IBIS TECHNOLOGY CORP
10-Q, 1998-08-13
SEMICONDUCTORS & RELATED DEVICES
Previous: CORNERSTONE REALTY INCOME TRUST INC, 8-K/A, 1998-08-13
Next: NEXTHEALTH INC, 10-Q, 1998-08-13



<PAGE>

                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20569

                                    Form 10-Q


              [X] Quarterly Report Pursuant to Section 13 or 15(d)
                     of the Securities Exchange Act of 1934

                                       Or

              [ ] Transition Report Pursuant to Section 13 or 15(d)
                     of the Securities Exchange Act of 1934


For the Quarterly Period Ended  June 30, 1998   Commission file number   0-23150
                                -------------                            -------


                           Ibis Technology Corporation 
- -------------------------------------------------------------------------------
            (Exact name of registrant as specified in its charter)

         Massachusetts                                         04-2987600 
- -------------------------------                            -------------------
(State or other jurisdiction of                            (I.R.S. Employer 
incorporation or organization)                             Identification No.)

                     32 Cherry Hill Drive, Danvers, MA                 01923
- ------------------------------------------------------------------------------
                (Address of principal executive offices)            (Zip Code)


                                 (978) 777-4247
- -------------------------------------------------------------------------------
              (Registrant's telephone number, including area code)


Indicate by check mark whether the registrant (1) has filed all reports required
to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during
the preceding 12 months (or for such shorter period that the registrant was
required to file such reports), and (2) has been subject to such filing
requirements for the past 90 days.


                                              Yes   X           No ___


6,764,760 shares of Common Stock, par value $.008, were outstanding on August 7,
1998.


                                              Total Number of Pages     65
                                              Exhibit Index at Page     19






<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                                      INDEX

<TABLE>
<CAPTION>

                                                                    Page  
PART 1 - FINANCIAL INFORMATION                                     Number 
- -------------------------------                                    ------
<S>                                                                 <C>
Item 1 - Financial Statements:

  Balance Sheets
    December 31, 1997 and June 30, 1998 (unaudited)...............    3

  Statements of Operations
    Three Months Ended June 30, 1997 and 1998 (unaudited)
    and Six Months Ended June 30, 1997 and 1998 (unaudited).......    4

  Statements of Cash Flows
    Six Months Ended June 30, 1997 and 1998 (unaudited)...........    5

  Notes to Financial Statements (unaudited) ......................    6

Item 2 - Management's Discussion and Analysis of Financial
 Condition and Results of Operations .............................    8



PART II - OTHER INFORMATION
- ---------------------------

Item 1 - Legal Proceedings .......................................   16

Item 2 - Changes in Securities ...................................   16

Item 3 - Defaults upon Senior Securities .........................   16

Item 4 - Submission of Matters to a Vote of Security Holders .....   16

Item 5 - Other Information .......................................   17

Item 6 - Exhibits and Reports on Form 8-K ........................   17

Signatures .......................................................   18

Exhibit Index ....................................................   19

</TABLE>


                                       2

<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                                 BALANCE SHEETS
                                   (Unaudited)

<TABLE>
<CAPTION>

                                                                              December 31,       June 30,
                                                                                 1997              1998  
                                                                              ------------       --------
<S>                                                                                <C>             <C>         
Assets
Current assets:
   Cash and cash equivalents .............................................   $ 13,309,823    $ 13,763,817
   Accounts receivable, trade, net .......................................      1,064,607       2,034,689
   Unbilled revenue ......................................................        230,490       1,948,564
   Inventories (note 3) ..................................................        487,031       4,965,604
   Prepaid expenses and other current assets .............................        124,711         153,873
                                                                             ------------     -----------
         Total current assets ............................................     15,216,662      22,866,547
                                                                             ------------     -----------
Property and equipment ...................................................     17,695,312      14,647,326
   Less:  Accumulated depreciation and amortization ......................     (8,250,372)     (9,180,907)
                                                                             ------------     -----------
         Net property and equipment ......................................      9,444,940       5,466,419
Patents and other assets, net ............................................        256,638         168,217
                                                                             ------------     -----------
         Total assets ....................................................   $ 24,918,240    $ 28,501,183
                                                                             ------------    ------------
                                                                             ------------    ------------

Liabilities and Stockholders' Equity
Current liabilities:
   Capital lease obligation, current.....................................    $    474,539    $    509,641
   Accounts payable ......................................................        691,325       2,811,053
   Accrued liabilities ...................................................      1,193,504       2,961,244
                                                                             ------------     -----------
         Total current liabilities .......................................      2,359,368       6,281,938
                                                                             ------------     -----------
                                                                             ------------     -----------

Capital lease obligation, noncurrent .....................................        498,685         234,776
Other accrued liabilities ................................................      1,303,187       1,275,231
                                                                             ------------      ----------
         Total liabilities ...............................................      4,161,240       7,791,945
                                                                             ------------      ----------

Stockholders' equity:
   Undesignated preferred stock, $.01 par value
    Authorized 2,000,000 shares; none issued .............................           --              --
   Common stock, $.008 par value 
    Authorized 20,000,000 shares; issued 6,628,728 and
       6,759,769 shares in 1997 and 1998, respectively ...................         53,030          54,051
    Additional paid-in capital ...........................................     35,593,999      36,368,429
    Accumulated deficit ..................................................    (14,890,029)    (15,713,242)
                                                                              ------------    -----------
         Total stockholders' equity ......................................     20,757,000      20,709,238
                                                                              ------------    -----------
         Total liabilities and stockholders' equity ......................   $ 24,918,240    $ 28,501,183
                                                                              ------------    -----------
                                                                              ------------    -----------

</TABLE>


                     See accompanying notes to financial statements.

                                       3

<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                            STATEMENTS OF OPERATIONS
                                   (Unaudited)
<TABLE>
<CAPTION>

                                                           Three months ended          Six months ended
                                                               June 30,                      June 30,
                                                 -------------------------------   --------------------------
                                                       1997           1998             1997         1998  
                                                 -------------   ---------------   ------------  ------------
<S>                                                     <C>            <C>            <C>            <C>  
Sales and revenue:
  Product sales .................................   $   512,580    $ 1,011,010    $ 1,626,528    $ 2,017,708
  Contract and other revenue ....................       899,153        292,852      1,423,906        783,055
  Equipment revenue .............................          --        4,000,000           --        4,200,000
                                                    -----------    -----------    -----------    -----------
      Total sales and revenue (note 2) ..........     1,411,733      5,303,862      3,050,434      7,000,763

Cost of sales and revenue:
  Cost of product sales .........................       997,511      1,259,056      1,977,965      2,571,594
  Cost of contract and other revenue ............       507,238        272,057        850,867        637,970
  Cost of equipment revenue .....................          --        2,688,811           --        2,814,009
                                                    -----------    -----------    -----------    -----------
      Total cost of sales and revenue ...........     1,504,749      4,219,924      2,828,832      6,023,573
                                                    -----------    -----------    -----------    -----------

      Gross profit (loss) .......................       (93,016)     1,083,938        221,602        977,190
                                                    -----------    -----------    -----------    -----------

Operating expenses:
  General and administrative ....................       388,078        503,140        725,661        947,640
  Marketing and selling .........................       135,208        102,814        245,257        217,399
  Research and development ......................       316,432        545,997        664,126        927,952
                                                    -----------    -----------    -----------    -----------
      Total operating expenses ..................       839,718      1,151,951      1,635,044      2,092,991
                                                    -----------    -----------    -----------    -----------


      Loss from operations ......................      (932,734)       (68,013)    (1,413,442)    (1,115,801)
                                                    -----------    -----------    -----------    -----------


Other income (expense):
  Interest income ...............................        74,875        183,921        178,163        358,611
  Interest expense ..............................       (49,012)       (30,048)      (107,715)       (64,768)
  Other .........................................           240           --              256           --   
                                                    -----------    -----------    -----------    -----------
      Total other income ........................        26,103        153,873         70,704        293,843
                                                    -----------    -----------    -----------    -----------

      Profit (loss) before income taxes .........      (906,631)        85,860     (1,342,738)      (821,958)

Income tax expense ..............................          --             --            1,256          1,256
                                                    -----------    -----------    -----------    -----------


      Net profit (loss) .........................   $  (906,631)   $    85,860    $(1,343,994)   $  (823,214)
                                                    ===========    ===========    ===========    ===========


Net profit (loss) per common share:
 Basic..........................................    $     (0.17)   $      0.01    $     (0.26)   $     (0.12)
                                                    ===========    ===========    ===========    ===========
 Diluted .......................................    $     (0.17)   $      0.01    $     (0.26)   $     (0.12)
                                                    ===========    ===========    ===========    ===========

Weighted average number of common 
shares outstanding:
 Basic ..........................................     5,221,257      6,738,536      5,207,301      6,704,814
                                                    ===========    ===========    ===========    ===========
 Diluted ........................................     5,221,257      7,071,017      5,207,301      6,704,814
                                                    ===========    ===========    ===========    ===========

</TABLE>


                 See accompanying notes to financial statements.

                                       4

<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                             STATEMENT OF CASH FLOWS
                                   (Unaudited)

<TABLE>
<CAPTION>

                                                                                          Six months ended
                                                                                             June 30,
                                                                                  -----------------------------
                                                                                       1997              1998
                                                                                  --------------   ------------
<S>                                                                                <C>             <C>          
Cash flows from operating activities:
   Net loss ....................................................................   $ (1,343,994)   $   (823,214)
   Adjustments to reconcile net loss to net cash provided 
    by (used in) operating activities:
     Depreciation and amortization .............................................      1,044,525         955,203
     Changes in operating assets and liabilities ...............................     (1,144,025)      1,133,353
                                                                                  --------------   ------------

         Net cash provided by (used in)
             operating activities ..............................................     (1,443,494)      1,265,342
                                                                                  --------------   ------------

Cash flows from investing activities:
   Additions to property and equipment .........................................     (2,907,287)     (1,421,748)
   Increase in other assets ....................................................         49,920          63,756
                                                                                  --------------   ------------

         Net cash used in investing activities .................................     (2,857,367)     (1,357,992)
                                                                                  --------------   ------------

Cash flows from financing activities:
   Payments of capital lease obligations .......................................       (391,717)       (228,807)
   Exercise of stock options ...................................................         50,230         775,451
                                                                                  --------------   ------------

         Net cash provided by (used in) financing activities ...................       (341,487)        546,644
                                                                                   ------------    ------------

         Net increase (decrease) in cash and cash equivalents ..................     (4,642,348)        453,994

Cash and cash equivalents, beginning of period .................................      9,201,016      13,309,823
                                                                                   ------------    ------------

Cash and cash equivalents, end of period .......................................   $  4,558,668    $ 13,763,817
                                                                                  --------------   ------------
                                                                                  --------------   ------------

Supplemental disclosure of cash flow information:
   Cash paid during the period for interest ....................................   $    103,484    $     64,768
                                                                                  --------------   ------------
                                                                                  --------------   ------------

</TABLE>



                 See accompanying notes to financial statements.


                                       5

<PAGE>



                           IBIS TECHNOLOGY CORPORATION

                          NOTES TO FINANCIAL STATEMENTS
                                   (Unaudited)


(1) Interim Financial Statements

         The accompanying financial statements are unaudited, except for the
Balance Sheet as of December 31, 1997, and have been prepared by the Company in
accordance with generally accepted accounting principles.

         In the opinion of management, the interim financial statements include
all adjustments which consist only of normal and recurring adjustments,
necessary for a fair presentation of the Company's financial position and
results of operations. Results of operations for the interim periods are not
necessarily indicative of the results to be expected for the full year. These
financial statements should be read in conjunction with the financial statements
of the Company as of and for the year ended December 31, 1997 which are included
in the Annual Report on Form 10-K.

(2) Revenue Recognition

         Product sales are recognized upon shipment. Revenue derived from
consulting services is recognized upon performance. Contract and equipment
revenue is recognized on the percentage-of-completion method. Provisions for
anticipated losses are made in the period in which such losses become
determinable. Unbilled revenue represents equipment and contract revenue earned
but not yet billable based on the terms of the contract which include shipment
of the product, achievement of milestones or completion of the contract.

(3) Inventories

         Inventories consist of the following:

<TABLE>
<CAPTION>
                                    December 31,   June 30,
                                       1997          1998
                                    -----------  ----------

<S>                                     <C>          <C>   
Raw materials ..................   $  221,378   $  256,271
      Work in process ..........      105,607       61,036
      Finished goods ...........      160,046      177,774
                                   ----------   ----------
        Subtotal wafer inventory   $  487,031   $  495,081
      Equipment inventory                --     $4,470,523
                                   ----------   ----------
        Total inventories          $  487,031   $4,965,604
                                   ==========   ==========

</TABLE>


         Equipment inventory at June 30, 1998 was classified as property and
equipment in prior financial statements.



                                       6

<PAGE>



                           IBIS TECHNOLOGY CORPORATION

                          NOTES TO FINANCIAL STATEMENTS
                                   (Unaudited)


(4) Earnings Per Share Reconciliation

         The reconciliation of the numerators and denominators of the basic and
diluted net income (loss) per common share computations for the Company's
reported net income (loss) is as follows:

<TABLE>
<CAPTION>

                                                       Three months ended                           Six months ended
                                                           June 30,                                      June 30,
                                                 ------------------------------------        ---------------------------
                                                       1997                 1998                   1997             1998
                                                 ---------------       --------------        ---------------------------


<S>                                         <C>                    <C>                 <C>                     <C>         
Basic net income (loss) .................   $          (906,631)   $          85,860   $         (1,343,994)   $  (823,214)
                                            ===================    =================   ====================    ===========

Weighted average common
   shares outstanding-basic .............             5,221,257            6,738,536              5,207,301      6,704,814
                                            ===================    =================   ====================    ===========

Net additional common shares upon assumed
   exercise of stock options and warrants                  --                332,481                   --             --   
                                            -------------------    -----------------   --------------------    -----------



Weighted average common
   shares outstanding-diluted ...........             5,221,257            7,071,017              5,207,301      6,704,814
                                            ===================    =================   ====================    ===========

Net income (loss) per common share
         Basic ..........................   $             (0.17)   $            0.01   $              (0.26)   $     (0.12)
                                            ===================    =================   ====================    ===========


         Diluted ........................   $             (0.17)   $            0.01   $              (0.26)   $     (0.12)
                                            ===================    =================   ====================    ===========

</TABLE>


                                       7

<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
                  FINANCIAL CONDITION AND RESULTS OF OPERATIONS


OVERVIEW

         Ibis Technology Corporation ("Ibis" or the "Company") was formed in 
October 1987 and commenced operations in January 1988. The Company's initial 
activities consisted of producing and selling SIMOX-SOI wafers and conducting 
funded and unfunded research and development activities. This research led to 
the Company's development of a proprietary second generation implanter, the 
Ibis 1000, and to other proprietary process technology.

         Until 1993, much of the Company's revenue was derived from research 
and development contracts and sales of SIMOX-SOI wafers for military 
applications. Since 1993, there has been a shift in revenue to sales of 
SIMOX-SOI wafers for commercial applications. For the six months ended June 
30, 1998 and for the fiscal year ended December 31, 1997, commercial product 
sales (measured in dollar volume) represented 78% and 83%, respectively, of 
total product sales compared with 48% of total product sales for the fiscal 
year ended December 31, 1993. To date, most customers of the Company that 
have purchased wafers for what the Company believes are commercial 
applications have done so solely for the purpose of characterizing and 
evaluating the wafers. Thus, historical sales are not necessarily indicative 
of future operations because such sales would not be considered of a 
recurring nature. In the second quarter of 1997, however, the Company 
announced that two of its customers had indicated their intentions to adopt 
SIMOX-SOI technology in commercial products.

         During the second quarter of 1998, the Company recognized revenue 
from the sale of two Ibis 1000 implanters to a major semiconductor 
manufacturer. The Company also received a confirming purchase order and a 
deposit for one Ibis 1000 implanter from another customer during this 
quarter. There were no equipment sales in 1997. During 1997, the Company 
experienced quarterly fluctuations in wafer sales due to reduced wafer 
requirements from one of the Company's customers. In addition, repair and 
maintenance on the first Ibis 1000, use of the second Ibis 1000 for SIMOX-SOI 
development, a mismatch of capacity and wafer size requirements of customer 
orders and dependence on a limited number of customers all contributed to the 
quarterly fluctuation in wafer sales. The Company may continue to see 
fluctuations in revenue due to equipment sales, shifts in customer demands 
during various stages of the SIMOX-SOI sales cycle and until the Company has 
a sufficient number of Ibis 1000's on-line such that specific implanters can 
be dedicated to the various products, sizes and continued research and 
development efforts.

         The Company currently has two Ibis 1000 oxygen implanters, one of 
which was funded by Motorola Corporation and must first be used to serve 
Motorola's production requirements. One Ibis 1000 implanter is currently 
undergoing customer acceptance and three implanters are under construction 
and are at various stages of completion. During the second quarter ended June 
30, 1998, the Company recognized revenue on two of these implanters using the 
percentage-of-completion method. The Company anticipates that the remaining 
revenue on these two implanters and one additional implanter will be 
recognized during the next three quarters as construction and/or milestones 
are completed. The remaining implanter is anticipated to be completed in the 
first half of 1999 and will be used for research and development and to 
increase the Company's internal production capacity. During the year ended 
December 31, 1997, the Company

                                       8
<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)


phased the two NV-200 implanters out of production. Consequently, all 
SIMOX-SOI wafers are being produced on the Ibis 1000's. As the Company 
operates below capacity or expands its production capacity in anticipation of 
expected increases in demand, its gross margins on product sales will 
initially be adversely affected until the implanters operate at or near full 
capacity. There can be no assurance, however, that the Company will succeed 
in attracting a sufficient number of customers and/or orders for SIMOX-SOI 
wafers to offset such production costs or that the Company will prevail over 
its competition.

Results of Operations

Second Quarter Ended June 30, 1998 Compared to Second Quarter Ended June 30, 
1997

         Product Sales. Product sales increased $498,430, or 97%, to 
$1,011,010 for the second quarter ended June 30, 1998 from $512,580 for the 
second quarter ended June 30, 1997. The increase in product sales is 
attributable to increased wafer sales to Japan and a new government program 
that was entered into in the first quarter of 1998. In addition, wafer 
production related issues contributed to the decreased level of product sales 
during the second quarter of 1997. The first event was a component failure 
and subsequent upgrade on the first Ibis 1000 implanter which resulted in a 
ten-week production loss. The other matter was the dedication of the second 
Ibis 1000 to process development for a specific customer. This decision 
resulted in a six-week loss of production.

         Contract and Other Revenue. Contract and other revenue decreased for 
the second quarter ended June 30, 1998 to $292,852 from $899,153 for the 
second quarter ended June 30, 1997, a decrease of $606,301 or 67%. The 
decrease in contract and other revenue is attributable to decreased revenues 
derived from a contract for consulting services for Orion Equipment, Inc. 
("Orion"). Revenue from the Orion contract amounted to approximately $305,000 
and $21,000 in the second quarter of 1997 and 1998, respectively. Revenues 
under the Orion contract have decreased substantially since the beginning of 
1998 and primarily all of the work under the Orion contract was completed by 
the end of the second quarter of 1998. During 1997, the Company began selling 
spare parts to the purchaser of the Ibis 1000 implanter sold in 1996. For the 
second quarter ended June 30, 1998 the sale of spare parts decreased to 
$36,245 from $314,190, a decrease of $277,945 or 88%. These sales accounted 
for 12% of contract and other revenue for the second quarter ended June 30, 
1998 as compared to 35% for the second quarter ended June 30, 1997.

         Equipment Revenue. Equipment revenue of $4,000,000 for the second 
quarter ended June 30, 1998 represents revenue recognized using the 
percentage-of-completion method in connection with the sale of two Ibis 1000 
implanters. The Company anticipates that the remaining revenue on these two 
implanters and one additional implanter will be recognized during the next 
three quarters as construction and/or milestones are completed. There were no 
equipment sales in 1997.

         Total Sales and Revenue. Total sales and revenue for the second 
quarter ended June 30, 1998 was $5,303,862, an increase of $3,892,129, or 
276%, from total revenue of $1,411,733 for the second quarter ended June 30, 
1997. This increase resulted from the equipment revenue and an increase in 
product sales which was partially offset by decreased contract and other 
revenue.

                                       9
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)

         Total Cost of Revenue. Cost of product sales for the second quarter 
ended June 30, 1998 was $1,259,056, as compared to $997,511 for the second 
quarter ended June 30, 1997, an increase of $261,545 or 26%. Cost of contract 
revenue for the second quarter ended June 30, 1998 was $272,057, as compared 
to $507,238 for the second quarter ended June 30, 1997, a decrease of 
$235,181, or 46%. Cost of equipment revenue for the second quarter ended June 
30, 1998 was $2,688,811. The gross margin for all sales was 20% for the 
second quarter ended June 30, 1998 as compared to negative 7% for the second 
quarter ended June 30, 1997. The increase in gross margin is primarily 
attributable to the profit recognized from equipment revenue in the quarter. 
The improvement in gross margin is also the result of the fundamental fixed 
cost nature of product sales which were absorbed by more wafers during the 
second quarter of 1998 compared to the same quarter in the previous year. The 
product mix during this year's second quarter consisted of a greater 
concentration of larger wafer sizes which resulted in a higher average sales 
price per wafer. Cost of sales for contract and other revenue consists of 
labor and materials expended during the quarter. Contract margins can vary 
from year to year based on the mix of cost-type, firm fixed price and cost 
share arrangements. Additionally, different fee arrangements and indirect 
cost absorption can contribute to margin variability.

         General and Administrative Expenses. General and administrative 
expenses for the second quarter ended June 30, 1998 were $503,140 (or 9% of 
total revenue) as compared to $388,078 (or 27% of total revenue) for the 
second quarter ended June 30, 1997, an increase of $115,062, or 30%. The 
increase is due to increases in payroll and payroll related expenses. Also 
contributing to the increase were higher professional service fees incurred 
in the quarter.

         Marketing and Selling Expenses. Marketing and selling expenses for 
the second quarter ended June 30, 1998 were $102,814 (or 2% of total revenue) 
as compared to $135,208 (or 10% of total revenue) for the second quarter 
ended June 30, 1997, a decrease of $32,394, or 24%.

         Research and Development Expenses. Internally funded research and 
development expenses increased by $229,565, or 73%, to $545,997 (or 10% of 
total revenue) for the second quarter ended June 30, 1998, as compared to 
$316,432 (or 22% of total revenue) for the second quarter ended June 30, 
1997. The increase is primarily due to an increase in materials along with 
increases in payroll expenses. In the prior year quarter a greater percentage 
of personnel was devoted to funded projects, including the Orion contract, 
and thus payroll and payroll related expenses for these personnel were 
included in cost of contract and other revenue.

         Loss from Operations. The loss from operations for the second 
quarter ended June 30, 1998 was $68,013 as compared to a loss of $932,734 for 
the second quarter ended June 30, 1997, a decrease of $864,721, or 93%. The 
decrease in the loss from operations is the result of equipment revenue and 
increase in product sales revenue which were partially offset by the increase 
in operating expenses.

         Other Income (Expense). Total other income for the second quarter 
ended June 30, 1998 was $153,873 as compared to $26,103 for the second 
quarter ended June 30, 1997, an increase of $127,770, or 489%. The increase 
in total other income is attributable to interest income earned on the 
proceeds from the August, 1997 exercise of its Public Warrants as well as 
reduced interest expense on capitalized leases.

                                       10
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)

         Profit Before Income Taxes. The profit before income taxes was $85,860
for the second quarter ended June 30, 1998, as compared to a loss of $906,631
for the second quarter ended June 30, 1997. The improvement of $992,491, or
110%, is due to equipment revenue recognized in the quarter ended June 30, 1998
and the increased product sales and was partially offset by decreased contract
and other revenue.

Six Months Ended June 30, 1998 Compared to Six Months Ended June 30, 1997

         Product Sales. Product sales increased $391,180, or 24%, to $2,017,708
for the six months ended June 30, 1998 from $1,626,528 for six months ended 
June 30, 1997. The increase in product sales is attributable to increased 
wafer sales to Europe, Japan and government programs. Sales in the United 
States remained constant. Also contributing to the increase in product sales 
compared to the prior year period were wafer production related issues 
arising during the second quarter of 1997 which had a negative impact on 
wafer sales during that period.

         Contract and Other Revenue. Contract and other revenue decreased for
the six months ended June 30, 1998 to $783,055 from $1,423,906 for the six
months ended June 30, 1997, a decrease of $640,851, or 45%. This decrease is
attributable to decreased revenues derived from a contract for consulting
services related to implementation of the magnetic scanning technology
previously licensed to this customer, Orion. Revenue from the Orion contract
amounted to approximately $627,000 and $157,000 in the first half of 1997 and
1998 respectively. Revenues under the Orion contract have decreased
substantially since the beginning of 1998 and primarily all of the work under
the Orion contract was completed by the end of the second quarter of 1998.
During 1997 the Company began selling spare parts to the purchaser of the Ibis
1000 implanter, a major semiconductor manufacturer. These sales accounted for
28% of contract and other revenue for the six months ended June 30, 1997 but
were only 15% of the contract and other revenue for the six months ended 
June 30, 1998.

         Equipment Revenue. Equipment revenue of $4,200,000 was recognized using
the percentage of completion method for the six months ended June 30, 1998 for
the sale of two Ibis 1000 implanters to a major semiconductor manufacturer.
There was no equipment revenue recognized in 1997. There was also a commitment
and deposit received from another customer for the purchase of one Ibis 1000
implanter. The Company anticipates that the remaining revenue on the two
implanters and the additional implanter will be recognized during the next three
quarters as construction and/or milestones are completed.

         Total Sales and Revenue. Total sales and revenue for the six months
ended June 30, 1998 was $7,000,763, an increase of $3,950,329, or 130%, from
total revenue of $3,050,434 for the six months ended June 30, 1997. This
increase resulted from the recognition of equipment revenue and the increase in
product sales and was partially offset by decreased contract and other revenue.

         Total Cost of Revenue. Cost of product sales for the six months ended
June 30, 1998 was $2,571,594, as compared to $1,977,965 for the six months ended
June 30, 1997, an increase of $593,629 or 30%. Cost of contract revenue for the
six months ended June 30, 1998 was $637,970, as compared to $850,867 for the six
months ended



                                       11
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)

June 30, 1997, a decrease of $212,897, or 25%. Cost of equipment revenue for 
the six months ended June 30, 1998 was $2,814,009. The gross margin for all 
sales was 14% for the six months June 30, 1998 as compared to 7% for the six 
months ended June 30, 1997. The increase in gross margin is attributable to 
the profit recognized from equipment revenue in the first six months ended 
June 30, 1998. Cost of sales for contract and other revenue consists of labor 
and materials expended during the period. Contract margins can vary from year 
to year based on the mix of cost type, firm fixed price and cost share 
arrangements. Additionally, different fee arrangements and indirect cost 
absorption can contribute to margin variability.

         General and Administrative Expenses. General and administrative 
expenses for the six months ended June 30, 1998 were $947,640 (or 14% of 
total revenue) as compared to $725,661 (or 24% of total revenue) for the six 
months ended June 30, 1997, an increase of $221,979, or 31%. The increase is 
due to increases in payroll, payroll related expenses and professional 
service fees.

         Marketing and Selling Expenses. Marketing and selling expenses for 
the six months ended June 30, 1998 were $217,399 (or 3% of total revenue) as 
compared to $245,257 (or 8% of total revenue) for the six months ended June 
30, 1997, a decrease of $27,858 or 11%.

         Research and Development Expenses. Internally funded research and 
development expenses increased by $263,826, or 40%, to $927,952 (or 13% of 
total revenue) for the six months ended June 30, 1998, as compared to 
$664,126 (or 22% of total revenue) for the six months ended June 30, 1997. 
The increase is primarily due to increases in payroll along with materials. 
In the prior year six-month period, a greater percentage of personnel was 
devoted to funded projects, including the Orion contract, and thus payroll 
and payroll related expenses for these personnel were included in the cost of 
contact and other revenue.

         Loss from Operations. The loss from operations for the six months 
ended June 30, 1998 was $1,115,801 as compared to a loss of $1,413,442 for 
the six months ended June 30, 1997, a decrease of $297,641 or 21%. The 
decrease in loss from operations is the result of recognition of equipment 
revenue and increased product sales which were partially offset by the 
increase in operating expenses.

         Other Income (Expense). Total other income for the six months ended 
June 30, 1998 was $293,843 as compared to $70,704 for the six months ended 
June 30, 1997. The increase in total other income is attributable to interest 
income earned on the proceeds from the August 1997 exercise of its Public 
Warrants as well as reduced interest expense on capital leases.

         Loss Before Income Taxes. The loss before income taxes was $821,958 
for the six months ended June 30, 1998, as compared to $1,342,738 for the six 
months ended June 30, 1997, a decrease of $520,780 or 39%. The decrease in 
loss before income taxes is the result of equipment revenue recognized under 
the percentage-of-completion method in the first six months of 1998 and the 
increased product sales offset by the increase in operating expenses.

                                       12
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)


Impact of the Year 2000 Issue

         The Year 2000 Issue refers to potential problems with computer systems
or any equipment with computer chips or software that use dates where the date
has been stored as just two digits (e.g., 98 for 1998). On January 1, 2000, any
clock or date recording mechanism incorporating date sensitive software which
uses only two digits to represent the year may recognize a date using 00 as the
year 1900 rather than the year 2000. This could result in a system failure or
miscalculations causing disruption of operations, including, among other things,
a temporary inability to process transactions, send invoices, or engage in
similar business activities.

         The Company is in the process of conducting a review of its internal
information systems to determine the extent of any Year 2000 problem. The
Company is still gathering information, but based on such review to date, the
Company does not believe that the impact of any Year 2000 problem will be
material, because its principal information systems appear to correctly define
the year 2000. Although there exists the possibility that Year 2000 issues will
be identified, based on such review to date, the Company does not currently
expect that any such problems will have a material adverse effect on the
Company's future operating results or financial condition.

         The Company is in the process of contacting its major suppliers and
customers in an effort to determine the extent to which the Company may be
vulnerable to those parties' failure to timely correct their own Year 2000
problems. To date, the Company is unaware of any situations of noncompliance
that would materially adversely affect its operations or financial condition.
There can be no assurance, however, that instances of noncompliance which could
have a material adverse effect on the Company's operations or financial
condition will be identified; that the systems of other companies with which the
Company transacts business will be corrected on a timely basis; or that a
failure by such entities to correct a year 2000 problem or a correction which is
incompatible with the Company's information systems would not have a material
adverse effect on the Company's operations or financial condition.

Liquidity and Capital Resources

         As of June 30, 1998, the Company had cash and cash equivalents of
$13,763,817. During the six months ended June 30, 1998, the Company generated
$1,265,342 in cash from operating activities as compared to cash consumed by
operating activities in the amount of $1,443,494 for the same period in 1997.
Depreciation and amortization expense for the six months ended June 30, 1998 and
1997 was $955,203 and $1,044,525, representing 14% and 34% of total revenue,
respectively. Due to the capital intensive nature of the Company's business and
the anticipated expansion of its facilities and production capacity, management
expects that depreciation and amortization will continue to be a significant
portion of its expenses. To date, the Company's working capital requirements
have been funded through debt and equity financings, warrant conversions,
equipment lines of credit, a working capital line of credit, a term loan, sale
leaseback arrangements, collaborative relationships and government contracts. At
June 30, 1998, the Company had commitments to purchase approximately $749,000 in
material or subassemblies to be used to manufacture the additional Ibis 1000
implanters and approximately $142,000 in capital equipment. During the six month
period ending June 30, 1998, the Company received deposits on the sale of two
implanters in the amount of $3 million.


                                       13
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)


         On July 24, 1997, the Company notified the holders of its 1,380,000
publicly traded Redeemable Common Stock Purchase Warrants (the "Public
Warrants") and its 120,000 privately held Underwriter Redeemable Common Stock
Purchase Warrants (the "Underwriter Warrants") that it would redeem these
Warrants on August 26, 1997 at the redemption price of $.20 per Warrant. Prior
to August 26, 1997, the holder of a Public Warrant had the right to exercise
such Warrant to acquire 1.044 shares of the Company's Common Stock at a price of
$8.05 per share and the holder of an Underwriter Warrant had the right to
exercise such Warrant to acquire 1.09 shares of Common Stock at a price of $9.26
per share. The Company received net proceeds of approximately $10.1 million
through the exercise of its Public Warrants. The holders of approximately 92% of
these Warrants elected to exercise the Warrants rather than have them redeemed.
Approximately 1,327,000 shares of Common Stock were issued upon exercise of the
Public Warrants. None of the Underwriter Warrants were exercised.

         The Company anticipates that it may be required to raise substantial
additional capital in the future in order to finance further expansion of its
manufacturing capacity and its research and development programs. The Company's
existing cash resources together with funds generated from operations are
believed to be sufficient to support the Company's operations on their
anticipated scale for at least the next twelve months. Management of the Company
currently believes that this anticipated scale of operations will include
additional Ibis 1000 oxygen implanters (in addition to its two oxygen implanters
currently on-line), the purchase of support equipment and expansion of the
Company's facilities.

New Accounting Pronouncements

         In June 1997, the Financial Accounting Standards Board issued SFAS 130,
"Reporting Comprehensive Income," which establishes standards for reporting and
display of comprehensive income and its components in a full set of
general-purpose financial statements. Under this concept, all revenues,
expenses, gains and losses recognized during the period are included in income,
regardless of whether they are considered to be results of operations of the
period. Effective January 1, 1998 the Company adopted SFAS 130, which had no
impact on the financial statements of the Company.

         In June 1997, the Financial Accounting Standards Board issued SFAS 131,
"Disclosures about Segments of an Enterprise and Related Information," which
establishes standards for the way that public business enterprises report
selected information about operating segments in annual financial statements and
requires that those enterprises report selected information about operating
segments in interim financial reports to shareholders. It also establishes
standards for related disclosures about products and services, geographic areas
and major customers. SFAS 131, which becomes effective for the Company in its
year ending December 31, 1998, is currently not expected to have a material
impact on the Company's financial statements and footnote disclosures.



                                       14
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (continued)


         Effective January 1, 1998, the Company adopted American Institute of
Certified Public Accountants' Statement of Position 98-1, "Accounting for the
Costs of Computer Software Developed or Obtained for Internal Use" (SOP 98-1)
which establishes guidelines for the accounting for the costs of all computer
software developed or obtained for internal use. SOP 98-1 must be applied on a
prospective basis as of the adoption date. Under SOP 98-1, certain consulting,
payroll and related costs for company consultants or employees working on the
application of development stage projects as defined in the SOP for internal use
computer software must be capitalized and amortized over the expected useful
life of the software. Previously, the Company had expensed these costs as
incurred. The adoption of SOP 98-1 did not have a material impact on the
Company's results of operations in the first six months of 1998 or financial
position at June 30, 1998.

Effects of Inflation

         The Company believes that over the past three years inflation has not
had a significant impact on the Company's sales or operating results.

Business Outlook

         The Form 10-Q contains forward-looking statements within the meaning of
the "safe harbor" provisions of the Private Securities Litigation Reform Act of
1995. Such statements are based on management's current expectations and are
subject to a number of factors and uncertainties which could cause actual
results to differ materially from those described in the forward-looking
statements. Such factors and uncertainties include, but are not limited to, the
uncertainty that the performance advantages of SIMOX-SOI wafers will continue to
be realized commercially or that a commercial market for SIMOX-SOI wafers will
continue to develop; the dependence by the Company on key customers (during
1995, 1996 and 1997, revenues from four customers averaged in the aggregate
between 25% and 68% of the Company's revenues, so that the loss of one or more
of these major customers and the failure of the Company to obtain other sources
of revenue could have a material adverse impact on the Company); the dependence
by the Company on revenues from its consulting arrangement with Orion (during
1995, 1996, and 1997, consulting revenues were approximately 0%, 2%, and 26%,
respectively, of the Company's revenues, so that the loss of Orion as a source
of consulting fees by the end of the second quarter of 1998 and the failure of
the Company to obtain other sources of consulting revenue could have a material
impact on the Company); the loss of the services of one or more of the Company's
key individuals, which could have a material adverse impact on the Company; the
dependence by the Company on key suppliers, so that the loss of services of one
or more suppliers could have a material adverse impact on the Company; the
development of competing or superior technologies and products from
manufacturers, many of which have substantially greater financial, technical and
other resources than the Company; the Company's lack of experience in producing
commercial quantities of its products at acceptable costs; the Company's ability
to develop and maintain strategic alliances for the manufacturing, marketing and
distribution of its products; the cyclical nature of the semiconductor industry,
which has negatively affected the Company's sales of SIMOX-SOI wafers during
industry downturns and which could continue to do so in the future; the limited
availability of critical materials and components for wafer products and
implanters, as a shortage of such materials and components or a significant
increase in the price thereof could have a material adverse effect on the
Company's business and results of operations; the availability of additional
capital to fund expansion on acceptable terms, if at all; and general economic
conditions.




                                       15
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                     PART II

                                OTHER INFORMATION


Item 1 - Legal Proceedings
         None

Item 2 - Changes in Securities
         None

Item 3 - Defaults upon Senior Securities
         None

Item 4 - Submission of Matters to a Vote of Security Holders
         The Annual Meeting of Stockholders of the Company was held on May 14,
         1998. The following matters were voted on at the meeting:

         (1)  Three persons were elected to the Board of Directors of the
              Company to serve for a term ending in the Year 2001 and until
              their successors are duly elected and qualified. The following is
              a table setting forth the number of votes cast for and withheld
              for each nominee for Director:

<TABLE>
<CAPTION>

                Name                      Vote For             Vote Withheld
                ----                      ---------            -------------
                <S>                       <C>                  <C>    
                Dimitri Antoniadis        5,689,175            163,566
                Robert L. Gable           5,689,175            163,566
                Martin J. Reid            5,690,175            162,566
</TABLE>

         Donald F. McGuinness and Peter H. Rose continue to serve as Directors
         for terms which expire in 1999 and Richard Hodgson and Geoffrey Ryding
         continue to serve as Directors for terms which expire in 2000.

         (2)  The Stockholders of the Company approved the adoption of the
              Company's 1997 Employee, Director and Consultant Stock Option Plan
              and the reservation of 750,000 shares of Common Stock for stock
              options which may be granted under the 1997 Plan. This proposal
              was approved with 2,255,632 votes for, 402,938 votes against,
              42,992 abstentions and 3,151,179 broker non-votes.

         (3)  The Stockholders of the Company ratified the appointment of KPMG
              Peat Marwick LLP as the Company's independent public accountants
              for the fiscal year ending December 31, 1998. This proposal was
              approved with 5,767,490 votes for, 63,471votes against and 21,780
              abstentions.

         (4)  The Stockholders of the Company approved an amendment to the
              Company's Articles of Organization to increase the number of
              authorized shares of Common Stock from 10,000,000 shares to
              20,000,000 shares. This proposal was approved with 5,700,999 votes
              for, 118,594 against and 33,148 abstentions.



                                       16
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                     PART II

                                OTHER INFORMATION

Item 5 - Other Information
         To be considered for inclusion in the proxy statement relating to the
         Annual Meeting of stockholders to be held in 1999, stockholder
         proposals must be received no later than December 1, 1998. To be
         considered for presentation at the Annual Meeting, although not
         included in the proxy statement, proposals must be received no later
         than March 15, 1999 and no earlier than February 13, 1999. All
         stockholder proposals should be marked for the attention of Clerk, Ibis
         Technology Corporation, 32 Cherry Hill Drive, Danvers, MA 01923.

Item     6 - Exhibits and Reports on Form 8-K 

             (a) Exhibits furnished as Exhibits hereto:

                  +10.39   Purchase Order, dated April 14, 1998, from Mitsubishi
                           Materials Silicon Corporation.

                  +10.40   Task Order, dated April 10, 1998, between the
                           Registrant and International Business Machines
                           Corporation ("IBM").

                  +10.41   Licensing and Development Agreement, dated June 9,
                           1998, between the Registrant and IBM.

                  27       Financial Data Schedule.

         (b)      Reports on Form 8-K

                  The Company filed with the Securities and Exchange Commission
                  (the "Commission") on April 3, 1998 a Current Report on Form
                  8-K for the April 2, 1998 event reporting that Dr. Julian
                  Blake had joined the Company as its Director of Technology.

                  The Company filed with the Commission on May 13, 1998 a
                  Current Report on Form 8-K for the May 11, 1998 event
                  reporting the financial results for the first quarter ended
                  March 31, 1998. The company also announced that it has
                  received a confirming purchase order for an Ibis 1000
                  implanter from Mitsubishi Materials Corporation through its
                  Mitsubishi Materials Silicon Corporation Subsidiary. A letter
                  of intent for this purchase was previously disclosed in the
                  Company's March 5, 1998 press release.

                  The Company filed with the Commission on June 10, 1998 a
                  Current Report on Form 8-K for the June 9, 1998 event
                  reporting that it had completed the sale of two Ibis 1000
                  implanters to IBM Corporation in a transaction valued at
                  approximately $8 million. The sale to IBM includes an
                  equipment licensing and development agreement which gives IBM
                  the right to a royalty-bearing, non-exclusive license to
                  supplement Ibis equipment manufacturing capacity. The purchase
                  orders for the two implanters were previously disclosed in
                  Ibis press released dated March 5, 1998.

                  ---------------
                  + Confidential treatment requested as to certain portions,
                  which portions are omitted and filed separately with the
                  Commission.


                                       17
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                   SIGNATURES


Pursuant to the requirements of the Securities Exchange Act of 1934, the
registrant has duly caused this report to be signed on its behalf by the
undersigned, thereunto duly authorized.


                           Ibis Technology Corporation



Date:   August 13, 1998    By:      /s/Debra L. Nelson
                               -----------------------
                                  Debra L. Nelson
                                  Chief Financial Officer, Treasurer and Clerk
                                  (principal financial and accounting officer)


Date:   August 13, 1998    By:      /s/Thomas F. Lacey
                                ----------------------
                                  Thomas F. Lacey
                                  Controller and Assistant Treasurer



                                       18
<PAGE>


                           IBIS TECHNOLOGY CORPORATION

                                  EXHIBIT INDEX



<TABLE>
<CAPTION>
Exhibit No.                                 Description                                                         Page
- -----------                                 -----------                                                         ----
<S>               <C>                                                                                           <C>
+10.39            Purchase Order, dated April 14, 1998, from Mitsubishi Materials Silicon Corporation.           20

+10.40            Task Order, dated April 10, 1998, between the Registrant and International Business            23
                  Machines Corporation ("IBM").

+10.41            Licensing and Development Agreement, dated June 9, 1998, between the Registrant
                  and IBM.                                                                                       41

27                Financial Data Schedule                                                                        65

</TABLE>

                  ---------------
                  + Confidential treatment requested as to certain portions,
                  which portions are omitted and filed separately with the
                  Commission.


                                       19

<PAGE>

                                                                 Exhibit 10.39

IBIS TECHNOLOGY CORPORATION HAS OMITTED FROM THIS EXHIBIT 10.39 PORTIONS OF 
THE EXHIBIT FOR WHICH IT HAS REQUESTED CONFIDENTIAL TREATMENT FROM THE 
SECURITIES AND EXCHANGE COMMISSION. THE PORTIONS OF THE AGREEMENT FOR WHICH 
CONFIDENTIAL TREATMENT HAS BEEN REQUESTED ARE MARKED [    ] AND SUCH 
CONFIDENTIAL PORTIONS HAVE BEEN FILED SEPARATELY WITH THE SECURITIES AND 
EXCHANGE COMMISSION.

[LETTERHEAD]

April 14, 1998

IBIS TECHNOLOGY CORPORATION
32A Cherry Hill Drive
Danvers, MA  01923
U.S.A.

Attention:  Mr. Al Alioto, Vice President, Sales & Marketing

Re: Purchase Order for This 1000 Implanter

Dear Sirs:

This letter serves as our formal purchase order for the Ibis 1000 Implanter, the
specifications of which are summarized in the Appendix A attached, according to
the following terms and conditions.

(1)      Purchase Price:   [    ]
(2)      Payment Terms:

         - [ ] within [ ] days after Ibis' acceptance of this purchase order

         - [ ] upon completion of assembly, test and demonstration of the
designed capability to produce good quality SIMOX wafers at Ibis to the
specifications agreed between MSIL and Ibis

         - Balance upon installation test run and acceptance by MSIL in Japan,
such tests and acceptance criteria to be agreed between MSIL and Ibis prior to
shipment.

                       MITSUBISHI MATERIALS SILICON CORPORATION
                     314 NISHISANGAO NODA-SHI CHIBA-KEN 278 JAPAN

                                       20
<PAGE>

[LETTERHEAD]

(3)      Spares and Services
         Separate purchase orders will be placed for spare parts and services.

We will look forward to receiving your acceptance of this order. We would also
like to receive your latest delivery schedule for the equipment.

With. best regards.
Sincerely yours,

/s/ Yunchi Furukawa
Yunchi Furukawa
Managing Director

Attachment



                                       21
<PAGE>

                                                                Exhibit 10.40

                                   APPENDIX A
                        Ibis 1000 Implanter Specification
                                     Summary

[    ]





                                       22

<PAGE>

                                                                Exhibit 10.40

IBIS TECHNOLOGY CORPORATION HAS OMITTED FROM THIS EXHIBIT 10.40 PORTIONS OF 
THE EXHIBIT FOR WHICH IT HAS REQUESTED CONFIDENTIAL TREATMENT FROM THE 
SECURITIES AND EXCHANGE COMMISSION. THE PORTIONS OF THE AGREEMENT FOR WHICH 
CONFIDENTIAL TREATMENT HAS BEEN REQUESTED ARE MARKED [   ] AND SUCH 
CONFIDENTIAL PORTIONS HAVE BEEN FILED SEPARATELY WITH THE SECURITIES AND 
EXCHANGE COMMISSION.

                                  Task Order #1
                                       to
                       Equipment Purchase Master Agreement
                                    No. 07482

This Task Order Agreement sets forth the terms and conditions of an individual
Equipment Purchase. All of the terms and conditions of the Equipment Purchase
Master Agreement No. 07482 between the parties ("EPMA") shall apply unless
superseded herein.

1.0      STATEMENT OF WORK

IBIS shall build, test, deliver, install and sell to IBM, and IBM shall buy, 
two (2) IBIS-1000 oxygen implantation systems (hereinafter referred to as 
"Equipment" arid "System #1" (with respect to the first system purchased and 
sold) and "System #2" (with respect to the second system purchased and sold). 
System #1 will initially be put into service at IBIS' facility in Danvers, MA 
as specified below. System #2 will be delivered to IBM'S East Fishkill, New 
York facility as specified below or other IBM facility as specified by IBM. 
The term "Equipment" shall also include all Deliverables specified in the 
Section entitled DELIVERABLES in the Equipment Purchase Master Agreement. IBM 
may, from time to time and in its sole discretion, order additional IBIS-1000 
or other model oxygen implantation systems under the terms of this Task 
Order. Nothing in this Agreement shall obligate IBM to purchase additional 
systems from IBIS. 

                                       23
<PAGE>

The Equipment is to be provided in accordance with the provisions of the 
Equipment Purchase Master Agreement, this Task Order Agreement, Attachments 
and Appendices, as well as any IBM Purchase Orders issued hereunder.

IBIS agrees that the price for the Equipment is that specified in the Section
entitled PRICING below.

2.0      PRICING

                                    -       Price for System #1 - [    ]

                                    -       Price for System #2 [    ]

2.1 IBM shall pay IBIS a transfer fee of [ ] in the event that IBM moves 
System #1 from IBIS' facility to IBM's facility or accepts a replacement 
system pursuant to Section 11.2.

3.0 IBIS SYSTEMS DELIVERY DATES

System #1 will be tested and put into service at IBIS' facility in Danvers, MA
as specified in Section 4 below.

IBIS will use best efforts to meet the schedule in Section 4.2 below, but in no
event shall System #2 be delivered to IBM later than [ ]. Time is of the
essence.

4.0      COMPLETION SCHEDULE


                                       24
<PAGE>

Major milestones for performing this Agreement and corresponding completion
dates are set out in the following schedule.

A technical review shall be conducted at each scheduled Milestone unless
otherwise agreed to by IBM and IBIS. Additional reviews may be conducted if
deemed necessary by IBM and IBIS. The agenda for the reviews shall include a
status of the work specified to be performed to date, significant problems
encountered, proposed and actual solution, as well as anticipated problems.

4.1  Schedule for System #1
     Preliminary Test                                                    [    ]
     Final Test                                                          [    ]

4.2  Schedule for System #2
     Design Review                                                       [    ]
     Equipment assembly                                                  [    ]
     Preliminary Test (IBIS M1000 Specification)                         [    ]
     Equipment Shipment to IBM                                           [    ]
     Equipment Installation at IBM                                       [    ]
     Final Test (Test to meet specifications as agreed upon between
     IBIS & IBM)                                                         [    ]


                                       25
<PAGE>

5.0      PURCHASE ORDERS/INVOICES

5.1 Upon execution of this Task Order for Equipment, Purchase Order Nos. 990NU3K
and 990NV7C will be delivered to IBIS authorizing the work on System #1 and
System #2, respectively. Each Purchase Order shall reference the Equipment
Purchase Master Agreement, this Task Order Agreement, and General Procurement
specifications for Process Equipment.

5.2 IBIS hereby grants to IBM the options to purchase up to [ ] additional new
fully functional SIMOX systems from IBIS' then-current product line (the
model(s) to be selected by IBM) under this Task Order Agreement and the
Equipment Purchase Master Agreement during the period beginning with the
Effective Date and ending on [ ]; such Option to be exercised by the sending of
IBM purchase order(s) to IBIS for such system(s); each such system to be
delivered no later than [ ]after delivery of the applicable purchase order by
IBM; and at a price that is the lower of (a) [ ] and (b) a price determined by
Section 10.2 of the EPMA. IBM and IBIS will negotiate if more than [ ]identical
SIMOX systems are required in a twelve (12) month period.

5.3 IBIS hereby agrees that IBM and/or its AFFILIATES shall have no obligation
whatsoever (i) to purchase any goods (other than Systems #1 and #2) or services
from IBIS or (ii) to exercise the option in Section 5.2.

5.4 IBIS shall send all invoices to the following address:


                                       26
<PAGE>

         IBM Corporation
         Accounts Payable Dept.
         P.O. Box 8098
         Endicott, NY 13761-8098

6.0      EXECUTION

This Task Order shall commence as of the Date of Execution below and shall
expire on December 31, 2003, unless extended by a formally executed written
amendment or unless terminated pursuant to Section entitled TERMINATION of the
Equipment Purchase Master Agreement.

7.0      COORDINATORS

7.1 All communications and notices between the parties shall be made or given to
the party's Purchasing Coordinator assigned as stated below:
In the case of IBM:

         Vic Cole

In the case of the IBIS:

         Al Alioto

7.2      The Technical Coordinator's assigned by each party are:

         For IBM:  Devendra Sedana, Scott Price

         For IBIS: Al Alioto




                                       27
<PAGE>

8.0      Deliberately left blank

9.0      INTELLECTUAL PROPERTY RIGHTS INDEMNIFICATION

         -        See License Agreement/EPMA

10.0     INTELLECTUAL PROPERTY RIGHTS

10.1.1 - IBIS agrees to deliver all of the data specified for delivery to IBM in
Section 5.0 entitled "DELIVERABLES" of the Equipment Purchase Master Agreement
and any additional data agreed by the parties to be delivered to IBM.

11.0     CONSIGNMENT

11.1 System #1 is hereby consigned by IBM to IBIS, subject to the terms of this
Agreement, including Appendix A.

11.2 IBIS grants IBM the option, to be exercised, if at all, in IBM's sole
discretion: i) to have IBIS transfer SIMOX System #1 to IBM's facility upon one
hundred and fifty (150) days' notice to IBIS; or ii) to transfer title to SIMOX
System #1 to IBIS and in exchange to receive and have delivered to IBM's
facility a new SIMOX system of a model then-offered by IBIS (to be selected by
IBM) upon payment of the amount set forth in Section 2.1, as the total
consideration) by giving five 


                                       28
<PAGE>

(5) months notice of its election to IBIS. The terms of such transfer of title
of IBM'S consigned SIMOX System #1 to IBIS shall be as specified in Appendix B.

12.0     SURVIVAL

To extent a particular right or obligation herein does not have a specifically
identified survival period, all rights and obligations which by their nature
survive the expiration or termination of this Task Order will remain in effect
beyond any expiration or termination for the period reasonably necessary to
accomplish their purpose and shall bind and inure to the benefit of the parties,
their legal representatives, successors and assigns.

13.0     CHANGES OR AMENDMENTS

The Task Order may not be changed or amended except by the signed written
agreement of the authorized representatives of both parties.

Accepted and Agreed to:

INTERNATIONAL BUSINESS                        IBIS TECHNOLOGY
MACHINES CORPORATION                          CORPORATION



By: /s/  Michael J. Flaherty                  By:  /s/ Al Alioto
   ----------------------------------             ------------------------------
Print Name:  Michael J. Flaherty              Print Name: Al Alioto
           --------------------------                    -----------------------


                                       29
<PAGE>

Title:  Mgr. Capital Equipment Procurement    Title: Vice President of Sales and
                                                     Marketing

Date:  5/14/98                                 Date:  April 11, 1998



                                       30
<PAGE>

                                   APPENDIX A

                      SUPPLEMENTAL TERMS AND CONDITIONS FOR
                         CONSIGNMENT OF IBM'S SYSTEM #1

The following provisions of this Appendix A to Task Order #1 supersede the 
terms in Appendix C of Equipment Purchase Master Agreement No. 07482 only for 
the SIMOX System #1 consigned to IBIS by IBM and activities performed under 
the terms of Task Order #1.

Pursuant to Section 11.1 of Task Order #1, IBM shall  consign  IBM's System 
#1 to IBIS subject to the  following  terms and conditions:

1.0 - System #1 shall remain the property of IBM. IBIS shall not pledge, 
mortgage, encumber, or assign System #1 in any manner, or transfer System #1 
to a third party, or exercise any right of ownership in System #1 or perform 
any act inconsistent with IBM'S ownership thereof, without IBM'S written 
approval.

2.0 - IBIS may use System #1 for the performance of implantation for other 
customers, provided that orders issued by IBM for implantation of wafers 
shall have absolute priority over orders from other customers of IBIS, and 
IBIS shall immediately process such IBM wafers.

                                       31
<PAGE>

3.0 - IBM shall have the right to inspect periodically System #1. Such 
inspections shall be conducted during normal business hours, subject to 
reasonable notice.

4.0 IBIS shall maintain records of all transactions involving the System #1 
and keep these records on 51. for a minimum of three (3) years from the date 
the work or services being performed have Inn completed. During such three 
(3) year period, IBM may audit these records during reasonable business 
hours, subject to reasonable notice.

5.0 - IBIS shall transfer System #1 to IBM's facility in accordance with 11.2 
of Task Order or within 60 days of termination of EPMA.

6.0 IBIS shall be responsible for any damage to System #1 while it is 
consigned to IBIS. System #1 shall be delivered to IBM in working order and 
in as good condition as when first put into service at IBIS facility 
(pursuant to Section 5.0) reasonable wear and tear accepted, and IBIS shall 
make any repairs or refurbishing required. The warranty period for System #1 
shall extend for the entire period during which System #1 remains at IBIS' 
facility and for an additional period of six (6) months after System #1 is 
installed at IBM's facility and accepted by IBM.

6.1 Delivery of System #1 to IBM hereunder shall be to IBM'S dock at East 
Fishkill, New York or to any other location IBM may direct. Crating, 
transportation, and insurance shall be at IBIS' expense.

                                       32
<PAGE>

7.0 IBIS agrees to indemnify, defend, and hold harmless, IBM, its officers, 
directors, agents, and employees, from any and all liability, losses, damages 
or expenses associated with claims, suits, or actions brought by or on behalf 
of any third party of any nature, including, but not limited to, personal 
injury (including death), environmental liability, or property damage arising 
from, or alleged to arise from IBIS' negligence or other wrongful acts or 
omissions resulting from or in any way related to this Agreement. For the 
avoidance of doubt, the obligations of this paragraph also apply to all 
claims, suits or actions based on the design or operation of System #1.

7.1 IBIS agrees to indemnify, defend, and hold harmless, IBM, its officers, 
directors, agents, and employees, from any and all liability, losses, damages 
or expenses associated with claims, suits, or actions brought by or on behalf 
of any third party of any nature, including, but not limited to, personal 
injury (including death), environmental liability, or property damage arising 
from, or alleged to arise from, IBIS' negligence or other wrongful acts or 
omissions and/or IBM's negligence or other wrongful acts or omissions 
resulting from or in any way related to work performed by IBIS on System #1 
for any person or entity other than IBM. For the avoidance of doubt, the 
obligations of this paragraph also apply to all claims, suits, or actions 
based on the design or operation of System #1.

                                       33
<PAGE>

8.0      INSURANCE
8.1 IBIS shall purchase, at its own expense, and during the term of this
Agreement (unless a longer term is specified) maintain in full force and effect
at least the following kinds and minimum amounts of insurance with reputable
insurance carriers:


         a. Workers' compensation insurance in accordance with statutory
         requirements.

         b. Comprehensive General Liability insurance, covering any liability
         for bodily injury, personal injury (including death), and property
         damage arising from IBIS' operations, its products and services
         provided hereunder, its assumed liabilities under this Agreement
         (including contractual indemnities), and its use and operation of its
         facilities, for limits of not less than $2,000,000.00 per occurrence
         combined single limit bodily injury and property damage. IBM shall be
         listed as an additional insured on the policy.

         IBIS shall maintain the foregoing coverage in full force and effect for
         at least three years following the expiration of this Agreement.

         c. Property Damage Insurance covering the IBM SIMOX System #1 located
         at IBIS' facilities. Such insurance shall be written on an "all risk"
         of physical loss or damage basis, for the full replacement cost of the
         covered items and in amounts that meet any coinsurance clause of the
         policies of insurance. IBM shall be listed as an additional insured and
         loss payee on the policy.

         d. Comprehensive Automobile Liability Insurance - third party, bodily
         injury, property damage with limits of $2,000,000.00 per occurrence for
         owned, non-owned, and hired vehicles used by IBIS while performing
         services in connection with this Agreement. IBM shall be listed as an
         additional insured on the policy.

         e. Employers Liability coverage with a limit of $1,000,000.00 per
         occurrence. IBIS shall not commence work until it has furnished IBM
         with certificates of insurance evidencing the coverage required by this
         Section. Such certificates must provide that the insurer will give IBM
         at least thirty (30) days prior written notice of material change in or
         cancellation of such insurance. IBIS shall indemnify, defend, and hold
         harmless IBM for all damages sustained by IBM resulting from IBIS'
         failure to have and maintain the insurance required in this Section.

         f. Maintenance of the Insurance required in this Section shall in no
         way be interpreted as relieving IBIS of any responsibility whatsoever
         under this Agreement. IBIS may secure, at its own expense, such
         additional insurance as it deems necessary.


                                       34
<PAGE>

9.0 If IBIS is unable to deliver System #1 to IBM when requested due to loss or
theft, IBIS shall pay IBM the actual cash value of System #1 and explain in
detail the circumstances surrounding such failure to deliver. If IBIS is able
but, for any reason, fails to deliver upon IBM's request, IBM shall have the
right to enter IBIS' premises to remove System #1, and IBIS expressly waives any
rights or remedies IBIS has with regard to System #1 including, but not limited
to, any right IBIS has to notice and a hearing or to a bond, undertaking, or
surely before a writ of replevin, order of seizure, or similar writ or order.
IBM shall have all other remedies, at law or in equity.


                                       35
<PAGE>

                                   APPENDIX B

The following terms and conditions shall govern the exercise of the option in
Section 11.2(ii) of Task Order #1.

PROPERTY - Any reference to "Property" or "property" herein shall be construed
to mean the used SIMOX System #1 located at IBIS' facility.

ACCEPTANCE -- The terms and conditions contained herein are the complete and
exclusive statement of the terms of any sale to IBIS. IBIS' signature below
confirms IBIS' assent to these terms and conditions. No addition to or
modification of any of these terms and conditions will be effective unless
agreed to in writing by IBM. Any terms and conditions submitted on documents
supplied by IBIS shall be deemed non-conforming.

WARRANTIES -- ALL PROPERTY IS SOLD ON AN "AS IS" BASIS WITH ALL FAULTS, LATENT
AND PATENTS. IBM MAKES NO WARRANTIES, EXPRESS OR IMPLIED, AS TO THE NATURE,
QUALITY OR CONDITION OF THE PROPERTY, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED
WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE OR
NON-INFRINGEMENT, OR OTHERWISE. IBM shall have no responsibility for shipping,
installation, warranty, maintenance, engineering changes or technical support of
the property purchased hereunder.



                                       36
<PAGE>

PERMITS AND AUTHORIZATIONS REQUIRED BY LAW -- IBIS represent that IBIS possess
all the necessary permits and authorizations required to disassemble, remove,
transport, resell or otherwise properly dispose of the property being acquired.
IBIS agree to comply with all applicable Federal, State and local laws,
regulations and ordinances, including but not limited to the regulations of
ordinances, including but not limited to the regulations of the United States
Department of Commerce relating to the Export of Technical Data, insofar as they
relate to IBIS' performance.

INDEMNIFICATION -- IBIS agree to indemnify IBM against any and all claims for
damages, including costs and attorney's fees, for personal injury (including
death), and loss of or destruction or damage to real or tangible personal
property arising from IBIS' acts, omissions or misrepresentation, regardless of
the form of action brought against IBM.

INFRINGEMENT OF PATENTS -- The purchase of property does not convey by
implication or otherwise any licenses under any patent, domestic or foreign. IBM
makes no representation or warranty that the use of any material, equipment or
technical information furnished hereunder will not infringe any patent,
trademark, copyright, trade secret, or other proprietary interests of any third
party, and it shall be IBIS' sole responsibility to make such determination as
is necessary with respect to other rights of third parties. IBM shall not be
held to any liability with respect to any claim made by any third party on
account of, or arising from, the use of such material, equipment, or technical
information. IBIS agree to indemnify and save harmless IBM from any and all
costs, expenses, liabilities, and claims for infringement of any patents or
similar instruments or any 



                                       37
<PAGE>

trademarks, copyrights, trade secrets, or other proprietary interests in any
foreign country or in the U.S.A. (subject to maximum cap as specified in the
license and development Section 11.1)

LIMITATION OF IBM'S LIABILITY -- IBM'S entire liability and IBIS' exclusive
remedy are set forth in this section. Under no circumstances shall IBM be liable
to IBIS for any lost revenue, consequential damages, incidental damages, lost
profits or possibility of such damages. In addition, in no event will IBM be
liable on any third party claim or for damages caused by IBIS' failure to
perform IBIS' responsibilities. In no event, except for claims by IBIS for
bodily injury or damage to real property or tangible personal property for which
IBM is legally liable, will IBM be liable to IBIS for actual damages in excess
of the amount paid by IBIS for property under this Agreement. These limitations
apply, regardless of the form of action, whether in contract or in tort,
including negligence.

GENERAL -- This Agreement shall be governed by the laws of the State of New
York, without regard to die conflict of laws principles thereof. The parties
hereto expressly waive any right they may have to a jury trial and agree that
any proceeding under this Agreement shall be tried by a judge without a jury.

If any section or subsection of this Agreement is found by competent judicial
authority to be invalid, illegal or unenforceable in any respect, the validity,
legality and enforceability of any such section or subsection in every other
respect and the remainder of this Agreement shall continue in effect so long 



                                       38
<PAGE>

as the redacted contract still expresses the Intent of the parties. If the
intent of the parties cannot be preserved, this Agreement shall be either
renegotiated or terminated.

All obligations and duties which by their nature survive the expiration or
termination of this Agreement shall remain in effect beyond any expiration or
termination.

No actions, regardless of form, arising out of this Agreement, may be brought by
either party more than two years alter the cause of action has arisen, or, in
the case of nonpayment, more than two years from the date payment was due.

Neither party shall assign this Agreement or any rights hereunder without the
prior written consent of the other party.

The waiver by either party of any instance of the other party's noncompliance
with any obligation or responsibility herein shall not be deemed a waiver of
subsequent instances or of either party's remedies for such noncompliance.

CONFIDENTIAL INFORMATION -- If any confidential information is to be disclosed
by IBM or IBIS, such disclosure shall be under the terms of the EPMA.


                                       39
<PAGE>

CHEMICAL -- IBIS agree to indemnify IBM against any and all claims or actions
for damage or other relief that may arise due to the property containing
chemical residue. IBIS agree to meet all applicable government safety standards
and environmental regulations and laws for the removal and transportation of
this property

EXPORT -- Some material(s) included in this sale may be a controlled commodity
and require a validated export license issued by the U.S. Department of Commerce
prior to the export of such commodities from the U.S. As a condition of sale,
Buyer will abide by all U.S. Export/Re-export Administration regulations,
including export license whenever applicable. IBIS acknowledge awareness of such
regulations and agree to become familiar with them prior to exporting any
property from the U.S.

SOLE AGREEMENT - THIS AGREEMENT embodies the understanding of the parties with
respect to the sale of the property and supersedes all previous communications,
representations or understandings, either written or oral, between the parties.

INTERNATIONAL BUSINESS                        IBIS TECHNOLOGY
MACHINES CORPORATION                          CORPORATION


BY:  /s/ Michael J. Flaherty                  BY:  /s/ Al Alioto
    --------------------------------------       ------------------------------
TITLE:  Mgr. Capital Equipment Procurement    TITLE:  VP of Sales and Marketing
       -----------------------------------           --------------------------
DATE:  5/14/98                                DATE:   April 11, 1998
       -----------------------------------           --------------------------


                                       40

<PAGE>


                                                                  
                                                                  EXHIBIT 10-41


IBIS TECHNOLOGY CORPORATION HAS OMITTED FROM THIS EXHIBIT 10.41 PORTIONS OF 
THE EXHIBIT FOR WHICH IT HAS REQUESTED CONFIDENTIAL TREATMENT FROM THE 
SECURITIES AND EXCHANGE COMMISSION. THE PORTIONS OF THE AGREEMENT FOR WHICH 
CONFIDENTIAL TREATMENT HAS BEEN REQUESTED ARE MARKED [  ] AND SUCH 
CONFIDENTIAL PORTIONS HAVE BEEN FILED SEPARATELY WITH THE SECURITIES AND 
EXCHANGE COMMISSION.


                            LICENSING AND DEVELOPMENT
                                    AGREEMENT
                                     between
                   INTERNATIONAL BUSINESS MACHINES CORPORATION
                                       and
                           IBIS TECHNOLOGY CORPORATION


                                       41

<PAGE>


                                TABLE OF CONTENTS


<TABLE>
<CAPTION>

Section Page

<S>                                                                    <C>
1. DEFINITIONS.......................................................  Page 1

2. PROGRAM...........................................................  Page 4

3. LICENSES..........................................................  Page 4

4. CONFIDENTIAL INFORMATION..........................................  Page 7

5. OWNERSHIP OF INTELLECTUAL PROPERTY AND TOOLS......................  Page 10

6. PAYMENT...........................................................  Page 11

7. TERM AND TERMINATION..............................................  Page 12

8. REPRESENTATIONS AND DISCLAIMERS...................................  Page 13

9. TECHNOLOGY TRANSFER AND TECHNICAL ASSISTANCE......................  Page 15

10. APPLICABLE LAW...................................................  Page 16

11. MISCELLANEOUS....................................................  Page 17

APPENDIX A SCHEDULE..................................................  Page 22

APPENDIX B DELVERABLES...............................................  Page 23

</TABLE>

                                       42

<PAGE>

This Licensing and Development Agreement ("Agreement") is made effective as of
March 1, 1998 ("Effective Date") by and between International Business Machines
Corporation (IBM), a New York corporation, having an office at 1580 Route 52,
Hopewell Junction, New York, United States of America and Ibis Technology
Corporation (IBIS), a Massachusetts corporation, having an office at 32 Cherry
Hill Drive, Danvers Massachusetts, United States of America, said named parties
being referred to hereinafter individually as a "Party" and collectively as the
"Parties".

WHEREAS, the Parties have developed expertise in the development and manufacture
of ion beam systems for implanting semiconductor wafers;

WHEREAS, IBM wishes to obtain a license to make and have made ion implanting
tools designed by IBIS;

WHEREAS, IBIS agrees to train IBM personnel in the design, manufacture,
operation and use of such tools;

WHEREAS, IBM wishes to obtain a license to make and have made improvements made
by IBIS in ion-implantation systems;

NOW, THEREFORE in consideration of the contributions of knowledge and skill in
the areas of their respective expertise, in the cooperative undertaking
specified hereunder, and in view of the mutual promises, commitments, and
efforts relating thereto, it hereby is agreed between the Parties hereto as
follows:

1        DEFINITIONS

         Words shall have their normally accepted meanings as employed in this
Agreement. The terms "herein", "hereunder" and "hereof", unless specifically
limited, shall have reference to the entire Agreement. The words "shall" and
"will" are mandatory, the word "may" is permissive, the word "or" is not
exclusive, the words "includes" and "including" are not limiting and the
singular includes the plural. The following terms shall have the described
meanings:

         1.1      "Affiliate" shall mean a corporation, company or other entity:

                  1)    more than twenty-five percent (25%) of whose
                        outstanding shares or securities (representing the
                        right to vote for the election of directors or other
                        managing authority) are, now or hereafter, owned or
                        controlled, directly or indirectly, by a Party
                        hereto, but such corporation, company or other entity
                        shall be deemed to be an Affiliate only so long as
                        such ownership or control exists; or

                  2)    which does not have outstanding shares or securities,
                        as may be the case in a partnership, joint venture or
                        unincorporated association, but more than twenty-five
                        percent (25%) of whose ownership interest
                        representing the right to make the decisions for such
                        corporation, company or other entity is, now or
                        hereafter, owned or controlled, directly or
                        indirectly, by a Party hereto, but such corporation,
                        company or other entity shall be deemed to be an
                        Affiliate 


                                       43

<PAGE>

                         only so long as such ownership or control exists; or

                         [       ]

         1.2      "Background Intellectual Property Rights" shall mean
                  Intellectual Property Rights that are owned by a Party or
                  Parties and are created outside the course and scope of the
                  Program.

         1.3      "Change of Control" shall mean one (1) transaction or a series
                  of related transactions which results in a third Party
                  obtaining, directly or indirectly, (a) thirty (30) percent or
                  more of the ownership of the outstanding voting shares or
                  other ownership interest of, or (b) the right to manage the
                  business or control the disposition of assets of, or (c)
                  Control of a Party.

         1.4      "Confidential Information" shall mean technical and business
                  information disclosed within the course and scope of the
                  Program by or on behalf of a Party that is embodied in
                  tangible form and marked as specified in Section 4.6 of this
                  Agreement.

         1.5      "Control" shall mean the power to direct the affairs of a
                  Person by reason of ownership of voting stock, by asset
                  acquisition, contract or otherwise.

         1.6      "Deliverables" shall mean drawings, data, algorithms, computer
                  source and object code, reports, documentation and the like
                  pertaining to SIMOX systems (e.g. the IBIS 1000), as specified
                  in Appendix B.

         1.7      "Escrow Agent" shall mean Fort Knox Escrow Services, Inc.,
                  3539A Church Street, Clarkston, Georgia, 30021-1717, or such
                  other escrow agent as the Parties may later agree to use.

         1.8      "Improvement" shall mean any change, upgrade, modification or
                  revision to the Licensed Technology and/or in the field of
                  SIMOX put into commercial use by a Party during the Term, or
                  which such Party acquires the right to license during the
                  Term. Improvements shall not include any change, upgrade,
                  modification or revision to the Licensed Technology that a
                  Party is contractually prohibited by a Prior Agreement from
                  providing to a third Party. In the case of information
                  disclosed by IBM, Improvements shall exclude information on
                  the operation of ion-implanting systems or other processing of
                  integrated circuit wafers, e.g. annealing, which IBM shall
                  have no obligation to provide or to disclose hereunder. For
                  the avoidance of doubt, Improvements shall include know-how or
                  other information contained in a new model SIMOX system sold
                  by IBIS during the Term.

         1.9      "Intellectual Property Rights" shall mean patent rights,
                  rights under copyright, and other rights in Inventions and
                  confidential information.

         1.10     "Licensed Patents" shall mean all patents, including utility
                  models and design patents, issued or issuing on patent
                  applications worldwide that claim inventions having an


                                       44

<PAGE>

                  effective filing date prior to the expiration of the Term,
                  under which patents or the applications therefor a Party has
                  the right, at any time during the Program, to grant licenses
                  to the other Party of the scope granted herein and any
                  continuation, continuation-in-part, divisional, reissue,
                  reexamination and any equivalents thereof. The term "Licensed
                  Patents" shall also include any patent reissuing on any of the
                  aforesaid patents. The term "Licensed Patents" shall include
                  patents which such grant or the exercise of rights thereunder
                  would result in the payment of royalties or other
                  consideration by a Party to third parties, provided that such
                  Party shall have notified the other Party of the requirement
                  of compensation and the other Party shall have consented to
                  compensate such Party for such consideration.

         1.11     "Licensed Product" shall mean a SIMOX system that
                  substantially conforms to the Licensed Technology (including
                  Improvements).

         1.12     "Licensed Technology" shall mean: a) know-how or other
                  information (e.g. computer software) contained in the
                  materials specified in Appendix B relating to the technology
                  to be transferred to IBM; and b) additional know-how or other
                  information transferred or otherwise disclosed in writing by
                  IBIS to IBM in providing technical assistance pursuant to
                  Section 9.

         1.13     "Material Default" shall mean the violation of or failure to
                  perform any material term or material covenant of this
                  Agreement by a Party.

         1.14     "Person" shall mean any individual, corporation, partnership,
                  joint venture, trust, business association, governmental
                  entity or other entity.

         1.15     "Prior Agreement" shall mean an agreement between a Party and
                  a third Party having a date of execution prior to the
                  Effective Date of this Agreement.

         1.16     "Program" shall mean the cooperative undertaking by the
                  Parties, in which IBIS discloses to IBM and trains IBM's
                  employees in the Licensed Technology including, at IBM's
                  option, IBM's making or having made and testing a Licensed
                  Product.

         1.17     "SIMOX" shall mean the implanting of oxygen ions into a
                  silicon wafer to form a layer of insulator underneath a device
                  layer of silicon and SIMOX system shall mean a system for
                  SIMOX.

         1.18     "Subsidiary" shall mean an Affiliate more than fifty percent
                  (50%) of whose outstanding shares, securities or ownership
                  interest are, now or hereafter, owned or controlled, directly
                  or indirectly, by a Party hereto, but such corporation,
                  company, or other entity shall be deemed to be a Subsidiary
                  only so long as such ownership or control exists.

         1.19     "Term" shall mean the period of time this Agreement is in
                  effect, which shall commence on the Effective Date and
                  continue until December 31, 2005, unless 


                                       45

<PAGE>

                  sooner terminated pursuant to the provisions of Section 7.

2        PROGRAM

         2.1      Each Party shall perform its tasks in the course of the 
                  Program as specified in Appendix A.

                  2.1.1 IBIS and IBM will make commercially reasonable efforts
                  to meet the schedule specified in Appendix A.

                  2.1.2 Upon exercise by IBM of either Option A or Option B as
                  set forth in Section 3.5, IBIS will give technical assistance
                  to IBM as specified in Section 9.

         2.2      Each Party shall have a Program Manager and a Technical 
                  Coordinator as follows:

                       For IBIS:  Program Manager:        Al Alioto
                       Technical Coordinator:             Al Alioto
                       For IBM:  Program Manager:         H. C. Calhoun
                       Technical Coordinator:             Devendra Sadana

                  Each Party may change its Program Manager and/or Technical
                  Coordinator by giving written notice to the other Party.

         2.3      Each of the Program Managers shall be responsible for the
                  representation of his Party's interest in the Program. The
                  Program Managers shall meet on a regular basis to review
                  progress.

         2.4      The Technical Coordinators or their designees shall supervise
                  the exchange of information during the Program.

         2.5      Each Party shall bear its own expenses in performing its tasks
                  in the course of the Program.

3        LICENSES

         3.1      IBIS hereby grants to IBM an irrevocable, worldwide,
                  royalty-bearing, nonexclusive license, exercisable as
                  specified below, under IBIS's applicable patent and trade
                  secret rights in Licensed Patents, Licensed Technology [ ] to:
                  (a) make, have made, use and practice any process in the use
                  of SIMOX systems and components thereof; (b) lease, sell, or
                  otherwise transfer SIMOX systems and components thereof to
                  Affiliates; and (c) sublicense such Affiliates to use and
                  practice any process in the use of such SIMOX systems and
                  components thereof. For the avoidance of doubt, IBM agrees
                  that the foregoing right to sublicense Affiliates does not
                  include the right to license Affiliates to make or have made a
                  SIMOX system. For the further avoidance of doubt, IBM agrees
                  that it is not permitted to act under the foregoing license
                  until it has elected one of the options set forth in Section
                  3.5.


                                       46

<PAGE>

         3.2      IBIS hereby grants to IBM an irrevocable, worldwide,
                  nonexclusive, license, exercisable as specified below, under
                  IBIS's copyrights in computer software or other works of
                  authorship disclosed by IBIS hereunder or delivered by IBIS to
                  IBM in connection with the sale of a SIMOX system to IBM to
                  copy and make derivative works of such software or other works
                  of authorship and to distribute such copies and derivative
                  works within IBM and to Affiliates, subject to the following
                  condition:

                  IBM may grant sublicenses under IBIS's copyrights in software
                  in object code format necessary for the operation of a SIMOX
                  system to its Affiliates' purchasing systems licensed
                  hereunder. Each license, agreement form, when executed with
                  customers, shall contain terms that are legally sufficient to:

                  (a)   authorize the customer to use software sublicensed from
                  IBIS and supplied to it by or for IBM for operating a SIMOX
                  system sold hereunder for SIMOX and for no other purpose;

                  (b)   authorize the customer to make copies of each authorized
                  product copy for backup purposes only; and

                  (c)   prohibit further copying and/or transfer of the product;
                  and

                  (d)   prohibit reverse assembly, reverse compilation, or other
                  translation of product code or any portion thereof.

                  For the avoidance of doubt, IBM agrees that it is not
                  permitted to act under the foregoing license until it has
                  elected one of the options set forth in Section 3.5.

         3.3      No license or immunity is extended by a Party either directly
                  or by implication, estoppel, or otherwise except as explicitly
                  set forth herein.

         3.4      IBM hereby grants to IBIS an irrevocable, royalty-free,
                  worldwide, nonexclusive license, exercisable as specified
                  below, under IBM's Intellectual Property Rights in [ ] that
                  pertain to the structure of a SIMOX system to: (a) make and
                  have made and (b) use, lease, sell, or otherwise transfer
                  SIMOX systems and components thereof. This license shall be
                  for the sale or other transfer of SIMOX systems only to IBM
                  and Affiliates for an initial period of [ ] after disclosure
                  of such [ ], after which initial period, IBIS may incorporate
                  such [ ] in a system sold to any customer. For the avoidance
                  of doubt, this license granted by IBM does not cover
                  Intellectual Property Rights pertaining to methods of
                  operation of an ion-implanting system or to processes used in
                  making or treating wafers and/or integrated circuits.

         3.5      IBM shall have the option, to be exercised in its sole
                  discretion and at any time, to elect either License Option A
                  or License Option B by delivery of a written notice to IBIS.
                  Exercise of Option A or Option B shall be subject to the
                  conditions of Section 3.5.1 or Section 3.5.2, as the case may
                  be.


                                       47
<PAGE>

         3.5.1          License Option A

                  IBM may exercise its license under License Option A by
                  delivery of written notice to IBIS and to the Escrow Agent.
                  The Escrow Agent shall immediately deliver the escrow
                  documentation to IBM upon receipt of notice. The consent of
                  IBIS is not required for delivery of the documentation under
                  this License Option A and IBIS hereby waives any right it may
                  have to object to such transfer. The royalty payments under
                  this License Option A shall be as specified in Section 6. Upon
                  receipt of notification, IBIS shall provide the training and
                  Technical Assistance specified in Appendix A at times mutually
                  agreed on but no later than the times specified in Appendix A.

         3.5.2          License Option B

                  IBM may, in its sole discretion, exercise its license under
                  License Option B by delivery of written notice to the Escrow
                  Agent stating: a) [ ]; or b) that IBIS has failed to satisfy
                  one or more of the following conditions and IBIS has not cured
                  such failure within [ ] days after notification by IBM of the
                  failure.

         3.5.2.1        The conditions are that IBIS:

         (a)      [   ]

         (b)      [   ]

         (c)      [   ]

         (d)      [   ]

                  The Escrow Agent shall immediately deliver the escrow
                  documentation to IBM upon receipt of notice. The consent of
                  IBIS is not required for delivery of the documentation under
                  this License Option B. IBIS hereby waives any right it may
                  have to object to or otherwise prevent the Escrow Agent from
                  completing such transfer and agrees that its only recourse
                  against IBM in the event of a dispute concerning such transfer
                  shall be a claim against IBM for monetary damages. The royalty
                  payments shall be as specified in Section 6. IBIS shall
                  deliver the training and Technical Assistance specified in
                  Appendix A at times mutually agreed on but no later than the
                  times specified in Appendix A.

         3.6      IBIS agrees, within [ ] days after the last signature date of
                  this Agreement, to review with IBM at IBIS' place of business
                  the documentation and updates thereof listed in Appendix B.
                  After such review, IBIS shall transmit such documentation to
                  an Escrow Agent chosen by mutual agreement of the Parties.
                  Such Escrow Agent shall hold such documentation pursuant to an
                  escrow agreement to be executed concurrently herewith. The
                  parties shall share the cost of the escrow equally. For
                  convenience in administration, IBIS shall pay the escrow Agent
                  and invoice IBM for its share of the 


                                       48

<PAGE>

                  payment. The Parties agree that such escrow agreement shall
                  permit IBM to inspect (but not copy) the documentation at the
                  Escrow Agent's premises.

         3.7      IBIS represents and agrees that it will not initiate any work
                  (or otherwise take any steps in reliance) on a SIMOX system
                  for sale to IBM unless and until IBIS has received an
                  applicable written purchase order from IBM. IBM shall have no
                  obligation to exercise any of the options granted to it under
                  this Agreement.

4        CONFIDENTIAL INFORMATION

         4.1      The prior Confidential Disclosure agreement between the
                  Parties concerning confidential information is terminated as
                  of the Effective Date and any information disclosed thereunder
                  shall be deemed to be disclosed under this Agreement as of the
                  Effective Date. The confidentiality provisions of the
                  Equipment Procurement Master Agreement between the Parties
                  having an effective date in May, 1996 are superseded only with
                  respect to Confidential Information disclosed under and marked
                  in accordance with this Agreement.

         4.2      Subject to the provisions of Section 3, for a confidentiality
                  period as set forth below, the receiving Party agrees to use
                  the same care and discretion to safeguard Confidential
                  Information of the disclosing Party and to avoid release of
                  such Confidential Information outside of the receiving Party
                  as it employs with similar embodiments of information of its
                  own which it does not desire to publish, disclose, or
                  disseminate, but in no event less than reasonable care.

         4.3      Obligations of confidentiality and restricted use set forth
                  herein shall extend until December 31, 2008.

         4.4      The obligations of confidentiality herein shall not apply to
                  information that:

                      (a)   Is already in the possession of the receiving Party
                  r any of its Subsidiaries without obligation of confidence;

                      (b)   Is independently developed by the receiving Party
                  r any of its Subsidiaries;

                      (c)   Is or becomes publicly available without breach of
                  his Agreement;

                      (d)   Is rightfully received by the receiving Party from
                   third Party;

                      (e)   Is released for disclosure by the disclosing Party
                  ith its written consent;

                      (f)   Is required to be disclosed in a patent
                  pplication; or

                      (g)   Is inherently disclosed in the use, lease, sale, or
                  ther distribution of any present or future product or
                  service by or for the receiving Party or any of its
                  Affiliates.


                                       49

<PAGE>

         4.5      All disclosures of Confidential Information by IBIS or IBM, as
                  the disclosing Party, shall be made by or under the
                  supervision of its Technical Coordinator, or his designee, to
                  the receiving Party's Technical Coordinator, or his designee.
                  In the event of inadvertent disclosure, either Party may give
                  notice to the other Party that such inadvertently disclosed
                  information was confidential and the receiving Party
                  thereafter shall treat in good faith such information as
                  Confidential Information.

         4.6      All disclosures of information will be deemed to be
                  non-confidential unless specifically designated at the time of
                  disclosure (as provided in Section 4.7 below) as including the
                  Confidential Information of a Party.

         4.6.1    Notwithstanding the foregoing, Inventions created and
                  Confidential Information disclosed in the course of joint work
                  or discussions between the Parties shall be deemed to be the
                  Confidential Information of the employer(s) of the individuals
                  creating them, whether or not the pertinent information is
                  marked or summarized in a resume. The Parties agree to make
                  reasonable efforts to document and mark such joint work or
                  discussions.

         4.7      Information, including Confidential Information, of a Party
                  shall be disclosed in writing in English (including such
                  information recorded in a medium such as a tape or disk),
                  which writing shall state the date of disclosure, that the
                  information contained therein is confidential and that it is
                  being disclosed pursuant to this Agreement, and shall contain
                  an appropriate legend, such as "IBIS Confidential
                  Information". If such disclosure is orally and/or visually
                  made, then it shall be confirmed in a written resume within
                  twenty (20) days following such disclosure. The resume will
                  specifically recite that information which is confidential.
                  Such resume will have such information that is confidential
                  identified as "IBIS Confidential (or IBM Confidential)
                  Information". The receiving Party may make a reasonable number
                  of copies of such writings or resumes.

         4.8      A receiving Party possessing Confidential Information of the
                  other Party may disclose it to a vendor or to a subcontractor
                  (or to a sublicensee that in turn may disclose to a vendor or
                  subcontractor), for the purpose of exercising the license
                  specified in Section 3. under restrictions on disclosure at
                  least as stringent as those set forth herein. The receiving
                  Party may only authorize such vendor, subcontractor or
                  sublicensee to use such Confidential Information only for the
                  benefit of such receiving Party. If disclosure is compelled as
                  testimony or evidence in a judicial or legislative proceeding,
                  the Party under compulsion to disclose shall immediately
                  notify the owner Party and shall avail itself of all
                  reasonable protection at the reasonable expense and with the
                  express prior concurrence in writing of the Party owning the
                  applicable Confidential Information, such as protective orders
                  or exemptions from Freedom of Information Act availability, as
                  may be reasonably available and effective to protect the
                  Confidential Information in question.

         4.9      It is understood that receipt of Confidential Information
                  under this Agreement will not create any obligation in any way
                  limiting or restricting the assignment and/or 




                                       50

<PAGE>

                  reassignment of IBIS employees within IBIS or IBM employees
                  within IBM.

         4.10     Each Party represents that it has, and agrees to maintain, an
                  appropriate agreement with each of its employees who may have
                  access to any Confidential Information sufficient to enable
                  each Party to comply with all the terms of this Agreement.

         4.11     All disclosures of information under this Agreement shall be
                  governed by the applicable statutes and regulations of the
                  United States Government regarding the export of technical
                  information. Each Party agrees to comply, and do all things
                  reasonably necessary for the other Party to comply, with all
                  applicable laws, regulations and ordinances of any country
                  having jurisdiction over the subject matter hereof, including
                  but not limited to the regulations of the United States
                  Department of Commerce and Department of State relating to the
                  export or re-export of technical data or the direct product
                  thereof, insofar as they relate to the activities to be
                  performed under this Agreement. Each Party agrees to obtain
                  any required government documents and approvals prior to the
                  export or re-export by it of any technical data disclosed to
                  it or the direct product related thereto.

         4.12     IBIS shall make available an initial data package [ ], as
                  specified in Section 3.6, Appendix A, and Appendix B, for
                  inspection and evaluation by IBM at IBIS' place of business
                  and subsequent transmission to the Escrow Agent. IBIS shall
                  promptly correct deficiencies in the data on IBM's request.
                  When IBM is satisfied that the data are adequate, IBIS shall
                  forward the data to the Escrow Agent.

         4.12.1   In the event that IBM exercises its license under Section
                  3.5.1 or 3.5.2, IBIS shall continue to deliver data updates,
                  which IBM may immediately use under the terms hereof.

         4.13     The conditions for release of data hereunder by the Escrow
                  Agent shall be as set forth herein and shall not be affected
                  by the existence of different conditions in, or by the status
                  of the escrow (i.e. whether released or not) under, the
                  Equipment Purchase Master Agreement. For the avoidance of
                  doubt, the data may be released under the Equipment Purchase
                  Master Agreement before or after the release of data
                  hereunder.

5        OWNERSHIP OF INTELLECTUAL PROPERTY

         5.1      Each Party shall have and retain the sole and exclusive
                  ownership of all Intellectual Property Rights that are made or
                  created solely by it or its employees or agents in the course
                  of the Program.

         5.2      Any Intellectual Property Rights made or created jointly by
                  the Parties or employees or agents of the Parties in the
                  course of the Program shall be owned jointly. Joint Inventions
                  shall be jointly owned, title to all patents issued thereon
                  shall be joint, all expense incurred in obtaining and
                  maintaining such patents, except as provided herein, shall be
                  jointly shared. Each Party shall have the unrestricted right
                  to license third parties under such jointly owned Intellectual
                  Property Rights without 


                                       51

<PAGE>

                  accounting.

         5.2.1    Unless otherwise agreed, joint owners of Intellectual Property
                  Rights shall engage outside counsel to perform tasks
                  associated with securing the legal protection of such
                  Intellectual Property Rights and shall share the costs thereof
                  equally. In the event that one Party elects not to seek patent
                  protection for any joint Invention in any particular country
                  or not to share equally in the expense thereof with the other
                  Party, the other Party shall have the right to seek or
                  maintain such protection at its own expense in such country
                  and shall have full control over the prosecution and
                  maintenance thereof even though title to any patent issuing
                  therefrom shall be jointly owned. Such one Party shall have no
                  obligation to pay expenses of securing and maintaining such
                  Intellectual Property Rights in any country unless it has so
                  agreed in writing.

         5.3      Each Party shall give the other Party all reasonable
                  assistance in obtaining patent protection and in preparing and
                  prosecuting any patent application filed by the other Party,
                  and shall cause to be executed assignments and all other
                  instruments and documents as the other Party may consider
                  necessary or appropriate to carry out the intent of this
                  Section 5.

6.       PAYMENT

         6.1      From and after the Effective Date, IBM shall pay to IBIS a
                  royalty comprising the amount listed in the appropriate column
                  of Table I for each Licensed Product made by or for IBM and/or
                  sold, leased or otherwise transferred or disposed of by or for
                  IBM.

                                       TABLE I

<TABLE>
<CAPTION>

             Number of
              Machines               Option A                Option B
                <S>                    <C>                     <C>
                [ ]                    [ ]                     [ ]
                [ ]                    [ ]                     [ ]
                [ ]                    [ ]                     [ ]
                [ ]                    [ ]                     [ ]
</TABLE>



         6.2      The royalty of Section 6.1 shall accrue when a Licensed
                  Product is first put into service by IBM or is first sold,
                  leased or otherwise transferred or disposed of by or for IBM.
                  For the purpose of determining such royalty, Licensed Products
                  shall be considered sold, leased or otherwise transferred or
                  disposed of when invoiced. If not invoiced, then Licensed
                  Products are to be considered sold, leased or otherwise
                  transferred or disposed of when delivered or when paid for, if
                  paid for before delivery. If not invoiced, delivered or paid
                  for before delivery, Licensed Products are to be considered
                  sold, leased or otherwise transferred or disposed of at the
                  earlier of when put into use or when possession is transferred
                  to a third Party. When Licensed 


                                       52

<PAGE>

                  Products are sold, leased or otherwise transferred or disposed
                  of in conjunction with other products or services provided,
                  sold, leased or otherwise transferred or disposed of by IBM,
                  IBM agrees to separately invoice such Licensed Products from
                  such other products or services.

         6.3      Accrued royalties shall be calculated and paid on a calendar
                  quarterly basis. Any royalties due IBIS for any calendar
                  quarter shall be paid to IBIS by [ ] days after the end of
                  each calendar quarter. IBM may deduct from the accrued
                  royalties calculation in this Section 6.3 those royalties
                  accrued on Licensed Products which have been returned to IBM
                  or for which credit allowances have been made.

         6.4      Within [ ] days of each calendar quarter, IBM shall furnish to
                  IBIS a written statement showing the Licensed Products that
                  were made, used, sold, leased and/or transferred or otherwise
                  disposed of during the immediately preceding calendar year and
                  the royalties payable thereon. If no royalties are payable,
                  that fact shall be shown on such statement.

         6.5      IBIS shall have the right, at its expense, to have an
                  independent accountant acceptable to IBM inspect relevant
                  records of IBM during normal business hours and on reasonable
                  notice, to verify that the number of SIMOX systems made by or
                  for IBM is as reported to IBIS, and for no other purpose. IBIS
                  shall require such accountant to execute an agreement
                  permitting disclosure of such number only to IBIS and its
                  counsel and prohibiting any other disclosure or use of any
                  information learned during such inspection, except in
                  connection of enforcing its rights under this Agreement. If
                  such audit reveals that IBM has underpaid the royalty due, IBM
                  shall pay the reasonable cost of the audit.

7.       TERM AND TERMINATION

         Either Party may terminate this Agreement for a Material Default as
provided herein:

         7.1      For a Material Default specified in Sections 7.1.1, the
                  non-defaulting Party may give written notice of such default
                  ("Notice of Default") to the defaulting Party. If a Notice of
                  Default is given and the defaulting Party should fail to cure
                  such default within [ ] days after the date of receipt of the
                  Notice of Default, the non-defaulting Party may terminate this
                  Agreement by a second written notice ("Notice of Termination")
                  to the defaulting Party.

         7.1.1    The parties agree that some of the grounds of Material
                  Default, for which a Party shall have the right to terminate
                  this Agreement per Section 7.1 are:

                  (a)    the other Party breaches its obligation to deliver
                  Licensed Technology, training and/or Improvements.

                  (b)    the other Party breaches its payment obligations under
                  Section 6.

                                       53

<PAGE>

         7.2      For a Material Default specified in Sections 7.2.1, the non-
                  defaulting Party may give to the defaulting Party a Notice of
                  Termination immediately terminating this Agreement.

         7.2.1    The parties agree that some of the grounds of Material
                  Default, for which a Party shall have the right to terminate
                  this Agreement immediately per Section 7.2 are:

                  (a)    the other Party engages in or suffers a Change of
                  Control.

                  (b)    the other Party breaches its obligation of
                  confidentiality under Section 4.

                  (c)    the other Party breaches the terms of its license
                  under Section 3.

         7.3      If this Agreement is terminated for Material Default;

                  (a)    the obligations of the Parties to deliver Improvements
                  shall terminate; and

                  (b)    the licenses granted in Section 3 and corresponding
                  payment obligations shall survive.

         7.4      In the event of termination by either Party for any reason,
                  all royalties, fees, and other payments due or accrued
                  hereunder as of the date of termination shall remain payable.

         7.5      Except as stated in Sections 7.3 and 7.4, to the extent a
                  particular right or obligation herein does not have a
                  specifically identified survival period, all rights and
                  obligations in this Section or in any other Section in this
                  Agreement which by their nature survive the termination of
                  this Agreement will remain in effect beyond any termination
                  for the time period reasonably necessary to accomplish their
                  purpose and shall bind and inure to the benefit of the
                  parties, their legal representatives and successors.

8.       REPRESENTATIONS AND DISCLAIMERS

         8.1      This Agreement is non-exclusive. IBIS and IBM recognize and
                  agree that each has been and may continue to be active in the
                  development of technology, and/or manufacture and sale of
                  products indirectly or directly relating to the technologies,
                  processes and products contemplated by this Agreement, and IBM
                  acknowledges and agrees that IBIS will be free in all respects
                  and not precluded by this Agreement to pursue such activities
                  independent of IBM, including with third parties, and further,
                  IBIS acknowledges and agrees that IBM will be free in all
                  respects and not precluded by this Agreement to pursue such
                  activities independent of IBIS, including with third parties.
                  Nothing in this Section 8.1 shall grant a Party any license
                  under the other Party's Intellectual Property Rights. Such
                  licenses are granted only as set forth explicitly elsewhere in
                  this Agreement.

         8.2      Nothing contained in this Agreement shall be construed as:


                                       54

<PAGE>

         8.2.1    conferring any rights to use in advertising, publicity, or
                  other marketing activities any name, trade name, trademark, or
                  other designation of either Party hereto, including any
                  contraction, abbreviation, or simulation of any of the
                  foregoing without prior mutual written agreement; or

                  8.2.2    conferring by implication, estoppel, or otherwise
                           upon either Party hereunder any license or other
                           right except the licenses and rights expressly
                           granted hereunder to a Party hereto or third parties;
                           or

                  8.2.3    a warranty that the recipient Party will successfully
                           manufacture products, or a particular volume of
                           products, based upon the Licensed Technology
                           transferred hereunder including transfer and
                           technical assistance; or

                  8.2.4    an obligation to bring or prosecute actions or suits
                           against third parties for infringement, or to defend
                           actions or suits from third parties for infringement,
                           or to secure and/or maintain any of its intellectual
                           property rights; or

                  8.2.5    in any way limiting the rights which a Party has
                           outside the scope of this Agreement.

         8.3      IBIS warrants that the data delivered hereunder and the
                  manufacture and operation of SIMOX systems made according to
                  such data does not infringe the Intellectual Property Rights
                  of third Parties.

         8.4      IBIS warrants that the initial data package disclosed to IBM
                  is the same as (or an improvement on) the information used in
                  the design assembly and test of tools currently used by IBIS
                  in production.

         8.5      WITH THE EXCEPTION OF THE FOREGOING WARRANTIES IN SECTIONS 8.3
                  AND 8.4, AND THE PROVISIONS OF SECTION 11, ALL INFORMATION,
                  TECHNOLOGY, IMPROVEMENTS, INVENTIONS, ASSISTANCE, AND SERVICES
                  PROVIDED BY EITHER PARTY HEREUNDER ARE PROVIDED "AS IS"
                  WITHOUT ANY WARRANTY OF ANY KIND INCLUDING THAT NEITHER PARTY
                  MAKES ANY WARRANTY AS TO THE CONFIDENTIAL ACCURACY,
                  SUFFICIENCY, OR SUITABILITY FOR THE OTHER PARTY'S USE OF ANY
                  INFORMATION, IMPROVEMENTS, INVENTIONS, OR LICENSED TECHNOLOGY
                  PROVIDED HEREUNDER FOR THE MANUFACTURE OF PRODUCTS OR DELIVERY
                  OF SERVICES USING THE INFORMATION, IMPROVEMENTS, INVENTIONS,
                  OR LICENSED TECHNOLOGY, OR THE YIELD FROM THE MANUFACTURE OF
                  PRODUCTS OR DELIVERY OF SERVICES USING THE INFORMATION,
                  IMPROVEMENTS, INVENTIONS, OR LICENSED TECHNOLOGY, OR FOR THE
                  QUALITY OF SUCH PRODUCTS MADE OR SERVICES DELIVERED USING THE
                  INFORMATION, `IMPROVEMENTS, INVENTIONS, OR LICENSED TECHNOLOGY
                  OR ANY OTHER WARRANTY, EXPRESS OR IMPLIED, INCLUDING WITHOUT
                  LIMITATION THE IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS
                  FOR A PARTICULAR PURPOSE. NEITHER PARTY ASSUMES ANY


                                       55

<PAGE>

                  RESPONSIBILITY OR LIABILITY FOR LOSSES OR DAMAGES, WHETHER
                  DIRECT, INDIRECT, CONSEQUENTIAL, INCIDENTAL, OR PUNITIVE,
                  WHICH MIGHT ARISE OUT OF THE OTHER PARTY'S USE OF THE
                  INFORMATION, IMPROVEMENTS, INVENTIONS, OR LICENSED TECHNOLOGY,
                  WHICH SHALL BE ENTIRELY AT THE OTHER PARTY'S RISK AND PERIL.

         8.6      Each Party acknowledges its responsibility to make its own
                  evaluation of the risks of bringing any product based on
                  information provided under this Agreement to market, or
                  otherwise to use such information.

         8.7      Although the Parties will use all reasonable efforts in
                  performing the Program, the Parties acknowledge that the
                  results of the work to be performed hereunder are uncertain
                  and cannot be guaranteed by any Party.

         8.8      Each Party disclaims any warranty that the recipient will be
                  able to reproduce the results of the disclosing Party and each
                  Party acknowledges that it may be not be able to use disclosed
                  information without further research and development.

9.       TECHNOLOGY TRANSFER AND TECHNICAL ASSISTANCE

         9.1      IBIS shall deliver, at [ ] cost to IBM, a portion of the
                  technical training specified in Section 9.2, prior to the
                  review specified in Section 3.6 and sufficient to enable IBM
                  personnel to perform the evaluation specified in Section 4.12.
                  Such technical training shall be limited to a maximum of [ ]
                  hours.

         9.2      IBIS shall provide detailed training to IBM in IBIS's
                  facilities in the United States the following technical
                  assistance, according to the schedule in Appendix A:

         [    ]

         In addition to the scheduled training listed above, IBM may make site
         visits to IBIS's facilities upon reasonable notice to IBIS and upon
         mutual agreement of the parties. A maximum of [ ] IBM employees may
         visit either of IBIS's facilities at any one time. The travel and
         living expenses of such visiting IBM employees shall be at the expense
         of IBM.

         9.3      During the period beginning on the date that IBM elects one of
                  the options specified in Section 3.5 and continuing for [ ]
                  years thereafter, IBIS agrees to provide, at [ ] cost to IBM,
                  assistance in the transfer of the Licensed Technology to IBM
                  as provided in Section 9.2, up to a total limit of [ ]
                  person-hours.

         9.4      After the [ ] person-hours of the transfer assistance and
                  technical assistance specified in Section 9.2 are exhausted,
                  IBIS agrees to provide, up to an additional [ ] person-hours
                  of transfer assistance and technical assistance to IBM for a
                  period ending [ ] years after the date on which the last
                  transfer assistance is provided under Section 9.2, IBM agrees
                  to pay IBIS for such limited additional transfer and technical


                                       56

<PAGE>

                  assistance provided to IBM at the rate of [ ].

         9.5      IBIS shall invoice charges monthly for the limited additional
                  transfer assistance and technical assistance provided for in
                  Section 9.3.

         9.6      The Parties shall disclose Improvements in accordance with the
                  following:

                  9.6.1    Beginning with the first calendar quarter after
                           notification under Section 3.5.1 or 3.5.2, if any,
                           the Technical Coordinators of the Parties shall meet
                           within forty-five (45) days following the end of each
                           calendar quarter to discuss whether any Improvements
                           have been made, and to disclose such Improvements to
                           the other Party.

10.      APPLICABLE LAW

         10.1     This Agreement shall be trued and the legal relations between
                  the Parties shall be determined in accordance the law of the
                  State of New York without regard to the conflict of law
                  provisions thereof. Any proceedings to enforce this Agreement,
                  or to resolve disputes relating to this Agreement, shall be
                  brought in the United States District Court for the Southern
                  District of New York, Westchester County Division. IBIS and
                  IBM waive the right to trial by jury in any matter which
                  arises between the Parties pursuant or related to this
                  Agreement and agree that any proceeding hereunder shall be
                  tried by a judge without a jury.

         10.1.1   No action, regardless of form, arising out of this Agreement
                  may be brought by a Party more than two (2) years after the
                  cause of action has accrued.

         10.2     Each Party agrees to pay the other Party's attorney's fees and
                  costs of litigation, up to a maximum of [ ] if such Party, for
                  any reason whatever, brings suit against the other Party and
                  the other Party is finally adjudicated not to have liability.

         10.3     If any sentence, paragraph, clause or combination of the same
                  in this Agreement is held by a court of competent jurisdiction
                  to be unenforceable in any jurisdiction, such sentence,
                  paragraph, clause or combination of same shall be
                  unenforceable in the jurisdiction in which it is invalid and
                  the remainder of this Agreement shall remain binding on the
                  Parties in such jurisdiction as if such unenforceable
                  provision had not been contained herein. The enforceability of
                  such sentence, paragraph, clause or combination of same in
                  this Agreement, shall be otherwise unaffected and shall remain
                  enforceable in all other jurisdictions.

11.      MISCELLANEOUS

         11.1     IBIS agrees to indemnify, defend, and hold harmless, IBM, its
                  Subsidiaries and Affiliates and their officers, directors,
                  agents, and employees, from any and all liability, losses,
                  damages, reasonable attorney's fees and expenses associated
                  with claims, suits, or actions brought by or on behalf of any
                  third party of any nature 



                                       57

<PAGE>

                  arising from, or alleged to arise from, infringement of the
                  Intellectual Property Rights of third parties, resulting from
                  or in any way related to the use of the Licensed Technology by
                  IBM or the performance of this Agreement. IBIS's total
                  obligation to pay under this Section 11.1 shall not exceed the
                  lesser of: (a) the amount of royalties paid by IBM to IBIS
                  hereunder; or (b) [ ].

         11.2     Each Party shall be solely responsible for determining its
                  prices and other terms and conditions for its products sold to
                  its customers. Each marketing Party shall be solely
                  responsible for marketing products to its customers, and the
                  other Party shall have no obligation to provide any support of
                  any kind to such marketing Party's customers.

         11.3     If any Party is rendered wholly or partially unable by force
                  majeure to carry out its obligations under this Agreement, and
                  if that Party gives prompt written notice and full particulars
                  of such force majeure to the other Party, the notifying Party
                  shall be excused from performance of its obligations hereunder
                  during the continuance of any inability so caused, but for no
                  longer period; provided that if payment cannot be made due to
                  the existence of a banking crisis or international payment
                  embargo, such amount may be paid within the following thirty
                  (30) days. Such cause shall be remedied by the notifying Party
                  as far as possible with reasonable speed and effort. For the
                  purposes of this Agreement, force majeure shall mean Acts of
                  God, acts of public enemies or terrorists, wars, other
                  military conflicts, blockades, insurrections, riots,
                  epidemics, quarantine restrictions, landslides, lightning,
                  earthquake, floods, washouts, civil disturbances, restraints
                  by or actions of any governmental body (including export or
                  security restrictions on information, material, personnel,
                  equipment or otherwise), and any other acts or events
                  whatsoever, whether or not similar to the foregoing, not
                  within the control of the Party claiming excuse from
                  performance, which by the exercise of due diligence and best
                  reasonable effort that Party shall not have been able to
                  overcome or avoid. If the notifying Party cannot remedy the
                  force majeure situation and resume satisfactory performance
                  within [ ] of the notice, the other Party may at its option
                  immediately terminate this Agreement pursuant to Section 7.

         11.4     Each Party agrees to comply with all applicable country,
                  Federal, State, and Local laws, rules, regulations, and
                  ordinances, including those of any other duly constituted
                  governmental authority having jurisdiction, and including
                  without limitation, all rules and regulations of the
                  Occupational Health and Safety Administration, Environmental
                  Protection Agency, U.S. Department of Commerce, and U.S.
                  Department of Transportation, as applicable. Each Party shall
                  do all things necessary (a) to obtain in a timely manner all
                  required licenses and approvals and (b) to comply with all
                  applicable laws, rules and regulations, including, but not
                  limited to, the Regulations of the United States Government
                  relating to the export and re-export of technical data,
                  commodities, and products produced as a result of the use of
                  such data. Each Party hereto agrees that it will not export or
                  re-export, directly or indirectly, any technology, software,
                  and/or commodities furnished under this Agreement, or the
                  direct product thereof, to any country, or the nationals
                  thereof, specified in such laws, rules, 



                                       58
<PAGE>

                  regulations, and ordinances referred to above as an
                  unauthorized destination without IBIS or IBM first obtaining
                  U.S. Government approval.

         11.5     The captions used in this Agreement are for convenience of
                  reference only and are not to be used in interpreting the
                  obligations of the Parties under this Agreement.

         11.6     Nothing contained herein, or done in pursuance of this
                  Agreement, shall constitute the Parties as entering upon a
                  joint venture or partnership or shall constitute either Party
                  hereto the agent for the other Party for any purpose or in any
                  sense whatsoever.

         11.7     Either Party may disapprove the assignment of any of its
                  former employees to perform work under this Agreement on its
                  premises by the other Party and such personnel will not be so
                  assigned. Each Party will take appropriate preventive steps,
                  before the assignment of any of its employees to perform work
                  under this Agreement, that that Party reasonably believes will
                  ensure that its employees will not engage in inappropriate
                  conduct while on the other Party's premises. Inappropriate
                  conduct shall include, but not be limited to: 1) being under
                  the influence of, or affected by, alcohol, illegal drugs or
                  controlled substances or engaging in their use, distribution
                  or sale; 2) the possession of a weapon of any sort; and 3)
                  harassment, threats or violent behavior.

         11.8     Representatives and personnel of each Party, during the time
                  they are present on the premises of the other Party shall be
                  subject to all rules and regulations prevailing on such
                  premises. Each Party shall be responsible for the payment of
                  all compensation and expense of its respective representatives
                  and personnel. None of the representatives or personnel of
                  either Party shall be considered, for any reason, to be an
                  employee or agent of the other.

         11.9     Each Party represents that it has, or will have in place,
                  established procedures and agreements with its Subsidiaries,
                  employees or others, including subcontractors and vendors,
                  whose services the Party may require, sufficient to enable the
                  Party to comply with all the provisions of this Agreement.

         11.10    In the event of any inconsistency between the terms and
                  conditions of this Agreement and language set forth in the
                  Appendices, the inconsistency shall be resolved by giving
                  precedence to the terms and conditions of this Agreement.

         11.11    Any written notice or communication required to be made or
                  given to either Party hereto, pursuant to this Agreement,
                  shall be deemed to have been sufficiently given on the date of
                  mailing if sent by registered or certified mail, postage
                  prepaid, and addressed as set forth below, or to such other
                  address as is designated by written notice given to the other
                  Party:

                  11.11.1           In the case of IBM:
                                    Director of Licensing
                                    International Business Machines Corporation
                                    500 Columbus Avenue


                                       59

<PAGE>

                                    Thornwood, NY, 10594

                  11.11.2           In the case of IBIS:
                                    Al Alioto
                                    Vice President of Sales and Marketing
                                    Ibis Technology Corporation
                                    32 Cherry Hill Drive
                                    Danvers, MA 01923

         11.12    The rights and obligations of Sections 3, 4, 5, 7, 8, 10, and
                  11 and the obligations of nondisclosure and restricted use of
                  this Agreement shall survive and continue after any expiration
                  or termination of this Agreement and shall bind the Parties
                  and their successors and assigns.

         11.13    No failure on the part of any Party to exercise, and no delay
                  in exercising, any right, power, or remedy hereunder shall
                  operate as a waiver thereof or as a waiver of any other right,
                  power, or remedy hereunder or to the performance of any Party;
                  and no single or partial exercise by a Party of any right,
                  power, or remedy hereunder shall preclude any other or further
                  exercise thereof or the exercise of any other right, power, or
                  remedy.

         11.14    Nothing contained in this Agreement shall be construed as
                  conferring any right to use in advertising, publicity or other
                  promotional activities any name, trade name, trademark or
                  other designation of either Party (including any contraction,
                  abbreviation or simulation of any of the foregoing); and each
                  Party agrees not to disclose the terms and conditions of this
                  Agreement except as may be required by law or government rule
                  or regulation, without the express written consent of the
                  other Party. Notwithstanding the foregoing, the Parties shall
                  be permitted to disclose a summary of pertinent Sections of
                  this Agreement that are reasonably necessary for disclosing
                  and/or licensing under this Agreement, provided, however, that
                  such disclosure is under a written agreement containing
                  restrictions of confidentiality at least as stringent as those
                  contained herein.

         11.15    Except for the provisions of Section 11.1, in no event will a
                  Party be liable to the other Party for incidental damages,
                  lost profits, lost savings special damages, or consequential
                  damages, regardless of whether the claim is for breach of
                  contract, breach of warranty, tort (including negligence),
                  failure of a remedy to accomplish its purpose or otherwise,
                  even if such Party has been advised of the possibility of such
                  damages.

         11.16    Each Party shall be liable to the other Party up to a maximum
                  of the greater of (a) [ ], or (b) the amount of unpaid
                  royalties owed by such Party to the other Party hereunder plus
                  [ ], for all actual direct losses or damages sustained by the
                  other Party (other than those arising under Section 11.1) that
                  are proximately caused by the acts or omissions of such Party
                  under this Agreement.


                                       60

<PAGE>


         11.17    Except as explicitly stated herein, a Party shall not assign
                  any of its rights, privileges or obligations under this
                  Agreement without the prior written consent of the other
                  Party. Any attempted assignment in derogation of the foregoing
                  shall be void.

         11.18    The Equipment Purchase Master Agreement, any task orders
                  thereunder, and the Wafer Purchase Agreement between the
                  Parties are not superseded by this Agreement, except as
                  explicitly stated herein. By way of example and not as a
                  limitation, the license to make up to two tools granted to IBM
                  in Section 13 of EPMA 07482 between the Parties is not
                  superseded and that license may be exercised by IBM, in its
                  sole discretion, in addition to the license granted hereunder.

         11.19    This Agreement shall not be binding upon the Parties until it
                  has been signed below by or on behalf of each Party, in which
                  event it shall be effective as of the date first above
                  written. Except as provided in Section 11.18, this Agreement
                  constitutes the entire agreement between the Parties with
                  respect to the subject matter hereof and shall supersede all
                  previous communications, understandings and agreements,
                  whether oral or written, between the Parties relating to the
                  subject matter hereof. No amendment or modification of this
                  Agreement shall be valid or binding upon the Parties unless
                  made in writing and signed on behalf of such Parties by their
                  respective authorized representatives. The requirement of
                  written form may only be waived in writing.


                                       61

<PAGE>

         IN WITNESS WHEREOF, the Parties have caused this Agreement to be
executed by their duly authorized representatives, who by their signature
represent that they are so authorized, to be effective as of the day and year
first above written.



By:      /s/ H.C. Calhoun
      ----------------------------------------
         H. C. Calhoun
         Vice President of Semiconductor
         Research and Development Center

Date:             6/3/98
      ----------------------------------------



By:      /s/ Al Alioto
      ----------------------------------------
         Al Alioto
         Vice President of Sales and Marketing

Date:             6/9/98
      ----------------------------------------



                                       62

<PAGE>

                                   APPENDIX A





Data Transfer Schedule

Initial data package for evaluation and delivery to the Escrow Agent
     -- [ ] days after the last signature date

Update  data for evaluation and delivery to the Escrow Agent
     -- [ ] days after each calendar quarter



Technical Training

     Initial training -- [ ] days after the last signature date.

Detailed training session pursuant to Section 9.2
     -- [ ] days after option notification under Section 3.5.


                                       63

<PAGE>

                                   APPENDIX B

                                  DELIVERABLES

[    ]



                                       64




<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<MULTIPLIER> 1
<CURRENCY>                      U.S. DOLLARS
       
<S>                             <C>
<PERIOD-TYPE>                   6-MOS
<EXCHANGE-RATE>                 1
<FISCAL-YEAR-END>                          DEC-31-1998
<PERIOD-START>                             JAN-01-1998
<PERIOD-END>                               JUN-30-1998
<CASH>                                      13,763,817
<SECURITIES>                                         0
<RECEIVABLES>                                2,034,689
<ALLOWANCES>                                    56,951
<INVENTORY>                                  4,965,604
<CURRENT-ASSETS>                            22,866,547
<PP&E>                                      14,647,326
<DEPRECIATION>                               9,180,907
<TOTAL-ASSETS>                              28,501,183
<CURRENT-LIABILITIES>                        6,281,938
<BONDS>                                              0
                                0
                                          0
<COMMON>                                        54,051
<OTHER-SE>                                  20,655,187
<TOTAL-LIABILITY-AND-EQUITY>                28,501,183
<SALES>                                      6,217,708
<TOTAL-REVENUES>                             7,000,763
<CGS>                                        5,385,603
<TOTAL-COSTS>                                6,023,573
<OTHER-EXPENSES>                             1,799,148
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                              64,768
<INCOME-PRETAX>                              (821,958)
<INCOME-TAX>                                     1,256
<INCOME-CONTINUING>                          (823,214)
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                 (823,214)
<EPS-PRIMARY>                                   (0.12)
<EPS-DILUTED>                                   (0.12)
        

</TABLE>


© 2022 IncJournal is not affiliated with or endorsed by the U.S. Securities and Exchange Commission