FSI INTERNATIONAL INC, 10-K, 1999-11-24

Exhibit 21.0

SUBSIDIARIES

NAME		JURISDICTION OF INCORPORATION
FSI International, Ltd.		Guam
SCD Mountain View, Inc.		Minnesota
Semiconductor Systems, Inc.		California

*: FSI International, Inc. also owns interests in Metron Technology B.V. (21.8%) and m•FSI, Ltd. (49%).