ETEC SYSTEMS INC
S-8, 1997-08-14
SEMICONDUCTORS & RELATED DEVICES
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<PAGE>
 
    As filed with the Securities and Exchange Commission on August 14, 1997.

                                                      Registration No. 333-_____
- --------------------------------------------------------------------------------

                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                    FORM S-8

                             REGISTRATION STATEMENT
                                     UNDER
                           THE SECURITIES ACT OF 1933


                               ETEC SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                   Nevada                              94-3094580
       -------------------------------             -------------------
       (State or other jurisdiction of              (I.R.S. Employer
       incorporation or organization)              Identification No.)

           26460 Corporate Avenue
            Hayward, California                           94545
       -------------------------------             -------------------
           (Address of Principal                        (Zip Code)
             Executive Offices)


               1995 OMNIBUS INCENTIVE PLAN OF ETEC SYSTEMS, INC.
               ------------------------------------------------- 
                            (Full title of the plan)
 
                                                         Copy to:
              STEPHEN E. COOPER                       RICHARD S. GREY
    President and Chief Executive Officer     Pillsbury Madison & Sutro LLP
             Etec Systems, Inc.                        P.O. Box 7880
           26460 Corporate Avenue                San Francisco, CA 94120
          Hayward, California 94545                   (415) 983-1000
               (510) 783-9210
       -------------------------------             -------------------
        (Name, address and telephone
        number, including area code,
            of agent for service)

                        CALCULATION OF REGISTRATION FEE
<TABLE>
<CAPTION>
- --------------------------------------------------------------------------------------- 
   Title of         Amount       Proposed Maximum          Proposed         Amount of
 Securities To       To Be        Offering Price      Maximum Aggregate    Registration
 Be Registered   Registered(1)     per Share(2)       Offering Price(1)        Fee
- --------------------------------------------------------------------------------------- 
<S>              <C>            <C>                  <C>                   <C>
Common Stock        975,000           $52.938             $51,614,550       $15,640.77
- --------------------------------------------------------------------------------------- 
</TABLE> 
(1)  Calculated pursuant to General Instruction E on Form S-8.

(2)  Estimated solely for the purpose of calculating the registration fee on the
     basis of the average of the high and low prices as reported on the Nasdaq
     National Market on August 11, 1997.

                               -----------------

The Registration Statement shall become effective upon filing in accordance with
Rule 462 under the Securities Act of 1933.
<PAGE>
 
                        INFORMATION REQUIRED PURSUANT TO
                        --------------------------------
                       GENERAL INSTRUCTION E TO FORM S-8
                       ---------------------------------


GENERAL INSTRUCTION E INFORMATION

 This Registration Statement is being filed for the purpose of increasing the
number of securities of the same class as other securities for which a
Registration Statement of the Registrant on Form S-8 relating to the same
employee benefit plan is effective.

 The Registrant's Form S-8 Registration Statement filed with the Securities and
Exchange Commission on January 18, 1996, File No. 333-386, is hereby
incorporated by reference.


INCORPORATION OF DOCUMENTS BY REFERENCE

 The following documents filed by Registrant with the Securities and Exchange
Commission are incorporated by reference in this Registration Statement:

 (1) The Registrant's Annual Report on Form 10-K (File No. 0-26968) for the
fiscal year ended July 31, 1996, which contains, among other things, the
consolidated financial statements of Registrant and certain supplementary data
for the fiscal year ended July 31, 1996 together with the report thereon of
Price Waterhouse LLP, independent accountants.

 (2) The Registrant's Quarterly Reports on Form 10-Q (File No. 0-26968) for the
quarters ended November 1, 1996, January 31, 1997 and May 2, 1997.

 (3) The description of Registrant's common stock contained in the Registrant's
Registration Statement on Form 8-A, filed on October 12, 1995.

 In addition, all documents subsequently filed by the Registrant pursuant to
Section 13(a), 13(c), 14 and 15(d) of the Securities Exchange Act of 1934, prior
to the filing of a post-effective amendment which indicates that all securities
offered have been sold or which deregisters all securities then remaining
unsold, shall be deemed to be incorporated by reference in this registration
statement and to be a part hereof from the date of filing of such documents.

                                      -2-
<PAGE>
 
                                   SIGNATURES
                                   ----------

 Pursuant to the requirements of the Securities Act of 1933, the Registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-8, and has duly caused this Registration
Statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Hayward, State of California, on August 14, 1997.

                                           ETEC SYSTEMS, INC.



                                           By    /s/ Stephen E. Cooper
                                              -----------------------------
                                                    Stephen E. Cooper
                                                      President and
                                                 Chief Executive Officer
                                              (Principal Executive Officer)


 Pursuant to the requirements of the Securities Act of 1933, this Amendment to
Registration Statement has been signed by the following persons in the
capacities and on the dates indicated.

<TABLE>
<CAPTION>

                Name                                   Title                        Date
                ----                                   -----                        ----
<S>                                   <C>                                      <C>
       /s/ Stephen E. Cooper          President and Chief Executive Officer    August 14, 1997
- ------------------------------------  (Principal Executive Officer) and
         Stephen E. Cooper            Chairman of the Board and Chief
                                      Financial Officer (Principal Financial
                                      Officer)
*
- ------------------------------------  Controller (Principal Accounting         August 14, 1997
           Edward Quigley             Officer)

*
- ------------------------------------  Director                                 August 14, 1997
         Edward L. Gelbach

*
- ------------------------------------  Director                                 August 14, 1997
         Catherine P. Lego

*
- ------------------------------------  Director                                 August 14, 1997
            Jack H. King

</TABLE> 

                                      -3-
<PAGE>
 
<TABLE>
<CAPTION>

                Name                                   Title                        Date
                ----                                   -----                        ----
<S>                                                 <C>                        <C>
*
- ------------------------------------                Director                   August 14, 1997
           John McBennett                                                     
                                                                              
*                                                                             
- ------------------------------------                Director                   August 14, 1997
            John Suzuki                                                       
                                                                              
*                                                                             
- ------------------------------------                Director                   August 14, 1997
        Thomas Michael Trent                                                  
                                                                              
*                                                                             
- ------------------------------------                Director                   August 14, 1997
          Robert L. Wehrli
</TABLE>


*BY   /s/ Stephen E. Cooper
      ------------------------------------
          Stephen E. Cooper
          Attorney-in-Fact

                                      -4-
<PAGE>
 
                               INDEX TO EXHIBITS
                               -----------------

<TABLE> 
<CAPTION> 

Exhibit
- -------
Number               Exhibit
- ------               -------
<C>      <S> 
5.1      Opinion regarding legality of securities to be offered.
         
23.1     Independent Accountants' Consent.
         
23.2     Consent of Pillsbury Madison & Sutro LLP (included in Exhibit 5.1)
         
24.1     Powers of Attorney for directors and certain officers of Etec
         Systems, Inc., authorizing the signing of the registration statement
         on Form S-8 on their behalf.
</TABLE> 

                                      -5-

<PAGE>
 
                                                                     EXHIBIT 5.1

                         PILLSBURY MADISON & SUTRO LLP
                             235 Montgomery Street
                            San Francisco, CA 94104
                              Tel: (415) 983-1000


                                       August 14, 1997


Etec Systems, Inc.
26460 Corporate Avenue
Hayward, CA  94545


      Re:  Registration Statement on Form S-8


Gentlemen:

 With reference to the Registration Statement on Form S-8 to be filed by Etec
Systems, Inc., a Nevada corporation (the "Company"), with the Securities and
Exchange Commission under the Securities Act of 1933, as amended, relating to
975,000 shares of the Company's Common Stock issuable pursuant to the Company's
1995 Omnibus Incentive Plan (the "Stock Plan"), it is our opinion that such
shares of the Common Stock of the Company, when issued and sold in accordance
with the Stock Plan, will be legally issued, fully paid and nonassessable.

 We hereby consent to the filing of this opinion with the Securities and
Exchange Commission as Exhibit 5.1 to the Registration Statement.

                                    Very truly yours,
 
 
                                    /s/ Pillsbury Madison & Sutro LLP
[E-03280]

<PAGE>
 
                                                                    EXHIBIT 23.1

INDEPENDENT ACCOUNTANTS' CONSENT

We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of our report dated August 27, 1996, appearing on page 34
of Etec Systems, Inc.'s Annual Report on Form 10-K for the year ended July 31,
1996.



/s/ PRICE WATERHOUSE LLP

San Jose, California
August 11, 1997

<PAGE>
 
                                                                    EXHIBIT 24.1


                               POWER OF ATTORNEY



 KNOW ALL MEN BY THESE PRESENTS, that each person whose signature appears below
constitutes and appoints Stephen E. Cooper and Philip J. Koen, Jr., and each of
them his true and lawful attorneys-in-fact and agents, each with full power of
substitution and resubstitution, for him and in his name, place and stead, in
any and all capacities, to sign any and all amendments, including post-effective
amendments, to this registration statement, and to file the same, with exhibits
thereto and other documents in connection therewith, with the Securities and
Exchange Commission, granting unto said attorneys-in-fact and agents, full power
and authority to do and perform each and every act and thing requisite and
necessary to be done, as fully to all intents and purposes as he might or could
do in person, hereby ratifying and confirming all that said attorneys-in-fact
and agents, or his substitute or substitutes, may do or cause to be done by
virtue hereof.

      Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed by the following persons in the
capacities and on the date indicated:

<TABLE>
<CAPTION>
Signature                         Title                    Date
- ---------                         -----                    ----
<S>                         <C>                       <C>
 
 
/s/Edward Quigley           Controller (Principal
- -------------------------   Accounting Officer)       January 18, 1996
    Edward Quigley    
 
/s/Edward L. Gelbach        
- -------------------------   Director                  January 18, 1996
    Edward L. Gelbach                                                 
                                                                      
/s/Catherine P.Goodrich                                               
- -------------------------   Director                  January 18, 1996
    Catherine P. Goodrich                                             
                                                                      
/s/Jack H. King                                                       
- -------------------------   Director                  January 18, 1996
    Jack H. King                                                      
                                                                      
/s/John McBennett                                                     
- -------------------------   Director                  January 18, 1996
    John McBennett                                                    
                                                                      
/s/Takeshi Suzuki                                                     
- -------------------------   Director                  January 18, 1996
    Takeshi Suzuki                                                    
                                                                      
/s/Thomas Michael Trent                                               
- -------------------------   Director                  January 18, 1996
    Thomas Michael Trent                                              
                                                                      
/s/Robert L. Wehrli                                                   
- -------------------------   Director                  January 18, 1996 
    Robert L. Wehrli

</TABLE> 


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