  Company sold  2,539,018 shares  of common  stock
through   a  private  placement  offering,   which  generated  net  proceeds  of
approximately $16.2 million.
 
    The Company believes that existing cash and cash equivalents, cash generated
from operations, if any,  and existing credit facilities  will be sufficient  to
satisfy its cash needs in the near term and for the foreseeable future.
 
                                       8
<PAGE>
                          CONSOLIDATED BALANCE SHEETS
                       (IN THOUSANDS, EXCEPT SHARE DATA)
 
<TABLE>
<CAPTION>
                                                                                             AS OF DECEMBER 31,
                                                                                           ----------------------
                                                                                              1995        1994
                                                                                           ----------  ----------
<S>                                                                                        <C>         <C>
ASSETS
Current Assets:
  Cash and cash equivalents..............................................................  $   12,630  $   10,188
  Accounts receivable (net of allowance for doubtful accounts of $250 in 1995 and
   1994).................................................................................      26,796      15,169
  Inventories............................................................................      24,437      14,677
  Other current assets...................................................................         623         655
  Current deferred taxes.................................................................       4,427
                                                                                           ----------  ----------
    Total current assets.................................................................      68,913      40,689
 
Property and equipment, net..............................................................      14,627      11,492
  Other assets, net......................................................................       3,824       2,816
Noncurrent deferred taxes................................................................       7,883
                                                                                           ----------  ----------
                                                                                           $   95,247  $   54,997
                                                                                           ----------  ----------
LIABILITIES
Current Liabilities:
  Short-term bank borrowings.............................................................                   3,800
  Accounts payable.......................................................................       7,129       5,858
  Accrued expenses.......................................................................      11,042       6,625
  Current portion of long-term debt and capital lease obligations........................         681       1,205
                                                                                           ----------  ----------
    Total current liabilities............................................................      18,852      17,488
                                                                                           ----------  ----------
Long-term debt and capital lease obligations, less current portion.......................       1,034         523
                                                                                           ----------  ----------
Commitments (Note 8)
 
SHAREHOLDERS' EQUITY
Preferred stock, no par value:
  Authorized, 2,000,000 shares;
    Issued and outstanding, none
Common stock, no par value:
  Authorized, 20,000,000 shares;
    Issued and outstanding, 16,163,539 shares (1995) and 12,813,028 shares (1994)........      95,683      76,590
  Accumulated deficit....................................................................     (20,322)    (39,604)
                                                                                           ----------  ----------
  Total shareholders' equity.............................................................      75,361      36,986
                                                                                           ----------  ----------
                                                                                           $   95,247  $   54,997
                                                                                           ----------  ----------
</TABLE>
 
    The accompanying notes are an integral part of the financial statements.
 
                                       9
<PAGE>
                     CONSOLIDATED STATEMENTS OF OPERATIONS
                     (IN THOUSANDS, EXCEPT PER SHARE DATA)
 
<TABLE>
<CAPTION>
                                                                                FOR THE YEARS ENDED DECEMBER 31,
                                                                                ---------------------------------
                                                                                   1995        1994       1993
                                                                                -----------  ---------  ---------
<S>                                                                             <C>          <C>        <C>
Net sales.....................................................................  $   100,350  $  63,616  $  44,236
Costs and expenses:
  Cost of goods sold..........................................................       61,111     38,649     30,336
  Research and development....................................................       12,259      8,999      7,788
  Selling, general and administrative.........................................       19,004     12,239     12,466
Special charge................................................................                                620
                                                                                -----------  ---------  ---------
    Income (loss) from operations.............................................        7,976      3,729     (6,974)
Other income, net.............................................................          327        661         91
                                                                                -----------  ---------  ---------
    Income (loss) before provision for (benefit from) income taxes............        8,303      4,390     (6,883)
Provision for (benefit from) income taxes.....................................      (10,979)       213
                                                                                -----------  ---------  ---------
    Net income (loss).........................................................  $    19,282  $   4,177  $  (6,883)
                                                                                -----------  ---------  ---------
Net income (loss) per share...................................................  $      1.20  $    0.32  $   (0.57)
                                                                                -----------  ---------  ---------
Shares used in per share calculations.........................................       16,063     13,106     12,170
                                                                                -----------  ---------  ---------
</TABLE>
 
    The accompanying notes are an integral part of the financial statements.
 
                                       10
<PAGE>
                CONSOLIDATED STATEMENTS OF SHAREHOLDERS' EQUITY
                       (IN THOUSANDS, EXCEPT SHARE DATA)
 
<TABLE>
<CAPTION>
                                                                                   FOR THE THREE YEARS ENDED
                                                                                       DECEMBER 31, 1995
                                                                               ----------------------------------
                                                                                COMMON    ACCUMULATED
                                                                                 STOCK      DEFICIT       TOTAL
                                                                               ---------  ------------  ---------
<S>                                                                            <C>        <C>           <C>
Balances, January 1, 1993....................................................  $  74,669   $  (36,898)  $  37,771
  Issuance of 213,922 shares of common stock under stock option plan.........        344                      344
  Issuance of 254,998 shares of common stock under employee stock purchase
   plan......................................................................        519                      519
  Net loss...................................................................                  (6,883)     (6,883)
                                                                               ---------  ------------  ---------
Balances, December 31, 1993..................................................     75,532      (43,781)     31,751
  Issuance of 214,024 shares of common stock under stock option plan.........        573                      573
  Issuance of 195,274 shares of common stock under employee stock purchase
   plan......................................................................        485                      485
  Net income.................................................................                   4,177       4,177
                                                                               ---------  ------------  ---------
Balances, December 31, 1994..................................................     76,590      (39,604)     36,986
  Issuance of 2,539,018 shares of common stock under private placement
   offering..................................................................     16,222                   16,222
  Issuance of 542,450 shares of common stock under stock option plan.........      1,161                    1,161
  Tax benefit on exercise of stock options...................................        750                      750
  Issuance of 269,043 shares of common stock under employee stock purchase
   plan......................................................................        960                      960
  Net income.................................................................                  19,282      19,282
                                                                               ---------  ------------  ---------
Balances, December 31, 1995..................................................  $  95,683   $  (20,322)  $  75,361
                                                                               ---------  ------------  ---------
</TABLE>
 
    The accompanying notes are an integral part of the financial statements.
 
                                       11
<PAGE>
                     CONSOLIDATED STATEMENTS OF CASH FLOWS
                                 (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                                                FOR THE YEARS ENDED DECEMBER 31,
                                                                               ----------------------------------
                                                                                 1995         1994        1993
                                                                               ---------  ------------  ---------
<S>                                                                            <C>        <C>           <C>
Cash flows from operating activities:
  Net income (loss)..........................................................  $  19,282   $    4,177   $  (6,883)
  Adjustments to reconcile to net cash from operating activities:
    Special charge...........................................................                                  84
(Gain) loss on disposal of property and equipment............................        261         (461)
    Depreciation and amortization............................................      4,244        2,622       3,261
    Deferred taxes...........................................................    (11,560)
    Changes in assets and liabilities:
      Accounts receivable....................................................    (11,627)      (2,442)      2,027
      Inventories............................................................     (9,760)      (3,945)      2,447
      Other current assets...................................................         32           37         291
      Accounts payable.......................................................      1,271        3,632      (1,260)
      Accrued expenses.......................................................      4,417         (558)      2,466
      Other, net.............................................................       (701)         (68)        131
                                                                               ---------  ------------  ---------
        Net cash provided by (used in) operating activities..................     (4,141)       2,994       2,564
                                                                               ---------  ------------  ---------
Cash flows from investing activities:
  Acquisition of property and equipment......................................     (5,594)      (4,671)     (3,543)
  Proceeds from disposition of property and equipment........................                     595
  Sales of marketable securities.............................................                               2,844
  Capitalization of software development costs...............................       (937)        (831)
                                                                               ---------  ------------  ---------
        Net cash used in investing activities................................     (6,531)      (4,907)       (699)
                                                                               ---------  ------------  ---------
Cash flows from financing activities:
  Proceeds from issuance of common stock.....................................     18,343        1,058         863
  Proceeds from short-term bank borrowings...................................                   6,600      11,500
  Payments of short-term bank borrowings.....................................     (3,800)      (4,900)     (9,400)
  Payments of long-term debt.................................................     (1,429)      (1,080)     (1,245)
                                                                               ---------  ------------  ---------
        Net cash provided by financing activities............................     13,114        1,678       1,718
                                                                               ---------  ------------  ---------
Increase (decrease) in cash..................................................      2,442         (235)      3,583
Decrease in marketable securities............................................                              (2,844)
Cash and cash equivalents, beginning of year.................................     10,188       10,423       9,684
                                                                               ---------  ------------  ---------
Cash and cash equivalents, end of year.......................................  $  12,630   $   10,188   $  10,423
                                                                               ---------  ------------  ---------
SUPPLEMENTAL CASH FLOW INFORMATION
Cash paid during the year for:
  Interest...................................................................  $     172   $      180   $     283
  Income taxes...............................................................        209          154          69
Noncash investing and financing activities:
  Purchase of property and equipment under long-term debt obligations........      1,416          842
  Tax benefit on exercise of stock options...................................        750
</TABLE>
 
    The accompanying notes are an integral part of the financial statements.
 
                                       12
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 1. -- NATURE OF OPERATIONS AND SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES
 
NATURE OF OPERATIONS
 
    Genus  develops,  manufactures,  markets  and  services  advanced  thin-film
deposition and  high  energy  (MeV)  ion  implantation  equipment  used  in  the
fabrication   of  advanced  semiconductor  integrated  circuits.  The  Company's
products are  marketed  worldwide  either  directly  to  end  users  or  through
exclusive  sales  representative arrangements.  The Company's  customers include
semiconductor manufacturers located throughout the United States, Europe and  in
the  Pacific Rim including Japan, Korea  and Taiwan. Genus conducts its business
within one industry segment.  The following is a  summary of Genus'  significant
accounting policies.
 
PRINCIPLES OF CONSOLIDATION
 
    The  consolidated financial statements  include the accounts  of Genus, Inc.
and its wholly owned subsidiaries after elimination of intercompany accounts and
transactions.
 
CASH AND CASH EQUIVALENTS
 
    The Company considers all highly liquid investments with a maturity of three
months or less when purchased to be cash equivalents and classifies such amounts
as cash.
 
FAIR VALUE OF FINANCIAL INSTRUMENTS
 
    The carrying amounts  of cash  and cash  equivalents approximates  estimated
fair  value because of the short  maturity of those financial instruments. Based
on rates currently  available to  the Company for  debt with  similar terms  and
remaining   maturities,  the  carrying  value  of  long-term  debt  approximates
estimated fair value.
 
CONCENTRATION OF CREDIT RISK
 
    Financial instruments that potentially subject the Company to concentrations
of credit risk consist  principally of cash and  trade receivables. The  Company
places   its  cash  investments   with  three  high   credit  quality  financial
institutions located in the United  States. The Company performs ongoing  credit
evaluations  of its customers. The Company  does not require collateral from its
customers and maintains an allowance for credit losses, which historically  have
not been material.
 
INVENTORIES
 
    Inventories  are stated at the lower of cost or market, using standard costs
that approximate actual costs, under the first-in, first-out method.
 
DEPRECIATION AND AMORTIZATION
 
    Property and  equipment  are  stated  at  cost  and  depreciated  using  the
straight-line method over their estimated useful lives, which range from 3 to 10
years.  Leasehold improvements are amortized using the straight-line method over
their estimated useful lives or the remaining lease term, whichever is less.
 
OTHER ASSETS
 
    Other assets include goodwill and software development costs and are  stated
at  cost. Goodwill represents the cost in  excess of an acquired business and is
amortized on a  straight-line basis  over 15 years.  Software development  costs
represent   costs   incurred  subsequent   to  establishing   the  technological
feasibility of software products and are amortized over the expected life of the
products, estimated to be three years.
 
                                       13
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 1. -- NATURE OF OPERATIONS AND SUMMARY OF SIGNIFICANT ACCOUNTING
POLICIES (CONTINUED)
REVENUE RECOGNITION
 
    Revenue related  to  systems  is  recognized  upon  shipment  or,  prior  to
shipment,  upon completion of customer  source inspection and factory acceptance
of the system where risk of loss and title to the system passes to the customer.
A provision for the estimated future  cost of system installation, warranty  and
commissions is recorded when revenue is recognized.
 
USE OF ESTIMATES
 
    The  preparation  of  financial  statements  in  conformity  with  generally
accepted  accounting  principles  requires  management  to  make  estimates  and
assumptions  that  affect the  reported amounts  of  assets and  liabilities and
disclosure of contingent  assets and liabilities  at the date  of the  financial
statements  and  the  reported  amounts  of  revenues  and  expenses  during the
reporting period. Actual results could differ from those estimates.
 
INCOME TAXES
 
    The Company accounts for income taxes using a method that requires  deferred
tax assets to be computed annually on an asset and liability method and adjusted
when  new tax  laws or rates  are enacted. Valuation  allowances are established
when necessary  to reduce  deferred tax  assets to  the amounts  expected to  be
realized.  Income tax expense (benefit) is  the tax payable (refundable) for the
period plus or minus  the change in deferred  tax assets and liabilities  during
the period.
 
NET INCOME (LOSS) PER SHARE
 
    Net income (loss) per share is computed by dividing the net income (loss) by
the  weighted average  number of  common and  common equivalent  (when dilutive)
shares of common stock outstanding during each year.
 
RECENT ACCOUNTING PRONOUNCEMENTS
 
    During March 1995, the Financial Accounting Standards Board issued Statement
No. 121 (SFAS No. 121), "Accounting for the Impairment of Long-Lived Assets  and
for  Long-Lived Assets to Be Disposed Of,"  which requires the Company to review
for impairment long-lived assets, certain identifiable intangibles and  goodwill
related  to those  assets whenever events  or changes  in circumstances indicate
that the carrying amount of  an asset may not  be recoverable. The Company  does
not  expect SFAS No.  121 to have  a material impact  on the Company's financial
condition or results of operations.
 
    During  October  1995,  the  Financial  Accounting  Standards  Board  issued
Statement  No. 123  (SFAS No.  123), "Accounting  for Stock-Based Compensation,"
which establishes  a  fair  value-based method  of  accounting  for  stock-based
compensation  plans. The Company is currently  following the requirements of APB
Opinion No. 25, "Accounting for Stock Issued to Employees." The Company plans to
adopt SFAS No. 123 during 1996, utilizing the disclosure alternative.
 
RECLASSIFICATION
 
    Certain amounts in prior years' financial statements have been  reclassified
to  conform to the current year's  presentation. These reclassifications did not
change previously reported results.
 
                                       14
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 2. -- INVENTORIES
    Inventories comprise the following:
 
<TABLE>
<CAPTION>
                                                                                                 DECEMBER 31,
                                                                                             --------------------
                                                                                               1995       1994
                                                                                             ---------  ---------
<S>                                                                                          <C>        <C>
Raw materials and parts....................................................................  $  12,922  $   8,156
Work in process............................................................................     10,048      6,118
Finished goods.............................................................................      1,467        403
                                                                                             ---------  ---------
                                                                                             $  24,437  $  14,677
                                                                                             ---------  ---------
                                                                                             ---------  ---------
</TABLE>
 
NOTE 3. -- PROPERTY AND EQUIPMENT
    Property and equipment are stated at cost and comprise the following:
 
<TABLE>
<CAPTION>
                                                                                                 DECEMBER 31,
                                                                                             --------------------
                                                                                               1995       1994
                                                                                             ---------  ---------
<S>                                                                                          <C>        <C>
Equipment..................................................................................  $  12,512  $   8,460
Demonstration equipment....................................................................     12,877     11,909
  Furniture and fixtures...................................................................      1,960      1,952
Leasehold improvements.....................................................................      6,366      5,901
                                                                                             ---------  ---------
                                                                                                33,715     28,222
Less accumulated depreciation and amortization.............................................    (19,944)   (18,262)
                                                                                             ---------  ---------
                                                                                                13,771      9,960
Construction in process....................................................................        856      1,532
                                                                                             ---------  ---------
                                                                                             $  14,627  $  11,492
</TABLE>
 
    Equipment includes  $2,258  and  $842  of assets  under  capital  leases  at
December  31,  1995 and  1994, respectively.  Accumulated amortization  on these
assets is $713 and $144 at December 31, 1995 and 1994, respectively.
 
NOTE 4. -- OTHER ASSETS
    Other assets comprise the following:
 
<TABLE>
<CAPTION>
                                                                                                   DECEMBER 31,
                                                                                               --------------------
                                                                                                 1995       1994
                                                                                               ---------  ---------
<S>                                                                                            <C>        <C>
Goodwill.....................................................................................  $   3,802  $   3,802
Software development costs...................................................................      1,768        831
                                                                                               ---------  ---------
                                                                                                   5,570      4,633
Accumulated amortization--goodwill...........................................................     (2,167)    (1,913)
Accumulated amortization--software development costs.........................................       (458)       (82)
                                                                                               ---------  ---------
                                                                                                   2,945      2,638
Other........................................................................................        879        178
                                                                                               ---------  ---------
                                                                                               $   3,824  $   2,816
                                                                                               ---------  ---------
</TABLE>
 
    Amortization expense for software development costs was $376 and $82 in 1995
and  1994,  respectively.  There  was  no  amortization  expense  for   software
development costs in 1993.
 
NOTE 5. -- SHORT-TERM BORROWINGS
    The  Company has a working capital line of credit agreement with a bank that
provides for maximum  borrowings of $10.0  million, which expires  in May  1996.
Borrowings under the line of credit
 
                                       15
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 5. -- SHORT-TERM BORROWINGS (CONTINUED)
are  collateralized  by substantially  all the  assets of  the Company  and bear
interest at the  bank's prime  rate (8  1/2 percent  at December  31, 1995).  At
December  31, 1995, the Company had no  borrowings outstanding under the line of
credit. In addition, the Company  has a Term Loan  Agreement with the same  bank
that  provides  $3.0  million to  fund  leasehold  improvements for  one  of its
facilities (see Note  7). At  December 31,  1995, $11  thousand was  outstanding
under  the Term  Loan Agreement. Both  agreements require the  Company to comply
with certain financial covenants and restrict the payment of dividends.
 
NOTE 6. -- ACCRUED EXPENSES
    Accrued expenses comprise the following:
 
<TABLE>
<CAPTION>
                                                                                                 DECEMBER 31,
                                                                                             --------------------
                                                                                               1995       1994
                                                                                             ---------  ---------
<S>                                                                                          <C>        <C>
System installation and warranty...........................................................  $   4,318  $   2,394
Accrued commissions and incentives.........................................................      3,227      1,527
Accrued payroll and related items..........................................................      1,104        966
Other......................................................................................      2,393      1,738
                                                                                             ---------  ---------
                                                                                             $  11,042  $   6,625
                                                                                             ---------  ---------
</TABLE>
 
NOTE 7. -- LONG-TERM DEBT AND CAPITAL LEASE OBLIGATIONS
    Long-term debt comprises the following:
 
<TABLE>
<CAPTION>
                                                                                                   DECEMBER 31,
                                                                                               --------------------
                                                                                                 1995       1994
                                                                                               ---------  ---------
<S>                                                                                            <C>        <C>
Term loan payable in monthly installments through January 1996 at 10 percent interest per
 annum and collateralized by substantially all assets
 of the Company..............................................................................  $      11  $     910
Capitalized lease obligations with interest rates of 4.2-11.2 percent........................      1,581        678
Mortgage loan payable in monthly installments through October 2000 at 9 1/4 percent interest
 per annum and collateralized by a building..................................................        123        140
                                                                                               ---------  ---------
                                                                                                   1,715      1,728
                                                                                               ---------  ---------
Less amounts due within one year.............................................................       (681)    (1,205)
                                                                                               ---------  ---------
                                                                                               $   1,034  $     523
                                                                                               ---------  ---------
</TABLE>
 
    The future aggregate principal payments of long-term debt and capital lease
obligations are as follows:
 
<TABLE>
<S>                                                                                  <C>
1996...............................................................................  $     797
1997...............................................................................  612......
1998...............................................................................        276
1999...............................................................................         91
2000...............................................................................        151
                                                                                     ---------
                                                                                     $   1,927
Less amounts representing interest on long-term debt and capital lease
 obligations.......................................................................       (212)
                                                                                     ---------
Principal payments and present value of minimum capital lease obligations..........  $   1,715
                                                                                     ---------
</TABLE>
 
                                       16
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 7. -- LONG-TERM DEBT AND CAPITAL LEASE OBLIGATIONS (CONTINUED)
    Certain of the capital lease agreements  require the Company to comply  with
specific  financial  covenants and  to pay  stipulated  amounts upon  default or
termination prior to the expiration of the basic lease terms.
 
NOTE 8. -- LEASE COMMITMENTS
    The Company leases certain  of its facilities  and various office  equipment
under   operating  leases  expiring  through  the  year  2017.  The  Company  is
responsible for property  taxes, insurance  and maintenance  under the  facility
leases. Certain of these leases contain renewal options.
 
    At  December 31, 1995, minimum lease payments required under these operating
leases are as follows:
 
<TABLE>
<S>              <C>
1996...........  $   1,652
1997...........      1,748
1998...........      1,482
1999...........      1,517
2000...........      1,517
Thereafter.....     12,942
                 ---------
                 $  20,858
                 ---------
</TABLE>
 
    Rent expense  for  1995,  1994  and 1993  was  $1,251,  $1,304  and  $1,260,
respectively.
 
NOTE 9. -- CAPITAL STOCK
 
PRIVATE PLACEMENT OFFERING
 
    On  February 17, 1995, the Company sold 2,539,018 shares of common stock for
$16.2 million through a private placement offering.
 
STOCK OPTION PLAN
 
    The Company has a 1991 Stock Option Plan (the "Plan") under which the  Board
of  Directors  may  issue incentive  and  nonstatutory stock  options.  The Plan
expires ten years after adoption and the Board of Directors has the authority to
determine to whom options will  be granted, the number  of shares, the term  and
the  exercise price. The options  are exercisable at times  and in increments as
specified by the Board of Directors, and expire five to ten years from the  date
of grant. These options generally vest over a three-year period. At December 31,
1995,  the Company  had reserved 2,053,006  shares of common  stock for issuance
under the  Plan; 35,161  shares  of common  stock  remain available  for  future
grants; and options to purchase 351,866 shares of common stock were exercisable.
 
                                       17
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 9. -- CAPITAL STOCK (CONTINUED)
Activity under the Plan is set forth in the table below:
(in thousands, except per share data)
 
<TABLE>
<CAPTION>
                                                                                     OUTSTANDING OPTIONS
                                                                           ----------------------------------------
                                                                            SHARES     PRICE PER SHARE      TOTAL
                                                                           ---------  ------------------  ---------
<S>                                                                        <C>        <C>                 <C>
Balance, January 1, 1993.................................................      1,219  $   1.25 to $ 5.13  $   2,754
Granted..................................................................        320      1.88 to   4.00        811
Exercised................................................................       (214)     1.25 to   2.88       (344)
Terminated...............................................................       (113)     1.25 to   5.13       (294)
                                                                           ---------  ------------------  ---------
Balance, December 31, 1993...............................................      1,212      1.25 to   4.38      2,927
Granted..................................................................        383      3.63 to   6.88      1,631
Exercised................................................................       (214)     1.25 to   4.38       (573)
Terminated...............................................................       (102)     1.25 to   4.38       (303)
                                                                           ---------  ------------------  ---------
Balance, December 31, 1994...............................................      1,279      1.25 to   6.88      3,682
Granted..................................................................        938      7.75 to  15.63      9,161
Exercised................................................................       (542)     1.25 to   6.88     (1,161)
Terminated...............................................................        (89)     1.25 to  13.13       (395)
                                                                           ---------  ------------------  ---------
Balance, December 31, 1995...............................................      1,586  $   1.75 to $15.63  $  11,287
                                                                           ---------  ------------------  ---------
</TABLE>
 
EMPLOYEE STOCK PURCHASE PLAN
 
    The  Company has reserved  a total of  1,300,000 shares of  common stock for
issuance under a qualified stock purchase plan, which provides substantially all
Company employees with the right to acquire shares of the Company's common stock
through payroll deductions. Under the plan, the Company's employees, subject  to
certain  restrictions, may purchase shares  of common stock at  the lesser of 85
percent of fair market value at  either the beginning of each two-year  offering
period or the end of each six-month purchase period within the two-year offering
period. At December 31, 1995, 1,102,667 shares have been issued under the plan.
 
COMMON STOCK PURCHASE RIGHTS
 
    In  July 1990, the Company distributed  a dividend to shareholders comprised
of a right to purchase one share of common stock ("Right") for each  outstanding
share  of common  stock of  the Company  they hold.  These rights  do not become
exercisable or transferrable apart from the common stock until the  Distribution
Date,  which  is either  the  tenth day  after a  person  or group  (a) acquires
beneficial ownership of 20 percent or more of the Company's common stock or  (b)
announces  a tender or exchange offer, the consummation of which would result in
ownership by a person  or group of  30 percent or more  of the Company's  common
stock.  After  the Distribution  Date,  each Right  will  entitle the  holder to
purchase from the Company  one share of  common stock at a  price of $28.00  per
share.
 
    If  the  Company  is acquired  in  a  merger or  other  business combination
transaction, or if  50 percent or  more of its  consolidated assets or  earnings
power  is sold, each Right  will entitle the holder  to purchase at the exercise
price that  number of  shares of  the acquiring  company having  a  then-current
market value of two times the exercise price of the Right. In the event that the
Company  is the surviving corporation in a merger and the Company's common stock
remains outstanding, or in the event that an acquiring party engages in  certain
self-dealing  transactions, each  Right not  owned by  the acquiring  party will
entitle the holder to purchase  at the exercise price  that number of shares  of
the  Company's common stock having a then-current  market value of two times the
exercise price of the Right.
 
                                       18
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 9. -- CAPITAL STOCK (CONTINUED)
    The Rights are redeemable at the  Company's option for $.01 per Right  prior
to  becoming exercisable, may be amended at  the Company's option on or prior to
the Distribution Date and expire on July 3, 2000.
 
NOTE 10. -- EMPLOYEE BENEFIT PLAN
    During 1988, the Company  adopted the Genus, Inc.  401(k) Plan (the  "401(k)
Plan") to provide retirement and incidental benefits for eligible employees. The
401(k)  Plan provides  for Company contributions  as determined by  the Board of
Directors that may  not exceed  6 percent of  the annual  aggregate salaries  of
those  employees  eligible  for participation.  In  1995 and  1994,  the Company
contributed $61 thousand and $34 thousand, respectively, to the 401(k) Plan.  No
Company contributions were made in 1993.
 
NOTE 11. -- SPECIAL CHARGE
    During  1993, the Company incurred special  charges of $0.6 million relating
primarily to the severance packages  and other payroll-related costs  associated
with a reduction in workforce at its Thin Film Division.
 
NOTE 12. -- OTHER INCOME, NET
    Other income, net, comprises the following:
 
<TABLE>
<CAPTION>
                                                                                           YEARS ENDED DECEMBER 31,
                                                                                        -------------------------------
                                                                                          1995       1994       1993
                                                                                        ---------  ---------  ---------
<S>                                                                                     <C>        <C>        <C>
Interest income.......................................................................  $     790  $     221  $     163
Interest expense......................................................................       (172)      (180)      (283)
Disposal of leasehold improvements....................................................       (261)
Gain on sale of property and equipment................................................                   461
Other, net............................................................................        (30)       159        211
                                                                                        ---------  ---------  ---------
                                                                                        $     327  $     661  $      91
                                                                                        ---------  ---------  ---------
</TABLE>
 
NOTE 13. -- INCOME TAXES
    For  the year  ended December  31, 1993, there  was no  provision for income
taxes. Income tax expense  (benefit) for the years  ended December 31, 1995  and
1994 consists of the following:
 
<TABLE>
<CAPTION>
                                                                                                  1995       1994
                                                                                               ----------  ---------
<S>                                                                                            <C>         <C>
Federal:
    Current..................................................................................  $      431  $     165
    Deferred.................................................................................     (11,036)
                                                                                               ----------  ---------
                                                                                                  (10,605)       165
                                                                                               ----------  ---------
State:
    Current..................................................................................         150         48
    Deferred.................................................................................        (524)
                                                                                               ----------  ---------
                                                                                                     (374)        48
                                                                                               ----------  ---------
                                                                                               $  (10,979) $     213
                                                                                               ----------  ---------
</TABLE>
 
    Actual  deferred taxes  are greater  than reflected  above for  1995 by $750
thousand for  the stock  option deduction  benefit recorded  as an  increase  to
shareholders' equity.
 
                                       19
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 13. -- INCOME TAXES (CONTINUED)
    The  Company's effective tax rate for the  years ended December 31, 1995 and
1994 differs from the U.S. federal statutory income tax rate as follows:
 
<TABLE>
<CAPTION>
                                                                                                       1995       1994
                                                                                                     ---------  ---------
<S>                                                                                                  <C>        <C>
Federal income tax at statutory rate...............................................................         34%        34%
Benefit of net operating loss......................................................................        (34%)       (34%)
Change in valuation allowance......................................................................       (134%)
Other..............................................................................................          2%         5%
                                                                                                           ---        ---
                                                                                                          (132%)         5%
                                                                                                           ---        ---
</TABLE>
 
    The components of the net deferred tax asset comprise the following:
 
<TABLE>
<CAPTION>
                                                                                               1995       1994
                                                                                             ---------  ---------
<S>                                                                                          <C>        <C>
Deferred tax assets:
    Net operating loss carryforwards.......................................................  $   7,027  $  10,600
    Tax credit carryforward................................................................      1,288      1,200
    Accounts receivable reserves...........................................................         97        100
    Inventory reserves.....................................................................      1,274      1,100
    Nondeductible accrued expenses.........................................................      2,395      2,800
    Other reserves.........................................................................        483
                                                                                             ---------  ---------
                                                                                                12,564     15,800
 
Deferred tax liabilities:
    Depreciation and amortization..........................................................       (254)      (630)
                                                                                                12,310     15,170
Valuation reserve..........................................................................               (15,170)
                                                                                             ---------  ---------
                                                                                             $  12,310  $       0
                                                                                             ---------  ---------
</TABLE>
 
    Temporary differences represent the cumulative taxable or deductible amounts
recorded in the financial statements in  different years than recognized in  the
tax returns.
 
    At December 31, 1995, the Company had the following income tax carryforwards
available:
 
<TABLE>
<CAPTION>
                                                                                             TAX      EXPIRATION
                                                                                          REPORTING     DATES
                                                                                          ---------  ------------
<S>                                                                                       <C>        <C>
U.S. regular tax operating losses.......................................................  $  25,000     2002-2008
U.S. business tax credits...............................................................      1,285     2002-2008
State net operating losses..............................................................      8,030     1997-1998
</TABLE>
 
NOTE 14. -- SEGMENT INFORMATION
    The  Company is engaged in the  design, manufacture, marketing and servicing
of advanced  thin-film  deposition  systems and  high  energy  ion  implantation
systems   used  primarily  in  the  semiconductor  manufacturing  industry.  The
Company's sales are primarily generated from two products, CVD tungsten silicide
and MeV ion implantation systems. The  Company's CVD system is designed for  the
deposition  of  tungsten  silicide  to create  multiple  interconnect  layers on
integrated circuits. The MeV ion implantation system drives electrically charged
ions  into  the  surface   of  a  silicon  wafer   to  convert  the   electrical
characteristics   of  the  wafer.  Both  products  are  primarily  used  in  the
manufacturing of  DRAMs. Its  business  serves the  semiconductor  manufacturing
industry  only. Net sales, identifiable assets  and the results of operations of
subsidiaries in foreign countries are not material.
 
                                       20
<PAGE>
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                     (IN THOUSANDS, UNLESS OTHERWISE NOTED)
 
NOTE 14. -- SEGMENT INFORMATION (CONTINUED)
INTERNATIONAL SALES
 
    International sales (principally from sales to customers in Asia and Europe)
for 1995, 1994 and 1993 represented 88 percent, 89 percent and 84 percent of net
sales, respectively.
 
MAJOR CUSTOMERS
 
    One customer accounted for 63 percent of net sales in 1995. Three  customers
accounted  for 33 percent,  19 percent and 14  percent of net  sales in 1994. In
1993, three customers accounted for 26 percent, 23 percent and 14 percent of net
sales.
 
NOTE 15. -- INTERIM FINANCIAL INFORMATION (UNAUDITED)
<TABLE>
<CAPTION>
                                                                               1995 QUARTER ENDED
                                                                ------------------------------------------------
(in thousands, except per share data)
                                                                MARCH 31    JUNE 30   SEPTEMBER 30  DECEMBER 31
                                                                ---------  ---------  ------------  ------------
<S>                                                             <C>        <C>        <C>           <C>
Net sales.....................................................  $  22,526  $  25,057   $   27,241    $   25,526
Gross profit..................................................      9,220     10,168       10,498         9,353
Net income....................................................      1,938      2,340        2,361        12,643
Net income per share..........................................       0.13       0.14         0.14          0.77
 
<CAPTION>
 
                                                                               1995 QUARTER ENDED
                                                                ------------------------------------------------
                                                                MARCH 31    JUNE 30   SEPTEMBER 30  DECEMBER 31
                                                                ---------  ---------  ------------  ------------
<S>                                                             <C>        <C>        <C>           <C>
Net sales.....................................................  $  13,773  $  14,966   $   18,246    $   16,631
Gross profit..................................................      5,317      6,017        6,970         6,663
Net income....................................................        652      1,051        1,132         1,342
Net income per share..........................................       0.05       0.08         0.09          0.10
</TABLE>
 
                                       21
<PAGE>
REPORT OF INDEPENDENT ACCOUNTANTS
 
TO THE BOARD OF DIRECTORS AND SHAREHOLDERS
GENUS, INC.
 
    We  have audited the accompanying consolidated balance sheets of Genus, Inc.
and subsidiaries as of December 31, 1995 and 1994, and the related  consolidated
statements  of operations, shareholders'  equity and cash flows  for each of the
three years in the  period ended December 31,  1995. These financial  statements
are  the responsibility  of the Company's  management. Our  responsibility is to
express an opinion on these financial statements based on our audits.
 
    We conducted  our  audits in  accordance  with generally  accepted  auditing
standards. Those standards require that we plan and perform the audits to obtain
reasonable assurance about whether the financial statements are free of material
misstatement.  An audit includes examining, on a test basis, evidence supporting
the amounts and disclosures in the financial statements. An audit also  includes
assessing  the  accounting principles  used  and significant  estimates  made by
management, as well as evaluating the overall financial statement  presentation.
We believe that our audits provide a reasonable basis for our opinion.
 
    In  our opinion, the financial statements  referred to above present fairly,
in all material respects, the consolidated financial position of Genus, Inc. and
subsidiaries as of December  31, 1995 and 1994  and the consolidated results  of
their  operations and their cash flows for each of the three years in the period
ended December  31,  1995,  in conformity  with  generally  accepted  accounting
principles.
 
/s/ Coopers & Lybrand LLP
San Jose, California
January 26, 1996
 
                                       22
<PAGE>
COMMON STOCK INFORMATION
 
    The  common stock of  Genus, Inc., is  traded on the  Nasdaq National Market
under the symbol GGNS. The high and low last sales prices for 1995 and 1994, set
forth below are as reported  by the Nasdaq National  Market. At March 12,  1996,
the Company has 503 shareholders.
 
<TABLE>
<CAPTION>
                                                                               HIGH        LOW       HIGH        LOW
                                                                             ---------  ---------  ---------  ---------
<S>                                                                          <C>        <C>        <C>        <C>
First Quarter..............................................................  $  11 1/4  $   7 1/2  $   5 3/4  $   2 7/8
Second Quarter.............................................................     14 1/8      9 1/2      4 7/8      3 1/4
Third Quarter..............................................................     16 3/4   11 15/16      5 5/8     3 5/16
Fourth Quarter.............................................................     15 1/2    6 49/64      8 3/8      5 1/2
</TABLE>
 
    The Company has not paid cash dividends on its common stock since inception,
and its Board of Directors presently intends to reinvest the Company's earnings,
if  any, in its business. Accordingly, it  is anticipated that no cash dividends
will be paid to holders of common stock in the foreseeable future.
 
ANNUAL SHAREHOLDERS' MEETING
 
    The 1996 annual meeting of  shareholders will be held  on April 30, 1996  at
2:00  p.m.  at  The  Westin  Hotel, 5101  Great  America  Parkway,  Santa Clara,
California 95054.
 
FORM 10-K
 
    A copy  of the  Company's  Annual Report  on Form  10-K  as filed  with  the
Securities  and Exchange  Commission may  be obtained  from the  Company without
charge by  writing to  Investor  Relations, Genus,  Inc., 1139  Karlstad  Drive,
Sunnyvale, CA 94089.
 
                                       23
<PAGE>
 
<TABLE>
<S>                                            <C>
GENUS CORPORATE OFFICERS                       WORLDWIDE LOCATIONS
William W. R. Elder                            Corporate Headquarters
Chairman, Chief Executive Officer              Genus, Inc.
Kent L. Robertson                              1139 Karlstad Drive
Executive Vice President,                      Sunnyvale, CA 94089
Chief Financial Officer,                       (408) 747-7120
Secretary                                      Ion Technology Division
James M. Burns                                 Genus, Inc.
Executive Vice President                       4 Mulliken Way
Thin Film Division                             Newburyport, MA 01950
John E. Aldeborgh                              (508) 463-1500
Vice President                                 Genus Europa SARL
Ion Technology Division                        Zac du Clos aux Pois
William D. Cole                                CE 4817, Lisses
Vice President, Sales                          91048 Evry Cedex
Kevin C. Conlon                                France
Vice President, Marketing                      011-331-69-89-79-20
Thomas E. Seidel, Ph. D.                       Genus Korea, Ltd.
Vice President,                                3F, KEC Building
Chief Technical Officer                        #275-7, Yangjae-Dong
Ernest P. Quinones                             Seocho-Ku, Seoul, South Korea
Corporate Controller,                          011-822-589-4800
Chief Accounting Officer,                      Genus KK
Treasurer                                      Shin Yokohama West Building
Mario M. Rosati, Assistant Secretary           2-3-3 Shin Yokohama, Kouhoku-ku
Partner                                        Yokohama, Japan 222
Wilson, Sonsini, Goodrich & Rosati             011-81-45-476-0581
BOARD OF DIRECTORS                             SALES AND
William W. R. Elder                            SERVICE OFFICES
Chairman, Chief Executive Officer              United States
Genus, Inc.                                    Sunnyvale, California
Todd S. Myhre                                  Newburyport, Massachusetts
Former Chief Operating Officer                 Rockville Center, New York
Genus, Inc.                                    Europe
Mario M. Rosati * +                            Melbourn, England
Partner                                        Evry, France
Wilson, Sonsini, Goodrich & Rosati             Asia/Pacific
Stephen F. Fisher * +                          Hsin-chu City, Taiwan, R.O.C.
Managing Director                              Hong Kong
Bachow & Associates, Inc.                      Seoul, South Korea
G. Frederick Forsyth                           Yokohama, Japan
Senior Vice President
Worldwide Operations
Apple Computer, Inc.
</TABLE>
 
* Member of Audit Committee
 
+ Member of Compensation Committee

<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<LEGEND>
This schedule contains summary financial information extracted from the year
ended Dec 31 1995, and is qualified in its entirety by reference to such
financial statements.
</LEGEND>
<MULTIPLIER> 1,000
       
<S>                             <C>
<PERIOD-TYPE>                   YEAR
<FISCAL-YEAR-END>                          DEC-31-1995
<PERIOD-START>                             JAN-01-1995
<PERIOD-END>                               DEC-31-1995
<CASH>                                          12,630
<SECURITIES>                                         0
<RECEIVABLES>                                   27,046
<ALLOWANCES>                                       250
<INVENTORY>                                     24,437
<CURRENT-ASSETS>                                68,913
<PP&E>                                          34,571
<DEPRECIATION>                                  19,944
<TOTAL-ASSETS>                                  95,247
<CURRENT-LIABILITIES>                           18,852
<BONDS>                                          1,034
                                0
                                          0
<COMMON>                                        95,683
<OTHER-SE>                                      20,322
<TOTAL-LIABILITY-AND-EQUITY>                    75,361
<SALES>                                        100,350
<TOTAL-REVENUES>                               100,350
<CGS>                                           61,111
<TOTAL-COSTS>                                   92,374
<OTHER-EXPENSES>                                     0
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                                   0
<INCOME-PRETAX>                                  8,303
<INCOME-TAX>                                    10,979
<INCOME-CONTINUING>                             19,282
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                    19,282
<EPS-PRIMARY>                                     1.20
<EPS-DILUTED>                                     1.20
        

</TABLE>


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