ETEC SYSTEMS INC
SC 13D/A, 1998-03-26
SEMICONDUCTORS & RELATED DEVICES
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                              UNITED STATES
                    SECURITIES AND EXCHANGE COMMISSION
                         Washington, D.C. 20549

                              SCHEDULE 13D

               Under the Securities Exchange Act of 1934
                           (Amendment No. 2)


                          ETEC Systems, Inc.
                            (Name of Issuer)

                              Common Stock
                    (Title of Class of Securities)
- --------------------------------------------------------------------------

                                26922C103
                              (CUSIP Number)

                     Christopher J. Rupright, Esq.
                      Shartsis Friese & Ginsburg
                    One Maritime Plaza, 18th Floor
                         San Francisco, CA 94111
                              (415) 421-6500
- ---------------------------------------------------------------------------
(Name, Address and Telephone Number of Person Authorized to Receive Notices
                              and Communications)

                              March 18, 1998
          (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to
report the acquisition which is the subject of this Schedule 13D, and is
filing this schedule because of Rule 13d-1(b)(3) or (4), check the following
box / /.

Note:  Six copies of this statement, including all exhibits, should be filed
with the Commission.  See Rule 13d-1(a) for other parties to whom copies are
to be sent.

* The remainder of this cover page shall be filled out for a reporting
person's initial filing on this form with respect to the subject class of 
securities, and for any subsequent amendment containing information which
would alter disclosures provided in a prior cover page.

The information required on the remainder of this cover page shall not be
deemed to be "filed" for the purpose of Section 18 of the Securities Exchange
Act of 1934 ("Act") or otherwise subject to the liabilities of that section
of the Act but shall be subject to all other provisions of the Act (however,
see the Notes).


Potential persons who are to respond to the collection of information
contained in this form are not required to respond unless the form displays
a currently valid OMB control number.

SEC 1746 (10-97)
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 2 of 11 Pages

- ---------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     SS OR IRS IDENTIFICATION NO. OF ABOVE PERSON

     West Highland Capital, Inc.
- ---------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*      (a) / X /
                                                            (b) /  /
- ---------------------------------------------------------------------------
3    SEC USE ONLY
- ---------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     AF
- ---------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
     ITEMS 2(d) or 2(E)                                               / /
- ---------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     California
- ---------------------------------------------------------------------------
     NUMBER OF           7    SOLE VOTING POWER
       SHARES                 -0-
    BENEFICIALLY         --------------------------------------------------
      OWNED BY           8    SHARED VOTING POWER
        EACH                  1,000,000
     REPORTING      --------------------------------------------------
       PERSON            9    SOLE DISPOSITIVE POWER
        WITH                  -0-
                         --------------------------------------------------
                         10   SHARED DISPOSITIVE POWER
                              1,000,000
- ---------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     1,000,000
- ---------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
                                                                      / /
- ---------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     4.6%
- ---------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*
     CO and IA
- ---------------------------------------------------------------------------
*SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
(INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE ATTESTATION.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 3 of 11 Pages

- ---------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     SS OR IRS IDENTIFICATION NO. OF ABOVE PERSON

     Estero Partners, LLC
- ---------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*      (a) / X /
                                                            (b) /  /
- ---------------------------------------------------------------------------
3    SEC USE ONLY
- ---------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     AF
- ---------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
     ITEMS 2(d) or 2(E)                                               / /
- ---------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     California
- ---------------------------------------------------------------------------
      NUMBER OF          7    SOLE VOTING POWER
       SHARES                 -0-
    BENEFICIALLY         --------------------------------------------------
      OWNED BY           8    SHARED VOTING POWER
        EACH                    837,404
      REPORTING          --------------------------------------------------
       PERSON            9    SOLE DISPOSITIVE POWER
        WITH                  -0-
                         --------------------------------------------------
                         10   SHARED DISPOSITIVE POWER
                                837,404
- ---------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
       837,404
- ---------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
                                                                      / /
- ---------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     3.8%
- ---------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*
     OO
- ---------------------------------------------------------------------------
*SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
(INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE ATTESTATION.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                               Page 4 of 11 Pages

- ---------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     SS OR IRS IDENTIFICATION NO. OF ABOVE PERSON

     Lang H. Gerhard
- ---------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*      (a) / X /
                                                            (b) /  /
- ---------------------------------------------------------------------------
3    SEC USE ONLY
- ---------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     AF
- ---------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
     ITEMS 2(d) or 2(E)                                               / /
- ---------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     United States
- ---------------------------------------------------------------------------
      NUMBER OF          7    SOLE VOTING POWER
       SHARES                 -0-
    BENEFICIALLY         --------------------------------------------------
      OWNED BY           8    SHARED VOTING POWER
        EACH                  1,000,000
      REPORTING          --------------------------------------------------
       PERSON            9    SOLE DISPOSITIVE POWER
        WITH                  -0-
                         --------------------------------------------------
                         10   SHARED DISPOSITIVE POWER
                              1,000,000
- ---------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     1,000,000
- ---------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
                                                                      / /
- ---------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     4.6%
- ---------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*
     IN
- ---------------------------------------------------------------------------
*SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
(INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE ATTESTATION.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 5 of 11 Pages

- ---------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     SS OR IRS IDENTIFICATION NO. OF ABOVE PERSON

     West Highland Partners, L.P.
- ---------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*      (a) / X /
                                                            (b) /  /
- ---------------------------------------------------------------------------
3    SEC USE ONLY
- ---------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
- ---------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
     ITEMS 2(d) or 2(E)                                               / /
- ---------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     California
- ---------------------------------------------------------------------------
      NUMBER OF          7    SOLE VOTING POWER
       SHARES                 -0-
    BENEFICIALLY         --------------------------------------------------
      OWNED BY           8    SHARED VOTING POWER
        EACH                  707,024
      REPORTING          --------------------------------------------------
       PERSON            9    SOLE DISPOSITIVE POWER
        WITH                  -0-
                         --------------------------------------------------
                         10   SHARED DISPOSITIVE POWER
                              707,024
- ---------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     707,024
- ---------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
                                                                      / /
- ---------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     3.2%
- ---------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*
     PN
- ---------------------------------------------------------------------------
*SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
(INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE ATTESTATION.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 6 of 11 Pages

- ---------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     SS OR IRS IDENTIFICATION NO. OF ABOVE PERSON

     Buttonwood Partners, L.P.
- ---------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*      (a) / X /
                                                            (b) /  /
- ---------------------------------------------------------------------------
3    SEC USE ONLY
- ---------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
- ---------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
     ITEMS 2(d) or 2(E)                                               / /
- ---------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     California
- ---------------------------------------------------------------------------
      NUMBER OF          7    SOLE VOTING POWER
       SHARES                 -0-
    BENEFICIALLY         --------------------------------------------------
      OWNED BY           8    SHARED VOTING POWER
        EACH                  130,380
      REPORTING          --------------------------------------------------
       PERSON            9    SOLE DISPOSITIVE POWER
        WITH                  -0-
                         --------------------------------------------------
                         10   SHARED DISPOSITIVE POWER
                              130,380
- ---------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     130,380
- ---------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
                                                                      / /
- ---------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)
     0.6%
- ---------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*
     PN
- ---------------------------------------------------------------------------
*SEE INSTRUCTIONS BEFORE FILLING OUT!
INCLUDE BOTH SIDES OF THE COVER PAGE, RESPONSES TO ITEMS 1-7
(INCLUDING EXHIBITS) OF THE SCHEDULE, AND THE SIGNATURE ATTESTATION.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 7 of 11 Pages

ITEM 1.   SECURITY AND ISSUER.

This amended statement relates to shares of Common Stock (the "Stock") of
ETEC Systems, Inc. ("ETEC").  The principal executive office of ETEC is
located at 26460 Corporate Avenue, Hayward, California 94545.

ITEM 2.   IDENTITY AND BACKGROUND.

The persons filing this statement and the persons enumerated in Instruction
C of Schedule 13D and, where applicable, their respective places of
organization, general partners, directors, executive officers and controlling
persons, and the information regarding them, is as follows:

(a)  Lang H. Gerhard ("Gerhard"); West Highland Capital, Inc., a California
     corporation ("WHC"); Estero Partners, LLC, a California limited
     liability company ("LLC"); West Highland Partners, L.P., a California
     limited partnership ("WHP"); Buttonwood Partners, L.P., a California
     limited partnership ("BP").

(b)  The business address of Gerhard, WHC, LLC, WHP and BP is 300 Drake's
     Landing Road, Suite 290, Greenbrae, California 94904.

(c)  Gerhard is the sole director and occupies all the executive offices of
     WHC, which is an investment adviser.  Gerhard is the sole manager of
     LLC.  WHC, LLC and Gerhard are the general partners of WHP and BP, which
     are investment limited partnerships.

(d)  During the last five years, none of such persons has been convicted in
     a criminal proceeding (excluding traffic violations or similar
     misdemeanors).

(e)  During the last five years, none of such persons was a party to a civil
     proceeding of a judicial or administrative body of competent
     jurisdiction and as a result of such proceeding was or is subject to a
     judgment, decree or final order enjoining future violations of, or
     prohibiting or mandating activities subject to, federal or state
     securities laws or finding any violation with respect to such laws.

(f)  Gerhard is a citizen of the United States of America.

ITEM 3.   SOURCE AND AMOUNT OF FUNDS OR OTHER CONSIDERATION.

The source and amount of funds used in purchasing the Stock were as follows:

Purchaser      Source of Funds               Amount

WHC            Funds Under Management(1)     $44,796,203.83
WHP            Working Capital               $31,518,043.33
BP             Working Capital               $ 5,753,013.50

(1)  Includes funds invested by WHP and BP in Stock.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 8 of 11 Pages

ITEM 4.   PURPOSE OF TRANSACTION.

The sole purpose of the acquisitions of the Stock reported herein was and is
for investment.

ITEM 5.   INTEREST IN SECURITIES OF THE ISSUER.

The beneficial ownership of the Stock of the persons named in Item 2 of this
statement is as follows at the date hereof:

          Aggregate
          Beneficially 
          Owned               Voting Power        Dispositive Power
Name      Number    Percent   Sole      Shared    Sole      Shared

WHC       1,000,000 4.6%      -0-       1,000,000 -0-       1,000,000
Gerhard   1,000,000 4.6%      -0-       1,000,000 -0-       1,000,000
LLC         837,404 3.8%      -0-         837,404 -0-         837,404
WHP         707,024 3.2%      -0-         707,024 -0-         707,024
BP          130,380 0.6%      -0-         130,380 -0-          130,380

The persons filing this statement effected the following transactions in the
Stock on the dates indicated, and such transactions are the only transactions
by the persons filing this statement in the Stock since January 18, 1998:

     Purchase                 Number         Price
Name  or Sale  Date           of Shares      Per Share

WHP       S    1-20-98         70,000        44.6875
BP        S    1-20-98         14,000        44.6875
WHC       S    1-20-98         16,000        44.6875
WHP       S    1-21-98         22,750        43.8036
BP        S    1-21-98          4,550        43.8036
WHC       S    1-21-98          5,200        43.8036
WHP       P    2-2-98             700        38.6875
BP        P    2-2-98             140        38.6875
WHC       P    2-2-98             160        38.6875
WHP       P    2-2-98          52,500        39.7833
BP        P    2-2-98          10,500        39.7833
WHC       P    2-2-98          12,000        39.7833
WHP       S    2-5-98          36,540        46.2596
BP        S    2-5-98           7,308        46.2596
WHC       S    2-5-98           8,352        46.2596
WHP       S    2-5-98          63,910        46.2496
BP        S    2-5-98          12,782        46.2496
WHC       S    2-5-98          14,608        46.2496
BP        S    3-4-98          10,000        51.75
BP        S    3-9-98           4,000        47.00
WHC       P    3-9-98           4,000        47.00
WHP       P    3-11-98          7,000        50.75

(Continued on page 9)<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 9 of 11 Pages

     Purchase                 Number         Price
Name  or Sale  Date           of Shares      Per Share

BP        P    3-11-98          1,300        50.75
WHC       P    3-11-98          1,700        50.75
WHP       S    3-18-98         56,000        54.8333
BP        S    3-18-98         10,400        54.8333
WHC       S    3-18-98         13,600        54.8333
WHP       S    3-18-98        140,000        54.875
BP        S    3-18-98         26,000        54.875
WHC       S    3-18-98         34,000        54.875
WHP       S    3-19-98         14,000        53.4219
BP        S    3-19-98          2,600        53.4219
WHC       S    3-19-98          3,400        53.4219


All transactions were executed through the Nasdaq National Market System.
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 10 of 11 Pages

ITEM. 6.  CONTRACTS, ARRANGEMENTS, UNDERSTANDINGS OR RELATIONSHIPS WITH
          RESPECT TO SECURITIES OF THE ISSUER.

Gerhard, WHC and LLC are the general partners of WHP and BP pursuant to
limited partnership agreements providing to Gerhard, WHC and LLC the
authority, among other things, to invest the funds of WHP and BP in Stock, to
vote and dispose of stock and to file this statement on behalf of WHP and BP. 
Pursuant to such limited partnership agreements, the general partners of WHP
and BP are entitled to allocations based on assets under management and
realized and unrealized gains, if certain conditions are met.  Pursuant to
investment management agreements, WHC is authorized, among other things, to
invest funds of its various investment advisory clients, and to vote and
dispose of those securities.  Such investment management agreements may be
terminated by either party on notice as provided in such agreements and
provide for fees payable to WHC based on assets under management and realized
and unrealized gains.

ITEM 7.   MATERIAL TO BE FILED AS EXHIBITS.

A.   Agreement Regarding Joint Filing of Statement on Schedule 13D or 13G
     (including power of attorney).

SIGNATURES

     After reasonable inquiry and to the best of my knowledge, I certify that
the information set forth in this statement is true, complete and correct.

DATED:    March 26, 1998.


  /s/ Lang H. Gerhard                   WEST HIGHLAND PARTNERS, L.P.
Lang H. Gerhard


WEST HIGHLAND CAPITAL, INC.             By:   /s/ Lang H. Gerhard          
                                             Lang H. Gerhard,
                                             General Partner

By:    /s/ Lang H. Gerhard          
     Lang H. Gerhard, President         BUTTONWOOD PARTNERS, L.P.


ESTERO PARTNERS, LLC
                                        By:   /s/ Lang H. Gerhard           
                                             Lang H. Gerhard,
                                             General Partner
By:    /s/ Lang H. Gerhard           
     Lang H. Gerhard, Manager
<PAGE>
<PAGE>
SCHEDULE 13D

CUSIP No. 26922C103                                    Page 11 of 11 Pages


                                                            EXHIBIT A

               AGREEMENT REGARDING JOINT FILING
               OF STATEMENT ON SCHEDULE 13D OR 13G

The undersigned agree to file jointly with the Securities and Exchange
Commission (the "SEC") any and all statements on Schedule 13D or Schedule 13G
(and any amendments or supplements thereto) required under section 13(d) of
the Securities Exchange Act of 1934, as amended, in connection with purchases
by the undersigned of securities of ETEC Systems, Inc.  For that purpose, the
undersigned hereby constitute and appoint West Highland Capital, Inc., a
California corporation, as their true and lawful agent and attorney-in-fact,
with full power and authority for and on behalf of the undersigned to prepare
or cause to be prepared, sign, file with the SEC and furnish to any other
person all certificates, instruments, agreements and documents necessary to
comply with section 13(d) and section 16(a) of the Securities Exchange Act of
1934, as amended, in connection with said purchases, and to do and perform
every act necessary and proper to be done incident to the exercise of the
foregoing power, as fully as the undersigned might or could do if personally
present.

DATED:    October 27, 1997.


  /s/ Lang H. Gerhard                   WEST HIGHLAND PARTNERS, L.P.
Lang H. Gerhard


WEST HIGHLAND CAPITAL, INC.             By:   /s/ Lang H. Gerhard          
                                             Lang H. Gerhard,
                                             General Partner

By:    /s/ Lang H. Gerhard          
     Lang H. Gerhard, President         BUTTONWOOD PARTNERS, L.P.


ESTERO PARTNERS, LLC
                                        By:   /s/ Lang H. Gerhard           
                                             Lang H. Gerhard,
                                             General Partner
By:    /s/ Lang H. Gerhard           
     Lang H. Gerhard, Manager

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