<PAGE>
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549
_____________________
SCHEDULE 13G
(Rule 13d-102)
INFORMATION STATEMENT PURSUANT TO RULES 13d-1 AND 13d-2
UNDER THE SECURITIES EXCHANGE ACT OF 1934
(Amendment No. 2)
IBIS TECHNOLOGY CORPORATION
---------------------------
(Name of Issuer)
Common Stock
--------------------------------------
(Title of Class of Securities)
450909 10 6
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(CUSIP Number)
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SCHEDULE 13G
CUSIP No. 450909 10 6 Page 2 of 7
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____________________________________________________________________________
1. Name of Reporting Persons
S.S. or I.R.S. Identification Number of Above Persons
BURR, EGAN, DELEAGE & CO.
04-2681308
____________________________________________________________________________
2. Check the Appropriate Box if a Member of a Group - Not Applicable
____________________________________________________________________________
3. SEC Use Only
____________________________________________________________________________
4. Citizenship or Place of Organization
MASSACHUSETTS
____________________________________________________________________________
Number of Shares Beneficially Owned By Each Reporting Person With;
5. Sole Voting Power
N/A
____________________________________________________________________________
6. Shared Voting Power
N/A
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CUSIP No. 450909 10 6 Page 3 of 7
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____________________________________________________________________________
7. Sole Dispositive Power
N/A
____________________________________________________________________________
8. Shared Dispositive Power
N/A
____________________________________________________________________________
9. Aggregate Amount Beneficially Owned by Each Reporting Person.
N/A
____________________________________________________________________________
10. Check Box if the Aggregate Amount in Row (9) Excludes Certain Shares.
N/A
____________________________________________________________________________
11. Percent of Class Represented by Amount in Row 9.
N/A - ALL HOLDINGS WERE SOLD BY DECEMBER 31, 1996
____________________________________________________________________________
12. Type of Reporting Person.
IA
____________________________________________________________________________
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CUSIP No. 450909 10 6 Page 4 of 7
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SCHEDULE 13G
Item 1(a). Name of Issuer:
- ---------------------------
IBIS TECHNOLOGY CORPORATION
Item 1(b). Address of Issuer's Principal Executive Offices:
- ------------------------------------------------------------
32A CHERRY HILL DRIVE
DANVERS, MA 01923
Item 2(a). Name of Person Filing:
- ----------------------------------
BURR, EGAN, DELEAGE & CO.
Item 2(b). Address of
Principal Business Office or, if None, Residence:
- -------------------------------------------------
ONE POST OFFICE SQURE
SUITE 3800
BOSTON, MA 02109
Item 2(c). Citizenship:
- ------------------------
MASSACHUSETTS
Item 2(d). Title of Class of Securities:
- -----------------------------------------
Common Stock, $.01 par value per share
Item 2(e). CUSIP Number:
- -------------------------
450909 10 6
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CUSIP No. 450909 10 6 Page 5 of 7
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Item 3:
- -------
Not Applicable
Item 4. Ownership:
- -------------------
(a) Amount Beneficially Owned:
N/A
(b) Percent of Class:
N/A - ALL HOLDINGS WERE SOLD BY DECEMBER 31, 1996
(c) Number of shares as to which such person has:
(i) sole power to vote or to direct the vote:
N/A
(ii) shared power to vote or to direct the vote:
N/A
(iii) sole power to dispose or to direct the
disposition of:
N/A
(iv) shared power to dispose or to direct the
disposition of:
N/A
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CUSIP No. 450909 10 6 Page 6 of 7
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Item 5. Ownership of Five Percent or Less of a Class:
- ------------------------------------------------------
ALL HOLDINGS WERE SOLD BY DECEMBER 31, 1996
Item 6. Ownership of More Than Five Percent on Behalf of Another Person:
- -------------------------------------------------------------------------
Not Applicable
Item 7. Identification and Classification of the Subsidiary which Acquired the
Security Being Reported by the Parent Holding Company:
- -----------------------------------------------------------
Not Applicable
Item 8. Identification and Classification
of Members of the Group:
- --------------------------------------------
Not Applicable
Item 9. Notice of Dissolution of Group:
- ----------------------------------------
Not Applicable
Item 10. Certification:
- ------------------------
Not Applicable
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CUSIP No. 450909 10 6 Page 7 of 7
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SIGNATURE
After reasonable inquiry and to the best of my knowledge and belief, I certify
that the information set forth in this statement is true, complete and correct.
February 10, 1997
----------------------------------
Date
BURR, EGAN, DELEAGE & CO.
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/s/ EILEEN McCARTHY
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Eileen McCarthy
Vice-President
