FSI INTERNATIONAL INC
10-K405, 1995-11-22
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>
 
                       SECURITIES AND EXCHANGE COMMISSION
                            WASHINGTON, D.C.  20549

                                   FORM 10-K

(Mark One)

[X]  ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(D) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the fiscal year ended           August 26, 1995
                              -----------------------------------------------

                                       or

[ ]  TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(D) OF THE SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from__________________________to__________________


                            FSI INTERNATIONAL, INC.
             (Exact Name of Registrant as specified in its charter)

              MINNESOTA                                41-1223238
     ------------------------------                    ----------
       (State or other jurisdiction of             (I.R.S. Employer
       incorporation or organization)              Identification No.)

322 LAKE HAZELTINE DRIVE, CHASKA, MINNESOTA               55318
- -------------------------------------------               -----
 (Address of principal executive offices)               (Zip Code)

                 Registrant's telephone number: (612) 448-5440

SECURITIES REGISTERED PURSUANT TO SECTION 12(B) OF THE SECURITIES EXCHANGE ACT:
                                      NONE

SECURITIES REGISTERED PURSUANT TO SECTION 12(G) OF THE SECURITIES EXCHANGE ACT:
                           COMMON STOCK, NO PAR VALUE

       Indicate by check mark whether the registrant (1) has filed all reports
required to be filed by Section 13 or 15(d) of the Securities Act of 1934 during
the preceding 12 months (or for such shorter period that the registrant was
required to file such reports), and (2) has been subject to such filing
requirements for the past 90 days.  Yes   X     No
                                        ----       -----
       Indicate by check mark if disclosure of delinquent filers pursuant to
Item 405 of Regulation S-K is not contained herein, and will not be contained,
to the best of Registrant's knowledge, in definitive proxy or information
statements incorporated by reference in Part III of this Form 10-K or any
amendment to this Form 10-K.     X
                                ---

       The aggregate market value of the common stock, no par  value held by
non-affiliates of the Registrant, based on the closing price of the Common Stock
on November 10, 1995, as reported on the Nasdaq-National Market, was
approximately $350,458,020.  Shares of common stock held by each officer and
director and by each person who owns 5% or more of the outstanding Common Stock
have been 
<PAGE>
 
excluded from this computation in that such persons may be deemed to be
affiliates. This determination of affiliate status is not necessarily a
conclusive determination for any other purpose.

       As of November 10, 1995, the registrant had issued and outstanding
20,315,645 shares of Common Stock.

                      DOCUMENTS INCORPORATED BY REFERENCE

       Portions of the Registrant's definitive Proxy Statement for the Annual
Meeting of Shareholders to be held on January 24, 1996, (the "Proxy Statement")
and to be filed within 120 days after the Registrant's fiscal year ended August
26, 1995, are incorporated by reference into Part III of this Form 10-K Report.

       Portions of the Annual Report to Shareholders for the fiscal year ended
August 26, 1995 (the "Annual Report") are incorporated by reference into Parts
II and IV of this Form 10-K Report.

   There are 163 pages to this Report. The Index to Exhibits begins on page 47.


                                     PART I
ITEM 1.  BUSINESS

THE COMPANY

       FSI International, Inc., a Minnesota corporation organized in 1973 ("FSI"
  or the "Company"), designs, manufactures, markets and supports
  microlithography, surface conditioning and chemical management equipment used
  in the fabrication of integrated circuits, which is the only industry segment
  in which the Company is presently engaged. The Company's microlithography
  product, the POLARIS(R) cluster, processes photoresist (light sensitive
  material used for patterning) on the surface of silicon wafers as part of the
  photolithography phase of the integrated circuit fabrication process. The
  Company's surface conditioning products, including the MERCURY(R) spray
  processing systems and the EXCALIBUR(R) vapor processing systems, remove
  contaminants and excess photoresist from wafers during the fabrication process
  and selectively remove oxide from the wafer surface. The process steps
  performed by the Company's microlithography and surface conditioning products,
  which are used repeatedly throughout the fabrication cycle, are an integral
  part of the manufacturing process for virtually every integrated circuit
  produced today. The Company's chemical management products, including its
  CHEMFILL(R), CHEMBLEND/tm/ and CHEMGEN/tm/ systems, perform the critical
  functions of blending, delivering and controlling the flow, concentration and
  purity of chemicals used by various types of processing equipment within a
  fabrication facility.

       Advances in electronics technology in recent years have resulted in
  increasingly sophisticated integrated circuits which require submicron
  geometries and complex manufacturing processes. To meet the demand for these
  more complex, high performance devices, integrated circuit manufacturers
  require process technologies that are timely, reliable and readily integrated
  into high volume manufacturing environments.  Competitive pressures are at the
  same time forcing integrated circuit manufacturers to reduce the costs of
  producing integrated circuits. FSI believes it responds to these demands by
  providing leading technology products that increase yields, integrate 

                                      -2-
<PAGE>
 
  with other suppliers' equipment and provide significant overall cost
  advantages. The Company's strategy is to remain focused as a technological
  leader in its three core markets, emphasizing close customer relationships
  that enhance the Company's responsiveness to the needs and cost constraints of
  its markets.

       The Company markets its products directly in North America and primarily
  through a network of affiliated distributors in Europe, the Far East, and
  Japan.  Through these affiliated international distributors the Company can
  provide timely and efficient worldwide customer service and support.

       During fiscal 1995, the Company completed two transactions which expanded
  its chemical management capabilities.  In January of this year, FSI and its
  affiliated distributor Metron Technology B.V. (f/k/a Metron Semiconductors
  Europa B.V.) each acquired a 50% interest in FSI Metron Europe, Limited
  ("FME") located in Newhaven, England.  FME manufactures, markets, and services
  chemical distribution systems, wet benches and portable clean rooms primarily
  for use by semiconductor device manufacturers.

       On March 8, 1995, the Company acquired all of the outstanding capital
  stock of Applied Chemical Solutions ("ACS") and ACS became a wholly-owned
  subsidiary of the Company.  Principal ACS products include chemical blending
  and delivery systems, point-of-use chemical generation systems and slurry
  mixing and delivery systems used in conjunction with chemical mechanical
  planarization, commonly referred to as CMP.  ACS's operations are
  headquartered in Hollister, California.

  INDUSTRY BACKGROUND

       The fabrication of integrated circuits is a complex process involving
  several distinct phases repeated numerous times during the fabrication
  process. Each production phase requires different processing technology and
  equipment, and no one semiconductor equipment supplier currently produces an
  entire state-of-the-art fabrication system. Rather, semiconductor device
  manufacturers typically construct fabrication facilities by combining
  manufacturing equipment produced by several different suppliers, each of which
  performs specific functions in the manufacturing process.

       Demand for new semiconductor production equipment is driven principally
  by the need for new processes and systems capable of manufacturing
  increasingly complex integrated circuits. Industries that utilize integrated
  circuits are demanding higher performance devices from semiconductor
  manufacturers. Over the last decade, technological advances have allowed
  integrated circuit manufacturers to reduce the size and substantially increase
  the number of transistors on each integrated circuit device.  Today, 16
  megabit dynamic random access memory ("DRAM") integrated circuits are
  manufactured using more than 200 process steps on six or eight inch diameter
  wafers and incorporating geometries of 0.5 micron.  With high density logic
  devices and 64 megabit DRAMs that require geometries of less than 0.5 micron
  now under development, integrated circuit manufacturers require process
  technology advances that are timely, highly reliable, and readily implemented
  into high volume manufacturing environments.

       Concurrent with these technological advances, competitive pressures are
  forcing semiconductor manufacturers to reduce integrated circuit manufacturing
  costs.  Because the capital cost of a large semiconductor fabrication facility
  is high, in some cases exceeding $1.0 billion, manufacturers have increased
  their focus on the various cost components of a semiconductor 
   
                                      -3-
<PAGE>
 
  manufacturing facility. This greater emphasis on total device processing cost
  has led manufacturers increasingly to analyze the costs associated with owning
  and operating each piece of process equipment in the manufacturing line
  (referred to as the "cost of ownership"), including capital cost, throughput,
  yield, up-time, consumables, start-up time, and other equipment related costs
  for each process step. In addition, the Company believes that in an effort to
  reduce total manufacturing costs and to reduce potential contaminant exposure
  as the wafer is transferred from one process step to another, manufacturers
  are increasingly seeking process equipment capable of being integrated with
  the process equipment of other suppliers to create a highly automated and
  integrated processing system.

       The Company believes that semiconductor manufacturers are asking
  equipment suppliers to take an increasingly active role in meeting the
  manufacturer's technology requirements and cost constraints by developing and
  supporting the products and processes required to fabricate advanced
  semiconductor designs.  Certain semiconductor manufacturers are seeking
  strategic  relationships with equipment suppliers for specific process steps
  on existing and new integrated circuit designs.  As a result, semiconductor
  equipment companies are being asked to provide advanced process expertise,
  superior product performance, reduced overall cost of ownership, and worldwide
  customer support to better meet the needs of integrated circuit manufacturers
  as well as meet international quality standards, such as ISO 9001
  certification.

  INTEGRATED CIRCUIT FABRICATION

       The basic component in the manufacture of integrated circuits is a thin,
  circular crystalline silicon wafer, typically three to eight inches in
  diameter.  During the fabrication process, several layers of conductive or
  dielectric materials are sequentially grown or deposited on the wafer surface
  through a series of thermal and/or chemical processes.  These processes are
  conducted in a controlled environment, typically a "clean room" which is a
  manufacturing facility separated from the outside environment with separately
  controlled temperature and humidity and employing specialized filters designed
  to reduce the number of particulates in the air within the facility.  Each
  layer undergoes a series of processes to etch a portion of the layer or change
  the electrical characteristics of the layer, leaving the desired integrated
  circuit pattern. The wafers are ultimately separated into individual
  integrated circuits or discrete components which are then packaged, assembled,
  and tested.  The typical integrated circuit fabrication process takes between
  eight and twelve weeks. The primary stages of this process are discussed
  below.

            Cleaning.  The wafer surface must be cleaned and conditioned at the
       beginning of the fabrication process and at numerous other times
       throughout the process.  Cleaning is generally performed by exposing the
       wafer to various chemicals in a liquid state, through immersion or
       spraying, or in a vapor state.  As integrated circuit geometries become
       smaller and more complex, the reduction of organic, metal, and particle
       contamination on the wafer becomes an increasingly critical factor in
       improving the yields of wafer processing.  In addition to contamination
       from particles left over from the various steps in the fabrication
       process, such as etching or stripping, contaminants may also be
       introduced from the equipment and chemicals utilized in the manufacturing
       process. FSI's surface conditioning products, including the MERCURY spray
       processors and the EXCALIBUR vapor processing systems, are designed to
       perform these cleaning functions throughout the integrated circuit
       fabrication process.
    
                                      -4-
<PAGE>
 
            Layering.  Following cleaning and conditioning, a thin film of
       either conductive or dielectric material is grown or deposited on the
       wafer surface.  Depending upon its particular electrical properties, each
       layer functions as an insulator, semiconductor or conductor.

            Planarization.  Recently, a new process step called chemical
       mechanical planarization, commonly referred to as CMP, has become
       important in semiconductor device manufacturing, particularly for
       advanced devices.  The CMP process uses a chemical and mechanical
       polishing procedure with a slurry and pad to smooth the surface of a
       wafer after each layering step in the metal interconnect process.  This
       smoothing, or planarization, is necessary to prevent extremes of
       topography which can reduce yield and reliability of semiconductor
       devices.  Certain of the Company's chemical management systems are used
       to mix and deliver the slurry used in this process.  The Company's
       MERCURY spray processing systems are used to remove the polishing grit
       from the surface of the wafer after CMP processing.

            Photolithography.  After the film layer is deposited on the wafer,
       the film is primed to promote the adhesion of a light sensitive material
       called photoresist.  After the photoresist is applied, the wafer is
       heated in order to remove solvents from the photoresist.  Integrated
       circuit patterns are then projected onto the photoresist by exposing it
       to a light source through a mask. Chemical changes occur in the portion
       of the photoresist exposed to the light source, resulting in a transfer
       of the image of the desired circuit into the photoresist on the wafer.
       After a circuit pattern has been imprinted, the image on the film is
       developed, which creates protected and unprotected areas.  The developed
       photoresist is then baked at a high temperature to remove remaining
       solvents, improve adhesion to the wafer surface and harden the
       photoresist for subsequent processing. POLARIS clusters perform all
       photolithography functions except exposure.

            Etching or Doping.  Upon completion of the photolithography process,
       the wafer is either etched or doped.  During etching the unprotected
       areas of the patterned film are removed with chemicals to leave the
       desired circuit pattern.  Etching can be accomplished with either a wet
       chemistry process using liquid chemicals, or a dry chemistry (typically
       plasma) process using chemical gases or vapors.  With advanced devices,
       most pattern etching is performed using a dry process.  The Company's
       EXCALIBUR vapor processing system is used to remove residual silicon
       dioxide to improve electrical performance and to remove the residue left
       by plasma or reactive ion etching.  The Company's spray processing
       systems have been used to perform blanket etching in limited wet
       chemistry applications.  During doping, specific ions are implanted on
       the wafer to control and change the electrical properties of the wafer
       surface.  Doping produces the semiconductor activity on the wafer.

            Stripping.  After etching or doping, the wafer is stripped of
       photoresist through either a wet chemistry or a dry chemistry process.
       The Company's spray processing systems are used to perform this function
       with wet chemistry applications or as a final clean-up after dry
       chemistry applications.

       These operations are repeated numerous times during the fabrication
  process depending upon the type and complexity of the semiconductor device and
  the overall process employed, and the precise order of the steps utilized
  varies by manufacturer.  A finished integrated circuit consists of a number of
  film layers which together form thousands of extremely small electronic
  components that combine to perform the desired electrical functions. Each step
  in the fabrication process 
   
                                      -5-
<PAGE>
 
  requires precision and must be rigorously controlled to attain commercially
  acceptable yields and cost performance.

       Chemical management systems enable semiconductor device manufacturers to
  store acids and solvents in bulk tanks outside the device fabrication clean
  room and to deliver programmed amounts of chemicals to various types of
  equipment in the clean room. The Company's chemical management products,
  including its CHEMFILL, CHEMBLEND and CHEMGEN systems, perform the critical
  functions of generating, blending, delivering and controlling the flow,
  concentration and purity of chemicals used by various types of processing
  equipment throughout the fabrication process.


  PRODUCTS

       The mix of products sold by the Company may vary significantly from year
  to year.  The following table sets forth, for the periods indicated, the
  amount of sales and approximate percentages of the Company's total sales
  contributed by the Company's principal products:

<TABLE> 
<CAPTION> 



                                                      FISCAL YEAR ENDED
                                 -------------------------------------------------------------
                                 AUGUST 26, 1995        AUGUST 27, 1994        AUGUST 28, 1993
                                 ---------------        ---------------        ---------------
                                                   (DOLLARS IN THOUSANDS)
 
<S>                              <C>        <C>          <C>        <C>         <C>       <C>
Microlithography clusters        $ 61,246   32.2%       $32,723    33.9%       $20,317    25.9%
Surface conditioning products      59,898   31.5         27,915    29.0         26,194    33.4
Chemical management systems        45,223   23.7         17,573    18.2         18,629    23.8
Spare parts and service            24,036   12.6         18,226    18.9         13,292    16.9
                                 --------  -----        -------   -----        -------   -----
                                 $190,403  100.0%       $96,437   100.0%       $78,432   100.0%
                                 ========  =====        =======   =====        =======   =====
</TABLE>

       MICROLITHOGRAPHY CLUSTERS.  The Company's POLARIS microlithography
  cluster performs all of the photolithography processing steps except exposure.
  The POLARIS cluster consists of a clean-room qualified robot surrounded by
  various process modules. Each module is totally independent and requires no
  mechanical interface.  The cluster is enclosed by transparent safety walls,
  creating a self-contained process environment and is configured to match the
  throughput capabilities of the integrated exposure equipment.  The enclosure
  can be modified to provide a Class 1 clean room environment, providing
  independent control of temperature, humidity and organics from the rest of the
  fabrication area. Operations within the cluster are primarily controlled by a
  computer console and a touch screen on each cluster's console. During
  operation, cassettes of wafers are loaded in the cluster's input/output module
  from which the robot transports wafers through the various process modules in
  a sequence programmed by the operator allowing the desired treatment of the
  wafer surface.

       The POLARIS cluster represents a processing alternative to conventional
  photoresist track or linear systems, which permit processing of the wafer only
  according to a pre-established arrangement of the equipment. Wafer routing and
  throughput in a POLARIS cluster are not dependent upon module configuration.
  The programmable capability allows random wafer routing and continuous
  processing of wafers eliminating the need for the queuing of partially
  processed 

                                      -6-
<PAGE>
 
  wafers sometimes required by traditional track systems. In addition, by
  controlling system variables within tight tolerance levels, the POLARIS
  cluster is able to better ensure the repeatability of the various process
  steps. As a result, the POLARIS cluster provides system flexibility and
  performance advantages over competing track systems. It also provides
  significant reliability and serviceability advantages. The highly integrated
  and automated cluster approach of the POLARIS cluster eliminates the need for
  a number of complex mechanisms which can impact system reliability, such as
  exposure system interface modules and wafer transport mechanisms generally
  associated with track systems. POLARIS process modules can be serviced from
  outside the cluster without disrupting other cluster process operations. In
  addition, should technology change in any particular process module, that
  individual module can be replaced with an upgrade without rendering the entire
  system obsolete.

       In July 1994, the Company introduced the POLARIS 2000 cluster.  This new
  generation POLARIS cluster system contains several process enhancements
  including an advanced bake/chill plate technology and a fluid temperature
  control system and new robot for higher throughput of wafers. Simultaneous
  multiple process flow capabilities allows the system to operate in tandem with
  another process tool which is physically linked to the POLARIS system and to
  simultaneously support  other process equipment which is not linked to the
  system.  The Company began shipping the POLARIS 2000 cluster in January 1995.

       Purchasers of the POLARIS cluster include Ericsson Components AB
  ("Ericsson"); ITT Corporation; International Business Machines Corporation
  ("IBM"), LG Semicon Co., Ltd. ("LG Semicon"); Motorola, Inc. ("Motorola");
  National Semiconductor, Corp. ("NSC"); Texas Instruments, Incorporated
  ("TI"); and Tower Semiconductor Ltd. ("TSL"). The Company has an installed
  base of approximately 120 POLARIS clusters, including approximately 45 POLARIS
  2000 clusters. The price of the POLARIS cluster ranges from approximately
  $800,000 to $1,600,000, depending on wafer size, number of modules, and number
  of robots required.

       The POLARIS cluster technology is licensed by the Company from TI.  See
  "Patents, Trademarks and Intellectual Property" below.

       SURFACE CONDITIONING PRODUCTS.  The Company's surface conditioning
  products perform cleaning and stripping functions necessary for the processing
  of integrated circuits.

       Spray Processing Systems.  The Company's spray processing systems, which
  include the MERCURY system, are sophisticated wet chemistry systems used to
  clean and strip wafers at various stages in the integrated circuit fabrication
  process.  These systems use centrifugal spray technology to process wafers by
  exposing them to a programmed, sequenced spray of fresh chemicals inside a
  closed, nitrogen filled chamber.  Cassettes filled with wafers are loaded into
  a turntable in the process chamber and the processing chemicals, de-ionized
  water, and nitrogen are sequentially dispensed into the chamber through a
  spray post mounted in the chamber.  As the turntable rotates, nozzles apply a
  chemical spray to the wafers' surface.  After chemical application, de-ionized
  water is sprayed on the wafer surface and all surfaces of the process chamber
  to remove chemical residues.  The wafers and chamber are then dried by
  centrifugal spinning combined with a flow of nitrogen into the chamber.  The
  Company's spray processing systems also can perform certain blanket etch
  functions in limited wet chemistry applications. FSI's spray processing
  systems include a microprocessor-based controller to program, control, and
  monitor the operating functions of the system in order to ensure precise
  control and repeatability of the process.
    
                                      -7-
<PAGE>
 
       The Company's spray processing systems provide an alternative to
  traditional immersion technology, principally wet-bench processing of wafers.
  A chemical wet-bench consists of an exhaust hood laboratory bench with open
  chemical tanks in which the wafers are either manually or automatically
  transferred from one chemical bath to another.  The Company believes that its
  spray processing systems provide many cost of ownership and other benefits
  over wet-bench chemical processing including protection of the process
  operator from hazardous chemicals or fumes, improved cleaning capability,
  reduced chemical usage, lower space utilization in the clean room, and greater
  process flexibility, including the capability to easily change chemical
  sequences.

       Spray processing system customers include Advanced Micro Devices, Inc.
  ("AMD"); Amtel Corporation ("Amtel"); Cypress Semiconductor Corporation
  ("Cypress"); Digital Equipment Corporation ("DEC"); Fujitsu Microelectronics,
  Inc. ("Fujitsu"); IBM; International Rectifier Corporation ("IRC"); Motorola;
  NCS; Phillips Semiconductors ("Phillips"); SGS Thompson Microelectronics, Inc.
  ("SGS Thompson"); Siemens A.G. ("Siemens"); TI; TSL; and Winbond Electronics
  Corp. ("Winbond").  The Company has an installed base of over 2,170 spray
  processing systems.  The Company offers four types of spray processing
  systems, which range in price from $300,000 to $600,000.  The Company also
  markets certain equipment complementary to its spray processors, including
  water heaters, chemical heaters, and booster pumps.

       Vapor Processing Systems.  The Company's EXCALIBUR vapor processing
  systems use anhydrous hydrofluoric ("HF") gas in conjunction with water vapor
  to perform cleaning steps normally done with liquid chemicals.  The EXCALIBUR
  systems are highly automated, with a microprocessor-based controller and user-
  friendly software for sequencing and control of the reactants.  Wafers are
  processed on an individual basis and loaded from the wafer carrier into the
  process chamber by a handler that minimizes particle contamination.  Single-
  wafer processing permits EXCALIBUR systems to be more easily integrated with
  equipment of other suppliers and provides greater control over process
  uniformity. Up to four process chambers can be operated with a single
  electronic controller through the utilization of multi-tasking software.

       The advantages of vapor phase processing over wet processing include
  increased chemical purity (due in part to its ability to mix chemical gases
  with water vapor at the point of use), reduced chemical and waste disposal
  costs, increased processing capabilities and improved integration with cluster
  tools. An integrated system of this type provides the necessary environmental
  and surface control of the wafer between cleaning and various other process
  steps, resulting in reduced contamination and improved yield.

       Since introduction in 1987, EXCALIBUR systems have gone through multiple
  enhancements, including the development from a single gas to a multi-gas
  system.  These continual enhancements led to the introduction of the latest
  version of the system, the EXCALIBUR MVP (Multi-Vapor Processor) system in
  July 1993.  In addition to HF gas, the EXCALIBUR MVP  system uses hydrochloric
  acid gas for improved metal removal and ozone gas for organic removal, and has
  the processing capability to clean the backside of the wafer along with the
  front.  The EXCALIBUR MVP system can be used for the critical cleaning steps
  in the integrated circuit production process.  Programs are under development
  to integrate the EXCALIBUR MVP system with other process equipment.  The
  process development of the EXCALIBUR MVP system was funded in part by
  SEMATECH, an industry and government consortium.

       The Company's EXCALIBUR customers include AT&T Corp. ("AT&T"), Fujitsu,
  Hyundai Electronics Industries Co., Ltd. ("Hyundai"), Intel Corporation
  ("Intel"), Siemens, and TI.  The 
   
                                      -8-
<PAGE>
 
  Company has installed approximately 160 vapor processing systems, many of
  which contain multiple modules. Systems vary in price from approximately
  $150,000 to $800,000 depending on the model, wafer size, number of process
  chambers, and related electronic control requirements.

       In August of 1995, the Company announced a License Agreement with IBM
  which will allow FSI to manufacture, market, and service products using IBM's
  cyrogenic aerosol cleaning technology.  This IBM developed technology uses
  frozen ice particles formed by inert gases to dislodge contaminants or residue
  particles from a silicon wafer's surface.  FSI anticipates having a production
  tool commercially available during the latter part 1996.

       Over the past several years, based in part upon funding received from the
  National Institute of Standards and Technology, the Company has developed the
  Orion/tm/ system, in which "dry" chemicals in a gaseous environment are
  charged by an energy source to remove contaminants from a silicon's wafer
  surface. The Company expects to ship a prototype to a customer for evaluation
  in the latter part of 1996.

       CHEMICAL MANAGEMENT SYSTEMS.  The Company's chemical management systems
  enable semiconductor manufacturers to generate certain acids from gases, blend
  acids and solvents to desired concentrations, store the acids and solvents in
  bulk tanks outside the device fabrication clean room and to deliver programmed
  amounts of chemicals to various types of equipment in the clean room.

       Chemical Delivery Systems.  The Company offers chemical delivery systems
  utilizing pump, pump and pressure, and vacuum pressure designs.  The Company's
  chemical delivery systems provide semiconductor manufacturers with enhanced
  chemical purity, inventory control, safety, dispensing accuracy and bulk
  purchasing opportunities.

       Typically, a chemical delivery system installation involves the delivery,
  flow and purity control of five to ten distinct chemicals.  Each chemical
  requires its own station operated by a dedicated programmable logic
  controller.  These dedicated controllers are in turn integrated by a host
  industrial computer to monitor and control the entire system. Normally, one
  chemical delivery module is required for each chemical; however, one module
  can be used to supply that chemical to multiple use points within the clean
  room. Each system installation requires a degree of customization based on the
  delivery requirements and physical layout of the customer's facility.  FSI's
  project management expertise allows it to perform multiple installations
  simultaneously, which is a significant advantage during periods of growth in
  the number of fabrication facilities being constructed, upgraded, or expanded.
  In addition, upon the request of a customer, FSI will oversee and coordinate
  not only the installation of a chemical delivery system but also the entire
  chemical distribution system of the fabrication facility, including point of
  use interfaces and primary and secondary containment piping.

       The Company offers four primary models of chemical delivery systems,
  including the CHEMFILL 500, which provides all the features of a centralized
  delivery system in a compact, economical unit.  This model can be used as a
  cost-effective solution for small volume chemical users or as a local source
  of chemicals in large fabrication facilities.  The CHEMFILL 1000 PLC (for
  "programmable logic control") offers increased automation to its users,
  providing enhanced control, flexibility, and functionality.  The VP4500
  utilizes proprietary ACS vacuum pressure technology to draw chemicals from
  their storage and transportation containers into the system and 
   
                                      -9-
<PAGE>
 
  pressure to transfer the chemical back to the container, in a recirculation
  mode, or to points of use in a dispense mode. The CHEMFILL 5000, which is also
  programmable logic controlled, features redundant flow systems that help
  increase uptime.

       Chemical Blending and Mixing Systems.  The Company's CHEMBLEND chemical
  blending and mixing systems allow semiconductor device manufacturers to reduce
  chemical costs by enabling them to blend a process chemical from concentrate
  on site to create the various chemical concentrations required at different
  points of use in the clean room.

       Chemical Generation Systems.  The CHEMGEN chemical generation systems
  allow semiconductor device manufacturers to reduce chemical costs by
  generating bulk quantities of certain chemicals by mixing gases with deionized
  water located at the facility.  These chemicals are then delivered to the
  various use points in the semiconductor device manufacturing facility.

       Slurry Mixing and Delivery Systems.  The Company's slurry mixing and
  delivery systems, which utilize proprietary vacuum pressure technology, mix
  and deliver slurry which is used in conjunction with CMP technology.  The
  Company's P2000 series systems mix and deliver silicon dioxide slurry, while
  the P2200M mixes and delivers tungsten slurry.

       Chemical management system customers include AMD, Cypress, DEC, Fujitsu,
  Intel, Motorola, NSC, Phillips, SGS Thompson, and Tech Semicondcutor
  Singapore PTE. LTD. ("Tech Semiconductor"). The Company has installed chemical
  management systems in over 75 fabrication plants worldwide. Typical
  installations vary in price from $250,000 to $2,500,000. However, a project
  involving turn-key installation with multiple chemicals and points of use can
  cost in excess of $6,000,000.

       SPARE PARTS AND SERVICE.  The Company sells spare part kits for a number
  of its products and individual spare part components for its equipment,
  primarily spray processing and to a lesser extent chemical management systems.
  The Company often packages product improvements to enable customers to update
  previously purchased equipment.

       The Company employs customer service and process engineers to assist and
  train the Company's customers in performing preventive maintenance and service
  on FSI equipment and developing process applications for the equipment. The
  Company generally provides a one to two year parts and labor warranty
  depending upon the product. The Company also provides in-house service and
  maintenance training and process application training for its customers'
  personnel on a fee basis. In addition, the Company offers a variety of
  process, service, and maintenance programs that may be purchased for a fee. A
  number of customers have purchased maintenance contracts whereby the Company's
  service employees work full-time at the customer's facility, and provide
  process service and maintenance support for FSI equipment.

  BACKLOG AND SEASONALITY

       The Company's backlog at the end of fiscal 1995 and 1994 was
  approximately $115 million and $77 million, respectively.  A substantial
  portion of the backlog at August 26, 1995 is scheduled to be shipped in fiscal
  1996. Backlog consists of orders for which a customer purchase order has been
  received or a customer purchase order number has been communicated to the
  Company.  Orders are subject to cancellation by the customer, generally with a
  cancellation charge.  In fiscal 1995 and 1994, purchase orders aggregating
  approximately $1,524,000 and $708,000, constituting 
    
                                      -10-
<PAGE>
 
  .8% and .7% of sales during fiscal 1995 and 1994, respectively, were canceled
  and not rescheduled. Because of the timing and relative size of certain orders
  received by the Company and possible changes in delivery schedules and
  cancellations of orders, the Company's backlog can vary from time to time and
  at any particular date is not necessarily indicative of actual sales for any
  succeeding period. See Item 7 - "Management's Discussion and Analysis of
  Financial Condition and Results of Operations." The business of the Company is
  not seasonal to any significant extent.

  RESEARCH AND DEVELOPMENT

       The Company believes that its future success will depend in large part on
  its ability to enhance, in collaboration with its customers, its existing
  product lines to meet the changing needs of semiconductor device
  manufacturers.  The Company believes that the trends in the industry, such as
  utilization of smaller integrated circuit geometries, increased use of eight
  inch and larger wafers, and manufacturers' increased desire for integral
  processing equipment will make highly automated and integral systems,
  including single wafer processing systems, more important in the manufacture
  of integrated circuits.  To assist the Company in its development efforts, the
  Company maintains relationships with a number of industry professionals some
  of whom serve on the Company's Technical Advisory Board ("TAB").  This board
  meets periodically with FSI management to identify and review semiconductor
  device industry trends in advanced technology and FSI's development activities
  toward meeting the industry's technology needs.  In addition, the industry
  professionals provide the Company with on-going technical consultation and
  support.

       The Company's current research and development programs are primarily
  focused on the need for cleaner wafer surfaces due to smaller geometries,
  increased process control and flexibility through monitoring and software
  management systems, robotics automation in the clean room and integration of
  the Company's product offerings with the processing equipment of other
  suppliers.  Each of these programs involves customer collaboration to ensure
  proper machine configuration and process development to meet the industry's
  requirements.

       The Company is actively engaged in a number of development and process
  enhancement programs regarding the POLARIS cluster.  Such programs include
  testing POLARIS clusters with new types of photoresist and new processes
  utilizing such resist.  The Company also is exploring, with customer
  collaboration, further process refinements to its spray processing systems and
  conducting basic research on vacuum-based gas phase (dry) cleaning systems
  which may provide increased cleaning capabilities and improved process
  integration. The Company's dry cleaning project was funded in part by a $2.0
  million research grant from the National Institute of Standards and Technology
  over a two-year period that ended February 28, 1995.

       The Company maintains a demonstration and process development laboratory
  at its headquarters in Minnesota, occupying over 2,500 square feet, and a
  2,000 square foot Class 1 microlithography demonstration and process
  development laboratory in Dallas, Texas.  The Company's laboratory personnel
  work directly with customers in solving process problems, developing new
  processes, evaluating new pieces of equipment and designing new equipment.

       Expenditures for research and development, which are expensed as
  incurred, during fiscal 1995, 1994, and 1993 were approximately $24,865,000,
  15,743,000 and $11,760,000, respectively, and represented 13.1%, 16.3% and
  15.0% of sales, respectively. The Company attempts to supplement its research
  and development efforts with third party funding from industry consortiums,
  government sources, and customers. During fiscal 1995, 1994 and 1993, the
  Company 
   
                                      -11-
<PAGE>
 
  recognized third party funding of approximately $546,000, $1.3 million and
  $1.2 million, respectively, as a reduction in research and development
  expenses.

  MARKETING, SALES AND SUPPORT

       The Company markets its products to integrated circuit manufacturers
  throughout the world. In North America, the Company markets its products
  through direct sales personnel located in four regional sales offices and
  through two independent sales representatives.  The Company also has several
  product and technical specialists devoted to each of the Company's product
  lines.  These product and technical specialists and the Company's process
  engineers work with customers to understand the customer's precise processing
  requirements and to configure the appropriate FSI equipment to meet such
  requirements.  In addition, as of fiscal year end the sales effort was
  supported by approximately 205 employees engaged in service and marketing
  support.

       International sales, primarily in Europe, the Far East and Japan,
  accounted for approximately 37%, 33% and 34% of total sales for fiscal years
  1995, 1994 and 1993 respectively.  The Company owns a 38.2% equity interest in
  Metron Technology B.V. ("Metron"), a distributor of the Company's products
  which has an extensive distribution organization located in Europe, including
  Germany, the United Kingdom, the Netherlands, France, Sweden, Italy, and
  Israel, in India, and in the Far East, including, Taiwan, Korea, China,
  Singapore, and Hong Kong.  Fluoroware, Inc., a manufacturer of plastic
  injection moldings for the semiconductor device industry, also owns a 38.2%
  equity interest in Metron.  In addition to the Company's products, Metron also
  sells products and equipments on behalf of several other semiconductor
  equipment and consumables manufacturers, including Fluoroware, Inc.

       The significant majority of the Company's international sales are made to
  its affiliated distributors for resale to end users of the Company's products.
  However, in some cases, the Company may also sell directly to an international
  customer, in which case the Company will pay a commission to one of its
  affiliated distributors in connection with the sale.  When commissions are
  taken into account, the international sales to the Company's affiliates are on
  terms generally no less favorable to the Company than international sales by
  the Company directly to non-affiliates.

       The Company owns a 49% equity interest in m/./FSI, Ltd. ("m/./FSI"), a
  Japanese joint venture company formed in August 1991 with Mitsui & Co., Ltd.
  and its wholly-owned subsidiary, Chlorine Engineers Corp., Ltd. (collectively,
  "Mitsui").  Mitsui owns a 51% equity interest in m/./FSI.  In connection with
  its formation, the Company and Mitsui granted m/./FSI certain product and
  technology licenses and product distribution rights.  m/./FSI distributes
  certain FSI and Mitsui products in Japan.

  MANUFACTURING AND SUPPLIERS

       Except with respect to ACS products and certain POLARIS cluster modules,
  the Company typically assembles its products and systems from components and
  prefabricated parts manufactured and supplied by others, such as process
  controllers, robots, integrated circuits, power supplies, stainless steel
  pressure vessels, chamber bowls, valves, and relays. Certain of the items
  manufactured by others are made to the Company's specifications.  All final
  assembly and systems tests are performed within the Company's manufacturing
  facilities.  Quality control is maintained through incoming inspection of
  components, in-process inspection during equipment assembly, and final
  inspection and operation of all manufactured equipment prior to shipment.
  Currently, ACS 
    
                                      -12-
<PAGE>
 
  products are manufactured for the Company by contract manufacturers. The
  Company's manufacturing engineers routinely monitor production progress and
  perform source inspections prior to delivery of finished ACS products to
  customers. FSI has a company-wide quality program in place and received ISO
  9001 certification in October 1994. Such certification, however, does not
  cover the operations of ACS or FME.

       In fiscal 1995, the Company through its fifty (50%) percent interest in
  FME, established a manufacturing capability in Europe for its chemical
  management systems division.  In addition, FME also provides program
  management, including the capability to manage the installation of large
  chemical generation and dispense systems throughout a semiconductor device
  manufacturing facility.

       Certain of the components and subassemblies included in the Company's
  products are obtained from a single supplier or a limited group of suppliers
  in order to ensure overall quality and timeliness of delivery.  Although the
  Company seeks to reduce dependence on sole and limited source suppliers,
  disruption or termination of certain of these sources could have a temporary
  adverse effect on the Company's operations.  The Company believes that
  alternative sources could be obtained and qualified to supply these products,
  if necessary.  Nevertheless, a prolonged inability to obtain certain
  components could have an adverse effect on the Company's operating results and
  could result in damage to customer relationships.

  COMPETITION

       The semiconductor equipment industry is highly competitive.  In each of
  the markets it serves, the Company faces intense competition from established
  competitors, some of which have substantially greater financial, engineering,
  research, development, manufacturing, marketing service and support resources,
  and greater name recognition than the Company, and long standing customer
  relationships. In order to remain competitive, the Company will be required to
  maintain a high level of investment in research and development,  marketing,
  and customer service and support as well as control operating expenses.  There
  can be no assurance that the Company will have sufficient resources to
  continue to make such investments or that the Company's products will continue
  to be viewed as competitive as a result of technological advances by
  competitors or changes in semiconductor processing technology.  The Company's
  competitors also may increase their efforts to gain and retain market share
  through competitive pricing. Such competitive pressures may necessitate
  significant price reductions by the Company or result in lost orders which
  could adversely affect the Company's results of operations.

       Since 1992, Japanese semiconductor manufacturers substantially reduced
  their levels of capital spending on new fabrication facilities and equipment
  in Japan and elsewhere.  This has resulted in reduced sales and increasing
  competitive pressures in the Japanese market segment (comprised of
  semiconductor device fabrication facilities located in Japan and those located
  outside of Japan which are controlled by Japanese companies).  As a result,
  pricing pressures in both the Japanese market and elsewhere may continue into
  the foreseeable future due to Japanese semiconductor equipment manufacturers
  offering substantial discounts on their products.

       The Company believes that the Japanese companies with which it competes
  have a competitive advantage because of their dominance of the Japanese market
  segment. Furthermore, Japanese semiconductor device manufacturers have
  extended their influence outside Japan by licensing products and process
  technologies to non-Japanese semiconductor device manufacturers.  
   
                                      -13-
<PAGE>
 
  Such licenses can result in a recommendation to use semiconductor device
  equipment manufactured by Japanese companies. Therefore, the Company may be at
  a competitive disadvantage with respect to the Japanese semiconductor
  equipment suppliers, who have been engaged for some time in collaborative
  efforts with Japanese semiconductor device manufacturers. Certain Japanese
  semiconductor equipment manufacturers have announced plans to begin
  manufacturing operations in the United States, which will enable them to
  compete more effectively in the United States market.

       The Japanese market segment is important as it represents a substantial
  percentage of the world-wide semiconductor device market.  To date, the
  Company has not yet established itself as a significant participant in the
  Japanese market segment with respect to its POLARIS cluster or chemical
  management system product lines.  As part of the strategy to establish its
  Japanese presence, the Company formed a joint venture, m/./FSI in August 1991
  with Mitsui and granted m/./FSI certain product and technology licenses and
  product distribution rights in Japan.

       A growing portion of the Company's international sales have been to
  semiconductor device manufacturers located in Korea. The Korean market is
  extremely competitive and the semiconductor device manufacturers located there
  have been very aggressive in seeking price concessions from suppliers.  FSI
  does not believe that there are any existing government trade restrictions
  that would materially limit FSI's ability to compete in the Japanese or Korean
  markets.

       Significant competitive factors in the semiconductor equipment market
  include quality, process repeatability, capability and flexibility, ability to
  integrate with other products, and overall cost of ownership, including
  reliability, automation, throughput, customer support, and system price.  The
  Company has experienced significant price competition from certain of its
  competitors, primarily those in the microlithography and chemical management
  systems markets.  Although the Company believes that it has certain
  technological and other advantages over its competitors, realizing and
  maintaining such advantages will require a continued high level of investment
  by the Company in research and development, and marketing and customer service
  and support as well as controlling operating expenses.  There can be no
  assurance that the Company will continue to compete successfully in the
  future.

       The Company's competitors differ across its three product lines. The
  Company's microlithography clusters compete with products offered by Dainippon
  Screen Manufacturing Co. Ltd. ("DNS"), Silicon Valley Group, Inc. and Tokyo
  Electron Ltd. ("TEC"),.  The Company competes with DNS, TEL, Semitool, Inc.,
  Submicron Systems, Inc. ("Submicron"), and Santa Clara Plastics in the area of
  surface conditioning products.  The Company's Chemical Management System
  competes with products from Systems Chemistry, Inc., a subsidiary of
  Submicron, and a number of chemical supply companies that also offer chemical
  management systems.

  CUSTOMERS

       The Company sells products from one or more of its product lines to most
  major integrated circuit manufacturers, including AMD, Cypress Semiconductor,
  DEC, International Rectifier, Ericsson, Fujitsu, Hyundai, IBM, Intel, LG
  Semicon, Motorola, NSC, Phillips, SGS Thompson, Siemens and TI, and has over
  100 active customers worldwide.
  
                                      -14-
<PAGE>
 
       Although the composition of the Company's customers has changed from year
  to year, direct sales to the Company's top five customers in each of fiscal
  1995, 1994 and 1993 have accounted for approximately 54%, 46% and 50%,
  respectively, of the Company's total sales.  Direct sales to the Company's top
  two customers in each of fiscal 1995, 1994 and 1993 accounted for
  approximately 28%, 30% and 32% respectively, of the Company's total sales.  In
  addition, approximately 38% of the Company's backlog at fiscal 1995 year-end
  was comprised of orders from two customers.  IBM accounted for approximately
  16% and 6% of the Company's sales in fiscal 1995 and 1994, respectively.
  Motorola accounted for approximately 12% and 8% of the Company's sales for
  fiscal 1995 and 1994, respectively.  LG Semicon accounted for approximately
  11% and 5% of the Company's sales for fiscal 1995 and 1994, respectively.

       Sales to the Company's affiliated international distributors in fiscal
  1995, 1994 and 1993, which may include sales of products subsequently resold
  to the Company's direct customers, accounted for approximately 22%, 26%, and
  25%, respectively, of the Company's total sales.  In addition, the earnings
  received from the Company's equity ownership interest in such affiliated
  distributors accounted for approximately 18%, 32%, and 43% of the Company's
  net income in fiscal 1995, 1994 and 1993, respectively.  The earnings or
  losses of the Company's affiliated distributors can affect significantly the
  financial results of the Company.  There can be no assurance that the
  affiliated distributors will continue to distribute the Company's products or
  do so successfully, and in such event the Company's results of operations and
  earnings could be adversely affected.

       The Company has experienced and expects to continue to experience
  fluctuations in its customer mix.  The timing of an order for the Company's
  equipment is primarily dependent upon the customer's expansion program,
  replacement needs, or requirements to improve integrated circuit fabrication
  productivity and yields.  Consequently, a customer who places significant
  orders in one year will not necessarily place significant orders in subsequent
  years.

       Certain of the Company's present products require an export license from
  the United States Department of Commerce prior to their sale outside the
  United States, while other FSI products can be freely exported under a general
  export license.


  PATENTS, TRADEMARKS AND INTELLECTUAL PROPERTY

       The POLARIS cluster is offered by the Company under a license from TI.
  Under the license agreement, FSI has the exclusive right to sell and the non-
  exclusive right to manufacture the POLARIS cluster, except that TI may
  manufacture and distribute the system within TI.  FSI also has the non-
  exclusive right to manufacture and sell related TI modules.  TI may modify
  FSI's exclusive sales rights to a non-exclusive license if FSI fails to use
  reasonable efforts in marketing the POLARIS cluster. The license agreement
  requires a royalty payment to TI on the equipment manufactured and sold by the
  Company pursuant to the license.  The royalty to be paid is based on the "net
  sales price" of the licensed equipment, as reflected in the final invoice
  amount charged by the Company to the customer for such equipment, excluding
  amounts for packaging, insurance, freight, service, maintenance, and value-
  added tax.

       The license agreement continues until terminated. It may be terminated by
  either party upon a breach by the other party, and the failure to cure, of
  certain terms of the agreement, including payment of royalties when due,
  refusal to sell products, and failure to meet quality standards.
  
                                      -15-
<PAGE>
 
       The Company holds numerous United States patents and additional patents
  in Japan and several European countries, and has several United States and
  foreign patent applications pending. However, the Company believes that
  patents and trademarks are of less significance in its industry than such
  factors as innovative skills, technical expertise, and the ability to quickly
  adapt to and deliver new technology to the marketplace.  The Company attempts
  to protect its proprietary information through non-disclosure agreements with
  its key employees.

  EMPLOYEES

       As of August 26, 1995, FSI and its wholly-owned subsidiary ACS had 808
  employees, of whom 259 were engaged in manufacturing, 138 were engaged in
  customer service, 256 were engaged in research and development, 66 were
  engaged in sales and marketing, and 89 held general and administrative
  positions.  As of such date, the Company also had over 125 independent
  contractors working throughout the Company in various capacities, principally
  in the areas of manufacturing and engineering.  FME employs approximately 35
  employees, the majority of whom are involved in manufacturing and/or system
  installation.

       The Company is not subject to any collective bargaining agreement, has
  never been subject to a work stoppage and believes its relations with its
  employees is good.

  ENVIRONMENTAL MATTERS

       The Company believes that compliance with federal, state and local
  provisions which have been enacted or adopted regulating discharges of
  materials into the environment, or otherwise relating to the protection of the
  environment will not have a material effect upon the capital expenditures,
  earnings and competitive position of the Company.  See also Item 3 - "Legal
  Proceedings."

  INTERNATIONAL SALES

       The Company's international sales for each of the last three fiscal years
  is disclosed in the financial statements incorporated by reference and
  referred to in Item 8 on pages 21-22 of this Report.


  ITEM 2.  PROPERTIES

       The Company's corporate offices are located in Chaska, a suburb of
  Minneapolis, Minnesota.  In fiscal 1995, the Company leased approximately
  176,000 square feet, in five buildings, at a total rental cost of
  approximately $1.4 million.  Effective December 1, 1995, the rental cost for
  these facilities will be reduced to approximately $790,000 as part of a new
  five year lease on its headquarters facility, which facility also contains a
  process research laboratory, and manufacturing for chemical management system
  products.

       In November 1995, the Company opened a new 100,000 square foot
  manufacturing facility which cost approximately $11.5 million to construct.
  The facility contains 45,000 square feet of Class 1000 manufacturing clean
  room space, which can be upgraded to class 100 as required.  The new facility
  also contains a manufacturing support operations and customer training center,
  and shell space for a new process research laboratory for the Surface
  Conditioning Division.
  
                                      -16-
<PAGE>
 
       The Company also leases facilities in England and in various locations
  within the United States including:

            /./ a 37,000 square foot process research laboratory, engineering
                and administrative facilities for the Microlithography Division
                located in Dallas, Texas.

            /./ a 17,180 square foot engineering and administrative facility for
                the Chemical Management Division located in Hollister,
                California (ACS Headquarters).

            /./ a 11,767 square foot engineering, manufacturing, and
                administrative facilities for the Chemical Management Division
                located in Europe (FME Headquarters).

       In addition, in August 1995, the Company entered into a five-year lease
  for approximately 125,800 square feet of engineering, administrative and
  warehouse space near its Chaska headquarters.  Approximately 45,000 square
  feet is being used and the remaining warehouse space is available for
  sublease.


  ITEM 3.  LEGAL PROCEEDINGS

       The Company generates minor amounts of liquid and solid hazardous waste
  and uses licensed haulers and disposal facilities to ship and dispose of such
  waste.  The Company has received notice from state or federal enforcement
  agencies that it is a potentially responsible party ("PRP") in connection with
  the investigation of four hazardous waste disposal sites owned and operated by
  third parties.  In each matter, the Company believes that it is at most a "de
  minimis" PRP.  The Company recently elected to participate in a settlement
  offer made to all de minimis parties with respect to one such site.

       The risk of being named a PRP is that if any of the other PRP's are
  unable to contribute their proportionate share of the liability, if any,
  associated with the site, those PRP that are able could be held financially
  responsible for the shortfall.  While the ultimate outcome of these matters
  cannot presently be determined, the Company does not believe that any of these
  investigations, either individually or in the aggregate, will have a material
  adverse effect on its business, operating results, or financial condition.

       In October, 1995, Purusar Corporation ("Purusar") brought suit against
  the Company in United States District Court, Northern District of California,
  seeking monetary damages and injunctive relief based upon the Company's
  alleged infringement of a patent held by Purusar.  The lawsuit is in the very
  initial stages.  The Company has asserted various defenses as well as
  noninfringement of such patent by the Company's products.  While litigation is
  subject to inherent uncertainties and no assurance can be given that the
  Company will prevail in such litigation or will obtain a license under such
  patent on commercially reasonable terms or at all if such patent is found to
  be valid and it is determined the Company infringes such patent, the Company
  believes that the Purusar lawsuit will not have a material adverse affect on
  the Company's consolidated financial statements.

                                      -17-
<PAGE>
 
       There has been substantial litigation regarding patent and other
  intellectual property rights in semiconductor related industries recently and
  further commercialization of the Company's products could provoke claims of
  infringement of third-parties.  Except for the allegations made by Purusar,
  the Company is not aware of any infringement by its products of any patents or
  proprietary rights of others.  In the future, litigation may be necessary to
  enforce patents issued to the Company, to protect trade secrets or know-how
  owned by the Company or to defend the Company against claimed infringement of
  the rights of others and determine the scope and validity of its proprietary
  rights.  Any such litigation could result in substantial costs and diversion
  of effort by the Company, which by itself could have a material adverse affect
  on the Company's financial condition and operating results.  Further, adverse
  determinations in such litigation could result in the Company's loss of
  proprietary rights, subject the Company to significant liabilities to third
  parties, require the Company to seek licenses from third-parties or prevent
  the Company from manufacturing or selling its products, any of which could
  have a material adverse effect on the Company's financial condition and
  results of operations.

       Other than the litigation described above or routine litigation
  incidental to the Company's business, there is no material litigation to which
  the Company is a party or of which any of its property is subject.

  ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SHAREHOLDERS

       There were no matters submitted to a vote of shareholders during the
  fourth quarter ended August 26, 1995.

  ITEM 4A.  EXECUTIVE OFFICERS OF THE COMPANY

       The executive officers are elected by the board of directors, generally
  for a term of one year, and serve until their successor is elected and
  qualified.  The following table and discussion contains information regarding
  the current executive officers of the Company.
<TABLE>
<CAPTION>
 
NAME                   AGE                              POSITION
- ----                   ---                              -------- 
<S>                    <C>                               <C>
 
Joel A. Elftmann        55   Chairman of the Board, President, and Chief
                             Executive Officer
 
Peter A. Pope           45   Executive Vice President, Marketing and Account
                             Management
 
Benno G. Sand           41   Executive Vice President, Chief Financial
                             Officer, and Secretary
 
Benjamin J. Sloan       55   Executive Vice President, Microlithography Division
 
Robert E. Cavins        60   Senior Vice President, Chemical Management Division
 
Dale A. Courtney        58   Senior Vice President, Surface Conditioning
                             Division
 
J. Wayne Stewart        45   Vice President, Operations
</TABLE> 

                                      -18-
<PAGE>
 
<TABLE>
<CAPTION>
 
<S>                     <C>   <C>
Timothy D. Krieg        40   Vice President, Quality and Human Resources
 </TABLE>

       Mr. Elftmann is a co-founder of the Company and has served as a Director
  of the Company since 1973 and as Chairman of the Board since August 1983.
  From August 1983 to August 1989, and from May 1991 until the present, Mr.
  Elftmann has also served as Chief Executive Officer of the Company. From 1977
  to August 1983, and from May 1991 until the present, Mr. Elftmann has served
  as President of the Company.  Prior to 1977, Mr. Elftmann was Vice President
  and General Manager of the Company.  Mr. Elftmann is also Chairman of the
  Supervisory Board of Metron and is a director of m/./FSI Ltd.  He has been a
  director of Veeco Instruments, Inc. since May 1994.

       Mr. Pope was elected Executive Vice President, Marketing and Account
  Management of the Company in January 1992.  Mr. Pope served as Senior Vice
  President and General Manager, Process Equipment of the Company from November
  1989 until January 1992.  Mr. Pope served as Vice President, Sales and Service
  of the Company from May 1985 to November 1989.  From September 1982 to May
  1985, Mr. Pope served as Executive Sales Manager of the Company.  Prior
  thereto, he was Managing Director of Metron.  Mr. Pope also serves as a
  director of m/./FSI Ltd.

       Mr. Sand has served as Executive Vice President and Chief Financial
  Officer of the Company since January 1992.  Mr. Sand served as Vice President,
  Finance and Chief Financial Officer of the Company from October 1990 until
  January 1992.   He served as Vice President, Finance of the Company from
  October 1987 until October 1990. From August 1983 to October 1987, Mr. Sand
  served as Corporate Controller of the Company and from November 1982 to August
  1983 as its Financial Accounting Manager.  Prior thereto he was employed by
  the accounting firm of KMG Main Hurdman as an auditor and consultant.  Mr.
  Sand was elected Assistant Secretary of the Company in November 1989 and
  Secretary in November 1990.

       Dr. Sloan has served as Executive Vice President, Microlithography
  Division of the Company since January 1992.  Prior thereto, Dr. Sloan was
  employed by TI in Dallas, Texas, where he served over 24 years in various
  research and development capacities, most recently as Vice President of TI's
  Semiconductor Group and Manager of the Wafer Fabrication Systems Division of
  TI's Process Automation Center.  Dr. Sloan is Chairman of the Company's
  Technical Advisory Board.
 
       Dr. Cavins has served as Senior Vice President, Chemical Management
  Division of the Company since March 1994.  He served as Vice President,
  Chemical Management Division from January 1993 until March 1994.  From 1988 to
  March 1992, Dr. Cavins served as Senior Vice President of Operations for E.F.
  Johnson Company.  From March 1992 to July 1992, Dr. Cavins was employed by
  Itron Corporation in the capacity of Vice President and General Manager for
  Enscan Operations, the energy management division of Itron Corporation.  Prior
  to joining E.F. Johnson Company, Dr. Cavins served in management positions in
  various electronics and engineering capacities at Honeywell Inc. and Control
  Data Corporation (now Ceridian Corporation).  Dr. Cavins also serves as a
  Managing Director of FME.

                                      -19-
<PAGE>
 
       Mr. Courtney has served as Senior Vice President, Surface Conditioning
  Division since March 1994.  Mr. Courtney served as Vice President, Surface
  Conditioning Division of the Company from November 1992 until March 1994.  Mr.
  Courtney served as Vice President, Engineering of the Company from August 1991
  to November 1992.  Mr. Courtney served as Director of Engineering of the
  Company from September 1990 to August 1991 and as manager of Engineering
  Software Development and Automation of the Company from September 1987 to
  September 1990.  Prior to joining the Company, Mr. Courtney was President of D
  A Courtney & Associates, Dallas, Texas, specializing in the development of
  software for automation and real time process control systems.  Mr. Courtney
  is a director of m/./FSI Ltd.

       Mr. Stewart has served as Vice President, Operations since February 1994.
  Prior thereto, Mr. Stewart was employed by TI in Dallas, Texas where he served
  over 20 years in various manufacturing and operations management positions,
  most recently as Corporate Computer Integrated Manufacturing Director,
  responsible for worldwide manufacturing and materials systems.  He also was
  the Manufacturing Manager of TI's award winning HARM (High Speed Anti-Radar
  Missile) program.  Mr. Stewart serves as a Managing Director of FME.

       Mr. Krieg has served as Vice President, Quality and Human Resources of
  the Company since March 1994 and also served in that capacity from January
  1992 until March 1993.  Mr. Krieg was Vice President, Human Resources from
  March 1993 until March 1994 and also served in that same capacity from October
  1987 until January 1992.  From September 1979 to October 1987, he served as
  Human Resources Manager of the Company.  Mr. Krieg was elected Assistant
  Secretary of the Company in November 1990.

                                      -20-
<PAGE>
 
                                    PART II

  ITEM 5.  MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED STOCKHOLDER
           MATTERS

       The Company's Common Stock, no par value, is traded on the Nasdaq
  National Market ("Nasdaq-NNM") under the symbol "FSII."  The information
  concerning the quarterly stock prices and dividends for the fiscal years ended
  August 26, 1995 and August 27, 1994 and the number of shareholders of record
  is contained in the Company's 1995 Annual Report to Shareholders ("Annual
  Report"), at page 34 under the captions "Quarterly Data" and "Common Stock
  Prices", which information is incorporated by reference.


  ITEM 6.  SELECTED FINANCIAL DATA

       The summary of selected financial data for each of the last five fiscal
  years set forth in the Annual Report in the table on page 13 under the caption
  "Five-Year Selected Financial Data" is incorporated by reference.

  ITEM 7.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND
           RESULTS OF OPERATIONS

       The information set forth under the caption "Management's Discussion and
  Analysis of Financial Condition and Results of Operations" appearing in the
  Company's Annual Report on pages 14 to 17 is incorporated by reference.

  ITEM 8.  FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

       The following consolidated financial statements and supplementary data of
  the Company and its subsidiaries for the periods indicated and the Independent
  Auditors' Report listed below which are included in the Annual Report at the
  pages indicated, are incorporated by reference.

<TABLE>
<CAPTION>
                                                               PAGE NUMBER IN
  CONSOLIDATED FINANCIAL STATEMENTS:                            ANNUAL REPORT
                                                               -------------
<S>                                                            <C>

       Consolidated Statements of Operations - Fiscal Years Ended       18
       August 26, 1995, August 27, 1994 and August 28, 1993.
 
       Consolidated Balance Sheets - August 26, 1995 and                19
       August 27, 1994.
 
       Consolidated Statements of Stockholders' Equity -                20
       Fiscal Years Ended August 26, 1995, August 27, 1994
       and August 28, 1993.
 
       Consolidated Statements of Cash Flows - Fiscal Years Ended       21
       August 26, 1995, August 27, 1994 and August 28, 1993.
</TABLE> 

                                      -21-
<PAGE>
 
<TABLE> 
<S>                                                                <C>   
       Notes to Consolidated Financial Statements.                   22-31
 
       Independent Auditors' Report                                     32
 
       Supplementary Data:  Quarterly Operating Results                 34
       and Market Data
</TABLE>


  ITEM 9.  CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
           FINANCIAL DISCLOSURE

       Not applicable.


                                    PART III

       Certain information required by Part III is incorporated by reference to
  the Company's Definitive Proxy Statement for the Annual Meeting of
  Shareholders to be held on January 24, 1996 (the "Proxy Statement") and which
  will be filed with the Securities and Exchange Commission pursuant to
  Regulation 14A within 120 days after August 26, 1995.

  ITEM 10.  DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

       The information concerning the Company's directors required by this Item
  is included in the Proxy Statement and is incorporated by reference.  For
  information concerning executive officers, see Item 4A of this Form 10-K
  Report.

  ITEM 11.  EXECUTIVE COMPENSATION

       The information required by this Item, which is included in the Proxy
  Statement, is incorporated by reference.

  ITEM 12.  SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

       The information required by this Item, which is included in the Proxy
  Statement, is incorporated by reference.

  ITEM 13.  CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

       The information required by this Item, which is included in the Proxy
  Statement, is incorporated by reference.

                                      -22-
<PAGE>
 
                                    PART IV

  ITEM 14.  EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K

         (a) (1) The following financial statements and documents and the report
         of the independent auditors are included in the Annual Report (an
         Exhibit to this Report) and are incorporated by reference in Item 8 of
         this Report:

<TABLE>
<CAPTION>
                                                                                 PAGE NUMBER IN
                                                                                  ANNUAL REPORT
                                                                                 --------------
<S>                                                                              <C>
         Selected Financial Data for the five years ended August 26, 1995                    13
 
         Management's Discussion and Analysis of Financial Condition                      14-17
         and Results of Operations
 
         Consolidated Statements of Operations - Fiscal Years ended                          18
         August 26, 1995, August 27, 1994, and August 28, 1993
 
         Consolidated Balance Sheets - August 26, 1995 and August 27, 1994                   19
 
         Consolidated Statements of Stockholders' Equity - Fiscal Years Ended                20
         August 26, 1995, August 27, 1994, and August 28, 1993
 
         Consolidated Statements of Cash Flows - Fiscal Years                                21
         ended August 26, 1995, August 27, 1994, and August 28, 1993
 
         Notes to Consolidated Financial Statements                                       22-31
 
         Independent Auditors' Report                                                        32


                                                                                   PAGE NUMBER 
                                                                                 IN THIS REPORT
                                                                                 --------------
         (a) (2) Financial Statement Schedules

         The following Report and financial statement schedule are
         included in this Part IV and are found in this Report at the pages
         indicated.

         Independent Auditors' Report on Schedule                                           29

           Schedule II - Valuation and Qualifying Accounts                                  30

         All other schedules are omitted because they are not applicable                   
         or the required information is shown in the consolidated                                       
         financial statements or notes thereto.                         
 
         Metron Semiconductors Europa B.V. 31 May 1995 and                                 31-46
         31 May 1994 Consolidated Financial Statements                                    
</TABLE> 

                                     -23-
<PAGE>
 
<TABLE>
<CAPTION>
 
(a)(3)  Exhibits
<C>                  <S>
 
                *An asterisk next to a listed Exhibit indicates it is
                 an executive compensation plan or arrangement.
 
                2.1  Agreement and Plan of Reorganization
                     dated December 23, 1994 by and among
                     the Company, ACS Acquisition Corp.,
                     Applied Chemical Solutions, and certain
                     significant shareholders of Applied
                     Chemical Solutions. (1)
                2.2  Share Purchase Agreement dated December
                     14, 1994 by and among the Company,
                     Metron Semiconductors Europa B.V.,
                     Christopher Springall, Anthony
                     Springall, Roger Springall, David
                     Springall and Michael Springall. (2)
                3.1  Restated Articles of Incorporation of
                     the Company. (3)
                3.2  Restated By-Laws. (4)
                3.3  Amendment to Restated By-Laws. (5)
                4.1  FSI Corporation Stock Purchase
                     Agreement dated March 20, 1981. (4)
                4.2  Stock Purchase Agreement dated
                     September 15, 1982. (4)
                4.3  Common Stock and Common Stock Purchase
                     Warrants Agreement dated October 15,
                     1985. (4)
                4.4  Second Amendment, dated as of January
                     9, 1989, to Common Stock and Common
                     Stock Warrants Purchase Agreement dated
                     as of October 15, 1985. (5)
                4.5  Registration and Preemptive Rights
                     Agreement dated October 15, 1985. (4)
              *10.1  1983 Incentive Stock Option Plan. (4)
              *10.2  1982 Nonqualified Stock Option Plan. (4)
              *10.3  Split Dollar Insurance Agreement and
                     Collateral Assignment Agreement dated
                     December 28, 1989, between the Company
                     and Joel A. Elftmann.  (Similar
                     agreements between the Company and each
                     of Robert E. Cavins, Benjamin J. Sloan,
                     Dale A. Courtney, Peter A. Pope, Benno
                     G. Sand and Timothy D. Krieg have been
                     omitted, but will be filed upon the
                     request of the Commission). (4)
               10.4  Lease dated June 27, 1985, between the
                     Company and Lake Hazeltine Properties.
                     (7)
               10.5  Lease dated September 1, 1985, between
                     the Company and Elftmann, Wyers,
                     Blackwood Partnership. (7)
               10.6  Lease dated September 1, 1985, between
                     the Company and Elftmann, Wyers
                     Partnership. (7)
              *10.7  1989 Stock Option Plan. (5)
              *10.8  Amended and Restated Employees Stock
                     Purchase Plan. (3)
              *10.9  Directors Nonstatutory Stock Option
                     Plan. (3)
              10.10  Shareholders Agreement among FSI
                     International, Inc. and Mitsui & Co.,
                     Ltd. and Chlorine Engineers Corp. Ltd.
                     dated as of August 14, 1991. (8)
              10.11  FSI Exclusive Distributorship Agreement
                     dated as of August 14, 1991 between FSI
                     International, Inc. and m.FSI, Ltd. (8)
              10.12  FSI Licensing Agreement dated as of
                     August 14, 1991, between FSI
                     International, Inc. and m.FSI, Ltd. (8)
              10.13  License Agreement, dated October 15,
                     1991, between the Company and Texas
                     Instruments Incorporated. (9)
              10.14  Amendment No. 1, dated April 10, 1992,
                     to the License Agreement, dated October
                     15, 1991, between the Company and Texas
                     Instruments Incorporated. (9)
              10.15  Amendment effective October 1, 1993 to
                     the License Agreement, dated October
                     15, 1991 between the Company and Texas
                     Instruments Incorporated. (10)
             *10.16  Amended and Restated Directors'
                     Nonstatutory Stock Option Plan. (11)
</TABLE> 
                                      -24-
<PAGE>
 
             *10.17  Management Agreement between FSI
                     International, Inc. and Robert E.
                     Cavins, effective as of March 28, 1994.
                     (11)
             *10.18  Management Agreement between FSI
                     International, Inc. and Dale A.
                     Courtney, effective as of March 28,
                     1994. (11)
             *10.19  Management Agreement between FSI
                     International, Inc. and Joel A.
                     Elftmann, effective as of March 28,
                     1994. (11)
             *10.20  Management Agreement between FSI
                     International, Inc. and Timothy D.
                     Krieg, effective as of March 28, 1994.
                     (11)
             *10.21  Management Agreement between FSI
                     International, Inc. and Peter A. Pope,
                     effective as of March 28, 1994. (11)
             *10.22  Management Agreement between FSI
                     International, Inc. and Benno G. Sand,
                     effective as of March 31, 1994. (11)
             *10.23  Management Agreement between FSI
                     International, Inc. and Benjamin J.
                     Sloan, effective as of March 28, 1994.
                     (11)
             *10.24  Management Agreement between FSI
                     International, Inc. and J. Wayne
                     Stewart, effective as of March 28,
                     1994. (11)
             *10.25  FSI International, Inc. 1994 Omnibus
                     Stock Plan. (12)
             *10.26  FSI International, Inc. 1995 Incentive
                     Plan
             *10.27  FSI International, Inc. 1996 Incentive
                     Plan
              10.28  First Amendment to Lease made and
                     entered into October 31, 1995 by and
                     between Lake Hazeltine Properties and
                     FSI International, Inc.
              10.29  Distribution Agreement made and entered
                     into as of July 6, 1995 by and between
                     FSI International, Inc. and Metron
                     Semiconductors Europa B.V. (Exhibits to
                     Agreement omitted)
              10.30  Lease dated August 9, 1995 between
                     Skyline Builders, Inc. and FSI
                     International, Inc.
              10.31  Lease Rider dated August 9, 1995
                     between Skyline Builders, Inc. and FSI
                     International, Inc.
              10.32  Lease Amendment dated November 15, 1995
                     between Roland A. Stinski and FSI
                     International, Inc. (Exhibits to 
                     Amendment omitted)
               11.1  Computation of Per Share Earnings of
                     FSI International, Inc.
               13.0  1995 Annual Report to Shareholders
               21.0  Subsidiaries of the Company
               23.0  Consent of KPMG Peat Marwick LLP.
               23.1  Consent of KPMG Accountants N.V.
               24.0  Powers of Attorney from the Directors
                     of FSI International, Inc.
               27.0  Financial Data Schedule
 
              -------------
                (1)  Filed as an Exhibit to the Company's
                     Report on Form 8-K dated January 5,
                     1995, as amended, File No. 0-17276, and
                     incorporated by reference.
                (2)  Filed as an Exhibit to the Company's
                     Registration Statement on Form S-3
                     dated January 5, 1995, SEC File No.
                     33-88250 and incorporated by reference.
                (3)  Filed as an Exhibit to the Company's
                     Report on Form 10-Q for the quarter
                     ended
   
                                      -25-
<PAGE>
 
                     February 24, 1990, SEC File No. 0-17276, 
                     and incorporated by reference.
                (4)  Filed as an Exhibit to the Company's
                     Registration Statement on Form S-1, SEC
                     File No. 33-25035, and incorporated by
                     reference.
                (5)  Filed as an Exhibit to the Company's
                     Report on Form 10-K  for the fiscal
                     year ended August 26, 1989, SEC File
                     No. 0-17276, and incorporated by
                     reference.
                (6)  Filed as an Exhibit to the Company's
                     Report on Form 10-K for the fiscal year
                     ended August 25, 1990, as amended by
                     Form 8 dated December 20, 1990, and by
                     Form 8 dated February 5, 1991, SEC File
                     No. 0-17276, and incorporated by
                     reference.  Similar agreements between
                     the Company and each of  Robert E.
                     Cavins, J. Wayne Stewart, Benjamin J.
                     Sloan, Dale A. Courtney, Peter A. Pope,
                     Benno G. Sand and Timothy D. Krieg have
                     been omitted, but will be filed upon
                     the request of the Commission.
                (7)  Filed as an Exhibit to the Company's
                     Registration Statement on Form S-1, SEC
                     File No. 33-25035, and incorporated by
                     reference.
                (8)  Filed as an Exhibit to the Company's
                     Report on Form 10-K for the fiscal year
                     ended August 31, 1991, as amended by
                     Form 8 dated January 7, 1992, SEC File
                     No. 0-17276, and incorporated by
                     reference.
                (9)  Filed as an Exhibit to the Company's
                     Report on Form 10-Q for the fiscal
                     quarter ended February 29, 1992, File
                     No. 0-17276, and incorporated by
                     reference.
               (10)  Filed as an Exhibit to the Company's
                     Report on Form 10-K for the fiscal year
                     ended August 27, 1993, SEC File No.
                     0-17276, and incorporated by reference.
               (11)  Filed as an Exhibit to the Company's
                     Report on Form 10-Q for the fiscal
                     quarter ended May 28, 1994, SEC File
                     No. 0-17276, and incorporated by
                     reference.
               (12)  Filed as an Exhibit to the Company's
                     Report on Form 10-K for the fiscal year
                     ended August 27, 1994, SEC File No.
                     0-17276, and incorporated by reference.
    
                                      -26-
<PAGE>
 
    (b)     Reports on Form 8-K

            No reports on Form 8-K were filed during the fourth quarter
            ending August 26, 1995.



                                       PROXY STATEMENT

                      Except for those portions specifically incorporated in
                    this Report by reference to the Company's Proxy Statement
                    for the Annual Meeting of Shareholders to be held on January
                    24, 1996, no other portions of the Proxy Statement are
                    deemed to be filed as part of this Report on Form 10-K.  The
                    Proxy Statement is furnished solely for the information of
                    the Securities and Exchange Commission.

                                      -27-
<PAGE>
 
                                   SIGNATURES


            Pursuant to the requirements of Section 13 or 15(d) of the
       Securities Exchange Act of 1934, the Registrant has duly caused this
       Report to be signed on its behalf by the undersigned, thereunto duly
       authorized.
 
                                    FSI INTERNATIONAL, INC.
 
 
                                    By:  /s/Joel A. Elftmann
                                        --------------------   
                                        Joel A. Elftmann, Chairman, President
                                        and Chief Executive Officer (Principal
                                        Executive Officer)
 
 
 
Dated:  November 21, 1995
 
 
                                    By:  /s/Benno Sand
                                        --------------
                                        Benno Sand, Executive Vice President
                                        and Chief Financial Officer
                                        (Principal Financial and Accounting
                                        Officer)
  
            Pursuant to the requirements of the Securities Exchange Act of 1934,
       this report has been signed below by the following persons, constituting
       a majority of the Board of Directors, on behalf of the Registrant and in
       the capacities and on the dates indicated.
 
       Joel A. Elftmann, Director     )
       James A. Bernards, Director    )
       Neil R. Bonke, Director        )
       Terrence W. Glarner, Director  )
       Robert E. Lorenzini, Director  )    By:  /s/Benno Sand
       William M. Marcy, Director     )        --------------  
       Charles R. Wofford, Director   )        Benno Sand, Executive Vice
                                               President and Chief Financial
                                               Officer
                                               (Principal Financial and
                                               Accounting Officer)
 
                                               Dated:  November 21, 1995

                                      -28-
<PAGE>
 
                    INDEPENDENT AUDITORS' REPORT ON SCHEDULE
                    ----------------------------------------

                          INDEPENDENT AUDITORS' REPORT



         The Board of Directors and Stockholders
         FSI International, Inc.


         Under the date of October 13, 1995, we reported on the consolidated
         balance sheets of FSI International, Inc. and subsidiaries as of August
         26, 1995 and August 27, 1994, and the related consolidated statements
         of operations, stockholders' equity, and cash flows for each of the
         years in the three-year period ended August 26, 1995, as contained in
         the 1995 annual report to stockholders.  These consolidated financial
         statements and our report thereon are incorporated by reference in the
         annual report on Form 10-K for the year 1995.  In connection with our
         audits of the aforementioned consolidated financial statements, we also
         have audited the related financial statement schedule as listed in the
         accompanying index.  The financial statement schedule is the
         responsibility of the Company's management.  Our responsibility is to
         express an opinion on the financial statement schedule based on our
         audits.

         In our opinion, such financial statement schedule, when considered in
         relation to the basic consolidated financial statements taken as a
         whole, presents fairly, in all material respects, the information set
         forth therein.



         Minneapolis, Minnesota
         October 13, 1995
  
                                      -29-
<PAGE>
 
                    FSI INTERNATIONAL, INC. AND SUBSIDIARIES

                                  SCHEDULE II

                       VALUATION AND QUALIFYING ACCOUNTS
    FISCAL YEARS ENDED AUGUST 26, 1995, AUGUST 27, 1994 AND AUGUST 28, 1993

<TABLE>
<CAPTION>
 
 
                                               Balance at                             
                                               Beginning                          Balance at
                                                of Year    Additions   Deletions  End of Year
                                               ----------  ----------  ---------  -----------
<S>                                             <C>         <C>         <C>         <C>
 
Fiscal Year Ended August 26, 1995
       Allowance for doubtful
       accounts (Deducted from                
       accounts receivable)                      $525,000    $700,000    $   -0-   $1,225,000  
                                                 ========    ========    =======   ==========
                                                 
Fiscal Year Ended August 27, 1994
       Allowance for doubtful
       accounts (Deducted from
       accounts receivable)                      $350,000    $175,000    $   -0-   $  525,000
                                                 ========    ========    =======   ==========
Fiscal Year Ended August 28, 1993
       Allowance for doubtful
       accounts (Deducted from
       accounts receivable)                      $300,000    $ 52,400    $(2,400)  $  350,000
                                                 ========    ========    =======   ==========
 
</TABLE>

                                      -30-
<PAGE>
 

                   METRON SEMICONDUCTORS EUROPA B.V., ALMERE


                             Financial Statements
                              for the years ended
                          31 May 1995, 1994 and 1993


                                     -31-
<PAGE>
 
 
TABLE OF CONTENTS


                                                                 page

Consolidated Statements of Operations                              2

Consolidated Balance Sheets                                        3

Consolidated Statements of Cash Flows                              4

Consolidated Statements of Shareholders' Equity                    5

Notes to the Consolidated Financial Statements                     6


                                                                       page 1


                                     -32-
<PAGE>


METRON SEMICONDUCTORS EUROPA B.V., ALMERE

Consolidated Statements of Operations
for the years ended 31 May 1995, 1994 and 1993


<TABLE>
<CAPTION>
=============================================================================================
(in Dutch Guilders)                        Notes      1994/5         1993/4         1992/3
- ----------------------------------------   -----  -------------- -------------- -------------
<S>                                        <C>    <C>            <C>            <C>

Sales                                        2       173,097,282    160,479,094   111,877,931
Cost of Sales                                       (123,205,862)  (115,196,670)  (77,335,028)

                                                  -------------- -------------- -------------
Gross Profit                                          49,891,420     45,282,424    34,542,903

Selling, General and Administrative
Expenses                                             (35,445,230)   (33,345,370)  (27,671,913)

                                                  -------------- -------------- -------------
Operating Profit                                      14,446,190     11,937,054     6,870,990

Interest Expense                                        (411,672)      (673,861)     (858,951)
Foreign Currency Exchange Differences                 (1,736,876)         5,076        47,761
Other Income, net                                        404,798        358,213       211,022

                                                  -------------- -------------- -------------
Income before Income Taxes                            12,702,440     11,626,482     6,270,822

Income Tax Expense                           3        (5,286,363)    (4,137,323)   (2,011,228)

                                                  -------------- -------------- -------------
Income after Income Taxes                              7,416,077      7,489,159     4,259,594

Equity in Earnings of Associated Company                 164,600              -             -
Minority Interests in Net Earnings                      (195,973)      (783,847)     (466,055)

                                                  -------------- -------------- -------------
Net Income                                             7,384,704      6,705,312     3,793,539
                                                  ============== ============== =============

Net Income per Share                                     NLG3.70        NLG3.44       NLG1.93
                                                  -------------- -------------- -------------

Weighted Average Shares                                1,994,655      1,948,000     1,962,000
                                                  -------------- -------------- -------------
</TABLE>

The accompanying notes are an integral part of the consolidated financial
statements.

                                                                       Page 2


                                     -33-
<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
CONSOLIDATED BALANCE SHEETS

<TABLE> 
<CAPTION> 

============================================================================ 
(in Dutch Guilders)                       Notes    31 May 1995   31 May 1994
- --------------------------------------    -----    -----------   -----------
<S>                                       <C>      <C>           <C>
 ASSETS
 
Current Assets
   Cash and Cash Equivalents                  4     13,258,686     8,805,082
   Trade Accounts Receivable, less
    Allowance for Doubtful Accounts
    of NLG 1,687,009 in 1994 and                                             
    NLG 869,401 in 1993                             33,291,994    36,978,551
   Accounts Receivable from Associated                   
    Company                                            400,600             -
   Inventories                                1      8,411,874    10,049,421
   Income Taxes Receivable                             740,962             -
   Prepaid Expenses and Other Current                
    Assets                                           3,084,519     2,874,892
                                                   -----------   -----------
Total Current Assets                                59,188,635    58,707,946
                                                   -----------   -----------
 
 
Property, Plant and Equipment                 5      5,586,248     5,418,786
 
Investment in Associated Company              6      2,177,239             -
                                                    ----------    ----------
                                                    66,952,122    64,126,732
                                                    ==========    ==========
LIABILITIES AND SHAREHOLDERS' EQUITY
 
Current Liabilities
  Bank Overdrafts                             4      4,483,020     2,255,820
  Current Maturities of Long-Term Debt        7        348,604       669,161
  Accounts Payable                                  14,563,651    16,455,999
  Accounts Payable to Related Companies       8      8,791,471    11,439,365
  Income Taxes Payable                               3,010,036     3,155,824
  Accrued Liabilities                         9      6,624,709     6,825,864
  Other Current Liabilities                          3,556,911     3,914,185
                                                    ----------    ----------
Total Current Liabilities                           41,378,402    44,716,218
                                                    ----------    ----------
 
Long-Term Debt, less Current Maturities       7        115,966       450,999
 
Deferred Taxation                                        8,659        19,839
 
Shareholders' Equity:
  Shares of NLG 0.10 par value;
   10,000,000 Shares
   authorised, issued and outstanding,
   2,127,171 Shares of NLG 0.10 par value
   at 31 May 1995 and 950 Shares NLG
   25.00 par value at 31 May 1994            10        212,717        23,750
  Additional Paid in Capital                         1,411,613             -
  Shares held in Treasury
   12,500 Shares at 31 May 1994                              -      (623,660)
  Translation Adjustment                            (2,237,252)   (1,188,822)
  Retained Earnings                                 26,062,017    18,843,563
                                                    ----------    ----------
Total Shareholders' Equity                          25,449,095    17,054,831
                                                    ----------    ----------
 
 
Minority Interests in Subsidiaries                           -     1,884,845
 
Commitments and Contingencies           12 & 13
                                                    ---------     ---------- 
                                                    66,952,122    64,126,732
                                                    ==========    ==========
</TABLE>

The accompanying notes are an integral part of the consolidated financial
statements.

                                                                        Page 3

                                     -34-
<PAGE>


METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
CONSOLIDATED STATEMENTS OF CASH FLOWS
for the years ended 31 May 1995, 1994 and 1993

<TABLE>
<CAPTION>
 
 
================================================================================= 
(in Dutch Guilders)                              1994/5       1993/4       1992/3
- ----------------------------------------     ----------   ----------   ----------
<S>                                           <C>          <C>          <C>         

Operating Activities
Net Income                                    7,384,704    6,705,312    3,793,539
Adjustments to reconcile net income to
 net cash provided by (used in) operating
 activities:
  Depreciation                                  892,708      960,864      891,811
  Minority Interests in Net Earnings            195,973      783,847      281,840
  Equity in Earnings of Associated Company     (164,600)           -            -
  Changes in Operating Assets and
   Liabilities:
    Accounts Receivable                       3,686,557   (7,395,901)  (6,747,468)
    Accounts Receivable from Associated           
     Company                                   (400,600)           -            -
    Inventories                               1,637,547   (4,093,519)    (281,249)
    Refundable Income Tax Benefit              (740,962)           -      460,348
    Prepaid Expenses and Other Current    
     Assets                                    (209,627)     135,453   (1,147,879)
    Accounts Payable                         (1,892,348)   4,627,059      308,640
    Accounts Payable to Related Companies    (2,647,894)   3,921,800    1,741,004
    Income Taxes Payable                       (145,788)   1,007,183    1,606,254
    Accrued Liabilities                        (201,155)   2,034,233    1,582,324
    Other Current Liabilities                  (357,274)   1,412,414    1,314,679
    Deferred Taxation                           (11,180)      19,839            -
                                             ----------   ----------   ----------
  Net cash provided by operations             7,026,061   10,118,584    3,803,843
                                             ----------   ----------   ---------- 
 
Investing Activities
  Acquisition of Equipment                   (1,292,203)  (1,376,423)  (1,150,250)
  Proceeds from Sale of Equipment                63,316      221,127      104,245
  Investment in Associated Company           (2,084,347)           -            -
  Acquisition of Minority Interests in        
   Subsidiaries                              (2,057,990)           -            -
                                             ----------   ----------   ---------- 
  Net cash used in investing activities      (5,371,224)  (1,155,296)  (1,046,005)
                                             ----------   ----------   ----------
 
 
Financing Activities
  Principal payments on Long-Term Debt         (655,590)    (715,873)    (573,121)
  Additions to Long-Term Debt                         -      169,206      960,688
  Issue of new Shares and Shares held in      
   Treasury                                   2,057,990            -            -
  Purchase of Shares held in Treasury                 -     (378,310)     (49,227)
  Net increase (decrease) in Bank             
   Overdrafts                                 2,227,200   (3,736,612)      46,234
                                              ---------    ---------   ----------
  Net cash provided by (used in)            
   financing activities                       3,629,600   (4,661,589)     384,574
                                              ---------    ---------   ----------
 
Effect of exchange rate changes on Cash        (830,833)     (87,306)    (294,265)
 
                                              ---------    ---------    ---------
Net increase (decrease) in Cash               4,453,604    4,214,393    2,848,147
 
Cash and Cash Equivalents at beginning       
 of the year                                  8,805,082    4,590,689    1,742,542     
                                              ---------    ---------    ----------
Cash and Cash Equivalents at end of year     13,258,686    8,805,082    4,590,689
                                             ==========   ==========    ========== 
 
</TABLE>
The accompanying notes are an integral part of the consolidated financial
statements.

                                                                        Page 4

                                     -35-
<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
CONSOLIDATED STATEMENTS OF SHAREHOLDERS' EQUITY
for the years ended 31 May 1995, 1994 and 1993

<TABLE>
<CAPTION>
 
 
 ==========================================================================================================================
                                                       Shares   Addl. Paid   Held in   Translation    Retained
                                        ---------------------
(in Dutch Guilders)                         Number     Amount   in capital  Treasury    Adjustment     Earnings     Total
- -------------------                     -----------   -------   ----------  --------    ----------   ----------   ----------
 <S>                                       <C>         <C>       <C>         <C>        <C>           <C>          <C>
Balance 31 May 1992                             983    24,575               (196,948)     (633,330)   8,344,712    7,539,009
 
Net Income                                        -         -                      -             -    3,793,539    3,793,539
Translation Difference                            -         -                      -      (464,562)           -     (464,562)
Shares Repurchased                               (4)     (100)               (49,127)            -            -      (49,227)
 
                                        -----------   -------               --------    ----------   ----------   ----------
Balance 31 May 1993                             979    24,475               (246,075)   (1,097,892)  12,138,251   10,818,759
 
Net Income                                        -         -                      -             -    6,705,312    6,705,312
Translation Difference                            -         -                      -       (90,930)           -      (90,930)
Shares Repurchased                              (29)     (725)              (377,585)            -            -     (378,310)
 
                                        -----------   -------               --------    ----------   ----------   ----------
Balance 31 May 1994                             950    23,750               (623,660)   (1,188,822)  18,843,563   17,054,831
 
Shares issued as a result of the
 change in nominal value                    236,550         -                      -             -            -            -
Shares issued as a result of the
 capitalisation of reserves               1,662,500   166,250                      -             -     (166,250)           -
Shares issued in exchange for
 minority interests in subsidiaries         227,171    22,717    1,411,613   623,660             -            -    2,057,990
Net Income                                        -         -                      -             -    7,384,704    7,384,704
Translation Difference                            -         -                      -    (1,048,430)           -   (1,048,430)
                                        -----------   -------    ---------  --------    ----------   ----------   ----------
Balance 31 May 1995                       2,127,171   212,717    1,411,613         -    (2,237,252)  26,062,017   25,449,095
                                        ===========   =======    =========  ========    ==========   ==========   ==========
 
 
</TABLE>
The accompanying notes are an integral part of the consolidated financial
statements.

                                                                          Page 5

                                     -36-
<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS
for the years ended 31 May 1995, 1994 and 1993


1   SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Principles of Consolidation

The consolidated financial statements include the financial statements of all
subsidiaries. All significant intercompany balances and transactions have been
eliminated.

The balance sheets of the subsidiaries are translated into Dutch Guilders (NLG)
at the rates of exchange ruling at the balance sheet date, whereas the profit
and loss accounts are translated at average rates. The resulting translation
adjustment is charged or credited to Shareholders' Equity in the accompanying
balance sheet.

The 50% investment in  an associated company is accounted for using the equity
method.

Revenue Recognition

Revenue is recognised on delivery of goods or the provision of services to the
customers.

Inventories

Inventories consist primarily of purchased products and are stated at the lower
of cost (first-in, first-out basis) or net realisable value. Suitable allowance
has been made for slow moving and obsolete items.

Property, Plant and Equipment

Property, plant and equipment is stated at cost less depreciation. Depreciation
is primarily determined by the straight-line method based on the estimated
useful lives as follows:
<TABLE>
<CAPTION>
<S>                                     <C>  
- -    buildings and improvements:        10 to 50 years;
- -    machinery and equipment:            3 to 17 years;
- -    motor vehicles:                     3 to  7 years.
</TABLE>

Land is not depreciated. When assets are retired or disposed of, the cost and
accumulated depreciation thereon is removed from the accounts and any gains or
losses included in the income statement. Repair and maintenance expenses are
capitalised only if they extend the useful life of the related asset.

Income Taxes

Deferred income taxes are provided to reflect the tax effect of temporary
differences between financial reporting and taxable income, where applicable.

Deferred income taxes have not been provided for undistributed earnings of
subsidiaries, as it is the intention of management to finance the development of
the companies through retention of earnings.

Product Warranty

Generally, the company warrants products sold to customers to be free from
defects in material and workmanship for up to one year. Provision is made for
the estimated cost of fulfilling these warranties at the time of sale.

                                                                          Page 6


                                     -37-

<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
Foreign Currency Transactions

Assets and liabilities denominated in foreign currencies are translated at
exchange rates ruling at the balance sheet date. Transactions in foreign
currencies are translated at exchange rates approximating those at the
transaction date. The resulting gains and losses are included in the profit and
loss account.

Exposure to exchange movement risks is minimised by matching the maturities of
foreign currency assets and liabilities, mainly accounts receivable and accounts
payable. Periodically, hedging transactions are entered into by the Company or
its subsidiaries to hedge differences existing between foreign currency assets
and liabilities.

Net Income Per Share

Net income per share is computed based on the weighted average number of shares
outstanding during the year. Comparative amounts have been adjusted to reflect
the reduction in nominal value and the issue of new shares through the
conversion of reserves. There are no dilutive share equivalents.


2   ADDITIONAL SALES INFORMATION AND CONCENTRATION OF CREDIT RISK

The Company operates in the semiconductor manufacturing sector. Approximately
13% in 1994/5, 26% in 1993/4 and 23% in 1992/3 of net sales for the years then
ended were made to one, two and two customers, respectively, which individually
represented more than 10% of net sales.

Sales by geographic area are summarised as follows:
<TABLE>
<CAPTION>
 
======================================================= 
(in Dutch Guilders '000)      1994/5   1993/4   1992/3
- ------------------------------------- -------- --------
 
<S>                           <C>      <C>      <C>
Europe                        166,700  154,170  109,856
 
Africa and the Middle East      6,397    6,309    2,022
                              -------  -------  -------
                              173,097  160,479  111,878
                              =======  =======  =======
 
 
 
</TABLE>
It is impractical to determine net income and identifiable assets by region, as
the sales are made by companies in Europe.

A large portion of the Company's sales are made to a number of major publicly
owned corporations. There is a concentration of credit risk in accounts
receivable from these customers. The credit risk associated with non-payment
from these customers is affected by conditions or occurrences within their
industries. However, accounts receivable from these customers were substantially
current at 31 May 1995. The Company believes that there is no significant credit
risk with respect to these receivables.

                                                                          Page 7



                                     -38-
<PAGE>
 

METRON SEMICONDUCTORS EUROPA B.V., ALMERE

3.  INCOME TAXES

Income before income taxes is as follows:

=========================================================================== 
(in Dutch Guilders)                        1994/5       1993/4     1992/3
- ---------------------------------------------------   ----------  ---------

The Netherlands                           1,401,313    1,338,411    484,970
 
Foreign                                  11,301,127   10,288,071  5,785,852
                                         ----------   ----------  ---------
                                         12,702,440   11,626,482  6,270,822
                                         ==========   ==========  =========
 
Income tax expense is as follows:
 
===========================================================================
(in Dutch Guilders)                          1994/5       1993/4     1992/3
- ---------------------------------------------------------------------------
 
Current
      The Netherlands                       457,278      347,541          -
      Foreign                             4,838,888    3,769,581  2,011,228
Deferred
      Foreign                                (9,803)      20,201          -
                                          ---------    ---------  ---------
                                          5,286,363    4,137,323  2,011,228
                                          =========    =========  =========
 
 

The expected tax rate is dependent on the amount of the profit in each of the
individual companies and the rates of tax in the countries in which the
companies operate. The rate will vary from year to year. The effective tax rate
differs from the expected tax rate as follows:
 
==================================================================
                                          1994/5   1993/4   1992/3
- ------------------------------------------------------------------

Expected income tax rate based on          40.6 %   42.8 %   40.9 %
 statutory tax rates
 
Use of prior year tax losses brought          
 forward                                      -     (1.3)%   (2.9)%
 
Tax credit arising from dividends from     (0.9)%   (7.2)%   (9.6)%
 a subsidiary
 
Loss benefit limitation on tax losses       0.4 %      - %    1.7 %
 carried forward
 
Other, mainly permanent differences         1.2 %    0.8 %    2.0 %
                                           ------   ------   ------
Effective income tax rate                  41.3 %   35.1 %   32.1 %
                                           ======   ======   ======
 
Tax losses carried forward amounted to NLG 1,409,000 (31 May 1994: NLG
1,380,000), with no expiry date. A full valuation allowance has been provided
against the related deferred tax asset, as there does not appear to be a chance
of realisation in the near future. The deferred tax liability relates to
differences between depreciation rates used for the financial statements and
those for tax purposes.

                                                                       Page 8


                                     -39-
<PAGE>
 

METRON SEMICONDUCTORS EUROPA B.V., ALMERE

4   CASH AND BANK OVERDRAFTS

Cash and cash equivalents represents cash on hand and at banks and time deposits
maturing within three months of the end of the year.

The Company and its subsidiaries have overdraft facilities in various currencies
with a number of banks. Interest is charged at current market rates for amounts
used under these facilities. The facilities are secured by charges over most of
the assets of the Company and its subsidiaries. The amount of the facilities and
their usage are as follows:
 
======================================================== 
(in Dutch Guilders)             31 May 1995  31 May 1994
- -------------------------------------------  -----------

Total facilities available       13,337,114   10,452,070
 
Usage                             4,483,020    2,255,820


5   PROPERTY, PLANT AND EQUIPMENT

The components of property, plant and equipment are shown as follows:
 
==================================================================
(in Dutch Guilders)                       31 May 1995  31 May 1994
- -----------------------------------------------------  -----------

Land                                        1,166,445    1,168,449
 
Buildings and Leasehold Improvements        4,279,289    4,033,382
 
Machinery, Equipment and Motor Vehicles     6,336,463    5,900,703
                                           ----------   ----------
                                           11,782,197   11,102,534
 
Less: Accumulated Depreciation              6,195,949    5,683,748
                                           ----------   ----------
                                            5,586,248    5,418,786
                                           ==========   ==========


Included in Machinery, Equipment and Motor Vehicles are assets under capital
leases with a net book value of NLG 334,693 (1994: NLG 487,541).


6   INVESTMENT IN ASSOCIATE

On 31 January, the Company acquired 50% of FSI Metron Europe Ltd. (formerly
Vinylglass Ltd.), England, a manufacturer of chemical distribution systems and
wet benches, to increase its presence in the European chemical distribution
market. FSI International, Inc., a related party, acquired the other 50% at the
same time. FSI Metron Europe Ltd. is accounted for using the equity method. Its
financial year end was altered to 31 May. Its assets, liabilities and results of
operations are summarised as follows:

                                                                       Page 9


                                     -40-

<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
<TABLE>
<CAPTION>
 
============================================================= 
(in thousands of Dutch Guilders)    31 May 1995  31 July 1994
- -----------------------------------------------  ------------
 
 <S>                                 <C>          <C>
Current Assets                            4,129         2,129
Non-current assets                          775           833
Current Liabilities                       2,716         1,661
Non-current Liabilities                      72           132
Shareholders' Equity                      2,116         1,169
 
 
                                         1994/5        1993/4
                                    -----------  ------------
                                      10 Months
 
Sales                                     7,849         6,214
Net Income                                1,110            74
</TABLE>

The cost of the investment was NLG 2,084,347, including goodwill of NLG
1,204,285. The goodwill element is being written off over a period of 5 years,
being the Company's assessment of the useful life of the goodwill.

In the period 1 February to 31 May 1995, the Group sold approximately NLG
1,087,000 of its products to its associate and purchased approximately NLG
174,000 products from its associate.



7    LONG-TERM DEBT


Long-term debt is summarised as follows:

<TABLE>
<CAPTION>
 
================================================================== 
(in Dutch Guilders)                       31 May 1995  31 May 1994
- -----------------------------------------------------  -----------
 <S>                                       <C>          <C> 
 
DEM loan repayable in six-monthly
 instalments of DEM 131,250 up to March
 1995; interest 6.75% p.a.; secured by             
 a mortgage on the land and buildings
 in Germany;                                        -      294,394
 
Instalment loans: interest at various
 rates between 9.75% and 16%; repayable       
 by May 1996; secured by charges on
 certain assets.                              201,778      426,756
 
GBP instalment loans on capital leases;
 interest at various rates between            
 10.2% and 17.6%; repayable by April
 1998                                         207,166      305,731
 
NIS loan and instalment loans on
 capital lease; interest rates between         
 17% and 21%; repayable by September
 1998.                                         55,626       93,279
                                            
                                          -----------  -----------
                                              464,570    1,120,160
 
Less: current maturities                      348,604      669,161
                                          -----------  ----------- 
                                              115,966      450,999
                                          ===========  ===========
</TABLE>
The debt is repayable as follows: 1995/6 NLG 348,604; 1996/7 NLG 70,591; 1997/8
NLG 45,259; 1998/9 NLG 116

                                                                         Page 10

                                     -41-

<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE 

8    Related Parties

Two of the company's shareholders each own between 20% and 50% of the
outstanding shares. The Company purchases goods from these shareholders and
their subsidiaries for resale in the normal course of business. The terms and
conditions of these purchases are similar to those with non-related vendors.


9   Accrued Liabilities

Included in accrued liabilities is NLG 2,690,000 (1993/4: NLG 3,110,000) for
amounts due under various profit sharing schemes.


10  Share Capital

During the year, the following changes occurred in the share capital:

i    The authorised capital of the company was increased from 1,000 shares of
     NLG 25.00 to 10,000,000 shares of NLG 0.10.

ii   The issued share capital was changed from 1,000 shares of NLG 25.00 to
     250,000 shares of NLG 0.10.

iii  1,662,500 new shares of NLG 0.10 were issued to existing shareholders
     through capitalising reserves.

iv   214,671 new shares plus the 12,500 shares held in treasury were issued in
     exchange for the minority shareholdings in two subsidiary companies.

Also, the company and entered into an agreement with its two minority
shareholders that under certain circumstances (e.g. termination of employment,
death) they or their estates may require the company to purchase their share
holdings at a price to be calculated based on asset value and with restrictions
as to the number of shares that can be purchased and the amount that may be paid
for all such purchases in any one year.

Circumstances which could lead to the Company being required to acquire its own
shares under this agreement did not occur during the year. Subsequent to the
year-end, this agreement was terminated as part of the agreement to acquire the
Asian and American companies (see Note 15).

                                                                       Page 11



                                     -42-
<PAGE>
METRON SEMICONDUCTORS EUROPA B.V., ALMERE
 
11   PENSION PLANS

Most employees are covered by defined contribution plans, which are funded with
insurance companies. Annual costs for such plans amounted to NLG 548,686 in
1994/5 NLG 446,844 in 1993/4 and NLG 300,281 in 1992/3.

There are defined benefit plans for a small number of employees. The components
of the cost of these plans were:
<TABLE>
<CAPTION>
 
============================================================================= 
(in Dutch Guilders)                        1994/5      1993/4        1992/3
- -----------------------------------------------------------------------------
<S>                                       <C>       <C>           <C>
Service Cost                               59,622        37,009        87,273
Interest Cost                              58,508        38,529        30,926
Amortisation                               11,684        11,701        11,730
                                          -------       -------       ------- 
Pension Cost                              129,814        87,239       129,929
                                          =======       =======       =======
The funding status of the plans was
=============================================================================
(in Dutch Guilders)                                 31 May 1995   31 May 1994
- ---------------------------------------------------------------   -----------
Accumulated benefit obligation
     Actuarial present value of vested benefits         719,403       612,052
Additional benefits based on projected future
 salary increases                                       223,693       224,300
                                                        -------       ------- 
Projected benefit obligation                            943,096       836,352
                                                        =======       =======
Plan assets less than projected benefit obligation      943,096       836,352
                                                        =======       =======
Accrued liability at year end                           836,121       707,794
Unrecognised transition amount, net of                  116,647       128,558
 amortisation
Unrecognised net gain                                    (9,672)            -
                                                        -------       -------
                                                        943,096       836,352
                                                        =======       =======
The assumptions used in determining the
 above amounts were:
=============================================================================
                                         1994/5         1993/4       1992/3
- -------------------------------------------------     ---------     ---------
Discount rate                                 7.0%          6.0%          6.0%
Compensation increase                         3.5%          3.5%          3.5%
</TABLE>






                                                                         Page 12




                                     -43-
<PAGE>
METRON SEMICONDUCTORS EUROPA B.V., ALMERE

 
12  COMMITMENTS

The Company and its subsidiaries have commitments arising from lease and rental
contracts amounting to annual expenses of:

<TABLE>
<CAPTION>
============================================================ 
(in Dutch Guilders)                       Capital  Operating
- -------------------------------------------------  ---------
<S>                                       <C>      <C>
Year ending 31 May 1996                   128,394  1,439,308
                   1997                    28,327  1,025,677
                   1998                    10,649    574,293
                   1999                         -    377,203
                   2000                         -    304,722
                   Thereafter                   -  2,400,074
                                        ---------  ---------
                                          167,370  6,121,277
                                        =========  =========
</TABLE> 
 
The Company and its subsidiaries have given guarantees mainly to banks with a
maximum commitment of NLG 1,758,688.

Rental expense for all operating leases was NLG 1,596,693 in 1994/5, NLG
1,335,620 in 1993/4 and NLG 1,339,891 in 1992/3.

The amount of the capital lease commitment excluding the interest element and
including the buy back price is NLG 251,754.


13  CONTINGENCIES

The Company and its subsidiaries are involved in various disputes arising from
the normal course of business. These disputes are for minor amounts and are not
material to the consolidated financial statements, either individually or in
total.


14  SUPPLEMENTARY CASH FLOW INFORMATION

The Company paid interest in 1994/5, 1993/4 and 1992/3 of NLG 418,474, NLG
684,127 and NLG 796,000, respectively. Net income taxes paid in 1994/5 and
1993/4 were NLG 5,112,062 and NLG 2,930,060, respectively, and net income taxes
received in 1992/3 were NLG 78,000. The non-cash investing and financing
activities in 1994/5, 1993/4 and 1992/3 included NLG 31,000, NLG 95,000 and NLG
375,000, respectively, for the purchase of cars under capital leases and NLG
2,057,990 in 1994/5 for the acquisition of the minority interests in subsidiary
companies.


15  DISCLOSURE CONCERNING FINANCIAL INSTRUMENTS

The Company has no significant off-balance sheet financial instruments at 31 May
1995 and 1994.

The carrying-value of accounts receivable and accounts payable approximate fair
values due to their short-term maturities. The carrying value of long-term debt
does not significantly differ from its estimated fair value.



                                                                         Page 13



                                     -44-
<PAGE>

METRON SEMICONDUCTORS EUROPA B.V., ALMERE
  

16   Subsequent Events

Following a strategic review of the effects of the globalisation of the business
of our customers on the Group, the Company and its major shareholders decided to
position the Group as the leading world-wide distributor of products to the
semiconductor manufacturing industry outside Japan. Subsequent to the year under
review, the following significant transactions were completed to reach this
objective:

i   In June, the Company acquired the entire share capital of three companies
    trading in Asia (the Metron Asia Group), excluding Japan, from its two major
    shareholders in exchange for 531,792 new shares in the Company.

ii  In July, the Company acquired the entire share capital of Transpacific
    Technology Corporation, a leading American distribution and sales
    representation group with subsidiary companies in Europe, in exchange for
    262,974 new shares in the Company, $500,000 cash and $1,300,000 promissory
    notes.


17   New Accounting Standards

In March 1995, the US Financial Accounting Standards Board issued Statement of
Financial Accounting Standards (FAS) No. 121, Accounting for the Impairment of
Long-Lived Assets to be Disposed Of. This statement establishes accounting
standards relating to the impairment of long-lived assets, certain identifiable
intangibles and goodwill related to those assets to be held and used and for
long-lived assets and certain intangibles to be disposed of. The Company is
first required to comply with the requirements of FAS No. 121 in its
Consolidated Financial Statements for fiscal 1997. However, the company does not
believe that implementation of FAS No. 121 will have a material impact on its
financial statements.

                                                                       Page 14

                                     -45-
<PAGE>


[KPMG LETTERHEAD]

 
INDEPENDENT AUDITOR'S REPORT

The Board of Directors and Shareholders
Metron Semiconductors Europa B.V.
Almere, The Netherlands

We have audited the accompanying consolidated balance sheets of Metron
Semiconductors Europa B.V. and its subsidiaries as of 31 May 1995 and 1994 and
the related consolidated statements of operations, shareholders' equity and cash
flows for each of the years ended 31 May 1995, 1994 and 1993 . The consolidated
financial statements are the responsibility of the Company's management. Our
responsibility is to express an opinion on these consolidated financial
statements based on our audits.

We conducted our audits in accordance with auditing standards generally accepted
in the United States of America. Those standards require that we plan and
perform the audits to obtain reasonable assurance about whether the financial
statements are free of material misstatements. An audit includes examining, on a
test basis, evidence supporting the amounts and disclosures in the financial
statements. An audit also includes assessing the accounting principles used and
significant estimates made by management, as well as evaluating the overall
financial statement presentation. We believe that our audits provide a
reasonable basis for our opinion.

In our opinion, the consolidated financial statements referred to above present
fairly, in all material respects, the financial position of Metron
Semiconductors Europa B.V. and its subsidiaries as of 31 May 1995 and 1994 and
the results of their operations and their cash flows for each of the years ended
31 May 1995, 1994 and 1993 in conformity with accounting principles generally
accepted in the United States of America.


Amstelveen, The Netherlands, 20 July 1995.

/s/ KPMG Accountants


Signature for identification purposes: X
                                      ---

Ref.: drs. H.C.M. van Damme / C.J. Swaan

[KPMG LETTERHEAD]


                                     -46-
<PAGE>
 
                                 EXHIBIT INDEX

<TABLE> 
<CAPTION> 
                                                                        PAGE(S)
                                                                        -------
<C>      <S>                                                            <C>
10.26    FSI International, Inc. 1995 Incentive Plan                     48-54
 
10.27    FSI International, Inc. 1996 Incentive Plan                     55-62
 
10.28    First Amendment to Lease made and entered into                  63-75
         October 31, 1995 by and between Lake Hazeltine
         Properties and FSI International, Inc.
 
10.29    Distribution Agreement made and entered into as                 76-88
         of July 6, 1995 by and between FSI International, 
         Inc. and Metron Semiconductors Europa B.V.
         (Exhibits to Agreement omitted)
 
10.30    Lease dated August 9, 1995 between Skyline                      89-106
         Builders, Inc. and FSI International, Inc.
 
10.31    Lease Rider dated August 9, 1995 between Skyline               107-112
         Builders, Inc. and FSI International, Inc.
 
10.32    Lease Amendment dated November 15, 1995 between                113-114
         Roland A. Stinski and FSI International, Inc. 
         (Exhibits to Amendment omitted)
 
11.1     Computation of Per Share Earnings of FSI                         115
         International, Inc.
 
13.0     1995 Annual Report to Shareholders (not deemed                 116-153
         "filed" as part of this Form 10-K except for those
         portions that are expressly incorporated by reference)
 
21.0     Subsidiaries of the Company                                      154
 
23.0     Consent of KPMG Peat Marwick LLP                                 155
 
23.1     Consent of KPMG Accountants N.V.                                 156
 
24.0     Powers of Attorney from the Directors of FSI 
         International, Inc.                                            157-163
</TABLE>


                                     -47-

<PAGE>

                                                                   EXHIBIT 10.26

                                      FSI

                              1995 INCENTIVE PLAN



1.   PURPOSE

     The purposes of the FSI 1995 Incentive Plan are to attract, motivate and
     retain high caliber employees who play significant roles in the attainment
     of annual corporate and divisional performance objectives.

2.   DESCRIPTION

     The Plan provides for cash awards if the Company or its operating divisions
     have met or exceeded preestablished Performance Targets.

3.   DEFINITIONS

     When used in the Plan these words and phrases shall have these meanings:

          "Annual Base Earnings": a Participant's base salary or wages during
     the Company's 1995 fiscal year, exclusive of profit-sharing contributions,
     incentive or discretionary bonuses, sales commissions or any other form of
     cash compensation and without regard to any deductions for taxes, or pre-
     tax deductions under the Company's benefit plans. The determination of
     Annual Base Earnings rests solely with the Company and its determination
     shall be final, binding and conclusive.

          "Award":  a cash award granted under the Plan.

          "Board":  the Board of Directors of the Company.

          "Committee": a committee consisting of the Company's Chief Executive
     Officer, Executive Vice President and Chief Financial Officer, and Vice
     President, Quality and Human Resources.

          "Company":  FSI International, Inc., its successors or assigns.

          "Division":  one or more of the Company's operating divisions,
     Chemical Management, Microlithography and Surface Conditioning.

          "Goal": the level of financial performance established by the
     Committee for the Company or a Division that meets the respective Company
     or Division's financial objectives for the 1995 fiscal year.












                                     -48-
<PAGE>
 
          "Eligible Employee": a person who during the 1995 fiscal year was a
     regular full-time salaried employee of the Company or a Subsidiary and who,
     in the opinion of the Committee, is a key employee whose performance
     contributed to the successful performance of the Company or a Subsidiary.

          "Maximum": the level of financial performance established by the
     Committee for the Company or a Division that yields the maximum possible
     Award under the Plan for that Company or Division and is 120% of the Goal
     for the Company or the respective Division.

          "Participant": an Eligible Employee to whom an Award has been made
     under the Plan.

          "Performance Targets": the Threshold, Goal and Maximum financial
     performance targets established by the Committee for the Company and each
     Division.

          "Plan":  this 1995 Incentive Plan.

          "Subsidiary": a corporation, domestic or foreign, the majority of the
     voting stock of which is owned directly by the Company.

          "Threshold": the level of financial performance established by the
     Committee for the Company or a Division necessary to result in an Award
     under the Plan and which is 85% of Goal for the Company or the respective
     Division.

4.   PLAN ADMINISTRATION

     The Plan shall be administered by the Committee. The Committee shall have
     all necessary powers to administer and interpret the Plan, such powers to
     include the authority to select Eligible Employees to whom awards may be
     granted under the Plan and to determine the amount of any Award to be
     granted to any Eligible Employee, except that the aggregate amount of
     Awards to be granted by the Committee to all Eligible Employees shall be
     approved by the Board or the Board's Compensation Committee. The Committee
     shall have full power and authority to adopt such rules and regulations for
     the administration of the Plan and for the conduct of its business as the
     Committee deems necessary or advisable. The Committee's interpretations of
     the Plan, the determination of any Awards, and all actions taken and
     determinations made by the Committee pursuant to the powers vested in it,
     shall be final, conclusive and binding on all parties.

5.   PLAN YEAR

     The plan year will be the Company's 1995 fiscal year.

                                      -2-










                                     -49-
<PAGE>
 
6.   EFFECTIVE DATE

     The effective date of the Plan will be the first day of the 1995 fiscal
     year.

7.   PARTICIPATION AND NOTIFICATION

     Eligible Employees in the Plan shall be selected by the Committee from
     among the Company's and its Subsidiaries' employees based upon such
     criteria as the Committee may from time to time determine including an
     employee's grade level and position with the Company or a Subsidiary.

     After the beginning of the fiscal year, Eligible Employees will be notified
     of their eligibility for participation in the Plan. Eligibility in any one
     year does not automatically qualify a participant for future years' Plans.

     Employees hired during the Plan Year are eligible for participation in the
     Plan and, if selected by the Committee, will be so notified.

     Eligible Employees in this Plan shall not be eligible to participate in any
     other FSI incentive or sales commission plan unless authorized in writing
     by the Committee and the Compensation Committee of the Board.

     In order to be eligible for an Award under the Plan, an Eligible Employee
     must be actively employed on the last day of the Plan Year and as of such
     date have been rated above 70 on his or her most recent performance review
     or have had no such performance evaluation within the twelve months
     preceding the end of the Plan Year.

8.   GRANTING OF AWARDS

          (A) Near the beginning of the Plan Year, the Committee established in
     writing the Performance Targets for the Company and the Divisions. In each
     case, there is a Threshold, Goal and Maximum financial objective
     established for the Company and each of the Divisions. The Performance
     Targets are comprised of specified annual levels of one or more performance
     criteria that the Committee may deem appropriate, including, but not
     limited to, such matters as: earnings per share, net earnings, operating
     earnings, net sales, return on assets, return on capital or the like. In
     determining whether such Performance Targets have been achieved, the
     Committee may disregard or offset the effect of any special charges or
     gains or the cumulative effect of a change in accounting in determining the
     attainment of one or more Performance Targets.

          (B) Prior to or soon after the beginning of the Plan Year, the
     Committee, in consultation with the appropriate members of the Company's
     management, shall determine the percentage of Annual Base Earnings that
     each Eligible Employee shall

                                      -3-


                                     -50-
<PAGE>
 
     be entitled to receive if Threshold, Goal or Maximum Performance Targets
     are achieved and if certain levels between Goal and Maximum, i.e., 105%,
     110% and 115% of Goal are achieved. Eligible Employees shall be classified
     in one of several tiers for determination of what is the appropriate
     percentage of Annual Base Earnings upon which their total potential Award
     is to be based. Each Eligible Employee will be notified as to the
     percentage applicable to such employee and the master list will be kept by
     the Committee or its designee. Eligible Employees who perform services
     primarily on behalf of a Division are eligible for Awards based upon the
     achievement of Performance Targets by the Company and by their Division. In
     such cases, the Company's Performance Target is weighted 40% and the
     Division's Performance Target is weighted 60%.

          (C) After the completion of the Plan Year, the Committee shall
     determine, in consultation with the Board, the level of achievement of the
     pre-established Performance Targets. If Threshold for the Company or the
     applicable Division has not been achieved, there shall be no Awards
     pursuant to the Plan to the Eligible Employees covered thereby with respect
     to those Performance Targets. Financial performance in excess of Maximum
     will not result in any additional payments pursuant to the terms of the
     Plan. Awards shall be authorized only after consultation with the Board.

          (D) The Committee (and the Board in the case of Performance Targets)
     shall have complete discretion with respect to the determination of the
     attainment of the Performance Targets, the Eligible Employees to whom
     Awards shall be granted and the determination of eligibility.

9.   PAYMENT OF AWARDS

     Awards under the Plan shall be paid in cash generally within 90 days
     following the end of the Plan Year. The Plan shall at all times be entirely
     unfunded. No provision shall at any time be made with respect to
     segregating assets of the Company for payment of any distributions
     hereunder. No Participant or any other person shall have any interest in
     any particular assets of the Company by reason of the right to receive an
     Award.

10.  TERMINATION OF EMPLOYMENT

     All potential awards under this Plan are forfeited if an employee's
     employment with FSI is terminated either voluntarily or involuntarily prior
     to the end of the Plan year except due to death, disability or retirement.

11.  DEATH, DISABILITY OR RETIREMENT OF A PARTICIPANT

     In the event that a Participant dies, becomes permanently disabled or
     retires during the Plan Year, a pro-rated Award may be made. The pro-rated
     Award, if any, will be made

                                      -4-


                                     -51-
<PAGE>
 
     based on the number of months actively employed during the Plan Year and
     such other criteria as the Committee shall determine.

12.  EMPLOYMENT

     Participation in this Plan does not confer or infer that an Eligible
     Employee has any right to continued employment with the Company or a
     Subsidiary. There is no employment agreement or right associated with
     participation in this Plan, nor does participation in this Plan restrict
     FSI's ability to terminate the employment of an Eligible Employee at any
     time for any reason.

13.  GOVERNMENT AND OTHER REGULATIONS

     The obligation of the Company to make payments or distributions under the
     Plan shall be subject to all applicable laws, rules and regulations, and to
     such approvals by governmental agencies as may be required.

14.  TAX WITHHOLDING

     The Company shall have the right to deduct from all Awards any federal,
     state, local or foreign taxes as required by law to be withheld with
     respect to such cash payments. Tax withholding from the Award will be based
     on the Participant's normal withholding rates, unless the Participant
     submits a written request to have withholding at a different rate and such
     is permitted by law. All tax liabilities will remain the responsibility of
     the Participant.

15.  BENEFICIARIES

     Any payment due to a deceased Participant shall be made to the
     Participant's surviving spouse. If a Participant does not have a surviving
     spouse, payment shall be made to the Participant's legal representative.

16.  NON-TRANSFERABILITY

     No Award payable under the Plan shall be subject in any manner to
     anticipation, alienation, sale, transfer, assignment, pledge, encumbrance
     or charge prior to actual receipt thereof by the payee; and any attempt to
     so anticipate, alienate, sell, transfer, assign, pledge, encumber or charge
     prior to such receipt shall be void except, in the event of an Employee's
     death, to the Employee's surviving spouse or in the absence of a surviving
     spouse by will or the laws of descent and distribution. The Company shall
     not be liable in any manner for or subject to the debts, contracts,
     liabilities, engagements or torts of any person entitled to any
     distribution under the Plan.

                                      -5-


                                     -52-
<PAGE>
 
17.  INDEMNIFICATION

     The members of the Board, its Compensation Committee and the Plan's
     Committee shall be defended, indemnified and held harmless by the Company
     against and from any loss, cost, liability or expense that may be imposed
     upon or reasonably incurred by them in connection with or resulting from
     any claim, action, suit or proceeding to which they may be a party or in
     which they may be involved by reason of any action or failure to act under
     the Plan and against and from any and all amounts paid by them in
     satisfaction of judgment in any such action, suit or proceeding against
     them. They shall give the Company an opportunity, at its own expense, to
     handle and defend the same before they undertake to handle and defend it on
     their own behalf. The foregoing right of indemnification and defense shall
     not be exclusive of any other rights of indemnification to which they may
     be entitled under the Company's Articles of Incorporation or Bylaws, as a
     matter of law, or otherwise, or any power that the Company may have to
     indemnify them or hold them harmless.

18.  RELIANCE ON REPORTS

     The Board, its Compensation Committee and the Plan's Committee shall be
     fully justified in relying or acting in good faith upon any report made by
     the independent public accountants of the Company and upon any other
     information furnished in connection with the Plan by any person or persons
     other than themselves. In no event shall they be liable for any
     determination made or other action taken or any omission to act in reliance
     upon any such report or information or for any action taken, including the
     furnishing of information, or failure to act, if in good faith.

19.  RELATIONSHIP TO OTHER BENEFITS

     No payment under the Plan shall be taken into account in determining any
     benefits under any pension, retirement, profit sharing, group insurance or
     other benefit plan of the Company or a Subsidiary unless specifically so
     provided under such plan.

20.  EXPENSES

     The expenses of administering the Plan shall be borne by the Company.

21.  TITLES AND HEADINGS

     The titles and headings of the section in the Plan are for convenience of
     reference only and in the event of any conflict, the text of the Plan,
     rather than such titles or headings, shall control.

                                      -6-


                                     -53-
<PAGE>
  
22.  AMENDMENTS AND TERMINATION

     The Board may at any time terminate the Plan, and the Board or the Plan's
     Committee may, at any time, or from time to time, amend or suspend and, if
     suspended, reinstate, the Plan in whole or in part.

                                      -7-


                                     -54-

<PAGE>
 
                                                                   EXHIBIT 10.27
                                                                   -------------
                                      FSI

                              1996 INCENTIVE PLAN



1.   PURPOSE

     The purposes of the FSI 1996 Incentive Plan are to attract, motivate and
     retain high caliber employees who play significant roles in the attainment
     of annual corporate and divisional performance targets.

2.   DESCRIPTION

     The Plan provides for cash awards if FSI and/or its operating divisions
     have met or exceeded preestablished Performance Targets.

3.   DEFINITIONS

     When used in the Plan these words and phrases shall have these meanings:

          "Annual Base Earnings":  a Participant's base salary or wages during
     the Company's 1996 fiscal year, exclusive of incentive, sales or
     discretionary bonuses, sales commissions or any other form of cash
     compensation and without regard to any deductions for taxes, or pre-tax
     deductions under the Company's benefit plans.  The determination of Annual
     Base Earnings rests solely with the Company and its determination shall be
     final, binding and conclusive.

          "Award":  a cash award granted under the Plan.

          "Board":  the Board of Directors of FSI.

          "Committee":  a committee consisting of FSI's Chief Executive Officer,
     Executive Vice President and Chief Financial Officer, and Vice President,
     Quality and Human Resources.

          "Company":  FSI International, Inc., its subsidiaries and their
     successors or assigns.

          "Covered Position":  a position with the Company which is within one
     of the salary bands to which the Plan applies.



                                     -55-
<PAGE>
 
          "Division":  one or more of FSI's operating divisions, including
     Chemical Management (which includes Applied Chemical Solutions),
     Microlithography and Surface Conditioning.

          "FSI":  FSI International, Inc. and its successors or assigns.

          "Goal":  the level of financial performance established by the
     Committee for the Company or a Division that meets the respective Company
     or Division's financial objectives for the 1996 fiscal year.

          "Eligible Employee":  a person who during the 1996 fiscal year was a
     regular full-time salaried employee of the Company and who, in the opinion
     of the Committee, is a key employee whose performance contributed to the
     successful performance of the Company and is in a salary band to which the
     Plan applies.

          "Maximum":  the level of financial performance established by the
     Committee for the Company or a Division that yields the maximum possible
     Award under the Plan for that Company or Division and is 120% of the Goal
     for the Company or the respective Division.

          "Participant":  an Eligible Employee to whom an Award has been made
     under the Plan.

          "Performance Targets":  the Threshold, Goal and Maximum financial
     performance targets established by the Committee for the Company and each
     Division.

          "Plan":  this 1996 Incentive Plan.

          "Threshold":  the level of financial performance established by the
     Committee for the Company or a Division necessary to result in an Award
     under the Plan and which is 85% of Goal for the Company or the respective
     Division.

4.   PLAN ADMINISTRATION

     The Plan shall be administered by the Committee.  The Committee shall have
     all necessary powers to administer and interpret the Plan, such powers to
     include the authority to select Eligible Employees to whom awards may be
     granted under the Plan and to determine the eligibility for and the amount
     of any Award to be granted to any Eligible Employee, except that the
     aggregate amount of Awards to be granted by the Committee to all Eligible
     Employees shall be approved by the Board or the Board's Compensation
     Committee.  The Committee shall have full power and authority to adopt such
     rules and regulations for the administration of the Plan and for the
     conduct of its business as the Committee deems necessary or advisable.  The
     Committee's interpretations of the Plan, the determination of any Awards,
     and all actions taken and 

                                      -2-



                                     -56-
<PAGE>
 
     determinations made by the Committee pursuant to the powers vested in it,
     shall be final, conclusive and binding on all parties.

5.   PLAN YEAR

     The Plan Year is the Company's 1996 fiscal year.

6.   EFFECTIVE DATE

     The effective date of the Plan will be the first day of the 1996 fiscal
     year.

7.   PARTICIPATION AND NOTIFICATION

     Eligible Employees in the Plan shall be selected by the Committee from
     among the Company's employees based upon such criteria as the Committee may
     from time to time determine including an employee's salary band level and
     position with the Company.  Except for Participants who are subject to a
     non-compete pursuant to a Management Agreement with the Company,
     participation in the Plan is conditioned upon the employee's entering into
     a new form of non-compete and invention assignment and non-disclosure
     agreement or an invention assignment and non-disclosure agreement with the
     Company which may in some cases replace an existing agreement between the
     employee and the Company.

     Near the beginning of the Plan Year, Eligible Employees will be notified of
     their eligibility for participation in the Plan.  Eligibility in any one
     year does not automatically qualify a Participant for future years' Plans.

     Employees first hired or promoted into a Covered Position during the Plan
     Year are eligible for participation in the Plan on a pro-rata basis and, if
     selected by the Committee will be so notified.  An individual who transfers
     from one Division to another, from a Division to a Core Competency Center
     ("CCC") or vice versa or from one Covered Position to another within the
     same Division or CCC shall be entitled to a pro-rated Award based upon the
     Covered Positions held during the Plan Year.  As to each such Covered
     Position, the pro-ration shall be based upon the Award the individual would
     have received had he or she been in that Covered Position the entire year
     times a fraction the numerator of which is the number of days during the
     Plan Year the individual served in such position and the denominator of
     which is 365.

     Eligible Employees in this Plan shall not be eligible to participate in any
     other Company incentive or sales commission plan unless authorized in
     writing by the Committee and the Compensation Committee of the Board.

     In order to be eligible for an Award under the Plan, an Eligible Employee
     must be actively employed in a Covered Position on the last day of the Plan
     Year.

                                      -3-



                                     -57-
<PAGE>
 
     If as of the end of the Plan Year an Eligible Employee is on a Performance
     Improvement Plan ("PIP") due to job performance issues (e.g. a performance
     review rating of less than 70), then such individual shall not receive an
     Award or Awards to which he or she would otherwise be entitled to under the
     Plan, unless each of the following criteria are met:

     .    The Company determines the individual has satisfactorily completed the
          PIP written 90 days following the commencement of the PIP; and

     .    The Employee is employed in a Covered Position as of the date the PIP
          is satisfactorily completed.

8.   GRANTING OF AWARDS

          (A) Near the beginning of the Plan Year, the Committee established in
     writing the Performance Targets for the Company and the Divisions.  In each
     case, there is a Threshold, Goal and Maximum financial objective
     established for the Company and each of the Divisions.  The Performance
     Targets are comprised of specified annual levels of one or more performance
     criteria that the Committee may deem appropriate, including, but not
     limited to, such matters as:  earnings per share, net income, operating
     income, operating income as a percent of net sales, return on assets,
     return on investment or the like.  In determining whether such Performance
     Targets have been achieved, the Committee may disregard or offset the
     effect of any special charges or gains or the cumulative effect of a change
     in accounting in determining the attainment of one or more Performance
     Targets.

          (B) Prior to or soon after the beginning of the Plan Year, the
     Committee, in consultation with the appropriate members of the Company's
     management, shall determine the percentage of Annual Base Earnings that
     each Eligible Employee shall be entitled to receive if Threshold, Goal or
     Maximum Performance Targets are achieved and if certain levels between Goal
     and Maximum, i.e., 105%, 110% and 115% of Goal are achieved.  Eligible
     Employees shall be classified in one of several tiers for determination of
     what is the appropriate percentage of Annual Base Earnings upon which their
     total potential Award is to be based.  Each Eligible Employee will be
     notified as to the percentage applicable to such employee and the master
     list will be kept by the Committee or its designee.  Eligible Employees who
     perform services primarily on behalf of a Division are eligible for Awards
     based upon the achievement of Performance Targets by the Company and by
     their Division.  In such cases, the Company's Performance Target is
     weighted 40% and the Division's Performance Target is weighted 60%.

          (C) After the completion of the Plan Year, the Committee shall
     determine the level of achievement as compared to the pre-established
     Performance Targets.  If 

                                      -4-



                                     -58-
<PAGE>
 
     Threshold for the Company or the applicable Division has not been achieved,
     there shall be no Awards pursuant to the Plan to the Eligible Employees
     covered thereby with respect to those Performance Targets. Financial
     performance in excess of Maximum will not result in any additional payments
     pursuant to the terms of the Plan.

          (D) The Committee shall have complete discretion with respect to the
     determination of the attainment of the Performance Targets, the Eligible
     Employees to whom Awards shall be granted and the determination of
     eligibility.

9.   PAYMENT OF AWARDS

     Awards shall be authorized only after consultation with the Board or its
     Compensation Committee.  Awards under the Plan shall be paid in cash
     generally within 90 days following the end of the Plan Year.  The Plan
     shall at all times be entirely unfunded.  No provision shall at any time be
     made with respect to segregating assets of the Company for payment of any
     distributions hereunder.  No Participant or any other person shall have any
     interest in any particular assets of the Company by reason of the right to
     receive an Award.

10.  TERMINATION OF EMPLOYMENT

     All potential awards under this Plan are forfeited if an employee's
     employment with the Company is terminated either voluntarily or
     involuntarily prior to the end of the Plan Year except due to death,
     disability or retirement.

11.  FORFEITURES.

     If an Eligible Employee received an Award, FSI, by action of the Committee,
     will have the right and option (the "Repayment Right') to require the
     Employee or his or her legal representative to repay the Award if the
     Eligible Employee (i) has engaged in competition with the Company during
     the Plan Year or within six months thereafter (the "Applicable Period")
     that the Committee concludes is detrimental to the Company, (ii) has made
     an unauthorized disclosure of material non-public or confidential
     information of the Company during the Applicable Period, (iii) has
     committed a material violation of any applicable business plans, policies
     or practices of the Company during the Applicable Period, or (iv) has
     engaged in conduct reflecting dishonesty or disloyalty to the Company
     during the Applicable Period.

     In addition, the Committee, may terminate the Eligible Employee's
     participation in the Plan if it determines that the Eligible Employee has
     engaged or intends to engage in the activities described in (i)-(iv) above.

                                      -5-



                                     -59-
<PAGE>
 
     The decision to exercise the Repayment Right will be based solely on the
     judgment of the Committee, in its sole and complete discretion, given the
     facts and circumstances of each particular case.

     Such Repayment Right may be exercised by the Committee within 90 days after
     the Committee's discovery of an occurrence that entitles it to exercise its
     Repayment Right (but in no event later than 270 days after the end of the
     Plan Year).  Such Repayment Right will be deemed to be exercised upon the
     Company's mailing written notice of such exercise, postage prepaid,
     addressed to the Eligible Employee at the Eligible Employee's most recent
     home address as shown on the personnel records of the Company.

     Receipt of an Award by an Eligible Employee constitutes an agreement on the
     Eligible Employee's behalf and on behalf of the Eligible Employee's legal
     representative or permitted assigns, as the case may be, to deliver to the
     Company, on the date specified in such notice, which date will not be less
     than 10 nor more than 30 days after such notice, a certified or cashier's
     check for the amount of the Award for which the Repayment Right has been
     exercised.

12.  DEATH, DISABILITY OR RETIREMENT OF A PARTICIPANT

     In the event that a Participant dies, becomes permanently disabled or
     retires during the Plan Year, a pro-rated Award may be made.  The pro-rated
     Award, if any, will be made based on the number of months actively employed
     during the Plan Year and such other criteria as the Committee shall
     determine.

13.  EMPLOYMENT

     Participation in this Plan does not confer or infer that an Eligible
     Employee has any right to continued employment with the Company.  There is
     no employment agreement or right associated with participation in this
     Plan, nor does participation in this Plan restrict the Company's ability to
     terminate the employment of an Eligible Employee at any time for any
     reason.

14.  GOVERNMENT AND OTHER REGULATIONS

     The obligation of the Company to make payments or distributions under the
     Plan shall be subject to all applicable laws, rules and regulations, and to
     such approvals by governmental agencies as may be required.

15.  TAX WITHHOLDING

     The Company shall have the right to deduct from all Awards any federal,
     state, local or foreign taxes as required by law to be withheld with
     respect to such cash payments.  Tax withholding from the Award will be
     based on applicable withholding rates, unless the Participant submits a
     written request to have withholding at a different rate and such is
     permitted by law.  All tax liabilities will remain the responsibility of
     the Participant.

                                      -6-



                                     -60-
<PAGE>
 
16.  BENEFICIARIES

     Any payment due to a deceased Participant shall be made to the
     Participant's surviving spouse.  If a Participant does not have a surviving
     spouse, payment shall be made to the Participant's legal representative.

17.  NON-TRANSFERABILITY

     No Award payable under the Plan shall be subject in any manner to
     anticipation, alienation, sale, transfer, assignment, pledge, encumbrance
     or charge prior to actual receipt thereof by the payee; and any attempt to
     so anticipate, alienate, sell, transfer, assign, pledge, encumber or charge
     prior to such receipt shall be void except, in the event of an Employee's
     death, to the Employee's surviving spouse or in the absence of a surviving
     spouse by will or the laws of descent and distribution.  The Company shall
     not be liable in any manner for or subject to the debts, contracts,
     liabilities, engagements or torts of any person entitled to any
     distribution under the Plan.

18.  INDEMNIFICATION

     The members of the Board, its Compensation Committee and the Committee
     shall be defended, indemnified and held harmless by FSI against and from
     any loss, cost, liability or expense that may be imposed upon or reasonably
     incurred by them in connection with or resulting from any claim, action,
     suit or proceeding to which they may be a party or in which they may be
     involved by reason of any action or failure to act under the Plan and
     against and from any and all amounts paid by them in satisfaction of
     judgment in any such action, suit or proceeding against them.  They shall
     give FSI an opportunity, at its own expense, to handle and defend the same
     before they undertake to handle and defend it on their own behalf.  The
     foregoing right of indemnification and defense shall not be exclusive of
     any other rights of indemnification to which they may be entitled under
     FSI's Articles of Incorporation or Bylaws, as a matter of law, or
     otherwise, or any power that the FSI may have to indemnify them or hold
     them harmless.

19.  RELIANCE ON REPORTS

     The Board, its Compensation Committee and the Committee shall be fully
     justified in relying or acting in good faith upon any report made by the
     independent public accountants of the Company and upon any other
     information furnished in connection with the Plan by any person or persons
     other than themselves.  In no event shall they be liable for any
     determination made or other action taken or any omission to act in reliance
     upon any such report or information or for any action taken, including the
     furnishing of information, or failure to act, if in good faith.

                                      -7-



                                     -61-
<PAGE>
 
20.  RELATIONSHIP TO OTHER BENEFITS

     No payment under the Plan shall be taken into account in determining any
     benefits under any pension, retirement, profit sharing, group insurance or
     other benefit plan of the Company unless specifically so provided under
     such plan.

21.  EXPENSES

     The expenses of administering the Plan shall be borne by the Company.

22.  TITLES AND HEADINGS

     The titles and headings of the section in the Plan are for convenience of
     reference only and in the event of any conflict, the text of the Plan,
     rather than such titles or headings, shall control.

23.  GENDER AND NUMBER

     Except when otherwise indicated by the context, reference to the masculine
     gender, shall include, when used, the feminine gender and any term used in
     the singular shall also include the plural.

24.  AMENDMENTS AND TERMINATION

     The Board may at any time terminate the Plan, and the Board or the Plan's
     Committee may, at any time, or from time to time, amend or suspend and, if
     suspended, reinstate, the Plan in whole or in part.

                                      -8-



                                     -62-

<PAGE>
 
                                                                   EXHIBIT 10.28
                                                                   -------------

                           FIRST AMENDMENT TO LEASE

     THIS FIRST AMENDMENT TO LEASE is made and entered into as of this 31st day 
of October, 1995, by and between Lake Hazeltine Properties, a Minnesota general 
partnership ("Landlord"), and FSI International, Inc., a Minnesota corporation 
("Tenant").

                                   RECITALS

     A.  Landlord, as landlord, and Tenant, as tenant, entered into that certain
Lease dated June 27, 1985 (the "Lease"), covering land improvements at 322 Lake 
Hazeltine Drive, located in City of Chaska, Carver County, Minnesota, and 
legally described in Section 1.3 of the Lease.

     B.  Landlord and Tenant now desire to amend the Lease in certain respects 
as more specifically provided in this Amendment.

     Accordingly, Landlord and Tenant agree as follows:

     1.  Adjustment Date.  The definition of "Adjustment Date" in Section 1.3 is
hereby amended and restated in its entirety as follows:

     The first day of each extension period of the Term pursuant to Section 2.2,
     commencing November 1, 2000.






                                     -63-
<PAGE>
 
     2.  Extension of Term.  Section 2.2 of the Lease is hereby amended and 
restated in its entirety as follows:

          2.2  Tenant is hereby granted and shall have the options to extend the
     term of this Lease for one five-year period commencing on November 1, 1995
     and ending on October 31, 2000, and thereafter for five consecutive periods
     of three years each, the first of which shall commence November 1, 2000 and
     end on October 31, 2003, and the successive periods to commence at the
     expiration of the preceding term, to be exercised in each case by giving
     written notice thereof to Landlord not less than 180, nor more than 270,
     days prior to the expiration of the original Term or the end of the
     extension period, as the case may be. Concurrent herewith the option to
     extend the Term through October 31, 2000 is deemed exercised without any
     right of rescission. It is the express intention of the parties hereto that
     any such extension as herein provided shall operate not as a renewal of
     this Lease but as an extension of the Term hereof, so that this Lease and
     each and every covenant, agreement and provision thereof shall be and
     remain in full force and effect during the Term hereof as extended and with
     the same force and effect as if the Term of this Lease were originally for
     such extended period.

     3.  Right to Rescind Extension.  Section 2.4 of the Lease is hereby amended
and restated in its entirety as follows:

          2.4  It is acknowledged that Tenant must exercise its options to 
     extend the term of this Lease pursuant to Section 2.2 prior to the date
     that the Fair Rental Value of the Property will be determined pursuant to

                                       2



                                     -64-
<PAGE>
 

     subsection 3.3 for the Adjustment Dates occurring on the first day of
     November of 2000, 2003, 2006, 2009 and 2012. Accordingly, Landlord and
     Tenant agree that if Tenant exercises any such extension option then
     Tenant, at its election, may terminate this Lease by giving, within thirty
     (30) days after the Basic Rent for the Adjustment Date in question has been
     determined pursuant to Section 3.3, not less than one hundred eighty (180)
     days' prior written notice thereof to Landlord. In the event Tenant
     terminates the Lease pursuant to this Section 2.4, Tenant shall pay to
     Landlord all costs and expenses incurred by Landlord in connection with the
     determination of the Fair Rental Value of the Property for the Adjustment
     Date to which the extension option then exercised so relates, including the
     appraisal fees and expenses and attorney fees.

     4.  Basic Rental.  Section 3.2 of the Lease is hereby amended to add the 
following subsections:

          3.2.3  For the period commencing on November 1, 1995 and ending on
     November 30, 1995, at the per annum rate of $1,015,500.00.

          3.2.4  For the period commencing on December 1, 1995 and ending on
     October 31, 2000, at the per annum rate of $700,000.00.

     5.  Basic Rent During Renewal Terms.  Landlord and Tenant agree that Basic 
Rent for each of the three-year extended terms shall be equal to the Fair Rental
Value of the Property. Therefore, Section 3.3 of the Lease (including the 
subsections

                                       3


                                     -65-
<PAGE>

3.3.1, 3.3.2 and 3.3.3) is hereby deleted and replaced in its entirety as
follows:

          3.3  On each of the Adjustment Dates the amount of the Basic Rent
     shall be adjusted and shall be at a per annum rate equal to the Fair Rental
     Value of the Property as of the Adjustment Date in question, determined as
     follows:

Subsections 3.3.3.1 and 3.3.3.2 are hereby renumbered as 3.3.1 and 3.3.2, 
respectively, and any references in the Lease to such subsections 3.3.3.1 and 
3.3.3.2 shall refer instead to such subsections as so renumbered. The 
parenthetical provision contained in Section 3.4 is hereby deleted.

     6.  Alterations.  Notwithstanding anything to the contrary in this 
Amendment or in the Lease, (a) the cost of alterations to which the consent, 
notice and security provisions of Article 9 of the Lease (subsection 9.2.3 and 
Sections 9.3, 9.4 and 9.5) applies is $100,000 rather than $25,000, (b) security
shall only be required under Section 9.5 if Landlord reasonably deems itself 
insecure with respect to payment by Tenant, and (c) under Section 9.4 plans and 
specification shall only be required in the case of structural Alterations.

                                       4

















                                     -66-
<PAGE>


     7.  Use and Operation of Property.  Under Section 11.1 of the Lease Tenant
may also use the Property for laboratory purposes and other uses related to its
business operations.

     8.  Existing Mortgage/Corporate Guaranty.  On or before October 31, 
1995, Landlord shall (a) pay and discharge the First Mortgage existing at the
date of the Lease, and (b) cause the First Mortgage to release the obligations
of the Tenant under the Corporate Guaranty dated June 27, 1985, made by Tenant
in connection with the First Mortgage. Thereupon, and in any event as of
November 1, 1995, Landlord and Tenant agree and confirm that (a) pursuant to the
last paragraph of Section 17.1 (following subsection 17.1.8) of the Lease (i)
the provisions of subsections 17.1.3, 17.1.4, 17.1.7 and 17.1.8 shall no longer
be effective or constitute an Event of Default under the Lease, and (ii) the
provisions of subsection 17.1.5 shall apply only to Tenant and not to any
Subsidiary, and (b) Articles 32 (Tenant's Affirmative Covenants) and 33
(Tenant's Negative Covenants) shall not have any force or effect.

     9.  Withholding of Consent.  Article 23 of the Lease is hereby deleted and 
replaced in its entirety as follows:

                      Article 23.  WITHHOLDING OF CONSENT

                                       5


                                     -67-
<PAGE>

          In any case in which Landlord or Tenant are required to give consent
     or approval to an action of the other pursuant to any provision of the
     Lease, each party agrees not to unreasonably withhold or delay such consent
     or approval.

     10.  Option to Purchase.  Tenant shall have the option to purchase the 
Property. Accordingly, the following is added as Article 35 of the Lease:

                         Article 35.  PURCHASE OPTIONS

          35.1  Tenant shall have and is hereby granted the option to purchase
     the Property as of October 31, 1999, or annually as of each succeeding
     October 31 thereafter during the Term, for a price determined pursuant to
     Section 35.2 and on the other terms and conditions hereinafter set forth in
     this Article 35. Tenant may exercise any such option by giving written
     notice thereof to Landlord at any time on or before May 1 of the same year
     as the October 31 option date in question occurs.

          35.2  The purchase price for the Property shall be an amount equal to
     the greater of Four Million Dollars ($4,000,000.00) or ninety percent (90%)
     of the Fair Market Value of the Property as of the date of exercise of such
     option. If Landlord and Tenant have not agreed to the appointment of a
     single appraiser as contemplated by subsection 3.3.1 within thirty (30)
     days after exercise of the option, then the appraisers shall be appointed
     as provided in subsection 3.3.2, with each party obligated to appoint an
     appraiser and give notice thereof within fifteen (15) days after expiration
     of such thirty (30) day period. If the purchase

                                       6


                                     -68-
<PAGE>

     price exceeds Four Million Dollars ($4,000,000.00), then at any time within
     twenty (20) days after such determination is communicated to Tenant, Tenant
     may terminate the agreement formed by exercise of the purchase option by
     giving notice thereof to Landlord without thereby otherwise affecting or
     impairing this Lease. If Tenant so terminates such agreement, Tenant shall
     pay all costs and expenses incurred by Landlord in connection with such
     determination of the Fair Market Value of the Property, including the
     appraisal fees and expenses and attorney fees.

          35.3  After exercise of the option pursuant to this Article, Landlord
     shall furnish to Tenant an abstract of title or registered property
     abstract certified to date to include all proper searches and a title
     insurance commitment (ALTA form 1970-B) with all standard exceptions
     deleted and agreeing to insure, subject only to the matters listed on
     Schedule A to this First Amendment to Lease (the "Permitted Encumbrances"),
     this Lease and any encumbrances created on or after the date hereof by
     Tenant or those claiming by, through or under Tenant and with such
     affirmative insurance as Tenant (or its lender) may reasonably require.
     Tenant shall pay the premium for any policy issued to Tenant pursuant
     thereto, provided that Tenant shall not be required to pay any charges for
     special endorsements or special coverages attributable to encumbrances
     other than those permitted under this Section 35.3. If Tenant gives
     Landlord notice prior to closing that the title insurance commitment does
     not comply with the foregoing requirements, Landlord shall at its expense
     within sixty (60) days following such notice cause all encumbrances not
     permitted as provided above

                                       7



                                     -69-
<PAGE>
 
     to be removed. If Landlord fails to do so within said sixty (60) day
     period, time being of the essence, Tenant may at its option: (a) attempt to
     cause such encumbrances to be removed, (b) proceed to close without waiving
     any rights to damages hereunder, or (c) terminate the agreement formed by
     exercise of the option, this Lease, or both, by giving written notice
     thereof to Landlord, without such termination releasing Landlord from
     liability for damages hereunder. If Tenant elects alternative (a) above,
     the closing shall be postponed until the encumbrances in question are
     removed and, if Tenant is unable within a further period of sixty (60) days
     to cause such encumbrances to be removed, Tenant may then elect either
     alternative (b) or (c) above. No such postponement shall alter the purchase
     price. All costs and expenses incurred by Tenant in causing or attempting
     to cause such encumbrances to be removed, including reasonable attorneys'
     fees, shall be payable by Landlord. Notwithstanding the foregoing, Landlord
     shall be permitted to pay and discharge of record at closing any mortgage
     or other lien, including out of the purchase price payable by Tenant.

          35.4  Subject to postponement pursuant to Section 35.3, the deed to
     the Property shall be delivered at 11:00 o'clock a.m. on November 1 of the
     year in which Tenant gave notice as provided in Section 35.1, or on the
     next business day if such date is not a business day, at the place in
     Minnesota designated in Tenant's notice or, if not so designated, at
     Tenant's main offices in Chaska, Minnesota. The deed shall be in the usual,
     proper full warranty form for recording and registration, subject only to
     Permitted Encumbrances. Landlord shall pay any state deed tax or revenue
     stamps. The purchase price shall be payable by wire

                                       8


                                     -70-
<PAGE>

     transfer, certified or bank cashier's check or other readily available
     funds. This Lease and all of the terms and provisions hereof shall remain
     in full force and effect until the purchase has closed.

          35.5  The options to purchase contained in this Article and the First
     Refusal Rights contained in Article 36 are each intended to and shall
     remain effective during the full Term of this Lease and neither shall be
     affected in any way by the right, whether or not exercised, to exercise, or
     the existence of, the other.

     11.  Right of First Refusal.  Tenant shall have a first refusal right to 
purchase the Property. Accordingly, the following is added as Article 36 of the 
Lease:

                      Article 36.  RIGHT OF FIRST REFUSAL

          36.1  Landlord shall not sell, transfer, assign or otherwise dispose
     of all or any part of its interest in the Property or any part thereof,
     until at least forty-five (45) days after it has given Tenant written
     notice as herein provided of its intention to dispose of said interest or
     portion thereof. Such notice shall describe in reasonable detail the
     interest proposed to be disposed and state accurately the names and
     addresses of each party to whom Landlord proposes to dispose of said
     interest (and, if known, the shareholders, partners or members thereof, if
     such party is not a public company or individual), the selling price and
     other terms of such proposed disposition; if available, an executed
     duplicate original or copy of the purchase or other agreement shall
     accompany the notice. After such notice is received, Tenant shall have and
     is hereby

                                       9


                                     -71-
<PAGE>

     granted the exclusive right and option ("First Refusal Right") to purchase
     such interest in the manner, at the price and on the terms provided in such
     notice.

          36.2  The First Refusal Right granted by Section 36.1 may be exercised
     by Tenant by giving notice to Landlord at any time within thirty (30) days
     after actual receipt of the notice given to Tenant pursuant to Section
     36.1.

          36.3  After exercising its First Refusal Right pursuant to this
     Article, Tenant may at its option and expense attempt to obtain a title
     insurance commitment to the Property agreeing to insure the interest which
     it is acquiring subject only to the Permitted Encumbrances. If the title
     company to which application is made will not issue such a commitment,
     within thirty (30) days after the date on which Tenant exercises its
     option, Tenant may by notice to Landlord terminate the agreement formed by
     exercise of the First Refusal Right, in which event this Lease shall remain
     in effect as though the First Refusal Right had not been exercised.

          36.4  Unless otherwise specified in this notice and purchase or other
     agreement given pursuant to Section 36.1, the closing shall be at 11:00
     o'clock a.m. on the day sixty (60) days after Tenant has exercised its
     First Refusal Right (or, if not a business day, the first day thereafter
     which is a business day), at Landlord's office in Minnesota; the deed shall
     be in the usual, proper full warranty form for recording and registration
     (excluding any part thereof which may have been taken by condemnation or
     eminent domain); Landlord shall pay all revenue stamps or state deed or
     transfer taxes, sales and other taxes due in

                                      10


                                     -72-
<PAGE>

     connection therewith, and Tenant shall pay all recording and filing fees;
     there shall be no adjustments under this Lease upon the delivery of the
     deed except for Basic Rent payable hereunder, except that Landlord shall
     pay to Tenant any amounts then held by Landlord for the account of Tenant
     or which are otherwise payable to Tenant under this Lease.

          36.5  Upon exercise of the First Refusal Right, any agreement between
     Landlord and the party to which Landlord proposed to dispose the Property
     shall automatically terminate and neither Landlord nor Tenant, nor the
     Property, shall be bound or in any way affected by any such agreement and
     such party shall not have any interest in the agreement between Landlord
     and Tenant formed by exercise of the First Refusal Right. Without limiting
     the generality of the foregoing, Landlord or Tenant may freely modify the
     terms and conditions on which the disposition from Landlord to Tenant may
     be made.

          36.6  Except as hereinafter provided, Landlord may dispose of the
     particular interest subject to Tenant's First Refusal Right if Tenant has
     not exercised its First Refusal Right within the thirty (30) day period
     provided therefor. Any sale, transfer, assignment or other disposition by
     Landlord shall be null and void, if said interest is not disposed of by
     Landlord within one hundred twenty (120) days after Tenant's First Refusal
     Right expires, or if it is disposed of to a different party or on any
     different terms from those stated in the notice given by Landlord pursuant
     to Section 36.1.

                                      11


                                     -73-
<PAGE>
 
 
          36.7 The First Refusal Right herein granted to Tenant is a continuing 
     right of first refusal and shall apply as often as any then holder of any 
     part of the Landlord's interest hereunder (including but not limited to any
     such holder who or which shall have acquired its interest in a disposition
     to which the First Refusal Right applied but was nor exercised) shall make
     or propose to make a sale, transfer, conveyance or other disposition of
     all or any part of the Property or any interest therein during the Term of
     this Lease. Further, the Right of First Refusal and the options to purchase
     contained in Article 35 are each independent of the other, are each
     intended to and shall remain effective during the full Term of this Lease
     and neither shall be affected in any way by the right, whether or not
     exercised, to exercise, or the existence of, the other.

          36.8 Landlord agrees that any proposed disposition of the Property 
     shall be for a consideration expressed and payable solely in United States
     dollars.

          36.9 The First Refusal Right shall not apply to a mortgage of the
     Property given by Landlord or to any foreclosure sale of such mortgage, but
     the First Refusal Right shall apply to any interest in the Property
     or any part thereof then or thereafter acquired by any holder of such 
     mortgage or any other purchaser at such foreclosure sale.

     12. Miscellaneous. Except as specifically amended herein, the terms and 
conditions of the Lease remain unchanged and in full force and effect. This
First Amendment shall be

                                      12


                                     -74-
<PAGE>
 
binding on and inure to the benefit of the parties hereto and their respective
successors and assigns.

     The parties have executed this First Amendment to Lease as of the date and
year first above written.

                                   LANDLORD:
 
                                   LAKE HAZELTINE PROPERTIES

                                                                     
                                   By /s/ J. A. Elftmann
                                      ------------------------------
                                      A General Partner
                            
                                   By /s/ Joseph C. Wyers
                                     ------------------------------
                                     A General Partner
     
                                   By /s/ Robert S. Blackwood
                                     ------------------------------
                                     A General Partner

                                   TENANT:
 
                                   FSI INTERNATIONAL, INC.
                                  
                                   By /s/ J. Wayne Stewart
                                     ------------------------------
                                     Its Vice President, Operations

                                   By /s/ Benno G. Sand
                                     ------------------------------
                                     Its Executive Vice President, 
                                     Chief Financial Officer



                                     13


                                     -75-

<PAGE>
 
                                                                   EXHIBIT 10.29

                            DISTRIBUTION AGREEMENT


     THIS AGREEMENT is made and entered into on this 6th day of July, 1995, by
and between FSI International, Inc., a corporation organized and existing under
the laws of Minnesota, U.S.A., with its principal place of business at Chaska,
Minnesota (U.S.A.) (hereafter "Supplier") and Metron Semiconductors Europa B.V.,
a limited liability company organized and existing under the laws of The
Netherlands, with its principal place of business at Almere, The Netherlands
(hereafter "Distributor").

     WHEREAS, Supplier designs, manufactures and sells products for use in the
semiconductor industry, which Products are more particularly described in
Exhibit A attached hereto (the "Products"), and wishes to expand its market for
the Products in the geographical areas set forth in Exhibit B attached hereto
(the "Territories");

     WHEREAS, Distributor has served as Supplier's distributor under various
distribution agreements dating back to 1975.

     WHEREAS, Distributor wishes to assign this Agreement to those of its
subsidiaries and affiliates in the respective Territories as more particularly
described in Exhibit B;

     WHEREAS, Supplier wishes to appoint Distributor and Distributor wishes to
accept such appointment, as the independent, exclusive distributor of the
Products in the Territories on the terms and conditions set forth herein; and

     NOW, THEREFORE, Supplier and Distributor agree as follows:

1.   Appointment of Distributor, Terms of Product Sales.
     ___________________________________________________

     1.1   Subject to all of the terms and conditions of this Agreement,
           Supplier hereby appoints Distributor, and Distributor hereby accepts
           such appointment, as the exclusive, independent distributor of the
           Products in the Territories.  Supplier may, however, sell Products to
           third parties for use in the Territories on a representative basis,
           provided that Supplier shall pay Distributor a commission with
           respect to such Products determined by Supplier and based on services
           performed by Distributor with respect to such Products.  In certain
           representative sales of Products, Supplier may allocate the
           commission between Distributor and a third party, such allocation
           determined by Supplier and based on an equitable basis and consistent
           with past practice between Supplier and Distributor.  Moreover,
           Supplier shall not be prohibited from establishing a technical or
           support offices or organizations in the Territories, provided that
           such offices or organizations should not engage in sales of the
           Products.

     1.2   With the exception of Products sold to specific customers determined
           on either a customer-by-customer or project-by-project basis, and as
           agreed to by Supplier and Distributor, Supplier shall sell the
           Products to Distributor at Supplier's current U.S. domestic sales
           list prices, less Distributor's discount, as provided in Exhibit A.


                                     -76-
<PAGE>
 
           Supplier may change its sales list prices upon sixty (60) days'
           advance written notice to Distributor.

     1.3   Distributor shall have the right of first refusal to act as
           distributor in the Territories and under the terms of this Agreement
           for any modified, revised, up-dated or replacement products sold by
           Supplier and related to the Products.  Supplier shall notify
           Distributor immediately of any such products.

     1.4   Sales to the Distributor will be invoiced on an open account basis.
           Sales invoices will be due for payment sixty (60) days after shipment
           of the Products.  A reasonable late payment penalty may be applied to
           late payments for Products accepted by Distributor or Distributor's
           customers, without prior written approval by Supplier.  Such penalty
           shall be equal to the lesser of the following interest rates in
           effect on the date the payment was due: (i) two points plus the prime
           interest rate as announced by Harris Trust and Savings Bank, and (ii)
           three points plus the statutory default late payment interest rate
           under the laws of the Netherlands applicable to distribution
           agreements.

     1.5   Supplier shall retain title to the Products and bear the risk of loss
           until delivery to the carrier, F.O.B. Supplier's factory or
           distribution center, at which time title shall pass and the risk of
           loss shall be borne by Distributor (or Distributor's customers).
           Provided, however, that beginning September 1, 1996, Supplier and
           Distributor shall implement procedures to provide for Supplier to
           retain title to the Products and bear the risk of loss until delivery
           F.O.B. at Distributor's warehouse (or the place of acceptance by
           Distributor's customer).  In any event, Distributor (or Distributor's
           customers) shall, directly or indirectly, bear the cost of any
           customs duties, taxes, shipping and handling costs, and insurance
           with respect to the shipment of the Products.

     1.6   Notwithstanding the general rule provided in Section 1.5 above,
           Supplier and Distributor may negotiate and arrange for certain sales
           of Products pursuant to terms under which either: (i) Supplier shall
           retain title to the Products and bear the risk of loss until
           delivery, F.O.B. Distributor's warehouse (or the place of acceptance
           by Distributor's customer), or (ii) Supplier shall retain title to
           the Products and bear the risk of loss until delivery to the carrier,
           F.O.B. Supplier's factory or distribution center.

2.   Obligations and Covenants of Supplier.
     ______________________________________

     2.1   Supplier will use its best efforts to comply with Distributor's
           request for the means of shipping the Products as specified in
           Distributor's orders and shall use its best efforts to notify
           Distributor in the event that Supplier is unable to comply with such

                                       2


                                     -77-
<PAGE>
 
           request.  Supplier shall not send partial shipments of Distributor's
           orders unless Distributor agrees in advance.

     2.2   Absent extraordinary circumstances and subject to written agreement
           by Supplier and Distributor (such agreement which shall not be
           reasonably withheld), Supplier shall not sell the Products directly
           to customers in the Territories and shall refer to Distributor in a
           timely manner all orders and inquiries relating to the Products
           originating from within or outside the Territories to the extent such
           orders or inquiries relate to Products destined for use within the
           Territories.

     2.3   In negotiation or renegotiation of any agreement with any of its
           other distributors, agents or employees subsequent to the date of
           this Agreement, Supplier will insist upon a covenant that such other
           distributor, agent or employee will not seek customers or establish a
           branch or maintain any distribution outlet in the Territories.

     2.4   Supplier will, from time to time, supply Distributor, at Supplier's
           cost, with a reasonable quantity of promotional materials in the
           English language, such as literature, catalogs and other advertising
           materials relating to the Products.  Such promotional materials shall
           also be translated in the native language of the country to which the
           Products are shipped if required by applicable law.

     2.5   [Section 2.5 is left blank intentionally.]

     2.6   Supplier will conduct technical seminars and provide training for
           sales or services related to the Products for the benefit of
           Distributor's employees.  Each party shall be responsible for the
           expenses (including the cost of transportation, meals and lodging)
           incurred by its own employees attending such seminars or training.

     2.7   Supplier will, from time to time, and at its own cost (including the
           cost of salaries and lodging for Supplier's employees) participate in
           international trade shows for promoting the Products in the
           Territories pursuant to agreement by Supplier and Distributor.

     2.8   Supplier will use its best efforts to assist Distributor to
           facilitate any import processing by providing Distributor with all
           required documents and information.

     2.9   Supplier agrees to comply with all applicable export control laws and
           regulations relating to the Products.  Supplier will also use its
           best efforts to provide information necessary for Distributor to
           comply with all applicable export control laws and regulations
           relating to the Products.

                                       3


                                     -78-
<PAGE>
 
     2.10  Supplier's current, general warranty with respect to the Products is
           set forth in Supplier's International System Warranty which is
           attached hereto as Exhibit C and incorporated herein by reference.
           Such warranty may be amended, supplemented or replaced by Supplier,
           provided that Supplier provides Distributor with sixty (60) days'
           prior written notice of such amended, supplemented or replacement
           warranty.

     2.11  Without Distributor's prior written consent, Supplier will not use,
           reproduce, disclose or otherwise make available to any person, other
           than Supplier's employees or agents who have a need to know such
           information, any and all information, written or oral, which is
           disclosed by Distributor to Supplier, identified as confidential
           information and not generally available to the public.  The term
           "confidential information" shall not include information provided by
           Distributor to Supplier exclusively for the purpose of soliciting
           potential and actual sales of the Products.  In addition, the term
           "confidential information" shall not include any information that is
           or becomes known to the public through no fault of Supplier.

     2.12  Supplier shall accept for credit Distributor's inventory of spares or
           equipment pursuant to the terms of Supplier's Inventory Return
           Policy, a current copy of which is attached hereto as Exhibit D.

     2.13  During the term of any warranty made by Supplier with respect to any
           Product sold by Distributor, Supplier shall maintain an adequate
           inventory of spare parts for such Product.

     2.14  Upon delivery of each Product by Supplier to Distributor, Supplier
           shall supply Distributor with adequate documentation to Distributor
           for purposes of servicing and trouble-shooting such Product.  Such
           documentation shall comply with any applicable law.  The cost of any
           such manuals and documentation shall be included in the price of the
           Product under Section 1.2 of this Agreement.

3.   Obligations and Covenants of Distributor.
     _________________________________________

     3.1   Distributor will use its best efforts to market and sell the Products
           in the Territories.

     3.2   Except as otherwise required by law, Distributor will market and sell
           the Products without removing or altering any labels, trade names,
           trademarks, notices, labels, serial numbers or other identifying
           marks, symbols or legends affixed to any of the Products or their
           containers or packages.

     3.3   Supplier shall not be liable under any warranty made by Distributor
           with respect to any of the Products which exceed the warranties made
           by Supplier which warranties are more particularly described in
           Exhibit C attached hereto. Supplier may modify


                                       4


                                     -79-
<PAGE>
 
           any warranties upon reasonable notice to Distributor, provided,
           however, that such amended Warranties will not apply to Products sold
           or Products which Distributor has entered into a contract to sell but
           has not yet delivered.

     3.4   Without Supplier's prior written consent, Distributor shall not use,
           produce or disclose or otherwise make available to any person, other
           than Distributor's employees or agents who have a need to know such
           information for the performance of its obligations hereunder, any and
           all information written or oral, which is disclosed by Supplier to
           Distributor, identified as confidential information and not generally
           available to the public.  The term "confidential information" shall
           not include information provided by Supplier to Distributor
           exclusively for the purpose of soliciting potential and actual sales
           of the Products.  In addition, the term "confidential information"
           shall not include any information that is or becomes known to the
           public through no fault of Distributor.

     3.5   Distributor shall furnish to Supplier, upon Supplier's reasonable
           requests from time to time, reports including, but not limited to,
           actual and forecast sales, market conditions and competitive
           activity.

     3.6   Distributor will, from time to time, and at its own cost (including
           the cost of salaries and lodging for Distributor's employees),
           participate in international trade shows for promoting the Products
           in the Territories, pursuant to agreement by Supplier and
           Distributor.

     3.7   Distributor shall use its best efforts to service any Products during
           any applicable warranty period.  Distributor may contract with other
           individuals or business entities to assist Distributor in installing
           and servicing the Products, provided that such individuals or
           business entities: (i) have adequate training to install and service
           the Products, and (ii) agree in writing that they will not compete
           with Supplier by selling any products or equipment in the Territories
           during the term of this Agreement, to the extent that such products
           or equipment are similar in function to any Products sold by
           Supplier.

4.   Term and Termination.
     _____________________

     4.1   Unless and until sooner terminated as provided for herein, this
           Agreement shall continue for a term of three (3) years commencing on
           July 1, 1995 and will be deemed automatically renewed thereafter for
           one or more additional terms of two (2) years and on the same
           conditions.

     4.2   This Agreement may be terminated by either party upon providing the
           other party with written notice of termination more than twelve (12)
           months prior to expiration


                                       5


                                     -80-
<PAGE>
 
           of the applicable term, i.e., more than twelve (12) months prior to
           expiration of the initial three-year term or more than twelve (12)
           months prior to expiration of an ensuing two-year extension.

     4.3   In the event of a breach of any material provision of this Agreement,
           this Agreement may be terminated upon ninety (90) days' written
           notice given by the non-breaching party to the other party, which
           notice shall specify the breach on which the termination is based,
           provided, however, that in such event this Agreement shall continue
           in full force and effect without regard to such notice if the other
           party cures the breach specified in the notice within the said 90-day
           period.

     4.4   This Agreement will terminate immediately upon the occurrence of any
           of the following events:

           (a)  All or any substantial part of the property of either party
                shall be condemned, seized or otherwise appropriated, or the
                custody or control of such property shall be assumed by any
                person or agency acting or purporting to act under authority of
                any government (de jure or de facto) or either party shall have
                been prevented from exercising normal managerial control over
                all or any substantial part of its property by any such person
                or agency; or
                                        
           (b)  Either party shall (i) apply for or consent to the appointment
                of a receiver, trustee or liquidator for its business or of all
                or any substantial part of its assets, or (ii) be unable, or
                admit in writing its inability, to pay its debts as they mature,
                (iii) make a general assignment for the benefit of creditors,
                (iv) be adjudicated a bankrupt or insolvent, or (v) file a
                voluntary petition in bankruptcy or a petition or an answer
                seeking reorganization or an arrangement with creditors or
                seeking to take advantage of any insolvency law, or file an
                answer admitting the material allegations of a petition filed
                against either party in any bankruptcy, reorganization or
                insolvency proceeding, or take corporate action for the purpose
                of effecting any of the foregoing; or
                                        
           (c)  An order, judgment or decree shall be entered without the
                application, approval or consent of the subject party by any
                court of competent jurisdiction, approving a petition seeking
                reorganization of the party or appointing a receiver, trustee or
                liquidator of its business or of all or any substantial part of
                its assets; or

           (d)  An order or notice shall be published by any government or 
                inter-government authority requiring the cessation of trading
                activities with

                                       6


                                     -81-
<PAGE>
 
                the subject party as a result of the violation of export
                controls, safety or other regulatory laws.

     4.5   Upon termination of this Agreement, Distributor shall no longer have
           the right to serve as a distributor of the Products in the
           Territories and shall not be entitled to any additional consideration
           as a result of such termination.  However, Distributor shall have the
           right to continue selling in the Territories the Products which are
           in Distributor's inventory at the time of termination of this
           Agreement; such right, however, shall terminate six (6) months after
           termination of this Agreement.  Supplier shall accept all Products
           returned by Distributor for full refund if Distributor so requests in
           writing within twelve (12) months after termination of this
           Agreement, such refund to be made at the prices for which the
           Products were originally purchased by Distributor from Supplier,
           provided that the returned Products are in good condition as approved
           by Supplier, such approval by Supplier shall not be unreasonably
           withheld or delayed.

     4.6   Upon termination of this Agreement, Distributor shall cease to
           represent itself as being a distributor of Supplier.  Within sixty
           (60) days after termination, Distributor will return to Supplier all
           promotional materials for and samples and demonstration models of the
           Products.
                                        
     4.7   Notwithstanding termination of this Agreement upon notice as provided
           in Section 4.2 of this Agreement, Supplier shall continue to provide
           Products in conformity with and pursuant to the terms of this
           Agreement during the remaining term of this Agreement.  Further, in
           the event of a termination notice, Distributor shall notify Supplier
           by the termination date, of a list of all prospective customers
           interested in the Products.  If, within six (6) months after the
           termination date, Supplier receives a purchase order from any of the
           identified prospects, Supplier (i) shall promptly notify Distributor
           of such purchase order and (ii) shall pay to Distributor a commission
           equal to the Distributor's discount with respect to the Products
           under such purchase order.

     4.8   Notwithstanding termination of this Agreement, Distributor shall
           continue to perform all warranty service during the term of any
           applicable warranty period, whether such warranty expires before or
           after the termination of this Agreement, with respect to any Products
           sold by, on behalf of, or in cooperation with Distributor.

     4.9   Upon the termination, expiration or non-renewal of this Agreement,
           Supplier shall not be liable to Distributor for any compensation,
           reimbursement or damages on account of the loss of prospective
           profits from anticipated sales, or on account of any expenditures,
           investments, losses or commitments in connection with the


                                       7


                                     -82-
<PAGE>
 
business or goodwill of Supplier, Distributor, or otherwise, provided that
Supplier has not breached any material provision of this Agreement, except as
expressly provided in Section 4.7 of this Agreement.

5.   Indemnification.
     ________________

     5.1     Distributor hereby agrees to indemnify and hold Supplier harmless
             from and against any and all damages, liabilities, fines or
             expenses incurred by Supplier as a result of Distributor's breach
             of any provision hereof.

     5.2     Supplier hereby agrees to indemnify and hold Distributor harmless
             from and against any and all damages, liabilities, fines or
             expenses incurred by Distributor as a result of Supplier's breach
             of any provision hereof.

     5.3     Supplier agrees to defend and hold Distributor harmless from and
             against any and all damages, liabilities, fines or expenses
             incurred by Distributor in connection with any claim or lawsuit
             arising out of the design, manufacture, use, Supplier's warranty,
             or defect ("gebrek") of any of the Products, provided that
             Distributor has complied with its obligations hereunder and has
             given prompt notice of the claim or lawsuit to Supplier together
             with all information and documents relating to such a claim or
             lawsuit. Distributor hereby agrees to assist Supplier in defending
             such claim or lawsuit.

     5.4     Supplier agrees to defend and hold Distributor harmless from and
             against any and all damages, liabilities, fines or expenses
             incurred by Distributor in connection with any claim or lawsuit
             arising out of any infringement or alleged infringement of any
             patent or other intellectual property rights of any person, firm or
             company in the Territories, provided that Distributor has given
             prompt notice of the claim or lawsuit to Supplier together with all
             information and documents relating to such a claim or lawsuit.
             Distributor hereby agrees to assist Supplier in defending such
             claim or lawsuit.

     5.5     The indemnification agreements as provided in this Section 5 shall
             continue in full force and effect despite the expiration, recision,
             or termination of this Agreement.

6.   Relationship of the Parties.
     ____________________________

     6.1     The relationship between Supplier and Distributor is that of seller
             and buyer. Neither Distributor, nor any employee of Distributor,
             shall be considered an employee or agent of Supplier for any
             purpose. Unless otherwise expressly authorized in writing by the
             other party hereto, neither party shall have the right or authority
             to assume or create any responsibility, express or implied, on
             behalf of or

                                       8


                                     -83-
<PAGE>
 
             in the name of the other party hereto, or to bind the other party
             in any manner whatsoever, or to accept payment from any person on
             behalf of the other party.

     6.2     Supplier hereby grants a license to Distributor permitting 
             Distributor to use Supplier's trademarks and trade names in
             connection with the sale of Products. Distributor agrees to use
             Supplier's trademarks and trade names only in connection with the
             sale of any Products. This license shall terminate upon the
             termination of this Agreement, at which time Distributor shall
             cease to and shall not thereafter use, and shall not permit any of
             its agents, employees or subsidiaries thereafter to use, for any
             purpose whatsoever, any of Supplier's trademarks or trade names
             other than for the purpose of selling Products in Distributor's
             inventory as specifically provided in Section 4.5 of this
             Agreement, or pursuant to any other written agreement between the
             parties. Nothing in this Agreement shall be deemed to transfer to
             or confer upon Distributor any right, title or interest in any
             trademark or trade name owned by or used by Supplier.

     6.3     During the term of this Agreement and for a period of six (6)
             months after termination of this Agreement, (i) Supplier shall not,
             without Distributor's prior written consent, solicit employees of
             Distributor or any of its subsidiaries for employment with Supplier
             or otherwise interfere with Distributor's relationship with its
             employees, and (ii) Distributor shall not, without Supplier's prior
             written consent, solicit employees of Supplier or any of its
             subsidiaries for employment with Distributor or otherwise interfere
             with Supplier's relationship with its employees. This Section shall
             not restrict or prohibit (i) Supplier from hiring an employee of
             Distributor or any of its subsidiaries, if such employee applies
             for employment with Supplier by responding to an announcement of an
             available employment position, and (ii) Distributor from hiring an
             employee of Supplier or any of its subsidiaries, if such employee
             applies for employment with Distributor by responding to an
             announcement of an available employment position.

7.   Assignment.
     ___________

     7.1     Neither this Agreement nor any right, title, interest or obligation
             hereunder may be assigned or otherwise transferred by either party
             or their assignees, transferees or successors in interest without
             the prior written consent of the other party. This Agreement shall
             inure to the benefit of such assignees, transferees and other
             successors in interest of the parties in the event of an assignment
             or other transfer made consistent with the provisions of this
             Agreement.

     7.2     By its signature to the Agreement, Supplier consents to the
             assignment of this Agreement to Distributor's affiliated companies
             in the respective geographical areas set forth in Exhibit B
             attached hereto.

                                       9


                                     -84-
<PAGE>
 
8.   Force Majeure.
     ______________

     Neither party shall be liable for any breach of this Agreement occasioned
     by an act of God, labor disputes, unavailability of transportation, goods
     or services, governmental restrictions or actions, change in the law, war
     (declared or undeclared) or other hostilities, or by any other event, the
     condition or cause of which is beyond the control of such party. In the
     event of nonperformance or delay attributable to any such causes, the
     period for performance of the applicable obligation hereunder will be
     extended for a period equal to the period of delay. However, the party so
     delayed shall use its best efforts, without obligation to expend
     substantial amounts not otherwise required under this Agreement, to
     circumvent or overcome the cause of the delay. In the event that any such
     delay exceeds sixty (60) days, either party may at its option terminate
     this Agreement effective immediately by giving written notice thereof to
     the other party.

9.   Notices                     
     _______

     Any notice required to be given hereunder shall be deemed to have been
     effectively given only when delivered personally to an officer of the
     applicable party, or when first sent by telefax and confirmed by registered
     mail, addressed to the applicable party at its address set forth below, or
     at such other address as such party my hereafter designate as the
     appropriate address for the receipt of such notice:

     To Supplier at: FSI International, Inc.
                              Attention:  Benno Sand
                              322 Lake Hazeltine Drive
                              Chaska, Minnesota 55318
                              U.S.A.

     To Distributor at:   Metron Semiconductors Europa B.V.
                              c/o Metron Technology Corporation
                              Attention: Edward Segal
                              770 Lucerne Drive
                              Sunnyvale, California 94086-3844
                              U.S.A.

     With a copy to:      Metron Semiconductors Europa B.V.
                              Attention:  Udo Jaensch
                              SaturnstraBe 48
                              D-85609 Aschheim
                              Germany

                                      10


                                     -85-
<PAGE>
 
10.  Waiver.
     _______

     No waiver by either party of strict compliance with all terms and 
     conditions of this Agreement shall constitute a waiver of any subsequent
     failure of the other party to comply strictly with each and every term and
     condition hereof.

11.  Complete Agreement.
     ___________________

     This Agreement constitutes the entire agreement between the parties 
     relating to the subject matter contained herein and it supersedes and
     terminates any and all prior agreements between them, including the
     Distribution Agreements between Supplier and Distributor dated July 8 and
     October 9, 1987, and the Distribution Agreement between Supplier and Metron
     Semiconductors (Hong Kong) Ltd. dated July 1, 1987. If any provision, or
     application hereof, of this Agreement is held unlawful or unenforceable in
     any respect, such illegality or unenforceability shall not affect other
     provisions or applications that can be given effect and this Agreement
     shall be construed as if the unlawful or unenforceable provision or
     application had not been contained herein. This Agreement may be amended or
     otherwise modified only by a written document signed by authorized
     representatives of the parties.

12.  Counterparts.
     _____________

     This Agreement may be executed in two counterparts, each of which shall
     be deemed an original, but both of which shall constitute but one
     instrument.

13.  Arbitration and Applicable Law.
     _______________________________

     13.1    Any dispute between the parties arising out of or in connection
             with this Agreement that cannot be settled amicably between the
             parties shall be finally resolved by arbitration. Arbitration
             proceedings shall be conducted in Minneapolis, Minnesota pursuant
             to the International Arbitration Rules of the American Arbitration
             Association. In the event that either party makes a demand for
             arbitration, the arbitrator shall be selected by mutual agreement
             between the parties, or if the parties are unable to agree on an
             arbitrator within twenty (20) days after a demand for arbitration
             is made, the arbitrator shall be selected by the American
             Arbitration Association. Disputes subject to arbitration hereunder
             for claims in the aggregate amount of One Million (U.S.) Dollars
             ($1,000,000.00) shall be resolved by a panel of three independent
             impartial arbitrators, one arbitrator selected by Supplier, one by
             Distributor and the third by the other two arbitrators. Failure to
             select an arbitrator within twenty (20) days of a demand for
             arbitration shall be deemed a waiver of a right to select an
             arbitrator and one will be selected by the American Arbitration
             Association. All arbitrators shall be persons with skill and
             experience in the
                              

                                      11


                                     -86-
<PAGE>
 
             industry. The costs of arbitration, but not the costs and
             expenses of the parties, shall be shared equally by Supplier and
             Distributor.

     13.2    Either party shall have the right to review, prior to the 
             submission of its case to the arbitration panel, any and all
             documents in the possession of the other party which relate to such
             other party's performance under, or the conduct of its activities
             in connection with, this Agreement.

     13.3    The governing language of this Agreement shall be English. This
             Agreement shall be interpreted and enforced in accordance with the
             laws of the United States and the State of Minnesota, without
             giving effect to choice of law principles. The United Nations
             Convention on Contracts for the International Sale of Goods shall
             not apply to this Agreement.

     13.4    The agreement to arbitrate as provided in this Section 13 shall
             continue in full force and effect despite the expiration, recision,
             or termination of this Agreement. The parties knowingly and
             voluntarily waive their rights to have their dispute tried and
             adjudicated by a judge or jury.

                                        
     THE REMAINDER OF THIS PAGE IS INTENTIONALLY LEFT BLANK


                                       12


                                     -87-
<PAGE>
 
     IN WITNESS WHEREOF, the parties hereto have executed this Agreement as of
                           the date first above written.

                DISTRIBUTOR                            SUPPLIER

      METRON SEMICONDUCTORS EUROPA B.V.           FSI INTERNATIONAL, INC.

          /s/ Udo Jaensch                   /s/ J. A. Elftmann
        By____________________________    By____________________________
         Udo Jaensch                       J. A. Elftmann
         Its Executive Vice President      Its Chief Executive Officer


                                       13


                                     -88-

<PAGE>
 
                                                                   EXHIBIT 10.30

                                     LEASE

     Skyline Builder's, Inc. ("Landlord"), a Minnesota corporation, hereby 
leases to FSI International, Inc. ("Tenant"), a Minnesota corporation, and
FSI International, Inc. hereby leases from Skyline Builders, Inc., that certain 
portion, as outlined in the drawing attached as Exhibit A, and containing 
approximately 125,800 square feet (the "Premises"), of that certain building 
(the "Building") known as 312 Lake Hazeltine Drive, Chaska, Minnesota, located 
on the legal parcel (the "Parcel") described as Tract C, Registered Land Survey 
No. 51, Files of Registrar of Titles, Carver County, Minnesota, on the terms and
conditions set forth below.

     1. Arrangements For Fixing Commencement Date. Landlord will immediately 
        __________________________________________
notify Tenant telephonically once Landlord acquires fee title to the Parcel. The
date of such notice is hereinafter referred to as the "Commencement Date." 
Tenant will thereupon have the right to enter the Premises for the purpose of 
designing and constructing Alterations (as hereafter defined) and the right to 
use the Premises in any manner permitted by this Lease. Landlord will cooperate 
with Tenant to give Tenant as much advance notice as is reasonably practical of 
any closing in which Landlord expects to acquire fee title to the Parcel.

     2. Cancellation Rights. Tenant and Landlord shall each have the right to
        ____________________
cancel this Lease, without further obligation to the other (except that Landlord
will refund any security deposit or prepaid Rent) if, for whatever reason,
Landlord has not acquired fee title to the Parcel by September 1, 1995.

     3. Square Footage. Preliminary measurements indicate that the Premises 
        _______________
contains 125,800 square feet. Prior to the Commencement Date, Landlord may (and,
if requested by Tenant, Landlord will) have an architect, engineer, or surveyor 
remeasure the Premises, at Landlord's expense, from the outside edges of the 
perimeter walls to the middle of any demising walls. Landlord will promptly 
notify Tenant of the results. As used in this Lease, "Square Footage" means 
125,800 square feet; provided, however, that if such an architect, engineer, or 
surveyor remeasures the Premises pursuant to the previous sentence, "Square 
Footage" will mean the square footage of the Premises, as thus measured, without
deduction for any columns, stairwells, elevators, or other unusable space within
the boundary walls of the Premises.

     4. Term. The Term of this Lease is a period (the "Initial Term") starting 
        _____
on the Commencement Date and ending at 11:59 p.m. on the last day of the 
calendar month in which the fifth year anniversary of the "Rent Start Date" (as 
hereinafter defined) occurs. Provided, however, that Landlord hereby grants 
Tenant the option, to be exercised, if at all, only by giving Landlord written 
notice at least 180 days prior to the expiration of the



                                     -89-
<PAGE>
 
Initial Term (with time being of the essence), to extend the Term for an
additional five year period (the "Renewal Term") commencing on the day following
the last day of the Initial Term. Provided further, however, that Tenant may
exercise this option only while it is not in Default and only prior to the time,
if any, in which it is dispossessed because of a Default. The word "Term," as
used herein, shall mean the Initial Term or, after Tenant timely and effectively
exercises its renewal option, the Initial Term plus the Renewal Term.

     5. Premises Condition. Landlord warrants that all electrical, mechanical,
        ___________________
structural, and plumbing systems, serving the Premises within the Building as of
the date of this Lease, will be in good working condition on the Commencement
Date. At its own expense, Landlord will install one passenger elevator serving
the mezzanine portion of the Premises, will enclose and finish the two existing
stairwells serving the area of the mezzanine portion of the Premises above the
present site of the office-finished space on the ground floor, and will
construct demising walls separating the Premises from adjacent space in the
Building. Landlord will make these improvements as soon as reasonably possible
after the Commencement Date. The specifications for these improvements shall be
left to Landlord's discretion, provided, however, that these specifications
shall conform to all applicable building code requirements, and provided further
that these improvements will be done in a good and workmanlike manner. Except as
expressly provided in this Article, Tenant is leasing the Premises "as is,"
without any warranty whatsoever as to the physical condition or suitability of
the Premises, Building, or Parcel. Tenant acknowledges that it has inspected the
Premises prior to signing this Lease and that it is in no way relying on any
representation or warranty by Landlord or any agent of Landlord, other than
those expressly contained in this Lease, as to the physical condition of the
Premises or its suitability, legal, structural, functional, or otherwise, for
Tenant's intended purposes.

     6. Base Rent. Base Rent will be due and owing from Tenant to Landlord, in 
        __________
advance, in the following amounts and at the following times:

     A. On the Rent Start Date: the sum of $36,692 (i.e., 125,800 x $3.50/12) 
multiplied by a fraction whose numerator is the number of days (starting with 
the Rent Start Date) remaining in the calendar month in which the Rent Start 
Date occurs, and whose denominator is the total number of days in that calendar 
month.

     B. On the first day of the next calendar month and each successive month 
thereafter during the Initial Term: the sum of $36,692.

                                      -2-


                                     -90-
<PAGE>


     C. On the first day of the next calendar month and each successive month
thereafter during the first three years of the Renewal Term: the sum of $42,248
(i.e., 125,800 x $4.03/12).

     D. On the first day of the next calendar month and each successive month 
thereafter during the remainder of the Renewal Term: the sum of $45,183 (i.e., 
125,800 V. $4.31/12).

     E. Notwithstanding the foregoing, Base Rent amounts will be subject to a 
multiplier in case of any holdover as provided in Article 19.

     F. All of the foregoing sums assume the Square Footage will be 125,800. If
and when the Square Footage changes from 125,800, the foregoing sums and the sum
described in paragraph H, below, will automatically be adjusted proportionately.

     G. The term "Rent Start Date" means the earliest of (a) the 60th day 
after each party has signed and delivered to the other party or its agent, a 
copy of the Lease, (b) the day on which Tenant first stores any inventory (other
than materials and equipment to be used to construct the Alterations, as defined
hereinafter) in the Premises, (c) the day on which any of Tenant's employees or 
agents first use any of the Premises as office space, or (d) October 1, 1995.

     H. On signing this Lease, Tenant will deposit $36,696 with Landlord. This 
money is in addition to the Security Deposit required elsewhere in this Lease 
and the prepayment of Additional Rent likewise required elsewhere in this Lease.
Landlord will apply this sum to the payment of Base Rent due on the Rent Start 
Date, and will apply the balance, if any, as a credit against the Base Rent
first due under paragraph B.

     7. Additional Rent. 
        ________________

     A. On the first day of each successive month during each calendar year or 
partial calendar year of the Term, Tenant will pay, as Additional Rent, 1/12th 
of Tenant's Proportionate Share of the total amount, as estimated by Landlord, 
of Operating Expenses and Real Estate Taxes. Landlord will use its best efforts 
to give Tenant written notice of this estimated amount for the upcoming year by 
December 15 or as soon thereafter as is practical. On 30 days written notice, 
Landlord may revise the estimate and adjust the Additional Rent payable by 
Tenant accordingly.

     B. Special Provisions for Calendar Year 1995. Landlord estimates Operating 
        __________________________________________
Expenses and Real Estate Taxes for 1995 (determined by annualizing the Operating
Expenses and Real Estate Taxes allocable to the remainder of 1995 following the 
Commencement Date) at $1.60 per square foot. On signing this Lease, Tenant will
deposit $16,773.33 (i.e., 125,800 x $1.60/12) with Landlord. Landlord will apply
this sum to the payment of




                                      -3-


                                     -91-
<PAGE>
 

Additional Rent accruing from the Rent Start Date through the last day of the
month in which the Rent Start Date occurs, and will apply the balance, if any,
as a credit against the Additional Rent due under the next sentence. On the
first day of the following month and each successive month thereafter through
December 1995, Tenant will pay, as Additional Rent, the sum equal to the Square
Footage multiplied by $1.60/12. With respect to the period from the Commencement
Date to the day prior to the Rent Start Date, Tenant will be liable for
utilities used by Tenant or its agents and the management fee, but will not be
liable for the other components of Operating Expenses and Real Estate Taxes.

     C.  After the end of each calendar year, Landlord will determine the actual
amount of Operating Expenses and Real Estate Taxes for that calendar year and
give Tenant a written certification of that amount. Any overpayment or
underpayment will be due from Landlord or Tenant, as the case may be, within
thirty (30) days after Tenant receives the certification. This will be true even
if the Term has ended, it being the parties' express intent that the obligation
of the previous sentence survive termination or expiration of the Term.

     D.  "Real Estate Taxes" for any given calendar year means all real estate
taxes and all installments of special assessments levied against the Parcel and
first due and payable in that year.

     E.  "Operating Expenses" means generally all expenses incurred by Landlord
in the operation of the Building and the maintenance and repair of the Parcel
grounds of a type normally incurred in the operation of similar buildings 
(excepting only those costs declared by Article 11 to be Landlord's sole
responsibility and not subject to reimbursement, and Landlord's debt service on
any loan incurred to finance the Property). This term includes a management fee
equal to 4.0 per cent of the all rent, Base and Additional, payable by Tenant.

     F.  Notwithstanding anything herein to the contrary, if the Carver County 
assessor increases the estimated market value of the Building because of 
improvements made to the Premises by Tenant or at Tenant's request, Landlord 
shall have the right to allocate Real Estate Taxes into three categories--(1)
those resulting from these improvements, (2) those resulting from the 
improvements made to the Building by or at the request of other tenants, and 
(3) the remainder, i.e., Real Estate Taxes not resulting from improvements
described in the previous two categories--and to require Tenant to pay, as
Additional Rent, 100% of category (1) and the Tenant's Proportionate Share of 
category (3) rather than the Tenant's Proportionate Share of Real Estate Taxes.
The amount so allocated to category one and category two will be the portion of
the overall estimated market value for property tax purposes which is 
attributable to the improvements within each category, according to the Carver
County assessor; provided, however, that if the assessor fails to inform 
Landlord, on request, of the portion of EMV attributable to the
 
                                      -4-


                                     -92-
<PAGE>
 

categories, then Landlord will allocate Real Estate Taxes to each of the various
improvements within categories one and two, in accordance with the following
formula, A x B/C, where A is the principal amount of the cost of the 
improvement, as shown on the building permit(s) obtained to construct the 
improvement, B is the per square foot estimated market value (for purposes of
determining property taxes for the calendar year at issue) for the "land only"
within the Parcel, and C is the per square foot estimated market value for the 
land only within the Parcel as of January 2 of the year following the year in
which the improvement was completed. 

     G.  Notwithstanding anything herein to the contrary, Landlord shall have 
the right to allocate to Tenant 100% rather than Tenant's Proportionate Share of
any particular expense, otherwise qualifying as an Operating Expense, which 
benefits Tenant but no other tenant of the Building or which arises solely 
because of Tenant's activities or defaults, and may similarly allocate 100% of 
the portion of any general expense arising from activities by Tenant creating 
such expense disproportionately).

     H.  The term "Tenant's Proportionate Share" means the Square Footage 
divided by the square footage within the Building (excluding, unless, until, and
then to the extent actually leased, the penthouse and spur track area), measured
in the same way as this Lease calls for the Square Footage to be measured, 
without deduction for stairwells, columns, and other unusable space within a 
leased area.

     I.  Tenant shall have the right to review and audit, at its own expense, 
Landlord's records concerning Operating Expenses.

     8.  Permitted Uses; Certain Restrictions.  Tenant may use the Premises only
        ______________________________________

for office purposes, one or more laboratories, and general warehouse purposes,
and uses incidental thereto. Without limitation, manufacturing, without 
Landlord's prior written consent, not to be unreasonably withheld, is 
prohibited. Notwithstanding anything herein to the contrary, Tenant will comply
with all local, state, and federal laws regulating the use of the Building; will
not conduct unlawful activities in the Premises; will not do anything to create
any unusual nuisance, noise, odor, or otherwise interfere with or disturb any
other tenant of the Building in its normal business operations or Landlord in 
its management of the Building; and will not bring onto the Parcel, without
Landlord's prior written consent, any Hazardous Substance (as defined below) 
other than gasoline or fuel oil or a substance deemed a Hazardous Substance only
when present in quantities greater than the quantity maintained by Tenant on the
Parcel.

     9.  Environmental Indemnity.  Tenant shall defend, indemnify, and hold
        _________________________

Landlord harmless from and against any and all actions, claims, proceedings, 
causes of action, damages, losses, and expenses (including, without limitation,
attorneys' fees and

                                      -5-


                                     -93-
<PAGE>
 
environmental engineering fees), arising from any use, handling, or release of a
Hazardous Substance by Tenant (or anyone for whom it is legally liable) on the
Parcel or in connection with Tenant's use of the Premises. Landlord represents
that, to the best of its actual knowledge, no leak, spill, release, discharge,
emission, treating, generating, or disposal of any Hazardous Substance has
occurred on the Parcel as of July 25, 1995, that no Hazardous Substance is being
stored on the Parcel as of that date, and that the soil, groundwater, and soil
vapor on or under the Parcel is free of any Hazardous Substance as of that date.
Landlord will defend, indemnify, and hold Tenant harmless from and against any
and all actions, claims, proceedings, causes of action, damages, losses, and
expenses (including, without limitation, attorneys' fees and environmental
engineering fees), arising from any breach of this representation. "Hazardous
Substance" means any pollutant or other toxic or hazardous waste, or other
substance regulated by any applicable law relating to environmental matters and
any materials containing friable asbestos, urea formaldehyde or polychlorinated
biphenyls. No waiver of Liability provision set forth in the Article of this
Lease addressing insurance shall apply to this indemnity. This Indemnity shall
survive expiration or termination of the Lease.

     10. Parking Regulations. "Common Area" means the portion, if any, of the
        _____________________
Parcel designated by Landlord for the use of all tenants of the Building. At
present, the only "Common Area" is the parking lots and Landlord does not
contemplate making any portion of the Building into a Common Area.

     Tenant will comply with such reasonable rules and regulations as Landlord
may prescribe, on written notice to Tenant, for the safety, care, cleanliness,
or orderly management of the Building (including, without limitation, rules
designed to preclude trespassers from entering the Building) or the Common Area.
No more than 125 parking spaces are to be occupied at any one time by Tenant and
its agents, employees, and other invitees; provided, however, that if, when, and
so long as the Premises contains more than 25,000 square feet of office space,
the number of spaces available for the use of Tenant and its invitees will be
125 plus the number of parking stalls required, per city ordinance, for the
office space in excess of 25,000 (it being understood, however, that Landlord
may require Tenant to pay for the construction of additional parking stalls
within the Parcel in accordance with Article 12). Overnight storage of vehicles
and the storage at any time of any other property in the parking lots is
prohibited.

     Landlord may regulate parking and allocate parking spaces within the Parcel
to Tenant and/or to the Building's other lessees, if the need arises. Landlord
has the right, in the event of such an allocation, to designate specific space
numbers for Tenant's exclusive use and Tenant shall use those spaces only;
provided, however, that Landlord shall, in making such a designation, consult
with Tenant and use its best efforts to

                                     - 6 -


                                     -94-
<PAGE>
 
designate spaces in locations acceptable to Tenant. Notwithstanding anything 
herein to the contrary, however, Landlord will always allocate to Tenant no less
than 125 parking stalls in the parking lots existing on the Parcel as of the 
Commencement Date.

     11. Maintenance and Repairs. Tenant will keep the Premises continuously in 
        _________________________
a neat, clean, and sanitary condition, and in as good condition as when turned 
over to it, reasonable wear and tear excepted. This maintenance and repair 
obligation extends to all interior walls, doors, windows, plumbing, and 
electrical fixtures within the Premises, except as these obligations may be 
covered by manufacturer or contractor warranties, and includes the obligation to
replace any objects serving the Premises exclusively when replacement, as 
opposed to repair, becomes appropriate.

     Excepting matters that are Tenant's obligation under this Article, Landlord
will maintain and manage the Building and the Parcel by providing such services
as is customary for like buildings in this area. Except as provided elsewhere in
this Lease concerning damage caused by Tenant not subject to a waiver of claims,
Landlord shall, at its sole expense, maintain, repair, and replace the
Building's roof and load bearing walls, floors, and columns.

     Notwithstanding anything herein to the contrary, Landlord shall have the 
right to perform, as a reimbursable Operative Expense, all other maintenance and
repairs, otherwise Tenant's obligation under this Article, if of a nature as to 
affect other tenants in the Building. E.g., repairs to a part of the HVAC system
affecting more than one Tenant.

     If Tenant fails to maintain or repair the Premises as required in this 
Lease after written notice shall have been given Tenant, and after Tenant has 
had a reasonable time to make the repairs, Landlord may make such repairs, at 
Tenant's expense, without liability to Tenant for any ensuing loss or damage.

     12. Alterations. Subject to the conditions set forth in this Article, 
Tenant has the right to remodel the Premises, at its own expense, so as to make 
it more suitable for Tenant's needs as office, warehouse, and laboratory space. 
The term "Alterations" means the changes to the Premises resulting from this 
remodeling. Tenant must carry out all such Alterations in a good, workmanlike 
manner and in accordance with all applicable building codes and the American 
Disabilities Act. Tenant must provide Landlord with copies of all plans and 
specifications for Alterations costing more than $5,000, in final, as-built form
or as close to final, as-built form as Tenant possesses. Tenant must provide 
Landlord with copies of all construction contracts, warranties, and guaranties 
related to the Alterations. Tenant may not alter the walls, floor, roof, or 
structural columns without Landlord's prior written consent, not to be 
unreasonably

                                     - 7 -


                                     -95-
<PAGE>

withheld. Tenant will not permit any mechanic's, materialmen's, or other liens 
to arise as a result of any Tenant alteration, will immediately notify Landlord 
of any such lien and shall cause the lien to be discharged within 10 days of its
filing or make other arrangements, satisfactory to Landlord, to protect 
Landlord's interest from the lien.

     Additional condition: If Tenant carries out any Alteration that increases
the Premises' office space, as classified for purposes of laws regulating the
number of parking stalls that must be available for Tenant's use, beyond 25,000
square feet, Tenant will be obligated to pay Landlord an amount, as reasonably
estimated by Landlord, sufficient (at the time the new stalls are to be
constructed) to pay for the creation of new striped and blacktopped parking
stalls (with curbs and gutters, together with any other feature required by city
ordinance) on the Parcel equal in number to the number of stalls required by
city ordinance for office space in the amount being added. For example, if
Tenant adds 10,000 square feet of office, and city ordinance specifies 4 stalls
per 1,000 square feet of office-finished space, Tenant is obligated to pay for
the creation of 40 new stalls. Notwithstanding the foregoing, however, (a)
Tenant need not pay this amount unless and until Landlord is ready to start
construction on the new stalls, (b) Tenant need not pay this amount unless and
until the number of stalls, as existing on the Parcel as of July 1, 1995, is
less than either (i) the number city ordinance requires Landlord to make
available to the persons or entities then actually leasing portions of the
Building, given their respective uses, or (ii) the number that Landlord has
agreed to make available to the persons or entities then actually leasing
portions of the Building (even if that number is higher than that required by
city ordinance, it being understood that Landlord shall have the right at all
times to commit to other tenants any and all parking stalls existing on the
Parcel as of July 1, 1995, other than the 125 stalls which Landlord will make
available to Tenant, and any and all new stalls constructed by Landlord
thereafter without payment or reimbursement by Tenant under this Article), and
(c) Tenant need not pay for any stalls first constructed after termination or
expiration of the Lease. Landlord will use its best efforts to cooperate with
Tenant to ensure that the additional, new stalls are completed in a timely
manner and by the time Tenant will need additional stalls because of the new
office space. Upon completion of the new stalls, Landlord will increase the
number of stalls available to Tenant by the number of new stalls and will use
its best efforts to satisfy any reasonable requests of Tenant as to the
additional stalls to be assigned to Tenant. For example, if Tenant starts with
125 stalls and Landlord builds 40 new stalls, at Tenant's expense per this
provision, Tenant will be entitled to use 165 parking stalls. Landlord need not,
however, assign to Tenant the particular new stalls constructed at Tenant's
expense, i.e., Landlord may assign to Tenant other, existing stalls, hitherto
unavailable for Tenant's use.

                                      -8-


                                     -96-
<PAGE>

     Any Alteration meeting the legal definition of a fixture shall become 
Landlord's property immediately. Notwithstanding the foregoing, (a) Tenant shall
maintain all such Alterations in good repair and condition during the Term and 
(b) Landlord may require Tenant to remove, at Tenant's expense, at the 
expiration or termination of the Term, any Alteration whereby Tenant converted 
warehouse space to office space so as to increase the office space in the 
Premises beyond 25,000 square feet, to repair any damage to the Building or 
Premises caused by the installation or removal of any such Alteration, and to 
restore the Premises to its condition as of the Commencement Date, normal wear 
and tear excepted. If a particular Alteration increases the office square 
footage from less than 25,000 square feet to more than that amount, Landlord may
require Tenant to remove the Alteration only as to an amount of square footage 
equal to the number of office square footage minus 25,000, and shall have the 
right to reasonably specify the particular square footage to be restored 
(provided, however, that the square footage thus specified for restoration shall
in no event include the approximately 12,500 square feet of space finished as 
office space as of the Commencement Date. Landlord will not require Tenant to 
remove any Alterations to warehouse space which do not alter its character as 
warehouse space.  

     13. Signs. Tenant may erect and maintain signs on the Parcel grounds, but 
         ______
only with Landlord's prior written consent, not to be withheld unreasonably, as 
to all particulars about any such sign, including, without limitation, number, 
placement, size, color, and material. Tenant shall be responsible for ensuring 
that all such signs comply with zoning and all other applicable laws. Tenant 
will pay all costs incurred in erecting, maintaining, and removing any such sign
upon termination or expiration of the Term. 

     14. Utilities. Tenant will pay for all water, gas, heat, light, power, 
         __________
telephone and other utilities and services supplied to the Premises, together 
with any taxes thereon. Tenant will pay such charges for any utility metered so 
as to measure use by Tenant and no other tenant of the Building directly to the 
utility provider. Landlord will bill any utilities not so metered to Tenant as 
an Operating Expense. Tenant shall have no right to require Landlord to install 
any utility meters at Landlord's expense. Tenant shall have the right to have 
separate utility meters installed at Tenant's own expense.

     15. Insurance. 
         __________

     A. Landlord shall at all times during the term of this Lease insure the 
Building for full replacement value against loss or damage by fire, explosion, 
or other insurable hazards commonly covered by an "all-risk" or "extended 
coverage" policy (including one years' worth of rent interruption coverage), 
provided that Landlord shall not be obligated to insure against loss or damage 
to any trade fixtures or personal property belonging to or leased 

                                      -9-


                                     -97-
<PAGE>
 

by Tenant or against any loss or damage arising from Tenant's use of any
Hazardous Substance. At Landlord's option, Landlord shall not be required to
insure against loss or damage to any Alteration that Tenant has the right to
remove upon expiration or termination of this Lease or that Tenant must 
remove, if Landlord so requests, upon the same. Tenant shall not be responsible 
for payment of any deductible or co-insurance portions of Landlord's fire and
extended coverage insurance. Landlord shall also at all times during the term
of the Lease maintain public liability insurance in the amounts specified in
paragraph 15D in the case of insurance required of Tenant. Landlord will cause
Tenant to be named as an additional insured in the policies maintained by 
Landlord, and Tenant will do the same for Landlord in the policies maintained by
Tenant.

     B.  Each insurance policy required by this Lease will provide that the 
insured party has relinquished all rights to recover against the other party to 
the Lease for loss or damage resulting from perils insured against by the 
policy. Each party waives any claim against the other based on loss or damage
which is covered by insurance or coverable under the insurance policies required
by this Lease, whether those policies are maintained or not. Landlord and Tenant
will promptly notify their respective insurance carriers of this waiver of 
claims and subrogation rights.

     C.  In the event that the use of the Premises by Tenant increases the 
premium rate for insurance carried by Landlord on the Property or any Building
included within the Premises, Tenant shall pay Landlord, upon demand, the amount
of such premium increase. If Tenant installs or uses any electrical equipment
that overloads the power lines to the Building or its wiring, Tenant shall, at
its own expense, make whatever changes are necessary to comply with the 
requirements of the insurance underwriter, insurance rating bureau, and 
governmental authorities having jurisdiction.

     D.  Tenant shall keep in full force and effect, at its expense, a policy or
policies of public liability insurance with respect to the Premises and the
business of Tenant, under limits of liability not less than: $2,000,000 combined
coverage for injury or death to any one person; $2,000,000 for injury or death
to more than one person; and $100,000 with respect to damage to property. Such
policy or policies shall provide that ten (10) days written notice must be
given to Landlord prior to cancellation thereof. Tenant shall furnish evidence
satisfactory to Landlord at the time this Lease is executed and thereafter, on
request, that such coverage is in full force and effect. Tenant's providing
insurance as prescribed herein does not release Tenant from liability to 
Landlord under applicable law, or otherwise limit that liability, except as to
those claims expressly deemed waived under other provisions of this Lease. 
Tenant will indemnify, defend, and hold Landlord harmless from and against any
and all claims of personal injury or property 
 
                                     -10-


                                     -98-
<PAGE>
 
damage asserted by Tenant's employees, agents, or any other person, or any other
business entity, arising from Tenant's operations on the Premises.

     16. Non-Liability. Unless caused by Landlord's gross negligence or willful
         _____________
misconduct, under no circumstances will Landlord be liable to Tenant or persons
claiming through Tenant for: any loss or damage to any property of Tenant or of
others by theft or destruction; any injury or damage to persons or property
resulting from fire, explosion, falling plaster, steam, gas, electricity, water,
rain or snow or leaks from any part of the Premises or from the pipes,
appliances, or plumbing works or from the roof, street or subsurface or from any
other place or by dampness or by any other cause of whatsoever nature. Under no
circumstances will Landlord be liable to Tenant or persons claiming through
Tenant for any such damage caused by any other tenant, other occupant, or
invitee of the Property, or the public, or caused by operations in construction
of any private, public or quasi-public work, or caused by the absence or
interruption of utilities; any loss or damage resulting from acts of God or any
cause beyond Landlord's reasonable control; any loss or damage caused by
Landlord's failure to make the Premises available for occupancy by any
particular date; or any consequential damages no matter what the cause.

     17. Eminent Domain.
         _______________

     A. If the entirety of the Building and Common Area is condemned (this term 
includes sales in lieu of condemnation and quick takes), then the Lease will 
terminate as of the date possession shall be taken by the condemning authority 
and rent shall be paid to the date of such termination. If otherwise, the Lease 
will remain in effect but with an equitable abatement of the Base Rent and 
Additional Rent based on the portion of the Premises rendered unsuitable and the
extent of that unsuitability.

     Absent termination, Landlord has the option of reducing or eliminating such
unsuitability resulting from a condemnation by restoring or remodeling the 
Premises or by making available substitute areas of the Building which are 
acceptable to Tenant.

     B. Landlord is entitled to all condemnation proceeds, no matter what the
bases, provided, however, that Tenant shall have the right to claim and recover
from the condemning authority, but not from Landlord, such compensation as may
be separately awarded or recoverable by Tenant in Tenant's own right on account
of any relocation costs of any resulting damage to Tenant's business.

     18. Damage or Destruction.
         ______________________

     A. Landlord has the option of terminating this Lease at any time if the 
Building or Premises, as the case may be, are damaged by fire or any other cause
to such extent that the restoration

                                     -11-


                                     -99-
<PAGE>
 
cost, as reasonably estimated by Landlord, will equal or exceed thirty percent 
(30%) of the replacement value of the Building or Premises, as the case may be, 
exclusive of foundation, just prior to the occurrence of the damage. The option 
is exercisable only by the giving of written notice within 90 days of the damage
and the termination is effective 30 days after the giving of the notice.

     B. Except where the aforementioned option is exercised, Landlord will 
promptly restore the Building or Premises, if damaged, subject to delays beyond 
Landlord's control and delays in the making of insurance adjustments by 
Landlord; and Tenant shall have no right to terminate this Lease as to any part 
of the Premises.

     C. While the Lease is in effect with respect to any portion of the Premises
that has been damaged by fire or other causes so as to be substantially 
unsuitable for Tenant's purposes, then Base Rent and Additional Rent shall be 
abated equitably effective as of the date of such damage, except that, if Tenant
caused the damage, Tenant will receive no rent abatement if Landlord's insurance
rent-interruption coverage bars Landlord from offering such an abatement.

     19. Termination of Lease. Upon termination or expiration of this Lease, 
         _____________________
Tenant agrees to do the following on or before the expiration or termination 
date: (a) remove all signs, personal property, and trade fixtures belonging to 
or leased by Tenant; (b) perform Tenant's obligations under the last sentence of
Article 12; (c) promptly surrender all keys to Landlord at the place then fixed 
for payment of rent and inform Landlord of the combinations of any locks and 
safes that will remain behind; and (d) surrender possession of the Premises or 
subparts being vacated, broom-clean and in as good condition and repair as the 
same were in at the commencement of this Lease except for (i) reasonable wear 
and tear, (ii) Alterations which Tenant is not obligated to remove under the 
last sentence of Article 12, and (iii) damage or destruction caused by perils 
customarily covered under fire and extended coverage insurance, acts of God, or 
by any other cause beyond the reasonable control of Tenant.

     Tenant agrees that Landlord shall have the option, with respect to all or 
any part of any personal property left behind in violation of this Article, to 
store it at Tenant's expense or declare it and treat it as having been abandoned
by Tenant.

     20. Holding Over. Any holding over without Landlord's written consent after
         _____________
termination or expiration of the Lease is a breach of the Lease entitling 
Landlord to institute legal actions to dispossess Tenant and to sue Tenant for 
any damages resulting from the holding over. Any holding over with Landlord's 
consent will be considered a month-to-month extension of the Lease, with rent 
payable as provided in the next sentence. In all cases, except insofar as 
Landlord may hereafter agree in writing, so

                                     -12-


                                     -100-
<PAGE>
 
long as Tenant remains in possession after the termination of the Lease, Tenant 
agrees to pay Base Rent at one and one-half the rate in effect immediately prior
to the termination or expiration of the Lease and to otherwise abide by all the 
other terms and obligations imposed on Tenant under the Lease.

     21. Default of Tenant.
         __________________

     A. It is a Default for Tenant to: (a) not pay any Base or Additional Rent
or other sum when due under the Lease (provided, however, that Tenant shall not
be deemed in default until it fails to cure any such delinquency within 3 days
after receiving Landlord's written notice of the delinquency); (b) not cure any
Lease violation not described by the other clauses of this paragraph within 10
days after Landlord gives notice of the violation (provided Landlord will extend
this period so long as cure is possible and Tenant has begun and is diligently
pursuing a cure); (c) knowingly violate the Lease on 3 separate occasions during
any 12 month period; (d) knowingly misrepresent any material fact in any writing
provided to Landlord or pursuant to this Lease; and (f) become insolvent or the
subject of a bankruptcy petition or an assignment for the benefit of creditors.

     B. A Default entitles Landlord to exercise all remedies available under 
law, including the right to re-enter, at its option, the Premises and remove all
persons and property from the Premises. Without limitation, Landlord may, at its
option, instead of exercising any other rights or remedies available to it under
this Lease or otherwise, enter the Premises (if necessary) and perform such acts
or spend such sums of money as may be reasonably necessary to cure any Default 
by Tenant, and the cost incurred, including reasonable attorney's fees, in 
curing the Default shall be paid by Tenant, as additional rent, within 10 days 
after receipt of Landlord's invoice.

     C. Should Landlord elect to re-enter the Premises, as herein provided, or 
should it take possession of the Premises pursuant to legal proceedings or 
pursuant to any notice provided for by law, it may either terminate this Lease 
or it may from time to time, without terminating this Lease, make such 
alterations and repairs as may be necessary in order to relet the Premises, and
relet the Premises or any part thereof for such term or terms (which may be for 
a term extending beyond the term of this Lease) and at such rental or rentals 
and upon such other terms and conditions as Landlord in its sole discretion may 
deem advisable. Upon each such reletting all rentals received by the Landlord 
from such reletting shall be applied first to the payment of any indebtedness 
other than rent due hereunder from Tenant to Landlord; second, to the payment of
any costs and expenses of such reletting, including brokerage fees and 
attorney's fees and of costs of such alterations and repairs; third, to all rent
accrued and due hereunder from Tenant; and fourth, to a fund to be held by 
Landlord and applied in payment

                                     -13-


                                     -101-
<PAGE>
 

of future rent as the same may become due and payable from Tenant hereunder. Any
surplus remaining upon termination of this Lease shall belong to Landlord. If
such rentals received from such reletting during any month be less than that to
be paid during that month by Tenant hereunder, Tenant, upon demand, shall pay
any such deficiency to Landlord. No such re-entry or taking possession of the
Premises by Landlord, or reletting, or any other act or omission, shall be 
construed as an election on its part to terminate this Lease unless a written
notice of such intention be given to Tenant. Notwithstanding any such reletting
without termination, Landlord may at any time after such re-entry elect to 
terminate this Lease for such previous breach.

     D.  In addition to its other remedies available because of Tenant's
Default, Landlord may elect, by giving written notice, to accelerate unaccrued
Base and Additional Rent and hold Tenant immediately liable for the present
value (using a 6% per annum time-value of money component) of the sum of all
Base and Additional Rent payable during the remainder of the Term. For purposes
of this provision, accelerated Additional Rent shall be deemed fixed for each
month of the remainder of the Term in the same estimated amount as had been due
monthly at the time Landlord gives notice of the acceleration. If Landlord
exercises its rights under this paragraph D., Landlord will not thereafter 
terminate the Lease but rather will credit against Tenant's obligation under
this paragraph any rentals, net of the expenses of reletting, it collects from
re-letting the Premises with respect to the remainder of the Term; provided,
however, that Landlord may terminate the Lease after accelerating the rent if it
also waives any right to claim rent on an accelerated basis and limits its
remedies to those available under the other paragraphs of this Article.
Notwithstanding anything in this Article to the contrary, Landlord waives any
legal right to dispossess Tenant by reason of a Default under clauses (a) or (b)
of paragraph A., above, if Tenant cures the Default prior to the issuance of an
order for a writ of restitution or similar order by a court of competent 
jurisdiction.

     E.  Should Landlord at any time terminate this Lease for any such Default,
in addition to any other remedies it may have, it may recover from Tenant all
damages it may incur by reason of such breach, including the worth at the time
of such termination of the excess, if any, of the amount of rent and changes 
equivalent to rent (discounted to present value using a 6% value of money
discount factor) reserved in this Lease for the remainder of the stated term
over the then reasonable rental value of the Premises for the remainder of the
stated term, all of which amounts shall be immediately due and payable from
Tenant to Landlord.

     F.  All expenses, including, without limitation, attorneys' fees, broker's
fees, and retro-fit expense, incurred by Landlord by reason of Tenant's breach,
whether or not the breach results in the commencement of legal proceedings or
involves termination

                                     -14-


                                     -102-
<PAGE>  
 
of the Lease, shall be chargeable to Tenant as Additional Rent and payable 
within 30 days after Landlord invoices Tenant therefor.

     G. No remedy of Landlord's shall be deemed exclusive except insofar as it 
may be such by operation of law. To the extent the law allows, Landlord's 
remedies shall be cumulative and exercisable from time to time and as often as 
Landlord desires.

     22. Rent Due Absolutely. Tenant's obligations to pay Base and Additional
         ____________________
Rent are independent of any other provision of this Lease and such Rent shall
be due irrespective of any claim of setoff. All Rent due under this Lease from
Tenant to Landlord shall be due at the times specified herein, provided,
however, that if Additional Rent payable hereunder is increased, the amount of
the increase shall be due on the 30th day following receipt of mailed notice of
the increase or when the increase would otherwise be payable, whichever is
later. Any monies due under this Lease other than Rent shall be due on the 30th
day following receipt of a written invoice for the same. All such Rent or other
monies, unless otherwise specified, if not paid when due, shall bear interest at
the rate of 18% per annum or the maximum rate permitted by law, whichever is
less. Any monies, Rent or otherwise, not paid within 10 days of when first due
shall be subject to a $50.00 late fee to cover Landlord's costs of monitoring
the delinquency.

     23. Right of Entry. Landlord and Landlord's agents and employees have the 
         _______________
right to enter the Premises at all reasonable times with reasonable prior notice
to show premises to parties wishing to purchase, lease, or lend against the 
Building; to make repairs, alterations, and improvements; to inspect the 
Premises to assess Tenant's compliance with the Lease; to post notices of 
non-responsibility under Minnesota law with respect to any work on the Premises 
subject to the Minnesota mechanic's lien statute; and for any other reasonable 
purpose. Notwithstanding the foregoing, Landlord may enter the Premises at any 
time in cases of emergency. Any entry for the purpose of showing the Premises to
prospective tenants shall be confined to the last six months of the Term.  

     24. Assignment and Subletting. Tenant may assign, sublet, or otherwise 
         __________________________
transfer any of its rights under this Lease only with Landlord's prior written 
consent, which consent will not be unreasonably withheld, except that Tenant may
assign its rights, without Landlord's consent, to any entity in which Tenant or 
any wholly owned subsidiary owns more than 50% of the outstanding ownership 
interests. Once Landlord receives Tenant's written notice, requesting such 
consent in the case of a bona fide prospective transferee, Landlord shall have 
30 days to notify Tenant in writing of Landlord's refusal to give consent and 
the reasons for that refusal; Landlord's failure to give such notice within 
those 30 days shall be deemed Landlord's consent to the proposed transfer. 
Tenant agrees that it shall be deemed 

                                     -15-


                                     -103-
<PAGE>


reasonable for Landlord to refuse to consent to any transfer to a tenant whose
net worth or creditworthiness does not satisfy Landlord's standards for leasing
to new tenants of the Building, or to refuse consent so long as Tenant is in
default or delinquent in respect to any obligation under this Lease. Tenant
further agrees that there may be other reasons why consent should be denied in
given instances. Absent an express release signed by Landlord, no assignment,
subleasing, or transfer, even if made with Landlord's consent, shall be
construed to relieve Tenant from any of its accrued or unaccrued obligations
under the Lease. Landlord's right to assign the Lease is unqualified, it being
understood, however, that Landlord's right to assign the Lease is not a right to
terminate it at will. 

     25. Subordination, Attornment, Novation. Tenant agrees to subordinate this
         ____________________________________
Lease to any mortgage now or hereafter placed of record, to attorn to any
successor in interest of Landlord (including the mortgagee under any such
mortgage upon foreclosure or a transfer in lieu of foreclosure of any such
mortgage), and to consent to a novation in the event Landlord conveys the Parcel
to a third party, provided, however, that the mortgagee, successor, or third
party agrees that, upon obtaining or succeeding to Landlord's interest, it will
keep this Lease in effect and abide by its terms until such time as it may be
terminated in accordance with its provisions. Tenant shall, within ten (10)
business days after receiving Landlord's request, execute and deliver to
Landlord an "estoppel certificate," in reasonable form, certifying that this
Lease is in full force and effect, and that there are no offsets against rent
nor defenses to Tenant's performance under this Lease, or setting forth any such
offsets or defenses claimed by Tenant, as the case may be, and certifying such
other information as may be reasonably requested.

     26. Notices. Any notice required or permitted under this Lease shall be 
         ________
deemed sufficiently given if sent by registered or certified return receipt 
mail, postage prepaid, to Tenant at FSI International, Inc., 322 Lake Hazeltine 
Drive, Chaska, Minnesota 55318-1096, and to Landlord at Skyline Builders, Inc., 
3647 McKinley St. N.E., Minneapolis 55418, attn: Roland Stinski. Either party 
may by like written notice at any time designate a different address to which 
notices shall subsequently be sent or rent be paid. Notices so mailed will be 
deemed given as of the postmarked receipt date. Notices sent by any other means 
will be deemed given only upon actual receipt. Rent will be paid to Landlord at 
the address then applicable for notices and will be deemed tendered at the time
of actual receipt unless directed to Landlord as provided above for mailed 
notices, in which case the postmarked receipt date will be deemed the date of 
such tender.

     27. Representations. Tenant acknowledges that, except as expressly set 
         ________________
forth in this Lease, Landlord has made no representations, promises, or 
warranties regarding the Premises, Building, Parcel, or this Lease.

                                     -16-


                                     -104-
<PAGE>
 

     28.  Security Deposit.  Upon signing this Lease, Tenant will deposit
          _________________ 
$36,696 with Landlord as a Security Deposit. In the event Landlord resorts to
the Security Deposit, Tenant will replenish it on demand. The principal amount
of the Security Deposit shall bear interest, payable at the time this Lease
expires or terminates and Landlord will then be obligated to return the unused
portion of the Security Deposit, together with interest accruing at the rate of
4% per annum on the principal balance from time to time. The Security Deposit
may be commingled with Landlord's other funds. The Security Deposit will remain
constant, at this amount, throughout the Initial Term and Renewal.

     29.  Non-Waiver.  Acceptance of Rent following a Default by Tenant, known
          ___________
or unknown to Landlord, monetary or non-monetary, shall in all cases be deemed a
matter of mitigating damages and not a waiver of such Default. Forbearance for
any length of time shall not be deemed a waiver by Landlord. Landlord's rights
can be waived only by a written express waiver. No other act, statement, or
omission of any kind by Landlord shall be deemed to be a waiver of Landlord's
rights.

     30.  Savings Clause.  Whenever this Lease grants a party a right to do
          _______________
something, that party has the option but not the obligation to exercise that
right. The unenforceability of any provision in this Lease shall not render the
Lease unenforceable as a whole. Any indemnity provisions (which term includes
defense and hold harmless agreements) and any provisions addressing the parties'
obligations upon expiration or termination of the Term shall survive the
expiration or termination of the Term.

     31.  Subdivision.  Landlord may subdivide the Parcel at any time. If
          ____________
Landlord subdivides the Parcel, then from and after the effective date of the
subdivision, the term "Parcel" shall automatically mean just the legal parcel or
those legal parcels, created by the subdivision, containing the Building and any
parking lot used by Tenant or available for use by any other tenant of the
Building.

     32.  Brokerage Commission.  Tobin Real Estate Company has represented
          _____________________
Tenant in connection with this Lease. Landlord will pay a brokerage commission
to Tobin Real Estate Company, on the Commencement Date if this Lease has not
been cancelled pursuant to Article 2, equal to one-half the commission
calculated based on the standard 7-6-5-4-3 percent formula. Tenant will
indemnify Landlord against any claim by Tobin Real Estate Company in excess of
the obligation assumed by Landlord in the previous sentence.

     33.  Miscellaneous.  This Lease contains all agreements of the parties
          ______________
pertaining to the Premises or the leasehold contemplated herein. Each party
shall be deemed to have drafted

                                     -17-


                                     -105-
<PAGE>
 

this Lease ad the Lease shall not be construed against one party or the other
on the premise that one or the other is responsible or more responsible for
the drafting.

     34.  Successors and Assigns.  This Lease shall apply to, inure to the
          _______________________
benefit of, and be binding upon the Landlord and Tenant and upon their
respective successors in interest and assigns.

     35.  Rider.  This Lease is subject to a single rider, attached hereto and
          ______
incorporated by reference into this Lease.

     IN TESTIMONY WHEREOF, the parties hereto have signed this Lease the day and
year first written below.



LANDLORD:                              TENANT:

SKYLINE BUILDERS, INC.                 FSI INTERNATIONAL, INC.
                        
                        
By:  /s/ R. A. Stinski                 By: /s/ J.W. Stewart
   --------------------                   -----------------------------
Its:  President                        Its:  Vice President, Operations
    -------------------                    ----------------------------
Dated:  8/9/95                         Dated:  8/9/95
      -----------------                      --------------------------


                                     -18-


                                     -106-

<PAGE>
 
                                                                 EXHIBIT 10.31


                                  LEASE RIDER

     Skyline Builders, as Landlord, and FSI International, Inc., as Tenant, 
hereby agree that, notwithstanding anything to the contrary in their Lease 
pertaining to 312 Lake Hazeltine Drive, Chaska, Minnesota, the following 
provisions shall apply to the Lease and shall be deemed to control and override 
any conflicting provision in the Lease. The numbering of the various provisions 
below corresponds to the Article or paragraph that provision supplements or 
amends.

     4. If Tenant exercises its option, the Lease will continue in effect during
the Renewal Term, subject to the same terms and conditions as set forth herein
(provided, however, that Tenant will have no further option to renew and will
pay Base Rent in the amount prescribed in the Lease with respect to the Renewal
Term, not the Initial Term).

     5.1 Landlord further warrants that (i) the Parcel, the Building and the 
Premises on the Commencement Date will comply with all laws, ordinances and 
other legal requirements for use as office and warehouse space, and (ii) as of 
the date of this Lease, there are no restrictions, covenants or exclusive rights
which would prohibit Tenant from using the Premises as an office, a laboratory, 
or a warehouse and in accordance with this Lease, and Landlord covenants not to 
enter into any such restrictions, covenants or agreements during the Term. 
Notwithstanding the foregoing, Landlord warrants that the Common Areas complies 
with the American Disabilities Act as of the Commencement Date, but makes no 
warranty that the Premises complies with the American Disabilities Act ("ADA"), 
and, except as may be expressly provided for in this Lease, makes no agreement 
to improve the Premises to bring about such compliance. Rather, Tenant will be 
responsible for improving the Premises (other than the Common Areas), at 
Tenant's expense, to comply with the ADA. Landlord will provide Tenant with a 
copy of the plans and specifications for the passenger elevator once Landlord 
obtains them.

     7D (continued from main lease). To the extent any taxes and/or assessments 
may be payable over a period of time, Landlord shall pay such taxes and/or 
assessments in equal installments over the longest time permitted by appropriate
taxing authorities. Notwithstanding anything to the contrary herein, taxes and 
assessments payable by Tenant under this Lease shall not include (a) taxes, 
assessments and the like not accruing during the Term; (b) federal, state, or 
local income (except as expressly permitted below) taxes, (c) franchise (except 
as expressly permitted below), gift, transfer, excise, capital stock, estate, 
succession, or inheritance taxes, (d) penalties or interest on late payment of 
taxes. For purposes of this Lease, ad valorem taxes first due and payable in a 
particular calendar year will be deemed to accrue on a prorated daily basis, 
i.e., 1/365th or 1/366th per day, over the course of that year. For

                                     -107-
<PAGE>
 
purposes of this Lease, notwithstanding anything herein to the contrary, Real 
Estate Taxes will not include ad valorem taxes on the assessed value of any 
structure comprising more than 5,000 square feet of finished interior space, 
hereafter erected on the Parcel, except structures constituting common area or 
structures used primarily to service the Building.

     7J. Notwithstanding anything contained in the Lease, the following shall be
excluded from amounts payable by Tenant under this Lease, including without 
limitation, Operating Expenses:

     (i) Attorney's fees, costs and disbursements and other expenses incurred in
connection with negotiations or disputes with tenants, other occupants, or 
prospective tenants or occupants of the Building;

     (ii) Costs relating to the breach of any warranty, representation or 
covenant of Landlord under this Lease;

     (iii) Interest on debt or payments on any mortgage, and rental under any 
ground or underlying leases;

     (iv) Depreciation and amortization, except as allowed in Paragraph 7K;

     (v) The cost of leasing air conditioning systems, elevators or other 
equipment, installed within the Parcel, ordinarily considered capital in nature,
except to the extent, in any given calendar year, equal to or less than the cost
Landlord could charge back for that year if Landlord had purchased the item in 
lieu of renting or leasing it.

     (vi) Costs of Landlord's general corporate and/or partnership overhead and 
general administrative expenses (including but not limited to costs paid to 
third parties to collect rents, prepare tax returns and accounting reports and 
obtain financing), which would not be chargeable to operating costs of the 
Building in accordance with generally accepted accounting principles, 
consistently applied (provided, however, that Landlord shall have the right to 
charge the fixed rate management fee described in the Lease);

     (vii) Costs incurred in leasing, advertising for the Building or other 
marketing or promotional activity specifically and primarily designed for 
marketing space in the Building but excluding amenities for the common benefit 
of existing tenants of the Building; and

     (viii) any bad debt expense or bad debt reserve.

     7I. (continued from main lease) Tenant shall have the right to examine 
books and records relating to items referred to in this Article 7 and may 
recover the cost (up to a maximum of $5,000) of an audit of Landlord's year end 
account of the actual

                                      -2-


                                     -108-
<PAGE>
 
total of Real Estate Taxes and Operating Expenses with respect to any given 
calendar year, should such audit establish to the satisfaction of Landlord (or, 
in case of dispute, any court of competent jurisdiction) that the actual total 
of Real Estate Taxes and Operating Expenses was less than 97% of the total 
reported by Landlord. In any event, Landlord shall refund to Tenant any excess 
amounts of Real Estate Taxes or Operating Expenses paid by tenant.

     7K. Notwithstanding anything herein to the contrary, Landlord may treat an 
expenditure, capitalized for purposes of income taxes, as an Operating Expense, 
but in doing so will charge back the expenditure by amortizing it over 10 years,
using a 10% cost of funds rate.

     9. To the extent Landlord actually maintains environmental hazards 
insurance permitting a waiver of subrogation claims, and actually receives the 
proceeds of any insurance policy on account of any use, handling, or release of 
a Hazardous Substance by Tenant or anyone for whom it is legally liable, 
Landlord is waiving the right to hold Tenant accountable under the other 
provisions of Article 9. Landlord makes no warranty that it will maintain any 
such insurance.

     11.1 Without limiting the foregoing, Landlord shall repair and maintain all
Building systems not exclusively serving the Premises, Building structural 
systems, roof, structural walls, subfloors, foundations, elevator, HVAC, 
Building electrical, Building plumbing and exterior walls and glass so as to 
keep the same in good condition and repair and in compliance with all legal 
requirements. Landlord shall maintain the Common Area in a sightly, safe 
condition and in a good state of repair, including, but not limited to, 
maintaining the parking lot and snow and debris removal. To the extent Landlord 
breaches its warranty set forth in the first sentence of Section 5, Landlord, 
not Tenant, shall be solely responsible for making and paying for any repairs 
necessary to cure the breach, and Landlord shall not charge back these repair 
costs as Operating Expenses.

     15F. Landlord shall at all times during the Term maintain comprehensive 
general public liability insurance against claims for death, bodily injury and 
property damage arising on or about the Parcel, naming Tenant as an additional 
insured, under limits of liability not less than $2,000,000 combined coverage 
for injury or death to any one person; $2,000,000 for injury or death to more 
than one person; and $100,000 with respect to damage to property. Landlord shall
defend, indemnify and hold Tenant harmless from any and all claims arising from 
Landlord's business on the Parcel or the conduct of its business or from any 
activity, work, or thing done, permitted or suffered by Landlord on or about the
Parcel, regardless of fault or negligence which is imputed to Tenant as the 
tenant of the Premises but which involves a condition of the Parcel within the 
control of Landlord, its employees, agents, or contractors.

                                      -3-


                                     -109-
<PAGE>


     17C.  The Landlord shall make all repairs to the Premises and the Building 
necessary to render and restore the same to an architectural unit as nearly
like its condition prior to such taking as shall be practicable. In the event
that Landlord is unable to restore the Premises to a condition suitable for the
conduct of Tenant's business, Tenant shall have the right to terminate this 
Lease.

     18A.  "Thirty" percent is changed to "Fifty" percent in the fifth line.

     18B.  Tenant shall have the right to terminate the Lease, on 30 days prior
written notice, if by the 180th day following the casualty, Landlord has neither
(a) restored the Premises so as to make the Premises substantially usable by 
Tenant in the same way Tenant was using the Premises immediately prior to the
casualty, or (b) made available to Tenant other substantially usable space 
within the Building.

     21C.  If Landlord re-enters the Premises, Landlord will make reasonable
efforts to relet them.

     21F.  Tenant shall be liable only for reasonable attorneys' fees.

     24.1.  Without Landlord's consent, Tenant may assign or sublease the 
Premises to any affiliate, subsidiary or parent of Tenant, or to the surviving
corporation or partnership in a statutory merger or reorganization of Tenant, or
to any corporation or partnership which purchases substantially all of the stock
or assets of Tenant, or to any corporation or partnership, the majority voting
stock or interest of which shall be owned by stockholders of Tenant holding a
controlling percentage or more of the voting stock of Tenant.

     25.  Tenant shall have the same right, provided herein to Landlord, to
require Landlord to execute and deliver an estoppel certificate for the benefit
of any actual or prospective lender or assignee of Tenant.

     31.  If Landlord constructs another structure on the Parcel, capable of
being occupied and leased independent of the Building, and Landlord does not
subdivide the Parcel, then, starting in the year in which the ad valorem taxes
reflect the fully assessed value of the new structure, Tenant will have to pay
its Proportionate Share of Real Estate Taxes multiplied by a fraction, the
numerator of which is the same number of leaseable square feet in the Building
used to calculate Proportionate Share, and the denominator of which is the sum
of that number plus the number of leasable square feet in the newly constructed
structure.

                                      -4-


                                     -110-
<PAGE>
 
     32. Landlord will indemnify and hold Tenant harmless against any claim for 
a commission based on the claimant's representation of Landlord in connection 
with this Lease.

     33.1 At the request of either Landlord or Tenant, the other party shall 
promptly execute, acknowledge, deliver and provide in recordable form a 
memorandum of this Lease containing such information as may be reasonably 
requested by such party. Landlord covenants that Tenant shall quietly have and 
enjoy the Premises and appurtenant rights during the Term without disturbance, 
hindrance or molestation. Notwithstanding any provision to the contrary herein, 
Tenant shall not be liable for consequential damages or costs incurred by 
Landlord in bad faith, and Landlord shall not be liable for Tenant's 
consequential damages. If either party hereto fails or refuses to perform or 
observe any provision of this Lease on its part to be performed or observed, the
other party may perform or observe such provision and the party so failing or 
refusing shall immediately pay to the other party an amount equal to the cost of
such performance or observance; provided, however, that Tenant shall have this 
right only after affording Landlord the same notice and opportunity to cure as 
is provided in this Lease in the case of non-monetary defaults by the Tenant. In
the event of dispute between Landlord and Tenant, the non-prevailing party shall
pay reasonable attorneys' fees and disbursements to the prevailing party.

     36. Landlord agrees to promptly modify the Building, such that Tenant has 
free and clear access to the freight elevator, existing as of August 9, 1995, 
and Landlord and Tenant agree to negotiate the size, placement, and other 
particulars of an access area connecting the Premises, as defined in the main 
Lease, and the freight elevator, and a reasonable rate of rent for the space 
occupied by the elevator and (to the extent not Common Area) the access area to 
this elevator. This rate will be based on the following factors: the rental rate
for the remainder of the Premises; any construction costs Landlord will incur in
providing such access; and any impact by the access on the leaseability of the 
Building's space other than the Premises. The square footage of the elevator and
access space (except to the extent Common Area) will be added to and be treated 
as a part of the Premises and the Square Footage, it being understood that 
Exhibit A to the main Lease depicts only the Premises as the Premises exists 
exclusive of this access area and elevator.

                                      -5-


                                     -111-
<PAGE>



     IN TESTIMONY WHEREOF, the parties hereto have signed this Lease the day and
year first written below.


LANDLORD:                              TENANT:

SKYLINE BUILDERS, INC.                 FSI INTERNATIONAL, INC.



By: /s/ R. A. Stinski                  By: /s/ J.W. Stewart
   ----------------------                 ----------------------------
Its: President                         Its: Vice President, Operations
    ---------------------                  ---------------------------
Dated: 8/9/95                          Dated: 8/9/95
      -------------------                    -------------------------



                                      -6-


                                     -112-

<PAGE>
 
                                                                   Exhibit 10.32

                                LEASE AMENDMENT

     The Undersigned amend their Lease pertaining to 312 Lake Hazeltine Drive, 
Chaska, Minnesota, as follows:

     1. The definition of Premises is hereby amended to include the space on
the first floor of the Building, marked by parallel diagonal lines or
crosshatching on attached Exhibits A and B. Exhibit A is a floor plan of part of
the Building, showing the freight elevator and surrounding areas. Exhibit B is a
floor plan of another part of the Building, showing a stairwell leading from the
first floor to the north end of the mezzanine. Tenant shall have the exclusive
use of the area marked by parallel diagonal lines on Exhibit A (subject,
however, to Landlord's right to use and access this space for mechanical room
purposes, consistent with the terms of the Lease), the non-exclusive use of the
area marked by crosshatching on Exhibit A, and the exclusive use of the area
marked by parallel diagonal lines on Exhibit B.

     2. For purposes of calculating Base Rent and Additional Rent, Tenant shall
be deemed to be leasing 50% of the square footage marked by cross hatching.
Tenant will pay Base Rent and Additional Rent on the Premises as expanded herein
at the same time and based on the same rates as apply to the 125,800 Premises as
initially defined in the Main Lease (subject to the qualification that Tenant is
deemed, for rent purposes, to be Leasing only 50% of the square footage marked
by crosshatching). For example, Base Rent accrues during the Initial Term at the
annual rate of $3.50/s.f.

     3. For such rent purposes, the Premises, as amended, shall be deemed to
contain 126,008 square feet, this being the sum of the square footage for the
mezzanine space above the existing office space (13,570), the main floor office
and warehouse space (64,478), the portion of Exhibit A marked by parallel
diagonal lines (1,874.5), the portion of Exhibit A marked by crosshatching
(503.5, being 50% of the total square footage of such portion), the middle
mezzanine space (45,100), and the space marked by parallel diagonal lines on
Exhibit B (482). The foregoing square footage figures are those the parties
agreed on after having an architect measure, at Landlord's expense, the
aforementioned component spaces comprising the Premises as expanded herein.

     4. This Agreement, as it pertains to Exhibit A, memorializes the agreement
contemplated in Section 36 of the Rider to the Lease, but does not alter
Landlord's obligation under that section to modify the Building, except that it
expands that obligation to include modifications to the additional stairwell
described in Exhibit B.




                                     -113-
<PAGE>
 
     5. Section 6G of the Main Lease is deleted in its entirety and replaced
with the following: "The term "Rent Start Date" means the earlier of (a) October
25, 1995 or (b) the date on which any of Tenant's employees or agents first use
any of the Premises as office space."

     6. Tenant and Landlord waive any right to cancel the Lease arising from the
Commencement Date not occurring on or before September 1, 1995.

     7. This Agreement may be executed in counterparts and all counterparts
shall be deemed part of a single instrument.

ROLAND A. STINSKI (AS ASSIGNEE OF      FSI INTERNATIONAL, INC.
SKYLINE BUILDERS, INC.)                (TENANT)
(LANDLORD)      


By:  /s/ R. A. Stinski                 By:  /s/ J. Wayne Stewart  
   --------------------------              -----------------------------
Its:                                   Its:  Vice President, Operations
    -------------------------              -----------------------------
Dated:       11/14/95                  Dated:       11/15/95
      -----------------------                ---------------------------

                                      -2-



                                     -114-

<PAGE>

<TABLE> 
<CAPTION> 
                                                                    Exhibit 11.1
                                                                 ------------------

                          FSI INTERNATIONAL, INC.                                    
                                                                        
                    COMPUTATION OF INCOME PER COMMON SHARE


                                                               FISCAL YEAR ENDED:
                                             ----------------------------------------------------------
                                                AUGUST 26, 1995     AUGUST 27, 1994     AUGUST 28, 1993    
                                             ----------------------------------------------------------
<S>                                          <C>                    <C>                 <C> 
PRIMARY:                                                                                            
                                                                                                    
AVERAGE SHARES OUTSTANDING                           15,682,934          12,284,184           9,900,564   
                                                                                                    
NET EFFECT OF DILUTIVE STOCK                                                                        
 OPTIONS AND WARRANTS -- BASED ON                                                                   
 THE TREASURY STOCK METHOD                            1,288,266             938,224             657,082   
                                             ------------------     ----------------    --------------- 
                                                                                                    
TOTAL                                                16,971,200          13,222,408          10,557,646   
                                             ==================     ===============     =============== 
                                                                                                    
NET INCOME                                          $19,285,684          $5,646,134          $2,957,955   
                                             ==================     ===============     =============== 
                                                                                                    
PRIMARY PER SHARE AMOUNTS                                 $1.14               $0.43               $0.28   
                                             ==================     ===============     =============== 
                                                                                                    
FULLY DILUTED:                                                                                      
                                                                                                    
AVERAGE SHARES OUTSTANDING                           15,682,934          12,284,184           9,900,564   
                                                                                                    
NET EFFECT OF DILUTIVE STOCK                                                                        
 OPTIONS AND WARRANTS -- BASED ON                                                                   
 THE TREASURY STOCK METHOD                            1,387,614           1,001,106             760,332   
                                             ------------------     ----------------    --------------- 
TOTAL                                                17,070,548          13,285,290          10,660,896   
                                             ==================     ===============     =============== 
NET INCOME                                          $19,285,684          $5,646,134          $2,957,955   
                                             ==================     ===============     =============== 
FULLY DILUTED PER SHARE AMOUNTS                           $1.13               $0.43               $0.28   
                                             ==================     ===============     =============== 




</TABLE>



                                     -115-

<PAGE>

                                                                    Exhibit 13.0


                                                              FSI International
                                                              1995 Annual Report











                                    [PHOTO]












                                     -116-
<PAGE>
 
HIGHLIGHTS


Sales increased 97 percent to $190.4 million, while net income 
more than tripled to $19.3 million in fiscal 1995.

Two secondary stock offerings provided more than $100 mil-
lion in funds for investments in future growth.

The Company declared a two-for-one common stock split
in June.

FSI acquired Applied Chemical Solutions and established a 
European manufacturing capability with an investment in FSI
Metron Europe, Limited, which is intended to increase market
share and product offerings.

A new cleanroom manufacturing facility, built to provide the
capacity required to meet customer demand, was opened in 
November 1995.

FSI had three products chosen in the same year for Semicon-
ductor International's 1994 Editors' Choice Best Product Award.

Texas Instruments presented its Supplier Excellence Award to
FSI. This is the fifth time FSI has received this recognition.

ISO 9001 Certification was achieved, a tangible outcome of FSI's
commitment to quality.


Company Description

FSI International, Inc. (Nasdaq: FSII) is a worldwide leader in producing 
automated equipment used by semiconductor manufacturers for processing silicon 
wafers. The Company is focused on three key technologies:

Microlithography Clusters--a modular, self-contained cluster, with a central 
robotic handler, that applies and develops photosensitive materials on a silicon
wafer's surface.

Surface Conditioning Products--systems used for preparing silicon wafers for 
the production of  integrated circuits. During processing, the systems are used 
to perform cleaning, etching and photoresist stripping applications.

Chemical Management Systems--products for controlled blending, mixing and safe 
distribution of chemicals throughout a semiconductor manufacturing facility.

Many of the world's largest semiconductor manufacturers rely on FSI's technology
and expertise to help them improve their manufacturing processes and lower their
costs. The Company works directly with its customers to develop long-term,
strategic technology and quality road maps with the goal of achieving 100
percent customer satisfaction.







                                     -117-
<PAGE>
 
FINANCIAL HIGHLIGHTS

<TABLE> 
<CAPTION> 
                                                                 Fiscal years ended August
                                                             ---------------------------------- 
(in thousands, except per share data)/1/,/2/                     1995         1994         1993
- -----------------------------------------------------------------------------------------------
<S>                                                          <C>           <C>          <C> 
Sales                                                        $190,403      $96,437      $78,432
Net income                                                     19,286        5,646        2,958
Net income per common share                                      1.13          .43          .28
Research and development expenses                              24,865       15,743       11,760 
Cash, cash equivalents and marketable securities              111,203       10,725          782
Working capital                                               146,130       27,778       13,421
Total assets                                                  233,841       69,357       41,369
Stockholders' equity                                          178,210       42,367       21,589
Book value per share                                             8.80         3.22         2.23
Number of shares outstanding                                   20,261       13,166        9,686
- -----------------------------------------------------------------------------------------------
/1/ All amounts have been adjusted to reflect the acquisition, effective March 8, 1995 of Applied 
Chemical Solutions, which acquisition was accounted for using the pooling-of-interests method of
accounting. See Note 2 of Notes to Consolidated Financial Statements.

/2/ Share information and per share information have been adjusted for a two-for-one common stock 
split. See Note 19 of Notes to Consolidated Financial Statements.
</TABLE> 

[BAR GRAPH]

Backlog
(in millions)
- --------------
$24  $77  $115
- --------------
 93   94   95
- --------------
[BAR GRAPH]

Working Capital
(in millions)
- --------------
$13  $28  $146
- --------------
 93   94   95
- --------------


[BAR GRAPH]

Book Value
Per Share
- -------------------
$2.23  $3.22  $8.80
- -------------------
  93     94     95
- -------------------


                                                         FSI INTERNATIONAL  |  1




                                     -118-
<PAGE>
 
TO OUR SHAREHOLDERS AND EMPLOYEES

Fiscal 1995 was a highly rewarding year for FSI and our investors. Past 
investments and our focus on the customer were rewarded with a 97 percent
increase in sales, while net income more than tripled.

    Sales for the year ended August 26, 1995, totaled $190.4 million, compared
with $96.4 million in fiscal 1994, thanks to strong growth and market share
gains in all three of our divisions, coupled with an acquisition and a joint
venture. Net income rose to $19.3 million from $5.6 million. Net income per
share for fiscal 1995 was $1.13 versus $.43 in fiscal 1994. The per share
amounts reflect several events during 1995 that resulted in an increase in the
number of shares outstanding: the secondary stock offerings completed in
February and July, a two-for-one stock split in June and the acquisition of
Applied Chemical solutions (ACS) in March. We ended the year in very good
standing with our largest order backlog ever, which increased from $77 million
at the end of fiscal 1994 to $115 million.

    FSI continued to receive recognition from customers and the industry for 
our product and service excellence, evidenced by several awards from long-time
customers and a key industry publication. This recognition is the result of our
employees' dedication to FSI and our customers.

    FSI's strong financial position, together with explosive growth in our 
industry, puts us in an advantageous position. Our challenge now is to 
strategically grow the Company while carefully managing human resources, new 
product development programs, our manufacturing capacity ramp-up and operating 
systems upgrades as we become a larger company.

GAINING MARKET SHARE

Industry analysts predict that the semiconductor device industry will grow from
an estimated $150 billion in 1995 to $300 billion by the year 2000. For this to
happen, our customers must add manufacturing capacity to meet the increasing
demand for semiconductor devices used in computers, telecommunications,
automobiles and other consumer electronics.

[BAR GRAPH]

Integrated Circuit Demand (in billions of dollars)

- ---------------------------------------------------------------------

65.2 85.5 110.6 122.8 149.8 135.0 182.9 150.4 210.4 171.0 238.6 275.7

- ---------------------------------------------------------------------
92A  93A  94A       95E         96E         97E         98E      99E

- ---------------------------------------------------------------------

_Dataquest October 1994 Forecast _Dataquest September 1995 Forecast

- ---------------------------------------------------------------------
Accelerating demand has caused Dataquest to revise its growth projections
upward for semiconductor manufacturing equipment demand.

    To meet our customers' needs, FSI must add both manufacturing capacity and 
product development capability to satisfy the demand for our products that play 
vital roles in semiconductor manufacturing.

    It is our goal to continue to capture market share as the industry expands
at a very rapid pace. We intend to accomplish this by investing in our
technology infrastructure and in skilled people and by expanding our worldwide
distribution and support capabilities.

    To advance our technological edge, FSI continues to invest in engineering,
research and development at an aggressive rate relative to the industry. This
allows us to continually build upon our existing technology by enhancing our
current product lines with applications that deliver greater value to customers.
Further, to broaden our process solutions, a portion of the proceeds from the
two stock offerings in fiscal 1995 is targeted for strategic acquisitions of
businesses, products or technologies that complement our existing offerings. In
fiscal 1995, we made such investments in the Chemical Management division, via
an acquisition and a joint venture, and in the Surface Conditioning business,
through the licensing of new technology.

    During the year, we also invested heavily in our people, concentrating on 
the areas that add the greatest value for ensur-

2  |  FSI INTERNATIONAL


                                     -119-
<PAGE>

 


 
                                    [photo]






                   Joel Elftmann conducts a semiconductor
                   industry overview for new FSI employees.


ing customer satisfaction. In addition to hiring approximately 300 new
employees, we increased our investment in training to keep our people current in
their skills and on topics important to our success, including the semiconductor
industry, improved or enhanced manufacturing processes and Total Quality
Management. We continue to add personnel throughout the world with the technical
skills to deliver on our goal of 100 percent customer satisfaction.


EXPANDING OUR GLOBAL PRESENCE

[graph]
                           ------------------------
                              International Sales
                           (percent of total sales)
                           ------------------------
                              34%     33%     37%
                           ------------------------    
                              93      94      95
                           ------------------------

Because we envisioned significant opportunities in Europe and Asia, FSI took
steps in fiscal 1995 to expand our presence in these markets. International
sales increased to 37 percent of revenues during the year. Our goal is to have
international sales represent approximately 50 percent of total sales.

     Europe has enjoyed a resurgence of growth in recent years and industry
forecasts show continued strength through the end of the decade. Our focus will
be on maintaining momentum in that region by strengthening our support of our
newly consolidated 38-percent-owned affiliate, Metron Technology B.V.

     During fiscal 1995, the Surface Conditioning division experienced strong
order growth in Japan, a difficult market for U.S. manufacturers to penetrate.
We recently received orders for more than 20 MERCURY MP(R) Spray Processing
Systems from m.FSI Ltd., our joint venture in Japan. We are enjoying similar
success in other emerging semiconductor markets in the Far East, including South
Korea, Singapore and Taiwan.


LOOKING AHEAD

As I said in the beginning of this letter, fiscal 1995 was a highly rewarding 
year. It will be a challenge to repeat this growth in fiscal 1996. However, we 
can expect another strong year if we remain focused on each of the following:

 . Keeping customer satisfaction as the ultimate goal;

 . Strategically managing the Company's growth;

 . Aggressively taking advantage of opportunities to gain market share;

 . Continuing our conservative approach to cost control;

 . Building upon our technical leadership; and

 . Effectively bringing our new manufacturing facility on-line.

I look forward to these challenges and thank you for your on-going support.

Sincerely,

/s/ J A Elftmann

Joel A. Elftmann
Chairman, President and Chief Executive Officer
November 13, 1995
 


                                                         FSI INTERNATIONAL  |  3


                                     -120-
<PAGE>
 
Product Overview

<TABLE> 
<CAPTION> 

Division                               Description                                  Major Product(s)
- -------------------------------------------------------------------------------------------------------------------------------
<S>                                    <C>                                            <C> 
SURFACE CONDITIONING                   Surface conditioning products are              MERCURY MP Processors
- --------------------------------       utilized to prepare the surface of the         MERCURY OC Spray Processors
                                       integrated circuit for subsequent pro-         EXCALIBUR ISR Vapor
           [PHOTO]                     cessing. Products include MERCURY(R)           Phase Processors
                                       spray processors that use a sequenced          EXCALIBUR MVP Vapor
                                       spray of chemicals to perform submi-           Phase Processors
                                       cron cleaning, etching and photore-            EXCALIBUR EOS Vapor
                                       sist stripping applications, and               Phase Processors
                                       EXCALIBUR(R) vapor phase processors
                                       used for critical cleaning and
                                       specialty etching applications.
                                       (pictured: EXCALIBUR MVP)

- -------------------------------------------------------------------------------------------------------------------------------
MICROLITHOGRAPHY                       Microlithography clusters apply and            POLARIS 2000 Cluster
- --------------------------------       develop photosensitive materials
                                       on the silicon wafer surface. The
           [PHOTO]                     POLARIS(R) modular, self-contained
                                       cluster uses a reliable central robotic
                                       handler to move silicon wafers from 
                                       station to station where prime, coat,
                                       bake and develop processes are
                                       performed. (pictured: POLARIS 2000)

- -------------------------------------------------------------------------------------------------------------------------------
CHEMICAL MANAGEMENT                    Chemical management systems,                   ChemFill 500, 1000, 5000
- --------------------------------       marketed under the names ChemFill(R)           ChemBlend 100
                                       and ChemBlend(TM) products are used for        Developer Blending Systems (DBS)
           [PHOTO]                     generation, controlled conditioning,           500, 1500, 3000
                                       blending and distribution of chemicals         Applied Chemical Solutions (ACS)
                                       throughout a semiconductor manufac-            products P2200, P4400, VP1000,
                                       turing facility. (pictured: ChemFill           VP4500
                                       1000 PC)
</TABLE> 


                                     -121-
<PAGE>
 
<TABLE> 
<CAPTION> 

     PERCENTAGE OF SALES*          Technology Highlights                          1995 Business Highlights
- -------------------------------------------------------------------------------------------------------------------------------
<S>                                    <C>                                            <C> 
           31%                         ICE/TM/--FSI Licensed IBM's                    Another year of solid financial
                                       cryogenic aerosol cleaning                     performance, with revenue
                                       technology.                                    increasing from $28 million
                                       ORION/TM/--FSI demonstrated                    to $60 million.
         [CHART]                       key gas-phase applications in                  EXCALIBUR ISR Vapor Processing
                                       a successful research program                  System and MERCURY MP Spray
                                       funded by NIST (National Institute             Processing System were among
                                       of Standards and Technology).                  three FSI products winning
                                                                                      Semiconductor International's
                                                                                      prestigious Best Product Award.

- -------------------------------------------------------------------------------------------------------------------------------
           32%                        .Robotics--A new high capacity                  Increased revenues by 87 percent,
                                       feature adds a wider range of                  from $33 million to $61 million.
                                       motion allowing greater flexibility            Received several multi-system,
                                       and increased productivity.                    multi-million dollar orders.
                                                                                      Ramped up manufacturing
         [CHART]                                                                      capability.
                                                                                      Expanded customer base worldwide.
                                                                                      The POLARIS 2000 also won
                                                                                      Semiconductor International's
                                                                                      Best Product Award.

- -------------------------------------------------------------------------------------------------------------------------------
           24%                         Slurry--The proprietary technology             Revenues up 157 percent
                                       from ACS is ideally suited to                  to $45 million.
                                       deliver slurry for the rapidly                 Applied Chemical Solutions
                                       expanding chemical-mechanical                  acquisition dramatically
         [CHART]                       planarization (CMP) application                broadened the product line.
                                       market.                                        Entered FSI Metron Europe,
                                                                                      Limited, joint venture to provide
                                                                                      European manufacturing capability
                                                                                      and program management.

* Approximately 13 percent of 
sales consists of spare parts         See Glossary of Industry Terms on page 33.
and services 
</TABLE> 


                                     -122-
<PAGE>


REVIEW OF OPERATIONS

Three words characterize fiscal 1995 for FSI: growth, technology and support. 
Our past successes allowed FSI to make strategic investments in these areas in 
order to maintain a leadership position in our industry.

LAYING THE GROUNDWORK

During a highly successful year like fiscal 1995, filling customer orders and 
maintaining customer satisfaction is a challenge.  The accelerated pace of our 
growth made it all the more important that we keep sight of our long-term goals.

     Our customers assume that we have a long-term perspective of their future. 
They expect us to take a leadership role in helping them succeed.  During the
year, FSI took steps toward putting in place the necessary infrastructure for us
to grow in anticipation of our customers' needs.

     To increase our production capacity, the Company constructed a new 
100,000-square-foot manufacturing facility near our headquarters in Chaska, 
Minnesota.  The facility, which started production in November 1995, adds 
approximately 45,000 square feet of Class 1000 cleanroom manufacturing space.  
With an eye on the future, this facility is designed to Class 100 upon customer 
request, which is the next level of purity that will be required for future 
product generations.

     Closely tied to manufacturing capacity is our computer systems capability. 
FSI initiated a company-wide overhaul of our information technology systems in 
fiscal 1994, called "Project Enterprise."  Fiscal 1995 was a major investment 
year for that effort.  This long-term effort is in the beginning stages of 
implementation and will continue to be a significant investment in fiscal 1996 
and 1997.

     Project Enterprise encompasses all operations of the Company; design 
engineering, communications, manufacturing and information reporting.  To date, 
FSI has installed new communication systems and new computer-aided design (CAD) 
tools.  The new communications systems make it easier for customers and 
suppliers to do business with FSI.  CAD tools allow our developers to take 
advantage of advanced design techniques, such as three-dimensional modeling of 
products--accelerating the design phase while lowering costs.



STAYING AHEAD OF THE TECHNOLOGY CURVE

Surface Conditioning

Customers are looking for technology that will allow them to meet their demands 
for reliability today and versatility for tomorrow.  Continuing our direction in
developing advanced products for wet, vapor and dry process technologies, FSI 
made significant progress with our existing product line offerings--adding new 
customers and expanding the applications of our current products of single wafer
systems and batch systems.  For example, our latest generation of single wafer 
technology now offers superior flexibility in process applications and tool 
integrations.


________________________________________________________________________________
|                                                                              |
|       During the year, FSI made progress in establishing the necessary       |
|    infrastructure to support its growth.  New computer-aided design tools    |
|    enable FSI engineer, Natarj Narayanswami, to perform three-dimensional    |
|   modeling of product designs "on-screen" instead of going through costly    |
|     physical modeling iterations.  Ultimately it means FSI can bring new     |
|  products to market in less time and at a lower cost.  A new manufacturing   |
|   facility in Chaska, Minnesota, provides added capacity for FSI to grow.    |
|     It adds manufacturing space, a parts warehouse and training center.      |
|______________________________________________________________________________|



6  |  FSI INTERNATIONAL
 

                                     -123-
<PAGE>




 
                                    [PHOTO]




 

                                  G R O W T H






 
                 [PHOTO]                                [PHOTO]








                            Plans for Future Growth
                            -----------------------

                 Blueprints for FSI's new 100,000-square-foot
                            manufacturing facility

                                     -124-
<PAGE>
 
   In the area of gas-phase technology, FSI participated in a successful 
research program funded by the National Institute of Standards and Technology 
(NIST). During this program, we qualified a number of process applications for 
the new ORION(TM) system and will deliver the first beta system next year.

   We also seized the opportunity to enter an exciting new technological area
for surface conditioning--cryogenic aerosol cleaning. This new technology, which
we licensed from IBM in August, uses frozen ice particles formed by inert gases
to dislodge contaminants or residue particles from a silicon wafer's surface.
Licensing this promising, environmentally sound technology will allow us to
enter the market sooner; we expect to have our new ICE(TM) Processing System
commercially available in the second half of 1996.

   Going forward, the Surface Conditioning division is committing significant 
resources to broadening our process application technologies in all areas, 
especially in the areas of vapor and dry technologies.

MICROLITHOGRAPHY

After successfully introducing the next generation POLARIS(R) system--the
POLARIS 2000 Cluster--near the close of fiscal 1994, the Microlithography
division's focus has been on fulfilling our customer commitments for the new
system.

   During the year, FSI received several multi-system, multi-million-dollar 
orders and has made good progress toward our goal of expanding our customer base
worldwide.

   The Microlithography division increased the technological leadership of the 
POLARIS 2000 with its higher throughput and enhanced productivity. For example, 
a new high capacity feature allows the robotic handler to move horizontally 
within the cluster and therefore access more modules in a single cluster.

   We also successfully positioned the POLARIS 2000 Cluster tool in both the 
high throughput manufacturing arena and the leading edge high-resolution 
technology area. Because the POLARIS 2000 cluster tool supports both, it is 
especially attractive for customers who require "mix and match" capability in 
their manufacturing lines.

CHEMICAL MANAGEMENT

The Chemical Management division's goal is to be a total chemical management 
solutions supplier. During fiscal 1995, we made significant strides in 
accomplishing this goal.

   Through an acquisition and a joint venture, plus our own internal development
activities, we dramatically broadened the product line and customer base, as 
well as our manufacturing and program management capabilities.

   Before the acquisition of ACS, FSI's capabilities were focused primarily on 
blending, purification and on-site distribution of batch chemicals, through the 
use of pump and pressure technologies. The ACS acquisition provided us with 
products that utilize proprietary vacuum pressure technology for mixing and 
delivering chemicals. In addition, through the acquisition, we now have products
that our customers can

- --------------------------------------------------------------------------------
/                                                                              /
/ Even as FSI's current generation of products earned industry and customer    /
/  awards of excellence, FSI project managers, like Bruce Johnson, worked on   /
/    increasing FSI's technological lead by enhancing existing products and    /
/                    developing next generation technology.                    /
- --------------------------------------------------------------------------------

8  |  FSI INTERNATIONAL


                                     -125-
<PAGE>
 
                              SIGNS OF EXCELLENCE

                        Awards from Texas Instruments,

                        Semiconductor International and

                         SGS Thomson Microelectronics

                                  [2 PHOTOS]

                                 [TECHNOLOGY]

                                     -126-
<PAGE>
 
use to generate chemicals at their facility and for slurry mixing and delivery. 
Slurry is used by our customers in conjunction with chemical mechanical 
plananzation, or CMP technology, a new fast-growing process application.

   Being a total chemical management solutions provider also means having 
manufacturing and project management in major regions of the world. Our joint 
venture, FSI Metron Europe, Limited, gives FSI manufacturing and program 
management capability in Europe.

SATISFYING CUSTOMER NEEDS WORLDWIDE

As FSI becomes a chosen supplier throughout the world, we are building and 
strengthening our distribution and support organization and adding programs that
provide feedback from our diverse customer base.

   With semiconductor manufacturers needing local support and service all over 
the globe, two of FSI's affiliated distributors consolidated with a third 
worldwide distribution corporation to form one of the largest semiconductor 
equipment and materials distribution companies outside of Japan.

   The new organization--with operations in more than 20 countries and employing
over 300 semiconductor industry professionals--gives FSI a strong worldwide
distribution network, plus the local expertise to deliver world-class support.

   Another aspect of being a global competitor is meeting international 
standards for quality. In fiscal 1995, FSI achieved a major milestone on its 
journey to reach world-class quality status by being awarded ISO 9001 
certification, a highly valued rating that is becoming a requirement of doing 
business with many of our customers. Although, as our awards prove, FSI has an 
excellent reputation for quality products, we discovered numerous ways to
improve efficiency and product quality during the process.

   Maintaining ISO 9001 certification is an ongoing effort involving reviews by 
an external certification organization every six months and a substantial 
commitment of time and resources. However, the results--greater productivity, 
lower costs and continuous improvement in our product quality--are worth the 
investment.

   International support and ISO 9001 manufacturing processes are key to 
providing our customers with unmatched products and service, but they do not 
ensure success. To close the loop on our support efforts, we embarked on a 
long-term customer satisfaction program early in 1995 that involves surveying
our worldwide customer base for feedback on our performance as a supplier.

   While the financial results shown in this annual report indicate we are 
meeting customer expectations, FSI's customer satisfaction program will provide
us with a true measure of our success. It will tell us precisely what we are
doing right and where we need to improve, so that we will achieve 100 percent
customer satisfaction, our ultimate goal.

- --------------------------------------------------------------------------------
/   To FSI's customers, support is a key element to the product. Customer      /
/ liaison specialists, like Vicky Sons-Eiden, represent the organization       /
/ every day in meeting customer expectations. The entire company is committed  /
/   to achieving 100 percent customer satisfaction. During the year, FSI was   /
/   awarded ISO 9001 certification, a company-wide achievement that requires   /
/             ongoing commitment and cross-functional team effort.             /
- --------------------------------------------------------------------------------
                 
10  |  FSI INTERNATIONAL       


                                     -127-
<PAGE>
 
                               SYMBOL OF QUALITY
                               -----------------

                          ISO 9001 certification mark

                                  [2 PHOTOS]

                                    [LOGO]

                                    SUPPORT

                                     -128-
<PAGE>
 
                              [FINANCIAL REVIEW]

Five-Year Selected Financial Data                           13

Management's Discussion and Analysis of Financial
    
    Condition and Results of Operations                     14

Consolidated Financial Statements                           18

Notes to Consolidated Financial Statements                  22

Independent Auditors' Report                                32

Statement of Management Responsibility                      32
 


                                     -129-
<PAGE>
 
FIVE-YEAR SELECTED FINANCIAL DATA


<TABLE>
<CAPTION>

                                                              Fiscal years ended August
                                                              --------------------------
(in thousands, except per share data)                 1995     1994      1993     1992     1991
- -------------------------------------------------------------------------------------------------
<S>                                                 <C>       <C>       <C>      <C>      <C>     
OPERATIONS/1/,/2/

Sales                                               $190,403  $96,437   $78,432  $46,879  $44,957

Gross profit                                          78,401   40,649    28,968   18,770   17,169

Selling, general and administrative expenses          33,909   19,552    14,496   11,170   12,299

Research and development expenses                     24,865   15,743    11,760    9,783    8,376

Operating income (loss)                               19,627    5,354     2,712   (2,183)  (3,506)

Net income (loss)                                     19,286    5,646     2,958   (3,358)  (3,264)

Net income (loss) per common share                      1.13      .43       .28     (.36)    (.37)

Weighted average common shares
  and common share equivalents                        17,071   13,222    10,558    9,275    8,715
- -------------------------------------------------------------------------------------------------
BALANCE SHEET/1/

Cash, cash equivalents and marketable securities    $111,203  $10,725  $   782  $    67  $   441

Working capital                                      146,130   27,778   13,421   10,934   13,355

Total assets                                         233,841   69,357   41,369   36,911   27,696

Total debt                                                80      182    3,096    5,842      503

Stockholders' equity                                 178,210   42,367   21,589   17,713   20,195
- ------------------------------------------------------------------------------------------------
</TABLE> 
/1/All amounts have been adjusted to reflect the acquisition, effective March 8,
1995, of Applied Chemical Solutions, which acquisition was accounted for using
the pooling-of-interests method of accounting. See Note 2 of Notes to
Consolidated Financial Statements.

/2/Share information and per share information have been adjusted for a two-
for-one common stock split. See Note 19 of Notes to Consolidated Financial
Statements.

<TABLE> 
<CAPTION> 
                                      1993    1994    1995
                                      ---------------------
<S>                                   <C>     <C>     <C> 
Sales (in millions)                   $ 78    $ 96    $ 190
Net Income (percent of sales)          3.8%    5.9%    10.1%
Stockholders' Equity (in millions)    $ 22    $ 42    $ 178
                                      ---------------------
</TABLE> 

                                                        FSI INTERNATIONAL  |  13


                                     -130-
<PAGE>
 
MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION
AND RESULTS OF OPERATIONS


The following table sets forth for the fiscal years indicated, certain income 
and expense items as a percent of total sales.

<TABLE> 
<CAPTION> 
                                                     Percent of Sales
                                                 ------------------------
Fiscal years ended August                         1995     1994     1993
- -------------------------------------------------------------------------
<S>                                              <C>      <C>      <C> 
Sales                                            100.0%   100.0%   100.0% 

Cost of goods sold                                58.8     57.9     63.1

Selling, general and administrative               17.8     20.3     18.5

Research and development                          13.1     16.3     15.0
- --------------------------------------------------------------------------
Operating income                                  10.3      5.5      3.4

Other income (expense)                             1.1     (0.2)    (0.8)
- --------------------------------------------------------------------------
Income before income taxes                        11.4      5.3      2.6

Income tax expense                                 3.1      1.3      0.5

Equity in earnings of affiliates                   1.9      1.9      1.7

Net income                                        10.1      5.9      3.8
- --------------------------------------------------------------------------
</TABLE> 

RESULTS OF OPERATIONS

Sales nearly doubled to $190.4 million for the fiscal year ended August 26, 1995
as compared to $96.4 million for the fiscal year ended August 27, 1994. The 
increase in sales occurred in all product lines due to increased unit sales 
driven primarily by the construction of new and the expansion of existing 
manufacturing facilities by our semiconductor manufacturing customers, the 
acquisition of Applied Chemical Solutions (ACS) and our investment in FSI Metron
Europe, Limited (FME).

  Sales for fiscal 1994 increased 23 percent to $96.4 million from $78.4 million
for fiscal 1993. The increase in sales from fiscal 1993 to fiscal 1994 was 
attributable to significant growth in the Company's microlithography cluster 
business and increased spare parts and service sales.

[GRAPH APPEARS HERE]

                        1993   1994   1995
                        ----   ----   ----
Sales (in millions)     $78    $96    $190

  International sales were $69.6 million, $31.5 million and $26.6 million during
fiscal 1995, 1994 and 1993, respectively, and represented approximately 37 
percent, 33 percent and 34 percent of sales during such periods. Sales increased
in Europe, the Far East and Japan during fiscal 1995. The majority of the 
increase in international sales in fiscal 1995 related to significant 
microlithography cluster sales in Asia. Sales of the Company's products in 
Europe, the Far East and Japan also increased from fiscal 1993 to 1994.

[GRAPH APPEARS HERE]

                                      1993   1994   1995
                                      ----   ----   ----
International Sales (in millions)     $27    $31    $70

  The Company believes its ability to continue to increase sales is dependent 
upon increased demand for all three of the Company's product lines, sales growth
in international markets, as well as industry and general economic conditions.

  Gross profit as a percentage of sales for fiscal 1995 was 41.2 percent as 
compared to 42.1 percent for fiscal 1994. The decrease in gross profit 
percentage is generally due to increased international sales which generally 
carry lower gross profit mar-

14  |  FSI INTERNATIONAL


                                     -131-
<PAGE>
 
gins. In addition, the decrease was also related to an increase in the 
percentage of total sales of the Company's lower margin products.

  The Company's gross profit margin increased for fiscal 1994 to 42.1 percent 
from 36.9 percent for fiscal 1993. The increase in gross profit percentage 
between fiscal 1993 and 1994 was attributable primarily to a loss of 
approximately $800,000 on $5.3 million of sales recognized in fiscal 1993 on a 
chemical management system project, due to cost overruns. The increase was also 
related to an increase in the percentage of total sales from the Company's 
higher margin products, and to a lesser extent to a decrease in the percentage 
of foreign sales as a percentage of total sales.

[GRAPH APPEARS HERE]

                               1993   1994   1995
                               ----   ----   ----
Gross Profit (in millions)     $29    $41    $78

  The Company's gross profit margin may fluctuate as a result of a number of 
factors, including the mix of products sold, the proportion of international 
sales and competitive pricing pressures.

  Selling, general and administrative expenses (SG&A) were $33.9 million, $19.6 
million and $14.5 million or 17.8 percent, 20.3 percent and 18.5 percent of 
sales during fiscal 1995, 1994 and 1993, respectively. The $14.3 million 
increase in 1995 is due primarily to increased costs of approximately $3.3 
million related to expanded customer support, increase in management incentive 
bonuses and employee profit sharing of $1.5 million, increased commissions of 
more than $1.0 million, fees and expenses associated with the ACS acquisition of
$800,000, increased allowance for bad debts, and costs associated with the 
computer systems upgrade. In addition, the overall number of personnel in the 
SG&A area increased more than 60 percent from the end of fiscal 1994 to the end 
of fiscal 1995. The increase in SG&A expenses from fiscal 1993 to fiscal 1994 
was chiefly due to expanded customer support and marketing of approximately $2.4
million, and management incentive bonuses and employee profit sharing of 
approximately $625,000. The Company anticipates a further reduction in SG&A 
expenses as a percentage of sales in fiscal 1996; however, it will increase its 
investment in customer support and information systems technology.

[GRAPH APPEARS HERE]

                                    1993    1994    1995
                                    ----    ----    ----
SG&A Expense (percent of sales)     18.5%   20.3%   17.8%
  
  Research and development (R&D) expenses for fiscal 1995 were $24.9 million, or
13.1 percent of sales, as compared to $15.7 million, or 16.3 percent of sales, 
for fiscal 1994. The increase of $9.2 million resulted primarily from the 
Company's continued development efforts on new or existing products, including 
the POLARIS(R) 2000 cluster, the EXCALIBUR(R) MVP system, the ORION(TM) 
vacuum-based, gas phase (dry) cleaning system, the ICE(TM) cryogenic aerosol 
cleaning system and certain chemical management products.

[GRAPH APPEARS HERE]

                               1993   1994   1995
                               ----   ----   ----
R&D Expense (in millions)      $12    $16    $25

  R&D expenses for fiscal 1994 increased $3.9 million to $15.7 million from 
$11.8 million for fiscal 1993. The increase in fiscal 1994 was primarily due to 
realizing a full year of expenses for the Microlithography division's 
demonstration and process development laboratory, and continued development 
costs for the Company's ORION vacuum-based, gas phase (dry) cleaning system.

  During fiscal years 1995, 1994 and 1993, the Company recognized approximately 
$546,000, $1.3 million and $1.2 million, respectively, of third party funding as
reductions in

                                                        FSI INTERNATIONAL  |  15


                                     -132-
<PAGE>
 
research and development expenses. The Company will continue to increase the 
dollars invested in R&D; however, the Company expects less sponsored R&D funding
in fiscal 1996.

    Other income (expense) was approximately $2.2 million of income, or 1.1 
percent of sales, for fiscal 1995 as compared to $254,000 of expense, or (0.2) 
percent of sales, for fiscal 1994. The majority of the change is due to an 
increase of approximately $1.7 million in interest income recognized on cash and
cash equivalents, and marketable securities. The Company's cash and cash 
equivalents, and marketable securities increased due to the proceeds of the two 
secondary offerings completed in February and July 1995.

<TABLE> 
<CAPTION> 
                                       1993    1994    1995
                                       ----    ----    -----       
<S>                                    <C>     <C>     <C>  
Operating Income (percent of sales)    3.4%    5.5%    10.3%
</TABLE> 

    Other income (expense) was approximately $254,000 of expense, or (0.2) 
percent of sales, for fiscal 1994 as compared to $671,000 of expense, or (0.8) 
percent of sales, for fiscal 1993. The decrease in expense in fiscal 1994 is due
to decreased interest expense as a result of eliminating the Company's 
asset-based credit facility in March 1994. In addition, the Company's interest 
income increased approximately $244,000 during fiscal 1994 due to increased 
investments in cash and cash equivalents from the proceeds of a secondary 
offering completed in November 1993.


<TABLE> 
<CAPTION> 
                                               1993    1994    1995
                                               -----   -----   -----       
<S>                                            <C>     <C>     <C>  
Effective Tax Rate (percent of pretax profit)  17.6%   24.6%   27.2%
</TABLE> 

    The Company's income tax expense was approximately $5.9 million, $1.3 
million and $360,000 in fiscal 1995, 1994 and 1993, respectively. This equated 
to an effective tax rate of 27.2 percent, 24.6 percent and 17.6 percent in
fiscal 1995, 1994 and 1993, respectively. The Company's effective tax rate was
lower than what would be expected using a 35 percent "statutory" effective tax
rate due to the reinstatement of deferred tax assets resulting from the
generation of taxable income in fiscal 1993, 1994 and 1995. The Company expects
its effective tax rate to increase in fiscal 1996.

   The equity in earnings of affiliates was $3.6 million, $1.8 million and $1.3 
million for fiscal 1995, 1994 and 1993, respectively. The increase in fiscal 
1995 resulted from the increased earnings of its 40-percent-owned affiliate, 
Metron Semiconductors Europe B.V. (MSE), and the Metron Asia Group (MSA) in 
which it had a 50 percent ownership. The increase in fiscal 1994 from 1993 was 
attributed to the increased earnings of both MSE and MSA. On July 5, 1995, MSE 
acquired MSA and on July 6, 1995, acquired Transpacific Technology Corporation, 
a U.S. distribution company. The Company owns 38 percent of this newly 
consolidated entity.

<TABLE> 
<CAPTION> 
                                                 1993    1994    1995
                                                 ----    ----    ----       
<S>                                              <C>     <C>     <C>  
Equity in Earnings of Affiliates (in millions)   $1.3    $1.8    $3.6 
</TABLE> 

LIQUIDITY AND CAPITAL RESOURCES

The Company's cash and cash equivalents, and marketable securities were 
approximately $111 million as of August 26, 1995, an increase of $100 million 
from the end of fiscal 1994. The increase in cash and cash equivalents, and 
marketable securities reflects the net proceeds of more than $100 million from 
secondary stock offerings completed by the Company in February and July 1995.

<TABLE>
<CAPTION>
                                   1993    1994    1995
                                   ----    ----    -----
<S>                                <C>     <C>     <C>
Net Income (percent of sales)      3.8%    5.9%    10.1%
</TABLE>

16  |  FSI INTERNATIONAL


                                     -133-
<PAGE>
 
  The Company's accounts receivable as of August 26, 1995 increased
approximately $26.2 million, from the end of fiscal 1994. This increase is due
to increased sales levels in all product lines. In addition, the percentage of
foreign receivables as compared to total receivables almost doubled from the end
of fiscal 1994 to the end of fiscal 1995. Foreign receivables generally take
longer to collect than domestic receivables. The Company's inventory increased
approximately $15.4 million from the end of fiscal 1994 to the end of fiscal
1995. The majority of the increase was due to increased levels of raw materials
and finished goods relating to the increased sales and order activity. As of
August 26, 1995, the Company's ratio of current assets to current liabilities
was 3.7 to 1.0 and working capital was $146.1 million.

[GRAPH APPEARS HERE]

                                1993   1994   1995
                                ----   ----   ----
Total Assets (in millions)      $41    $69    $234
  
  The Company had acquisitions of property, plant and equipment of $16.5 million
for fiscal 1995 as compared to $2.7 million for fiscal 1994. The increase 
reflects investments in computer equipment and facilities expansion programs. 
The Company expects to continue to increase its investment in facilities 
expansion programs and computer systems in fiscal 1996. FSI opened a new 
100,000-square-foot manufacturing facility in Chaska, Minnesota, in November 
1995. The costs of purchasing the land and of constructing the new facility are
expected to total $11.5 million, and the cost of upgrading the computer systems 
is expected to total more than $7.0 million when it is completed in the latter 
part of fiscal 1996.

[GRAPH APPEARS HERE]

                                       1993   1994   1995
                                       ----   ----   ----
Stockholders' Equity (in millions)     $22    $42    $178
     
  On January 31, 1995, the Company purchased a 50 percent equity interest in FME
for approximately $1.2 million. On March 8, 1995, the Company completed the 
acquisition of ACS, which was accounted for as a pooling of interests. In 
connection with the ACS acquisition, the Company issued 1,061,472 shares of its 
common stock to the former holders of ACS common stock and issued options to 
purchase up to 214,758 shares of its common stock in substitution of previously 
outstanding options to acquire shares of ACS common stock. These acquisitions 
are intended to enhance and broaden the Company's chemical management product 
offerings and establish in Europe a manufacturing capability for the Company's 
chemical management systems.

  The Company does not currently have a credit facility. However, the Company 
has negotiated the terms of a new credit facility, which it expects to enter 
into during fiscal 1996. The Company believes that existing cash and cash 
equivalents, marketable securities and internally generated funds will be 
sufficient to meet the Company's currently projected working capital and other 
cash requirements both for the short-term and through at least the end of fiscal
1996.

  The Company believes that success in its industry requires substantial capital
in order to maintain the flexibility to take advantage of opportunities as they 
may arise. The Company may, from time to time, as market and business conditions
warrant, invest in or acquire complementary businesses, products or 
technologies. The Company may effect additional equity or debt financings to 
fund such activities. The sale of additional equity or debt securities could 
result in additional dilution to the Company's stockholders.

                                                        FSI INTERNATIONAL  |  17


                                     -134-
<PAGE>
 
CONSOLIDATED STATEMENTS OF OPERATIONS

<TABLE> 
<CAPTION> 
                                                                           ------------------------------------------
Fiscal years ended August 26, 1995, August 27, 1994 and August 28, 1993       1995            1994           1993
- ---------------------------------------------------------------------------------------------------------------------
<S>                                                                        <C>             <C>            <C> 
Sales (including sales to affiliates of $42,625,000
  $24,699,000 and $19,603,000, respectively)                               $190,403,364    $96,437,653    $78,432,284

Cost of goods sold                                                          112,002,351     55,788,375     49,464,226
- ---------------------------------------------------------------------------------------------------------------------
Gross profit                                                                 78,401,013     40,649,278     28,968,058

Selling, general and administrative expenses                                 33,908,913     19,552,376     14,496,165

Research and development expenses                                            24,864,705     15,742,894     11,760,306
- ---------------------------------------------------------------------------------------------------------------------
Operating income                                                             19,627,395      5,354,008      2,711,587

Interest expense                                                                (27,745)      (417,521)      (556,984)

Interest income                                                               2,067,619        318,211         74,308

Other income (expense), net                                                     133,079       (154,314)      (188,217)
- ---------------------------------------------------------------------------------------------------------------------
Income before income taxes                                                   21,800,348      5,100,384      2,040,694

Income tax expense                                                            5,926,000      1,254,000        360,000
- ---------------------------------------------------------------------------------------------------------------------
Income before minority interest and equity
  in earnings of affiliates                                                  15,874,348      3,846,384      1,680,694

Minority interest                                                              (155,562)            --             --

Equity in earnings of affiliates                                              3,566,900      1,799,750      1,277,261
- ---------------------------------------------------------------------------------------------------------------------
  Net income                                                               $ 19,285,686    $ 5,646,134    $ 2,957,955
=====================================================================================================================
  Net income per common share                                              $       1.13    $       .43    $       .28
- ---------------------------------------------------------------------------------------------------------------------
Weighted average common shares and
  common share equivalents                                                   17,070,549     13,222,408     10,557,646
=====================================================================================================================
</TABLE> 

The accompanying notes are an integral part of the consolidated financial 
statements.


18  |  FSI INTERNATIONAL


                                     -135-
<PAGE>

CONSOLIDATED BALANCE SHEETS


<TABLE>
<CAPTION>

                                             August 26, 1995    August 27, 1994
- -------------------------------------------------------------------------------
<S>                                           <C>                <C>
Assets

Current assets:
    Cash and cash equivalents                  $ 97,143,176        $10,724,729
    Marketable securities                        14,059,682                 _
    Trade accounts receivable, less
      allowance for doubtful accounts
      of $1,225,000 and $525,000,
      respectively                               34,709,769         16,234,940
    Trade accounts receivable from
      affiliates                                 13,069,739          5,378,164
    Inventories                                  31,859,135         16,452,665
    Deferred income tax benefit                   5,828,018          1,832,000
    Prepaid expenses and other current
      assets                                      4,362,652          4,112,238
- -------------------------------------------------------------------------------
        Total current assets                    201,032,171         54,734,736
- -------------------------------------------------------------------------------
Property, plant and equipment, net               19,352,519          5,143,244
Investment in affiliates                          8,813,370          4,856,091
Deposits and other assets                         4,048,242          4,622,798
Deferred income tax benefit--long-term              595,085                 -
- -------------------------------------------------------------------------------
                                               $233,841,387        $69,356,869

===============================================================================
LIABILITIES AND STOCKHOLDERS' EQUITY
Current liabilities:
    Current maturities of long-term debt       $     33,228        $   148,834
    Trade accounts payable                       25,279,750         10,968,855
    Accrued expense                              21,252,755          8,948,086
    Customer deposits                             2,614,874          3,685,948
    Deferred revenue                              5,722,030          3,204,892
- -------------------------------------------------------------------------------
        Total current liabilities                54,902,637         26,956,615
- -------------------------------------------------------------------------------
Long-term debt, less current mturities               46,711             33,228
Minority interest                                   681,558                 -
Stockholders' equity:
    Preferred stock, no par value;
      10,000,000 shares authorized; none
      issued and outstanding                             -                  -
    Common stock, no par value; 50,000,000
      shares authorized; issued and
      outstanding, 20,260,612 and 13,166,073
      shares, respectively                      144,379,884         28,719,418
    Retained earnings                            32,571,902         13,286,216
    Cumulative translation adjustment             1,258,695            361,392
- -------------------------------------------------------------------------------
        Total stockholders' equity              178,210,481         42,367,026
- -------------------------------------------------------------------------------
Commitments (notes 3, 5, 6, 17 and 20)         $233,841,387        $69,356,869
===============================================================================
</TABLE>
The accompanying notes are an integral part of the consolidated financial
statements.

                                                        FSI INTERNATIONAL  |  19


                                     -136-
<PAGE>
 
CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY


<TABLE> 
<CAPTION>                           
                                                           Common Stock
                                                     ------------------------               Cumulative
Fiscal years ended August 26, 1995,                  Number of                  Retained    Translation
August 27, 1994 and August 28, 1993                   Shares        Amount      Earnings    Adjustment       Total
- ---------------------------------------------------------------------------------------------------------------------
<S>                                                  <C>         <C>           <C>          <C>          <C>  
Balance, August 29, 1992                              9,533,602  $ 12,562,704  $ 4,682,127  $  467,922   $ 17,712,753

Stock issuance                                          504,793       830,685           --          --        830,685

Recision of shares                                     (352,223)         (171)          --          --           (171)

Tax benefit from stock options exercised                     --       156,711           --          --        156,711

Change in cumulative translation adjustment                  --            --           --     (69,313)       (69,313)

Net income                                                   --            --    2,957,955          --      2,957,955
- ---------------------------------------------------------------------------------------------------------------------
Balance, August 28, 1993                              9,686,172    13,549,929    7,640,082     398,609     21,588,620

Stock issuance                                        3,479,901    14,804,079           --          --     14,804,079

Tax benefit from stock options exercised                     --       365,410           --          --        365,410

Change in cumulative translation adjustment                  --            --           --     (37,217)       (37,217)

Net income                                                   --            --    5,646,134          --      5,646,134
- ---------------------------------------------------------------------------------------------------------------------
Balance, August 27, 1994                             13,166,073    28,719,418   13,286,216     361,392     42,367,026

Stock issuance                                        7,094,539   114,913,188           --          --    114,913,188

Tax benefit from stock options exercised                     --       747,278           --          --        747,278

Change in cumulative translation adjustment                  --            --           --     897,303        897,303

Net income                                                   --            --   19,285,686          --     19,285,686
- ---------------------------------------------------------------------------------------------------------------------
Balance, August 26, 1995                             20,260,612  $144,379,884  $32,571,902  $1,258,695   $178,210,481
=====================================================================================================================
</TABLE> 

The accompanying notes are an integral part of the consolidated financial 
statements.


20  |  FSI INTERNATIONAL


                                     -137-
<PAGE>
 
CONSOLIDATED STATEMENTS OF CASH FLOWS


<TABLE> 
<CAPTION> 
                                                                           ----------------------------------------
Fiscal years ended August 26, 1995, August 27, 1994 and August 28, 1993        1995          1994          1993
- -------------------------------------------------------------------------------------------------------------------
<S>                                                                        <C>            <C>          <C>  
OPERATING ACTIVITIES
Net income                                                                 $ 19,285,686   $ 5,646,134   $ 2,957,955
Adjustments to reconcile net income to net cash provided
  by operating activities:
    Minority interest                                                           155,562            --            --
    Depreciation and amortization                                             3,141,701     2,647,441     2,783,157
    Provision for deferred income taxes                                      (4,591,103)     (696,000)   (1,136,000)
    Stock issued for services                                                    65,643       141,376            --
    Equity in earnings of affiliates                                         (3,566,900)   (1,799,750)   (1,277,261)
    Gain on sale of equipment                                                    (8,000)      (19,254)           --
  Changes in operating assets and liabilities:
      Trade accounts receivable                                             (24,698,519)   (7,298,164)     (880,363)
      Inventories                                                           (15,319,190)   (3,332,475)      265,257
      Prepaid expenses and other current assets                                (250,414)   (2,234,324)      321,460
      Trade accounts payable                                                 13,019,625     3,285,564       999,624
      Accrued expenses                                                       13,043,417     2,840,603     2,667,696
      Customer deposits                                                      (1,071,074)    2,901,801      (799,627)
      Deferred revenue                                                        2,517,138     1,589,371       488,763
      Other                                                                      13,854            --            --
- -------------------------------------------------------------------------------------------------------------------
  Net cash provided by operating activities                                   1,737,426     3,672,323     6,390,661
- -------------------------------------------------------------------------------------------------------------------
INVESTING ACTIVITIES
Investment in FME, net of cash received                                        (850,333)           --            --
Acquisition of property, plant and equipment                                (16,525,386)   (2,716,891)   (2,455,266)
Proceeds from note receivable from affiliate                                    500,000            --            --
Purchase of marketable securities                                           (15,560,502)           --            --
Sales of marketable securities                                                1,500,820            --            --
Decrease (increase) in deposits and other assets                                927,097    (4,151,350)        3,717
Proceeds from sale of equipment                                                   8,000        19,254            --
- -------------------------------------------------------------------------------------------------------------------
  Net cash used in investing activities                                     (30,000,304)   (6,848,987)   (2,451,549)
- -------------------------------------------------------------------------------------------------------------------
FINANCING ACTIVITIES
Restricted cash                                                                      --     1,370,891      (539,295)
Principal payments on long-term debt                                           (166,220)     (924,365)     (594,051)
Cash overdraft                                                                       --            --      (652,714)
Notes payable to bank, net                                                           --    (1,989,497)   (2,269,149)
Net proceeds from issuance of common stock                                  114,847,545    14,662,703       830,514
- -------------------------------------------------------------------------------------------------------------------
  Net cash provided by (used in) financing activities                       114,681,325    13,119,732    (3,224,695)
- -------------------------------------------------------------------------------------------------------------------
Increase in cash and cash equivalents                                        86,418,447     9,943,068       714,417
Cash and cash equivalents at beginning of year                               10,724,729       781,661        67,244
- -------------------------------------------------------------------------------------------------------------------
Cash and cash equivalents at end of year                                   $ 97,143,176   $10,724,729   $   781,661
===================================================================================================================
</TABLE> 

The accompanying notes are an integral part of the consolidated financial 
statements.


                                                        FSI INTERNATIONAL  |  21


                                     -138-
<PAGE>
 
NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

Fiscal years ended August 26, 1995, August 27, 1994 and August 28, 1993

- -------------------------------------------------------
NOTE 1  |  Summary of Significant Accounting Principles
- -------------------------------------------------------

PRINCIPLES OF CONSOLIDATION. The accompanying consolidated financial statements 
include the accounts of FSI International, Inc. and its wholly owned 
subsidiaries, FSI International, Ltd., a foreign sales corporation (FSC), and 
Applied Chemical Solutions, Inc. (collectively, the "Company"). The 1995 
consolidated financial statements also include the accounts of FSI Metron 
Europe, Limited (FME), a joint venture owned equally by the Company and Metron 
Semiconductors Europa B.V., an affiliate of the Company. This joint venture 
interest was acquired as of January 31, 1995. All significant intercompany 
balances and transactions have been eliminated in consolidation.

  The Company's fiscal year ends on the last Saturday in August and is comprised
of 52 or 53 weeks.

REVENUE RECOGNITION. Revenue related to the majority of the Company's products 
is recognized upon shipment, except for newly introduced products and for 
initial customer installments, which are recognized upon the successful 
completion of an evaluation period. Revenue on chemical management systems for 
which the Company has the responsibility of engineering and design work, as 
well as installation, is recognized upon successful completion of the projects' 
phases and milestones. Losses on such projects are recognized in the period in 
which it is determined that it is probable that a loss might be incurred.

CASH AND CASH EQUIVALENTS. All highly liquid investments purchased with an 
original maturity of three months or less are considered to be cash equivalents.

MARKETABLE SECURITIES. In fiscal 1995, the Company adopted Statement of
Financial Accounting Standards (SFAS) No. 115, Accounting for Certain
Investments in Debt and Equity Securities. Under the provisions of this
statement, the Company classifies its marketable debt and equity securities in
one of three categories: trading, available-for-sale or held-to-maturity.
Trading securities are bought and held principally for the purpose of selling
them in the near-term. Held-to-maturity securities are those which the Company
intends to, and has the ability to hold until maturity. All other securities not
included in trading or held-to-maturity are classified as available-for-sale.
Trading and available-for-sale securities are recorded at fair market value.
Held-to-maturity securities are recorded at cost, adjusted for the amortization
or accretion of premiums or discounts. Unrealized holding gains and losses for
trading securities are included in earnings. Available-for-sale securities'
unrealized holding gains and losses are excluded from earnings and reported as a
net amount and as a separate component of stockholders' equity until realized.

  At August 26, 1995, cash equivalents and marketable securities consisted 
mainly of investment grade commercial paper and U.S. Government Agency discount 
notes and are considered by management to be available for sale. The substantial
majority of these investments are classified as cash equivalents. The remaining 
investments are classified as marketable securities, most of which mature in 
fiscal 1996. Because amortized cost approximates market, no adjustment has been 
made to stockholders' equity as a result of changes in the market value of these
securities.

INVENTORIES. Inventories are valued at the lower of cost, determined by the 
first-in, first-out method, or estimated net realizable value.

PROPERTY, PLANT AND EQUIPMENT. Leasehold improvements are carried at cost and 
amortized over a three to 15 year period or the term of the underlying lease, 
whichever is shorter. Equipment is carried at cost and depreciated on a 
straight-line or declining-balance method over their estimated economic lives. 
Principal economic lives for equipment are one to seven years. When assets are
retired or disposed of, the cost and accumulated depreciation thereon is removed
from

22  |  FSI INTERNATIONAL


                                     -139-
<PAGE>
 

the accounts and gains or losses are included in other income (expense). 
Maintenance and repairs are expensed as incurred; significant renewals and 
betterments are capitalized.

PATENTS AND LICENSE FEES. Patents and license fees are capitalized and amortized
over their estimated economic or legal lives, whichever is shorter, ranging up
to five years.

INVESTMENT IN AFFILIATES. As of August 26, 1995, the Company's investment in
affiliated companies consists of a 40 percent interest in Metron Semiconductors
Europa B.V., a 50 percent interest in Metron Semiconductors (Hong Kong) Limited,
Metron Semiconductors Far East Limited and Metron Semiconductors Asia Limited
(collectively, Metron Asia Group), and a 49 percent interest in m.FSI Ltd., a
Japanese joint venture. Each investment is accounted for by the equity method
utilizing a three-month lag due to the affiliates' May and June year-ends.
Summary financial information for Metron Semiconductors Europa B.V., Metron Asia
Group and m.FSI Ltd. are included in note 6.

CAPITALIZED PRODUCT SOFTWARE COSTS. The Company capitalizes computer software 
production costs once technological feasibility has been established for the 
product. The capitalized costs are generally amortized over periods of two to 
four years. The Company had unamortized capitalized software costs of 
approximately $0 and $225,000 at August 26, 1995 and August 27, 1994, 
respectively. The Company amortized approximately $225,000, $225,000 and 
$432,000 in fiscal years 1995, 1994 and 1993, respectively.

INCOME TAXES. Deferred income taxes are provided in amounts sufficient to give 
effect to temporary differences between financial and tax reporting.

PRODUCT WARRANTY. The Company, in general, warrants new equipment manufactured 
by the Company to the original purchaser to be free from defects in material and
workmanship for up to two years, depending upon the product. Provisions are made
for the estimated costs of maintaining product warranties at the time the 
product is sold.

FOREIGN CURRENCY TRANSLATION. Assets and liabilities of foreign subsidiaries 
and investees are translated into U.S. dollar at current exchange rates.
Operating results of subsidiaries and investees are translated into U.S. dollars
using the average rates of exchange prevailing during the year. Unrealized gains
or losses resulting from translating subsidiaries and investees are included in
the cumulative translation adjustment account in stockholders' equity.

NET INCOME PER COMMON SHARE. Net income per common share is computed based on 
the weighted average number of common shares and common share equivalents 
outstanding during the year. All stock options and stock warrants are reflected 
in the computation of common share equivalents. For all periods presented, fully
diluted and primary net income per common share are approximately the same.

RECLASSIFICATIONS. Certain fiscal 1994 and 1993 amounts have been reclassified 
to conform to the fiscal 1995 presentation.

- --------------------------------------------------------------------------------
/                                                                              \
/    Note 2            Acquisition of Applied Chemical Solutions               \
/                                                                              \
- --------------------------------------------------------------------------------

On March 8, 1995, the Company completed its merger with Applied Chemical
Solutions ("ACS"). The Company issued 1,061,472 shares of common stock in
connection with the merger. This transaction was accounted for as a pooling of
interests; therefore, all prior financial statements have been restated to
reflect the merger. Prior to the merger, ACS prepared its financial statements
on a July 31 fiscal year-end. ACS's fiscal year has been changed to the last
Saturday in August to conform to the Company's year-end. The Company's restated
financial statements for fiscal years 1994 and 1993 include ACS amounts for the
fiscal years ended August 27, 1994 and August 28, 1993, respectively.

                                                       FSI  INTERNATIONAL  |  23


                                     -140-
<PAGE>
 
  Sales and net income (loss) included in the Company's consolidated statements 
of operations are as follows:

                           -----------------------------------------------------
Fiscal years ended         August 26, 1995   August 27, 1994   August 28, 1993
- --------------------------------------------------------------------------------
Sales:

  ACS                         $ 11,064,550       $ 2,390,082       $ 1,480,245

  FSI and other
   subsidiaries                179,338,814        94,047,571        76,952,039
- --------------------------------------------------------------------------------
                              $190,403,364       $96,437,653       $78,432,284
================================================================================
Net income (loss):

  ACS                         $    875,734       $  (869,617)      $  (231,281) 

  FSI and other
   subsidiaries                 18,409,952         6,515,751         3,189,236  
- --------------------------------------------------------------------------------
                              $ 19,285,686       $ 5,646,134       $ 2,957,955
================================================================================

  In connection with the merger, approximately $800,000 of merger costs and
expenses were incurred and have been charged to selling, general and
administrative expenses in fiscal 1995. The charge includes professional fees
and other direct transaction costs associated with the merger.

- -------------------------------------------------
|  NOTE 3  |  Related Party Transactions and    |
|          |  Other Lease Commitments           |
- -------------------------------------------------

The Company is obligated under operating lease agreements for equipment and 
manufacturing and office facilities. Certain of the lease agreements are with
partnerships of which a partner is an officer and director of the Company.

  The lease for the Company's manufacturing facilities is a lease with such a 
partnership (Lake Hazeltine Properties). The agreement provides for base monthly
rentals of approximately $58,333, plus payment of executory costs such as 
property taxes, maintenance and insurance.

  In addition, the agreement provides for an annual adjustment of the monthly 
rental based upon the percentage increase in the Consumer Price Index (CPI) for 
all urban customers; however, such increase shall not exceed 5 percent per year
and is adjusted every three years to the fair market rental.

  Future minimum lease payments for all leases with non-cancellable lease terms 
in excess of one year at August 26, 1995 are as follows:

                                          -------------------------------------
                                                     Related
Fiscal years ending August                      Party Leases      Other Leases
- -------------------------------------------------------------------------------
1996                                              $  847,958        $1,002,789

1997                                                 790,000           757,258

1998                                                 700,000           575,965

1999                                                 700,000           502,684

2000                                                 700,000           485,354

Thereafter                                           116,667            36,752
- ------------------------------------------------------------------------------- 
  Total minimum lease payments                    $3,854,625        $3,360,802
===============================================================================

  Rental expense for all operating leases consisted of the following:

                           -----------------------------------------------------
Fiscal years ended         August 26, 1995    August 27, 1994   August 28, 1993
- --------------------------------------------------------------------------------
Rent expense for
  related party leases          $1,320,300         $1,289,800        $1,261,300

Rent expense for other
  operating leases                 909,400            763,600           889,800
- --------------------------------------------------------------------------------
                                $2,229,700         $2,053,400        $2,151,100
================================================================================

  On June 1, 1991, the Company received a Demand Note Payable with interest at
approximately 0.75 percent over prime from Metron Semiconductors Asia Ltd. At
August 27, 1994, there was $500,000 outstanding against the note. The note
was paid in full in fiscal 1995. As of August 26, 1995, the Company is a
guarantor of approximately $400,000 of Metron Semiconductors Asia Ltd.'s debt.

24  |  FSI INTERNATIONAL


                                     -141-
<PAGE>
 
- -------------------------------------------------
|  NOTE 4  |  Inventories                       |
- -------------------------------------------------

Inventories are summarized as follows:

                                       -----------------------------------------
                                        August 26, 1995      August 27, 1994
- --------------------------------------------------------------------------------
Finished products                           $ 7,048,392          $ 1,675,041 

Work in process                               6,448,693            5,965,322

Subassemblies                                 3,387,324            2,195,364

Raw materials and purchased parts            14,974,726            6,616,938
- --------------------------------------------------------------------------------
                                            $31,859,135          $16,452,665
================================================================================

- -------------------------------------------------
|  NOTE 5  |  Property, Plant and Equipment     |
- -------------------------------------------------

The components of property, plant and equipment are as follows:

                                       -----------------------------------------
                                        August 26, 1995      August 27, 1994
- --------------------------------------------------------------------------------
Leasehold improvements                     $  3,387,698         $  2,195,030

Office furniture and equipment               11,015,452            7,027,347

Manufacturing equipment                       4,175,259            2,903,051

Lab equipment                                 5,205,462            4,955,367

Tooling                                         573,159              535,277 

Vehicles                                        196,669                   --

Capital-in-progress                          10,170,725                   -- 
- --------------------------------------------------------------------------------
                                             34,724,424           17,616,072

Less accumulated depreciation
  and amortization                          (15,371,905)         (12,472,828)
- --------------------------------------------------------------------------------
                                           $ 19,352,519         $  5,143,244
================================================================================

  The Company is in the process of completing a new manufacturing facility in 
Chaska, Minnesota. Capital-in-progress costs relating to the building of 
approximately $5,553,000 were incurred through August 26, 1995. During fiscal
1996, the Company anticipates approximately $5,950,000 will be incurred to 
complete the facility. In addition, the Company has commitments for 
approximately $1,400,000 for furniture and equipment related to this facility.
The majority of remaining capital-in-progress amounts relate to investments in 
our information technology systems.

- -------------------------------------------------
|  NOTE 6  |  Investments in Affiliates         |
- -------------------------------------------------

A summary of assets, liabilities and results of operations for Metron 
Semiconductors Europa B.V., the Metron Asia Group and m.FSI Ltd., accounted
for on the equity method, is as follows (dollars in thousands):

Metron Semiconductors Europa B.V.:

                           -----------------------------------------------------
May 31,                              1995                1994              1993
- --------------------------------------------------------------------------------
Current assets                    $38,409             $31,637           $23,932

Noncurrent assets, net              5,038               2,952             3,029

Current liabilities                26,852              23,799            19,521

Noncurrent liabilities                 81                 539               762

Minority interest                      --               1,020               621

Total stockholders' equity         16,514               9,231             6,057
- --------------------------------------------------------------------------------

                           -----------------------------------------------------
Fiscal years ended May 31,           1995                1994              1993
- --------------------------------------------------------------------------------
Sales                            $101,968             $84,097           $63,226

Net income before minority
  interest                          4,465               3,947             2,430

Minority interest                    (115)               (413)             (266)

Net income                          4,350               3,534             2,164
- --------------------------------------------------------------------------------

                                                        FSI INTERNATIONAL  |  25


                                     -142-
<PAGE>
 
Metron Asia Group:

                          ------------------------------------------------------
                           May 31, 1995        June 30, 1994      June 30, 1993 
- --------------------------------------------------------------------------------
Current Assets                  $14,270               $7,360             $4,760

Noncurrent assets, net              628                  197                290

Current liabilities              11,257                7,214              5,631

Noncurrent liabilities               87                   --                 --

Total stockholders'
  (deficit) equity                3,554                  343               (581)
- --------------------------------------------------------------------------------



                               
                           Eleven 
                           months ended                Fiscal years ended
                          ------------------------------------------------------
                           May 31, 1995        June 30, 1994      June 30, 1993 
- --------------------------------------------------------------------------------
Sales                           $34,655              $17,964            $14,262

Net income                        3,357                  913                616
- --------------------------------------------------------------------------------

  Metron Asia Group changed its fiscal year-end to May from June in fiscal 1995.


m.FSI Ltd:

                          ------------------------------------------------------
June 30,                          1995                  1994               1993 
- --------------------------------------------------------------------------------
Current Assets                  $6,430                $5,748             $4,494

Noncurrent assets, net           2,532                 1,646              2,046

Current liabilities              4,989                 4,613              5,669

Noncurrent liabilities              50                    19                  9

Total stockholders'
  equity                         3,923                 2,762                862 
- --------------------------------------------------------------------------------


                          ------------------------------------------------------
Fiscal years ended June 30,       1995                  1994               1993 
- --------------------------------------------------------------------------------
Sales                           $9,641               $10,027             $4,487

Net income (loss)                  581                 1,737               (928)
- --------------------------------------------------------------------------------

  The Company sold approximately $42,625,000, $24,699,000 and $19,603,000 of 
its products to Metron Semiconductors Europa B.V., Metron Asia Group and m.FSI
Ltd. in fiscal 1995, 1994 and 1993, respectively. In addition, the Company paid 
the Metron Asia Group a commission for direct sales to Asian customers of
$1,112,000, $459,000 and $432,000 in fiscal years 1995, 1994 and 1993, 
respectively. At August 26, 1995 and August 27, 1994, trade accounts receivable
from affiliates was approximately $13,070,000 and $5,378,000, respectively.
  On July 6, 1995, subsequent to the affiliates' fiscal year-ends, the
consolidation Metron Semiconductors Europa B.V., the Metron Asia Group and a
U.S. company named Transpacific Technology Corporation (TCC) was completed. The
Company owns 38.2 percent of this newly consolidated entity. As part of this
transaction, the Company is a guarantor of affiliate debt to former TTC
shareholders of approximately $489,000.

- ------------------------------------------
| NOTE 7  |  Deposits and Other Assets   |
- ------------------------------------------

Included in deposits and other assets are net investments in sales type leases
and equipment under operating leases. The components of net investment in sales 
type leases are as follows:

                                    --------------------------------------------
Fiscal years ended                      August 26, 1995         August 27, 1994
- --------------------------------------------------------------------------------
Minimum lease payments receivable              $892,800              $1,488,000

Less:

  Unearned revenue                               50,872                 135,016
- --------------------------------------------------------------------------------
     Total net investments in sales
        type leases                            $841,928              $1,352,984 
================================================================================

  Future minimum lease payments to be received are as follows:

                                                      --------------------------
Fiscal year                                                              Amount
- --------------------------------------------------------------------------------
1996                                                                   $595,200

1997                                                                    297,600
- --------------------------------------------------------------------------------
Total future minimum lease payments to be received                     $892,800
================================================================================
 
26  |  FSI INTERNATIONAL


                                     -143-
<PAGE>
 
  Components of investments in equipment under operating leases are as follows:

                                    --------------------------------------------
Fiscal years ended                      August 26, 1995         August 27, 1994
- --------------------------------------------------------------------------------
Equipment under operating leases             $1,997,312              $1,997,312

Less accumulated depreciation                   713,325                 142,665
- --------------------------------------------------------------------------------
Equipment under operating leases, net        $1,283,987              $1,854,647
================================================================================

  The following is a schedule of future minimum lease payments under operating 
leases:


                                                      --------------------------
Fiscal year                                                              Amount
- --------------------------------------------------------------------------------
1996                                                                 $  839,000

1997                                                                    839,000

1998                                                                    211,100
- --------------------------------------------------------------------------------
                                                                     $1,889,100
================================================================================

- ------------------------------------------
| NOTE 8  |  Accrued Expenses            |
- ------------------------------------------

Accrued expenses are summarized as follows:

                                    --------------------------------------------
Fiscal years ended                      August 26, 1995         August 27, 1994
- --------------------------------------------------------------------------------
Commissions                                 $ 1,385,205              $1,057,738

Commissions due to affiliates                 1,602,530                  56,127

Income taxes                                  4,201,245                 501,781

Salaries and bonuses                          4,984,319               2,989,010 

Pension and profit sharing                    1,298,115                 449,600

Estimated product warranty                    5,030,947               2,742,671

Product sales incentive commission              744,927                  64,334

Other                                         2,005,467               1,086,825
- --------------------------------------------------------------------------------
                                            $21,252,755              $8,948,086
================================================================================

- ------------------------------------------
| NOTE 9  | Long-Term Debt                |
- ------------------------------------------

Long-term debt is summarized as follows:

                                    --------------------------------------------
Fiscal years ended                      August 26, 1995         August 27, 1994
- --------------------------------------------------------------------------------
Installment loans due in monthly
  installments of $10,899 in 
  principal and interest at 10%
  through February 1995--secured
  by stock                                      $    --                $ 20,009

Installment loans on capital leases;
  interest rates ranging from 9% to
  14.25% through August 1996--secured
  by underlying equipment                        33,228                 162,053

Other                                            46,711                      --
- --------------------------------------------------------------------------------
                                                 79,939                 182,062

Less current maturities                          33,228                 148,834
- --------------------------------------------------------------------------------
                                                $46,711                $ 33,228
================================================================================

  Maturities of long-term debt in fiscal 1997 and 1998, are $43,503 and $3,208,
respectively.

- ------------------------------------------
| NOTE 10  | Technology Purchase         |
- ------------------------------------------

During fiscal 1994, the Company purchased technology and related assets from a
third party. The total purchase price consisted of $90,000 cash and 35,000 
shares of the Company's common stock with a fair value of approximately 
$205,600. As of fiscal year-end, the 35,000 shares of common stock were reserved
for issuance on June 16, 1996.

                                                        FSI INTERNATIONAL  |  27


                                     -144-
<PAGE>
 
- ----------------------------------
|  NOTE 11  | Income Taxes       |
- ----------------------------------

The provision for income taxes is summarized as follows:

                             ---------------------------------------------------
Fiscal years ended                      1995             1994              1993 
- --------------------------------------------------------------------------------
Current:

  Federal                        $ 9,561,000       $1,627,000       $ 1,416,000

  Foreign                            204,000               --                --

  State                              752,000          323,000            80,000 
- --------------------------------------------------------------------------------
                                  10,517,000        1,950,000         1,496,000
- --------------------------------------------------------------------------------
Deferred:

  Federal                         (4,084,000)        (696,000)       (1,136,000)

  State                             (507,000)              --                --
- --------------------------------------------------------------------------------
                                  (4,591,000)        (696,000)       (1,136,000)
- --------------------------------------------------------------------------------
                                 $ 5,926,000       $1,254,000       $   360,000
================================================================================

  In fiscal 1995, 1994 and 1993, there was a tax benefit of $747,278, $365,410 
and $156,711, respectively, credited to stockholders' equity associated with 
the exercise of stock options.

  The tax effects of temporary differences that give rise to significant
portions of the deferred tax assets and deferred tax liabilities at August 26,
1995 and August 27, 1994 are as follows:



                             ---------------------------------------------------
Fiscal years ended                    August 26, 1995           August 27, 1994 
- --------------------------------------------------------------------------------
Deferred tax assets:

  Inventory                                $3,522,000               $ 2,187,800

  Revenue recognition                       1,034,000                   179,000

  Accounts receivable                         466,000                   185,000

  Property, plant and equipment               365,000                   294,000

  Accruals                                    915,000                   594,500

  Tax credit carryovers                            --                   484,300

  Net operating loss carryover                     --                   466,500

  Other, net                                  357,000                  (115,300)
- --------------------------------------------------------------------------------
     Total gross deferred tax assets        6,659,000                 4,275,800 
     

     Valuation allowance                           --                (1,996,800)
- --------------------------------------------------------------------------------
        Net deferred tax assets             6,659,000                 2,279,000
- --------------------------------------------------------------------------------
Deferred tax liabilities:

  Accruals                                    236,000                   201,000

  Undistributed subsidiary income                  --                   150,000

  Other, net                                       --                    96,000
- --------------------------------------------------------------------------------
     Total gross deferred tax liabilities     236,000                   447,000
- --------------------------------------------------------------------------------
        Net deferred tax assets            $6,423,000               $ 1,832,000
================================================================================

28  | FSI INTERNATIONAL


                                     -145-
<PAGE>
 
  The effective tax rate differs from the statutory federal income tax rate as 
follows:

                                        ----------------------------------------
Fiscal years ended                         1995             1994           1993
- --------------------------------------------------------------------------------
Expected federal income tax expense        35.0%            34.0%          34.0%

State income taxes, net of federal 
  benefit                                   2.7              2.3           (7.2)

Research activities credit                 (1.0)            (8.4)         (13.2)

Valuation allowance                        (9.2)            (0.8)          (3.3)

Foreign sales corporation                  (2.6)            (4.3)         (10.3)

Undistributed earnings of subsidiary         --               --            5.1

Other items, net                            2.3              1.8           12.5
- --------------------------------------------------------------------------------
                                           27.2%            24.6%          17.6%
================================================================================

  The Company reduced its valuation allowance from $1,996,800 as of August 27,
1994 to $0 as of August 26, 1995. Based on the Company's taxable income over the
last three fiscal years, management believes it is more likely than not that the
Company will realize the benefit of the net deferred tax asset of $6,423,000 as
of August 26, 1995 through the availability of taxable income in the carryback
period and future earnings.

  The Company utilized approximately $1,300,000 of net operating loss 
carryforwards from ASC in fiscal year 1995.

- ----------------------------------------------------
| NOTE 12 | Pensions and Profit Sharing Plans      |
- ----------------------------------------------------

The Company has a defined contribution pension plan for employees, Total pension
cost for fiscal 1995, 1994 and 1993 was $857,826, $630,657 and $500,243, 
respectively. There is no past service liability.

  The Company's joint venture, FME, has a fully insured pension plan for its 
present directors and employees with a minimum annual contribution of 
approximately $33,000.

  The Company also has an Employee 401(k) Retirement Plan, which allows for a 
discretionary profit sharing contribution on a calendar year basis, covering 
eligible employees. Contributions under the plan are determined by means of a 
formula or at the discretion of the Board of Directors. Contributions accrued in
fiscal years 1995, 1994 and 1993 were $290,000, $200,000 and $150,000, 
respectively.

- ----------------------------------------------------
| NOTE 13 | Stock Options and Warrants             |
- ----------------------------------------------------

The Company's Directors Nonstatutory Stock Option Plan (the "Directors Plan")
allows for the granting of options to nonemployee directors. The option price
and terms of the options are determined by the Directors Plan, and the per share
exercise price of the option may not be less than the fair market value of the
stock at the time the option is granted.

  The Company's Stock Option Plans (the "Option Plans") authorize grants of 
options to purchase shares of the Company's common stock to officers and 
employees. Under the Option Plans, options become exercisable as determined by
the Option Committee. The option prices are fixed by the Option Committee, and
may not be less than the fair market value of the stock at the time the option
is granted. Options expire 10 years after the date granted or on a prior date
as fixed by the Option Committee.

  The Company adopted a 1994 Omnibus Stock Plan (the "Plan") during fiscal year
1994. The Plan, which was approved by the Company's shareholders, authorizes 
stock based awards ("Awards") to purchase up to 1,000,000 shares of the 
Company's common stock. Under the Plan, the Plan Committee has the power to
make Awards, to determine when and to whom Awards will be granted, the form of
each Award, the amount of each Award, and any other terms or conditions of
each Award consistent with the Plan.

                                                        FSI INTERNATIONAL  |  29


                                     -146-
<PAGE>
 
  The activity under all plans is as follows:

<TABLE> 
<CAPTION> 

                                         ----------------------------------------------------------------------

                                                   Number of Shares
                                         -----------------------------------------
                                           Available 
Activity description                       For Grant                Outstanding                      Price Range
- ----------------------------------------------------------------------------------------------------------------
<S>                                         <C>                      <C>                              <C> 

August 29, 1992                              269,998                  1,642,826                     $  .94- 3.03

  Granted                                   (257,558)                   257,558                       1.87- 6.21

  Exercised                                       --                   (326,564)                       .94- 2.75  

  Cancelled                                   44,330                    (44,330)                       .94- 2.75 
- -----------------------------------------------------------------------------------

August 28, 1993                               56,770                  1,529,490                        .94- 6.21 

  1994 Omnibus Stock 
    Option Plan                            1,000,000                         --                               --

  Granted                                   (354,164)                   354,164                       6.00- 7.13

  Exercised                                       --                   (216,864)                       .94- 3.03 

  Cancelled                                 (195,828)                   (51,162)                      1.75- 7.13  
- -----------------------------------------------------------------------------------

August 27, 1994                              506,778                  1,615,628                        .94- 7.13  

  Directors Non-
    statutory Plan                           100,000                         --                               --

  Granted                                   (433,848)                   433,848                       8.70-26.00  

  Exercised                                       --                   (519,381)                       .94- 7.13 

  Cancelled                                   10,694                    (17,694)                      2.75- 7.13 
- -----------------------------------------------------------------------------------

August 26, 1995                              183,624                  1,512,401                        .94-26.00
===================================================================================

Number of shares 
 exercisable at 
 August 26, 1995                             833,038                                                $  .94-7.125 
                                             =======                                                ============

</TABLE> 
    
  In fiscal 1993, the Company issued a warrant to purchase 100,000 shares of 
common stock at an exercise price of $3.75 per share to an unrelated company 
providing consulting services. The warrant expires on February 28, 2003.

  In August 1995, the Board of Directors, subject to the approval of the 
shareholders at the 1996 annual shareholders meeting, amended the 1994 Omnibus 
Stock Plan to increase the aggregate number of shares that  may be purchased 
under the plan by an additional 500,000 shares.

- -------------------------------------------------------------------------------
/                                                                             \
/     Note 14          Employee Stock Purchase Plan                           \
/                                                                             \
- -------------------------------------------------------------------------------

The Company adopted an employee stock purchase plan (the "Plan") effective
January 1, 1989. The Plan enables employees to contribute up to 6 percent of
their wages toward the purchase of the Company's common stock at 85 percent of
the lower of market value at the beginning of the calendar year or the end of
the calendar year. At August 26, 1995, 322,278 shares were reserved for future
employee purchases of stock under the Plan. On December 31, 1994, 1993 and 1992,
139,582 shares were issued at $4.78 per share, 153,436 shares were issued at
$3.16 per share and 171,222 shares were issued at $1.70 per share, respectively,
under the Plan.

  In August 1995, the Board of Directors, subject to the approval of the 
shareholders at the 1996 annual shareholders meeting, amended the Plan to 
increase the number of shares that may be purchased under the Plan by 200,000 
shares. 

- -------------------------------------------------------------------------------
/                                                                             \
/     Note 15          Additional Sales Information                           \
/                                                                             \
- --------------------------------------------------------------------------------

International sales for the fiscal years ended 1995, 1994 and 1993 were 
approximately 37 percent, 33 percent and 34 percent, respectively, of total 
sales. (Included in these percentages and the table below are sales to 
affiliates. See note 6.) International sales by geographic area, consisting 
principally of export sales, are summarized as follows:

<TABLE> 
<CAPTION> 

                                  --------------------------------------------------------------
Fiscal years ended                            1995                    1994                  1993
- ------------------------------------------------------------------------------------------------
<S>                                <C>                           <C>                   <C> 

Asia                                   $42,363,000             $16,015,000           $15,021,000

Europe                                  27,092,000              14,854,000            11,457,000 

Other                                      149,000                 626,000               113,000
- ------------------------------------------------------------------------------------------------
                                       $69,604,000             $31,495,000           $26,591,000  
================================================================================================
</TABLE> 

  The following summarizes significant customers comprising 10 percent or more
of the Company's direct customer sales, which includes sales through affiliates 
to end users:

30  |  FSI INTERNATIONAL


                                     -147-
<PAGE>
 
<TABLE> 
<CAPTION> 
                     -----------------------------------------
                           1995           1994            1993
- --------------------------------------------------------------
<S>                         <C>            <C>             <C>   

Customer A                   16%            --              23%

Customer B                   --             21%             --

Customer C                   12%            --              --

Customer D                   11%            --              --
- --------------------------------------------------------------
"--" = less than 10%
</TABLE> 

- --------------------------------------------------------------------------------
/                                                                              \
/     Note 16          Research and Development Agreements                     \
/                                                                              \
- --------------------------------------------------------------------------------

The Company has received research and development funding commitments from third
party organizations. Such funds are not anticipated to cover all costs of the 
research and development projects involved. The funds received are recorded as 
reductions to research and development expenses. The Company recognized 
approximately $546,200, $1,342,100 and $1,202,700 of third party funding in 
fiscal years 1995, 1994 and 1993, respectively.

- --------------------------------------------------------------------------------
/                                                                              \
/     Note 17          License Agreement                                       \
/                                                                              \
- --------------------------------------------------------------------------------

A product is offered by the Company under a license agreement. Under the license
agreement, the Company has the exclusive right to sell and the non-exclusive 
right to manufacture the product, except that the licensor may manufacture and 
distribute the product for its own use. The Company also has the non-exclusive 
right to manufacture and sell related modules. The licensor may modify the 
Company's exclusive sales rights to a non-exclusive license if the Company fails
to use reasonable efforts in marketing the product. The license agreement 
requires a royalty payment to the licensor on the equipment manufactured and 
sold by the Company pursuant to the license. When certain aggregate sales 
amounts are achieved under the license agreement, the Company has the option of
reducing the royalty amount or converting the license to a fully paid, 
non-exclusive license. The license agreement continues until terminated. It may
be terminated by either party upon a breach by the other party, and the failure 
to cure, of certain terms of the agreement, including payment of royalties when 
due, refusal to sell products, and failure to meet quality standards.

- --------------------------------------------------------------------------------
/                                                                              \
/     Note 18          Supplementary Cash Flow Information                     \
/                                                                              \
- --------------------------------------------------------------------------------

The Company's non-cash investing and financing activities in fiscal 1993
included $117,195 for the purchase of equipment under capital leases. The
Company paid interest in fiscal 1995, 1994 and 1993 of $31,119, $442,688 and
$586,827, respectively. Income taxes paid in fiscal years 1995, 1994 and 1993
were $5,916,126, $1,751,000 and $595,691, respectively. In addition, the Company
realized, in fiscal years 1995, 1994 and 1993, a tax benefit from the exercise
of stock options in the amount of $747,278, $365,410 and $156,711,
respectively. 

- --------------------------------------------------------------------------------
/                                                                              \
/     Note 19          Common Stock                                            \
/                                                                              \
- --------------------------------------------------------------------------------

On June 1, 1995, the Board of Directors declared a two-for-one common stock 
split to stockholders of record as of June 13, 1995. All share information and 
per share information have been restated to reflect this stock split.

- --------------------------------------------------------------------------------
/                                                                              \
/     Note 20          Contingencies                                           \
/                                                                              \
- --------------------------------------------------------------------------------

In the normal course of business, the Company from time to time becomes involved
in litigation which may ultimately result in a liability to the Company. It is 
the opinion of management that facts known at the present time do not indicate 
that there is a probability that any such litigation would have a material 
effect on the Company's operations or its financial position. As of August 26, 
1995, the Company believes it is not involved in any material litigation.
 
                                                        FSI INTERNATIONAL  |  31

                                     -148-
<PAGE>
 
INDEPENDENT AUDITORS' REPORT

The Board of Directors and Stockholders
FSI International, Inc.:

We have audited the accompanying consolidated balance sheets of FSI 
International, Inc. and subsidiaries as of August 26, 1995 and August 27, 1994, 
and the related consolidated statements of operations, stockholders' equity and 
cash flows for each of the fiscal years in the three-year period ended August 
26, 1995. These consolidated financial statements are the responsibility of the 
Company's management. Our responsibility is to express an opinion on these 
consolidated financial statements based on our audits.

   We conducted our audits in accordance with generally accepted auditing 
standards. Those standards require that we plan and perform the audit to obtain 
reasonable assurance about whether the financial statements are free of material
misstatement. An audit includes examining, on a test basis, evidence supporting 
the amounts and disclosures in the financial statements. An audit also includes 
assessing the accounting principles used and significant estimates made by 
management, as well as evaluating the overall financial statement presentation. 
We believe that our audits provide a reasonable basis for our opinion.

   In our opinion, the consolidated financial statements referred to above 
present fairly, in all material respects, the financial position of FSI 
International, Inc. and subsidiaries as of August 26, 1995 and August 27, 1994, 
and the results of their operations and their cash flows for each of the fiscal 
years in the three-year period ended August 26, 1995, in conformity with 
generally accepted accounting principles.

/s/ KPMG Peat Marwick LLP

KPMG Peat Marwick LLP
Minneapolis, Minnesota
October 13, 1995

STATEMENT OF MANAGEMENT RESPONSIBILITY

The Company's management is responsible for the preparation, integrity and 
objectivity of the consolidated financial statements and other financial 
information presented in this report. The accompanying consolidated financial 
statements have been prepared in conformity with generally accepted accounting 
principles and reflect the effects of certain estimates and judgments made by 
management.

   Management relies upon established accounting procedures and related systems
of internal control for meeting its responsibilities to maintain reliable
financial records. These systems are designed to provide reasonable assurance
that assets are safeguarded and that transactions are properly recorded and
executed in accordance with management's intentions. Management believes that
the established system provides an acceptable balance between the benefits and
associated costs of internal controls.

   As part of their audit of the consolidated financial statements, KPMG Peat
Marwick LLP, the independent auditors, consider the internal control structure
of the Company to gain a basic understanding of the accounting system in order
to design an effective and efficient audit approach; however, it is not intended
to provide assurance on the system of internal control. Management recognizes
the constructive recommendations from the auditors as part of the auditing
process and responds to each suggestion.

   The Audit Committee of the Board of Directors, which consists of two outside 
and one inside director, meets periodically with management and the independent 
accountants to review accounting, reporting, auditing and internal control 
matters. The committee has direct and private access to the external auditors.

/s/ J A Elftmann                       /s/ Benno Sand

Joel A. Elftmann                       Benno Sand
Chairman, President and                Executive Vice President and
Chief Executive Officer                Chief Financial Officer

32 | FSI INTERNATIONAL


                                     -149-
<PAGE>

GLOSSARY


FSI PRODUCTS 


Chemical Management: FSI is the only equipment company to offer totally 
automated management and delivery of chemicals. This allows semiconductor 
manufacturers to store bulk acids and solvents outside the cleanroom, and then 
filter and dispense ultra-clean chemicals to equipment points-of-use.

Microlithography Clusters: These systems prime, coat, bake and develop 
photosensitive material called photoresist on wafer surfaces. FSI manufactures 
and distributes a microlithography cluster with advanced interface capability 
and high reliability.

Spray Processors: FSI is the technology and market leader in "wet cleaning" of 
silicon wafers through centrifugal spray processing. The Company's systems use a
computer-controlled, sequenced spray of chemicals to remove contamination, rinse
and dry the wafers. This approach provides high throughput, low cost of 
ownership and low environmental impact.

Vapor Phase Processors: FSI is pioneering this market with a system that uses 
gas and vapor to etch silicon dioxide from the wafer's surface. Benefits of 
this fully automated system include process uniformity, low operating costs and 
significant reduction in chemical waste.


INDUSTRY TERMS

Class 100/1000: A high-grade classification for a cleanroom or manufacturing 
facility, designating the number and size of particles per cubic foot of air.

Cluster: Refers to a modular cluster of process stations that form an enclosed 
work cell. FSI's POLARIS/R/ cluster consists of independent modules that can be 
configured in any combination. A robotic handler moves wafers from station to 
station while the wafers are primed, coated, baked and developed. 

CMP--chemical mechanical planarization: A process that removes unwanted material
from the wafer surface by using a chemical slurry containing abrasives along 
with mechanical equipment which applies pressure on a rotating platen to polish 
the surface.

Contaminants: Unwanted material that adversely affects the physical or 
electrical characteristics of a semiconductor wafer. 

Etching: The process of removing material from a silicon surface to form the 
microscopic "valleys" and "ridges" that make up a circuit.

Fabrication: The process of manufacturing a semiconductor that involves building
layer-upon-layer of circuitry on a silicon wafer.

Integrated Circuit: A semiconductor circuit combining the functions of many 
electronic components in a single piece of semiconductor material, usually 
silicon. These components are fabricated and interconnected on a single chip.

Semiconductor: Generally refers to integrated circuits or other solid state 
devices formed in semiconducting materials.

Slurry: The chemical used in the chemical mechanical planarization process: The 
chemical contains small particles, often silicon or alumina which aid in 
polishing.

Wafer: The starting material for semiconductor device manufacture; a thin, round
slice of semiconductor material, primarily silicon, on which integrated circuits
are made and then cut into semiconductor chips.

                                                        FSI INTERNATIONAL  |  33


                                     -150-
<PAGE>

QUARTERLY DATA


The Company's fiscal quarters are generally 13 weeks, ending on a Saturday. The
fiscal year ends on the last Saturday in August and is comprised of 52 or 53
weeks.

<TABLE> 
<CAPTION> 

                                              -------------------------------------------------------------------------------------
(in thousands, except per share data)           First Quarter          Second Quarter         Third Quarter          Fourth Quarter
- -----------------------------------------------------------------------------------------------------------------------------------
<S>                                             <C>                     <C>                    <C>                     <C> 

1995 (unaudited)/1/,/2/                                

Sales                                                 $30,184                 $42,728               $53,503                 $63,988 

Gross profit                                           13,921                  18,358                21,976                  24,146

Operating income                                        2,719                   4,848                 5,220                   6,840

Net income                                              3,050                   4,090                 5,006                   7,140 

Net income per common share                               .21                     .28                   .27                     .35 
- ------------------------------------------------------------------------------------------------------------------------------------
1994 (unaudited)/1/,/2/                          

Sales                                                 $21,415                 $20,707               $26,087                 $28,228 

Gross profit                                            8,750                   9,244                10,419                  12,236

Operating income                                        1,070                   1,160                 1,708                   1,416 
 
Net income                                              1,101                   1,218                 1,644                   1,683 

Net income per common share                               .10                     .09                   .12                     .12
- -----------------------------------------------------------------------------------------------------------------------------------
/1/All amounts have been adjusted to reflect the acquisition, effective March 8, 1995, of Applied Chemical Solutions, which 
acquisition was accounted for using the pooling-of-interests method of accounting. See Note 2 of Notes to Consolidated Financial 
Statements.

/2/Share information and per share information have been adjusted for a two-for-one common stock split. See Note 19 of Notes to 
Consolidated Financial Statements.
 
</TABLE> 

COMMON STOCK PRICES

 
The Company's common stock is traded on the Nasdaq National Market under the 
symbol FSII. The following table sets forth the highest and lowest stock prices,
as reported by the Nasdaq National Market.

<TABLE> 
<CAPTION> 

                       --------------------------------------------------
                                 1995                      1994
                       --------------------------------------------------
Fiscal quarter            High           Low         High          Low
- -------------------------------------------------------------------------
<S>                      <C>             <C>         <C>           <C>   

First                    $14 1/4        $ 8 5/8      $6 1/2       $4 5/8

Second                    18 1/8         12 1/8       6 7/8        4 7/8

Third                     26 5/8         17 3/8       7 7/8        5 1/4 

Fourth                    35             22 3/4       9            5 3/8
- -------------------------------------------------------------------------
</TABLE> 


  There were approximately 400 stockholder accounts of record on November 3, 
1995, approximately 50 of which are "street name" accounts that the Company 
estimates to represent approximately 6,000 stockholders.

  The Company has never declared or paid cash dividends on its common stock. The
Company currently intends to retain all earnings for use in its business, and 
does not anticipate paying dividends in the foreseeable future.  


                               [CHART GOES HERE]



34  |  FSI INTERNATIONAL


                                     -151-
<PAGE>
 
                     CORPORATE AND STOCKHOLDER INFORMATION

BOARD OF DIRECTORS

James A. Bernards
President
Facilitation, Incorporated
(Strategic planning,
directorships, organizational
development)

Neil R. Bonke
Chairman and Chief
Executive Officer
Electron, Inc.
(Automatic water probing 
equipment manufacturer)

Joel A. Elftmann
FSI Chairman, President and
Chief Executive Officer

Terrence W. Glarner
President
West Concord Ventures, Inc.
(Venture capital)

Robert E. Lorenzini
Chairman                 
SunPower Corporation
(Solar energy power
generation systems)

Dr. William M. Marcy
Associate Dean of Engineering
for Research and Administration
Texas Tech University

Charles R. Wofford
Business and Management
Consultant
(former Texas Instruments
executive officer)

CORPORATE OFFICERS

Joel A. Elftmann
Chairman, President
and Chief Executive Officer
Co-founded FSI in 1973

Dr. Robert E. Cavins
Senior Vice President,
Chemical Management Division
Joined FSI in 1993

Dale A. Courtney
Senior Vice President,
Surface Conditioning Division
Joined FSI in 1987

Timothy D. Krieg    
Vice President, Quality
and Human Resources
Joined FSI in 1979

Peter A. Pope
Executive Vice President,
Marketing and Account
Management
Joined FSI in 1982

Benno G. Sand
Executive Vice President
Chief Financial Officer
and Secretary
Joined FSI in 1982

Dr. Benjamin J. Sloan
Executive Vice President
Microisthography Division
Joined FSI in 1992

J. Wayne Stewart
Vice President, Operations
Joined FSI in 1994

CORPORATE
HEADQUARTERS

322 Lake Hazeltine Drive
Chaska, Minnesota
55318-1096
612/448-5440

COMMON STOCK

The common stock of FSI
International is traded on
the Nasdaq National Market
under the symbol FSII.

REGISTRAR AND
TRANSFER AGENT

Harris Trust & Savings Bank,
Shareholder Services Division
311 West Monroe Street
Chicago, Illinois 60606
312/461-2549

FORM 10-K

The Annual Reort on
Form 10-K filed with the
Securities and Exchange
Commission is available
to stockholders on request
by writing to:

Chief Financial Officer
FSI International, Inc.
322 Lake Hazeltine Drive
Chaska, Minnesota
55318-1096
612/448-8936

ANNUAL MEETING

All stockholders and other 
interested parties are 
invited to attend the Company's
annual meeting, scheduled for 
January 24, 1996 at 3:30 p.m.
at the Marriott Hotel Minneapolis
30 South Seventh Street
Minneapolis, Minnesota.

INDEPENDENT
AUDITORS

KPMG Peat Marwick LLP
Minneapolis, Minnesota

LEGAL COUNSEL

Faegre & Benson LLP
Minneapolis, Minnesota

INVESTOR RELATIONS
COUNSEL

Padilla Speer Beardsley Inc.
Minneapolis, Minnesota



                                     -152-
<PAGE>
 
                                  [FSI LOGO]

                            FSI International, Inc.

                            Corporate Headquarters

                           322 Lake Hazeltine Drive

                             Chaska, MN 55318 USA

                              Phone: 612/448-5440

                               Fax: 612/448-1300


                                     -153-

<PAGE>
 
                                                                    EXHIBIT 21.0
                                                                    ------------
                                 SUBSIDIARIES*
                                 ------------ 



                                                JURISDICTION OF
 NAME                                           INCORPORATION
 ----                                           -------------

Applied Chemical Solutions, Inc.                Minnesota
FSI International, Ltd.                         Guam
FSI Metron Europe, Limited                      England


    
_____________________
*    FSI International, Inc. also owns interests in Metron Technology B.V.
     (38%), and m-FSI, Ltd. (49%).


                                     -154-

<PAGE>
 
                                                                    EXHIBIT 23.0
                                                                    ------------



                         INDEPENDENT AUDITORS' CONSENT



The Board of Directors and Stockholders
FSI International, Inc.:


We consent to incorporation by reference in the registration statements (No.'s
33-29494, 33-39919, 33-33649, 33-33647, 33-39920, 33-42893, 33-77852, 33-77854,
and 33-60903) on Form S-8 of FSI International, Inc. of our reports dated
October 13, 1995, relating to the consolidated balance sheets of FSI
International, Inc. and subsidiaries as of August 26, 1995 and August 27, 1994,
and the related consolidated statements of operations, stockholders' equity and
cash flows and related financial statement schedule for each of the years in the
three-year period ended August 26, 1995, which reports appear in or are
incorporated by reference in the August 26, 1995 annual report on Form 10-K of
FSI International, Inc.
     

                                      /s/ KPMG PEAT MARWICK LLP
                                     ----------------------------
Minneapolis, Minnesota               
November 20, 1995



                                     -155-

<PAGE>
 
                                                                    Exhibit 23.1
                                                                    ------------


                         Independent Auditors' Consent


The Board of Directors and Stockholders
FSI International, Inc.:


We consent to incorporation by reference in the registration statements (No.'s
33-29494, 33-39919, 33-33649, 33-33647, 33-39920, 33-42893, 33-77852, 33-77854
and 33-60903) on Form S-8 of FSI International, Inc. of our report dated July
20, 1995, relating to the consolidated balance sheets of Metron Semiconductors
Europa B.V. and subsidiaries as of May 31, 1995 and 1994, and the related
consolidated statements of operations, stockholders' equity and cash flows for
each of the fiscal years in the three-year period ended May 31, 1995, which
report appears in or is incorporated by reference in the August 26, 1995 annual
report on Form 10-K of FSI International, Inc.


                                       /s/ KPMG ACCOUNTANTS N.V.


Amsterdam, The Netherlands
November 20, 1995


                                     -156-

<PAGE>
 
                                                                    EXHIBIT 24.0
                                                                    ------------



                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of FSI
International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and each
of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 9th day of October,
1995.



                                              /s/ James A. Bernards
                                              ---------------------
                                                James A. Bernards

                                     -157-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 16th day of October,
1995.



                                              /s/ Neil R. Bonke
                                              -----------------
                                                Neil R. Bonke

                                     -158-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 5th day of October,
1995.



                                              /s/ Joel A. Elftmann
                                              --------------------
                                                Joel A. Elftmann

                                     -159-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 16th day of October,
1995.



                                              /s/ Terrence W. Glarner
                                              -----------------------
                                                Terrence W. Glarner

                                     -160-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 19th day of October,
1995.



                                              /s/ Robert E. Lorenzini
                                              -----------------------
                                                Robert E. Lorenzini

                                     -161-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 14th day of October,
1995.



                                              /s/ William M. Marcy
                                              --------------------
                                                William M. Marcy




                                     -162-
<PAGE>
 
                               POWER OF ATTORNEY


     KNOW ALL BY MEN BY THESE PRESENTS, that I, the undersigned director of
FSI International, Inc. hereby appoint Joel A. Elftmann and Benno G. Sand, and
each of them (with full power to act alone), as attorneys and agents for the
undersigned, with full power of substitution, for and in name, place, and stead
of the undersigned, to sign and file with the Securities and Exchange Commission
under the Securities Exchange Act of 1934, as amended, the Annual Report on Form
10-K for the fiscal year ended August 26, 1995 of FSI International, Inc. and
any and all amendments and exhibits thereto, with full power and authority to do
and perform any and all acts and things whatsoever requisite and necessary or
desirable, as fully and effectually in all respects as I could do if personally
present.

     IN WITNESS WHEREOF, I have hereunto set my hand this 16th day of October,
1995.



                                              /s/ Charles R. Wofford
                                              ----------------------
                                                Charles R. Wofford



                                     -163-

<TABLE> <S> <C>

<PAGE>
 
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS RESTATED SUMMARY FINANCIAL INFORMATION EXTRACTED FROM FSI
INTERNATIONAL, INC.'S ANNUAL REPORT ON FORM 10-K FOR THE FISCAL YEAR ENDED
AUGUST 26, 1995 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH FINANCIAL
STATEMENTS.
</LEGEND>
<RESTATED>
       
<S>                             <C>                     <C>                     
<PERIOD-TYPE>                   12-MOS                  12-MOS
<FISCAL-YEAR-END>                          AUG-26-1995             AUG-27-1994
<PERIOD-START>                             AUG-28-1994             AUG-29-1993
<PERIOD-END>                               AUG-26-1995             AUG-27-1994
<CASH>                                      97,143,176              10,724,729
<SECURITIES>                                14,059,682                       0
<RECEIVABLES>                               49,004,508              22,138,104
<ALLOWANCES>                                 1,225,000                 525,000
<INVENTORY>                                 31,859,135              16,452,665
<CURRENT-ASSETS>                           201,032,171              54,734,736
<PP&E>                                      34,724,424              17,616,072
<DEPRECIATION>                              15,371,905              12,472,828
<TOTAL-ASSETS>                             233,341,387              69,356,869
<CURRENT-LIABILITIES>                       54,902,637              26,956,615
<BONDS>                                              0                       0
<COMMON>                                   144,379,884              28,719,418
                                0                       0
                                          0                       0
<OTHER-SE>                                  33,830,597              13,647,608
<TOTAL-LIABILITY-AND-EQUITY>               233,841,387              69,356,869
<SALES>                                    190,403,364              96,437,653
<TOTAL-REVENUES>                           190,403,364              96,437,653
<CGS>                                      112,002,351              55,788,375
<TOTAL-COSTS>                              112,002,351              55,788,375
<OTHER-EXPENSES>                                     0                       0
<LOSS-PROVISION>                                     0                       0
<INTEREST-EXPENSE>                              27,745                 417,521
<INCOME-PRETAX>                             21,800,348               5,100,384
<INCOME-TAX>                                 5,926,000               1,254,000
<INCOME-CONTINUING>                         19,285,686               5,646,134
<DISCONTINUED>                                       0                       0
<EXTRAORDINARY>                                      0                       0
<CHANGES>                                            0                       0
<NET-INCOME>                                19,285,686               5,646,134
<EPS-PRIMARY>                                    $1.14                    $.43
<EPS-DILUTED>                                    $1.13                    $.43
<FN>

All financial statements are restated to reflect the merger with ACS which was 
accounted for as a pooling of interests. All share and per share amounts are 
restated to reflect a 2-for-1 stock split to holders of record on June 13, 1995.
</FN>
        


</TABLE>


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