ETEC SYSTEMS INC
SC 13G/A, 1999-02-11
SEMICONDUCTORS & RELATED DEVICES
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						UNITED STATES
				SECURITIES AND EXCHANGE COMMISSION
					Washington, D.C. 20549

						SCHEDULE 13G

			Under the Securities Exchange Act of 1934
					  (Amendment No. 1)

					 ETEC SYSTEMS, INC.
				    	  (Name of Issuer)

						Common Stock
				(Title of Class of Securities)

						  26922C103
						(CUSIP Number)

						December 31, 1998
		(Date of Event Which Requires Filing of this 
Statement)

Check the appropriate box to designate the rule pursuant to 
which this Schedule is filed:
					/___/	Rule 13d-1(b)
					/_X_/	Rule 13d-1(c)
					/___/	Rule 13d-1(d)

* The remainder of this cover page shall be filled out for a 
reporting person's initial filing on this form with respect to 
the subject class of securities, and for any subsequent 
amendment containing information which would alter disclosures 
provided in a prior cover page.

The information required on the remainder of this cover page 
shall not be deemed to be "filed" for the purpose of Section 18 
of the Securities Exchange Act of 1934 ("Act") or otherwise 
subject to the liabilities of that section of the Act but shall 
be subject to all other provisions of the Act (however, see the 
Notes).

Potential persons who are to respond to the collection of 
information contained in this form are not required to respond 
unless the form displays a currently valid OMB control number.

SEC 1745 (3-98)			Page 1 of 11

CUSIP No. 26922C103

- ----------------------------------------------------------------
1	NAME OF REPORTING PERSONS
	IRS IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

	West Highland Capital, Inc.
- ----------------------------------------------------------------
2	CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See 
	Instructions)
	(a)/X /
	(b)/  /
- ----------------------------------------------------------------
3	SEC USE ONLY

- ----------------------------------------------------------------
4	CITIZENSHIP OR PLACE OF ORGANIZATION

	California
- ----------------------------------------------------------------
	  NUMBER OF		5	SOLE VOTING POWER
	   SHARES				0
	BENEFICIALLY		---------------------------------------
	  OWNED BY			6	SHARED VOTING POWER
	    EACH				197,200
	 REPORTING		---------------------------------------
	   PERSON			7	SOLE DISPOSITIVE POWER
	    WITH				0
					---------------------------------------
					8	SHARED DISPOSITIVE POWER
						197,200
- ----------------------------------------------------------------
9	AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING 
PERSON
	197,200
- ----------------------------------------------------------------
10	CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
	SHARES (See Instructions)

- ----------------------------------------------------------------
11	PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
	0.9%
- ----------------------------------------------------------------
12	TYPE OF REPORTING PERSON (See Instructions)
	CO and IA
- ----------------------------------------------------------------
					Page 2 of 11

CUSIP No. 26922C103

- ----------------------------------------------------------------
1	NAME OF REPORTING PERSONS
	IRS IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

	Estero Partners, LLC
- ----------------------------------------------------------------
2	CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See 
	Instructions)
	(a)/X /
	(b)/  /
- ----------------------------------------------------------------
3	SEC USE ONLY

- ----------------------------------------------------------------
4	CITIZENSHIP OR PLACE OF ORGANIZATION

	California
- ----------------------------------------------------------------
	  NUMBER OF		5	SOLE VOTING POWER
	   SHARES				0
	BENEFICIALLY		---------------------------------------
	  OWNED BY			6	SHARED VOTING POWER
	    EACH				170,798
	 REPORTING		---------------------------------------
	   PERSON			7	SOLE DISPOSITIVE POWER
	    WITH				0
					---------------------------------------
					8	SHARED DISPOSITIVE POWER
						170,798
- ----------------------------------------------------------------
9	AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING 
PERSON
	170,798
- ----------------------------------------------------------------
10	CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
	SHARES (See Instructions)

- ----------------------------------------------------------------
11	PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
	0.8%
- ----------------------------------------------------------------
12	TYPE OF REPORTING PERSON (See Instructions)
	OO
- ----------------------------------------------------------------
					Page 3 of 11

CUSIP No. 26922C103

- ----------------------------------------------------------------
1	NAME OF REPORTING PERSONS
	IRS IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

	Lang H. Gerhard
- ----------------------------------------------------------------
2	CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See 
	Instructions)
	(a)/X /
	(b)/  /
- ----------------------------------------------------------------
3	SEC USE ONLY

- ----------------------------------------------------------------
4	CITIZENSHIP OR PLACE OF ORGANIZATION

	United States  
- ----------------------------------------------------------------
	  NUMBER OF		5	SOLE VOTING POWER
	   SHARES				0
	BENEFICIALLY		---------------------------------------
	  OWNED BY			6	SHARED VOTING POWER
	    EACH				197,200
	 REPORTING		---------------------------------------
	   PERSON			7	SOLE DISPOSITIVE POWER
	    WITH				0
					---------------------------------------
					8	SHARED DISPOSITIVE POWER
						197,200
- ----------------------------------------------------------------
9	AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING 
PERSON
	197,200
- ----------------------------------------------------------------
10	CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
	SHARES (See Instructions)

- ----------------------------------------------------------------
11	PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
	0.9%
- ----------------------------------------------------------------
12	TYPE OF REPORTING PERSON (See Instructions)
	IN
- ----------------------------------------------------------------
					Page 4 of 11

CUSIP No. 26922C103

- ----------------------------------------------------------------
1	NAME OF REPORTING PERSONS
	IRS IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

	West Highland Partners, L.P.
- ----------------------------------------------------------------
2	CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See 
	Instructions)
	(a)/X /
	(b)/  /
- ----------------------------------------------------------------
3	SEC USE ONLY

- ----------------------------------------------------------------
4	CITIZENSHIP OR PLACE OF ORGANIZATION

	California
- ----------------------------------------------------------------
	  NUMBER OF		5	SOLE VOTING POWER
	   SHARES				0
	BENEFICIALLY		---------------------------------------
	  OWNED BY			6	SHARED VOTING POWER
	    EACH				147,220
	 REPORTING		---------------------------------------
	   PERSON			7	SOLE DISPOSITIVE POWER
	    WITH				0
					---------------------------------------
					8	SHARED DISPOSITIVE POWER
						147,220
- ----------------------------------------------------------------
9	AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING 
PERSON
	147,220
- ----------------------------------------------------------------
10	CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
	SHARES (See Instructions)

- ----------------------------------------------------------------
11	PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
	0.7%
- ----------------------------------------------------------------
12	TYPE OF REPORTING PERSON (See Instructions)
	PN
- ----------------------------------------------------------------
					Page 5 of 11

CUSIP No. 26922C103

- ----------------------------------------------------------------
1	NAME OF REPORTING PERSONS
	IRS IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

	Buttonwood Partners, L.P.
- ----------------------------------------------------------------
2	CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See 
	Instructions)
	(a)/X /
	(b)/  /
- ----------------------------------------------------------------
3	SEC USE ONLY

- ----------------------------------------------------------------
4	CITIZENSHIP OR PLACE OF ORGANIZATION

	California
- ----------------------------------------------------------------
	  NUMBER OF		5	SOLE VOTING POWER
	   SHARES				0
	BENEFICIALLY		---------------------------------------
	  OWNED BY			6	SHARED VOTING POWER
	    EACH				23,578
	 REPORTING		---------------------------------------
	   PERSON			7	SOLE DISPOSITIVE POWER
	    WITH				0
					---------------------------------------
					8	SHARED DISPOSITIVE POWER
						23,578
- ----------------------------------------------------------------
9	AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING 
PERSON
	23,578
- ----------------------------------------------------------------
10	CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
	SHARES (See Instructions)

- ----------------------------------------------------------------
11	PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
	0.1%
- ----------------------------------------------------------------
12	TYPE OF REPORTING PERSON (See Instructions)
	PN
- ----------------------------------------------------------------
					Page 6 of 11

CUSIP No. 26922C103				13G		

ITEM 1.

     (a)  The name of the issuer is Etec Systems, Inc. (the 
"Issuer").

     (b)  The principal executive office of the Issuer is 
located at 26460 Corporate Avenue, Hayward, CA  94545.

ITEM 2.

     (a)  The names of the persons filing this statement are 
West Highland Capital, Inc. ("WHC"), Lang H. Gerhard 
("Gerhard"), Estero Partners, LLC ("LLC"), West Highland 
Partners, L.P. ("WHP") and Buttonwood Partners, L.P. ("BP") 
(collectively, the "Filers").

     (b)  The principal business office of the Filers is located 
at 300 Drakes Landing Road, Suite 290, Greenbrae, CA 94904.

     (c)  WHC is a California corporation, LLC is a California 
limited liability company, WHP and BP are California limited 
partnerships and Gerhard is a United States citizen.

     (d)  This statement relates to shares of Common Stock of 
the Issuer (the "Stock").

     (e)  The CUSIP number of the Stock is 26922C103.

					Page 7 of 11

CUSIP No. 26922C103				13G		

ITEM 3.  If this statement is filed pursuant to rule 240.13d-
1(b), or 240.13d-2(b) or (c), check whether the person filing is 
a:

	(a)	___	Broker or dealer registered under section 15 of 
the Act (15 U.S.C. 78o).

	(b)	___	Bank as defined in section 3(a)(6) of the Act (15 
U.S.C. 78c).

	(c)	___	Insurance company as defined in section 3(a)(19) 
of the Act (15 U.S.C. 78c).

	(d)	___	Investment company registered under section 8 of 
the Investment Company Act of 1940 (15 U.S.C. 80a-8).

	(e)	___	An investment adviser in accordance with 240.13d-
1(b)(1)(ii)(E).

	(f)	___	An employee benefit plan or endowment fund in 
accordance with 240.13d-1(b)(1)(ii)(F).

	(g)	___	A parent holding company or control person in 
accordance with 240.13d-1(b)(1)(ii)(G)

	(h)	___	A savings association as defined in section 3(b) 
of the Federal Deposit Insurance Act (12 U.S.C. 1813).

	(i)	___	A church plan that is excluded from the 
definition of an investment company under section 3(c)(14) of 
the Investment Company Act of 1940 (15 U.S.C. 80a-3).

	(j)	___	Group, in accordance with section 240.13d-
1(b)(1)(ii)(J)


					Page 8 of 11

CUSIP No. 26922C103				13G		

ITEM 4.  OWNERSHIP.

See Items 5-9 and 11 of the cover sheet for each Filer.

ITEM 5.  OWNERSHIP OF FIVE PERCENT OR LESS OF A CLASS

If this statement is being filed to report the fact that as of 
the date hereof the reporting person has ceased to be the 
beneficial owner of more than five percent of the class of 
securities, check the following / X /.


ITEM. 6.  OWNERSHIP OF MORE THAN FIVE PERCENT ON BEHALF OF 
ANOTHER PERSON

WHC is a registered investment adviser whose clients have the 
right to receive or the power to direct the receipt of dividends 
from, or the proceeds from the sale of, the Stock.  Gerhard is 
the sole shareholder of WHC and the Manager of LLC.  WHC, LLC 
and Gerhard are the general partners of WHP and BP, which are 
investment limited partnerships.  No single client of WHC holds 
more than five percent of the Stock.

ITEM 7.  IDENTIFICATION AND CLASSIFICATION OF THE SUBSIDIARY 
WHICH ACQUIRED THE SECURITY BEING REPORTED ON BY THE PARENT 
HOLDING COMPANY

Not applicable.

ITEM 8.  IDENTIFICATION AND CLASSIFICATION OF MEMBERS OF THE 
GROUP

See Item 2(a) of this Schedule.

ITEM 9.  NOTICE OF DISSOLUTION OF GROUP

Not applicable.

ITEM 10.  CERTIFICATION

By signing below I certify that, to the best of my knowledge and 
belief, the securities referred to above were not acquired and 
are not held for the purpose of or with the effect of changing 
or influencing the control of the issuer of the securities and 
were not acquired and are not held in connection with or as a 
participant in any transaction having that purpose or effect.

					Page 9 of 11

CUSIP No. 26922C103				13G		

SIGNATURES

	After reasonable inquiry and to the best of my knowledge 
and belief, I certify that the information set forth in this 
statement is true, complete and correct.

DATED:	February 10, 1999

LANG H. GERHARD					WEST HIGHLAND PARTNERS, 
L.P.

By:	West Highland				By:	West Highland
	Capital, Inc.					Capital, Inc.
	Attorney-in-Fact				Attorney-in-Fact

	By:	/s/Bonnie George			By:	/s/Bonnie George	
		Bonnie George					Bonnie George
		Chief Operating Officer			Chief Operating
									Officer

WEST HIGHLAND CAPITAL, INC.		BUTTONWOOD PARTNERS, L.P.

By:	/s/Bonnie George			By:	/s/Bonnie George	
	Bonnie George					Bonnie George
	Chief Operating Officer			Chief Operating Officer

ESTERO PARTNERS, LLC				

By:  West Highland Capital, Inc.
	Attorney-in-Fact
	By:	/s/Bonnie George
	Bonnie George
	Chief Operating Officer


						Page 10 of 11

CUSIP No. 26922C103			13G			

										EXHIBIT A

			AGREEMENT REGARDING JOINT FILING
			OF STATEMENT ON SCHEDULE 13D OR 13G

The undersigned agree to file jointly with the Securities and 
Exchange Commission (the "SEC") any and all statements on 
Schedule 13D or Schedule 13G (and any amendments or supplements 
thereto) required under section 13(d) of the Securities Exchange 
Act of 1934, as amended, in connection with purchases by the 
undersigned of securities of Intermedia Communications, Inc. and 
any other issuer, until such time as the undersigned file with 
the SEC a statement terminating this Agreement Regarding Joint 
Filing of Statement on Schedule 13D or 13G.  For that purpose, 
the undersigned hereby constitute and appoint West Highland 
Capital, Inc., a California corporation, as their true and 
lawful agent and attorney-in-fact, with full power and authority 
for and on behalf of the undersigned to prepare or cause to be 
prepared, sign, file with the SEC and furnish to any other 
person all certificates, instruments, agreements and documents 
necessary to comply with section 13(d) and section 16(a) of the 
Securities Exchange Act of 1934, as amended, in connection with 
said purchases, and to do and perform every act necessary and 
proper to be done incident to the exercise of the foregoing 
power, as fully as the undersigned might or could do if 
personally present, until such time as the undersigned file with 
the SEC a statement terminating this Agreement Regarding Joint 
Filing of Statement on Schedule 13D or 13G.

DATED:	May 15, 1998

  /s/ Lang H. Gerhard         	WEST HIGHLAND PARTNERS, L.P.
Lang H. Gerhard					
							By:  /s/ Lang H. Gerhard  	
							Lang H. Gerhard
WEST HIGHLAND CAPITAL, INC.			General Partner

By:	  /s/ Bonnie George     
	Bonnie George, Chief		BUTTONWOOD PARTNERS, L.P.
	Operating Officer			
							By:  /s/ Lang H. Gerhard   
ESTERO PARTNERS, LLC				Lang H. Gerhard
								General Partner
By:	  /s/ Lang H. Gerhard   
	Lang H. Gerhard
	Manager
						Page 11 of 11
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CSR\2463\041\1028959.01	2/9/1999 9:52



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