ETEC SYSTEMS INC, 424B4, 1996-06-25

ETEC SYSTEMS INC
424B4, 1996-06-25
SPECIAL INDUSTRY MACHINERY, NEC

Previous: MESA OPERATING CO, S-3/A, 1996-06-25

Next: CNB INC /FL, S-4/A, 1996-06-25

<PAGE>

Rule 424(b)(4)
File No. 333-04363

[LOGO OF ETEC]

4,350,000 SHARES

COMMON STOCK

Of the 4,350,000 shares of Common Stock offered hereby, 250,000 shares are
being issued and sold by Etec Systems, Inc. ("Etec" or the "Company") and
4,100,000 shares are being sold by the Selling Stockholders. See "Principal
and Selling Stockholders." The Company will not receive any of the proceeds
from the sale of shares by the Selling Stockholders. On June 24, 1996 the last
sale price of the Common Stock, as reported on the Nasdaq National Market, was
$21.50 per share. See "Price Range of Common Stock." The Common Stock trades
on the Nasdaq National Market under the symbol "ETEC."

Concurrently with the closing of this offering, Intel Corporation ("Intel")
will purchase $10.0 million of Common Stock directly from the Company at the
Price to Public, together with certain warrants. See "Investment by Intel."

----------------

THE COMMON STOCK OFFERED HEREBY INVOLVES A HIGH DEGREE OF RISK.
SEE "RISK FACTORS" AT PAGE 7.

----------------

THESE SECURITIES HAVE NOT BEEN APPROVED OR DISAPPROVED BY THE SECURITIES
AND EXCHANGE COMMISSION OR ANY STATE SECURITIES COMMISSION NOR HAS
THE COMMISSION OR ANY STATE SECURITIES COMMISSION PASSED UPON
THE ACCURACY OR ADEQUACY OF THIS PROSPECTUS. ANY
REPRESENTATION TO THE CONTRARY IS A CRIMINAL OFFENSE.

- -------------------------------------------------------------------------------
- -------------------------------------------------------------------------------
<TABLE>
<CAPTION>
UNDERWRITING PROCEEDS TO
PRICE TO DISCOUNTS AND PROCEEDS TO SELLING
PUBLIC COMMISSIONS COMPANY(1) STOCKHOLDERS
- --------------------------------------------------------------------------------
<S> <C> <C> <C> <C>
Per Share................... $20.00 $1.00 $19.00 $19.00
- --------------------------------------------------------------------------------
Total(2).................... $87,000,000 $4,350,000 $4,750,000 $77,900,000
</TABLE>
- -------------------------------------------------------------------------------
- -------------------------------------------------------------------------------
(1) Before deducting expenses payable by the Company, estimated at $400,000.

(2) The Company has granted to the Underwriters a 30-day option to purchase up
to an additional 652,500 shares of Common Stock solely to cover over-
allotments, if any. See "Underwriting." If such option is exercised in
full, the total Price to Public, Underwriting Discounts and Commissions
and Proceeds to Company will be $100,050,000, $5,002,500 and $17,147,500,
respectively.

----------------

The Common Stock is offered by the Underwriters as stated herein, subject to
receipt and acceptance by them and subject to their right to reject any order
in whole or in part. It is expected that delivery of such shares will be made
through the offices of Robertson, Stephens & Company LLC ("Robertson, Stephens
& Company"), San Francisco, California, on or about June 28, 1996.

ROBERTSON, STEPHENS & COMPANY NEEDHAM & COMPANY, INC.

The date of this Prospectus is June 25, 1996
<PAGE>

[GRAPHIC: SEE APPENDIX]

IN CONNECTION WITH THIS OFFERING, THE UNDERWRITERS MAY OVER-ALLOT OR EFFECT
TRANSACTIONS WHICH STABILIZE OR MAINTAIN THE MARKET PRICE OF THE COMMON STOCK
OF THE COMPANY AT A LEVEL ABOVE THAT WHICH MIGHT OTHERWISE PREVAIL IN THE OPEN
MARKET. SUCH STABILIZING, IF COMMENCED, MAY BE DISCONTINUED AT ANY TIME.

IN CONNECTION WITH THIS OFFERING, CERTAIN UNDERWRITERS AND SELLING GROUP
MEMBERS OR THEIR AFFILIATES MAY ENGAGE IN PASSIVE MARKET MAKING TRANSACTIONS
IN THE COMPANY'S COMMON STOCK ON NASDAQ IN ACCORDANCE WITH RULE 10b-6a UNDER
THE SECURITIES EXCHANGE ACT OF 1934. SEE "UNDERWRITING."

<PAGE>

NO DEALER, SALES REPRESENTATIVE OR ANY OTHER PERSON HAS BEEN AUTHORIZED TO
GIVE ANY INFORMATION OR TO MAKE ANY REPRESENTATIONS IN CONNECTION WITH THIS
OFFERING OTHER THAN THOSE CONTAINED IN THIS PROSPECTUS, AND, IF GIVEN OR MADE,
SUCH INFORMATION OR REPRESENTATIONS MUST NOT BE RELIED UPON AS HAVING BEEN
AUTHORIZED BY THE COMPANY, ANY SELLING STOCKHOLDER OR ANY UNDERWRITER. THIS
PROSPECTUS DOES NOT CONSTITUTE AN OFFER TO SELL, OR A SOLICITATION OF AN OFFER
TO BUY, ANY SECURITIES OTHER THAN THE REGISTERED SECURITIES TO WHICH IT
RELATES OR AN OFFER TO, OR A SOLICITATION OF, ANY PERSON IN ANY JURISDICTION
WHERE SUCH AN OFFER OR SOLICITATION WOULD BE UNLAWFUL. NEITHER THE DELIVERY OF
THIS PROSPECTUS NOR ANY SALE MADE HEREUNDER SHALL, UNDER ANY CIRCUMSTANCES,
CREATE ANY IMPLICATION THAT THERE HAS BEEN NO CHANGE IN THE AFFAIRS OF THE
COMPANY SINCE THE DATE HEREOF OR THAT THE INFORMATION CONTAINED HEREIN IS
CORRECT AS OF ANY TIME SUBSEQUENT TO THE DATE HEREOF.

----------------

TABLE OF CONTENTS

<TABLE>
<CAPTION>
PAGE
----
<S> <C>
Prospectus Summary........................................................ 4
Risk Factors.............................................................. 7
The Company............................................................... 16
Investment by Intel....................................................... 17
Use of Proceeds........................................................... 17
Price Range of Common Stock............................................... 18
Dividend Policy........................................................... 18
Capitalization............................................................ 19
Selected Consolidated Financial Data...................................... 20
Management's Discussion and Analysis of Financial Condition and Results of
Operations............................................................... 22
Business.................................................................. 34
Management................................................................ 54
Certain Transactions...................................................... 62
Principal and Selling Stockholders........................................ 65
Description of Capital Stock.............................................. 68
Shares Eligible for Future Sale........................................... 71
Underwriting.............................................................. 73
Legal Matters............................................................. 74
Experts................................................................... 74
Change in Accountants..................................................... 74
Additional Information.................................................... 74
Index to Consolidated Financial Statements................................ F-1
</TABLE>

----------------

MEBES(R), CORE(R), Etec(R), the Etec logo, Polyscan and ALTA(R) are
trademarks of the Company. This Prospectus also includes trademarks and trade
names of other companies.

3
<PAGE>

PROSPECTUS SUMMARY

The following summary is qualified in its entirety by the more detailed
information, including "Risk Factors" and the consolidated financial statements
and notes thereto, appearing elsewhere in this Prospectus.

THE COMPANY

Etec Systems, Inc. ("Etec" or the "Company") is the world leader in the
production of mask pattern generation equipment for the semiconductor industry.
Etec designs, develops, manufactures and markets equipment that produces high
precision masks, which are used to print circuit patterns onto semiconductor
wafers. Etec sells its MEBES electron beam systems and its CORE and ALTA laser
beam systems at prices currently ranging from approximately $2.5 million to
$7.5 million each and accessories and upgrades at prices currently ranging from
approximately $1.5 million to $5.0 million each. The Company also derives
significant revenues from service and support of its installed base of systems.
The Company believes that over 230 commercial electron beam and laser beam mask
pattern generation systems are currently installed outside the former Eastern
Bloc, of which over 155 have been produced by Etec.

The Company believes that advanced masks and mask pattern generation tools
are becoming strategically important to the advancement of semiconductor
technology. During the second half of the 1980s and the beginning of the 1990s,
the maskmaking equipment industry experienced an extended period of slow
growth, primarily as a result of several advances in semiconductor production
methods that sharply reduced the number of mask units required and the
precision requirements for masks. The effects of these advances in production
methods have largely run their course, which the Company believes will result
in mask demand more closely correlating with semiconductor demand. In addition,
as semiconductor devices have become more complex, the semiconductor
manufacturing process has become very sensitive to mask errors, requiring more
complex masks and, as a result, increasingly sophisticated mask pattern
generation tools.

The Company is the only maskmaking equipment manufacturer currently offering
both electron beam and laser beam systems. The Company believes that the
different performance and cost characteristics of electron beam and laser beam
systems satisfy the broad range of technical requirements and cost
sensitivities of its customers. The Company's systems are designed to provide a
low cost of ownership through high performance, reliability and ease of
maintenance.

The Company's goal is to maintain its leadership position in pattern
generation for the semiconductor market and leverage its expertise to pursue
other opportunities in high performance imaging. To maintain technology
leadership, the Company intends to continue to work closely with major
customers and seek strategic alliances with other semiconductor industry
participants to identify the leading-edge requirements for semiconductor
maskmaking. In addition, Etec plans to develop or acquire lithography-related
products that serve other markets having technology and market links with its
business, such as direct imaging and maskmaking for large-area applications. In
furtherance of this strategy, the Company acquired substantially all of the
assets of Polyscan, Inc. ("Polyscan"), a developer of laser direct imaging
systems for large-area pattern generation applications, in February 1996. The
Company also intends to continue to emphasize the compatibility of its new
systems with its installed systems and to provide superior technical service
and support to its customers.

4
<PAGE>

Japan, South Korea and Europe through its sales offices in California, Japan,
South Korea and France. Customers in Southeast Asia, China and India are
currently covered by sales representatives with assistance by the Company's
sales and marketing staff in California.

THE OFFERING

<TABLE>
<C> <S>
Common Stock offered by the Company............... 250,000 shares
Common Stock offered by the Selling Stockholders.. 4,100,000 shares
Common Stock to be outstanding after the offering. 18,908,335 shares(1)
Use of proceeds................................... For capital expenditures
and for general corporate
purposes including working
capital.
Nasdaq National Market symbol..................... ETEC
</TABLE>
- --------

(1) Includes 500,000 shares to be sold to Intel pursuant to a private placement
concurrently with the consummation of this offering. See "Investment by
Intel." Also includes 73,221 shares to be issued to Selling Stockholders
for sale in this offering upon the exercise of stock options, all of which
were outstanding as of April 30, 1996. Excludes 1,391,012 shares of Common
Stock issuable upon exercise of other stock options and 376,997 shares
issuable upon exercise of warrants as of April 30, 1996, and excludes
warrants to purchase 75,000 shares of Common Stock to be issued to Intel
concurrently with the consummation of this offering. See "Capitalization"
and Note 5 and Note 9 of Notes to Consolidated Financial Statements.

5
<PAGE>

SUMMARY CONSOLIDATED FINANCIAL DATA
(in thousands, except per share amounts)

<TABLE>
<CAPTION>
PRO
NINE FORMA
MONTHS NINE
ENDED MONTHS
YEAR ENDED JULY 31, APRIL 30, ENDED
------------------------- ------------------ APRIL 30,
1993 1994 1995(1) 1995 1996(2)(3) 1996(4)
-------- ------- ------- ------- ---------- ---------
<S> <C> <C> <C> <C> <C> <C>
STATEMENT OF OPERATIONS
DATA:
Revenue................. $ 58,582 $68,710 $82,916 $61,045 $98,035 $98,035
Gross profit............ 16,644 25,481 35,297 25,623 43,635 43,635
Write-off of in-process
technology acquired(5). -- -- -- -- 6,269 --
Income (loss) from
operations............. (4,439) 9,576 11,403 9,477 10,402 15,540
Income (loss) before
income tax provision
(benefit), minority
interest and
extraordinary items.... (9,530) 4,390 7,340 6,011 11,083 16,429
Net income (loss)....... (11,409) 1,612 9,936 4,018 21,846 27,192
Net income (loss) per
share.................. $ (0.94) $ 0.12 $ 0.68 $ 0.28 $ 1.23 $ 1.51
Weighted average common
shares(6).............. 12,168 14,008 14,594 14,594 17,750 17,996
</TABLE>

<TABLE>
<CAPTION>
APRIL 30, 1996
------------------------------------
PRO FORMA AS
ACTUAL PRO FORMA(7) ADJUSTED(7)(8)
-------- ------------ --------------
<S> <C> <C> <C>
BALANCE SHEET DATA:
Cash and investments....................... $ 40,996 $ 50,996 $ 55,379
Working capital............................ 74,052 84,052 88,435
Total assets............................... 157,482 168,082 172,465
Long-term debt, less current portion....... 7,625 7,625 7,625
Total stockholders' equity................. 73,377 83,977 88,360
</TABLE>
- --------
(1) Net income (loss) reflects the inclusion of an extraordinary gain of $5.4
million recorded as a result of the early extinguishment of $19.7 million
of subordinated notes payable and accrued interest. See Note 3 of Notes to
Consolidated Financial Statements.
(2) Net income (loss) reflects the inclusion of an extraordinary loss of
$300,000 recorded as a result of the early extinguishment of $5.0 million
of secured notes payable.
(3) Net income (loss) reflects a $15.4 million tax benefit realized as a result
of reversing a portion of the Company's valuation allowance associated with
certain deferred tax assets. See Note 6 of Notes to Consolidated Financial
Statements.
(4) Pro forma statement of operations data reflects the consolidated results of
the Company after giving effect to the acquisition of substantially all of
the assets and certain specified liabilities of Polyscan assuming that the
acquisition took place on August 1, 1995.
(5) In 1996, the Company wrote off $6.3 million of in-process technology in
conjunction with its acquisition of substantially all of the assets and
certain specified liabilities of Polyscan. See Note 13 of Notes to
Consolidated Financial Statements.
(6) Computed on the basis described in Note 1 of Notes to Consolidated
Financial Statements.

(7) Pro forma balance sheet data reflects the sale of $10.0 million of Common
Stock to Intel at a price of $20.00 per share and the issuance of warrants
to Intel. See "Investment by Intel."

(8) Reflects the event specified in footnote (7) above, and as adjusted to
reflect the sale by the Company of the 250,000 shares of Common Stock being
offered hereby after deducting underwriting discounts and commissions and
estimated offering expenses payable by the Company, and the application of
the estimated net proceeds therefrom as set forth under "Use of Proceeds."
Also reflects the issuance of 73,221 shares of Common Stock to Selling
Stockholders for sale in this offering upon the exercise of stock options.
See "Capitalization."

Unless otherwise indicated, all information in this Prospectus assumes no
exercise of the Underwriters' over-allotment option. The Company prepares its
financial statements on the basis of a 52-53 week fiscal year. For purposes of
presentation, fiscal periods are indicated as ending at calendar month- and
year-ends. This Prospectus contains, in addition to historical information,
forward-looking statements that involve risks and uncertainties. The Company's
actual results could differ significantly from the results discussed in the
forward-looking statements. Factors that could cause or contribute to such
differences include, but are not limited to, those discussed in "Risk Factors."

6
<PAGE>

RISK FACTORS

In addition to the other information in this Prospectus, the following risk
factors should be considered carefully in evaluating the Company and its
business before purchasing the shares of Common Stock offered hereby. This
Prospectus contains forward-looking statements that involve risks and
uncertainties. The Company's actual results may differ significantly from the
results discussed in the forward-looking statements. Factors that could cause
or contribute to such differences include, but are not limited to, those
discussed below.

CYCLICALITY OF THE MASKMAKING AND SEMICONDUCTOR INDUSTRIES

The Company's operating results depend on capital expenditures by
maskmakers, which in turn depend on the current and anticipated demand for
masks, integrated circuits made from masks and products that use such
integrated circuits. Although the semiconductor industry has experienced
significant growth in recent years, there can be no assurance that such growth
will be sustained. The ratio of semiconductor orders to shipments (the "book-
to-bill" ratio) for U.S.-based semiconductor manufacturers, as reported by the
Semiconductor Industry Association, has declined to less than one in recent
periods. Moreover, the overall semiconductor industry has been and is likely
to continue to be cyclical with periods of oversupply. A downturn in the
demand for semiconductors would likely reduce the demand for masks and could
reduce the demand for the Company's maskmaking equipment. The Company's
ability to reduce expenses in response to any such downturn is limited by its
need for continued investment in research and development and in customer
service and support. Previous downturns in capital investment by the
maskmaking industry have materially adversely affected the Company's business,
financial condition and results of operations in prior periods, and future
downturns may have similar material adverse effects. In addition, due to
changes in semiconductor manufacturing technology, at times the demand for
maskmaking equipment has been depressed while the demand for semiconductor
devices remained strong. A downturn in demand for maskmaking equipment would
have a material adverse effect on the Company's business, financial condition
and results of operations. See "Business--Industry Background."

FLUCTUATIONS IN OPERATING RESULTS

The Company's operating results have historically been subject to
significant quarterly and annual fluctuations. The Company believes that its
operating results will continue to fluctuate quarterly and annually due to a
variety of factors, including the cyclicality of the maskmaking and
semiconductor industries, patterns of capital spending by customers, the
timing of significant orders, order cancellations and shipment reschedulings,
market acceptance of the Company's products, fluctuations in the grant and
funding of development contracts, consolidation of mask shops, unanticipated
delays in design, engineering or production or in customer acceptance of
product shipments, changes in pricing by the Company or its competitors, the
timing of product announcements or introductions by the Company or its
competitors, the mix of systems sold, the relative proportions of product
revenues and service revenues, the timing of payments of sales commissions,
the availability of components and subassemblies, changes in product
development costs, expenses associated with acquisitions and exchange rate
fluctuations. In any particular period, average gross margin per system
shipped may vary significantly depending on the types of systems shipped, the
specific configuration of each shipped system, and potential differences in
selling prices among systems ordered at

7
<PAGE>

different times. Over the last seven quarters the Company's gross margin has
fluctuated from approximately 39% to 47% of revenues. The Company anticipates
that its gross margin will continue to fluctuate. The Company's net income and
cash flow will also be affected by its ability to apply its net operating loss
carryforwards ("NOLs"), which totaled approximately $27.3 million for federal
income tax purposes at April 30, 1996, against taxable income in future
periods. Under the Tax Reform Act of 1986, the amount of the benefit from NOLs
may be impaired or limited in certain circumstances, including a cumulative
stock ownership change of more than 50% over a three-year period. The
consummation of this offering will result in a cumulative change in ownership
of the Company in excess of 50%, measured over the past three-year period. As
a result, based on the Company's market value on June 24, 1996, the Company's
utilization of the NOLs cannot exceed approximately $19.0 million per fiscal
year commencing with the completion of this offering. This limitation could
have an adverse effect on the Company's net income. The Company cannot predict
the impact of these and other factors on its financial performance in any
future period.

IMPORTANCE OF RECENTLY INTRODUCED PRODUCTS

The Company's future success depends upon the market's acceptance of new
generations of its systems. The Company commenced shipments of its MEBES 4500
electron beam systems in June 1995 and of its ALTA 3000 laser beam systems in
June 1994, both of which are targeted at the 0.25- to 0.35-micron generation
of semiconductor devices currently in pilot production and under development.
The Company has limited experience with the production of the MEBES 4500 and
ALTA 3000 systems, having shipped five MEBES 4500 systems, two MEBES 4500
upgrades and seven ALTA 3000 systems to date. Any technical or manufacturing
difficulties with these systems (or subsequent generations of the Company's
systems) would have a material adverse effect on the Company's business,
financial condition and results of operations. In addition, there can be no
assurance that the market for the leading-edge applications targeted by the
MEBES 4500 and ALTA 3000 systems will develop as quickly or to the degree that
the Company currently anticipates.

RAPID TECHNOLOGICAL CHANGE; DEPENDENCE ON PRODUCT DEVELOPMENT

The semiconductor industry in general, and the maskmaking industry in
particular, are characterized by rapid technological change and evolving
industry standards. As a result, the Company must continue to enhance its
existing products and to develop and manufacture new products and upgrades
with improved capabilities. This has required and will continue to require
substantial investments in research and development by the Company to advance
a number of state-of-the-art technologies. Continuous investments in research
and development will also be required to respond to the emergence of new mask
technologies, such as optical proximity correction ("OPC") and phase shift
mask ("PSM") technologies. The failure to develop, manufacture and market new
products, or to enhance existing products, would have a material adverse
effect on the Company's business, financial condition and results of
operations. In addition, the Company's competitors can be expected to continue
to develop and introduce new and enhanced products, any of which could cause a
decline in market acceptance of the Company's products or a reduction in the
Company's margins as a result of intensified price competition.

Changes in mask or semiconductor manufacturing processes could also have a
material adverse effect on the Company's business, financial condition and
results of operations. The Company anticipates continued changes in
semiconductor and pattern generation technologies and processes, which may
include the development of product or process technologies that extend the
useful lives of previously sold maskmaking tools. For example, the Company's
sales were materially adversely affected for several years from the mid-1980s
to the early 1990s due to the introduction of "5X" reduction steppers. See
"Business--Industry Background." There can be no assurance that the Company
will be able to develop, manufacture and sell products that respond adequately
to such changes.

The Company's success in developing and selling new and enhanced products
depends upon a variety of factors, including accurate prediction of future
customer requirements, introduction of new products on schedule, cost-
effective manufacturing and product performance in the field. The Company's
new product

8
<PAGE>

decisions and development commitments must anticipate the equipment needed to
satisfy the requirements for lithography processes three or more years in
advance of sales. Any failure to predict accurately customer requirements and
to develop new generations of products to meet those requirements would have a
sustained material adverse effect on the Company's business, financial
condition and results of operations. New product transitions could adversely
affect sales of existing systems, and product introductions could contribute
to quarterly fluctuations in operating results as orders for new products
commence and orders for existing products decline. There can be no assurance
that the Company will be successful in selecting, developing, manufacturing
and marketing new products or enhancements of existing products.

DEPENDENCE ON KEY SUPPLIERS; AVAILABILITY OF CRITICAL COMPONENTS

The Company does not maintain any long-term supply agreements with any of
its suppliers, and the majority of the critical components and subassemblies
included in the Company's products are obtained from sole source suppliers or
a limited group of suppliers. The manufacture of certain components and
subassemblies is very complex and requires long lead times. The Company's
systems cannot be produced without certain sole sourced, critical components.
Alternative suppliers for many of these components may not be readily
available, and no substantial increase in the number of alternative suppliers
is anticipated. In addition, the Company intends to rely to an increasing
degree on outside suppliers because of their specialized expertise in
component fabrication and subsystem assembly. However, some of the Company's
suppliers may be unwilling or unable to produce sufficient volumes of key
components to keep pace with the demand for the Company's systems and
upgrades, or to permit the Company to provide customers with an adequate
supply of spare parts.

The Company's reliance on a limited group of suppliers, and particularly on
sole source suppliers, involves several risks, including the potential
inability to obtain an adequate supply of components and reduced control over
pricing and delivery time. To date, the Company has generally been able to
obtain adequate, timely delivery of critical subassemblies and components,
although it has experienced occasional delays. Due to occasional shortfalls in
supply, the Company has from time to time attempted to develop and manufacture
critical parts and subassemblies. In addition, the Company is attempting to
modify product designs to avoid the use of currently obsolete electronic
components. For example, certain components in the Company's MEBES systems
were designed for the MEBES system architecture, which was developed over 20
years ago. In addition, the ALTA data path and portions of the CORE system
contain components that have been or are being discontinued due to
obsolescence. There can be no assurance that delays or shortages caused by
suppliers will not occur in the future or that the Company will be successful
in developing critical components internally or in modifying product designs
to avoid the use of obsolete components. Any inability to obtain adequate,
timely deliveries of subassemblies and components could prevent the Company
from meeting scheduled shipment dates, which would damage relationships with
current and prospective customers and materially adversely affect the
Company's business, financial condition and results of operations. Future
shortages of components from these limited sources could also require the
Company to expend resources on internal parts development and production, or
to alter product designs, which could have a material adverse effect on the
Company's business and results of operations. See "Business--Manufacturing."

LIMITED MANUFACTURING CAPACITY

The Company's systems have a large number of components and are highly
complex. The Company has experienced delays from time to time in manufacturing
and delivering its systems and upgrades and may experience similar delays in
the future. Any inability to manufacture and ship systems or upgrades on
schedule could adversely affect the Company's relationships with its customers
and thereby materially adversely affect the Company's business, financial
condition and results of operations. The Company's ability to increase its
manufacturing capacity in response to an increase in demand is limited given
the complexity of the manufacturing process, the lengthy lead times necessary
to obtain critical components and the need for highly skilled personnel.
However, manufacturing capacity is not currently limited by facility
constraints. The failure of the Company to keep pace with customer demand
could lead to extensions of delivery times, which could

9
<PAGE>

deter customers from placing additional orders, and could adversely affect
product quality. In an effort to keep pace with customer demand and to shorten
delivery times, the Company is outsourcing significant subassemblies, is
performing vendor certifications, is partnering to reduce lead times on
critical components, and is attempting to standardize its bills of materials.
Additionally, the Company is attempting to attract additional skilled
personnel. There can be no assurance that these efforts will be successful in
increasing the Company's manufacturing capacity.

The Company conducts all of its manufacturing activities at its leased
facilities in Hayward, California, Beaverton, Oregon and Tucson, Arizona. The
Company's Hayward facility is located in a seismically active area. Although
the Company maintains business interruption insurance, a major catastrophe
(such as an earthquake or other natural disaster) at the Hayward or Beaverton
sites could result in a prolonged interruption of the Company's business. All
of the Company's electron beam systems are produced in Hayward, and all of its
CORE and ALTA laser beam systems are produced in Beaverton. Neither facility
is equipped to produce the type of system produced by the other.

CONCENTRATION OF CUSTOMERS; LIMITED CONCURRENT SELLING OPPORTUNITIES

Historically, the Company has sold a significant proportion of its systems
to a limited number of customers. Sales to the Company's ten largest customers
accounted for approximately 76%, 74% and 80% of total revenues in fiscal 1994,
fiscal 1995 and the first nine months of fiscal 1996, respectively. Sales to
the largest customer during those periods accounted for approximately 13%, 14%
and 19% of total revenues, respectively. Opportunities for new system sales
are episodic, because the number of captive and merchant mask shops worldwide
is limited and each mask shop has historically purchased at most one or two
pattern generation tools per year. As a particular customer completes a new or
expanded facility or production line, sales to that customer may decrease
sharply. The failure to replace such sales with sales to other customers in
succeeding periods would have a material adverse effect on the Company's
business, financial condition and results of operations. The Company expects
that sales to relatively few customers will continue to account for a high
percentage of the Company's revenues in any accounting period in the
foreseeable future. A reduction in orders from any such customer or the
cancellation of any significant order could have a material adverse effect on
the Company's business, financial condition and results of operations. None of
the Company's customers has entered into a long-term agreement requiring it to
purchase the Company's products. See "Business--Customers."

DEPENDENCE ON KEY EMPLOYEES; NEW MANAGEMENT; MANAGEMENT OF GROWTH

The Company's operating results will depend significantly upon the continued
contributions of its officers and key management, engineering, manufacturing,
marketing, customer support and sales personnel, many of whom would be
difficult to replace. The Company does not have an employment agreement with
any of its employees or maintain key person life insurance with respect to any
employee. The loss of any key employee could have a material adverse effect on
the Company's business, financial condition and results of operations.
Employees of the Company are currently required to enter into a
confidentiality agreement as a condition of their employment. However, these
agreements do not expressly prohibit the employees from competing with the
Company after leaving its employ, and certain of its former employees
currently provide services or technical support to the Company's customers or
for its competitors.

The Company's operating results will depend in significant part upon its
ability to attract and retain other qualified management, engineering,
manufacturing, marketing, customer support and sales personnel. Competition
for such personnel is intense, and there can be no assurance that the Company
will be successful in attracting and retaining such personnel. The failure to
attract and retain such personnel could have a material adverse effect on the
Company's business, financial condition and results of operations.

Certain of the Company's senior management, including its Chief Executive
Officer, Chief Financial Officer, Vice President, Operations, and Vice
President, Human Resources and Administration and the General Manager of the
Company's subsidiary, Etec Polyscan, Inc., joined the Company within the past
three

10
<PAGE>

and one-half years. The Company's ability to compete effectively and to
execute its strategies will depend in part upon its ability to integrate these
and future new managers into its operations. The Company continues to require
additional managerial and technical personnel due to its recent growth, and
occasional delays in filling key positions have placed additional burdens on
existing personnel. There can be no assurance that the Company will be
successful in attracting and retaining qualified managerial and technical
personnel sufficient to meet its requirements. See "Business--Employees" and
"Management."

The recent growth in the Company's sales and expansion of its operations has
placed a considerable strain on its management, financial, manufacturing and
other resources and has required the Company to implement and improve a
variety of operating, financial and other systems, procedures and controls.
There can be no assurance that any existing or new systems, procedures or
controls will be adequate to support the Company's operations or that its
systems, procedures and controls will be designed, implemented or improved in
a cost-effective and timely manner. Any failure to implement, improve and
expand such systems, procedures and controls in an efficient manner at a pace
consistent with the Company's business could have a material adverse effect on
the Company's business, financial condition and results of operations.

ACQUISITIONS

The Company's business strategy includes expanding its product lines and
markets through internal product development or acquisitions. See "Business--
Strategy." Any acquisition may result in potentially dilutive issuances of
equity securities, the incurrence of debt and contingent liabilities,
potential reductions in income due to losses incurred by the acquired
business, and amortization expense related to intangible assets acquired, any
of which could materially adversely affect the Company's financial condition
and results of operations. For example, in the third quarter of fiscal 1996,
the Company wrote off $6.3 million of in-process technology relating to the
acquisition of substantially all of the assets of Polyscan described below.
Any acquisition will involve numerous risks, including difficulties in the
assimilation of the acquired company's operations and products, uncertainties
associated with operating in new markets and working with new customers, and
the potential loss of the acquired company's key employees. To date, the
Company has had limited experience in integrating businesses operating in
markets other than semiconductor maskmaking equipment.

In February 1996, Etec Polyscan, Inc., a wholly-owned subsidiary of the
Company ("Etec Polyscan"), acquired substantially all of the assets and
assumed certain liabilities of Polyscan, a development-stage company based in
Tucson, Arizona that designs and develops laser direct imaging systems for
printed circuit board and multi-chip module applications, for 350,000 shares
of the Company's Common Stock. Etec Polyscan has not yet sold a product and
has had net operating losses since its inception. The Company expects that
Etec Polyscan will continue to have net operating losses for the foreseeable
future. The Company has never operated in the market segments targeted by Etec
Polyscan. The Company's failure to integrate Etec Polyscan's technology into
the Company's product development strategy, or Etec Polyscan's inability to
complete its obligations under development contracts and to manufacture and
market its products, may have a material adverse effect on the Company's
business. There can be no assurance that the Company will be able to integrate
Etec Polyscan into its current business operations or will be able to
integrate Etec Polyscan's technology into the Company's product development
strategy or to market and sell Etec Polyscan's products successfully, or that
the Etec Polyscan business will ever become profitable. There can be no
assurance of the effect of any future acquisition on the Company's business or
operating results.

COMPETITION

The maskmaking equipment industry is highly competitive. The Company
currently experiences competition worldwide from a number of foreign and
domestic manufacturers, including Hitachi, Ltd. ("Hitachi") and Japan Electron
Optical Laboratory ("JEOL"). Most of the Company's competitors have
substantially greater financial resources than the Company and extensive
engineering, manufacturing, marketing and customer service and support
capabilities. Some competitors have entered into strategic

11
<PAGE>

relationships or alliances with leading semiconductor manufacturers. In
particular, the Company believes that Japanese competitors such as Hitachi and
JEOL have longstanding collaborative relationships with Japanese and other
Asian semiconductor manufacturers. In the past year, several industry
consortia have been formed in Japan to promote the development of maskmaking
and direct write technology. Because of the significant investment required to
install and integrate maskmaking equipment, the Company also believes that
many customers rely upon a single maskmaking equipment vendor for multiple
generations of equipment, making it difficult to achieve significant sales to
a particular customer once a competitor's system has been selected.

The Company's competitors can be expected to continue to improve the design
and performance of their current products and processes and to introduce new
products and processes with improved price and performance characteristics.
Product introductions and enhancements by the Company's present or future
competitors could cause a significant decline in sales or loss of market
acceptance of the Company's systems, intensify price competition or otherwise
make the Company's systems or technology obsolete or noncompetitive. In
addition to competition from companies employing lithography technologies
currently in volume production, the Company believes that it may face
competition from companies employing new technologies, such as the cell
projection technology that is currently under development. In addition, the
Company's MEBES, CORE and ALTA systems all use a raster scanning writing
method. Currently, despite the throughput advantage of vector scanning for
some types of integrated circuit designs, the Company believes that raster
scanning has a competitive advantage over vector scanning due to its greater
accuracy. If changes in integrated circuit manufacturing or in customer
requirements were to make vector scanning systems more attractive, the
Company's raster scanning products could be subjected to more intense
competition from vector scanning systems. There can be no assurance that
competitive pressures will not have a material adverse effect on the Company's
business, financial condition or results of operations. See "Business--
Competition."

RISKS ASSOCIATED WITH INTERNATIONAL SALES AND OPERATIONS

Sales to customers in countries other than the United States accounted for
43%, 44% and 59% of revenues in fiscal 1994, fiscal 1995 and the first nine
months of fiscal 1996, respectively, with an additional 10%, 16% and 18% of
revenues, respectively, attributable to sales in the United States for
shipment abroad. In particular, sales of systems delivered in Japan accounted
for 16%, 14% and 42% of revenues in fiscal 1994, fiscal 1995 and the first
nine months of fiscal 1996, respectively. The Company anticipates that
international sales will continue to account for a significant portion of
revenues for the foreseeable future. Sales and operations outside of the
United States are subject to certain inherent risks, including fluctuations in
the value of the U.S. dollar relative to foreign currencies, tariffs, quotas,
taxes and other market barriers, political and economic instability,
restrictions on the export or import of technology, potentially limited
intellectual property protection, difficulties in staffing and managing
international operations and potentially adverse tax consequences. There can
be no assurance that any of these factors will not have a material adverse
effect on the Company's business, financial condition or results of
operations. In particular, although the Company's international sales are
primarily denominated in U.S. dollars, currency exchange fluctuations in
countries where the Company does business could materially adversely affect
the Company's business, financial condition and results of operations, by
rendering the Company less price-competitive than foreign manufacturers. See
"Management's Discussion and Analysis of Financial Condition and Results of
Operations," "Business--Customers" and "Business--Sales and Marketing."

LENGTHY SALES CYCLE

Installing and integrating maskmaking equipment requires a substantial
investment by a customer. In addition, customers often require a significant
number of product presentations and demonstrations, as well as substantial
interaction with the Company's senior management, before reaching a sufficient
level of confidence in the system's performance characteristics and
compatibility with the customer's target applications. Accordingly, the
Company's systems typically have a lengthy sales cycle during which the
Company may expend substantial funds and management time and effort with no
assurance that a sale will result. See "Business--Sales and Marketing."

12
<PAGE>

FUTURE CAPITAL NEEDS

The development, manufacture and marketing of pattern generation systems are
highly capital intensive. The Company has budgeted a total of approximately
$19.0 million for the purchase of testing equipment, the upgrading of
manufacturing facilities and improvements to management information systems in
fiscal 1996, of which $7.9 million had been expended as of April 30, 1996. The
Company has also budgeted in excess of $20.0 million for capital expenditures
in fiscal 1997. The Company expects that the proceeds of this offering and the
concurrent sale of Common Stock to Intel, together with anticipated cash flow
from operations and existing cash balances, will satisfy its cash requirements
for at least the next twelve months. To the extent that such cash resources
are insufficient to fund the Company's activities, additional funds will be
required. There can be no assurance that additional financing will be
available on reasonable terms or at all. If additional capital is raised
through the sale of additional equity or convertible debt securities, dilution
to the Company's stockholders could occur. See "Use of Proceeds" and
"Management's Discussion and Analysis of Financial Condition and Results of
Operations."

REDUCED COOPERATIVE DEVELOPMENT FUNDING

The Company's research and development efforts have historically received
significant funding from governmental and quasi-governmental agencies, such as
the Advanced Research Projects Agency ("ARPA") and SEMATECH, Inc.
("SEMATECH"), a consortium of U.S. semiconductor manufacturers, and from the
private sector. Aggregate funding from all such sources amounted to
approximately $16.1 million in fiscal 1994, approximately $7.3 million in
fiscal 1995 and approximately $725,000 in the first nine months of fiscal
1996. Governmental funding of the Company's development activities has
declined precipitously in recent periods, and the Company and SEMATECH
recently ended their most recent cooperative development agreement. Future
funding from governmental, quasi-governmental and private sources is
uncertain, and there can be no assurance that any such funding will be
available to the Company. Accordingly, the Company anticipates that its net
research and development expenditures will continue to increase over at least
the next two years. See "Business--Product Development."

PATENTS AND OTHER INTELLECTUAL PROPERTY

The Company currently holds 44 United States patents expiring on various
dates from 1999 through 2012, and holds corresponding patents and applications
in several foreign countries for most of such patents. The Company also has
five pending U.S. patent applications and over 40 pending foreign patent
applications. There can be no assurance that any of the Company's patent
applications will be allowed or that any of the allowed applications will be
issued as patents. Certain important aspects of the Company's systems depend
upon licenses granted by third parties. In particular, the basic technological
architecture for MEBES, the Company's family of electron beam systems, was
licensed to the Company by AT&T. This license is non-exclusive, and similar
licenses could be granted to potential competitors. Although the Company
believes that significant development efforts would be necessary to generate a
commercial production tool from the basic technology covered by this license,
there can be no assurance that competitors will not be able to utilize this
technology to develop products that could reduce the Company's sales of MEBES
systems, accessories and upgrades. In addition, certain rights relating to
laser beam technology have been licensed on a non-exclusive basis from Patlex
Corporation. The Company's electron beam and laser beam systems also
incorporate software and hardware licensed from other third parties. If the
Company's licenses were invalidated or terminated, or if their scope became
subject to dispute, the Company's business could be adversely affected. The
Company also relies on trade secrets and proprietary technology that it seeks
to protect through confidentiality agreements with employees, consultants and
other parties. There can be no assurance that these agreements will not be
breached, that the Company will have adequate remedies for any breach, or that
the Company's trade secrets or proprietary technology will not otherwise
become known to or independently developed by others. Overall, while the
Company intends to protect its intellectual property rights vigorously, there
can be no assurance that any patents or other rights held by or licensed to
the Company will not be challenged, invalidated or circumvented, or that
protracted and costly litigation will not be necessary to enforce the
Company's patents and other intellectual property rights.

13
<PAGE>

Semiconductor-related industries have experienced substantial litigation
regarding patent and other intellectual property rights. As is typical in the
industry, the Company has from time to time received, and may in the future
receive, communications from third parties alleging infringements of patents
and other intellectual property rights. No assurance can be given that
additional infringement claims by third parties will not be asserted. In the
future, protracted litigation may be necessary to defend the Company against
alleged infringement of others' rights. Any such litigation, even if
ultimately successful in defense of the Company, could result in substantial
cost and diversion of time and effort by management, which by itself could
have a material adverse effect on the Company's business, financial condition
and results of operations. Further, adverse determinations in such litigation
could result in the Company's loss of proprietary rights, subject the Company
to significant liabilities (including treble damages under certain
circumstances), require the Company to seek licenses from third parties or
prevent the Company from manufacturing or selling its systems, any of which
could have a material adverse effect on the Company's business, financial
condition or results of operations. See "Business--Patents and Other
Proprietary Rights."

ENVIRONMENTAL REGULATIONS

The Company is subject to a variety of governmental regulations relating to
the use, storage, discharge, handling, emission, generation, manufacture and
disposal of toxic or other hazardous substances. The Company believes that it
is currently in compliance in all material respects with such regulations and
that it has obtained or is in the process of obtaining all material
environmental permits necessary to conduct its business. Nevertheless, the
failure to comply with current or future regulations could result in
substantial fines being imposed on the Company, suspension of production,
alteration of its manufacturing process or cessation of operations. Such
regulations could require the Company to acquire expensive remediation or
abatement equipment or to incur substantial expenses to comply with
environmental regulations. Any failure by the Company to control the use,
disposal or storage of, or adequately restrict the discharge of, hazardous or
toxic substances could subject the Company to significant liabilities.

In 1990, several monitoring wells were installed on the site of the
Company's headquarters in Hayward, California to monitor levels of Freon 113,
Dichloroethene (1, 1--DCE), Trichloroethene and Chloroform in groundwater
under the site. On June 1, 1995, an environmental consulting firm recommended
to the California Regional Water Quality Board (the "Water Quality Board")
that groundwater monitoring at the site be discontinued, and on July 19, 1995
the Water Quality Board agreed in writing with this recommendation. However,
there can be no assurance that the Water Quality Board or any other
governmental agency will not require additional monitoring or remediation at
the Hayward site in the future. The Perkin-Elmer Corporation ("Perkin-Elmer"),
the former owner of the property, has agreed to indemnify the Company, subject
to a 50% copayment by the Company of the first $600,000 of indemnifiable
costs, in the event that any toxic substances which were present and
identified at the time of the Company's acquisition of the property in 1990
require remediation. The Company is obligated to indemnify the current owner
of the Hayward property, which is leased by the Company, in the event that
soil or groundwater remediation at the site becomes necessary.

HEALTH AND SAFETY REGULATIONS AND STANDARDS

14
<PAGE>

regulations, the Company may be barred from selling its products directly or
through its customers to member countries of the EU. A disruption in or loss
of sales to the Company's European customers could adversely affect the
Company's customer relationships and results of operations. In addition,
numerous domestic semiconductor manufacturers and independent mask shops,
including certain of the Company's customers, have subscribed to voluntary
health and safety standards and decline to purchase equipment not meeting such
standards. The Company believes that its products currently comply with all
material governmental health and safety regulations, except for the EU
regulations described above, and with the voluntary industry standards
currently in effect. In part because the future scope of these and other
regulations and standards cannot be predicted, there can be no assurance that
the Company will be able to comply with any future regulation or industry
standard. Noncompliance could result in governmental restrictions on sales or
reductions in customer acceptance of the Company's products. Compliance may
also require significant product modifications, potentially resulting in
increased costs and impaired product performance.

SHARES ELIGIBLE FOR FUTURE SALE

Sales of substantial numbers of shares of Common Stock in the public market
after this offering could adversely affect the market price of the Common
Stock. In addition to the 4,350,000 shares to be sold in this offering and the
4,830,000 shares sold in the Company's initial public offering, approximately
53,593 shares are eligible for immediate sale in the public market. Commencing
July 20, 1996, 60 days after the effective date of the Registration Statement
of which this Prospectus is a part and January 20, 1997, upon the expiration
of lock-up agreements with the Company and the underwriters, approximately
51,547, 63,598 and 7,066,038 additional shares, respectively, will be eligible
for immediate sale in the public market pursuant to Rule 144 or Rule 701,
subject in some cases to compliance with certain volume limitations under Rule
144. Holders of an aggregate of approximately 9,419,387 shares of Common Stock
and warrants to purchase 287,418 shares of Common Stock have rights under
certain circumstances to request that the Company register their shares for
future sale. See "Description of Capital Stock--Registration Rights," "Shares
Eligible for Future Sale" and "Underwriting."

VOLATILITY OF STOCK PRICE

Since the Company's initial public offering in October 1995, the price of
the Company's Common Stock has fluctuated widely, with sales prices on the
Nasdaq National Market ranging from $7.75 to $39.00. The Company believes that
factors such as announcements of developments related to the Company's
business, fluctuations in the Company's operating results, failure to meet
securities analysts' expectations, general conditions in the maskmaking and
semiconductor industries and the worldwide economy, announcements of
technological innovations, new systems or product enhancements by the Company
or its competitors, fluctuations in the level of cooperative development
funding, acquisitions, changes in governmental regulations, developments in
patents or other intellectual property rights and changes in the Company's
relationships with customers and suppliers could cause the price of the
Company's Common Stock to fluctuate, perhaps substantially. In addition, in
recent years the stock market in general, and the market for small
capitalization stocks in particular, has experienced extreme price
fluctuations which have often been unrelated to the operating performance of
affected companies. Such fluctuations could adversely affect the market price
of the Company's Common Stock.

FACTORS AFFECTING A CHANGE IN CONTROL

The Company's five largest institutional investors will, in the aggregate,
own beneficially approximately 29.3% of the Company's outstanding shares of
Common Stock after this offering. As a result, these stockholders, acting
together, may be able to exert significant influence over the election of
directors and other corporate actions requiring stockholder approval. The
Company's charter provides for authorized but unissued preferred stock, the
terms of which may be fixed by the Board of Directors. In addition, certain
provisions of Nevada law will prohibit certain significant stockholders from
entering into a business combination with the Company unless certain
conditions are met. These charter and statutory provisions could have the
effect of delaying, deferring or preventing a change of control of the
Company. See "Description of Capital Stock."

15
<PAGE>

THE COMPANY

Etec Systems, Inc. ("Etec" or the "Company") is the world leader in the
production of mask pattern generation equipment for the semiconductor
industry. Etec designs, develops, manufactures and markets equipment that
produces high precision masks, which are used to print circuit patterns onto
semiconductor wafers. Etec sells its MEBES electron beam systems and its CORE
and ALTA laser beam systems at prices currently ranging from approximately
$2.5 million to $7.5 million each and accessories and upgrades at prices
currently ranging from approximately $1.5 million to $5.0 million each. The
Company also derives significant revenues from service and support of its
installed base of systems. The Company believes that over 230 commercial
electron beam and laser beam mask pattern generation systems are currently
installed outside the former Eastern Bloc, of which over 155 have been
produced by Etec. The Company's customers include merchant semiconductor mask
manufacturers and semiconductor manufacturers with captive mask manufacturing
operations.

The Company's business commenced in 1970 and was sold to The Perkin-Elmer
Corporation ("Perkin-Elmer") in 1979, at which point it became Perkin-Elmer's
Electron Beam Technology Division ("EBT"). The Company was incorporated in
Nevada on May 10, 1989 by the management of EBT to acquire the majority of the
assets and certain of the liabilities of EBT from Perkin-Elmer in 1990 (the
"LBO"). The purchase price consisted of cash, subordinated notes, and
preferred stock, all of which has been converted into Common Stock. See
"Certain Transactions." In November 1991, the Company acquired approximately
98% of the outstanding capital stock of ATEQ Corporation ("ATEQ"), a supplier
of laser beam maskmaking systems. In August 1995, ATEQ was merged into Etec.

During fiscal 1995, the Company undertook a recapitalization involving the
sale and leaseback of its facility in Hayward, California for proceeds of
approximately $11.8 million, the repayment of $6.0 million in respect of
senior notes, the conversion of $19.7 million in senior subordinated debt into
preferred stock and convertible debt and accrued interest, and the acquisition
of the 18% minority equity interest in the Company's subsidiary, Etec Systems
Japan Ltd. ("Etec Japan"), for 75,753 shares of Series E Cumulative,
Participating, Convertible Preferred Stock ("Series E Preferred Stock"). All
such preferred stock was converted into Common Stock upon the consummation of
the Company's initial public offering in October 1995. See "Management's
Discussion and Analysis of Financial Condition and Results of Operations."

In February 1996, the Company acquired substantially all of the assets and
certain specified liabilities of Polyscan, a development-stage company that
designs and develops laser direct imaging systems for large-area pattern
generation applications.

The Company's principal offices are located at 26460 Corporate Avenue,
Hayward, California 94545, and its telephone number is (510) 783-9210. Unless
the context otherwise requires, references herein to "Etec" and the "Company"
refer to Etec Systems, Inc., its consolidated subsidiaries and its
predecessor, EBT.

16
<PAGE>

INVESTMENT BY INTEL

Intel Corporation ("Intel") has agreed to purchase 500,000 shares of Common
Stock directly from the Company. This purchase will occur concurrently with
the consummation of this offering at the Price to Public set forth on the
cover page of this Prospectus. Intel will also receive warrants to purchase an
additional 75,000 shares of Common Stock. These warrants will be exercisable
only if Intel's purchases of products and services from the Company over the
succeeding four years exceed certain thresholds, or upon the occurrence of
certain other conditions. The Company will also grant Intel certain
registration rights with respect to its shares. See "Description of Capital
Stock." Intel will agree not to sell any of the purchased shares for two years
following such purchase, other than in a private transaction to a purchaser
that assumes this obligation, and will agree not to purchase additional shares
of Common Stock or securities convertible into Common Stock if it would own
20% or more of the Company's Common Stock on a fully diluted basis after such
purchase.

USE OF PROCEEDS

The net proceeds to the Company from the sale of the 250,000 shares of
Common Stock being offered by the Company are estimated to be approximately
$4.4 million ($16.7 million if the Underwriters' over-allotment option is
exercised in full), after deducting underwriting discounts and commissions and
estimated offering expenses. The Company will receive an additional $10.0
million from Intel upon the sale of Common Stock to Intel concurrently with
the completion of this offering. See "Investment by Intel." The Company
anticipates using a portion of the net proceeds of this offering and the
concurrent Intel investment for capital expenditures, including the purchase
of testing equipment, upgrading manufacturing facilities and improvements to
the Company's management information systems, and for general corporate
purposes, including working capital and the funding of research and
development efforts. The Company may also use a portion of the net proceeds of
this offering and the Intel investment to acquire businesses, technology or
products that complement its business, although it currently has no
commitments or agreements with respect to any such transaction. Pending such
uses, the Company intends to invest the net proceeds in short-term, investment
grade, interest-bearing securities.

The Company will not receive any proceeds from the sale of the shares of
Common Stock by the Selling Stockholders.

17
<PAGE>

PRICE RANGE OF COMMON STOCK

The Company's Common Stock has been traded on the Nasdaq National Market
under the symbol "ETEC" since October 24, 1995. The following table sets forth
the range of quarterly high and low closing sale prices of the Common Stock as
reported on the Nasdaq National Market.

<TABLE>
<CAPTION>
FISCAL 1996 HIGH LOW
----------- ------ ------
<S> <C> <C>
First Quarter (from October 24, 1995)...................... $11.00 $10.00
Second Quarter............................................. 13.75 8.00
Third Quarter.............................................. 24.75 10.75
Fourth Quarter (through June 24, 1996)..................... 37.00 21.25
</TABLE>

On June 24, 1996, the closing price for the Company's Common Stock as
reported on the Nasdaq National Market was $21.50. As of April 30, 1996, there
were approximately 330 holders of record of the Company's outstanding Common
Stock.

DIVIDEND POLICY

The Company has never declared or paid dividends on its capital stock and
does not anticipate paying any dividends in the foreseeable future. The
Company currently intends to retain its earnings, if any, for the development
of its business. Currently, the Company and its subsidiaries are prohibited
from paying dividends under the terms of its $30.0 million financing facility.
In addition, the lease of the Company's Hayward, California property restricts
the Company from paying cash dividends under certain conditions. See
"Management's Discussion and Analysis of Financial Condition and Results of
Operations."

18
<PAGE>

CAPITALIZATION

The following table sets forth the capitalization of the Company (i) as of
April 30, 1996; and (ii) on a pro forma basis, assuming that the sale of $10.0
million of Common Stock to Intel had occurred as of such date at the public
offering price of $20.00 per share, and as adjusted to reflect the sale by the
Company of the 250,000 shares of Common Stock being offered by the Company
after deducting underwriting discounts and commissions and estimated offering
expenses payable by the Company, and the application of the estimated net
proceeds therefrom as set forth under "Use of Proceeds."

<TABLE>
<CAPTION>
APRIL 30, 1996
---------------------
PRO FORMA
ACTUAL AS ADJUSTED
-------- -----------
(IN THOUSANDS)
<S> <C> <C>
Current maturities of long-term debt(1)............. $ 1,336 $ 1,336
======== =======
Long-term debt, less current portion(1)............. $ 7,625 $ 7,625
-------- -------
Stockholders' equity:
Preferred Stock, par value $0.01 per share;
10,000,000 shares authorized; no shares issued
and outstanding.................................. -- --
Common Stock, par value $0.01 per share;
30,000,000 shares authorized; 18,075,037 shares
issued and outstanding, actual; 18,898,258 shares
issued and outstanding, pro forma(2)............... 181 189
Warrants.......................................... 496 1,096
Additional paid-in capital........................ 123,176 137,551
Notes receivable from stockholders................ (47) (47)
Cumulative translation adjustment................... 70 70
Accumulated deficit................................. (50,499) (50,499)
-------- -------
Total stockholders' equity...................... 73,377 88,360
-------- -------
Total capitalization.......................... $ 81,002 $95,985
======== =======
</TABLE>
- --------
(1) See Note 3 of Notes to Consolidated Financial Statements for a description
of the Company's notes payable.

(2) Excludes 1,232,259 shares of Common Stock reserved for issuance and
available for grant or sale under the Company's 1990 Executive Stock Plan,
1990 Employee Stock Option Plan, 1994 Employee Stock Option Plan, 1995
Omnibus Incentive Plan, 1995 Employee Stock Purchase Plan and 1995
Directors' Stock Option Plan and certain nonstatutory stock option
agreements, under which there were options outstanding to purchase an
aggregate of 1,464,233 shares of Common Stock at a weighted average
exercise price of $3.25 per share as of April 30, 1996. As adjusted
excludes the same, except includes 73,221 shares of Common Stock issuable
upon exercise of stock options by Selling Stockholders in connection with
this offering. See "Management--Stock Option Plans" and Note 9 of Notes to
Consolidated Financial Statements. Also excludes warrants to purchase
376,997 shares of Common Stock outstanding at April 30, 1996 and warrants
to purchase 75,000 shares of Common Stock to be issued to Intel
concurrently with the completion of this offering. See "Description of
Capital Stock" and Notes 5 and 9 of Notes to Consolidated Financial
Statements.

19
<PAGE>

SELECTED CONSOLIDATED FINANCIAL DATA

The following selected consolidated financial data should be read in
conjunction with the Consolidated Financial Statements and related notes
thereto appearing elsewhere in this Prospectus and "Management's Discussion
and Analysis of Financial Condition and Results of Operations." The selected
consolidated financial data as of and for each of the years in the three-year
period ended July 31, 1995 are derived from financial statements of the
Company included herein that have been audited by Price Waterhouse LLP,
independent accountants. The selected consolidated financial data for the
fiscal years ended July 31, 1991 and 1992 and the nine months ended April 30,
1995 are derived from financial statements not included herein. The selected
consolidated financial data as of and for the nine months ended April 30, 1996
are derived from the financial statements of the Company included herein and
are unaudited. In the opinion of management, such unaudited data reflect all
adjustments (consisting only of normal recurring adjustments) necessary for a
fair statement of the financial data for such period. The results of
operations for the nine months ended April 30, 1996 are not necessarily
indicative of results that may be expected for the full year. The pro forma
results of operations for the nine months ended April 30, 1996 and balance
sheet data as of April 30, 1996 reflect the transactions described in
footnotes 5 and 8 below, respectively. Such pro forma results are not
necessarily indicative of results of operations that would have been attained
had these transactions actually occurred on the dates indicated or of future
operating results. The data set forth below are qualified in their entirety
by, and should be read in conjunction with, "Management's Discussion and
Analysis of Financial Condition and Results of Operations" and the financial
statements and notes thereto included elsewhere in this Prospectus.

<TABLE>
<CAPTION>
PRO
NINE FORMA
MONTHS NINE
ENDED MONTHS
YEAR ENDED JULY 31, APRIL 30, ENDED
-------------------------------------------------- -------------------- APRIL 30,
1991 1992(1) 1993 1994 1995(2) 1995 1996(3)(4) 1996(5)
-------- --------- --------- -------- -------- -------- ---------- ---------
(IN THOUSANDS, EXCEPT PER SHARE AMOUNTS)
<S> <C> <C> <C> <C> <C> <C> <C> <C>
STATEMENT OF OPERATIONS
DATA:
Revenue:
Products............... $ 21,938 $ 41,819 $ 31,650 $ 40,731 $ 51,395 $ 38,143 $ 73,983 $ 73,983
Services............... 24,442 26,769 26,932 27,979 31,521 22,902 24,052 24,052
-------- --------- --------- -------- -------- -------- -------- --------
46,380 68,588 58,582 68,710 82,916 61,045 98,035 98,035
-------- --------- --------- -------- -------- -------- -------- --------
Cost of revenue:
Cost of products....... 13,473 32,682 25,450 25,559 27,015 20,756 37,606 37,606
Cost of services....... 15,779 17,655 16,488 17,670 20,604 14,666 16,794 16,794
-------- --------- --------- -------- -------- -------- -------- --------
29,252 50,337 41,938 43,229 47,619 35,422 54,400 54,400
-------- --------- --------- -------- -------- -------- -------- --------
Gross profit............ 17,128 18,251 16,644 25,481 35,297 25,623 43,635 43,635
-------- --------- --------- -------- -------- -------- -------- --------
Operating expenses:
Research, development
and engineering....... 3,208 9,472 11,034 5,102 10,497 6,952 11,991 12,598
Write-off of in-process
technology
acquired(6)........... -- 10,600 -- -- -- -- 6,269 --
Selling, general and
administrative........ 11,139 25,331 10,049 10,803 13,397 9,194 14,973 15,497
-------- --------- --------- -------- -------- -------- -------- --------
14,347 45,403 21,083 15,905 23,894 16,146 33,233 28,095
-------- --------- --------- -------- -------- -------- -------- --------
Income (loss) from
operations............. 2,781 (27,152) (4,439) 9,576 11,403 9,477 10,402 15,540
Interest expense........ (3,093) (5,277) (5,880) (5,115) (4,238) (3,369) (1,462) (1,462)
Other income (expense),
net.................... -- (795) 789 (71) 175 (97) 2,143 2,351
-------- --------- --------- -------- -------- -------- -------- --------
Income (loss) before
income tax provision
(benefit), minority
interest and
extraordinary items.... (312) (33,224) (9,530) 4,390 7,340 6,011 11,083 16,429
Income tax provision
(benefit).............. 2,081 1,296 1,500 2,316 2,289 1,600 (11,063) (11,063)
Minority interest in
earnings of subsidiary. -- 321 379 462 527 393 -- --
-------- --------- --------- -------- -------- -------- -------- --------
Income (loss) before
extraordinary items.... (2,393) (34,841) (11,409) 1,612 4,524 4,018 22,146 27,492
Extraordinary gain
(loss) on early
extinguishment of debt. -- -- -- -- 5,412 -- (300) (300)
-------- --------- --------- -------- -------- -------- -------- --------
Net income (loss)....... (2,393) (34,841) (11,409) 1,612 9,936 4,018 21,846 27,192
Accretion of mandatorily
redeemable convertible
preferred stock........ 2,143 2,541 2,740 2,946 3,092 2,319 1,078 1,078
-------- --------- --------- -------- -------- -------- -------- --------
Net income (loss)
attributable to Common
Stockholders........... $ (4,536) $ (37,382) $ (14,149) $ (1,334) $ 6,844 $ 1,699 $ 20,768 $ 26,114
======== ========= ========= ======== ======== ======== ======== ========
Per share data:
Income (loss) before
extraordinary items... $ (0.23) $ (2.86) $ (0.94) $ 0.12 $ 0.31 $ 0.28 $ 1.25 $ 1.53
Extraordinary items.... -- -- -- -- 0.37 -- (0.02) (0.02)
-------- --------- --------- -------- -------- -------- -------- --------
Net income (loss)...... $ (0.23) $ (2.86) $ (0.94) $ 0.12 $ 0.68 $ 0.28 $ 1.23 $ 1.51
======== ========= ========= ======== ======== ======== ======== ========
Weighted average common
shares(7).............. 10,428 12,167 12,168 14,008 14,594 14,594 17,750 17,996
======== ========= ========= ======== ======== ======== ======== ========
</TABLE>

20
<PAGE>

<TABLE>
<CAPTION>
JULY 31, PRO FORMA
--------------------------------------------- APRIL 30, APRIL 30,
1991 1992 1993 1994 1995 1996 1996(8)
-------- ------- ------- ------- -------- --------- ----------
(IN THOUSANDS)
<S> <C> <C> <C> <C> <C> <C> <C>
BALANCE SHEET DATA:
Cash and investments.... $ 13,403 $ 1,919 $ 7,234 $ 6,571 $ 23,638 $ 40,996 $ 50,996
Working capital......... 36,252 18,764 9,942 6,184 23,215 74,052 84,052
Total assets............ 80,322 76,793 66,151 62,782 85,984 157,482 168,082
Long-term debt, less
current portion........ 30,057 49,377 46,573 31,251 16,866 7,625 7,625
Minority interest....... 4,891 5,632 7,093 7,711 -- -- --
Mandatorily redeemable
convertible preferred
stock.................. 29,036 41,577 44,317 54,362 76,397 -- --
Accumulated deficit..... (25,246) (62,628) (76,777) (78,111) (71,267) (50,499) (50,499)
Total stockholders' eq-
uity (deficit)......... (19,058) (61,700) (75,575) (76,341) (67,415) 73,377 83,977
</TABLE>
- --------
(1) In 1992, the Company wrote off $10.6 million of in-process technology in
conjunction with its purchase of ATEQ and recorded a $10.2 million charge
related to the write-off of certain inventory and assets.
(2) Net income (loss) reflects the inclusion of an extraordinary gain of $5.4
million recorded as a result of the early extinguishment of $19.7 million
of subordinated notes payable and accrued interest. See Note 3 of Notes to
Consolidated Financial Statements.
(3) Net income (loss) reflects the inclusion of an extraordinary loss of
$300,000 recorded as a result of the early extinguishment of $5.0 million
of secured notes payable.
(4) Net income (loss) reflects a $15.4 million tax benefit realized as a
result of reversing a portion of the Company's valuation allowance
associated with certain deferred tax assets. See Note 6 of Notes to
Consolidated Financial Statements.
(5) Pro forma statement of operations data reflects the consolidated results
of the Company after giving effect to the acquisition of substantially all
of the assets and certain specified liabilities of Polyscan, assuming that
the acquisition took place on August 1, 1995.
(6) In 1996, the Company wrote off $6.3 million of in-process technology in
conjunction with its acquisition of substantially all of the assets and
certain specified liabilities of Polyscan. See Note 13 of Notes to
Consolidated Financial Statements.
(7) Computed on the basis described in Note 1 of Notes to Consolidated
Financial Statements.

(8) Pro forma balance sheet data reflects the sale of $10.0 million of Common
Stock to Intel at a price of $20.00 per share and the issuance of warrants
to Intel. See "Investment by Intel."

21
<PAGE>

MANAGEMENT'S DISCUSSION AND ANALYSIS
OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS

This Prospectus contains forward-looking statements that involve risks and
uncertainties. The Company's actual results may differ significantly from the
results discussed in the forward-looking statements. Factors that could cause
or contribute to such differences include, but are not limited to, those
discussed in "Risk Factors."

OVERVIEW

Etec designs, develops, manufactures, markets and services electron beam and
laser beam mask pattern generation equipment for the semiconductor industry.
Etec was incorporated in 1989 to effect a leveraged buyout (the "LBO") in 1990
of the former Electron Beam Technology Division of Perkin-Elmer, which was
itself the continuation of a business commenced in 1970. In November 1991, the
Company purchased ATEQ, a supplier of laser beam maskmaking systems. In
February 1996, the Company acquired substantially all of the assets and
certain specified liabilities of Polyscan, a developer of laser direct imaging
systems for large-area pattern generation applications. See "The Company."

From the LBO through fiscal 1993, the Company incurred net losses primarily
due to the depressed demand for maskmaking equipment, substantial interest
expense relating to the debt incurred in the LBO, costs incurred to develop
new technology and high overhead costs. During calendar 1993, the Company
hired its current Chief Executive Officer and other members of senior
management.

Beginning in fiscal 1994, Etec's new management team focused on reducing
overhead, achieving manufacturing efficiencies and improving the Company's
operating and capital structure, while continuing to develop and market its
electron beam and laser beam systems. Through management's efforts, the
Company improved its margins and restructured its capitalization, thereby
reducing debt and interest expense. Revenues increased in fiscal 1994, fiscal
1995 and the nine months ended April 30, 1996, reflecting an upturn in the
maskmaking industry and the Company's introduction of new products.

The Company completed its initial public offering ("IPO") in October 1995.
The Company's sale of 3,841,667 shares in the IPO raised approximately $35.7
million before offering expenses. In connection with the IPO, in November
1995, the underwriters exercised their option to purchase an additional
630,000 shares from the Company. Net proceeds in connection with this exercise
amounted to approximately $5.9 million.

The Company derives most of its annual revenues from the sale of a small
number of systems and upgrades at prices currently ranging from approximately
$2.5 million to $7.5 million each for systems and from approximately $1.5
million to $5.0 million each for upgrades. As a result, any delay in the
recognition of revenue for a single system or upgrade could have a material
adverse effect on the Company's results of operations for a given accounting
period. For example, a system shipment planned for the fourth quarter of
fiscal 1995 was delayed due to the failure to complete factory acceptance
tests prior to the end of the quarter. The revenue from that sale was not
recognized in the fourth quarter of fiscal 1995 and was delayed until
completion of factory acceptance tests, which occurred during the first
quarter of fiscal 1996. See "Risk Factors--Fluctuations in Operating Results."
The Company generally recognizes product revenue upon shipment. A provision
for installation and estimated future warranty costs is recorded at the time
revenue is recognized. Revenue associated with upgrading machines is generally
recognized upon customer final acceptance. Systems typically carry a one-year
warranty. The Company's service contracts typically have a stated duration of
one year, subject to renewal at the customer's option. Service revenue is
deferred and recognized on a straight-line basis over the service period of
the related contract.

Sales to customers in countries other than the United States accounted for
59%, 44%, 43%, and 46% of total revenues in the nine months ended April 30,
1996, fiscal 1995, fiscal 1994 and fiscal 1993, respectively, with an
additional 18%, 16%, 10%, and 13% of total revenues, respectively,
attributable to sales in the United States for shipment abroad. The Company's
international sales are primarily denominated in U.S. dollars. To date,
transactions conducted in currencies other than U.S. dollars, and net monetary
assets and liabilities

22
<PAGE>

denominated in currencies other than U.S. dollars, have not presented
significant currency exchange exposure. Accordingly, the Company has not
entered into hedging transactions. The Company plans to actively monitor its
foreign exchange exposure and to take appropriate action to reduce its foreign
exchange risk, if such risk becomes significant.

The following table sets forth certain consolidated statement of operations
data as a percentage of total revenue for the periods indicated, and on a pro
forma basis for the nine months ended April 30, 1996 giving effect to the
Polyscan acquisition as if it had occurred on August 1, 1995 as described
below:

<TABLE>
<CAPTION>
PRO
FORMA
NINE MONTHS NINE
ENDED MONTHS
YEAR ENDED JULY 31, APRIL 30, ENDED
------------------------- ------------- APRIL 30,
1993 1994 1995 1995 1996 1996
------ ------ ------ ----- ----- ---------
<S> <C> <C> <C> <C> <C> <C>
Revenue:
Products.................... 54% 59% 62% 62% 75% 75%
Services.................... 46 41 38 38 25 25
------ ------ ------ ----- ----- ---
100 100 100 100 100 100
------ ------ ------ ----- ----- ---
Cost of revenue:
Cost of products............ 44 37 32 34 38 38
Cost of services............ 28 26 25 24 17 17
------ ------ ------ ----- ----- ---
72 63 57 58 55 55
------ ------ ------ ----- ----- ---
Gross margin.................. 28 37 43 42 45 45
------ ------ ------ ----- ----- ---
Operating expenses:
Research, development and
engineering.................. 19 7 13 11 12 13
Write-off of in-process
technology acquired.......... -- -- -- -- 7 --
Selling, general and
administrative............... 17 16 16 15 15 16
------ ------ ------ ----- ----- ---
36 23 29 26 34 29
------ ------ ------ ----- ----- ---
Income (loss) from operations. (8) 14 14 16 11 16
Interest expense.............. (9) (8) (4) (6) (1) (1)
Other income, net............. 1 -- -- -- 2 2
------ ------ ------ ----- ----- ---
Income (loss) before income
tax provision (benefit),
minority interest and
extraordinary items.......... (16) 6 10 10 12 17
Income tax provision
(benefit).................... 3 3 3 3 (11) (11)
Minority interest in earnings
of subsidiary................ 1 1 1 -- -- --
------ ------ ------ ----- ----- ---
Income (loss) before
extraordinary items.......... (20)% 2% 6% 7% 23% 28%
====== ====== ====== ===== ===== ===
</TABLE>

At April 30, 1996, the Company had remaining net operating loss
carryforwards ("NOLs") of approximately $27.3 million for federal tax
purposes. These carryforwards, if not utilized to offset future taxable
income, expire at various dates through the year 2009. Additionally, under the
Tax Reform Act of 1986, the amount of the benefit from NOLs may be impaired or
limited in certain circumstances, including a cumulative stock ownership
change of more than 50% over a three-year period. The consummation of this
offering will result in a cumulative change in ownership of the Company in
excess of 50%, measured over the past three-year period. As a result, based on
the Company's market value as of June 24, 1996, the Company's usage of the
NOLs cannot exceed approximately $19.0 million per fiscal year, commencing
with the completion of this offering.

During fiscal 1995, management undertook actions to reduce a substantial
portion of the Company's long-term indebtedness, including the sale and
leaseback of its facility in Hayward, California and the repayment of $6.0
million in respect of senior notes, the exchange of $19.7 million of senior
subordinated

23
<PAGE>

debt and accrued interest for preferred stock and convertible subordinated
debt, the acquisition of the minority interest in its Japanese subsidiary in
exchange for Series E Preferred Stock and cash, and the elimination of ATEQ's
minority stockholders through a short-form merger. See "Certain Transactions."
The conversion of the senior subordinated debt into preferred stock and
convertible debt resulted in an extraordinary gain of approximately $5.4
million which was recorded in the fourth quarter of fiscal 1995. All
outstanding series of preferred stock were converted into Common Stock upon
the consummation of the IPO.

NINE MONTHS ENDED APRIL 30, 1996 AND APRIL 30, 1995

Revenue. Revenues are primarily comprised of sales of MEBES, CORE and ALTA
systems, accessories and upgrades, and sales of technical support, maintenance
and other services. Product revenue increased 94% to $74.0 million from $38.1
million for the nine months ended April 30, 1996 and 1995, respectively. This
increase reflects the sale of six additional systems, higher average selling
prices, changes in product mix toward a higher-priced new product, the MEBES
4500, in the fourth quarter of fiscal 1995, and increased revenues from the
ALTA 3000, offset by a reduction in the sales of upgrades and accessories of
approximately $6.1 million.

Service revenue increased 5.0% to $24.1 million from $22.9 million for the
nine months ended April 30, 1996 and 1995, respectively, due primarily to
price increases on service contracts and an increase in the installed base of
systems.

Gross Profit. The Company's gross profit on product revenue increased 109%
to $36.4 million from $17.4 million for the nine months ended April 30, 1996
and 1995, respectively. The increase in gross profit on product revenue was
due to an increase in product revenue and a higher gross margin on product
revenue, which increased to 49.2% from 45.6% for the nine months ended April
30, 1996 compared to the nine months ended April 30, 1995. The increase in
product gross margin is primarily attributable to generally higher selling
prices for the Company's products and improved manufacturing efficiencies.

The Company's gross profit on service revenue decreased 11.9% to $7.3
million from $8.2 million for the nine months ended April 30, 1996 and 1995,
respectively. Gross margin on service revenue was 30.2% and 36.0% for the nine
months ended April 30, 1996 and 1995, respectively. The decrease in margin
reflects an investment in service personnel and training to support the
growing installed base. The Company continues to make such investments, which
it expects will result in additional erosion of service margins.

Research, Development and Engineering. Research, development and engineering
expenses, net of third-party funding under cooperative development agreements,
increased to $12.0 million, representing 12.2% of revenue, from $7.0 million,
representing 11.4% of revenue, for the nine months ended April 30, 1996 and
1995, respectively. This increase primarily reflects a reduction in third-
party funding. For the nine months ended April 30, 1996 and 1995, $725,000 and
$5.5 million, respectively, of funds received under the cooperative
development agreements were applied against research, development and
engineering expenses. See Note 1 of Notes to Consolidated Financial
Statements. Excluding these cost reimbursements, gross research, development
and engineering spending was $12.7 million and $12.5 million in each of the
nine month periods ended April 30, 1996 and 1995, respectively. Due to the
Company's commitment to product development, net research, development and
engineering expenses are expected to increase in future periods.

The Company's success in developing and selling new and enhanced products
depends upon a variety of factors, including accurate prediction of future
customer requirements three or more years in advance of sales, introduction of
new products on schedule, cost-effective manufacturing and product performance
in the field. There can be no assurance that the Company will be successful in
selecting, developing, manufacturing and marketing new products or
enhancements of existing products. See "Risk Factors--Rapid Technological
Change; Dependence on Product Development."

Write-Off of In-Process Technology Acquired. In the third quarter of fiscal
1996, the Company acquired substantially all of the assets and certain
specified liabilities of Polyscan in exchange for 350,000 shares

24
<PAGE>

of the Company's Common Stock. The excess of the purchase price over the fair
market value of the net tangible assets of $6.3 million was allocated to in-
process technology acquired which, because of the uncertainty as to
realization, the Company wrote off in the third quarter of fiscal 1996.

Selling, General and Administrative. Selling, general and administrative
expenses increased to $15.0 million, representing 15.3% of revenue, from $9.2
million, representing 15.1% of revenue, for the nine months ended April 30,
1996 and 1995, respectively. The increase in selling, general and
administrative expenses was partially due to rent associated with the
leaseback of facilities previously owned, additional professional fees
associated with becoming a public company, increased profit sharing, costs
associated with an increase in hiring and an increase in market development
fees tied to shipments of laser beam products.

The Company was party to certain cooperative development agreements that
provided partial funding of general and administrative costs associated with
research and development projects. For the nine months ended April 30, 1995,
$1.2 million of the funding received under these agreements was offset against
selling, general and administrative expenses. Excluding these cost
reimbursements, gross selling, general and administrative spending was $10.4
million for the nine months ended April 30, 1995. No such funding was offset
against selling, general and administrative expenses for the nine months ended
April 30, 1996.

Interest Expense. Interest expense for the nine months ended April 30, 1996
and 1995 was $1.5 million and $3.4 million, respectively, and resulted from
the substantial debt incurred to finance the LBO. The decrease in interest
expense from the corresponding period of the preceding fiscal year reflects
the following: (i) the repayment during the second half of fiscal 1995 of
approximately $6.0 million of senior secured debt in conjunction with the
February 1995 sale and leaseback of the Company's Hayward facility; (ii) the
exchange in July 1995 of approximately $19.7 million of senior subordinated
notes and accrued interest for 105,641 shares of mandatorily redeemable
convertible preferred stock (which were converted into Common Stock on
completion of the IPO) and approximately $3.5 million of senior subordinated
convertible notes which were repaid in the first quarter of fiscal 1996; and
(iii) the repayment of approximately $9.3 million of senior secured notes
during the first half of fiscal 1996.

Other Income, Net. Other income was $2.1 million of income for the nine
months ended April 30, 1996. Included in other income is approximately $1.2
million of interest earned on the investment of the proceeds from the IPO as
well as $846,000 of transaction gains on the redemption of the minority
interest in Etec Japan, which was denominated in yen, in the first quarter of
fiscal 1996.

Income Tax Provision (Benefit). During the nine months ended April 30, 1996,
the Company evaluated the recoverability of its deferred tax assets and
recognized a $15.4 million income tax benefit as a result of releasing a
portion of the valuation allowance previously recorded against its deferred
tax assets. Management's evaluation of the recoverability of the Company's
deferred tax assets is based in part upon the current product backlog and its
ability to increase manufacturing capacity. Management has fully reserved
deferred tax assets that may be realized beyond one year, because of the
uncertainty of realization, and management will continue to evaluate the
recoverability of the Company's deferred tax assets. The Company recorded a
benefit for income taxes for the nine months ended April 30, 1996 of $11.1
million and a provision for income taxes for the nine months ended April 30,
1995 of $1.6 million, primarily reflecting taxes payable by the Company's
foreign subsidiaries and the $15.4 million income tax benefit in fiscal 1996.

Minority Interest. Minority interest in the Company's Japanese subsidiary,
Etec Japan, was $393,000 for the nine months ended April 30, 1995. On July 31,
1995, the minority interest was exchanged for shares of the Company's Series E
Preferred Stock (which were converted into Common Stock on the completion of
the IPO) and a payment of approximately $400,000 to one of the minority
investors, who is the President of Etec Japan and a director of the Company.
Accordingly, no minority interest was recorded during fiscal 1996.

Extraordinary Loss on Early Extinguishment of Debt. During the nine months
ended April 30, 1996, the Company recorded an extraordinary loss of
approximately $300,000 related to the accelerated amortization of financing
costs resulting from a $5.0 million prepayment on its outstanding debt to a
senior lender.

25
<PAGE>

YEARS ENDED JULY 31, 1995 AND JULY 31, 1994

Revenue. Product revenue increased 26.2% to $51.4 million from $40.7 million
for the years ended July 31, 1995 and 1994, respectively. This increase
reflected generally higher selling prices, a change in product mix towards
higher-priced MEBES IV systems, and sales of upgrades and accessories, which
grew as a percentage of total revenue.

Service revenue increased by 12.7% to $31.5 million from $28.0 million for
the years ended July 31, 1995 and 1994, respectively, due primarily to
favorable exchange rates on foreign service contracts, as well as the
relocation of a customer's system to a different facility and generally higher
service activity.

Gross Profit. The Company's gross profit on product revenue increased 60.7%
to $24.4 million from $15.2 million for the years ended July 31, 1995 and
1994, respectively. The increase in gross profit on product revenue was due to
an increase in product revenue and a higher gross margin on product revenue,
which increased to 47.4% from 37.2% for the year ended July 31, 1995 compared
to the year ended July 31, 1994. The increase in product gross margin is
primarily attributable to higher margins earned on MEBES IV, MEBES 4000 and
MEBES 4500 systems, generally higher selling prices for the Company's
products, increased manufacturing efficiencies and increased sales of upgrades
and accessories that generally have higher gross margins than new systems. In
the year ended July 31, 1994, the Company sold two systems that it had
previously capitalized as demonstration and test equipment and fully amortized
in prior fiscal years, which favorably impacted gross margin for the year
ended July 31, 1994. Excluding the sale of these systems, gross margin for the
year ended July 31, 1994 was approximately 32%.

The Company's gross profit on service revenue increased 5.9% to $10.9
million from $10.3 million for the years ended July 31, 1995 and 1994,
respectively. Gross margin on service revenue was 34.6% and 36.8% for the
years ended July 31, 1995 and 1994, respectively. The decrease in margin
reflects an increase in maintenance costs for MEBES III tools.

Research, Development and Engineering. Research, development and engineering
expenses, net of third-party funding, increased to $10.5 million, representing
12.7% of revenue, from $5.1 million, representing 7.4% of revenue, for the
years ended July 31, 1995 and 1994, respectively. This increase primarily
reflects an increase in the proportion of such expenses not funded by third
parties. For the years ended July 31, 1995 and 1994, $6.1 million and $13.9
million, respectively, of funds received under cooperative development
agreements were applied against research, development and engineering
expenses. Excluding these cost reimbursements, gross research, development and
engineering spending was $16.6 million and $19.0 million for the years ended
July 31, 1995 and 1994, respectively. The decrease in gross spending of $2.4
million primarily reflects engineering personnel being reallocated to
manufacturing activities in the year ended July 31, 1995 due primarily to the
winding down of a cooperative development program and manufacturing activities
associated with new product introductions.

Selling, General and Administrative. Selling, general and administrative
expenses increased to $13.4 million, representing 16.2% of revenue, from $10.8
million, representing 15.7% of revenue, for the years ended July 31, 1995 and
1994, respectively. The increase in selling, general and administrative
expenses was partially due to rent and professional fees resulting from the
consummation of the sale and leaseback transaction in February 1995. In
addition, bonuses, sales commissions and other sales expenses were greater in
the year ended July 31, 1995, due to increased sales volume and profitability.

For the years ended July 31, 1995 and 1994, respectively, $1.2 million and
$2.2 million of the funding received under cooperative development agreements
was offset against selling, general and administrative expenses. Excluding
these cost reimbursements, gross selling, general and administrative spending
was $14.6 million and $13.0 million for the years ended July 31, 1995 and
1994, respectively.

26
<PAGE>

Interest Expense. Interest expense for the years ended July 31, 1995 and
1994 was $4.2 million and $5.1 million, respectively, and resulted from the
substantial debt incurred to finance the LBO. Interest expense decreased as a
result of the repayment of approximately $6.0 million of senior secured debt
in conjunction with the sale and leaseback transaction.

Other Income (Expense). Other income (expense) was $175,000 of income and
$71,000 of expense for the years ended July 31, 1995 and 1994, respectively.
Included in income for the year ended July 31, 1995 is approximately $195,000
of deferred gain amortization related to the sale and leaseback of the
Company's Hayward facility during fiscal 1995.

Provision for Income Taxes. The Company recorded provisions for income taxes
for each of the years ended July 31, 1995 and 1994 of $2.3 million,
respectively. These provisions primarily reflect taxes payable by the
Company's foreign subsidiaries. Taxes otherwise due in the U.S have been
substantially offset by net operating loss carryforward benefits.

Minority Interest. Minority interest in the Company's Japanese subsidiary,
Etec Japan, was $527,000 and $462,000, respectively, for the years ended July
31, 1995 and 1994.

YEARS ENDED JULY 31, 1994 AND JULY 31, 1993

Revenue. Product revenue increased 28.7% to $40.7 million from $31.7 million
for the years ended July 31, 1994 and 1993, respectively, due primarily to an
increase in the number of systems sold and increased sales of upgrades from
MEBES III to MEBES IV systems.

Service revenue increased 3.9% to $28.0 million from $26.9 million in the
years ended July 31, 1994 and 1993, respectively. Service revenue did not
increase at the same rate as product revenue because new systems generally
have a one-year warranty and because the number of new service contracts is
relatively small compared to the total number of systems under contract.

Gross Profit. The Company's gross profit on product revenue increased 145%
to $15.2 million from $6.2 million for the years ended July 31, 1994 and 1993,
respectively. The increase in gross profit was due to increases in product
revenue and gross margin on product revenue, which were 37.2% and 19.6% for
the years ended July 31, 1994 and 1993, respectively. The improvement in
product gross margin was due to a variety of factors, including: the sale of
two systems in fiscal 1994 that had been previously capitalized as
demonstration and test equipment and fully amortized in prior fiscal years;
improved manufacturing efficiencies; reduced costs of manufacturing MEBES IV
systems, which were introduced in fiscal 1993; absorption of overhead costs
over a larger sales volume; and increased sales of upgrades and accessories,
which generally have a higher gross margin than new systems. Excluding the
sale of the two systems mentioned above, gross margin for the year ended July
31, 1994 was approximately 32%.

The Company's gross profit on service revenue decreased 1% to $10.3 million
from $10.4 million for the years ended July 31, 1994 and 1993, respectively.
The Company's gross margin on service revenue was 36.8% and 38.8% for the
years ended July 31, 1994 and 1993, respectively. The decrease in gross margin
reflects increased maintenance costs for MEBES III tools.

Research, Development and Engineering. Research, development and engineering
expenses decreased to $5.1 million, representing 7.4% of revenue, from $11.0
million, representing 18.8% of revenue, during the years ended July 31, 1994
and 1993, respectively. During the years ended July 31, 1994 and 1993, $13.9
million and $9.3 million, respectively, of cooperative development agreement
funding was applied against research, development and engineering costs.
Including these cost reimbursements, gross research, development and
engineering spending was $19.0 million and $20.3 million for the years ended
July 31, 1994 and 1993, respectively. The decrease in gross spending of $1.3
million reflects a reduction in engineering personnel, the completion of the
development stage of the ALTA 3000 and a reallocation of engineering personnel
to manufacturing operations.

27
<PAGE>

Selling, General and Administrative. Selling, general and administrative
expenses increased to $10.8 million, representing 15.7% of revenue, from $10.0
million, representing 17.2% of revenue, during the years ended July 31, 1994
and 1993, respectively. During the years ended July 31, 1994 and 1993, $2.2
million and $1.7 million of cooperative development agreement funding received
was offset against selling, general and administrative costs. Including these
cost reimbursements, gross selling, general and administrative spending for
the years ended July 31, 1994 and 1993 was $13.0 million and $11.7 million,
respectively. The increase in absolute dollars is due to increased sales and
marketing expenses. The number of sales and marketing personnel increased,
resulting in an increase in salaries, commissions and benefits. In addition,
costs incurred for customer demonstrations and other marketing expenses
including costs for trade shows and international travel increased.

Interest Expense. Interest expense for the years ended July 31, 1994 and
1993 was $5.1 million and $5.9 million, respectively, and resulted from the
substantial debt incurred to finance the LBO. The decrease in interest expense
reflects the retirement of a bank loan and certain notes payable.

Other Income (Expense). Other income (expense) was $71,000 of expense and
$789,000 of income for the years ended July 31, 1994 and 1993, respectively.
Included in income for the year ended July 31, 1993 is certain miscellaneous
nonrecurring income resulting from the liquidation of intercompany loan
balances at favorable foreign currency rates, the disposal of certain capital
equipment and several other nonrecurring transactions.

Provision for Income Taxes. The Company recorded a provision for income
taxes of $2.3 million and $1.5 million for the years ended July 31, 1994 and
1993, respectively. The provisions primarily reflect taxes on the earnings of
the Company's foreign subsidiaries.

Minority Interest. Minority interest expense for the years ended July 31,
1994 and 1993 was $462,000 and $379,000, respectively. The minority interest
expense reflected the percentage of the mandatory redemption amount of the
minority shares in Etec Japan equal to the Japanese long-term interest rate
plus 1%.

28
<PAGE>

QUARTERLY INFORMATION

The following tables present certain unaudited quarterly data for the seven
quarters ended April 30, 1996, and such data expressed as a percentage of
revenue for such quarters. In the opinion of management, this information has
been presented on the same basis as the audited consolidated financial
statements appearing elsewhere in this Prospectus, and all necessary
adjustments have been included in the amounts stated below to present fairly
the unaudited quarterly results when read in conjunction with the audited
consolidated financial statements of the Company. Results of operations for
any quarter are not necessarily indicative of the results to be expected for
the entire fiscal year or for any future period.

<TABLE>
<CAPTION>
THREE MONTHS ENDED
---------------------------------------------------------------------
OCT. 31, JAN. 31, APRIL 30, JULY 31, OCT. 31, JAN. 31, APRIL 30,
1994 1995 1995 1995 1995 1996 1996
-------- -------- --------- -------- -------- -------- ---------
(IN THOUSANDS)
<S> <C> <C> <C> <C> <C> <C> <C>
Revenue:
Products.............. $12,603 $12,630 $12,910 $13,252 $17,103 $23,522 $ 33,358
Services.............. 6,941 7,194 8,767 8,619 7,605 8,083 8,364
------- ------- ------- ------- ------- ------- --------
19,544 19,824 21,677 21,871 24,708 31,605 41,722
------- ------- ------- ------- ------- ------- --------
Cost of revenue:
Cost of products...... 6,706 7,063 6,987 6,259 8,381 12,826 16,399
Cost of services...... 4,476 4,968 5,222 5,938 5,371 5,548 5,875
------- ------- ------- ------- ------- ------- --------
11,182 12,031 12,209 12,197 13,752 18,374 22,274
------- ------- ------- ------- ------- ------- --------
Gross profit............ 8,362 7,793 9,468 9,674 10,956 13,231 19,448
------- ------- ------- ------- ------- ------- --------
Operating expenses:
Research, development
and engineering...... 2,277 2,124 2,551 3,545 3,271 3,568 5,152
Write-off of in-
process technology
acquired............. -- -- -- -- -- -- 6,269
Selling, general and
administrative....... 2,915 2,736 3,543 4,203 4,453 4,771 5,749
------- ------- ------- ------- ------- ------- --------
5,192 4,860 6,094 7,748 7,724 8,339 17,170
------- ------- ------- ------- ------- ------- --------
Income from operations.. 3,170 2,933 3,374 1,926 3,232 4,892 2,278
Interest expense........ (1,195) (1,146) (1,028) (869) (612) (512) (338)
Other income (expense),
net.................... (154) 110 (53) 272 929 671 543
------- ------- ------- ------- ------- ------- --------
Income before income tax
provision (benefit),
minority interest and
extraordinary items.... 1,821 1,897 2,293 1,329 3,549 5,051 2,483
Income tax provision
(benefit).............. 480 500 620 689 887 1,263 (13,213)
Minority interest in
earnings of subsidiary. 129 129 135 134 -- -- --
------- ------- ------- ------- ------- ------- --------
Income before
extraordinary items.... 1,212 1,268 1,538 506 2,662 3,788 15,696
Extraordinary gain
(loss) on early
extinguishment of debt. -- -- -- 5,412 -- (300) --
------- ------- ------- ------- ------- ------- --------
Net income.............. $ 1,212 $ 1,268 $ 1,538 $ 5,918 $ 2,662 $ 3,488 $ 15,696
======= ======= ======= ======= ======= ======= ========
PERCENTAGE OF REVENUE:
Revenue:
Products.............. 64% 64% 60% 61% 69% 74% 80%
Services.............. 36 36 40 39 31 26 20
------- ------- ------- ------- ------- ------- --------
100 100 100 100 100 100 100
------- ------- ------- ------- ------- ------- --------
Cost of revenue:
Cost of products...... 34 36 32 29 34 41 39
Cost of services...... 23 25 24 27 22 17 14
------- ------- ------- ------- ------- ------- --------
57 61 56 56 56 58 53
------- ------- ------- ------- ------- ------- --------
Gross profit............ 43 39 44 44 44 42 47
------- ------- ------- ------- ------- ------- --------
Operating expenses:
Research, development
and engineering...... 12 10 12 16 13 11 12
Write-off of in-
process technology
acquired............. -- -- -- -- -- -- 15
Selling, general and
administrative....... 15 14 16 19 18 15 14
------- ------- ------- ------- ------- ------- --------
27 24 28 35 31 26 41
------- ------- ------- ------- ------- ------- --------
Income from operations.. 16 15 16 9 13 16 6
Interest expense........ (6) (6) (5) (4) (3) (2) (1)
Other income (expense),
net.................... (1) 1 0 1 4 2 1
------- ------- ------- ------- ------- ------- --------
Income before income tax
provision (benefit),
minority interest and
extraordinary items.... 9 10 11 6 14 16 6
Income tax provision
(benefit).............. 2 3 3 3 4 4 (32)
Minority interest in
earnings of subsidiary. 1 1 1 1 -- -- --
------- ------- ------- ------- ------- ------- --------
Income before
extraordinary items.... 6 6 7 2 10 12 38
Extraordinary gain
(loss) on early
extinguishment of debt. -- -- -- 25 -- (1) --
------- ------- ------- ------- ------- ------- --------
Net income.............. 6% 6% 7% 27% 10% 11% 38%
======= ======= ======= ======= ======= ======= ========
</TABLE>

29
<PAGE>

The Company's operating results have historically been subject to
significant quarterly and annual fluctuations. The Company believes that its
operating results will continue to fluctuate on a quarterly and annual basis
due to a variety of factors, including the cyclicality of the maskmaking and
semiconductor industries, the timing of significant orders, order
cancellations, shipment reschedulings, market acceptance of the Company's
products, fluctuations in the grant and funding of development contracts,
consolidation of the number of mask shops, unanticipated delays in design,
engineering or production or in customer acceptance of product shipments,
changes in pricing by the Company or its competitors, the timing of product
announcements or introductions by the Company or its competitors, the mix of
systems sold, the relative proportions of product revenues and service
revenues, the timing of payments of sales commissions, changes in product
development costs, expenses associated with acquisitions and exchange rate
fluctuations. The Company's net income and cash flow will also be affected by
its ability to apply its NOLs, which totaled approximately $27.3 million for
federal income tax purposes at April 30, 1996, against taxable income in
future periods. The utilization of the Company's NOLs cannot exceed
approximately $19.0 million per fiscal year following this offering, based on
the Company's market value on June 24, 1996. The Company cannot predict the
impact of these and other factors on its financial performance in any future
period. See "Risk Factors--Fluctuations in Operating Results."

Over the last seven quarters, the Company's product revenues have fluctuated
primarily as a result of the timing of shipments and the number and mix of
systems sold in a particular quarter. The Company expects that such
fluctuations will continue in the future. For example, the Company had
expected to ship a significant system in the fourth quarter of fiscal 1995,
which, as a result of delays in factory acceptance, did not ship until the
first quarter of fiscal 1996. Product revenues increased significantly from
the fourth quarter of fiscal 1995 to the third quarter of fiscal 1996, due
primarily to increases in shipments and average selling prices and changes in
the product mix. Included in cost of products in the fourth quarter of fiscal
1995 is the reversal of a $500,000 reserve taken in a prior period related to
the installation of a machine. In the fourth quarter of fiscal 1995, the
Company satisfied all of its outstanding obligations pertaining to this
installation and reversed the excess reserve.

Service revenues have fluctuated primarily due to changes in exchange rates,
growth in the installed base of systems, occasional relocations of systems and
other non-recurring service events, and changes in service contract rates.
Service revenues and gross margin on services increased significantly in the
third quarter of fiscal 1995 primarily as a result of favorable exchange rates
on foreign service contracts and the relocation of a customer's system to a
different facility. In the fourth quarter of fiscal 1995, favorable exchange
rates continued to affect service revenue, and the Company relocated another
customer's system to a different facility. As the Company continues to invest
in service personnel and training to support the growing installed base of
systems, it anticipates that service margins will decline.

The Company's contribution to net research, development and engineering
increased commencing in the fourth quarter of fiscal 1995 due to reductions in
cooperative development funding from third parties. Research, development and
engineering expenses increased significantly in the third quarter of fiscal
1996 due to a reduction in the amount of activities funded by third parties,
an increase in procurement of materials for the Company's development programs
of approximately $500,000 and research and development expenses incurred at
Etec Polyscan, Inc. of approximately $168,000. Due to the Company's commitment
to product development, net research, development and engineering expenses are
expected to increase in future periods. In addition, research and development
expenses may fluctuate as a result of the timing of the receipt of materials
used in development activities.

Selling, general and administrative expenses increased significantly in the
third and fourth quarters of fiscal 1995, primarily as a result of increased
bonuses and sales commissions as well as increased professional fees in the
third quarter of fiscal 1995. Selling, general and administrative expenses
increased significantly in the third quarter of fiscal 1996 due to increased
expenses for market development fees for laser beam system sales in Asia,
increased profit-sharing and the costs associated with being a public company.

30
<PAGE>

Included in the fourth quarter of fiscal 1995 is an extraordinary gain of
$5.4 million recorded as a result of the early extinguishment of $19.7 million
of subordinated notes payable and accrued interest. Included in the second
quarter of fiscal 1996 is an extraordinary loss of $300,000 recorded as a
result of the early extinguishment of $5.0 million of senior secured debt. See
Note 3 of Notes to Consolidated Financial Statements.

Included in the third quarter of fiscal 1996 is a $6.3 million charge for
in-process technology acquired related to the excess of the purchase price
over net assets acquired in the acquisition of substantially all of the assets
of Polyscan. See Note 13 of Notes to Consolidated Financial Statements.

In the third quarter of fiscal 1996, the Company evaluated the
recoverability of its deferred tax assets and recognized $15.4 million income
tax benefit as a result of releasing a portion of the valuation allowance
previously recorded against its deferred tax assets. Management's evaluation
of the recoverability of the Company's deferred assets is based upon the
current product backlog and its ability to increase manufacturing capacity.
Management has fully reserved deferred tax assets that may be realized beyond
one year, because of the uncertainty of realization, and management will
continue to evaluate the recoverability of the Company's deferred tax assets.

LIQUIDITY AND CAPITAL RESOURCES

Since the beginning of fiscal 1993, the Company has financed its cash needs
primarily with cash from operations, approximately $11.0 million in net
receipts from the sale and leaseback of the Company's Hayward, California
facility in fiscal 1995, and $41.6 million from the Company's IPO in the first
half of fiscal 1996.

The Company has budgeted a total of approximately $19.0 million for capital
expenditures in fiscal 1996 primarily to purchase testing and other equipment,
upgrade its manufacturing facilities and implement an enterprise-wide business
software system, of which $7.9 million had been expended as of April 30, 1996.
The Company has budgeted in excess of $20.0 million for capital expenditures
in fiscal 1997. In April 1996, the Company commenced construction of a 60,000
square foot administrative building in Hayward, California, and is financing
the construction with available cash.

As of April 30, 1996, the Company had cash and cash equivalents and
marketable securities of $41.0 million. The Company believes that the net
proceeds from this offering and from the concurrent sale of Common Stock to
Intel, together with existing sources of liquidity including cash flow from
operations, will provide adequate cash to fund its operations for at least the
next twelve months.

Cash Flow from Operations

Net cash used in operations for the nine months ended April 30, 1996 was
$4.5 million compared to $3.0 million provided by operations for the
corresponding period in 1995. Net cash provided by operations for the fiscal
years ended July 31, 1995, 1994 and 1993 was $9.1 million, $3.6 million and
$12.0 million, respectively.

Cash flow from operations for the nine months ended April 30, 1996 reflected
net income of $21.8 million, decreased by non-cash items (which include $15.4
million of deferred taxes, partially offset by depreciation and amortization
of intangibles of $2.2 million and the write-off of in-process technology
acquired of $6.3 million); cash inflows from decreases in prepaid expenses and
other assets of $1.2 million, and increases in accounts payable and other
current liabilities of $16.1 million; and cash outflows from increases in
accounts receivable of $19.5 million and inventory of $17.5 million.

Cash flow from operations for the nine months ended April 30, 1995 reflected
net income of $4.0 million, increased by non-cash items (which include
depreciation and amortization of intangibles of $2.5 million); cash inflows
from decreases in inventory, prepaid expenses and other assets of $2.3
million; and cash outflows from an increase in accounts receivable of $3.4
million and a decrease in current liabilities of $2.3 million.

31
<PAGE>

Cash flow from operations in fiscal 1995 reflected net income of $9.9
million, decreased by non-cash items (which include an extraordinary gain of
$5.4 million, partially offset by depreciation and amortization of intangibles
of $3.0 million), increases in accounts receivable, inventory, prepaid
expenses and other assets, accrued and other liabilities of $14.7 million, and
decreases in accounts payable of $1.2 million.

Cash flow from operations in fiscal 1994 reflected net income of $1.6
million, increased by non-cash items (which include depreciation and
amortization of intangibles of $3.8 million), decreases in inventory of $7.9
million, increases in accounts receivable of $4.7 million, and decreases in
current liabilities of $4.1 million.

Cash flow from operations in fiscal 1993 reflected a net loss of $11.4
million partially offset by non-cash items (which include depreciation and
amortization of intangibles of $4.6 million), and reflected a decrease in
accounts receivable and inventory of $5.5 million and $5.5 million,
respectively, and an increase in current liabilities of $6.5 million.

Fluctuations in accounts receivable, inventory and current liabilities for
all of the above periods were caused primarily by the timing of system orders,
the timing of shipments, customer requested delivery dates and the timing of
payments to vendors. The significant increase in inventory during the nine
months ended April 30, 1996 was due primarily to increases in material
purchases and work-in-process to meet scheduled production.

Prior to the shipment of a system, the Company receives payment for a
significant portion of the system sales price. Such payments are generally
received when the Company receives an order and at various agreed upon times
when the system is being manufactured. Therefore, the amount of customer
advances received fluctuates based on the number of systems that are on order
and depending on each system's status within the manufacturing cycle. Advances
from customers increased significantly to $22.1 million at April 30, 1996 from
$12.9 million at July 31, 1995 and from $3.8 million at July 31, 1994 because
the Company's backlog for products increased to $142.8 million from $65.2
million and $30.1 million, respectively. See "Business--Backlog".

Financing and Investing Activities

During fiscal 1995, the Company sold its headquarters facility located in
Hayward, California for approximately $11.0 million. The Company leased back
the property for an initial term of fifteen years, and has options to renew
the lease for four five-year periods. See Note 11 of Notes to Consolidated
Financial Statements. The Company intends to restructure the existing sale and
leaseback arrangement to include its new administrative facility upon the
completion of construction.

Net cash provided by financing activities for the nine months ended April
30, 1996 was $31.2 million, and net cash used in financing activities for the
same period ended in 1995 was $8.6 million. In the first half of fiscal 1996,
the Company raised approximately $41.6 million before offering expenses in
connection with its IPO. The Company also received interim financing on
foreign sales of $3.5 million from one of its stockholders during the nine
months ended April 30, 1996. See "Sales and Marketing." During that period,
the Company prepaid $9.3 million of its senior secured indebtedness and repaid
$3.8 million of subordinated convertible notes out of the proceeds of the IPO.

Net cash provided by financing activities for fiscal 1995 was $162,000 and
net cash used in financing activities for fiscal 1994 and fiscal 1993 was $2.3
million and $6.0 million, respectively. During fiscal 1995 and fiscal 1994,
the Company repaid $6.0 million and $600,000, respectively, of its senior
secured notes. During fiscal 1994 and 1993, the Company repaid $2.8 million
and $5.2 million, respectively, of a bank loan and other notes payable.
Additionally, during fiscal 1995 and fiscal 1994 the Company received interim
financing on foreign sales of $6.2 million and $507,000, respectively, from
one of its stockholders.

32
<PAGE>

On May 24, 1996, the Company entered into a $30.0 million financing facility
with a major financial institution, which includes a $20.0 million two-year
revolving credit facility and a $10.0 million three-year term note.
Indebtedness under the revolving credit facility and term note will be
unsecured and will bear interest at the London Interbank Offered Rate plus
1.25%. The London Interbank Offered Rate was 5.56% on June 24, 1996. The terms
of the financing facility will require the Company to comply with certain
financial and restrictive covenants, including maintenance of certain
financial ratios and minimum net worth criteria, restrictions on the
incurrence of indebtedness and certain dividend restrictions. On May 31, 1996,
the Company drew down the $10.0 million term note to prepay in full its 10.65%
senior secured notes. As a result of the early extinguishment of the senior
secured notes, the Company will record an extraordinary charge of
approximately $600,000 in the fourth quarter of fiscal 1996, related to the
accelerated amortization of financing costs.

In June 1995, the Company entered into a loan agreement with Polyscan,
whereby the Company provided financing to Polyscan. The loan bore interest at
prime plus 3% and the balance of $1.8 million was due on January 31, 1996.
During February 1996, Polyscan repaid $600,000 to the Company and Etec
Polyscan acquired substantially all of the assets and certain specified
liabilities of Polyscan in exchange for 350,000 shares of the Company's Common
Stock. Etec Polyscan also assumed Polyscan's obligation to repay the
outstanding loan in the amount of approximately $1.2 million.

Concurrently with the completion of this offering, Intel will purchase
500,000 shares of the Company's Common Stock for $10.0 million and will
receive warrants to purchase an additional 75,000 shares of Common Stock.
These warrants will be exercisable only if Intel's purchases of products and
services from the Company over the succeeding four years exceed certain
thresholds, or upon the occurrence of certain other conditions.

33
<PAGE>

BUSINESS

INTRODUCTION

Etec Systems, Inc. ("Etec" or the "Company") is the world leader in the
production of mask pattern generation equipment for the semiconductor
industry. Etec designs, develops, manufactures and markets equipment that
produces high precision masks, which are used to print circuit patterns onto
semiconductor wafers. Etec sells its MEBES electron beam systems and its CORE
and ALTA laser beam systems at prices currently ranging from approximately
$2.5 million to $7.5 million each and accessories and upgrades at prices
currently ranging from approximately $1.5 million to $5.0 million each. The
Company also derives significant revenues from service and support of its
installed base of systems. The Company believes that over 230 commercial
electron beam and laser beam mask pattern generation systems are currently
installed outside the former Eastern Bloc, of which over 155 have been
produced by Etec.

The Company is the only maskmaking equipment manufacturer currently offering
both electron beam and laser beam systems. The Company believes that the
different performance and cost characteristics of electron beam and laser beam
systems satisfy the broad range of technical requirements and cost
sensitivities of its customers. The Company's systems are designed to provide
a low cost of ownership through high performance, reliability and ease of
maintenance.

The Company's goal is to maintain its leadership position in pattern
generation for the semiconductor market and leverage its expertise to pursue
other opportunities in high performance imaging. To maintain technology
leadership, the Company intends to continue to work closely with major
customers and seek strategic alliances with other semiconductor industry
participants to identify the leading-edge requirements for semiconductor
maskmaking. In addition, Etec plans to develop or acquire lithography-related
products that serve other markets having technology and market links with its
business, such as direct imaging and maskmaking for large-area applications.
In furtherance of this strategy, the Company acquired substantially all of the
assets of Polyscan, a developer of laser direct imaging systems for large-area
pattern generation applications, in February 1996. The Company also intends to
continue to emphasize the compatibility of its new systems with its installed
systems and to provide superior technical service and support to its
customers.

The Company's customers include merchant maskmakers such as Dai Nippon
Printing Co. Ltd., DuPont Photomasks, Inc., Photronics, Inc. and Toppan
Printing Company, Ltd., and semiconductor manufacturers with captive mask
shops, such as International Business Machines Corporation, Intel Corporation,
Samsung Electronics Co., Ltd. and Sony Corporation. Concurrently with the
completion of this offering, Intel will purchase 500,000 shares of the
Company's Common Stock for $10.0 million and will receive warrants to purchase
an additional 75,000 shares of Common Stock. The Company markets and
distributes its products directly into North America, Japan, South Korea and
Europe through its sales offices in California, Japan, South Korea and France.
Customers in Southeast Asia, China and India are currently covered by sales
representatives with assistance by the Company's sales and marketing staff in
California.

INDUSTRY BACKGROUND

MASKMAKING IN THE SEMICONDUCTOR INDUSTRY

The worldwide semiconductor industry is large and growing. According to
industry analysts' estimates, worldwide semiconductor sales increased from
approximately $77 billion in 1993 to $102 billion in 1994 and to $144 billion
in 1995. The increase in demand is driven by growth in traditional markets for
semiconductors such as computers, networking, telecommunications and other
advanced electronics applications, as well as the proliferation of
semiconductor devices into new products and markets such as cellular
telephones, pagers, automobiles, medical products, household appliances and
other consumer products.

34
<PAGE>

Masked wafer lithography is the predominant method for high-volume
semiconductor device manufacturing. Masked wafer lithography utilizes a
"mask," which is a physical master image of the circuit pattern written by a
pattern generating tool onto a chrome layer on a quartz substrate with
extremely high precision and resolution. In the mask writing process, the
circuit design data are converted to pattern data and used to control an
electron or laser beam, which exposes the circuit pattern onto a resist
covering the opaque chrome layer of the mask. After developing the mask
resist, the chrome layer is permanently etched into the pattern of the mask.

The mask, which is conceptually similar to a negative in photography, is
used in photolithography tools (called "steppers" or "aligners") to make
numerous copies of the pattern image on semiconductor wafers. This
reproduction is typically accomplished by transferring light through the mask
onto a thin, photosensitive polymer or "photoresist" that is spread over the
surface of the wafer. Those areas of the photoresist that have been exposed to
light are then dissolved by chemical developers, and the exposed areas are
etched. Successive steps of deposition, lithography and etch create the
multiple pattern layers of conductive, semiconductor and insulating material
that make up the millions of transistors designed into a single semiconductor.
See diagram below. The pattern reproduction process performed by a stepper or
aligner can be automated for very high rates of wafer processing, which allows
the device manufacturer to reduce its wafer printing costs.

[GRAPHIC: SEE APPENDIX]

An alternative to masked semiconductor lithography, direct write
lithography, prints the circuit pattern directly onto a semiconductor wafer
without using a mask. The wafer direct write method has historically suffered
from throughput limitations that have severely reduced its usefulness for
high-volume, commercial device manufacturing.

THE MASKMAKING MARKET

The maskmaking industry is comprised of "merchant" suppliers selling to a
variety of semiconductor manufacturers, and "captive" mask shops of
semiconductor manufacturers producing almost exclusively for their own
requirements. The demand for mask pattern generation tools is primarily driven
by advances in technology requiring more precise and more complex masks and by
increases in mask unit volumes. Mask average selling prices ("ASPs") and unit
sales began to grow in 1994. Accordingly, maskmakers' sales and profitability
began to rise significantly in 1994. This contributed to stronger demand for
mask pattern generation equipment. According to VLSI Research, worldwide mask
pattern generation equipment revenues increased by 28% from 1994 to 1995, and
are projected to increase by 65% from 1995 to 1996.

35
<PAGE>

Currently, the Company believes that maskmakers are substantially increasing
their investment in new mask pattern generation tools to meet increased
capacity requirements and to create more complex, higher resolution masks
required for next generation integrated circuits. However, from 1984 to 1993,
several advances in semiconductor production methods sharply reduced the
number of mask units required and the precision requirements for masks. These
changes caused slow mask unit growth and low mask prices throughout that
period.

The Maskmaking Market From 1984 to 1993

The market for masks and maskmaking equipment experienced an extended period
of slow growth during the second half of the 1980s and the beginning of the
1990s. Rose Associates estimates that, from 1984 to 1993, worldwide mask
revenues grew by approximately 50%, from $740 million to $1.1 billion, while
sales of semiconductors nearly tripled, from approximately $26 billion to
approximately $77 billion. Thus, the estimated size of the mask market
declined from 3.5% of the semiconductor market in 1984 to 1.4% in 1993. Over
the same period, sales of maskmaking equipment were relatively flat. The
Company believes that this period of limited growth in the market for masks
and maskmaking equipment resulted from several factors, including the
following:

Introduction of Reduction Steppers. During the late 1970s and early 1980s,
the predominant semiconductor lithography technology was projection aligners
that used masks with features the same size as the features printed on the
wafer ("1X" masks). In the mid-1980s, the semiconductor industry made the
transition to reduction steppers that used masks with features five times
larger than the features printed on the wafer ("5X" masks). This resulted in a
significant relaxation of mask specifications because mask errors were reduced
by the 5X demagnification of the mask pattern.

The relaxation of mask specifications extended the life of the existing mask
pattern generation systems, which were developed for 1X masks for the pilot
production of 1.2 micron devices beginning in the mid-1980s. The less rigorous
specifications allowed these mask pattern generators to be used through the
production of 0.8 micron devices, well into 1994, when the production of 0.5
micron devices began to accelerate. No significant technical requirement
existed during that period to increase the demand for new pattern generation
equipment.

Adoption of Software Design Tools. The introduction of computer-aided design
("CAD") and other software tools for design automation and simulation in the
mid-1980s reduced the number of mask iterations required to create a working
integrated circuit. Before the advent of design automation and simulation, the
creation of a production-worthy device design would typically require several
mask iterations. This trial-and-error process supported mask demand. Design
automation and simulation reduced the number of iterations required to produce
a commercially usable mask, typically to no more than two. This reduced the
demand for masks, which contributed to a depressed level of investment in
maskmaking equipment.

Introduction of Pellicles. A "pellicle" is a thin, transparent membrane
suspended over the mask surface on a frame mounted to the mask. The pellicle
increases semiconductor manufacturing yields by preventing airborne particles
from falling onto the surface of the mask and printing as defects on the
wafer. Since their introduction in the early 1980s, pellicles have
significantly reduced the need to clean the masks used in production, thus
substantially extending the life of a mask. Accordingly, the introduction of
pellicles significantly reduced the number of masks required in high-volume
semiconductor device manufacturing. This reduction in mask demand adversely
affected investment in maskmaking equipment.

The Maskmaking Market After 1993

The Company believes that the factors restraining the maskmaking industry's
growth from the mid-1980s through the early 1990s have dissipated in recent
years. The reduction in semiconductor linewidths to 0.5 micron and below has
exceeded the capabilities of pattern generation systems designed in the early
1980s,

36
<PAGE>

even with the demagnification provided by 5X reduction steppers. In addition,
the impact of CAD tools and pellicles on mask demand should not be as great as
when they were first introduced in the 1980s. The Company believes that,
because these historical factors have largely run their course, the demand for
masks and maskmaking equipment will tend to be more closely correlated with
semiconductor demand.

In addition, the Company believes that increased complexity in semiconductor
devices has recently contributed to higher demand for complex masks and for
increased sophistication in maskmaking equipment. Future device generations
are expected to require feature sizes beyond the optical resolution limit of
existing photolithography equipment. In order to print these patterns with
conventional masks, integrated circuit manufacturers would have to incur
significant capital expenses to retool their facilities with new steppers with
shorter wavelength illumination sources and new resist and other processes.
New mask technologies such as phase shift masks and optical proximity
correction are expected to extend the optical resolution of existing
photolithography equipment, delaying the investment required for new steppers
and the associated process equipment.

Although device complexity was also increasing during the 1980s, the
relaxation of mask specifications permitted by 5X steppers and the other
factors described above had a largely offsetting effect on maskmaking
equipment demand. For example, due to the increasing complexity of
semiconductor devices, the number of masked lithography layers required to
produce a typical device has increased from approximately ten in the mid-1980s
to between 20 and 25 today. From the mid-1980s to the early 1990s, this growth
factor was offset by the factors described above. By contrast, in the last two
or three years, increasing device complexity has led to several developments
that the Company believes have contributed to recent growth in the maskmaking
market. These developments include the following:

Advances in Phase Shift Masks and Optical Proximity Correction. As
semiconductor line widths have become as small as the wavelength of the
illumination sources used in optical lithography, the semiconductor
manufacturing process has become very sensitive to mask errors and requires
much more sophisticated masks. Two new technologies are being applied to a
pattern image on a mask that can extend the resolution of optical lithographic
technology--phase shift masks ("PSM") and optical proximity correction
("OPC"). PSM requires one or more additional exposure steps on each mask,
making masks more difficult and slower to produce and thereby reducing the
capacity of mask pattern generators. OPC significantly increases the
resolution required on a mask, which significantly reduces mask tolerances and
thus requires new mask pattern generation technology. PSM and OPC are still
under development, but as they emerge, the Company believes that they will
lead to additional demand for mask pattern generators. See "--New Mask
Technologies: Phase Shift Masks and Optical Proximity Correction."

Trend to Lower Reduction Ratio Steppers. The increasing complexity of
integrated circuit devices has led to an increase in their physical size. For
example, Intel Pentium(R) chips are approximately three times larger than the
80286 chips that were in commercial production in the mid-1980s. In order to
produce larger chips, most stepper manufacturers have moved from 5X to 4X
reduction ratios in their designs for the next generation of photolithography
equipment. A decrease in stepper reduction ratios exacerbates the effect of
mask errors, driving masks to tighter tolerances and accelerating the demand
for more advanced mask pattern generators. Further decreases in stepper
reduction ratios may be required in the future.

Acceptance of Mix-and-Match Production. Many of the layers of a typical
semiconductor device do not require the small feature sizes that advanced
steppers can reproduce. Some device manufacturers have therefore integrated
less expensive, lower performance steppers into their production, in a "mix-
and-match" mode that reduces the overall cost of the photolithography process.
Today, lower performance steppers are being designed with a lower reduction
ratio (between 1X and 2.5X), in an effort to place more information on the
mask, increasing the throughput of the stepper. This increases the
productivity per unit cost of the photolithography process. Lower mask
magnification requires tighter mask tolerances, which accelerates the demand
for new mask pattern generation technology.

37
<PAGE>

STRATEGIC IMPORTANCE OF MASKS

Advanced masks and mask pattern generation tools have become strategically
important to the advancement of semiconductor technology and to cost
containment in the manufacture of future generations of semiconductors. The
Company believes that advanced mask technology is viewed as critical to the
cost-effective extension of optical lithography through the next three or four
device generations and that the trade-off between the cost of shorter
wavelength lithography tools and the cost of advanced masks will favor
investment in advanced masks. In addition, as semiconductor linewidths become
as small as the wavelength of the illumination sources in optical lithography
and stepper magnifications decline, the semiconductor manufacturing process
becomes very sensitive to mask errors and requires masks with much tighter
tolerances. These advanced masks must be produced by increasingly
sophisticated mask pattern generation tools.

STRATEGY

Maintain Technology Leadership. Since its formation, the Company's
objective has been to extend its leadership position in pattern generation
technology. To maintain technology leadership, the Company intends to
continue to work closely with major customers and pursue strategic
alliances with other semiconductor industry participants to identify the
leading-edge requirements for semiconductor maskmaking and to support
product and process development.

Provide Broad Range of Mask Pattern Generation Solutions. The Company's
product strategy is to cover a broad range of technical requirements and
cost sensitivities. The Company believes that its ability to offer both
electron beam and laser beam systems, which have different performance and
cost characteristics, is a significant competitive advantage. The Company's
MEBES, ALTA and CORE product lines serve the diverse needs of commercial
mask manufacturers, which must supply a range of mask types to their
different customers. The MEBES 4500 delivers the accuracy, resolution and
flexibility necessary to meet the demanding mask requirements of the
prototyping and pilot production of 0.25 micron devices. The ALTA 3000,
CORE 2564 and CORE 2100 are well suited for high-volume production of masks
for semiconductor devices with feature sizes from 0.35 micron to more than
one micron.

Broaden Product Offerings. Etec plans to develop or acquire pattern
generation and lithography-related products that serve additional markets
and market segments. The Company intends to target opportunities that have
technology and market links with its existing business, such as direct
imaging and maskmaking for large area applications, including multichip
modules, flat panel displays, fine pitch printed circuit boards and
precision etched parts. In furtherance of this strategy, the Company
acquired substantially all of the assets of Polyscan in February 1996.
Through a subsidiary, Etec Polyscan, the Company intends to continue
Polyscan's efforts to develop laser direct imaging systems for industries
requiring large-area pattern generation, such as printed circuit boards and
multi-chip modules. The Company is also exploring potential synergies
between Polyscan's technology and Etec's laser beam maskmaking systems.

Leverage Installed Base. In marketing new products to existing customers,
Etec plans to continue to emphasize the compatibility of its new systems
with its installed systems. Software and hardware enhancements to existing
systems have historically provided a significant source of higher margin
revenues. Etec intends to continue to pursue additional revenues where new
system sales are otherwise unobtainable, by developing and marketing a wide
variety of retrofit "suites" and other product accessories and upgrades.
For example, both of Etec's most advanced systems, the MEBES 4500 and the
ALTA 3000, have modular designs to facilitate future enhancements.

38
<PAGE>

Deliver Superior Customer Support. Etec has made customer support one of
its foremost corporate priorities. Accordingly, the Company treats customer
support as an integral part of its business rather than as a stand-alone
unit. To achieve customer satisfaction, the Company seeks to provide
superior technical service and responsiveness, products that meet or exceed
specifications and parts that are rapidly delivered and defect free.

PRODUCTS AND SERVICES

Etec's products consist of electron beam and laser beam maskmaking systems.
The Company's systems are designed to provide a low cost of ownership through
high performance, reliability and ease of maintenance. In addition, the
Company's systems have modular designs to facilitate retrofitting. The Company
is the only maskmaking equipment manufacturer currently offering both electron
beam and laser beam systems. The Company believes that this represents an
important competitive advantage, as the different performance and cost
characteristics of electron beam and laser beam systems permit it to cover a
broad range of technical requirements and cost sensitivities for its
customers.

The different characteristics of electron beam and laser beam systems suit
them to different segments of the mask pattern generation market. Electron
beam systems have a much smaller beam spot size than laser beam systems and
are best suited for leading-edge market segments that require the highest
resolution and accuracy. The Company's MEBES electron beam systems also have
an open control and software architecture, which offer maximum flexibility to
the maskmaker. The primary advantage of laser beam systems is their relative
simplicity and lower cost of ownership compared to electron beam systems.
Another advantage of laser beam systems is the use of optical resists for the
maskmaking process, which are easier to use than electron beam resists.

MEBES Electron Beam Systems. The MEBES family of mask pattern generation
tools began with Etec's licensed manufacture of a Bell Laboratories design in
1976, and has been continuously upgraded due to the ever-increasing demands of
semiconductor production. Etec believes that more mask shops use its MEBES
systems than any other maskmaking tool. Over 150 MEBES systems have been
produced, of which at least 110 remain in service. MEBES systems currently
sell for approximately $5.0 million to $7.5 million.

39
<PAGE>

MEBES systems comprise three interconnected modules: the electronics
console, the worktable and the utility console. The electronics console
contains computerized controls for the electron source, for the vacuum chamber
and other aspects of the system, the pattern file management system through
which the customer inputs the pattern design data, and the operator's console.
The worktable contains the electron beam column, the mask blank loading
chamber, a high precision stage to position the mask during writing, extensive
real-time measurement and feedback controls to maintain high accuracy and
resolution, and a vacuum system. Finally, the utility console provides
temperature, air and other controls through pumps and chilling systems. The
system is illustrated below:

[GRAPHIC: SEE APPENDIX]

The MEBES I system was one of the first commercially available electron beam
lithography systems. In 1983, Etec introduced the MEBES III system. The advent
of 5X reduction steppers prolonged the useful life of the MEBES III through
three-and-one-half generations of semiconductor devices, from 256-Kbit dynamic
random access memory ("DRAM") through 4-Mbit DRAM. Etec's latest electron beam
system, the MEBES 4500, was first shipped in June 1995. Seven MEBES 4500
systems, including two upgrades from older configurations, have been shipped
to date. See "Risk Factors--Importance of Recently Introduced Products." The
evolution of the MEBES product line is shown below.

<TABLE>
<CAPTION>
FIRST FEATURE SIZE*
SYSTEM SHIPMENT (MICRONS)
------ -------- -------------
<S> <C> <C>
MEBES I**............ 1977 (Greater than) 1.5
MEBES II**........... 1981 (Greater than) 1.2
MEBES III**.......... 1983 0.5-1.2
MEBES IV**........... 1991 0.35-0.5
MEBES 4000***........ 1993 0.35-0.5
MEBES 4500........... 1995 0.25-0.35
</TABLE>

40
<PAGE>

- --------
* Represents semiconductor device feature size, in microns, for typical
commercial production application. For MEBES 4500, represents feature size
for target applications.

** No longer in production.

*** Improved throughput by using a Flash High Throughput Memory.

The MEBES 4500 is designed for 0.35 micron production requirements and pilot
production of 0.25 micron devices. The MEBES 4500 significantly reduces write
times compared to the Company's earlier systems. The MEBES 4500 incorporates
several proprietary techniques for adjusting the electron beam during
patterning, improving throughput and accuracy, and detects height variations
in mask blanks before patterning. The MEBES 4500 also permits a customer to
tailor the writing method to the customer's application by selecting the
appropriate combination of throughput, accuracy and resolution. The MEBES 4500
hardware and software remain compatible with existing MEBES installations, and
its hardware and software innovations can be retrofitted to prior generations
of MEBES systems.

CORE and ALTA Laser Beam Systems. Etec currently offers a family of scanned
laser beam maskmaking systems. While MEBES electron beam products target the
most technically demanding, leading- edge requirements, the Company's CORE
laser beam systems, which were initially acquired from ATEQ in 1991, offer
lower costs for the higher production volume of masks with less technically
demanding specifications. The CORE 2564, an eight-beam system, is targeted at
cost-sensitive production devices, while the CORE 2100 serves trailing-edge
applications. Thirty-eight CORE systems had been delivered from 1987 to April
30, 1996, all but one of which were in service as of such date. CORE systems
sell for approximately $2.5 million to $4.0 million. The Company's latest
laser beam system, the ALTA 3000, was first shipped in 1994. The evolution of
the Company's laser beam product line is shown below.

<TABLE>
<CAPTION>
FIRST FEATURE SIZE*
SYSTEM SHIPMENT (MICRONS)
------ -------- -------------
<S> <C> <C>
CORE 2000**.......... 1987 (Greater than) 1.5
CORE 2100............ 1990 (Greater than) 1.2
CORE 2564............ 1991 0.5-1.2
ALTA 3000............ 1994 0.35-0.5
</TABLE>
- --------
* Represents semiconductor device feature size, in microns, for typical
commercial production application. For ALTA 3000, represents feature size
for target applications.

** No longer in production.

The ALTA 3000 offers a 32-beam architecture and is designed for the
production of masks for the 0.35 micron generation of semiconductor devices.
It is capable of writing PSM and OPC masks, as well as large-format masks, and
currently sells for approximately $5.5 million to $7.0 million. Seven ALTA
3000 systems have been shipped to date. See "Risk Factors--Importance of
Recently Introduced Products."

41
<PAGE>

The ALTA system comprises a single environmentally controlled enclosure. The
enclosure is divided into two sections as shown in the illustration below. One
section contains the control electronics, the environmental control system,
and utility distribution systems. The other section contains the vibration
isolated granite table, which supports the ultraviolet laser illumination
source; the robotic loading module for automatically loading and unloading
mask blanks into the air bearing stage; the air bearing stage, which moves the
mask blank under the objective lens during writing; and the optical bridge.
The optical bridge includes beam splitters, lenses, and the scanner that focus
and scan the laser beams onto the mask blank during writing. It also contains
the modulator that controls the intensities of the laser beams, and the
alignment system necessary for writing multi-layer masks.

[GRAPHIC: SEE APPENDIX]

Accessories and Upgrades. The Company sells a variety of hardware and
software packages, which are designed to enhance the performance of previously
installed MEBES and CORE systems. For example, the Company markets retrofit
"suites" that upgrade MEBES III and IV systems to higher performance systems,
such as MEBES 4000 or MEBES 4500 systems. In addition, the Company sells
accessories to enhance the performance of the MEBES 4500 system itself, such
as a robotic loading module to automate mask loading and a two-cassette load
chamber to permit faster evacuation of the finished mask from the load
chamber. Accessories are currently priced at less than $1.0 million, and
upgrades currently range in price from approximately $1.5 million to $5.0
million. From time to time, the Company also repurchases, refurbishes and
resells a limited number of systems.

Customer Support. The Company believes that system performance and
reliability are essential competitive factors and that the field reliability
of its systems has typically met or exceeded customer expectations. The
Company estimates that its systems generally provide over 95% uptime, even
though the average utilization of MEBES, ALTA and CORE systems under service
contracts with Etec usually exceeds 120 hours per week. The Company
establishes a standard warranty reserve at shipment for each of its systems.
Historically, warranty expenses have been consistent with established
allowances. Standard allowances are adjusted to reflect product life cycle
stages.

42
<PAGE>

Etec believes that it is critical to supplement the mechanical reliability
of its systems with superior customer service and technical support worldwide.
Customers in North America are supported by a 64-person organization. Other
regions of the world are covered by 94 field engineers and service
administrators located in Japan, Taiwan, Korea, Singapore, China and Europe.
In addition to providing technical support, the Company's service and support
personnel advise customers about product applications, provide customer
training, coordinate upgrades, manage the Company's inventory of spare parts
and provide preventive maintenance. For several years, the Company has also
conducted regular user group meetings in major markets, which provide a forum
for executive-level interaction with customers, product presentations and
customer input. The Company recently implemented a 24-hour, toll-free customer
support hotline and has asked customers for a critical assessment of its
performance in two recent customer surveys in an effort to improve customer
satisfaction.

The Company's warranty obligations for its systems generally cover a 12-
month period beginning upon final customer acceptance. However, most customers
have requested service and support beyond the warranty period, and Etec has
historically derived significant revenues from annual service and maintenance
for its installed base of systems. Approximately 125 of the Company's systems
are currently serviced under one-year contracts with Etec. Most customers
request a comprehensive package of service and support that includes a variety
of spare parts (excluding electron guns, laser sources and other more
expensive parts) and support from an on-site Etec field engineer. Service
revenues were approximately $28.0 million, $31.5 million and $24.1 million in
fiscal 1994, fiscal 1995 and the first nine months of fiscal 1996,
respectively.

MASK PATTERN GENERATION TECHNOLOGY

Pattern generators are very complex and require the integration of a wide
range of advanced technologies encompassing design data conversion at very
high rates, electron and laser beam sources, electron and laser beam optical
systems, high-frequency electron beam and laser beam controls, and high-
precision mechanical motion control. In addition, the mechanical components of
electron beam systems must function in an ultra-low vacuum and with materials
free of electromagnetic properties. Integrating these diverse, sophisticated
subsystem technologies into reliable industrial tools requires broad
experience and design capability in system engineering and real-time machine
control software.

Design Data Conversion. High-speed data processing hardware and software are
required to convert the design information for an integrated circuit from the
CAD database to the pattern generator's exposure format. For leading-edge
integrated circuits, the file sizes of design data can be larger than one
gigabyte. Within the last decade, such file sizes have doubled every two to
four years as integrated circuits have become increasingly complex. During
mask exposure, these large databases must be converted in near real-time,
requiring data processing speed comparable to that required by advanced three-
dimensional animation and simulation.

Etec has developed specialized processors and software to perform these data
processing and conversion tasks. In MEBES systems, the High Throughput Memory
("HTM") converts pattern data and delivers it to the electron beam column at
160 MHz. The HTM subsystem has rapidly evolved to keep pace with the
increasing complexity of the design data. A DRAM mask that would have taken
five hours to produce on the original MEBES IV can now be processed in less
than one hour on the MEBES 4500, using the newest version of the processor,
the Super Flash HTM. This version of the processor can bypass the system
control computer and convert design data obtained from a network, processing
the data simultaneously with the mask exposure. This capability effectively
removes any constraint on pattern file size. In the ALTA 3000, a new data path
architecture was developed to handle large design data. This architecture
features high-speed geometry engines to accelerate design data conversion to
digital grey pixels. The implementation of grey pixels is well suited for
small data address designs by combining fine edge placement resolution with a
high printing rate. Each of the 32 laser beams in the ALTA 3000 is modulated
at 50 MHz, for a peak bandwidth of 1.6 gigapixels per second independent of
input data address size.

43
<PAGE>

Exposure Technologies. Both electron beam and laser beam systems combine a
series of state-of-the-art, high-resolution lens systems with complex scanning
and beam blanking (on and off switching) mechanisms.

There are two basic exposure methods: raster scanning with a fixed-size beam
and vector scanning with a variable shaped beam. In raster scanning, which all
of Etec's systems employ, a very small beam of fixed diameter corresponding to
a single pixel of the pattern is moved in a repetitive scan to cover the
entire area of the circuit. The beam is turned on and off at very high rates
to delineate the pattern features. In vector scanning, the beam can be changed
in shape and size to correspond to multiple pixels that can be exposed in a
single "flash." The beam is moved or "vectored" only to those areas of the
pattern requiring exposure. The multiple pixel flash and vectoring motion
permits vector scanned, shaped beam systems to have higher theoretical
throughput than raster scanning systems. Because raster scanning systems use
fixed beam sizes and move the beam repetitively, the Company believes that
they are simpler, more stable and more precise and accurate than vector
scanning systems for maskmaking applications.

Electron Beam Systems. In an electron beam maskmaking system, an electron
source fires electrons through a series of centering coils and condensing
lenses onto the mask substrate. Because electrons are easily deflected by air
and other molecules, exposure must occur in a vacuum chamber. The following
diagram illustrates the structure of a typical electron beam column. The
electron beam is generated in a thermal field emission gun and passes through
a series of electromagnetic lenses that adjust the beam's size and current and
focus the beam on the mask substrate. An electromagnetic three-stage beam
deflection system scans the beam over the mask and dynamically corrects for
any positional error in the mask stage. Because electrons have a much shorter
equivalent wavelength than light optical radiation, electron beam systems
permit mask manufacturers to achieve smaller pattern sizes than with laser
beam and other optical radiation patterning technologies, together with
precise pattern size and placement tolerances. Etec's electron beam systems
use beam spot sizes as small as 0.08 micron.

[GRAPHIC: SEE APPENDIX]

44
<PAGE>

Laser Beam Systems. In a laser beam maskmaking system, multiple laser
beams, operating at light optical wavelengths, make up a "brush" that is
scanned over the mask substrate. The optical system of the Company's ALTA 3000
laser beam pattern generator is shown in the following diagram. From a single
ultraviolet laser, 32 parallel beams are formed by a beamsplitter. The
intensity of each beam is individually varied by an acousto-optic modulator. A
20X reduction lens projects the beams onto the substrate. The diameter of each
beam is approximately 0.35 micron. A rotating polygonal scanning mirror and a
lens scan the brush of beams over the substrate, using a repetitive raster
method as in an electron beam system. However, the scans of the brush are
partially overlapped. At any one point in the pattern, the final image is
formed by multiple partial exposures that have occurred during different scans
of the brush. This is an important benefit of a multiple beam brush because it
allows the positional errors of the individual scans to be averaged,
significantly improving the final positional accuracy.

[GRAPHIC: SEE APPENDIX]

The wavelength of laser illumination does not allow laser beam systems to
achieve the resolution possible with electron beam exposure, and laser beam
systems currently in production have a resolution of about 0.6 micron.
However, the chemical processes used to develop the mask image for laser beam
systems are the same as those used in mass production wafer printing and are
significantly simpler and less expensive than those used in electron beam
exposure. This is of particular benefit in the production of PSMs where two
complete exposures of the mask may be required. In addition, a vacuum chamber
is unnecessary, resulting in a simpler system design than can be achieved in
an electron beam system. These characteristics of laser beam systems result in
lower overall cost of ownership for the maskmaker.

Control and Motion Systems. For leading-edge maskmaking applications, the
mask must be positioned with an accuracy of approximately 0.01 micron. Analog
electronic control systems must control beam size and position to these
extreme requirements. Furthermore, these tolerances must be maintained over
hours or days with essentially no measurable change, requiring sophisticated
self-monitoring and compensating mechanisms.

45
<PAGE>

The MEBES 4500 incorporates techniques for monitoring errors and adjusting
calibration dynamically during exposure. Because the length of the raster scan
can have significant impact on the size of the smallest features, the MEBES
4500 permits automatic adjustments of the scan length between exposures, as
well as self-monitoring and dynamic adjustments during exposure. Furthermore,
the height variations of the mask substrate itself can produce scan length
errors. Therefore, the MEBES 4500 can map these height variations prior to
exposure and compensate for the unique profile of each substrate. The
substrate can be rejected prior to exposure if its variations are out of
tolerance, thereby avoiding the time and expense of exposing a mask that would
likely fail to meet its specification.

During exposure, the mask substrate is moved continuously on a mechanical
stage with a position accuracy of better than one micron, requiring very
precise, ultra-clean mechanical motion systems. For example, the ALTA 3000
utilizes an advanced linear motor and air bearing transport technology, which
eliminates frictional surfaces for low contamination and high reliability. The
substrate stage control utilizes laser interferometry at l/512 (0.0012 micron)
resolution. At these levels of precision, temperature changes on the order of
0.01 degree centigrade can produce unacceptable errors. For this reason the
ALTA 3000 stage uses specialized ceramic materials that have a low thermal
expansion coefficient.

NEW MASK TECHNOLOGIES: PHASE SHIFT MASKS AND OPTICAL PROXIMITY CORRECTION

Two new mask technologies, PSM and OPC, are being applied to the pattern
image on the mask to extend the resolution of photolithography. These advanced
masks are "optically active"; that is, the original circuit design data is
altered for the pattern generator to create a mask that will compensate for
the optical distortions that occur when feature sizes approach the stepper's
resolution limit or wavelength. It is possible to print circuit patterns on
the wafer that are actually smaller than the wavelength of the stepper using
these new mask technologies. As a result, PSM and OPC offer the promise of
extending the life of existing wafer steppers and their current process
technology.

Phase shift masks involve the printing of two different pattern layers on
one mask. The two patterns optically interfere, producing a higher resolution
image on the wafer than would be possible with only one pattern on the mask.
PSM requires essentially two complete mask patterning steps, one for the base
layer and another for the phase shifting layer, and therefore demands
additional pattern generation capacity.

In OPC, the circuit pattern is modified by the addition of numerous, very
small features around each edge of the intended pattern which, although they
are too small to be printed on the wafer, have the effect of compensating for
the loss of resolution in the wafer image caused when image features are
similar in size to the wavelength of the illumination source. OPC dramatically
increases the resolution and accuracy required in the maskmaking equipment and
substantially increases mask write times.

ETEC POLYSCAN

The Company acquired substantially all of the assets of Polyscan, a
development-stage company based in Tucson, Arizona, in February 1996, in
furtherance of its strategy to develop or acquire pattern generation and
lithography-related products that serve additional markets. Etec Polyscan, a
wholly-owned subsidiary of the Company formed to operate the acquired
business, designs and develops ultraviolet ("UV") laser direct imaging systems
that the Company intends to manufacture and market for applications that
require large area pattern generation, including printed circuit boards
("PCBs"), multi-chip modules ("MCMs") and flat panel displays ("FPDs").

Traditional methods of large area pattern generation for such applications
as PCBs and MCMs employ conventional photographic methods to make phototools
which are used to print images of circuitry on substrates. These conventional
processes require multiple steps that increase turnaround time and capital and
materials expenses. These processes also introduce inaccuracies that reduce
yield and increase scrap. As the pattern density of many large area
applications continues to rise, the Company believes that manufacturers will
find it increasingly difficult to achieve acceptable accuracy using
traditional phototool processes. The

46
<PAGE>

Company believes that laser direct imaging of large area substrates offers a
number of advantages over traditional processes. In particular, laser direct
imaging eliminates up to 75% of the steps in the primary imaging process as
well as the errors inherent in each of those steps. The Company believes that
the resulting process simplification improves productivity, raises yields and
reduces scrap costs. However, the Company believes that direct imaging without
phototools has historically lacked sufficient throughput to be commercially
viable for these applications.

The Company believes that Etec Polyscan's direct imaging technology could
provide a major advance in throughput for large area direct imaging
applications, by achieving highly optical efficiencies and image transfer
speeds. In addition, the Company intends to exploit technology synergies
between Etec Polyscan and its laser-based semiconductor mask pattern
generation systems to seek to achieve performance and cost advances in both
product lines, and to extend its maskmaking technology to include systems for
large area mask pattern generation.

The Company has never operated in the market segments targeted by Etec
Polyscan, and there can be no assurance that Etec Polyscan will be able to
develop, manufacture and market its products successfully. There also can be
no assurance that any technology synergies will be realized between Etec
Polyscan and the Company's laser beam mask pattern generation business or that
Etec Polyscan's technology can be integrated into the Company's product
development strategy. Etec Polyscan has never shipped a product and has had
net operating losses since its inception. The Company expects that Etec
Polyscan will continue to experience net operating losses.

CUSTOMERS

The Company's customers include both captive and commercial (or "merchant")
mask shops. Semiconductor manufacturers employ their captive capabilities
largely to supply their own requirements for masks, while merchant mask shops
sell masks to a variety of semiconductor device manufacturers. Repeat sales to
existing customers represent a significant portion of the Company's product
revenues, and the Company believes that its installed base of over 155 systems
represents a significant competitive advantage. The following semiconductor
manufacturers and merchant mask shops have ordered or installed at least $2.0
million of systems, accessories or upgrades from the Company since the
beginning of fiscal 1994:

<TABLE>
<S> <C>
Align-Rite International Inc. Photronics, Inc.
Compugraphics International Ltd. P.K. Ltd. (formerly Anam S&T Co. Ltd.)
Dai Nippon Printing Co. Ltd. Raytheon Company
DuPont Photomasks, Inc. Rockwell International Corp.
Hewlett-Packard Company Samsung Electronics Co., Ltd.
Hoya Corporation Sharp Corporation
Hyundai Electronics Industries Co.,
Ltd. Siemens AG
Intel Corporation Sony Corporation
International Business Machines
Corporation Taiwan Mask Corp.
Motorola, Inc. Toppan Printing Company, Ltd.
NEC Corporation Toshiba Corporation
Oki Electric Industries Co. Ltd.
</TABLE>

Historically, a significant portion of the Company's revenues in any
particular period has been attributable to sales to a limited number of
customers. In fiscal 1994, fiscal 1995 and the first nine months of fiscal
1996, sales to the Company's ten largest customers accounted for approximately
76%, 74% and 80% of total revenues, respectively. IBM and Toppan Printing
accounted for approximately 13% and 12%, respectively, of total revenues in
fiscal 1994. DuPont, Dai Nippon Printing and Photronics accounted for
approximately 14%, 14% and 12%, respectively, of total revenues in fiscal
1995. Dai Nippon Printing and Photronics accounted for approximately 19% and
18%, respectively, of total revenues in the nine months

47
<PAGE>

ended April 30, 1996. No other customer accounted for more than 10% of total
revenues during those periods. Sales are generally made on a purchase order
basis, and none of the Company's customers has entered into a long-term
agreement requiring it to purchase the Company's products. The loss of any
significant customer or any reductions or delays in orders by a significant
customer could have a materially adverse effect on the Company. See "Risk
Factors--Concentration of Customers; Limited Concurrent Selling
Opportunities."

SALES AND MARKETING

Etec markets and distributes its products directly into its primary markets,
which consist of North America, Japan, South Korea and Europe. The Company
maintains sales offices in California, Japan, France and South Korea.
Customers in Southeast Asia, China and India are currently covered by sales
representatives, with assistance from the sales and marketing staff in
California. The Company's agreements with its sales representatives are
terminable upon 90 days' notice by either party.

Because of the significant investment required to purchase Etec's systems
and their highly technical nature, the sales process is complex, requiring
interaction with several levels of the customer's organization and extensive
technical exchanges, product demonstrations and commercial negotiations. As a
result, the sales cycle can be as long as 12 to 18 months. Purchase decisions
are generally made at a high level within the customer's organization, and the
sales process involves broad participation across the Etec organization, from
the Chief Executive Officer to the engineers who designed the product.

The first step in the sales process is to establish clearly the customer's
requirements and to identify the best product to meet such requirements. The
marketing department works closely with members of the engineering,
manufacturing and customer support departments in this process. Once the
customer's needs are identified and the sales objective is established, a
cross-functional sales team is formed under the coordination of the sales
department that may include members from sales, marketing, customer support,
engineering and manufacturing to establish a sales strategy. Execution of the
sales strategy often involves detailed customer demonstrations of the system's
performance in order to match the system to the customer's requirements. The
marketing staff also develops the Company's promotional and pricing strategy.

Sales to customers in countries outside of the United States have accounted
for a significant portion of the Company's revenues. The Company effects sales
in Japan through its wholly-owned subsidiary, Etec Japan. Customer orders for
MEBES equipment received by Etec Japan are placed through Kanematsu
Corporation ("KG Japan") and its United States affiliate ("KG USA"), which in
turn orders the equipment from Etec. KG Japan receives a commission and
provides interim financing to Etec Japan covering the period between KG USA's
payments to Etec and the customer's payments to Etec Japan. The Company's
laser products were sold in Japan and the Far East by a distributor until
April 1995, when the Company began direct sales and marketing of laser beam
systems in that region. As part of that transition, the Company agreed to pay
the distributor a percentage of revenue for each CORE and ALTA system sold in
the defined sales territory for at most the next four years. See Note 12 of
Notes to Consolidated Financial Statements.

As a result of the Company's worldwide distribution and service activities,
the Company from time to time has engaged in the distribution of third
parties' products to gain insight into new markets. For example, the Company
distributes Micrion Corporation's mask repair products in Korea. In December
1994, the Company entered into an exclusive distribution agreement with QC
Optics, Inc. ("QC Optics") to distribute and sell QC Optics' laser-based
inspection products in Japan, Korea, Taiwan and Singapore. QC Optics'
inspection products are used to detect defects in masks, flat panel displays
and magnetic media.

48
<PAGE>

BACKLOG

The Company's backlog for products was approximately $30.1 million, $65.2
million and $142.8 million at July 31, 1994, July 31, 1995 and April 30, 1996,
respectively. Etec defines backlog to include only those systems, accessories
and upgrades with respect to which a written purchase order or agreement has
been received and a delivery schedule has been specified for product shipment
over the succeeding 12 months. Cancellations of product purchase orders are
subject to penalties, depending upon the time of cancellation. Cancellations
prior to 30 days before estimated shipment are generally subject to charges of
up to 50% of the purchase price. Cancellations within the 30 days prior to the
estimated shipment date are generally prohibited. However, orders have
occasionally been subject to rescheduling by the customer without penalty.
Accordingly, backlog is not necessarily representative of future sales.

PRODUCT DEVELOPMENT

Etec invests heavily in research and development, primarily in electron beam
and laser beam imaging, high-speed data retrieval, processing and delivery
electronics, measurement and positioning systems and software development.
Research and development expenses, net of funding under cooperative
development agreements, were $5.1 million, $10.5 million and $12.0 million in
fiscal 1994, fiscal 1995 and the first nine months of fiscal 1996,
respectively, representing 7.4%, 12.7% and 12.2% of revenues, respectively.

The Company has recently adopted a formal product development methodology,
employing a product life cycle process. By requiring a common set of
specifications, schedules, objectives and terminology throughout the phases of
a development project, this process is intended to provide consistency with
corporate strategic plans and to facilitate coordination among marketing,
engineering, manufacturing and customer support personnel. The development of
a product is mapped through four phases: concept and feasibility; development;
commercialization; and obsolescence. Each of these four phases can only be
initiated by a formal decision by senior management, and the transition from
each phase to the next can only occur if key issues have been satisfactorily
addressed, such as consistency with the corporate strategy, market and
financial analyses, risk assessment, opportunity costs, scheduling and
technical specifications.

Current research and development programs include the development of next-
generation pattern generators. Although Etec does not sell direct write
systems, it developed direct write, electron beam technology with Department
of Defense funding in the 1980s and is utilizing certain aspects of that
technology in its efforts to develop tools to support next-generation
maskmaking.

Historically, governmental and private sources have funded a significant
portion of Etec's product development efforts. Governmental and quasi-
governmental agencies such as the Department of Defense, ARPA and SEMATECH
have supported Etec as a primary supplier of pattern-generation technologies
to the U.S. semiconductor industry, although such funding declined
significantly from fiscal 1994 to fiscal 1996. The aggregate funding from
ARPA, SEMATECH and other sources amounted to approximately $16.1 million and
$7.3 million for fiscal 1994 and fiscal 1995, respectively, and approximately
$725,000 for the first nine months of fiscal 1996. The Company cannot predict
whether any such funding will be available to it in future periods.

SEMATECH provided partial funding for the Company's development of
enhancements to its existing electron beam and laser beam products pursuant to
cooperative development agreements. Funding pursuant to these agreements
amounted to approximately $5.5 million, $1.3 million and $280,000 during
fiscal 1994, fiscal 1995 and the first nine months of fiscal 1996,
respectively. SEMATECH and its members have the right to obtain a nonexclusive
royalty-bearing license from the Company to use the technology developed under
the agreements.

49
<PAGE>

MANUFACTURING

Etec leases a 150,000 square foot design and manufacturing facility for the
production of electron beam systems at its headquarters in Hayward,
California, and a 60,000 square foot design and manufacturing facility for the
production of laser beam systems in Beaverton, Oregon. Management believes
that these facilities will be sufficient to satisfy the Company's needs for at
least the next eighteen months. The Company manufactures all of its electron
beam systems in Hayward and all of its CORE and ALTA laser beam systems in
Beaverton. Neither facility is equipped to produce the type of system produced
by the other. The Company's subsidiary, Etec Polyscan, also leases an
approximately 22,000 square foot facility in Tucson, Arizona. The Company's
Hayward facility is located in a seismically active area. Although the Company
maintains business interruption insurance, a major catastrophe (such as an
earthquake or other natural disaster) at its Hayward or Beaverton sites could
result in a prolonged interruption of the Company's business.

The Company's manufacturing activities consist of fabricating and assembling
components and subassemblies, which are then integrated into finished systems
and tested for compliance with customer requirements. The Company believes
that production lead time, product quality and customer responsiveness are key
elements to its success. Accordingly, the Company has implemented a cycle time
reduction program that has reduced time to build and improved product quality.

Historically, the average time required to manufacture a system has been in
excess of 52 weeks. The Company has recently reduced its manufacturing cycle
time, and manufactured its most recent shipments in less than 30 weeks.
However, there can be no assurance that future shipments can be manufactured
on similar schedules or that the Company will be able to maintain or further
reduce its manufacturing cycle time over a sustained period. The Company's
ability to increase its manufacturing capacity in response to any future
increase in demand is limited. See "Risk Factors--Limited Manufacturing
Capacity."

Although the Company manufactures some of the components and subassemblies
used in its systems, many are purchased from unaffiliated subcontractors,
typically to the Company's specifications. None of the Company's suppliers is
obligated to provide the Company with any specific quantity of components or
subassemblies over any specific period. Most of the components and
subassemblies included in the Company's products are obtained from a single
supplier or a limited group of suppliers. In particular, the Company relies on
sole-source suppliers for its MEBES systems' electron beam sources, high-
voltage power supplies, certain lasers, lenses and other critical components,
each of which is required for the production of the Company's systems. In
addition, because the Company believes that subsystem vendors have increased
their manufacturing expertise, the Company intends to obtain an increasing
percentage of components and subassemblies from third parties, in order to
devote its resources toward systems design, software development and systems
integration, its primary areas of competence. To date, the Company has
generally been able to obtain adequate, timely delivery of critical
subassemblies and components, although it has experienced occasional delays.
However, some of the Company's suppliers may be unwilling or unable to produce
sufficient volumes of key components to keep pace with the demand for the
Company's systems and upgrades, or to permit the Company to provide customers
with an adequate supply of spare parts. Due to occasional shortfalls in
supply, the Company has from time to time attempted to develop and manufacture
critical parts and subassemblies. In addition, the Company is attempting to
modify product designs to avoid the use of currently obsolete electronic
components. For example, certain components in the Company's MEBES systems
were designed for the MEBES system architecture, which was developed over 20
years ago. There can be no assurance that delays or shortages caused by
suppliers will not occur in the future or that the Company will be successful
in developing critical components internally or in modifying product designs
to avoid the use of obsolete components. In addition, the ALTA data path and
portions of the CORE system contain components that have been or are being
discontinued due to obsolescence. Because the manufacture of these components
and subassemblies is very complex and requires long lead times, and because
alternative sources may not be readily available, there can be no assurance
that delays or shortages caused by suppliers will not occur in the future. Any
disruption of the Company's supply of critical components and subassemblies

50
<PAGE>

could prevent the Company from meeting its manufacturing schedules, which
would damage relationships with customers and would have a materially adverse
effect on the Company's business, financial condition and results of
operations. See "Risk Factors--Dependence on Key Suppliers; Availability of
Critical Components."

COMPETITION

The maskmaking equipment industry is highly competitive. The Company
believes that the principal competitive factors in this industry are product
performance, service, technical support, and overall cost of ownership,
including system price, reliability and ease of upgrade. The Company believes
that it presently competes favorably with respect to each of these factors.
Management also believes that the size of Etec's installed base and the
compatibility of its various products provide a significant competitive
advantage due to customers' desire for compatible mask layers and data
formats. However, the Company believes that to remain competitive, it will
require significant financial resources in order to invest in new product
development, to introduce next-generation systems on a timely basis, and to
maintain customer service and support centers worldwide.

Management believes that its primary competitors are JEOL and Hitachi. These
competitors have substantially greater financial resources than the Company
and extensive engineering, manufacturing, marketing and customer service and
support capabilities. Some competitors have entered into strategic
relationships or alliances with leading semiconductor manufacturers. In
particular, the Company believes that Japanese competitors such as Hitachi and
JEOL may have longstanding collaborative relationships with Japanese and other
Asian semiconductor manufacturers. In the past year, several industry
consortia have been formed in Japan to promote the development of maskmaking
and direct write technology. Etec expects its present and future competitors
to continue to improve the performance of their current systems and to
introduce new systems with improved price and performance characteristics.
These new systems may compete directly with the Company's systems, which could
reduce their market acceptance. Competitive pressures could also result in
lower prices and margins, which could materially adversely affect the
Company's financial condition and operating results.

PATENTS AND OTHER PROPRIETARY RIGHTS

Etec holds 44 United States patents expiring on various dates from 1999
through 2012, with corresponding patents and patent applications claiming
prior right from U.S. patent applications for most such patents in Japan,
South Korea, the European Community and Canada. In the field of electron beam
lithography, Etec owns patents and/or patent applications directed to electron
guns, ion pumps, particle beam systems, deflection assemblies, calibration and
measure processes, and addressing and writing schemes. In the field of laser
beam lithography, Etec owns patents and/or patent applications directed to
scanning optics, laser pattern generation, and rasterization schemes. Etec
also has five pending U.S. patent applications and over 40 pending patent
applications in other countries. There can be no assurance that any of these
applications will be allowed or that any of the allowed applications will be
issued as patents.

Etec has six registered U.S. trademarks. In addition to patent and trademark
protection, the Company relies on the laws of unfair competition, copyright
and trade secrets to protect its proprietary rights. The Company has entered
into confidentiality and invention assignment agreements with its employees
and consultants that are designed to limit access to, and disclosure or use
of, the Company's proprietary information.

Certain important aspects of the Company's systems depend upon licenses
granted by third parties. In particular, the Company has licensed the basic
technological architecture for MEBES, the Company's family of electron beam
systems, as well as certain rights relating to laser beam technology, from
AT&T and Patlex Corporation, respectively. The Company's electron beam and
laser beam systems incorporate software and hardware licensed from other third
parties. The Company also relies on trade secrets and proprietary technology
that it seeks to protect through confidentiality agreements with employees,
consultants and other parties.

51
<PAGE>

As is typical in the industry, the Company has from time to time received,
and may in the future receive, communications from third parties alleging
infringements of patents and other intellectual property rights. No assurance
can be given that additional infringement claims by third parties will not be
asserted. In the future, litigation may be necessary to defend the Company
against alleged infringement of others' rights. Any such litigation could
result in substantial cost and diversion of effort by the Company, which by
itself could have a material adverse effect on the Company. Further, adverse
determinations in such litigation could result in the Company's loss of
proprietary rights, subject the Company to significant liabilities, require
the Company to seek licenses from third parties or prevent the Company from
manufacturing or selling its systems, any of which could have a material
adverse effect on the Company's business, financial condition or results of
operations. In addition, there can be no assurance that, in the future,
litigation will not be necessary to enforce the Company's patents or other
intellectual property rights.

GOVERNMENTAL REGULATIONS AND INDUSTRY STANDARDS

The Company is subject to a variety of governmental regulations relating to
the use, storage, discharge, handling, emission, generation, manufacture and
disposal of toxic or other hazardous substances. The Company believes that it
is currently in compliance in all material respects with such regulations and
that it has obtained or is in the process of obtaining all material
environmental permits necessary to conduct its business. The Company currently
maintains groundwater monitoring wells on its Hayward, California property,
although it may discontinue monitoring due to the recent concurrence of the
California Regional Water Quality Board in the Company's proposal to cease
groundwater monitoring at the site. See "Risk Factors--Environmental
Regulation."

The Company's products and worldwide operations are subject to numerous
governmental regulations designed to protect the health and safety of
operators of manufacturing equipment. In particular, recent European Union
("EU") regulations relating to electromagnetic fields, electrical power and
human exposure to laser radiation require Certificate Europa ("CE") mark
certification for shipments of laser beam and electron beam products into the
EU. Prior EU regulations in this area have required the Company to modify its
systems for shipment to Europe. The Company's systems currently do not comply
with the additional EU regulations which became effective in January 1996, and
further EU regulations in this area are scheduled to become effective in
January 1997. The Company is currently pursuing product design activities to
obtain CE mark certification for its CORE and ALTA laser beam systems and for
its next generation of MEBES products, but no such activities are planned with
respect to the MEBES 4500. No assurance can be given that the Company will
obtain such certification. If the Company is unable to comply with these EU
regulations, the Company may be barred from selling its products directly or
through its customers to member countries of the EU. In addition, numerous
domestic semiconductor manufacturers and independent mask shops, including
certain of the Company's customers, have subscribed to voluntary health and
safety standards and decline to purchase equipment not meeting such standards.
The Company believes that its products currently comply with all material
governmental health and safety regulations, except for the EU regulations
described above, and with the voluntary industry standards currently in
effect. In part because the scope of future regulations and standards cannot
be predicted, however, there can be no assurance that the Company will be able
to comply with any future regulation or industry standard. Noncompliance could
result in governmental restrictions on sales or reductions in customer
acceptance of the Company's products. Compliance may also require significant
product modifications, potentially resulting in increased costs and impaired
product performance. In addition, the composition of the Company's workforce
and other aspects of its operations have been subject to extensive
governmental regulation due to the Company's provision of services to federal
agencies such as ARPA.

Certain of the Company's products may not be sold outside of the United
States except pursuant to an export license from the United States Department
of Commerce. While the Company has not experienced significant delays in
obtaining such licenses for major markets, there can be no assurance that
future sales will not be subject to delay due to export license or other
regulatory requirements.

52
<PAGE>

LEGAL PROCEEDINGS

The Company is not currently involved in any material legal proceedings.

EMPLOYEES

As of April 30, 1996, Etec had 639 employees, including 142 in research,
development and engineering-related functions, 191 in manufacturing and
production, 108 in administration, 158 in field service, and 40 in marketing
and sales. Etec's foreign offices employed 121 employees, all foreign
nationals, as of such date. None of Etec's employees is governed by a
collective bargaining agreement, and the Company believes that its relations
with its employees are good.

The Company's financial performance will depend significantly upon the
continued contributions of its officers and key management, technical, sales
and support personnel, many of whom would be difficult to replace. In
addition, the Company believes that certain of its former employees currently
provide services or technical support to the Company's customers or
competitors. There can be no assurance that the Company will be successful in
attracting or retaining qualified personnel.

FACILITIES

The Company maintains its electron beam system design, development and
manufacturing capability at its headquarters located in Hayward, California.
The Company leases the Hayward facility under a lease that expires in 2010
unless extended at the Company's option for up to four five-year renewal
periods. The Hayward facility consists of two buildings with a total area of
150,000 square feet. The Company recently broke ground for the construction of
a 60,000-square-foot administrative building in Hayward, which is expected to
be completed in early 1997. The manufacturing building has been custom
modified for the production of electron beam systems and includes an 18,500
square foot cleanroom facility, including 20 test cells, for precision
assembly and final system testing. The Company also leases general office
space in Hayward.

CORE and ALTA laser systems are manufactured at a facility in Beaverton,
Oregon with approximately 60,000 square feet under a lease that expires on
June 30, 1999 unless extended at the Company's option for an additional three-
year period. The facility includes approximately 5,000 square feet of
cleanroom space, including six test cells. The Company also leases sales and
service offices in France, Germany, Japan and South Korea. The Company
believes its facilities are adequate to support its current needs.

Etec Polyscan operates an approximately 22,000 square foot facility in
Tucson, Arizona under a lease that expires in 2000. This facility is currently
under renovation. When this renovation is completed, the facility will include
4,500 square feet of cleanroom space.

53
<PAGE>

MANAGEMENT

DIRECTORS AND EXECUTIVE OFFICERS

The directors and executive officers of the Company are as follows:

<TABLE>
<CAPTION>
NAME AGE POSITION
---- --- --------
<S> <C> <C>
Stephen E. Cooper....... 50 Chairman of the Board, President and Chief
Executive Officer
Frank E. Abboud......... 36 Vice President, Customer Support
Trisha A. Dohren........ 50 Vice President, Human Resources and Administration
Roy A. Earle............ 39 Vice President, Operations
Mark A. Gesley.......... 40 Vice President, Engineering
Philip J. Koen, Jr...... 44 Vice President and Chief Financial Officer
Takeshi (John) Suzuki... 57 President, Etec Japan and Director
Paul A. Warkentin....... 42 Vice President, Marketing
Edward L. Gelbach....... 64 Director
Catherine P. Goodrich(1) 39 Director
Jack H. King(2)......... 61 Director
John McBennett(1)....... 57 Director
Thomas Michael Trent(2). 50 Director
Robert L. Wehrli(2)..... 73 Director
</TABLE>
- --------
(1) Member of the Audit Committee of the Board of Directors.
(2) Member of the Compensation Committee of the Board of Directors.

Mr. Cooper joined Etec as President and Chief Operating Officer in January
1993 and was named Chief Executive Officer in July 1993. He was initially
appointed to the Board of Directors in March 1993 and became Chairman of the
Board in April 1995. Before joining Etec, Mr. Cooper served as President and
Chief Executive Officer of Bipolar Integrated Technology, a manufacturer of
bipolar emitter coupled logic semiconductors, from 1987 to 1990. From 1980 to
1987, Mr. Cooper held various positions, including President and Chief
Operating Officer, with Silicon Systems, Inc., a manufacturer of
analog/digital semiconductors. From 1973 to 1980, Mr. Cooper held various
engineering and management positions at Intel Corporation, including
Engineering Manager and Wafer Fabrication Manager. Mr. Cooper holds a B.S.E.E.
from the University of California at Santa Barbara. He is also a director of
Vivid Semiconductor.

Mr. Abboud joined Etec in 1985 and has been Vice President, Customer Support
since June 1994. He served as manager of electron beam raster scan programs
from August 1991 to June 1994. During that time he led several critical
product development programs and contracts with SEMATECH for the development
of the MEBES IV and MEBES 4000 products. Mr. Abboud received his B.S.E.E. from
California State University at Sacramento and his M.S.E.E. from Santa Clara
University.

Ms. Dohren joined Etec as Vice President, Human Resources and Administration
in August 1993. Before joining Etec, Ms. Dohren was a human resources
executive with Wells Fargo Bank's Wells Electronic Banking Systems from May
1993 to August 1993. From 1991 to February 1993, she served as Regional Human
Resources Manager with Brooks Brothers. From 1983 to 1991, Ms. Dohren held
various managerial positions including Personnel Manager at Macy's of
California. Ms. Dohren attended San Jose State University.

54
<PAGE>

Mr. Earle joined Etec as Vice President, Operations in October 1995. Before
joining Etec, Mr. Earle served as Chief Operating Officer and Plant Manager
for Temic Siliconix, a manufacturer of integrated circuits and bipolar
discretes, from 1994 to October 1995. He was Senior Director: Tactical
Marketing of Temic Siliconix from 1990 to 1994. Mr. Earle served Siliconix,
Inc., a semiconductor manufacturer, as Plant Manager from 1989 to 1990 and as
Operations Manager from 1988 to 1989. From 1980 to 1988, Mr. Earle held
various operations and engineering positions with GE Ceramics and GE
Semiconductor. He holds a B.Sc. from University College, Dublin (Ireland), and
a M.Sc.Tech. from the University of Sheffield (United Kingdom).

Dr. Gesley has been Vice President, Engineering of Etec since April 1995. He
served as Director of Engineering from January 1995 to April 1995 and as
Director of the Company's vector-scan development team from September 1994 to
January 1995. Dr. Gesley also served as Program Manager from June 1994 to
September 1994. He joined Etec in 1988. Dr. Gesley was a member of the
electron beam lithography group at IBM's Thomas L. Watson Research Center from
1985 to 1988, first as a post-doctoral fellow and then as an advisory
engineer. He holds a B.A. in Physics from Reed College and a Ph.D. in Applied
Physics from the Oregon Graduate Institute of Science and Technology.

Mr. Koen joined Etec as Vice President, Chief Financial Officer and
Treasurer in December 1993. He served as Chief Financial Officer and Vice
President Manufacturing of Levolor Corporation, a consumer products
manufacturer, from April 1989 to December 1993. From 1980 to 1989, he held
several management positions, the last being Director of Business Development,
at Baker Hughes, Inc., a manufacturer of oil field service equipment. Mr. Koen
holds a B.A. in Economics from Claremont McKenna College and an M.B.A. from
the University of Virginia. Mr. Koen is a Certified Public Accountant
(inactive status).

Mr. Suzuki has been a director of Etec since May 1994. Mr. Suzuki has been
President and a director of Etec Japan since May 1990. He founded Etec Japan
in 1977. Mr. Suzuki has worked in the electronics industry since 1962 and has
extensive international trade experience.

Dr. Warkentin has been Vice President, Marketing of Etec since July 1995,
and has served in various other positions, including Vice President, Corporate
Development and Beaverton Site Manager. Dr. Warkentin came to Etec through its
acquisition of ATEQ in November 1991, where his last position was Director of
Development. Dr. Warkentin led a number of product development programs after
joining ATEQ in January 1984. Dr. Warkentin holds a B.A. in Physics and
Chemistry from the University of California, Santa Cruz and a Ph.D. in Physics
from the University of California, San Diego.

Mr. Gelbach has been a director of Etec since June 1995. He has been a
private investor for more than the past five years and also serves as a
director of Richey Electronics Inc. and Bell Microproducts. Mr. Gelbach held
various positions at Intel Corporation, including Senior Vice President
Corporate Marketing, from 1971 to 1989. He held various positions at Texas
Instruments, including National Sales Manager, from 1965 through 1971.

Ms. Goodrich has been a director of Etec since September 1991. From June
1992 to the present, Ms. Goodrich has been self-employed as a financial
consultant. From July 1981 to May 1992, Ms. Goodrich held various positions
with Oak Management Corp., a venture capital firm. Ms. Goodrich was a general
partner of the following venture capital partnerships until May 1992: Oak
Investment Partners V from November 1991, Oak Investment Partners IV from
November 1988, and Oak Investment Partners III from January 1985. Ms. Goodrich
is also a director of Uniphase Corp., Zitel and SanDisk Corporation.

Mr. King has been a director of Etec since April 1990. He has been President
and Chief Executive Officer of Zitel, a manufacturer of high performance
storage subsystems, since October 1986. Mr. King was named a director of Zitel
in January 1987. Prior to joining Zitel, Mr. King served as President and
Chief Executive Officer of Dynamic Disk, Inc., a manufacturer of thin film
media, from 1984 to 1986. From 1981 to 1984, he served as President and Chief
Operating Officer of Data Electronics, Inc., a cartridge tape drive
manufacturer. Mr. King also served as Group President of the Computer Media
Group of Memorex Corporation.

55
<PAGE>

Mr. McBennett has been a director of Etec since December 1994. Mr. McBennett
has been the Corporate Controller of Perkin-Elmer, which manufactures
analytical instrumentation, since 1977. He has been a corporate officer of
Perkin-Elmer since 1993.

Mr. Trent has been a director of Etec since December 1994. Mr. Trent has
been a Vice President of Micron, a semiconductor manufacturer, since 1986. He
joined Micron as an integrated circuit design engineer in 1980. Previously,
Mr. Trent worked in Motorola, Inc.'s semiconductor research and development
department.

Mr. Wehrli joined the Company's Board of Directors in April 1995. Since
1977, Mr. Wehrli has been owner and Chief Executive Officer of Chronometry,
Inc., a consulting firm. Mr. Wehrli has been Chairman of the Board of
Siliconix, Inc., a manufacturer of power semiconductors, since 1990, and a
director of Siliconix since 1981. He is also a director of PECO Controls Co.

The Company currently has authorized ten directors. All directors are
elected to hold office until the next annual meeting of stockholders of the
Company and until their successors have been elected. Officers are elected at
the first Board of Directors meeting following the stockholders' meeting at
which the directors are elected and serve at the discretion of the Board of
Directors. There are no family relationships among any of the directors or
executive officers of the Company.

The Company has granted to IBM, Grumman and DuPont observer rights to attend
meetings of the Company's Board of Directors. Grumman's and DuPont's observer
rights expire on December 31, 1996.

The Board of Directors has a Compensation Committee (consisting of Messrs.
King, Trent and Wehrli), which makes recommendations concerning salaries and
incentive compensation for employees of the Company and administers the
Company's incentive compensation and benefit plans, and an Audit Committee
(consisting of Ms. Goodrich and Mr. McBennett) which reviews the results and
scope of the audit and other services provided by the Company's independent
auditors.

COMPENSATION OF DIRECTORS

Ms. Goodrich provided consulting services to the Company from July 1993
until July 1995, for which she received a monthly fee of $2,000. In December
1994, Ms. Goodrich was awarded options to purchase 5,000 shares of Common
Stock at an exercise price of $0.45 per share. Ms. Goodrich exercised these
options in July 1995.

Each director who is not a Company employee is eligible to receive $1,500
for each Board meeting and $500 for each Board committee meeting attended in
person. Directors are also reimbursed for their expenses for each meeting
attended in person and are eligible to participate in the Company's 1995
Directors' Stock Option Plan. See "Stock Option Plans" and "Certain
Transactions."

EXECUTIVE COMPENSATION

The following table summarizes all compensation earned by or paid to the
Company's Chief Executive Officer and to each of the Company's four most
highly compensated executive officers other than the Chief Executive Officer
whose total annual salary and bonus exceeded $100,000, for services rendered
in all capacities to the Company during the fiscal year ended July 31, 1995.

56
<PAGE>

SUMMARY COMPENSATION TABLE

<TABLE>
<CAPTION>
LONG-TERM
COMPENSATION
ANNUAL COMPENSATION AWARDS
--------------------- ------------
SECURITIES ALL
UNDERLYING OTHER
NAME AND PRINCIPAL POSITION YEAR SALARY($) BONUS($) OPTIONS(#) COMPENSATION($)
- --------------------------- ---- ---------- --------- ------------ ---------------
<S> <C> <C> <C> <C> <C>
Stephen E. Cooper....... 1995 $ 200,655 $ 93,698 44,000 $ 2,006(1)
President and Chief
Executive Officer
Takeshi (John) Suzuki... 1995 277,610 63,058 16,000 62,710(2)
President, Etec Japan
Philip J. Koen, Jr...... 1995 150,001 68,144 22,000 1,500(1)
Vice President and
Chief Financial Officer
Paul A. Warkentin....... 1995 110,001 35,776 12,000 1,100(1)
Vice President of
Marketing
Trisha A. Dohren........ 1995 105,238 27,258 12,000 1,047(1)
Vice President, Human
Resources and
Administration
</TABLE>
- --------
(1) Represents contributions by the Company under its 401(k) plan.
(2) Represents contributions of approximately $50,000 by the Company to a plan
which provides for payments to Mr. Suzuki during his retirement, pursuant
to an agreement between the Company and Mr. Suzuki entered into in fiscal
1994, and approximately $12,000 for a housing allowance.

The following tables set forth certain information as of July 31, 1995 and
for the fiscal year ended July 31, 1995 with respect to stock options granted
to the individuals named in the Summary Compensation Table above. No stock
appreciation rights have been granted to date.
<TABLE>
<CAPTION>
POTENTIAL REALIZABLE
VALUE AT ASSUMED
ANNUAL RATES
OF STOCK PRICE
APPRECIATION FOR
INDIVIDUAL GRANTS(1) OPTION TERM(2)
--------------------------------------------- ---------------------
NUMBER OF % OF
SECURITIES TOTAL OPTIONS
UNDERLYING GRANTED TO EXERCISE
OPTIONS EMPLOYEES IN PRICE EXPIRATION
NAME GRANTED(#) FISCAL YEAR ($/SHARE) DATE 5% 10%
---- ---------- ------------- --------- ---------- ---------- ----------
<S> <C> <C> <C> <C> <C> <C>
Stephen E. Cooper....... 44,000 8% $4.00 6/06/05 540,714 965,247
Takeshi (John) Suzuki... 16,000 3% $4.00 6/06/05 196,623 350,999
Philip J. Koen, Jr. .... 10,000 2% $1.70 2/16/05 145,889 242,374
12,000 2% $4.00 6/06/05 147,467 263,249
Paul A. Warkentin....... 12,000 2% $4.00 6/06/05 147,467 263,249
Trisha A. Dohren........ 12,000 2% $4.00 6/06/05 147,467 263,249

OPTION GRANTS IN FISCAL YEAR 1995
</TABLE>
- --------
(1) These options have a term of ten years, subject to earlier termination in
certain events related to termination of employment. Each of these options
was granted at an exercise price equal to the fair market value of the
underlying stock on the date of grant, as determined by the Board of
Directors. They vest as to 25% of the underlying shares on each
anniversary of the date of grant, becoming fully vested on the fourth
anniversary of the date of grant.

(2) Based on assumed rates of appreciation from the Company's initial public
offering price of $10.00 per share. The 5% and 10% assumed rates of
appreciation are mandated by the rules of the Securities and Exchange
Commission and do not represent the Company's estimate or projection of
the future price of the Company's Common Stock. There can be no assurance
that any of the values reflected in the table will be achieved.

57
<PAGE>

AGGREGATED OPTION EXERCISES IN FISCAL YEAR 1995 AND FISCAL YEAR-END OPTION
VALUES

<TABLE>
<CAPTION>
NUMBER OF
SECURITIES VALUE OF
UNDERLYING UNEXERCISED
UNEXERCISED IN-THE-MONEY
OPTIONS AT OPTIONS
FISCAL YEAR- AT FISCAL YEAR-
END(#)(1) END($)(2)
SHARES ACQUIRED VALUE EXERCISABLE/ EXERCISABLE/
NAME ON EXERCISE(#) REALIZED($) UNEXERCISABLE UNEXERCISABLE
- ------------------------ --------------- ----------- ------------- -----------------
<S> <C> <C> <C> <C>
Stephen E. Cooper....... 20,000 $25,000.00 42,500/81,500 $405,875/$622,125
Takeshi (John) Suzuki... -- -- 13,334/16,000 127,340/96,000
Philip J. Koen, Jr...... 33,333 41,666.25 0/88,667 0/791,670
Paul A. Warkentin....... -- -- 15,124/44,663 144,434/383,932
Trisha A. Dohren........ -- -- 14,167/47,833 135,295/414,205
</TABLE>
- --------
(1) Includes unexercisable options granted effective as of June 1995, as
follows: Mr. Cooper, 44,000; Mr. Koen, Dr. Warkentin and Ms. Dohren,
12,000; and Mr. Suzuki, 16,000.
(2) There was no public trading market for the Common Stock at July 31, 1995.
Accordingly, these values have been calculated on the basis of the
Company's initial public offering price of $10.00 per share, minus the
exercise price.

EMPLOYMENT AGREEMENTS AND TERMINATION AGREEMENTS

None of the executive officers named in the Summary Compensation Table has
an employment agreement with the Company, except that Mr. Cooper is entitled
to six months' salary continuance if the Company terminates his employment at
its discretion, and Mr. Koen and Ms. Dohren are each entitled to 26 weeks of
salary continuance if the Company terminates such employees other than for
cause.

STOCK OPTION PLANS

As of April 30, 1996, options to purchase an aggregate of 1,424,830 shares
of Common Stock were outstanding under the Company's 1990 Executive Stock
Plan, 1990 Employee Stock Option Plan, 1994 Employee Stock Option Plan, 1995
Omnibus Incentive Plan and 1995 Directors' Stock Option Plan, at exercise
prices ranging from $0.45 to $17.88 per share. Options to purchase 39,403
shares granted under the nonstatutory stock option agreements for former
holders of ATEQ securities were also outstanding as of such date, at an
average exercise price of $0.45. The weighted average exercise price of the
foregoing options was $3.25. As of April 30, 1996, 746,193 shares of Common
Stock were available for future issuance under the above plans.

1995 Omnibus Incentive Plan. The 1995 Omnibus Incentive Plan of the Company
(the "1995 Plan") was adopted by the Company's Board of Directors in July 1995
and approved by the stockholders in September 1995, and became effective upon
the consummation of the Company's initial public offering.

The 1995 Plan provides for awards in the form of restricted shares, stock
units, stock appreciation rights ("SARs") and options. Options issued under
the 1995 Plan may take the form of incentive stock options ("ISOs") intended
to qualify for preferential tax treatment under section 422 of the Internal
Revenue Code (the "Code"), and nonstatutory stock options ("NSOs") that do not
qualify for such treatment. A total of 1,000,000 shares of Common Stock have
been reserved for issuance under the 1995 Plan.

58
<PAGE>

The 1995 Plan is administered by the Compensation Committee of the Board of
Directors, which is comprised of directors of the Company who are
disinterested within the meaning of Rule 16b-3 of the Exchange Act. The Board
of Directors may appoint another committee, which may consist of any two or
more members of the Board of Directors, to administer the 1995 Plan with
respect to employees who are not officers or directors. Subject to the
limitations set forth in the 1995 Plan, the applicable committee has the
authority to determine to whom options will be granted or shares will be sold
or awarded and to determine the terms and conditions of each grant, sale or
award. Options and rights to purchase shares under the 1995 Plan are
nontransferable.

Employees and consultants of the Company are eligible for awards under the
Plan, except that only employees are eligible for the grant of ISOs. No
participant may be granted options covering more than 100,000 shares under the
1995 Plan in any calendar year, and no participant may be awarded more than
100,000 SARs under the 1995 Plan in any calendar year.

Vesting of restricted shares, stock units, SARs or stock options will be
specified in individual agreements. Stock options become immediately
exercisable in the event of death or total and permanent disability, and
vesting of stock options may be accelerated in the event of a merger,
consolidation or sale of substantially all of the assets of the Company that
constitutes a change in the control of the Company, or in the event of the
employee's retirement or any other event determined by the administering
committee.

The committee may grant options that are exercisable prior to becoming
vested, subject to the Company's right to repurchase unvested shares.

The exercise price of NSOs granted under the 1995 Plan may vary in
accordance with a predetermined formula. The exercise price of an ISO cannot
be less than 100% of the fair market value of the Common Stock on the date of
grant and, if the ISO is granted to a holder of more than 10% of the voting
power of the Company, not less than 110% of such fair market value. The
maximum term of an ISO is 10 years and, if the ISO is granted to a holder of
more than 10% of the voting power of the Company, five years.

At April 30, 1996, options to purchase 452,496 shares had been granted under
the 1995 Plan, and an additional 547,504 shares are available for future
grants. If any restricted shares, stock units or options granted under the
1995 Plan are forfeited, or if options or SARs terminate prior to exercise,
then they will again become available for awards under the 1995 Plan. The 1995
Plan automatically terminates 10 years from the date of shareholder approval.

1995 Directors' Stock Option Plan. The 1995 Directors' Stock Option Plan of
the Company (the "1995 Directors' Plan") was approved by the Board of
Directors in June 1995 and approved by the stockholders in September 1995. The
purpose of this plan is to allow the Company to recruit and retain qualified
outside directors to serve on the Company's Board of Directors.

Under the 1995 Directors' Plan, each director of the Company who is not an
employee of the Company (and who is not precluded by his or her employer from
receiving such grant) will receive a one-time grant of options to purchase
8,000 shares of the Company's Common Stock upon first joining the Board of
Directors (or, in the case of the Board members serving as of the plan's
adoption, upon the original grant of options under the plan by the Board of
Directors). Thereafter, each non-employee director will receive, during his or
her tenure as a director, annual grants of options covering 3,000 shares upon
each anniversary of such director's initial grant of options. To date, options
to purchase 38,000 shares have been granted under the 1995 Directors' Plan,
and an additional 112,000 shares are available for future grants.

Under the 1995 Directors' Plan, each option's exercise price is 100% of the
fair market value of the underlying shares on the grant date. One-time grants
vest in two installments, with half of the shares vesting immediately and the
other half vesting upon the first anniversary of the grant date; however,
after the Company becomes a reporting company under the Exchange Act, then
half of the shares will vest six months after the grant date and the other
half will vest on the first anniversary of the grant date. Annual grants of
3,000 options vest on the first anniversary of the grant date.

59
<PAGE>

Other Plans. The Company's 1994 Employee Stock Option Plan of Etec Systems,
Inc. (the "1994 Plan") was adopted by the Company's Board of Directors in June
1994, and subsequently approved by the stockholders. The 1994 Plan provides
for the grant of both ISOs and NSOs. Selected employees, directors, officers
and consultants of the Company are eligible for the grant of NSOs. Only
employees are eligible for the grant of ISOs. Options granted under the 1994
Plan generally vest over a four-year period. The 1994 Plan was amended in July
1995 to provide that options become immediately exercisable in the event of
death or total and permanent disability. The 1994 Plan is administered by the
Company's Compensation Committee. Under the 1994 Plan, options to purchase
442,621 shares of Common Stock were outstanding at April 30, 1996, with an
additional 721 shares available for future grants.

The 1990 Employee Stock Option Plan of Etec (the "1990 Plan") was adopted by
the Company's Board of Directors in March 1990, and subsequently approved by
its stockholders. The 1990 Plan was amended in November 1991. The 1990 Plan
provides for the grant of both ISOs and NSOs. Selected employees, directors,
officers and consultants of the Company are eligible for the grant of NSOs.
Only employees are eligible for the grant of ISOs. Options granted under the
1990 Plan generally vest over a four-year period. Under the 1990 Plan, options
to purchase 386,930 shares of Common Stock were outstanding at April 30, 1996,
with an additional 50,270 shares available for future grants. The 1990 Plan is
administered by the Compensation Committee.

The 1990 Executive Stock Plan of Etec (the "Executive Stock Plan") was
adopted by the Company's Board of Directors in March 1990, and subsequently
approved by its stockholders. The Executive Plan provides for direct sales or
awards of stock and for the grant of both ISOs and NSOs. Only executive
employees of the Company are eligible for the grant of options or for sales or
awards of shares under the Executive Stock Plan. Options granted under the
Executive Stock Plan vested ratably over three years on August 1, 1991, August
1, 1992 and August 1, 1993, subject to performance targets. Under the
Executive Stock Plan, options to purchase 104,783 shares of Common Stock were
outstanding at April 30, 1996, with an additional 20,408 shares available for
future grants. The Executive Stock Plan is administered by the Company's
Compensation Committee.

In connection with the Company's acquisition of ATEQ, options to purchase
Common Stock were issued to holders of options to purchase ATEQ Common Stock
and to the management employees of ATEQ under nonstatutory stock option
agreements. All options granted under these agreements are currently
exercisable.

EMPLOYEE STOCK PURCHASE PLAN

The 1995 Employee Stock Purchase Plan of Etec Systems, Inc. (the "ESPP") was
approved by the Board of Directors of the Company in July 1995 and approved by
the stockholders in September 1995. The ESPP provides employees of the Company
with the opportunity to purchase Common Stock through payroll deductions. A
total of 500,000 shares of Common Stock has been reserved for issuance, of
which 13,934 shares had been issued as of April 30, 1996. All employees are
eligible to participate in the ESPP.

Eligible employees may participate by authorizing payroll deductions of up
to 10% of their cash compensation. Amounts withheld will be applied at the end
of every six-month accumulation period to purchase shares of Common Stock, but
not more than 250 shares per accumulation period. The value of Common Stock
that may be purchased by any participant in a calendar year is limited to
$25,000. Participants may withdraw their contributions at any time before
stock is purchased.

The purchase price of Common Stock is determined as being 85% of the lower
of (i) the market price of the Common Stock immediately before the beginning
of the applicable offering period or (ii) the market price of Common Stock at
the time of the purchase. In general, the offering period is 18 months long,
but a new offering period begins every six months. Thus up to three offering
periods may be in effect at the same time. An offering period continues to
apply to a participant for the full 18 months, unless the market price of the
Common Stock is lower when a subsequent offering period begins. In that event,
the subsequent offering period automatically becomes the applicable period for
purposes of determining the purchase price.

60
<PAGE>

SENIOR MANAGEMENT INCENTIVE PLAN

Senior management employees who hold key positions are selected by the
Company's Board of Directors to participate in the Company's Senior Management
Incentive Plan ("SMIP"). Bonus ranges are established based on the position of
the employee and computed as a percentage of the employee's salary. A
performance goal based on the Company's return on net capital employed is set
by the Board of Directors and the amount of the bonus is calculated based on
the employees bonus range and the performance of the Company compared with the
performance goal.

LIMITATION OF LIABILITY AND INDEMNIFICATION MATTERS

The Nevada General Corporation Law (the "Nevada Law") permits a
corporation's Articles of Incorporation to limit the liability of its
directors or officers for monetary damages for breach of their fiduciary duty
as directors or officers, except for liability (i) for acts or omissions that
involve intentional misconduct, fraud or a knowing violation of law, or (ii)
for unlawful payment of dividends or unlawful stock repurchases or
redemptions. The Company's Articles of Incorporation limit the liability of
the Company's directors and officers to the fullest extent permitted by the
Nevada Law.

The Nevada Law also permits a corporation to indemnify each of its directors
and officers against expenses, including attorneys' fees, judgments, fines and
amounts paid in settlement, reasonably incurred in connection with a
threatened or pending suit or proceeding arising out of such person's status
as a director and officer, so long as he or she acted in good faith and in a
manner that he or she reasonably believed to be in or not opposed to the
Company's best interests and, with respect to a criminal proceeding, had no
reason to believe that his or her conduct was unlawful. The Company's Articles
of Incorporation and By-Laws provide that the Company shall indemnify its
directors and officers to the fullest extent permitted by the Nevada Law. The
Company has entered into separate indemnification agreements with its
directors and executive officers that could require the Company, among other
things, to indemnify them against certain liabilities that may arise by reason
of their status or service as directors or officers and to advance expenses
that they may incur in any proceeding as to which they are entitled to be
indemnified. The Company also maintains directors' and officers' liability
insurance covering all of its directors and executive officers against
liabilities arising out of their service as directors or officers.

The Company believes that the indemnification and insurance arrangements
described above will enable it to continue to attract and retain qualified
individuals to serve as directors and officers.

COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

The Compensation Committee of the Board of Directors, consisting of Messrs.
King, Trent and Wehrli, makes recommendations concerning salaries incentive
compensation for the Company's employees and administers its incentive
compensation and benefit plans. Mr. King is the President and Chief Executive
Officer and a director of Zitel. In connection with the LBO, the Company sold
Zitel 10,000 shares of Series B Preferred Stock at a price of $100 per share.
Such shares converted at the Company's option into 205,128 shares of Common
Stock upon the consummation of the Company's initial public offering. In
addition, the Company paid Zitel approximately $590,000 in 1994 under a
technology transfer agreement. Mr. Trent is Vice President of Micron. In
connection with the LBO, the Company sold Micron 50,000 shares of Series B
Preferred Stock at a price of $100 per share. Such shares converted at the
Company's option into 1,025,640 shares of Common Stock upon the consummation
of the Company's initial public offering. See "Certain Transactions."

61
<PAGE>

CERTAIN TRANSACTIONS

Sales of Preferred Stock. From March 1990 through December 1994, the Company
issued shares of its Preferred Stock in private transactions, as follows:
260,000 shares of Series B Preferred Stock at a price of $100 per share in
connection with the LBO in March 1990; 81,278 shares of Series C Preferred
Stock in connection with the ATEQ acquisition in November 1991; and 50,000
shares of Series D Preferred Stock to IBM in January 1994 in exchange for the
cancellation of approximately $7.1 million in principal and accrued interest
on a note from the Company. In July 1995 the Company entered into an agreement
with IBM and Perkin-Elmer, under which the Company exchanged three senior
subordinated notes owed to IBM and Perkin-Elmer in the aggregate principal
plus interest amount of approximately $19.7 million for 105,641 shares of
Series B Preferred Stock and two new senior subordinated notes that were
repaid out of the proceeds of the Company's IPO. In July 1995, the Company
also issued 75,753 shares of Series E Preferred Stock in satisfaction of the
Company's obligation to repurchase the minority interest in Etec Japan. Upon
the consummation of the Company's IPO, each share of Series B Preferred Stock,
Series C Preferred Stock Series D Preferred Stock and Series E Preferred Stock
was converted into approximately 20.51 shares of Common Stock. The purchasers
of the Preferred Stock included the following holders of more than 5% of each
class of the Company's Preferred Stock, determined immediately prior to the
conversion of the Preferred Stock into Common Stock, and entities associated
with the Company's directors:

<TABLE>
<CAPTION>
SHARES
-----------------------------------
SERIES B SERIES C SERIES D SERIES E
-------- -------- -------- --------
<S> <C> <C> <C> <C>
IBM...................................... 90,251 -- 50,000 --
Perkin-Elmer............................. 115,390 -- -- --
DuPont................................... 50,000 -- -- --
Grumman.................................. 50,000 -- -- --
Micron................................... 50,000 -- -- --
Zitel.................................... 10,000 -- -- --
Asset Management Associates 1984......... -- 4,103 -- --
CH Partners III.......................... -- 10,651 -- --
Hambrecht & Quist(1)..................... -- 8,370 -- --
Institutional Venture Partners........... -- 13,245 -- --
Oak Investment Partners III.............. -- 6,818 -- --
Sequoia Capital IV....................... -- 5,799 -- --
Kanematsu Corporation.................... -- -- -- 22,902
Japan Associated Finance Co., Ltd........ -- -- -- 52,851
</TABLE>
- --------
(1) Includes 4,156 shares of Series C Preferred Stock purchased by H&Q
Ventures IV; 4,156 shares purchased by H&Q Ventures International C.V.;
and 58 shares purchased by five other entities affiliated with Hambrecht &
Quist.

The above stockholders have certain rights to have their Company securities
registered under the Securities Act of 1933, as amended (the "Securities
Act"). See "Description of Capital Stock--Registration Rights."

IBM. IBM has been a customer of the Company. See "Business--Customers." In
1990, in return for a license of certain technology, the Company issued a
$10.0 million subordinated note to IBM. In January 1994, IBM exchanged $5.0
million of the note's principal balance and approximately $2.1 million in
accrued interest for 50,000 shares of the Company's Series D Preferred Stock.
In February 1995, in connection with the Company's sale and leaseback
transaction, the note was amended to extend the payment schedule and to
condition the Company's obligation to make payments on the achievement of
certain operating cash flow and cash balance tests. The Company also agreed to
make certain prepayments in accordance with an excess cash sharing agreement.

62
<PAGE>

In July 1995, IBM exchanged its senior subordinated note for 40,251 shares
of Series B Preferred Stock and a new subordinated convertible note with a
principal amount of approximately $1.6 million. Such note was repaid out of
the proceeds of the Company's initial public offering.

In connection with the LBO, the Company licensed certain technology from IBM
and IBM agreed to purchase two systems employing the licensed technology. IBM
placed a purchase order for these systems and advanced the Company
approximately $6.0 million toward its purchase commitment in fiscal 1992. In
fiscal 1994, IBM canceled its purchase order for the two systems, at which
time the Company had incurred approximately $2.9 million in manufacturing
costs for the relevant systems. In fiscal 1995, the Company and IBM agreed (i)
to apply $2.4 million of the $6.0 million advance toward the purchase of a
CORE system, (ii) that the Company would purchase an older system from IBM for
$200,000, (iii) that the Company would be entitled to the remaining $3.4
million, (iv) that the Company released IBM from its obligation to purchase
two systems employing the licensed technology, and (v) that IBM released the
Company from claims relating to the alleged failure of an ALTA 3000 system
that IBM had ordered from the Company to achieve certain performance
specifications by an agreed date.

In connection with an agreement for services provided in conjunction with
the Company's research and development contract with ARPA/NAVAIR, the Company
paid IBM approximately $400,000, $1.8 million and $800,000 during fiscal 1993,
1994 and 1995, respectively.

In 1990, the Company agreed to lease software and computer equipment from
IBM under an agreement which expired in November 1995. The aggregate amount of
payments over the lease's term was approximately $285,000.

Perkin-Elmer. In March 1990, the Company issued its Series A Payment-in-Kind
Preferred Stock (the "Series A Preferred Stock") and a $6.0 million senior
subordinated note to Perkin-Elmer in partial payment of the purchase price in
the LBO. The principal of the note was reduced to $4.4 million in December
1991, in settlement of purchase price adjustments for the LBO. In July 1992,
the Company redeemed all outstanding shares of Series A Preferred Stock for
$250,000 in cash and a $5.8 million senior subordinated note.

In February 1995, in connection with the Company's sale and leaseback
transaction, both senior subordinated notes held by Perkin-Elmer were amended
in a manner similar to the amendment of the IBM subordinated note, as
described above.

In July 1995, Perkin-Elmer exchanged its senior subordinated notes for
65,390 shares of Series B Preferred Stock and a new subordinated convertible
note with a principal amount of approximately $2.0 million. This note was
repaid out of the proceeds of the Company's initial public offering.

Grumman. In March 1990, the Company entered into a purchase agreement with
Grumman pursuant to which the Company committed to purchase specified
quantities of components from Grumman upon achieving certain sales levels. In
fiscal 1992, Grumman billed the Company $1.4 million under this agreement. The
Company disputed the appropriateness of this billing, but paid Grumman $1.0
million in fiscal 1993. Grumman continued to maintain that the Company had not
satisfied its obligations under the agreement. During fiscal 1995, the Company
and Grumman entered into an agreement under which Grumman released the Company
from all obligations under the 1990 inventory purchase agreement and the
Company issued to Grumman a warrant to purchase 150,000 shares of the
Company's Common Stock at an exercise price of $1.70 per share.

Zitel. Zitel has been a supplier of memory boards and subsystems to the
Company. In 1994, the Company purchased approximately $590,000 of pattern
memory boards, beam sequencers and other related materials from Zitel.

63
<PAGE>

DuPont. DuPont has been a customer of the Company. See "Business--
Customers." DuPont has also supplied masks to the Company for use by the
Company in developing products. In 1995 and the first nine months of fiscal
1996, the Company purchased approximately $200,000 and $183,000, respectively,
of photomasks from DuPont.

Other. In September 1993, the Company sold 50,000 shares of Common Stock to
Stephen E. Cooper, the Company's President and Chief Executive Officer, for a
purchase price of $0.45 per share. Mr. Cooper executed a promissory note in
the amount of the purchase price; the note is payable over a ten-year period
in semi-annual installments. The Company also granted Mr. Cooper options to
purchase a total of 100,000 shares of Common Stock in January and December
1993 at an exercise price of $0.45 per share, of which he exercised 23,000 in
1995, and options to purchase 44,000 shares at an exercise price of $4.00 per
share in June 1995, of which none has been exercised.

The Company has granted certain of its other named executive officers and
directors stock options with exercise prices below the public offering price,
as follows: Trisha Dohren, a total of 50,000 shares in 1993 and 1994 at an
exercise price of $0.45 and 12,000 shares in 1995 at an exercise price of
$4.00; Philip Koen, Jr., 100,000 shares in 1993 at an exercise price of $0.45,
and 10,000 shares at an exercise price of $1.70 and 12,000 shares at an
exercise price of $4.00 in 1995; John Suzuki, 13,333 shares in 1991 at an
exercise price of $0.45 and 16,000 in 1995 at an exercise price of $4.00; Paul
Warkentin, 45,568 shares in 1991, 1993 and 1994 at an exercise price of $0.45,
2,216 shares in connection with the acquisition of ATEQ in 1991 at an exercise
price of $0.01, and 12,000 shares in 1995 at an exercise price of $4.00;
Edward Gelbach and Robert Wehrli, 8,000 shares in 1995, under the 1995
Directors' Stock Option Plan, at exercise prices of $1.70 and $4.00; Jack King
and Catherine Goodrich, 8,000 shares in 1995 at exercise prices of $1.70 and
$4.00 and 3,000 shares in 1996 at an exercise price of $12.125, under the 1995
Directors' Stock Option Plan; and all directors and executive officers as a
group, 2,216 shares at an exercise price of $0.01, 208,901 shares at an
exercise price of $0.45, 34,000 shares at an exercise price of $1.70, 44,000
shares at an exercise price of $4.00, and 6,000 shares at an exercise price of
$12.125. Some of the above options have been exercised.

Effective July 31, 1995, the Company repurchased shares of Etec Japan's
common stock held by John Suzuki, a director of the Company and President of
Etec Japan, for approximately 35.4 million Japanese yen (approximately
$400,000 as of July 31, 1995).

Upon his retirement as Chief Executive Officer in July 1993, Charles Minihan
entered into a three-year consulting agreement with the Company providing for
payments of $650 per day of service, up to 100 days per year. In connection
with his retirement from the Board of Directors in March 1995, the Company
entered into a one-year consulting agreement providing for aggregate payments
to Mr. Minihan of $90,000 and loaned him $30,000 toward the payment of the
exercise price of his outstanding options. This loan was forgiven in July
1995.

The Company believes that the foregoing transactions were in its best
interests. It is the Company's current policy that it will enter into
transactions with officers, directors, five percent stockholders and their
affiliates only if such transactions are approved by a majority of the
disinterested independent directors, are on terms no less favorable to the
Company than could be obtained from unaffiliated parties and are reasonably
expected to benefit the Company.

For information concerning indemnification of directors and officers, see
"Management--Limitation of Liability and Indemnification Matters."

64
<PAGE>

PRINCIPAL AND SELLING STOCKHOLDERS

The following table sets forth certain information regarding beneficial
ownership of the Company's Common Stock as of April 30, 1996, and as adjusted
to reflect the sale by the Company and the Selling Stockholders of the shares
offered hereby (assuming no exercise of the Underwriters' over-allotment
option), by: (i) each person who is known by the Company to own beneficially
more than 5% of the Company's Common Stock, (ii) each of the Company's
directors, (iii) each of the Company's executive officers, (iv) all directors
and executive officers of the Company as a group, and (v) the other Selling
Stockholders.

<TABLE>
<CAPTION>
SHARES SHARES
BENEFICIALLY BENEFICIALLY
OWNED PRIOR NUMBER OWNED AFTER
TO OFFERING(1) OF OFFERING(2)
----------------- SHARES -----------------
PRINCIPAL STOCKHOLDERS NUMBER PERCENT OFFERED NUMBER PERCENT
- ---------------------- --------- ------- --------- --------- -------
<S> <C> <C> <C> <C> <C>
International Business Machines
Corporation..................... 2,876,940 15.9% 1,209,119 1,667,821 8.8%
Old Orchard Road
Armonk, NY 10504

The Perkin-Elmer Corporation..... 2,366,971 13.1% 872,437 1,494,534 7.9%
761 Main Avenue
Norwalk, CT 06859

Grumman Aerospace Corporation(3). 1,175,640 6.5% 636,543 539,097 2.8%
c/o Northrop Grumman Corporation
2301 West 120th Street
Hawthorne, CA 90250

Micron Technology, Inc........... 1,025,640 5.7% 205,128 820,512 4.3%
8000 S. Federal Way
Boise, ID 83707

DuPont Photomasks, Inc. ......... 1,025,640 5.7% 0 1,025,640 5.4%
1007 Market Street
Wilmington, DE 19898

DIRECTORS AND EXECUTIVE OFFICERS
- --------------------------------
Frank E. Abboud(4)............... 32,762 * 0 32,762 *
Stephen E. Cooper(5)............. 174,715 * 30,000 144,715 *
Roy A. Earle..................... 0 -- 0 0 --
Philip J. Koen, Jr.(6)........... 72,166 * 0 72,166 *
Trisha A. Dohren(7).............. 31,333 * 0 31,333 *
Edward L. Gelbach(8)............. 18,000 * 0 18,000 *
Mark A. Gesley(9)................ 13,504 * 10,000 3,504 *
Catherine P. Goodrich(10)........ 18,000 * 0 18,000 *
Jack H. King(11)(16)............. 8,000 * 0 8,000 *
John McBennett(12)............... 0 -- 0 0 --
Takeshi (John) Suzuki(13)........ 30,667 * 0 30,667 *
Thomas Michael Trent(14)......... 0 -- 0 0 --
Paul A. Warkentin(15)............ 29,028 * 0 29,028 *
Robert L. Wehrli(16)............. 8,000 * 0 8,000 *
All directors and executive
officers as a group (14
persons)(17).................... 436,175 2.4% 40,000 396,175 2.1%
</TABLE>

65
<PAGE>

<TABLE>
<CAPTION>
SHARES SHARES
BENEFICIALLY BENEFICIALLY
OWNED PRIOR NUMBER OWNED AFTER
TO OFFERING(1) OF OFFERING(2)
--------------- SHARES ---------------
OTHER SELLING STOCKHOLDERS NUMBER PERCENT OFFERED NUMBER PERCENT
- -------------------------- ------- ------- ------- ------- -------
<S> <C> <C> <C> <C> <C>
Asset Management Associates 1984....... 84,164 * 34,123 50,041 *
John G. Balletto....................... 39,404 * 15,976 23,428 *
William E. Boeing, Jr.(18)............. 64,670 * 25,845 38,825 *
Cable & Howse Investment Partners(19).. 222,127 1.2% 90,058 132,069 *
Charles River Partnership V............ 80,040 * 32,451 47,589 *
CIGNA Mezzanine Partners II, L.P....... 258,936 1.4% 86,310 172,626 *
Connecticut General Life Insurance
Company............................... 176,072 * 58,690 117,382 *
Joseph P. Donahue...................... 65,782 * 40,462 25,320 *
Stephen Emmanuele(20).................. 33,792 * 13,792 20,000 *
Foreign & Colonial Enterprise Trust
PLC................................... 33,128 * 13,431 19,697 *
Hambrecht & Quist(21).................. 171,709 * 40,000 131,709 *
Institutional Venture Partners(22)..... 271,794 1.5% 110,193 161,601 *
Charles Minihan........................ 129,650 * 79,375 50,275 *
O'Donnell & Masur, L.P. ............... 62,789 * 25,457 37,332 *
Oak Investment Partners III............ 139,856 * 56,702 83,154 *
Orien I, L.P. ......................... 49,805 * 20,193 29,612 *
R.A. Properties, Ltd. ................. 64,164 * 26,014 38,150 *
Robert L. Smith(23).................... 35,070 * 35,070 0 --
Union Venture Corporation.............. 62,789 * 25,457 37,332 *
Venrock Associates(24)................. 78,666 * 31,894 46,772 *
Vista II Limited Partnership........... 58,646 * 23,777 34,869 *
Richard Worthington(25)................ 39,356 * 20,000 19,356 *
Zitel Corporation...................... 205,128 1.1% 111,065 94,063 *
Other Selling Stockholders(26)......... 260,596 1.4% 120,438 140,158 *
</TABLE>
- --------
* Less than 1%.

(1) To the Company's knowledge, the persons named in the table have sole
voting and investment power with respect to all shares of Common Stock
shown as beneficially owned by them, subject to community property laws
where applicable and the information contained in the footnotes to this
table.

(2) Shares outstanding after the offering include 500,000 shares of Common
Stock to be purchased by Intel upon consummation of this offering, and
73,221 shares issued to Selling Stockholders for sale in this offering
upon the exercise of options.

(3) Includes 150,000 shares issuable upon exercise of warrants.

(4) Includes 30,512 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(5) Includes 63,000 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(6) Includes 38,833 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(7) Includes 21,333 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(8) Includes 8,000 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(9) Includes 11,921 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(10) Includes 8,000 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(11) Excludes 205,128 shares held by Zitel. Mr. King, as President, Chief
Executive Officer and a director of Zitel, may be deemed to share voting
and investment power with respect to such shares.

(12) Excludes 2,366,971 shares held by Perkin-Elmer, of which Mr. McBennett is
an officer. Mr. McBennett has indicated to the Company that he does not
have or share voting or dispositive power over such shares.

(13) Includes 17,334 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(14) Excludes 1,025,640 shares held by Micron, of which Mr. Trent is a Vice
President. Mr. Trent has indicated to the Company that he does not have
or share voting or dispositive power over such shares.

(15) Includes 29,013 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

66
<PAGE>

(16) Represents shares subject to stock options exercisable on April 30, 1996
or within 60 days thereafter.

(17) Includes 243,946 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(18) Consists of 64,183 shares beneficially owned by Mr. Boeing, of which
25,358 are being offered, and 487 shares beneficially owned by Boeing
Oregon Mesabi Trust of which Mr. Boeing is Co-Trustee, of which 487 are
being offered.

(19) Consists of 218,481 shares beneficially owned by CH Partners III, of
which 86,412 are being offered; 2,748 shares beneficially owned by Cable
& Howse Investment Partners, of which 2,748 are being offered; and 898
shares beneficially owned by CH Partners II, of which 898 are being
offered.

(20) Includes 13,792 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(21) Consists of 85,251 shares beneficially owned by H&Q Ventures IV, of which
39,693 are being offered; 307 shares beneficially owned by H&Q Ventures
III, of which 307 are being offered; and 85,251 shares, 348 shares, 328
shares, 143 shares and 61 shares beneficially owned by H&Q Ventures
International C.V., Hamquist, H&Q Investors, Hamco Capital Corp. and H&Q
Alliance Fund, respectively.

(22) Consists of 267,712 shares beneficially owned by Institutional Venture
Partners III, of which 106,111 are being offered, and 4,082 shares
beneficially owned by Institutional Venture Management III, of which
4,082 are being offered.

(23) Includes 18,403 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(24) Consists of 54,297 shares beneficially owned by Venrock Associates, of
which 24,369 are being offered, and 24,369 shares beneficially owned by
Venrock Associates II, L.P., of which 7,525 are being offered.

(25) Includes 19,146 shares subject to stock options exercisable on April 30,
1996 or within 60 days thereafter.

(26) Consists of 40 individuals and institutions, each of whom beneficially
owns less than 0.20% of the Company's outstanding Common Stock prior to
the offering. Beneficial ownership prior to the offering includes an
aggregate of 25,227 shares subject to stock options exercisable on April
30, 1996 or within 60 days thereafter.

67
<PAGE>

DESCRIPTION OF CAPITAL STOCK

The authorized capital stock of the Company consists of 30,000,000 shares of
Common Stock, $0.01 par value per share, and 10,000,000 shares of Preferred
Stock, $0.01 par value per share.

COMMON STOCK

As of April 30, 1996, there were 18,075,037 shares of Common Stock
outstanding held by approximately 330 stockholders of record.

The holders of Common Stock are entitled to one vote for each share held of
record on all matters submitted to a vote of the stockholders, including the
election of directors, and do not have cumulative voting rights. Accordingly,
the holders of a majority of the shares of Common Stock entitled to vote in
any election of directors can elect all of the directors standing for
election. Subject to preferences that may be applicable to any then
outstanding Preferred Stock, holders of Common Stock are entitled to receive
ratably such dividends, if any, as may be declared by the Board of Directors
out of funds legally available therefor. See "Dividend Policy." Upon a
liquidation, dissolution or winding up of the Company, the holders of Common
Stock will be entitled to share ratably in the net assets legally available
for distribution to stockholders after the payment of all debts and other
liabilities of the Company, subject to the prior rights of any Preferred Stock
then outstanding. Holders of Common Stock have no preemptive or conversion
rights and there are no redemption or sinking fund provisions applicable to
the Common Stock. All outstanding shares of Common Stock are, and the Common
Stock to be outstanding upon completion of this offering will be, fully paid
and nonassessable.

PREFERRED STOCK

The Board of Directors has the authority, without further action by the
stockholders, to issue from time to time additional shares of Preferred Stock
in one or more series and to fix the number of shares, designations,
preferences, powers, and relative, participating, optional or other special
rights and the qualifications or restrictions thereof. The preferences,
powers, rights and restrictions of different series of Preferred Stock may
differ with respect to dividend rates, amounts payable on liquidation, voting
rights, conversion rights, redemption provisions, sinking fund provisions, and
purchase funds and other matters. The issuance of Preferred Stock could
decrease the amount of earnings and assets available for distribution to
holders of Common Stock or affect adversely the rights and powers, including
voting rights, of the holders of Common Stock, and may have the effect of
delaying, deferring or preventing a change in control of the Company. The
Company has no present plan to issue any shares of Preferred Stock.

WARRANTS

As of April 30, 1996, warrants to purchase 376,997 shares of Common Stock
were outstanding. These consist of the following: warrants to purchase 150,000
shares exercisable at $1.70 per share which were issued to Grumman in April
1995 pursuant to a settlement agreement and which expire on March 4, 2010;
warrants to purchase 212,418 shares exercisable at $0.45 per share which were
issued in connection with the sale and leaseback of the Company's Hayward
property and which expire on November 15, 2003; and warrants to purchase 1,064
shares and 13,515 shares which expire on October 14, 1996 and October 14,
2001, respectively.

Concurrently with the completion of this offering, Intel will receive
warrants to purchase 75,000 shares of Common Stock. See "Investment by Intel."
The warrants will become exercisable only if Intel's purchases of products and
services from the Company during the succeeding four years exceed certain
thresholds, or upon the occurrence of certain other conditions. The warrants'
exercise price will be equal to the Price to Public set forth on the cover
page of this Prospectus.

68
<PAGE>

REGISTRATION RIGHTS

Following this offering, the holders of 9,419,387 shares of Common Stock,
(including the shares of Common Stock sold to Intel concurrently herewith) and
the holders of warrants to purchase 287,418 shares of Common Stock, or their
permitted transferees, are entitled to certain rights with respect to the
registration of such shares (the "Registrable Shares") under the Securities
Act. Two years after the completion of this offering, Intel will be entitled
to request that the Company file a registration statement under the Securities
Act covering the resale of some or all of its Registrable Shares subject to
certain conditions. The Company is required to bear all costs associated with
such registration.

In addition, if the Company proposes to register any of its securities under
the Securities Act for its own account, the holders of Registrable Shares are
entitled to notice of such registration and are entitled to include
Registrable Shares therein, provided, among other conditions, that the
underwriters of any such offering have the right to limit the number of shares
included in such registration. The Company is required to bear all costs
associated with such registration.

The shares offered herein by the Selling Stockholders are in exercise of the
registration rights of the Selling Stockholders. All other registration rights
have either been waived or been limited by the underwriters.

In addition, holders of 1,195,565 Registrable Shares have the right
commencing October 23, 1996 to request the Company to file a registration
statement covering such shares or the resale of such shares. The Company is
required to bear all costs associated with such registration.

NEVADA ANTI-TAKEOVER LAWS AND CERTAIN CHARTER PROVISIONS

Nevada's "Combination with Interested Stockholders Statute," which applies
to Nevada corporations having at least 200 stockholders, prohibits an
"interested stockholder" from entering into a "combination" with the
corporation, unless certain conditions are met. A "combination" includes (a)
any merger with an "interested stockholder," (b) any consolidation, sale,
lease, exchange, mortgage, pledge, transfer or other disposition of assets, in
one transaction or a series of transactions, to an "interested stockholder,"
having: (i) an aggregate market value equal to 5% or more of the aggregate
market value of the corporation's assets; (ii) an aggregate market value equal
to 5% or more of the aggregate market value of all outstanding shares of the
corporation; or (iii) representing 10% or more of the earning power or net
income of the corporation, or (c) any issuance or transfer of shares of the
corporation or its subsidiaries having an aggregate market value equal to 5%
or more of the aggregate market value of all the outstanding shares of the
corporation. An "interested stockholder" is a person who, together with
affiliates and associates, beneficially owns (or within the prior three years,
did beneficially own) 10% or more of the corporation's voting stock.
Stockholders who owned 10% or more of the corporation's stock on January 1,
1991 are exempt.

A corporation to which the statute applies may not engage in a "combination"
within three years after the interested stockholder acquired its shares,
unless the combination or the interested stockholder's acquisition of shares
was approved by the board of directors before the interested stockholder
acquired the shares. If this approval is not obtained, then after the three-
year period expires, the combination may be consummated with the approval of
the board of directors or a majority of the voting power held by disinterested
stockholders, or if the consideration to be paid by the interested stockholder
is at least equal to the higher of: (i) the highest price per share paid by
the interested stockholder within the three years immediately preceding the
date of the announcement of the combination or in the transaction in which it
became an interested stockholder, whichever is higher; (ii) the market value
per common share on the date of announcement of the combination or the date
the interested stockholder acquired the shares, whichever is higher; or (iii)
if higher for the holders of preferred stock, the highest liquidation value of
the preferred stock.

Nevada's "Control Share Acquisition Statute" prohibits an acquiror, under
certain circumstances, from voting shares of a target corporation's stock
after crossing certain threshold ownership percentages, unless the acquiror
obtains the approval of the target corporation's stockholders. The statute
specifies three thresholds:

69
<PAGE>

at least one-fifth but less than one-third, at least one-third but less than a
majority, and a majority or more, of the outstanding voting power. Once an
acquiror crosses one of the above thresholds, shares which it acquired in the
transaction taking it over the threshold or within ninety days become "Control
Shares" which are deprived of the right to vote until a majority of the
disinterested stockholders restore that right. If the stockholders fail to
restore voting rights to the acquiror, then the corporation may, if so
provided in its Articles of Incorporation or By-Laws, call certain of the
acquiror's shares for redemption. The Company's Articles of Incorporation and
By-Laws do not currently permit it to call an acquiror's shares for redemption
under these circumstances. The Control Share Acquisition Statute also provides
that in the event the stockholders restore full voting rights to a holder of
Control Shares which owns a majority of the voting stock, then all other
stockholders who do not vote in favor of restoring voting rights to the
Control Shares may demand payment for the "fair value" of their shares (which
is generally equal to the highest price paid in the transaction subjecting the
stockholder to the statute). The Control Share Acquisition Statute only
applies to Nevada corporations with at least 200 stockholders, including at
least 100 record stockholders who are Nevada residents, and which do business
directly or indirectly in Nevada.

The provisions described above, together with the ability of the Board of
Directors to issue Preferred Stock as described under "--Preferred Stock," may
have the effect of delaying or deterring a change in the control or management
of the Company.

TRANSFER AGENT AND REGISTRAR

The transfer agent and registrar for the Common Stock is Chase Mellon
Shareholder Services.

70
<PAGE>

SHARES ELIGIBLE FOR FUTURE SALE

No prediction can be made regarding the effect, if any, that market sales of
shares of Common Stock or the availability of shares for sale will have on the
market price prevailing from time to time. As described below, the number of
shares available for sale shortly after this offering will be limited due to
certain contractual and legal restrictions on resale. Nevertheless, sales of
substantial amounts of Common Stock of the Company in the public market after
the restrictions lapse could adversely affect the prevailing market price.

Upon completion of this offering, the Company will have outstanding
18,908,335 shares of Common Stock (assuming no exercise of options and
warrants to purchase 1,959,194 shares). Of these, 9,233,593 shares of Common
Stock (including the 4,350,000 shares being sold hereby) will be freely
tradable (other than by an "affiliate" of the Company as such term is defined
in the Securities Act) without restriction or registration under the
Securities Act. The remaining 9,674,742 shares held by existing stockholders
(the "Restricted Shares") were issued and sold by the Company in reliance on
exemptions from the registration requirements of the Securities Act or are
shares subject to certain lock-up restrictions (as defined below). These
shares may be sold in the public market only if registered or pursuant to an
exemption from registration such as Rules 144 or 701 under the Securities Act
and/or after such lock-up period has expired.

Of the Restricted Shares, 51,547 are held by certain stockholders that have
agreed in connection with the Company's initial public offering not to sell,
directly or indirectly, any shares owned by them until July 20, 1996, 63,598
are held by three officers and one director of the Company who have agreed not
to sell, directly or indirectly, any shares owned by them for a period of 60
days from the date of this Prospectus and 8,988,192 are held by certain other
stockholders (including the Company's remaining officers and directors and the
Selling Stockholders) who have agreed not to sell, directly or indirectly, any
shares owned by them until January 20, 1997 (collectively, the "Lock-up
Restrictions") without prior written consent of the Company and Robertson,
Stephens & Company LLC. Of the remaining 571,405 Restricted Shares not subject
to the Lock-up Restrictions, 69,742 are eligible for immediate sale in the
public market in reliance on Rule 144(k), 7,807 shares are eligible for sale,
subject to the restrictions of Rule 144 and Rule 701 and 493,856 will become
eligible for sale upon satisfaction of certain requirements under Rule 144
including the holding period requirements which presently will not be
satisfied prior to February 1998.

Commencing July 20, 1996, upon the expiration of Lock-up Restrictions (or
earlier upon the consent of the Company and Robertson, Stephens & Company
LLC), 7,662 Restricted Shares will become eligible for sale without
restriction in reliance on Rule 144(k), and 16,574 Restricted Shares will
become eligible for sale subject to the restrictions of Rule 144 and Rule 701.
Commencing 60 days after the offering, upon the expiration of Lock-up
Restrictions (or earlier upon the consent of the Company and Robertson,
Stephens & Company LLC), 38,348 additional Restricted Shares will become
eligible for sale subject to the restrictions of Rule 144 and Rule 701.
Commencing January 20, 1997, upon the expiration of Lock-up Restrictions (or
earlier upon the consent of the Company and Robertson, Stephens & Company LLC)
1,652,478 additional Restricted Shares will become eligible for sale without
restriction in reliance on Rule 144(k), and 5,413,860 Restricted Shares will
become eligible for sale subject to the restrictions of Rule 144.

In general, under Rule 144 as currently in effect, an affiliate of the
Company, or a holder of Restricted Shares who owns beneficially shares that
were not acquired from the Company or an affiliate of the Company within the
previous two years, would be entitled to sell within any three-month period a
number of shares that does not exceed the greater of 1% of the then
outstanding shares of Common Stock (approximately 189,083 shares immediately
after this offering, assuming no exercise of the Underwriters' over-allotment
option) or the average weekly trading volume of the Common Stock during the
four calendar weeks preceding the date on which notice of the sale is filed
with the Securities and Exchange Commission (the "Commission"). Sales under
Rule 144 are subject to certain requirements relating to manner of sale,
notice and availability of current public information about the Company.
However, a person (or persons whose shares are aggregated) who is not deemed
to have been an affiliate of the Company at any time during the 90

71
<PAGE>

days immediately preceding the sale and who owns beneficially Restricted
Shares is entitled to sell such shares under Rule 144(k) without regard to the
limitations described above, provided that at least three years have elapsed
since the later of the date the shares were acquired from the Company or from
an affiliate of the Company. The foregoing is a summary of Rule 144 and is not
intended to be a complete description of it.

Subject to certain limitations on the aggregate offering price of a
transaction and other conditions, Rule 701 may be relied upon with respect to
the resale of securities originally purchased from the Company by its
employees, directors, officers, consultants or advisers prior to the closing
of the Company's initial public offering, pursuant to written compensatory
benefit plans or written contracts relating to the compensation of such
persons. In addition, the Commission has indicated that Rule 701 will apply to
stock options granted by the Company before its initial public offering, along
with the shares acquired upon exercise of such options. Securities issued in
reliance on Rule 701 are deemed to be Restricted Shares and (unless subject to
the contractual restrictions described above), may be sold by persons other
than affiliates subject only to the manner of sale provisions of Rule 144 and
by affiliates under Rule 144 without compliance with its two-year minimum
holding period requirements.

The Company has filed Registration Statements on Form S-8 covering the
resale of 2,815,930 shares of Common Stock which are reserved for issuance
under the Company's 1995 Omnibus Incentive Plan, 1994 Employee Stock Option
Plan, 1995 Directors' Stock Option Plan, 1990 Executive Stock Plan, 1990
Employee Stock Plan, and 1995 Employee Stock Purchase Plan, including, in some
cases, shares for which an exemption under Rule 144 or Rule 701 would also be
available, thus permitting the resale of shares in the public market without
restriction under the Securities Act. As of April 30, 1996, options to
purchase 1,424,830 shares were outstanding under the Company's 1995 Omnibus
Incentive Plan, 1994 Employee Stock Option Plan, 1990 Executive Stock Plan,
1990 Employee Stock Plan, and 1995 Directors' Stock Option Plan, and as of
April 30, 1996, 13,934 shares had been purchased under the Company's Employee
Stock Purchase Plan. In addition, the Company has filed a Registration
Statement on Form S-8 covering the resale of 44,288 shares of Common Stock
which are reserved for issuance upon exercise of warrants to purchase Common
Stock. These warrants were originally issued in connection with the Company's
acquisition of ATEQ in 1991, and as of April 30, 1996, 30,770 shares of Common
Stock have been issued upon exercise of such warrants and are available for
resale in the public market.

Certain other holders of Restricted Shares have the right to cause the
company to register the sale of their shares under the Securities Act. If such
registration rights are exercised, the shares can be sold without any holding
period or sales volume limitation under the Securities Act. See "Description
of Capital Stock--Registration Rights."

The holders of certain additional shares of Common Stock will be entitled to
cause the Company to register the sale of such shares under the Securities
Act, subject in some cases to the lock-up agreements described above. The
registration of such shares under the Securities Act would result in such
shares becoming freely tradeable without restriction under the Securities Act
(except for shares purchased by affiliates of the Company) immediately upon
the effectiveness of such registration. See "Description of Capital Stock--
Registration Rights."

72
<PAGE>

UNDERWRITING

The Underwriters named below, acting through their representatives,
Robertson, Stephens & Company LLC and Needham & Company, Inc. (the
"Representatives"), have severally agreed with the Company and the Selling
Stockholders subject to the terms and conditions of the underwriting
agreement, to purchase from the Company and the Selling Stockholders the
numbers of shares of Common Stock set forth opposite their respective names
below. The Underwriters are committed to purchase and pay for all of such
shares if any are purchased:

<TABLE>
<CAPTION>
NUMBER
UNDERWRITER OF SHARES
----------- ---------
<S> <C>
Robertson, Stephens & Company LLC ............................... 1,765,000
Needham & Company, Inc........................................... 1,765,000
Alex. Brown & Sons Incorporated.................................. 200,000
Lehman Brothers Inc. ............................................ 200,000
The Chicago Corporation.......................................... 150,000
Soundview Financial Group........................................ 150,000
Kaufman Brothers, L.P. .......................................... 120,000
---------
Total.......................................................... 4,350,000
=========
</TABLE>

The Representatives have advised the Company and the Selling Stockholders
that the Underwriters propose to offer shares of Common Stock to the public at
the offering price set forth on the cover page of this Prospectus and to
certain dealers at such price less a concession of not in excess of $.57 per
share, of which $.10 per share may be reallowed to other dealers. After
commencement of the public offering, the public offering price, concession and
reallowance to dealers may be varied by the Representatives. No such reduction
shall change the amount of proceeds to be received by the Company as set forth
on the cover page of the Prospectus.

The Company has granted the Underwriters the option, exercisable during the
30-day period after the date of this Prospectus, to purchase up to 652,500
additional shares of Common Stock at the public offering price less the
underwriting discounts and commissions set forth on the cover page of the
Prospectus. To the extent that the Underwriters exercise such option, each of
the Underwriters will have a firm commitment to purchase approximately the
same percentage of such additional shares as the number of shares of Common
Stock to be purchased by it shown in the above table bears to the total number
of shares of Common Stock offered hereby. The Company will be obligated,
pursuant to such option, to sell such shares to the Underwriters to the extent
such option is exercised. The Underwriters may exercise such option only to
cover over-allotments made in connection with the sale of Common Stock offered
hereby.

The Company and the Selling Stockholders have severally agreed to indemnify
the Underwriters against certain liabilities, including liabilities under the
Securities Act, and to contribute to payments the Underwriters may be required
to make in respect thereof.

Except for the Common Stock to be sold in this offering, the Company has
agreed not to offer, sell or dispose of any Common Stock or any rights to
acquire Common Stock, subject to certain exceptions, prior to the expiration
of 60 days from the date of this Prospectus, without the prior written consent
of Robertson, Stephens & Company LLC. Three officers and one director of the
Company holding an aggregate of approximately 63,598 shares have agreed not to
offer, sell or otherwise dispose in the public market of their shares of
Common Stock owned at the time of this offering during a period of 60 days
following the date of this Prospectus, and certain stockholders of the Company
holding an aggregate of 51,547 shares have agreed in connection with the
Company's initial public offering not to sell, directly or indirectly, any
shares owned by them until July 20, 1996, and certain other stockholders
(including the remaining officers and directors of the Company and Selling
Stockholders) holding an aggregate of 8,988,192 shares have agreed not to sell
any shares owned by them until January 20, 1997, without the prior written
consent of the Company and Robertson, Stephens & Company LLC. See "Shares
Eligible for Future Sale."

73
<PAGE>

The Representatives have informed the Company that they do not intend to
sell the Common Stock to any accounts over which they have discretionary
authority.

The rules of the Securities and Exchange Commission (the "Commission")
generally prohibit the Underwriters and other members of the selling group
from making a market in the Company's Common Stock during the "cooling-off"
period immediately preceding the commencement of sales in the offering. The
Commission has, however, adopted an exemption from these rules that permits
passive market making under certain conditions. These rules permit an
Underwriter or other member of the selling group, if any, to continue to make
a market in the Company's Common Stock subject to the conditions, among
others, that its bid not exceed the highest bid by a market maker not
connected with the offering and that its net purchases on any one trading day
not exceed prescribed limits. Pursuant to these exemptions, certain
Underwriters and other members of the selling group, if any, may engage in
passive market making in the Company's Common Stock during the cooling-off
period.

LEGAL MATTERS

Certain legal matters with respect to the validity of the Common Stock
offered hereby will be passed upon for the Company and certain of the Selling
Stockholders by Pillsbury Madison & Sutro LLP, San Francisco, California, and
for the Underwriters by Brobeck, Phleger & Harrison LLP, Palo Alto,
California. A member of Pillsbury Madison & Sutro LLP is the Secretary of the
Company.

EXPERTS

The financial statements of Etec Systems, Inc. as of July 31, 1994 and July
31, 1995, and for each of the three years in the period ended July 31, 1995
and the financial statements of Polyscan, Inc. as of March 31, 1995 and for
the year then ended, included in this Prospectus have been so included in
reliance on the report of Price Waterhouse LLP, independent accountants, given
on the authority of said firm as experts in auditing and accounting.

CHANGE IN ACCOUNTANTS

Effective April 10, 1995, Price Waterhouse LLP was engaged as the Company's
principal independent accountants. Prior to April 10, 1995, KPMG Peat Marwick
LLP ("KPMG") had been the Company's independent accountants. The decision to
change independent accountants was approved by the Company's Board of
Directors. In the period from August 1, 1993 through April 9, 1995 KPMG issued
no audit report which was qualified or modified as to uncertainty, audit scope
or accounting principles, no adverse opinions or disclaimers of opinion on any
of the Company's financial statements, and there were no disagreements with
KPMG on any matter of accounting principles or practices, financial statement
disclosure, or auditing scope or procedures. KPMG has not audited or reported
on any of the Company's financial statements or information included in this
Prospectus. Prior to April 10, 1995 the Company had not consulted with Price
Waterhouse LLP on items which involved the Company's accounting principles or
the form of audit opinion to be issued on the Company's financial statements.

ADDITIONAL INFORMATION

The Company has filed with the Commission a Registration Statement on Form
S-1 under the Securities Act with respect to the Common Stock offered hereby.
This Prospectus, which constitutes part of the Registration Statement, does
not contain all of the information set forth in the Registration Statement and
the exhibits and schedules thereto. For further information with respect to
the Company and the Common Stock offered hereby, reference is hereby made to
such Registration Statement, exhibits and schedules. Statements contained in
this Prospectus regarding the contents of any contract or other document are
not necessarily complete; with respect to each such contract or document filed
as an exhibit to the Registration Statement, reference is made to the exhibit
for a more complete description of the matter involved, and each such
statement shall be deemed qualified in its entirety by such reference. A copy
of the Registration Statement, including the exhibits and schedules thereto,
may be inspected without charge at the principal office of the Commission, 450
Fifth Street, N.W., Washington, D.C. 20549, and copies of such material may be
obtained from such office upon payment of the fees prescribed by the
Commission.

74
<PAGE>

ETEC SYSTEMS, INC.

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS

<TABLE>
<CAPTION>
PAGE
----
<S> <C>
ETEC SYSTEMS, INC.
Report of Independent Accountants......................................... F-2
Consolidated Balance Sheets at July 31, 1994, July 31, 1995 and April 30,
1996 (unaudited)......................................................... F-3
Consolidated Statements of Operations for the years ended July 31, 1993,
1994 and 1995 and for the nine months ended April 30, 1995 and 1996
(unaudited).............................................................. F-4
Consolidated Statements of Stockholders' Equity (Deficit) for the years
ended July 31, 1993, 1994 and 1995 and for the nine months ended April
30, 1996 (unaudited)..................................................... F-5
Consolidated Statements of Cash Flows for the years ended July 31, 1993,
1994 and 1995 and for the nine months ended April 30, 1995 and 1996
(unaudited).............................................................. F-6
Notes to Consolidated Financial Statements................................ F-7
POLYSCAN, INC.
Report of Independent Accountants......................................... F-23
Balance Sheets at March 31, 1995 and January 31, 1996 (unaudited)......... F-24
Statements of Operations and Accumulated Deficits for the year ended March
31, 1995 and for the ten months ended January 31, 1996 (unaudited)....... F-25
Statements of Cash Flows for the year ended March 31, 1995 and for the ten
months ended January 31, 1996 (unaudited)................................ F-26
Notes to Financial Statements............................................. F-27
PRO FORMA FINANCIAL STATEMENTS (Unaudited)
Pro Forma Consolidated Statement of Operations for the year ended July 31,
1995 with explanatory notes thereon...................................... F-32
Pro Forma Consolidated Statement of Operations for the nine months ended
April 30, 1996 with explanatory notes thereon............................ F-33
</TABLE>

F-1
<PAGE>

REPORT OF INDEPENDENT ACCOUNTANTS

To the Board of Directors and Stockholders
of Etec Systems, Inc.

In our opinion, the accompanying consolidated balance sheets and the related
consolidated statement of operations, stockholders' equity (deficit) and cash
flows present fairly, in all material respects, the financial position of Etec
Systems, Inc. and its subsidiaries at July 31, 1994, and July 31, 1995, and
the results of their operations and their cash flows for each of the three
years in the period ended July 31, 1995 in conformity with generally accepted
accounting principles. These financial statements are the responsibility of
the Company's management; our responsibility is to express an opinion on these
financial statements based on our audits. We conducted our audits of these
statements in accordance with generally accepted auditing standards which
require that we plan and perform the audit to obtain reasonable assurance
about whether the financial statements are free of material misstatement. An
audit includes examining, on a test basis, evidence supporting the amounts and
disclosures in the financial statements, assessing the accounting principles
used and significant estimates made by management, and evaluating the overall
financial statement presentation. We believe that our audits provide a
reasonable basis for the opinion expressed above.

Price Waterhouse LLP

San Jose, California
August 21, 1995

F-2
<PAGE>

ETEC SYSTEMS, INC.

CONSOLIDATED BALANCE SHEETS
(IN THOUSANDS, EXCEPT SHARE AND PER SHARE AMOUNTS)
<TABLE>
<CAPTION>
JULY 31, PRO FORMA
------------------ APRIL 30, APRIL 30,
1994 1995 1996 1996
-------- -------- ----------- -----------
ASSETS (UNAUDITED) (UNAUDITED)
<S> <C> <C> <C> <C>
Current assets:
Cash and cash equivalents........ $ 6,571 $ 23,638 $ 28,031 $ 38,031
Marketable securities............ -- -- 12,965 12,965
Accounts receivable, less
allowance for doubtful accounts
of $1,436, $1,270 and $1,156.... 20,216 24,572 40,638 40,638
Inventory........................ 21,685 24,238 44,032 44,032
Prepaid expenses and other cur-
rent assets..................... 1,329 1,972 1,151 1,151
Deferred tax assets.............. 659 944 16,345 16,345
-------- -------- -------- --------
Total current assets............. 50,460 75,364 143,162 153,162
Property, plant and equipment, net. 8,140 6,474 10,288 10,288
Other assets....................... 4,182 4,146 4,032 4,632
-------- -------- -------- --------
$ 62,782 $ 85,984 $157,482 $168,082
======== ======== ======== ========
LIABILITIES, MANDATORILY REDEEMABLE
CONVERTIBLE PREFERRED STOCK, AND
COMMON STOCKHOLDERS' EQUITY
(DEFICIT)
Current liabilities:
Current maturities of long-term
debt............................ $ 12,441 $ 5,386 $ 1,336 $ 1,336
Accounts payable................. 7,098 6,575 13,380 13,380
Accrued and other liabilities.... 23,324 38,671 51,052 51,052
Taxes payable.................... 1,413 1,517 3,342 3,342
-------- -------- -------- --------
Total current liabilities...... 44,276 52,149 69,110 69,110
Long-term debt, less current
portion........................... 31,251 16,866 7,625 7,625
Deferred gain on sale of asset..... -- 6,015 5,682 5,682
Other liabilities.................. 1,523 1,972 1,688 1,688
-------- -------- -------- --------
Total liabilities.............. 77,050 77,002 84,105 84,105
-------- -------- -------- --------
Minority interest.................. 7,711 -- -- --
-------- -------- -------- --------
Mandatorily redeemable convertible
preferred stock................... 54,362 76,397 -- --
-------- -------- -------- --------
Commitments and Contingencies (Note
11)
Common stockholders' equity
(deficit):
Common Stock, par value $0.01 per
share; 20,000,000 shares
authorized at July 31, 1994 and
1995, 30,000,000 shares
authorized at April 30, 1996;
and 711,171, 910,402 and
18,075,037 issued and
outstanding and 18,575,037 pro
forma........................... 7 9 181 186
Warrants......................... -- 562 496 1,096
Additional paid-in capital....... 324 400 123,176 133,171
Notes receivable from
stockholders.................... (89) (55) (47) (47)
Cumulative translation
adjustment...................... 1,528 2,936 70 70
Accumulated deficit.............. (78,111) (71,267) (50,499) (50,499)
-------- -------- -------- --------
Total common stockholders'
equity (deficit).............. (76,341) (67,415) 73,377 83,977
-------- -------- -------- --------
$ 62,782 $ 85,984 $157,482 $168,082
======== ======== ======== ========
</TABLE>

The accompanying notes are an integral part of these financial statements.

F-3
<PAGE>

ETEC SYSTEMS, INC.

CONSOLIDATED STATEMENTS OF OPERATIONS
(IN THOUSANDS, EXCEPT PER SHARE AMOUNTS)

<TABLE>
<CAPTION>
NINE MONTHS ENDED
YEARS ENDED JULY 31, APRIL 30,
-------------------------- ------------------
1993 1994 1995 1995 1996
-------- ------- ------- -------- --------
(UNAUDITED)
<S> <C> <C> <C> <C> <C>
Revenue:
Products..................... $ 31,650 $40,731 $51,395 $ 38,143 $ 73,983
Services..................... 26,932 27,979 31,521 22,902 24,052
-------- ------- ------- -------- --------
58,582 68,710 82,916 61,045 98,035
-------- ------- ------- -------- --------
Cost of revenue:
Cost of products............. 25,450 25,559 27,015 20,756 37,606
Cost of services............. 16,488 17,670 20,604 14,666 16,794
-------- ------- ------- -------- --------
41,938 43,229 47,619 35,422 54,400
-------- ------- ------- -------- --------
Gross profit................... 16,644 25,481 35,297 25,623 43,635
-------- ------- ------- -------- --------
Operating expenses:
Research, development and
engineering................. 11,034 5,102 10,497 6,952 11,991
Write-off of in-process
technology acquired......... -- -- -- -- 6,269
Selling, general and
administrative.............. 10,049 10,803 13,397 9,194 14,973
-------- ------- ------- -------- --------
21,083 15,905 23,894 16,146 33,233
-------- ------- ------- -------- --------
Income (loss) from operations.. (4,439) 9,576 11,403 9,477 10,402
Interest expense............... (5,880) (5,115) (4,238) (3,369) (1,462)
Other income (expense), net.... 789 (71) 175 (97) 2,143
-------- ------- ------- -------- --------
Income (loss) before income tax
provision (benefit), minority
interest and extraordinary
items......................... (9,530) 4,390 7,340 6,011 11,083
Income tax provision (benefit). 1,500 2,316 2,289 1,600 (11,063)
Minority interest in earnings
of subsidiary................. 379 462 527 393 --
-------- ------- ------- -------- --------
Income (loss) before
extraordinary items........... (11,409) 1,612 4,524 4,018 22,146
Extraordinary gain (loss) on
early extinguishment of debt.. -- -- 5,412 -- (300)
-------- ------- ------- -------- --------
Net income (loss).............. (11,409) 1,612 9,936 4,018 21,846
Accretion of mandatorily
redeemable convertible
preferred stock............... 2,740 2,946 3,092 2,319 1,078
-------- ------- ------- -------- --------
Net income (loss) attributable
to Common Stockholders........ $(14,149) $(1,334) $ 6,844 $ 1,699 $ 20,768
======== ======= ======= ======== ========
Per share data:
Income (loss) before
extraordinary items......... $ (0.94) $ 0.12 $ 0.31 $ 0.28 $ 1.25
Extraordinary gain (loss).... -- -- 0.37 -- (0.02)
-------- ------- ------- -------- --------
Net income (loss)............ $ (0.94) $ 0.12 $ 0.68 $ 0.28 $ 1.23
======== ======= ======= ======== ========
Weighted average common shares. 12,168 14,008 14,594 14,594 17,750
======== ======= ======= ======== ========
</TABLE>

The accompanying notes are an integral part of these financial statements.

F-4
<PAGE>

ETEC SYSTEMS, INC.

CONSOLIDATED STATEMENT OF STOCKHOLDERS' EQUITY (DEFICIT)
(IN THOUSANDS, EXCEPT SHARE AMOUNTS)

<TABLE>
<CAPTION>
COMMON STOCK ADDITIONAL CUMULATIVE
----------------- PAID-IN NOTES TRANSLATION ACCUMULATED
SHARES AMOUNT WARRANTS CAPITAL RECEIVABLE ADJUSTMENT DEFICIT TOTAL
---------- ------ -------- ---------- ---------- ----------- ----------- --------
<S> <C> <C> <C> <C> <C> <C> <C> <C>
Balance at July 31,
1992................... 642,544 $ 6 $ -- $ 270 $ (72) $ 724 $(62,628) $(61,700)
Issuance of Common
Stock.................. 1,473 -- -- 3 (3) -- -- --
Payments on notes
receivable............. -- -- -- -- 14 -- -- 14
Cumulative translation
adjustment............. -- -- -- -- -- 260 -- 260
Accretion of Mandatorily
Redeemable Convertible
Preferred Stock
redemption value....... -- -- -- -- -- -- (2,740) (2,740)
Net loss................ -- -- -- -- -- -- (11,409) (11,409)
---------- ----- ------- -------- ----- ------- -------- --------
Balance at July 31,
1993................... 644,017 6 -- 273 (61) 984 (76,777) (75,575)
Issuance of Common
Stock.................. 67,154 1 -- 29 (23) -- -- 7
Payments on notes
receivable............. -- -- -- 22 (5) -- -- 17
Cumulative translation
adjustment............. -- -- -- -- -- 544 -- 544
Accretion of Mandatorily
Redeemable Convertible
Preferred Stock
redemption value....... -- -- -- -- -- -- (2,946) (2,946)
Net income.............. -- -- -- -- -- -- 1,612 1,612
---------- ----- ------- -------- ----- ------- -------- --------
Balance at July 31,
1994................... 711,171 7 -- 324 (89) 1,528 (78,111) (76,341)
Issuance of Common
Stock.................. 199,231 2 -- 76 -- -- -- 78
Issuance of warrants.... -- -- 562 -- -- -- -- 562
Payments on notes
receivable............. -- -- -- -- 34 -- -- 34
Cumulative translation
adjustment............. -- -- -- -- -- 1,408 -- 1,408
Accretion of Mandatorily
Redeemable Convertible
Preferred Stock
redemption value....... -- -- -- -- -- -- (3,092) (3,092)
Net income.............. -- -- -- -- -- -- 9,936 9,936
---------- ----- ------- -------- ----- ------- -------- --------
Balance at July 31,
1995................... 910,402 9 562 400 (55) 2,936 (71,267) (67,415)
Stock offering
(unaudited)............ 4,471,667 45 -- 40,696 -- -- -- 40,741
Shares issued in
conjunction with the
Polyscan acquisition
(unaudited)............ 350,000 4 -- 3,496 -- -- -- 3,500
Issuance of warrants
(see Note 5)
(unaudited)............ -- -- 1,031 -- -- -- -- 1,031
Exchange of Ateq stock
for Common Stock
(unaudited)............ 66,915 -- -- -- -- -- -- --
Accretion of Mandatorily
Redeemable Convertible
Preferred Stock
(unaudited)............ -- -- -- -- -- -- (1,078) (1,078)
Conversion of
Mandatorily Redeemable
Convertible Preferred
Stock (unaudited)...... 11,747,057 118 -- 77,357 -- -- -- 77,475
Payments on notes
receivable (unaudited). -- -- -- -- 8 -- -- 8
Cumulative translation
adjustment (unaudited). -- -- -- -- -- (2,866) -- (2,866)
Issuance under stock
plans (unaudited)...... 93,988 1 -- 134 -- -- -- 135
Exercise of warrants
(unaudited)............ 435,008 4 (1,097) 1,093 -- -- -- --
Net income (unaudited).. -- -- -- -- -- -- 21,846 21,846
---------- ----- ------- -------- ----- ------- -------- --------
Balance at April 30,
1996 (unaudited)....... 18,075,037 $ 181 $ 496 $123,176 $ (47) $ 70 $(50,499) $ 73,377
========== ===== ======= ======== ===== ======= ======== ========
</TABLE>

The accompanying notes are an integral part of these consolidated financial
statements.

F-5
<PAGE>

ETEC SYSTEMS, INC.

CONSOLIDATED STATEMENTS OF CASH FLOWS
(IN THOUSANDS, EXCEPT SHARE AMOUNTS)

<TABLE>
<CAPTION>
NINE MONTHS ENDED
YEARS ENDED JULY 31, APRIL 30,
--------------------------- -------------------
1993 1994 1995 1995 1996
-------- ------- -------- -------- ---------
(UNAUDITED)
<S> <C> <C> <C> <C> <C>
Cash flows from operating
activities:
Net income (loss)........... $(11,409) $ 1,612 $ 9,936 $ 4,018 $ 21,846
Adjustments to reconcile
net income (loss) to net
cash (used in) provided by
operating activities:
Extraordinary (gain) loss
on early extinguishment
of debt.................. -- -- (5,412) -- 300
Write-off of in-process
technology acquired...... -- -- -- -- 6,269
Depreciation and
amortization............. 4,605 3,790 2,951 2,456 2,165
Deferred taxes............ (547) (103) (442) (580) (15,401)
Provision for doubtful
accounts................. 950 74 -- 100 --
Minority interest in
earnings of subsidiary... 379 462 527 393 --
Changes in assets and
liabilities:
Accounts receivable..... 5,506 (4,676) (2,745) (3,374) (19,512)
Inventory............... 5,466 7,890 (3,217) 516 (17,473)
Prepaid expenses and
other assets........... 595 (1,347) (18) 1,785 1,216
Accounts payable........ (3,865) (2,703) (1,178) (4,726) 6,786
Accrued and other
liabilities............ 10,346 (1,425) 8,697 2,430 9,285
-------- ------- -------- -------- ---------
Net cash (used in)
provided by operating
activities............. 12,026 3,574 9,099 3,018 (4,519)
-------- ------- -------- -------- ---------
Cash flows from investing
activities:
Purchase of marketable
securities, net............ -- -- -- -- (12,965)
Loan to Polyscan, Inc, net
and other.................. -- -- (825) -- (637)
Proceeds from sale of
plant...................... -- -- 10,969 10,969 --
Capital expenditures for
property and equipment..... (656) (1,957) (2,915) (1,365) (7,947)
-------- ------- -------- -------- ---------
Net cash provided by (used
in) investing activities. (656) (1,957) 7,229 9,604 (21,549)
-------- ------- -------- -------- ---------
Cash flows from financing
activities:
Repayment of debt and
capital leases............. (5,208) (2,850) (6,169) (6,126) (13,099)
Financing from (repayment
to) a related party........ (834) 507 6,219 (2,575) 3,497
Proceeds from issuance of
Common Stock............... 14 24 112 88 40,884
-------- ------- -------- -------- ---------
Net cash provided by (used
in) financing activities. (6,028) (2,319) 162 (8,613) 31,282
-------- ------- -------- -------- ---------
Effect of exchange rate
changes on cash............ (27) 39 577 674 (821)
-------- ------- -------- -------- ---------
Net change in cash and cash
equivalents................ 5,315 (663) 17,067 4,683 4,393
Cash and cash equivalents
at beginning of the
period..................... 1,919 7,234 6,571 6,571 23,638
-------- ------- -------- -------- ---------
Cash and cash equivalents
at the end of the period... $ 7,234 $ 6,571 $ 23,638 $ 11,254 $ 28,031
======== ======= ======== ======== =========
Supplemental disclosures of
cash flow information:
Cash paid during the period
for interest............... $ 3,431 $ 3,827 $ 3,342 $ 2,840 $ 1,552
======== ======= ======== ======== =========
Cash paid during the period
for income taxes........... $ 462 $ 2,559 $ 2,831 $ 2,439 $ 2,513
======== ======= ======== ======== =========
Supplemental schedule of
noncash financing
activities:
Conversion of Senior
subordinated debt into
mandatorily redeemable
convertible preferred
stock...................... $ -- $ 7,099 $ 10,564 $ -- $ --
======== ======= ======== ======== =========
Conversion of mandatorily
redeemable convertible
preferred stock to Common
Stock...................... $ -- $ -- $ -- $ -- $ 77,475
======== ======= ======== ======== =========
Acquisition of
substantially all assets
and certain liabilities of
Polyscan, Inc. in exchange
for 350,000 shares of
Common Stock............... $ -- $ -- $ -- $ -- $ 3,500
======== ======= ======== ======== =========
</TABLE>

The accompanying notes are an integral part of these financial statements

F-6
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

NOTE 1--THE COMPANY AND ITS SIGNIFICANT ACCOUNTING POLICIES:

Etec Systems, Inc. (the "Company") designs, develops, manufactures, markets
and services electron beam and laser beam pattern generation equipment for the
semiconductor industry. The Company has operations in the United States,
Japan, Korea, Germany and France. The Company operates in one industry
segment.

Certain Equity Transactions

The pro forma presentation reflects the issuance of 500,000 new shares at a
purchase price of $20.00 per share to an investor in the fourth quarter of
fiscal 1996 and the commitment to issue warrants to purchase an additional
75,000 shares of Common Stock to such investor. The pro forma effect of this
transaction is unaudited and has been reflected on the accompanying
consolidated balance sheet at April 30, 1996. See Note 14.

Basis of Presentation

The consolidated financial statements include the accounts of the Company
and all of its subsidiaries. Intercompany transactions and balances are
eliminated in consolidation. Accounts denominated in foreign currencies are
translated using the foreign currencies as the functional currencies. Assets
and liabilities of foreign operations are translated to U.S. dollars at
current rates of exchange and revenue and expenses are translated using
weighted average rates. Gains and losses from foreign currency translations
are included as a separate component of stockholders' equity (deficit).
Foreign currency transactions gains and losses are included as a component of
other income (expense), net. Such gains and losses have not been significant.

For the purposes of presentation, the Company has indicated its interim
fiscal periods as ending on April 30, 1995 and 1996. As the Company's annual
fiscal period is accounted for on a 52-53 week year, the interim period
financial statements included herein represent interim results through April
28, 1995 and April 26, 1996, respectively.

These financial statements have been prepared on the accrual basis of
accounting in accordance with generally accepted accounting principles. This
requires management to make estimates and assumptions that affect the reported
amounts of assets and liabilities and disclosures of contingent assets and
liabilities at the date of the financial statements and the reported amounts
of revenues and expenses during the reporting periods. Actual results could
vary from those estimates.

Interim Results (Unaudited)

The accompanying balance sheet at April 30, 1996 and the statements of
operations, stockholders' equity and cash flows for the nine-month periods
ended April 30, 1995 and April 30, 1996, are unaudited. In the opinion of
management, these statements have been prepared on the same basis as the
audited financial statements and include all adjustments, consisting of normal
recurring adjustments, necessary for the fair statement of the results for the
interim periods. The results of operations and cash flows for the interim
periods are not necessarily indicative of the results to be expected for any
interim period or for the year ending July 31, 1996.

Revenue Recognition

Product revenue is generally recognized upon shipment. A provision for
installation and estimated future warranty costs is recorded at the time
revenue is recognized. Revenue associated with retrofitting machines is
generally recognized upon completion of the retrofit. Service revenue is
deferred and is recognized on a straight-line basis over the service period of
the related contract.

F-7
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

Cash Equivalents and Marketable Securities

The Company considers all highly liquid debt instruments having a maturity
of three months or less on the date of purchase to be cash equivalents.

The Company has classified all investments as available for sale.
Investments classified as available for sale are recorded at fair value and
any temporary difference between an investment's cost and its fair value is
recorded as a separate component of stockholders' equity.

At April 30, 1996, the fair value of the Company's investments approximated
cost. At April 30, 1996, $21.0 million of investments are included in cash and
cash equivalents on the balance sheet. The investment portfolio at April 30,
1996 is comprised of investments in commercial paper, money market funds, U.S.
Government obligations, and corporate debentures.

The Company manages its cash equivalents and short-term investments in a
single portfolio of highly marketable securities, all of which are intended to
be available to meet the Company's current cash requirements.

Inventory

Inventory is stated at the lower of cost or market, with cost being
determined under the first-in, first-out method.

Depreciation and Amortization

Property, plant and equipment are stated at cost less accumulated
depreciation. Depreciation is calculated using the straight-line method over
the estimated useful lives of the assets, which range from three to ten years
for furniture, fixtures, and equipment. Assets held under capital leases are
amortized using the straight-line method over the shorter of their estimated
useful life of three to five years or the term of the related lease. Leasehold
improvements are amortized over the term of the related lease or the estimated
useful life, if shorter.

Capitalization of Software

The Company capitalizes substantially all costs related to the purchase of
software and its implementation which include purchased software, hardware,
consulting fees, and use of certain specified Company resources. As of April
30, 1996, $1.6 million of the software had been capitalized and is included in
machinery and equipment.

Research, Development and Engineering

Research, development and engineering costs are expensed as incurred. As
more fully described in Note 8, the Company is party to certain research and
development contracts which provide for partial funding of certain research,
development and engineering costs. Amounts funded under these contracts, which
are generally best efforts contracts, are recognized as cost is incurred. In
the aggregate, the Company has received funding of approximately $11.0
million, $16.1 million and $7.3 million during the year ended July 31, 1993,
1994 and 1995, respectively and $6.7 million and $725,000 for the nine months
ended April 30, 1995 and 1996, respectively. The Company has recorded
approximately $9.3 million, $13.9 million and $6.1 million of this funding as
an offset to research, development and engineering costs during the year ended
July 31, 1993, 1994 and 1995 and $5.5 million and $725,000 during the nine
months ended April 30, 1995 and 1996. The Company has recorded approximately
$1.7 million, $2.2 million and $1.2 million, respectively, as an offset to
selling, general and administrative expenses during the year ended July 31,
1993, 1994 and 1995.

F-8
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

Income Taxes

The Company accounts for income taxes in accordance with the liability
approach.

Off-Balance Sheet Risk and Concentrations of Credit Risk

Financial instruments which potentially subject the Company to
concentrations of credit risk consist principally of temporary cash
investments, marketable securities and accounts receivable. The Company places
its temporary cash investments and marketable securities with financial
institutions and other creditworthy issuers and limits the amount of credit
exposure to any one party.

The Company's accounts receivable are derived primarily from sales to
customers located in the U.S., Europe, and the Far East. The Company performs
ongoing credit evaluations of its customers. Additionally, prior to shipment
of systems, the Company receives payment of a significant portion of the
system sales price. Write-offs during the periods presented have been
insignificant.

Sales to the Company's ten largest customers accounted for approximately
79%, 76%, 74% and 80% of revenues in fiscal 1993, fiscal 1994, fiscal 1995 and
the nine months ended April 30, 1996.

At July 31, 1994, outstanding receivables from three customers represented
20%, 14% and 13%, respectively, of the Company's accounts receivable. At July
31, 1995, outstanding receivables from two customers represented 29% and 28%,
respectively, of the Company's accounts receivable. At April 30, 1996,
outstanding receivables from four customers represented 21%, 21%, 20% and 10%,
respectively, of the Company's accounts receivable.

Net Income (Loss) Per Share

Net income (loss) per share is computed using the weighted average number of
common and common equivalent shares outstanding during the period. Common
equivalent shares for the nine months ended April 30, 1996 consist of stock
options and warrants using the treasury stock method except when antidilutive.
Common equivalent shares for the years ending July 31, 1993, 1994 and 1995 and
the nine months ended April 30, 1995 consist of common stock issuable upon the
conversion of the Company's Series B, C, D and E mandatorily redeemable
convertible preferred stock using the as if converted method and the exercise
of stock options and warrants using the treasury stock method, except when
antidilutive. Pursuant to the requirements of the Securities and Exchange
Commission, common stock equivalent shares relating to stock options and
warrants using the treasury stock method, and the mandatorily redeemable
convertible preferred stock using the as if converted method, issued
subsequent to July 31, 1994 through the IPO date, are included in the
computation of net income (loss) per share for the years ending July 31, 1993,
1994 and 1995 and the nine months ended April 30, 1995, as if they were
outstanding for the entire period.

F-9
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

NOTE 2--BALANCE SHEET COMPONENTS:

<TABLE>
<CAPTION>
JULY 31,
---------------- APRIL 30,
1994 1995 1996
------- ------- -----------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C> <C>
Inventory:
Purchased parts............................ $ 4,127 $ 5,703 $13,253
Work-in-process............................ 11,398 10,855 20,309
Finished parts and assemblies.............. 6,160 7,680 10,470
------- ------- -------
$21,685 $24,238 $44,032
======= ======= =======
Property, plant and equipment:
Land....................................... $ 863 $ -- $ --
Buildings.................................. 4,102 693 1,849
Machinery and equipment.................... 11,964 14,938 18,768
------- ------- -------
16,929 15,631 20,617
Less accumulated depreciation.............. (8,789) (9,157) (10,329)
------- ------- -------
$ 8,140 $ 6,474 $10,288
======= ======= =======
Accrued and other liabilities:
Customer advances.......................... $ 3,785 $12,898 $22,107
Accrued employee costs..................... 3,355 4,362 4,699
Accrued warranty and installation.......... 2,459 2,960 4,982
Deferred service revenue................... 2,510 1,066 629
Payable to related party................... 3,550 8,936 11,405
Other accrued liabilities.................. 7,665 8,449 7,230
------- ------- -------
$23,324 $38,671 $51,052
======= ======= =======
</TABLE>

NOTE 3--LONG-TERM DEBT:

<TABLE>
<CAPTION>
JULY 31,
--------------- APRIL 30,
1994 1995 1996
------- ------- -----------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C> <C>
Long-term debt:
Senior secured notes payable................ $24,864 $18,706 $8,961
Senior subordinated notes payable to Perkin-
Elmer...................................... 11,683 1,979 --
Senior subordinated note payable to IBM..... 7,145 1,567 --
------- ------- ------
Total debt.................................. 43,692 22,252 8,961
Less current maturities..................... 12,441 5,386 1,336
------- ------- ------
$31,251 $16,866 $7,625
======= ======= ======
</TABLE>

Senior Secured Notes Payable

The senior secured notes payable of approximately $9.0 million bears
interest at 10.65% per annum which is payable quarterly. The note is secured
by substantially all of the Company's assets. The note is payable in
installments over the next four fiscal years. The terms of the senior secured
note payable require

F-10
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

the Company to comply with certain financial and restrictive covenants
including maintenance of certain financial ratios and minimum net worth
criteria and restrictions on capital expenditures, indebtedness and dividends.
The Company was in compliance with the covenants as of April 30, 1996.

In February 1995, as part of a sale and leaseback of its Hayward, California
facility, the Company entered into an excess cash sharing agreement with the
holders of the senior secured notes. This agreement required that the Company
make an annual prepayment on its senior secured notes equal to 50% of its
"excess cash," which, as defined in the agreement, is based on the Company's
financial performance during the fiscal year and its cash balance at the end
of the year. At July 31, 1995, there was no payment due under this agreement.
The $5.0 million prepayment on the Company's senior secured debt in January
1996 satisfied any excess cash payment that would have been due under the
agreement at July 31, 1996.

Minimum annual repayments of the senior secured notes payable are as follows
(in thousands):

<TABLE>
<S> <C>
Three months ending July 31, 1996.................................. $ 191
Fiscal year ending:
1997............................................................. 1,832
1998............................................................. 2,750
1999............................................................. 2,750
2000............................................................. 1,438
------
$8,961
======
</TABLE>

Senior Subordinated Notes Payable

In July 1995, IBM and Perkin-Elmer, holders of the Company's senior
subordinated notes payable and mandatorily redeemable convertible preferred
stock, exchanged approximately $7.1 million and $12.6 million of their senior
subordinated notes and accrued interest for 40,251 and 65,390 shares,
respectively, of Series B mandatorily redeemable convertible preferred stock
and approximately $1.6 million and $2.0 million, respectively, of senior
subordinated notes payable. These notes bore interest at 12% and 10.3%,
respectively. As a result of this transaction, the Company recorded an
extraordinary gain, net of tax, of approximately $5.4 million. In computing
the gain, management estimated that the fair value of the senior subordinated
notes at the date of the exchange was approximately $14.2 million reflecting
the present value of future obligations discounted at approximately 15% to
16%. The discount rate reflects management's estimate of fair market rates for
high yield, private debt issuances at the time. The fair value of the debt
resulted in an implied value of the Series B mandatorily redeemable
convertible preferred stock at the date of the exchange of approximately $4.88
per common share equivalent.

The Series B mandatorily redeemable convertible preferred stock was
converted upon the closing of the initial public offering on October 24, 1995,
into 825,660 and 1,341,331 shares of common stock, respectively. The notes
were repaid in October 1995.

F-11
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

NOTE 4--MANDATORILY REDEEMABLE CONVERTIBLE PREFERRED STOCK:

As of July 31, 1995, the Company had issued and outstanding a total of
572,672 shares of mandatorily redeemable convertible preferred stock, par
value $0.01 per share, as follows:

<TABLE>
<CAPTION>
JULY 31,
-----------------------
1993 1994 1995
------- ------- -------
(IN THOUSANDS)
<S> <C> <C> <C>
Series B, 260,000 shares designated, issued and
outstanding in 1993 and 1994; 365,641 shares
designated, issued and outstanding at July 31,
1995............................................. $33,323 $35,465 $48,172
Series C, 86,400 shares designated, 81,278 shares
issued and outstanding........................... 10,996 11,593 12,190
Series D, 50,000 shares designated, issued and
outstanding...................................... -- 7,304 7,656
Series E, 75,753 shares designated, issued and
outstanding...................................... -- -- 8,379
------- ------- -------
$44,319 $54,362 $76,397
======= ======= =======
</TABLE>

All of the series of mandatorily redeemable convertible preferred stock were
converted upon completion of the initial public offering on October 24, 1995
into 11,747,057 common shares.

NOTE 5--STOCKHOLDERS' EQUITY:

Warrants

In fiscal 1992, in conjunction with the acquisition of the assets and
liabilities of ATEQ Corporation, the Company issued warrants to purchase 67
and 2,159 shares of Series C mandatorily redeemable convertible preferred
stock at an exercise price of $100 and $0.01 per share, respectively. Upon
completion of the initial public offering these warrants were exchanged for
warrants to purchase common stock. At April 30, 1996, 52 and 659 of these
warrants are exercisable into 1,064 and 13,515 shares of Common Stock,
respectively. These warrants expire on October 14, 1996 and on October 14,
2001, respectively.

In February 1995, in conjunction with entering into a sale and leaseback
agreement (Note 11), the Company issued the lessor a warrant to purchase
159,314 shares of the Company's Common Stock at $0.45 per share. Additionally,
the Company issued to the bank providing mortgage financing to the lessor a
warrant to purchase 53,104 shares of Common Stock at $0.45 per share. These
warrants expire on November 15, 2003. The value assigned to these warrants is
being amortized over the lease period, which is 15 years, and is not material.

During fiscal 1992 and 1993, the Company issued warrants to Cigna to
purchase 307,341 and 21,875 shares of the Company's common stock at $0.70 per
share, respectively, in connection with its senior secured notes. During the
nine months ended April 30, 1996, Cigna received the right to acquire 105,794
additional shares of Common Stock pursuant to the terms of the Warrant
Agreement. Subsequently, in February 1996, 435,008 shares of Common Stock were
issued upon exercise of such warrants for an aggregate exercise price of and
proceeds to the Company in the amount of $230,000.

F-12
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

Debt issuance costs in the amount of $1.1 million were recorded upon the
issuance of warrants which are being amortized over the remaining term of the
senior secured notes. During the second quarter of fiscal 1996, the Company
made a $5.0 million prepayment on its outstanding debt resulting in the
accelerated amortization of deferred financing costs and recognition of an
extraordinary loss in the amount of $300,000.

In fiscal 1995, the Company also issued a warrant to purchase 150,000 shares
of the Company's Common Stock at an exercise price of $1.70 per share. (See
Note 10--Related Party Transactions.)

NOTE 6--INCOME TAXES:

The components of income (loss) before provision for income taxes and
minority interest are as follows:

<TABLE>
<CAPTION>
YEAR ENDED JULY 31,
--------------------------
1993 1994 1995
-------- ------- -------
(IN THOUSANDS)
<S> <C> <C> <C>
Domestic.......................................... $(12,950) $ (353) $ 3,401
Foreign........................................... 3,420 4,743 3,939
-------- ------- -------
$ (9,530) $ 4,390 $ 7,340
======== ======= =======
</TABLE>

The component of the provision for income taxes are as follows:

<TABLE>
<CAPTION>
YEAR ENDED JULY 31,
------------------------
1993 1994 1995
------ ------- -------
(IN THOUSANDS)
<S> <C> <C> <C>
Current:
U.S.............................................. $ -- $ 5 $ 200
Foreign.......................................... 2,046 2,359 2,481
State............................................ 1 55 50
------ ------- -------
2,047 2,419 2,731
Deferred:
Foreign.......................................... (547) (103) (442)
------ ------- -------
Provision for income taxes......................... $1,500 $ 2,316 $ 2,289
====== ======= =======
</TABLE>

The provision for income taxes differs from the amount computed by applying
the statutory U.S. federal income tax rate as follows (in thousands):

<TABLE>
<CAPTION>
JULY 31,
-------------------------
1993 1994 1995
-------- ------- -------
(IN THOUSANDS)
<S> <C> <C> <C>
Tax provision (benefit) at U.S. statutory rate.. $ (3,240) $ 1,493 $ 2,496
State income taxes, net of federal income tax
benefit........................................ -- 36 33
Purchase accounting adjustments resulting from
differences between tax basis and book basis of
assets acquired................................ 1,248 -- --
Change in the valuation allowance............... 3,156 -- (1,182)
Foreign earnings taxed at higher rates.......... 336 644 700
Alternative minimum tax and other............... -- 143 242
-------- ------- -------
Total......................................... $ 1,500 $ 2,316 $ 2,289
======== ======= =======
</TABLE>

The Company recorded a tax benefit of $11.1 million for the nine months
ended April 30, 1996. The benefit reflects the release in the third fiscal
quarter of $15.4 million of valuation allowances previously recorded against

F-13
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

the Company's deferred tax assets. Management's evaluation of the
recoverability of the Company's deferred tax assets is based in part upon the
current product backlog and its ability to increase manufacturing capacity.
Management has fully reserved deferred tax assets which may be realized beyond
the ensuing twelve-month period because of the uncertainty regarding their
realization. The provision for income taxes for the nine months ended
April 30, 1996 otherwise includes taxes on foreign earnings as the Company
continues to utilize net operating loss ("NOL") carryforwards in the U.S.

The components of deferred taxes are as follows:

<TABLE>
<CAPTION>
JULY 31,
---------------------------- APRIL 30,
1993 1994 1995 1996
-------- -------- -------- -----------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C> <C> <C>
Current:
Nondeductible accruals and
reserves...................... $ 12,774 $ 12,547 $ 11,229 $14,762
Uniform capitalization
adjustment to inventory....... 1,121 1,542 1,536 1,667
Revenue recognized for tax
return purposes and deferred
for financial statements...... 893 1,028 2,031 324
Net operating loss
carryforward.................. -- -- -- 9,552
Valuation allowance............ (14,115) (14,458) (13,852) (9,960)
-------- -------- -------- -------
Net current deferred tax asset. 673 659 944 16,345
-------- -------- -------- -------
Noncurrent:
Book depreciation in excess of
tax depreciation.............. 3,050 3,037 4,609 3,790
Net operating loss
carryforwards................. 21,482 21,228 14,743 --
Other.......................... 393 655 1,110 899
Valuation allowance............ (24,644) (24,522) (19,907) (4,134)
-------- -------- -------- -------
Net noncurrent deferred tax
asset......................... 281 398 555 555
-------- -------- -------- -------
Net deferred tax asset....... $ 954 $ 1,057 $ 1,499 $16,900
======== ======== ======== =======
</TABLE>

At April 30, 1996, the Company had NOL carryforwards for federal income tax
purposes of approximately $27.3 million. These carryforwards, if not utilized
to offset future taxable income and income taxes payable, will expire at
various dates through the year 2009. Additionally, under the Tax Reform Act of
1986, the amount of the benefit from NOL carryforwards may be impaired or
limited in certain circumstances, including a cumulative stock ownership
change of more than 50% over a three-year period. The completion of the
Company's proposed public offering will result in a cumulative change in
ownership of the Company in excess of 50% and as a consequence the utilization
of NOLs will be subject to limitation.

NOTE 7--MINORITY INTEREST:

In July 1991, the Company sold 225 newly-issued shares of common stock of
its Japanese subsidiary (Etec Japan) for approximately $4.8 million and a note
for $188,000. The minority holding represented approximately 18% of the
outstanding shares of Etec Japan. Pursuant to the sale agreement, on July 31,
1995, minority stockholders were entitled to elect to have the Company
repurchase their shares at the original purchase price plus interest which was
defined in the agreement as being the Japanese bank long-term interest rate
plus one percent.

On July 31, 1995, the minority interest investors exchanged their minority
interest in Etec Japan for 75,753 shares of Series E mandatorily redeemable
convertible preferred stock and a payment to one of the holders, who is a
director of the Company, of approximately $400,000 which was paid in the first
quarter of

F-14
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

fiscal 1996. This transaction was accounted for under the purchase method of
accounting resulting in the elimination of the minority liability and the
creation of $350,000 of goodwill which is being amortized over seven years.
There were no other significant effects from this transaction. Upon completion
of the initial public offering, the 75,753 shares of Series E mandatorily
redeemable convertible preferred stock were converted to 1,553,898 shares of
common stock.

NOTE 8--RESEARCH, DEVELOPMENT AND ENGINEERING CONTRACTS:

In November 1992, the Company entered into a cost reimbursement research and
development contract with ARPA/NAVAIR under which the Company was entitled to
receive approximately $22 million. In connection with this contract, funding
in the amount of approximately $6.0 million, $10.3 million, $5.7 million and
$5.7 million was recognized and billed during the years ended July 31, 1993,
1994 and 1995, and the nine months ended April 30, 1995. The Company did not
receive any funding under this contract during the nine months ended April 30,
1996. The Company also received $400,000 from ARPA/NAVAIR under another
contract during the year ended July 31, 1993. Costs incurred during each of
these periods approximated billings and are included in research, development
and engineering and general and administrative expenses.

During the years ended July 31, 1993, 1994 and 1995, and the nine months
ended April 30, 1996, the Company performed research and development under
several cooperative development agreements. These agreements provide for
payments upon the Company's achievement of specified milestones. Funding for
these contracts was $4.6 million, $5.8 million and $1.6 million and $1 million
and $725,000 during the years ended July 31, 1993, 1994 and 1995, and the nine
months ended April 30, 1995 and 1996, respectively. Costs of approximately
$12.8 million, $7.5 million and $3.8 million and $2.6 million and $2.9 million
for these projects were included in research and development expense during
the years ended July 31, 1993, 1994 and 1995, and the nine months ended
April 30, 1995 and 1996, respectively.

Etec Polyscan, Inc. ("Etec Polyscan"), a wholly owned subsidiary of the
Company, has a cost reimbursement research and development contract with the
United States Department of Defense, Advanced Research Projects Agency
("ARPA"), pursuant to which Etec Polyscan is entitled to receive approximately
$3.9 million. Funding is due in three phases with approximately $1.2 million,
$1.4 million and $1.3 million being due for each of the respective phases.
There are deliverables at the end of each phase. As of April 30, 1996. Etec
Polyscan is in the process of completing phase I and had received
approximately $1.2 million in funding and is awaiting approval from ARPA for
phase II. Approximately $1.2 million in funding which had been received as of
the date of the acquisition of Polyscan, Inc. has been deferred and is
included in accrued and other liabilities. Since the date of the acquisition,
the Company has incurred costs of $411,000 under this development contract.

In February 1996, Etec Polyscan was authorized to proceed and incur costs of
$207,000 by MCM-D Consortium in anticipation of the Consortium being awarded a
contract to be funded by ARPA to develop technology for a large format
maskless exposure system. As of April 30, 1996, no costs have been incurred
under this agreement.

NOTE 9--EMPLOYEE BENEFIT PLANS:

Employee Stock Option Plan

Under the Company's 1990 Employee Stock Option Plan, options to purchase
600,000 shares of Common Stock may be granted. The plan provides that options
may be granted at a price not less than the fair value of a share at the date
of grant. Options generally vest annually over a four-year period and expire
over terms not exceeding ten years.

F-15
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

In fiscal 1994, the Company adopted the 1994 Employee Stock Option Plan.
Under this plan, options to purchase 448,374 shares of Common Stock may be
granted. This Plan provides that options may be granted at a price not less
than the fair value of a share at the date of grant except in the case of
employees owning more than 10 percent of the total combined voting of all
classes of outstanding stock of the Company or any of its subsidiaries whereby
the option price must be at least 110 percent of the fair market value.
Options generally vest annually over a four-year period and expire over terms
not exceeding 10 years.

In fiscal 1995, the Company's Board of Directors approved the 1995 Omnibus
Incentive Plan. Under this plan options to purchase 1,000,000 shares of Common
Stock may be granted. Options vest annually over a period not to exceed five
years and expire over terms not exceeding ten years, except that options
granted to an employee who owns more than 10% of the total combined voting
power of all classes of outstanding stock of the Company expire five years
from the date of grant.

In addition, the Company has granted options to purchase 39,403 shares of
Common Stock under certain other option agreements.

Executive Stock Plan

Under the Company's 1990 Executive Stock Plan, options to purchase 884,959
shares of Common Stock may be granted. The Plan provides that options may be
granted at a price not less than the fair value of a share at the date of
grant. Options generally vest annually over a three-year period and expire
over terms not exceeding ten years.

Directors' Stock Option Plan

In fiscal 1995, the Company adopted a 1995 Directors' Stock Option Plan.
Under this plan options to purchase 150,000 shares of Common Stock may be
granted. The plan provides that options may be granted at a price not less
than the fair value of a share at the date of grant. Under this plan, each
non-employee director will receive a one-time grant upon joining the Board of
Directors and annual grants upon the anniversary of the initial grant. The
initial grants vest in two installments, with half of the shares vesting six
months after the grant date and the other half vesting on the first
anniversary of the grant date. Annual grants vest on the first anniversary of
the respective grant date.

Employee Stock Purchase Plan

In July 1995, the Company's Board of Directors approved the 1995 Employee
Stock Purchase Plan. Under this plan, employees of the Company can purchase
common stock through payroll deductions. A total of 500,000 shares have been
reserved for issuance under this plan. As of April 30, 1996, 13,934 shares
have been purchased under the Employee Stock Purchase Plan.

F-16
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

A summary of activity for the Employee, Executive and Directors' Stock
Option Plans follows:

<TABLE>
<CAPTION>
OPTIONS
AVAILABLE OPTIONS EXERCISE
FOR GRANT OUTSTANDING PRICE
---------- ----------- -------------
<S> <C> <C> <C>
Outstanding, July 31, 1992............ 792,840 586,452 $ 0.45
---------- --------- -------------
Granted............................... (244,187) 244,187 $ 0.45
Canceled.............................. 34,971 (34,971) $ 0.45
Exercised............................. -- (1,473) $ 0.45
---------- --------- -------------
Outstanding, July 31, 1993............ 583,624 794,195 $ 0.45
Granted............................... (1,011,527) 1,011,527 $ 0.45
Canceled.............................. 691,430 (691,430) $ 0.45
Repurchased........................... 89,446 -- $ 0.45
Exercised............................. -- (156,600) $ 0.45
---------- --------- -------------
Outstanding, July 31, 1994............ 352,973 957,692 $ 0.45
Additional options authorized......... 1,150,000 --
Granted............................... (565,406) 565,406 $0.45- $ 5.40
Canceled.............................. 71,520 (71,520) $ 0.45
Repurchased........................... 107,415 -- $ 0.45
Exercised............................. -- (306,646) $ 0.45
---------- --------- -------------
Outstanding, July 31, 1995............ 1,116,502 1,144,932 $0.45- $ 5.40
Granted............................... (387,531) 387,531 $7.20- $17.88
Canceled.............................. 17,222 (17,222) $0.45- $13.75
-------------
Exercised............................. -- (51,008) $ 0.45
---------- --------- -------------
Outstanding, April 30, 1996........... 746,193 1,464,233 $0.45- $17.88
========== ========= =============
</TABLE>

At July 31, 1994, July 31, 1995, and April 30, 1996 exercisable options were
404,925, 412,426 and 480,965 respectively.

401(k) Plan

On June 15, 1990, the Company adopted a 401(k) savings plan. The Plan covers
all eligible employees with more than three months of service. The Company
contributed $145,000, $151,000 and $173,000 to the Plan during the years ended
July 31, 1993, 1994 and 1995, respectively and $127,000 and $133,000 during
the nine months ended April 30, 1995 and 1996, respectively.

NOTE 10--RELATED PARTY TRANSACTIONS:

In March 1990, the Company entered into an inventory component purchasing
agreement with Grumman, one of the former holders of its Series B mandatorily
redeemable convertible preferred shares, pursuant to which the Company
committed to purchase specified quantities of components from Grumman upon
achieving certain sales levels. In fiscal 1992, Grumman billed the Company
$1.4 million under this agreement. The Company disputed the appropriateness of
this billing, but paid Grumman $1.0 million in fiscal 1993. Grumman continued
to maintain that the Company had not satisfied its obligations under the
agreement. In fiscal 1995, the Company and Grumman entered into an agreement
under which Grumman released the Company from all obligations under the 1990
inventory purchase agreement and the Company issued to Grumman a warrant to
purchase 150,000 shares of the Company's Common Stock at an exercise price of
$1.70 per share.

The Company paid approximately $400,000, $1.8 million and $800,000 in fiscal
1993, 1994 and 1995, respectively, and $800,000 during the nine months ended
April 30, 1995, for services provided in conjunction

F-17
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

with the research and development contract with ARPA/NAVAIR to a party which
held shares of the Company's Series B and D mandatorily redeemable convertible
preferred shares until October 1995, at which time all such shares were
converted into shares of Common Stock. No such services were provided to the
Company during the nine months ended April 30, 1996.

In fiscal 1994, the Company purchased approximately $590,000 of pattern
memory boards, beam sequencers and other related materials from a party which
at that time held shares of the Company's Series B mandatorily redeemable
convertible preferred stock.

In fiscal 1995 and during the nine months ended April 30, 1996, the Company
purchased masks for use by the Company in the development of new products for
approximately $200,000 and $180,000, respectively from a party which held
shares of the Company's Series B mandatorily redeemable convertible preferred
stock until October 1995, at which time such shares were converted into Common
Stock.

Sales to related parties included in product and service revenue in fiscal
1993, 1994 and 1995 are approximately $15 million, $15 million and $13
million, respectively and $11 million and $6.2 million during the nine months
ended April 30, 1995 and 1996, respectively.

In fiscal 1994, a party which at the time held shares of the Company's
Series B and D mandatorily redeemable convertible preferred stock canceled an
order and the Company recognized approximately $500,000 in penalty
cancellation fees; which is included in revenue for that period.

At July 31, 1994, July 31, 1995, and April 30, 1996 included in accrued
liabilities is approximately $3.5 million, $8.9 million and $11.4 million,
respectively, due to a party which held shares of the Company's Series E
mandatorily redeemable convertible preferred stock. The amount is due under a
financing arrangement, whereby the holder provides interim financing of
certain Japanese receivables between the date of billing and the date of
collection from the customers of the Company. Amounts due bear interest at the
U.S. prime rate plus 1.25% per annum, which at April 30, 1996 was 8.25%, when
financing is received in the U.S. or the Japanese prime rate plus 1.25% per
annum, which at April 30,1996 was 3.6%, when financing is received in Japan.

NOTE 11--COMMITMENTS AND CONTINGENCIES:

In February 1995, the Company entered into a sale and leaseback agreement,
pursuant to which the Company sold its office/manufacturing facilities (the
"Property") located in Hayward, California for approximately $11.8 million and
leased back the Property for an initial term of fifteen years, with options
for four five-year renewals. Initial annual rental payments to the lessor are
approximately $1.4 million for the first three years. At the end of the third,
sixth, ninth and twelfth years, respectively, the rent will be adjusted by an
amount based on any percentage increase in the Consumer Price Index for the
preceding three years, with a cap of 12%. Under the terms of the lease, the
Company is responsible for paying maintenance, insurance, taxes, and all other
expenses associated with operating and maintaining the property. The Company
recorded the transaction as a sale and deferred the gain on the sale which was
approximately $7.0 million. This gain is being amortized over the fifteen year
operating lease term. The agreement requires the Company to comply with
certain financial covenants and to maintain a fixed charge coverage ratio of
at least 1.5. At April 30, 1996, the Company was in compliance with these
covenants.

F-18
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

In addition, the Company leases certain other facilities and equipment under
operating lease agreements. Rent expense under all operating leases for the
years ended July 31, 1993, 1994 and 1995, was $2.1 million, $1.9 million and
$2.6 million, respectively. Rent expense for the nine months ended April 30,
1996 was $2.6 million. Future minimum lease commitments excluding property
taxes, maintenance and insurance under leases having initial or remaining
terms in excess of one year agreements, are as follows (in thousands):

<TABLE>
<S> <C>
April 30, 1996 through July 31, 1996.............................. $ 879
1997............................................................ 3,378
1998............................................................ 2,783
1999............................................................ 2,549
2000............................................................ 1,905
2001............................................................ 1,523
Thereafter...................................................... 13,019
-------
$26,036
=======
</TABLE>

In April 1996, the Company entered into an agreement with a contractor to
construct a new facility at a cost not to exceed approximately $4.3 million.

In April 1995, the Company signed an agreement with a distributor of the
Company, under which Etec Japan assumed responsibility for sales, direct
customer service and support for the Company's products in the Japanese
market. As part of this agreement, the Company agreed to pay the distributor a
percentage of revenue for each CORE and ALTA system sold in the defined sales
territory for the next four years. In May 1996, the Company purchased
approximately $1.1 million of the distributor's inventory. This amount is
payable in equal installments over four quarters commencing in May 1996.

F-19
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

NOTE 12--GEOGRAPHIC REPORTING AND CUSTOMER CONCENTRATION:

<TABLE>
<CAPTION>
UNITED JAPAN AND
STATES FAR EAST EUROPE TOTAL
------- --------- ------- -------
(IN THOUSANDS)
<S> <C> <C> <C> <C>
Net revenues to third parties:
Year ended July 31, 1993
Domestic................................. $24,091 $ -- $ -- $24,091
Foreign.................................. 7,552 21,477 5,462 34,491
------- ------- ------- -------
$31,643 $21,477 $ 5,462 $58,582
======= ======= ======= =======
Year ended July 31, 1994
Domestic................................. $32,651 $ -- $ -- $32,651
Foreign.................................. 6,721 24,305 5,033 36,059
------- ------- ------- -------
$39,372 $24,305 $ 5,033 $68,710
======= ======= ======= =======
Year ended July 31, 1995
Domestic................................. $33,342 $ -- $ -- $33,342
Foreign.................................. 13,353 31,057 5,164 49,574
------- ------- ------- -------
$46,695 $31,057 $ 5,164 $82,916
======= ======= ======= =======
Nine months ended April 30, 1995
(unaudited)
Domestic................................. $29,676 $ -- $ -- $29,676
Foreign.................................. 8,748 18,738 3,883 31,369
------- ------- ------- -------
$38,424 $18,738 $ 3,883 $61,045
======= ======= ======= =======
Nine months ended April 30, 1996 (unau-
dited)
Domestic................................. $22,812 $ -- $ -- $22,812
Foreign.................................. 17,605 53,605 4,013 75,223
------- ------- ------- -------
$40,417 $53,605 $ 4,013 $98,035
======= ======= ======= =======
</TABLE>

<TABLE>
<CAPTION>
YEAR ENDED JULY 31, NINE MONTHS ENDED APRIL 30,
------------------------- ---------------------------
1993 1994 1995 1995 1996
-------- ------- ------- ------------- -------------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C> <C> <C> <C>
Operating income (loss):
United States......... $ (8,153) $ 4,377 $ 7,415 $ 5,494 $ 5,485
Japan and Far East.... 3,216 4,456 3,975 4,163 4,729
Europe................ 498 743 13 (180) 188
-------- ------- ------- ------------- -------------
Total................. $ (4,439) $ 9,576 $11,403 $ 9,477 $ 10,402
======== ======= ======= ============= =============
</TABLE>

<TABLE>
<CAPTION>
JULY 31,
--------------- APRIL 30,
1994 1995 1996
------- ------- -----------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C> <C>
Identifiable assets:
United States..................................... $40,744 $51,736 $117,626
Japan and Far East................................ 18,371 30,577 37,421
Europe............................................ 3,667 3,671 2,435
------- ------- --------
Total............................................. $62,782 $85,984 $157,482
======= ======= ========
</TABLE>

F-20
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)
<TABLE>
<CAPTION>
NINE MONTHS
YEAR ENDED JULY 31, ENDED APRIL 30,
------------------------ -----------------
1993 1994 1995 1995 1996
------ ------ ------ ------- -------
(UNAUDITED)
<S> <C> <C> <C> <C> <C>
Customers comprising 10% or
more of the Company's total
revenue for the periods
indicated:
A............................ 18% 9% 14% 17% 5%
B............................ 14% 7% 14% 16% 19%
C............................ 14% 12% 4% 4% 9%
D............................ 8% 13% 2% 2% 1%
E............................ 12% 2% 12% 14% 18%
</TABLE>

NOTE 13--POLYSCAN ACQUISITION (UNAUDITED):

On June 27, 1995, the Company entered into a loan agreement with Polyscan,
Inc. ("Polyscan"), whereby the Company provided financing to Polyscan. The
loan bore interest at prime plus 3% and the balance of $1.8 million was due on
January 31, 1996. During February 1996, Polyscan repaid $600,000 to the
Company.

On February 5, 1996, Etec Polyscan acquired substantially all of the assets
and certain specified liabilities of Polyscan in exchange for 350,000 shares
of the Company's Common Stock with a market value of $3.5 million. Etec
Polyscan will retain 175,000 of the Company's common shares issued until up to
February 5, 1998 to provide payment for any liability of Polyscan or the
Polyscan shareholders (which was not assumed by Etec Polyscan as part of the
acquisition) or any adjustment of the purchase price. On February 5, 1996,
Polyscan's obligation to repay the outstanding loan in the amount of
approximately $1.2 million was assumed by Etec Polyscan.

The purchase price for book purposes was allocated by the Company
approximately as follows (in thousands):

<TABLE>
<S> <C>
Inventory.......................................................... $ 733
Other current assets............................................... 69
Other assets....................................................... 65
In-process technology.............................................. 6,269
Accounts payable and accrued expenses (includes note payable to the
Company).......................................................... (3,636)
-------
Total acquisition costs.......................................... $ 3,500
=======
</TABLE>

The excess of the purchase price over the fair market value of the net
tangible assets was allocated to in-process technology purchase which, because
of the uncertainty as to realization, the Company wrote off in fiscal 1996.

The operating results of this acquisition are included in the Company's
consolidated results of operations from the date of acquisition. The following
unaudited pro forma summary presents the consolidated results of operations as
if the acquisition had occurred at August 1, 1994, after giving effect to
certain adjustments, including interest income on the Polyscan loan and the
increase in common equivalent shares outstanding. Additionally, the 1996 pro
forma information excludes a $6.3 million write-off of in-process technology
acquired. Polyscan's results included in the pro forma presentation for the
year ended July 31, 1995 and the nine months ended April 30, 1996 are for the
twelve months ended June 30, 1995 and for the period from July 1, 1995 through
January 31, 1996, respectively. These pro forma results have been prepared for
comparative purposes only and do not purport to be indicative of what would
have occurred had the acquisition taken place at the beginning of the periods
presented or the results which may occur in the future.

F-21
<PAGE>

ETEC SYSTEMS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS--(CONTINUED)

<TABLE>
<CAPTION>
YEAR ENDED NINE MONTHS ENDED
JULY 31, 1995 APRIL 30, 1996
------------- -----------------
<S> <C> <C>
Net income (in thousands)....................... $8,170 $27,192
Net income per common share..................... $ 0.54 $ 1.51
</TABLE>

NOTE 14--SUBSEQUENT EVENTS (UNAUDITED):

In the fourth quarter of 1996, the Company entered into an equity investment
agreement whereby, in exchange for $10.0 million, the Company will issue
500,000 shares of common stock. Additionally, the Company agreed to issue
warrants to purchase an additional 75,000 shares at an exercise price equal to
the price of the shares purchased. Such warrants only become exercisable if
the investor purchases products and services that exceed certain thresholds
from the Company over the succeeding four years or upon the occurrence of
certain other conditions. The Company estimates that the value of the warrants
will be approximately $600,000 and will be amortized to cost of sales as
product purchases are made by the investor in future periods.

F-22
<PAGE>

REPORT OF INDEPENDENT ACCOUNTANTS

To the Board of Directors and Stockholders
of Polyscan, Inc.

In our opinion, the accompanying balance sheet and the related statements of
operations and accumulated deficit, and of cash flows present fairly, in all
material respects, the financial position of Polyscan, Inc. (a company in the
development stage) at March 31, 1995, and the results of its operations and
cash flows for the year then ended, in conformity with generally accepted
accounting principles. These financial statements are the responsibility of
the Company's management, our responsibility is to express an opinion on these
financial statements based on our audit. We conducted our audit of these
statements in accordance with generally accepted auditing standards which
require that we plan and perform the audit to obtain reasonable assurance
about whether the financial statements are free of material misstatement. An
audit includes examining, on a test basis, evidence supporting the amounts and
disclosures in the financial statements, assessing the accounting principles
use and significant estimates made by management, and evaluating the overall
financial statement presentation. We believe that our audit provides a
reasonable basis for the opinion expressed above.

As explained in note 1, on February 5, 1996, substantially all of the assets
and certain specified liabilities of the Company were sold to Etec Polyscan,
Inc., a wholly owned subsidiary of Etec Systems, Inc., in exchange for 350,000
common shares of Etec Systems, Inc.

Price Waterhouse LLP

San Jose, California
February 5, 1996

F-23
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

BALANCE SHEETS

AT MARCH 31, 1995 AND JANUARY 31, 1996
(IN THOUSANDS, EXCEPT SHARE AMOUNTS)

<TABLE>
<CAPTION>
MARCH 31, 1995 JANUARY 31, 1996
-------------- ----------------
(UNAUDITED)
<S> <C> <C>
ASSETS
Current assets:
Cash......................................... $ 63 $ 6
Accounts receivable.......................... 14 --
Inventory.................................... 515 723
Prepaid expenses and other current assets.... 55 65
------- -------
Total current assets....................... 647 794
Property, plant and equipment, net............. 90 100
------- -------
$ 737 $ 894
======= =======
LIABILITIES AND COMMON STOCKHOLDERS' DEFICIT
Current liabilities:
Current maturities of obligations under
capital leases.............................. $ 31 $ 39
Note payable................................. 95 1,262
Accounts payable............................. 194 133
Accrued and other liabilities................ 1,829 2,189
------- -------
Total current liabilities.................. 2,149 3,623
Long-term obligations under capital leases,
less current maturities....................... 37 46
------- -------
Total liabilities.......................... 2,186 3,669
------- -------
Commitments and Contingencies (Notes 8 and 9)
Common stockholders' deficit:
Common Stock, no par value; 4,000,000 shares
authorized; 1,920,000 issued and outstanding
shares...................................... -- --
Accumulated deficit.......................... (1,449) (2,775)
------- -------
Total common stockholders' deficit......... (1,449) (2,775)
------- -------
$ 737 $ 894
======= =======
</TABLE>

The accompanying notes are an integral part of these financial statements.

F-24
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

STATEMENTS OF OPERATIONS AND ACCUMULATED DEFICIT

FOR THE YEAR ENDED MARCH 31, 1995

FOR THE PERIOD FROM APRIL 1, 1995 TO JANUARY 31, 1996

FOR THE PERIOD FROM INCEPTION (MAY 27, 1993) THROUGH TO JANUARY 31, 1996
(IN THOUSANDS)

<TABLE>
<CAPTION>
PERIOD FROM
INCEPTION
TEN MONTH (MAY 27, 1993)
YEAR ENDED PERIOD ENDED THROUGH
MARCH 31, 1995 JANUARY 31, 1996 JANUARY 31, 1996)
-------------- ---------------- -----------------
(UNAUDITED) (UNAUDITED)
<S> <C> <C> <C>
Operating expenses:
Research, development and
engineering............... $ 881 $ 848 $1,729
Selling, general and
administrative............ 568 684 1,252
Insurance settlement....... -- (276) (276)
-------- -------- -------
1,449 1,256 2,705
-------- -------- -------
Interest expense............. -- 70 70
Net loss..................... (1,449) (1,326) (2,775)
Accumulated deficit, begin-
ning of period.............. -- (1,449) --
-------- -------- -------
Accumulated deficit, end of
period...................... $ (1,449) $ (2,775) $(2,775)
======== ======== =======
</TABLE>

The accompanying notes are an integral part of these financial statements.

F-25
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

STATEMENTS OF CASH FLOWS

FOR THE YEAR ENDED MARCH 31, 1995

FOR THE PERIOD FROM APRIL 1, 1995 TO JANUARY 31, 1996
(IN THOUSANDS)

<TABLE>
<CAPTION>
PERIOD FROM
INCEPTION
TEN MONTH (MAY 27, 1993)
YEAR ENDED PERIOD ENDED THROUGH
MARCH 31, 1995 JANUARY 31, 1996 JANUARY 31, 1996
-------------- ---------------- ----------------
(UNAUDITED) (UNAUDITED)
<S> <C> <C> <C>
Cash flows from operating
activities:
Net loss................... $(1,449) $(1,326) $(2,775)
Adjustments to reconcile
net loss to net cash
provided by (used in)
operating activities:
Write-off of in-process
technology acquired..... 95 -- 95
Depreciation............. 30 28 58
Changes in assets and
liabilities:
Accounts receivable.... (14) 14 --
Inventory.............. (515) (208) (723)
Prepaid expenses and
other current assets.. (55) (10) (65)
Accounts payable....... 195 (61) 134
Accrued and other
liabilities........... 1,829 360 2,189
------- ------- -------
Net cash provided by
(used in) operating
activities............ 116 (1,203) (1,087)
------- ------- -------
Cash flows from financing
activities:
Payment of obligations
under capital leases...... (54) (21) (75)
Repayment of note from
shareholder............... -- (95) (95)
Proceeds from note payable. -- 1,862 1,862
Repayment of note payable
using insurance proceeds
received.................. -- (600) (600)
------- ------- -------
Net cash (used in) provided
by financing activities..... (54) 1,146 1,092
------- ------- -------
Net change in cash and cash
equivalents................. 62 (57) 5
Cash at beginning of the
period...................... 1 63 1
------- ------- -------
Cash at the end of period.... $ 63 $ 6 $ 6
======= ======= =======
Supplemental disclosure of
non-cash investing and
financing activities:
Equipment acquired under
capital leases.............. $ 88 $ 38 $ 126
======= ======= =======
Acquisition of technology in
exchange for note payable... $ 95 $ 95
======= =======
</TABLE>

The accompanying notes are an integral part of these financial statements.

F-26
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

NOTES TO FINANCIAL STATEMENTS

NOTE 1--THE COMPANY AND ITS SIGNIFICANT ACCOUNTING POLICIES

Polyscan, Inc. ("Polyscan") was incorporated in Arizona on May 27, 1993 and
commenced development activities on April 1, 1994. Since commencing activities
Polyscan has been principally involved in research and development related to
direct write laser beam products, market analysis and other business planning
activities. Polyscan has had no revenue from product sales and since inception
has incurred net losses. Because Polyscan was in development stage at March
31, 1995, and at January 31, 1996, the accompanying financial statements
should not be regarded as typical for normal operating periods.

On February 5, 1996, Etec Polyscan, Inc. ("Etec Polyscan"), a wholly-owned
subsidiary of Etec Systems, Inc. ("Etec"), acquired substantially all of the
assets of Polyscan and certain specified liabilities in exchange for 350,000
common shares of Etec with a deemed market value of $3.5 million. The
financial information presented in these financial statements is based on
historical cost and does not give consideration to the adjustments that will
result from Etec Polyscan's acquisition.

Inventory

Inventory is stated at the lower of cost or market, with cost being
determined under the first-in, first-out method.

Depreciation and Amortization

Property, plant and equipment are stated at cost less accumulated
depreciation. Depreciation is calculated using the straight-line method over
the estimated useful lives of the assets, which is four years. Assets held
under capital leases are amortized using the straight-line method over the
shorter of the estimated useful life of three to five years or the term of the
related lease.

Research, Development and Engineering

Research, development and engineering costs are expensed as incurred. As
more fully described in Note 5, Polyscan is party to a research and
development contract which provides for partial funding of certain research,
development and engineering costs. Amounts funded under this contract are
being recognized using the completed contract method.

Income Taxes

Polyscan accounts for income taxes in accordance with the liability
approach.

Interim Results and Period From Inception (May 27, 1993) through January 31,
1996 (Unaudited)

The accompanying balance sheet at January 31, 1996 and the related
statements of operations and accumulated deficit and cash flows for the ten-
month period ended January 31, 1996 and for the period from inception (May 27,
1993) through January 31, 1996 are unaudited. In the opinion of management,
these statements have been prepared on the same basis as the audited financial
statements and include all adjustments, consisting only of normal recurring
adjustments, necessary for the fair statement of the results for the interim
period. The results of operations and cash flows for the interim period are
not necessarily indicative of the results to be expected for any other interim
period or for the year ending March 31, 1996.

F-27
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

NOTES TO FINANCIAL STATEMENTS--(CONTINUED)

NOTE 2--BALANCE SHEET COMPONENTS

<TABLE>
<CAPTION>
MARCH 31, JANUARY 31,
1995 1996
--------- -----------
(UNAUDITED)
(IN THOUSANDS)
<S> <C> <C>
Inventory:
Purchased parts...................................... $ 89 $ 302
Work-in-process...................................... 426 421
------ ------
$ 515 $ 723
====== ======
Property plant and equipment:
Machinery and equipment.............................. $ 120 $ 158
Less accumulated depreciation........................ (30) (58)
------ ------
$ 90 $ 100
====== ======
Accrued and other liabilities:
Customer advances.................................... $ 523 $ 621
Accrued employee costs............................... 104 60
Government contract advances......................... 1,202 1,202
Other accrued liabilities............................ -- 306
------ ------
$1,829 $2,189
====== ======
</TABLE>

At March 31, 1995 and January 31, 1996, $88,000 and $126,000, respectively,
of machinery and equipment was held under capital leases. Depreciation for
such leases was $20,000 for the year ended March 31, 1995 and $19,000 for the
ten month period ended January 31, 1996.

NOTE 3--DEBT

On June 27, 1995, Polyscan entered into a loan agreement with Etec whereby
Etec provided financing to Polyscan up to a maximum of $925,000. On August 16,
1995, Etec increased the maximum amount of financing available to Polyscan to
approximately $1.8 million. The loan bore interest at prime plus 3% and was
due on January 31, 1996. The loan was secured by all of the assets of Polyscan
and the shares of the major shareholders. On January 31, 1996, Etec increased
the maximum amount of financing available to Polyscan to approximately $2.4
million. On January 31, 1996, Polyscan repaid $600,000 of the outstanding
loan. On February 5, 1996, the outstanding loan in the amount of approximately
$1.2 million was assumed by Etec Polyscan (See Note 1.)

NOTE 4--INCOME TAXES

<TABLE>
<CAPTION>
MARCH 31,
1995
--------------
(IN THOUSANDS)
<S> <C>
Deferred tax assets:
Net operating loss carryforwards............................ $ 242
Reserve for future losses on development contract........... 244
Other reserves.............................................. --
-----
486
-----
Less: valuation allowance................................... (486)
-----
$ --
=====
</TABLE>

F-28
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

NOTES TO FINANCIAL STATEMENTS--(CONTINUED)

Polyscan established a full valuation allowance against the deferred tax
assets due to the uncertainty of their realization. At March 31, 1995,
Polyscan had net operating loss carryforwards for federal income tax purposes
of approximately $700,000. These carryforwards, if not utilized to offset
future taxable income and income taxes payable, will expire through the year
2008. Additionally, under the Tax Reform Act of 1986, the amount of the
benefit from net operating loss carryforwards may be impaired or limited in
certain circumstances, including a cumulative stock ownership change of more
than 50% over a three-year period.

NOTE 5--RESEARCH, DEVELOPMENT AND ENGINEERING CONTRACTS

In May 1994, Polyscan entered into a cost reimbursement research and
development contract with the Advanced Research Projects Agency ("ARPA"),
pursuant to which Polyscan is entitled to receive approximately $3.9 million.
Funding is due in three phases with approximately $1.2 million, $1.4 million
and $1.3 million being due for each of the respective phases. There are
deliverables at the end of each phase. However, Polyscan is under no
obligation to complete all of the phases provided that it terminates the
arrangement prior to commencement and receipt of funding for a respective
phase. Polyscan is in the process of completing Phase I and as of March 31,
1995 had received approximately $1.2 million in funding. Polyscan has deferred
this funding received and this amount is included in accrued and other
liabilities. At March 31, 1995, Polyscan anticipated that it would incur a
loss of approximately $719,000 in order to satisfy its obligations under Phase
I of the contract which it has accrued.

NOTE 6--RELATED PARTY TRANSACTIONS

In April 1994, one of the founders of Polyscan who is a majority
shareholder, contributed certain intellectual property to Polyscan in exchange
for a note for approximately $95,000. This note was paid in July 1995. The
statement of operations for the year ended March 31, 1995 includes a charge of
$95,000 for the write off of this purchased in-process technology.

NOTE 7--INSURANCE REFUND

During the ten months ended January 31, 1996, Polyscan experienced business
interruptions as a result of a flood, and received approximately $329,000 in
payments under its business interruption insurance policy. The payments of
$240,000 and $89,000 have been recorded as reductions in research, development
and engineering, and selling, general and administrative expenses,
respectively.

On January 31, 1996 Polyscan received a $600,000 payment in settlement of
its claims for damages incurred as a result of the flood. Approximately
$142,000 of the settlement covered damaged inventory and approximately
$182,000 of the settlement represents an amount that has been delineated to
make certain leasehold improvements to its current facility. Under the
settlement, Polyscan was required to utilize the entire $182,000 by March 24,
1996, or refund the shortfall. As of March 24, 1996, the entire amount had
been utilized. The remaining amount of $276,000 represents a general insurance
payment covering interruptions and has been reflected as income in the ten
month period ended January 31, 1996 statement of operations and accumulated
deficit.

NOTE 8--COMMITMENTS

Polyscan leases its facilities and certain equipment under cancelable
operating lease agreements. Rent expense under all operating leases for the
year ended March 31, 1995 and the period ended January 31,

F-29
<PAGE>

POLYSCAN, INC.

(A COMPANY IN THE DEVELOPMENT STAGE)

NOTES TO FINANCIAL STATEMENTS--(CONTINUED)

1996 was approximately $145,000 and $126,000, respectively. Future minimum
lease commitments under all of these agreements, excluding property taxes and
insurance, are as follows:

<TABLE>
<CAPTION>
OPERATING CAPITAL
LEASES LEASES
--------- -------
(IN THOUSANDS)
<S> <C> <C>
Two months ending March 31, 1996........................... $ 43 $ 17
Years ending March 31:
1997....................................................... 130 40
1998....................................................... 125 34
1999....................................................... 114 11
2000....................................................... 114 --
Thereafter................................................. 57 --
----- ----
Total minimum payments................................... $ 583 102
=====
Less: imputed interest..................................... (17)
----
Present value of minimum lease payments.................... 85
Less: current maturities................................... (39)
----
Long-term lease obligations, less current maturities....... $ 46
====
</TABLE>

Polyscan is in the process of designing and manufacturing a tool for two
customers that paid Polyscan deposits. These deposits have been deferred and
are included in accrued and other liabilities in the amount of $523,000 and
$621,000 at March 31, 1995 and January 31, 1996, respectively. Polyscan has
expensed all design costs to date with respect to developing these tools. On
September 1, 1995, one of the customers attempted to cancel its purchase order
and made a demand for the return of its tendered progress payments. In
February 1996, Polyscan refunded both customer deposits without further
obligation to either customer.

NOTE 9--LITIGATION

Polyscan is involved in various litigation matters and potential claims
which management believes, based on facts presently known, will not have a
material adverse effect on the results of operations of Polyscan.

F-30
<PAGE>

ETEC SYSTEMS, INC.

PRO FORMA CONSOLIDATED FINANCIAL INFORMATION

(UNAUDITED)

On February 5, 1996, Etec Polyscan, Inc. a wholly-owned subsidiary of Etec
Systems, Inc. ("the Company") acquired substantially all of the assets,
properties and businesses of Polyscan, Inc. ("Polyscan") and assumed certain
specified liabilities of Polyscan in exchange for 350,000 common shares of the
Company.

The following unaudited pro forma consolidated statements of operations give
effect to the acquisition as if it had occurred on August 1, 1994, by
consolidating the results of operations of the Company and Polyscan for the
year ended July 31, 1995 and for the nine months ended April 30, 1996. The pro
forma adjustments include elimination of all intercompany transactions and the
increase in common equivalent shares outstanding.

No pro forma balance sheet as of April 30, 1996 has been presented because
the acquisition took place on February 5, 1996 and consequently the effect of
the acquisition is already reflected in the Company's balance sheet as of
April 30, 1996.

The unaudited pro forma consolidated statements of operations are not
necessarily indicative of the operating results that would have been achieved
had the transaction been in effect as of the beginning of the periods
presented and should not be construed as representative of future operating
results.

The unaudited pro forma condensed consolidated financial statements should
be read in conjunction with the historical financial statements and related
notes of the Company.

F-31
<PAGE>

ETEC SYSTEMS, INC.

PRO FORMA CONSOLIDATED STATEMENT OF OPERATIONS

FOR THE YEAR ENDED JULY 31, 1995
(IN THOUSANDS, EXCEPT PER SHARE AMOUNTS)
(UNAUDITED)

<TABLE>
<CAPTION>
HISTORICAL POLYSCAN(A) ADJUSTMENTS PRO FORMA(D)
---------- ----------- ----------- ------------
<S> <C> <C> <C> <C>
Revenue:
Products................. $ 51,395 $ -- $-- $ 51,395
Services................. 31,521 -- -- 31,521
-------- -------- ---- --------
82,916 -- -- 82,916
-------- -------- ---- --------
Cost of revenue:
Cost of products......... 27,015 -- -- 27,015
Cost of services......... 20,604 -- -- 20,604
-------- -------- ---- --------
47,619 -- -- 47,619
-------- -------- ---- --------
Gross profit.............. 35,297 -- -- 35,297
-------- -------- ---- --------
Operating expenses:
Research, development and
engineering............. 10,497 1,225 -- 11,722
Selling, general and
administrative.......... 13,397 535 -- 13,932
-------- -------- ---- --------
23,894 1,760 -- 25,654
-------- -------- ---- --------
Income (loss) from
operations............... 11,403 (1,760) -- 9,643
Interest expense.......... (4,238) (2) 2 (b)(c) (4,238)
Other income (expense),
net...................... 175 -- (6)(c) 169
-------- -------- ---- --------
Income (loss) before
provision for income
taxes and minority
interest................. 7,340 (1,762) (4) 5,574
Provision for income
taxes.................... 2,289 -- -- 2,289
Minority interest in
earnings of subsidiary... 527 -- -- 527
-------- -------- ---- --------
Income (loss) before
extraordinary item....... 4,524 (1,762) (4) 2,758
Extraordinary gain on
early extinguishment of
debt..................... 5,412 -- -- 5,412
-------- -------- ---- --------
Net income (loss)......... 9,936 (1,762) (4) 8,170
Accretion of mandatorily
redeemable convertible
preferred stock.......... 3,092 -- -- 3,092
-------- -------- ---- --------
Net income (loss)
attributable to Common
Stockholders............. $ 6,844 $ (1,762) $ (4) $ 5,078
======== ======== ==== ========
Per share data:
Income before
extraordinary item...... $ 0.31 $ 0.18
Extraordinary gain....... 0.37 0.36
-------- --------
$ 0.68 $ 0.54
======== ========
Weighted average common
shares................... 14,594 350 14,944
======== ==== ========
</TABLE>
- --------
(a) Polyscan amounts are for the twelve months ended June 30, 1995.
(b) To adjust Polyscan's interest expense on the note payable to the Company
from $2 for the year ended June 30, 1995 to $6 for the twelve months ended
July 31, 1995.
(c) To eliminate the interest expense on the note between Polyscan and the
Company.
(d) The pro forma information does not reflect a one-time charge for in-
process technology write-off of $6.3 million which is directly
attributable to the transaction that was charged to expense in the quarter
ended April 30, 1996.

F-32
<PAGE>

ETEC SYSTEMS, INC.

PRO FORMA CONSOLIDATED STATEMENT OF OPERATIONS

FOR THE PERIOD FROM AUGUST 1, 1995 TO APRIL 30, 1996
(IN THOUSANDS, EXCEPT PER SHARE AMOUNTS)
(UNAUDITED)

<TABLE>
<CAPTION>
HISTORICAL POLYSCAN(A) ADJUSTMENTS PRO FORMA
---------- ----------- ----------- ---------
<S> <C> <C> <C> <C>
Revenue:
Products...................... $ 73,983 $ -- $ -- $ 73,983
Services...................... 24,052 -- -- 24,052
-------- ------ ------- --------
98,035 -- -- 98,035
-------- ------ ------- --------
Cost of revenue:
Cost of products.............. 37,606 -- -- 37,606
Cost of services.............. 16,794 -- -- 16,794
-------- ------ ------- --------
54,400 -- -- 54,400
-------- ------ ------- --------
Gross profit................... 43,635 -- -- 43,635
-------- ------ ------- --------
Operating expenses:
Research, development and
engineering.................. 11,991 607 -- 12,598
Write-off of in-process
technology acquired.......... 6,269 -- (6,269)(c) --
Selling, general and
administrative............... 14,973 524 -- 15,497
-------- ------ ------- --------
33,233 1,131 (6,269) 28,095
-------- ------ ------- --------
Income (loss) from operations.. 10,402 (1,131) 6,269 15,540
Interest expense............... (1,462) (68) 68 (b) (1,462)
Other income (expense), net.... 2,143 276 (68)(b) 2,351
-------- ------ ------- --------
Income (loss) before income tax
(benefit) and extraordinary
item.......................... 11,083 (923) 6,269 16,429
Income tax (benefit)........... (11,063) -- -- (11,063)
-------- ------ ------- --------
Net income (loss) before
extraordinary item............ 22,146 (923) 6,269 27,492
Extraordinary item............. (300) -- -- (300)
-------- ------ ------- --------
21,846 (923) 6,269 27,192
Accretion of mandatorily
redeemable convertible
preferred stock............... 1,078 -- -- 1,078
-------- ------ ------- --------
Net income (loss) attributable
to Common Stockholders........ $ 20,768 $ (923) $ 6,269 $ 26,114
======== ====== ======= ========
Per share data:
Income before extraordinary
item......................... $ 1.25 $ 1.53
Extraordinary item............ (0.02) (0.02)
-------- --------
$ 1.23 $ 1.51
======== ========
Weighted average common shares. 17,750 246 17,996
======== ======= ========
</TABLE>
- --------
(a) Polyscan amounts are for the period from July 1, 1995 through January 31,
1996.
(b) To eliminate the interest expense on the note between Polyscan and the
Company.
(c) To reverse one-time charge to write-off in-process technology acquired.

F-33
<PAGE>

[GRAPHICS: See Appendix]

<PAGE>

[GRAPHICS: See Appendix]
<PAGE>

GRAPHICS APPENDIX LIST

ETEC REGISTRATION STATEMENT

PAGE REFERENCE DESCRIPTION OF OMITTED GRAPHICS
- -------------- -------------------------------
INSIDE COVER GRAPHIC 1: Header at top of page: "ETEC. Etec Systems is
OF PROSPECTUS the leader in electron beam and laser beam pattern generation
equipment for the semiconductor industry." Below, picture of
a photomask with caption to right, "High-precision masks
produced by Etec's mask pattern generation equipment are used
to image integrated circuit patterns onto semiconductor
wafers."

INSIDE COVER GRAPHIC 2: Picture of a MEBES 4500 from the above with a
OF PROSPECTUS caption on left, "The MEBES 4500's ultra-precision stage
moves and positions the mask under the electron beam as the
beam writes the pattern on the mask." Below, footer at the
bottom of the page:

"IN CONNECTION WITH THIS OFFERING, THE UNDERWRITERS MAY OVER-
ALLOT OR EFFECT TRANSACTIONS WHICH STABILIZE OR MAINTAIN THE
MARKET PRICE OF THE COMMON STOCK OF THE COMPANY AT A LEVEL
ABOVE THAT WHICH MIGHT OTHERWISE PREVAIL IN THE OPEN MARKET.
SUCH STABILIZING, IF COMMENCED, MAY BE DISCONTINUED AT ANY
TIME.

IN CONNECTION WITH THIS OFFERING, CERTAIN UNDERWRITERS AND
SELLING GROUP MEMBERS OR THEIR AFFILIATES MAY ENGAGE IN
PASSIVE MARKET MAKING TRANSACTIONS IN THE COMPANY'S COMMON
STOCK ON NASDAQ IN ACCORDANCE WITH RULE 10b-6A UNDER THE
SECURITIES EXCHANGE ACT OF 1934. SEE "UNDERWRITING."

INSIDE FLAP GRAPHIC 3: Header at top of page: "ETEC. The Role of Masks
OF PROSPECTUS in Semiconductor Manufacturing." Below, picture of an ALTA
3000 from front with caption to left "Circuit layer design
data" and caption below "Etec Pattern generation tool.
Semiconductor manufacturing begins with the creation of a
mask. Circuit design data, up to one giga byte per layer, is
fed into Etec's MEBES, ALTA or CORE
<PAGE>

PAGE REFERENCE DESCRIPTION OF OMITTED GRAPHICS
- -------------- -------------------------------
tools, which write an image of one layer of the circuit onto
the mask."

INSIDE FLAP GRAPHIC 4: Picture of integrated circuit from side and
OF PROSPECTUS enlarged, caption below "Packaged integrated circuit," and
captions to the right "Testing, dicing and packaging" and
"The process is completed by testing, dicing and packaging
the individual integrated circuits."

INSIDE FLAP GRAPHIC 5: Picture of Semiconductor wafer, round and
OF PROSPECTUS enlarged from above with caption below, "Wafer with completed
circuits."

INSIDE FLAP GRAPHIC 6: Schematic picture of design writing process
OF PROSPECTUS with grid representing circuit design with caption below
"Circuit design written on mask."

INSIDE FLAP GRAPHIC 7: Picture of photo mask with caption below,
OF PROSPECTUS "Mask."

INSIDE FLAP GRAPHIC 8: Picture of photholitography stepper machine in
OF PROSPECTUS schematic with captions below" Wafer stepper photolithography
tool" and "The wafer stepper uses the mask like a
photographic negative to rapidly make numerous repetitive
images of the circuit pattern on the wafer. The stepper
transfers light through the mask onto photoresist that is
spread over the surface of the wafer. Those areas of the
photoresist that have been exposed to light are dissolved by
chemical developers, and the exposed areas of the layer under
the resist are then etched."
<PAGE>

PAGE REFERENCE DESCRIPTION OF OMITTED GRAPHICS
- -------------- -------------------------------
INSIDE FLAP GRAPHIC 9: Schematic picture of light bulb above a mask above
OF PROSPECTUS a wafer and flow chart with arrows from "Deposition" to
"Etch" with captions to left, "Lithography: Circuit layer
pattern exposed on wafer" and below "A different mask is
required for each layer of the integrated circuit. Successive
steps of deposition, lithography and etch build layers of
patterns that make up a single semiconductor."

35 GRAPHIC 10: Schematic diagram of boxes with arrows describing
the semiconductor manufacturing process.

40 GRAPHIC 11: Schematic drawing of MEBES system with inset
diagrams of electronics console and utility console.

42 GRAPHIC 12: Schematic drawing of ALTA system from above and
to the side.

44 GRAPHIC 13: Schematic drawing of electron-beam column.

45 GRAPHIC 14: Schematic drawing of laser beam system.

BACK INSIDE GRAPHIC 15: Photograph of MEBES 4500 with header on page,
COVER "Etec Pattern Generation Equipment" and below "The MEBES (R)
4500 is an electron beam tool designed for 0.35 micron
production requirements and pilot production of 0.25 micron
semiconductor devices. This tool operates at 160 megahertz
with a
<PAGE>

PAGE REFERENCE DESCRIPTION OF OMITTED GRAPHICS
- -------------- -------------------------------
beam spot size as small as 0.08 micron."

INSIDE BACK GRAPHIC 16: Photograph of CORE system
COVER

INSIDE BACK GRAPHIC 17: Photograph of ALTA 3000

BACK COVER GRAPHIC 18: Photograph of laser component.