IBIS TECHNOLOGY CORP
SC 13G, 1998-08-05
SEMICONDUCTORS & RELATED DEVICES
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                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549


                                  SCHEDULE 13G

                   UNDER THE SECURITIES EXCHANGE ACT OF 1934


                           IBIS TECHNOLOGY CORPORATION
                       -----------------------------------
                                (Name of Issuer)

                     COMMON STOCK, PAR VALUE $.008 PER SHARE
                     ---------------------------------------
                         (Title of Class of Securities)

                                    450909106
                                 --------------
                                 (CUSIP Number)

                                August 4, 1998
             -----------------------------------------------------
             Date of Event Which Requires Filing of this Statement

Check the  appropriate box to designate the rule pursuant to which this Schedule
is filed:

     [ ] Rule 13d-1(b)
     [X] Rule 13d-1(c)
     [ ] Rule 13d-1(d)

- ----------
* The remainder of this cover page shall be filled out for a reporting  person's
initial filing on this form with respect to the subject class of securities, and
for any  subsequent  amendment  containing  information  which  would  alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the  Securities  Exchange  Act of
1934 ("Act") or otherwise  subject to the liabilities of that section of the Act
but  shall be  subject  to all other  provisions  of the Act  (however,  see the
Notes).
<PAGE>

                                  SCHEDULE 13G


CUSIP NO. 450909106                                            PAGE 2 OF 5 PAGES
- ----------------------                                         -----------------

1     NAMES OF REPORTING PERSONS
      S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS

      Jeffrey J. Puglisi
      --------------------------------------------------------------------------
2     CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*                  (a) [ ]
                                                                         (b) [ ]
      --------------------------------------------------------------------------
3     SEC USE ONLY
      --------------------------------------------------------------------------
4     CITIZENSHIP OR PLACE OF ORGANIZATION

      U.S.
      -----------------------------------------------------------------------
                    5  SOLE VOTING POWER
                       336,004 shares
       NUMBER OF       ---------------------------------------------------------
        SHARES      6  SHARED VOTING POWER      
      BENEFICIALLY     74,027 shares
       OWNED BY        ---------------------------------------------------------
         EACH       7  SOLE DISPOSITIVE POWER   
       REPORTING       336,004 shares
        PERSON         ---------------------------------------------------------
         WITH       8  SHARED DISPOSITIVE POWER 
                       74,027 shares
                       ---------------------------------------------------------
             
9     AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

      410,031 shares
      -----------------------------------------------------------------------
10    CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES* [ ]

      -----------------------------------------------------------------------
11    PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)

      6.1%
      -----------------------------------------------------------------------
12    TYPE OF REPORTING PERSON*

      IN
      -----------------------------------------------------------------------

                      *SEE INSTRUCTIONS BEFORE FILLING OUT!
<PAGE>

ITEM 1(a)  NAME OF ISSUER:

           Ibis Technology Corporation

ITEM 1(b)  ADDRESS OF ISSUER'S PRINCIPAL EXECUTIVE OFFICES:

           32 Cherry Hill Drive
           Danvers, MA 01923

ITEM 2(a)  NAME OF PERSON FILING:

           Jeffrey J. Puglisi

ITEM 2(b)  ADDRESS OF PRINCIPAL BUSINESS OFFICE OR, IF NONE, RESIDENCE:

           399 Park Avenue, 37th floor
           New York, NY 10022

ITEM 2(c)  CITIZENSHIP:

           United States

ITEM 2(d)  TITLE OF CLASS OF SECURITIES:

           Common Stock, $.008 par value

ITEM 2(e)  CUSIP NUMBER:

           450909106

ITEM 3.    IF THIS STATEMENT IS FILED PURSUANT TO  RULES 13D-1(B) OR 13D-2(B),
           CHECK WHETHER THE PERSON FILING IS A:

           (a) [ ] Broker or Dealer  registered  under  Section 15 of the Act,

           (b) [ ] Bank  as  defined  in  Section  3(a)(6)  of the  Act,

           (c) [ ] Insurance Company as defined in Section 3(a)(19) of the Act,

           (d) [ ] Investment Company registered under Section 8 of the
                   Investment Company Act of 1940,

           (e) [ ] An investment adviser in accordance with ss. 240.13d-1(b)(1)
                  (ii)(E),

                                       3
<PAGE>
           (f) [ ] An employee benefit plan or endowment fund in accordance with
                   ss. 240.13d-1(b)(1)(ii)(F),

           (g) [ ] A parent holding company or control person, in accordance 
                   with ss. 13d-1(b)(1)(ii)(G),

           (h) [ ] A savings association as defined in Section 3(b) of the 
                   Federal Deposit Insurance Act,

           (i) [ ] A church plan that is excluded from the definition of an 
                   investment company under Section 3(c)(14) of the Investment
                   Company Act;

           (h) [ ] Group, in accordance with ss.240.13d-1(b)(1)(ii)(J)

           If this statement is filed pursuant to ss. 240.13d-1(c), check this 
           box [X]

ITEM 4.   OWNERSHIP.

  (a) Amount beneficially owned:

      410,031 shares

  (b) PERCENT OF CLASS:
      
      6.1%

  (c) NUMBER OF SHARES AS TO WHICH SUCH PERSON HAS:

     (i)  sole power to vote or to direct the vote:               336,004 shares
    (ii)  shared power to vote or to direct the vote:              74,027 shares
    (iii) sole power to dispose or to direct the disposition of:  336,004 shares
    (iv)  shared power to dispose or to direct the disposition of: 74,027 shares

ITEM 5.   OWNERSHIP OF FIVE PERCENT OR LESS OF A CLASS

           If this statement  is being  filed to report  the fact that as of
      the date hereof the reporting  person has ceased to be the  beneficial
      owner of more than five percent of the class of securities,  check the
      following [ ].
         
ITEM 6.   OWNERSHIP OF MORE THAN FIVE PERCENT ON BEHALF OF ANOTHER PERSON.

           Various affiliated persons or entities which are record owners of
       certain  portions of the subject  securities have the right to receive
       dividends from and the proceeds of the sale of such  securities.  None
       of such parties owns beneficially more than 5% of the class.

                                       4
<PAGE>
      
ITEM 7.   IDENTIFICATION AND CLASSIFICATION OF THE SUBSIDIARY WHICH ACQUIRED THE
          SECURITY BEING REPORTED ON BY THE PARENT HOLDING COMPANY

          Not Applicable
          
ITEM 8.   IDENTIFICATION AND CLASSIFICATION OF MEMBERS OF THE GROUP

          Not Applicable

ITEM 9.   NOTICE OF DISSOLUTION OF GROUP

          Not Applicable

ITEM 10.  CERTIFICATION

     By signing  below I certify  that,  to the best of my knowledge and belief,
the  securities  referred  to above were not  acquired  and are not held for the
purpose of or with the effect of  changing  or  influencing  the  control of the
issuer of the  securities  and were not acquired and are not held in  connection
with or as a participant in any transaction having that purposes or effect.


                                    SIGNATURE

          After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information  set forth in this statement is true,  complete and
correct.


                                                August 4, 1998
                                            ----------------------------------

                                            /s/ Jeffrey J. Puglisi
                                            ----------------------------------
                                                   (Signature)

                                            /s/ Jeffrey J. Puglisi
                                            ----------------------------------
                                                   (Name/Title)


                                       5


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