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Previous: FSI INTERNATIONAL INC, 10-K, EX-10.27, 2000-11-21 |
Next: FSI INTERNATIONAL INC, 10-K, EX-23.0, 2000-11-21 |
<PAGE> 1
EXHIBIT 21.0
SUBSIDIARIES
<TABLE>
<CAPTION>
JURISDICTION OF
NAME INCORPORATION
---- -------------
<S> <C>
FSI International, Ltd. Guam
SCD Mountain View, Inc. Minnesota
Semiconductor Systems, Inc. California
</TABLE>
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* FSI International, Inc. also owns interests in Metron Technology B.V. (20.4%)
and m-FSI, Ltd. (49%).
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